Differential pressure sensor and differential pressure detection device

Abstract

This invention discloses a differential pressure sensor and a differential pressure detection device. The differential pressure sensor includes a first module, a second module, and a flexible connector. The first module includes a first block having a first cavity; a first diaphragm attached to the first block; and first and second pressure sensors installed in the first cavity of the first block. The second module includes a second block having a second cavity; and a second diaphragm attached to the second block. The flexible connector is a hollow tube connected between the first and second blocks, allowing the first module to float relative to the second module. The first pressure sensor communicates with the first cavity and is used to detect a first fluid pressure, while the second pressure sensor communicates with the second cavity via the flexible connector and is used to detect a second fluid pressure. This invention can absorb positional errors between the connection ends of the customer's first and second pipes, allowing the differential pressure sensor to be easily installed on the customer's pipes.

Description

Technical Field

[0001] The present invention relates to a differential pressure sensor and a differential pressure detection device including the differential pressure sensor. Background Technology

[0002] In existing technology, differential pressure sensors are typically used to detect the pressure difference between the fluid in a customer's first and second pipelines. One end of the differential pressure sensor is connected to the connection end of the first pipeline, and the other end is connected to the connection end of the second pipeline. In existing technology, the relative positions between the two ends of the differential pressure sensor are fixed and cannot float relative to each other. This requires that the relative positions between the connection ends of the first and second pipelines be precise. However, in practical applications, it is difficult to accurately guarantee the relative positions between the connection ends of the first and second pipelines, making it difficult to install the differential pressure sensor on the customer's pipelines. Summary of the Invention

[0003] The purpose of this invention is to solve at least one aspect of the aforementioned problems and defects existing in the prior art.

[0004] According to one aspect of the present invention, a differential pressure sensor is provided. The differential pressure sensor includes: a first module, a second module, and a flexible connector. The first module includes: a first block having a first cavity for containing a first fluid; a first diaphragm attached to the first block for transmitting pressure in a first conduit to the first fluid in the first cavity; a first pressure sensor mounted in the first cavity of the first block; and a second pressure sensor mounted in the first cavity of the first block. The second module includes: a second block having a second cavity for containing a second fluid; and a second diaphragm attached to the second block for transmitting pressure in a second conduit to the second fluid in the second cavity. The flexible connector is a hollow tube connected between the first block and the second block, allowing the first module to float relative to the second module. The first pressure sensor communicates with the first cavity for detecting the pressure of the first fluid, and the second pressure sensor communicates with the second cavity via the flexible connector for detecting the pressure of the second fluid.

[0005] According to an exemplary embodiment of the present invention, the first pressure sensor has a first detection hole that communicates with the first cavity to detect the first fluid pressure; the second pressure sensor has a second detection hole that communicates with the second cavity via the flexible connector to detect the second fluid pressure.

[0006] According to another exemplary embodiment of the present invention, the flexible connector includes: a first connecting end connected to the first block and in fluid communication with the second pressure sensor; a second connecting end connected to the second block and in fluid communication with the second cavity; and a flexible connecting portion connected between the first connecting end and the second connecting end, wherein a communicating hole is formed on the first block, and the first connecting end of the flexible connector is in fluid communication with the second pressure sensor via the communicating hole.

[0007] According to another exemplary embodiment of the present invention, a first mounting portion is formed on the first block, and a first connecting end of the flexible connector is embedded in the first mounting portion of the first block to realize the connection between the two; a second mounting portion is formed on the second block, and a second connecting end of the flexible connector is embedded in the second mounting portion of the second block to realize the connection between the two.

[0008] According to another exemplary embodiment of the present invention, the first connecting end and the second connecting end of the flexible connector are respectively welded to the first block and the second block.

[0009] According to another exemplary embodiment of the present invention, the flexible connection portion of the flexible connector is corrugated and its wall size is smaller than a predetermined value, so that the flexible connection portion can be bent, twisted, stretched or compressed.

[0010] According to another exemplary embodiment of the present invention, the flexible connecting portion of the flexible connector is a thin-walled tube with a wall thickness less than a predetermined value, so that the flexible connecting portion can elastically deform in its axial and radial directions.

[0011] According to another exemplary embodiment of the present invention, the first block has two axially opposite sides, the first cavity has an opening formed on one side of the first block, the first diaphragm is attached to one side of the first block and closes the opening of the first cavity; the first mounting portion is formed on the other side of the first block and communicates with the communicating hole.

[0012] According to another exemplary embodiment of the present invention, the second block has two axially opposite sides, the second cavity has an opening formed on one side of the second block, the second diaphragm is attached to one side of the second block and closes the opening of the second cavity; an axially extending receiving hole is formed on the other side of the second block, the second mounting portion communicates the second cavity and the receiving hole; at least a portion of the flexible connecting portion of the flexible connector is received in the receiving hole, and the inner diameter of the receiving hole is larger than the outer diameter of the flexible connecting portion to allow the flexible connecting portion to move radially.

[0013] According to another exemplary embodiment of the present invention, the first block and the second block are axially spaced apart by a predetermined distance, so as to allow the first block and the second block to move axially toward each other by the predetermined distance.

[0014] According to another exemplary embodiment of the present invention, a first fluid filling passage is formed on the first block, the first fluid filling passage being in communication with the first cavity for filling the first cavity with the first fluid.

[0015] According to another exemplary embodiment of the present invention, the first module further includes: a first sealing ball, welded to the inlet of the first fluid filling passage to seal the inlet of the first fluid filling passage.

[0016] According to another exemplary embodiment of the present invention, a second fluid filling passage is formed on the second block, the second fluid filling passage communicating with the second cavity for filling the second cavity with the second fluid.

[0017] According to another exemplary embodiment of the present invention, the second module further includes: a second sealing ball, welded to the inlet of the second fluid filling passage to seal the inlet of the second fluid filling passage.

[0018] According to another exemplary embodiment of the present invention, the first module further includes: a first welding ring for welding the peripheral portion of the first diaphragm to one side of the first block and for welding the first module to the connection end of the first pipe.

[0019] According to another exemplary embodiment of the present invention, the second module further includes: a second welding ring for welding the peripheral portion of the second diaphragm to one side of the second block and for welding the second module to the connection end of the second pipe.

[0020] According to another exemplary embodiment of the present invention, the first module further includes an insert, inserted into the first cavity, for reducing the amount of first fluid that needs to be filled in the first cavity.

[0021] According to another exemplary embodiment of the present invention, the first module further includes: a first pin passing through the first block and fixed to the first block; and a first lead electrically connected between the first pressure sensor and the first pin, the first pin being used to output a first fluid pressure signal detected by the first pressure sensor.

[0022] According to another exemplary embodiment of the present invention, the second module further includes: a second pin passing through the first block and fixed to the first block; and a second lead electrically connected between the second pressure sensor and the second pin, the second pin being used to output a second fluid pressure signal detected by the second pressure sensor.

[0023] According to another exemplary embodiment of the present invention, the first connecting end and the second connecting end of the flexible connector are L-shaped tubular, and the flexible connecting portion of the flexible connector is L-shaped tubular or straight tubular and its two ends are respectively connected to the first connecting end and the second connecting end.

[0024] According to another exemplary embodiment of the present invention, the first connecting end and the second connecting end of the flexible connector are straight tubes, and the flexible connecting portion of the flexible connector is L-shaped or straight tube and its two ends are respectively connected to the first connecting end and the second connecting end.

[0025] According to another exemplary embodiment of the present invention, the axis of the first module and the axis of the first connecting end of the flexible connector are located in a first plane, and the axis of the second module and the axis of the second connecting end of the flexible connector are located in a second plane. The first plane and the second plane have a predetermined angle, which is within the range of 0 degrees to 360 degrees.

[0026] According to another exemplary embodiment of the present invention, the flexible connector is a single integrally formed component.

[0027] According to another exemplary embodiment of the present invention, the first connecting end, the second connecting end, and the flexible connecting portion of the flexible connector are three separately formed independent components connected together; the two ends of the flexible connecting portion of the flexible connector are respectively welded to the first connecting end and the second connecting end of the flexible connector.

[0028] According to another exemplary embodiment of the present invention, the first connecting end and the second connecting end of the flexible connector are respectively sealed to the first block and the second block by a glass encapsulation process; or the first connecting end and the second connecting end of the flexible connector are respectively welded to the first block and the second block.

[0029] According to another aspect of the present invention, a differential pressure detection device is provided. The differential pressure detection device includes: the aforementioned differential pressure sensor; a pressure signal acquisition device electrically connected to a first pressure sensor and a second pressure sensor of the differential pressure sensor, for acquiring a first fluid pressure signal detected by the first pressure sensor and a second fluid pressure signal detected by the second pressure sensor; and a differential pressure calculation device for calculating the difference between the first fluid pressure and the second fluid pressure based on the first fluid pressure signal and the second fluid pressure signal acquired by the pressure signal acquisition device.

[0030] In the aforementioned exemplary embodiments of the present invention, the first module of the differential pressure sensor is able to float relative to the second module, thereby absorbing the positional error between the connection end of the first pipe and the connection end of the second pipe of the customer, so that the differential pressure sensor can be easily installed on the customer's pipe.

[0031] Other objects and advantages of the invention will become apparent from the following description of the invention with reference to the accompanying drawings, and will help to provide a comprehensive understanding of the invention. Attached Figure Description

[0032] Figure 1 A perspective view of a differential pressure sensor according to an exemplary embodiment of the present invention is shown;

[0033] Figure 2 A perspective view of a differential pressure sensor according to an exemplary embodiment of the present invention, viewed from one end;

[0034] Figure 3 A perspective view of a differential pressure sensor according to an exemplary embodiment of the present invention, viewed from the other end;

[0035] Figure 4 This shows a three-dimensional dissected view of a differential pressure sensor according to an exemplary embodiment of the present invention;

[0036] Figure 5 This shows a three-dimensional assembled cross-sectional view of a differential pressure sensor according to an exemplary embodiment of the present invention;

[0037] Figure 6 This shows a planar assembly cross-sectional view of a differential pressure sensor according to an exemplary embodiment of the present invention;

[0038] Figure 7 An exploded schematic diagram of a first module of a differential pressure sensor according to an exemplary embodiment of the present invention is shown;

[0039] Figure 8 A perspective view of a differential pressure sensor according to a first variation of the present invention is shown;

[0040] Figure 9 A perspective view of a differential pressure sensor according to a second variation of the present invention is shown;

[0041] Figure 10 A perspective view of a differential pressure sensor according to a third variation of the present invention is shown;

[0042] Figure 11 A perspective view of a differential pressure sensor according to a fourth variation of the present invention is shown;

[0043] Figure 12 A perspective view of a differential pressure sensor according to a fifth variation of the present invention is shown;

[0044] Figure 13 A perspective view of a differential pressure sensor according to a sixth variation of the present invention is shown;

[0045] Figure 14 A perspective view of a differential pressure sensor according to a seventh variation of the present invention is shown;

[0046] Figure 15 A perspective view of a differential pressure sensor according to an eighth variation of the present invention is shown. Detailed Implementation

[0047] The technical solution of the present invention will be further described in detail below through embodiments and in conjunction with the accompanying drawings. In this specification, the same or similar reference numerals indicate the same or similar components. The following description of the embodiments of the present invention with reference to the accompanying drawings is intended to explain the overall inventive concept of the present invention and should not be construed as a limitation thereof.

[0048] Furthermore, in the following detailed description, numerous specific details are set forth for ease of explanation to provide a thorough understanding of the embodiments disclosed herein. However, it will be apparent that one or more embodiments may be practiced without these specific details. In other instances, well-known structures and apparatuses are illustrated to simplify the figures.

[0049] According to a general technical concept of the present invention, a differential pressure sensor is provided. The differential pressure sensor includes: a first module, a second module, and a flexible connector. The first module includes: a first block having a first cavity for containing a first fluid; a first diaphragm attached to the first block for transmitting pressure from a first conduit to the first fluid in the first cavity; a first pressure sensor mounted in the first cavity of the first block; and a second pressure sensor mounted in the first cavity of the first block. The second module includes: a second block having a second cavity for containing a second fluid; and a second diaphragm attached to the second block for transmitting pressure from a second conduit to the second fluid in the second cavity. The flexible connector is a hollow tube connected between the first block and the second block, allowing the first module to float relative to the second module. The first pressure sensor communicates with the first cavity for detecting the pressure of the first fluid, and the second pressure sensor communicates with the second cavity via the flexible connector for detecting the pressure of the second fluid.

[0050] According to another general technical concept of the present invention, a differential pressure detection device is provided. The differential pressure detection device includes: the aforementioned differential pressure sensor; a pressure signal acquisition device electrically connected to a first pressure sensor and a second pressure sensor of the differential pressure sensor, for acquiring a first fluid pressure signal detected by the first pressure sensor and a second fluid pressure signal detected by the second pressure sensor; and a differential pressure calculation device for calculating the difference between the first fluid pressure and the second fluid pressure based on the first fluid pressure signal and the second fluid pressure signal acquired by the pressure signal acquisition device.

[0051] Figure 1 A perspective view of a differential pressure sensor according to an exemplary embodiment of the present invention is shown; Figure 2 A perspective view of a differential pressure sensor according to an exemplary embodiment of the present invention, viewed from one end; Figure 3 A perspective view of a differential pressure sensor according to an exemplary embodiment of the present invention, viewed from the other end; Figure 4 This shows a three-dimensional dissected view of a differential pressure sensor according to an exemplary embodiment of the present invention; Figure 5 This shows a three-dimensional assembled cross-sectional view of a differential pressure sensor according to an exemplary embodiment of the present invention.

[0052] like Figures 1 to 5As shown, in an exemplary embodiment of the present invention, a differential pressure sensor is disclosed. The differential pressure sensor includes: a first module 1, a second module 2, and a flexible connector 3. The first module 1 includes: a first block 10, a first diaphragm 12, a first pressure sensor 17, and a second pressure sensor 18. The first block 10 has a first cavity 11 for containing a first fluid. The first diaphragm 12 is attached to the first block 10 for transmitting pressure from a first conduit (not shown) to the first fluid in the first cavity 11. The first pressure sensor 17 is installed in the first cavity 11 of the first block 10. The second pressure sensor 18 is installed in the first cavity 11 of the first block 10. The second module 2 includes: a second block 20 and a second diaphragm 22. The second block 20 has a second cavity 21 for containing a second fluid. The second diaphragm 22 is attached to the second block 20 for transmitting pressure from a second conduit (not shown) to the second fluid in the second cavity 21.

[0053] like Figures 1 to 5 As shown in the illustrated embodiment, the flexible connector 3 is a hollow tube with a hollow inner cavity 301. The flexible connector 3 connects between the first block 10 and the second block 20, allowing the first module 1 to float relative to the second module 2. In the illustrated embodiment, the first pressure sensor 17 is connected to the first cavity 11 to detect the first fluid pressure in the first cavity 11, and the second pressure sensor 18 is connected to the second cavity 21 via the flexible connector 3 to detect the second fluid pressure in the second cavity 21.

[0054] like Figures 1 to 5 As shown in the illustrated embodiment, since the first module 1 can float relative to the second module 2, it can absorb the relative positional error between the connection ends of the first pipe and the second pipe, so that the first module 1 and the second module 2 can be easily connected to the connection ends of the first pipe and the second pipe.

[0055] like Figures 1 to 5 As shown in the illustrated embodiment, the first pressure sensor 17 has a first detection port 171, which communicates with the first cavity 11 to detect the first fluid pressure. The second pressure sensor 18 has a second detection port 181, which communicates with the second cavity 21 via a flexible connector 3 to detect the second fluid pressure. In the illustrated embodiment, both the first pressure sensor 17 and the second pressure sensor 18 are micro-electro-mechanical systems, commonly referred to simply as MEMS. The aforementioned first and second fluids can be silicone oil or other suitable fluids.

[0056] like Figures 1 to 5As shown in the illustrated embodiment, the flexible connector 3 includes a first connecting end 31, a second connecting end 32, and a flexible connecting portion 33. The first connecting end 31 is connected to the first block 10 and is in fluid communication with the second pressure sensor 18. The second connecting end 32 is connected to the second block 20 and is in fluid communication with the second cavity 21. The flexible connecting portion 33 connects between the first connecting end 31 and the second connecting end 32. A through hole 102 is formed on the first block 10, and the first connecting end 31 of the flexible connector 3 is in fluid communication with the second pressure sensor 18 via the through hole 102.

[0057] like Figures 1 to 5 As shown in the illustrated embodiment, a first mounting portion 101 is formed on the first block 10, and the first connecting end 31 of the flexible connector 3 is embedded in the first mounting portion 101 of the first block 10 to achieve a connection between the two. A second mounting portion 201 is formed on the second block 20, and the second connecting end 32 of the flexible connector 3 is embedded in the second mounting portion 201 of the second block 20 to achieve a connection between the two.

[0058] like Figures 1 to 5 As shown in the illustrated embodiment, the first connecting end 31 and the second connecting end 32 of the flexible connector 3 are respectively welded to the first block 10 and the second block 20. In the illustrated embodiment, the flexible connector 3 further includes a first annular weld strip portion 311 and a second annular weld strip portion 312. The first annular weld strip portion 311 is located between the outer wall surface of the first connecting end 31 and the inner wall surface of the first mounting portion 101 to seal the two together. The second annular weld strip portion 312 is located between the outer wall surface of the second connecting end 32 and the inner wall surface of the second mounting portion 201 to seal the two together.

[0059] Figure 6 This shows a planar assembly cross-sectional view of a differential pressure sensor according to an exemplary embodiment of the present invention; Figure 7 An exploded schematic diagram of the first module 1 of a differential pressure sensor according to an exemplary embodiment of the present invention is shown.

[0060] like Figures 1 to 7 As shown in the illustrated embodiment, the flexible connection portion 33 of the flexible connector 3 is corrugated and its wall size is smaller than a predetermined value, so that the flexible connection portion 33 can be bent, twisted, stretched or compressed.

[0061] However, please note that the structure and shape of the flexible connection portion 33 of the flexible connector 3 of the present invention are not limited to the illustrated embodiment. For example, in another exemplary embodiment of the present invention, the flexible connection portion 33 of the flexible connector 3 can be a thin-walled tube with a wall thickness less than a predetermined value, so that the flexible connection portion 33 can elastically deform in its axial and radial directions. This also allows the flexible connection portion 33 to be bent, twisted, stretched, or compressed.

[0062] like Figures 1 to 7 As shown in the illustrated embodiment, the flexible connector 3 can be a tubular component made of steel or copper. Of course, the flexible connector 3 can also be a tubular component made of other suitable materials.

[0063] like Figures 1 to 7 As shown in the illustrated embodiment, the first block 10 has two axially opposite sides, the first cavity 11 has an opening formed on one side of the first block 10, the first diaphragm 12 is attached to one side of the first block 10 and closes the opening of the first cavity 11; the first mounting part 101 is formed on the other side of the first block 10 and communicates with the connecting hole 102.

[0064] like Figures 1 to 7 As shown in the illustrated embodiment, the second block 20 has two axially opposite sides, and the second cavity 21 has an opening formed on one side of the second block 20. The second diaphragm 22 is attached to one side of the second block 20 and closes the opening of the second cavity 21. An axially extending receiving hole 202 is formed on the other side of the second block 20, and the second mounting portion 201 communicates the second cavity 21 and the receiving hole 202. At least a portion of the flexible connecting portion 33 of the flexible connector 3 is received in the receiving hole 202, and the inner diameter of the receiving hole 202 is larger than the outer diameter of the flexible connecting portion 33 to allow the flexible connecting portion 33 to move radially.

[0065] like Figures 1 to 7 As shown in the illustrated embodiment, the first block 10 and the second block 20 are axially spaced apart by a predetermined distance d, allowing the first block 10 and the second block 20 to move axially toward each other by the predetermined distance d.

[0066] like Figures 1 to 7 As shown in the illustrated embodiment, a first fluid filling passage 14 is formed on the first block 10. The first fluid filling passage 14 is connected to the first cavity 11 and is used to fill the first cavity 11 with a first fluid.

[0067] like Figures 1 to 7 As shown in the illustrated embodiment, the first module 1 further includes a first sealing ball 15, which is welded to the inlet of the first fluid filling passage 14 to seal the inlet of the first fluid filling passage 14.

[0068] like Figures 1 to 7 As shown in the illustrated embodiment, a second fluid filling passage 24 is formed on the second block 20. The second fluid filling passage 24 is connected to the second cavity 21 and is used to fill the second cavity 21 with a second fluid.

[0069] like Figures 1 to 7 As shown, in the illustrated embodiment, the second module 2 further includes a second sealing ball 25, which is welded to the inlet of the second fluid filling passage 24 to seal the inlet of the second fluid filling passage 24.

[0070] like Figures 1 to 7 As shown in the illustrated embodiment, the first module 1 further includes a first welding ring 13, which is used to weld the peripheral portion of the first diaphragm 12 to one side of the first block 10 and to weld the first module 1 to the connection end of the customer's first pipe.

[0071] like Figures 1 to 7 As shown in the illustrated embodiment, the second module 2 further includes a second welding ring 23, which is used to weld the peripheral portion of the second diaphragm 22 to one side of the second block 20 and to weld the second module 2 to the connection end of the customer's second pipe.

[0072] like Figures 1 to 7 As shown in the illustrated embodiment, the first module 1 further includes an insert 16, which is inserted into the first cavity 11 to reduce the amount of first fluid that needs to be filled in the first cavity 11. This reduces the amount of first fluid needed and improves the accuracy of the first fluid pressure detection.

[0073] like Figures 1 to 7 As shown in the illustrated embodiment, the first module 1 further includes a first pin 173 and a first lead 172. The first pin 173 passes through the first block 10 and is fixed to the first block 10. The first lead 172 is electrically connected between the first pressure sensor 17 and the first pin 173. The first pin 173 is used to output a first fluid pressure signal detected by the first pressure sensor 17.

[0074] like Figures 1 to 7 As shown in the illustrated embodiment, the second module 1 further includes a second pin 183 and a second lead 182. The second pin 183 passes through the first block 10 and is fixed to the first block 10. The second lead 182 is electrically connected between the second pressure sensor 18 and the second pin 183. The second pin 183 is used to output a second fluid pressure signal detected by the second pressure sensor 18.

[0075] Please note that this invention is not limited to Figure 1-7 The illustrated embodiments, for example, Figures 8 to 15 Showing eight different variations.

[0076] Figure 8 A perspective view of a differential pressure sensor according to a first variation of the present invention is shown; Figure 9 A perspective view of a differential pressure sensor according to a second variation of the present invention is shown.

[0077] like Figure 8 and Figure 9 As shown in the illustrated embodiment, the first connecting end 31 and the second connecting end 32 of the flexible connector 3 are L-shaped tubular, and the flexible connecting portion 33 of the flexible connector 3 is straight tubular with its two ends connected to the first connecting end 31 and the second connecting end 32 respectively.

[0078] like Figure 8 and Figure 9 As shown, in the illustrated embodiment, the axis of the first module 1 and the axis of the first connecting end 31 of the flexible connector 3 are located in a first plane. The axis of the second module 2 and the axis of the second connecting end 32 of the flexible connector 3 are located in a second plane. Figure 8 and Figure 9 As shown, the first plane and the second plane can have a predetermined angle, which is within the range of 0 degrees to 360 degrees. For example, Figure 8 The 90 degrees shown Figure 9 The indicated 0 degrees or other suitable angle.

[0079] like Figure 8 and Figure 9 As shown in the illustrated embodiment, the first connecting end 31, the second connecting end 32, and the flexible connecting portion 33 of the flexible connector 3 are three separately formed components connected together. The two ends of the flexible connecting portion 33 of the flexible connector 3 are welded to the first connecting end 31 and the second connecting end 32 of the flexible connector 3, respectively. The first connecting end 31 and the second connecting end 32 of the flexible connector 3 are respectively sealed to the first block 10 and the second block 20 using a glass encapsulation process.

[0080] Figure 10 A perspective view of a differential pressure sensor according to a third variation of the present invention is shown; Figure 11 A perspective view of a differential pressure sensor according to a fourth variation of the present invention is shown.

[0081] like Figure 10 and Figure 11 As shown in the illustrated embodiment, the first connecting end 31 and the second connecting end 32 of the flexible connector 3 are L-shaped tubular, and the flexible connecting portion 33 of the flexible connector 3 is L-shaped tubular with its two ends connected to the first connecting end 31 and the second connecting end 32 respectively.

[0082] like Figure 10 and Figure 11 As shown, in the illustrated embodiment, the axis of the first module 1 and the axis of the first connecting end 31 of the flexible connector 3 are located in a first plane. The axis of the second module 2 and the axis of the second connecting end 32 of the flexible connector 3 are located in a second plane. Figure 8 and Figure 9 As shown, the first plane and the second plane can have a predetermined angle, which is within the range of 0 degrees to 360 degrees. For example, Figure 10 The 90 degrees shown Figure 11 The indicated 0 degrees or other suitable angle.

[0083] like Figure 10 and Figure 11 As shown in the illustrated embodiment, the first connecting end 31, the second connecting end 32, and the flexible connecting portion 33 of the flexible connector 3 are three separately formed components connected together. The two ends of the flexible connecting portion 33 of the flexible connector 3 are welded to the first connecting end 31 and the second connecting end 32 of the flexible connector 3, respectively. The first connecting end 31 and the second connecting end 32 of the flexible connector 3 are respectively sealed to the first block 10 and the second block 20 using a glass encapsulation process.

[0084] Figure 12 A perspective view of a differential pressure sensor according to a fifth variation of the present invention is shown; Figure 13 A perspective view of a differential pressure sensor according to a sixth variation of the present invention is shown.

[0085] like Figure 12 and Figure 13 As shown in the illustrated embodiment, the first connecting end 31 and the second connecting end 32 of the flexible connector 3 are L-shaped tubular, and the flexible connecting portion 33 of the flexible connector 3 is straight tubular with its two ends connected to the first connecting end 31 and the second connecting end 32 respectively.

[0086] like Figure 12 and Figure 13 As shown, in the illustrated embodiment, the axis of the first module 1 and the axis of the first connecting end 31 of the flexible connector 3 are located in a first plane. The axis of the second module 2 and the axis of the second connecting end 32 of the flexible connector 3 are located in a second plane. Figure 12 and Figure 13 As shown, the first plane and the second plane can have a predetermined angle, which is within the range of 0 degrees to 360 degrees. For example, Figure 12 The 90 degrees shown Figure 13 The indicated 0 degrees or other suitable angle.

[0087] like Figure 12 and Figure 13As shown in the illustrated embodiment, the flexible connector 3 is a single integrally formed component; that is, the first connecting end 31, the second connecting end 32, and the flexible connecting portion 33 of the flexible connector 3 are integrally formed. The first connecting end 31 and the second connecting end 32 of the flexible connector 3 are respectively welded to the first block 10 and the second block 20.

[0088] Figure 14 A perspective view of a differential pressure sensor according to a seventh variation of the present invention is shown; Figure 15 A perspective view of a differential pressure sensor according to an eighth variation of the present invention is shown.

[0089] like Figure 14 and Figure 15 As shown in the illustrated embodiment, the first connecting end 31 and the second connecting end 32 of the flexible connector 3 are L-shaped tubular, and the flexible connecting portion 33 of the flexible connector 3 is L-shaped tubular with its two ends connected to the first connecting end 31 and the second connecting end 32 respectively.

[0090] like Figure 14 and Figure 15 As shown, in the illustrated embodiment, the axis of the first module 1 and the axis of the first connecting end 31 of the flexible connector 3 are located in a first plane. The axis of the second module 2 and the axis of the second connecting end 32 of the flexible connector 3 are located in a second plane. Figure 14 and Figure 15 As shown, the first plane and the second plane can have a predetermined angle, which is within the range of 0 degrees to 360 degrees. For example, Figure 14 The 90 degrees shown Figure 15 The indicated 0 degrees or other suitable angle.

[0091] like Figure 14 and Figure 15 As shown in the illustrated embodiment, the flexible connector 3 is a single integrally formed component; that is, the first connecting end 31, the second connecting end 32, and the flexible connecting portion 33 of the flexible connector 3 are integrally formed. The first connecting end 31 and the second connecting end 32 of the flexible connector 3 are respectively welded to the first block 10 and the second block 20.

[0092] like Figures 1 to 7As shown, in another exemplary embodiment of the present invention, a differential pressure detection device is also disclosed. This differential pressure detection device includes: the aforementioned differential pressure sensor, a pressure signal acquisition device (not shown), and a differential pressure calculation device (not shown). The pressure signal acquisition device is electrically connected to the first pressure sensor 17 and the second pressure sensor 18 of the differential pressure sensor, and is used to acquire a first fluid pressure signal detected by the first pressure sensor 17 and a second fluid pressure signal detected by the second pressure sensor 18. The differential pressure calculation device calculates the difference between the first fluid pressure and the second fluid pressure based on the first fluid pressure signal and the second fluid pressure signal acquired by the pressure signal acquisition device.

[0093] Those skilled in the art will understand that the embodiments described above are exemplary and can be improved upon. The structures described in the various embodiments can be freely combined without causing structural or principle conflicts, and these changes should fall within the protection scope of this invention.

[0094] Although the invention has been described in conjunction with the accompanying drawings, the embodiments disclosed in the drawings are intended to illustrate preferred embodiments of the invention and should not be construed as limiting the invention.

[0095] While some embodiments of the general concept of the invention have been shown and described, those skilled in the art will understand that changes may be made to these embodiments without departing from the principles and spirit of the general concept of the invention, the scope of which is defined by the claims and their equivalents.

[0096] It should be noted that the word "comprising" does not exclude other elements or steps, and the words "a" or "an" do not exclude multiple elements. Furthermore, any reference numerals in the claims should not be construed as limiting the scope of the invention.

Claims

1. A differential pressure sensor, characterized in that, include: The first module (1) includes: The first block (10) has a first cavity (11) for containing a first fluid; A first diaphragm (12) is attached to the first block (10) for transmitting pressure in the first pipe to the first fluid in the first cavity (11); A first pressure sensor (17) is installed in the first cavity (11) of the first block (10); and The second pressure sensor (18) is installed in the first cavity (11) of the first block (10). The second module (2) includes: The second block (20) has a second cavity (21) for containing a second fluid; and A second diaphragm (22), attached to the second block (20), is used to transmit pressure in the second conduit to the second fluid in the second cavity (21); and A flexible connector (3), which is hollow and tubular, is connected between the first block (10) and the second block (20), allowing the first module (1) to float relative to the second module (2). The first pressure sensor (17) is connected to the first cavity (11) and is used to detect the first fluid pressure. The second pressure sensor (18) is connected to the second cavity (21) via the flexible connector (3) and is used to detect the second fluid pressure.

2. The differential pressure sensor according to claim 1, characterized in that: The first pressure sensor (17) has a first detection hole (171) which is connected to the first cavity (11) to detect the first fluid pressure; The second pressure sensor (18) has a second detection hole (181) which communicates with the second cavity (21) via the flexible connector (3) to detect the second fluid pressure.

3. The differential pressure sensor according to claim 1, characterized in that: The flexible connector (3) includes: The first connection end (31) is connected to the first block (10) and is in fluid communication with the second pressure sensor (18); The second connecting end (32) is connected to the second block (20) and is in fluid communication with the second cavity (21); and A flexible connecting part (33) is connected between the first connecting end (31) and the second connecting end (32). A connecting hole (102) is formed on the first block (10), and the first connecting end (31) of the flexible connector (3) is in fluid communication with the second pressure sensor (18) through the connecting hole (102).

4. The differential pressure sensor according to claim 3, characterized in that: A first mounting portion (101) is formed on the first block (10), and the first connecting end (31) of the flexible connector (3) is embedded in the first mounting portion (101) of the first block (10) to realize the connection between the two. A second mounting portion (201) is formed on the second block (20), and the second connecting end (32) of the flexible connector (3) is embedded in the second mounting portion (201) of the second block (20) to achieve the connection between the two.

5. The differential pressure sensor according to claim 3, characterized in that: The first connecting end (31) and the second connecting end (32) of the flexible connector (3) are respectively welded to the first block (10) and the second block (20).

6. The differential pressure sensor according to claim 3, characterized in that: The flexible connection part (33) of the flexible connector (3) is corrugated and its wall is smaller than a predetermined value, so that the flexible connection part (33) can be bent, twisted, stretched or compressed.

7. The differential pressure sensor according to claim 3, characterized in that: The flexible connecting part (33) of the flexible connector (3) is a thin-walled tube with a wall thickness less than a predetermined value, so that the flexible connecting part (33) can elastically deform in its axial and radial directions.

8. The differential pressure sensor according to claim 4, characterized in that: The first block (10) has two axially opposite sides, the first cavity (11) has an opening formed on one side of the first block (10), and the first diaphragm (12) is attached to one side of the first block (10) and closes the opening of the first cavity (11). The first mounting part (101) is formed on the other side of the first block (10) and communicates with the connecting hole (102).

9. The differential pressure sensor according to claim 4, characterized in that: The second block (20) has two axially opposite sides, the second cavity (21) has an opening formed on one side of the second block (20), and the second diaphragm (22) is attached to one side of the second block (20) and closes the opening of the second cavity (21); An axially extending receiving hole (202) is formed on the other side of the second block (20), and the second mounting part (201) connects the second cavity (21) and the receiving hole (202); At least a portion of the flexible connecting portion (33) of the flexible connector (3) is accommodated in the receiving hole (202), and the inner diameter of the receiving hole (202) is larger than the outer diameter of the flexible connecting portion (33) to allow the flexible connecting portion (33) to move radially.

10. The differential pressure sensor according to claim 3, characterized in that: The first block (10) and the second block (20) are axially spaced apart by a predetermined distance (d) to allow the first block (10) and the second block (20) to move axially toward each other by the predetermined distance (d).

11. The differential pressure sensor according to claim 1, characterized in that: A first fluid filling passage (14) is formed on the first block (10), and the first fluid filling passage (14) is connected to the first cavity (11) for filling the first cavity (11) with the first fluid.

12. The differential pressure sensor according to claim 11, characterized in that: The first module (1) further includes: A first sealing ball (15) is welded to the inlet of the first fluid filling passage (14) to seal the inlet of the first fluid filling passage (14).

13. The differential pressure sensor according to claim 1, characterized in that: A second fluid filling passage (24) is formed on the second block (20), and the second fluid filling passage (24) is connected to the second cavity (21) for filling the second fluid into the second cavity (21).

14. The differential pressure sensor according to claim 13, characterized in that: The second module (2) also includes: The second sealing ball (25) is welded to the inlet of the second fluid filling passage (24) to seal the inlet of the second fluid filling passage (24).

15. The differential pressure sensor according to claim 1, characterized in that: The first module (1) further includes: The first welding ring (13) is used to weld the periphery of the first diaphragm (12) to one side of the first block (10) and to weld the first module (1) to the connection end of the first pipe.

16. The differential pressure sensor according to claim 1, characterized in that: The second module (2) also includes: The second welding ring (23) is used to weld the periphery of the second diaphragm (22) to one side of the second block (20) and to weld the second module (2) to the connection end of the second pipe.

17. The differential pressure sensor according to claim 1, characterized in that: The first module (1) further includes: An insert (16) is inserted into the first cavity (11) to reduce the amount of first fluid that needs to be filled in the first cavity (11).

18. The differential pressure sensor according to claim 1, characterized in that: The first module (1) further includes: The first pin (173) passes through the first block (10) and is fixed to the first block (10); and The first lead (172) is electrically connected between the first pressure sensor (17) and the first pin (173). The first pin (173) is used to output the first fluid pressure signal detected by the first pressure sensor (17).

19. The differential pressure sensor according to claim 1, characterized in that: The second module (1) also includes: The second pin (183) passes through the first block (10) and is fixed to the first block (10); and The second lead (182) is electrically connected between the second pressure sensor (18) and the second pin (183). The second pin (183) is used to output the second fluid pressure signal detected by the second pressure sensor (18).

20. The differential pressure sensor according to claim 3, characterized in that: The first connecting end (31) and the second connecting end (32) of the flexible connector (3) are L-shaped tubes, and the flexible connecting part (33) of the flexible connector (3) is L-shaped tube or straight tube and its two ends are respectively connected to the first connecting end (31) and the second connecting end (32).

21. The differential pressure sensor according to claim 3, characterized in that: The first connecting end (31) and the second connecting end (32) of the flexible connector (3) are straight tubes, and the flexible connecting part (33) of the flexible connector (3) is L-shaped or straight tube and its two ends are respectively connected to the first connecting end (31) and the second connecting end (32).

22. The differential pressure sensor according to claim 20 or 21, characterized in that: The axis of the first module (1) and the axis of the first connecting end (31) of the flexible connector (3) are located in a first plane, and the axis of the second module (2) and the axis of the second connecting end (32) of the flexible connector (3) are located in a second plane. There is a predetermined angle between the first plane and the second plane, and the predetermined angle is within the range of 0 degrees to 360 degrees.

23. The differential pressure sensor according to claim 3, characterized in that: The flexible connector (3) is a single component formed in one piece.

24. The differential pressure sensor according to claim 3, characterized in that: The first connecting end (31), the second connecting end (32), and the flexible connecting part (33) of the flexible connector (3) are three separate components that are formed separately and connected together. The two ends of the flexible connecting part (33) of the flexible connector (3) are respectively welded to the first connecting end (31) and the second connecting end (32) of the flexible connector (3).

25. The differential pressure sensor according to claim 23 or 24, characterized in that: The first connecting end (31) and the second connecting end (32) of the flexible connector (3) are respectively sealed to the first block (10) and the second block (20) through a glass encapsulation process; or The first connecting end (31) and the second connecting end (32) of the flexible connector (3) are respectively welded to the first block (10) and the second block (20).

26. A differential pressure detection device, characterized in that, include: The differential pressure sensor according to any one of claims 1-25; The pressure signal acquisition device is electrically connected to the first pressure sensor (17) and the second pressure sensor (18) of the differential pressure sensor, and is used to acquire the first fluid pressure signal detected by the first pressure sensor (17) and the second fluid pressure signal detected by the second pressure sensor (18). and The differential pressure calculation device calculates the difference between the first fluid pressure and the second fluid pressure based on the first fluid pressure signal and the second fluid pressure signal acquired by the pressure signal acquisition device.

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