Purification device for ultra-high vacuum environments

Abstract

This invention discloses a purification device for ultra-high vacuum environments, comprising a cylinder, an isolator, a magnet, and an ionization filament. The cylinder has an open first end and a closed second end. The isolator is disposed within the cylinder, dividing the internal cavity of the cylinder into an ionization cavity near the first end and a collection cavity near the second end along the axial direction of the cylinder. The magnet passes through the isolator and has a perforation connecting the ionization cavity and the collection cavity. The two magnetic poles of the magnet are distributed along a direction perpendicular to the central axis of the cylinder. The ionization filament is at least partially disposed within the ionization cavity for ionizing the gas within the ionization cavity. The ionization filament of this invention can ionize the gas into negatively charged particles and positively charged particles. These negatively charged and positively charged particles, influenced by the magnetic field, undergo spiral motion within the perforation on the magnet and are collected into the collection cavity.

Description

Technical Field

[0001] This invention belongs to the field of vacuum interconnection technology, and specifically relates to a purification device for ultra-high vacuum environments. Background Technology

[0002] The Nanoscale Vacuum Interconnection Experimental Station is a platform in the nanotechnology field that integrates material growth, device fabrication, and testing and analysis. The platform is designed with ultra-high vacuum pipelines, which are connected to multiple devices used for material growth, device fabrication, and testing and analysis.

[0003] Due to the variety of equipment, various gaseous elements and dust particles will always remain in the interconnected pipes. Under ultra-high vacuum, the mean free path of a single molecule is relatively large, so residual gas molecules and dust particles often come into contact with the sample surface, causing the sample to be contaminated.

[0004] Current solutions primarily involve using titanium pumps to sublimate titanium and remove gaseous elements, mainly oxygen and nitrogen. However, titanium pumps are expensive, and installing them within equipment chambers is challenging, requiring high-quality flange openings on the pipelines, thus increasing operating costs. Furthermore, titanium pumps are unstable in operation, often failing to remove gaseous elements effectively, and also failing to effectively remove dust particles.

[0005] The information disclosed in this background section is intended only to enhance the understanding of the overall background of the invention and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0006] The purpose of this invention is to provide a purification device for ultra-high vacuum environments, which solves the problem of high purification costs in ultra-high vacuum environments.

[0007] To achieve the above objectives, a specific embodiment of the present invention provides a purification device for ultra-high vacuum environments, comprising a cylinder, an isolator, a magnet, and an ionization filament. The cylinder has an open first end and a closed second end. The isolator is disposed within the cylinder, dividing the internal cavity of the cylinder into an ionization cavity near the first end and a collection cavity near the second end in the axial direction of the cylinder. The magnet passes through the isolator, and has a perforation connecting the ionization cavity and the collection cavity. The two magnetic poles of the magnet are distributed along a direction perpendicular to the central axis of the cylinder. The ionization filament is at least partially disposed within the ionization cavity for ionizing the gas within the ionization cavity.

[0008] In one or more embodiments of the present invention, the ionization filament includes a first filament portion and two first electrode portions connected to both ends of the first filament portion. The first filament portion is located inside the ionization cavity, and one end of the first electrode portion away from the first filament portion extends to the second end of the cylinder.

[0009] In one or more embodiments of the present invention, the purification device further includes two first insulating members that are sleeved on the two first electrode portions in a one-to-one correspondence.

[0010] In one or more embodiments of the present invention, the purification device further includes a neutralizing filament at least partially disposed within the collection chamber.

[0011] In one or more embodiments of the present invention, the neutralizing filament includes a second filament portion and two second electrode portions connected to both ends of the second filament portion, wherein one end of the second electrode portion away from the second filament portion extends to the second end of the cylinder.

[0012] In one or more embodiments of the present invention, the purification device further includes two second insulating members that are sleeved on the two second electrode portions in a one-to-one correspondence.

[0013] In one or more embodiments of the present invention, the purification device includes a plurality of magnets distributed along the circumference of the cylinder, wherein the magnetic poles of adjacent magnets are distributed in opposite positions.

[0014] In one or more embodiments of the present invention, a plurality of magnets are arranged around the central axis of the cylinder.

[0015] In one or more embodiments of the present invention, the purification device further includes a flange sleeved on the circumferential outer wall of the cylinder.

[0016] In one or more embodiments of the present invention, the magnet is constructed as a magnetic ring or a hollow magnetic column.

[0017] Compared with existing technologies, the ionization filament of this invention can ionize gas into negatively charged and positively charged particles. These particles, influenced by a magnetic field, undergo spiral motion within perforations on the magnet and are collected into a collection chamber. Furthermore, dust particles entering the ionization chamber can also adsorb negatively and positively charged particles, forming charged dust particles, which are then collected into the collection chamber under the influence of the magnetic field. This allows for the centralized storage of impurities inside the pipe without disrupting the vacuum environment. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a three-dimensional structural diagram of a purification device for ultra-high vacuum environments according to an embodiment of the present invention;

[0020] Figure 2 This is an internal structural diagram of a purification device for ultra-high vacuum environments according to an embodiment of the present invention;

[0021] Figure 3 This is a cross-sectional structural diagram of a purification device for an ultra-high vacuum environment according to an embodiment of the present invention;

[0022] Figure 4 This is a top view of a purification device for ultra-high vacuum environments according to an embodiment of the present invention.

[0023] Explanation of main reference numerals in the attached drawings: 1. Cylinder body; 11. Ionization chamber; 12. Collection chamber; 2. Isolator; 3. Magnet; 31. Perforation; 4. Ionization filament; 41. First filament section; 42. First electrode section; 5. First insulating component; 6. Neutralizing filament; 61. Second filament section; 62. Second electrode section; 7. Second insulating component; 8. Flange. Detailed Implementation

[0024] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0025] In one embodiment, reference is made to Figures 1 to 4 As shown, this invention provides a purification device for ultra-high vacuum environments. The purification device includes a cylinder 1, an isolator 2, a magnet 3, and an ionization filament 4. The first end of the cylinder 1 is open, and the second end is closed. The first end of the cylinder 1 is used to connect to a pipe in a vacuum interconnection system. The isolator 2 is disposed inside the cylinder 1, and its shape is adapted to the shape of the internal cavity of the cylinder 1. In the axial direction of the cylinder 1, the isolator 2 divides the internal cavity of the cylinder 1 into an ionization cavity 11 and a collection cavity 12. The ionization cavity 11 is located near the first end of the cylinder 1, and the collection cavity 12 is located near the second end of the cylinder 1. A magnet 3 is mounted on the isolator 2. The magnet 3 has a perforation 31, through which the ionization chamber 11 and the collection chamber 12 are connected. The two magnetic poles of the magnet 3 are distributed along a direction perpendicular to the central axis of the cylinder 1; that is, the inner side of the magnet 3 (the inner ring portion near the perforation 31) is the N pole, and the outer side (the outer ring portion away from the perforation 31) is the S pole, or the inner side is the S pole and the outer side is the N pole. An ionization filament 4 is at least partially disposed within the ionization chamber 11 for ionizing the gas within the ionization chamber 11.

[0026] According to the above structural design, in practical application, the first end of the cylinder 1 is connected to the pipe of the vacuum interconnection system. After the gas in the pipe enters the ionization chamber 11, the ionization filament 4 ionizes the gas into negatively charged particles and positively charged particles. Under the influence of the magnetic field of the magnet 3, the negatively charged particles and positively charged particles are subjected to the Lorentz force and move in a spiral motion within the perforation 31 on the magnet 3. When the negatively charged particles and positively charged particles enter the collection chamber 12, they begin to neutralize to form uncharged neutral particles, which are then collected in the collection chamber 12.

[0027] Furthermore, after the gas is ionized into negatively charged particles and positively charged particles, the dust particles entering the ionization chamber 11 can adsorb the negatively charged particles and positively charged particles to form charged dust particles. The charged dust particles can also be affected by the magnetic field and move in a spiral motion within the perforation 31, and are collected into the collection chamber 12.

[0028] Additionally, it should be noted that when the gas in the collection chamber 12 enters the ionization chamber 11 through the perforation 31, it will be re-ionized into negatively charged and positively charged particles by the ionization filament 4, and then re-enter the collection chamber 12 under the influence of the magnetic field. Similarly, dust particles that leave the collection chamber 12 will also be collected back into the collection chamber 12.

[0029] In one embodiment, reference is made to Figures 1 to 4 As shown, the magnet 3 is constructed as a hollow cylindrical structure, with its axial cavity forming a perforation 31.

[0030] In addition, the hollow cylindrical structure means that the height of magnet 3 is greater than its outer diameter. In practical applications, when the height of magnet 3 is less than its outer diameter, magnet 3 is actually constructed as a magnetic ring.

[0031] In one embodiment, reference is made to Figure 2 and Figure 3 As shown, the ionization filament 4 includes a first filament portion 41 and two first electrode portions 42 connected to both ends of the first filament portion 41. The first filament portion 41 is located inside the ionization chamber 11, and the end of the first electrode portion 42 away from the first filament portion 41 extends to the second end of the cylinder 1. The first electrode portion 42 is constructed as a long, columnar structure and is used to connect an external circuit to supply power to the first filament portion 41.

[0032] Furthermore, the purification device also includes two first insulating members 5, which are fitted one-to-one onto the two first electrode portions 42 to provide insulation protection for the first electrode portions 42 and prevent the first electrode portions 42 from touching the surrounding conductors and short-circuiting.

[0033] In one embodiment, reference is made to Figure 2 and Figure 3As shown, the purification device also includes a neutralizing filament 6, which is at least partially disposed in the collection chamber 12. The neutralizing filament 6 can provide a suitable neutralization environment (electric field, energy and temperature), increase the neutralization speed of negative and positive particles in the collection chamber 12, and improve the purification efficiency.

[0034] Similarly, the neutralizing filament 6 includes a second filament portion 61 and two second electrode portions 62 connected to both ends of the second filament portion 61. The end of the second electrode portion 62 away from the second filament portion 61 extends to the second end of the cylinder 1. The second electrode portion 62 is constructed as a long, columnar structure and is used to connect an external circuit to supply power to the second filament portion 61.

[0035] Furthermore, the purification device also includes two second insulating members 7, which are fitted one-to-one onto the two second electrode portions 62 to provide insulation protection for the second electrode portions 62 and prevent the second electrode portions 62 from contacting surrounding conductors and short-circuiting.

[0036] The length of the first electrode portion 42 is greater than the length of the second electrode portion 62, so as to facilitate the introduction of the first filament portion 41 into the ionization cavity 11. Similarly, the length of the first insulating member 5 is greater than the length of the second insulating member 7.

[0037] In one embodiment, the first insulating member 5 and the second insulating member 7 are made of a high-temperature resistant insulating material.

[0038] Preferably, the first insulating element 5 and the second insulating element 7 are made of ceramic material.

[0039] In one embodiment, reference is made to Figure 1 and Figure 4 As shown, the purification device includes multiple magnets 3 distributed circumferentially along the cylinder 1, with the magnetic poles of adjacent magnets 3 having opposite positions. That is, if the inner side of a magnet 3 is the N pole and the outer side is the S pole, then the inner side of another adjacent magnet 3 is the S pole and the outer side is the N pole. This ensures that when the magnets 3 are installed on the insulating member 2, there is no repulsive force between adjacent magnets 3, thus avoiding increased installation difficulty and improving the installation efficiency of the magnets 3.

[0040] In addition, even if the separator 2 is formed on the magnet 3 by injection molding or casting, the opposite magnetic pole distribution positions of two adjacent magnets 3 can make the magnets 3 attract together in advance, so as to facilitate subsequent injection molding or casting.

[0041] Preferably, the separator 2 is made of a non-magnetic metal.

[0042] Furthermore, multiple magnets 3 are arranged around the central axis of the cylinder 1.

[0043] In one embodiment, reference is made to Figure 1As shown, the purification device also includes a flange 8 fitted on the outer wall of the cylinder 1. After the cylinder 1 is inserted into the pipeline of the vacuum interconnection system, the flange 8 can be fixed to the outer wall of the pipeline by bolts to fix the entire purification device.

[0044] Furthermore, to ensure the smoothness of the outer wall of the pipe in the vacuum interconnection system, the flange 8 is positioned as close as possible to the second end of the cylinder 1 to increase the depth to which the cylinder 1 is inserted into the pipe.

[0045] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0046] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is merely for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A purifier for ultra-high vacuum environments, characterized in that, The purification device comprises: a cylinder (1), which is open at a first end and closed at a second end; a partition (2) arranged in the cylinder (1), which divides the internal cavity of the cylinder (1) into an ionization cavity (11) close to the first end of the cylinder (1) and a collection cavity (12) close to the second end of the cylinder (1) in the axial direction of the cylinder (1); a magnet (3) arranged on the partition (2), which is provided with a through hole (31) communicating the ionization cavity (11) and the collection cavity (12), and two magnetic poles of the magnet (3) are distributed along a direction perpendicular to the central axis of the cylinder (1); an ionization filament (4) arranged at least partially in the ionization cavity (11) for ionizing the gas in the ionization cavity (11); the ionization filament (4) comprises a first filament portion (41) and two first electrode portions (42) connected at both ends of the first filament portion (41), the first filament portion (41) is located in the ionization cavity (11), and one end of the first electrode portion (42) away from the first filament portion (41) extends to the second end of the cylinder (1).

2. The purification device of claim 1, wherein, The purification device further comprises two first insulating members (5) respectively sleeved on the two first electrode portions (42).

3. The purification device of claim 1, wherein, The purification device further comprises a neutralization filament (6) arranged at least partially in the collection cavity (12).

4. The purification device of claim 3, wherein The neutralization filament (6) comprises a second filament portion (61) and two second electrode portions (62) connected at both ends of the second filament portion (61), and one end of the second electrode portion (62) away from the second filament portion (61) extends to the second end of the cylinder (1).

5. The purification device of claim 4, wherein, The purification device further comprises two second insulating members (7) respectively sleeved on the two second electrode portions (62).

6. The purification device of claim 1, wherein, The purification device comprises a plurality of magnets (3) distributed circumferentially along the cylinder (1), and the magnetic pole distribution positions of two adjacent magnets (3) are opposite.

7. The purification device of claim 6, wherein The plurality of magnets (3) are arranged around the central axis of the cylinder (1).

8. The purification device of claim 1, wherein, The purification device further comprises a flange (8) sleeved on the circumferential outer wall of the cylinder (1).

9. The purification device of claim 1, wherein, The magnet (3) is configured as a magnetic ring or a hollow magnetic column.

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