Silicon wafer flower basket with anti-slip structure

Abstract

The present invention discloses a silicon wafer flower basket with an anti-slip structure, which relates to the technical field of silicon wafer flower baskets, including two flower basket end plates, any one of which is fixedly provided with a control device, a plurality of evenly distributed adjustment slots are provided on the flower basket end plates, a plurality of transmission slots are provided on the flower basket end plates, two drive slots are provided on the flower basket end plates, two anti-slip slots are provided on the flower basket end plates, and a plurality of groups of bearing parts are provided between the two flower basket end plates, two groups of driving mechanisms are provided on the two flower basket end plates, two groups of anti-slip parts are symmetrically provided between the two flower basket end plates, and two groups of power parts are provided on the two flower basket end plates respectively. The device is provided with an anti-slip part, so that the device can limit and fix the silicon wafer on the flower basket support rod, thereby preventing the silicon wafer from slipping off the flower basket support rod during transportation or other unexpected situations, and to a certain extent, ensuring the safety of the silicon wafer stored in the device.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer flower baskets, and in particular to a silicon wafer flower basket with an anti-slip structure. Background Art

[0002] In the semiconductor industry, silicon wafers are the basic materials for integrated circuit manufacturing, and their quality and integrity are critical to the performance of the final product. In order to ensure the safety of silicon wafers during handling, transportation and storage, special baskets are usually used to carry silicon wafers.

[0003] However, traditional flower basket designs often have shortcomings, especially in preventing silicon wafers from slipping. Since silicon wafers are very fragile and expensive, any slight collision or drop may cause irreparable damage, resulting in huge economic losses, so improvements are urgently needed. Summary of the invention

[0004] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a silicon wafer flower basket with an anti-slip structure, aiming to solve the above technical problems.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A silicon wafer flower basket with an anti-slip structure comprises two flower basket end plates, any one of the flower basket end plates is fixedly provided with a control device, the flower basket end plates are provided with a plurality of evenly distributed adjustment slots, the flower basket end plates are provided with a plurality of transmission slots corresponding to the adjustment slots one by one, the flower basket end plates are provided with two symmetrically arranged drive slots, the flower basket end plates are provided with two symmetrically arranged anti-slip slots, and the silicon wafer flower basket with an anti-slip structure further comprises:

[0007] The bearing parts have a plurality of groups, and the plurality of groups of bearing parts are evenly arranged between the two basket end plates, the bearing parts are used to bear and place silicon wafers, and the number of the groups of bearing parts is consistent with the number of the adjustment slots;

[0008] The driving mechanism has two groups, and the two groups of driving mechanisms are respectively arranged on the two flower basket end plates, the driving mechanism is electrically connected to the control device, and the driving mechanism is used to drive multiple groups of bearing parts to slide synchronously in the adjustment groove to adapt to silicon wafers of different sizes;

[0009] The anti-slip part has two groups, and the two groups of anti-slip parts are symmetrically arranged between the two flower basket end plates, and the anti-slip parts are used to prevent the silicon wafer from sliding off the bearing part;

[0010] The power part has two groups, and the two groups of power parts are respectively arranged on the two flower basket end plates. The power part is electrically connected to the control device, and the power part is used to drive the two groups of anti-slip parts to slide in the anti-slip groove.

[0011] Preferably, the bearing portion comprises:

[0012] An adjusting block, slidably disposed in the adjusting slot;

[0013] The flower basket support rod is arranged between two flower basket end plates, and the two ends of the flower basket support rod are respectively fixedly connected to adjacent adjustment blocks. The flower basket support rod is provided with a plurality of silicon wafer grooves for carrying silicon wafers, and the plurality of silicon wafer grooves are provided with a consistent spacing.

[0014] Preferably, the driving mechanism comprises:

[0015] An intermediate plate, arranged on the flower basket end plate and fixedly connected to the flower basket end plate;

[0016] There are four pillars, and the four pillars are symmetrically arranged in pairs on the surface of the flower basket end plate away from the flower basket support rod, and the pillars are fixedly connected to the flower basket end plate;

[0017] A support plate, fixedly arranged at one end of the support column away from the end plate of the flower basket;

[0018] A driving unit, disposed on the support plate and electrically connected to the control device;

[0019] The adjusting parts have multiple groups, and the multiple groups of adjusting parts are evenly distributed on the flower basket end plate, and the adjusting parts are used to drive the adjusting block to slide in the adjusting groove.

[0020] Preferably, the driving unit comprises:

[0021] A driving motor is disposed on the support plate and is detachably fixedly connected to the support plate, and the driving motor is electrically connected to the control device;

[0022] A driving shaft is rotatably disposed on the support plate, and one end of the driving shaft close to the driving motor is fixedly connected to the output end of the driving motor;

[0023] A driving disc, fixedly arranged at an end of the driving shaft away from the driving motor;

[0024] The gear ring is sleeved on the driving disc and fixedly connected to the driving disc.

[0025] Preferably, the adjustment unit comprises:

[0026] A connecting shaft is rotatably disposed on the flower basket end plate;

[0027] An adjusting gear is located in the adjusting groove, and a surface of the adjusting gear close to the connecting shaft is fixedly connected to the connecting shaft, and the adjusting gear is meshed with the gear ring;

[0028] A protective cover is arranged on surfaces of the two flower basket end plates that are away from each other and is fixedly connected to the flower basket end plates;

[0029] An adjusting screw is located in the adjusting groove and is rotatably connected to the flower basket end plate. One end of the adjusting screw close to the connecting shaft is fixedly connected to the connecting shaft. The adjusting screw is threadedly connected to the adjusting block.

[0030] Preferably, the anti-slip portion comprises:

[0031] A first sliding block is slidably disposed in the anti-slip groove;

[0032] A fixing rod is located in the anti-slip groove and fixedly connected to the flower basket end plate, and the fixing rod is slidably connected to the first sliding block;

[0033] The anti-skid piece is located between the two flower basket end plates and is used to prevent the silicon wafer from sliding off the silicon wafer groove.

[0034] Preferably, the anti-slip member comprises:

[0035] An anti-slip rod is located between the two flower basket end plates, and both ends of the anti-slip rod are fixedly connected to adjacent first sliding blocks;

[0036] An anti-slip cylinder, disposed on the anti-slip rod and rotatably connected to the anti-slip rod;

[0037] The anti-slip block is arranged on the anti-slip tube and is fixedly connected to the anti-slip tube. The surface of the anti-slip block away from the anti-slip rod is arranged as an inclined surface.

[0038] Preferably, the power unit comprises:

[0039] There are two groups of linkage members, and the two groups of linkage members are symmetrically arranged in the driving groove on the flower basket end plate, and the linkage members are used to drive the first sliding block to slide in the anti-slip groove;

[0040] A power piece is arranged on the flower basket end plate, and the power piece is electrically connected to the control device.

[0041] Preferably, the linkage comprises:

[0042] A through groove is provided in the driving groove, and the through groove is used to connect the driving groove and the anti-skid groove;

[0043] A second sliding block is slidably disposed in the driving groove;

[0044] The linkage block is slidably arranged in the through slot, and two ends of the linkage block are respectively fixedly connected to the first sliding block and the second sliding block.

[0045] Preferably, the power member comprises:

[0046] A power motor is arranged on the flower basket end plate and is detachably fixedly connected to the flower basket end plate, and the power motor is electrically connected to the control device;

[0047] A double-headed screw is rotatably arranged on the flower basket end plate, and one end of the double-headed screw close to the power motor is fixedly connected to the output end of the power motor. The double-headed screw is threadedly connected to the second slider, and the threads on both sides of the double-headed screw have opposite rotation directions.

[0048] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0049] 1. The device is provided with an anti-slip part, so that the device can limit and fix the silicon wafers on the flower basket support rods, thereby preventing the silicon wafers from sliding off the flower basket support rods during transportation or other unexpected situations, and to a certain extent ensuring the safety of the silicon wafers stored in the device.

[0050] 2. The device is provided with a power unit, so that the device can adjust the distance between the two sets of anti-slip parts, and then the anti-slip parts in the device can limit and fix silicon wafers of different sizes stored in the device, thereby improving the application range of the device to a certain extent.

[0051] 3. The device is provided with a driving mechanism, so that the device can adjust the position of the flower basket support rod on the flower basket end plate, so that the device can be suitable for the placement and storage of silicon wafers of different sizes, thereby greatly improving the application scope of the device for storing silicon wafers and improving the practicability of the device to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0053] Figure 1 A schematic diagram of the three-dimensional structure of a silicon wafer flower basket with an anti-slip structure is shown.

[0054] Figure 2 A front view of a silicon wafer flower basket with an anti-slip structure is shown.

[0055] Figure 3 Shows Figure 2 Sectional view of AA.

[0056] Figure 4 A side view of a silicon wafer flower basket with an anti-slip structure is shown.

[0057] Figure 5 Shows Figure 4 Cross-sectional view of BB.

[0058] Figure 6 A top view of a silicon wafer flower basket with an anti-slip structure is shown.

[0059] Figure 7 A partial structural schematic diagram of a silicon wafer flower basket with an anti-slip structure is shown.

[0060] Figure 8 The schematic diagram of the structure of the anti-slip part and the power part is shown.

[0061] Legend:

[0062] 1. Flower basket end plate; 2. Control device; 3. Adjustment slot; 4. Transmission slot; 5. Drive slot; 6. Anti-skid slot; 7. Adjustment block; 8. Flower basket support rod; 9. Silicon wafer slot; 10. Intermediate plate; 11. Pillar; 12. Support plate; 13. Drive motor; 14. Drive shaft; 15. Drive disc; 16. Gear ring; 17. Connecting shaft; 18. Adjustment gear; 19. Protective cover; 20. Adjustment screw; 21. First slider; 22. Fixed rod; 23. Anti-skid rod; 24. Anti-skid cylinder; 25. Anti-sliding block; 26. Through slot; 27. Second slider; 28. Linkage block; 29. ​​Power motor; 30. Double-headed screw. DETAILED DESCRIPTION

[0063] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0064] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0065] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0066] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0067] Reference Figures 1 to 8 An embodiment of a silicon wafer flower basket with an anti-slip structure of the present invention is further described.

[0068] A silicon wafer flower basket with an anti-slip structure comprises two flower basket end plates 1, a control device 2 is fixedly arranged on any one of the flower basket end plates 1, a plurality of evenly distributed adjustment grooves 3 are provided on the flower basket end plates 1, a plurality of transmission grooves 4 corresponding to the adjustment grooves 3 are provided on the flower basket end plates 1, two symmetrically arranged drive grooves 5 are provided on the flower basket end plates 1, and two symmetrically arranged anti-slip grooves 6 are provided on the flower basket end plates 1. The silicon wafer flower basket with an anti-slip structure also comprises:

[0069] The bearing part has multiple groups, and the multiple groups of bearing parts are evenly arranged between the two basket end plates 1. The bearing part is used to carry and place silicon wafers, and the number of the bearing parts is consistent with the number of the adjustment slots 3. Figures 1 to 8 , the bearing portion comprises:

[0070] An adjusting block 7 is slidably disposed in the adjusting slot 3;

[0071] The flower basket support rod 8 is arranged between the two flower basket end plates 1, and the two ends of the flower basket support rod 8 are respectively fixedly connected to the adjacent adjustment blocks 7. The flower basket support rod 8 is provided with a plurality of silicon wafer grooves 9 for carrying silicon wafers. There are a plurality of silicon wafer grooves 9, and the spacing between the plurality of silicon wafer grooves 9 is consistent.

[0072] Reference Figures 1 to 8, a driving mechanism having two groups, and the two driving mechanisms are respectively arranged on two basket end plates 1, the driving mechanism is electrically connected to the control device 2, and the driving mechanism is used to drive multiple groups of bearing parts to slide synchronously in the adjustment groove 3 to adapt to silicon wafers of different sizes, and the driving mechanism includes:

[0073] The intermediate plate 10 is arranged on the flower basket end plate 1 and is fixedly connected to the flower basket end plate 1;

[0074] There are four pillars 11, and the four pillars 11 are symmetrically arranged in pairs on the surface of the flower basket end plate 1 away from the flower basket support rod 8. The pillars 11 are fixedly connected to the flower basket end plate 1, and the pillars 11 provide a support foundation for the support plate 12;

[0075] A support plate 12 is fixedly arranged at one end of the support column 11 away from the flower basket end plate 1, and the support plate 12 is arranged to provide a support foundation for the driving motor 13;

[0076] The driving part is arranged on the support plate 12 and is electrically connected to the control device 2. The driving part includes:

[0077] A driving motor 13 is disposed on the support plate 12 and is detachably fixedly connected to the support plate 12. The driving motor 13 is electrically connected to the control device 2.

[0078] A driving shaft 14 is rotatably disposed on the support plate 12, and one end of the driving shaft 14 close to the driving motor 13 is fixedly connected to the output end of the driving motor 13;

[0079] A driving disc 15 is fixedly disposed on an end of the driving shaft 14 away from the driving motor 13;

[0080] A gear ring 16 is sleeved on the driving disc 15 and fixedly connected to the driving disc 15;

[0081] During operation, the control device 2 controls the drive motor 13 to start, so that the drive shaft 14 fixedly connected to the output end of the drive motor 13 rotates, and then the drive disk 15 fixedly connected to the drive shaft 14 rotates, so that the gear ring 16 arranged on the drive disk 15 rotates, and then the subsequent adjustment part drives the adjustment block 7 to slide in the adjustment groove 3 to provide power.

[0082] The adjusting part has multiple groups, and the multiple groups of adjusting parts are evenly distributed on the flower basket end plate 1. The adjusting part is used to drive the adjusting block 7 to slide in the adjusting groove 3. The adjusting part includes:

[0083] A connecting shaft 17 is rotatably disposed on the flower basket end plate 1;

[0084] An adjusting gear 18 is located in the adjusting groove 3, and a surface of the adjusting gear 18 close to the connecting shaft 17 is fixedly connected to the connecting shaft 17, and the adjusting gear 18 is meshed with the toothed ring 16;

[0085] The protective cover 19 is disposed on surfaces of the two flower basket end plates 1 that are away from each other, and is fixedly connected to the flower basket end plates 1. It should be noted that the protective cover 19 is provided to protect the adjusting gear.

[0086] The adjusting screw 20 is located in the adjusting groove 3 and is rotatably connected to the flower basket end plate 1. One end of the adjusting screw 20 close to the connecting shaft 17 is fixedly connected to the connecting shaft 17. The adjusting screw 20 is threadedly connected to the adjusting block 7.

[0087] Reference Figures 1 to 8 When working, the adjusting gear 18 rotates through the meshing between the toothed ring 16 and each adjusting gear 18, and then the connecting shaft 17 fixedly connected to the adjusting gear 18 rotates, driving the adjusting screw 20 fixedly connected to the connecting shaft 17 to rotate, and the adjusting blocks 7 on the basket end plate 1 slide synchronously in the adjusting groove 3 through the threaded transmission cooperation between the adjusting screw 20 and the adjusting block 7, so that the basket support rod 8 fixedly connected to the adjusting block 7 moves, until each basket support rod 8 is moved to a corresponding position to adapt to the size of the silicon wafer to be placed;

[0088] The device is provided with a driving mechanism, so that the device can adjust the position of the flower basket support rod 8 on the flower basket end plate 1, so that the device can be suitable for the placement and storage of silicon wafers of different sizes, thereby greatly improving the application scope of the device for storing silicon wafers and improving the practicability of the device to a certain extent.

[0089] Reference Figures 1 to 8 The power unit has two groups, and the two groups of power units are respectively arranged on the two flower basket end plates 1. The power unit is electrically connected to the control device 2. The power unit is used to drive the two groups of anti-slip parts to slide in the anti-slip groove 6. The power unit includes:

[0090] The linkage has two groups, and the two groups of linkage are symmetrically arranged in the driving groove 5 on the flower basket end plate 1, and the linkage is used to drive the first slider 21 to slide in the anti-slip groove 6, and the linkage includes:

[0091] A through groove 26 is provided in the driving groove 5, and the through groove 26 is used to connect the driving groove 5 and the anti-skid groove 6;

[0092] A second sliding block 27 is slidably disposed in the driving slot 5;

[0093] The linkage block 28 is slidably disposed in the through slot 26, and the two ends of the linkage block 28 are fixedly connected to the first slider 21 and the second slider 27 respectively;

[0094] A power member is arranged on the flower basket end plate 1, the power member is electrically connected to the control device 2, and the power member includes:

[0095] A power motor 29 is disposed on the flower basket end plate 1 and is detachably fixedly connected to the flower basket end plate 1. The power motor 29 is electrically connected to the control device 2.

[0096] The double-headed screw 30 is rotatably arranged on the flower basket end plate 1, and one end of the double-headed screw 30 close to the power motor 29 is fixedly connected to the output end of the power motor 29, and the double-headed screw 30 is threadedly connected to the second slider 27, and the threads on both sides of the double-headed screw 30 have opposite rotation directions.

[0097] The device is provided with a power unit, so that the device can adjust the distance between the two sets of anti-slip parts, and then the anti-slip parts in the device can limit and fix silicon wafers of different sizes stored in the device, thereby improving the application range of the device to a certain extent.

[0098] Reference Figures 1 to 8 The anti-slip part has two groups, and the two groups of anti-slip parts are symmetrically arranged between the two flower basket end plates 1. The anti-slip part is used to prevent the silicon wafer from sliding off the bearing part. The anti-slip part includes:

[0099] A first sliding block 21 is slidably disposed in the anti-slip groove 6;

[0100] A fixing rod 22 is located in the anti-slip groove 6 and is fixedly connected to the flower basket end plate 1. The fixing rod 22 is slidably connected to the first sliding block 21;

[0101] The anti-slip member is located between the two flower basket end plates 1, and is used to prevent the silicon wafer from sliding off the silicon wafer slot 9. The anti-slip member includes:

[0102] The anti-slip rod 23 is located between the two flower basket end plates 1, and both ends of the anti-slip rod 23 are fixedly connected to the adjacent first sliding blocks 21;

[0103] An anti-slip cylinder 24 is disposed on the anti-slip rod 23 and is rotatably connected to the anti-slip rod 23;

[0104] The anti-slip block 25 is disposed on the anti-slip tube 24 and fixedly connected to the anti-slip tube 24 . The surface of the anti-slip block 25 away from the anti-slip rod 23 is configured as an inclined surface.

[0105] Reference Figures 1 to 8After the spacing between the flower basket support rods 8 on the flower basket end plate 1 is adjusted, the spacing between the two anti-sliding blocks 25 is adjusted to prevent the silicon wafer from sliding off the flower basket support rods 8. The specific process is that the power motor 29 is controlled by the control device 2 to start, thereby rotating the double-headed screw 30 fixedly connected to the output end of the power motor 29, and the double-headed screw 30 and the two second sliding blocks 27 on the same flower basket end plate 1 are matched by the threaded transmission, thereby making the two second sliding blocks 27 on the same flower basket end plate 1 slide in the driving groove 5 toward the direction of the silicon wafer, so that the second sliding blocks 27 fixedly connected to the second sliding blocks 27 The linkage block 28 slides in the through groove 26 toward the silicon wafer, driving the first slider 21 fixedly connected to the linkage block 28 to slide in the anti-skid groove 6 toward the silicon wafer, causing the anti-skid rod 23 fixedly connected to the first slider 21 to slide in the direction of the silicon wafer, driving the anti-skid cylinder 24 provided on the anti-skid rod 23 to slide in the direction of the silicon wafer, thereby causing the anti-skid block 25 fixedly connected to the anti-skid cylinder 24 to slide in the direction of the silicon wafer, and thus causing the anti-skid block 25 fixedly connected to the anti-skid cylinder 24 to slide in the direction of the silicon wafer until the anti-skid block 25 is attached to the surface of the silicon wafer. At this time, the distance between the two anti-skid blocks 25 is smaller than the diameter of the silicon wafer, thereby preventing the silicon wafer from sliding off the flower basket support rod 8;

[0106] The device is provided with an anti-slip portion, so that the device can limit and fix the silicon wafers on the flower basket support rod 8, thereby preventing the silicon wafers from sliding off the flower basket support rod 8 during transportation or other unexpected situations, thereby ensuring the safety of the silicon wafers stored in the device to a certain extent.

[0107] Working principle: Refer to Figures 1 to 8 During operation, the staff adjusts the position of the flower basket support rod 8 in the adjustment groove 3 according to the size of the silicon wafer to adapt to the placement of silicon wafers of different sizes. The specific process is that the control device 2 controls the drive motor 13 to start, so that the drive shaft 14 fixedly connected to the output end of the drive motor 13 rotates, and then the drive disk 15 fixedly connected to the drive shaft 14 rotates, so that the toothed ring 16 arranged on the drive disk 15 rotates, and the toothed ring 16 and each adjusting gear 18 are meshed, so that the adjusting gear 18 rotates, and then the connecting shaft 17 fixedly connected to the adjusting gear 18 rotates, driving the adjusting screw 20 fixedly connected to the connecting shaft 17 to rotate, and through the threaded transmission cooperation between the adjusting screw 20 and the adjusting block 7, the adjusting blocks 7 on the flower basket end plate 1 slide synchronously in the adjustment groove 3, so that the flower basket support rod 8 fixedly connected to the adjusting block 7 moves, until each flower basket support rod 8 is moved to a corresponding position to adapt to the size of the silicon wafer to be placed;

[0108] After the spacing between the flower basket support rods 8 on the flower basket end plate 1 is adjusted, the spacing between the two anti-sliding blocks 25 is adjusted to prevent the silicon wafer from sliding off the flower basket support rods 8. The specific process is that the power motor 29 is controlled by the control device 2 to start, so that the double-headed screw 30 fixedly connected to the output end of the power motor 29 rotates, and the double-headed screw 30 cooperates with the thread transmission between the two second sliding blocks 27 on the same flower basket end plate 1, so that the two second sliding blocks 27 on the same flower basket end plate 1 slide in the driving groove 5 toward the direction of the silicon wafer, so that the connecting block fixedly connected to the second sliding block 27 The movable block 28 slides in the through groove 26 toward the silicon wafer, driving the first slider 21 fixedly connected to the linkage block 28 to slide in the anti-skid groove 6 toward the silicon wafer, causing the anti-skid rod 23 fixedly connected to the first slider 21 to slide in the direction of the silicon wafer, driving the anti-skid tube 24 provided on the anti-skid rod 23 to slide in the direction of the silicon wafer, thereby causing the anti-skid slider 25 fixedly connected to the anti-skid tube 24 to slide in the direction of the silicon wafer, thereby causing the anti-skid slider 25 fixedly connected to the anti-skid tube 24 to slide in the direction of the silicon wafer until the anti-skid slider 25 is attached to the surface of the silicon wafer. At this time, the distance between the two anti-skid sliders 25 is smaller than the diameter of the silicon wafer, thereby preventing the silicon wafer from slipping off the flower basket support rod 8.

[0109] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A silicon wafer basket with an anti-slip structure, comprising two basket end plates (1), wherein a control device (2) is fixedly arranged on any one of the basket end plates (1), characterized in that: The flower basket end plate (1) is provided with a plurality of evenly distributed adjustment grooves (3), the flower basket end plate (1) is provided with a plurality of transmission grooves (4) corresponding one to one with the adjustment grooves (3), the flower basket end plate (1) is provided with two symmetrically arranged drive grooves (5), the flower basket end plate (1) is provided with two symmetrically arranged anti-skid grooves (6), and the silicon wafer flower basket with an anti-skid structure further comprises: The bearing parts have a plurality of groups, and the plurality of groups of bearing parts are evenly arranged between the two flower basket end plates (1), the bearing parts are used to bear and place silicon wafers, and the number of the groups of bearing parts is consistent with the number of the adjustment slots (3); The driving mechanism comprises two groups, and the two groups of driving mechanisms are respectively arranged on two flower basket end plates (1), the driving mechanism is electrically connected to the control device (2), and the driving mechanism is used to drive multiple groups of bearing parts to slide synchronously in the adjustment groove (3) to adapt to silicon wafers of different sizes; The anti-slip parts have two groups, and the two groups of anti-slip parts are symmetrically arranged between the two flower basket end plates (1), and the anti-slip parts are used to prevent the silicon wafer from sliding off the bearing part; A power unit having two groups, and the two groups of power units are respectively arranged on two flower basket end plates (1), the power unit is electrically connected to the control device (2), and the power unit is used to drive the two groups of anti-slip parts to slide in the anti-slip groove (6); The anti-slip part comprises: A first sliding block (21) is slidably disposed in the anti-slip groove (6); A fixing rod (22) is located in the anti-slip groove (6) and is fixedly connected to the flower basket end plate (1); the fixing rod (22) is slidably connected to the first sliding block (21); An anti-slip member located between the two flower basket end plates (1); The anti-slip member comprises: An anti-slip rod (23) is located between the two flower basket end plates (1), and both ends of the anti-slip rod (23) are fixedly connected to adjacent first sliding blocks (21); An anti-slip cylinder (24) is disposed on the anti-slip rod (23) and is rotatably connected to the anti-slip rod (23); The anti-slip block (25) is arranged on the anti-slip cylinder (24) and is fixedly connected to the anti-slip cylinder (24); the surface of the anti-slip block (25) away from the anti-slip rod (23) is arranged as an inclined surface.

2. The silicon wafer flower basket with an anti-slip structure according to claim 1, characterized in that: The bearing portion comprises: An adjustment block (7) slidably disposed in the adjustment slot (3); A flower basket support rod (8) is arranged between two flower basket end plates (1), and both ends of the flower basket support rod (8) are respectively fixedly connected to adjacent adjustment blocks (7). The flower basket support rod (8) is provided with a plurality of silicon wafer grooves (9) for carrying silicon wafers, and a plurality of silicon wafer grooves (9) are provided, and the spacing between the plurality of silicon wafer grooves (9) is consistent.

3. The silicon wafer flower basket with an anti-slip structure according to claim 2, characterized in that: The driving mechanism comprises: An intermediate plate (10) is arranged on the flower basket end plate (1) and is fixedly connected to the flower basket end plate (1); There are four pillars (11), and the four pillars (11) are symmetrically arranged in pairs on the surface of the flower basket end plate (1) away from the flower basket support rod (8), and the pillars (11) are fixedly connected to the flower basket end plate (1); A support plate (12) is fixedly arranged on an end of the support column (11) away from the flower basket end plate (1); A driving unit, arranged on the support plate (12) and electrically connected to the control device (2); The adjusting parts have a plurality of groups, and the plurality of groups of adjusting parts are evenly distributed on the flower basket end plate (1), and the adjusting parts are used to drive the adjusting block (7) to slide in the adjusting groove (3).

4. The silicon wafer flower basket with an anti-slip structure according to claim 3, characterized in that: The driving unit comprises: a drive motor (13) disposed on the support plate (12) and detachably fixedly connected to the support plate (12); the drive motor (13) being electrically connected to the control device (2); A drive shaft (14) is rotatably disposed on the support plate (12), and one end of the drive shaft (14) close to the drive motor (13) is fixedly connected to an output end of the drive motor (13); A drive disk (15) fixedly disposed on an end of the drive shaft (14) away from the drive motor (13); The toothed ring (16) is sleeved on the driving disc (15) and fixedly connected to the driving disc (15).

5. The silicon wafer flower basket with an anti-slip structure according to claim 4, characterized in that: The adjustment unit comprises: A connecting shaft (17) rotatably mounted on the flower basket end plate (1); an adjusting gear (18) located in the adjusting groove (3), and a surface of the adjusting gear (18) close to the connecting shaft (17) is fixedly connected to the connecting shaft (17), and the adjusting gear (18) is meshed with the gear ring (16); A protective cover (19) is arranged on surfaces of the two flower basket end plates (1) that are away from each other and is fixedly connected to the flower basket end plates (1); An adjusting screw (20) is located in the adjusting groove (3) and is rotatably connected to the flower basket end plate (1); one end of the adjusting screw (20) close to the connecting shaft (17) is fixedly connected to the connecting shaft (17); and the adjusting screw (20) is threadedly connected to the adjusting block (7).

6. The silicon wafer flower basket with an anti-slip structure according to claim 5, characterized in that: The power unit comprises: Linking members, comprising two groups, and the two groups of linking members are symmetrically arranged in the driving groove (5) on the flower basket end plate (1), and the linking members are used to drive the first sliding block (21) to slide in the anti-slip groove (6); A power piece is arranged on the flower basket end plate (1), and the power piece is electrically connected to the control device (2).

7. The silicon wafer flower basket with an anti-slip structure according to claim 6, characterized in that: The linkage comprises: A through groove (26) is formed in the driving groove (5), and the through groove (26) is used to connect the driving groove (5) and the anti-slip groove (6); A second sliding block (27) is slidably disposed in the driving groove (5); The linkage block (28) is slidably disposed in the through slot (26), and two ends of the linkage block (28) are respectively fixedly connected to the first slider (21) and the second slider (27).

8. The silicon wafer flower basket with an anti-slip structure according to claim 7, characterized in that: The power member comprises: a power motor (29) disposed on the flower basket end plate (1) and detachably fixedly connected to the flower basket end plate (1); the power motor (29) being electrically connected to the control device (2); A double-headed screw (30) is rotatably disposed on the flower basket end plate (1), and one end of the double-headed screw (30) close to the power motor (29) is fixedly connected to the output end of the power motor (29), and the double-headed screw (30) is threadedly connected to the second slider (27), and the threads on both sides of the double-headed screw (30) have opposite rotation directions.

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