DMD-based maskless photoetching processing device and control method

Abstract

The invention relates to the technical field of photocuring 3D printing, and provides a DMD-based maskless photoetching processing device and a control method, and the device comprises a light source system used for generating laser; the printing system is used for containing a to-be-printed medium; the driving system is used for driving the execution system; a moving assembly of the execution system is slidably arranged at the bottom of the printing system. The moving assembly is used for driving the first execution assembly to move in the first direction of the printing system so as to expel bubbles in the printing medium. The moving assembly is used for driving the second execution assembly to move in the first direction of the printing system under the action of the driving force of the driving system so as to expel bubbles in the printing medium. According to the device, the two execution assemblies can be driven by a single power source to move independently and can also be driven at the same time, the installation space can be saved, the multi-joint control difficulty of equipment is reduced, the influence of multi-power-source vibration on precision is reduced, the time delay during multi-power-source driving can be eliminated, and the printing effect is guaranteed.

Description

Technical Field

[0001] The present application relates to the field of photocuring 3D printing technology, and in particular to a DMD-based maskless photolithography processing device and a control method. Background Art

[0002] Additive manufacturing technology uses a layer-by-layer cumulative method to create physical parts. Digital micromirror device (DMD) maskless lithography technology relies on a DMD device composed of millions of microscopic mirrors, each of which can independently control its angle, thereby controlling the direction of the light beam. When a UV light source illuminates the DMD device, each micromirror reflects or does not reflect light according to the instructions for the designed pattern, ultimately projecting the pattern onto the photoresist, completing the lithography process. DMD maskless lithography hybrid processing methods are widely used in optical device manufacturing, micro-nanostructure fabrication, and other fields.

[0003] In the DMD maskless lithography process, the output light must be focused onto the surface of the liquid in the print cartridge. The liquid used varies depending on the application process. A thin film is typically applied to the surface of the liquid. During processing, bubbles may form on the underside of the film, requiring regular removal. A scraper and roller mechanism, a bidirectional moving mechanism on top of the print cartridge, dispels these bubbles.

[0004] Currently, the scraper and roller mechanisms are driven by independent dual-stepping motors. However, this drive mode not only requires a large number of motors and is costly, but also takes up space. During operation, it can cause vibration interference to the optical components, thus affecting the final printing effect. Summary of the Invention

[0005] The present application provides a maskless lithography processing device and control method based on DMD, so that a single power source can drive two execution components to move independently, and can also drive two execution components to move synchronously at the same time. It has low cost, small space occupation, reduces the impact of vibration on accuracy, and ensures the printing effect.

[0006] The present application provides a DMD-based maskless lithography processing device provided in the first aspect, including: a light source system, a printing system, a driving system and an execution system; the light source system is configured to generate laser; the printing system is arranged on the laser path and is configured to hold the medium to be printed; the driving system is connected to the execution system and is configured to drive the execution system; the execution system includes a moving component, a first execution component and a second execution component; the moving component is slidably arranged at the bottom of the printing system, and the moving component is arranged between the first execution component and the second execution component; the moving component is configured to cooperate with the first execution component under the driving force of the driving system, and drive the first execution component to move along the first direction of the printing system to drive out bubbles inside the printing medium; the first direction is the length direction of the printing system; the moving component is also configured to cooperate with the second execution component under the driving force of the driving system, and drive the second execution component to move along the first direction of the printing system to drive out bubbles inside the printing medium.

[0007] In some possible implementations, the printing system includes: a print box, configured to hold a print medium; a cover, configured to cover the surface of the print medium; wherein the upper portion of the first execution component is located within the print medium and is in contact with a side of the cover covering the print medium, and the first execution component is configured to expel bubbles inside the print medium; the upper portion of the second execution component is located on the cover and is in contact with a side of the cover facing away from the print medium, and the second execution component is configured to expel bubbles inside the print medium.

[0008] In some feasible implementations, the first actuator includes a first connecting plate and a first actuator; the first connecting plate is located at the bottom of the print box, and the first actuator is arranged in the print medium; the moving assembly is configured to be connected to the first connecting plate under the driving force of the driving system, and drive the first actuator through the first connecting plate to move inside the print medium along the first direction; the second actuator includes a second connecting plate and a second actuator; the second connecting plate is located at the bottom of the print box, and the second actuator is arranged on the surface of the cover away from the print medium; the moving assembly is configured to be connected to the second connecting plate under the driving force of the driving system, and drive the second actuator through the second connecting plate to move on the surface of the print medium along the first direction.

[0009] In some feasible implementations, the drive system includes a drive motor and a synchronous belt, the output end of the drive motor is connected to the synchronous belt; the synchronous belt extends along a first direction, and the moving component is arranged on the synchronous belt; the synchronous belt is configured to rotate under the driving force of the drive motor and drive the moving component to rotate along the first direction.

[0010] In some feasible implementations, a first photoelectric switch and a second photoelectric switch; the execution system also includes a base plate, the first photoelectric switch and the second photoelectric switch are arranged on the base plate, and the first photoelectric switch and the second photoelectric switch are respectively located on both sides of the base plate along the first direction; wherein, the first photoelectric switch is configured to: determine the coordination state between the moving component and the first execution component; the second photoelectric switch is configured to: determine the coordination state between the moving component and the second execution component.

[0011] The first aspect of the present application provides a DMD-based maskless lithography processing device, in which the drive system can drive the mobile component to drive the first execution component to work, and the drive system can also drive the mobile component to drive the second execution component to work. Of course, the drive system can also drive the mobile component to drive the first execution component and the second execution component at the same time. In this way, a single power source can drive two execution components to move independently, and can also drive two execution components to move synchronously at the same time, thereby realizing switching between two movement modes. Compared with the traditional dual power source, it can save installation space and working devices, reduce the difficulty of controlling multiple joints of the equipment, reduce the impact of vibration of multiple power sources on accuracy, and eliminate the delay when driving multiple power sources to ensure printing effect.

[0012] The second aspect of the present application provides a control method for a DMD-based maskless lithography processing device, which is applied to the device provided in the first aspect. The control method includes determining the working mode of the execution system according to the cross-sectional area of ​​the bubbles inside the print box in the printing system; wherein the working mode includes a single-line mode and a parallel mode, the single-line mode is the working mode when the execution system adopts either the first execution component or the second execution component to work, and the parallel working mode is the working mode when the execution system adopts the first execution component and the second execution component to work simultaneously; determining the working state of the drive system according to the working mode; controlling the execution system to drive out bubbles in the printing medium in the printing system according to the working state of the drive system; and controlling the light source system to send laser into the printing medium of the printing system.

[0013] In some feasible implementations, the working mode of the execution system is determined based on the cross-sectional area of ​​the bubbles inside the print cartridge in the printing system, including: based on the cross-sectional area of ​​the bubbles inside the print cartridge being greater than or equal to a preset value, the execution system adopts a single-line working mode; based on the cross-sectional area of ​​the bubbles inside the print cartridge being less than a preset value, the execution system adopts a parallel working mode; wherein the length of the print cartridge is equal to the moving distance of the first execution component and the second execution component in the execution system along the first direction, and the first direction is the length direction of the printing system.

[0014] In some feasible implementations, when the execution system adopts a parallel working mode, the working state of the drive system is determined according to the working mode, including: controlling the drive motor in the drive system to rotate along a first clockwise direction; obtaining the on state of the first photoelectric switch; based on the on state of the first photoelectric switch, controlling the drive motor to rotate along a second clockwise direction; the first clockwise direction and the second clockwise direction are opposite; obtaining the on state of the second photoelectric switch; based on the on state of the second photoelectric switch, controlling the drive motor to rotate along the first clockwise direction.

[0015] In some feasible implementations, when the execution system adopts a single-line working mode and the first execution component is working, the working state of the drive system is determined according to the working mode, including: controlling the drive motor in the drive system to rotate along a first clockwise direction; obtaining the on state of the first photoelectric switch; based on the first photoelectric switch being turned on, controlling the drive motor to rotate along a second clockwise direction; obtaining the on state of the second photoelectric switch; based on the second photoelectric switch being turned on, controlling the drive motor to rotate along the first clockwise direction; the first clockwise direction and the second clockwise direction are opposite.

[0016] In some feasible implementations, when the execution system adopts a single-line working mode and the second execution component is working, the working state of the drive system is determined according to the working mode, including: controlling the drive motor in the drive system to rotate along the second clockwise direction; obtaining the on state of the second photoelectric switch; based on the second photoelectric switch being turned on, controlling the drive motor to rotate along the first clockwise direction; obtaining the on state of the first photoelectric switch; based on the first photoelectric switch being turned on, controlling the drive motor to rotate along the second clockwise direction; the first clockwise direction and the second clockwise direction are opposite.

[0017] The control method of the DMD maskless lithography processing device provided in the second aspect of this application is applied to the device provided in the first aspect. Its beneficial technical effects can be found in the first aspect and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the present application, the following is a brief introduction to the drawings required for use in the embodiments. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0019] Figure 1 This is a structural diagram of a DMD-based maskless lithography processing device provided in an embodiment of the present application; Figure 2 1 is a side view of a multi-axis movable platform and an actuator assembly combination provided in an embodiment of the present application; Figure 3 This is a schematic diagram of the installation structure of a printing system provided in an embodiment of the present application; Figure 4 is a cross-sectional view of a cover fixture provided in an embodiment of the present application; Figure 5 This is a schematic structural diagram of a first actuator and a second actuator provided in an embodiment of the present application; Figure 6 This is a schematic structural diagram of a print cartridge provided in an embodiment of the present application; Figure 7 is a top view of an execution system provided in an embodiment of the present application; Figure 8 is a side view of an execution system provided by an embodiment of the present application; Figure 9 yes Figure 7 Cross-sectional view in the AA direction; Figure 10 yes Figure 9 A partial schematic diagram at point C; Figure 11 yes Figure 8 Cross-sectional view in the BB direction; Figure 12 This is one of the structural schematic diagrams of a first position-limiting member provided in an embodiment of the present application; Figure 13 This is the second structural diagram of a first position-limiting member provided in the application embodiment; Figure 14 This is a flow chart of a control method for a DMD-based maskless lithography processing device provided in an embodiment of the present application; Figure 15 It is a flow chart of a control method in a specific implementation provided in an embodiment of the present application.

[0020] Graphic mark: 1- Light source system; 2-printing system; 21-printing box; 211-box body; 212-base plate; 213-column; 22 - cover; 23 - cover fixture; 231 - first fixture; 232 - second fixture; 233 - handle; 234 - membrane support plate; 3- drive system; 31- drive motor; 32- timing belt; 33- timing pulley; 4-Execution system; 41-Moving assembly; 411-Front guide column; 42 - first actuator; 421 - first connecting plate; 422 - first actuator, 423 - first leveling module; 423a - first horizontal guide support rod; 423b - first vertical guide support rod; 423c - first linear slide; 43 - second actuator; 431 - second connecting plate; 432 - second actuator; 433 - second leveling module; 433a - second horizontal guide support rod; 433b - second vertical guide support rod; 433c - second linear slide; 44 - bottom plate; 441 - first fixed stopper, 442 - first compression spring; 443 - first sliding stopper; 444 - first locking flange; 445 - first ball plunger; 446 - first stopper; 447 - second fixed stopper, 448 - second compression spring; 449 - second sliding stopper; 450 - second locking flange; 451 - second ball plunger; 452 - second stopper; 45 - slide rail; 46 - first sliding connecting plate; 47 - first slide connecting plate; a1 - first guide groove; b1 - first long hole; 48 - second sliding connecting plate; 49 - second slide connecting plate; a2 - second guide groove; b2 - second long hole; 5-Multi-axis movable platform; 61 - first photoelectric switch; 62 - second photoelectric switch; 63 - third photoelectric switch; 64 - fourth photoelectric switch. DETAILED DESCRIPTION

[0021] The following will clearly describe the technical solutions in the embodiments of the present application in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments of the present application, other embodiments obtained by ordinary technicians in this field without making any creative work are all within the scope of protection of this application.

[0022] Hereinafter, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature identified with "first," "second," etc., may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0023] In addition, in this application, directional terms such as "upper", "lower", "inner" and "outer" are defined relative to the orientation of the components in the drawings. It should be understood that these directional terms are relative concepts. They are used for relative description and clarification, and they can change accordingly according to changes in the orientation of the components in the drawings.

[0024] Combine Figure 1 and Figure 2 As shown, the DMD-based maskless lithography processing device provided in an embodiment of the present application includes a light source system 1, a printing system 2, a driving system 3 and an execution system 4.

[0025] The light source system 1 is configured to generate laser light. The light source system 1 provided in the embodiment of the present application may be a DMD light source system.

[0026] The printing system 2 is disposed on the optical path of the laser and is configured to hold the medium to be printed and provide a printing environment.

[0027] The printing medium can be a liquid, and the laser is applied to the liquid to form the desired printing pattern, which gradually transforms from liquid to solid. The liquid can be a photosensitive resin, and the light source system 1 can emit light according to a set program to perform light curing in the photosensitive resin.

[0028] The driving system 3 is connected to the execution system 4 and is configured to drive the execution system 4 .

[0029] The driving system 3 may include a driving motor.

[0030] The execution system 4 includes a moving component 41 , a first execution component 42 , and a second execution component 43 .

[0031] The movable assembly 41 is slidably disposed at the bottom of the printing system 2. Vertically, the movable assembly 41 is disposed below the first actuator 42 and the second actuator 43. Horizontally, the movable assembly 41 is positioned between the first actuator 42 and the second actuator 43. Under the driving force of the drive system 3, the movable assembly 41 is configured to cooperate with the first actuator 42 to drive the first actuator 42 to move along a first direction within the printing system 2 to dislodge bubbles within the print medium. The first direction is the longitudinal direction of the printing system 2. The movable assembly 41 is also configured to cooperate with the second actuator 43 to drive the second actuator 43 to move along the first direction within the printing system 2 to dislodge bubbles on the surface of the print medium. The first direction may be a horizontal direction.

[0032] That is, under the driving force of the drive system 3, the moving component 41 can cooperate with the first actuator 42 and the second actuator 43. The upper portion of the first actuator 42 can be located inside the print medium, and the upper portion of the first actuator 42 can be a scraper. The scraper moves along a first direction inside the print medium, thereby dispelling bubbles from the print medium. The upper portion of the second actuator 43 can be located on the surface of the print medium, and the upper portion of the second actuator 43 can be a roller. The roller moves along a first direction on the surface of the print medium, thereby dispelling bubbles from the print medium surface. The purpose of dispelling bubbles is to prevent bubbles in the optical path from affecting the printing effect. The bubbles are dispelled to the ends of the print medium and do not interfere with the printing optical path.

[0033] During actual operation, the drive system 3 can drive the mobile component 41 to drive the first actuator 42 to work, and the drive system 3 can also drive the mobile component 41 to drive the second actuator 43 to work. Of course, the drive system 3 can also drive the mobile component 41 to drive the first actuator 42 and the second actuator 43 at the same time. In this way, a single power source can drive the two actuators to move independently, and can also drive the two actuators to move synchronously at the same time, realizing switching between the two movement modes. Compared with the traditional dual power source, it can save installation space and working components, has low cost, reduces the difficulty of controlling multiple joints of the equipment, reduces the impact of vibration of the multi-joint power source on accuracy, and can also eliminate the delay when driving multiple power sources, ensuring printing accuracy and printing effect.

[0034] In some feasible implementations, continue to combine Figure 1 As shown, the DMD-based maskless lithography processing apparatus provided in the embodiment of the present application further includes a multi-axis movable platform 5. The printing system 2, the driving system 3 and the execution system 4 can be arranged on the multi-axis movable platform 5.

[0035] The multi-axis movable platform 5 may include multiple driving motors controlled along the XYZ axis directions, so as to meet the printing requirements in different directions.

[0036] In some possible implementations, combined with Figure 3 and Figure 4 As shown, the printing system 2 includes a print cartridge 21 , a cover 22 , and a cover fixture 23 .

[0037] The print cartridge 21 is configured to contain print media.

[0038] The cover 22 is configured to cover the surface of the print medium. The cover 22 can be fixed to the print cartridge 21 via a cover fixture 23. The cover 22 is in contact with the print medium, so that bubbles inside the print medium can be driven out by rolling the cover 22.

[0039] Specifically, the upper portion of the first actuator 42 is located in the printing medium and is in contact with the side of the cover 22 covering the printing medium. The first actuator 42 is configured to drive out bubbles inside the printing medium.

[0040] The upper portion of the second actuator 43 is located on the cover 22 and is in contact with the side of the cover 22 facing away from the printing medium. The second actuator 43 is configured to drive out bubbles inside the printing medium.

[0041] In a specific implementation, see Figure 4The cover 22 may be a film, which is mounted on the print cartridge 21 via a cover fixture 23. In this embodiment, the cover fixture 23 may include a first fixture 231, a second fixture 232, a handle 233, and a film support plate 234. The film is attached to the first fixture 231. The second fixture 232 may be fixed to the upper side of the first fixture 231 by a threaded connection. The film support plate 234 contacts and presses the film downwardly and is fixed to the upper portion of the second fixture 232 by a threaded connection. The handle 233 may be fixed to the upper portion of the second fixture 232 by a threaded connection.

[0042] During the printing process, the laser from light source system 1 performs photocuring at the focal point of the light on the lower surface of the film. The printed pattern of a single layer of the photocured product is formed by the linear motion of motors that control the X and Y axes. After one layer of patterning is completed, the Z-axis motor is controlled to move the placed object away from the light source, preparing for printing the next layer. The laser prints onto the placed object, gradually forming a cured product on its surface. The print cartridge 21 remains fixed in position after the printing laser has adjusted its focal length. After one layer of printing is completed, the Z-axis motor can be used to drive the placed object to continue printing the next layer.

[0043] The maximum printing height of the light-curable product is related to the depth of the print box 21 and the stroke of the Z-axis motor.

[0044] In a specific implementation, Figure 3 and Figure 5 As shown, the first execution assembly 42 includes a first connecting plate 421 and a first execution member 422 . The first connecting plate 421 is located at the bottom of the printing box 21 , and the first execution member 422 is disposed in the printing medium.

[0045] The second actuator assembly 43 includes a second connecting plate 431 and a second actuator 432 ; the second connecting plate 431 is located at the bottom of the print cartridge 21 , and the second actuator 432 is disposed on the surface of the cover 22 facing away from the print medium.

[0046] The moving assembly 41 is configured to be connected to the first connecting plate 421 under the driving force of the driving system 3 , and to drive the first actuator 422 to move inside the printing medium along a first direction via the first connecting plate 421 .

[0047] The moving assembly 41 is configured to be connected via the second connecting plate 431 under the driving force of the driving system 3 , and to drive the second actuator 432 via the second connecting plate 431 to move along the first direction on the surface of the printing medium.

[0048] In this way, the first actuator 422 and the second actuator 432 located at the upper portion can be driven by driving the first connecting plate 421 or the second connecting plate 431 through the moving assembly 41 .

[0049] In a specific implementation, see Figure 6 As shown, the print cartridge 21 may include a cartridge body 211, a base plate 212, and columns 213. The cartridge body 211 may be precisely positioned and fixed to the base plate 212 via two locating pins. The position of the cartridge body 211 may also be fine-tuned via three fine-adjustment screws on the base plate 212. After horizontal adjustment, the print cartridge 21 may be fixed to the base plate 212 via four M6 set screws, and the base plate 212 may be fastened to the four columns 213 via four M4 screws. The columns 213 are disposed on the bottom plate of the execution system 4.

[0050] In some possible implementations, see Figure 3 The drive system 3 may include a drive motor 31, a synchronous belt 32, and a synchronous pulley 33. The output end of the drive motor 31 is connected to the synchronous pulley 33. The synchronous belt 32 is sleeved on the synchronous pulley 33. The synchronous belt 32 extends along a first direction. The drive motor 31 can drive the synchronous belt 32 to rotate in the first direction. The moving assembly 41 is disposed on the synchronous belt 32. When the synchronous belt 32 is driven by the drive motor 31, it can drive the moving assembly 41 to move in the first direction.

[0051] For example, during the movement of the moving component 41 along the first direction, it gradually approaches the first connecting plate 421 and at the same time moves away from the second connecting plate 431 until the moving component 41 moves to connect with the first connecting plate 421, thereby driving the first actuator 422 to move.

[0052] For example, during the movement of the moving component 41 along the first direction, it gradually approaches the second connecting plate 431 and at the same time moves away from the first connecting plate 421 until the moving component 41 moves to connect with the second connecting plate 431, thereby driving the second actuator 432 to move.

[0053] Specifically, see Figure 5The first actuator component 42 also includes a first leveling module 423, which is arranged between the first actuator 422 and the first connecting plate 421. The first leveling module 423 plays a role in transmitting the driving force, and can also adjust the horizontal state of the first actuator 422. The second actuator component 43 also includes a second leveling module 433, which is arranged between the second actuator 432 and the second connecting plate 431. The second leveling module 433 plays a role in transmitting the driving force, and can also adjust the horizontal state of the second actuator 432. In this way, by setting the first leveling module 423 and the second leveling module 433, the printing accuracy can be improved, and the assembly and disassembly can be facilitated.

[0054] Among them, the first leveling module 423 includes a first horizontal guide support rod 423a, a first vertical guide support rod 423b and a first linear slide 423c. The two ends of the first actuator 422 are respectively fixed on the first horizontal guide support rod 423a by butterfly nuts. The first horizontal guide support rod 423a and the first vertical guide support rod 423b are connected by a rotating shaft, and a slight angle rotation can occur between the two for leveling. The first linear slide 423c is connected to the first vertical guide support rod 423b through a slide connecting rod, and the first linear slide 423c and the slide connecting rod can be connected by M2.5 screws. The first linear slide 423c can move up and down in the vertical direction to achieve leveling of the first actuator 422. Among them, the first linear slide 423c is connected to the first connecting plate 421.

[0055] The second leveling module 433 includes a second horizontal guide support rod 433a, a second vertical guide support rod 433b and a second linear slide 433c. The two ends of the second actuator 432 are respectively fixed to the second horizontal guide support rod 433a by butterfly nuts. The second horizontal guide support rod 433a and the second vertical guide support rod 433b are connected by a rotating shaft, and a slight angular rotation can occur between the two for leveling. The second linear slide 433c is connected to the second vertical guide support rod 433b through a slide connecting rod, and the second linear slide 433c and the slide connecting rod can be connected by M2.5 screws. The second linear slide 433c can move up and down in the vertical direction to achieve leveling of the second actuator 432. Among them, the second linear slide 433c is connected to the second connecting plate 431.

[0056] In a specific implementation, Figures 7 to 11 As shown, the execution system 4 further includes a base plate 44 and a slide rail 45. The driving motor 31 and the synchronous belt 32 are both arranged on the base plate 44.

[0057] The moving assembly 41 is disposed on the upper portion of the slider of the slide rail 45 and may be threadedly connected. The drive motor 31 may be a stepper motor, which is disposed on one side of the base plate 44. The synchronous belt 32 is mounted on a synchronous pulley 33 connected to the stepper motor. The synchronous belt 32 transmits the driving force of the stepper motor to the moving assembly 41 via the synchronous pulley 33, thereby enabling the moving assembly 41 to move along the slide rail 45 in the first direction.

[0058] To facilitate a better understanding of the single power source controlling the dual execution components in this application, the following Figures 7 to 13 The connection and separation process of the moving component 41 and the first connecting plate 421 is described. Figure 13 (a) and Figure 13 (b) shows different positions of the first limiting member 446 .

[0059] When it is necessary to control the movement of the first actuator 42, the control drive motor 31 is controlled to rotate along the first clockwise direction, and the synchronous belt 32 drives the moving assembly 41 to move along the A1 direction close to the first connecting plate 421. During the movement, the front guide column 411 of the moving assembly 41 gradually shortens the distance between it and the first guide groove a1. The first guide groove a1 is a groove structure formed by the first sliding connecting plate 46 and the first slide connecting plate 47 arranged at the lower part of the first connecting plate 421. The first sliding connecting plate 46 and the first slide connecting plate 47 include a slotted structure. After assembling the two, the first guide groove a1 and the first long hole b1 can be formed, and the two are installed at the lower part of the first connecting plate 421. The first guide groove a1 it has corresponds to the position of the front guide column 411 of the moving assembly 41. As the moving assembly 41 enters the first guide groove a1, the distance between the moving assembly 41 and the first connecting plate 421 continues to decrease. At the same time, the first elongated hole b1 formed by the first sliding connecting plate 46 and the first slide connecting plate 47 is positioned corresponding to the center area of ​​the first connecting plate 421, effectively ensuring balanced force. As the moving assembly 41 is in contact with the first connecting plate 421, to ensure connection stability, the drive motor 31 will continue to control the moving assembly 41 to push the first connecting plate 421 toward the first locking flange 444. A first snap-fit ​​assembly is also provided on the base plate 44. The first snap-fit ​​assembly includes a first fixed stop 441, a first compression spring 442, a first sliding stop 443, and a first locking flange 444. The first locking flange 444 is fixed to the base plate 44. The first fixed stop 441 has a structure with a guide end and a connecting rod. The connecting rod is threadedly connected to the first locking flange 444. The first sliding stop 443 is sleeved on the connecting rod and is located between the guide end and the first locking flange 444. The first sliding stop 443 is connected to the first fixed stop 441 via the first compression spring 442. During the process of the moving assembly 41 driving the first connecting plate 421 to continue to move along the A1 direction, as the first fixed stopper 441 enters the first long hole b1, the distance between the first connecting plate 421 and the first locking flange 444 continues to decrease. Since the first limiting member 446 on the first connecting plate 421 is connected to a spring structure at one end and abuts against the first fixed stopper 441 at the other end, during this process, the first limiting member 446 will slide along the inclined surface m1 of the guide end in the B1 direction, thereby compressing the spring structure connected thereto. The horizontal length of the sliding area of ​​the first limiting member 446 is L1. At this time, the first limiting member 446 gradually changes from the first limiting member 446 to the first limiting member 446. Figure 12 The position is converted to Figure 13The position shown in (a) in the figure. Next, as the moving assembly 41 continues to move, the end of the first limiter 446 will enter the area between the first fixed stop 441 and the first sliding stop 443. The sliding area of ​​the first limiter 446 has a horizontal length of L2. In this area, due to the lack of an inclined surface, the first limiter 446 will not squeeze the spring connected to it. Next, the end of the first limiter 446 will slide along the inclined surface m2 of the first sliding stop 443 in the direction B1. At this time, the spring structure connected to the first limiter 446 will be squeezed. The inclined surface m2 and the inclined surface m1 have the same inclination direction, but different inclination angles. The angle between the inclined surface m2 and the vertical direction is smaller than the angle between the inclined surface m1 and the vertical direction. Finally, the first limiter 446 will move from the inclined surface m2 to the inclined surface m3. The inclined surface m3 and the inclined surface m2 have different inclination directions. During the movement of the first limiter 446 on the inclined surface m3, the first limiter 446 slides along the direction B2, and the spring structure connected to it recovers its elastic deformation. The sliding distance of the first limiter 446 on the inclined surface m2 and the inclined surface m3 along the horizontal direction is L3. At this time, the moving assembly 41 and the first connecting plate 421 are in a connected relationship, and the first limiter 446 is in Figure 13 The position shown in (b) is shown in FIG. The inclination angles of the inclined surfaces m1, m2, and m3 can be adjusted according to the actual model.

[0060] At this point, the front guide post 411 of the moving assembly 41 is completely restrained within the first guide groove a1 by the first ball plunger 445 on the first connecting plate 421. There is no restraining relationship between the first retaining member 446 and the first fixed block 441, the first compression spring 442, and the first sliding block 443. The moving assembly 41 is connected to the first connecting plate 421 and can drive it to move. In this state, a signal trigger (not shown) located above the moving assembly 41 triggers the first photoelectric switch 61 to turn on. The control unit of the drive system 3 receives the on signal from the first photoelectric switch 61 and controls the drive motor 31 to reverse. The moving assembly 41 drives the first connecting plate 421 to move in the A2 direction. Because a first compression spring 442 is provided between the first sliding block 443 and the first fixed block 441, the first stopper 446 pushes the first sliding block 443 to compress the first compression spring 442 until the first fixed block 441 and the first sliding block 443 engage. The first stopper 446 then slides directly from the inclined surface m3 of the first sliding block 443 to the inclined surface m1 of the first fixed block 441, freeing the first connecting plate 421 from the first locking flange 444. The moving assembly 41 can then drive the first actuator 42 to move. A1 and A2 are two opposite sub-directions of the first direction. Among them, the length and force state of the first compression spring 442 can be determined according to the fitting state of the first fixed stopper 441 and the first sliding stopper 443 when under force, thereby ensuring that during the above movement process, the first limiter 446 can slide directly from the inclined surface m3 to the inclined surface m1.

[0061] It should be emphasized that for ease of presentation, Figure 13 The structure of the first compression spring 442 is not reflected in the figure. After the first connecting plate 421 is separated from the first locking flange 444, the first compression spring 442 restores its elastic deformation, and the first fixed stop 441 and the first sliding stop 443 return to their initial state, that is, there is a certain distance between the two.

[0062] After the first actuator 42 completes its movement, it is necessary to move the first actuator 42 to its initial position and connect it to the first locking flange 444, the first fixed stop 441, etc. It is only necessary to control the drive motor 31 to rotate along the first clockwise direction, and the moving assembly 41 drives the first connecting plate 421 to move along the A1 direction. When the first limit member 446 moves between the inclined surface m1 and the inclined surface m2, the signal trigger member on the upper part of the moving assembly 41 triggers the third photoelectric switch 63 to turn on, and the drive motor 31 rotates along the second clockwise direction, and the moving assembly 41 drives the first connecting plate 421 to move along the A2 direction. The top of the first limit member 446 is stuck at the larger end of the guide end of the first fixed stop 441. As the drive motor 31 continues to rotate, the moving assembly 41 continues to pull the first connecting plate 421, and the first connecting plate 421 is connected to the first locking flange 444 as a whole through the first limit member 446 and cannot be separated. During this process, the restraining force of the first ball plunger 445 on the first connecting plate 421 on the front guide column 411 of the moving component 41 is less than the pulling force of the moving component 41. The first ball plunger 445 moves along the B2 direction, releasing the restraint on the front guide column 411, and the moving component 41 and the first connecting plate 421 are in a separated state.

[0063] The DMD-based maskless lithography processing apparatus further includes a first photoelectric switch 61, a second photoelectric switch 62, a third photoelectric switch 63, and a fourth photoelectric switch 64 disposed on the base plate 44. The first photoelectric switch 61, the third photoelectric switch 63, the fourth photoelectric switch 64, and the second photoelectric switch 62 can be sequentially disposed along the direction from A1 to A2. The first photoelectric switch 61 and the third photoelectric switch 63 are disposed on opposite sides of the base plate 44, and the second photoelectric switch 62 and the fourth photoelectric switch 64 are disposed on opposite sides of the base plate 44, with the first photoelectric switch 61 being located near the first locking flange 444.

[0064] The first photoelectric switch 61 is used to determine the coordination status between the movable assembly 41 and the first actuator 42. When the first photoelectric switch 61 is on, it indicates that the first actuator 42 has been driven to slide by the movable assembly 41. The third photoelectric switch 63 is used to determine whether the first actuator 42 is separated from the movable assembly 41. When the first photoelectric switch 61 is on, it indicates that the movable assembly 41 is separated from the first actuator 42.

[0065] The second photoelectric switch 62 is used to determine the coordination status between the movable assembly 41 and the second actuator 43. When the second photoelectric switch 62 is on, it indicates that the second actuator 43 has been driven to slide by the movable assembly 41. The fourth photoelectric switch 64 is used to determine whether the second actuator 43 is separated from the movable assembly 41. When the fourth photoelectric switch 64 is on, it indicates that the movable assembly 41 has been separated from the second actuator 43.

[0066] Similarly, the base plate 44 is also equipped with a second fixed stop 447, a second compression spring 448, a second sliding stop 449, a second locking flange 450, a second ball plunger 451, and a second stopper 452. The DMD-based maskless lithography processing apparatus also includes a second sliding connecting plate 48, a second slide connecting plate 49, a second guide groove a2, and a second slot b2. The second connecting plate 431 on the other side cooperates with these components and moves in the same way as the first connecting plate 421. The detailed connection relationship and movement process of the first connecting plate 421 can be found in the description of the first connecting plate 421, thereby enabling a single power source to control two independent actuators.

[0067] It is worth noting that the above-mentioned connection method between the moving component 41 and the first connecting plate 421 and the second connecting plate 431 is only an example. In other specific implementation methods, the moving component 41 can also be provided with a first grasping part and a second grasping part (not shown in the figure). The first grasping part is used to grasp the first connecting plate 421 and drive the first connecting plate 421 to move through a grasping clamp under the action of the driving force and the control program of the control unit. The first grasping part can also open the grasping clamp and separate from the first connecting plate 421 under the action of the control program of the control unit. The principle of the second grasping part is the same as that of the first grasping part.

[0068] Corresponding to the aforementioned embodiment, the present application also provides an embodiment of a control method based on a DMD maskless lithography processing device, which is applied to the aforementioned device.

[0069] Combine Figure 11 and Figure 14 As shown, the control method includes the following steps S1 to S4.

[0070] Step S1: determining the operating mode of the actuator system according to the cross-sectional area of ​​the air bubble inside the print box in the printing system.

[0071] Among them, the working mode includes a single-line mode and a parallel mode. The single-line mode is the working mode when the execution system adopts either the first execution component or the second execution component to work, and the parallel working mode is the working mode when the execution system adopts the first execution component and the second execution component to work simultaneously.

[0072] Specifically, step S2 may include steps S11 to S13.

[0073] Step S11: Determine whether the cross-sectional area of ​​the bubble inside the print cartridge is greater than or equal to a preset value. If so, proceed to step S12; otherwise, proceed to step S13.

[0074] Step S12: Based on the cross-sectional area of ​​the bubble inside the print cartridge being greater than or equal to a preset value, the execution system adopts a single-line working mode.

[0075] Step S13: Based on the cross-sectional area of ​​the bubble inside the print cartridge being smaller than a preset value, the execution system adopts a parallel working mode.

[0076] The length of the print cartridge is equal to the moving distance of the first execution component and the second execution component in the execution system along the first direction.

[0077] Specifically, the preset value can represent the distribution of bubbles within the print medium. For example, if the cross-sectional area of ​​bubbles within the print cartridge is greater than or equal to the preset value, it indicates a large film area and a high number of bubbles, and single-line operation mode can be used. If the cross-sectional area of ​​bubbles within the print cartridge is less than the preset value, it indicates a small film area with fewer surface issues, and parallel operation mode can be used. The appropriate operation mode can be selected based on the printing scenario to effectively ensure printing efficiency. It should be noted that when the print medium is placed, it is shaken to eliminate bubbles, and then the film is sealed. The cross-sectional area of ​​bubbles within the print cartridge can be detected by a sensor located on the DMD-based maskless photolithography processing device or manually input. The manual input setting can be manually detected or input using an external detection device. In other words, the cross-sectional area of ​​bubbles within the print cartridge in this application can be determined using a variety of methods. It is worth noting that the cross-sectional area of ​​the print bubbles within the print cartridge is determined based on detection within the print area of ​​the print cartridge. The print area is smaller than the cross-sectional area of ​​the print cartridge, and the printing light path is within the print area. That is, if the bubble is in the non-printing area and does not interfere with the printing light path, the cross-sectional area detection is not performed. If the bubble is in the printing area and interferes with the printing light path, the cross-sectional area detection is performed.

[0078] The preset value can be adjusted comprehensively according to the properties of the actual printing medium, the size of the printing box, the parameters of the printing laser, etc.

[0079] Step S2: Determine the working state of the drive system according to the working mode.

[0080] The working state of the drive system includes positive output and reverse output. Positive output means the drive motor in the drive system rotates forward, and reverse output means the drive motor in the drive system rotates reverse.

[0081] Specifically, when the execution system adopts the parallel working mode, step S2 can be implemented by the following steps S201 to S205.

[0082] Step S201: controlling a driving motor in the driving system to rotate along a first clockwise direction.

[0083] Step S202: Acquire the on state of the first photoelectric switch.

[0084] Step S203: Based on the activation of the first photoelectric switch, the driving motor is controlled to rotate along the second clockwise direction.

[0085] It is understood that the first clockwise direction may be the direction of forward rotation of the drive motor, the first clockwise direction may be a clockwise direction, and the second clockwise direction may be a counterclockwise direction. When the drive motor rotates in the first clockwise direction, the movable assembly moves toward the first connecting plate, and when the first photoelectric switch is turned on, it indicates that the movable assembly is connected to the first connecting plate and can drive the first actuator to move. The second clockwise direction may be the direction of reverse rotation of the drive motor, and the second clockwise direction may be a counterclockwise direction.

[0086] After the first connecting plate is connected, the moving assembly needs to be connected to the second connecting plate. At this time, the driving motor is controlled to rotate along the second clockwise direction, and the moving assembly moves toward the second connecting plate.

[0087] Step S204: Acquire the on state of the second photoelectric switch.

[0088] Step S205: Based on the activation of the second photoelectric switch, the driving motor is controlled to rotate along the first clockwise direction.

[0089] After the second photoelectric switch is turned on, it indicates that the moving component has been connected to the second connecting plate and can drive the second actuator to move. At this time, the driving motor is controlled to rotate along the first clockwise direction, thereby driving the first actuator and the second actuator to move synchronously.

[0090] Specifically, when the execution system adopts a single-line working mode and the first execution component is working, step S2 can be implemented by the following steps S211 to S215.

[0091] Step S211: controlling the driving motor in the driving system to rotate along a first clockwise direction.

[0092] Step S212: Acquire the on state of the first photoelectric switch.

[0093] Step S213: Based on the first photoelectric switch being turned on, controlling the drive motor to rotate along the second clockwise direction.

[0094] Step S214: Acquire the on state of the fourth photoelectric switch.

[0095] Step S215: Based on the activation of the fourth photoelectric switch, the driving motor is controlled to rotate along the first clockwise direction.

[0096] In this implementation, if the moving component needs to drive the first execution component to work, but does not need to drive the second execution component to work, the control motor first rotates along the first clockwise direction, connects to the first connecting plate of the first execution component, and then rotates along the second clockwise direction. When the fourth photoelectric switch is turned on, it indicates that the moving component and the second connecting plate are in a separated state and not connected, and the control motor rotates along the first clockwise direction to perform reciprocating motion.

[0097] Specifically, when the execution system adopts a single-line working mode and the second execution component is working, step S2 can be implemented by the following steps S221 to S225.

[0098] Step S221: Control the driving motor in the driving system to rotate along the second clockwise direction.

[0099] Step S222: Acquire the on state of the second photoelectric switch.

[0100] Step S223: Based on the second photoelectric switch being turned on, controlling the drive motor to rotate along the first clockwise direction; Step S224: obtaining the on state of the third photoelectric switch; Step S225: Based on the activation of the third photoelectric switch, the driving motor is controlled to rotate along the second clockwise direction.

[0101] In this implementation, if the moving component needs to drive the second execution component to work, and does not need to drive the first execution component to work, the control drive motor is first rotated along the second clockwise direction and connected to the second connecting plate of the second execution component, and then rotated along the first clockwise direction. When the third photoelectric switch is turned on, it indicates that the moving component and the first connecting plate are in a separated state and not connected, and the control motor is rotated along the second clockwise direction to perform reciprocating motion.

[0102] Step S3: According to the working state of the driving system, the execution system is controlled to drive out the bubbles of the printing medium in the printing system.

[0103] In this step, the bubbles inside and on the surface of the printing medium are driven out during the execution of the single-line mode and the parallel mode.

[0104] Step S4: Control the light source system to send laser light into the printing medium of the printing system.

[0105] After the bubbles inside the printing medium are driven out, the light source system is controlled to turn on the laser to perform the printing operation.

[0106] Steps S2 to S4 can be executed repeatedly. After printing a layer of patterns, bubbles in the printing medium are driven out and step S2 is executed again.

[0107] In a specific implementation, see Figure 15 As shown, the control method can be implemented by following steps 001 to 010.

[0108] First, turn on the machine to perform device initialization, set the number of object printing layers, set the execution times, set the working mode and motor speed, etc.

[0109] Step S001: Device initialization.

[0110] Step S002: Set the number of printing layers M.

[0111] Step S003: Set the number of execution times N.

[0112] Step S004: Setting the motor speed.

[0113] Step S005: Setting the working mode.

[0114] Step S006: Determine the working mode. If the working mode is the single-row working mode, execute step S007; if the working mode is the parallel working mode, execute step S008.

[0115] Single-power source drive can include two working modes. One is the single-line working mode, that is, the drive system controls the two motion execution components to move separately, which is used in scenarios where there are many bubbles on a large area of ​​the film; the other is the parallel working mode, in which the two execution components move simultaneously in the same direction, which is used in situations where there are fewer problem points on the film surface and the simultaneous movement causes less disturbance to the printing liquid.

[0116] Step S007: Determine the execution component. If the execution component is the first execution component, execute step S710-1; if the execution component is the second execution component, execute step S720-1.

[0117] Step S710 - 1 : The motor rotates forward, which corresponds to the driving motor in the above implementation rotating along the first clockwise direction.

[0118] Step S710-2: Determine whether the first photoelectric switch is on. If yes, execute step S710-3; if no, repeat step S710-2.

[0119] Step S710 - 3 : The motor rotates in reverse, which corresponds to the driving motor in the above implementation rotating in the second clockwise direction.

[0120] Step S710-4: Determine whether the fourth photoelectric switch is on. If yes, execute step S710-5; if no, repeat step S710-3.

[0121] Step S710-5: The motor rotates forward.

[0122] Step S710-6: N=N-1.

[0123] In this step, it indicates that the first execution component has completed one execution, and the remaining execution times are N-1.

[0124] Step S710 - 7 : Determine whether N is zero.

[0125] In this step, it is determined whether the first execution component has completed all execution times N during the continuous execution process. If yes, step S710-8 is executed, otherwise step S710-2 is executed.

[0126] Step S710-8: Determine whether the third photoelectric switch is on. If so, execute step S710-9; if not, repeat step S710-8.

[0127] Step S710-9: The motor rotates in reverse.

[0128] Step S710 - 10 : Delay for a preset time t.

[0129] In this step, the purpose of delaying the preset time t is to provide time for the motor to reverse and drive the movable assembly from the edge position to the center area of ​​the base plate. This can be understood as controlling the movable assembly to return to its initial position. It is understood that the preset time t can be determined based on the actual motor speed. If the motor speed is high, the preset time t can be relatively short. If the motor speed is low, the preset time t can be relatively long. The preset time t can range from 0 to 10 seconds.

[0130] Step S710 - 11 : The motor stops.

[0131] In the single-line working mode, the use of the execution component is determined. When the first execution component is selected, the motor rotates forward to start the loop control, and the moving component follows the synchronous belt to move in the direction of the first photoelectric switch. Then the switch status of the first photoelectric switch is queried. If it is Off, the query continues. If it is ON, the motor reverses, and the moving component moves in the opposite direction to hang the first connecting plate of the first execution component (determined by the mechanical structure design characteristics). The two are connected together and move in the direction of the fourth photoelectric switch. At this time, the switch status of the fourth photoelectric switch is queried. If it is Off, the query continues. If it is On, the motor rotates forward, and the two move in the direction of the first photoelectric switch and the third photoelectric switch. The control is executed once, the execution number N is reduced by 1, and it is determined whether the execution number is 0. If it is not 0, the above cycle continues. If it is 0, the switch status of the third photoelectric switch is queried. If it is Off, the query continues. If it is On, the motor reverses, the moving component moves in the opposite direction and disengages from the first execution component (determined by the mechanical structure design characteristics). After the preset delay time t, the motor stops and the control ends.

[0132] Step S720 - 1 : The motor rotates in reverse.

[0133] Step S720-2: Determine whether the second photoelectric switch is on. If yes, execute step S720-3; if no, repeat step S720-2.

[0134] Step S720-3: The motor rotates forward.

[0135] Step S720-4: Determine whether the third photoelectric switch is on. If so, execute step S720-5; if not, repeat step S720-4.

[0136] Step S720-5: The motor rotates in reverse.

[0137] Step S720-6: N=N-1.

[0138] Step S720-7: Determine whether N is zero. If so, execute step S720-8; otherwise, execute step S710-2.

[0139] Step S720-8: Determine whether the fourth photoelectric switch is turned on.

[0140] Step S720-9: The motor rotates forward.

[0141] Step S720-10: Delay for a preset time t.

[0142] Step S720 - 11 : The motor stops.

[0143] In the single-line working mode, the use of the execution component is determined. When the second execution component is selected, the motor reverses to start the loop control, and the moving component follows the synchronous belt to move in the direction of the second photoelectric switch. The switch status of the second photoelectric switch is queried. If it is Off, the query continues. If it is ON, the motor rotates forward, and the moving component moves in the opposite direction to hang the second execution component (determined by the mechanical structure design characteristics). The two are connected together and move in the direction of the third photoelectric switch. At this time, the switch status of the third photoelectric switch is queried. If it is Off, the query continues. If it is On, the motor rotates forward. Both move in the direction of the second photoelectric switch and the fourth photoelectric switch. The execution control is completed once, the execution number N is reduced by 1, and it is determined whether the execution number is 0. If it is not 0, the above cycle is continued. If it is 0, the switch status of the fourth photoelectric switch is queried. If it is Off, the query continues. If it is On, the motor reverses, the moving component moves in the opposite direction and disengages from the second execution component (determined by the mechanical structure design characteristics). After the preset delay time t, the motor stops and the control ends.

[0144] Step S008: The motor rotates in reverse.

[0145] Step S810: Determine whether the second photoelectric switch is on. If so, execute step S811; if not, repeat step S810.

[0146] Step S811: The motor rotates forward.

[0147] Step S812: Determine whether the first photoelectric switch is on. If so, execute step S813; if not, repeat step S812.

[0148] Step S813: The motor rotates in reverse.

[0149] Step S814: N=N-1.

[0150] Step S815: Determine whether N is zero. If so, execute step S816; otherwise, execute step S810.

[0151] Step S816: Determine whether the fourth photoelectric switch is on. If so, execute step S817; if not, repeat step S816.

[0152] Step S817: The motor rotates forward.

[0153] Step S818: Determine whether the third photoelectric switch is on. If so, execute step S819; if not, repeat step S818.

[0154] Step S819: The motor rotates in reverse.

[0155] Step S820: Delay for a preset time t.

[0156] It should be emphasized that the specific values ​​of the preset time t in step S710 - 10 , step S720 - 10 and step S820 may be the same or different.

[0157] Step S821: The motor stops.

[0158] Step S009: The number of printing layers M=M-1.

[0159] Step S010: Determine whether M is zero. If so, the process ends; otherwise, the process proceeds to step S005.

[0160] In parallel working mode, the motor reverses to start the cycle control, and the mobile component follows the synchronous belt to move in the direction of the second photoelectric switch. At this time, the switch status of the second photoelectric switch is queried. If it is Off, continue to query. If it is ON, the motor rotates forward, and the mobile component moves in the opposite direction to hang the second executive component (determined by the mechanical structure design characteristics). The two are connected together and move in the direction of the first photoelectric switch. At this time, the switch status of the first photoelectric switch is queried. If it is Off, continue to query. If it is On, the motor reverses, and the mobile component hangs the first executive component (determined by the mechanical structure design characteristics). At this time, the mobile component, the first executive component and the second executive component are connected together, and the three are in the third photoelectric switch. The control is completed once when the switch and the fourth photoelectric switch are in motion. The execution count N is reduced by 1. It is judged whether the execution count is 0. If it is not 0, the above cycle is continued. If it is 0, the switch status of the fourth photoelectric switch is queried. If it is Off, the query is continued. If it is On, the motor rotates forward, the moving component and the second actuator are separated (determined by the mechanical structure design characteristics), and the moving component moves toward the direction of the third photoelectric switch with the first actuator. The switch status of the third photoelectric switch is queried. If it is Off, the query is continued. If it is On, the motor reverses, and the moving component and the first actuator are separated (determined by the mechanical structure design characteristics). After the preset delay time t, the motor stops and the control ends.

[0161] When performing single-layer light-curing 3D printing, the number of layers of the system product is M-1. It is determined whether M-1 is 0. If it is not zero, the process logic block diagram is followed. In the next cycle, if it is zero, the system considers that the printing is completed and the stagnation cycle ends the processing.

[0162] It should be noted that those skilled in the art will readily conceive of other embodiments of the present application after considering the specification and practicing the application disclosed herein. This application is intended to cover any variations, uses, or adaptations of the present application that follow the general principles of this application and include common knowledge or customary techniques in the art that are not disclosed in this application.

[0163] It will be understood that the present application is not limited to the precise construction that has been described above and shown in the accompanying drawings, and that various modifications and changes may be made without departing from the scope thereof, the true scope being indicated by the present application.

Claims

1. A DMD-based maskless lithography processing device, characterized in that: include: Light source system, printing system, driving system and execution system; The light source system is configured to generate laser light; The printing system is disposed on the optical path of the laser and is configured to hold the medium to be printed; The driving system is connected to the execution system and is configured to drive the execution system; The execution system includes a moving component, a first execution component, and a second execution component; The moving component is slidably disposed at the bottom of the printing system, and the moving component is disposed between the first executing component and the second executing component; The moving component is configured to cooperate with the first actuator component under the driving force of the driving system to drive the first actuator component to move along a first direction of the printing system to drive away bubbles inside the printing medium; the first direction is the length direction of the printing system; The moving component is also configured to cooperate with the second executing component under the driving force of the driving system to drive the second executing component to move along the first direction of the printing system to drive away bubbles inside the printing medium.

2. The DMD-based maskless lithography processing device according to claim 1, characterized in that: The printing system comprises: A print box configured to hold the print medium; a covering member configured to cover a surface of the printing medium; The upper portion of the first actuator is located in the printing medium and is in contact with a side of the cover covering the printing medium, and the first actuator is configured to drive away bubbles in the printing medium; The upper portion of the second actuator is located on the cover and is in contact with a side of the cover facing away from the printing medium. The second actuator is configured to drive away bubbles inside the printing medium.

3. The DMD-based maskless lithography processing device according to claim 2, characterized in that: The first execution assembly includes a first connecting plate and a first execution member; the first connecting plate is located at the bottom of the printing box, and the first execution member is arranged in the printing medium; The moving component is configured to be connected to the first connecting plate under the driving force of the driving system, and to drive the first actuator to move inside the printing medium along the first direction through the first connecting plate; The second execution assembly includes a second connecting plate and a second execution member; the second connecting plate is located at the bottom of the printing box, and the second execution member is arranged on the surface of the covering member away from the printing medium; The moving component is configured to be connected to the second connecting plate under the driving force of the driving system, and to drive the second actuator through the second connecting plate to move along the first direction on the surface of the printing medium.

4. The DMD-based maskless lithography processing device according to claim 3, characterized in that: The driving system comprises a driving motor and a synchronous belt, and the output end of the driving motor is connected to the synchronous belt; The synchronous belt extends along the first direction, and the moving component is arranged on the synchronous belt; The synchronous belt is configured to rotate under the driving force of the driving motor and drive the moving component to rotate along the first direction.

5. The DMD-based maskless lithography processing device according to claim 4, characterized in that: Also includes: a first photoelectric switch and a second photoelectric switch; The execution system also includes a base plate, the first photoelectric switch and the second photoelectric switch are arranged on the base plate, and the first photoelectric switch and the second photoelectric switch are respectively located on both sides of the base plate along the first direction; wherein the first photoelectric switch is configured to: determine the coordination state between the moving component and the first execution component; the second photoelectric switch is configured to: determine the coordination state between the moving component and the second execution component.

6. A control method for a DMD maskless lithography processing device, characterized in that: The control method of the DMD-based maskless lithography processing device is applied to the DMD-based maskless lithography processing device as described in any one of claims 1 to 5, and the control method of the DMD-based maskless lithography processing device comprises: Determine the working mode of the execution system according to the cross-sectional area of ​​the air bubble inside the print box in the printing system; wherein the working mode includes a single-line mode and a parallel mode, the single-line mode is a working mode when the execution system uses any one of the first execution component or the second execution component to work, and the parallel working mode is a working mode when the execution system uses the first execution component and the second execution component to work simultaneously; determining the working state of the drive system according to the working mode; According to the working state of the driving system, controlling the execution system to drive out the bubbles of the printing medium in the printing system; The light source system is controlled to send laser light into the printing medium of the printing system.

7. The control method of the DMD-based maskless lithography processing device according to claim 6, characterized in that: The method of determining the working mode of the execution system according to the cross-sectional area of ​​the air bubble inside the print box in the printing system includes: Based on the cross-sectional area of ​​the bubble inside the print cartridge being greater than or equal to a preset value, the execution system adopts a single-line working mode; Based on the cross-sectional area of ​​the bubble inside the printing box being smaller than the preset value, the execution system adopts a parallel working mode; The length of the printing box is equal to the moving distance of the first execution component and the second execution component in the execution system along the first direction, and the first direction is the length direction of the printing system.

8. The control method of the DMD-based maskless lithography processing device according to claim 6, characterized in that: When the execution system adopts the parallel working mode, determining the working state of the driving system according to the working mode includes: Controlling a driving motor in the driving system to rotate along a first clockwise direction; Acquire the on state of the first photoelectric switch; Based on the activation of the first photoelectric switch, the driving motor is controlled to rotate along a second clockwise direction; the first clockwise direction and the second clockwise direction are opposite; Acquire the on state of the second photoelectric switch; Based on the activation of the second photoelectric switch, the driving motor is controlled to rotate along the first clockwise direction.

9. The control method of the DMD-based maskless lithography processing device according to claim 6, characterized in that: When the execution system adopts a single-line working mode and the first execution component is working, determining the working state of the drive system according to the working mode includes: Controlling the driving motor in the driving system to rotate along a first clockwise direction; Acquire the on state of the first photoelectric switch; Based on the first photoelectric switch being turned on, controlling the driving motor to rotate along a second clockwise direction; Acquire the on state of the fourth photoelectric switch; Based on the activation of the fourth photoelectric switch, the driving motor is controlled to rotate along the first clockwise direction; the first clockwise direction and the second clockwise direction are opposite.

10. The control method of the DMD-based maskless lithography processing device according to claim 6, characterized in that: When the execution system adopts a single-line working mode and the second execution component is working, determining the working state of the drive system according to the working mode includes: Controlling the driving motor in the driving system to rotate along the second clockwise direction; Acquire the on state of the second photoelectric switch; Based on the second photoelectric switch being turned on, controlling the driving motor to rotate along a first clockwise direction; Obtaining the on state of the third photoelectric switch; Based on the activation of the third photoelectric switch, the driving motor is controlled to rotate along a second clockwise direction; the first clockwise direction and the second clockwise direction are opposite.

Images