A constant temperature module for a multi-gas control cabinet

Abstract

The present invention relates to the field of temperature control technology, and specifically to a thermostatic module for a multi-gas control cabinet, including a low-pressure nitrogen tank, a high-pressure nitrogen tank, a pressure regulating valve, a heat exchanger, a booster pump, a temperature sensor, and a gas leakage detection sensor; the low-pressure nitrogen tank and the high-pressure nitrogen tank are respectively connected to the two input ends of the pressure regulating valve through pipelines, and the two input ends are respectively connected to a solenoid valve one and a solenoid valve two. Compared with the traditional method, the present technical solution combines high- and low-pressure nitrogen systems, and provides nitrogen in different pressure states through a low-pressure nitrogen tank and a high-pressure nitrogen tank, respectively, and can flexibly choose to use high-pressure nitrogen to release heat or low-pressure nitrogen to absorb heat to adjust the temperature according to the change of the temperature inside the cabinet. Compared with some traditional thermostatic devices that only use a single heating or cooling method, this module can more accurately adapt to different temperature requirements, achieve more accurate constant temperature control, and ensure that the inside of the cabinet is always in a suitable temperature environment.

Description

Technical Field

[0001] The invention relates to the technical field of temperature control, and in particular to a constant temperature module for a multi-gas control cabinet. Background Art

[0002] A multi-gas control cabinet is a device specifically used to control the flow of gas. It usually contains components such as pressure regulators, filters, flow meters, solenoid valves, etc., which are used to control the flow of gas (such as compressed air, nitrogen, etc.). It controls the opening and closing of the gas path to achieve gas flow, stop, control and other operations. It is widely used in places where gas flow needs to be controlled, such as semiconductor manufacturing, food processing, medical equipment, etc. In some special application scenarios, such as where it is necessary to store and maintain a stable temperature of a specific gas, the multi-gas control cabinet also needs to use additional thermostats or structures to achieve precise control of the gas temperature.

[0003] The patent document with patent announcement number: CN108816165B discloses an automatic constant temperature and pressure device in a gas environment, including a high-temperature acquisition structure, a constant pressure structure, and a product collection structure. This scheme realizes constant temperature and pressure regulation of the reaction system, and the reaction exhaust gas is discharged and collected after purification. The reaction temperature and pressure are stably controlled, saving manpower and material resources, with a high safety factor and improved production efficiency.

[0004] The above solution achieves constant temperature and pressure regulation of the reaction system through constant pressure accessories and constant temperature control cabinets, mainly using hydrogen as the gas source. It has certain advantages in specific reaction scenarios, but it also has certain limitations, which are manifested in the following aspects:

[0005] This solution mainly uses hydrogen, but hydrogen is flammable and explosive, and requires higher safety measures during use and storage, which increases equipment costs and operational risks. Not only that, in large-scale applications, the cost of producing hydrogen is also high and difficult to promote. Summary of the invention

[0006] The present invention aims to solve one of the technical problems in the related art at least to a certain extent. To this end, the purpose of the present invention is to provide a constant temperature module, a constant temperature adjustment method and an electronic device for a multi-gas control cabinet to ensure that the interior of the cabinet is always in a constant temperature environment.

[0007] To achieve the above-mentioned object, the first embodiment of the present invention proposes a thermostatic module for a multi-gas control cabinet, which is used to keep the interior of the cabinet of the multi-gas control cabinet at a constant temperature. The thermostatic module includes a low-pressure nitrogen tank, a high-pressure nitrogen tank, a pressure regulating valve, a heat exchanger, a throttle valve, a booster pump, a temperature sensor, and a gas leakage detection sensor;

[0008] The low-pressure nitrogen tank and the high-pressure nitrogen tank are respectively connected to two input ends of the pressure regulating valve through pipelines, and the two input ends are respectively connected to a solenoid valve 1 and a solenoid valve 2;

[0009] The output end of the pressure regulating valve is connected to the input end of the heat exchanger. The heat exchanger is distributed in a winding shape inside the cabinet. The output end of the heat exchanger is connected to the input end of the throttle valve. The throttle valve includes at least two output ends, wherein one output end of the throttle valve is connected to the low-pressure nitrogen tank through a pipeline, and the other output end of the throttle valve is connected to the input end of the boosting pump, and the output end of the boosting pump is connected to the high-pressure nitrogen tank through a pipeline.

[0010] In some embodiments of the present invention, a plurality of gas delivery pipes are provided inside the cabinet, and the gas delivery pipes are connected to flow meters; when the gas delivery pipes deliver nitrogen, the gas delivery pipes are connected to the low-pressure nitrogen tank through a pipeline or to the high-pressure nitrogen tank through the booster pump, depending on the pressure of the delivered nitrogen.

[0011] In some embodiments of the present invention, a delivery cylinder is connected between the output end of the pressure regulating valve and the input end of the heat exchanger, a cavity is formed inside the delivery cylinder, and a baffle plate 1 and a baffle plate 2 are arranged in the cavity of the delivery cylinder at intervals along the axial direction thereof;

[0012] The diameters of baffle plate 1 and baffle plate 2 match the inner diameter of the conveying cylinder cavity. Baffle plate 1 and baffle plate 2 are rotatably connected to the inner wall of the conveying cylinder cavity through rotating shafts on both sides of the baffle plate, and at least one side of the rotating shaft is connected to a driving motor.

[0013] In some embodiments of the present invention, a through hole 1 is formed in the middle of the baffle 1 corresponding to the axial position of the conveying cylinder, and a plurality of through holes 2 are opened through the surface of the baffle 2, and the aperture of the through hole 1 is larger than that of the through hole 2.

[0014] In some embodiments of the present invention, the cross-sectional outer contour of the heat exchanger is rectangular, a circular conveying cavity is formed inside the heat exchanger, and the heat exchanger is installed close to the inner wall of the cabinet from the input end to the output end.

[0015] In some embodiments of the present invention, an electric heating wire is embedded in the outer surface of the heat exchanger, and the length of the electric heating wire matches the length of the heat exchanger.

[0016] In some embodiments of the present invention, a plurality of fins are obliquely installed on the inner wall of the conveying cavity. The plurality of fins are arranged at equal angles and have an arc-shaped structure. The inclination direction of the fins forms an angle with the axial direction of the conveying cavity, and the inclination direction of all the fins remains consistent.

[0017] In some embodiments of the present invention, exhaust holes and a mesh cover are provided on the surface of the cabinet, a fan is provided inside the cabinet corresponding to the mesh cover, a fixing plate is installed on the back of the fan, a plurality of strip-shaped through grooves are spaced apart on the fixing plate, a rotating plate is rotatably connected in the strip-shaped through grooves, one end of the rotating plate is connected to a gear, the plurality of gears are connected to each other via a transmission belt, and at least one gear is connected to a driver.

[0018] To achieve the above object, a second embodiment of the present invention provides a constant temperature adjustment method for a multi-gas control cabinet, comprising the following steps:

[0019] The temperature sensor monitors the internal temperature of the cabinet in real time and transmits the signal to the processor. When the internal temperature of the cabinet changes, the processor determines whether the temperature adjustment mechanism needs to be activated based on the preset temperature range;

[0020] When the temperature inside the cabinet is lower than the preset lower temperature limit and needs to be heated, the processor controls the solenoid valve 2 to open, and the high-pressure nitrogen in the high-pressure nitrogen tank enters the pressure regulating valve through the pipeline. The pressure regulating valve adjusts the high-pressure nitrogen to a suitable pressure according to the instructions of the processor, and then sends it to the heat exchanger through the conveying cylinder; in the conveying cylinder, the axis of the through hole 1 in the middle of the baffle 1 is the same as the axis of the conveying cylinder, and the high-pressure nitrogen enters the heat exchanger through the through hole 1, and the baffle 2 is rotated 90° to avoid disturbing the flow of the high-pressure nitrogen; the high-pressure nitrogen entering the heat exchanger flows in the winding conveying cavity. Due to the high pressure and large internal energy of the high-pressure nitrogen, the high-pressure nitrogen will release heat to the surrounding environment during the process, and the heat is transferred from the high-pressure nitrogen to the heat exchanger. To the cabinet environment with lower temperature, the temperature inside the cabinet is increased; at the same time, because the high-pressure nitrogen flows along the inclined direction of the fins, the equal-angle intervals and consistent inclined directions of adjacent fins make the high-pressure nitrogen gradually form a spiral flow; at this time, the electric heating wire can be started as needed, and the heat generated by the electric heating wire is transferred to the wall of the heat exchanger, and then to the spirally flowing nitrogen, so that its temperature is further increased. The heated nitrogen releases heat in the heat exchanger, heats the internal space of the cabinet, and accelerates the realization of the temperature increase purpose; the nitrogen flowing out of the output end of the heat exchanger is reduced in pressure by the throttle valve, a part of it flows back to the low-pressure nitrogen tank, and the other part enters the booster pump for pressurization and then returns to the high-pressure nitrogen tank, so as to realize the recycling and pressure regulation of nitrogen;

[0021] When the temperature inside the cabinet is higher than the preset upper temperature limit and needs to be cooled, the processor controls the solenoid valve 1 to open, and the low-pressure nitrogen in the low-pressure nitrogen tank enters the pressure regulating valve, and enters the delivery cylinder after the pressure is adjusted. In the delivery cylinder, the baffle plate 1 rotates 90 degrees to avoid disturbing the flow of the low-pressure nitrogen. The through hole 2 on the surface of the baffle plate 2 is opposite to the flow direction of the low-pressure nitrogen in the delivery cylinder, and the low-pressure nitrogen enters the heat exchanger through the through hole 2; in the heat exchanger, due to the temperature difference between the heat exchanger and the high-temperature environment in the cabinet, according to the principle of heat transfer, the low-pressure nitrogen enters the heat exchanger through the through hole 2. In principle, heat is transferred from the high-temperature cabinet environment to the low-temperature nitrogen, the nitrogen temperature rises and takes away the heat; the nitrogen after absorbing the heat flows out of the heat exchanger and passes through the throttle valve, which further reduces the nitrogen pressure and expands the volume. According to the Joule-Thomson effect, the nitrogen will consume its own internal energy during the expansion process, thereby further reducing the temperature. Part of the cooled nitrogen flows back to the low-pressure nitrogen tank, and the other part can be sucked into the booster pump as needed, and stored in the high-pressure nitrogen tank after boosting to maintain nitrogen circulation and pressure balance.

[0022] To achieve the above-mentioned purpose, the third aspect of the present invention proposes an electronic device, including a memory, a processor and a computer program stored in the memory, and when the computer program is executed by the processor, the above-mentioned constant temperature adjustment method is implemented.

[0023] Beneficial effects of the present invention:

[0024] Compared with traditional methods, this technical solution combines high and low pressure nitrogen systems, and provides nitrogen at different pressures through low pressure nitrogen tanks and high pressure nitrogen tanks, respectively. It can flexibly choose to use high pressure nitrogen to release heat or low pressure nitrogen to absorb heat to adjust the temperature according to the changes in the temperature inside the cabinet. Compared with some traditional thermostatic devices that only use a single heating or cooling method, this module can more accurately adapt to different temperature requirements and achieve more precise constant temperature control, ensuring that the inside of the cabinet is always in a suitable temperature environment, which is conducive to the stable operation of equipment in the multi-gas control cabinet and the stable storage and use of gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The present invention will be further described below in conjunction with the accompanying drawings.

[0026] Figure 1 is a three-dimensional view of a cabinet body and a cabinet door in one embodiment of the present invention;

[0027] Figure 2 The internal structure of the cabinet in one embodiment of the present invention is shown in FIG. Figure 1 ;

[0028] Figure 3 The internal structure of the cabinet in one embodiment of the present invention is shown in FIG. Figure 2 ;

[0029] Figure 4is a three-dimensional view of a conveying cylinder in one embodiment of the present invention;

[0030] Figure 5 is a cross-sectional view of a conveying cylinder in one embodiment of the present invention;

[0031] Figure 6 is a three-dimensional view of baffle plate 1 and baffle plate 2 in one embodiment of the present invention;

[0032] Figure 7 is a three-dimensional view of a fan and a fixing plate in one embodiment of the present invention;

[0033] Figure 8 is a three-dimensional view of a heat exchanger and an electric heating wire in one embodiment of the present invention;

[0034] Fig. 9 is a side view of a heat exchanger in one embodiment of the present invention;

[0035] Fig.10 It is a schematic structural diagram of an electronic device in another embodiment of the present invention.

[0036] In the figure: 1, cabinet; 11, cabinet door; 12, exhaust hole; 13, mesh cover; 2, gas delivery pipe; 21, flow meter; 3, low-pressure nitrogen tank; 31, high-pressure nitrogen tank; 32, pressure regulating valve; 33, solenoid valve 1; 34, solenoid valve 2; 35, delivery cylinder; 351, baffle 1; 3511, through hole 1; 352, baffle 2; 3521, through hole 2; 353, rotating shaft; 354, driving motor; 36, throttle valve; 37, booster pump; 4, heat exchanger; 41, delivery cavity; 42, fin; 5, temperature sensor; 6, gas leakage detection sensor; 7, fan; 71, fixing plate; 72, strip through groove; 73, rotating plate; 74, gear; 75, transmission belt; 8, electric heating wire; 9, electronic equipment; 91, processor; 92, bus; 93, memory; 94, transceiver. DETAILED DESCRIPTION

[0037] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0038] The following describes a thermostatic module for a multi-gas control cabinet, a thermostatic adjustment method, and an electronic device according to embodiments of the present invention with reference to the accompanying drawings.

[0039] like Figure 1The figure shows a schematic diagram of the structure of the cabinet 1 in which the constant temperature module displayed by the present invention is installed. The cabinet 1 is rotatably connected to a cabinet door 11. A plurality of gas delivery pipes 2 are passed through the inside of the cabinet 1. The gas delivery pipes 2 are used to transport various types of gases, such as chlorine, nitrogen, hydrogen, etc. A flow meter 21 is connected to each gas delivery pipe 2.

[0040] Figure 2 , Figure 3 Schematic diagram of a thermostatic module for a multi-gas control cabinet according to an embodiment of the present invention Figure 1 and stereoscopic Figure 2 .

[0041] like Figure 2 , Figure 3 As shown, a thermostatic module for a multi-gas control cabinet is used to keep the interior of a cabinet 1 of the multi-gas control cabinet at a constant temperature. The thermostatic module includes a low-pressure nitrogen tank 3, a high-pressure nitrogen tank 31, a pressure regulating valve 32, a heat exchanger 4, a throttle valve 36, a booster pump 37, a temperature sensor 5, and a gas leakage detection sensor 6; the low-pressure nitrogen tank 3 and the high-pressure nitrogen tank 31 are respectively connected to two input ends of the pressure regulating valve 32 through pipelines, and the two input ends are respectively connected to a solenoid valve 1 33 and a solenoid valve 2 34;

[0042] The output end of the pressure regulating valve 32 is connected to the input end of the heat exchanger 4. The heat exchanger 4 is distributed in a winding shape inside the cabinet 1. The output end of the heat exchanger 4 is connected to the input end of the throttle valve 36. The throttle valve 36 includes at least two output ends, wherein one output end of the throttle valve 36 is connected to the low-pressure nitrogen tank 3 through a pipeline, and the other output end of the throttle valve 36 is connected to the input end of the boosting pump 37, and the output end of the boosting pump 37 is connected to the high-pressure nitrogen tank 31 through a pipeline.

[0043] The thermostatic module combines high and low pressure nitrogen systems and many components, which are interconnected through pipelines to form a complete closed-loop system for maintaining a constant temperature environment inside the multi-gas control cabinet 1. As the storage source of nitrogen, the low-pressure nitrogen tank 3 and the high-pressure nitrogen tank 31 are connected to the pressure regulating valve 32 through the solenoid valve respectively. The output end of the pressure regulating valve 32 leads to the heat exchanger 4, and the heat exchanger 4 is then connected to the throttle valve 36 and the booster pump 37 in sequence, finally realizing the recycling of nitrogen under high and low pressure states, and can flexibly choose to use high-pressure nitrogen to release heat or low-pressure nitrogen to absorb heat to adjust the temperature according to the change of the internal temperature of the cabinet 1. Compared with some traditional thermostatic devices that only use a single heating or cooling method, this module can more accurately adapt to different temperature requirements, achieve more accurate thermostatic control, ensure that the inside of the cabinet 1 is always in a suitable temperature environment, and is conducive to the stable operation of the equipment in the multi-gas control cabinet and the stable storage and use of gas, whether it is a heating or cooling process, it can respond quickly and effectively.

[0044] As an example, the booster pump 37 plays a role in maintaining the pressure of the high-pressure nitrogen tank 31 and boosting the low-pressure nitrogen during the whole process. When the pressure in the high-pressure nitrogen tank 31 drops to a certain level, or when high-pressure nitrogen needs to be supplemented, the booster pump 37 works to boost the low-pressure nitrogen and store it in the high-pressure nitrogen tank 31.

[0045] The pressure regulating valve 32 accurately adjusts the pressure and flow of nitrogen delivered from the high-pressure or low-pressure nitrogen storage tank to the heat exchanger 4 according to the instructions of the processor 91 to adapt to different temperature control requirements and ensure the stable operation of the constant temperature device.

[0046] As an example, Figure 2 , Figure 3 As shown, the temperature sensor 5 and the gas leakage detection sensor 6 are responsible for monitoring the key parameters inside the cabinet 1, providing data support for the precise control and safe operation of the entire system. The real-time monitoring function of the temperature sensor 5 ensures that the system can grasp the temperature changes inside the cabinet in a timely manner, provide an accurate basis for subsequent control decisions, and help improve the accuracy and stability of temperature control. The gas leakage detection sensor 6 is installed at the interface of the pipeline, around the heat exchanger 4, and at locations prone to leakage. These sensors can detect the nitrogen concentration in real time, and once the nitrogen leakage is detected to exceed the safety threshold, the signal is immediately sent to the processor 91. At the same time, an emergency exhaust valve is equipped. When a leak occurs, the processor 91 can open the emergency exhaust valve to discharge the nitrogen in the system to a safe place, and sound an alarm to remind the staff to perform maintenance. The presence of the gas leakage detection sensor 6 enhances the safety of the system, can detect potential nitrogen leakage risks in a timely manner, avoid safety accidents that may be caused by gas leakage, and ensure the safety of the multi-gas control cabinet and the surrounding environment.

[0047] In some embodiments of the present invention, when the gas delivery pipe 2 delivers nitrogen, the gas delivery pipe 2 is connected to the low-pressure nitrogen tank 3 through a pipeline or to the high-pressure nitrogen tank 31 through a booster pump 37, depending on the pressure of the delivered nitrogen. The flow meter 21 measures the flow of nitrogen in the gas delivery pipe 2 in real time, providing the system with detailed information on the use of nitrogen, which helps to achieve reasonable allocation and precise control of nitrogen resources.

[0048] This design realizes the intelligent management of nitrogen supply inside cabinet 1, mainly considering two aspects:

[0049] 1. Nitrogen can be delivered to the high-pressure nitrogen tank 31 or the low-pressure nitrogen tank 3 through the gas delivery pipe 2, avoiding the step of manually adding nitrogen, thereby achieving the purpose of long-term unmanned operation with high intelligence;

[0050] 2. When nitrogen is in short supply, nitrogen can be delivered to the gas delivery pipe 2 through a high-pressure nitrogen tank 31 or a low-pressure nitrogen tank 3. By switching the nitrogen source according to the pressure of the delivered nitrogen, it can be ensured that under different working conditions, the gas delivery pipe 2 always maintains a suitable nitrogen pressure to meet the nitrogen needs of various equipment. For example, in equipment that requires high-pressure nitrogen, sufficient supply from the high-pressure nitrogen tank 31 can be obtained in time; and for equipment that only requires low-pressure nitrogen, the risks and waste that may be caused by excessively high-pressure nitrogen are avoided. The use of the flow meter 21 helps to monitor the consumption of nitrogen, facilitates the timely detection of abnormal changes in nitrogen flow, and takes measures in advance, such as checking whether the pipeline is leaking or whether the equipment is operating normally, etc., which improves the reliability and stability of the entire system, and is also conducive to optimizing the use efficiency of nitrogen and reducing operating costs.

[0051] In some embodiments of the present invention, Figure 4 , Figure 5 As shown, a conveying cylinder 35 is connected between the output end of the pressure regulating valve 32 and the input end of the heat exchanger 4, and a cavity is formed inside the conveying cylinder 35. A baffle 1 351 and a baffle 2 352 are arranged in the cavity of the conveying cylinder 35 along its axial direction; the diameters of the baffle 1 351 and the baffle 2 352 match the inner diameter of the cavity of the conveying cylinder 35, and the baffle 1 351 and the baffle 2 352 are rotatably connected to the inner wall of the cavity of the conveying cylinder 35 through the rotating shafts 353 on both sides of the two, and the rotating shaft 353 on at least one side is connected to a driving motor 354. According to the input of nitrogen with different pressures, the corresponding baffle can be switched to process the nitrogen. The corresponding baffle can be controlled to flip by the driving motor 354, and the baffle 1 351 and the baffle 2 352 can be controlled independently.

[0052] In some embodiments of the present invention, Figure 6 As shown, a through hole 1 3511 is formed in the middle of the baffle 1 351 corresponding to the axial center position of the conveying cylinder 35 , and a plurality of through holes 2 3521 are formed through the surface of the baffle 2 352 , and the aperture of the through hole 1 3511 is larger than that of the through hole 2 3521 .

[0053] As an example, when high-pressure nitrogen flows, the large through holes of baffle 1 351 allow most of the nitrogen to pass smoothly, so that the high-pressure nitrogen can pass at a higher flow rate, reduce local resistance, increase the contact frequency with the tube wall of the heat exchanger 4, and improve the heat exchange efficiency. At the same time, the disturbance caused by part of the nitrogen impacting baffle 1 351 is conducive to promoting local mixing and enhancing the heat exchange effect. Baffle 2 352 rotates 90° to avoid disturbing the high-pressure nitrogen, ensuring that it enters the heat exchanger 4 smoothly.

[0054] As an example, for low-pressure nitrogen, baffle plate 1 351 is rotated 90° to prevent disturbance, and baffle plate 2 352 evenly disperses the low-pressure nitrogen through multiple small-aperture through holes to adapt to the large flow rate and low flow velocity characteristics of low-pressure nitrogen, reduce flow resistance, increase the contact area and residence time between nitrogen and baffle plate 2 352, and make the nitrogen more evenly distributed before entering the heat exchanger 4, thereby improving the subsequent heat exchange efficiency.

[0055] The above design allows the reasonable rotation of the baffle to avoid unnecessary disturbances when nitrogen of different pressures passes through the delivery cylinder 35, so that the nitrogen can smoothly enter the heat exchanger 4 for heat exchange, further ensuring the stability of the system operation. This fine control in the nitrogen delivery process is often overlooked in traditional constant temperature adjustment methods and is an important advantage of this solution.

[0056] In some embodiments of the present invention, Figure 8 , Fig. 9 As shown, the cross-sectional outer contour of the heat exchanger 4 is rectangular, which cleverly adapts to the spatial layout inside the cabinet 1, improves the space utilization, and ensures good thermal contact between the heat exchanger 4 and the environment of the cabinet 1. A circular conveying cavity 41 is formed inside the heat exchanger 4, and the heat exchanger 4 is installed close to the inner wall of the cabinet 1 from the input end to the output end, which greatly increases the heat exchange area and the heat exchange path length.

[0057] In some embodiments of the present invention, Figure 8 , Fig. 9 As shown, an electric heating wire 8 is embedded in the outer surface of the heat exchanger 4, and the length of the electric heating wire 8 matches the length of the heat exchanger 4, which can provide additional heat when needed. The setting of the electric heating wire 8 provides an additional heating means, which can assist the high-pressure nitrogen to release heat in a low-temperature environment or when rapid heating is required, enhance the heating effect, and further improve the response capability and control accuracy of the constant temperature module to different temperature requirements.

[0058] In some embodiments of the present invention, Fig. 9 As shown, the inner wall of the delivery chamber 41 is obliquely installed with a plurality of fins 42, which are arranged at equal angles between the plurality of fins 42, and the fins 42 are in an arc-shaped structure. The inclination direction of the fins 42 forms an angle with the axial direction of the delivery chamber 41, and the inclination direction of all the fins 42 is consistent. The arc-shaped fins 42 promote the nitrogen to form a spiral flow, increase the contact frequency and contact area between the nitrogen and the wall of the heat exchanger 4, and both the high-pressure nitrogen release and the low-pressure nitrogen endothermic process can more efficiently transfer heat, improve the heat exchange efficiency, and speed up the temperature adjustment speed.

[0059] In some embodiments of the present invention, Figure 3 , Figure 7As shown, the cabinet 1 is provided with exhaust holes 12 and a mesh cover 13 on its surface, a fan 7 is provided inside the cabinet 1 at a position corresponding to the mesh cover 13, a fixing plate 71 is installed on the back of the fan 7, a plurality of strip-shaped through slots 72 are provided at intervals on the fixing plate 71, a rotating plate 73 is rotatably connected in the strip-shaped through slots 72, a gear 74 is connected to one end of the rotating plate 73, a plurality of gears 74 are connected to each other through a transmission belt 75, and at least one gear 74 is connected to a driver. After the driver is pneumatically activated, the transmission belt 75 drives the plurality of gears 74 to rotate together, thereby realizing that the rotating plate 73 flips at a certain angle, and the opening and closing of the strip-shaped through slots 72 are selectively controlled according to different strategies for heating or cooling the cabinet 1.

[0060] During the temperature adjustment process, the operation of the fan 7 can accelerate the air convection inside the cabinet 1, so that the air after heat exchange can be distributed to all parts of the cabinet 1 more quickly, avoiding local over-high or over-low temperatures, and improving the uniformity of the temperature inside the cabinet 1. For example, during the heating process, the angle of the rotating plate 73 can be appropriately adjusted to allow the hot air to circulate better inside the cabinet 1 and improve the heating efficiency; during the cooling process, the ventilation direction is optimized to accelerate the mixing of low-temperature nitrogen and hot air inside the cabinet 1, thereby speeding up the heat dissipation. In addition, good ventilation can also help to discharge moisture or other impurities that may be generated inside the cabinet 1, keep the internal environment of the cabinet 1 dry and clean, and help to extend the service life of the equipment and improve the overall stability and reliability of the system.

[0061] Corresponding to the constant temperature module of the above embodiment, the present invention also proposes a constant temperature adjustment method for a multi-gas control cabinet, comprising the following steps:

[0062] The temperature sensor 5 monitors the internal temperature of the cabinet 1 in real time and transmits a signal to the processor 91. When the internal temperature of the cabinet 1 changes, the processor 91 determines whether to start the temperature adjustment mechanism according to the preset temperature range;

[0063] When the temperature inside the cabinet 1 is lower than the preset lower temperature limit and needs to be heated, the processor 91 controls the electromagnetic valve 2 34 to open, and the high-pressure nitrogen in the high-pressure nitrogen tank 31 enters the pressure regulating valve 32 through the pipeline. The pressure regulating valve 32 adjusts the high-pressure nitrogen to a suitable pressure according to the instruction of the processor 91, and then sends it to the heat exchanger 4 through the conveying cylinder 35; in the conveying cylinder 35, the axis of the through hole 1 3511 in the middle of the baffle 1 351 is the same as the axis of the conveying cylinder 35, and the high-pressure nitrogen enters the heat exchanger 4 through the through hole 1 3511, and the baffle 2 352 is rotated 90 degrees to avoid disturbing the flow of the high-pressure nitrogen; enters the heat exchanger 4 The high-pressure nitrogen flows in the winding delivery cavity 41. Due to the high pressure and large internal energy of the high-pressure nitrogen, the high-pressure nitrogen will release heat to the surrounding environment during the process. The heat is transferred from the high-pressure nitrogen to the cabinet 1 environment with a lower temperature, so that the temperature inside the cabinet 1 increases; at the same time, since the high-pressure nitrogen flows along the inclined direction of the fins 42, the equal-angle intervals and consistent inclined directions of adjacent fins 42 make the high-pressure nitrogen gradually form a spiral flow; this spiral flow increases the residence time of the nitrogen in the heat exchanger 4 and the contact area with the wall of the heat exchanger 4, and also enhances the mixing inside the nitrogen, which is conducive to the full exchange of heat. At this time, the electric heating wire 8 can be started as needed (for example, when rapid heating is required or the heat release of high-pressure nitrogen is insufficient to meet the heating requirement). The heat generated by the electric heating wire 8 is transferred to the wall of the heat exchanger 4, and then to the spirally flowing nitrogen, so that its temperature is further increased. The heated nitrogen releases heat in the heat exchanger 4, heats the internal space of the cabinet 1, and accelerates the temperature increase. The nitrogen flowing out of the output end of the heat exchanger 4 is depressurized by the throttle valve 36, a part of it flows back to the low-pressure nitrogen tank 3, and the other part enters the booster pump 37 for boosting and then returns to the high-pressure nitrogen tank 31, thereby realizing the recycling and pressure regulation of nitrogen.

[0064] When the temperature inside the cabinet 1 is higher than the preset upper temperature limit and needs to be cooled, the processor 91 controls the solenoid valve 1 33 to open, and the low-pressure nitrogen in the low-pressure nitrogen tank 3 enters the pressure regulating valve 32, and enters the delivery cylinder 35 after the pressure is adjusted. In the delivery cylinder 35, the baffle 1 351 rotates 90° to avoid disturbing the flow of the low-pressure nitrogen. The through hole 2 3521 on the surface of the baffle 2 352 is opposite to the flow direction of the low-pressure nitrogen in the delivery cylinder 35, and the low-pressure nitrogen enters the heat exchanger 4 through the through hole 2 3521; in the heat exchanger 4, due to the high temperature environment in the heat exchanger 4 and the cabinet 1, the low-pressure nitrogen enters the heat exchanger 4. Temperature difference. According to the heat transfer principle, heat is transferred from the high-temperature cabinet 1 environment to the low-temperature nitrogen. The nitrogen temperature rises and takes away the heat. The nitrogen after absorbing the heat flows out from the heat exchanger 4 and passes through the throttle valve 36. The throttle valve 36 further reduces the nitrogen pressure and expands the volume. According to the Joule-Thomson effect, the nitrogen consumes its own internal energy during the expansion process, thereby further reducing the temperature. Part of the cooled nitrogen flows back to the low-pressure nitrogen tank 3, and the other part can be sucked by the booster pump 37 as needed, and stored in the high-pressure nitrogen tank 31 after boosting to maintain nitrogen circulation and pressure balance.

[0065] It should be noted that the fan 7 plays a role in assisting air circulation inside the cabinet. During the heating process, the hot air after the heat exchanger 4 releases heat can be more effectively circulated to various parts of the cabinet 1; during the cooling process, the heat exchange between the low-temperature nitrogen and the air inside the cabinet 1 can be accelerated to improve the cooling efficiency. At the same time, the exhaust holes 12 and the mesh cover 13 on the surface of the cabinet 1 provide an outlet for air circulation to ensure the normal circulation of air.

[0066] The constant temperature adjustment method in the present invention is based on the real-time monitored temperature data, and the processor 91 executes a preset algorithm to judge the temperature change trend and select a suitable adjustment method. This intelligent adjustment strategy can quickly respond to the fluctuation of the internal temperature of the cabinet 1, timely adjust the supply of high-pressure nitrogen or low-pressure nitrogen and the working state of the electric heating wire 8, and ensure that the temperature is always stable within the preset range. In addition, during the heating process, the constant temperature adjustment method makes full use of the high pressure and high internal energy characteristics of high-pressure nitrogen, so that it naturally releases heat in the heat exchanger 4, and at the same time, combined with the auxiliary heating of the electric heating wire 8 (started as needed), the temperature of the cabinet 1 can be quickly increased. In the cooling process, low-pressure nitrogen is used to absorb heat, and the temperature is further reduced by the throttle valve 36 pressure reduction expansion. This comprehensive adjustment method based on different principles and working conditions is more efficient and energy-saving than a single heating or cooling adjustment method.

[0067] The nitrogen recycling mechanism in this method ensures a stable nitrogen supply during long-term operation of the system, and maintains the pressure balance of nitrogen in the system through pressure regulation. Whether it is the heating or cooling process, nitrogen circulates in an orderly manner between various components, avoiding temperature fluctuations or equipment failures caused by unstable nitrogen pressure or flow, and improving the operating stability and reliability of the entire constant temperature system.

[0068] Corresponding to the above embodiment, the present invention further provides an electronic device.

[0069] like Fig.10 The figure shows a schematic diagram of the structure of an electronic device in the present invention, where the electronic device 9 includes: a processor 91 and a memory 93. The processor 91 and the memory 93 are connected, such as through a bus 92. Optionally, the electronic device 9 may further include a transceiver 94. It should be noted that in actual applications, the transceiver 94 is not limited to one, and the structure of the electronic device 9 does not constitute a limitation on the embodiments of the present invention.

[0070] The processor 91 may be a CPU (Central Processing Unit), a general-purpose processor, a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array) or other programmable logic devices, transistor logic devices, hardware components or any combination thereof. It may implement or execute various exemplary logic blocks, modules and circuits described in conjunction with the disclosure of the present invention. The processor 91 may also be a combination that implements computing functions, such as a combination of one or more microprocessors, a combination of a DSP and a microprocessor, etc.

[0071] The bus 92 may include a path for transmitting information between the above components. The bus 92 may be a PCI (Peripheral Component Interconnect) bus or an EISA (Extended Industry Standard Architecture) bus. The bus 92 may be divided into an address bus, a data bus, a control bus, etc. For ease of representation, Fig.10 Only one thick line is used in the diagram, but this does not mean that there is only one bus or only one type of bus.

[0072] The memory 93 is used to store a computer program corresponding to the heat energy recovery and reuse method of the above embodiment of the present invention, and the computer program is controlled and executed by the processor 91. The processor 91 is used to execute the computer program stored in the memory 93 to implement the contents shown in the above method embodiment.

[0073] The electronic device 9 includes, but is not limited to, mobile terminals such as laptop computers, PADs (tablet computers), and fixed terminals such as desktop computers. Fig.10 The electronic device 9 shown is only an example and should not bring any limitation to the functions and scope of use of the embodiments of the present invention.

[0074] The electronic device 9 of the embodiment of the present invention stores the thermostatic adjustment method in the memory 93 through a software program, and is executed by the processor 91, thereby realizing highly integrated and automated control of the thermostatic module. The electronic device 9 can serve as the control core of the entire thermostatic system, uniformly managing hardware components such as the temperature sensor 5, the solenoid valve, and the pressure regulating valve 32, so that the operation of the entire system is more coordinated and efficient. Compared with the traditional decentralized control or manual control method, this integrated control reduces the complexity and failure rate of hardware connection, and improves the reliability and maintainability of the system. In addition, the electronic device 9 can process a large amount of temperature data and system operation status information in real time, analyze and make decisions through preset logic and algorithms, and realize intelligent management of the thermostatic module. For example, the temperature change trend is predicted according to historical temperature data, and the nitrogen supply and heating or cooling strategy are adjusted in advance, which further improves the accuracy of temperature control and energy utilization efficiency. This level of intelligence is difficult to achieve in traditional thermostatic control systems, and brings higher performance and convenience to the thermostatic control of multi-gas control cabinets.

[0075] It should be noted that the logic and / or steps represented in the flowchart or otherwise described herein, for example, can be considered as a sequenced list of executable instructions for implementing logical functions, and can be specifically implemented in any computer-readable medium for use by an instruction execution system, device or apparatus (such as a computer-based system, a system including a processor, or other system that can fetch instructions from an instruction execution system, device or apparatus and execute instructions), or in combination with these instruction execution systems, devices or apparatuses. For the purposes of this specification, "computer-readable medium" can be any device that can contain, store, communicate, propagate or transmit a program for use by an instruction execution system, device or apparatus, or in combination with these instruction execution systems, devices or apparatuses. More specific examples (non-exhaustive list) of computer-readable media include the following: an electrical connection portion with one or more wirings (electronic device), a portable computer disk box (magnetic device), a random access memory (RAM), a read-only memory (ROM), an erasable and programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disk read-only memory (CDROM). In addition, the computer-readable medium may even be paper or other suitable medium on which the program is printed, since the program may be obtained electronically, for example, by optically scanning the paper or other medium and then editing, interpreting or otherwise processing in a suitable manner if necessary, and then stored in a computer memory.

[0076] It should be understood that the various parts of the present invention can be implemented by hardware, software, firmware or a combination thereof. In the above-mentioned embodiments, multiple steps or methods can be implemented by software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if implemented by hardware, as in another embodiment, it can be implemented by any one of the following technologies known in the art or their combination: a discrete logic circuit having a logic gate circuit for implementing a logic function for a data signal, a dedicated integrated circuit having a suitable combination of logic gate circuits, a programmable gate array (PGA), a field programmable gate array (FPGA), etc.

[0077] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0078] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0079] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A constant temperature adjustment method for a multi-gas control cabinet, applied to a constant temperature module, characterized in that: The constant temperature module is used to keep the interior of the multi-gas control cabinet at a constant temperature. The constant temperature module includes a low-pressure nitrogen tank, a high-pressure nitrogen tank, a pressure regulating valve, a heat exchanger, a throttle valve, a booster pump, a temperature sensor, and a gas leakage detection sensor; The low-pressure nitrogen tank and the high-pressure nitrogen tank are respectively connected to two input ends of the pressure regulating valve through pipelines, and the two input ends are respectively connected to a solenoid valve 1 and a solenoid valve 2; The output end of the pressure regulating valve is connected to the input end of the heat exchanger, the heat exchanger is distributed in a zigzag shape inside the cabinet, the output end of the heat exchanger is connected to the input end of the throttle valve, the throttle valve includes at least two output ends, wherein one output end of the throttle valve is connected to the low-pressure nitrogen tank through a pipeline, and the other output end of the throttle valve is connected to the input end of the booster pump, and the output end of the booster pump is connected to the high-pressure nitrogen tank through a pipeline; The constant temperature regulation method comprises the following steps: The temperature sensor monitors the internal temperature of the cabinet in real time and transmits the signal to the processor. When the internal temperature of the cabinet changes, the processor determines whether the temperature adjustment mechanism needs to be activated based on the preset temperature range; When the temperature inside the cabinet is lower than the preset lower temperature limit and needs to be heated, the processor controls the solenoid valve 2 to open, and the high-pressure nitrogen in the high-pressure nitrogen tank enters the pressure regulating valve through the pipeline. The pressure regulating valve adjusts the high-pressure nitrogen to a suitable pressure according to the instructions of the processor, and then sends it to the heat exchanger through the conveying cylinder; in the conveying cylinder, the axis of the through hole 1 in the middle of the baffle 1 is the same as the axis of the conveying cylinder, and the high-pressure nitrogen enters the heat exchanger through the through hole 1, and the baffle 2 is rotated 90° to avoid disturbing the flow of the high-pressure nitrogen; the high-pressure nitrogen entering the heat exchanger flows in the winding conveying cavity. Due to the high pressure and large internal energy of the high-pressure nitrogen, During the process, high-pressure nitrogen will release heat to the surrounding environment, and the heat is transferred from the high-pressure nitrogen to the cabinet environment with lower temperature, so that the temperature inside the cabinet increases; at this time, the electric heating wire can be started as needed, and the heat generated by the electric heating wire is transferred to the wall of the heat exchanger, and then to the nitrogen flowing in the spiral, so that its temperature is further increased. The heated nitrogen releases heat in the heat exchanger, heats the internal space of the cabinet, and accelerates the temperature increase; the nitrogen flowing out of the output end of the heat exchanger is reduced in pressure by the throttle valve, and a part of it flows back to the low-pressure nitrogen tank, and the other part enters the booster pump for pressurization and then returns to the high-pressure nitrogen tank, so as to realize the recycling and pressure regulation of nitrogen; When the temperature inside the cabinet is higher than the preset upper temperature limit and needs to be cooled, the processor controls the solenoid valve 1 to open, and the low-pressure nitrogen in the low-pressure nitrogen tank enters the pressure regulating valve, and enters the delivery cylinder after the pressure is adjusted. In the delivery cylinder, the baffle plate 1 rotates 90 degrees to avoid disturbing the flow of the low-pressure nitrogen. The through hole 2 on the surface of the baffle plate 2 is opposite to the flow direction of the low-pressure nitrogen in the delivery cylinder, and the low-pressure nitrogen enters the heat exchanger through the through hole 2; in the heat exchanger, due to the temperature difference between the heat exchanger and the high-temperature environment in the cabinet, according to the principle of heat transfer, the low-pressure nitrogen enters the heat exchanger through the through hole 2. In principle, heat is transferred from the high-temperature cabinet environment to the low-temperature nitrogen, the nitrogen temperature rises and takes away the heat; the nitrogen after absorbing the heat flows out of the heat exchanger and passes through the throttle valve, which further reduces the nitrogen pressure and expands the volume. According to the Joule-Thomson effect, the nitrogen will consume its own internal energy during the expansion process, thereby further reducing the temperature. Part of the cooled nitrogen flows back to the low-pressure nitrogen tank, and the other part can be sucked into the booster pump as needed, and stored in the high-pressure nitrogen tank after boosting to maintain nitrogen circulation and pressure balance.

2. A constant temperature adjustment method for a multi-gas control cabinet according to claim 1, characterized in that: A plurality of gas delivery pipes are provided inside the cabinet, and the gas delivery pipes are connected to flow meters. When the gas delivery pipes deliver nitrogen, the gas delivery pipes are connected to the low-pressure nitrogen tank through pipelines or to the high-pressure nitrogen tank through the booster pump according to the pressure of the delivered nitrogen.

3. A constant temperature adjustment method for a multi-gas control cabinet according to claim 1, characterized in that: A delivery cylinder is connected between the output end of the pressure regulating valve and the input end of the heat exchanger, a cavity is formed inside the delivery cylinder, and a baffle plate 1 and a baffle plate 2 are arranged in the cavity of the delivery cylinder along the axial direction thereof at intervals; The diameters of baffle plate 1 and baffle plate 2 match the inner diameter of the conveying cylinder cavity. Baffle plate 1 and baffle plate 2 are rotatably connected to the inner wall of the conveying cylinder cavity through rotating shafts on both sides of the baffle plate, and at least one side of the rotating shaft is connected to a driving motor.

4. A constant temperature adjustment method for a multi-gas control cabinet according to claim 3, characterized in that: A through hole 1 is formed in the middle of the baffle plate 1 corresponding to the axial center position of the conveying cylinder, and a plurality of through holes 2 are formed through the surface of the baffle plate 2, and the aperture of the through hole 1 is larger than that of the through hole 2.

5. A constant temperature adjustment method for a multi-gas control cabinet according to claim 1, characterized in that: The cross-sectional outer contour of the heat exchanger is rectangular, a circular conveying cavity is formed inside the heat exchanger, and the heat exchanger is installed closely against the inner wall of the cabinet between the input end and the output end.

6. A constant temperature adjustment method for a multi-gas control cabinet according to claim 5, characterized in that: An electric heating wire is embedded in the outer surface of the heat exchanger, and the length of the electric heating wire matches the length of the heat exchanger.

7. A constant temperature adjustment method for a multi-gas control cabinet according to claim 5, characterized in that: The inner wall of the conveying cavity is obliquely mounted with a plurality of fins, the plurality of fins are arranged at equal angles, the fins are in an arc-shaped structure, the inclination direction of the fins forms an angle with the axial direction of the conveying cavity, and the inclination direction of all the fins remains consistent.

8. A constant temperature adjustment method for a multi-gas control cabinet according to claim 1, characterized in that: The cabinet surface is provided with exhaust holes and a mesh cover, a fan is arranged inside the cabinet corresponding to the mesh cover, a fixing plate is installed on the back of the fan, a plurality of strip-shaped through grooves are spaced apart on the fixing plate, a rotating plate is rotatably connected in the strip-shaped through grooves, one end of the rotating plate is connected to a gear, the plurality of gears are connected to each other through a transmission belt, and at least one gear is connected to a driver.

9. An electronic device, characterized in that: The invention comprises a memory, a processor and a computer program stored in the memory, and when the computer program is executed by the processor, the constant temperature adjustment method as claimed in claim 1 is implemented.

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