A forced cooling mechanism and cooling method for a CVD furnace

Abstract

This invention discloses a forced cooling mechanism and method for a CVD furnace. The forced cooling mechanism for a CVD furnace includes a cooling channel; along the flow direction, the cooling channel sequentially houses a first thermal shut-off mechanism, a first diverting cooling pipe, a first angle valve unit, a second diverting cooling pipe, a heat exchange channel, a cooling fan unit, a third diverting cooling pipe, a second angle valve unit, and a second thermal shut-off mechanism; the first and second thermal shut-off mechanisms are arranged vertically, and each includes a thermal shut-off water-cooled flange, a thermal shut-off cylinder, a thermal shut-off shutter, and a thermal shut-off felt. The cylinder body of the thermal shut-off cylinder is mounted on the thermal shut-off flange, and the piston rod of the thermal shut-off cylinder passes through the thermal shut-off water-cooled flange and is connected to the thermal shut-off shutter. A thermal shut-off felt is connected to the side of the thermal shut-off shutter away from the thermal shut-off cylinder. This invention achieves rapid cooling of the CVD furnace.

Description

Technical Field

[0001] This invention relates to the field of silicon carbide furnaces, and more specifically to cooling mechanisms and cooling methods thereof. Background Technology

[0002] During the coating process, the temperature in the CVD furnace is relatively high, around 1500℃. After the coating is completed, the cavity of the CVD furnace needs to be rapidly and forcibly cooled.

[0003] There is an urgent need for a device and method for rapidly cooling CVD furnaces to accelerate the cooling process. Summary of the Invention

[0004] To address the problems existing in the prior art, the present invention provides a forced cooling mechanism and cooling method for a CVD furnace, which solves at least one of the aforementioned technical problems.

[0005] The technical solution of the present invention is: a forced cooling mechanism for a CVD furnace, characterized in that it includes a cooling channel, the two ends of which are detachably connected to the side wall flanges of the main furnace body of the CVD furnace.

[0006] The cooling channel is sequentially equipped with a first thermal shut-off mechanism, a first diverting cooling pipe, a first angle valve unit, a second diverting cooling pipe, a heat exchange channel, a cooling fan unit, a third diverting cooling pipe, a second angle valve unit, and a second thermal shut-off mechanism along the flow direction.

[0007] The first thermal disconnection and the second thermal disconnection and the second thermal disconnection and the second thermal disconnection and the second thermal disconnection and the first thermal disconnection and the second thermal disconnection and the second thermal disconnection and the second thermal disconnection and the second thermal disconnection and the third thermal disconnection are both included in the thermal disconnection water-cooled flange, the thermal disconnection cylinder, the thermal disconnection shutter and the thermal disconnection felt. The cylinder body of the thermal disconnection cylinder is installed on the thermal disconnection flange. The piston rod of the thermal disconnection cylinder passes through the thermal disconnection water-cooled flange and is connected to the thermal disconnection shutter. The thermal disconnection felt is connected to the side of the thermal disconnection shutter away from the thermal disconnection cylinder.

[0008] When the piston rod of the thermal break cylinder is in the extended state, the piston rod drives the thermal break felt to block the side flange of the main furnace body of the CVD furnace, and the main furnace body of the CVD furnace is isolated from the cooling channel. At this time, the first angle valve and the second angle valve are in the closed state.

[0009] When the piston rod of the thermal break cylinder is in the shortened state, the main furnace body of the CVD furnace is connected to the cooling channel. At this time, the first angle valve and the second angle valve are in the open state.

[0010] This invention, through the combination of a thermal shut-off mechanism and an angle valve, facilitates the prevention of heat overflow from the main furnace body of the CVD furnace during the coating process, thus isolating the CVD furnace from the cooling channel. Various cooling pipes and cooling fan units enable rapid cooling of the CVD furnace after coating is completed.

[0011] More preferably, one of the two connectors of the thermally cut-off water-cooled flange and the water-cooled tee joint that are axially connected is detachably connected;

[0012] The first hot-break shut-off mechanism has a hot-break water-cooled flange and a first water-cooled tee joint axially connected to each other with a detachable joint. The first water-cooled tee joint has another axially connected to the side wall flange of the main furnace body of the CVD furnace.

[0013] The second hot-shutdown mechanism has a hot-shutdown water-cooled flange and a second water-cooled tee joint axially connected to each other. One joint is detachably connected to the second water-cooled tee joint axially connected to the side wall flange of the main furnace body of the CVD furnace.

[0014] More preferably, the first steering cooling pipe includes a first water-cooled bend, a second water-cooled bend, and a water-cooled straight pipe connected in sequence, and the first water-cooled bend, the second water-cooled bend, and the water-cooled straight pipe are all provided with an inlet and an outlet for cooling water to flow through.

[0015] The first water-cooled bend is connected to the first thermal disconnect mechanism, and the water-cooled straight pipe is connected to the first angle valve unit.

[0016] The central axis of the connection point between the first water-cooled bend and the first thermal disconnection mechanism is vertical.

[0017] The central axis of the water-cooled straight pipe where it connects with the first angle valve is perpendicular to the vertical direction and also perpendicular to the extension / retraction direction of the thermal break cylinder.

[0018] More preferably, the second turning cooling pipe is a 90° turning water-cooled bend, and the water-cooled bend is provided with an inlet and an outlet for cooling water to flow through;

[0019] The flow direction of the water-cooled bend is on a horizontal plane.

[0020] More preferably, the outer wall of the heat exchange channel is provided with upper and lower docking flanges on the same side, the upper docking flange docking with the second deflecting cooling pipe, and the lower docking flange docking with the cooling fan unit.

[0021] The heat exchange channel includes an upper cooling chamber, a middle cooling chamber, and a lower cooling chamber arranged from top to bottom;

[0022] Both the upper cooling cavity and the lower cooling cavity are provided with inlets and outlets for guiding cooling water flow.

[0023] The central cooling cavity is equipped with more than one hundred heat exchange tubes. The inner wall of the heat exchange tubes is used to connect with the upper cooling cavity and the lower cooling cavity, and the outer wall of the heat exchange tubes is provided with heat exchange guide channels for connecting with cooling water.

[0024] More preferably, the lower cooling cavity is equipped with a water leakage detection sensor, and the lower opening of the middle cooling cavity is directly opposite the water leakage detection sensor.

[0025] More preferably, temperature sensors are installed on both the end of the heat exchange channel near the second steering cooling pipe and on the side of the heat exchange channel near the cooling fan unit;

[0026] A pressure sensor is installed inside the heat exchange channel.

[0027] More preferably, the cooling fan unit includes a mounting valve seat and cooling blades, and the mounting valve seat is provided with a vertically arranged first mounting flange and a second mounting flange;

[0028] The cooling blades are rotatably mounted in the mounting valve seat; the axial direction of the rotation center of the cooling blades is parallel to the central axis of the first mounting flange.

[0029] The first mounting flange is connected to the heat exchange channel, and the second mounting flange is connected to the third diversion cooling pipe;

[0030] The third steering cooling pipeline includes a third water-cooled tee connector and a water-cooled connecting pipe connected in sequence. The upper connector of the third water-cooled tee connector is connected to the second mounting flange. One of the two axially connected connectors of the third water-cooled tee connector is sealed, and the other connector is connected to the water-cooled connecting pipe.

[0031] More preferably, both the first angle valve unit and the second angle valve unit include a water-cooled valve seat, an angle valve connecting plate, an angle valve cylinder, and a valve plate. The angle valve cylinder is mounted on the angle valve connecting plate, and the telescopic rod of the angle valve cylinder passes through the angle valve connecting plate and is connected to the valve plate.

[0032] The water-cooled valve seat is provided with a first flange port and a second flange port, with the first flange port facing the valve plate.

[0033] The angle valve connecting plate and the first flange port are respectively provided on opposite sides of the water-cooled valve seat in the axial direction, and the central axis direction of the second flange port is perpendicular to the central axis direction of the first flange port.

[0034] More preferably, the first flange of the first angle valve unit is connected to the first steering cooling pipe;

[0035] The second flange of the second angle valve unit is connected to the second thermal disconnection mechanism.

[0036] More preferably, the extension and retraction direction of the thermal shut-off cylinder of the first thermal shut-off mechanism is perpendicular to the extension and retraction direction of the angle valve cylinder of the first angle valve unit.

[0037] The extension and retraction direction of the thermal shut-off cylinder of the second thermal shut-off mechanism is perpendicular to the extension and retraction direction of the angle valve cylinder of the second angle valve unit.

[0038] The extension and retraction direction of the angle valve cylinder of the first angle valve unit is perpendicular to the extension and retraction direction of the angle valve cylinder of the second angle valve unit.

[0039] The forced cooling mechanism is used to cool the main body of the CVD furnace after coating is completed, so as to shorten the furnace start-up time. At this time, the piston rods of the first heat-breaking opening and closing mechanism, the first angle valve unit, the second angle valve unit and the second heat-breaking opening and closing mechanism are all retracted to make the cooling channel unobstructed. At the same time, the cooling fan unit is turned on and the cooling blades rotate.

[0040] The heat inside the CVD furnace main body enters through the flange port on the side of the first thermal disconnection mechanism and exits through the flange port on the side of the second thermal disconnection mechanism, and the cycle repeats.

[0041] When the temperature sensor detecting the temperature in the heat exchange channel reaches the required level, the main furnace body of the CVD furnace begins to discharge exhaust gas, preparing to start the furnace.

[0042] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0043] This invention provides rapid forced cooling of the temperature inside the main furnace cavity of a CVD furnace. It is equipped with both water cooling and air cooling. The heat inside the main furnace cavity enters from the upper end of the flange and exits from the lower end, forming a circulation and accelerating the cooling effect.

[0044] This invention is equipped with a temperature sensor and a pressure sensor, which can monitor the temperature and pressure inside the mechanism in real time. Attached Figure Description

[0045] Figure 1 This is a schematic diagram of a specific embodiment 1 of the present invention;

[0046] Figure 2 This is a structural schematic diagram from another perspective of a specific embodiment 1 of the present invention;

[0047] Figure 3This is a cross-sectional view of the first thermal disconnection mechanism of a specific embodiment 1 of the present invention;

[0048] Figure 4 This is a cross-sectional view of the first angle valve unit in a specific embodiment 1 of the present invention;

[0049] Figure 5 This is a cross-sectional view of the heat exchange channel in a specific embodiment 1 of the present invention.

[0050] In the diagram, 1 is the first thermal shut-off mechanism, 2 is the first angle valve unit, 3 is the first thermocouple, 4 is the heat exchange channel, 5 is the cooling fan unit, 6 is the second angle valve unit, 7 is the second thermal shut-off mechanism, 8 is the second water-cooled elbow, 9 is the cooling pipe, 10 is the first water-cooled elbow, 11 is the first cooling tee connector, 12 is the pressure sensor, 13 is the second cold water tee connector, 14 is the connecting pipe, 15 is the third cooling tee connector, and 16 is the second thermocouple. 1-1 is a thermal break cylinder, 1-2 is a thermal break O-ring, 1-3 is a thermal break hot water cooling flange, 1-4 is a thermal break oil seal, 1-5 is a thermal break shutter, 1-6 is a thermal break hard felt, 2-1 is an angle valve cylinder, 2-2 is an angle valve connecting plate, 2-3 is a cylinder O-ring, 2-4 is a water-cooled valve seat, 2-5 is a valve plate, 2-6 is a valve plate sealing ring, 4-1 is an upper cooling chamber, 4-2 is a middle cooling chamber, 4-3 is a lower cooling chamber, and 4-4 is a water leakage detection sensor. Detailed Implementation

[0051] See Figures 1 to 5 In specific embodiment 1, a forced cooling mechanism for a CVD furnace includes a cooling channel, the two ends of which are detachably connected to the side wall flanges of the main furnace body of the CVD furnace. Along the flow direction, the cooling channel is sequentially equipped with a first thermal shut-off mechanism 1, a first diverting cooling pipe, a first angle valve unit 2, a second diverting cooling pipe, a heat exchange channel 4, a cooling fan unit 5, a third diverting cooling pipe, a second angle valve unit 6, and a second thermal shut-off mechanism 7. The first thermal shut-off mechanism 1 and the second thermal shut-off mechanism 7 are arranged vertically, and both include a thermal shut-off water-cooled flange 1-3, a thermal shut-off cylinder 1-1, a thermal shut-off shutter 1-5, and a thermal shut-off felt 1-6. The cylinder body of the thermal shut-off cylinder 1-1 is installed on the thermal shut-off flange, and the piston rod of the thermal shut-off cylinder 1-1 passes through the thermal shut-off water-cooled flange 1-3 and is connected to the thermal shut-off shutter 1-5. The side of the thermal shut-off shutter 1-5 away from the thermal shut-off cylinder 1-1 is connected to the thermal shut-off felt 1-6. A thermal break O-ring 1-2 and a thermal break oil seal 1-4 are sandwiched between the thermal break water-cooled flange 1-3 and the piston rod of the thermal break cylinder 1-1.

[0052] When the piston rod of the thermal shut-off cylinder 1-1 is extended, it drives the thermal shut-off felt 1-6 to block the side flange of the main furnace body of the CVD furnace, isolating the main furnace body from the cooling channel. At this time, the first and second angle valves are closed. When the piston rod of the thermal shut-off cylinder 1-1 is shortened, the main furnace body of the CVD furnace is connected to the cooling channel, and the first and second angle valves are open. This invention, through the combination of the thermal shut-off mechanism and the angle valves, facilitates the prevention of heat overflow from the main furnace body of the CVD furnace during the coating process, achieving isolation between the CVD furnace and the cooling channel. Rapid cooling of the CVD furnace is achieved after coating through various cooling pipes (9 in total) and the cooling fan unit (5).

[0053] One of the two axially connected joints of the hot-break water-cooled flange 1-3 and the water-cooled tee joint is detachably connected; the hot-break water-cooled flange 1-3 of the first hot-break closing mechanism 1 is axially connected to the first water-cooled tee joint 11 with one detachable joint, and the other axially connected joint of the first water-cooled tee joint 11 is detachably connected to the side wall flange of the main furnace body of the CVD furnace; the hot-break water-cooled flange 1-3 of the second hot-break closing mechanism 7 is axially connected to the second water-cooled tee joint 13 with one detachable joint, and the other axially connected joint of the second water-cooled tee joint 13 is detachably connected to the side wall flange of the main furnace body of the CVD furnace.

[0054] The first steering cooling pipeline includes a first water-cooled bend 10, a second water-cooled bend 8, and a water-cooled straight pipe connected in sequence. The first water-cooled bend 10, the second water-cooled bend 8, and the water-cooled straight pipe are all provided with inlets and outlets for cooling water to flow through. The first water-cooled bend 10 is connected to the first thermal shut-off mechanism 1, and the water-cooled straight pipe is connected to the first angle valve unit 2. The central axis of the connection between the first water-cooled bend 10 and the first thermal shut-off mechanism 1 is vertical. The central axis of the connection between the water-cooled straight pipe and the first angle valve is perpendicular to the vertical direction and perpendicular to the extension and retraction direction of the thermal shut-off cylinder 1-1.

[0055] The second turning cooling pipe is a 90° turning water-cooled bend, with an inlet and an outlet for cooling water to flow through; the flow direction of the water-cooled bend is on a horizontal plane.

[0056] The outer wall of the heat exchange channel 4 has vertically arranged docking flanges on the same side. The upper docking flange connects to the second directional cooling pipe, and the lower docking flange connects to the cooling fan unit 5. The heat exchange channel 4 includes an upper cooling chamber 4-1, a middle cooling chamber 4-2, and a lower cooling chamber 4-3 arranged from top to bottom. Both the upper cooling chamber 4-1 and the lower cooling chamber 4-3 are provided with inlets and outlets for guiding cooling water. The middle cooling chamber 4-2 is equipped with more than one hundred heat exchange tubes. The inner wall of the heat exchange tubes is used to connect to the upper and lower cooling chambers, and the outer wall of the heat exchange tubes is provided with heat exchange guiding channels for connecting cooling water. A leakage detection sensor is installed in the lower cooling chamber, and the lower opening of the middle cooling chamber 4-2 faces the leakage detection sensor. Temperature sensors are installed at the end of the heat exchange channel 4 near the second directional cooling pipe and on the side of the heat exchange channel 4 near the cooling fan unit 5. A pressure sensor 12 (i.e., a pressure gauge) is installed inside the heat exchange channel 4. A first thermocouple 3 is installed at the end of the heat exchange channel 4 near the second diverting cooling pipe. A second thermocouple 16 is installed on the side of the heat exchange channel 4 near the cooling fan unit 5.

[0057] The cooling fan unit 5 includes a mounting valve seat and cooling blades. The mounting valve seat is provided with a vertically arranged first mounting flange and a second mounting flange. The cooling blades are rotatably mounted in the mounting valve seat. The axial direction of the rotation center of the cooling blades is parallel to the central axis of the first mounting flange. The first mounting flange is connected to the heat exchange channel 4, and the second mounting flange is connected to the third diversion cooling pipe. The third diversion cooling pipe includes a third water-cooled tee connector 15 and a water-cooled connecting pipe 14 connected in sequence. The upper connector of the third water-cooled tee connector 15 is connected to the second mounting flange. One of the two axially connected connectors of the third water-cooled tee connector 15 is sealed, and the other connector is connected to the water-cooled connecting pipe 14.

[0058] Both the first angle valve unit 2 and the second angle valve unit 6 include a water-cooled valve seat 2-4, an angle valve connecting plate 2-2, an angle valve cylinder 2-1, and a valve plate 2-5. The angle valve cylinder 2-1 is mounted on the angle valve connecting plate 2-2, and its telescopic rod passes through the angle valve connecting plate 2-2 and connects to the valve plate 2-5. The water-cooled valve seat 2-4 has a first flange and a second flange, with the first flange facing the valve plate 2-5. The angle valve connecting plate 2-2 and the first flange are respectively provided on opposite sides of the water-cooled valve seat 2-4 in the axial direction, and the central axis of the second flange is perpendicular to the central axis of the first flange. A cylinder O-ring 2-3 is clamped between the angle valve connecting plate 2-2 and the telescopic rod of the angle valve cylinder 2-1, and a valve plate 2-5 sealing ring 2-6 is installed on the water-cooled valve seat 2-4 to abut against the valve plate 2-5.

[0059] The first flange of the first angle valve unit 2 is connected to the first steering cooling pipe; the second flange of the second angle valve unit 6 is connected to the second thermal disconnection mechanism 7.

[0060] The extension and retraction direction of the thermal shut-off cylinder 1-1 of the first thermal shut-off mechanism 1 is perpendicular to the extension and retraction direction of the angle valve cylinder 2-1 of the first angle valve unit 2; the extension and retraction direction of the thermal shut-off cylinder 1-1 of the second thermal shut-off mechanism 7 is perpendicular to the extension and retraction direction of the angle valve cylinder 2-1 of the second angle valve unit 6; the extension and retraction direction of the angle valve cylinder 2-1 of the first angle valve unit 2 is perpendicular to the extension and retraction direction of the angle valve cylinder 2-1 of the second angle valve unit 6.

[0061] The forced cooling mechanism is used to cool the main body of the CVD furnace after the coating is completed, so as to shorten the furnace opening time. At this time, the piston rods of the first heat-breaking opening and closing mechanism, the first angle valve unit 2, the second angle valve unit 6 and the second heat-breaking opening and closing mechanism are all retracted to make the cooling channel unobstructed. At the same time, the cooling fan unit 5 is turned on and the cooling blades rotate.

[0062] The heat inside the CVD furnace main body enters through the flange port on the side of the first thermal disconnection mechanism 1 and exits through the flange port on the side of the second thermal disconnection mechanism 7, and the cycle repeats.

[0063] When the temperature sensor in the heat exchange channel 4 reaches the required temperature, the main furnace body of the CVD furnace begins to discharge exhaust gas, preparing to start the furnace.

[0064] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A forced cooling mechanism for a CVD furnace, characterized in that, It includes a cooling channel, the two ends of which are detachably connected to the side wall flanges of the main furnace body of the CVD furnace; The cooling channel is sequentially equipped with a first thermal shut-off mechanism, a first diverting cooling pipe, a first angle valve unit, a second diverting cooling pipe, a heat exchange channel, a cooling fan unit, a third diverting cooling pipe, a second angle valve unit, and a second thermal shut-off mechanism along the flow direction. The first thermal disconnection and the second thermal disconnection and the second thermal disconnection and the second thermal disconnection and the second thermal disconnection and the first thermal disconnection and the second thermal disconnection and the second thermal disconnection and the second thermal disconnection and the second thermal disconnection and the third thermal disconnection are both included in the thermal disconnection water-cooled flange, the thermal disconnection cylinder, the thermal disconnection shutter and the thermal disconnection felt. The cylinder body of the thermal disconnection cylinder is installed on the thermal disconnection water-cooled flange, the piston rod of the thermal disconnection cylinder passes through the thermal disconnection water-cooled flange and is connected to the thermal disconnection shutter, and the thermal disconnection felt is connected to the side of the thermal disconnection shutter away from the thermal disconnection cylinder. When the piston rod of the thermal break cylinder is in the extended state, the piston rod drives the thermal break felt to block the side flange of the main furnace body of the CVD furnace, and the main furnace body of the CVD furnace is isolated from the cooling channel. At this time, the first angle valve and the second angle valve are in the closed state. When the piston rod of the thermal break cylinder is in the shortened state, the main furnace body of the CVD furnace and the cooling channel are connected to each other. At this time, the first angle valve and the second angle valve are in the open state. On the same side of the outer wall of the heat exchange channel, there are mating flanges arranged vertically. The upper mating flange is connected to the second diverting cooling pipe, and the lower mating flange is connected to the cooling fan unit. The heat exchange channel includes an upper cooling chamber, a middle cooling chamber, and a lower cooling chamber arranged from top to bottom; Both the upper cooling cavity and the lower cooling cavity are provided with inlets and outlets for guiding cooling water flow. The central cooling chamber is equipped with more than one hundred heat exchange tubes. The inner wall of the heat exchange tubes is used to connect with the upper cooling chamber and the lower cooling chamber, and the outer wall of the heat exchange tubes is provided with heat exchange guiding channels for connecting with cooling water. The lower cooling cavity is equipped with a water leakage detection sensor, and the lower opening of the middle cooling cavity faces the water leakage detection sensor. Temperature sensors are installed on both the end of the heat exchange channel near the second steering cooling pipe and on the side of the heat exchange channel near the cooling fan unit. A pressure sensor is installed inside the heat exchange channel; Both the first angle valve unit and the second angle valve unit include a water-cooled valve seat, an angle valve connecting plate, an angle valve cylinder, and a valve plate. The angle valve cylinder is mounted on the angle valve connecting plate, and the telescopic rod of the angle valve cylinder passes through the angle valve connecting plate and is connected to the valve plate. The water-cooled valve seat is provided with a first flange port and a second flange port, with the first flange port facing the valve plate. The angle valve connecting plate and the first flange port are respectively provided on opposite sides of the water-cooled valve seat in the axial direction, and the central axis direction of the second flange port is perpendicular to the central axis direction of the first flange port.

2. The forced cooling mechanism for a CVD furnace according to claim 1, characterized in that: One of the two connectors that are axially connected and conductive between the thermally cut-off water-cooled flange and the water-cooled tee can be detachably connected. The first hot-break shut-off mechanism has a hot-break water-cooled flange and a first water-cooled tee joint axially connected to each other with a detachable joint. The first water-cooled tee joint has another axially connected to the side wall flange of the main furnace body of the CVD furnace. The second hot-shutdown mechanism has a hot-shutdown water-cooled flange and a second water-cooled tee joint axially connected to each other. One joint is detachably connected to the second water-cooled tee joint axially connected to the side wall flange of the main furnace body of the CVD furnace.

3. The forced cooling mechanism for a CVD furnace according to claim 1, characterized in that: The first steering cooling pipeline includes a first water-cooled bend, a second water-cooled bend, and a water-cooled straight pipe connected in sequence. The first water-cooled bend, the second water-cooled bend, and the water-cooled straight pipe are all provided with inlets and outlets for cooling water to flow through. The first water-cooled bend is connected to the first thermal disconnect mechanism, and the water-cooled straight pipe is connected to the first angle valve unit. The central axis of the junction between the first water-cooled bend and the first thermal disconnection mechanism is vertical. The central axis of the water-cooled straight pipe at the junction with the first angle valve unit is perpendicular to the vertical direction and also perpendicular to the extension / retraction direction of the thermal break cylinder.

4. The forced cooling mechanism for a CVD furnace according to claim 1, characterized in that: The second turning cooling pipe is a 90° turning water-cooled bend pipe, and the water-cooled bend pipe is provided with an inlet and an outlet for cooling water to flow through. The flow direction of the water-cooled bend is on a horizontal plane.

5. The forced cooling mechanism for a CVD furnace according to claim 1, characterized in that: The cooling fan unit includes a mounting valve seat and cooling blades, and the mounting valve seat is provided with a vertically arranged first mounting flange and a second mounting flange. The cooling blades are rotatably mounted in the mounting valve seat; the axial direction of the rotation center of the cooling blades is parallel to the central axis of the first mounting flange. The first mounting flange is connected to the heat exchange channel, and the second mounting flange is connected to the third diversion cooling pipe; The third steering cooling pipeline includes a third water-cooled tee connector and a water-cooled connecting pipe connected in sequence. The upper connector of the third water-cooled tee connector is connected to the second mounting flange. One of the two axially connected connectors of the third water-cooled tee connector is sealed, and the other connector is connected to the water-cooled connecting pipe.

6. The forced cooling mechanism for a CVD furnace according to claim 1, characterized in that: The first flange port of the first angle valve unit is connected to the first steering cooling pipe; The second flange of the second angle valve unit is connected to the second thermal disconnection mechanism.

7. The forced cooling mechanism for a CVD furnace according to claim 1, characterized in that: The extension and retraction direction of the thermal shut-off cylinder of the first thermal shut-off mechanism is perpendicular to the extension and retraction direction of the angle valve cylinder of the first angle valve unit. The extension and retraction direction of the thermal shut-off cylinder of the second thermal shut-off mechanism is perpendicular to the extension and retraction direction of the angle valve cylinder of the second angle valve unit. The extension and retraction direction of the angle valve cylinder of the first angle valve unit is perpendicular to the extension and retraction direction of the angle valve cylinder of the second angle valve unit.

8. The cooling method of the forced cooling mechanism of a CVD furnace according to claim 1, characterized in that, After the CVD furnace body is coated, it needs to be cooled to shorten the furnace start-up time. At this time, the piston rods of the first heat insulation opening and closing mechanism, the first angle valve unit, the second angle valve unit, and the second heat insulation opening and closing mechanism are all retracted to make the cooling channel unobstructed. At the same time, the cooling fan unit is turned on and the cooling blades rotate. The heat inside the CVD furnace main body enters through the flange port on the side of the first thermal disconnection mechanism and exits through the flange port on the side of the second thermal disconnection mechanism, and the cycle repeats. When the temperature sensor detecting the temperature in the heat exchange channel reaches the required level, the main furnace body of the CVD furnace begins to discharge exhaust gas, preparing to start the furnace.

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