Light processing device

Abstract

Provided is an optical processing device that eliminates problems caused by deflection of a housing. The light processing apparatus includes: a light source configured to irradiate ultraviolet light to an object to be processed conveyed along a conveyance path; a housing having the light source therein and having an opening through which the object to be processed is carried in or out; and a heat deflection reducing portion that reduces heat deflection of the housing surrounding the opening.

Description

Technical Field

[0001] The present invention relates to light processing devices. Background Art

[0002] A photoprocessing device is known, which has a light source for emitting light and a frame (lamp chamber) having the light source inside. The object to be processed is transported through the frame while being irradiated with light inside the frame, thereby performing photo-cleaning and photo-surface treatment on the object to be processed (for example, refer to patent document 1).

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2006-108069 Summary of the invention

[0006] Problems that the invention will solve

[0007] In such an optical processing device, a light source emits light and generates heat. A frame surrounding the light source is sometimes heated by the heat generated by the light source and thermally expands. It is known that thermal expansion of the frame may cause the frame to bend and interfere with components disposed in the frame. Therefore, an optical processing device that reduces the bending of the frame is studied.

[0008] Means for solving problems

[0009] According to the results of the intensive research conducted by the inventors of the present invention, it was found that the bending of the frame body is concentrated in a part of the frame body. The area that is particularly prone to bending is the area surrounding the opening for carrying in or out the object to be processed. Then, the optical processing device shown below was discovered.

[0010] The optical processing device of the present invention comprises:

[0011] a light source for irradiating ultraviolet light to the object to be processed conveyed along the conveying path;

[0012] a frame having the light source inside and having an opening for carrying in or out the object to be processed; and

[0013] A thermal deflection reducing portion that reduces thermal deflection of the frame body surrounding the opening.

[0014] The thermal deflection of the frame is caused by the heat generated by the light source and the like arranged in the frame being transferred to the frame. If the frame is heated, the frame expands. If the temperature rise of the frame extends to a large range, the frame as a whole will thermally expand, so there is no big problem. However, if the heating of the frame does not extend, a temperature difference is generated between nearby areas, and a difference in thermal expansion is generated, resulting in thermal deflection on the frame. Although described in detail later, the inventors of the present invention noticed that in the area surrounding the opening, the local temperature difference of the frame is large, so the thermal expansion difference is large and it is easy to deflect. By providing a thermal deflection reducing portion, the thermal deflection of the frame surrounding the opening, which is particularly prone to deflection, can be reduced. In this way, interference between the frame and the components arranged in the frame can be prevented.

[0015] The frame may also be composed of more than two frames. For example, the frame may be composed of a first frame having a space for irradiating the ultraviolet light to the processed object and a second frame having the light source inside. The first frame and the second frame close each other's openings to form a space. In this way, when a plurality of frames close each other's openings to form a space, if the plurality of frames are separated from each other, the maintainability of the components arranged inside the frame is improved. In the light processing device, the opening may also be provided in the second frame. In addition, the opening may also be provided in the first frame.

[0016] The opening may have a shape that is short in the thickness direction of the processed object and long in the width direction of the processed object.

[0017] The second frame body may include a band region sandwiched between the band-shaped opening and an end portion of the second frame body.

[0018] The thermal deflection reducing portion includes a plurality of aspects as exemplified below. The thermal deflection reducing portion preferably includes at least one of the aspects described below.

[0019] The belt region may also be composed of a belt component that is separate from the main body that constitutes the portion other than the belt region. The thermal deflection reducing portion may also include a snap-fit ​​mechanism that loosely snaps the belt component to the main body. The snap-fit ​​mechanism may also release the belt component from thermal expansion in the extension direction relative to the main body, that is, while allowing the belt component to extend, it restricts deviation in a direction orthogonal to the extension direction.

[0020] The thermal deflection reducing portion may include a heater for heating a region of the first frame body that faces the belt region across the opening. As the heater, an electric heating wire, a pipe through which a high-temperature fluid passes, a light source that irradiates infrared light, etc. may be used.

[0021] The thermal deflection reducing unit may include a cooler for cooling the belt region. The cooler may include a radiator, a Peltier element, a cooling pipe for circulating a refrigerant, or a cooling fan.

[0022] The thermal deflection reducing portion may also include a light shielding portion inserted between the band area and the light source. The light shielding portion shields light from the light source toward the band area. Therefore, thermal expansion of the band area caused by light irradiating the band area can be prevented.

[0023] Effects of the Invention

[0024] An object of the present invention is to provide a light processing device that solves at least one of the problems that have existed in the past. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 Cross-sectional view of the light processing device.

[0026] Figure 2A This is a diagram showing the frame as viewed from upstream toward downstream in the conveying direction.

[0027] Figure 2B This is a diagram showing the frame as viewed from upstream toward downstream in the conveying direction.

[0028] Figure 3 yes Figure 1 An enlarged view of the main parts.

[0029] Figure 4 This is a cross-sectional view of a light treatment device having a light shielding portion as a thermal deflection reducing portion for suppressing light irradiation to a belt region.

[0030] Figure 5 This is a diagram of a frame body using another thermal deflection reducing portion as viewed from upstream toward downstream in the conveying direction.

[0031] Figure 6 Yes means Figure 5 A diagram showing the structure of a second frame body in a frame body.

[0032] Fig. 7A It is detailed description Figure 4 FIG. 1 is a diagram of a locking mechanism of a frame.

[0033] Figure 7B yes Fig. 7A Cross-sectional view of line II.

[0034] Fig. 8A It is a diagram for explaining a modified example of the engagement mechanism of the frame.

[0035] Figure 8B yes Fig. 8A Cross-sectional view of line II-II.

[0036] Fig. 9 It is a cross-sectional view showing another embodiment of the optical processing device. DETAILED DESCRIPTION

[0037] Please refer to the attached Figure 1 The embodiments of the present invention are described in detail. The drawings disclosed in this specification are only schematic representations. That is, the dimension ratios on the drawings are not necessarily consistent with the actual dimension ratios, and the dimension ratios are not necessarily consistent even between the drawings. The number of each component element shown in the drawings is not necessarily consistent with the actual dimension ratio and the number of each component element.

[0038] Hereinafter, each of the accompanying drawings will be described with appropriate reference to the XYZ coordinate system. In this specification, when expressing a direction, when distinguishing between positive and negative directions, a positive and negative sign is attached, such as "+X direction" and "-X direction". When a direction is expressed without distinguishing between positive and negative directions, it is only recorded as "X direction". That is, in this specification, when it is only recorded as "X direction", both "+X direction" and "-X direction" are included. The same is true for the Y direction and the Z direction. In the embodiment described below, the gravity direction is the -Z direction, the conveying direction for conveying the processed body is the -Y direction, and the width direction of the processed body is the X direction.

[0039] [Overview of optical processing device]

[0040] Figure 1 1 is a cross-sectional view of a light processing device shown as an example. The light processing device 100 has a light source 3 that irradiates light L1 to a processed object 4 and a frame (2a, 2b) having the light source 3 inside. The processed object 4 is transported along a conveying path. In the present embodiment, there is a belt 7 on which the processed object 4 is carried on the conveying path. The processed object 4 is placed on the belt 7 and is transported together with the belt 7. The belt 7 is supported by a rotatable guide roller 33. If the viewpoint is changed, it can be said that the light processing device 100 is arranged in the middle of the conveying path. The emission direction of the light L1 of the light source 3 is the -Z direction. While the processed object 4 is transported in the -Y direction along the conveying path, the processed object 4 is exposed to the light L1. As a result, the processed object 4 is subjected to light processing. The processing contents of the light processing will be described later.

[0041] The frame (2a, 2b) is composed of a first frame 2a and a second frame 2b. The first frame 2a and the second frame 2b are respectively box-shaped, and the box-shaped is composed of a surface along the XY plane and four side surfaces surrounding the surface and along the XZ plane or the YZ plane. In one surface along the XY plane of the first frame 2a, there is no surface close to the processed object 4. The second frame 2b is also box-shaped, composed of a surface along the XY plane and four side surfaces surrounding the surface and along the XZ plane or the YZ plane. In one surface along the XY plane of the second frame 2b, there is no surface close to the processed object 4.

[0042] When the frames (2a, 2b) are closed in such a manner that the portions of the frames (2a, 2b) that do not have faces with each other are close to each other, the frames (2a, 2b) form a space. This space is the processed space of the processed object 4. Figure 1 In the figure, the second frame 2b is shown as having a hatched area, and the first frame 2a is shown as a thick line, but this is to distinguish the first frame 2a from the second frame 2b, and does not mean that the thickness of the second frame 2b must be thicker than the thickness of the first frame 2a. The thickness of the second frame 2b and the thickness of the first frame 2a can be the same thickness or different thicknesses. The thickness of the second frame 2b can be thicker than the thickness of the first frame 2a, or the thickness of the first frame 2a can be thicker than the thickness of the second frame 2b.

[0043] Once the frame (2a, 2b) is closed, it is possible to open the frame (2a, 2b) again. Therefore, the maintainability of the components arranged inside the frame (2a, 2b) is improved. However, the frame may be composed of a single undivided frame or may be composed of three or more frames.

[0044] The first frame 2a has a gas supply port 8. The second frame 2b also has a gas supply port 8, similar to the first frame 2a. By supplying gas from the gas supply port 8, it is possible to reduce the gas intrusion from outside the processed space. However, the gas supply port 8 is not a necessary structure for the optical processing device. The details of the gas supply port 8 will be described later.

[0045] The first frame 2a functions as a lamp room. Although not shown in the figure, the first frame 2a supports the light source 3. An opening 5i for carrying in the object 4 to be processed is provided on the side of the second frame 2b, and an opening 5o for carrying out the object 4 to be processed is provided on the side opposite to the side. The openings (5i and 5o) are respectively openings surrounded by the side of the second frame 2b. The openings are used as a conveying path for the object 4 to be processed.

[0046] Figure 2AThis is a diagram of the housing (2a, 2b) in the optical processing device 100 viewed from upstream to downstream (-Y direction) in the conveying direction. The gas recovery chamber described later is not shown. Figure 2A In the figure, the light source 3 and the gas supply port 8 are not visible and are therefore indicated by dotted lines. A cross section of a belt 7 on which the object to be processed 4 can be placed is shown. In this figure, the object to be processed 4 is not shown.

[0047] like Figure 2A As shown, the carry-in opening 5i is short in the thickness direction (Z direction) of the processed body 4 and long in the width direction (X direction) of the processed body 4. The thickness T1 of the carry-in opening 5i can be, for example, not less than 5 mm and not more than 34 mm, and more preferably not less than 9 mm and not more than 17 mm. The length L2 of the carry-in opening 5i is longer than the length of the belt 7 (or, the processed body 4). However, in order to suppress the amount of gas in the frame (2a, 2b) leaking from the carry-in opening 5i, the difference between the length of the carry-in opening 5i and the length of the belt 7 (or, the processed body 4) is preferably not more than 14 mm. The shape of the carry-out opening 5o can be the same as or different from the shape of the carry-in opening 5i.

[0048] As described above, in this embodiment, the second frame body 2b has the opening 5i for carrying in and the opening 5o for carrying out. However, the first frame body 2a may also have at least one of the opening 5i for carrying in and the opening 5o for carrying out. Figure 1 Although the first frame 2a has a light source 3 inside and functions as a lamp room, the second frame 2b may have a light source 3 inside and function as a lamp room. Alternatively, both the first frame 2a and the second frame 2b may have a light source 3 inside and function as a lamp room.

[0049] [Thermal deflection of the frame]

[0050] As described above, the light source 3 generates heat as the light L1 is radiated. The frame (2a, 2b) surrounding the light source 3 is heated by the light source 3. When the frame (2a, 2b) is heated, the frame (2a, 2b) thermally expands. Figure 2B as well as Figure 3 The following describes the problem associated with thermal expansion of the frame (2a, 2b).

[0051] and Figure 2A same, Figure 2B This is a diagram of the frames (2a, 2b) viewed from upstream to downstream (-Y direction) in the conveying direction. In the second frame 2b, there is a belt area 20 between the loading opening 5i and the end close to the first frame 2a. The belt area 20 is short in the Z direction and long in the X direction.

[0052] like Figure 1 As shown in FIG. 1 , the belt region 20 is located near the light source 3. Therefore, the heat generated by the light source 3 is easily transferred to the belt region 20. Moreover, the belt region 20 is adjacent to the opening 5i for carrying in, so the heat transferred to the belt region 20 is difficult to diffuse through the second frame 2b and is easily retained in the belt region 20. Therefore, the temperature of the belt region 20 is easily increased. In addition, the thickness T2 of the belt region 20 (see Figure 2A ) is small, which is also an important factor that makes it easy for the temperature of the belt area 20 to rise. On the other hand, the area 21 (see Figure 2B ) is far from the light source 3 and is separated from the belt area 20 by the carry-in opening 5i, so less heat is transferred from the belt area 20. Therefore, the temperature of the area 21 is unlikely to rise. As a result, two areas (20, 21) with different temperatures exist across the carry-in opening 5i.

[0053] The thickness T2 of the band region 20 (see Figure 2A ) is, for example, 5 mm to 80 mm. The thickness T2 is more preferably 10 mm to 50 mm. If the thickness T2 is shorter, the distance between the transport path of the processed object 4 and the light source 3 becomes smaller, so the processed object 4 can be effectively irradiated with ultraviolet light. The length of the belt area is the same as the length L2 of the opening 5i for carrying in.

[0054] Figure 3 yes Figure 1 The main partial enlarged view. The thermal deflection of the frame (2a, 2b) is caused by the difference in thermal expansion in the frame (2a, 2b) with different temperature rise ranges. The belt area 20 and the area 21 close to each other across the opening 5i for carrying in are prone to thermal deflection due to the difference in thermal expansion. The belt area 20 is long in one direction, so the deflection is particularly large.

[0055] Figure 3 Region v20 shows the position of the belt region 20 that is bent due to thermal expansion. Region v20 is offset by m1 in the -Y direction from the position where it should be. In this way, if the belt region 20 of the second frame 2b is offset to the position of region v20, there is a risk of contact between the belt region 20 and other components (such as the reflective component, light source, etc. in the first frame 2a). In addition, there is a concern that a gap will be generated between the belt region 20 and the first frame 2a, and the inactive gas in the first frame 2a will leak. In this embodiment, a situation in which the belt region 20 is offset in the -Y direction is shown, but there is also a risk that the belt region 20 is offset in the +Y direction, or in the +Z direction or -Z direction. Moreover, in the event that such a positional offset of the belt region 20 occurs, there is also a risk of contact with other components constituting the optical processing device, the belt 7 or the processed body 4, and a risk of a gap between the belt region 20 and the first frame 2a.

[0056] [Thermal deflection reduction section]

[0057] In order to reduce the above-mentioned thermal deflection, the optical processing device 100 has a thermal deflection reducing unit. By providing the thermal deflection reducing unit, the thermal deflection of the band area 20 is reduced so that the band area 20 does not deviate from the original position. There are various forms of the thermal deflection reducing unit, which are described below.

[0058] Methods for reducing thermal deflection of the belt region 20 are roughly divided into the following two methods: a method of suppressing the thermal expansion of the belt region 20 itself (first method); and a method of preventing the belt region 20 from deflecting even if the belt region 20 thermally expands (second method). There are various forms for each method.

[0059] The first method (a method for suppressing the thermal expansion of the belt region 20 itself) is described. The first method includes a cooling method for cooling the belt region 20 and a shading method for shading the belt region 20 in order to suppress the thermal expansion of the belt region 20 itself. First, a cooler used in the cooling method for cooling the belt region 20 is described as a thermal deflection reducing unit for performing the first method.

[0060] As a cooler, a radiator, a cooling pipe, a Peltier element, or a cooling fan can be exemplified. As a specific example of a radiator, it is conceivable to form a concave-convex on the surface of the belt area 20 so that the heat can be easily diffused. As a specific example of a cooling pipe, it is conceivable to configure a cooling pipe that allows the refrigerant to circulate in a manner that is in contact with the surface of the belt area 20, or near the surface, or inside the belt area 20. As a specific example of a Peltier element, it is conceivable to configure a Peltier element on the surface of the belt area 20 and use the Peltier element to absorb heat from the belt area 20. As a specific example of a cooling fan, it is conceivable to configure a cooling fan to transport cooling gas toward the belt area 20, or to configure a cooling fan to attract high-temperature gas around the belt area 20. No matter what kind of cooler, multiple can be configured, and in addition, a cooler after appropriately combining these specific examples can also be used.

[0061] Next, as a heat deflection reducing unit for performing the first method, a light shielding method is described in which light is shielded to prevent light from being irradiated to the belt area 20 in order to suppress the thermal expansion of the belt area 20 itself. The light irradiation device has a light shielding unit 22 as a heat deflection reducing unit for performing the first method. Figure 4 As shown, the light shielding portion 22 is inserted between the belt area 20 and the light source 3 . Figure 4 The light shielding portion 22 shown is in a plate shape. The shape and arrangement of the light shielding portion 22 in this embodiment are just an example. The light shielding portion 22 is not particularly limited as long as it has a function of shielding the belt area 20 from the light from the light source 3 .

[0062] The second method (a method of preventing the belt region 20 from bending even if the belt region 20 thermally expands) includes a method of relieving the thermal expansion of the belt region 20 in its extending direction and a method of heating the region 21 facing the belt region 20 across the introduction opening 5i.

[0063] One side reference Figure 5 as well as Figure 6 , while explaining a method for releasing the thermal expansion of the band region 20 in its extending direction. Figure 5 This is a diagram of the frame (2a, 2b) viewed from upstream toward downstream (-Y direction) in the conveying direction. Figure 6 2 is a diagram showing only the second frame 2b in this method. The second frame 2b includes a main body 2b1 and a belt member 2b2 independent of the main body 2b1. The belt area of ​​the optical processing device 200 is formed by the belt member 2b2. The main body 2b1 has a concave portion 24 on one side. Figure 6 As shown by the dashed-dotted arrow in the -Z direction, the belt member 2b2 is moved to overlap with the side of the main body 2b1 having the recessed portion and arranged. Thus, the carrying-in opening 5i is formed.

[0064] The end portion 26 of the belt member 2b2 (see Figure 6 ), the end portion 26 is fixed to the main body 2b1 so as to be immovable. The end portion 27 of the belt member 2b2 is fixed by the engagement mechanism F1 (see Figure 5 ) is loosely engaged with the main body 2b1 in a manner that includes play.

[0065] One side reference Fig. 7A as well as Figure 7B , while explaining the engagement mechanism F1 in detail. Fig. 7A Yes Description Figure 4 FIG. 1 is a diagram showing details of the locking mechanism of the frame. Figure 7B yes Fig. 7Asectional view along line II of . The belt part 2b2 has a groove 40 along its length direction (X direction). The end 27 uses a head bolt 42, and is loosely engaged with the main body 2b1 in a state where the belt part 2b2 can expand in the X direction. Inside the groove 40 provided at the end 27, there are a through hole 41 and a flange 43. The flange 43 constitutes a surface that is one step lower than the surface of the belt part 2b2. The head portion of the head bolt 42 is larger than the gap between the opposing flanges 43 and smaller than the width of the groove 40. Moreover, the head bolt 42 is loosely tightened to the extent that the head of the head bolt 42 does not contact the flange 43. As a result, it is possible to suppress the deviation of the belt part 2b2 in the Y direction and the Z direction while releasing the expansion of the belt part 2b2 in the X direction. Even if there is a difference in thermal expansion between the belt member 2b2 and the main body 2b1, the belt member 2b2 is not pressed by the main body 2b1 and can thermally expand freely in the X direction relative to the main body 2b1, so the belt member 2b2 is unlikely to bend.

[0066] As an example of the engagement mechanism F1 including play, a mechanism including the groove 40 formed by the flange 43 and the through hole 41 and the head bolt 42 has been described, but this engagement mechanism is only an example and is not limited to this. Fig. 8A It is a diagram for explaining a modified example of the engagement mechanism F1. Figure 8B yes Fig. 8A The engaging mechanism shown in this example has a sliding guide 46 into which a portion 45 of the belt member 2b2 can be inserted. The sliding guide 46 is mounted on the main body 2b1. The portion 45 of the belt member 2b2 is inserted into a loop surrounded by the sliding guide 46 and the main body 2b1 in a slidable state. Fig. 8A As shown, the portion 45 is preferably formed thinner than the other portions of the belt member 2b2. Even with the engagement mechanism having the slide guide 46, it is possible to suppress the deviation of the belt member 2b2 in the Y and Z directions while releasing the expansion of the belt member 2b2 in the X direction.

[0067] In the present embodiment and the modified example, only the end 27 of the ends 26 and 27 of the belt member 2b2 has the loosely engaged engagement mechanism F1 and the end 26 is fixed. However, both the ends 26 and 27 may be provided with loosely engaged engagement mechanisms.

[0068] The belt part 2b2 may also be made of the same material as the main body 2b1 (for example, an aluminum material). In addition, the belt part 2b2 may also be made of a material different from that of the main body 2b1. In the case where the belt part 2b2 is made of a material different from that of the main body 2b1, it is preferred to use a material that makes the linear expansion coefficient of the belt part 2b2 smaller than the linear expansion coefficient of the main body 2b1 (especially, the region 21). In addition, the case where the belt part 2b2 is separate from the main body 2b1 has been described above, but the belt part 2b2 may also be integral with the main body 2b1. For example, it may be formed integrally with the main body 2b1 and the belt region protrudes from the end 26 toward the end 27.

[0069] The method of heating the region 21 is described. It is described above that if the thermal expansion amount is different between the band region 20 and the region 21, the band region 20 that is long in the X direction is easily bent due to heat. Therefore, the region 21 is heated so that the thermal expansion amount in the region 21 is close to the thermal expansion amount of the band region 20. That is, it is better that the heat deflection reduction part used to implement the heating method is a heater for heating the region 21. The region 21 is heated by the heater so that the temperature of the region 21 is close to that of the band region 20. If the temperature difference between the region 21 and the band region 20 becomes smaller, the thermal expansion amounts of the two are close and the difference in thermal expansion amounts becomes smaller, then the deflection of the band region 20 can be suppressed.

[0070] As a specific example of the heater, a temperature control tube through which an electric heating wire or a temperature control fluid flows may be arranged on the surface or inside of the region 21 , or light for generating heat may be irradiated toward the surface of the region 21 .

[0071] As a first method, a method of cooling the belt area 20 (hereinafter referred to as the "cooling method") and a shading method are described, and as a second method, a method of releasing the expansion of the belt area 20 or the area 21 existing as the belt part 2b2 (hereinafter referred to as the "expansion release method") and a method of heating the area 21 opposite to the belt area 20 (hereinafter referred to as the "heating method") are described. Any one of these methods can be applied, or multiple methods can be applied. That is, the cooling method and the expansion release method can be used, the cooling method and the heating method can be used, the expansion release method and the heating method can be used, or the cooling method, the shading method, the expansion release method, and the heating method can be used. In addition, although it is described that a thermal deflection reduction portion is provided for the second frame 2b surrounding the opening 5i for carrying in, the above-mentioned thermal deflection reduction portion can also be provided for the second frame 2b surrounding the opening 5o for carrying out.

[0072] [light source]

[0073] One side reference Figure 1The light source 3 is described. The light source 3 emits light L1 of a predetermined wavelength. The wavelength is set according to the processing content of the object to be processed. The processing content includes surface modification, cleaning, exposure, or processing of the object to be processed. The light L1 of this embodiment is vacuum ultraviolet light, that is, ultraviolet light having a wavelength band of at least 205 nm or less. The "light of at least 205 nm or less wavelength" used in this specification refers to light that shows luminous intensity at least below 205 nm in the emission spectrum of the light source 3. As such light, there can be exemplified (1) light that shows intensity in a wide wavelength band and shows an emission spectrum in which the peak emission wavelength indicating the maximum intensity is below 205 nm, (2) light that shows an emission spectrum indicating multiple maximum intensities (multiple peaks) and shows an emission spectrum in which one of the multiple peaks is included in the wavelength range below 205 nm, and (3) light that shows an integrated intensity of at least 30% of the light below 205 nm relative to the total integrated intensity in the emission spectrum. In addition, the light used may not be vacuum ultraviolet light.

[0074] In the present embodiment, the light source 3 is a dielectric barrier discharge lamp sealed with xenon gas. However, the light source 3 may also be a dielectric barrier discharge lamp sealed with a gas other than xenon gas. In addition, the light source 3 may also be other discharge lamps. The light source 3 may also be a light source other than a discharge lamp, such as a solid light source such as an LED.

[0075] The first frame 2a includes three light sources 3, but the first frame 2a may include one or two light sources 3, or may include more than four light sources 3. In the present embodiment, the plurality of light sources 3 are arranged along the conveying direction (Y direction) of the processed object 4, but the plurality of light sources 3 may be arranged along the X direction, or may be arranged along the X direction and the Y direction, respectively.

[0076] The width of the light source 3 in the X direction is preferably larger than the width of the object 4 in the X direction. Thus, the light L1 can be uniformly irradiated along the width direction from the center to the end of the object 4. When the object 4 is transported, if the hidden danger of the position of the object 4 in the X direction changing due to the meandering of the belt 7 is considered, the width of the light source 3 in the X direction is preferably 50 mm to 100 mm larger than the width of the object 4 in the X direction. For example, when the width of the object 4 in the X direction is 500 mm, the width of the light source 3 in the X direction is preferably 550 mm to 600 mm.

[0077] The illumination to the object 4 can also be changed by making the light source 3 approach or move away from the object 4 (transport path). In addition, the illumination can be changed by configuring a desired dimming filter on the light source 3. A reflector or a reflective layer that reflects ultraviolet light can also be formed on the inner wall of the first frame 2a. The reflector or the reflective layer is used to give a direction so that the light L1 emitted from the light source 3 enters in the -Z direction.

[0078] When the light source 3 is disposed in the second frame body 2 b , the above description about the light source 3 also applies to the light source 3 disposed inside the second frame body 2 b .

[0079] [Gas supply port]

[0080] Reference Figure 1 The gas supply port 8 is described in detail. The first frame 2a and the second frame 2b are provided with a plurality of gas supply ports 8 inside their respective frames. The gas supplied from the gas supply port 8 is preferably an inert gas IG (e.g., nitrogen gas). The gas supply port 8 supplies the inert gas IG to the inside of the frame to form an inert gas environment. The gas supply port 8 is connected to a gas supply source 12 that supplies the inert gas IG via a gas piping 6. There is a flow regulating valve 17 in the middle of the gas piping 6. In the present embodiment, nitrogen gas is used as the inert gas IG, but an inert gas other than nitrogen gas may also be used.

[0081] If an inert gas environment is formed, the environment in the space formed by the first frame 2a and the second frame 2b is stabilized. In particular, when vacuum ultraviolet light is used for the light L1, the formation of an inert gas environment helps to suppress the absorption of the light L1 by oxygen in the air and improve the illumination of the light L1 in the object 4 to be processed.

[0082] In this specification, "inert gas environment" refers to a mixed gas in which the inert gas IG accounts for more than 90 vol% of the whole inside the frame (2a, 2b), unless otherwise specified. At this time, the oxygen concentration inside the frame (2a, 2b) is reliably less than 10 vol%. For example, if the ultraviolet light of 172 nm travels 4 mm in a space where the oxygen concentration is less than 10%, a light intensity of more than 50% can be ensured. Inside the frame (2a, 2b), the inert gas IG preferably occupies more than 95 vol%. At this time, the oxygen concentration inside is reliably less than 5%. For example, if the ultraviolet light of 172 nm travels 4 mm in a space where the oxygen concentration is less than 5%, a light intensity of more than 70% can be ensured. The inert gas concentration inside is further preferably more than 98 vol%.

[0083] The gas supply port 8 provided in the frame (2a, 2b) is described in detail. In the present embodiment, the gas supply port 8 may also be designed to supply the inert gas IG along the plane (XY plane) including the conveying direction of the processed object 4, and not to spray the inert gas IG toward the processed object 4. Thus, it is possible to avoid the sprayed inert gas IG colliding with the processed object 4 and causing the gas in the environment to become turbulent in the frame (2a, 2b). If the gas in the frame (2a, 2b) becomes turbulent, it is easy for the gas to invade the frame (2a, 2b) from outside the frame (2a, 2b). In addition, the supply direction of the gas supply port 8 may be tilted from the XY plane to such an extent that the inert gas IG will not be sprayed toward the processed object 4.

[0084] like Figure 1 As shown, the plurality of gas supply ports 8 are arranged at substantially equal intervals in the conveying direction. At this time, it is preferable to set the inert gas supply amount of each gas supply port 8 to substantially the same amount. This can suppress the formation of turbulence in the frame (2a, 2b).

[0085] like Figure 2A as well as Figure 2B As shown, the gas supply port 8 is a long strip-shaped component that is long in the X direction. A plurality of holes are arranged in the X direction on the component. Thus, the inert gas can be evenly supplied in the width direction (X direction). In addition, the gas supply port 8 can also be a slit-shaped gas supply port that is long in the X direction.

[0086] Reference Figure 1 , a plurality of gas supply ports 8 are connected to a gas supply source 12 via a gas pipe 6. The gas pipe 6 is branched as needed. A flow control valve 17 is provided in the middle of the gas pipe 6. In addition, in the present invention, the gas supply port 8 is not a necessary structure, and it is better to use the gas supply port 8 as needed.

[0087] Alternatively, only one of the first frame 2a and the second frame 2b may have a gas supply port 8. Even in the case where only one of the first frame 2a and the second frame 2b has a gas supply port 8, the gas supplied from the gas supply port 8 can bypass the object to be processed 4 and the belt 7 and replace the ambient gas in the frame on the side without the gas supply port 8.

[0088] [Gas Recovery Room]

[0089] One side reference Figure 1, while explaining the gas recovery chamber. The optical processing device 100 has a gas recovery chamber (20a, 20b) for recovering gas upstream (+Y direction) of the frame (2a, 2b) in the conveying path. The gas recovery chamber 20a is located on the light irradiation surface side (+Z side) of the processed body 4. The gas recovery chamber 20b is located on the opposite side of the light irradiation surface of the processed body 4 (-Z side). The gas recovery chamber 20b and the gas recovery chamber 20a are located at positions opposite to each other across the processed body 4. The optical processing device 100 has a gas recovery chamber (30a, 30b) for recovering gas downstream (-Y direction) of the frame (2a, 2b) in the conveying path. The gas recovery chamber 30a is located on the light irradiation surface side (+Z side) of the processed body 4. The gas recovery chamber 30b is located on the opposite side of the light irradiation surface of the processed body 4 (-Z side). The gas recovery chamber 30b and the gas recovery chamber 30a are located at positions opposite to each other across the processed body 4.

[0090] The gas recovery chamber 20a is a frame having an opening in a direction close to the processed object 4 (-Z direction). The gas recovery chamber 20a may also have a plurality of gas recovery ports arranged in the frame. The plurality of gas recovery ports may also be formed by arranging a porous plate (not shown) in the gas recovery chamber 20a. It is preferable that the plurality of gas recovery ports are connected to a common exhaust port 23. The exhaust port 23 is connected to Figure 1 The exhaust source is not shown in the figure. In addition, the gas recovery chamber (20b, 30a, 30b) may have the same structure as the gas recovery chamber 20a, or may have a different structure.

[0091] The inert gas IG inside the first frame 2a and the second frame 2b leaks out to the upstream or downstream of the first frame 2a and the second frame 2b through the carry-in opening 5i or the carry-out opening 5o. The gas recovery chamber (20a, 20b, 30a, 30b) recovers the leaked inert gas IG. Thus, people near the optical processing device 100 are protected from hypoxia. In addition, when there is no one near the optical processing device 100, or when there is an exhaust device that does not belong to the optical processing device 100, the optical processing device 100 may not have a gas recovery chamber. That is, in the optical processing device 100, the gas recovery chamber (20a, 20b, 30a, 30b) is not a necessary structure.

[0092] The optical processing device may include only one of the gas recovery chamber (20a, 20b) upstream of the frame (2a, 2b) and the gas recovery chamber (30a, 30b) downstream of the frame (2a, 2b).

[0093] The oxygen concentration inside the frame (2a, 2b) may be measured by one or more oxygen concentration meters, and the supply amount of the inert gas IG may be adjusted according to the measured oxygen concentration, or the exhaust amount of the gas recovery chamber (20a, 20b, 30a, 30b) may be adjusted. The oxygen concentration meter may be connected to the inert gas IG supply amount adjustment mechanism or the exhaust amount adjustment mechanism by a control unit, and the control unit may automatically control the oxygen concentration.

[0094] [Processed object]

[0095] The processed body of the present embodiment may also be a substrate used in an FPD (flat panel display) or the like. When the substrate is an inorganic raw material such as glass, it is particularly preferred to irradiate the entire surface of the substrate with light L1 in order to optically clean the substrate. When the substrate is a film such as a resin, it is particularly preferred to irradiate the entire surface of the substrate with light L1 in order to modify the substrate. When the substrate is a metal sheet used in a fuel cell or the like, it is better to irradiate the metal sheet with light L1 in order to clean the metal sheet or to give the metal sheet a matte effect. As another example of the processed body 4, it may also be a sheet-shaped decorative sheet. It is better to give a matte effect to the surface by surface modifying the resin on the surface of the decorative sheet.

[0096] When the object to be processed 4 is in the form of a sheet, it is preferable to transport the object to be processed 4 in a roll-to-roll manner, for example. In the roll-to-roll manner, the object to be processed 4 in the form of a sheet is unwound from a roll of the object to be processed 4 wound in an unwinding device (not shown), the object to be processed 4 is transported along a transport path, and the object to be processed 4 is wound in a winding device (not shown). In the transport path, the object to be processed 4 is supported by a plurality of guide rollers 33. That is, when the object to be processed is in the form of a sheet, the belt 7 may not be provided.

[0097] Fig. 9 It is a cross-sectional view showing other embodiments of the optical processing device. The optical processing device 200 has an outer frame 50 to surround the frame (2a, 2b) and the recovery chamber (20a, 20b, 30a, 30b). A plurality of FFUs (fan filter units) 51 are installed on the ceiling (the wall on the +Z direction side) of the outer frame 50. The plurality of FFUs 51 deliver the gas outside the outer frame 50 into the interior of the outer frame 50. The delivered gas forms a downward flow and is discharged from a plurality of holes 52 provided on the bottom plate (the wall on the -Z direction side) of the outer frame 50. As shown in the figure, a gap may also be left between the frame (2a, 2b) and the recovery chamber (20a, 20b, 30a, 30b).

[0098] Although the embodiment and its modified examples of the optical processing device have been described above, the present invention is not limited to the above embodiment at all, and various changes or improvements can be added to the above embodiment within the scope not departing from the gist of the present invention.

[0099] For example, the above-mentioned optical processing device has only one space formed by the first frame 2a and the second frame 2b, but may also have a frame for forming another optical processing space upstream or downstream of the first frame 2a and the second frame 2b in the conveying direction.

[0100] For example, the above-mentioned optical processing device is shown in a manner that the irradiation direction of the light L1 is the same direction as the gravity direction (-Z direction), but the irradiation direction of the light L1 may be different from the gravity direction. For example, the ultraviolet light may be irradiated horizontally to the transported body transported in the gravity direction.

[0101] Description of Reference Numerals

[0102] 2a: First frame

[0103] 2b: Second frame

[0104] 2b1: Main body (constituting the second frame)

[0105] 2b2: Belt member (composing the second frame)

[0106] 3: Light source

[0107] 4: Processed object

[0108] 5i: Opening for carrying in

[0109] 5o: Opening for carrying out

[0110] 6: Gas piping

[0111] 7: Belt

[0112] 8: Gas supply port

[0113] 12: Gas supply source

[0114] 15: Interior

[0115] 17: Flow control valve

[0116] 20: Band area (of the second frame)

[0117] 20a: Gas recovery room

[0118] 20b: Gas recovery room

[0119] 21: Area (opposite to the belt area across the loading opening in the second frame)

[0120] 22: Shading part

[0121] 23: Exhaust port (of gas recovery chamber)

[0122] 24: Recess (with component)

[0123] 26, 27: Ends (with components)

[0124] 30a, 30b: Gas recovery room

[0125] 33: Guide roller

[0126] 40: Slot (with parts)

[0127] 41: Through hole (with components)

[0128] 42: Head bolt

[0129] 43: Flange (with components)

[0130] 45: a part (with parts)

[0131] 46: Sliding guide

[0132] 50: Outer frame

[0133] 51: FFU

[0134] 52: Hole (outer frame)

[0135] 100, 200: Light processing device

[0136] F1: snap-fit ​​mechanism

[0137] IG: Inert gas

[0138] L1: Light

Claims

1. A light processing device, characterized in that: have: A light source irradiates ultraviolet light to the object to be processed conveyed along the conveying path; a frame having the light source inside and having an opening for carrying in or out the object to be processed; and The thermal deflection reducing portion reduces thermal deflection of the frame surrounding the opening.

2. The optical processing device according to claim 1, characterized in that: The frame includes: a first frame having the light source inside; and a second frame having a space for irradiating the ultraviolet light to the object to be processed. The opening is arranged on the second frame body.

3. The optical processing device according to claim 2, characterized in that: The opening is short in the thickness direction of the processed object and long in the width direction of the processed object. The second frame body includes a band region sandwiched between the opening and an end portion of the second frame body.

4. The optical processing device according to claim 3, characterized in that: The belt area is composed of a belt member that is separate from the main body that constitutes the portion other than the belt area. The thermal deflection reducing portion includes an engaging mechanism for loosely engaging the belt member with the main body. The engagement mechanism releases displacement of the belt member due to thermal expansion in the extending direction and restricts displacement of the belt member due to thermal expansion in a direction perpendicular to the extending direction.

5. The optical processing device according to claim 3 or 4, characterized in that: The thermal deflection reducing portion includes a heater that heats a region of the first frame body that faces the belt region across the opening.

6. The optical processing device according to claim 3 or 4, characterized in that: The thermal deflection reducing portion has a cooler for cooling the belt region.

7. The optical processing device according to claim 3 or 4, characterized in that: The thermal deflection reducing portion has a light shielding portion interposed between the belt region and the light source.

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