A self-adaptive femtosecond laser precision machining system and method

Abstract

The present invention discloses a self-adaptive femtosecond laser precision machining system and method, which relates to the field of laser application technology, including: a central control mechanism, a femtosecond laser, an optical adjustment mechanism, an self-adaptive control mechanism, a sample displacement mechanism and a CCD monitoring mechanism. The technical solution of the present invention utilizes the light beam emitted by the femtosecond laser, performs light beam adjustment and collimation through an optical adjustment mechanism, uses an self-adaptive control method to adjust the parameters of the laser, uses a micro-displacement sample stage to achieve micro-nano manufacturing of complex structures, and observes the preparation results through a microscope. The system of the present invention has a simple optical path and uses automatic adjustment of the focus of the laser to solve the technical problem of the cumbersome operation of the existing femtosecond laser focus adjustment.

Description

Technical Field

[0001] The present invention relates to the field of laser application technology, and in particular to a self-adaptive femtosecond laser precision machining system and method. Background Art

[0002] Femtosecond is a unit of time, 1 femtosecond is equal to 10-15 seconds. Femtosecond laser refers to a pulsed laser emitted within a femtosecond period. Femtosecond laser is widely used in myopia correction surgery, fine processing of materials, ultrafast processes of materials, and chemical reaction kinetics research due to its high instantaneous power, precise targeted focusing and positioning, and little thermal damage to materials.

[0003] The common femtosecond laser precision processing systems on the market currently have the following disadvantages: 1. The optical path design is relatively complex, which may increase the cost, volume and maintenance difficulty of the system, and may also affect the stability and accuracy of laser transmission. 2. Focus adjustment may require complex operating steps, and may require multiple manual adjustments, which is time-consuming and labor-intensive, and it is difficult to achieve precise focus, affecting processing accuracy and efficiency. 3. Lack of adaptive adjustment capabilities, unable to automatically adjust laser parameters according to the actual situation during the processing, difficult to adapt to changes in different materials and processing requirements, may lead to unstable processing results. 4. Lack of effective observation means, unable to understand the processing process and results in real time, and difficult to make timely adjustments and optimizations. Summary of the invention

[0004] The technical solution of the present invention to solve the above technical problems is to provide an adaptively adjustable femtosecond laser ultra-precision machining system, comprising:

[0005] Central control agency;

[0006] A femtosecond laser, connected to the laser adjustment unit of the central control mechanism, for performing femtosecond laser parameter adjustment and emitting a laser beam;

[0007] An optical adjustment mechanism, used for adjusting and collimating the laser beam emitted by the femtosecond laser;

[0008] An adaptive control mechanism that measures the distance from the laser to the sample and transmits the data to a central control mechanism;

[0009] A sample displacement mechanism, which is located at the lower side of the optical adjustment mechanism and is used to execute the displacement parameter instruction of the central control mechanism to adjust the sample position; and

[0010] The CCD monitoring mechanism is connected to the central control mechanism and is used to monitor the graphics of the laser micro-nano manufacturing of the system.

[0011] Furthermore, the sample displacement mechanism includes: an X-axis electric displacement stage, a Y-axis electric displacement stage, and a Z-axis electric displacement stage; the Y-axis electric displacement stage is movably disposed on the X-axis electric displacement stage, and the Z-axis electric displacement stage is movably disposed on the Y-axis electric displacement stage.

[0012] Furthermore, the optical adjustment mechanism includes: a first reflector, a first lens, a second lens, a second reflector, a third reflector, and a third lens; the laser emitted by the femtosecond laser is reflected 90° by the first reflector, passes through the first lens and the second lens, is reflected 90° by the second reflector, and then reflected 90° by the third reflector, and is output through the third lens.

[0013] Furthermore, the adaptive control mechanism comprises:

[0014] Obtain the distance information from the laser to the sample;

[0015] Calculate the adjustment space distance ΔS(k) = ∑Ka*S(k-1)+∑Kb*Sc(k),

[0016] Among them, Ka, Kb are adaptive control coefficients, S(k-1) is the position in the measurement coordinates, and Sc(k) is the position in the basic coordinates;

[0017] The central control mechanism (1) decouples the adjustment space distance ΔS into:

[0018] Set the space distance

[0019] Analyze the adjustment space distance ΔS(k) = ∑Ka*S(k-1) + ∑Kb*Sc(k). When ΔS is small, it can be considered that:

[0020]

[0021] have to

[0022] The decoupling result is sent to the sample displacement mechanism for performing ΔS x ,ΔS y ,ΔS z Displacement parameter adjustment instructions.

[0023] In order to solve the above technical problems, the present invention also proposes a self-adjusting femtosecond laser precision machining method, comprising the following steps:

[0024] Setting the initial parameters of the femtosecond laser through a human-machine interface unit of a central control mechanism;

[0025] The femtosecond laser emits a laser beam according to the set parameters, and the beam is adjusted and collimated by an optical adjustment mechanism;

[0026] The adaptive control mechanism detects the spatial distance between the laser and the sample, and transmits the data to the central control mechanism for analysis and processing, calculates the adjusted spatial distance and decouples it into displacement parameter adjustment instructions;

[0027] The sample displacement mechanism performs precise displacement adjustment according to the received displacement parameter adjustment instruction, and adjusts the movement position parameters of the sample in real time;

[0028] The CCD monitoring mechanism monitors the manufactured graphics and sends the image signal to the central control mechanism for real-time monitoring;

[0029] Adjust the femtosecond laser parameters according to the real-time monitoring information.

[0030] Furthermore, the adaptive control mechanism detects the spatial distance between the laser and the sample, and transmits the data to the central control mechanism for analysis and processing, and the steps of calculating the adjustment of the spatial distance and decoupling it into displacement parameter adjustment instructions include:

[0031] Obtain the distance information from the laser to the sample;

[0032] Calculate the adjustment space distance ΔS(k) = ∑Ka*S(k-1)+∑Kb*Sc(k),

[0033] Among them, Ka, Kb are adaptive control coefficients, S(k-1) is the position in the measurement coordinates, and Sc(k) is the position in the basic coordinates;

[0034] The central control mechanism (1) decouples the adjustment space distance ΔS into:

[0035] Set the space distance

[0036] Analyze the adjustment space distance ΔS(k) = ∑Ka*S(k-1) + ∑Kb*Sc(k). When ΔS is small, it can be considered that:

[0037]

[0038] have to

[0039] The decoupling result is sent to the sample displacement mechanism for performing ΔS x ,ΔS y ,ΔS z Displacement parameter adjustment instructions.

[0040] The present invention uses the light beam emitted by a femtosecond laser to adjust and collimate the light beam through an optical adjustment mechanism, uses an adaptive control method to adjust the parameters of the laser, uses a micro-displacement sample stage to achieve micro-nano manufacturing of complex structures, and observes the preparation results through a microscope. The system of the present invention has a simple optical path and uses automatic adjustment of the focus of the laser to solve the technical problem of the cumbersome operation of the existing femtosecond laser focus adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0042] Figure 1 It is a structural schematic diagram of the self-adaptive femtosecond laser precision machining system of the present invention;

[0043] Figure 2 is a structural schematic diagram of the optical adjustment mechanism of the present invention;

[0044] Figure 3 It is a structural schematic diagram of the sample displacement mechanism of the present invention.

[0045] Description of Figure Numbers:

[0046] Label name Label name 1 Central Control Agency 4 Adaptive control mechanism 2 Femtosecond laser 5 Sample displacement mechanism 3 Optical adjustment mechanism 51 First drive motor 31 First reflector 52 X-axis electric translation stage 32 First lens 53 Second drive motor 33 Second lens 54 Y-axis motorized translation stage 34 Second reflector 55 Lifting motor 35 The third reflector 56 Z-axis motorized translation stage 36 The third lens 6 CCD Monitoring Agency DETAILED DESCRIPTION

[0047] The present invention proposes a self-adaptive femtosecond laser precision machining system and method, aiming to design a self-adaptive femtosecond laser precision machining system.

[0048] The femtosecond laser precision machining system with adaptive adjustment proposed by the present invention will be described below in a specific embodiment:

[0049] In the technical solution of this embodiment, Figure 1 As shown, an adaptively adjustable femtosecond laser ultra-precision machining system comprises:

[0050] Central control agency 1;

[0051] A femtosecond laser 2, which is connected to the laser adjustment unit of the central control mechanism 1, and is used to perform parameter adjustment of the femtosecond laser 2 and emit a laser beam;

[0052] An optical adjustment mechanism 3, used for adjusting and collimating the laser beam emitted by the femtosecond laser 2;

[0053] An adaptive control mechanism 4 is used to measure the distance between the laser and the sample and transmit the data to the central control mechanism 1;

[0054] A sample displacement mechanism 5, which is located at the lower side of the optical adjustment mechanism 3 and is used to execute the displacement parameter instruction of the central control mechanism 1 to adjust the sample position; and

[0055] The CCD monitoring mechanism 6 is connected to the central control mechanism 1 and is used to monitor the patterns of the laser micro-nano manufacturing of the system.

[0056] Specifically, the central control mechanism 1 includes a laser adjustment unit, an adaptive calculation unit, a displacement operation unit, a video acquisition unit, a structured design unit and a human-computer interaction interface unit; the laser adjustment unit is used to set the parameters of the femtosecond laser 2; the adaptive calculation unit is used to measure the distance between the laser and the sample after adjustment by the optical adjustment mechanism 3, calculate the adjustment parameters of the laser spot focusing on the surface of the micro-nano processing sample, and set the parameters of the adaptive control mechanism 4; the displacement operation unit is used to adjust the sample processing position, and execute the parameters of the adaptive control mechanism 4 to adjust the sample displacement mechanism 5; the video acquisition unit is used to collect the processing image content taken by the CCD monitoring mechanism 6 and monitor the processing process; the structured design unit is used to design the sample processing pattern; the human-computer interaction interface unit is used to monitor and manipulate the femtosecond laser precision processing system.

[0057] The adaptive control mechanism 4 includes a multi-channel position sensor for measuring the distance between the laser and the sample and adjusting the laser focus parameters. The multi-channel position sensor is connected to the central control mechanism 1, measures the distance between the laser and the sample after adjustment by the optical adjustment mechanism 3, and transmits data signals to the central control mechanism 1, and the central control mechanism 1 sets the parameters.

[0058] The sample displacement mechanism 5 uses the displacement parameter adjustment instructions analyzed by the central control mechanism 1 to control the displacement adjustment of the X-axis electric displacement stage 52, the Y-axis electric displacement stage 54, and the Z-axis electric displacement stage 56, and adjusts the movement position parameters of the sample in real time.

[0059] Furthermore, if Figure 3 As shown, the sample displacement mechanism 5 includes: an X-axis electric displacement stage 52, a Y-axis electric displacement stage 54, and a Z-axis electric displacement stage 56; the Y-axis electric displacement stage 54 can be movably set on the X-axis electric displacement stage 52, and the Z-axis electric displacement stage 56 can be movably set on the Y-axis electric displacement stage 54.

[0060] Specifically, a first drive motor 51 is provided in the X-axis electric translation table 52, a first screw is provided along the length direction of the X-axis electric translation table 52, the first screw is connected to the output shaft of the first drive motor 51, a first mobile table is provided along the length direction of the X-axis electric translation table 52, and the first mobile table is connected to the first screw; the Y-axis electric translation table 54 is fixed on the first mobile table, and when the output shaft of the first drive motor 51 rotates, the first screw is driven to rotate in the X-axis electric translation table 52, thereby driving the Y-axis electric translation table 54 to move along the length direction of the X-axis electric translation table 52. A second drive motor 53 is provided in the Y-axis electric translation stage 54, and a second screw is provided in the Y-axis electric translation stage 54, the second screw is connected to the output shaft of the second drive motor 53, a second moving stage is provided along the length direction of the Y-axis electric translation stage 54, and the second moving stage is connected to the second screw; the Z-axis electric translation stage 56 is fixed on the second moving stage, and when the output shaft of the second drive motor 53 rotates, the second screw is driven to rotate in the Y-axis electric translation stage 54, thereby driving the Z-axis electric translation stage 56 to move along the length direction of the Y-axis electric translation stage 54. A lifting platform is provided in the Z-axis electric translation stage 56, and is controlled by the lifting motor 55 in the Z-axis electric translation stage 56.

[0061] Furthermore, if Figure 2 As shown, the optical adjustment mechanism 3 includes: a first reflector 31, a first lens 32, a second lens 33, a second reflector 34, a third reflector 35, and a third lens 36; the laser emitted by the femtosecond laser 2 is reflected 90° by the first reflector 31, passes through the first lens 32 and the second lens 33, is reflected 90° by the second reflector 34, and then is reflected 90° by the third reflector 35, and is output through the third lens 36.

[0062] Furthermore, the adaptive control mechanism 4 comprises:

[0063] Obtain the distance information from the laser to the sample;

[0064] Calculate the adjustment space distance ΔS(k) = ∑Ka*S(k-1)+∑Kb*Sc(k),

[0065] Among them, Ka, Kb are adaptive control coefficients, S(k-1) is the position in the measurement coordinates, and Sc(k) is the position in the basic coordinates;

[0066] The central control mechanism 1 (1) decouples the adjustment space distance ΔS into:

[0067] Set the space distance

[0068] Analyze the adjustment space distance ΔS(k) = ∑Ka*S(k-1) + ∑Kb*Sc(k). When ΔS is small, it can be considered that:

[0069]

[0070] have to

[0071] The decoupling result is sent to the sample displacement mechanism 5 for executing ΔS x ,ΔS y ,ΔS z Displacement parameter adjustment instructions.

[0072] The present invention also proposes a self-adaptive femtosecond laser precision machining method, comprising the following steps:

[0073] Setting the initial parameters of the femtosecond laser through a human-machine interface unit of a central control mechanism;

[0074] The femtosecond laser emits a laser beam according to the set parameters, and the beam is adjusted and collimated by an optical adjustment mechanism;

[0075] The adaptive control mechanism detects the spatial distance between the laser and the sample, and transmits the data to the central control mechanism for analysis and processing, calculates the adjusted spatial distance and decouples it into displacement parameter adjustment instructions;

[0076] The sample displacement mechanism performs precise displacement adjustment according to the received displacement parameter adjustment instruction, and adjusts the movement position parameters of the sample in real time;

[0077] The CCD monitoring mechanism monitors the manufactured graphics and sends the image signal to the central control mechanism for real-time monitoring;

[0078] Adjust the femtosecond laser parameters according to the real-time monitoring information.

[0079] Furthermore, the adaptive control mechanism detects the spatial distance between the laser and the sample, and transmits the data to the central control mechanism for analysis and processing, and the steps of calculating the adjustment of the spatial distance and decoupling it into displacement parameter adjustment instructions include:

[0080] Obtain the distance information from the laser to the sample;

[0081] Calculate the adjustment space distance ΔS(k) = ∑Ka*S(k-1)+∑Kb*Sc(k),

[0082] Among them, Ka, Kb are adaptive control coefficients, S(k-1) is the position in the measurement coordinates, and Sc(k) is the position in the basic coordinates;

[0083] The central control mechanism (1) decouples the adjustment space distance ΔS into:

[0084] Set the space distance

[0085] Analyze the adjustment space distance ΔS(k) = ∑Ka*S(k-1) + ∑Kb*Sc(k). When ΔS is small, it can be considered that:

[0086]

[0087] have to

[0088] The decoupling result is sent to the sample displacement mechanism for performing ΔS x ,ΔS y ,ΔS z Displacement parameter adjustment instructions.

[0089] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. An adaptively adjustable femtosecond laser precision machining system, characterized in that: include: Central control agency; A femtosecond laser, connected to the laser adjustment unit of the central control mechanism, for performing femtosecond laser parameter adjustment and emitting a laser beam; An optical adjustment mechanism, used for adjusting and collimating the laser beam emitted by the femtosecond laser; An adaptive control mechanism that measures the distance from the laser to the sample and transmits the data to a central control mechanism; A sample displacement mechanism, which is located at the lower side of the optical adjustment mechanism and is used to execute the displacement parameter instruction of the central control mechanism to adjust the sample position; A CCD monitoring mechanism, the CCD monitoring mechanism is connected to the central control mechanism and is used to monitor the pattern of laser micro-nano manufacturing of the system; The calculation method of the adaptive control mechanism is: Calculate the adjustment space distance ΔS(k) = ∑Ka*S(k-1)+∑Kb*Sc(k), Among them, Ka, Kb are adaptive control coefficients, S(k-1) is the position in the measurement coordinates, and Sc(k) is the position in the basic coordinates; The central control mechanism (1) decouples the adjustment space distance ΔS into: Set the space distance Analyze the adjustment space distance ΔS(k) = ∑Ka*S(k-1) + ∑Kb*Sc(k). When ΔS is small, it can be considered that: have to The decoupling result is sent to the sample displacement mechanism for performing ΔS x ,ΔS y ,ΔS z Displacement parameter adjustment instructions.

2. The self-adaptive femtosecond laser precision machining system according to claim 1, characterized in that: The sample displacement mechanism comprises: an X-axis electric displacement stage, a Y-axis electric displacement stage, and a Z-axis electric displacement stage; the Y-axis electric displacement stage can be movably arranged on the X-axis electric displacement stage, and the Z-axis electric displacement stage can be movably arranged on the Y-axis electric displacement stage.

3. The self-adaptive femtosecond laser precision machining system according to claim 1, characterized in that: The optical adjustment mechanism includes: a first reflector, a first lens, a second lens, a second reflector, a third reflector, and a third lens; the laser emitted by the femtosecond laser is reflected 90° by the first reflector, passes through the first lens and the second lens, is reflected 90° by the second reflector, and then reflects 90° by the third reflector, and is output through the third lens.

4. A femtosecond laser precision machining method with adaptive adjustment, characterized in that: The following steps are involved: Setting the initial parameters of the femtosecond laser through a human-machine interface unit of a central control mechanism; The femtosecond laser emits a laser beam according to the set parameters, and the beam is adjusted and collimated by an optical adjustment mechanism; The adaptive control mechanism detects the spatial distance between the laser and the sample, and transmits the data to the central control mechanism for analysis and processing, calculates the adjusted spatial distance and decouples it into displacement parameter adjustment instructions; The sample displacement mechanism performs precise displacement adjustment according to the received displacement parameter adjustment instruction, and adjusts the movement position parameters of the sample in real time; The CCD monitoring mechanism monitors the manufactured graphics and sends the image signal to the central control mechanism for real-time monitoring; Adjust femtosecond laser parameters according to real-time monitoring information; The adaptive control mechanism detects the spatial distance between the laser and the sample, and transmits the data to the central control mechanism for analysis and processing, and the steps of calculating the adjustment of the spatial distance and decoupling it into displacement parameter adjustment instructions include: Obtain the distance information from the laser to the sample; Calculate the adjustment space distance ΔS(k) = ∑Ka*S(k-1)+∑Kb*Sc(k), Among them, Ka, Kb are adaptive control coefficients, S(k-1) is the position in the measurement coordinates, and Sc(k) is the position in the basic coordinates; The central control mechanism (1) decouples the adjustment space distance ΔS into: Set the space distance Analyze the adjustment space distance ΔS(k) = ∑Ka*S(k-1) + ∑Kb*Sc(k). When ΔS is small, it can be considered that: have to The decoupling result is sent to the sample displacement mechanism for performing ΔS x ,ΔS y ,ΔS z Displacement parameter adjustment instructions.

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