Method for detecting target block

Abstract

The invention discloses a method for detecting a target block. The method for detecting the target block comprises the following steps: S1, testing a to-be-detected target block by adopting a water immersion flaw detector to obtain reflected wave intensity data of the to-be-detected target block; in the step S1, the detection surface of the to-be-detected target block is ground flat, and the thickness of the to-be-detected target block is larger than or equal to 10 mm and smaller than or equal to 35 mm; s2, comparing the reflected wave intensity data of the to-be-detected target block with the reflected intensity data of the standard target block, and judging whether the to-be-detected target block is qualified or not; in the step S2, reflection intensity data of the standard target block is obtained through testing of the water immersion flaw detector in the step S1, and the material and the thickness of the standard target block are the same as those of the target block to be tested. According to the method, the crystal grain conditions of the target blocks can be determined by analyzing the ultrasonic reflected waves on the bottom surfaces of the target blocks, so that the target blocks can be quickly screened in batches in a lossless manner, and the unqualified target blocks with large overall crystal grains can be screened out.

Description

Technical Field

[0001] The invention relates to a method for detecting a target block. Background Art

[0002] GB / T 6394-2017 discloses a method for determining the average grain size of metals, which uses the intercept method to measure the average grain size of metals; however, since the maximum size of most grains is not on the measurement section, and the actual average size measured is low, the values ​​of sections at different depths of the same sample vary greatly, and the reproducibility is poor. In addition, this method requires sampling, grinding, and acid etching, and cannot achieve non-destructive measurement.

[0003] The existing technology lacks a method for rapid and non-destructive screening of target materials or target blocks, which results in some targets with coarse grains produced due to process abnormalities entering the downstream process, thus affecting the quality of the final product. Therefore, it is urgent to develop a method for detecting target blocks, which can rapidly and non-destructively detect the average grain size and maximum grain size of target blocks in batches, thereby screening whether the target blocks are qualified. Summary of the invention

[0004] In order to overcome the existing interception method of measuring the average grain size of the material to determine whether the material meets the qualified standard, this method is difficult to perform batch, rapid and non-destructive testing of the material, the present invention provides a method for detecting target blocks. The method can determine the grain size of the target block by analyzing the ultrasonic reflection wave on the bottom surface of the target block, thereby achieving rapid and non-destructive screening of the target block batches, and screening out the target blocks with large overall grains and unqualified.

[0005] The present invention solves the above technical problems through the following technical solutions:

[0006] The present invention provides a method for detecting a target block, which comprises the following steps: S1, using a water immersion flaw detector to test a target block to obtain reflected wave intensity data of the target block to be tested; in step S1, the detection surface of the target block to be tested is subjected to a flattening treatment, and the thickness of the target block to be tested is ≥10 mm and ≤35 mm; S2, comparing the reflected wave intensity data of the target block to be tested with the reflection intensity data of a standard target block to determine whether the target block to be tested is qualified; in step S2, the reflection intensity data of the standard target block is obtained by testing the water immersion flaw detector in step S1, and the material and thickness of the standard target material are the same as those of the target block to be tested.

[0007] In the present invention, the target material can be obtained by splicing target blocks; therefore, those skilled in the art should know that the method for detecting target blocks can also be used to detect target materials.

[0008] Prior to this invention, water immersion flaw detectors were mostly used to screen for internal defects or binding rates of target materials or target blocks. They mainly determined internal defects such as shrinkage cavities or cracks in target materials or target blocks by measuring the peak between the top and bottom reflection waves. However, if the target material or target block has no defects but has coarse grains, there will be no defect-free abnormal peaks between the surface reflection wave and the bottom reflection wave, which cannot be screened out. The use and principle of kerosene flaw detectors are similar; however, such testing methods cannot screen out the grain size information of the target material.

[0009] In the present invention, the water immersion flaw detector may be a UT-ARS504 water immersion flaw detector.

[0010] In the present invention, the working principle of the water immersion flaw detector is as follows: the ultrasonic wave emitted by the water immersion flaw detector passes through the target block from top to bottom, and when passing through the top surface of the target block, a wave peak will be reflected, which will be absorbed by the probe to form a top surface reflection wave, and a wave peak will be reflected back on the bottom surface, which is the bottom surface reflection wave; if there are "pores, impurities and other defects" inside the target block, a defect reflection wave can also be formed between the top surface reflection wave and the bottom surface reflection wave; in the process of passing through the target block and reflecting back from the bottom surface, it is continuously absorbed or scattered by the grains inside the target block, and the larger the grains, the more obvious this phenomenon is. In the target material of the same thickness, the more large-sized grains there are, the weaker the intensity of the bottom surface reflection wave is, so by monitoring the intensity of the bottom surface reflection wave, the internal grain conditions of different target blocks can be directly and effectively screened.

[0011] In some embodiments, the reflected wave intensity data includes bottom surface reflected wave data or defect reflected wave data. The bottom surface reflected wave data can be used to analyze a target block with no internal defects but coarse grains; the defect reflected wave data can be used to analyze a target block with internal defects.

[0012] In some embodiments, the material of the target block to be tested is a Ni-based alloy, preferably a NiCr alloy, such as 8020NiCr.

[0013] In the present invention, as the thickness of the target block to be measured decreases, under the same gain condition, the difference value between the target blocks with different grain sizes decreases; when the thickness of the target block to be measured or the standard target block is less than 10 mm, the difference value of the grain size between the target blocks is difficult to distinguish, thereby affecting the accuracy of detection.

[0014] In some embodiments, the thickness of the target block to be measured is ≥18 mm and ≤30 mm.

[0015] In a specific embodiment, the thickness of the target block to be measured is ≥18 mm and ≤25 mm, for example, 18 mm, 22 mm or 25 mm.

[0016] In one embodiment, the material of the target block to be measured is 8020NiCr, and the thickness of the target block to be measured is 25 mm.

[0017] In one embodiment, the number of the target blocks to be tested is 10.

[0018] In some embodiments, the gain of the water immersion flaw detector is 46 db ~56 db, for example, 50 db.

[0019] In some embodiments, the compensation of the immersion flaw detector is 0 db ~2 db, for example 2 db.

[0020] In some embodiments, the scanning interval of the immersion flaw detector is 0.2 mm to 2 mm, for example, 1 mm.

[0021] In some embodiments, the operating frequency of the probe of the immersion flaw detector is 10 MHz.

[0022] In some embodiments, in step S1, during the test, the target block to be tested is placed on the same plane as the standard target block in the immersion flaw detector to keep the depth of the target block to be tested the same and reduce experimental errors caused by different depths.

[0023] In the present invention, the detection surface generally includes the top surface and the bottom surface of the target block to be tested; if the detection surface is not ground flat, the unground surface will cause the ultrasonic waves emitted by the water immersion flaw detector to scatter, thereby affecting the test results.

[0024] In some embodiments, in step S1, the flattening treatment includes mechanical grinding to make the detection surfaces of the standard target block and the target block to be detected flat.

[0025] In some embodiments, the number of the standard target blocks is at least 2.

[0026] In a specific embodiment, the number of the standard target blocks is 3; preferably, the standard target blocks include target blocks with a reflected wave intensity greater than 100%, target blocks with a reflected wave intensity of 60%-100%, and target blocks with a reflected wave intensity less than 10%; the reflected wave intensity refers to the ratio of the actual value of the reflected wave intensity to the actual value of the incident wave intensity, with the incident wave intensity as 100%; that is, the calculation formula for the reflected wave intensity is: actual value of the reflected wave intensity / actual value of the incident wave intensity × 100%.

[0027] Among them, the three levels of standard targets are selected from the residual sputtered targets to make the most accurate and cost-effective. Usually, when testing the target block to be tested, the three standard targets are put in and scanned together. By comparing the target block to be tested with the standard target block, the level of the standard target block is determined, which can eliminate the interference of some machine and environmental factors.

[0028] In a certain embodiment, the standard target block is composed of a first standard target block representing "excellent", a second standard target block representing "qualified", and a third standard target block representing "unqualified", and the average particle size and maximum particle size of each standard target block are different; the average grain size of the first standard target block, the second standard target block, and the third standard target block are 31.2 μm, 76.3 μm, and 161.8 μm, respectively.

[0029] In some embodiments, in step S1, the presentation form of the reflection intensity data includes a color block obtained by processing the reflection intensity data, and a spectrum peak obtained by processing the reflection intensity data.

[0030] In the present invention, the color block obtained by processing the reflection intensity data is a picture generated according to the intensity of the reflected wave after scanning by the water immersion flaw detector, wherein the color of the color block is generated by a computer according to the intensity of the reflected wave, and there is a relevant comparison scale for the comparison of specific intensity and color.

[0031] In the present invention, the larger the grains are, the weaker the intensity of the bottom surface reflected wave is. By comparing the color and intensity value of the reflected wave intensity feedback with the reference target block, the average grain size and the maximum grain size of the target block can be reversely deduced.

[0032] In some embodiments, step S2 includes the following process: comparing the color block of the target block to be tested obtained by processing the reflection intensity data with the color block of the standard target block obtained by processing the reflection intensity data, and judging whether the target block to be tested is qualified based on the color difference of the color blocks.

[0033] In some embodiments, step S2 includes the following process: comparing the spectrum peak of the target block to be tested obtained by processing the reflection intensity data with the spectrum peak of the standard target block obtained by processing the reflection intensity data, and judging whether the target block to be tested is qualified by comparing the intensity of the spectrum peaks.

[0034] In a certain embodiment of the present invention, step S2 may also include the following process: first, preliminarily judge whether the target block to be tested is qualified based on the color; among them, by comparison, the green / blue color can be directly judged as "unqualified" or "abnormal", and the red color can be directly judged as "excellent" or "qualified"; when the color is purple or close to red-purple, it is necessary to further analyze the spectrum peak, move the mouse to the spectrum peak of the target block to be tested, the computer will display the reflection peak graph, and then judge according to the intensity of the reflected wave, and >60% is judged as "qualified".

[0035] In the present invention, the criteria for judging whether the target block to be tested is qualified include: the maximum grain size of the product is required to be less than 150-300 μm.

[0036] In the present invention, the standard for judging whether the target material to be tested is qualified is determined based on the residual target surface after sputtering. Whether it is the average grain size or the intensity of the reflected wave, it is a feedback condition of a certain sputtering surface. The purpose of this application is to use the water immersion flaw detection method to judge the target block that exceeds the critical value (the surface where a small amount of coarse grains will appear after sputtering) and remove it.

[0037] In the present invention, the standard target block can be made of the residual target after magnetron sputtering, and is determined according to the grain size of the sputtering surface. A target material without coarse grains is excellent (100% of the grains are free of coarse grains, which is reflected in the bottom surface reflection wave intensity of >100%), a target material with very few coarse grains is qualified (more than 95% of the grains are free of coarse grains, which is reflected in the bottom surface reflection wave intensity of 60%-100%), and a target material with most coarse grains is unqualified (less than 95% of the grains are free of coarse grains, which is reflected in the bottom surface reflection wave intensity of <60%); among them, a target material with coarse grains on the entire surface is seriously abnormal (less than 50% of the grains are free of coarse grains, which is reflected in the bottom surface reflection wave intensity of <10%).

[0038] On the basis of being in accordance with the common sense in the art, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present invention.

[0039] The reagents and raw materials used in the present invention are commercially available.

[0040] The positive and progressive effects of the present invention are:

[0041] (1) Due to the long detection time and the loss of products due to the test method, the existing interception method needs to use sampling detection to detect the entire batch of target blocks, which may result in misdetection and missed detection. The method of detecting target blocks of the present invention uses a water immersion flaw detector to detect the intensity of the bottom surface reflection wave, and can screen each finished target block before shipment. It can quickly and accurately screen and remove coarse grain abnormal products, and can also focus on screening targets with qualified average grains but individual coarse grains, thereby realizing batch, rapid and non-destructive screening of target blocks.

[0042] (2) Because targets with different grain sizes have different coating speeds under the same coating conditions, the resulting film properties are also different. After the target blocks are screened by this application, the target blocks with the same grain size range can be collected into the same target material to avoid uncontrollable effects on the film properties of downstream users during coating due to irregular differences in grains between target blocks. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 The appearance of the target material includes an abnormal target block with coarse grains and a normal target block;

[0044] Figure 2 The main view of three target blocks of different qualities in the target material;

[0045] Figure 3 Part a of the figure is the result of analyzing the target block without internal defects using a water immersion flaw detector; Figure 3 Part b is the result of analyzing the target block with internal defects using a water immersion flaw detector.

[0046] Figure 4 This is a schematic diagram of the placement of each target block in the water immersion flaw detector in Example 1 of the present application;

[0047] Figure 5 Schematic diagram of the bottom surface reflection wave intensity of three standard target blocks in Example 1 of the present application;

[0048] Figure 6 Schematic diagram of the bottom surface reflected wave intensity of different target materials to be tested in Example 1 of the present application;

[0049] Figure 7 It is a schematic diagram of the reflected wave intensity when the cross section of the target block is placed downward;

[0050] Figure 8 It is a schematic diagram of the reflected wave intensity when the cross section of the target block is placed upward;

[0051] Fig. 9 This is an electron microscope scanning image of target block No. 22 tested by the intercept method in effect embodiment 1;

[0052] Fig.10 This is an electron microscope scanning image of target block No. 21 tested by the intercept method in effect embodiment 1;

[0053] Fig.11 This is an appearance diagram of each target material in Example 2 of the present application;

[0054] Fig.12 Schematic diagram of the bottom surface reflection wave intensity of each target material in Example 2 of the present application. DETAILED DESCRIPTION

[0055] The present invention is further described below by way of examples, but the present invention is not limited to the scope of the examples. The experimental methods in the following examples without specifying specific conditions are carried out according to conventional methods and conditions, or selected according to the product specifications.

[0056] Figure 1 This is the appearance of the target material containing abnormal target blocks with coarse grains and normal target blocks. A set of target materials is usually composed of more than a dozen target blocks. Due to the lack of screening, the abnormal target blocks with coarse grains and the normal target blocks will be placed in the same set of target materials (the upper part is the abnormal target material, and the lower part is the normal target material). Before they are used, the appearance of the abnormal target blocks and the normal target blocks are the same; after the target blocks are used, that is, after the downstream users perform magnetron sputtering and use up the target materials, such as Figure 1 As shown, the appearance is obviously different. The surface of the whole set of targets will be partially rough and partially uniform. Three targets with different surface roughness are selected. Figure 2 The main view of three target blocks of different qualities in the target material; Figure 2 From top to bottom, the downstream users are classified into "excellent" targets, "qualified" targets and "abnormal" targets after magnetron sputtering.

[0057] By using the method for detecting target blocks in the present application, unqualified target blocks (target blocks with coarse internal grains) can be screened out before shipment, and qualified target blocks with similar grain sizes can be spliced ​​into target materials. After downstream users perform magnetron sputtering and exhaust the use of the target materials, the surface of the entire set of target materials will be a uniform plane.

[0058] Prior to this invention, water immersion flaw detectors were only used to measure structural defects such as "porosity, impurities and other undesirable factors" or binding adhesion rates of target blocks. By analyzing whether defective reflection waves appear between the top and bottom reflection waves, defects such as shrinkage cavities / cracks inside the target blocks can be determined. Figure 3 Part a and Figure 3 Part b of the diagram shows the results of using a water immersion flaw detector to analyze targets with no internal defects and targets with internal defects. Figure 3 From the a and b parts, we can know that the internal defects of the target block can be judged by analyzing whether there is a defect reflection wave between the top and bottom reflection waves by the water immersion flaw detector, that is, selecting Figure 3 The intensity of the defect reflection wave peak within the range of gate 2 or 3 in parts a and b of the target. However, if there is no defect inside the target material or target block but only coarse grains, since individual coarse grains are perfectly combined with surrounding grains without corresponding gaps, there will be no defect abnormal peak between the surface reflection wave and the bottom reflection wave, and it cannot be screened out.

[0059] Example 1

[0060] This embodiment provides a method for detecting a target block; the method comprises the following steps:

[0061] Step (1): The test surfaces of the standard target block and the target block to be tested, both of which are 25 mm thick and made of 8020NiCr, are ground flat. The standard target block and the target block to be tested are placed at the same level in the UT-ARS504 water immersion flaw detector with their cross sections facing upward (ground flat surface facing upward). Figure 4 As shown ( Figure 4 is a schematic diagram of the placement position of the target block in the water immersion flaw detector), the reflected wave intensity of the standard target block and the reflected wave intensity of the target block to be tested are obtained by testing; wherein the reflected wave intensity of the standard target block and the reflected wave intensity of the target block to be tested are the respective bottom surface reflected wave intensities, corresponding to Figure 3 The intensity of the reflection peak at the bottom surface of gate 4 in part a.

[0062] The number of standard targets is 3, and the average grain sizes thereof are determined by the intercept method to be 31.2 μm, 76.3 μm, and 161.8 μm, respectively; they are respectively regarded as excellent targets (100% of the grains are free of coarseness, which is reflected in the bottom surface reflection wave intensity of >100%), qualified targets (more than 95% and less than 100% of the grains are free of coarseness, which is reflected in the bottom surface reflection wave intensity of 60%-100%), and abnormal targets (50% and less than the grains are free of coarseness, which is reflected in the bottom surface reflection wave intensity of <10%).

[0063] Among them, the test parameters of the immersion flaw detector are: probe is 10 MHz, material is 8020NiCr, thickness is 25 mm, gain is 50 db, compensation is 2 db, and scanning interval is 1 mm.

[0064] Figure 5 Schematic diagram of the bottom surface reflection wave intensity of the three standard target blocks in this embodiment; in the figure, the target blocks from left to right correspond to the standard target block with an average grain of 31.2 μm (red), the standard target block with an average grain of 76.3 μm (purple), and the standard target block with an average grain of 161.8 μm (green). It can be seen that Figure 5 The average particle size of the target blocks increases gradually from left to right. Figure 5 The area closer to green in color (excluding the edge) shows that there are more large grains in this area. It may be a large grain or the effect of the superposition of several relatively large grains.

[0065] Step (2): Compare the reflected wave intensity of the target block to be tested with the reflected wave intensity of the standard target block to determine whether the target block to be tested is qualified.

[0066] In this embodiment, target blocks No. 21 to No. 30 are selected as the target blocks to be tested, and the colors in the reflected wave intensity map thereof are compared with the colors in the reflected wave intensity map of the standard target material. Figure 6 Schematic diagram of the bottom surface reflection wave intensity of different target materials to be tested in this embodiment. It can be seen that only the color of the reflection wave intensity diagram of No. 21 is similar to the color of the reflection wave intensity diagram of the qualified target block. Clicking the mouse to the position of the target block on the diagram can display the intensity value of the bottom surface reflection wave. The bottom surface reflection wave intensity is 60%-70%, which belongs to the qualified target block with more than 95% grains without coarse grains; while the color of the reflection wave intensity diagram of target blocks No. 22-30, clicking the mouse to the position of the target block on the diagram can display the intensity value of the bottom surface reflection wave. The bottom surface reflection wave intensity is 60%-70%, and the bottom surface reflection wave intensity is lower than 60%, which belongs to the unqualified target block with less than 95% grains without coarse grains. Among them, the color of the reflection wave intensity diagram of target block No. 22 is similar to the color of the reflection wave intensity diagram of the abnormal target block, and the bottom surface reflection wave intensity is about 10%, which belongs to the abnormal target material with 50% or less grains without coarse grains.

[0067] This method can easily screen out qualified products and abnormal products; and this detection method has no requirements on whether the cross section of the target block is placed upward or downward. Figure 7 and Figure 8 Schematic diagrams of the reflected wave intensity when the cross section of the target block is placed downward and the cross section is placed upward. Figure 7 and Figure 8 The left part of the figure is a schematic diagram of the reflected wave intensity of the excellent target block. Figure 7 and Figure 8 The right part of the figure is a schematic diagram of the reflected wave intensity of the unqualified target block. Figure 7 and Figure 8 It can be seen that there is no obvious difference in the color and value of its reflection intensity.

[0068] The method of this embodiment is used to screen the target blocks to be tested, forming reflection intensity diagrams of different colors, which can directly distinguish qualified products, unqualified products and abnormal products, and prevent unqualified products and abnormal products from flowing into the hands of downstream users.

[0069] Effect Example 1

[0070] This effect embodiment is to verify the accuracy of the target block detection method of Example 1.

[0071] A small amount of sample was cut from the target block No. 22 of the sample to be tested in Example 1, and its average grain size was tested by the intercept method, and its maximum grain size was analyzed; wherein, the intercept method includes the following steps: cutting a metal block of about 1cm*1cm to make a standard sample, XQ-2B metallographic sample mounting machine; using 200 / 800 / 2000 mesh sandpaper to grind the surface, MoPao200DE metallographic sample grinding and polishing machine; after acid etching, it was placed under the LM100 metallographic microscope for observation and photography, and then input into the computer for analysis, and the average grain size of the target block No. 22 was obtained to be 151 μm, and the maximum grain reached 1000 μm. The grain size of the target block No. 22 was analyzed using a metallographic microscope of model LM100 produced by Wright Company, and the following was obtained: Fig. 9 The electron microscope scanning image of target block No. 22 is shown. Fig. 9 The circled part is the largest grain of the target block, and its size is 1000 μm. This proves that target material No. 22 is an abnormal target material and the method of Example 1 is correct.

[0072] In addition, the intercept method was used to test the average grain size of target block No. 21, and its largest grain was analyzed. The grains of target block No. 21 were analyzed using a metallographic microscope model LM100 from Wright Company, and the following results were obtained: Fig.10 The electron microscope scanning image of target block No. 21 shown in the figure is Fig.10 It can be seen that the average grain size of target block No. 21 is 65.8 μm, and the maximum grain size is 143.2 μm. Fig.11 It can be seen that the target block No. 21 to be tested has no large grains and is relatively uniform. This proves that the target block No. 21 is a qualified target and the method of Example 1 is correct.

[0073] The present application can analyze the overall grain size of the target block with good reproducibility; the original intercept method can only analyze the grain size of a certain cross section of the sample taken, and with the change of grinding depth and sampling point position, the measured average grain size has poor reproducibility.

[0074] Example 2

[0075] This embodiment provides a method for detecting target materials; this embodiment adopts the same detection steps and detection processes as in embodiment 1, and uses the three standard target blocks in embodiment 1; target materials No. 5 to No. 8 are used as the target materials to be tested. The thickness of the target materials to be tested in this embodiment is 25 mm, and the material is 8020NiCr

[0076] Fig.11 is the appearance diagram of each target material in this embodiment; Fig.11 It can be seen that there is no difference in appearance between the newly prepared targets No. 5 to No. 8.

[0077] Through the analysis of the water immersion flaw detector, the bottom surface reflection wave intensity of target materials No. 5 to No. 8 can be obtained, and its relationship with the bottom surface reflection wave intensity of the standard target block can be compared. Fig.12 The figure is a schematic diagram of the bottom surface reflection wave intensity of each target material in this embodiment. Target materials 5 to 8 are preliminarily judged by color. Since target materials 5, 7, and 8 are obviously different from the dark red standard in the middle, they are directly judged as unqualified targets; target material 6 is similar to the dark red standard in the middle. Move the mouse to the position of the target block on the figure and compare the value displayed by the computer. It is 40%-50%, which is also judged as an unqualified target. Fig.12 It can be seen that targets No. 5 to No. 7 are all unqualified targets with 95%-50% free of coarse grains, and target No. 8 is an abnormal target with less than 50% free of coarse grains.

[0078] This application can realize rapid non-destructive testing. The original interception method requires cutting samples for grinding and etching, which greatly improves efficiency.

Claims

1. A method for detecting a target block, characterized in that: It includes the following steps: S1. Testing the target block to be tested by using a water immersion flaw detector to obtain reflected wave intensity data of the target block to be tested; In step S1, the detection surface of the target block to be tested is ground flat, and the thickness of the target block to be tested is ≥10 mm and ≤35 mm; S2, comparing the reflection wave intensity data of the target block to be tested with the reflection wave intensity data of the standard target block to determine whether the target block to be tested is qualified; In step S2, the reflection intensity data of the standard target block is obtained by testing the water immersion flaw detector in step S1, and the material and thickness of the standard target are the same as those of the target block to be tested.

2. The method for detecting a target block according to claim 1, characterized in that: The reflected wave intensity data includes bottom surface reflected wave data or defect reflected wave data.

3. The method for detecting a target block according to claim 1, characterized in that: The target block to be tested meets one or both of the following conditions: ① The material of the target block to be tested is Ni alloy; ② The thickness of the target block to be measured is ≥18 mm and ≤30 mm.

4. The method for detecting a target block according to claim 3, characterized in that: The thickness of the target block to be measured is ≥18 mm and ≤25 mm.

5. The method for detecting a target block according to claim 1, characterized in that: The operating parameters of the water immersion flaw detector meet one or more of the following conditions: ① The gain of the water immersion flaw detector is 46 db ~56 db; ②The compensation of the water immersion flaw detector is 0 db~2 db; ③The scanning interval of the water immersion flaw detector is 0.2 mm~2 mm.

6. The method for detecting a target block according to claim 5, characterized in that: The operating parameters of the water immersion flaw detector meet one or more of the following conditions: ① The gain of the water immersion flaw detector is 50 db; ② The compensation of the water immersion flaw detector is 2 db; ③The scanning interval of the water immersion flaw detector is 1 mm; ④The operating frequency of the water immersion flaw detector is 10 MHz.

7. The method for detecting a target block according to claim 1, characterized in that: Step S1 satisfies one or both of the following processes: ① During the test, the target block to be tested is placed on the same plane as the standard target block in the water immersion flaw detector; ② The flattening treatment method includes mechanical grinding to make the detection surfaces of the standard target block and the target block to be tested flat.

8. The method for detecting a target block according to claim 1, wherein: The number of the standard target blocks is 3; the standard target blocks include a target block with a reflected wave intensity greater than 100%, a target block with a reflected wave intensity of 60%-100%, and a target block with a reflected wave intensity less than 10%.

9. The method for detecting a target block according to claim 1, wherein: In step S1, the presentation form of the reflection intensity data includes a color block obtained by processing the reflection intensity data, and a spectrum peak obtained by processing the reflection intensity data.

10. The method for detecting a target block according to claim 8, characterized in that: Step S2 satisfies one or both of the following processes: ① Compare the color block of the target block to be tested obtained by processing the reflection intensity data with the color block of the standard target block obtained by processing the reflection intensity data, and judge whether the target block to be tested is qualified according to the color difference of the color blocks; ② Compare the spectrum peak of the target block to be tested obtained by processing the reflection intensity data with the spectrum peak of the standard target block to be processed by processing the reflection intensity data, and judge whether the target block to be tested is qualified by comparing the intensity of the spectrum peaks.

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