A detection device and detection method for gallium nitride semiconductor chip processing

Abstract

The present invention discloses a detection device and a detection method for gallium nitride semiconductor chip processing, which relates to the field of chip detection devices, and includes a detection host, a mobile frame installed in the detection host, and an electron microscope installed on the mobile frame. It should be noted that in the embodiment of the present invention, the surface of the chip is cleaned by a swing rod to avoid the problem of more impurities falling on the chip, which affects the detection; in addition, when the chip moves, if there are impurities such as welding slag on the chip, it will drive the detection rotating plate to rotate, and the alarm will be turned on to sound an alarm, reminding the staff that the chip has quality problems, and can clearly observe the specific parts of the chip with problems, which is convenient for the staff to check; when performing detection, if the fixture is not moved into place, so that the mobile frame is locked, the staff can be reminded to adjust in time to avoid the fixture with the increase of the number of uses. The displacement position is too large, which affects the chip detection.

Description

Technical Field

[0001] The present invention relates to the technical field of chip detection devices, and in particular to a detection device and a detection method for gallium nitride semiconductor chip processing. Background Art

[0002] Gallium nitride is a direct bandgap semiconductor material with the chemical formula GaN, which is composed of nitrogen and gallium. It has the characteristics of wide direct bandgap, high thermal conductivity and good chemical stability, which makes it have broad prospects in the application of optoelectronics, high-temperature high-power devices and high-frequency microwave devices; in addition, its high melting point, high hardness and good chemical stability make it perform well in high-temperature and high-frequency environments. Gallium nitride is a wide bandgap semiconductor material with high frequency and low on-resistance. As the star choice of the latest generation of semiconductor materials, it has been widely and deeply applied in many key fields in recent years.

[0003] It should be noted that when gallium nitride chips are produced, the surface of the chip needs to be inspected through visual inspection. During the inspection, the chip is clamped in a fixture, and then the electron microscope is moved down by a mobile frame to inspect the chip. However, during the chip inspection process, impurities are easily adhered to the surface of the chip when it is transferred. Therefore, when observing under a microscope, the impurities can easily cover the surface of the chip. Due to the small size of the chip, manual cleaning is troublesome and may even damage the chip, making it impossible to effectively observe the chip surface, causing errors in chip inspection. Summary of the invention

[0004] The object of the present invention is to provide a detection device and a detection method for gallium nitride semiconductor chip processing to solve the problems raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A detection device for processing gallium nitride semiconductor chips, comprising a detection host, a mobile frame installed in the detection host, an electron microscope installed on the mobile frame, a fixture provided in the detection host, and a chip clamped on the fixture;

[0007] A driving cylinder is installed in the detection host, a driving bar is installed on the driving cylinder, the clamp is connected to the driving bar, an active detection and cleaning device is installed in the detection host, and the active detection and cleaning device is used to actively detect and clean the chip; the active detection and cleaning device includes a mounting seat, a rotating frame is rotatably installed on the mounting seat, a swing rod is installed on the rotating frame, and the swing rod is rotated to detect the position of the chip and clean the surface of the chip;

[0008] It also includes a welding quality detection device, which is installed in the detection host and is used to detect the surface of the chip; the welding quality detection device includes a detection frame, which is installed in the detection host, and a plurality of mounting blocks are movably installed in the detection frame by bolts, a telescopic rod is movably installed on the bottom side of the mounting block, a telescopic seat is installed at the bottom end of the telescopic rod, a detection rotating plate in contact with the chip is rotatably installed in the telescopic seat, an alarm is installed on the mounting block, a switch is installed on the inner wall of the top side of the telescopic seat, and the detection rotating plate rotates to squeeze the switch to trigger the alarm;

[0009] It also includes a locking device, which is installed in the detection host and is used to lock the mobile frame; the locking device includes two support plates, and a locking frame is movably installed in the support plate. The locking frame is inserted into the mobile frame and is used to lock the mobile frame.

[0010] Furthermore, in a preferred embodiment of the present invention, the active detection and cleaning device further comprises a liquid storage tank, the liquid storage tank is installed in the detection host, an extraction pump is installed on the liquid storage tank, an infusion tube is connected between the extraction pump and the swing rod, and the infusion tube is connected to the top side of the rotating frame;

[0011] A sponge is sleeved on the bottom side of the swing rod, and the swing rod rotates to clean the surface of the chip through the sponge.

[0012] Further, in a preferred embodiment of the present invention, a rotating column is rotatably installed in the mounting seat, a mounting shaft is installed on the top side of the rotating column, and the rotating frame is installed on the mounting shaft;

[0013] Two mounting frames are installed on the mounting seat, and an extrusion head for extruding the infusion tube is installed on the bottom side of the mounting frame.

[0014] Furthermore, in a preferred embodiment of the present invention, a lifting slot is provided on one side of the mounting seat, a lifting block is slidably installed in the lifting slot, and a lower pressing plate is installed on one side of the lifting block;

[0015] A pressing plate is installed on one side of the clamp, and the movement of the clamp drives the pressing plate to press the lower pressing plate downward.

[0016] Furthermore, in a preferred embodiment of the present invention, a return spring is installed on the top side of the lifting block, and the top end of the return spring is installed on the top inner wall of the lifting slot.

[0017] Furthermore, in a preferred embodiment of the present invention, a lifting shaft is installed on one side of the lifting block, a driving groove is opened in an arc shape on the outer surface of the rotating column, and one end of the lifting shaft extends into the driving groove;

[0018] The lifting block drives the lifting shaft to move, drives the lifting shaft to move in the driving groove, and drives the rotating column to rotate.

[0019] Furthermore, in a preferred embodiment of the present invention, a telescopic slot is provided on the bottom side of the mounting block, and the top end of the telescopic rod is movably mounted in the telescopic slot;

[0020] A supporting spring is installed on the bottom side of the mounting block, and the bottom end of the supporting spring is installed on the telescopic seat.

[0021] Furthermore, in a preferred embodiment of the present invention, a mounting cavity is provided on the detection rotating plate, a connecting shaft is movably installed in the mounting cavity, and two ends of the connecting shaft are respectively installed on the inner walls of both sides of the telescopic seat;

[0022] A torsion spring is installed on the connecting shaft, and the other end of the torsion spring is installed on the inner wall of the installation cavity.

[0023] Further, in a preferred embodiment of the present invention, a push hole is provided on the support plate, the locking frame is movably installed in the push hole, the clamp moves to push the locking frame to move, two locking grooves are provided on the moving frame, and the two locking frames are respectively inserted into the two locking grooves;

[0024] A push-pull plate is installed on the bottom side of the support plate, and a push-pull spring is connected between the push-pull plate and the support plate.

[0025] A method for detecting a gallium nitride semiconductor chip is performed according to the above-mentioned detection device for processing gallium nitride semiconductor chips, and comprises the following steps:

[0026] S1. The driving cylinder is started, and the clamp is pulled into the detection host through the driving bar, and the extrusion plate is driven to squeeze the lower pressure plate, so that the lower pressure plate drives the lifting block to move in the lifting slot, and the movement of the lifting block drives the lifting shaft to move in the driving slot, driving the rotating column to rotate, and the rotating column drives the swing rod to rotate through the rotating frame, and drives the infusion tube to detach from an extrusion head. The cleaning liquid in the liquid storage tank is extracted into the infusion tube by the extraction pump, and then enters the sponge on the swing rod through the infusion tube, and cleans the surface of the chip as the swing rod swings;

[0027] S2. The fixture drives the chip to move, and impurities such as welding slag on the chip drive the detection rotating plate to rotate, so that the detection rotating plate rotates on the connecting shaft, and the detection rotating plate rotates and squeezes the switch to open, reminding the staff that there is a quality problem with the chip;

[0028] S3. When the fixture is moved into place, the two support plates are pushed to move so that the two support plates are disengaged from the two locking grooves, so that the movable frame is released from restriction, which is convenient for testing the chip.

[0029] The beneficial effects of the detection device and detection method for gallium nitride semiconductor chip processing proposed by the present invention are:

[0030] In the present invention, through the setting of the active detection and cleaning device, after the chip is installed on the fixture, the driving cylinder is used to drive the driving bar to move, so that when the driving bar pulls the fixture into the detection host, it drives the swing rod to clean the surface of the chip, thereby avoiding the problem of more impurities falling on the chip during detection, which affects the detection; in addition, if the fixture does not move into place, the staff can clearly observe the deviation of the swing position of the swing rod, which is convenient for adjusting the position of the chip, further ensuring the accuracy of the detection work.

[0031] Furthermore, in the present invention, through the setting of the welding quality inspection device, when the fixture drives the chip into the inspection host, if there are impurities such as welding slag on the chip, which makes the chip surface have many protrusions, it will directly drive the inspection turn plate to rotate, so that the inspection turn plate rotates on the connecting shaft, and drives the torsion spring to be stressed, and makes the inspection turn plate squeeze the switch, and then makes the alarm turn on and sound an alarm, reminding the staff that the chip has quality problems, and can clearly observe the specific part of the chip where the problem occurs, which is convenient for the staff to check.

[0032] Furthermore, in the present invention, through the setting of the locking device, when performing detection, if the clamp is moved into place, it will push the two support plates to move, so that the two support plates are disengaged from the two locking grooves, and then the movable frame is released from the restriction, which is convenient for chip detection; if the position of the clamp is not moved into place, so that the movable frame is locked, the staff can be reminded in time to make adjustments, so as to avoid the problem of excessive displacement of the clamp as the number of uses increases, thereby affecting chip detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A schematic diagram of the three-dimensional structure of a detection device for gallium nitride semiconductor chip processing provided by an embodiment of the present invention;

[0034] Figure 2 A schematic diagram of the structure of a moving frame of a detection device for gallium nitride semiconductor chip processing provided by an embodiment of the present invention connected with an active detection and cleaning device and other structures;

[0035] Figure 3 A schematic diagram of the structure of the connection between a mounting base and a rotating column and other structures of a detection device for processing gallium nitride semiconductor chips provided by an embodiment of the present invention;

[0036] Figure 4 A schematic cross-sectional view of the connection between a mounting base and a rotating column and other structures of a detection device for processing gallium nitride semiconductor chips provided by an embodiment of the present invention;

[0037] Figure 5 A schematic diagram of the structure of the connection between a lower pressing plate and a rotating column and other structures of a detection device for processing gallium nitride semiconductor chips provided by an embodiment of the present invention;

[0038] Figure 6 A detection device for gallium nitride semiconductor chip processing provided by an embodiment of the present invention Figure 4 The structural diagram of part A in the figure;

[0039] Figure 7 A schematic diagram of a partial structure of a detection frame and a detection rotating plate and other structures connected to a detection device for processing gallium nitride semiconductor chips provided by an embodiment of the present invention;

[0040] Figure 8 A schematic cross-sectional view of the connection between a telescopic seat and a detection rotating plate and other structures of a detection device for processing gallium nitride semiconductor chips provided by an embodiment of the present invention;

[0041] Fig. 9 A schematic diagram of the structure of the connection between a support plate and a locking frame and other structures of a detection device for processing gallium nitride semiconductor chips provided by an embodiment of the present invention;

[0042] Fig.10 A schematic diagram of the partial structure of the connection between a moving frame and a locking frame and other structures of a detection device for gallium nitride semiconductor chip processing provided by an embodiment of the present invention.

[0043] In the figure: 1-detection host; 2-moving frame; 3-electron microscope; 4-driving cylinder; 5-clamp; 6-chip; 7-active detection and cleaning device; 701-mounting seat; 702-swing rod; 703-rotating frame; 704-liquid storage tank; 705-extraction pump; 706-infusion tube; 707-mounting frame; 708-extrusion head; 709-lifting slot; 710-lifting block; 711-reset spring; 712-lower pressure plate; 713-extrusion plate; 714-rotating column; 715-driving slot; 716-lifting shaft ;717-installation shaft;8-welding quality detection device;801-detection frame;802-installation block;803-telescopic rod;804-telescopic seat;805-detection rotating plate;806-alarm;807-switch;808-telescopic slot;809-support spring;810-installation cavity;811-connecting shaft;812-torsion spring;9-locking device;901-support plate;902-locking frame;903-locking slot;904-push hole;905-push-pull plate;906-push-pull spring;10-drive bar. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0045] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0046] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0047] In addition, in the description of the present invention, it should be noted that the terms "center", "upper", "lower", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the invented product is usually placed when in use, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0048] In addition, the terms "horizontal", "vertical", "perpendicular" and the like do not mean that the components are required to be absolutely vertical, but can be slightly tilted. For example, "vertical" only means that its direction is more vertical than "horizontal", and does not mean that the structure must be completely vertical, but can be slightly tilted.

[0049] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] Please refer to the attached manual Figure 1-10 An embodiment of the present invention provides a detection device for gallium nitride semiconductor chip processing, which includes a detection host 1, a mobile frame 2 is installed in the detection host 1, an electron microscope 3 is installed on the mobile frame 2, a fixture 5 is provided in the detection host 1, and a chip 6 is clamped on the fixture 5.

[0051] Furthermore, an embodiment of the present invention provides a detection device for processing gallium nitride semiconductor chips, wherein a driving cylinder 4 is installed in the detection host 1, a driving bar 10 is installed on the driving cylinder 4, a fixture 5 is connected to the driving bar 10, and an active detection and cleaning device 7 is installed in the detection host 1, and the active detection and cleaning device 7 is used to actively detect and clean the chip 6; specifically, the active detection and cleaning device 7 includes a mounting seat 701, a rotating frame 703 is rotatably installed on the mounting seat 701, and a swing rod 702 is installed on the rotating frame 703, and the swing rod 702 is rotated to detect the position of the chip 6 and clean the surface of the chip 6. It should be noted that in the embodiment of the present invention, after the chip 6 is mounted on the fixture 5, the driving cylinder 4 drives the driving bar 10 to move, so that when the driving bar 10 pulls the fixture 5 into the detection host 1, it drives the swing rod 702 to clean the surface of the chip 6, so as to avoid the problem that a lot of impurities fall on the chip 6 during the detection, which affects the detection.

[0052] Further specifically, in the embodiment of the present invention, it also includes a welding quality detection device 8, which is installed in the detection host 1, and is used to detect the surface of the chip 6; the welding quality detection device 8 includes a detection frame 801, and the detection frame 801 is installed in the detection host 1. A plurality of mounting blocks 802 are movably installed in the detection frame 801 by bolts, and a telescopic rod 803 is movably installed on the bottom side of the mounting block 802, and a telescopic seat 804 is installed at the bottom end of the telescopic rod 803. A detection rotating plate 805 in contact with the chip 6 is rotatably installed in the telescopic seat 804, an alarm 806 is installed on the mounting block 802, and a switch 807 is installed on the top inner wall of the telescopic seat 804. The detection rotating plate 805 rotates to squeeze the switch 807 to trigger the alarm 806. It should be noted that, in the embodiment of the present invention, when the clamp 5 drives the chip 6 into the detection host 1, if there are impurities such as welding slag on the chip 6, which makes the surface of the chip 6 have many protrusions, it will directly drive the detection turntable 805 to rotate, so that the detection turntable 805 rotates on the connecting shaft 811, and drives the torsion spring 812 to be subjected to force, and makes the detection turntable 805 squeeze the switch 807, and then makes the alarm 806 turn on and sound an alarm, reminding the staff that the chip 6 has quality problems, and can clearly observe the specific part of the chip 6 where the problem occurs, so that the staff can check it easily.

[0053] More specifically, in the embodiment of the present invention, a locking device 9 is further included, which is installed in the detection host 1 and is used to lock the mobile frame 2; the locking device 9 includes two support plates 901, and a locking frame 902 is movably installed in the support plate 901, and the locking frame 902 is inserted on the mobile frame 2 and is used to lock the mobile frame 2. It should be noted that in the embodiment of the present invention, when performing detection, if the clamp 5 is moved into place, it will push the two support plates 901 to move, so that the two support plates 901 are separated from the two locking grooves 903, so that the mobile frame 2 is released from the restriction, which is convenient for detecting the chip 6; if the position of the clamp 5 is not moved into place, so that the mobile frame 2 is locked, the staff can be reminded to make adjustments in time to avoid the problem that the clamp 5 is displaced too much with the increase in the number of uses, which affects the detection of the chip 6.

[0054] For further information, please refer to the attached manual. Figure 2-6 , an inspection device for gallium nitride semiconductor chip processing provided by an embodiment of the present invention, the active inspection and cleaning device 7 further includes a liquid storage tank 704, the liquid storage tank 704 is installed in the inspection host 1, an extraction pump 705 is installed on the liquid storage tank 704, an infusion tube 706 is connected between the extraction pump 705 and the swing rod 702, and the infusion tube 706 is connected to the top side of the rotating frame 703;

[0055] In addition, a sponge is sleeved on the bottom side of the swing rod 702, and the swing rod 702 rotates to clean the surface of the chip 6 through the sponge. It should be noted that in the embodiment of the present invention, when the swing rod 702 rotates, the cleaning liquid in the liquid storage tank 704 is pumped into the infusion tube 706 by the extraction pump 705, and then enters the sponge on the swing rod 702 through the infusion tube 706, and cleans the surface of the chip 6 as the swing rod 702 swings.

[0056] More specifically, in the embodiment of the present invention, a rotating column 714 is rotatably installed in the mounting seat 701, a mounting shaft 717 is installed on the top side of the rotating column 714, and the rotating frame 703 is installed on the mounting shaft 717; in addition, two mounting frames 707 are installed on the mounting seat 701, and an extrusion head 708 for extruding the infusion tube 706 is installed on the bottom side of the mounting frame 707. It should be noted that, in the embodiment of the present invention, the clamp 5 enters into the detection host 1, causing the swing arm 702 to rotate and driving the infusion tube 706 to detach from an extrusion head 708. At this time, the cleaning liquid in the liquid storage tank 704 is extracted into the infusion tube 706 by the extraction pump 705, and then enters into the sponge on the swing arm 702 through the infusion tube 706, and cleans the surface of the chip 6 as the swing arm 702 swings. When the swing arm 702 rotates into place, the infusion tube 706 is squeezed by another extrusion head 708, so that the infusion tube 706 is squeezed and closed, thereby realizing automatic opening and closing of the infusion tube 706.

[0057] Please continue to refer to the instruction manual Figure 2-6 , further specifically, in the embodiment of the present invention, a lifting slot 709 is provided on one side of the mounting seat 701, a lifting block 710 is slidably installed in the lifting slot 709, and a lower pressing plate 712 is installed on one side of the lifting block 710;

[0058] In addition, a pressing plate 713 is installed on one side of the clamp 5, and the movement of the clamp 5 drives the pressing plate 713 to press the lower pressing plate 712 downward. It should be noted that in the embodiment of the present invention, when the clamp 5 enters the detection host 1, the pressing plate 713 is driven to press the lower pressing plate 712, so that the lower pressing plate 712 drives the lifting block 710 to move, thereby causing the swing rod 702 to rotate.

[0059] More specifically, in the embodiment of the present invention, a return spring 711 is installed on the top side of the lifting block 710, and the top end of the return spring 711 is installed on the top inner wall of the lifting slot 709. It should be noted that in the embodiment of the present invention, when the lifting block 710 moves, the return spring 711 is subjected to force, so the return spring 711 can help the lifting block 710 to reset.

[0060] Please continue to refer to the instruction manual Figure 2-6 , more specifically, in the embodiment of the present invention, a lifting shaft 716 is installed on one side of the lifting block 710, and a driving groove 715 is opened in an arc shape on the outer surface of the rotating column 714, and one end of the lifting shaft 716 extends into the driving groove 715; the lifting block 710 drives the lifting shaft 716 to move, drives the lifting shaft 716 to move in the driving groove 715, and drives the rotating column 714 to rotate. It should be noted that in the embodiment of the present invention, when the lifting block 710 moves, it drives the lifting shaft 716 to move in the driving groove 715, and then drives the rotating column 714 to rotate, and the rotating column 714 drives the swing rod 702 to rotate through the rotating frame 703 to clean the chip 6.

[0061] For further information, please refer to the attached manual. Figure 7-8 , an inspection device for processing gallium nitride semiconductor chips provided by an embodiment of the present invention, a telescopic groove 808 is provided on the bottom side of the mounting block 802, and the top end of the telescopic rod 803 is movably mounted in the telescopic groove 808;

[0062] In addition, a support spring 809 is installed on the bottom side of the mounting block 802, and the bottom end of the support spring 809 is installed on the telescopic seat 804. It should be noted that in the embodiment of the present invention, when the chip 6 moves, the protruding solder joints on the chip 6 press the detection rotating plate 805 to move upward, and the detection rotating plate 805 drives the telescopic seat 804 to move, so that the telescopic seat 804 drives the telescopic rod 803 to move in the telescopic slot 808, and drives the support spring 809 to be stressed.

[0063] Please continue to refer to the instruction manual Figure 7-8 Specifically, in the embodiment of the present invention, a mounting cavity 810 is provided on the detection rotating plate 805, a connecting shaft 811 is movably installed in the mounting cavity 810, and the two ends of the connecting shaft 811 are respectively installed on the inner walls on both sides of the telescopic seat 804; in addition, a torsion spring 812 is installed on the connecting shaft 811, and the other end of the torsion spring 812 is installed on the inner wall of the mounting cavity 810. It should be noted that in the embodiment of the present invention, when the detection rotating plate 805 is driven to rotate by impurities, it rotates on the connecting shaft 811 and drives the torsion spring 812 to be stressed, so the resilience of the torsion spring 812 can help the detection rotating plate 805 to reset.

[0064] For further information, please refer to the attached manual. Figure 9-10 , an inspection device for processing gallium nitride semiconductor chips provided by an embodiment of the present invention, a push hole 904 is provided on a support plate 901, a locking frame 902 is movably installed in the push hole 904, a clamp 5 moves to push the locking frame 902 to move, two locking grooves 903 are provided on the moving frame 2, and the two locking frames 902 are respectively inserted into the two locking grooves 903;

[0065] In addition, a push-pull plate 905 is installed on the bottom side of the support plate 901, and a push-pull spring 906 is connected between the push-pull plate 905 and the support plate 901. It should be noted that in the embodiment of the present invention, after the clamp 5 is moved into place, the two support plates 901 are pushed to move, so that the two support plates 901 are disengaged from the two locking grooves 903, and then the mobile frame 2 is released from the restriction, which is convenient for testing the chip 6; if the position of the clamp 5 is not moved into place, so that the mobile frame 2 is locked, the staff can be reminded in time to make adjustments.

[0066] In summary, the working principle of a detection device for processing gallium nitride semiconductor chips provided by an embodiment of the present invention, that is, the detection method when using the detection device for processing gallium nitride semiconductor chips according to the embodiment of the present invention for detection is:

[0067] After the chip 6 is mounted on the fixture 5, the driving cylinder 4 drives the driving bar 10 to move, so that the driving bar 10 pulls the fixture 5 into the detection host 1, and drives the extrusion plate 713 to squeeze the lower pressure plate 712, so that the lower pressure plate 712 drives the lifting block 710 to move in the lifting slot 709, and drives the reset spring 711 to be stretched, and the lifting block 710 moves to drive the lifting shaft 716 to move in the driving slot 715, thereby driving the rotating column 714 to rotate, and the rotating column 714 drives the swing rod 702 to rotate through the rotating frame 703, and drives the infusion tube 706 to detach from an extrusion head 708. At this time, the liquid in the liquid storage tank 704 The cleaning liquid is extracted into the infusion tube 706 by the extraction pump 705, and then enters the sponge on the swing rod 702 through the infusion tube 706, and cleans the surface of the chip 6 as the swing rod 702 swings, so as to avoid the problem that a lot of impurities fall on the chip 6 during the detection, which affects the detection; and when the swing rod 702 rotates into place, the infusion tube 706 is squeezed by another squeezing head 708, so that the infusion tube 706 is squeezed and closed, and if the clamp 5 does not move into place, the staff can clearly observe the deviation of the swing position of the swing rod 702, which is convenient for adjusting the position of the chip 6, and further ensures the accuracy of the detection work;

[0068] Further, when the fixture 5 drives the chip 6 into the detection host 1, the protruding solder joints on the chip 6 squeeze the detection rotating plate 805 to move upward, and the detection rotating plate 805 drives the telescopic seat 804 to move, so that the telescopic seat 804 drives the telescopic rod 803 to move in the telescopic slot 808, and drives the support spring 809 to be stressed; if there are impurities such as welding slag on the chip 6, so that the surface of the chip 6 has many protrusions, it will directly drive the detection rotating plate 805 to rotate, so that the detection rotating plate 805 rotates on the connecting shaft 811, and drives the torsion spring 812 to be stressed, and makes the detection rotating plate 805 squeeze the switch 807, and then makes the alarm 806 open to sound an alarm, reminding the staff that the chip 6 has a quality problem, and can clearly observe the specific part of the chip 6 with the problem, which is convenient for the staff to check;

[0069] Furthermore, after the clamp 5 is moved into place, the two support plates 901 are pushed to move, so that the two support plates 901 are disengaged from the two locking grooves 903, and then the movable frame 2 is released from the restriction, which is convenient for detecting the chip 6 and ensures that the electron microscope 3 can fully detect the chip 6. At the same time, if the position of the clamp 5 is not moved into place, so that the movable frame 2 is locked, the staff can be reminded in time to make adjustments to avoid the problem that the clamp 5 is displaced too much as the number of uses increases, thereby affecting the detection of the chip 6.

[0070] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A detection device for gallium nitride semiconductor chip processing, characterized in that: It comprises a detection host, a mobile frame is installed in the detection host, an electron microscope is installed on the mobile frame, a fixture is provided in the detection host, and a chip is clamped on the fixture; A driving cylinder is installed in the detection host, a driving bar is installed on the driving cylinder, the clamp is connected to the driving bar, an active detection and cleaning device is installed in the detection host, and the active detection and cleaning device is used to actively detect and clean the chip; the active detection and cleaning device includes a mounting seat, a rotating frame is rotatably installed on the mounting seat, a swing rod is installed on the rotating frame, and the swing rod is rotated to detect the position of the chip and clean the surface of the chip; It also includes a welding quality detection device, which is installed in the detection host and is used to detect the surface of the chip; the welding quality detection device includes a detection frame, which is installed in the detection host, and a plurality of mounting blocks are movably installed in the detection frame by bolts, a telescopic rod is movably installed on the bottom side of the mounting block, a telescopic seat is installed at the bottom end of the telescopic rod, a detection rotating plate in contact with the chip is rotatably installed in the telescopic seat, an alarm is installed on the mounting block, a switch is installed on the inner wall of the top side of the telescopic seat, and the detection rotating plate rotates to squeeze the switch to trigger the alarm; It also includes a locking device, which is installed in the detection host and is used to lock the mobile frame; the locking device includes two support plates, and a locking frame is movably installed in the support plate, and the locking frame is inserted into the mobile frame to lock the mobile frame; The active detection and cleaning device further comprises a liquid storage tank, the liquid storage tank is installed in the detection host, an extraction pump is installed on the liquid storage tank, a liquid infusion tube is connected between the extraction pump and the swing rod, and the liquid infusion tube is connected to the top side of the rotating frame; The bottom side of the swing rod is sleeved with a sponge, and the swing rod rotates to clean the surface of the chip through the sponge; A rotating column is rotatably mounted in the mounting seat, a mounting shaft is mounted on the top side of the rotating column, and the rotating frame is mounted on the mounting shaft; Two mounting frames are installed on the mounting seat, and an extrusion head for extruding the infusion tube is installed on the bottom side of the mounting frame; A lifting slot is provided on one side of the mounting seat, a lifting block is slidably installed in the lifting slot, and a lower pressing plate is installed on one side of the lifting block; A pressing plate is installed on one side of the clamp, and the movement of the clamp drives the pressing plate to press the lower pressing plate downward; A return spring is installed on the top side of the lifting block, and the top end of the return spring is installed on the top inner wall of the lifting slot; A lifting shaft is installed on one side of the lifting block, and a driving groove is opened in an arc shape on the outer surface of the rotating column, and one end of the lifting shaft extends into the driving groove; The lifting block drives the lifting shaft to move, drives the lifting shaft to move in the driving groove, and drives the rotating column to rotate; The support plate is provided with a push hole, the locking frame is movably installed in the push hole, the clamp moves to push the locking frame to move, the movable frame is provided with two locking grooves, and the two locking frames are respectively inserted into the two locking grooves; A push-pull plate is installed on the bottom side of the support plate, and a push-pull spring is connected between the push-pull plate and the support plate.

2. The detection device for gallium nitride semiconductor chip processing according to claim 1, characterized in that: A telescopic slot is provided on the bottom side of the mounting block, and the top end of the telescopic rod is movably mounted in the telescopic slot; A supporting spring is installed on the bottom side of the mounting block, and the bottom end of the supporting spring is installed on the telescopic seat.

3. The detection device for gallium nitride semiconductor chip processing according to claim 2, characterized in that: The detection rotating plate is provided with an installation cavity, a connecting shaft is movably installed in the installation cavity, and two ends of the connecting shaft are respectively installed on the inner walls of both sides of the telescopic seat; A torsion spring is installed on the connecting shaft, and the other end of the torsion spring is installed on the inner wall of the installation cavity.

4. A method for detecting a gallium nitride semiconductor chip, which is performed according to the detection device for gallium nitride semiconductor chip processing according to any one of claims 1 to 3, characterized in that: The following steps are involved: S1. Start the driving cylinder, pull the fixture into the detection host through the driving bar, and drive the extrusion plate to squeeze the lower pressure plate, so that the lower pressure plate drives the lifting block to move in the lifting slot, and the movement of the lifting block drives the lifting shaft to move in the driving slot, driving the rotating column to rotate, and the rotating column drives the swing rod to rotate through the rotating frame, and drives the infusion tube to detach from an extrusion head. The cleaning liquid in the liquid storage tank is extracted into the infusion tube by the extraction pump, and then enters the sponge on the swing rod through the infusion tube, and cleans the surface of the chip as the swing rod swings; S2. The fixture drives the chip to move, and impurities such as welding slag on the chip drive the detection rotating plate to rotate, so that the detection rotating plate rotates on the connecting shaft, and the detection rotating plate rotates and squeezes the switch to open, reminding the staff that there is a quality problem with the chip; S3. When the fixture moves into place, the two support plates are pushed to move so that the two support plates are disengaged from the two locking grooves, so that the movable frame is released from restriction, which facilitates the detection of the chip.

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