Micromirror array detection device, method and optical switch device

Abstract

The present application relates to the technical field of optical communication, and particularly relates to a micro-mirror array detection device, a method and an optical switch device. The micro-mirror array detection device is used for detecting a deflection angle of at least one micro-mirror in a micro-mirror array of an optical switch device, and the micro-mirror array detection device comprises: a laser scanning assembly, which is used for emitting a detection laser and adjusting an emission direction and / or an emission angle of the detection laser, so that the detection laser can scan the at least one micro-mirror in the micro-mirror array according to a preset sequence; and a photosensitive assembly, which is used for receiving reflected laser reflected after the at least one micro-mirror is scanned by the detection laser, and obtaining angle information of the at least one micro-mirror based on position information of an incident point of the reflected laser on the photosensitive assembly. The present application can detect the deflection angle of the micro-mirror in the micro-mirror array, so that corresponding operations can be performed based on the deflection angle to ensure the communication quality of the optical switch device.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of optical communication technology, and in particular to a micromirror array detection device, method and optical switch device. BACKGROUND

[0002] A MEMS (Micro-Electro-Mechanical System) optical switch is an optical switch manufactured using micro-electro-mechanical system technology. The MEMS optical switch includes an array of micro-mirrors, each of which can control the reflection direction of an optical signal. By controlling the state of these micro-mirrors, the connection and switching between different input and output fibers can be achieved. The rotation angle of the micro-mirror needs to be detected and fed back in real time to ensure the stability of the output power of the optical path.

[0003] Generally, the rotation angle of the micro-mirror in the MEMS optical switch is controlled by applying a voltage. However, due to the influence of stress on the chip, the relationship between the rotation angle of the micro-mirror and the applied voltage may change. This means that the originally designed voltage control rotation angle relationship may fail, resulting in a change in the micro-mirror angle, which can cause a change in the path of the communication beam, thereby affecting the output power stability of the beam.

[0004] Therefore, it is necessary to detect the deflection angle of the micro-mirror in real time to adjust the corresponding voltage according to the deflection angle, so as to meet the requirements of stability and accuracy of the optical system. SUMMARY

[0005] The technical problem to be solved by the embodiments of the present application is to provide a micromirror array detection device, method and optical switch device to solve the problem of low output power stability of the communication beam caused by the influence of stress in the prior art.

[0006] The present application discloses a micromirror array detection device for detecting the deflection angle of at least one micro-mirror in a micromirror array of an optical switch device, the micromirror array detection device comprising:

[0007] a laser scanning component for emitting a detection laser and adjusting the emission direction and / or emission angle of the detection laser so that the detection laser can scan at least one micro-mirror in the micromirror array in a predetermined order;

[0008] a light sensing component for receiving reflected laser light reflected by at least one micro-mirror after being scanned by the detection laser, and obtaining angle information of at least one micro-mirror based on position information of an incident point of the reflected laser light on the light sensing component.

[0009] Optionally, the laser scanning component comprises a laser, a galvanometer body and a driving component.

[0010] The laser generator is configured to provide the detection laser;

[0011] The galvanometer body is configured to reflect the detection laser;

[0012] The driving assembly is capable of driving the galvanometer body to deflect in at least two directions, so that the detection laser reflected by the galvanometer body can scan at least one micro-mirror in the micro-mirror array in a preset order.

[0013] The application discloses a kind of optical switch devices, including micro-mirror array detection device and micro-mirror array as described above, the optical switch device is configured to transmit communication laser;The frequency of the detection laser is different from the frequency of the communication laser;

[0014] The optical switch device further includes an optical transmission assembly, the optical transmission assembly includes at least one micro-mirror array, an input fiber array and an output fiber array;

[0015] When the angle information of micro-mirror obtained based on the micro-mirror array detection device does not match the current deflection voltage of the micro-mirror, the control circuit of the micro-mirror array adjusts the real-time deflection voltage applied to the micro-mirror, so that the angle information matches the current deflection voltage.

[0016] Optionally, the frequency of the detection laser is different from the frequency of the communication laser;

[0017] The optical switch device further includes a light splitting element, the light splitting element is capable of transmitting the detection laser, and reflecting the communication laser, the optical transmission assembly includes at least one micro-mirror array, an input fiber array and an output fiber array;

[0018] The optical transmission assembly, the laser scanning assembly and the photosensitive assembly are respectively located on both sides of the light splitting element.

[0019] Optionally, when the number of micro-mirror arrays is greater than one, the number of laser scanning assemblies is one or more;The photosensitive assembly and the micro-mirror array are one-to-one corresponding.

[0020] Optionally, when the number of laser scanning assemblies is one, the laser scanning assembly is arranged at the center position between a plurality of micro-mirror arrays, and the laser scanning range of the laser scanning assembly can cover all the micro-mirror arrays;The photosensitive assembly is located around the laser scanning assembly, and is arranged corresponding to the micro-mirror array, so as to be capable of receiving all the reflected laser;

[0021] When the number of laser scanning assemblies is more than one, the laser scanning assembly and the micro-mirror array are one-to-one corresponding.

[0022] The application discloses a detection method for a deflection angle of a micro-mirror array, which is applied to an optical switch device as mentioned above.

[0023] An initial deflection voltage is applied to a target micro-mirror in the micro-mirror array based on a micro-mirror adjustment instruction.

[0024] A detection laser is emitted by driving a laser scanning assembly, so that the detection laser can scan the target micro-mirror in the micro-mirror array in a preset order.

[0025] Current position information of an incident point of reflected laser reflected by the target micro-mirror on a photosensitive assembly is acquired, and current deflection information of the target micro-mirror is acquired based on the current position information.

[0026] Optionally, the current deflection information includes a current deflection angle.

[0027] After the step of acquiring the current deflection angle of the target micro-mirror based on the position information, the method further includes:

[0028] A target deflection angle corresponding to the initial deflection voltage is acquired, and the initial deflection voltage is adjusted so that the current deflection angle and the target deflection angle are consistent when the target deflection angle is inconsistent with the current deflection angle.

[0029] Optionally, the step of acquiring the current deflection information of the target micro-mirror based on the position information includes:

[0030] Standard position information of reflected laser reflected by the target micro-mirror when the target micro-mirror is deflected to the target deflection angle on the photosensitive assembly is acquired, and it is determined that the target deflection angle is inconsistent with the current deflection angle when the standard position information is inconsistent with the current position information.

[0031] Optionally, the step of adjusting the initial deflection voltage so that the current deflection angle and the target deflection angle are consistent includes:

[0032] The initial deflection voltage is adjusted so that the current position information and the standard position information are consistent.

[0033] Compared with the prior art, the micro-mirror array detection device provided by the embodiment of the application has the beneficial effect that: the target micro-mirror is scanned by the laser scanning assembly to reflect the reflected laser, the reflected laser is received by the photosensitive assembly, and since the positional relationship between the photosensitive assembly and the micro-mirror array is fixed and known, the angle information of the target micro-mirror can be obtained according to the incident point of the reflected laser on the photosensitive assembly, so that whether the deflection angle of the target micro-mirror is in place can be determined according to the current angle information, and the situation that the deflection angle of the micro-mirror array is not in place can be monitored in time, so that measures can be taken in time to ensure the communication quality. BRIEF DESCRIPTION OF DRAWINGS

[0034] The scheme of the application will be further described in detail below with reference to the drawings and embodiments, and the drawings are as follows:

[0035] Figure 1 is a structural schematic diagram of an embodiment of the micro-mirror array detection device provided by the application;

[0036] Figure 2 is a schematic diagram of an application scenario of the first embodiment of the optical switch device provided by the application;

[0037] Figure 3 is a schematic diagram of an application scenario of the second embodiment of the optical switch device provided by the application;

[0038] Figure 4 is a structural schematic diagram of an embodiment of the photosensitive assembly provided by the application;

[0039] Figure 5 is a flow schematic diagram of an embodiment of the detection method of the deflection angle of the micro-mirror array provided by the application.

[0040] The various reference signs in the drawings are as follows:

[0041] 10, micro-mirror array detection device; 11, laser scanning assembly; 111, laser; 112, galvanometer; 12, photosensitive assembly; 121, photosensitive unit; 20, optical switch device; 21, optical transmission assembly; 211, micro-mirror array; 212, input fiber array; 213, output fiber array; 22, light splitting element; 221, light splitting sheet. DETAILED DESCRIPTION

[0042] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The preferred embodiments of the application will be described in detail with reference to the drawings.

[0043] Please refer to Figure 1 , Figure 1is a structural schematic diagram of an embodiment of the micro-mirror array detection device provided by the present application. The micro-mirror array detection device 10 is used to detect the deflection angle of at least one micro-mirror in the micro-mirror array 211 in the optical switch device 20. Thus, it can be determined whether the current deflection angle of the at least one micro-mirror matches the current deflection voltage, and if the two match, the transmission of communication information can be performed, and if the two do not match, the target angle corresponding to the current deflection voltage can be obtained, the deflection voltage is adjusted, and the deflection angle is detected in real time until the deflection angle reaches the target angle. The deflection voltage at this time is recorded as the target voltage, and the target voltage is applied to the micro-mirror during subsequent adjustment, which can ensure the accurate transmission of communication signals and the stable power of the transmitted power signals. Therefore, the micro-mirror array detection device 10 is of great help to the improvement of the communication quality of the optical switch device 20.

[0044] The micro-mirror array detection device 10 includes a laser scanning assembly 11 and a photosensitive assembly 12. The laser scanning assembly 11 can emit detection laser, and the emission direction and / or emission angle of the emitted detection laser can be adjusted. By adjusting the emission direction and / or emission angle of the detection laser, the detection laser can be scanned in a preset order in at least one micro-mirror in the micro-mirror array 211, for example, all micro-mirrors can be scanned, or the emission direction and / or emission angle can be calculated according to the position relationship between the light outlet of the laser scanning assembly 11 and the micro-mirror array 211, so that the detection laser can be scanned to the micro-mirror on the preset row and / or preset column.

[0045] The photosensitive assembly 12 is used to receive reflected laser reflected after at least one micro-mirror is scanned by the detection laser. The relative position between the photosensitive assembly 12 and the micro-mirror array 211 is fixed and known, so the angle information of the micro-mirror corresponding to the incident point of the reflected laser on the photosensitive assembly 12 can be calculated according to the position relationship between each micro-mirror and the photosensitive assembly 12, and the position of the incident point. The angle information includes the deflection angles of the micro-mirror in the x-axis and y-axis directions.

[0046] Since the deflection voltage provided for each micro-mirror of the optical switch device 20 includes the x-axis deflection voltage and the y-axis deflection voltage, the preset deflection angle of the micro-mirror in the x-axis and y-axis directions is also known, so the calculated deflection angle and the preset deflection angle can be compared, so that it can be determined whether the current deflection angle of the micro-mirror is the preset deflection angle.

[0047] In other implementation scenarios, the preset incidence point of the reflected light of the micro-mirror on the photosensitive component 12 can also be calculated based on the preset deflection angle of the micro-mirror and the positional relationship between the micro-mirror and the photosensitive component 12. If the actual incidence point of the reflected light of the micro-mirror coincides with the preset incidence point, it can be determined that the current deflection angle of the micro-mirror is not the preset deflection angle, and if the actual incidence point does not coincide with the preset incidence point, it can be determined that the current deflection angle of the micro-mirror is not the preset deflection angle.

[0048] As described above, in the present embodiment, the detection laser is emitted by the laser scanning component to scan the target micro-mirror, so that the target micro-mirror reflects the reflected laser, and the reflected laser is received by the photosensitive component. Since the positional relationship between the photosensitive component and the micro-mirror array is fixed and known, the angle information of the target micro-mirror can be obtained according to the incidence point of the reflected laser on the photosensitive component, so that whether the deflection angle of the target micro-mirror is in place can be determined according to the current angle information, and the situation that the deflection angle of the micro-mirror array is not in place can be monitored in time, so that measures can be taken in time to ensure the communication quality.

[0049] In one implementation scenario, the laser scanning component 11 includes a laser 111 and a galvanometer 112, the galvanometer 112 includes a galvanometer body and a driving component, and the galvanometer 112 is an optical element capable of rapid deflection in two or more directions. By controlling the deflection angle of the galvanometer body, precise positioning and control of the light beam can be achieved. The galvanometer 112 can realize a small angle adjustment and can be deflected in multiple directions, and has great flexibility, so that precise positioning and control of the light beam can be achieved.

[0050] The laser 111 is used to provide detection laser, the galvanometer body is used to reflect the detection laser, and the driving component can drive the galvanometer body to deflect in at least two directions such as the x-axis direction and the y-axis direction, so as to adjust the emission direction and / or emission angle of the reflected detection laser, so that the detection laser can scan at least one micro-mirror in the micro-mirror array 211 in a preset order.

[0051] Please refer to Figure 2 and Figure 3 , Figure 2 is an application scenario diagram of a first embodiment of the optical switching device provided by the present application, Figure 3 is an application scenario diagram of a second embodiment of the optical switching device provided by the present application. In Figure 2 and Figure 3In the shown application scenario, the optical switch device 20 comprises the micro-mirror array detection apparatus 10 and an optical transmission assembly 21, the optical transmission assembly 21 comprising at least one micro-mirror array 211, an input optical fiber array 212 and an output optical fiber array 213, specifically, the input optical fiber array 212 and the output optical fiber array 213 are respectively located at two sides of the at least one micro-mirror array 211, so that the communication laser output by the input optical fiber array 212 can be reflected to the output optical fiber array 213 through the at least one micro-mirror array 211.

[0052] The optical switch device 20 can detect whether the deflection angle of at least one micro-mirror in the micro-mirror array 211, for example, a micro-mirror to be used in the optical communication operation, is correct in the x-axis direction and the y-axis direction through the micro-mirror array detection apparatus 10 before or during the optical communication operation, if the deflection angle is not correct, the control circuit driving the micro-mirror array 211 adjusts the x-axis deflection voltage and / or the y-axis deflection voltage applied to the micro-mirror to make the deflection angle of the micro-mirror correct. If the deflection angle is correct, the optical communication operation is continued.

[0053] Specifically, for a micro-mirror A in a micro-mirror array 211, the current deflection voltage currently applied to the micro-mirror A by the control circuit can be obtained, including the x-axis deflection voltage and the y-axis deflection voltage, and the target deflection angle of the micro-mirror A is obtained based on the current deflection voltage. The current deflection angle of the micro-mirror A can be obtained through the micro-mirror array detection apparatus 10, if the target deflection angle is inconsistent with the current deflection angle, the x-axis deflection voltage and / or the y-axis deflection voltage applied to the micro-mirror A by the driving circuit is adjusted, and the real-time deflection angle of the micro-mirror A is obtained through the micro-mirror array detection apparatus 10 until the real-time deflection angle is the target deflection angle.

[0054] Further, the current deflection voltage at this time can be recorded as the target deflection voltage corresponding to the target deflection angle, and when the micro-mirror A needs to be adjusted to the target deflection angle in the future, the target deflection voltage is applied to it, which can reduce the adjustment time and improve the work efficiency.

[0055] In one implementation scenario, after the micro-mirror A is adjusted to the target deflection angle, the micro-mirror array detection apparatus 10 can be started according to a preset period to periodically detect whether the deflection angle of the micro-mirror A changes, and adjust the deflection voltage in time to ensure that the communication quality is stable and reliable.

[0056] In other implementation scenarios, the optical switch device 20 further comprises a light splitting element 22, and the light transmission assembly 21 and the micro-mirror array detection device 10 are respectively located on two sides of the light splitting element 22. The light splitting element 22 is capable of transmitting laser light in a first wavelength range, for example, 600nm-900nm, and reflecting laser light in a second wavelength range, for example, 1270nm-1670nm. The communication laser transmitted by the light transmission assembly 21 is in the second wavelength range, for example, 1370nm, and the detection laser is in the first wavelength range, for example, 850nm. The light splitting element 22 is capable of transmitting the detection laser and reflecting the communication laser. Therefore, the detection laser and the communication laser can not interfere with each other, and the deflection angle of the micro-mirror can be detected while the communication transmission is performed.

[0057] Specifically, the input fiber array 212 and the output fiber array 213 are respectively located on two sides of the at least one micro-mirror array 211, so that the communication laser output by the input fiber array 212 can be reflected by the at least one micro-mirror array 211 to the light splitting element 22. Since the light splitting element 22 reflects the communication laser, the communication laser is reflected by the light splitting element 22 to the output fiber array 213. When there are two or more micro-mirror arrays 211, the communication laser is reflected and transmitted by the light splitting element 22 and the plurality of micro-mirror arrays 211, and finally reflected to the output fiber array 213.

[0058] The laser scanning assembly 11 in the micro-mirror array detection device 10 scans at least one micro-mirror in the micro-mirror array 211, and emits detection laser to the micro-mirror array 211. Since the light splitting element 22 transmits the detection laser, the detection laser is transmitted by the light splitting element 22 to the micro-mirror in the micro-mirror array 211, and the micro-mirror reflects the detection laser, so that the reflected laser is emitted to the photosensitive assembly 12. Please refer to Figure 4 , Figure 4 is a structural schematic diagram of an embodiment of the photosensitive assembly provided by the application. The photosensitive assembly 12 is composed of a plurality of photosensitive units 121 arranged in an array. Each photosensitive unit 121 can be labeled, and a coordinate system can be constructed based on the label, so that after the reflected laser is emitted to the photosensitive assembly 12, the position information of the incident point of the reflected laser on the photosensitive assembly 12 can be obtained. Since the laser scanning assembly 11 scans the micro-mirror in the micro-mirror array 211 in a predetermined order, there is only one incident point on the photosensitive assembly at the same time. Therefore, the correspondence between the currently scanned micro-mirror and the current incident point can be constructed, so that the micro-mirror corresponding to each incident point can be obtained, and the deflection angle of the corresponding micro-mirror can be obtained according to the position information of the incident point.

[0059] The light splitting element 22 can be Figure 2 is a light splitting sheet 221, or as shown in Figure 3As shown, the plurality of parallel arranged light splitting plates 221 are provided. By providing the plurality of parallel arranged light splitting plates 221, the plurality of parallel arranged light splitting plates 221 can realize the multi-path transmission of the optical signal in a smaller space, so that the whole optical switch device 20 structure is more compact.

[0060] In Figure 2 and Figure 3 In the scenario shown, the number of micromirror arrays 211 is greater than one, for example, can be two, then the photosensitive components 12 and the micromirror arrays 211 can be arranged one by one, so that the deflection angle of the micromirror in the micromirror array 211 corresponding to the photosensitive component 12 can be obtained according to the incident point on each photosensitive component 12. The number of laser scanning components 11 can be one or more. One corresponding laser scanning component 11 can be provided for each micromirror array 211, or one scanning component can scan all micromirror arrays 211.

[0061] When the number of laser scanning components 11 is one, the laser scanning component 11 is arranged at the center position between the plurality of micromirror arrays 211, ensuring that the laser scanning range can cover all micromirror arrays 211, so as to realize the scanning of the whole micromirror array 211. The photosensitive components 12 are arranged around the laser scanning component 11, for example, on both sides, and are arranged one by one with the micromirror arrays 211, which can ensure that each photosensitive component 12 can receive the reflected laser reflected by each micromirror in the corresponding micromirror array 211, so as to realize the detection of the deflection angle of each micromirror. By centrally arranging the laser scanning component 11 and the photosensitive component 12, the layout and connection mode of the whole system can be simplified, and the stability and reliability of the system can be improved.

[0062] When the number of laser scanning components 11 is more than one, each laser scanning component 11 is arranged one by one with the micromirror array 211. This one-to-one arrangement can realize more precise control and adjustment to realize more accurate optical path control. The deflection angles of the micromirrors in all micromirror arrays 211 can be detected at the same time, improving the detection processing efficiency and performance. As Figure 3 shown in the figure, when the number of micromirror arrays 211 is two, and the two micromirror arrays 211 are located on the same horizontal plane, the number of laser scanning components 11 is also two, and the two laser scanning components 11 are arranged symmetrically, and the symmetry axis is a vertical axis located at the center of the interval between the two micromirror arrays 211 and perpendicular to the horizontal plane where the two micromirror arrays 211 are located.

[0063] It can be known from the above description that the micro-mirror array detection device is arranged in the optical switch device in the embodiment, so that whether the deflection angle of each micro-mirror in the micro-mirror array in the optical switch device corresponds to the current applied deflection voltage can be detected, the deflection angle of the micro-mirror that does not correspond to the deflection voltage can be found in time, and the micro-mirror is deflected to the required angle by adjusting the deflection voltage, so that the communication laser can be accurately transmitted in the optical switch device, the output communication laser power is stable, and the communication quality of the optical switch device 20 is effectively ensured.

[0064] Please refer to Figure 5 , Figure 5 is a flowchart of an embodiment of a method for detecting the deflection angle of a micro-mirror array provided by the application. The method for detecting the deflection angle of the micro-mirror array is applied to the scene shown in Figure 1 、 Figure 2 or Figure 3 , and includes the following steps:

[0065] S101: Obtain a micro-mirror adjustment instruction, and apply a current deflection voltage to a target micro-mirror in the micro-mirror array based on the micro-mirror adjustment instruction.

[0066] In a specific implementation scenario, the micro-mirror adjustment instruction can be generated based on a communication instruction, the communication instruction specifies an input optical fiber in an input optical fiber array and an output optical fiber in an output optical fiber array, and the input optical fiber and the output optical fiber corresponding micro-mirrors in the micro-mirror array are obtained. When there is one micro-mirror array in the optical switch device, the target micro-mirror corresponding to the input optical fiber and the output optical fiber in the micro-mirror array is obtained, and the target deflection angle of the target micro-mirror is obtained for the transmission light path between the input optical fiber, the output optical fiber and the target micro-mirror. The initial deflection voltage corresponding to the target deflection angle is obtained, and the initial deflection voltage corresponding to the target micro-mirror is applied.

[0067] When there are two micro-mirror arrays in the optical switch device as shown in Figure 2 or Figure 3 , the target micro-mirror in the micro-mirror array corresponding to the input optical fiber and the target micro-mirror in the micro-mirror array corresponding to the output optical fiber are obtained, and the target deflection angle of each target micro-mirror is calculated based on the transmission light path between the input optical fiber, the output optical fiber and the two target micro-mirrors. The initial deflection voltage corresponding to the target deflection angle is obtained, and the initial deflection voltage corresponding to the two target micro-mirrors is applied.

[0068] When there are more micro-mirror arrays in the optical switch device, the target deflection angle of each target micro-mirror is obtained based on the light path of the input optical fiber, the output optical fiber and the target micro-mirror in the multiple micro-mirror arrays, the initial deflection voltage corresponding to each target deflection angle is obtained, and the initial deflection voltage corresponding to each target micro-mirror is applied.

[0069] The number of input optical fibers and output optical fibers can be one or more, and thus the number of target micro-mirrors for transmitting communication laser in each micro-mirror array can also be one or more, which is set by specific transmission requirements and is not limited herein.

[0070] S102: driving the laser scanning assembly to emit laser to scan the target micro-mirror in the micro-mirror array according to a preset order.

[0071] In a specific implementation scenario, after the initial deflection voltage is applied to the target micro-mirror, the laser scanning assembly is driven to emit laser, so that the detection laser can scan the target micro-mirror in each micro-mirror array according to a preset order, to detect whether the current deflection angle of the target micro-mirror is the preset deflection angle.

[0072] Specifically, when there is only one micro-mirror array, the coordinates of all target micro-mirrors on the micro-mirror array are obtained, for example, X rows and Y columns, and all target micro-mirrors are scanned in turn according to the order of row by row or column by column. The target micro-mirror can be scanned, or all micro-mirrors in a micro-mirror array can be scanned, but only the reflected laser of the target micro-mirror is collected.

[0073] When there are at least two micro-mirror arrays and one laser scanning assembly, the at least two micro-mirror arrays are sorted, and the target micro-mirrors in each micro-mirror array are sorted, and the laser scanning assembly is driven to scan each target micro-mirror in each micro-mirror array according to the sorting.

[0074] When the micro-mirror array and the laser scanning assembly are one-to-one corresponding, the target micro-mirror in each micro-mirror array is sorted, and the corresponding laser scanning assembly of each micro-mirror array is driven to perform scanning work according to the sorting at the same time, to simultaneously detect each target micro-mirror in each micro-mirror array.

[0075] S103: obtaining current position information of the incident point of the reflected laser reflected by the target micro-mirror on the photosensitive assembly, and obtaining the current deflection angle of the target micro-mirror based on the current position information.

[0076] In a specific implementation scenario, since the target micro-mirror is scanned in turn in this implementation scenario, and the photosensitive assembly is one-to-one corresponding to the micro-mirror array, only the incident point of the reflected laser of the target micro-mirror will exist on the photosensitive assembly at the same time, which corresponds to the target micro-mirror scanned at the current time. Since the position relationship between the photosensitive assembly and the micro-mirror array is known and fixed, the current position information of the incident point on the photosensitive assembly and the position relationship between the photosensitive assembly and the micro-mirror array can be used to obtain the current deflection angle of the target micro-mirror.

[0077] In other implementation scenarios, after the current deflection angle is obtained, it can be detected whether the current deflection angle and the target deflection angle are consistent. If they are consistent, the initial deflection voltage is taken as the target deflection voltage, and the communication operation is continued to transmit the communication laser. If they are not consistent, the initial deflection voltage needs to be adjusted according to the difference between the current deflection angle and the target deflection angle, and the adjusted deflection angle is monitored in real time by the micromirror array detection device during the adjustment until the detected deflection angle is consistent with the target deflection angle. Then the communication operation can be continued to transmit the communication laser. In this way, it can be ensured that the communication laser is transmitted along the preset optical path, the power of the communication laser output by the optical fiber is stable, and the communication quality of the optical switching device is reliable.

[0078] In other implementation scenarios, the specific current deflection angle can not be directly obtained, but only whether the current deflection angle is in place needs to be known. Therefore, based on the positional relationship between the photosensitive component and the micromirror array and the target deflection angle to which the target micromirror needs to be deflected in the preset optical path, the standard position information of the reflected laser reflected by the target micromirror when the target micromirror is deflected to the target deflection angle and is scanned by the detected laser can be calculated in theory. When the target micromirror is applied with the initial deflection voltage, the current position information of the actual incident point of the reflected laser reflected by the target micromirror when the target micromirror is scanned by the detected laser is obtained. Whether the standard position information and the current position information are consistent, that is, whether the theoretical incident point and the actual incident point coincide,

[0079] When the standard position information and the current position information are inconsistent, it is determined that the target deflection angle and the current deflection angle are inconsistent. Therefore, the initial deflection voltage can be adjusted according to the difference between the standard position information and the current position information, and the position information of the adjusted incident point is monitored in real time by the micromirror array detection device during the adjustment until the detected position information is consistent with the standard position information. Then the communication operation can be continued to transmit the communication laser. In this way, it can be ensured that the communication laser is transmitted along the preset optical path, the power of the communication laser output by the optical fiber is stable, and the communication quality of the optical switching device is reliable.

[0080] As can be known from the above description, in the embodiment, the detected laser is emitted by the laser scanning component to scan the target micromirror, so that the target micromirror reflects the reflected laser, which is received by the photosensitive component. Since the positional relationship between the photosensitive component and the micromirror array is fixed and known, the current deflection information of the target micromirror can be obtained according to the incident point of the reflected laser on the photosensitive component, so that whether the deflection angle of the target micromirror is in place can be judged according to the current deflection information, and timely adjustment can be made to ensure the communication quality of the optical switching device.

[0081] The application further provides a communication device. The communication device comprises a processor and a memory. The processor is coupled to the memory. The memory stores a computer program. The processor executes the computer program to implement the method described above. The detailed steps are described above and will not be repeated here.

[0082] The application further provides a computer readable storage medium. The computer readable storage medium stores at least one computer program. The computer program is used to be executed by a processor to implement the method described above. The detailed steps are described above and will not be repeated here. In an embodiment, the computer readable storage medium can be a storage chip in a terminal, a hard disk, or a mobile hard disk or an optical disk, or other readable and writable storage tools, and can also be a server, etc.

[0083] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiments can be completed by a computer program instructing related hardware. The program can be stored in a non-volatile computer readable storage medium. When the program is executed, it can include the processes of the above-mentioned embodiments. Any reference to memory, storage, database or other medium used in the embodiments provided by the present application can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. As an illustration but not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDR SDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), Rambus direct RAM (RDRAM), direct memory bus dynamic RAM (DRAM), and memory bus dynamic RAM (RDRAM), etc.

[0084] The technical features of the above embodiments can be combined in any way. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combinations of the technical features do not contradict, they should be considered as the scope of the present application.

[0085] It should be understood that the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit it. Those skilled in the art can modify the technical solutions described in the above embodiments, or make equivalent replacement for part of the technical features; and all these modifications and replacements shall fall within the protection scope of the appended claims of the present application.

Claims

1. An optical switching device, characterized in that, It includes a micromirror array detection device and a micromirror array, wherein the optical switch device is used to transmit communication laser; the frequency of the detected laser is different from the frequency of the communication laser; The micromirror array detection device is used to detect the deflection angle of at least one micromirror in the micromirror array of the optical switch device, including: A laser scanning component is used to emit a detection laser and adjust the emission direction and / or emission angle of the detection laser so that the detection laser can scan at least one of the micromirrors in the micromirror array in a preset order. A photosensitive component is used to receive reflected laser light from at least one of the micromirrors after it has been scanned by the detection laser, and to obtain angle information of at least one of the micromirrors based on the position information of the incident point of the reflected laser light on the photosensitive component. The optical switching device further includes an optical transmission component, which includes at least one micromirror array, an input fiber array, and an output fiber array. When the angle information of the micromirror obtained by the micromirror array detection device does not match the current deflection voltage of the micromirror, the control circuit of the micromirror array adjusts the real-time deflection voltage applied to the micromirror so that the angle information matches the current deflection voltage.

2. The optical switching device according to claim 1, characterized in that, The laser scanning assembly includes a laser, a galvanometer body, and a driving assembly; The laser generator is used to provide the detection laser; The galvanometer body is used to reflect the detection laser; The driving component can drive the galvanometer body to deflect in at least two directions, so that the detection laser reflected by the galvanometer body can scan at least one of the micromirrors in the micromirror array in a preset order.

3. The optical switching device according to claim 1, characterized in that, The frequency of the detection laser is different from the frequency of the communication laser; The optical switching device further includes a beam splitter, which can transmit the detection laser and reflect the communication laser. The optical transmission component includes at least one micromirror array, an input fiber array, and an output fiber array. The optical transmission component, the laser scanning component, and the photosensitive component are located on both sides of the beam splitter.

4. The optical switching device according to claim 3, characterized in that, When the number of micromirror arrays is greater than one, the number of laser scanning components is one or more; the photosensitive components and the micromirror arrays are arranged in a one-to-one correspondence.

5. The optical switching device according to claim 4, characterized in that, When there is only one laser scanning component, the laser scanning component is positioned at the center between the multiple micromirror arrays, and the laser scanning range of the laser scanning component can cover the entire micromirror array; the photosensitive component is located around the laser scanning component and is positioned corresponding to the micromirror array, so as to receive all the reflected laser light. When there are multiple laser scanning components, each laser scanning component and the micromirror array are configured in a one-to-one correspondence.

6. A method for detecting the deflection angle of a micromirror array, characterized in that, The method for detecting the deflection angle of the micromirror, applicable to the optical switching device according to any one of claims 1-5, includes: Obtain micromirror adjustment commands, and apply initial deflection voltages to the target micromirrors in the micromirror array based on the micromirror adjustment commands; The laser scanning component is driven to emit a detection laser, which enables the detection laser to scan the target micromirrors in the micromirror array in a preset order; The current position information of the incident point of the reflected laser light from the target micromirror on the photosensitive component is obtained, and the current deflection information of the target micromirror is obtained based on the current position information.

7. The method for detecting the deflection angle of a micromirror array according to claim 6, characterized in that, The current deflection information includes the current deflection angle; After the step of obtaining the current deflection angle of the target micromirror based on the position information, the following steps are included: Obtain the target deflection angle corresponding to the initial deflection voltage. When the target deflection angle is inconsistent with the current deflection angle, adjust the initial deflection voltage so that the current deflection angle is consistent with the target deflection angle.

8. The method for detecting the deflection angle of a micromirror array according to claim 7, characterized in that, The step of obtaining the current deflection information of the target micromirror based on the position information includes: When the target micromirror is deflected to the target deflection angle, the standard position information of the reflected laser on the photosensitive component is obtained. When the standard position information and the current position information are inconsistent, it is determined that the target deflection angle is inconsistent with the current deflection angle.

9. The method for detecting the deflection angle of a micromirror array according to claim 8, characterized in that, The step of adjusting the initial deflection voltage to make the current deflection angle consistent with the target deflection angle includes: Adjust the initial deflection voltage so that the current position information is consistent with the standard position information.

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