Evaporation simulation device and evaporation simulation system having the same

Abstract

The application discloses a kind of evaporation simulation device and the evaporation simulation system with it, the evaporation simulation device includes shell, holding vessel and heating piece, shell is high vacuum resistance piece, and with containing cavity, shell is equipped with suction port and first visual window, holding vessel is set in containing cavity, for holding film coating material, holding vessel is equipped with second visual window, first visual window and second visual window are correspondingly arranged, heating piece is set in containing cavity, to heat holding vessel.The evaporation simulation device is convenient for observing the physical change of film coating material in holding vessel during heating and temperature rising process, and the observation time is shorter.

Description

Technical Field

[0001] This invention relates to the field of vapor deposition simulation technology, and in particular to a vapor deposition simulation device and a vapor deposition simulation system having the same. Background Technology

[0002] During the process of moving from research and development to mass production of new device structures, some new materials may undergo deformation or experience performance degradation due to their special physical properties when vapor-deposited using containers such as crucibles.

[0003] In actual production, since most containers are made of metal, the physical changes of the new coating material during the heating process within the container are not easily observed. For example, it is impossible to observe the timing of material degradation and changes in material state that may occur, the physical state of materials whose performance may decline during long-term vapor deposition, and the material state and change process of materials that may be unevenly distributed in the crucible (uneven distribution leads to localized heating and thus affects material performance) during vapor deposition. In addition, since the capacity of containers in actual production is large, the time for parameter adjustments to take effect is long, resulting in a long parameter adjustment time. Summary of the Invention

[0004] The present invention aims to at least solve one of the technical problems existing in the prior art. To this end, the present invention proposes a vapor deposition simulation device, which facilitates the observation of the physical changes of the coating material during the heating process in the container, and the observation time is relatively short.

[0005] According to an embodiment of the first aspect of the present invention, a vapor deposition simulation apparatus includes:

[0006] The housing is a high-vacuum resistant component and has a receiving cavity. The housing is provided with an air extraction port and a first viewing window.

[0007] A container is provided in the receiving cavity for holding coating material. The container is provided with a second viewing window, and the first viewing window and the second viewing window are provided correspondingly.

[0008] A heating element is disposed in the receiving cavity to heat the container.

[0009] According to some embodiments of the present invention, the container includes:

[0010] A container for holding the main body, wherein the top of the container for holding the main body has an opening;

[0011] A cover, which is disposed over the opening;

[0012] The container body and / or the cover body are made of a light-transmitting material to form the second viewing window.

[0013] According to some embodiments of the present invention,

[0014] The top surface and / or sides of the housing are made of a light-transmitting material to form the first viewing window.

[0015] According to some embodiments of the invention, a support platform is also included, the support platform having a groove, in which at least a portion of the container is located.

[0016] According to some embodiments of the present invention, the heating element is a heating platform disposed at the bottom of the container; and / or, the heating element is a heating wire disposed on the outer surface of the container.

[0017] According to some embodiments of the present invention, the heating element is a heating platform disposed at the bottom of the support platform; and / or, the heating element is a heating wire disposed on the outer surface of the container.

[0018] According to some embodiments of the present invention, the heating platform is disposed at the bottom of the support platform, and / or the heating wire is disposed on the outer surface of the support platform to heat the support platform.

[0019] According to some embodiments of the present invention, the heating element includes multiple heating zones;

[0020] It also includes a heating control module, which is connected to multiple heating zones to control the heating parameters of different heating zones.

[0021] According to some embodiments of the present invention, a video input module is also included, wherein the video input module is disposed in the first visual window.

[0022] According to some embodiments of the present invention, a rate control module is further included, which is connected to the heating element to adjust the evaporation rate of the coating material.

[0023] According to some embodiments of the present invention, a nozzle is also included; the cover is provided with a through hole communicating with the interior of the holding body and the receiving cavity, and the nozzle is detachably connected to the through hole.

[0024] This application provides a vapor deposition simulation device, which includes a shell, a container, and a heating element. The shell is a high-vacuum resistant component and has a receiving cavity. The shell has an evacuation port and a first viewing window. The container is placed in the receiving cavity to hold the coating material and has a second viewing window. The first and second viewing windows are correspondingly arranged. The heating element is placed in the receiving cavity to heat the container. The shell with the receiving cavity houses the container and the heating element. The shell is designed to withstand high vacuum to allow the coating material to be heated in a high-vacuum environment. The evacuation port on the shell allows air to be evacuated from the receiving cavity, changing the vacuum level within the cavity. The first viewing window allows observation of the container inside the receiving cavity. The container holds the coating material, and the heating element heats the vapor deposition material. The second viewing window on the container allows observation of the physical changes in the coating material within the container. The first and second viewing windows are correspondingly set to facilitate observation of the physical changes of the coating material inside the container from outside the shell. Specifically, it allows observation of the timing of material deformation and changes in material state that may lead to degradation, the physical state of materials whose performance may decline during long-term vapor deposition, and the state and changes of materials with uneven distribution within the crucible (which leads to localized heating and thus affects material performance) during vapor deposition. Furthermore, when the vaporization rate of the coating material is observed to be too fast or too slow, the vaporization rate can be adjusted by regulating parameters such as the heating temperature. Since the capacity of the container in this simulation device is smaller than that of a container in actual production, parameter adjustment can be performed quickly, saving time.

[0025] According to a second aspect of the present invention, a vapor deposition simulation system includes the vapor deposition simulation device and a vacuum extraction device as described in the above embodiments, wherein the vacuum extraction device is connected to the vacuum extraction port.

[0026] According to the vapor deposition simulation system of the present invention, by employing the vapor deposition simulation device in the above embodiments, it is convenient to obtain the physical changes of the coating material during the heating process in the container, and the simulation efficiency is high.

[0027] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the housing of a vapor deposition simulation device according to an embodiment of this application;

[0029] Figure 2This is a front view of one embodiment of a vapor deposition simulation apparatus according to an embodiment of this application;

[0030] Figure 3 This is a top view of another embodiment of a vapor deposition simulation apparatus according to an embodiment of this application;

[0031] Figure 4 This is a schematic diagram of the structure of an embodiment of a vapor deposition simulation device according to an embodiment of the present application, showing the cooperation between the container and the heating element;

[0032] Figure 5 This is a schematic diagram of another embodiment of a vapor deposition simulation apparatus according to an embodiment of the present application, showing the combination of a container and a heating element.

[0033] Figure 6 This is a schematic diagram of another embodiment of a vapor deposition simulation apparatus according to an embodiment of the present application, showing the combination of a container and a heating element.

[0034] Figure 7 This is a schematic diagram of another embodiment of a vapor deposition simulation apparatus according to an embodiment of the present application, showing the cooperation between the container and the heating element.

[0035] Figure 8 This is a front view of another embodiment of a vapor deposition simulation apparatus according to an embodiment of this application;

[0036] Figure 9 This is a top view of the cover of a vapor deposition simulation apparatus according to an embodiment of this application;

[0037] Figure 10 This is a schematic diagram of the structure of a vapor deposition simulation system according to an embodiment of this application.

[0038] Figure label:

[0039] Evaporation simulation device 100

[0040] 10 housing, 10a receiving cavity, 11 air extraction port, 12 first viewing window, 13 support frame

[0041] Container 20, second viewing window 21, container body 22, lid 23, through hole 231

[0042] Heating element 30, heating zone 31

[0043] Support platform 40, groove 41

[0044] Heating control module 50, video input module 60, speed control module 70, nozzle 80,

[0045] 1000 vapor deposition simulation system and 200 vacuum pumps. Detailed Implementation

[0046] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0047] The following disclosure provides numerous different embodiments or examples for implementing various structures of the invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. Additionally, examples of various specific processes and materials are provided in this invention; however, those skilled in the art will recognize the applicability of other processes and / or the use of other materials.

[0048] Vacuum evaporation, or simply evaporation, refers to a process in which a coating material (or film material) is evaporated under vacuum conditions using a specific heating and evaporation method, causing the vaporized particles to condense on the substrate surface to form a film. Evaporation is an early and widely used vapor deposition technology, offering advantages such as simple film formation, high film purity and density, and unique film structure and properties.

[0049] The physical process of vapor deposition includes: the deposition material evaporates or sublimates into gaseous particles → the gaseous particles are rapidly transported from the evaporation source to the substrate surface → the gaseous particles attach to the substrate surface, nucleate, and grow into a solid thin film → the thin film atoms are reconstructed or chemically bonded.

[0050] Specifically, the substrate is placed in a vacuum chamber, and the film material is heated using methods such as resistance, electron beam, or laser, causing the film material to evaporate or sublimate, vaporizing into particles (atoms, molecules, or atomic clusters) with a certain energy (0.1–0.3 eV). These gaseous particles travel rapidly to the substrate in a near-collision-free linear motion. Upon reaching the substrate surface, some particles are reflected, while others are adsorbed onto the substrate and undergo surface diffusion. Two-dimensional collisions occur between deposited atoms, forming clusters. Some clusters may remain on the surface briefly before evaporating. These particle clusters continuously collide with diffused particles, either adsorbing or releasing single particles. This process repeats until the number of aggregated particles exceeds a certain critical value, at which point they become stable nuclei. These nuclei continue to adsorb diffused particles and gradually grow, eventually forming a continuous thin film through the contact and merging of adjacent stable nuclei.

[0051] During the transition of new device structures from R&D to mass production, some new coating materials, due to their unique physical properties, may undergo deformation or experience performance degradation when deposited using containers such as crucibles over a prolonged period. Using coating materials that have deformed or experienced performance degradation during deposition will negatively impact the overall performance of the new device.

[0052] In actual production, since most containers are made of metal, the physical changes of the new coating material during the heating process within the container are not easily observed. For example, it is impossible to observe when the material may deform and the changes in its state, the physical state of materials whose performance may decline during long-term vapor deposition, and the state and changes of materials that may be unevenly distributed in the crucible (uneven distribution leads to localized heating, which in turn affects material performance) during vapor deposition. Furthermore, because the capacity of containers in actual production is large, the time required for parameter adjustments to take effect is long, resulting in a long parameter adjustment time.

[0053] Based on this, the present invention proposes a vapor deposition simulation device 100, which can observe the physical changes of the coating material during the heating process in the container 20, while saving parameter adjustment time.

[0054] Figures 1-9 This is a schematic diagram of the vapor deposition simulation apparatus 100 according to an embodiment of the present invention. (Refer to...) Figure 1 and Figure 2 The vapor deposition simulation device 100 includes a housing 10, a container 20, and a heating element 30. The housing 10 is a high vacuum resistant component and has a receiving cavity 10a. The housing 10 is provided with an air extraction port 11 and a first viewing window 12. The container 20 is located in the receiving cavity 10a and is used to hold the coating material. The container 20 is provided with a second viewing window 21. The first viewing window 12 and the second viewing window 21 are correspondingly arranged. The heating element 30 is located in the receiving cavity 10a to heat the container 20.

[0055] Specifically, refer to Figure 1 and Figure 2 The vapor deposition simulation device 100 in this embodiment of the invention includes a housing 10. The shape of the housing 10 is not limited; for example, the shape of the housing 10 can be a cube, sphere, column, irregular shape, etc. Preferably, the housing 10 is a cube. The housing 10 has a receiving cavity 10a for accommodating the container 20 and the heating element 30, etc. The shape of the receiving cavity 10a can be the same as or different from the shape of the housing 10. For example, the shape of the receiving cavity 10a can be a cube, sphere, column, irregular shape, etc. Preferably, the receiving cavity 10a is a cube, that is, the shape of the receiving cavity 10a is the same as that of the housing 10, which can improve space utilization.

[0056] The housing 10 is a high-vacuum resistant component, suitable for heating the coated material in a vacuum environment. For example, the housing 10 can be made of metal, such as austenitic stainless steel, aluminum and aluminum alloys, aluminum bronze, beryllium, molybdenum, and tantalum; it can also be made of plastic, such as polyvinylidene fluoride, polytetrafluoroethylene (PTFE), Nalkin, polycarbonate, and polystyrene; or it can be made of glass and ceramic, such as borosilicate glass, ceramics and alumina ceramics, and Markol.

[0057] The housing 10 is provided with an air extraction port 11. By providing the air extraction port 11, the air in the receiving cavity 10a can be evacuated, changing the vacuum level within the receiving cavity 10a. It is understood that the air extraction port 11 can be located at any position on the housing 10, for example, on the top, side, or bottom surface of the housing 10. The shape of the air extraction port 11 is not limited and can be square, circular, irregular, etc. The size of the air extraction port 11 can be set according to actual needs. The number of air extraction ports 11 is not limited and can be set according to actual needs. To improve the air extraction efficiency, two or more air extraction ports 11 can be provided, for example, two, three, five, etc. To improve the sealing performance of the housing 10, one air extraction port 11 can be provided. Preferably, there is only one air extraction port 11. The air extraction port 11 is provided with a sealing element for sealing the air extraction port 11 after air extraction; the sealing element can be a rubber stopper, etc.

[0058] The housing 10 is provided with a first viewing window 12, through which the container 20 inside the receiving cavity 10a can be observed. The size of the first viewing window 12 can be set according to actual needs. For example, the first viewing window 12 can be a part of any side of the housing 10, or any side of the housing 10, or two or more sides of the housing 10, etc. Any side can be the top, bottom, or side surface of the housing 10. The shape of the first viewing window 12 is not limited; for example, the first viewing window 12 can be square, circular, irregular, etc. It is understood that the first viewing window 12 can be made of a light-transmitting material so that the container 20 inside the receiving cavity 10a can be observed through the first viewing window 12.

[0059] The vapor deposition simulation apparatus 100 also includes a container 20, which can be a crucible or the like. The container 20 is used to hold the coating material, which can be a blue light-emitting layer host material, an electron / hole transport layer material, a green light-emitting layer guest material, etc. The holding cavity of the container 20, i.e., the space used to hold the coating material, can have the same shape as or different from the shape of the coating material. Preferably, the shape of the holding cavity of the container 20 is the same as the shape of the coating material. The container 20 is disposed in the receiving cavity 10a. Specifically, the container 20 can be disposed at any position in the receiving cavity 10a; for example, the container 20 can be disposed at the bottom of the receiving cavity 10a, or it can be connected to the side wall or top of the receiving cavity 10a by other connecting parts.

[0060] The container 20 is provided with a second viewing window 21, through which the physical changes of the coating material inside the container 20 can be observed. The size of the second viewing window 21 can be set according to actual needs. For example, the second viewing window 21 can be a part of any side of the container 20, or any side of the container 20, or two or more sides of the container 20, etc. Any side can be the top, bottom, or side of the container 20. The shape of the second viewing window 21 is not limited; for example, the second viewing window 21 can be square, circular, irregular, etc. It is understood that the second viewing window 21 can be made of a light-transmitting material so as to allow observation of the physical changes of the coating material inside the container 20.

[0061] The first viewing window 12 and the second viewing window 21 are correspondingly set so that the physical changes of the coating material inside the container 20 can be observed from outside the shell 10 through the first viewing window 12 and the second viewing window 21. That is, the timing of material deformation and changes in material state that may be altered can be observed, the physical state of materials whose performance may decline during long-term vapor deposition, and the material state and change process of materials that may be unevenly distributed in the crucible (uneven distribution leads to local heating and thus affects material performance) during vapor deposition when the material is unevenly distributed in the container 20. At the same time, when the vaporization rate of the coating material is observed to be too fast or too slow, the vaporization rate of the coating material can be adjusted by adjusting parameters such as heating temperature. Since the capacity of the container 20 in this simulation device is smaller than that of the container 20 in actual production, the parameters can be adjusted in a shorter time, saving parameter adjustment time.

[0062] Specifically, the projection of the second viewing window 21 onto the housing 10 can fall within the first viewing window 12, or the projection of the second viewing window 21 onto the housing 10 can coincide with the first viewing window 12, or the projection of the second viewing window 21 onto the housing 10 can completely cover the first viewing window 12 and be larger than the area of ​​the first viewing window 12, or the projection of the second viewing window 21 onto the housing 10 can partially coincide with the first viewing window 12.

[0063] A heating element 30 is disposed in the receiving cavity 10a to heat the container 20. Specifically, the heating element 30 can be disposed at any position in the receiving cavity 10a. For example, the heating element 30 can be disposed at the bottom of the receiving cavity 10a, or it can be connected to the side wall or top of the receiving cavity 10a through other connecting parts. The heating element 30 can be in direct contact with the container 20 for heating, or it can be heated by transferring heat through other heat-conducting parts.

[0064] Therefore, referring to Figure 1 and Figure 2 According to the vapor deposition simulation apparatus 100 of the present invention, a housing 10 having a receiving cavity 10a is provided to house a container 20 and a heating element 30. The housing 10 is configured to withstand high vacuum to meet the requirements of heating the coating material in a high vacuum environment. By providing an evacuation port 11 in the housing 10, the air in the receiving cavity 10a can be evacuated through the evacuation port 11, thereby changing the vacuum level in the receiving cavity 10a. A first viewing window 12 is provided to observe the container 20 in the receiving cavity 10a. The container 20 is used to hold the coating material, and the heating element 30 is used to heat the vapor deposition material. A second viewing window 21 provided in the container 20 allows observation of the physical changes of the coating material in the container 20. The first viewing window 12 and the second viewing window 21 are correspondingly set to facilitate observation of the physical changes of the coating material inside the container 20 from outside the shell 10 through the first viewing window 12 and the second viewing window 21. That is, it is possible to observe the timing of material deformation and changes in material state that may undergo changes, the physical state of materials whose performance may decline during long-term vapor deposition, and the material state and change process of materials that may be unevenly distributed in the crucible (uneven distribution leads to local heating and thus affects material performance) during vapor deposition when the material is unevenly distributed in the container 20. At the same time, when the vaporization rate of the coating material is observed to be too fast or too slow, the vaporization rate of the coating material can be adjusted by adjusting parameters such as heating temperature. Since the capacity of the container 20 in this simulation device is smaller than that of the container 20 in actual production, the parameters can be adjusted in a shorter time, saving parameter adjustment time.

[0065] In some embodiments, the housing 10 may include a support frame 13 and a panel mounted within the support frame 13. The support frame may be made of metal, and the panel may be made of metal or glass, etc.

[0066] Understandably, to facilitate the insertion and removal of the container 20 and the coating material, the housing 10 includes at least one openable panel. This panel can be a top panel, a bottom panel, or a side panel.

[0067] In some embodiments of the present invention, reference is made to... Figure 2 and Figure 3 The container 20 includes a container body 22 and a lid 23. The top of the container body 22 has an opening, and the lid 23 covers the opening. The container body 22 and / or the lid 23 are made of a light-transmitting material to form a second viewing window 21.

[0068] In some embodiments of the present invention, the top surface and / or side surface of the housing 10 are made of a light-transmitting material to form a first viewing window 12.

[0069] Specifically, the container 22 can be made of a translucent material to form a second viewing window 21, and the cover 23 can also be made of a translucent material to form a second viewing window 21. Alternatively, the container 22 can be made of a translucent material to form a second viewing window 21, while the cover 23 can be made of an opaque material. Alternatively, the container 22 can be made of a non-translucent material, while the cover 23 can be made of a translucent material to form the second viewing window 21.

[0070] The top surface of the housing 10 can be made of a light-transmitting material to form the first viewing window 12, and the sides of the housing 10 can also be made of a light-transmitting material to form the first viewing window 12. Alternatively, the top surface of the housing 10 can be made of a light-transmitting material to form the first viewing window 12, while the sides of the housing 10 can be made of an opaque material. Or, the top surface of the housing 10 can be made of an opaque material, while the sides of the housing 10 can be made of a light-transmitting material to form the first viewing window 12.

[0071] In some embodiments, by using a light-transmitting material for the cover 23 on top of the holding body 22 to form a second viewing window 21, and using a light-transmitting material for the top surface of the housing 10 to form a first viewing window 12, the first viewing window 12 and the second viewing window 21 can be set correspondingly so that the physical changes of the coating material during the heating process can be observed through the first viewing window 12 and the second viewing window 21.

[0072] It is understandable that when the container 20 is placed in the receiving cavity 10a, the top opening of the container body 22 faces the top surface of the shell 10, that is, the container 20 is placed vertically with the top facing upward in the receiving cavity 10a.

[0073] It is understandable that the container body 22 and the cover body 23 can be separate structures, or the container body 22 and the cover body 23 can be rotatably connected, etc.

[0074] In some embodiments, by using a light-transmitting material to form a second viewing window 21 on the holding body 22, and using a light-transmitting material on the side of the housing 10 to form a first viewing window 12, the first viewing window 12 and the second viewing window 21 can be set correspondingly so that the physical changes of the coating material during the heating process can be observed through the first viewing window 12 and the second viewing window 21.

[0075] It is understandable that when the container 20 is placed in the receiving cavity 10a, the side of the container body 22 faces the side of the shell 10, that is, the container 20 is placed vertically in the receiving cavity 10a with the top facing upwards. This facilitates the placement of the container 20.

[0076] When the housing 10 is a cube, the housing 10 includes multiple sides. One side of the housing 10 may be made of a light-transmitting material, or two or more sides may be made of a light-transmitting material, so as to observe the physical changes of the coating material during the heating process from multiple angles.

[0077] In some embodiments, the container 20 is made of a light-transmitting material; the shell 10 is made of a light-transmitting material.

[0078] By using light-transmitting materials for both the container 20 and the shell 10, the physical changes of the coating material during the heating process can be observed from different angles, making observation convenient and the results highly accurate.

[0079] It is understandable that the container 20 and the shell 10 can be made of the same material; for example, both the container 20 and the shell 10 can be made of high-temperature resistant and high-vacuum resistant glass. The container 20 and the shell 10 can also be made of different materials; for example, the container 20 can be made of high-temperature resistant and high-vacuum resistant glass, and the shell 10 can be made of high-vacuum resistant glass. Preferably, both the container 20 and the shell 10 are made of high-temperature resistant and high-vacuum resistant glass, which reduces production costs.

[0080] In some embodiments of the present invention, reference is made to... Figure 5 It also includes a support platform 40, which has a groove 41 in which at least part of the container 20 is located.

[0081] By providing a support platform 40 with a groove 41, and with at least a portion of the container 20 located within the groove 41, the stability of the support platform 40 in supporting the container 20 is improved.

[0082] The container 20 may be partially located within the groove 41, for example, 1 / 3, 1 / 2, 3 / 4, or 4 / 5 of the height of the container 20 may be located within the groove 41; the container 20 may also be entirely located within the groove 41.

[0083] The bottom surface of the container 20 can match the supporting surface of the groove 41. For example, the bottom surface of the container 20 can be a flat surface, in which case the supporting surface of the groove 41 is a flat surface; the bottom surface of the container 20 can be a convex arc surface, in which case the supporting surface of the groove 41 is also a convex arc surface; the bottom surface of the container 20 can be a concave arc surface, in which case the supporting surface of the groove 41 is also a concave arc surface.

[0084] The projection of the bottom surface of the container 20 onto the supporting surface of the groove 41 can coincide with or be slightly smaller than the supporting surface of the groove 41. Preferably, the projection of the bottom surface of the container 20 onto the supporting surface of the groove 41 is slightly smaller than the supporting surface of the groove 41, which facilitates placing the container 20 into the groove 41.

[0085] The side of the container 20 may or may not match the side of the groove 41. Preferably, the side of the container 20 is flat, and the side of the groove 41 is also flat.

[0086] In some embodiments of the present invention, reference is made to... Figure 2 The heating element 30 is a heating platform, which is located at the bottom of the container 20 to heat the container 20.

[0087] By placing the container 20 on top of the heating platform, the heating platform can heat the container 20 from below and also provide support for the container 20.

[0088] In some embodiments, the heating stage can be a resistance heating stage, an electron beam heating stage, a radio frequency induction heating stage, an electric arc heating stage, and a laser heating stage, etc.

[0089] The bottom surface of the container 20 can be fitted against the top surface of the heating platform to increase the contact area, thereby increasing the heating area and improving the heating rate. For example, the bottom surface of the container 20 can be a flat surface, in which case the top surface of the heating platform is also a flat surface; the bottom surface of the container 20 can be a convex arc surface, in which case the top surface of the heating platform is also a convex arc surface; the bottom surface of the container 20 can be a concave arc surface, in which case the top surface of the heating platform is also a concave arc surface.

[0090] The projection of the bottom surface of the container 20 onto the bottom surface of the housing 10 can coincide with the projection of the top surface of the heating platform onto the bottom surface of the housing 10, or it can fall within the projection of the top surface of the heating platform onto the bottom surface of the housing 10, or it can completely cover and be larger than the projection of the top surface of the heating platform onto the bottom surface of the housing 10. Preferably, the projection of the bottom surface of the container 20 onto the bottom surface of the housing 10 coincides with the projection of the top surface of the heating platform onto the bottom surface of the housing 10.

[0091] In some embodiments of the present invention, reference is made to... Figure 4 The heating element 30 is a heating wire, which is located on the outer surface of the container 20.

[0092] By placing the heating wire on the outer surface of the container 20, the outer surface of the container 20 can be heated.

[0093] In some embodiments, the heating wire may be a resistance heating wire, an electron beam heating wire, a radio frequency induction heating wire, an electric arc heating wire, or a laser heating wire, etc.

[0094] The heating wire can be wrapped around the circumferential outer surface of the container 20, or it can be disposed on the bottom surface of the container 20, or it can be wrapped around both the circumferential outer surface and the bottom surface of the container 20. Preferably, the heating wire is wrapped around both the circumferential outer surface and the bottom surface of the container 20. The heating wire can be wound at intervals or wrapped adjacently. Preferably, the heating wire is wound at intervals. The heating wire can be arranged spirally or in parallel, etc.

[0095] In some embodiments of the present invention, reference is made to... Figure 6 A heating platform is located at the bottom of the support platform 40, and / or a heating wire is located on the outer surface of the support platform 40 to heat the support platform 40.

[0096] It should be noted that the support platform 40 should be a heat-conducting component to transfer the heat from the heating platform or heating wire to the container 20. The material of the support platform 40 is not limited and can be metal, ceramic, etc.

[0097] The support platform 40 is heated by a heating platform located at the bottom of the support platform 40, so as to heat the container 20 inside the support platform 40. The container 20 can be heated from the bottom and the side, making the heating more uniform and stable, and the heating efficiency higher.

[0098] The projection of the bottom surface of the support platform 40 onto the bottom surface of the housing 10 can coincide with the projection of the top surface of the heating platform onto the bottom surface of the housing 10, or it can fall within the projection of the top surface of the heating platform onto the bottom surface of the housing 10, or it can completely cover and be larger than the projection of the top surface of the heating platform onto the bottom surface of the housing 10. Preferably, the projection of the bottom surface of the support platform 40 onto the bottom surface of the housing 10 coincides with the projection of the top surface of the heating platform onto the bottom surface of the housing 10.

[0099] The support platform 40 is heated by heating wires located on the outer surface of the support platform 40, thereby heating the container 20 inside the support platform 40. This allows for heating from the bottom and sides of the container 20, resulting in more uniform and stable heating and higher heating efficiency.

[0100] The heating wire can be wrapped around the circumferential outer surface of the support platform 40, or it can be disposed on the bottom surface of the support platform 40, or it can wrap around both the circumferential outer surface and the bottom surface of the support platform 40. Preferably, the heating wire wraps around both the circumferential outer surface and the bottom surface of the support platform 40. The heating wire can be wound at intervals or wrapped adjacently. Preferably, the heating wire is wound at intervals. The heating wire can be arranged spirally or in parallel, etc.

[0101] In some embodiments of the present invention, reference is made to... Figure 7 The heating element 30 includes multiple heating zones 31; the vapor deposition simulation device 100 also includes a heating control module 50, which is connected to multiple heating zones 31 to control the heating parameters of different heating zones 31.

[0102] By setting up multiple heating zones 31 and adjusting the parameters of different heating zones 31 separately, it is possible to study how uneven heating affects the material state and change process of the coating material.

[0103] There can be more than two heating zones 31, for example, two, three, five, eight, etc. The heating temperature of different heating zones 31 can be set according to actual needs, and the heating control module 50 can increase or decrease the heating temperature of the controlled zone.

[0104] Different heating zones 31 may use the same heating method or different heating methods. Preferably, different heating zones 31 use the same heating method.

[0105] In some embodiments of the present invention, reference is made to... Figure 8 The vapor deposition simulation device 100 also includes a video input module 60, which is located in the first viewing window 12.

[0106] By setting a video input module 60 in the first viewing window 12, the physical changes of the coating material during the heating process can be recorded by the video input module 60 instead of manually.

[0107] In some embodiments, the video input module 60 can be a high-definition camera or the like, which can observe subtle changes that are invisible to the human eye, and can also store the video for repeated observation and comparison.

[0108] It is understandable that the input end of the video input module 60, which is located in the first viewing window 12, is directly opposite the second viewing window 21 in order to observe the coating material inside the container 20.

[0109] In some embodiments, the video input module 60 may be located on the top, side, or bottom of the housing 10.

[0110] In some embodiments of the present invention, reference is made to... Figure 8 The vapor deposition simulation device 100 also includes a rate control module 70, which is connected to the heating element 30 to adjust the vapor deposition rate of the coating material.

[0111] By setting a rate control module 70 connected to the heating element 30, the evaporation rate of the vapor deposition material can be controlled, thus better simulating the mass production evaporation process.

[0112] In some embodiments of the present invention, reference is made to... Figure 9 The vapor deposition simulation device 100 also includes a nozzle 80; the cover 23 is provided with a through hole 231 that connects the interior of the holding body 22 and the receiving cavity 10a, and the nozzle 80 is detachably connected to the through hole 231.

[0113] By providing a through hole 231 on the cover 23 that connects the interior of the holding body 22 with the receiving cavity 10a, and installing a nozzle 80 in the through hole 231, the vaporized coating material is conveyed to the substrate through the nozzle 80.

[0114] The cover 23 of the nozzle 80 is made of a light-transmitting material, which makes it easy to observe when the coating material (such as the main material of the blue light emitting layer, and some electron / hole transport layer materials) that is prone to clogging becomes clogged, including the timing of the accumulation, the material state at the time of accumulation, and the cause of the material accumulation.

[0115] The nozzle 80 and the through hole 231 can be detachably connected by means of a snap-fit ​​connection, a threaded connection, or a detachable connector. This facilitates the connection of a nozzle 80 of the appropriate size.

[0116] In some embodiments, a plurality of through holes 231 are provided, and the plurality of through holes 231 are arranged in three rows at intervals along the length or width direction of the cover body 23, wherein the diameter of the through holes 231 located in the middle row is smaller than the diameter of the through holes 231 located on both sides.

[0117] According to a second aspect embodiment of the vapor deposition simulation system 1000, referring to Figure 10 It includes the vapor deposition simulation device 100 and the air extraction device 200 in the above embodiments, and the air extraction device 200 is connected to the air extraction port 11.

[0118] According to the evaporation simulation system 1000 of the present invention, by employing the evaporation simulation device 100 in the above embodiment, it is convenient to obtain the physical changes of the coating material during the heating process in the container 20, and the simulation efficiency is high.

[0119] Specifically, the air extraction equipment 200 can be a vacuum pump, etc.

[0120] In some embodiments, the vapor deposition simulation system 1000 further includes a control module, which can be connected to the vacuum pump 200 to control the start and stop of the vacuum pump 200 according to the vacuum level inside the housing 10. The control module is also connected to the heating element 30 to control the heating temperature and heating time. The control module is also connected to the heating control module 50 to control the heating parameters of different heating zones 31. The control module is also connected to the video input module 60 to control the start and stop of the video input module 60, as well as data storage and transmission. The control module is also connected to the rate control module 70 to control the rate control module 70, thereby adjusting the vapor deposition rate of the coating material.

[0121] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0122] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0123] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or that the first feature is at a lower horizontal level than the second feature.

[0124] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0125] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A vapor deposition simulation device, characterized in that, include: The housing is a high-vacuum resistant component and has a receiving cavity. The housing is provided with an air extraction port and a first viewing window. A container is provided in the receiving cavity for holding coating material. The container is provided with a second viewing window, and the first viewing window and the second viewing window are provided correspondingly. A heating element is disposed in the receiving cavity to heat the container.

2. The vapor deposition simulation apparatus according to claim 1, characterized in that, The container includes: A container for holding the main body, wherein the top of the container for holding the main body has an opening; A cover, which is disposed over the opening; The container body and / or the cover body are made of a light-transmitting material to form the second viewing window.

3. The vapor deposition simulation apparatus according to claim 1 or 2, characterized in that, The top surface and / or sides of the housing are made of a light-transmitting material to form the first viewing window.

4. The vapor deposition simulation apparatus according to claim 3, characterized in that, It also includes a support platform having a groove, in which at least a portion of the container is located.

5. The vapor deposition simulation apparatus according to claim 1 or 2, characterized in that, The heating element is a heating platform located at the bottom of the container; and / or, the heating element is a heating wire located on the outer surface of the container.

6. The vapor deposition simulation apparatus according to claim 4, characterized in that, The heating element is a heating platform located at the bottom of the support platform, and / or the heating element is a heating wire located on the outer surface of the support platform to heat the support platform.

7. The vapor deposition simulation apparatus according to claim 1, characterized in that, The heating element includes multiple heating zones; It also includes a heating control module, which is connected to multiple heating zones to control the heating parameters of different heating zones.

8. The vapor deposition simulation apparatus according to claim 1, characterized in that, It also includes a video input module, which is located in the first visible window.

9. The vapor deposition simulation apparatus according to claim 1, characterized in that, It also includes a rate control module, which is connected to the heating element to adjust the evaporation rate of the coating material.

10. The vapor deposition simulation apparatus according to claim 2, characterized in that, It also includes nozzles; The cover has a through hole connecting the interior of the container body and the receiving cavity, and the nozzle is detachably connected to the through hole.

11. A vapor deposition simulation system, characterized in that, include: The vapor deposition simulation apparatus according to any one of claims 1-10; An air extraction device, wherein the air extraction device is connected to the air extraction port.

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