A silicon wafer flower basket with anti-dumping function

Abstract

The present invention discloses a silicon wafer flower basket with an anti-dumping function, which relates to the technical field of silicon wafer flower baskets, including a flower basket end plate, two of which are provided, and a plurality of flower basket support rods are provided between the two flower basket end plates, and also including a pad provided on the flower basket end plate, a pad located directly below the pad, a shock absorbing mechanism provided on the pad, an axial anti-dumping mechanism provided on the shock absorbing mechanism, and a side anti-dumping mechanism provided on the shock absorbing mechanism. The device is provided with an axial anti-dumping mechanism, so that the device can dynamically adjust the center of gravity position of the silicon wafer flower basket according to the values ​​measured by the pressure sensors on the pads on both sides of the silicon wafer flower basket, thereby preventing the silicon wafer flower basket from being tilted due to the center of gravity shift of the silicon wafer flower basket caused by external force impact or unstable operation during transportation or operation.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer flower baskets, and in particular to a silicon wafer flower basket with an anti-dumping function. Background Art

[0002] In the semiconductor manufacturing process, silicon wafers are one of the key materials. In order to ensure the safety and cleanliness of silicon wafers during transportation, cleaning and storage, silicon wafer baskets are usually used to carry and protect silicon wafers. However, traditional silicon wafer baskets do not have corresponding anti-dumping structures. During transportation or operation, if the silicon wafer basket is impacted by external forces or unstable operations, the traditional silicon wafer basket is prone to dumping, causing damage to the silicon wafers. Therefore, improvement is urgently needed. Summary of the invention

[0003] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a silicon wafer flower basket with an anti-dumping function, aiming to solve the above technical problems.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] A silicon wafer flower basket with an anti-dumping function comprises a flower basket end plate, two of the flower basket end plates are provided, and a plurality of flower basket support rods are provided between the two flower basket end plates, each of the flower basket support rods is provided with a silicon wafer groove for placing silicon wafers, and the silicon wafer flower basket with an anti-dumping function further comprises:

[0006] A cushion block is fixedly arranged on the flower basket end plate, and two cushion blocks are symmetrically arranged on each flower basket end plate;

[0007] A pad is located directly below the pad block, a connecting groove is provided at one end of the pad, a plug rod is fixedly provided at the other end of the pad, two symmetrically arranged ball head grooves are provided on the surface of the plug rod, rod grooves connected to the connecting grooves are provided on both sides of the pad, two groups of first shock absorbing grooves are provided on the pad, and the two groups of first shock absorbing grooves are symmetrically distributed on the pad, two groups of second shock absorbing grooves are provided on the pad, and the two groups of second shock absorbing grooves are symmetrically distributed on the pad, and a built-in groove is provided on the outer side of the second shock absorbing groove;

[0008] A control device, fixedly arranged on the pad;

[0009] A shock absorbing mechanism is arranged on the cushion block, the shock absorbing mechanism is electrically connected to the control device, and the shock absorbing mechanism is used to alleviate the impact on the end plate of the flower basket;

[0010] An axial anti-falling mechanism is arranged on the shock absorbing mechanism, the axial anti-falling mechanism is electrically connected to the control device, and the axial anti-falling mechanism is used to prevent the silicon wafer flower basket from falling in the direction of the axis of the flower basket support rod;

[0011] A side anti-fall mechanism is arranged on the shock absorbing mechanism, the side anti-fall mechanism is electrically connected to the control device, and the side anti-fall mechanism is used to prevent the silicon wafer flower basket from tipping over in a direction perpendicular to the axis of the flower basket support rod.

[0012] Preferably, the shock absorbing mechanism comprises:

[0013] A first shock absorbing part is arranged on the cushion block, and the first shock absorbing part is used to alleviate the impact on the end plate of the flower basket;

[0014] The second shock absorbing part is arranged on the cushion block, and the second shock absorbing part is used for further alleviating the impact on the end plate of the flower basket.

[0015] Preferably, the first shock absorbing part comprises:

[0016] A first shock absorbing rod, fixedly arranged on a surface of the cushion block close to the cushion plate, the first shock absorbing rod being slidably connected to the first shock absorbing groove;

[0017] A blocking plate is slidably disposed in the first shock absorbing groove, and a surface of the blocking plate close to the first shock absorbing rod is fixedly connected to the first shock absorbing rod;

[0018] The first shock absorbing spring is arranged in the first shock absorbing groove, and one end of the first shock absorbing spring close to the blocking plate is fixedly connected to the blocking plate.

[0019] Preferably, the second shock absorbing part comprises:

[0020] A second shock absorbing rod is fixedly arranged on the surface of the cushion block close to the cushion plate, and the second shock absorbing rod is slidably connected to the second shock absorbing groove;

[0021] A second shock absorbing spring, sleeved on the second shock absorbing rod;

[0022] The pressure sensor is located in the built-in groove and is detachably fixedly connected to the pad. The pressure sensor is electrically connected to the control device. The pressure sensor is used to detect the pressure of the second shock absorbing spring on the pressure sensor in real time.

[0023] Preferably, the axial anti-fall mechanism comprises:

[0024] A limit rod is located between two flower basket end plates, and both ends of the limit rod are fixedly connected to adjacent flower basket end plates respectively;

[0025] The adjusting part is arranged on the pad and electrically connected to the control device. The adjusting part is used to adjust the center of gravity of the silicon wafer basket according to the values ​​of the pressure sensors on the pads on both sides.

[0026] Preferably, the adjustment unit comprises:

[0027] An adjusting motor is arranged on a pad on either side and is detachably fixedly connected to the pad, and the adjusting motor is electrically connected to the control device;

[0028] An adjusting screw is arranged on the pad, and one end of the adjusting screw close to the adjusting motor is fixedly connected to the output end of the adjusting motor;

[0029] The counterweight block is arranged on the adjusting screw and is threadedly connected with the adjusting screw. The counterweight block is slidably connected with the limiting rod.

[0030] Preferably, the side anti-fall mechanism comprises:

[0031] A connection frame is fixedly arranged on the pad, two groups of connection frames are arranged on the pad, and a reset groove is opened on the connection frame;

[0032] A fixing frame, fixedly arranged on the connecting frame;

[0033] A plug-in portion is arranged in the connection frame, and is used to stabilize the connection between the two pads to prevent the silicon wafer flower basket from tipping over in a direction perpendicular to the axis of the flower basket support rod;

[0034] The reset part is arranged in the fixing frame and is electrically connected to the control device. The reset part is used to slide the plug-in part into the connecting frame.

[0035] Preferably, the plug-in portion comprises:

[0036] A plug connector is slidably disposed in the connection frame, wherein one end of the plug connector close to the plug rod is configured as a hemisphere, and one end of the plug connector close to the plug rod is matched with the ball head groove;

[0037] A connecting rod is located in the connecting frame, and one end of the connecting rod close to the plug connector is fixedly connected to the plug connector;

[0038] A sliding block is slidably disposed in the connecting frame, and one end of the sliding block close to the connecting rod is fixedly connected to the connecting rod, and a wedge-shaped groove is provided on the surface of the sliding block close to the reset groove;

[0039] The built-in spring is arranged in the connection frame, and the two ends of the built-in spring are respectively fixedly connected to the connection frame and the sliding block, and the built-in spring is always in a compressed state.

[0040] Preferably, the resetting unit comprises:

[0041] An electric push rod, fixedly disposed in the fixing frame and electrically connected to the control device;

[0042] A wheel plate, fixedly arranged at one end of the electric push rod close to the sliding block;

[0043] A reset roller is rotatably arranged on the wheel plate, and the reset roller is rollingly connected with the wedge-shaped groove.

[0044] Preferably, a pop-up portion is provided in the connecting groove, and the pop-up portion comprises:

[0045] A pop-up spring is disposed in the connecting groove and fixedly connected to the backing plate;

[0046] The pop-up plate is slidably disposed in the connecting groove, and the surface of the pop-up plate close to the pop-up spring is fixedly connected to the pop-up spring.

[0047] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0048] 1. The device is provided with an axial anti-falling mechanism, so that the device can dynamically adjust the center of gravity position of the silicon wafer basket according to the values ​​measured by the pressure sensors on the pads on both sides of the silicon wafer basket, thereby preventing the silicon wafer basket from falling due to the center of gravity shift of the silicon wafer basket due to external impact or unstable operation during transportation or operation.

[0049] 2. The device is provided with a side anti-fall mechanism so that each silicon wafer basket can be connected together, thereby further increasing the contact area between the silicon wafer basket and the supporting surface, making it easier for the center of gravity of the silicon wafer basket to fall within the supporting surface, thereby further increasing the stability of the silicon wafer basket. At the same time, the friction between the silicon wafer basket as a whole and the contact surface is increased by increasing the contact area, and the pressure can be distributed more evenly, avoiding instability caused by local overload of the silicon wafer basket, thereby reducing the possibility of tipping. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0051] Figure 1 A schematic diagram of the three-dimensional structure of a silicon wafer flower basket with an anti-dumping function is shown.

[0052] Figure 2 A front view of a silicon wafer flower basket with an anti-dumping function is shown.

[0053] Figure 3 Shows Figure 2 Sectional view of AA.

[0054] Figure 4 Shows Figure 3A schematic diagram of the enlarged local structure at point A in the middle.

[0055] Figure 5 Shows Figure 4 A magnified schematic diagram of the local structure at point B in the middle.

[0056] Figure 6 Shows Figure 2 Cross-sectional view of BB.

[0057] Figure 7 Shows Figure 6 Enlarged schematic diagram of the local structure at point C in the middle.

[0058] Figure 8 A side view of a silicon wafer flower basket with an anti-dumping function is shown.

[0059] Fig. 9 Shows Figure 8 Cross-sectional view of CC.

[0060] Fig.10 A top view of a silicon wafer flower basket with an anti-dumping function is shown.

[0061] Fig.11 An exploded view of a portion of the structure of a silicon wafer flower basket with an anti-dumping function is shown.

[0062] Fig.12 Shows the connection diagram of two silicon chip baskets.

[0063] Legend:

[0064] 1. Flower basket end plate; 2. Flower basket support rod; 3. Silicon wafer groove; 4. Cushion block; 5. Cushion plate; 6. Connection groove; 7. Insert rod; 8. Ball head groove; 9. Rod groove; 10. First shock-absorbing groove; 11. Second shock-absorbing groove; 12. Built-in groove; 13. First shock-absorbing rod; 14. Blocking plate; 15. First shock-absorbing spring; 16. Second shock-absorbing rod; 17. Second shock-absorbing spring; 18. Pressure sensor; 19. Limit rod; 20. Adjustment motor; 21. Adjustment screw; 22. Counterweight; 23. Connection frame; 24. Reset groove; 25. Fixed frame; 26. Plug connector; 27. Connecting rod; 28. Sliding block; 29. ​​Wedge groove; 30. Built-in spring; 31. Electric push rod; 32. Wheel plate; 33. Reset roller; 34. Pop-up spring; 35. Pop-up plate; 36. Control device. DETAILED DESCRIPTION

[0065] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0066] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0067] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0068] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0069] Reference Figures 1 to 12 , an embodiment of a silicon wafer flower basket with an anti-dumping function of the present invention is further described.

[0070] A silicon wafer flower basket with an anti-dumping function comprises a flower basket end plate 1, two of the flower basket end plates 1 are provided, and a plurality of flower basket support rods 2 are provided between the two flower basket end plates 1, each of the flower basket support rods 2 is provided with a silicon wafer slot 3 for placing silicon wafers, and the silicon wafer flower basket with an anti-dumping function further comprises:

[0071] The cushion block 4 is fixedly arranged on the flower basket end plate 1, and two cushion blocks 4 are symmetrically arranged on each flower basket end plate 1;

[0072] A pad 5 is located directly below the pad block 4, a connecting groove 6 is provided at one end of the pad 5, an insertion rod 7 is fixedly provided at the other end of the pad 5, two symmetrically arranged ball head grooves 8 are provided on the surface of the insertion rod 7, rod grooves 9 connected to the connecting groove 6 are provided on both sides of the pad 5, two groups of first shock absorbing grooves 10 are provided on the pad 5, and the two groups of first shock absorbing grooves 10 are symmetrically distributed on the pad 5, two groups of second shock absorbing grooves 11 are provided on the pad 5, and the two groups of second shock absorbing grooves 11 are symmetrically distributed on the pad 5, and a built-in groove 12 is provided on the outer side of the second shock absorbing groove 11;

[0073] A control device 36, fixedly disposed on the pad 5;

[0074] It should be noted that the device is provided with a pad 5, which increases the contact area between the silicon wafer basket and the corresponding supporting surface to a certain extent, making it easier for the center of gravity of the silicon wafer basket to fall within the supporting surface, thereby increasing the stability of the silicon wafer basket. At the same time, by increasing the contact area, the friction between the silicon wafer basket as a whole and the supporting surface is increased, and the pressure can be distributed more evenly, avoiding instability caused by local overload of the silicon wafer basket, thereby reducing the possibility of tipping.

[0075] Reference Figures 1 to 12 , a shock absorbing mechanism is arranged on the cushion block 4, the shock absorbing mechanism is electrically connected to the control device 36, and the shock absorbing mechanism is used to alleviate the impact on the flower basket end plate 1, and the shock absorbing mechanism includes:

[0076] The first shock absorbing part is arranged on the cushion block 4, and is used to alleviate the impact on the flower basket end plate 1. The first shock absorbing part includes:

[0077] A first shock absorbing rod 13 is fixedly disposed on the surface of the cushion block 4 close to the cushion plate 5, and the first shock absorbing rod 13 is slidably connected to the first shock absorbing groove 10;

[0078] A blocking plate 14 is slidably disposed in the first shock absorbing groove 10, and a surface of the blocking plate 14 close to the first shock absorbing rod 13 is fixedly connected to the first shock absorbing rod 13;

[0079] The first shock absorbing spring 15 is disposed in the first shock absorbing groove 10 , and one end of the first shock absorbing spring 15 close to the blocking plate 14 is fixedly connected to the blocking plate 14 .

[0080] It should be noted that when the flower basket end plates 1 on both sides vibrate, the first shock-absorbing rod 13 slides into the first shock-absorbing groove 10, so that the blocking plate 14 fixedly connected to the first shock-absorbing rod 13 slides into the first shock-absorbing groove 10, thereby compressing the first shock-absorbing spring 15, so that the first shock-absorbing spring 15 converts kinetic energy into elastic potential energy, thereby achieving shock absorption for the silicon wafer flower basket and preventing the silicon wafer flower basket from tipping over to a certain extent.

[0081] The second shock absorbing part is arranged on the cushion block 4, and the second shock absorbing part is used to further alleviate the impact on the flower basket end plate 1, and the second shock absorbing part includes:

[0082] A second shock absorbing rod 16 is fixedly disposed on the surface of the cushion block 4 close to the cushion plate 5, and the second shock absorbing rod 16 is slidably connected to the second shock absorbing groove 11;

[0083] A second shock absorbing spring 17, sleeved on the second shock absorbing rod 16;

[0084] It should be noted that when the flower basket end plates 1 on both sides vibrate, the second shock absorbing rod 16 slides into the second shock absorbing groove 11, and the cushion block 4 arranged on the flower basket end plate 1 applies a force to the second shock absorbing spring 17, so that the second shock absorbing spring 17 is compressed, thereby converting the kinetic energy into the elastic potential energy of the second shock absorbing spring 17, thereby further realizing the shock absorbing of the silicon wafer flower basket and further preventing the silicon wafer flower basket from tipping over;

[0085] The pressure sensor 18 is located in the built-in groove 12 and is detachably fixedly connected to the pad 5. The pressure sensor 18 is electrically connected to the control device 36. The pressure sensor 18 is used to detect the pressure of the second shock-absorbing spring 17 on the pressure sensor 18 in real time.

[0086] Reference Figures 1 to 12 , an axial anti-falling mechanism is arranged on the shock absorbing mechanism, the axial anti-falling mechanism is electrically connected to the control device 36, and the axial anti-falling mechanism is used to prevent the silicon wafer flower basket from falling in the direction of the axis of the flower basket support rod 2, and the axial anti-falling mechanism includes:

[0087] The limiting rod 19 is located between the two flower basket end plates 1, and the two ends of the limiting rod 19 are respectively fixedly connected to the adjacent flower basket end plates 1;

[0088] The adjusting part is arranged on the pad 5 and is electrically connected to the control device 36. The adjusting part is used to adjust the center of gravity of the silicon wafer basket according to the values ​​of the pressure sensors 18 on the pads 5 on both sides. The adjusting part includes:

[0089] The regulating motor 20 is arranged on the backing plate 5 on either side and is detachably fixedly connected to the backing plate 5. The regulating motor 20 is electrically connected to the control device 36.

[0090] The adjusting screw 21 is arranged on the backing plate 5, and one end of the adjusting screw 21 close to the adjusting motor 20 is fixedly connected to the output end of the adjusting motor 20;

[0091] The counterweight block 22 is arranged on the adjusting screw 21 and is threadedly connected to the adjusting screw 21. The counterweight block 22 is slidably connected to the limiting rod 19. It should be noted that by providing the counterweight block 22, the center of gravity of the silicon wafer flower basket is greatly lowered, thereby avoiding the silicon wafer flower basket from tipping over due to excessively high center of gravity to a certain extent.

[0092] During operation, the pressure sensors 18 arranged on the pads 5 on both sides monitor the pressure of the second shock absorbing springs 17 on both sides in real time. When the silicon wafer basket is fully loaded with silicon wafers, the values ​​measured by the pressure sensors 18 on the pads 5 on both sides are equal. When the values ​​measured by the pressure sensors 18 on the pads 5 on both sides are not equal, the control device 36 controls the counterweight 22 in the axial anti-fall mechanism to move to the side with the smaller value measured by the pressure sensor 18 until the values ​​measured by the pressure sensors 18 on the pads 5 on both sides are equal. Specifically, the control device 36 controls the start of the adjusting motor 20 to rotate the adjusting screw 21 fixedly connected to the output end of the adjusting motor 20, and the threaded transmission between the adjusting screw 21 and the counterweight 22 makes the counterweight 22 slide on the limit rod 19 until the counterweight 22 slides to the corresponding position so that the values ​​measured by the pressure sensors 18 on the pads 5 on both sides are equal.

[0093] The device is provided with an axial anti-falling mechanism, so that the device can dynamically adjust the center of gravity position of the silicon wafer basket according to the values ​​measured by the pressure sensors 18 on the pads 5 on both sides of the silicon wafer basket, thereby preventing the silicon wafer basket from falling due to the center of gravity shift of the silicon wafer basket due to external force impact or unstable operation during transportation or operation.

[0094] Reference Figures 1 to 12 , a side anti-falling mechanism is arranged on the shock absorbing mechanism, the side anti-falling mechanism is electrically connected to the control device 36, and the side anti-falling mechanism is used to prevent the silicon wafer flower basket from tipping over in a direction perpendicular to the axis of the flower basket support rod 2, and the side anti-falling mechanism includes:

[0095] The connection frame 23 is fixedly arranged on the backing plate 5. Two groups of connection frames 23 are arranged on the backing plate 5. The connection frames 23 are provided with a reset groove 24.

[0096] A fixing frame 25, fixedly arranged on the connecting frame 23;

[0097] The plug-in part is arranged in the connection frame 23, and is used to stabilize the connection between the two pads 5 to prevent the silicon wafer flower basket from tipping over in a direction perpendicular to the axis of the flower basket support rod 2. The plug-in part includes:

[0098] The plug connector 26 is slidably disposed in the connection frame 23, and one end of the plug connector 26 close to the plug rod 7 is set to be hemispherical, and one end of the plug connector 26 close to the plug rod 7 is matched with the ball head groove 8;

[0099] A connecting rod 27 is located in the connecting frame 23, and one end of the connecting rod 27 close to the plug connector 26 is fixedly connected to the plug connector 26;

[0100] A sliding block 28 is slidably disposed in the connecting frame 23, and one end of the sliding block 28 close to the connecting rod 27 is fixedly connected to the connecting rod 27, and a wedge-shaped groove 29 is formed on the surface of the sliding block 28 close to the reset groove 24;

[0101] The built-in spring 30 is disposed in the connecting frame 23 , and two ends of the built-in spring 30 are fixedly connected to the connecting frame 23 and the sliding block 28 respectively, and the built-in spring 30 is always in a compressed state.

[0102] When it is necessary to connect the various silicon wafer flower baskets together, the insertion rod 7 is inserted into the connection groove 6. At this time, the insertion rod 7 that slides into the connection groove 6 applies pressure to the plug connector 26, so that the plug connector 26 slides in the direction of the built-in spring 30. As the insertion rod 7 continues to slide in the direction of the pop-up spring 34 until the insertion rod 7 is completely inserted into the connection groove 6, the plug connector 26 loses the force of the insertion rod 7 on it and slides into the ball head groove 8 on the insertion rod 7 under the action of the built-in spring 30, thereby stabilizing the insertion rod 7 in the connection groove 6, thereby realizing the connection of various silicon wafer flower baskets. By connecting various silicon wafer flower baskets together, the contact area between the silicon wafer flower basket and the supporting surface is further increased, thereby further preventing the silicon wafer flower basket from tipping over in the direction perpendicular to the axis of the flower basket support rod 2;

[0103] The device is provided with a side anti-falling mechanism so that each silicon wafer basket can be connected together, thereby further increasing the contact area between the silicon wafer basket and the supporting surface, making it easier for the center of gravity of the silicon wafer basket to fall within the supporting surface, thereby further increasing the stability of the silicon wafer basket. At the same time, the friction between the silicon wafer basket as a whole and the contact surface is increased by increasing the contact area, and the pressure can be distributed more evenly, thereby avoiding instability caused by local overload of the silicon wafer basket, thereby reducing the possibility of tipping.

[0104] Reference Figures 1 to 12, a reset portion is arranged in the fixing frame 25 and is electrically connected to the control device 36, and the reset portion is used to slide the plug-in portion into the connecting frame 23, and the reset portion includes:

[0105] The electric push rod 31 is fixedly disposed in the fixing frame 25 and is electrically connected to the control device 36;

[0106] The wheel plate 32 is fixedly disposed on one end of the electric push rod 31 close to the sliding block 28;

[0107] The reset roller 33 is rotatably disposed on the wheel plate 32 , and the reset roller 33 is rollingly connected to the wedge-shaped groove 29 .

[0108] The connecting groove 6 is provided with a pop-up portion, and the pop-up portion includes:

[0109] A pop-up spring 34 is disposed in the connecting groove 6 and fixedly connected to the backing plate 5;

[0110] The pop-up plate 35 is slidably disposed in the connection slot 6 , and the surface of the pop-up plate 35 close to the pop-up spring 34 is fixedly connected to the pop-up spring 34 .

[0111] When it is necessary to disassemble the connected silicon wafer baskets, the control device 36 only needs to control the electric push rod 31 to start, so that the wheel plate 32 fixedly connected to the electric push rod 31 moves in the direction of the wedge-shaped groove 29, and then the reset roller 33 rotatably connected to the wheel plate 32 moves in the direction of the wedge-shaped groove 29 until the reset roller 33 contacts the wedge-shaped groove 29 on the sliding block 28. As the reset roller 33 continues to move away from the electric push rod 31, the reset roller 33 applies a force to the sliding block 28, so that the sliding block 28 moves inward. The sliding block 28 slides in the direction of the built-in spring 30, thereby causing the connecting rod 27 fixedly connected to the sliding block 28 to slide in the direction of the built-in spring 30, driving the plug connector 26 fixedly connected to the connecting rod 27 to slide in the direction of the built-in spring 30, until the plug connector 26 is separated from the plug rod 7 and slides into the connecting frame 23. At this time, the compressed pop-up spring 34 releases its elastic potential energy, thereby pushing the pop-up plate 35 to slide in the direction away from the pop-up spring 34, so that the pop-up plate 35 pushes the plug rod 7 away from the connecting groove 6, thereby realizing the disassembly of the connected silicon wafer baskets;

[0112] The device is provided with a plug-in part, so that the staff can easily connect the various silicon wafer flower baskets together, thereby further increasing the contact area between the silicon wafer flower basket and the corresponding supporting surface, thereby further avoiding the silicon wafer flower basket from tipping over in the direction perpendicular to the axis of the flower basket support rod 2. The reset part and the pop-up part are provided, so that the staff can easily disassemble the various silicon wafer flower baskets connected together.

[0113] Working principle: Refer to Figures 1 to 12 When working, the pressure sensors 18 arranged on the pads 5 on both sides monitor the pressure of the second shock absorbing springs 17 on both sides in real time. When the silicon wafer basket is fully loaded with silicon wafers, the values ​​measured by the pressure sensors 18 on the pads 5 on both sides are equal. When the values ​​measured by the pressure sensors 18 on the pads 5 on both sides are not equal, the control device 36 controls the counterweight 22 in the axial anti-fall mechanism to move to the side with the smaller value measured by the pressure sensor 18 until the values ​​measured by the pressure sensors 18 on the pads 5 on both sides are equal. Specifically, the control device 36 controls the start of the adjusting motor 20 to rotate the adjusting screw 21 fixedly connected to the output end of the adjusting motor 20, and the threaded transmission between the adjusting screw 21 and the counterweight 22 makes the counterweight 22 slide on the limit rod 19 until the counterweight 22 slides to the corresponding position so that the values ​​measured by the pressure sensors 18 on the pads 5 on both sides are equal.

[0114] When it is necessary to connect the various silicon wafer flower baskets together, the insertion rod 7 is inserted into the connecting groove 6. At this time, the insertion rod 7 sliding into the connecting groove 6 exerts pressure on the plug connector 26, so that the plug connector 26 slides in the direction of the built-in spring 30. As the insertion rod 7 continues to slide in the direction of the pop-up spring 34 until the insertion rod 7 is fully inserted into the connecting groove 6, the plug connector 26 loses the force of the insertion rod 7 on it and slides into the ball head groove 8 on the insertion rod 7 under the action of the built-in spring 30, thereby stabilizing the insertion rod 7 in the connecting groove 6, thereby realizing the connection of the various silicon wafer flower baskets. By connecting the various silicon wafer flower baskets together, the contact area between the silicon wafer flower basket and the supporting surface is further increased, thereby further preventing the silicon wafer flower basket from tipping over in the direction perpendicular to the axis of the flower basket support rod 2.

[0115] When it is necessary to disassemble the connected silicon wafer baskets, the control device 36 only needs to control the electric push rod 31 to start, so that the wheel plate 32 fixedly connected to the electric push rod 31 moves in the direction of the wedge-shaped groove 29, and then the reset roller 33 rotatably connected to the wheel plate 32 moves in the direction of the wedge-shaped groove 29 until the reset roller 33 contacts the wedge-shaped groove 29 on the sliding block 28. As the reset roller 33 continues to move away from the electric push rod 31, the reset roller 33 applies a force to the sliding block 28, so that the sliding block 28 moves inward. The pop-up plate 35 slides in the direction of the built-in spring 30, thereby causing the connecting rod 27 fixedly connected to the sliding block 28 to slide in the direction of the built-in spring 30, driving the plug connector 26 fixedly connected to the connecting rod 27 to slide in the direction of the built-in spring 30, until the plug connector 26 is separated from the plug rod 7 and slides into the connecting frame 23. At this time, the compressed pop-up spring 34 releases its elastic potential energy, thereby pushing the pop-up plate 35 to slide in the direction away from the pop-up spring 34, so that the pop-up plate 35 pushes the plug rod 7 away from the connecting groove 6, thereby realizing the disassembly of the connected silicon wafer baskets.

[0116] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A silicon wafer flower basket with an anti-dumping function, comprising a flower basket end plate (1), wherein two flower basket end plates (1) are provided, and a plurality of flower basket support rods (2) are provided between the two flower basket end plates (1), and each of the flower basket support rods (2) is provided with a silicon wafer groove (3) for placing silicon wafers, characterized in that: The silicon wafer flower basket with anti-dumping function also includes: A cushion block (4) is fixedly arranged on the flower basket end plate (1), and two cushion blocks (4) are symmetrically arranged on each flower basket end plate (1); A pad (5) is located directly below the pad block (4), one end of the pad (5) is provided with a connecting groove (6), the other end of the pad (5) is fixedly provided with an insertion rod (7), the surface of the insertion rod (7) is provided with two symmetrically arranged ball head grooves (8), both sides of the pad (5) are provided with rod grooves (9) connected to the connecting groove (6), the pad (5) is provided with two groups of first shock absorbing grooves (10), and the two groups of first shock absorbing grooves (10) are symmetrically distributed on the pad (5), the pad (5) is provided with two groups of second shock absorbing grooves (11), and the two groups of second shock absorbing grooves (11) are symmetrically distributed on the pad (5), and the outer side of the second shock absorbing groove (11) is provided with a built-in groove (12); A control device (36) fixedly mounted on the backing plate (5); A shock absorbing mechanism is arranged on the cushion block (4), the shock absorbing mechanism is electrically connected to the control device (36), and the shock absorbing mechanism is used to alleviate the impact on the flower basket end plate (1); An axial anti-falling mechanism is arranged on the shock absorbing mechanism, the axial anti-falling mechanism is electrically connected to the control device (36), and the axial anti-falling mechanism is used to prevent the silicon wafer flower basket from falling in the direction of the axis of the flower basket support rod (2); A side anti-fall mechanism is arranged on the shock absorbing mechanism, the side anti-fall mechanism is electrically connected to the control device (36), and the side anti-fall mechanism is used to prevent the silicon wafer flower basket from tipping over in a direction perpendicular to the axis of the flower basket support rod (2).

2. The silicon wafer flower basket with anti-dumping function according to claim 1, characterized in that: The shock absorbing mechanism comprises: A first shock absorbing portion, arranged on the cushion block (4), the first shock absorbing portion being used to alleviate the impact on the flower basket end plate (1); A second shock absorbing portion is arranged on the cushion block (4), and the second shock absorbing portion is used to further alleviate the impact on the flower basket end plate (1).

3. The silicon wafer flower basket with anti-dumping function according to claim 2, characterized in that: The first shock absorbing part comprises: A first shock absorbing rod (13) is fixedly arranged on a surface of the cushion block (4) close to the cushion plate (5), and the first shock absorbing rod (13) is slidably connected to the first shock absorbing groove (10); A blocking plate (14) is slidably disposed in the first shock absorbing groove (10), and a surface of the blocking plate (14) close to the first shock absorbing rod (13) is fixedly connected to the first shock absorbing rod (13); A first shock absorbing spring (15) is arranged in the first shock absorbing groove (10), and one end of the first shock absorbing spring (15) close to the blocking plate (14) is fixedly connected to the blocking plate (14).

4. The silicon wafer flower basket with anti-dumping function according to claim 3, characterized in that: The second shock absorbing part comprises: A second shock absorbing rod (16) is fixedly arranged on a surface of the cushion block (4) close to the cushion plate (5), and the second shock absorbing rod (16) is slidably connected to the second shock absorbing groove (11); A second shock absorbing spring (17) sleeved on the second shock absorbing rod (16); A pressure sensor (18) is located in the built-in groove (12) and is detachably fixedly connected to the backing plate (5). The pressure sensor (18) is electrically connected to the control device (36). The pressure sensor (18) is used to detect the pressure of the second shock absorbing spring (17) on the pressure sensor (18) in real time.

5. The silicon wafer flower basket with anti-dumping function according to claim 4, characterized in that: The axial anti-fall mechanism comprises: A limiting rod (19) is located between two flower basket end plates (1), and two ends of the limiting rod (19) are respectively fixedly connected to adjacent flower basket end plates (1); An adjustment unit is provided on the pad (5) and is electrically connected to the control device (36), and is used to adjust the center of gravity of the silicon wafer basket according to the values ​​of the pressure sensors (18) on the pads (5) on both sides.

6. The silicon wafer flower basket with anti-dumping function according to claim 5, characterized in that: The adjustment unit comprises: an adjusting motor (20) disposed on the backing plate (5) on either side and detachably fixedly connected to the backing plate (5); the adjusting motor (20) being electrically connected to the control device (36); An adjusting screw rod (21) is arranged on the backing plate (5), and one end of the adjusting screw rod (21) close to the adjusting motor (20) is fixedly connected to the output end of the adjusting motor (20); The counterweight block (22) is disposed on the adjusting screw rod (21) and is threadedly connected to the adjusting screw rod (21); the counterweight block (22) is slidably connected to the limiting rod (19).

7. The silicon wafer flower basket with anti-dumping function according to claim 6, characterized in that: The side anti-fall mechanism comprises: A connection frame (23) is fixedly arranged on the backing plate (5), two groups of connection frames (23) are arranged on the backing plate (5), and a reset groove (24) is opened on the connection frame (23); A fixing frame (25) fixedly arranged on the connecting frame (23); A plug-in portion, arranged in the connection frame (23), the plug-in portion being used to stabilize the connection between the two pads (5) to prevent the silicon wafer flower basket from tipping over in a direction perpendicular to the axis of the flower basket support rod (2); A reset portion is arranged in the fixing frame (25) and is electrically connected to the control device (36), and the reset portion is used to slide the plug-in portion into the connection frame (23).

8. The silicon wafer flower basket with anti-dumping function according to claim 7, characterized in that: The plug-in portion comprises: A plug connector (26) is slidably disposed in the connection frame (23); an end of the plug connector (26) close to the plug rod (7) is configured to be hemispherical; and an end of the plug connector (26) close to the plug rod (7) is matched with the ball head groove (8); A connecting rod (27) is located in the connecting frame (23), and one end of the connecting rod (27) close to the plug connector (26) is fixedly connected to the plug connector (26); A sliding block (28) is slidably disposed in the connecting frame (23), and one end of the sliding block (28) close to the connecting rod (27) is fixedly connected to the connecting rod (27), and a wedge-shaped groove (29) is formed on the surface of the sliding block (28) close to the reset groove (24); The built-in spring (30) is arranged in the connecting frame (23), and two ends of the built-in spring (30) are respectively fixedly connected to the connecting frame (23) and the sliding block (28), and the built-in spring (30) is always in a compressed state.

9. The silicon wafer flower basket with anti-dumping function according to claim 8, characterized in that: The reset unit comprises: An electric push rod (31) is fixedly disposed in the fixing frame (25) and is electrically connected to the control device (36); A wheel plate (32) is fixedly arranged on one end of the electric push rod (31) close to the sliding block (28); A reset roller (33) is rotatably disposed on the wheel plate (32), and the reset roller (33) is rollingly connected to the wedge-shaped groove (29).

10. The silicon wafer flower basket with anti-dumping function according to claim 9, characterized in that: A pop-up portion is provided in the connection groove (6), and the pop-up portion comprises: A pop-up spring (34) is disposed in the connecting groove (6) and fixedly connected to the backing plate (5); The pop-up plate (35) is slidably disposed in the connection groove (6), and the surface of the pop-up plate (35) close to the pop-up spring (34) is fixedly connected to the pop-up spring (34).

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