An exhaust gas treatment device and process for preparing phosphine

Abstract

The present invention relates to the field of waste gas treatment technology, specifically a tail gas treatment device and process for phosphine preparation, the device includes a tower body and a filtering mechanism arranged in the tower body, the filtering mechanism includes a fixed frame and a lifting frame, the feeding mechanism includes a feeding assembly for conveying the filling material between the fixed frame and the lifting frame through a mounting pipe and a recovery assembly for recovering the filling material between the fixed frame and the lifting frame, the present invention realizes dynamic adjustment of the space between the fixed frame and the lifting frame by sliding the lifting frame, thereby automatically adjusting the thickness of the filling material. When the lifting frame slides, the feeding mechanism replenishes or recovers the filling material as needed, thereby improving the filtering efficiency and avoiding the waste of the filling material. Not only does it reduce the need for frequent replacement of fillers and reduce maintenance costs, it also avoids the trouble of frequent disassembly and cleaning of the device, significantly improving the long-term stability and sustainability of the device.

Description

Technical Field

[0001] The present invention relates to the technical field of waste gas treatment, and in particular to a tail gas treatment device and process for preparing phosphine. Background Art

[0002] Phosphine is a toxic gas widely used in various industries, including semiconductor manufacturing, the phosphating industry, and metal processing. As a key raw material, phosphine produces significant exhaust emissions during processing. Due to its toxicity and potential environmental hazards, phosphine tail gas is currently typically treated using a spray tower, which utilizes the full contact between droplets and the gas to remove harmful substances from the gas and achieve tail gas purification. For example, Chinese Patent Publication No. CN113877396B discloses a spray tower for industrial desulfurization, comprising a mounting base, a main tower body, a water storage tank, a support frame, a movable packing storage mechanism, a triangular base, a discharge pipe, and a rotary spray mechanism. This patent utilizes a movable packing storage mechanism that allows for left and right movement within the main tower body, and the design of two packing frames allows for the replacement of packing material without shutting down the machine. This technology facilitates the replacement of packing material without stopping the tower body, improving work efficiency. However, while this design has certain advantages, it also has certain limitations. First, replacing the filler material relies on the entire packing frame being displaced, requiring the frame to be moved left and right. This not only increases operational complexity but also makes it difficult to prevent the leakage of toxic gases within the spray tower during movement, potentially posing a safety hazard. Second, to ensure smooth movement of the packing frame, sufficient space must be left around the spray tower, which complicates installation and layout in confined spaces. Furthermore, precise docking and adjustment of the packing frame complicates the work, impacting the overall reliability and efficiency of the system. Summary of the Invention

[0003] To address the above-mentioned issues, a tail gas treatment device and process for phosphine production are provided. The present invention dynamically adjusts the space between the fixed frame and the lifting frame through the sliding movement of the lifting frame, thereby automatically adjusting the thickness of the filler material. As the lifting frame slides, a feeding mechanism replenishes or recycles the filler material as needed, improving the filtration efficiency of the phosphine tail gas and avoiding filler material waste. This not only reduces the need for frequent filler material replacement and maintenance costs, but also avoids the hassle of frequent disassembly and cleaning of the device, significantly improving the long-term stability and sustainability of the device.

[0004] In order to solve the problems of the prior art, the present invention provides an exhaust gas treatment device for phosphine preparation, comprising a tower body and a filtering mechanism arranged in the tower body, the filtering mechanism comprising a fixed frame and a lifting frame, the fixed frame being fixedly installed in the tower body; the lifting frame can slide below the fixed frame along the axial direction of the tower body; filter screens are provided at the top of the fixed frame, the bottom of the lifting frame, and between the fixed frame and the lifting frame, wherein the filter screen between the fixed frame and the lifting frame can be expanded or contracted as the positions of the lifting frame and the fixed frame change; the space between the fixed frame and the lifting frame is filled with filling material for treating exhaust gas; a feeding mechanism is provided on the side of the tower body; a discharge tray is provided in the center of the lifting frame, and a mounting pipe is provided on the discharge tray that passes through the tower wall and is connected to an external feeding mechanism; the feeding mechanism comprises a feeding component for conveying the filling material to the space between the fixed frame and the lifting frame through the mounting pipe and a recovery component for recovering the filling material between the fixed frame and the lifting frame, and both the feeding component and the recovery component are connected to the mounting pipe.

[0005] Preferably, a fixing ring that matches the unloading tray is also provided in the center of the lifting frame, and a plurality of fixing rods equidistantly surrounding its axis are provided on the circumference of the fixing ring. The fixing ring is sleeved on the unloading tray, and a fixing component that can connect and disconnect the two is provided between the fixing ring and the unloading tray. A driving component for driving the unloading tray to move is provided on the fixing frame, and a plurality of telescopic rods equidistantly surrounding its axis are provided on the unloading tray. The two ends of the telescopic rods are respectively hinged to the unloading tray and the lifting frame.

[0006] Preferably, the fixing assembly includes a plurality of sliding holes and a plurality of elastic clips, the plurality of sliding holes are arranged equidistantly around the axis of the fixing ring, and the sliding holes extend radially along the fixing ring, the plurality of elastic clips can be slidably disposed in the plurality of sliding holes, and the edge of the discharge tray is provided with mounting holes that are the same in number and one-to-one corresponding to the elastic clips.

[0007] Preferably, the drive assembly includes a first rotary drive motor and multiple electric push rods, and the multiple electric push rods are arranged equidistantly around the axis of the unloading tray, and the axes of the multiple electric push rods are parallel to the axis direction of the tower body. The two ends of the electric push rods are respectively connected to the fixed frame and the unloading tray. The first rotary drive motor is arranged in the center of the fixed frame, and the first rotary drive motor is used to synchronously drive the multiple electric push rods to extend and retract.

[0008] Preferably, the drive assembly further comprises a protective cover arranged on the fixing frame, the first rotary drive motor and the plurality of electric push rods are all arranged in the protective cover, and the protective cover has a conical structure.

[0009] Preferably, a sensor for identifying the filling amount of the input filling material is provided in the discharge tray.

[0010] Preferably, a first valve is provided at the bottom of the discharge tray, a retractable connecting pipe is provided between the mounting pipe and the first valve, a three-way joint connected to the mounting pipe is provided at one end away from the discharge tray, a second valve is provided on the three-way joint, and the three-way joint is respectively connected to the feeding assembly and the recovery assembly.

[0011] Preferably, the feeding assembly includes a feeding barrel, a spiral blade, a second rotary drive motor and a feeding rack. The feeding barrel is arranged at an angle beside the tower body. A first feeding pipe connected to a three-way joint is provided on the top of the feeding barrel. The spiral blade is rotatably arranged in the feeding barrel. The second rotary drive motor is arranged at the bottom of the feeding barrel, and the spiral blade is transmission-connected to the output shaft of the second rotary drive motor. The feeding rack is arranged beside the feeding barrel, and a second feeding pipe connected to the feeding barrel is provided on the feeding rack.

[0012] Preferably, the recovery component includes a recovery box and a recovery pipe for collecting the filling material. The recovery box is arranged on the side of the tower body, and the recovery pipe is arranged between the recovery box and the tower body. The two ends of the recovery pipe are respectively connected to the recovery box and the three-way joint. The recovery pipe is also provided with a branch connected to the external suction device.

[0013] A tail gas treatment process for phosphine preparation is applied to the above-mentioned tail gas treatment device for phosphine preparation, comprising the following steps:

[0014] S1. Phosphine tail gas is introduced from the bottom of the tower body, and the impurities in the tail gas are preliminarily filtered through the filtering mechanism inside the tower body.

[0015] S2. Adjust the position of the lifting frame according to the impurity concentration in the exhaust gas, thereby adjusting the space between the fixed frame and the lifting frame, and then adjusting the expansion or contraction of the filter to optimize the filtering effect.

[0016] S3a. When the space between the fixed frame and the lifting frame becomes larger, the filling material is supplied to the filtering mechanism through the feeding mechanism, and the filling amount is adjusted according to the change of the position of the lifting frame.

[0017] S3b. When the space between the fixed frame and the lifting frame becomes smaller, the filling material is recovered using the recovery component so that it can be reused or replaced in the next processing process.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. This invention utilizes a lifting frame that slides along the tower axis to adjust the space between the fixed frame and the lifting frame. This allows the filter screen between the fixed frame and the lifting frame to automatically expand or contract as the space changes. This dynamic adjustment of the space allows precise adjustment of the thickness of the filler material (such as polypropylene multifaceted hollow spheres). When the lifting frame slides, the feed assembly automatically replenishes the space with an appropriate amount of filler material, thereby increasing the filler thickness and improving filtration efficiency. Conversely, when the space decreases, the recovery assembly reclaims and stores excess filler material, preventing waste. This process not only reduces operating costs but also effectively extends the lifespan of the filler material.

[0020] 2. This invention utilizes a feed assembly and a recovery assembly to dynamically adjust the device and recycle the filling material, significantly reducing the need for frequent filling material replacement and eliminating the need for frequent disassembly and cleaning. By reducing maintenance cycles and workload, this invention enhances the long-term stability and sustainability of the device, ensuring efficient and reliable performance over the long term, and enabling the cleaning of the filling material without disassembly.

[0021] 3. The present invention utilizes a fixed assembly so that when the drive assembly drives the discharge tray, the discharge tray can be connected and disconnected from the fixed ring through the fixed assembly, allowing the filter at the bottom of the lifting frame to change from a disc-shaped structure to a funnel-shaped structure, thereby achieving efficient recovery of the filler material during the recovery process. This enables the device to flexibly adjust the filtering mechanism according to the actual composition and concentration of the exhaust gas, adapting to the needs of different operating conditions and ensuring efficient operation under different loads and pollution levels. In addition, the drive assembly only needs to drive the discharge tray to achieve device adjustment, avoiding the need for separate drive sources for the discharge tray and lifting frame, reducing the complexity and cost of the device, and improving the flexibility and efficiency of the adjustment process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 The present invention is a schematic diagram of the three-dimensional structure of an exhaust gas treatment device for phosphine preparation.

[0023] Figure 2 The present invention is a schematic diagram of the cross-sectional structure of a tail gas treatment device for phosphine preparation.

[0024] Figure 3 The present invention is a schematic diagram of the cross-sectional structure of a tail gas treatment device for phosphine preparation when a discharge tray moves independently.

[0025] Figure 4 The present invention is a schematic diagram of the cross-sectional structure of a tail gas treatment device for phosphine preparation when a lifting frame and a discharge tray move synchronously.

[0026] Figure 5The present invention is a schematic diagram of the three-dimensional structure of a feeding mechanism in a tail gas treatment device for phosphine preparation.

[0027] Figure 6 The present invention is a schematic cross-sectional structure diagram of a feeding mechanism in a tail gas treatment device for phosphine preparation.

[0028] Figure 7 The present invention is a schematic diagram of a partial three-dimensional structure of a filtering mechanism in an exhaust gas treatment device for phosphine preparation.

[0029] Figure 8 The present invention is a schematic diagram of the three-dimensional structure of a lifting frame in a tail gas treatment device for phosphine preparation.

[0030] Figure 9 This is an exploded view of the lifting frame, discharge tray and fixed components in the tail gas treatment device for phosphine preparation.

[0031] Figure 10 The present invention is a schematic diagram of the three-dimensional structure of a fixing frame in an exhaust gas treatment device for phosphine preparation.

[0032] Figure 11 yes Figure 9 Enlarged view of point A in the middle.

[0033] The numbers in the figure are:

[0034] 1. Tower body; 2. Filter mechanism; 21. Fixing frame; 22. Lifting frame; 221. Discharge tray; 2211. Telescopic rod; 2212. Mounting pipe; 22121. Connecting pipe; 22122. Tee joint; 22123. Second valve; 2213. Mounting hole; 2214. Sensor; 2215. First valve; 222. Fixing ring; 2221. Fixing rod; 2222. Fixing assembly; 22221. Sliding hole; 22222. Elastic buckle; 223. Driving assembly; 2231, first rotary driving motor; 2232, electric push rod; 2233, protective cover; 23, filter; 3, feeding mechanism; 31, feeding assembly; 311, feeding barrel; 3111, spiral blade; 3112, second rotary driving motor; 3113, first feeding pipe; 312, feeding rack; 3121, second feeding pipe; 32, recovery assembly; 321, recovery box; 3211, recovery pipe; 322, branch; 3221, external suction device. DETAILED DESCRIPTION

[0035] In order to further understand the features, technical means, specific objectives and functions achieved by the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0036] like Figures 1 to 5As shown: A tail gas treatment device for phosphine preparation includes a tower body 1 and a filter mechanism 2 arranged in the tower body 1, the filter mechanism 2 includes a fixed frame 21 and a lifting frame 22, the fixed frame 21 is fixedly installed in the tower body 1; the lifting frame 22 can slide below the fixed frame 21 along the axis direction of the tower body 1; a filter screen 23 is provided on the top of the fixed frame 21, the bottom of the lifting frame 22, and between the fixed frame 21 and the lifting frame 22, wherein the filter screen 23 located between the fixed frame 21 and the lifting frame 22 can be expanded or contracted as the positions of the lifting frame 22 and the fixed frame 21 change; the fixed frame 21 and the lifting frame 22 can be adjusted. The space between the lifting frames 22 is filled with filling materials for treating exhaust gas; a feeding mechanism 3 is provided on the side of the tower body 1; a discharge tray 221 is provided in the center of the lifting frame 22, and a mounting pipe 2212 is provided on the discharge tray 221 that passes through the tower wall and is connected to the external feeding mechanism 3; the feeding mechanism 3 includes a feeding component 31 for conveying the filling material between the fixed frame 21 and the lifting frame 22 through the mounting pipe 2212 and a recovery component 32 for recovering the filling material between the fixed frame 21 and the lifting frame 22, and both the feeding component 31 and the recovery component 32 are connected to the mounting pipe 2212.

[0037] After entering the tower body 1 from the bottom, the phosphine tail gas is filtered by the filter screens 23 on the fixed frame 21 and the lifting frame 22, and the filling material between the fixed frame 21 and the lifting frame 22. As the lifting frame 22 slides along the axis of the tower body 1, the space between the fixed frame 21 and the lifting frame 22 can be changed. At this time, the filter screen 23 between the fixed frame 21 and the lifting frame 22 will expand or contract with the change in space. The change in space can be used to adjust the thickness of the filling material (polypropylene multi-faceted hollow spheres). When the space becomes larger, the filling material is replenished to the filter mechanism 2 through the feeding assembly 31. When the space becomes smaller, the excess filling material is recovered through the recovery assembly 32. By increasing or decreasing the thickness of the filling material, the contact time between the phosphine tail gas and the filling material is controlled (the thicker the filling material, the longer the gas-filling material contact time), thereby optimizing the filtering effect.

[0038] Phosphine tail gas first enters the processing unit at the bottom of the tower body 1. Once inside the tower body 1, the tail gas is filtered through a filter 23 mounted on the fixed frame 21 and the lifting frame 22, as well as the filler material between them. The filter 23 and filler material purify the tail gas, removing solid particles and contaminants. The lifting frame 22 can slide freely along the axis of the tower body 1, adjusting the space between the fixed frame 21 and the lifting frame 22. As the position of the lifting frame 22 changes, the filter 23 between the fixed frame 21 and the lifting frame 22 automatically expands or contracts, achieving dynamic adjustment of the filtration space.

[0039] When the sliding of the lifting frame 22 increases the space between the fixed frame 21 and the lifting frame 22, the feeding component 31 will automatically add an appropriate amount of filling material to the space, thereby increasing the thickness of the filling material and improving the filtration efficiency; conversely, when the space is reduced, the recovery component 32 will recycle and store the excess filling material to avoid unnecessary material waste. This not only reduces operating costs but also extends the service life of the filling material. Compared with traditional devices that require frequent replacement and disposal of excess filling materials, the present invention can efficiently utilize each piece of filling material and reduce overall operation and maintenance costs. This dynamic adjustment of the space and the thickness of the filling material can optimize the filtration effect in real time according to changes in the exhaust gas concentration and composition, thereby ensuring the efficiency and stability of the entire exhaust gas treatment process.

[0040] In addition, the sliding mechanism of the lifting frame 22 and the changes in the filter screen 23 can flexibly adjust the treatment efficiency according to the degree of exhaust gas pollution, thereby avoiding the problems of uneven treatment and low efficiency that may be caused by the fixed filtering mechanism 2 in the prior art, so that the exhaust gas treatment effect is always maintained in the best state, avoiding the problem of low purification efficiency caused by insufficient reaction of the traditional spray tower. This flexible adjustment mechanism makes the exhaust gas treatment more adaptable to the needs under different working conditions.

[0041] By recycling the excess filling material through the recycling component 32, the present invention avoids the waste of filling material. The filtering mechanism 2 realizes dynamic adjustment of the exhaust gas processing capacity in this way, so that the entire device does not require frequent manual intervention during operation. The device can automatically adjust according to the exhaust gas processing requirements, thereby reducing the workload of manual operation and maintenance, and improving the degree of automation and work efficiency of the device.

[0042] Due to the dynamic adjustment and recycling of the filling material, the present invention reduces the need for frequent replacement of the filling material and avoids the trouble of frequent disassembly and cleaning of the device. By reducing the maintenance cycle and work intensity, the present invention improves the long-term stability and sustainability of the device.

[0043] like Figures 2 to 4 and Figures 7 to 11 As shown: a fixing ring 222 matching the discharge tray 221 is also provided in the center of the lifting frame 22, and a plurality of fixing rods 2221 equidistantly surrounding its axis are provided on the circumference of the fixing ring 222, the fixing ring 222 is sleeved on the discharge tray 221, and a fixing component 2222 that can connect and disconnect the two is provided between the fixing ring 222 and the discharge tray 221, a driving component 223 for driving the discharge tray 221 to move is provided on the fixing frame 21, and a plurality of telescopic rods 2211 equidistantly surrounding its axis are provided on the discharge tray 221, and the two ends of the telescopic rods 2211 are hinged to the discharge tray 221 and the lifting frame 22 respectively.

[0044] The fixing assembly 2222 is configured to enable the discharge tray 221 to be connected and disconnected from the fixing ring 222. When the filling material needs to be recycled, the connection between the discharge tray 221 and the fixing ring 222 is first disconnected by the fixing assembly 2222, and then the discharge tray 221 is driven to move along the axis of the tower body 1 by the driving assembly 223. During this process, the multiple telescopic rods 2211 will move along with the discharge tray 221, thereby changing the bottom surface of the lifting frame 22 from the original disc-shaped structure to a funnel-shaped structure. At this time, the filter screen 23 at the bottom of the lifting frame 22 will also deform. The funnel-shaped bottom structure can effectively guide the filling material to flow along the inner wall of the filter screen 23 into the discharge tray 221, facilitating the recycling of the filling material. When the space between the lifting frame 22 and the fixed frame 21 needs to be adjusted, the connection between the fixing ring 222 and the discharge tray 221 is first locked by the fixing component 2222, and then the discharge tray 221 is driven to move by the driving component 223. The fixing ring 222 will move synchronously with the discharge tray 221, and the movement of the lifting frame 22 is driven by the multiple fixing rods 2221 on the fixing ring 222, so that the lifting frame 22 can move together with the discharge tray 221, thereby realizing precise dynamic adjustment of the space between the lifting frame 22 and the fixed frame 21, ensuring that the filtration process optimizes the filtration effect in real time according to changes in exhaust gas concentration or composition.

[0045] By providing the fixing assembly 2222, the drive assembly 223 only needs to drive the discharge tray 221 to achieve device adjustment. This effectively simplifies the device structure and eliminates the need for separate drive sources for both the discharge tray 221 and the lifting frame 22. This not only reduces the complexity and cost of the device, but also improves the flexibility and efficiency of the adjustment process. Furthermore, the need for additional drive sources is reduced, thereby reducing energy consumption and maintenance costs, achieving more efficient and economical operation.

[0046] Dynamically adjusting the space between the lifting frame 22 and the fixed frame 21 eliminates the need for frequent manual adjustments. Automated operation facilitates maintenance and management of the entire device, reduces manual intervention, and improves operational safety and stability. The provision of fixed assembly 2222 allows the device to flexibly adjust the filter mechanism 2 based on the actual composition and concentration of the exhaust gas, adapting to the needs of different operating conditions and ensuring efficient operation under varying loads and pollution levels.

[0047] It should be noted that the lifting frame 22 and the fixed frame 21 are connected and lifted by a damping rod. Through the setting of the damping rod, the lifting frame 22 can achieve a stable position after being adjusted, thereby ensuring that the thickness of the filling material can be guaranteed after being adjusted.

[0048] like Figures 2 to 4 and Figures 7 to 11As shown: the fixing assembly 2222 includes a plurality of sliding holes 22221 and a plurality of elastic clips 22222, the plurality of sliding holes 22221 are arranged equidistantly around the axis of the fixing ring 222, and the sliding holes 22221 extend radially along the fixing ring 222, and the plurality of elastic clips 22222 can be slidably arranged in the plurality of sliding holes 22221, and the edge of the discharge tray 221 is provided with mounting holes 2213 the same number as the elastic clips 22222 and corresponding one to one.

[0049] In the initial state, the elastic clips 22222 are in the ejected state in the sliding holes 22221. The elastic clips 22222 can be connected to the discharge tray 221 through the mounting holes 2213, so that the discharge tray 221, which is sleeved in the fixing ring 222, is tightly coupled with the fixing ring 222. When the discharge tray 221 is driven by the driving assembly 223, the discharge tray 221 can drive the fixing ring 222 to move through the mounting holes 2213 and the elastic clips 22222. The fixing ring 222 then drives the lifting frame 22 to move via the fixing rod 2221, thereby achieving the space adjustment between the lifting frame 22 and the fixing frame 21.

[0050] When it is necessary to recover the filling material between the fixed frame 21 and the lifting frame 22, the elastic clip 22222 retracts, causing the elastic clip 22222 to slide into the sliding hole 22221 along the axial direction of the sliding hole 22221, thereby separating the elastic clip 22222 from the mounting hole 2213, so that the discharge tray 221 is separated from the fixed ring 222 at this time, and the discharge tray 221 can be independently driven by the driving component 223, and the telescopic rod 2211 is driven to move by the discharge tray 221, and the shape of the filter screen 23 at the bottom of the lifting frame 22 is changed by the telescopic rod 2211, so as to facilitate the introduction of the filling material in the filter screen 23 into the discharge tray 221, thereby realizing efficient recovery of the filling material.

[0051] The elastic clip 22222 can be provided with an elastic member and a magnetic block at one end thereof near the sliding hole 22221. An electromagnet is provided inside the sliding hole 22221. When the electromagnet is energized, it can generate magnetic attraction with the magnetic block, thereby adsorbing the elastic clip 22222, causing the elastic clip 22222 to shrink within the sliding hole 22221. When the electromagnet is de-energized, the elastic member resets and the elastic clip 22222 can be ejected from the sliding hole 22221. Through the synergistic effect of the electromagnet and the elastic clip 22222, the connection and separation of the discharge tray 221 and the fixing ring 222 can be precisely controlled, greatly simplifying the operation steps and improving the convenience of operation. The cooperation between the electromagnet and the elastic clip 22222 enables this adjustment process to be semi-automatic or fully automatic, greatly improving the automation level of the device and reducing the complexity and labor intensity of manual operation. Excessive mechanical friction is avoided, and mechanical wear caused by frequent operation is reduced, thereby extending the service life of the device and reducing maintenance costs.

[0052] like Figures 2 to 4 and Figures 7 to 11 As shown: the drive assembly 223 includes a first rotary drive motor 2231 and multiple electric push rods 2232. The multiple electric push rods 2232 are equidistantly arranged around the axis of the discharge tray 221, and the axes of the multiple electric push rods 2232 are parallel to the axis direction of the tower body 1. The two ends of the electric push rods 2232 are respectively connected to the fixed frame 21 and the discharge tray 221. The first rotary drive motor 2231 is arranged in the center of the fixed frame 21. The first rotary drive motor 2231 is used to synchronously drive the multiple electric push rods 2232 to extend and retract.

[0053] When the first rotary drive motor 2231 is started, the first rotary drive motor 2231 drives the electric push rod 2232 to extend and retract along its axial direction. Each electric push rod 2232 will generate a certain force during the extension and retraction process, pushing the discharge tray 221 to move along the axial direction of the tower body 1. Due to the synchronous action of multiple electric push rods 2232, the discharge tray 221 can maintain stable movement and ensure the accuracy of its position adjustment. The extension and retraction action of the electric push rod 2232 can also be used to adjust the space between the lifting frame 22 and the fixed frame 21, thereby realizing functions such as adjusting the filling material, changing the shape of the discharge tray 221, and optimizing the filtering effect. By synchronously driving the movement of multiple electric push rods 2232 by the first rotary drive motor 2231, the smooth movement of the discharge tray 221 is ensured, thereby improving the working efficiency of the device. By arranging multiple electric push rods 2232 equidistantly around the discharge tray 221, the discharge tray 221 is evenly stressed during movement, improving its stability and accuracy while avoiding damage or malfunction to the device caused by uneven stress. The relatively smooth telescopic movement of the electric push rods 2232 avoids frequent high-load operation, thereby reducing wear and failure of the device and extending its service life. Furthermore, the telescopic movement of the electric push rods 2232 can be precisely adjusted to meet specific needs, adapting to adjustments required under different working conditions, and providing greater flexibility and adaptability.

[0054] like Figures 2 to 4 and Figures 7 to 11 As shown, the driving assembly 223 further includes a protective cover 2233 disposed on the fixing frame 21 , the first rotary driving motor 2231 and the plurality of electric push rods 2232 are all disposed in the protective cover 2233 , and the protective cover 2233 is a conical structure.

[0055] The conical structure of the protective cover 2233 effectively protects the first rotary drive motor 2231 and the multiple electric push rods 2232, preventing reactive liquids (such as water mist, purification liquid, etc.) from entering the interior of the drive assembly 223 during the spraying process. The conical structure effectively guides the flow of potentially splashing liquids, preventing them from contacting sensitive components such as the first rotary drive motor 2231 and the electric push rods 2232. The protective cover 2233 acts as a barrier, blocking these liquids and preventing them from directly entering the interior of the first rotary drive motor 2231 and the electric push rods 2232, thereby ensuring the long-term stable operation of the drive assembly 223. The conical shape of the protective cover 2233 not only enhances the guidance of the liquid, but also reduces the accumulation of liquid on the surface through its streamlined shape, thereby improving the protective effect. The structural design of the protective cover 2233 takes into account requirements such as waterproofing and corrosion resistance, and can be used for a long time in harsh working environments. The protective cover 2233 can withstand high humidity, high temperature and corrosive substances in harsh working environments, improves the adaptability and durability of the device in complex environments, and reduces the frequency of maintenance and replacement.

[0056] like Figure 8 As shown, a sensor 2214 for identifying the filling amount of the input filling material is provided in the discharge tray 221.

[0057] The amount of filler material added is detected by a sensor 2214 disposed within the discharge tray 221. The sensor 2214 is preferably a pressure sensor. The sensor 2214 is mounted on the bottom or sidewall of the discharge tray 221 and is capable of monitoring pressure changes within the tray 221 in real time. When filler material is added to the discharge tray 221, it occupies a certain amount of space and exerts a certain amount of pressure on the tray 221. The sensor 2214 senses this pressure change and transmits a corresponding signal to the control system.

[0058] As the amount of filling material increases, the pressure within discharge tray 221 also increases accordingly. Sensor 2214 continuously monitors this pressure change to accurately determine the filling level. When the volume of filling material reaches a set threshold, sensor 2214 sends a signal to the control system, triggering a response from the control system, either stopping the addition of filling material or initiating the next operation.

[0059] The sensor 2214 can be integrated with automated control systems to achieve precise fill level control, preventing overfilling or underfilling while ensuring efficient and stable filling processes. Automated monitoring and adjustment of fill levels eliminates the tedious manual process of checking fill levels, reduces errors, and improves overall production efficiency.

[0060] It should be noted that the sensor 2214 can also be set as a weighing sensor 2214, a capacitive sensor 2214 and a laser sensor 2214, etc., and the most appropriate detection method can be selected according to the different properties of the filling material and the working environment, thereby realizing real-time and high-precision monitoring of the filling amount of the filling material.

[0061] like Figures 1 to 6 As shown: a first valve 2215 is provided at the bottom of the discharge tray 221, a retractable connecting pipe 22121 is provided between the mounting pipe 2212 and the first valve 2215, a three-way joint 22122 is provided on the end of the mounting pipe 2212 away from the discharge tray 221 and connected thereto, a second valve 22123 is provided on the three-way joint 22122, and the three-way joint 22122 is respectively connected to the feeding component 31 and the recovery component 32.

[0062] The first valve 2215 is used to control the flow of filling material within the lifting frame 22 and the fixed frame 21, regulating the addition or recovery of filling material. A flexible connection is provided between the discharge tray 221 and the mounting pipe 2212 via a retractable connecting pipe 22121, ensuring that the movement of the lifting frame 22 does not affect the smooth delivery or recovery of filling material. A three-way connector 22122 is provided at the end of the mounting pipe 2212 away from the discharge tray 221, serving as a switching channel for the pipeline, enabling the selection of the feeding assembly 31 or the recovery assembly 32 as needed. The second valve 22123 switches between the feeding and recovery functions by controlling the channel switching of the three-way connector 22122. When filling material needs to be added to the device, second valve 22123 opens the channel of supply assembly 31, delivering new filling material into the device. When filling material needs to be recovered, second valve 22123 switches to recovery assembly 32, completing the material recovery process. This ensures a smooth transition between material supply and recovery at different stages during device operation, improving the device's operating efficiency, enabling a higher level of automation, reducing manual intervention, improving production efficiency, and reducing the occurrence of operational errors. It also simplifies the device's piping layout and operating procedures, reducing the device's complexity and maintenance difficulty.

[0063] like Figures 1 to 6 As shown: the feeding assembly 31 includes a feeding barrel 311, a spiral blade 3111, a second rotary drive motor 3112 and a feeding rack 312. The feeding barrel 311 is arranged at an angle beside the tower body 1. The top of the feeding barrel 311 is provided with a first feeding pipe 3113 connected to the three-way joint 22122. The spiral blade 3111 is rotatably arranged in the feeding barrel 311. The second rotary drive motor 3112 is arranged at the bottom of the feeding barrel 311, and the spiral blade 3111 is connected to the output shaft of the second rotary drive motor 3112. The feeding rack 312 is arranged beside the feeding barrel 311, and the feeding rack 312 is provided with a second feeding pipe 3121 connected to the feeding barrel 311.

[0064] The feeding rack 312 is arranged beside the feeding barrel 311 to stably support the position of the feeding barrel 311. At the same time, the feeding rack 312 facilitates the addition of filling materials. The filling materials are fed into the feeding barrel 311 through the second feeding pipe 3121. The feeding barrel 311 is arranged beside the tower body 1 at an inclined angle to ensure that the filling materials can flow smoothly into the interior of the tower body 1. The top of the feeding barrel 311 is connected to the first feeding pipe 3113 and is connected to the three-way joint 22122. By starting the second rotary drive motor 3112, the output shaft of the second rotary drive motor 3112 drives the spiral blade 3111 to rotate. The rotation of the spiral blade 3111 generates a driving force, so that the filling material is provided to the first feeding pipe 3113 along the axial direction of the feeding barrel 311. It ensures that the filling material is evenly transported to the tower body 1, avoiding the problem of clogging or uneven distribution of the filling material. The second rotary drive motor 3112 automatically adjusts the speed of the spiral blade 3111 to precisely control the material flow rate and delivery speed, enhancing the automation level of the feeding process, reducing manual intervention, and improving production efficiency. The feeding assembly 31 works closely with the recovery assembly 32. The connection between the feeding assembly 31 and the tee connector 22122 allows for flexible switching between material supply and recovery, improving the operational convenience and adaptability of the entire device.

[0065] like Figures 1 to 6 As shown: the recovery component 32 includes a recovery box 321 and a recovery pipe 3211 for collecting filling materials. The recovery box 321 is arranged on the side of the tower body 1, and the recovery pipe 3211 is arranged between the recovery box 321 and the tower body 1. The two ends of the recovery pipe 3211 are respectively connected to the recovery box 321 and the three-way joint 22122. The recovery pipe 3211 is also provided with a branch 322 connected to the external suction device 3221.

[0066] The recovery assembly 32 effectively collects the filling material within the tower body 1. A recovery pipe 3211 connects the recovery tank 321 to the tower body 1, serving as a material recovery and guide. The two ends of the recovery pipe 3211 are connected to the recovery tank 321 and the three-way connector 22122 within the tower body 1, respectively, forming a closed circulation loop, ensuring that the filling material is guided from the tower body 1 to the recovery tank 321.

[0067] In addition, the recovery pipe 3211 is also provided with a branch 322, which is connected to an external suction device 3221. The external suction device 3221 can absorb the filling material or gas in the recovery pipe 3211 through the negative pressure effect, thereby improving the recovery efficiency. When the filling material in the tower body 1 needs to be recovered, the external suction device 3221 extracts the filling material from the tower body 1 through the suction effect and guides it into the recovery box 321 through the recovery pipe 3211, thereby achieving an efficient recovery process. It should be noted that when the external suction device 3221 is working, the first valve 2215 is in a closed state, so that a negative pressure can be formed in the section from the connecting pipe 22121 to the recovery pipe 3211, which facilitates the movement of the filling material. Through the negative pressure suction effect, the filling material in the tower body 1 can be efficiently sucked out from the tower body 1 and guided into the recovery box 321, thereby avoiding the waste of filling material and improving the utilization rate of resources.

[0068] The sealing arrangement between the recovery pipe 3211 and the recovery box 321, as well as the connection with the external suction device 3221, ensures that the gas and filling material will not leak out during the recovery process, thereby improving the sealing of the device and avoiding environmental pollution and material waste.

[0069] The entire recycling process can be automatically completed through the negative pressure of the external suction device 3221, which reduces manual intervention, improves the convenience and automation level of operation, and further improves the overall working efficiency of the device.

[0070] The arrangement of the recovery box 321 and the recovery pipe 3211 facilitates the cleaning of the collected filling material. When the recovery assembly 32 needs to be repaired, the recovery box 321 and the recovery pipe 3211 can be easily disassembled and cleaned, reducing maintenance difficulty and downtime, and improving the reliability and long-term service life of the device.

[0071] like Figures 1 to 5 As shown: A tail gas treatment process for phosphine preparation, applied to the above-mentioned tail gas treatment device for phosphine preparation, includes the following steps:

[0072] S1. Phosphine tail gas is introduced from the bottom of the tower body 1, and impurities in the tail gas are preliminarily filtered through the filtering mechanism 2 in the tower body 1.

[0073] S2. Adjust the position of the lifting frame 22 according to the impurity concentration in the exhaust gas, thereby adjusting the space between the fixed frame 21 and the lifting frame 22, and further adjusting the expansion or contraction of the filter 23 to optimize the filtering effect.

[0074] S3a. When the space between the fixed frame 21 and the lifting frame 22 becomes larger, the filling material is supplied to the filter mechanism 2 through the feeding mechanism 3, and the filling amount is adjusted according to the change of the position of the lifting frame 22.

[0075] S3b. When the space between the fixed frame 21 and the lifting frame 22 becomes smaller, the filling material is recovered by using the recovery component 32 so as to be reused or replaced in the next processing process.

[0076] The above embodiments merely represent one or more embodiments of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of protection of the present invention. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present invention, and such modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the appended claims.

Claims

1. A tail gas treatment device for phosphine preparation, comprising a tower body (1) and a filtering mechanism (2) arranged in the tower body (1), characterized in that: The filtering mechanism (2) comprises a fixing frame (21) and a lifting frame (22), wherein the fixing frame (21) is fixedly installed in the tower body (1); The lifting frame (22) can slide below the fixed frame (21) along the axial direction of the tower body (1); Filters (23) are provided on the top of the fixed frame (21), the bottom of the lifting frame (22), and between the fixed frame (21) and the lifting frame (22), wherein the filter (23) located between the fixed frame (21) and the lifting frame (22) can be expanded or contracted as the positions of the lifting frame (22) and the fixed frame (21) change; A filling material for treating exhaust gas is filled between the fixing frame (21) and the lifting frame (22); A feeding mechanism (3) is provided on the side of the tower body (1); A discharge tray (221) is provided in the center of the lifting frame (22), and a mounting pipe (2212) is provided on the discharge tray (221) that penetrates the tower wall and is connected to the external feeding mechanism (3); The feeding mechanism (3) comprises a feeding assembly (31) for conveying the filling material to a position between the fixed frame (21) and the lifting frame (22) through the installation pipe (2212), and a recovery assembly (32) for recovering the filling material between the fixed frame (21) and the lifting frame (22), wherein both the feeding assembly (31) and the recovery assembly (32) are connected to the installation pipe (2212); A fixing ring (222) matching the discharge tray (221) is provided in the center of the lifting frame (22), a plurality of fixing rods (2221) equidistantly surrounding the axis of the fixing ring (222) are provided on the circumference of the fixing ring (222), the fixing ring (222) is sleeved on the discharge tray (221), and a fixing assembly (2222) capable of connecting and disconnecting the fixing ring (222) and the discharge tray (221) is provided between the fixing ring (222) and the discharge tray (221), a driving assembly (223) for driving the discharge tray (221) to move is provided on the fixing frame (21), a plurality of telescopic rods (2211) equidistantly surrounding the axis of the discharge tray (221) are provided on the discharge tray (221), and the two ends of the telescopic rods (2211) are respectively hinged to the discharge tray (221) and the lifting frame (22); The fixing assembly (2222) includes a plurality of sliding holes (22221) and a plurality of elastic clips (22222), the plurality of sliding holes (22221) are equidistantly arranged around the axis of the fixing ring (222), and the sliding holes (22221) extend radially of the fixing ring (222), the plurality of elastic clips (22222) can be slidably arranged in the plurality of sliding holes (22221), the edge of the discharge tray (221) is provided with mounting holes (2213) that are the same in number and correspond one to one with the elastic clips (22222), the elastic clip (22222) can be provided with an elastic member and a magnetic block at one end thereof close to the sliding hole (22221), and an electromagnet is provided inside the sliding hole (22221); A first valve (2215) is provided at the bottom of the discharge tray (221), a retractable connecting pipe (22121) is provided between the mounting pipe (2212) and the first valve (2215), a three-way connector (22122) is provided at one end of the mounting pipe (2212) away from the discharge tray (221), and is in communication with the three-way connector (22122), a second valve (22123) is provided on the three-way connector (22122), and the three-way connector (22122) is respectively connected to the feeding assembly (31) and the recovery assembly (32).

2. A tail gas treatment device for phosphine preparation according to claim 1, characterized in that: The drive assembly (223) comprises a first rotary drive motor (2231) and a plurality of electric push rods (2232). The plurality of electric push rods (2232) are arranged equidistantly around the axis of the discharge tray (221), and the axes of the plurality of electric push rods (2232) are all parallel to the axis direction of the tower body (1). The two ends of the electric push rods (2232) are respectively connected to the fixed frame (21) and the discharge tray (221). The first rotary drive motor (2231) is arranged at the center of the fixed frame (21). The first rotary drive motor (2231) is used to synchronously drive the plurality of electric push rods (2232) to extend and retract.

3. A tail gas treatment device for phosphine preparation according to claim 2, characterized in that: The drive assembly (223) further includes a protective cover (2233) disposed on the fixing frame (21), the first rotary drive motor (2231) and the plurality of electric push rods (2232) are all disposed within the protective cover (2233), and the protective cover (2233) has a conical structure.

4. The tail gas treatment device for phosphine preparation according to claim 1, characterized in that: A sensor (2214) for identifying the filling amount of the input filling material is provided in the discharge tray (221).

5. The tail gas treatment device for phosphine preparation according to claim 1, characterized in that: The feeding assembly (31) comprises a feeding barrel (311), a spiral blade (3111), a second rotary drive motor (3112) and a feeding rack (312). The feeding barrel (311) is arranged at an angle on the side of the tower body (1). A first feeding pipe (3113) connected to a three-way joint (22122) is provided on the top of the feeding barrel (311). The spiral blade (3111) is rotatably arranged in the feeding barrel (311). The second rotary drive motor (3112) is arranged at the bottom of the feeding barrel (311), and the spiral blade (3111) is transmission-connected to the output shaft of the second rotary drive motor (3112). The feeding rack (312) is arranged on the side of the feeding barrel (311). A second feeding pipe (3121) connected to the feeding barrel (311) is provided on the feeding rack (312).

6. The tail gas treatment device for phosphine preparation according to claim 1, characterized in that: The recovery assembly (32) comprises a recovery box (321) and a recovery pipe (3211) for collecting the filling material. The recovery box (321) is arranged beside the tower body (1). The recovery pipe (3211) is arranged between the recovery box (321) and the tower body (1). Both ends of the recovery pipe (3211) are respectively connected to the recovery box (321) and the three-way joint (22122). The recovery pipe (3211) is also provided with a branch (322) connected to the external suction device (3221).

7. A process for treating tail gas for phosphine production, applied to a tail gas treatment device for phosphine production according to any one of claims 1 to 6, characterized in that: The following steps are included: S1, introducing phosphine tail gas from the bottom of the tower body (1), and performing preliminary filtration of impurities in the tail gas through the filtering mechanism (2) in the tower body (1); S2. adjusting the position of the lifting frame (22) according to the concentration of impurities in the exhaust gas, thereby adjusting the space between the fixed frame (21) and the lifting frame (22), and further adjusting the expansion or contraction of the filter (23) to optimize the filtering effect; S3a, when the space between the fixed frame (21) and the lifting frame (22) becomes larger, the filling material is supplied to the filter mechanism (2) through the feeding mechanism (3), and the filling amount is adjusted according to the change in the position of the lifting frame (22); S3b, when the space between the fixed frame (21) and the lifting frame (22) becomes smaller, the filling material is recovered by using the recovery component (32) so as to be reused or replaced in the next processing process.

Images