A lateral piezoelectric deformable mirror and a method for manufacturing the same

Abstract

The present application relates to the technical field of adaptive optics, and particularly provides a transverse piezoelectric deformable mirror and a preparation method thereof, which structurally comprises a lens, electrodes and a driving element for driving the lens to deform, the driving element can comprise a bulk driving piezoelectric ceramic piece for bulk driving, or can comprise a discrete driving piezoelectric ceramic piece for fine driving deformation, in order to simplify the preparation of the driving electrode array and the complicated preparation process of the driving electrode conductive circuit in the preparation process of the transverse piezoelectric deformable mirror, the present application designs a flexible circuit board with integrated driving wiring, the patterned driving electrode array and the corresponding conductive circuit can be prepared in advance, the flexible circuit board and the deformation driving element can be directly bonded by conductive adhesive, and two technical difficulties in the manufacture of the transverse piezoelectric deformable mirror, i.e. the preparation and electrical connection of the driving electrode array, are directly solved, the manufacturing process of the transverse piezoelectric deformable mirror is simplified, and the compactness of the structure is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of adaptive optics, and particularly provides a lateral piezoelectric deformable mirror and a preparation method thereof. BACKGROUND

[0002] Adaptive optics is a key technology developed rapidly in recent decades, which is used to compensate for wavefront aberration in optical transmission caused by atmospheric turbulence or aero-optics, and can effectively improve the imaging quality of an optical imaging system.

[0003] The wavefront correction device in an adaptive optical system is usually implemented by a deformable mirror, and the surface shape of the deformable mirror can be adjusted according to the input control instruction, so as to correct the aberration wavefront in the system. For the driving assembly of the deformable mirror, researchers have proposed many schemes such as voice coil motor driving, MEMS driving, stack piezoelectric ceramic driving, and piezoelectric ceramic sheet driving. Among them, the voice coil motor driven deformable mirror has large power consumption and stroke, and is usually used in ground-based large aperture telescopes; the MEMS driven deformable mirror is small in size, but the aperture and deformation amount are very limited; in comparison, the deformable mirror driven by piezoelectric ceramic is more suitable for conventional adaptive optical systems, especially the lateral piezoelectric deformable mirror using the lateral inverse piezoelectric effect of piezoelectric ceramic sheet, which has the significant advantages of simple structure, small size and low cost, and has a broad application prospect in miniaturized adaptive optical systems.

[0004] According to the number of driving piezoelectric ceramic sheets, the lateral piezoelectric deformable mirror can be mainly divided into single piezoelectric sheet deformable mirror, double piezoelectric sheet deformable mirror and multi-piezoelectric sheet deformable mirror, etc., wherein the single piezoelectric sheet deformable mirror is the simplest lateral piezoelectric deformable mirror, and the number of driving piezoelectric ceramic sheets is only one. In different lateral piezoelectric deformable mirrors, there is a core discrete driving piezoelectric ceramic sheet, which is used to control the surface shape of the mirror at a certain spatial frequency.

[0005] In the manufacturing process of the lateral piezoelectric deformable mirror, there are two key steps to be implemented: one is to set a driving electrode array on the surface of the entire discrete driving piezoelectric ceramic sheet, and the other is to independently electrically connect each driving electrode to the driving circuit. In the existing technical scheme, the two steps are performed separately, that is, first, the additive or subtractive scheme is used to prepare the driving electrode array on the surface of the discrete driving piezoelectric ceramic sheet, and then the flying wire or flexible circuit board scheme is used to electrically connect the driving electrode to the driving circuit board. This makes the manufacturing process of the lateral piezoelectric deformable mirror complicated, and increases the manufacturing difficulty. SUMMARY

[0006] The application provides a transverse piezoelectric deformation mirror and a preparation method thereof.

[0007] To achieve the above object, the technical scheme of the application is as follows:

[0008] In a first aspect, the application provides a transverse piezoelectric deformation mirror, which comprises a mirror, electrodes and a deformation driving part of the mirror.

[0009] The flexible circuit board comprises a base material, a patterned driving electrode array arranged on one side of the base material and conductive lines arranged on the other side of the base material, and a conductive via hole is formed in the base material corresponding to each conductive area of the patterned driving electrode array, and one end of each conductive line is connected with the conductive area through the conductive via hole.

[0010] The patterned driving electrode array is connected with the deformation driving part through conductive glue.

[0011] Preferably, the deformation driving part is a discrete driving piezoelectric ceramic sheet.

[0012] Preferably, the mirror comprises a reflecting surface and a non-reflecting surface, the electrodes are connected with the non-reflecting surface of the mirror, and the discrete driving piezoelectric ceramic sheet is connected with the electrodes.

[0013] Preferably, a whole driving piezoelectric ceramic sheet is arranged between the discrete driving piezoelectric ceramic sheet and the electrodes.

[0014] Preferably, the base material is an insulating material.

[0015] Preferably, the surface of the discrete driving piezoelectric ceramic sheet is provided with conductive glue with the same pattern distribution as the patterned driving electrode array by a silk screen printing technology, and the patterned driving electrode array is connected with the deformation driving part through the conductive glue.

[0016] Preferably, the position of the conductive via hole corresponds to the center of each conductive area.

[0017] In a second aspect, the application provides a preparation method of a transverse piezoelectric deformation mirror, which is used for preparing a transverse piezoelectric deformation mirror and comprises the following steps.

[0018] Conductive glue is applied on the non-reflecting surface of the mirror.

[0019] The application provides a discrete driving piezoelectric ceramic piece, confirms the polarization direction of the discrete driving piezoelectric ceramic piece, and bonds the discrete driving piezoelectric ceramic piece and a lens concentrically through conductive glue.

[0020] The application provides a flexible circuit board, and the same conductive glue as the patterned driving electrode array pattern distribution of the flexible circuit board is printed on the side of the discrete driving piezoelectric ceramic piece away from the lens through a screen printing technology, and the patterned driving electrode array is bonded to the discrete driving piezoelectric ceramic piece through the conductive glue.

[0021] Preferably, before the lens is bonded to the discrete driving piezoelectric ceramic piece, the application further comprises the following steps: bonding at least one integral driving piezoelectric ceramic piece to the non-reflective surface of the lens, confirming the polarization direction of the integral driving piezoelectric ceramic piece, and sequentially bonding all the integral driving piezoelectric ceramic pieces.

[0022] Compared with the prior art, the application can achieve the following beneficial effects:

[0023] The application optimizes the design of the driving electrode array and the conductive circuit of the transverse piezoelectric deformation mirror, designs a flexible circuit board with integrated driving wiring, realizes the preparation and electrical connection of the driving electrode array of the transverse piezoelectric deformation mirror, and leaves an electronic interface in the form of an electrical connector at the end of the flexible circuit board to form an electronic package; the discrete driving piezoelectric ceramic is bonded to the flexible circuit board through patterned conductive glue, the step of preparing the driving electrode array on the surface of the discrete driving piezoelectric ceramic piece is omitted, the manufacturing process of the transverse piezoelectric deformation mirror is simplified, the manufacturing efficiency is improved, and the compactness of the transverse piezoelectric deformation mirror structure is improved.

[0024] The flexible circuit board with integrated driving wiring of the application can be pre-prepared, and in the assembly and preparation process of the transverse piezoelectric deformation mirror, the pre-prepared flexible circuit board can be directly assembled with the discrete driving piezoelectric ceramic piece, which greatly reduces the preparation time of the transverse piezoelectric deformation mirror, provides a novel structure of the transverse piezoelectric deformation mirror, and in addition, the driving electrode array can be directly integrated with the conductive circuit through a conductive via, avoiding the complex process of preparing the driving electrode array on the discrete driving piezoelectric ceramic piece through additive or subtractive methods in the prior art, and then connecting the conductive circuit of the driving electrode array through a flying wire or a flexible circuit board, realizing a new deformation mirror preparation process, and in addition, the flexible circuit board with integrated driving wiring of the application improves the compact structure, has an advantage in miniaturization of the deformation mirror, and the electrical connection reliability of the conductive circuit and the patterned driving electrode array is also higher through the conductive via. BRIEF DESCRIPTION OF DRAWINGS

[0025] The accompanying drawings, which form a part of this application, are included to provide a further understanding of the application and are incorporated in and constitute a part of this application. The illustrations, together with the description, serve to explain the application, but do not limit the application. In the drawings:

[0026] Figure 1 is a plan view of the assembled state of a transverse piezoelectric deformable mirror according to an embodiment of the application, taking a single piezoelectric sheet deformable mirror as an example;

[0027] Figure 2 is an exploded view of the three-dimensional structure of a transverse piezoelectric deformable mirror according to an embodiment of the application, taking a single piezoelectric sheet deformable mirror as an example;

[0028] Figure 3 is a structural schematic diagram of a flexible circuit board according to an embodiment of the application.

[0029] The reference signs in the drawings include:

[0030] Lens 100, electrode 200, discrete driving piezoelectric ceramic sheet 300, conductive adhesive 400, flexible circuit board 500, base material 501, patterned driving electrode array 502, conductive via 503, conductive circuit 504. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and do not constitute a limitation on the present application. Similar elements in different embodiments use associated similar element numbers. In the following embodiments, many details are described in order to make the present application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different cases, or can be replaced by other elements, materials or methods. In some cases, some operations related to the present application are not shown or described in the specification in order to avoid the core part of the present application being overwhelmed by too much description, and it is not necessary to describe these related operations in detail for those skilled in the art based on the description in the specification and general technical knowledge in the art.

[0032] It should be noted that the embodiments and features of the present application can be combined with each other to form various implementations, without conflict. Meanwhile, the steps or actions in the method description can be sequentially adjusted or adjusted in a manner obvious to those skilled in the art. Therefore, the various sequences in the description and the drawings are only for the purpose of clearly describing a certain embodiment, and do not mean that the sequence is necessary, unless otherwise stated that a certain sequence must be followed.

[0033] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" and the like can explicitly or implicitly include one or more features. In the description of the present application, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0034] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between two elements inside. For those skilled in the art, the specific meaning of the above terms in the present application can be understood through specific circumstances.

[0035] The present application will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.

[0036] Please refer to Figure 1 , 2And 3, in an embodiment of the present application, a transverse piezoelectric deformation mirror is provided, and a single piezoelectric sheet deformation mirror without overall driving piezoelectric ceramic sheet is taken as an example to introduce the structure, which specifically comprises: a mirror 100, an electrode 200, a discrete driving piezoelectric ceramic sheet 300, a conductive adhesive 400 and a flexible circuit board 500, wherein the mirror 100 is the main part of the deformation mirror, which is usually made of glass or other transparent materials, and has a circular sheet structure, a reflecting surface and a non-reflecting surface, the reflecting surface is used for reflecting the light beam, and the non-reflecting surface is used for connecting with the rear-end deformation driving. A layer of conductive adhesive is uniformly applied on the non-reflecting surface of the mirror 100, and the layer of conductive adhesive is the electrode 200 of the deformation mirror, and the electrode 200 is a ground electrode. The size of the electrode 200 needs to be able to completely cover the deformation driving part needed to be bonded by the rear-end for driving the mirror deformation.

[0037] In an embodiment of the present application, a single piezoelectric sheet deformation mirror without overall driving piezoelectric ceramic sheet is provided, which only has a layer of discrete driving piezoelectric ceramic sheet 300 as a deformation driving part. As an optional embodiment, according to the actual design requirements, a plurality of layers of discrete driving piezoelectric ceramic sheets 300 can be designed to be sequentially arranged and bonded, which can be a single piece or a plurality of pieces stacked, and the stacked form can obtain a larger displacement stroke by increasing the stacking height. In addition, at least one layer of overall driving piezoelectric ceramic sheet can be designed between the electrode 200 and the discrete driving piezoelectric ceramic sheet 300, and a plurality of layers of overall driving piezoelectric ceramic sheets can also be sequentially arranged and bonded by conductive adhesive. The overall driving piezoelectric ceramic sheet is mainly used to generate large-scale overall deformation, and the overall driving piezoelectric ceramic sheet is pasted on the non-reflecting surface of the mirror by conductive adhesive, and electrodes 200 are uniformly arranged on both surfaces of the overall driving piezoelectric ceramic sheet. This design allows the overall driving piezoelectric ceramic sheet to contact the non-reflecting surface of the mirror, thereby realizing overall deformation control.

[0038] In an embodiment of the present application, only a single circular sheet structure of discrete driving piezoelectric ceramic sheet 300 is used, and according to the transverse inverse piezoelectric effect, the discrete driving piezoelectric ceramic sheet 300 can drive the mirror 100 to generate curvature deformation after voltage is applied.

[0039] The conductive adhesive 400 is used to bond the discrete driving piezoelectric ceramic sheet 300 and the flexible circuit board 500, and the conductive adhesive 400 has a sheet structure, and its shape and distribution are the same as the pattern distribution of the patterned driving electrode array 502 in the flexible circuit board 500.

[0040] The flexible circuit board 500 adopts an integrated driving wiring design, is in a flexible sheet structure, and is composed of a base material 501 and a driving circuit structure arranged on the bottom layer and the top layer of the base material 501. Specifically, the base material 501 is an insulating material, the bottom layer of the base material 501 is a patterned driving electrode array 502, and the patterned driving electrode array 502 is divided into a plurality of conductive sub-areas. Each conductive sub-area is an independent driving electrode. A conductive via hole 503 is formed in the corresponding position of the base material 501 at the center position of each conductive sub-area and connects the bottom layer and the top layer. Each conductive line 504 is electrically connected to the patterned driving electrode array 502 through the conductive via hole 503. It can be understood that one end of the conductive line 504 of each conductive sub-area is connected to the conductive sub-area through the conductive via hole 503. The starting point of each conductive line 504 is located at the center of the corresponding bottom layer conductive sub-area through the conductive via hole 503, and the terminal point is away from the patterned driving electrode array 502. The conductive line 504 of each conductive sub-area can be designed according to the actual design, and the conductive line 504 is arranged and designed for welding electronic interface elements such as an electrical connector. Therefore, the flexible circuit board 500 usually presents a round sheet shape corresponding to the shape of the lens 100, and the dense arrangement of the output ends of the conductive lines 504 is designed on the edge of the round sheet structure, that is, one end extends outward.

[0041] The lateral piezoelectric deformation mirror of the embodiment of the present application adopts the flexible circuit board 500 with integrated driving wiring, and directly realizes two key technologies of lateral piezoelectric deformation mirror manufacturing on one component: preparation of the patterned driving electrode array 502 and lead-out of the conductive line 504 on the patterned driving electrode array 502. The flexible circuit board 500 can be prepared as a preform, and the conductive glue 400 with a pattern distribution consistent with the patterned driving electrode array 502 is arranged on the surface of the discrete driving piezoelectric ceramic sheet 300 through screen printing or other methods during the preparation process of the lateral piezoelectric deformation mirror. That is, the flexible circuit board 500 can be directly and reliably connected to the discrete driving piezoelectric ceramic sheet 300, greatly simplifying the preparation and electrical connection of the driving electrode of the lateral piezoelectric deformation mirror, improving the manufacturing efficiency of the lateral piezoelectric deformation mirror, and improving the compactness of the lateral piezoelectric deformation mirror structure. In the prior art, the patterned driving electrode array 502 is first prepared on the surface of the discrete driving piezoelectric ceramic sheet 300 through additive or subtractive processes, and the conductive line 504 required for connecting each conductive sub-area of the patterned driving electrode array 502 is connected. The process is extremely complex, time-consuming, and the existing preparation process of the patterned driving electrode array 502 is directly prepared on the surface of the discrete driving piezoelectric ceramic sheet 300, which may damage the discrete driving piezoelectric ceramic sheet 300. In addition, the flying wire or the flexible circuit board is connected for each conductive sub-area, and the electrical connection process is too complex, and the point connection reliability is poor.

[0042] Based on the structural design of the transverse piezoelectric deformation mirror, the embodiment of the present application further provides a preparation method of the transverse piezoelectric deformation mirror, which specifically comprises the following steps:

[0043] S1: First, provide the lens 100, and place it on a clean workbench with the non-reflective surface facing up by using a holding tool.

[0044] S2: Uniformly apply a layer of conductive glue on the non-reflective surface of the lens 100, and make the area where the conductive glue is applied completely cover the subsequent bonding area of the discrete driving piezoelectric ceramic piece 300. The conductive glue not only plays a bonding role, but also provides electrical connection, and after solidification, the layer of conductive glue becomes the electrode 200, ensuring that the discrete driving piezoelectric ceramic piece 300 is grounded.

[0045] Since the present embodiment is directed to the preparation of a single-piezoelectric-piece deformation mirror without a whole driving piezoelectric ceramic piece, the bonding process of the whole driving piezoelectric ceramic piece is not involved. If the prepared deformation mirror has at least one whole driving piezoelectric ceramic piece, the whole driving piezoelectric ceramic piece should be provided first, and the polarization direction of the whole driving piezoelectric ceramic piece should be confirmed, then the whole driving piezoelectric ceramic piece is concentrically bonded to the lens 100 through the conductive glue, and then the conductive glue is uniformly applied again on the side of the whole driving piezoelectric ceramic piece away from the lens 100, and other whole driving piezoelectric ceramic pieces are bonded again; if there is only one whole driving piezoelectric ceramic piece, the discrete driving piezoelectric ceramic piece 300 should be provided, the polarization direction of the discrete driving piezoelectric ceramic piece 300 should be confirmed, and the discrete driving piezoelectric ceramic piece 300 should be bonded. The discrete driving piezoelectric ceramic piece 300 also needs to be concentrically bonded to the lens 100.

[0046] S3: Solidify the conductive glue to ensure reliable connection between the lens 100 and the discrete driving piezoelectric ceramic piece 300.

[0047] S4: Use techniques such as silk screen printing to print the conductive glue 400 on the side of the discrete driving piezoelectric ceramic piece 300 away from the lens, and the shape and distribution of the conductive glue 400 completely comply with the pattern distribution of the designed patterned driving electrode array 502.

[0048] S5: Through the patterned conductive glue 400, the patterned driving electrode array 502 in the integrated driving wiring flexible circuit board 500 is bonded to the discrete driving piezoelectric ceramic piece 300, and the patterned driving electrode array 502 on the bottom layer of the flexible circuit board 500 completely coincides with the pattern of the conductive glue 400 on the surface of the discrete driving piezoelectric ceramic piece 300.

[0049] S6: Solidify the conductive glue 400 to complete the reliable connection of the discrete driving piezoelectric ceramic piece 300 and the flexible circuit board 500. At this time, the preparation of the main structure of the transverse piezoelectric deformation mirror is completed.

[0050] S7: At this time, the main body structure of the transverse piezoelectric deformation mirror can also be mechanically and circuitry packaged to complete the fabrication of the transverse piezoelectric deformation mirror.

[0051] In the above preparation process, the design of the flexible circuit board 500 integrated with the driving wiring allows the preparation of the patterned driving electrode array 502 and the lead-out of the conductive circuit 504 to be realized at the same time, and the step of preparing the patterned driving electrode array 502 on the surface of the separate driving piezoelectric ceramic sheet in the traditional process is omitted. In addition, the conductive circuit 504 is directly prefabricated on the flexible circuit board 500, avoiding the complexity of the conductive circuit 504 wiring, making the entire structure more compact, and at the same time, the electronic interface such as the electronic connector with convenient plugging, good stability and high reliability can be designed on the flexible circuit board 500. These design considerations are closely related to the requirements and design of the electrical connector, ensuring the internal reliability and use reliability of the connection, and integrating the patterned driving electrode array 502 and the conductive circuit 504 on the flexible circuit board 500, and electrically connecting through the conductive via 503, improving the electrical connection stability, which is beneficial to the response speed and control accuracy of the deformation mirror, greatly improving the preparation efficiency and structural compactness of the transverse piezoelectric deformation mirror.

[0052] In summary, the above only describes the preferred embodiments of the present specification, and is not used to limit the protection scope of the present specification. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present specification shall be included in the protection scope of the present specification.

[0053] The system, device, module or unit illustrated by one or more embodiments described above can be specifically implemented by a computer chip or entity, or by a product with certain functions. A typical implementation device is a computer. Specifically, the computer may, for example, be a personal computer, a laptop computer, a cellular phone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0054] It should also be noted that the terms "comprising", "including", or any other variant thereof are intended to cover non-exclusive inclusion, so that processes, methods, articles or devices that include a series of elements not only include those elements, but also include other elements that are not explicitly listed, or other elements inherent to such processes, methods, articles or devices. Without more limitations, the element defined by the statement "comprising a" does not exclude the presence of additional identical elements in the process, method, article or device that includes the element.

[0055] Various embodiments described in this specification are described with reference to a particular sequence or order, but the order of events can differ from that described without departing from the spirit of the disclosure. When a description of a sequence or order of certain steps, events, or functions are described, other sequences, functions, or steps can be employed, and other specific sequences, functions, or steps can be developed which still fall within the scope of the disclosure. Embodiments described in this specification are not limited to the specific embodiments described but can apply to any medical device or system that uses a similar technique to achieve a similar result.

[0056] The above description of certain embodiments of the disclosure has been presented for the purposes of illustration and description. Other embodiments are within the scope of the claims. In some cases, actions recited in the claims can be performed in a different order and still accomplish the desired results. Additionally, the processes depicted in the accompanying figures do not necessarily require the particular order shown, or sequential order, to achieve the desired results. In certain implementations, multitasking and parallel processing can be advantageous.

Claims

1. A transverse piezoelectric deformable mirror, comprising: The lens, the electrode, and the deformation drive of the lens are characterized in that they further include: A flexible circuit board includes: a substrate, a patterned driving electrode array disposed on one side of the substrate, and conductive lines disposed on the other side of the substrate. Conductive vias are formed on the substrate corresponding to each conductive sub-region of the patterned driving electrode array. One end of each conductive line is conductively connected to the conductive sub-region through the conductive via. Each conductive sub-region is an independent driving electrode. The patterned driving electrode array is connected to the deformation driving component via conductive adhesive; the deformation driving component is a discrete driving piezoelectric ceramic sheet; conductive adhesive with the same pattern distribution as the patterned driving electrode array is applied to the surface of the discrete driving piezoelectric ceramic sheet by screen printing technology, and the patterned driving electrode array is connected to the deformation driving component via the conductive adhesive; The flexible circuit board is a prefabricated body. During the fabrication of the transverse piezoelectric deformable mirror, conductive adhesive with the same pattern distribution as the patterned driving electrode array is directly screen-printed onto the surface of the discrete driving piezoelectric ceramic sheet, and the flexible circuit board is connected to the discrete driving piezoelectric ceramic sheet.

2. The transverse piezoelectric deformable mirror as described in claim 1, characterized in that, The lens includes a reflective surface and a non-reflective surface, the electrode is connected to the non-reflective surface of the lens, and the discrete driving piezoelectric ceramic sheet is connected to the electrode.

3. The transverse piezoelectric deformable mirror as described in claim 2, characterized in that, An integral driving piezoelectric ceramic sheet is also provided between the discrete driving piezoelectric ceramic sheet and the electrode.

4. The transverse piezoelectric deformable mirror as described in claim 1, characterized in that, The substrate is an insulating material.

5. The transverse piezoelectric deformable mirror as described in claim 1, characterized in that, The position of the conductive via corresponds to the center of each conductive sub-region.

6. A method for fabricating a transverse piezoelectric deformable mirror, characterized in that, For fabricating the transverse piezoelectric deformable mirror as described in any one of claims 1 to 5, comprising: Apply conductive adhesive to the non-reflective surface of the lens; Provide discrete driven piezoelectric ceramic sheets, confirm the polarization direction of the discrete driven piezoelectric ceramic sheets, and use conductive adhesive to concentrically bond the discrete driven piezoelectric ceramic sheets to the lens. A flexible circuit board is provided. Conductive adhesive with the same patterned driving electrode array pattern as the flexible circuit board is printed on the side of the discrete driving piezoelectric ceramic sheet away from the lens using screen printing technology. The patterned driving electrode array is then bonded to the discrete driving piezoelectric ceramic sheet using the same conductive adhesive with the same patterned driving electrode array pattern as the flexible circuit board.

7. The method for preparing a transverse piezoelectric deformable mirror as described in claim 6, characterized in that, Before bonding the discrete driving piezoelectric ceramic sheets to the lens, the process includes: bonding at least one integral driving piezoelectric ceramic sheet to the non-reflective surface of the lens, confirming the polarization direction of the integral driving piezoelectric ceramic sheet, and bonding all integral driving piezoelectric ceramic sheets in sequence.

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