Micromirror array detection device and method and optical switch device

Abstract

The invention relates to the technical field of optical communication, in particular to a micromirror array detection device and method and an optical switch device. The micro-mirror array detection device is used for detecting the deflection angle of at least one micro-mirror in a micro-mirror array of the optical switch device, and comprises a laser scanning assembly which is used for emitting detection laser and adjusting the emitting direction and / or the emitting angle of the detection laser so as to detect the deflection angle of at least one micro-mirror in the micro-mirror array of the optical switch device. The detection laser can scan at least one micromirror in the micromirror array according to a preset sequence; and the light sensing assembly is used for receiving reflected laser reflected by the at least one micro-mirror after being scanned by the detection laser, and acquiring angle information of the at least one micro-mirror based on position information of an incidence point of the reflected laser on the light sensing assembly. According to the invention, the deflection angle of the micromirror in the micromirror array can be detected, so that corresponding operation can be carried out based on the deflection angle to ensure the communication quality of the optical switch device.

Description

Technical Field

[0001] The present invention relates to the field of optical communication technology, and in particular to a micromirror array detection device, method and optical switch device. Background Art

[0002] A MEMS (Micro-Electro-Mechanical System) optical switch is an optical switch manufactured using micro-electromechanical system technology. The MEMS optical switch includes an array of micro-mirrors, each of which can control the reflection direction of the optical signal. By controlling the state of these micro-mirrors, the connection and switching between different input optical fibers and output optical fibers can be achieved. The rotation angle of the micro-mirrors needs to be detected and fed back in real time to ensure the stability of the output power of the optical path.

[0003] Typically, the rotation angle of the micromirror in a MEMS optical switch is controlled by applying voltage. However, due to stress on the chip, the relationship between the micromirror's rotation angle and the applied voltage may change. This means that the originally designed relationship between the voltage and the rotation angle may fail, causing the micromirror's selected angle to change, which will cause the path of the communication beam to change, thereby affecting the output power stability of the beam.

[0004] Therefore, it is necessary to detect the deflection angle of the micromirror in real time and make corresponding voltage adjustments according to the deflection angle to meet the requirements of the optical system for stability and accuracy. Summary of the invention

[0005] The technical problem to be solved by the embodiments of the present invention is to provide a micromirror array detection device, method and optical switch device to solve the problem in the prior art that the output power stability of the communication light beam is low due to the influence of stress.

[0006] The present invention discloses a micromirror array detection device, which is used to detect the deflection angle of at least one micromirror in a micromirror array of an optical switch device. The micromirror array detection device comprises:

[0007] A laser scanning component, used for emitting a detection laser and adjusting an emission direction and / or an emission angle of the detection laser so that the detection laser can scan at least one of the micromirrors in the micromirror array in a preset order;

[0008] The photosensitive component is used to receive the reflected laser reflected by at least one of the micromirrors after being scanned by the detection laser, and obtain the angle information of at least one of the micromirrors based on the position information of the incident point of the reflected laser on the photosensitive component.

[0009] Optionally, the laser scanning assembly includes a laser, a galvanometer body and a driving assembly;

[0010] The laser generator is used to provide the detection laser;

[0011] The galvanometer body is used to reflect the detection laser;

[0012] The driving component can drive the galvanometer body to deflect in at least two directions, so that the detection laser reflected by the galvanometer body can scan at least one of the micromirrors in the micromirror array according to a preset order.

[0013] The present invention discloses an optical switch device, comprising the micromirror array detection device and the micromirror array as described above, wherein the optical switch device is used to transmit communication laser; the frequency of the detection laser is different from the frequency of the communication laser;

[0014] The optical switch device further comprises an optical transmission component, wherein the optical transmission component comprises at least one micromirror array, an input optical fiber array and an output optical fiber array;

[0015] When the angle information of the micromirror obtained by the micromirror array detection device does not match the current deflection voltage of the micromirror, the control circuit of the micromirror array adjusts the real-time deflection voltage applied to the micromirror so that the angle information matches the current deflection voltage.

[0016] Optionally, the frequency of the detection laser is different from the frequency of the communication laser;

[0017] The optical switch device further comprises a beam splitter element, which is capable of transmitting the detection laser and reflecting the communication laser, and the optical transmission component comprises at least one micromirror array, an input optical fiber array and an output optical fiber array;

[0018] The light transmission component, the laser scanning component and the photosensitive component are respectively located on two sides of the light splitting element.

[0019] Optionally, when the number of the micromirror arrays is greater than one, the number of the laser scanning components is one or more; the photosensitive components and the micromirror arrays are arranged in a one-to-one correspondence.

[0020] Optionally, when there is one laser scanning component, the laser scanning component is arranged at the center position between the plurality of micromirror arrays, and the laser scanning range of the laser scanning component can cover all the micromirror arrays; the photosensitive component is located around the laser scanning component and is arranged corresponding to the micromirror array, so as to receive all the reflected lasers;

[0021] When there are multiple laser scanning components, the laser scanning components and the micromirror arrays are arranged in a one-to-one correspondence.

[0022] The present invention discloses a method for detecting a deflection angle of a micromirror array, which is applied to the optical switch device as described above. The method for detecting the deflection angle of the micromirror comprises:

[0023] Obtaining a micromirror adjustment instruction, and applying an initial deflection voltage to a target micromirror in the micromirror array based on the micromirror adjustment instruction;

[0024] Driving the laser scanning component to emit a detection laser so that the detection laser can scan the target micromirrors in the micromirror array according to a preset sequence;

[0025] The current position information of the incident point of the reflected laser reflected by the target micromirror on the photosensitive component is obtained, and the current deflection information of the target micromirror is obtained based on the current position information.

[0026] Optionally, the current deflection information includes a current deflection angle;

[0027] After the step of acquiring the current deflection angle of the target micromirror based on the position information, the method further comprises:

[0028] A target deflection angle corresponding to the initial deflection voltage is obtained, and when the target deflection angle is inconsistent with the current deflection angle, the initial deflection voltage is adjusted so that the current deflection angle is consistent with the target deflection angle.

[0029] Optionally, the step of acquiring current deflection information of the target micromirror based on the position information comprises:

[0030] The standard position information of the reflected laser reflected by the target micromirror on the photosensitive component is obtained when the target micromirror is deflected to the target deflection angle. When the standard position information is inconsistent with the current position information, it is determined that the target deflection angle is inconsistent with the current deflection angle.

[0031] Optionally, the step of adjusting the initial deflection voltage so that the current deflection angle is consistent with the target deflection angle includes:

[0032] The initial deflection voltage is adjusted so that the current position information is consistent with the standard position information.

[0033] Compared with the prior art, the beneficial effect of the micromirror array detection device provided by the embodiment of the present invention is that: the detection laser is emitted by the laser scanning component to scan the target micromirror, so that the target micromirror reflects the reflected laser, and the reflected laser is received by the photosensitive component. Since the positional relationship between the photosensitive component and the micromirror array is fixed and known, the angle information of the target micromirror can be obtained according to the incident point of the reflected laser on the photosensitive component, so that it is possible to judge whether the deflection angle of the target micromirror is in place according to the current angle information, and timely monitor whether the micromirror array has any deflection that is not in place, so that timely measures can be taken to ensure communication quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The scheme of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments, in which:

[0035] Figure 1 It is a structural schematic diagram of an embodiment of a micromirror array detection device provided by the present invention;

[0036] Figure 2 is a schematic diagram of an application scenario of the first embodiment of the optical switch device provided by the present invention;

[0037] Figure 3 is a schematic diagram of an application scenario of the second embodiment of the optical switch device provided by the present invention;

[0038] Figure 4 It is a structural schematic diagram of an embodiment of a photosensitive component provided by the present invention;

[0039] Figure 5 It is a flow chart of an embodiment of a method for detecting a deflection angle of a micromirror array provided by the present invention.

[0040] The reference numerals in the figures are:

[0041] 10. Micromirror array detection device; 11. Laser scanning component; 111. Laser; 112. Vibrating mirror; 12. Photosensitive component; 121. Photosensitive unit; 20. Optical switch device; 21. Optical transmission component; 211. Micromirror array; 212. Input optical fiber array; 213. Output optical fiber array; 22. Spectral element; 221. Spectral splitter. DETAILED DESCRIPTION

[0042] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. Now, in conjunction with the accompanying drawings, the preferred embodiments of the present invention are described in detail.

[0043] See also Figure 1 , Figure 1It is a structural schematic diagram of an embodiment of the micromirror array detection device provided by the present invention. The micromirror array detection device 10 is used to detect the deflection angle of at least one micromirror in the micromirror array 211 in the optical switch device 20. It can be judged whether the current deflection angle of at least one micromirror matches the expected current deflection voltage. If the two match, communication information can be transmitted. If the two do not match, the target angle corresponding to the current deflection voltage can be obtained, the deflection voltage is adjusted, and the deflection angle is detected in real time until the deflection angle reaches the target angle. The deflection voltage at this time is recorded as the target voltage, and the target voltage is applied to the micromirror during subsequent adjustments, which can ensure the accurate transmission of the communication signal and the power of the transmitted power signal is stable. Therefore, the micromirror array detection device 10 is of great help in improving the communication quality of the optical switch device 20.

[0044] The micromirror array detection device 10 includes a laser scanning component 11 and a photosensitive component 12. The laser scanning component 11 can emit a detection laser, and the emission direction and / or emission angle of the emitted detection laser can be adjusted. By adjusting the emission direction and / or emission angle of the detection laser, the detection laser can scan at least one micromirror in the micromirror array 211 in a preset order, for example, all the micromirrors can be scanned, or the emission direction and / or emission angle can be calculated based on the positional relationship between the light outlet of the laser scanning component 11 and the micromirror array 211, so that the detection laser can scan the micromirrors on preset rows and / or preset columns.

[0045] The photosensitive component 12 is used to receive the reflected laser reflected by at least one micromirror after being scanned by the detection laser. The relative position of the photosensitive component 12 and the micromirror array 211 is fixed and known. Therefore, the angle information of the micromirror corresponding to the incident point can be calculated based on the positional relationship between each micromirror and the photosensitive component 12, and the position of the incident point of the reflected laser on the photosensitive component 12. The angle information includes the deflection angles of the micromirror in the x-axis and y-axis directions.

[0046] Since the deflection voltage provided for each micromirror includes the x-axis deflection voltage and the y-axis deflection voltage and are known for the optical switch device 20, the preset deflection angles of the micromirror in the x-axis and y-axis directions are also known. Therefore, the calculated deflection angle and the preset deflection angle can be compared to determine whether the current deflection angle of the micromirror is the preset deflection angle.

[0047] In other implementation scenarios, the preset incident point of the reflected light of the micromirror on the photosensitive component 12 can also be calculated based on the preset deflection angle of the micromirror and the positional relationship between the micromirror and the photosensitive component 12. If the actual incident point of the reflected light of the micromirror coincides with the preset incident point, it can be determined that the current deflection angle of the micromirror is not the preset deflection angle; if the actual incident point does not coincide with the preset incident point, it can be determined that the current deflection angle of the micromirror is not the preset deflection angle.

[0048] From the above description, it can be known that in the present embodiment, the detection laser is emitted by the laser scanning component to scan the target micromirror, so that the target micromirror reflects the reflected laser, and the reflected laser is received by the photosensitive component. Since the positional relationship between the photosensitive component and the micromirror array is fixed and known, the angle information of the target micromirror can be obtained according to the incident point of the reflected laser on the photosensitive component, so that it is possible to judge whether the deflection angle of the target micromirror is in place according to the current angle information, and timely monitor whether the micromirror array has any deflection that is not in place, so that timely measures can be taken to ensure the communication quality.

[0049] In one implementation scenario, the laser scanning assembly 11 includes a laser 111 and a galvanometer 112. The galvanometer 112 includes a galvanometer body and a drive assembly. The galvanometer 112 is an optical element capable of rapid deflection in two or more directions. By controlling the deflection angle of the galvanometer body, the light beam can be precisely positioned and controlled. The galvanometer 112 can achieve slight angle adjustment and can deflect in multiple directions, and has great flexibility, so that the light beam can be precisely positioned and controlled.

[0050] The laser 111 is used to provide a detection laser, the galvanometer body is used to reflect the detection laser, and the driving component can drive the galvanometer body to deflect along at least two directions, such as the x-axis direction and the y-axis direction, thereby adjusting the emission direction and / or emission angle of the reflected detection laser, so that the detection laser can scan at least one micromirror in the micromirror array 211 according to a preset order.

[0051] Please refer to Figure 2 and Figure 3 , Figure 2 is a schematic diagram of an application scenario of the first embodiment of the optical switch device provided by the present invention, Figure 3 Schematic diagram of the application scenario of the second embodiment of the optical switch device provided by the present invention. Figure 2 and Figure 3In the application scenario shown, the optical switch device 20 includes a micromirror array detection device 10 and an optical transmission component 21. The optical transmission component 21 includes at least one micromirror array 211, an input optical fiber array 212 and an output optical fiber array 213. Specifically, the input optical fiber array 212 and the output optical fiber array 213 are respectively located on both sides of at least one micromirror array 211, so that the communication laser output by the input optical fiber array 212 can be reflected by at least one micromirror array 211 to the output optical fiber array 213.

[0052] The optical switch device 20 can detect whether the deflection angle of at least one micromirror in the micromirror array 211, such as a micromirror required for the optical communication operation, in the x-axis direction and the y-axis direction is correct through the micromirror array detection device 10 before or during the optical communication operation. If the deflection angle is incorrect, the control circuit driving the micromirror array 211 adjusts the x-axis deflection voltage and / or the y-axis deflection voltage applied to the micromirror to make the deflection angle of the micromirror correct. If the deflection angle is correct, the optical communication operation continues.

[0053] Specifically, for a micromirror A in a micromirror array 211, the current deflection voltage currently applied by the control circuit to the micromirror A can be obtained, including the x-axis deflection voltage and the y-axis deflection voltage, and the target deflection angle of the micromirror A can be obtained based on the current deflection voltage. The current deflection angle of the micromirror A can be obtained through the micromirror array detection device 10. If the target deflection angle is inconsistent with the current deflection angle, the x-axis deflection voltage and / or the y-axis deflection voltage applied by the drive circuit to the micromirror A is adjusted, and the real-time deflection angle of the micromirror A is obtained through the micromirror array detection device 10 until the real-time deflection angle is the target deflection angle.

[0054] Furthermore, the implemented deflection voltage at this time can be recorded as the target deflection voltage corresponding to the target deflection angle. When the micromirror A needs to be adjusted to the target deflection angle in the future, the target deflection voltage is applied thereto, which can reduce the adjustment time and improve work efficiency.

[0055] In one implementation scenario, after the micromirror A is adjusted to the target deflection angle, the micromirror array detection device 10 can be started according to a preset cycle to periodically detect whether the deflection angle of the micromirror A changes, and adjust the deflection voltage in time to ensure stable and reliable communication quality.

[0056] In other implementation scenarios, the optical switch device 20 further includes a spectroscopic element 22, and the optical transmission component 21 and the micromirror array detection device 10 are respectively located on both sides of the spectroscopic element 22. The spectroscopic element 22 can transmit lasers within a first wavelength range, such as 600nm-900nm, and can reflect lasers within a second wavelength range, such as 1270nm-1670nm. The wavelength of the communication laser transmitted by the optical transmission component 21 is within the second wavelength range, such as 1370nm, and the wavelength of the detection laser is within the first wavelength range, such as 850nm. The spectroscopic element 22 can transmit the detection laser and reflect the communication laser. Therefore, the detection laser and the communication laser can not interfere with each other, and the micromirror deflection angle can be detected while the communication transmission is being performed.

[0057] Specifically, the input fiber array 212 and the output fiber array 213 are respectively located on both sides of at least one micromirror array 211, so that the communication laser output by the input fiber array 212 can be reflected by at least one micromirror array 211 to the beam splitter 22. Since the beam splitter 22 reflects the communication laser, the communication laser is reflected by the beam splitter 22 to the output fiber array 213. When there are two or more micromirror arrays 211, the communication laser is reflected and transmitted between the beam splitter 22 and the plurality of micromirror arrays 211, and finally reflected to the output fiber array 213.

[0058] The laser scanning component 11 in the micromirror array detection device 10 scans at least one micromirror in the micromirror array 211 and emits a detection laser to the micromirror array 211. Since the light splitting element 22 transmits the detection laser, the detection laser passes through the light splitting element and is emitted to the micromirrors in the micromirror array 211. The micromirrors reflect the detection laser and emit reflected laser to the photosensitive component 12. Figure 4 , Figure 4 It is a schematic diagram of the structure of an embodiment of the photosensitive component provided by the present invention. The photosensitive component 12 is composed of a plurality of photosensitive units 121 arranged in an array. Each photosensitive unit 121 can be numbered, and a coordinate system can be constructed based on the numbering, so that after the reflected laser is incident on the photosensitive component 12, the position information of the incident point of the reflected laser on the photosensitive component 12 can be obtained. Since the laser scanning component 11 scans the micromirrors in the micromirror array 211 in a preset order, there is only one incident point on a laser component at the same time, so the correspondence between the currently scanned micromirror and the current incident point can be constructed, so that the micromirror corresponding to each incident point can be obtained, and then the deflection angle of the corresponding micromirror can be obtained according to the position information of the incident point.

[0059] The light splitting element 22 may Figure 2 The light splitter 221 is shown as a beam splitter. Figure 3As shown, it includes a plurality of parallel beam splitters 221. By providing a plurality of parallel beam splitters 221, the plurality of parallel beam splitters 221 can realize multi-path transmission of optical signals in a smaller space, making the entire optical switch device 20 more compact.

[0060] exist Figure 2 and Figure 3 In the illustrated scenario, the number of micromirror arrays 211 is greater than one, for example, two, and the photosensitive components 12 and the micromirror arrays 211 can be set in one-to-one correspondence, so that the deflection angle of the micromirror in the micromirror array 211 corresponding to the photosensitive component 12 can be obtained according to the incident point on each photosensitive component 12. The number of laser scanning components 11 can be one or more. A corresponding laser scanning component 11 can be set for each micromirror array 211, or all micromirror arrays 211 can be scanned by one scanning component.

[0061] When there is only one laser scanning assembly 11, the laser scanning assembly 11 is set at the center position between multiple micromirror arrays 211 to ensure that the laser scanning range can cover all the micromirror arrays 211 to scan the entire micromirror array 211. The photosensitive assembly 12 is located around the laser scanning assembly 11, such as on both sides, and is set in a one-to-one correspondence with the micromirror array 211 to ensure that each photosensitive assembly 12 can receive the reflected laser reflected by each micromirror in the corresponding micromirror array 211, thereby realizing the detection of the deflection angle of each micromirror. By centrally arranging the laser scanning assembly 11 and the photosensitive assembly 12, the layout and connection method of the entire system can be simplified, and the stability and reliability of the system can be improved.

[0062] When there are multiple laser scanning components 11, each laser scanning component 11 is set in a one-to-one correspondence with the micromirror array 211. This one-to-one correspondence can achieve more precise control and adjustment to achieve more accurate light path control. It can also detect the deflection angles of all micromirrors in the micromirror array 211 at the same time, thereby improving the detection processing efficiency and performance. Figure 3 As shown in , when the number of micromirror arrays 211 is two and the two micromirror arrays 211 are located in the same horizontal plane, there are also two laser scanning assemblies 11, and the two laser scanning assemblies 11 are axially symmetrically arranged, and the symmetry axis is the vertical axis located at the center of the interval between the two micromirror arrays 211 and perpendicular to the horizontal plane where the two micromirror arrays 211 are located.

[0063] From the above description, it can be seen that a micromirror array detection device is provided in the optical switch device in the present embodiment, so that it can detect whether the deflection angle of each micromirror in the micromirror array in the optical switch device corresponds to the deflection voltage currently applied thereto, and can promptly discover that the deflection angle of the micromirror does not correspond to the deflection voltage, and by adjusting the deflection voltage, the micromirror is deflected to a desired angle, so that the communication laser can be accurately transmitted in the optical switch device, and the output communication laser power is stable, effectively ensuring the communication quality of the optical switch device 20.

[0064] Please refer to Figure 5 , Figure 5 FIG. 1 is a flow chart of an embodiment of a method for detecting the deflection angle of a micromirror array provided by the present invention. The method for detecting the deflection angle of a micromirror array is applied to Figure 1 , Figure 2 or Figure 3 The scenario shown includes the following steps:

[0065] S101: Obtain a micromirror adjustment instruction, and apply a current deflection voltage to a target micromirror in the micromirror array based on the micromirror adjustment instruction.

[0066] In a specific implementation scenario, a micromirror adjustment instruction is obtained, and the micromirror adjustment instruction can be generated based on a communication instruction, and the communication instruction specifies the input optical fiber in the input optical fiber array and the output optical fiber in the output optical fiber array, and the micromirrors corresponding to the input optical fiber and the output optical fiber in the micromirror array are obtained. When there is a micromirror array in the optical switch device, the target micromirrors corresponding to the input optical fiber and the output optical fiber in the micromirror array are obtained, and the target deflection angle of the target micromirror is obtained for the transmission optical path between the input optical fiber, the output optical fiber and the target micromirror, and the initial deflection voltage corresponding to the target deflection angle is obtained. The initial deflection voltage is applied to the target micromirror.

[0067] When there are two micromirror arrays in the optical switch device, Figure 2 or Figure 3 As shown, the target micromirror in the micromirror array corresponding to the input optical fiber and the target micromirror in the micromirror array corresponding to the output optical fiber are obtained, the transmission optical path between the input optical fiber, the output optical fiber, the two target micromirrors and the beam splitter is obtained, the target deflection angles of the two target micromirrors are respectively calculated based on the transmission optical path, the initial deflection voltage corresponding to each target deflection angle is obtained, and the corresponding initial deflection voltages are applied to the two target micromirrors respectively.

[0068] When there are more micromirror arrays in the optical switch device, based on the input optical fiber, the output optical fiber and the optical path of the target micromirrors in the multiple micromirror arrays, the target deflection angle of each target micromirror is obtained respectively, the initial deflection voltage corresponding to each target deflection angle is obtained, and the corresponding initial deflection voltage is applied to each target micromirror.

[0069] The number of input optical fibers and output optical fibers can be one or more, so the number of target micromirrors used for transmitting communication lasers in each micromirror array can also be one or more, which is set by specific transmission requirements and is not limited here.

[0070] S102: driving the laser scanning component to emit laser to laser scan target micromirrors in the micromirror array according to a preset sequence.

[0071] In a specific implementation scenario, after an initial deflection voltage is applied to the target micromirror, the laser scanning component is driven to emit laser, so that the detection laser can scan the target micromirror in each micromirror array in a preset order to detect whether the current deflection angle of the target micromirror is a preset deflection angle.

[0072] Specifically, when there is only one micromirror array, the coordinates of all target micromirrors on the micromirror array are obtained, for example, row X and column Y, and all target micromirrors are scanned in sequence row by row / column by column. Only the target micromirrors can be scanned, or all micromirrors in a micromirror array can be scanned, but only the reflected laser of the target micromirrors is collected.

[0073] When there are at least two micromirror arrays and one laser scanning component, the at least two micromirror arrays are sorted, and then the target micromirrors in each micromirror array are sorted, and the laser scanning component is driven to scan each target micromirror in each micromirror array according to the sorting.

[0074] When the micromirror arrays and the laser scanning components correspond one to one, the target micromirrors in each micromirror array are sorted, and the laser scanning components corresponding to each micromirror array are driven to scan simultaneously according to the sorting, so as to simultaneously detect each target micromirror in each micromirror array.

[0075] S103: Obtain the current position information of the incident point of the reflected laser reflected by the target micromirror on the photosensitive component, and obtain the current deflection angle of the target micromirror based on the current position information.

[0076] In a specific implementation scenario, since the target micromirrors are scanned sequentially in this implementation scenario, and the photosensitive components correspond one-to-one to the micromirror array, there will only be one incident point of the reflected laser of the target micromirror on the photosensitive component at the same time, and the incident point corresponds to the target micromirror scanned at the current moment. Since the positional relationship between the photosensitive component and the micromirror array is known and fixed, the current deflection angle of the target micromirror can be obtained by using the current position information of the incident point on the photosensitive component and the positional relationship between the photosensitive component and the micromirror array.

[0077] In other implementation scenarios, after obtaining the current deflection angle, it is possible to detect whether the current deflection angle is consistent with the target deflection angle. If the two are consistent, the initial deflection voltage is used as the target deflection voltage, and the communication operation is continued to transmit the communication laser. If the two are inconsistent, it is necessary to adjust the initial deflection voltage according to the difference between the current deflection angle and the target deflection angle, and monitor the adjusted deflection angle in real time through the micromirror array detection device during adjustment until the detected deflection angle is consistent with the target deflection angle. Then the communication operation can be continued to transmit the communication laser. In this way, it can be ensured that the communication laser is transmitted according to the preset optical path, the power of the communication laser output by the output optical fiber is stable, and the communication quality of the optical switch device is reliable.

[0078] In other implementation scenarios, it is not necessary to directly obtain the specific current deflection angle, but only to know whether the current deflection angle is in place. Therefore, based on the positional relationship between the photosensitive component and the micromirror array, and the target deflection angle to which the target micromirror needs to be deflected in the preset optical path, it is possible to calculate the standard position information of the reflected laser on the photosensitive component when the target micromirror is deflected to the target deflection angle and is scanned by the detection laser. When the initial deflection voltage is applied to the target micromirror, the current position information of the actual incident point of the reflected laser reflected by the target micromirror on the photosensitive component when the detection laser scans the target micromirror is obtained, and the standard position information is compared to see if they are consistent with the current position information, that is, whether the theoretical incident point and the actual incident point coincide.

[0079] When the standard position information and the current position information are inconsistent, it is determined that the target deflection angle is inconsistent with the current deflection angle. Therefore, the initial deflection voltage can be adjusted according to the difference between the standard position information and the current position information, and the position information of the adjusted incident point is monitored in real time by the micromirror array detection device during the adjustment until the detected position information is consistent with the standard position information. Then the communication operation can be continued to transmit the communication laser. In this way, it can be ensured that the communication laser is transmitted according to the preset optical path, the power of the communication laser output by the output optical fiber is stable, and the communication quality of the optical switch device is reliable.

[0080] From the above description, it can be seen that in the present embodiment, the detection laser is emitted by the laser scanning component to scan the target micromirror, so that the target micromirror reflects the reflected laser, and the reflected laser is received by the photosensitive component. Since the positional relationship between the photosensitive component and the micromirror array is fixed and known, the current deflection information of the target micromirror can be obtained according to the incident point of the reflected laser on the photosensitive component, so that it is possible to judge whether the deflection angle of the target micromirror is in place according to the current deflection information, and make timely adjustments to ensure the communication quality of the optical switch device.

[0081] The present invention also provides a communication device. The communication device includes a processor and a memory. The processor is coupled to the memory. A computer program is stored in the memory, and the processor executes the computer program when working to implement the above method. The detailed steps can be referred to above and will not be repeated here.

[0082] The present invention also provides a computer-readable storage medium. The computer-readable storage medium stores at least one computer program, which is used to be executed by a processor to implement the above method. The detailed steps can be referred to above and will not be repeated here. In one embodiment, the computer-readable storage medium can be a storage chip, a hard disk, or a mobile hard disk or a USB flash drive, an optical disk, or other readable and writable storage tools in a terminal, or a server, etc.

[0083] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiments can be completed by instructing the relevant hardware through a computer program. The program can be stored in a non-volatile computer-readable storage medium. When the program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided in the present application can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory ROM), programmable ROM PROM), electrically programmable ROM EPROM), electrically erasable programmable ROM EEPROM) or flash memory. Volatile memory can include random access memory RAM) or external cache memory. As an illustration and not limitation, RAM is available in many forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDR SDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM).

[0084] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0085] It should be understood that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. For those skilled in the art, the technical solutions described in the above embodiments can be modified, or some of the technical features therein can be replaced by equivalents; and all these modifications and replacements should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A micromirror array detection device, characterized in that: The micromirror array detection device is used to detect the deflection angle of at least one micromirror in a micromirror array of an optical switch device, and the micromirror array detection device comprises: A laser scanning component, used for emitting a detection laser and adjusting an emission direction and / or an emission angle of the detection laser so that the detection laser can scan at least one of the micromirrors in the micromirror array in a preset order; The photosensitive component is used to receive the reflected laser reflected by at least one of the micromirrors after being scanned by the detection laser, and obtain the angle information of at least one of the micromirrors based on the position information of the incident point of the reflected laser on the photosensitive component.

2. The micromirror array detection device according to claim 1, characterized in that: The laser scanning assembly includes a laser, a galvanometer body and a driving assembly; The laser generator is used to provide the detection laser; The galvanometer body is used to reflect the detection laser; The driving component can drive the galvanometer body to deflect in at least two directions, so that the detection laser reflected by the galvanometer body can scan at least one of the micromirrors in the micromirror array according to a preset order.

3. An optical switch device, characterized in that: The micromirror array detection device and the micromirror array comprise the micromirror array according to any one of claims 1 to 2, wherein the optical switch device is used to transmit communication laser; the frequency of the detection laser is different from the frequency of the communication laser; The optical switch device further comprises an optical transmission component, wherein the optical transmission component comprises at least one micromirror array, an input optical fiber array and an output optical fiber array; When the angle information of the micromirror obtained by the micromirror array detection device does not match the current deflection voltage of the micromirror, the control circuit of the micromirror array adjusts the real-time deflection voltage applied to the micromirror so that the angle information matches the current deflection voltage.

4. The optical switch device according to claim 3, characterized in that: The frequency of the detection laser is different from the frequency of the communication laser; The optical switch device further comprises a beam splitter element, which is capable of transmitting the detection laser and reflecting the communication laser, and the optical transmission component comprises at least one micromirror array, an input optical fiber array and an output optical fiber array; The light transmission component, the laser scanning component and the photosensitive component are respectively located on two sides of the light splitting element.

5. The optical switch device according to claim 4, characterized in that: When the number of the micromirror arrays is greater than one, the number of the laser scanning components is one or more; the photosensitive components and the micromirror arrays are arranged in a one-to-one correspondence.

6. The optical switch device according to claim 5, characterized in that: When the number of the laser scanning components is one, the laser scanning component is arranged at the center position between the plurality of micromirror arrays, and the laser scanning range of the laser scanning component can cover all the micromirror arrays; the photosensitive component is located around the laser scanning component and is arranged corresponding to the micromirror array, so as to receive all the reflected lasers; When there are multiple laser scanning components, the laser scanning components and the micromirror arrays are arranged in a one-to-one correspondence.

7. A method for detecting the deflection angle of a micromirror array, characterized in that: Applied to the optical switch device according to any one of claims 3 to 6, the method for detecting the deflection angle of the micromirror comprises: Obtaining a micromirror adjustment instruction, and applying an initial deflection voltage to a target micromirror in the micromirror array based on the micromirror adjustment instruction; Driving the laser scanning component to emit a detection laser so that the detection laser can scan the target micromirrors in the micromirror array according to a preset sequence; The current position information of the incident point of the reflected laser reflected by the target micromirror on the photosensitive component is obtained, and the current deflection information of the target micromirror is obtained based on the current position information.

8. The method for detecting the deflection angle of the micromirror array according to claim 7, characterized in that: The current deflection information includes a current deflection angle; After the step of acquiring the current deflection angle of the target micromirror based on the position information, the method further comprises: A target deflection angle corresponding to the initial deflection voltage is obtained, and when the target deflection angle is inconsistent with the current deflection angle, the initial deflection voltage is adjusted so that the current deflection angle is consistent with the target deflection angle.

9. The method for detecting the deflection angle of the micromirror array according to claim 8, characterized in that: The step of acquiring the current deflection information of the target micromirror based on the position information comprises: The standard position information of the reflected laser reflected by the target micromirror on the photosensitive component is obtained when the target micromirror is deflected to the target deflection angle. When the standard position information is inconsistent with the current position information, it is determined that the target deflection angle is inconsistent with the current deflection angle.

10. The method for detecting the deflection angle of a micromirror array according to claim 9, characterized in that: The step of adjusting the initial deflection voltage so that the current deflection angle is consistent with the target deflection angle includes: The initial deflection voltage is adjusted so that the current position information is consistent with the standard position information.

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