An interference microscope-based microsphere tip precision measurement device and method

Abstract

The present application belongs to the field of precision measurement, and particularly relates to a micro ball head precision measurement device and method based on an interference microscope. The micro ball head precision measurement device based on the interference microscope can detachably and fixedly install a ball small shaft to be measured, the ball small shaft comprising a micro ball head and a ball small shaft ball column which are arranged in connection along a horizontal direction, and the micro ball head is coaxially arranged at one end of the ball small shaft ball column in the horizontal direction. The measurement device can detachably and fixedly install the ball small shaft to be measured, and the interference microscope can precisely measure the ball diameter of the micro ball head arranged on the measurement device.

Description

Technical Field

[0001] This invention belongs to the field of precision measurement technology, and in particular to a precision measurement device and method for a microsphere based on an interference microscope. Background Technology

[0002] The ball bearing is a core supporting component in a precision gyroscope. Currently, such as Figure 7 As shown, the ball shaft generally includes a tiny ball head 5 and a ball column 6 connected together. The ball head part of the ball shaft needs to be precisely matched with the bearing to ensure the stability and durability of the gyroscope when rotating at high speed.

[0003] Currently, engineers typically rely on high-precision measuring equipment, such as coordinate measuring machines (CMMs) and outside micrometers, to measure the diameter of the tiny ball heads in these types of gyroscopes. These traditional measuring methods and equipment, with their excellent measurement accuracy, can reliably meet the stringent requirements for the ball diameter of the gyroscope. However, these methods and equipment are not without drawbacks. During the measurement process, the probe needs to be in direct contact with the surface of the gyroscope. This operation inevitably causes some scratches or wear to the measured surface of the gyroscope, thus affecting the surface finish and overall quality of the gyroscope. This is undoubtedly a challenge for the precision manufacturing of gyroscopes.

[0004] Therefore, how to reduce or avoid damage to the measured surface of the ball shaft while ensuring measurement accuracy has become an urgent technical problem to be solved. Summary of the Invention

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a precision measurement device and method for a microsphere based on an interference microscope.

[0006] The technical solution adopted by this invention to solve its technical problem is:

[0007] A precision measuring device for a microsphere head based on an interference microscope is provided. The measuring device can detachably and fixably mount a microsphere shaft to be measured. The microsphere shaft includes a microsphere head and a microsphere shaft column connected in a horizontal direction. The microsphere head is coaxially connected to the horizontal end of the microsphere shaft column. The interference microscope can precisely measure the diameter of the microsphere head mounted on the measuring device.

[0008] The measuring device includes a pad, a standard block, a support block, and a bracket. The pad is arranged in a horizontal direction, and the upper surface of the pad is set as a horizontal plane. The standard block, the support block, and the bracket can be detachably and fixedly installed on the upper surface of the pad.

[0009] The standard block is set horizontally, and the bottom surface of the standard block is parallel to and detachably set together with the upper surface of the pad block. The upper surface of the standard block is set as a horizontal plane, and the horizontal side surface of the standard block is detachably connected to the support block.

[0010] The support block is set horizontally, and its upper surface is set as a horizontal plane. The support block is provided with a first groove, which is set horizontally and recessed downward from the upper surface of the support block. The horizontal side of the support block is detachably connected to the horizontal side of the standard block. The upper surface of the support block outside the first groove is set as a support platform. The microsphere to be measured can be detachably installed on the support platform. The upper surface of the support platform is set below the upper surface of the standard block, and the upper surface of the standard block is also set above the top of the microsphere head set on the small axle of the ball on the support platform.

[0011] The bracket is set vertically, and the bracket and the support block are vertically detachable. The bracket is provided with a U-shaped groove and a second groove. Both the U-shaped groove and the second groove are set longitudinally. The U-shaped groove is recessed downward from the upper surface of the bracket, and the second groove is recessed upward from the bottom surface of the bracket. The shape of the second groove matches the support block below the first groove. The bracket can be detachably connected to the support block below the first groove by tightly engaging with the second groove and the first groove.

[0012] The U-shaped groove is designed to match the shape of the ball shaft and the ball column. The other horizontal end of the ball shaft and the ball column can be detachably and movablely connected to the U-shaped groove, thereby allowing the ball shaft to be detachably and movablely connected between the standard block and the U-shaped groove.

[0013] Furthermore, the diameter of the tiny ball head of the ball shaft is SΦ0.6mm, and the upper surface of the support platform is located 0.6mm below the upper surface of the standard block.

[0014] Furthermore, the device is characterized in that it further includes an interference microscope, and the interference microscope and the measuring device are detachably connected together.

[0015] Furthermore, the method for measuring the diameter of a microsphere using a precision measuring device for microspheres based on an interference microscope includes the following steps:

[0016] (1) Equipment integration

[0017] 1) First, clean the surfaces of the pad block, standard block, support block and bracket. Place the standard block on the pad block, align the left end of the horizontal side, and move it back and forth and left and right until it will not slip off automatically.

[0018] 2) Place the support block on the other side of the pad block, with the horizontal left end of the support block in contact with the horizontal right end of the standard block, and lap them together until they do not slip off automatically.

[0019] 3) Place the bracket on the support block, and the second groove at the lower end is fastened onto the support block.

[0020] (2) Placement of precision measuring devices

[0021] 1) Place the precision measuring device horizontally on the platform, ensuring it is as perpendicular as possible to the platform slide.

[0022] 2) Rotate the stage so that the mating surfaces of the standard block and the support block are parallel to the direction of the stage slide, that is, the small ball shaft is set perpendicular to the direction of the stage slide.

[0023] (3) Leveling the device

[0024] Turn the focusing handwheel of the interference microscope to find the interference fringes of the standard block. At this time, the interference fringes are not parallel to the comparison baseline. Adjust the bidirectional adjustment screw on the objective lens of the interference microscope. Tighten and loosen the screws at the same time to adjust the tilt angle of the interference fringes. When the interference fringes are parallel to the comparison baseline, the leveling step of the device is completed.

[0025] (4) Placement of the small axle of the ball

[0026] Place the small ball shaft to be measured on the precision measuring device using tweezers. Place the tiny ball head of the small ball shaft on the support platform, with the top of the ball head placed against the side of the standard block. The ball shaft column can be detached and coaxially placed inside the U-shaped groove of the bracket.

[0027] (5) Comparison measurement

[0028] Adjust the stage orientation to align the precision measuring device with the objective lens. Then, adjust the fine-tuning focus knob of the interference microscope until ring interference fringes appear on the screen. When the center is darkest, the measurement position is the highest point of the spherical head. Rotate the stage knobs left and right to align the ring interference fringes with the standard block interference fringes on the same screen. To facilitate subsequent readings, adjust the darkest point of the standard block's interference fringes to coincide with the baseline. Insert the filter, select the green light source, and adjust the light intensity appropriately. Read the number of fringes ΔN between line 1 and the darkest point of the ring interference fringes on the screen. This allows you to calculate the distance between the highest point of the spherical head and the standard block. Rotate the spherical head of the small axis by 45° sequentially, measuring in three directions and recording ΔN for each direction.

[0029] The height of the standard block is denoted as H1, the height of the support block as H2, and the formula for calculating the diameter of the ball head is:

[0030] S=(H1-H2)+0.00027*ΔN

[0031] Where: S--sphere diameter; H1--standard block height; H2--support block height; ΔN--number of interference fringe intervals;

[0032] Finally, the diameter of the tiny ball head of the small ball shaft was calculated.

[0033] Furthermore, the pad, standard block, support block, and bracket of the measuring device are all made of second-class gauge blocks, with a flatness requirement of 0.1 μm. When the device is lapped together, the parallelism between the upper and lower planes is required to be 0.2 μm.

[0034] The advantages and positive effects of this invention are as follows:

[0035] 1. When using the device of this invention, the small spherical shaft to be measured is placed on the precision measuring device using tweezers. The tiny spherical head of the small spherical shaft is placed on the support stage, with the top of the spherical head resting against the side of the standard block. The spherical shaft column is detachably and coaxially placed inside the U-shaped groove of the support. Then, the direction of the stage is adjusted to align the precision measuring device with the objective lens. The fine-tuning focus wheel of the interference microscope is then adjusted until annular interference fringes appear on the screen. When the center is darkest, the measurement position is the highest point of the spherical head. Figure 9 Rotate the stage knobs left and right until the annular interference fringes and the standard block interference fringes are on the same screen. To facilitate subsequent readings, adjust the darkest part of the standard block's interference fringes to align with the reference line. Figure 9 When the red line coincides with the standard block, insert the filter, select the green light source, adjust the appropriate light intensity, and read the number of fringes ΔN at the darkest point of the ring interference fringe from the screen. Then you can calculate the distance between the highest point of the ball head and the standard block.

[0036] This invention provides a measuring device that allows for the detachable and fixed installation of the small spherical shaft to be measured. An interference microscope enables precise measurement of the diameter of the tiny spherical head mounted on the measuring device. The device comprises a pad, a standard block, a support block, and a bracket. Its simple structure and clear connections between components facilitate easy disassembly and installation, allowing for timely replacement of damaged parts and ensuring normal testing. Furthermore, this device achieves non-contact measurement using an interference microscope, effectively avoiding scratches or wear caused by direct contact between the probe and the part surface in traditional methods. This ensures the smoothness of the measured part's surface and improves measurement accuracy. Utilizing the high precision of the interference microscope, accurate measurement of the diameter of the tiny spherical head is achieved. By observing the changes in the number of interference fringes, the distance between the highest point of the spherical head and the standard block can be accurately calculated, thus yielding the spherical diameter value. Interference fringes provide a direct reading. The interference fringes observed through the interference microscope allow for a direct assessment of the highest point of the spherical head, and the spherical diameter can be calculated, making the measurement results more intuitive and easy to understand.

[0037] 2. The method of this invention uses an interference microscope for non-contact measurement, effectively avoiding scratches or wear caused by direct contact between the probe and the surface of the part in traditional measurement methods, thus ensuring the smoothness of the surface of the measured part. Utilizing the high precision of the interference microscope, accurate measurement of the diameter of a tiny ball head is achieved. By observing the changes in the number of interference fringes, the distance between the highest point of the ball head and the standard block can be accurately calculated, thereby obtaining the ball diameter value. Interference fringes provide a direct reading. The interference fringes observed through the interference microscope allow for a direct identification of the highest point of the ball head, and the ball diameter can be calculated, making the measurement results more intuitive and easy to understand. Attached Figure Description

[0038] Figure 1 This is a front view schematic diagram of a structural connection of the measuring device of the present invention;

[0039] Figure 2 for Figure 1 A three-dimensional schematic diagram of a structural connection;

[0040] Figure 3 for Figure 1 A three-dimensional schematic diagram of a structural connection of the middle pad block;

[0041] Figure 4 for Figure 1 A schematic diagram of a structural connection of a standard block;

[0042] Figure 5 for Figure 1 A three-dimensional schematic diagram of a structural connection of the central support block;

[0043] Figure 6 for Figure 1 Right view schematic diagram of a structural connection of a central support;

[0044] Figure 7 for Figure 1 A schematic diagram of the connection between a measuring device and an interference microscope;

[0045] Figure 8 This is a photograph of an actual interferometer (Michelson interferometer) used in this invention.

[0046] Figure 9 This is a schematic diagram of the interference fringes during measurement using the method of the present invention. Detailed Implementation

[0047] The present invention will be further described in detail below with reference to specific embodiments. The following embodiments are merely descriptive and not limiting, and should not be used to limit the scope of protection of the present invention.

[0048] Unless otherwise specified, all raw materials used in this invention are commercially available products. Unless otherwise specified, all methods used in this invention are conventional methods in the field. All substances used in this invention are of conventional mass. Structures, connections, etc., not described in detail in this invention can be understood as conventional techniques in the field.

[0049] A precision measurement device for a microsphere based on an interferometric microscope, such as Figures 1 to 8 As shown, the measuring device can detachably and fixably install the small ball shaft to be measured. The small ball shaft includes a micro ball head 5 and a small ball shaft column 6 connected in the horizontal direction. The micro ball head is coaxially connected to the horizontal end of the small ball shaft column.

[0050] The measuring device includes a pad 1, a standard block 2, a support block 3, and a bracket 4. The pad is arranged horizontally, and the upper surface 11 of the pad is set as a horizontal plane. The standard block, support block, and bracket can be detachably and fixedly installed on the upper surface of the pad. The pad can provide platform support.

[0051] The standard block is set horizontally, with its lower surface parallel to and detachably attached to the upper surface of the pad. The upper surface of the standard block (not labeled in the figure) is set as a horizontal plane. One horizontal surface 21 of the standard block is detachably connected to the support block. The standard block provides a corresponding reference for the measurement of the microsphere and facilitates subsequent data measurement by inducing interference. Interference microscopy measurement of the sphere's small axis and head is a relative measurement. Knowing the height of the standard block, the distance between the highest point of the sphere and the standard block can be calculated using the number of interference fringes between the sphere and the standard block, thus determining the size of the sphere. Therefore, a step with a height difference of θ between the standard block and the support block is designed to hold the sphere's small axis and head.

[0052] The support block is set horizontally, and its upper surface is set as a horizontal plane. A first groove 31 is provided on the support block. The first groove is set horizontally and is recessed downward from the upper surface of the support block. The horizontal side 33 of the support block is detachably connected to the horizontal side 21 of the standard block. The upper surface of the support block outside the first groove is set as a support platform 32. The microsphere to be measured can be detachably installed on the support platform. The upper surface of the support platform is set below the upper surface of the standard block. The upper surface of the standard block is also set above the top of the microsphere head of the microsphere shaft set on the support platform. This structure facilitates the subsequent measurement of the diameter of the microsphere head. At the same time, the support platform can provide a support platform for the microsphere and the microsphere shaft column, making it difficult for them to fall off the support platform, which facilitates the subsequent measurement of their diameter.

[0053] The bracket is arranged vertically, and the bracket and the support block are vertically detachable. The bracket is provided with a U-shaped groove 41 and a second groove 42. Both the U-shaped groove and the second groove are arranged longitudinally. The U-shaped groove is recessed downward from the upper surface of the bracket, and the second groove is recessed upward from the bottom surface of the bracket. The shape of the second groove matches the support block below the first groove. The bracket can be tightly engaged and detachably connected to the support block below the first groove through the second groove and the first groove, so that the bracket can be firmly installed with the support block. At the same time, the installation and disassembly are convenient and the cost is low, which brings great convenience to the use.

[0054] The U-shaped groove is designed to match the shape of the spherical shaft and column. The other horizontal end of the spherical shaft and column can be detachably and coaxially connected to the U-shaped groove, allowing the spherical shaft to be detachably and movable between the standard block and the U-shaped groove. This facilitates subsequent interferometric microscopy inspections. The detachable connection method also makes installation and disassembly more convenient. Furthermore, the U-shaped groove supports the spherical shaft and column, preventing them from sliding and ensuring the accuracy of the measurement results.

[0055] In use, the device of this invention involves placing the small spherical shaft to be measured onto the precision measuring device using tweezers. The tiny spherical head of the small spherical shaft is placed on the support stage, with the top of the spherical head resting against the side of the standard block. The spherical shaft column is detachably and coaxially placed inside the U-shaped groove of the support. Then, the stage direction is adjusted to align the precision measuring device with the objective lens. The fine-tuning focus wheel of the interference microscope is then adjusted until annular interference fringes appear on the screen. When the center is darkest, the measurement position is the highest point of the spherical head. Figure 9 Rotate the stage knobs left and right until the annular interference fringes and the standard block interference fringes are on the same screen. To facilitate subsequent readings, adjust the darkest part of the standard block's interference fringes to align with the reference line. Figure 9 When the red line coincides with the standard block, insert the filter, select the green light source, adjust the appropriate light intensity, and read the number of fringes ΔN at the darkest point of the ring interference fringe from the screen. Then you can calculate the distance between the highest point of the ball head and the standard block.

[0056] This invention provides a measuring device that allows for the detachable and fixed installation of the small spherical shaft to be measured. An interference microscope enables precise measurement of the diameter of the tiny spherical head mounted on the measuring device. The device comprises a pad, a standard block, a support block, and a bracket. Its simple structure and clear connections between components facilitate easy disassembly and installation, allowing for timely replacement of damaged parts and ensuring normal testing. Furthermore, this device achieves non-contact measurement using an interference microscope, effectively avoiding scratches or wear caused by direct contact between the probe and the part surface in traditional methods. This ensures the smoothness of the measured part's surface and improves measurement accuracy. Utilizing the high precision of the interference microscope, accurate measurement of the diameter of the tiny spherical head is achieved. By observing the changes in the number of interference fringes, the distance between the highest point of the spherical head and the standard block can be accurately calculated, thus yielding the spherical diameter value. Interference fringes provide a direct reading. The interference fringes observed through the interference microscope allow for a direct assessment of the highest point of the spherical head, and the spherical diameter can be calculated, making the measurement results more intuitive and easy to understand.

[0057] In this embodiment, the diameter of the tiny ball head of the ball shaft is SΦ0.6mm, and the upper surface of the support platform is located 0.6mm below the upper surface of the standard block. By comparing the height difference between the highest point of the ball head and the upper end of the step using an interference microscope, the size of the ball head can be calculated from the interference fringes.

[0058] In this embodiment, the device also includes an interference microscope (not labeled in the figure). The interference microscope and the measuring device are detachably connected. The interference microscope can precisely measure the diameter of the tiny ball head set on the measuring device, thereby improving the measurement accuracy.

[0059] The method for measuring the diameter of a microsphere using the microsphere precision measuring device based on an interference microscope as described above includes the following steps:

[0060] (1) Equipment integration

[0061] 1) First, clean the surfaces of the pad block, standard block, support block and bracket. Place the standard block on the pad block, align the left end of the horizontal side, and move it back and forth and left and right until it will not slip off automatically.

[0062] 2) Place the support block on the other side of the pad block, with the horizontal left end of the support block in contact with the horizontal right end of the standard block, and lap them together until they do not slip off automatically.

[0063] 3) Place the bracket on the support block, and the second groove at the lower end is fastened onto the support block.

[0064] (2) Placement of precision measuring devices

[0065] 1) Place the precision measuring device horizontally on the platform, ensuring it is as perpendicular as possible to the platform slide.

[0066] 2) Rotate the stage so that the mating surfaces of the standard block and the support block are parallel to the direction of the stage slide, that is, the small ball shaft is set perpendicular to the direction of the stage slide.

[0067] (3) Leveling the device

[0068] Turn the focusing handwheel of the interference microscope to find the interference fringes of the standard block. At this time, the interference fringes are not parallel to the comparison baseline. Adjust the bidirectional adjustment screw on the objective lens of the interference microscope. Tighten and loosen the screws at the same time to adjust the tilt angle of the interference fringes. When the interference fringes are parallel to the comparison baseline, the leveling step of the device is completed.

[0069] (4) Placement of the small axle of the ball

[0070] Place the small ball shaft to be measured on the precision measuring device using tweezers. Place the tiny ball head of the small ball shaft on the support platform, with the top of the ball head placed against the side of the standard block. The ball shaft column can be detached and coaxially placed inside the U-shaped groove of the bracket.

[0071] (5) Comparison measurement

[0072] Adjust the stage orientation to align the precision measuring device with the objective lens. Then, adjust the fine-tuning focus knob of the interference microscope until ring-shaped interference fringes appear on the screen. When the center is darkest, the measurement position is the highest point of the spherical head. Figure 9 Rotate the stage knobs left and right until the annular interference fringes and the standard block interference fringes are on the same screen. To facilitate subsequent readings, adjust the darkest part of the standard block's interference fringes to align with the reference line. Figure 9 Align the red line with the standard block, insert the filter, select the green light source, adjust the light intensity appropriately, and read the number of fringes ΔN at the darkest point of the ring interference fringes from the screen. This will allow you to calculate the distance between the highest point of the ball head and the standard block. Rotate the ball head of the small shaft 45° sequentially, measure in three directions, and record ΔN for each direction.

[0073] The height of the standard block is denoted as H1, the height of the support block as H2, and the formula for calculating the diameter of the ball head is:

[0074] S=(H1-H2)+0.00027*ΔN

[0075] Where: S--sphere diameter; H1--standard block height; H2--support block height; ΔN--number of interference fringe intervals;

[0076] Finally, the diameter of the tiny ball head of the small ball shaft was calculated.

[0077] In this embodiment, the pad, standard block, support block, and bracket of the measuring device are all made of equal-sized blocks, with a flatness requirement of 0.1 μm. During device lamination, the parallelism between the upper and lower planes is required to be 0.2 μm. This improves measurement accuracy and imaging stability.

[0078] This invention employs an interference microscope for non-contact measurement, effectively avoiding scratches or wear caused by direct contact between the probe and the part surface in traditional methods, thus ensuring the surface finish of the measured part. Utilizing the high precision of the interference microscope, accurate measurement of the diameter of a tiny ball head is achieved. By observing changes in the number of interference fringes, the distance between the highest point of the ball head and the standard block can be precisely calculated, thereby obtaining the ball diameter value. Interference fringes provide a direct visual reading. The interference fringes observed through the interference microscope allow for a direct identification of the highest point of the ball head, and the ball diameter can be calculated, making the measurement results more intuitive and easy to understand.

[0079] Although embodiments of the invention have been disclosed for illustrative purposes, those skilled in the art will understand that various substitutions, variations, and modifications are possible without departing from the spirit and scope of the invention and the appended claims. Therefore, the scope of the invention is not limited to the contents disclosed in the embodiments.

Claims

1. A precision measuring device for a microsphere based on an interference microscope, characterized in that: The measuring device can detachably and fixably install the small spherical shaft to be measured. The small spherical shaft includes a micro-ball head and a small spherical shaft column connected in the horizontal direction. The micro-ball head is coaxially connected to the horizontal end of the small spherical shaft column. The interference microscope can precisely measure the diameter of the micro-ball head set on the measuring device. The measuring device includes a pad, a standard block, a support block, and a bracket. The pad is arranged in a horizontal direction, and the upper surface of the pad is set as a horizontal plane. The standard block, the support block, and the bracket can be detachably and fixedly installed on the upper surface of the pad. The standard block is set horizontally, and the bottom surface of the standard block is parallel to and detachably set together with the upper surface of the pad block. The upper surface of the standard block is set as a horizontal plane, and the horizontal side surface of the standard block is detachably connected to the support block. The support block is set horizontally, and its upper surface is set as a horizontal plane. The support block is provided with a first groove, which is set horizontally and recessed downward from the upper surface of the support block. The horizontal side of the support block is detachably connected to the horizontal side of the standard block. The upper surface of the support block outside the first groove is set as a support platform. The microsphere to be measured can be detachably installed on the support platform. The upper surface of the support platform is set below the upper surface of the standard block, and the upper surface of the standard block is also set above the top of the microsphere head set on the small axle of the ball on the support platform. The bracket is set vertically, and the bracket and the support block are vertically detachable. The bracket is provided with a U-shaped groove and a second groove. Both the U-shaped groove and the second groove are set longitudinally. The U-shaped groove is recessed downward from the upper surface of the bracket, and the second groove is recessed upward from the bottom surface of the bracket. The shape of the second groove matches the support block below the first groove. The bracket can be detachably connected to the support block below the first groove by tightly engaging with the second groove and the first groove. The U-shaped groove is designed to match the shape of the ball shaft and the ball column. The other horizontal end of the ball shaft and the ball column can be detachably and movablely connected to the U-shaped groove, thereby allowing the ball shaft to be detachably and movablely connected between the standard block and the U-shaped groove.

2. The micro-spherical precision measuring device based on an interference microscope according to claim 1, characterized in that: The diameter of the tiny ball head of the ball shaft is SΦ0.6mm, and the upper surface of the support platform is located 0.6mm below the upper surface of the standard block.

3. The micro-spherical precision measuring device based on an interference microscope according to claim 1 or 2, characterized in that: The device also includes an interference microscope, and the interference microscope and the measuring device are detachably connected together.

4. A method for measuring the diameter of a microsphere using the microsphere precision measuring device based on an interference microscope as described in any one of claims 1 to 3, comprising the following steps: (1) Equipment integration 1) First, clean the surfaces of the pad block, standard block, support block and bracket. Place the standard block on the pad block, align the left end of the horizontal side, and move it back and forth and left and right until it will not slip off automatically. 2) Place the support block on the other side of the pad block, with the horizontal left end of the support block in contact with the horizontal right end of the standard block, and lap them together until they do not slip off automatically. 3) Place the bracket on the support block, and secure the second groove at the lower end onto the support block; (2) Placement of precision measuring devices 1) Place the precision measuring device horizontally on the platform, ensuring it is as perpendicular as possible to the platform slide. 2) Rotate the stage so that the contact surfaces of the standard block and the support block are parallel to the direction of the stage slide, that is, the small ball shaft is set perpendicular to the direction of the stage slide. (3) Leveling the device Turn the focusing handwheel of the interference microscope to find the interference fringes of the standard block. At this time, the interference fringes are not parallel to the comparison baseline. Adjust the bidirectional adjustment screw on the objective lens of the interference microscope. Tighten and loosen the screws at the same time to adjust the tilt angle of the interference fringes. When the interference fringes are parallel to the comparison baseline, the leveling step of the device is completed. (4) Placement of the small axle of the ball Place the small ball shaft to be measured on the precision measuring device with tweezers. Place the tiny ball head of the small ball shaft on the support platform. Place the top of the ball head against the side of the standard block. The ball shaft column can be detached and coaxially placed inside the U-shaped groove of the bracket. (5) Comparison measurement Adjust the stage orientation to align the precision measuring device with the objective lens. Then, adjust the fine-tuning focus knob of the interference microscope until ring interference fringes appear on the screen. When the center is darkest, the measurement position is the highest point of the spherical head. Rotate the stage knobs left and right to align the ring interference fringes with the standard block interference fringes on the same screen. To facilitate subsequent readings, adjust the darkest point of the standard block's interference fringes to coincide with the baseline. Insert the filter, select the green light source, and adjust the light intensity appropriately. By reading the number of fringes ΔN at the darkest point of the ring interference fringes from line 1 on the screen, the distance between the highest point of the spherical head and the standard block can be calculated. Rotate the spherical head of the small axis by 45° sequentially, measure in three directions, and record ΔN for each direction. The height of the standard block is denoted as H1, the height of the support block as H2, and the formula for calculating the diameter of the ball head is: S=(H1-H2)+0.00027*ΔN in: S -- Ball head diameter; H1 -- Standard block height; H2 -- Support block height; ΔN -- Number of interference fringe intervals; Finally, the diameter of the tiny ball head of the small ball shaft was calculated.

5. The method for measuring the diameter of a microsphere using a microsphere precision measuring device based on an interference microscope according to claim 4, characterized in that: The pad, standard block, support block, and bracket of the measuring device are all made of second-class gauge blocks, with a flatness requirement of 0.1 μm. When the device is lapped together, the parallelism between the upper and lower planes is required to be 0.2 μm.

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