Multi-axis displacement simultaneous measurement device using optical system

Abstract

The device is characterized by comprising a test mirror, an X axis, a Y axis and a Z axis, and the test mirror can swing around the X axis and the Y axis; a first lens through which incident light and reflected light incident to the reference point pass; a second lens disposed along the optical axis of the reflected light; a first sensor that detects the movement of the test mirror on the XY axis on the basis of the light receiving position of the light transmitted through the second lens; a first light source disposed perpendicular to the optical axis of the reflected light; a first beam splitter forming incident light incident to the first lens, the reflected light passing through the first lens passing through the first beam splitter; a second beam splitter that reflects a portion of the reflected light that has passed through the first beam splitter and causes the reflected light to enter a second lens; a second sensor which receives the reflected light of the second beam splitter and detects the X-axis and Y-axis swing angles of the test mirror based on the light receiving position; a second light source that emits light toward the reference point; and a third sensor that detects the movement of the test mirror on the Z-axis on the basis of the light receiving position of the reflected light.

Description

Technical Field

[0001] The invention relates to a displacement measuring device which can simultaneously measure the movement of a rigid body in various axial directions caused by external force by using an optical system. Background Art

[0002] At present, with the development of camera lenses and camera-related technologies, more accurate and clearer photos can be taken. With the development of these camera-related technologies, users' demands for taking clearer and higher-quality photos are increasing, and technologies that sense shaking caused by user hand shaking and automatically correct the effects of such shaking have emerged.

[0003] This shake correction technology can be achieved by sensing the movement of the device caused by hand shaking, etc., and performing reverse calculation correction on the sensed movement. As a result, a technology that wants to accurately sense the movement of the above-mentioned device, that is, a rigid body, has emerged.

[0004] The usual method for detecting the motion of this rigid body is to detect the motion of the rigid body for each axis, wherein three modules are used to detect the motion of the rigid body on the X-axis and Y-axis, the module to detect the motion on the Z-axis, and the module to detect the swing (tilt) in the X-axis direction and the swing in the Y-axis direction. The motion of the above-mentioned rigid body is detected for each axis.

[0005] This conventional rigid body motion detection method uses three modules that are separately constructed in order to detect the accurate motion of the rigid body, so there is a problem that the detection module for detecting the rigid body motion is large in size and volume.

[0006] Furthermore, in the case of a conventional rigid body motion detection module, since multiple (for example, three) different individual modules measure the motion of the rigid body separately, it is difficult to measure the motion of the rigid body at the same time, and there is a problem that the multiple modules need to be controlled separately. Therefore, research is currently being actively conducted to achieve control convenience by simultaneously detecting the motion of the rigid body in multiple axis directions. Summary of the invention

[0007] Technical issues

[0008] The present invention is made to solve the above-mentioned problem and provides a multi-axis displacement simultaneous measuring device capable of simultaneously measuring the movement of a rigid body in multi-axis directions, that is, multi-axis displacement.

[0009] Furthermore, in order to solve the above-mentioned problem, the present invention provides a multi-axis displacement simultaneous measurement device capable of detecting the movement of the above-mentioned rigid body in multi-axis directions by one measurement device.

[0010] Means of solving the problem

[0011] A multi-axis displacement simultaneous measurement device according to an embodiment of the present invention for achieving the above-mentioned purpose is characterized in that it includes a measuring unit, which has: a test mirror, which is combined with a rigid body and is formed to be able to move along the X-axis, Y-axis and Z-axis directions and can swing around the X-axis or Y-axis as the rigid body moves; a first lens, through which incident light incident on a reference point formed on the test mirror and reflected light reflected by the test mirror pass; a second lens, which is arranged along the optical axis of the reflected light, so that the incident light passes through and becomes parallel light; a first sensor, which detects the movement of the test mirror on the X-axis and the Y-axis based on the light receiving position of the parallel light passing through the second lens; a first light source, which is arranged perpendicular to the optical axis of the reflected light; a first beam splitter, which is arranged between the first lens and the second lens. lenses, reflecting the light of the first light source to form incident light incident on the first lens, and the reflected light incident on the first lens after passing through the first lens passes through the first beam splitter; a second beam splitter, which is arranged between the first lens and the second lens, reflects a part of the reflected light passing through the first beam splitter, and transmits the remaining part of the reflected light so that the remaining part of the reflected light is incident on the second lens; a second sensor, which receives a part of the reflected light reflected from the second beam splitter, and detects the X-axis or Y-axis swing angle of the test mirror based on the light receiving position; a second light source, which emits light toward the reference point; and a third sensor, which receives the light of the second light source reflected by the reference point, and detects the movement of the test mirror on the Z-axis based on the light receiving position.

[0012] In one embodiment, it is characterized in that the above-mentioned first lens includes a first surface formed to face the above-mentioned test mirror and a second surface formed to face the above-mentioned second lens, and the above-mentioned first lens is a lens formed in the following manner: when the light is incident on the above-mentioned first surface, the above-mentioned incident light passes through the above-mentioned second surface, and when the light is incident on the above-mentioned second surface, it passes through the above-mentioned first surface and then enters the above-mentioned test mirror.

[0013] In one embodiment, it is characterized in that the above-mentioned test mirror is configured at a first focal length which is the focal length of the above-mentioned first lens, the above-mentioned first lens and the above-mentioned second lens are configured to separate the sum of the above-mentioned first focal length and the second focal length which is the focal length of the above-mentioned second lens, and the above-mentioned first sensor is configured to be separated from the above-mentioned second lens by the second focal length.

[0014] In one embodiment, it is characterized in that a third lens formed by a convex lens is further provided between the above-mentioned second beam splitter and the above-mentioned second sensor, and the above-mentioned second sensor is arranged at a position where the above-mentioned third lens converges light, so that a part of the above-mentioned reflected light reflected from the above-mentioned second beam splitter forms a focus on the surface of the above-mentioned second sensor after being converged by the above-mentioned third lens.

[0015] In one embodiment, the feature is that it also includes: a fourth lens, formed between the above-mentioned first beam splitter and the above-mentioned first light source, and used to make the light of the above-mentioned first light source incident on the above-mentioned first beam splitter, wherein the above-mentioned first light source is located at the focal length of the lens group composed of the above-mentioned first lens, the above-mentioned first beam splitter, and the above-mentioned fourth lens, so that the light diverged from the above-mentioned first light source is incident on the above-mentioned first beam splitter after passing through the above-mentioned fourth lens, and forms parallel light that passes through the above-mentioned first lens after being reflected by the above-mentioned first beam splitter.

[0016] In one embodiment, it is characterized in that the light incident angle of the above-mentioned second light source and the light reflection angle of the above-mentioned second light source form a predetermined first angle with the optical axis formed by the light of the above-mentioned first light source reflected from the above-mentioned test mirror, and the above-mentioned predetermined first angle is an angle between 25 degrees and 40 degrees.

[0017] In one embodiment, it is characterized in that a fifth lens and a sixth lens are provided between the second light source and the reference point and between the reference point and the third sensor, respectively, the fifth lens is configured to converge light along the optical axis of light incident from the second light source to the reference point on the reference point through the fifth lens, and the third sensor is configured to converge light along the optical axis of reflected light of the second light source reflected from the reference point on the upper surface of the third sensor through the sixth lens.

[0018] In one embodiment, the feature is that the surface of the third sensor forms an angle Φ according to the following mathematical formula.

[0019] [Mathematical formula]

[0020]

[0021] The above-mentioned angle is the angle formed by the normal of the surface of the above-mentioned third sensor and the optical axis of the reflected light of the above-mentioned second light source, the above-mentioned normal is located on a plane determined by the optical axis of the reflected light of the above-mentioned second light source and the optical axis of the light incident on the above-mentioned reference point, and the above-mentioned angle is an angle measured in the counterclockwise direction from the optical axis of the reflected light of the above-mentioned second light source and has a positive sign, and the above-mentioned θ is the angle between the normal direction of the above-mentioned test mirror and the optical axis of the above-mentioned second light source, and the above-mentioned m is the lateral magnification of the above-mentioned sixth lens when the distance to the above-mentioned test mirror is set as the object distance and the distance to the above-mentioned third sensor is set as the image distance, which has a positive value.

[0022] In one embodiment, the measuring unit is characterized in that the measuring unit includes a sealed chamber surrounding the test mirror to prevent the scattered light of the test mirror from passing through, and the sealed chamber includes:

[0023] a first window formed between the first lens and the test mirror to allow incident light of the first light source incident from the test mirror and reflected light of the first light source reflected from the test mirror to pass therethrough; a second window formed between the fifth lens and the test mirror to allow incident light of the second light source incident to the test mirror to pass therethrough; and a third window formed between the sixth lens and the test mirror to allow reflected light of the second light source reflected by the test mirror to pass therethrough.

[0024] In one embodiment, the first window is configured so that a normal of the first window is inclined at a second predetermined angle relative to an optical axis formed by reflected light of the first light source reflected by the test mirror, and the second predetermined angle has an angle between 1 degree and 5 degrees according to a distance between the first window and the test mirror.

[0025] In one embodiment, the feature is that it includes: the above-mentioned measuring unit; a storage unit, which has a distance-displacement table corresponding to each of the first sensor to the third sensor of the above-mentioned measuring unit; and a control unit, which calculates the movement distance of the above-mentioned rigid body in the X-axis, Y-axis and Z-axis directions and the swing angle around the X-axis or Y-axis corresponding to the sensing value detected by each of the first sensor to the third sensor of the above-mentioned measuring unit based on the distance-displacement table corresponding to each of the first sensor to the third sensor.

[0026] In one embodiment, the control unit is characterized in that the control unit detects the planar movement direction of the rigid body according to the movement direction of the light receiving position of the first light source reflected light detected by the first sensor, detects the swing direction of the rigid body according to the movement direction of the light receiving position of the first light source reflected light detected by the second sensor, and detects the movement direction of the rigid body in the Z-axis direction according to the movement direction of the light receiving position of the second light source reflected light detected by the third sensor, thereby simultaneously detecting the movement of the rigid body in multiple axis directions.

[0027] In one embodiment, the test mirror has an area smaller than an area of ​​parallel light incident on the test mirror from the first lens.

[0028] Effects of the Invention

[0029] The effects of the multi-axis displacement simultaneous measurement device according to the present invention are described below.

[0030] According to at least one of the embodiments of the present invention, the present invention can simultaneously detect the movement of a rigid body in multiple axial directions by one measuring device, so it has the advantage of being able to realize the control convenience of detecting the above-mentioned rigid body movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 is a block diagram showing the structure of a multi-axis displacement simultaneous measurement device for detecting rigid body motion according to an embodiment of the present invention.

[0032] Figure 2 It is shown in the above Figure 1 A block diagram showing the structure of a measuring unit for measuring the displacement on each axis caused by the rigid body motion.

[0033] Figure 3 It shows the above Figure 2 An illustrative diagram of an example in which a measuring unit detects displacement caused by movement of a rigid body in an X-axis swing or a Y-axis swing direction.

[0034] Figure 4 It shows the above Figure 2 1 is an illustrative diagram of an example in which a measuring unit detects displacement caused by movement of a rigid body in the X-axis direction or the Y-axis direction.

[0035] Figure 5 It shows the above Figure 2 illustrative diagram of an example in which a measuring unit detects displacement caused by movement of a rigid body in the Z-axis direction.

[0036] Figure 6 This is an illustrative diagram showing a configuration of a measuring unit including a window for preventing scattered light generated by a test mirror mounted on a rigid body.

[0037] Figure 7 1 is an illustrative diagram showing an example in which the first window is arranged along the Z-axis direction perpendicular to the rigid body.

[0038] Figure 8 The flowchart shows the operation process of measuring rigid body motion by the multi-axis displacement simultaneous measurement device according to an embodiment of the present invention.

[0039] Fig. 9 The above is shown in more detail Figure 8 Flowchart of the process of calculating the displacement on each axis.

[0040] Fig.10a as well as Fig.10b 1 is an illustrative diagram showing an example in which the multi-axis displacement measuring device according to an embodiment of the present invention simultaneously measures the motion of a rigid body in five-axis directions. DETAILED DESCRIPTION

[0041] The technical terms used in this specification are only used to illustrate specific embodiments and are not used to limit the present invention. In addition, in the absence of other meanings clearly indicated in the context, the singular expressions used in this specification include multiple expressions. In this specification, the terms "having" or "including" should be interpreted as not including a part of the multiple constituent elements or steps recorded in the specification, or may also include additional constituent elements or steps, and should not be interpreted as necessarily including all of the multiple constituent elements or steps recorded in the specification.

[0042] Furthermore, in the process of describing the technology disclosed in this specification, if it is determined that a detailed description of a related known technology may obscure the technical spirit disclosed in this specification, the detailed description will be omitted.

[0043] When describing the drawings, similar reference numerals are used for similar elements. In addition, terms such as first and second may be used to describe various elements, but the above elements are not limited to these terms. The above terms are used to distinguish one element from other elements.

[0044] Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the relevant technology, and should not be interpreted as an idealized or overly formal meaning if not clearly defined in this application.

[0045] In addition, in the following description, "axis" means the axis of movement or rotation of a rigid body, and even axes in the same direction can be divided into different axes according to the movement of the rigid body. For example, the X-axis and Y-axis when the rigid body moves in plane, and the X-axis (hereinafter referred to as the swinging X-axis) and Y-axis (hereinafter referred to as the swinging Y-axis) that become the rotation axes when the rigid body rotates (tilts) can be axes in the same direction. However, the movement of a rigid body is different, so in the following description, the X-axis and Y-axis when the rigid body moves in plane, and the swinging X-axis and swinging Y-axis when the rigid body rotates are distinguished and described as different axes. Therefore, it is assumed that the five axes in the following description refer to the X-axis and Y-axis, the Z-axis, and the swinging X-axis and the swinging Y-axis.

[0046] first, Figure 1 is a block diagram showing the structure of a multi-axis displacement simultaneous measurement device 10 for detecting rigid body motion according to an embodiment of the present invention.

[0047] Reference Figure 1According to an embodiment of the present invention, the multi-axis displacement simultaneous measurement device 10 may include a control unit 100, a measurement unit 110 connected to the control unit 100, and a memory 120. In addition, the multi-axis displacement simultaneous measurement device 10 may also include an output unit 130 that outputs the rigid body motion measured under the control of the control unit 100. Figure 1 The components are not necessary components of the multi-axis displacement simultaneous measurement device 10 according to the embodiment of the present invention, and may not include a part of them or may further include more components.

[0048] First, the measuring unit 110 includes a test mirror mounted on the rigid body when the rigid body is configured, so that the displacement on at least one axis caused by the movement of the rigid body can be measured according to at least one light reflected from the test mirror. The test mirror can be a flat plate of a reflective material.

[0049] To this end, the measuring unit 110 may be configured to include a sensor unit 111 and a light source unit 112, wherein the sensor unit 111 includes a plurality of sensors for detecting the motion of the rigid body on each axis, and the light source unit includes a plurality of light sources for emitting light incident on the test mirror in order to detect the motion of the rigid body on each axis. The light source unit 112 may be composed of an LD (laser diode), an LED (light emitting diode), or a lamp that emits not only light in the visible light band but also light in the non-visible band, such as ultraviolet UV or infrared band.

[0050] The measuring unit 110 may constitute an optical system including a plurality of light sources, a plurality of lenses and a plurality of beam splitters of the light source unit 112. The lens may be a single lens or a composite lens composed of a plurality of lenses combined. In addition, the measuring unit 110 may measure the moving distance and moving direction of the reflected light reflected from the test mirror through the optical system through various sensors.

[0051] Refer to the following Figures 2 to 7 The configuration of an optical system including the light source unit 112 , that is, a plurality of light sources, the plurality of lenses, and the beam splitter in the measurement unit 110 will be described in detail.

[0052] On the other hand, the measuring unit 110 can provide the control unit 100 with information about the sensing values ​​of each sensor of the sensor unit 111, that is, the distance and direction of movement of the reflected light. Therefore, the control unit 100 can detect the movement of the measurement object, that is, the rigid body, for multiple axes based on the moving distance and moving direction of the reflected light received from the measuring unit 110. To this end, the control unit 100 can calculate the displacement on each axis corresponding to the moving distance and direction of the reflected light based on at least one distance-displacement table of each axis pre-stored in the memory 120.

[0053] On the other hand, generally, the control unit 100 can control the overall operation of the multi-axis displacement simultaneous measurement device 10. For example, the control unit 100 controls the power supply of the sensor unit 111 and the light source unit 112 provided in the measurement unit 110, thereby controlling the ON or OFF of the measurement unit 110. Furthermore, the control unit 100 can be formed to connect to each sensor of the sensor unit 111 when the measurement unit 110 is powered on, thereby receiving the sensing values ​​of each sensor.

[0054] Furthermore, the control unit 100 can read the distance-displacement table of each axis pre-stored in the memory 120, and calculate the displacement on each axis corresponding to the sensing value of each sensor according to the value of the read table. In addition, when the multi-axis displacement simultaneous measurement device 10 includes an output unit 130, the calculated displacement on each axis can be outputted as the motion of the rigid body through the output unit 130.

[0055] The memory 120 may include programs and data for the operation of the control unit 100. For example, the memory 120 may store the sensing values ​​of the sensors of the measuring unit 110 received by the control unit 100 and the displacements on the axes calculated by the control unit 100 for the sensing values. In addition, a distance-displacement table may be stored for each of the multiple axes, and the distance-displacement table is used by the control unit 100 to calculate the displacements on the axes for the sensing values.

[0056] For example, the memory 120 may include an XY-axis distance-displacement table for calculating the displacement caused by movement on the X-axis or Y-axis, a Z-axis distance-displacement table for calculating the displacement on the Z-axis, and an XY swing distance-displacement table for calculating the X-axis swing displacement or the Y-axis swing displacement.

[0057] Among them, each sensor of the above-mentioned measuring unit 110 can detect the moving distance and direction of the reflected light used to detect the displacement on different axes. For example, the first sensor of the sensor unit 111 can be a sensor for detecting the movement of the reflected light caused by the movement of the rigid body on the X-axis or Y-axis. In addition, the second sensor can be a sensor for detecting the movement of the reflected light caused by the X-axis swing (tilting) or Y-axis swing of the rigid body. And the third sensor can be a sensor for detecting the movement of the reflected light caused by the movement of the rigid body on the Z-axis.

[0058] Therefore, the sensors corresponding to the distance-displacement tables set for the sensor unit 111 may be different from each other. For example, in the case where the sensing values ​​sensed by the first sensor to the third sensor of the sensor unit 111 are as described above, the XY axis distance-displacement table may correspond to the first sensor. In addition, the XY swing distance-displacement table may correspond to the second sensor. In addition, the Z axis distance-displacement table may correspond to the third sensor. Then, the control unit 100 detects the displacement corresponding to the sensing value of each sensor from the tables corresponding to each sensor, and the displacement on each axis of the rigid body may be detected based on the detected displacement.

[0059] On the other hand, in the above description, the case where the memory 120 includes a table containing information about the displacement on each axis based on the reflected light moving distance is described as an example, but differently from this, the memory 120 can also include information about the displacement on each axis based on a preset unit distance for each axis. In this case, the control unit 100 can calculate the displacement on each axis corresponding to the reflected light moving distance based on the sensor sensing value based on the displacement based on the above unit distance stored in the memory 120. In this case, for each axis (such as: X-axis and Y-axis, Z-axis, swing X-axis and swing Y-axis), even if the unit distance is the same, the displacement can be different. And, of course, the unit distance corresponding to the same displacement can also be different. In addition, for the above X-axis, Y-axis, and Z-axis, as a displacement based on the reflected light moving distance, the distance can be calculated, but for the above swing X-axis and swing Y-axis, as a displacement based on the reflected light moving distance, the angle of rigid body swing can be calculated.

[0060] On the other hand, according to the control of the control unit 100, the output unit 130 outputs the calculated displacements on the above-mentioned axes as the detected motion of the above-mentioned rigid body. To this end, the output unit 130 may include at least one of a display unit capable of outputting visual information or a sound output unit capable of outputting sound information. Alternatively, the output unit 130 may include a communication module for communicating in accordance with a pre-set communication method. In this case, the output unit 130 may transmit the information on the displacements on the above-mentioned axes calculated by the above-mentioned control unit 100 to a pre-set device using the above-mentioned communication module, thereby outputting information on the detected motion of the above-mentioned rigid body.

[0061] on the other hand, Figure 2 It shows the above Figure 1 2 is a block diagram showing the configuration of a measuring unit 110 for measuring the displacement on each axis caused by the rigid body motion.

[0062] Reference Figure 2 First, a test mirror 250 combined with or mounted on a rigid body to be measured can be arranged at the center of the bottom surface of the measuring unit 110 of the present invention. The test mirror 250 can include a mounting portion 260 that can be combined with the rigid body, and the mounting portion 260 can be formed to be able to move freely along multiple axes (for example, 5 axes).

[0063] Among them, the axis perpendicular to the plane on which the above-mentioned test mirror 250 is configured can be called the Z axis. When the center of the above-mentioned test mirror 250 is assumed to be the origin of the above-mentioned Z axis, with the above-mentioned origin (i.e., the reference point) as the center, the left and right direction of the above-mentioned test mirror 250 can form an X axis, and the front and back direction of the above-mentioned test mirror 250 can form a Y axis.

[0064] On the other hand, when the test mirror 250 rotates (sways) around the X-axis direction as the rigid body (not shown) coupled to the mounting portion 260 moves, the axis (X-axis) of the test mirror 250's swing may have the same direction as the X-axis. Also, when the test mirror rotates (sways) around the Y-axis direction as the rigid body moves, the axis (Y-axis) of the test mirror's swing may have the same direction as the Y-axis. However, the movement of the rigid body is different, so in order to distinguish from the X-axis and Y-axis, the X-axis and Y-axis of the test mirror's swing are distinguished as a swinging X-axis and a swinging Y-axis. Therefore, in addition to moving along the X-axis, Y-axis, and Z-axis, the test mirror 250 may also move in at least one of the swinging X-axis and swinging Y-axis directions as the rigid body moves.

[0065] In this case, the center of the test mirror is located at the origin of the Z axis, the X axis, and the Y axis, and the rigid body is in a non-swinging state, that is, a horizontal state, so that the state in which the test mirror is consistent with the plane formed by the X axis and the Y axis can be referred to as the reference state. That is, the state in which the test mirror 250 coupled to the rigid body through the mounting portion 260 does not move or rotate is referred to as the reference state.

[0066] Next, an optical system including a plurality of light sources, a plurality of lenses, and a plurality of beam splitters in the measuring unit 110 will be described based on the reference state.

[0067] First, the first lens 231, the first beam splitter 221, the second beam splitter 222, the second lens 232, and the first sensor 201 may be sequentially arranged along the Z axis perpendicular to the test mirror 250 in the reference state. The first lens 231 may be a lens for refracting light incident along the Z axis into parallel light and then causing it to enter the test mirror 250.

[0068] On the other hand, the first beam splitter 221 may reflect a portion of the light incident from the first light source 211 to the first lens 231 , wherein the first light source 211 is arranged along the X-axis or the Y-axis perpendicular to the Z-axis. The remaining portion of the light incident from the first light source 211 may pass through the first beam splitter 221 .

[0069] A fourth lens 234 may be disposed between the first light source 211 and the first beam splitter 221. On the other hand, the light emitted from the first light source 211 is incident on the first beam splitter 221 after passing through the fourth lens 234, and may be reflected by the first beam splitter 221 to the first lens 231. In addition, through the combination of the fourth lens 234 and the first lens 231, the light emitted from the first light source 211 may become parallel light and be incident on the test mirror 250. That is, the light emitted from the first light source 211 may be incident on the test mirror 250 in parallel, which may be achieved through the combination of the fourth lens 234 and the first lens 231. To this end, the first light source 211 may be located at the focal position of the lens group formed by the fourth lens 234 and the first lens 231. Among them, the first light source 211 may be a point light source.

[0070] On the other hand, the light divided and reflected by the first beam splitter 221 may be incident on the test mirror 250 through the first lens 231. In addition, the light may be reflected by the test mirror 250. Thus, the light reflected by the test mirror 250 may be incident on the first lens 231.

[0071] On the other hand, the reflected light of the test mirror 250 that has passed through the first lens 231 may be incident on the second beam splitter 222 that is disposed after the first beam splitter 221 along the Z-axis with the origin as a reference.

[0072] In addition, part of the reflected light of the test mirror 250 incident on the second beam splitter 222 can be transmitted in the Z-axis direction through the second beam splitter 222, and the remaining part is reflected in the X-axis or Y-axis direction perpendicular to the Z-axis through the second beam splitter 222. As an example, the second beam splitter 222 can transmit 50% of the incident light and reflect 50%.

[0073] On the other hand, the reflected light of the test mirror 250 reflected by the second beam splitter 222 may be incident on the third lens 233. Thus, a part of the reflected light of the test mirror 250 reflected by the second beam splitter 222 passes through the third lens 233 and converges toward the focus of the third lens 233.

[0074] In addition, the light reflected by the second beam splitter 222 may be converged on the upper surface of the second sensor 202 through the third lens 233. Therefore, the second sensor 202 can detect the position of a portion of the reflected light of the test mirror 250 that is converged by the third lens 233 and converged on the second sensor 202. In this case, the test mirror 250 is the reference position, so the light-converging position detected by the second sensor 202 may also be the reference position.

[0075] On the other hand, if the test mirror 250 performs X-axis swing or Y-axis swing, the test mirror 250 may be tilted due to the swing. In addition, when the test mirror 250 is tilted, the angle at which the reflected light reflected by the test mirror 250 is incident on the lens surface of the first lens 231 may change. Therefore, the path of the light passing through the first lens 231 may change according to the incident light.

[0076] Therefore, the path of the light incident on the second beam splitter 222 may be changed, and thereby the focal position formed on the third lens 233 may be changed. That is, the focusing position detected by the second sensor 202 may be moved from the reference position.

[0077] On the other hand, the larger the swing angle of the test mirror 250 is, the larger the movement amplitude of the light-concentrating position detected by the second sensor 202 is. That is, the distance and direction of the light-concentrating position of the light reflected by the test mirror 250 detected by the second sensor 202 moving from the reference position may correspond to the X-axis swing state or the Y-axis swing state of the test mirror 250. Therefore, based on the distance and direction of the light-concentrating position of the light reflected by the test mirror 250 moving in the second sensor 202, the control unit 100 may detect the X-axis swing state or the Y-axis swing state of the test mirror 250. That is, the second sensor 202 may be a sensor for detecting the X-axis swing state or the Y-axis swing state of the test mirror 250.

[0078] On the other hand, a portion of the reflected light of the test mirror 250 passing through the second beam splitter 222 may be incident on the second lens 232. The second lens 232 may be a convex lens. In this case, the second lens 232 is located at a distance exceeding the focal length of the convex lens of the first lens 231, so that, like a Keplerian telescope, the light diverging from the convex lens of the first lens 231 after passing through the focal length is refracted into parallel light by the second lens 232.

[0079] In this case, the separation distance between the convex lens of the first lens 231 and the test mirror 250 can be the focal length f1 of the convex lens of the first lens 231, and the second lens 232 can be separated from the convex lens of the first lens 231 by a distance (f1+f2) equal to the sum of the focal length f1 of the convex lens of the first lens 231 and the focal length f2 of the second lens 232, so that the light passing through the second lens 232 becomes parallel light. In addition, along the Z-axis direction, the first sensor 201 can be arranged after the second lens 232. The first sensor 201 and the second lens 232 can be separated by the focal length f2 of the second lens 232.

[0080] On the other hand, as described above, the convex lens of the first lens 231 and the second lens 232 can form a Keplerian telescope structure. That is, the first lens 231 and the second lens 232 can be Keplerian lenses. Therefore, the reflected light of the test mirror 250 can pass through the first lens 231 and be inverted and incident on the second lens 232. In addition, the parallel light passing through the second lens 232 can be incident on the first sensor 201. Therefore, when the position of the test mirror 250 moves along the X-axis or Y-axis direction, the movement of the test mirror 250 can be detected truthfully on the first sensor 201, as observed through a telescope. It should be noted that, due to the structure of the Keplerian telescope with an inverted image formed between the objective lens and the eyepiece, the image formed on the first sensor 201 by the reflected light of the test mirror 250 can move in the opposite direction to the movement of the test mirror 250.

[0081] On the other hand, along the first oblique line direction tilted at a preset angle θ relative to the Z axis with the origin, i.e., the center of the test mirror in the reference state as a reference, the fifth lens 235 and the second light source 212 may be sequentially arranged. In addition, along the second oblique line direction facing the first oblique line where the fifth lens 235 and the second light source 212 are arranged and also tilted at a preset angle θ with the center of the test mirror in the reference state as a reference, the sixth lens 236 and the third sensor 203 may be arranged.

[0082] As described above, the first oblique line and the second oblique line are inclined at the same angle θ relative to the Z axis with reference to the above-mentioned origin, so the above-mentioned third sensor 203 is configured at the same angle (reflection angle) as the incident angle of the light emitted from the second light source 212 incident on the center of the test mirror 250, thereby the light emitted from the above-mentioned second light source 212 can be incident on the third sensor 203 after being reflected by the above-mentioned test mirror 250.

[0083] In this case, the fifth lens 235 and the sixth lens 236 may be formed of convex lenses. In addition, the distance between the fifth lens 235 and the test mirror 250 may correspond to the position where the emitted light of the second light source 212 converges through the fifth lens 235, and the converged light may be reflected at the test mirror 250. In addition, the distance between the sixth lens 236 and the third sensor 202 may correspond to the distance at which the reflected light converges through the sixth lens 236.

[0084] Therefore, the light emitted from the second light source 212 can be refracted by the fifth lens 235 and converged at a location of the test mirror 250. For example, when the test mirror 250 is in a reference state, the light can be converged at a central location (focus), and the light converged at the focus can be reflected by the test mirror 250. In this case, the incident angle of the second light source 212 is the preset angle θ, so the reflection angle also forms the preset angle θ, whereby the light of the second light source 212 reflected and diverged from the test mirror 250 is incident on the sixth lens 236, and is refracted again into a form that converges from the sixth lens 236 toward the focus direction of the sixth lens.

[0085] Therefore, when the third sensor 203 is separated from the sixth lens 236 by the focusing distance of the sixth lens 236, the light refracted from the sixth lens 236 converges on the surface of the third sensor 203, thereby forming a focus. In this case, when the test mirror 250 is in a reference state, that is, in a Z-axis origin state, the position of the test mirror reflected light detected by the third sensor 203 may be a position corresponding to the Z-axis position of the test mirror 250.

[0086] On the other hand, when the test mirror 250 moves in the Z-axis direction, the position where the light of the second light source 212 converges on the test mirror 250 may change. Therefore, the position of the reflected light in the test mirror 250 may also change, and the change of the focusing position causes the image of the sixth lens 236 to change, so that the position of the reflected light from the test mirror detected by the third sensor 203 may change.

[0087] For example, when the test mirror 250 moves in a direction along the Z-axis direction where the first sensor 201 is arranged (hereinafter referred to as an upper direction), the position where the light of the second light source 212 is incident may change according to the upward movement of the test mirror 250. Therefore, since the image is inverted at the focus of the test mirror 250, the position of the test mirror reflected light detected by the third sensor 203 may move in the direction opposite to the movement of the test mirror 250. That is, it may move downward along the Z-axis direction.

[0088] Therefore, the control unit 100 can detect the movement state of the test mirror 250 on the Z axis based on the distance and direction of the focusing position of the reflected light of the test mirror 250 in the third sensor 203. That is, the third sensor 203 can be a sensor for detecting the movement displacement of the test mirror 250 on the Z axis.

[0089] Among them, regarding the above-mentioned preset angle θ formed by the above-mentioned first oblique line and the second oblique line with the above-mentioned Z axis based on the origin, the larger the angle is, the more accurately the displacement of the above-mentioned test mirror 250 on the Z axis can be calculated. However, as the above-mentioned preset angle θ becomes larger, the volume of the displacement measuring device according to the embodiment of the present invention may also become larger, so in order to minimize the volume, the above-mentioned preset angle θ can be determined within the range of 25 degrees to 40 degrees.

[0090] On the other hand, when the test mirror 250 moves according to at least one of the displacements in the five-axis directions, the optical system constructed as the measuring unit 110 can simultaneously perform the following detections: based on the positional movement of the test mirror 250 reflected light detected by the first sensor 201, the displacements of the test mirror 250 in the X-axis direction and the Y-axis direction can be detected; based on the positional movement of the test mirror 250 reflected light detected by the second sensor 202, the swing X-axis angle and the swing Y-axis angle of the test mirror 250 can be detected; based on the positional movement of the test mirror 250 reflected light detected by the third sensor 203, the displacement of the test mirror 250 in the Z-axis direction can be detected. That is, the measuring unit 110 can simultaneously measure at least one of the displacements in the five-axis directions (X-axis displacement, Y-axis displacement, Z-axis displacement, swing X-axis angle, swing Y-axis angle) of the test mirror 250 through the optical system constructed as described above.

[0091] An example in which the displacement of the test mirror 250 is detected by the first sensor 201 to the third sensor 203 will be described in further detail below.

[0092] Figure 3 It shows the above Figure 2 1 and 2 are diagrams showing an example in which the measuring unit 110 detects displacement caused by movement of the test mirror 250, which is a rigid body, in the X-axis swing or Y-axis swing direction.

[0093] First, refer to Figure 3 (a), Figure 3 (a) shows an example when the test mirror 250 is in a reference state.

[0094] like Figure 3 (a), when the test mirror 250 is not swung around the X-axis or Y-axis, the light emitted from the first light source 211 can be incident on the first beam splitter 221 through the fourth lens 234. In this case, the first beam splitter 221 is configured to reflect the light incident from the X-axis or Y-axis perpendicular to the Z-axis downward along the Z-axis. To this end, the first beam splitter 221 can be configured so that the reflection surface is at an angle of 45 degrees relative to the Z-axis.

[0095] So, as mentioned above Figure 3(a) shows that the light emitted from the first light source 211 arranged on the X-axis or Y-axis perpendicular to the Z-axis can be incident on the fourth lens 234. In this case, the light of the first light source 211 is incident on the surface of the fourth lens 234 facing the first light source 211, and can be transmitted to the surface facing the first beam splitter 221. Therefore, the light of the first light source 211 can be incident on the first beam splitter 221.

[0096] In this case, as described above, the first beam splitter 221 is configured such that the reflection surface is at an angle of 45 degrees relative to the Z axis, so the parallel light of the converged first light source 211 can be incident along the Z axis toward the lower direction where the test mirror 250 is configured after being reflected by the first beam splitter 221. Therefore, the light incident on the surface of the first lens 231 facing the first beam splitter 221 (hereinafter referred to as the first surface) can pass through the surface of the first lens 231 facing the test mirror 250 (hereinafter referred to as the second surface). Therefore, the light incident on the first lens 231 can be incident on the test mirror 250 in the form of parallel light.

[0097] On the other hand, as described above, the test mirror 250 is not swung around the X-axis or Y-axis direction, so it can reflect in the same direction as the incident angle, that is, in the direction perpendicular to the Z-axis. Therefore, it can be incident on the second surface of the first lens 231.

[0098] On the other hand, as described above, the first lens 231 may be a lens that transmits light in a manner that allows light incident on the first surface to pass through the second surface and allows parallel light incident on the second surface to converge along the focal direction on the first surface. Therefore, the reflected light of the test mirror 250 that passes through the first lens 231 may converge to a focal point according to the focal length of the first lens 231, and may be inverted and divergent when passing through the focal length.

[0099] On the other hand, Figure 3 (a) shows that the light passing through the first lens 231 may be inverted at the focal length of the first lens 231 after passing through the first beam splitter 221, and may diverge when passing through the focal length.

[0100] On the other hand, the second beam splitter 222 may be a beam splitter with a reflective surface so as to reflect light incident from the lower part of the Z axis toward the X axis or the Y axis. In this case, the reflective surface of the second beam splitter 222 may be configured to be at an angle of 135 degrees relative to the Z axis. Figure 3 (a) shows that the reflected light of the test mirror 250 that diverges when passing through the above focal length is reflected by the reflective surface of the second beam splitter 222 in the X-axis direction or the Y-axis direction.

[0101] On the other hand, a third lens 233 composed of a convex lens and the second sensor 202 may be arranged in a direction corresponding to the reflection surface of the second beam splitter 222. Therefore, the third lens 233 may transmit light in such a manner that the reflected light reflected by the reflection surface of the second beam splitter 222 converges in the focal direction of the third lens 233. The second sensor 202 is arranged at a position where the light is converged by the third lens 233, so the light converged by the third lens 233 may form a focal point on the surface of the second sensor 202.

[0102] In this state, the test mirror 250 can swing with the X-axis or Y-axis direction as a reference. Figure 3 (b) shows that it is conceivable that the test mirror 250 swings with the Y axis as a reference (Y-axis swing).

[0103] In this case, as the test mirror 250 swings, the reflection angle of the test mirror 250 may change. Figure 3 (b) shows that when the test mirror 250 is swung along the Y-axis, the test mirror 250 tilts as the Y-axis swings, so the reflection angle of the test mirror 250 decreases (assuming that it decreases when tilted to the right with respect to the Z-axis, and increases when tilted to the left).

[0104] So, if Figure 3 (b) shows that, as the incident angle of the reflected light reflected by the test mirror 250 to the first lens 231 changes, the incident angle of the light incident to the second beam splitter 222 changes. That is, assuming that the reference state is a state where light is irradiated from the second surface of the first lens 231, the test mirror 250 is as follows: Figure 3 The swinging state as shown in (b) may be a state where light is irradiated from the right side of the second surface of the first lens 231 .

[0105] Therefore, the incident angle of the light incident on the reflection surface of the second beam splitter 222 changes, so the reflection angle of the light reflected by the reflection surface of the second beam splitter 222 may also change. Figure 3 (b) shows that the position of the reflected light focused on the second sensor 202 after passing through the third lens 233 may change.

[0106] The position of the reflected light focused on the second sensor 202 may change according to the swing angle of the test mirror 250. That is, the greater the swing angle of the test mirror 250, the greater the change in the reflection angle of the test mirror 250, and thus the reflection angle of the light reflected by the reflection surface of the second beam splitter 222 also changes greatly. Therefore, the position of the reflected light focused on the second sensor 202 also moves to a farther distance relative to the position of the reflected light detected in the reference state. That is, the moving distance of the reflected light detected by the second sensor 202 may correspond to the swing angle of the test mirror 250.

[0107] On the other hand, if the swing direction of the test mirror 250 changes, the moving direction of the reflected light may also change. Figure 3 (b) shows that when the test mirror 250 performs Y-axis swing, according to the above Figure 3 In the structure of the optical system shown, the position of the reflected light focused on the second sensor 202 can move in the Z-axis direction. However, in the case where the test mirror 250 performs X-axis swing, the position of the reflected light focused on the second sensor 202 can move in the Y-axis direction due to the change in the reflection angle caused by the tilt direction of the test mirror 250. That is, the moving direction of the reflected light detected by the second sensor 202 can correspond to the swing direction of the test mirror 250. Therefore, the control unit 100 can detect the swing angle and the swing direction of the test mirror 250 based on the distance and direction in which the reflected light focusing position on the second sensor 202 corresponding to the reference state moves along with the movement of the test mirror 250, that is, detect the swing displacement in the X-axis or Y-axis direction.

[0108] on the other hand, Figure 4 It shows the above Figure 2 1 and 2. An illustrative diagram of an example in which the measuring unit detects displacement caused by movement of a rigid body, namely, the test mirror 250, in the X-axis direction or the Y-axis direction.

[0109] First, refer to Figure 4 (a), as in the above Figure 3 It is explained in FIG. 2 that the light of the first light source 211 incident on the first surface of the fourth lens 234 can be incident on the first surface of the first lens 231 after being reflected by the reflection surface of the first beam splitter 221. Therefore, through the combination of the fourth lens 234 and the first lens 231, parallel light can be incident on the test mirror 250.

[0110] The area of ​​the test mirror 250 may be smaller than the area of ​​the incident parallel light. Figure 4(a) shows that only a portion of the parallel light incident on the test mirror 250 through the first lens 231 can be reflected by the test mirror 250. In addition, only a portion of the reflected parallel light can be incident on the first sensor 201 through the first lens 231 to the second lens 232 along the optical axis.

[0111] Therefore, if the test mirror 250 is in the reference state, Figure 4 (a) shows that the light is reflected in the vertical direction along the Z axis (optical axis) and then enters the center of the first lens 231 , and can be transmitted in a direction converging toward the focal direction of the first lens 231 .

[0112] The first beam splitter 221 and the second beam splitter 222 may be arranged within the focal length of the first lens 231. Therefore, the light passing through the reflection surface of the first beam splitter 221 may form a focus at the focal length of the first lens 231. In addition, an inverted image may be formed and diverged when passing through the focus. In addition, the diverged light may pass through the reflection surface of the second beam splitter 222.

[0113] On the other hand, along the Z axis, a second lens 232 and a first sensor 201 may be disposed after the second beam splitter 222. The second lens 232 may be formed as a convex lens. Therefore, the reflected light of the test mirror 250 passing through the second beam splitter 222 is divergent and incident on the second lens 232. Thus, the light incident on the second lens 232 may be converted into parallel light and then incident on the first sensor 201. Therefore, the position of the reflected light may be detected at the central portion of the first sensor 201.

[0114] The test mirror 250 may be disposed at the focal length (first focal length: f1) of the first lens 231. In addition, the first lens 231 and the second lens 232 may be separated by a distance (f1+f2) equal to the sum of the first focal length f1 and the focal length (second focal length: f2) of the second lens 232. In addition, the first sensor 201 may be disposed at a distance from the second lens 232 equal to the second focal length f2. The first lens 231 and the test mirror 250 may be separated by the first focal length f1.

[0115] Therefore, the first lens 231 can function as an objective lens of a Keplerian telescope, and the second lens 232 can function as an eyepiece of a Keplerian telescope. That is, the image of the test mirror 250 (hereinafter referred to as a reflected image) formed by reflecting the light incident from the first light source 211 can be inverted at the focal point between the first lens 231 and the second lens 232, and formed on the first sensor 201.

[0116] Therefore, when the position of the test mirror 250 moves in the X-axis or Y-axis direction, the reflected image formed on the first sensor 201 can move along with the movement of the test mirror 250. In this case, the reflected image is an inverted image, so it can move in the direction opposite to the moving direction of the test mirror 250.

[0117] The light incident on the test mirror 250 may be larger (wider) than the test mirror 250. In this case, only a portion corresponding to the size of the test mirror 250 is reflected by the test mirror 250, and can pass through the first lens 231. Therefore, when the test mirror 250 is displaced on the X-axis and the Y-axis, the position of a portion of the reflection changes, and thus the optical path of the reflected light passing through the first lens 231 upward and incident on the first sensor 201 may also change.

[0118] On the other hand, the image is inverted at the focal length, so Figure 4 (b) shows that when the test mirror 250 moves to the right in the X-axis direction, the reflected image can move in the same X-axis direction as the axis along which the test mirror 250 moves, i.e., to the left in the direction opposite to the moving direction of the test mirror 250.

[0119] Therefore, the control unit 100 can detect the displacement of the test mirror 250 in the X-axis or Y-axis direction based on the distance and direction in which the reflected image moves from the position of the reflected image detected in the reference state as the test mirror 250 moves.

[0120] Figure 5 It shows the above Figure 2 1 is an illustrative diagram of an example in which the measuring unit 110 detects displacement caused by movement of a rigid body, namely, a test mirror 250, in the Z-axis direction.

[0121] As described above, in order to detect the displacement on the Z axis caused by the movement of the test mirror 250, in addition to the above Figure 3 as well as Figure 4 In addition to the structure described in the figure, the optical system of the measuring part 110 according to the embodiment of the present invention can also include a fifth lens 235 and a second light source 212 arranged along a first oblique line, and a sixth lens 236 and a third sensor 203 arranged along a second oblique line, wherein the first oblique line is inclined at a predetermined angle θ relative to the Z axis with the origin, that is, the center of the test mirror 250 in a reference state, as a reference, and the second oblique line is inclined at the predetermined angle θ relative to the Z axis with the origin as a reference in the direction facing the first oblique line.

[0122] In this case, the second light source 212 may be configured to emit light toward the origin along the first oblique line. In addition, a fifth lens 235 composed of a convex lens may be disposed between the second light source 212 and the origin (test mirror 250). In this case, the separation distance between the fifth lens 235 and the origin may be set so that the light from the second light source 212 converges after passing through the fifth lens 235. Therefore, the light diverging from the second light source 212 passes through the fifth lens 235 and may converge on the test mirror 250. Therefore, the light converged on the test mirror 250 may be reflected by the test mirror 250.

[0123] In addition, the reflected light of the test mirror 250 may be reflected at a reflection angle corresponding to the incident angle of the light of the second light source 212 incident on the test mirror 250, that is, the pre-set angle θ. In this case, the incident angle is the same as the reflection angle, so the reflected light of the test mirror 250 may travel along the second oblique line. That is, the sixth lens 236 and the third sensor 203 may be configured according to the reflection angle of the light of the second light source 212 reflected by the test mirror 250 in the reference state.

[0124] The fifth lens 235 is composed of a convex lens, so the reflected light of the test mirror 250 can be reflected in a divergent manner with the focus formed on the test mirror 250 as the center. Then, the divergent reflected light can be incident on the sixth lens 236 composed of a convex lens. Therefore, the reflected light passes through the sixth lens 236 and is refracted again to converge toward the focus direction.

[0125] On the other hand, the sixth lens 236 and the third sensor 203 may be separated by a distance corresponding to the position where the light incident on the fifth lens 236 converges. Therefore, the reflected light of the test mirror 250 converges through the sixth lens 236 and may form a focus on the surface of the third sensor 203. In particular, with respect to the surface of the third sensor 203, the normal direction of the surface of the third sensor 203 and the optical axis of the reflected light, i.e., the second oblique line, may form an angle Φ according to the following mathematical formula 1.

[0126] [Mathematical formula 1]

[0127]

[0128] The angle is an angle formed by a normal line of a surface of the third sensor and an optical axis of the reflected light of the second light source, the normal line is located on a plane defined by an optical axis of the reflected light of the second light source and an optical axis of the light incident on the reference point, and the angle is an angle measured counterclockwise from the optical axis of the reflected light of the second light source and has a positive sign,

[0129] The above-mentioned θ is the angle between the normal direction of the above-mentioned test mirror and the optical axis of the above-mentioned second light source, and the above-mentioned m is the lateral magnification of the above-mentioned sixth lens when the distance with the above-mentioned test mirror is set as the object distance and the distance with the above-mentioned third sensor is set as the image distance, which has a positive value.

[0130] on the other hand, Figure 5 (b) shows that by forming as described above Figure 5 The optical system of (a) detects the position of the reflected light of the test mirror 250 detected by the third sensor 203 when the light of the second light source 212 is reflected by the test mirror 250 in the reference state. For example, when the test mirror 250 is in the reference state, Figure 5 FIG. 5( b ) shows that the reflected light of the test mirror 250 can be focused on the central location of the third sensor 203 .

[0131] In this state, if the test mirror 250 moves in the Z-axis direction, the position of the light focused on the upper surface of the test mirror 250 may change. At this time, the defocusing of the light point caused by the change of the Z-axis position is ignored.

[0132] That is, Figure 5 (c) shows that if the test mirror 250 moves upward in the Z-axis direction of the rigid body, the position of the focal point focused on the upper surface of the test mirror 250 moves upward in the Z-axis direction, and more precisely, moves to the right in the X-axis direction. Therefore, the image of the sixth lens 236 of the optical system that uses the position of the focal point as the object distance also changes position, and the third sensor 203 can sense the change.

[0133] On the contrary, if the test mirror 250 moves downward in the Z-axis direction of the rigid body, the position of the focal point focused on the upper surface of the test mirror 250 moves downward in the Z-axis direction, and more precisely, moves to the left in the X-axis direction. Therefore, the position of the image of the sixth lens 236 changes, and the third sensor 203 can sense the change.

[0134] On the other hand, as mentioned above Figure 2 It is shown that, when an optical system is formed, a portion of the light from the light source may be reflected or scattered in an unexpected direction through the test mirror 250 or the beam splitter. Therefore, in order to prevent such unexpected reflected light or scattered light (hereinafter referred to as scattered light) from entering an unexpected light path and to allow the light to enter through a specified light path, the multi-axis displacement simultaneous measurement device 10 according to an embodiment of the present invention may have a window (window) through which light can pass in each light path.

[0135] Figure 62 is a diagram showing an example of the configuration of the measurement unit 110 including such a window for preventing scattered light.

[0136] Reference Figure 6 , the optical system formed in the measuring unit 110 according to the embodiment of the present invention may have light paths in three directions. That is, a first light path 611 may be formed in which the light of the first light source 211 is reflected by the first beam splitter 221 and then incident on the test mirror 250, and the light reflected by the test mirror 250 is incident on the second beam splitter 222, a second light path 612 may be formed in which the light of the second light source 212 is incident on the test mirror 250, and a third light path 613 may be formed in which the light of the second light source 212 reflected by the test mirror 250 is incident on the third sensor 203. Therefore, the measuring unit 110 according to the embodiment of the present invention may have a first window 601 arranged on the first light path 611, a second window 602 arranged on the second light path 612, and a third window 603 arranged on the third light path 613.

[0137] The first window 601 may be disposed between the first lens 231 and the test mirror 250, and more specifically, may be disposed adjacent to the second surface of the first lens 231. The second window 602 and the third window 603 may also be disposed between the fifth lens 235 and the test mirror 250 and between the sixth lens 236 and the test mirror 250. Similarly, the second window 612 and the third window 613 may be disposed adjacent to the fifth lens 235 and the sixth lens 236, respectively.

[0138] On the other hand, the test mirror 250 may be formed so that light cannot pass through except for the windows 611, 612, and 613. Figure 6 As shown, the chamber 610 is formed so that light cannot penetrate except for the areas where the windows 611, 612, and 613 are formed. In this case, the interior of the chamber 610 can be treated as a dark room, and no unexpected reflected light or scattered light can be absorbed.

[0139] In addition, the measuring part 110 can also be processed as a sealed chamber so as to avoid noise caused by ambient light when the first sensor 201, the second sensor 202 and the third sensor 203 detect the reflected light of the test mirror 250. In this case, the measuring part 110 can be formed by a first sealed chamber 610 structure including an area where windows 611, 612 and 614 are formed and a second sealed chamber 620 structure including the entire measuring part 110.

[0140] On the other hand, in the case where such a measuring unit 110 includes a window, the reflected light of the first light source 211 reflected by the test mirror 250 may be reflected by the first window 601. In this case, at least a portion of the light reflected by the first window 601 is incident on the first sensor 201 or the second sensor 202 or the third sensor 203, thereby causing a problem that the measurement accuracy may be reduced. Therefore, in order to prevent the reflected light from flowing into the first window 601, the first window 601 may be configured so that the normal direction of the first window 601 forms a predetermined angle with the Z axis, i.e., the first light path 611.

[0141] Figure 7 2 is an illustrative diagram showing an example in which the first window 601 is arranged as described above.

[0142] Reference Figure 7 , the first window 601 can be configured such that the normal of the first window 601 is tilted at a predetermined angle ψ relative to the first optical path 611, i.e., the Z axis formed with the center of the test mirror 250 as the origin. As described above, the first window 601 is configured such that the normal of the first window 601 is inconsistent with the optical axis (first optical path 611), thereby preventing the light reflected by the surface of the first window 601 from entering the sensor. That is, by tilting the first window 601 as described above, it is possible to prevent the light incident on the first window 601 from the first lens 231 in addition to the reflected light of the test mirror 250 from being reflected by the first window 601 and sensed by the sensor.

[0143] The predetermined angle ψ may be between 1 degree and 5 degrees.

[0144] On the other hand, in the above Figures 2 to 7 The optical system formed in the measuring unit 110 and the example of simultaneously detecting the motion of the test mirror 250 in five axes (X, Y, Z, X-axis swing, Y-axis swing) by the first sensor to the third sensor through the optical system are described in the following description. The operation process of the control unit 100 detecting the displacement caused by the rigid body motion based on the measurement result of the measuring unit 110 is described.

[0145] first, Figure 8 1 is a flowchart showing an operation process of the multi-axis displacement simultaneous measurement device 10 according to an embodiment of the present invention measuring the displacement caused by the rigid body motion using the measurement result of the measurement unit 110 .

[0146] Reference Figure 8 , the control unit 100 of the multi-axis displacement simultaneous measurement device 10 may drive the light source unit 112 of the measurement unit 110 to simultaneously turn on a plurality of light sources included in the light source unit 112 (S800). In this case, if the measurement unit 110 includes the Figure 2 In the optical system shown, the first light source 211 and the second light source 212 are turned on at the same time and can emit light.

[0147] In this state, the test mirror 250 moves with the movement of the rigid body, as in the above Figure 3 As described in the figure, the focusing position of the reflected light (the reflected light of the first light source 211) of the test mirror 250 detected by the second sensor 202 can be moved according to the X-axis or Y-axis swing state of the test mirror 250. Figure 4 It is explained that the position of the reflection image (the reflection image of the light from the first light source 211) of the test mirror 250 detected by the first sensor 201 can move according to the X-axis or Y-axis movement of the test mirror 250. In this case, the direction in which the reflection image of the test mirror 250 moves in the first sensor 201 can be the opposite direction to the direction in which the test mirror 250 moves.

[0148] And, as mentioned above Figure 5 It is explained that when the test mirror 250 moves in the Z-axis direction, the focusing position of the reflected light (reflected light for the light of the second light source 212) of the test mirror 250 detected by the third sensor 203 can move according to the movement on the Z-axis. Therefore, according to the detection results of the first sensor 201, the second sensor 202 and the third sensor 203, the movement state of the test mirror 250 in the X-axis or Y-axis direction, the swing state of the X-axis or Y-axis and the movement state on the Z-axis can be detected simultaneously. In this case, the control unit 100 can detect the moving distance and moving direction of the reflected light for the light of the first light source 211 and the reflected light for the light of the second light source 212 by each of the first sensor 201, the second sensor 202 and the third sensor 203 (S802).

[0149] Then, the control unit 100 can calculate the displacement of the test mirror 250 in each axis direction based on the moving distance and moving direction of the multiple reflected lights detected in the above step S802 (S804). For example, the control unit 100 calculates the displacement in each axis direction detected by the movement of the test mirror 250 according to the distance-displacement table for each sensor in the memory 120. Fig. 9 The process of calculating the displacement in each axial direction in the above-mentioned step S804 will be described in more detail.

[0150] When the displacement on each axis is calculated in the above step S804, the control unit 100 may output the calculated displacement on each axis in a predetermined manner (S806). For example, the control unit 100 may output the calculated displacement on each axis in a visual manner.

[0151] On the other hand, the user can detect the accuracy of the measurement unit 110 by comparing the displacement on each axis of the output with the displacement on each axis of the actual movement of the rigid body. Alternatively, in the case where the rigid body is a driving module that moves according to the control of the control unit 100, the control unit 100 can compare the displacement on each axis calculated with the control value of the driving module in the above step S806. In this case, the control unit 100 can determine whether the rigid body moves correctly according to the control of the control unit 100 by comparing the control value of the rigid body with the displacement on each axis calculated.

[0152] On the other hand, as mentioned above, Fig. 9 This is a flowchart showing in more detail the operation procedure of the above-mentioned step S804 of calculating the displacement on each axis based on the moving distance and direction of the light receiving position of the reflected light in each sensor.

[0153] Reference Fig. 9 First, the control unit 100 may detect at least one sensor among the sensors whose light receiving position of the reflected light, i.e., the reflected light or the reflected image focused at the focal point, has moved (S900). In this case, when there is a specific sensor whose light receiving position of the reflected light has not moved, the control unit 100 may determine that the rigid body has not moved in the direction corresponding to the specific sensor. Therefore, the control unit 100 may not detect the specific sensor in the above step S900.

[0154] In step S900, if at least one sensor detects the movement of the light receiving position of the reflected light, the control unit 100 can determine at least one axis of the movement of the rigid body based on the number and type of the detected sensors. In addition, the moving direction of the rigid body can be determined based on the determined axis (S902).

[0155] For example, if the movement of the light receiving position in the first sensor 201 is detected, the control unit 100 can determine that the rigid body moves in at least one direction of the X-axis and the Y-axis. In this case, the control unit 100 can determine the moving direction of the rigid body based on the vector component corresponding to the opposite direction of the moving direction of the light receiving position.

[0156] Furthermore, if the movement of the light receiving position in the third sensor 203 is detected, the control unit 100 can determine that the rigid body moves in the Z-axis direction. In this case, the control unit 100 can determine the movement direction of the rigid body in the Z-axis as the opposite direction of the movement direction of the light receiving position.

[0157] In addition, if the movement of the light receiving position in the second sensor 202 is detected, the control unit 100 can determine that the rigid body is swinging around the X axis or the Y axis. In this case, the direction of the swing of the rigid body can be determined based on the moving direction of the light receiving position.

[0158] After determining the moving direction of the rigid body as described above, the control unit 100 can detect the distance-displacement table corresponding to each sensor where the light receiving position moves from the memory 120 (S904). In this case, the distance-displacement table can be a table including displacement information on each axis corresponding to the moving distance of the light receiving position. In this case, the distance-displacement table corresponding to the first sensor 201 and the third sensor 203 can include information about different distances of the rigid body movement corresponding to different moving distances of the light receiving position, and the distance-displacement table corresponding to the second sensor 202 can include information about different angles of rotation of the rigid body corresponding to different moving distances of the light receiving position.

[0159] Thus, the control unit 100 can detect the displacement on each axis caused by the movement of the rigid body based on at least one distance-displacement table detected in the above step S904 (S906). For example, the control unit 100 can determine at least one of the moving distance on the X axis and the moving distance on the Y axis according to the moving direction of the rigid body determined in the above step S902 (the vector component corresponding to the opposite direction of the moving direction of the light receiving position). In addition, based on the distance-displacement table corresponding to the first sensor 201 (for example: XY axis distance-displacement table), the displacement corresponding to at least one of the moving distance on the X axis and the moving distance on the Y axis determined above can be detected. In addition, based on the distance-displacement table corresponding to the third sensor 203 (for example: Z axis distance-displacement table), the displacement corresponding to the moving distance of the light receiving position detected by the above third sensor 203 can be detected. And, based on the distance-displacement table corresponding to the second sensor 202 (for example: XY swing distance-displacement table), the control unit 100 can detect the displacement corresponding to the moving distance of the light receiving position detected by the above second sensor 202. In this case, the detected displacement may be the angle of the swing.

[0160] On the other hand, the distance-displacement table corresponding to each of the above-mentioned sensors may be a table including information about a unit displacement corresponding to a unit distance. That is, the distance-displacement table corresponding to the first sensor 201 may be a table including information about a displacement on the X-axis or Y-axis per unit distance for the moving distance of the light receiving position detected by the first sensor 201. And the distance-displacement table corresponding to the third sensor 203 may be a table including information about a displacement on the Z-axis per unit distance for the moving distance of the light receiving position detected by the third sensor 203. In addition, the distance-displacement table corresponding to the second sensor 202 may be a table including information about a swing angle per unit distance for the moving distance of the light receiving position detected by the second sensor 202. In this case, in the above-mentioned Fig. 9 In step S906, the control unit 100 can calculate the displacement on each axis based on the moving distance of the light receiving position of each sensor based on the unit displacement for the unit distance included in the distance-displacement table corresponding to each sensor.

[0161] on the other hand, Fig.10a as well as Fig.10b 1 is an illustrative diagram showing an example of simultaneously measuring the motion of a rigid body in five axis directions in the multi-axis displacement measuring device 10 according to an embodiment of the present invention. Fig.10a as well as Fig.10b (a) shows a detection example of the first sensor 201 , (b) shows a detection example of the second sensor 202 , and (c) shows a detection example of the third sensor 203 .

[0162] First, refer to Fig.10a , Fig.10a The light receiving positions of the reflected light detected by the first sensor 201, the second sensor 202, and the third sensor 203 when the test mirror 250 is in the reference state are shown. That is, it is assumed that when the test mirror 250 is in the reference state, that is, in a state where there is no rigid body motion, the reflected light reflected from the test mirror 250 is received at the center position of each sensor.

[0163] In the above case, the test mirror 250 moves to the right along the X-axis as the rigid body moves, and rotates clockwise with the Y-axis as the reference (Y-axis swings clockwise), and can move upward along the Z-axis. In this case, as the rigid body moves to the right along the X-axis, a portion of the reflected light of the first light source 211 received by the first sensor 201 can move to the left along the X-axis ( Fig.10b (a)).

[0164] Furthermore, as the Y-axis of the rigid body swings clockwise, the remaining part of the reflected light of the first light source 211 received by the second sensor 202 can move downward along the Z-axis. In this case, the second sensor 202 is arranged perpendicular to the first sensor 201, so it can be Fig.10b Similarly, as the rigid body moves in the Z-axis direction, the reflected light of the second light source 212 received by the third sensor 203 can move downward along the Z-axis. Fig.10b Detection as shown in (c).

[0165] As described above, with the movement of the rigid body, the light receiving position of the reflected light in the first sensor to the third sensor moves, as described above. Fig. 9 It is described in the figure that the control unit 100 can detect the direction in which the above-mentioned rigid body moves according to the direction in which the light receiving position in each sensor moves. In addition, according to the moving distance of the light receiving position in each sensor, the moving distance of the above-mentioned rigid body can be detected or calculated. In addition, according to the above-mentioned detected moving direction of the rigid body and the above-mentioned moving distance, the displacement on each axis caused by the movement of the above-mentioned rigid body can be detected.

[0166] On the other hand, in the above description of the present invention, specific embodiments are described, but various modifications can be implemented without departing from the scope of the present invention. In particular, although not shown in the embodiments of the present invention, a driving unit that moves or rotates the test mirror along at least one axial direction can be used as a rigid body. In this case, the driving unit is controlled by the control unit 100, and according to the control of the control unit 100, the test mirror moves (X-axis, Y-axis, or Z-axis) or rotates (X-axis swing Tx or Y-axis swing Ty) in at least one axial direction.

[0167] Then, the measuring unit 110 detects the moving distance and moving direction of the reflected light reflected by the test mirror that moves or rotates together with the rigid body that moves or rotates according to the control of the control unit 100 through the optical system, and the control unit 100 can calculate the rigid body motion based on the moving distance and moving direction detected by the measuring unit 110 as the displacement on each axis. In this case, it is needless to say that the control unit 100 can also compare the displacement on each axis detected by the measuring unit 110 with the control result of the driving unit to test the performance of the driving unit.

[0168] Furthermore, in the above-mentioned embodiment of the present invention, the first beam splitter, the fourth lens, and the first light source are arranged behind the first lens along the Z axis, and the second beam splitter, the third lens, and the second sensor are arranged behind the first beam splitter along the Z axis. However, this order can be changed. That is, the second beam splitter can be arranged after the first lens, and the third lens and the second sensor can be arranged to face the reflection surface of the second beam splitter. In addition, the first beam splitter can be arranged between the second beam splitter and the second lens, so as to reflect the light of the first light source along the Z axis. In this case, the light emitted from the first light source is incident on the test mirror after passing through the reflection surface of the first beam splitter and the reflection surface of the second beam splitter.

[0169] On the other hand, according to the above description, the first lens to the sixth lens may be a composite lens composed of at least one lens. In this case, the first lens to the sixth lens may also be formed by at least one convex lens.

[0170] According to other embodiments of the present invention, at least a portion of the first to sixth lenses, such as the first lens and the fourth lens, may be lenses constituting an optical system consisting of a convex lens and a concave lens. As an example, the first surface of the first lens and the fourth lens (the first lens: the surface facing the first beam splitter, the fourth lens: the surface facing the first light source) is formed as a convex lens, and the second surface (the first lens: the surface facing the test mirror, the fourth lens: the surface facing the first beam splitter) is formed as a concave lens. In this case, the distance between the convex lens and the concave lens constituting the first lens and the fourth lens may be greater than the focal length of the concave lens.

[0171] However, a person skilled in the art of the present invention may obtain various modifications and variations without departing from the essential features of the present invention. Therefore, the embodiments disclosed in the present invention are used to illustrate the technical ideas of the present invention, and are not used to limit the technical ideas of the present invention. The protection scope of the present invention should be interpreted based on the attached claims, and should be interpreted as all technical ideas within the scope equivalent to them are included in the protection scope of the present invention.

Claims

1. A multi-axis displacement simultaneous measurement device, which simultaneously measures the multi-axis position of a rigid body, characterized in that: The multi-axis displacement simultaneous measurement device comprises a measuring unit, which has: A test mirror, which is combined with the rigid body and is formed to be able to move along the X-axis, Y-axis and Z-axis directions and to swing around the X-axis or Y-axis as the rigid body moves; a first lens through which incident light incident on a reference point formed on the test mirror and reflected light reflected by the test mirror pass; A second lens is arranged along the optical axis of the reflected light to transmit the incident light and convert it into parallel light; A first sensor, which detects the movement of the test mirror on the X-axis and the Y-axis based on the light receiving position of the parallel light passing through the second lens; A first light source, which is arranged perpendicular to the optical axis of the reflected light; A first beam splitter is disposed between the first lens and the second lens, and reflects the light of the first light source to form incident light incident on the first lens, and the reflected light incident on the first lens passes through the first beam splitter; a second beam splitter disposed between the first lens and the second lens, reflecting a portion of the reflected light transmitted through the first beam splitter and transmitting the remaining portion of the reflected light so that the remaining portion of the reflected light is incident on the second lens; a second sensor that receives a portion of the reflected light reflected from the second beam splitter and detects an X-axis or Y-axis swing angle of the test mirror based on a light receiving position; a second light source emitting light toward the reference point; as well as The third sensor receives the light of the second light source reflected by the reference point and detects the movement of the test mirror on the Z axis based on the light receiving position.

2. The multi-axis displacement simultaneous measurement device according to claim 1, characterized in that: The first lens includes a first surface formed to face the test mirror and a second surface formed to face the second lens. The first lens is a lens formed such that when light is incident on the first surface, the incident light passes through the second surface, and when light is incident on the second surface, the light passes through the first surface and then enters the test mirror.

3. The multi-axis displacement simultaneous measurement device according to claim 1, characterized in that: The test mirror is arranged at a first focal length which is the focal length of the first lens. The first lens and the second lens are configured to separate the sum of the first focal length and a second focal length which is the focal length of the second lens. The first sensor is configured to be separated from the second lens by the second focal length.

4. The multi-axis displacement simultaneous measurement device according to claim 1, characterized in that: A third lens formed of a convex lens is further provided between the second beam splitter and the second sensor. The second sensor is disposed at a position where the third lens converges light so that a portion of the reflected light reflected from the second beam splitter is converged by the third lens and forms a focus on a surface of the second sensor.

5. The multi-axis displacement simultaneous measurement device according to claim 1, characterized in that: Also includes: a fourth lens formed between the first beam splitter and the first light source, so that the light from the first light source is incident on the first beam splitter, Among them, the above-mentioned first light source is located at the focal length of the lens group composed of the above-mentioned first lens, the above-mentioned first beam splitter, and the above-mentioned fourth lens, so that the light diverged from the above-mentioned first light source is incident on the above-mentioned first beam splitter after passing through the above-mentioned fourth lens, and after being reflected by the above-mentioned first beam splitter, it forms parallel light that passes through the above-mentioned first lens.

6. The multi-axis displacement simultaneous measurement device according to claim 1, characterized in that: The incident angle of light from the second light source and the reflection angle of light from the second light source respectively form a predetermined first angle with the optical axis formed by the light from the first light source reflected from the test mirror. The predetermined first angle is between 25 degrees and 40 degrees.

7. The multi-axis displacement simultaneous measurement device according to claim 1, characterized in that: A fifth lens and a sixth lens are provided between the second light source and the reference point and between the reference point and the third sensor, respectively. The fifth lens is configured to converge light along the optical axis of light incident from the second light source to the reference point at the reference point through the fifth lens, The third sensor is configured to converge light along an optical axis of the reflected light of the second light source reflected from the reference point onto an upper surface of the third sensor through the sixth lens.

8. The multi-axis displacement simultaneous measurement device according to claim 7, characterized in that: The surface of the third sensor forms an angle Φ according to the following mathematical formula, [Mathematical formula] The angle is an angle formed by the normal line of the surface of the third sensor and the optical axis of the reflected light of the second light source, the normal line is located on a plane determined by the optical axis of the reflected light of the second light source and the optical axis of the light incident on the reference point, and the angle is an angle measured counterclockwise from the optical axis of the reflected light of the second light source and has a positive sign, The above θ is the angle between the normal direction of the above test mirror and the optical axis of the above second light source, the above m is the lateral magnification of the above sixth lens when the distance to the above test mirror is set as the object distance and the distance to the above third sensor is set as the image distance, and the above m has a positive value.

9. The multi-axis displacement simultaneous measurement device according to claim 7, characterized in that: The measuring unit includes a sealed chamber surrounding the test mirror to prevent the scattered light of the test mirror from passing through. The above-mentioned secret rooms include: A first window is formed between the first lens and the test mirror to allow incident light of the first light source incident from the test mirror and reflected light of the first light source reflected from the test mirror to pass therethrough; a second window formed between the fifth lens and the test mirror to allow incident light from the second light source incident on the test mirror to pass therethrough; and A third window is formed between the sixth lens and the test mirror so as to allow reflected light of the second light source reflected by the test mirror to pass therethrough.

10. The multi-axis displacement simultaneous measurement device according to claim 9, characterized in that: The first window is configured such that a normal line of the first window is inclined at a second predetermined angle relative to an optical axis formed by the reflected light of the first light source reflected by the test mirror. According to the distance between the first window and the test mirror, the second predetermined angle has an angle between 1 degree and 5 degrees.

11. The multi-axis displacement simultaneous measurement device according to claim 1, characterized in that: include: the above-mentioned measurement department; A storage unit having a distance-displacement table corresponding to each of the first to third sensors of the measuring unit; as well as A control unit calculates the moving distance of the rigid body in the X-axis, Y-axis and Z-axis directions and the swing angle around the X-axis or Y-axis corresponding to the sensing value detected by each of the first sensor to the third sensor of the measuring unit, based on the distance-displacement table corresponding to each of the first sensor to the third sensor.

12. The multi-axis displacement simultaneous measurement device according to claim 11, characterized in that: The above control unit The planar moving direction of the rigid body is detected based on the moving direction of the light receiving position of the reflected light from the first light source detected by the first sensor. The swing direction of the rigid body is detected according to the moving direction of the light receiving position of the reflected light from the first light source detected by the second sensor, and The moving direction of the rigid body in the Z-axis direction is detected based on the moving direction of the light receiving position of the reflected light from the second light source detected by the third sensor, thereby simultaneously detecting the movement of the rigid body in multiple axis directions.

13. The multi-axis displacement simultaneous measurement device according to claim 1, characterized in that: The test mirror has an area smaller than an area of ​​parallel light incident on the test mirror from the first lens.

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