Vertical wet process cleaning equipment

Abstract

The invention provides vertical type wet process cleaning equipment, and relates to the field of wet process cleaning, the vertical type wet process cleaning equipment comprises water baffles which are symmetrically arranged in a staggered mode, the water baffles are U-shaped, spraying pipes are evenly distributed in inner cavities of the water baffles, three water baffles are arranged on the inner side of each water baffle, baffles are fixedly installed among the three spraying pipes, and the spraying pipes are arranged in the water baffles. A conveying belt is arranged below the two water baffles, and an adjusting assembly is arranged below the conveying belt. By arranging the water guide plate, the center rod, the spherical rod and the baffle, the water guide plate is rotated to push the center rod and the spherical rod to move, and then the baffle and the spray pipe fixedly installed on the baffle are pushed to incline, so that the angle of the nozzle is adjusted, and water flow is prevented from vertically impacting the base plate; meanwhile, through the arranged liquid collecting hopper and a spiral plate installed in the liquid collecting hopper, the waste liquid is collected through the liquid collecting hopper, and the waste liquid is simply treated through the spiral plate, so that the water source is conveniently and repeatedly utilized.

Description

Technical Field

[0001] The invention relates to the field of wet process cleaning, and in particular to a vertical wet process cleaning device. Background Art

[0002] Among the three steps of wet etching, cleaning and film removal in the wet etching process, cleaning is a very important step. The existing cleaning technology mainly uses a nozzle to spray high-pressure water flow to impact the dry film, so that the corroded dry film is peeled off from the substrate. However, this technology consumes a lot of water, and because some fine film residues are impacted by the water flow and embedded in the circuit groove, they cannot be effectively removed by simple water flow impact, which can easily lead to circuit isolation, affect subsequent processes, and reduce product yield. At the same time, the position of the nozzle of the existing vertical wet process cleaning equipment cannot be adjusted during water flow impact, causing the water flow sprayed from the nozzle to always be perpendicular to the substrate, so that the water flow splashes outward, affecting the cleaning of other areas, and causing water waste again.

[0003] For example, the utility model patent (application number: CN201720622592.X) discloses a "substrate cleaning device". Its specification discloses that in the manufacturing process of various image display devices such as liquid crystal displays, plasma displays and field-luminescent displays, a variety of organic materials, especially polymer materials, are involved. During the manufacturing process, debris may remain on the substrate. Therefore, the cleaning process is an indispensable part of substrate manufacturing. Cleaning is a process technology that removes substrate contamination or particles in the process in advance to improve the product yield. Moreover, by effectively cleaning the substrate, the adhesion between film layers can be improved. The traditional substrate cleaning device is a flow-type spray cleaning, that is, the particles on the surface of the substrate are generally removed by the impact force of the spray. However, since there is always a layer of water film on the surface of the substrate during the process of moving and spraying, when the spray passes through this layer of water film and then hits the substrate, the impact force is damaged, which will reduce the cleaning effect; the above patent can prove the defects of the prior art.

[0004] Therefore, we have made improvements to this and proposed a vertical wet process cleaning equipment. Summary of the invention

[0005] The purpose of the present invention is to address the problem that the position of the nozzle of the existing vertical wet process cleaning equipment cannot be adjusted during water flow impact, causing the water flow sprayed from the nozzle to always be perpendicular to the substrate, thereby causing the water flow to splash outward, affecting the cleaning of other areas and causing water waste again.

[0006] In order to achieve the above-mentioned purpose of the invention, the present invention provides a vertical wet process cleaning equipment to improve the above-mentioned problem.

[0007] The specific application is as follows: It includes symmetrically staggered water baffles, which are U-shaped, and the inner cavity of the water baffles is evenly distributed with nozzles. Three groups are arranged on the inner side of each group of water baffles, and baffles are fixedly installed between the three groups of nozzles. Conveyor belts are arranged below the two groups of water baffles, and an adjusting component is arranged below the conveyor belt. The adjusting component includes a liquid collecting hopper, which is funnel-shaped, and the inner cavity of the liquid collecting hopper is fixedly installed with a spiral plate.

[0008] As a preferred technical solution of the present application, a water guide plate is arranged above the liquid collecting hopper, the water guide plate is arc-shaped, and the side wall array of the water guide plate is provided with a center rod for connection, and ratchets are fixedly installed at both ends of the center rod.

[0009] As a preferred technical solution of the present application, transmission plates are symmetrically installed at the upper and lower ends of the center rod, and the transmission plates are triangular in shape. Spherical rods are symmetrically arranged at both ends of the transmission plate. The spherical ends of one group of the spherical rods are spherically socketed with the side walls of the water guide plate, and the spherical ends of the other group of the spherical rods are rotatably connected to the inner wall of the baffle. Ratchets are arranged on the inner sides of the other ends of the two groups of spherical rods, and the two groups of spherical rods are socketed with the ratchet wheels through the pawls.

[0010] As a preferred technical solution of the present application, a rotating shaft is fixedly installed at the bottom of the water guide plate, and a spring plate is fixedly installed at the bottom of the rotating shaft, and spring plates are arrayed on the outer side of the spring plate. A fixed column is arranged under the water guide plate, and the fixed column is fixedly connected to the inner wall of the spiral plate.

[0011] As a preferred technical solution of the present application, the top of the fixed column is flush with the top of the liquid collecting bucket, the bottom of the fixed column is higher than the bottom of the liquid collecting bucket, a connecting groove is provided on the top of the fixed column, and the outer side of the connecting groove is tooth-shaped, and the fixed column is connected to the bottom of the rotating shaft and the spring disk through the connecting groove.

[0012] As a preferred technical solution of the present application, a right-angle pipe for transporting wastewater is fixedly installed at the bottom of the liquid collecting hopper, and the other end of the right-angle pipe is fixedly connected to a water tank, and the water tank is barrel-shaped.

[0013] As a preferred technical solution of the present application, a water wheel is provided in the inner cavity of the water tank. The outer side of the water wheel is made of rubber material. The outer side of the water wheel is tightly attached to the water tank. Rotating rods are extended from both ends of the water wheel, and two groups of rotating rods pass through both sides of the water tank and extend to the outside thereof. The water tank is sealed and sleeved with the rotating rods.

[0014] As a preferred technical solution of the present application, synchronous belts are symmetrically arranged on the left and right sides of the water tank, the bottom of the synchronous belts are sleeved with the rotating rods extending from the two ends of the water wheel, and the synchronous belts are inclined, and the bottom of the water tank is symmetrically connected with liquid outlet pipes.

[0015] As a preferred technical solution of the present application, a conveyor belt is arranged above the liquid collecting bucket, and the conveyor belt is located between the water retaining plate and the liquid collecting bucket, rotating rollers are symmetrically sleeved on the inner side of the conveyor belt, and a group of the rotating rollers are sleeved on the top of the conveyor belt.

[0016] As a preferred technical solution of the present application, a hanging plate is fixedly installed on the top of the outer side of the nozzle, the top of the hanging plate is arc-shaped, a hanging rod is vertically arranged above the nozzle, and the nozzle is connected to the hanging rod through the hanging plate, and the hanging plate is suspended on the outer side of the hanging rod.

[0017] Compared with the prior art, the present invention has the following beneficial effects: In the scheme of this application: 1. In order to solve the problem in the prior art that the position of the nozzle cannot be adjusted, causing the water flow to hit the substrate vertically and splashing water, the present application provides a water guide plate, a center rod, a spherical rod and a baffle plate, so that the water guide plate is rotated to push the center rod and the spherical rod to move, thereby pushing the baffle plate and the nozzle fixed thereto to tilt, thereby adjusting the angle of the nozzle to prevent the water flow from hitting the substrate vertically; 2. In order to solve the problem of water waste during the cleaning process of the cleaning device in the prior art, the present application uses a liquid collecting hopper and a spiral plate installed inside the liquid collecting hopper to collect waste liquid and to simply process the waste liquid through the spiral plate, thereby facilitating the reuse of water resources; 3. By setting up the water wheel and the water tank in cooperation with the liquid collecting bucket, the waste liquid is collected by the liquid collecting bucket, and the waste liquid entering the liquid collecting bucket is accelerated by the spiral plate, so that the water flow hits the water wheel, and then cooperates with the synchronous belt to drive the conveyor belt to rotate, thereby realizing the material transportation function, solving the problem that the cleaning equipment in the prior art needs to set up a separate conveying mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the structure of the vertical wet process cleaning equipment provided by the present application; Figure 2 A top view of the structure of the vertical wet process cleaning equipment provided by the present application; Figure 3 A schematic diagram of the connection structure of the nozzle of the vertical wet process cleaning equipment provided in this application; Figure 4 A schematic diagram of the outer surface structure of the liquid collecting hopper of the vertical wet process cleaning equipment provided in this application; Figure 5 A schematic diagram of the connection structure of the water guide plate of the vertical wet process cleaning equipment provided in this application; Figure 6 A schematic diagram of the connection structure of the center rod of the vertical wet process cleaning equipment provided by the present application; Figure 7 A schematic diagram of the internal structure of the liquid collecting hopper of the vertical wet process cleaning equipment provided in this application; Figure 8 A cross-sectional view of the internal structure of a fixed column of a vertical wet process cleaning equipment provided in the present application; Fig. 9 A cross-sectional view of the internal structure of a water tank of a vertical wet process cleaning equipment provided in this application.

[0019] Indicated in the figure: 1. Water baffle; 2. Spray pipe; 3. Hanging plate; 4. Suspension rod; 5. Baffle; 6. Adjustment assembly; 601. Liquid collecting bucket; 602. Spiral plate; 603. Fixed column; 604. Connecting groove; 605. Rotating shaft; 606. Shrapnel plate; 607. Water guide plate; 608. Center rod; 609. Transmission plate; 610. Ratchet; 611. Spherical rod; 612. Right-angle tube; 613. Water tank; 614. Water wheel; 615. Synchronous belt; 616. Liquid outlet pipe; 7. Conveyor belt; 8. Rotating roller. DETAILED DESCRIPTION

[0020] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0021] As described in the background technology, the position of the nozzle of the existing vertical wet process cleaning equipment cannot be adjusted during water flow impact, resulting in the water flow sprayed from the nozzle always being perpendicular to the substrate, causing the water flow to splash outward, affecting the cleaning of other areas and causing water waste again.

[0022] In order to solve this technical problem, the present invention provides a vertical wet process cleaning equipment, which is applied to an angle-adjustable wet process cleaning device.

[0023] Specifically, please refer to Figure 1-Figure 9The vertical wet process cleaning equipment specifically includes symmetrically staggered water baffles 1, the water baffles 1 are U-shaped, and the inner cavity of the water baffles 1 is evenly distributed with nozzles 2. Three groups are arranged on the inner side of each group of water baffles 1, and baffles 5 are fixedly installed between the three groups of nozzles 2. Conveyor belts 7 are arranged below the two groups of water baffles 1, and an adjusting component 6 is arranged below the conveyor belt 7. The adjusting component 6 includes a liquid collecting hopper 601, and the liquid collecting hopper 601 is funnel-shaped. A spiral plate 602 is fixedly installed in the inner cavity of the liquid collecting hopper 601.

[0024] The vertical wet process cleaning equipment provided by the present invention realizes that by rotating the water guide plate, the center rod, the spherical rod and the baffle plate, the center rod and the spherical rod are pushed to move, thereby pushing the baffle plate and the nozzle fixed thereto to tilt, thereby adjusting the angle of the nozzle to prevent the water flow from vertically hitting the substrate; and by the provided liquid collecting hopper and the spiral plate installed therein, the waste liquid is collected by the liquid collecting hopper, and the waste liquid is simply treated by the spiral plate, thereby facilitating the reuse of water resources.

[0025] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings.

[0026] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features and technical solutions in the embodiments may be combined with each other.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0028] Example 1, please refer to Figure 1 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Fig. 9 A vertical wet process cleaning device, wherein a water guide plate 607 is arranged above a liquid collecting hopper 601, the water guide plate 607 is arc-shaped, a central rod 608 for connection is arranged on the side wall array of the water guide plate 607, and ratchets 610 are fixedly installed at both ends of the central rod 608; The wastewater is blocked by the substrate and the baffle 5, so that the wastewater falls along the substrate and the baffle 5 into the top of the water guide plate 607, and flows back through the water guide plate 607, so that the wastewater falls into the top of the spiral plate 602 installed in the inner cavity of the liquid collecting bucket 601, thereby facilitating the acceleration of the wastewater and preventing the wastewater from falling directly into the middle of the spiral plate 602, and then the wastewater flows out without being pressurized.

[0029] Further, such as Figure 1 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Fig. 9 As shown, transmission plates 609 are symmetrically installed at the upper and lower ends of the center rod 608, and the transmission plate 609 is triangular. Ball rods 611 are symmetrically arranged at both ends of the transmission plate 609. The spherical ends of one group of ball rods 611 are spherically sleeved with the side wall of the water guide plate 607, and the spherical ends of the other group of ball rods 611 are rotatably connected with the inner wall of the baffle 5. The inner sides of the other ends of the two groups of ball rods 611 are both provided with ratchet claws, and the two groups of ball rods 611 are sleeved with the ratchet wheel 610 through the ratchet claws. Rotate the center rod 608 so that it can rotate unidirectionally under the action of the ratchet wheels 610 provided at its two ends and the ratchet claws on the inner side of the spherical rod 611, so that the transmission plate 609 is tilted. At this time, after the water flows to the top of the transmission plate 609, it will impact the transmission plate 609, thereby causing the transmission plate 609 to generate horizontal power. At this time, the spherical rods 611 knotted at its two ends provide corresponding horizontal power for the water guide plate 607.

[0030] Further, such as Figure 1 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Fig. 9 As shown, a rotating shaft 605 is fixedly installed at the bottom of the water guide plate 607, and a spring plate 606 is fixedly installed at the bottom of the rotating shaft 605. The outer array of the spring plate 606 has springs. A fixed column 603 is arranged below the water guide plate 607, and the fixed column 603 is fixedly connected to the inner wall of the spiral plate 602.

[0031] Further, such as Figure 1 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Fig. 9 As shown, the top of the fixed column 603 is flush with the top of the liquid collecting bucket 601, and the bottom of the fixed column 603 is higher than the bottom of the liquid collecting bucket 601. A connecting groove 604 is provided on the top of the fixed column 603, and the outer side of the connecting groove 604 is tooth-shaped. The fixed column 603 is sleeved with the bottom of the rotating shaft 605 and the elastic disc 606 through the connecting groove 604; When the water guide plate 607 rotates, the central rod 608 and the spherical rods 611 arranged at both ends are used to push the baffle 5 and the nozzle 2 fixedly installed on both sides of the baffle 5 to tilt, thereby changing the angle of the nozzle. When the water guide plate 607 rotates, it will drive the rotating shaft 605 fixedly installed at the bottom and the spring plate 606 to rotate inside the connecting groove 604, and the spring plate 606 is limited and fixed by the connecting groove 604.

[0032] Further, such as Figure 1 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Fig. 9 As shown, a right-angle pipe 612 for transporting wastewater is fixedly installed at the bottom of the liquid collecting hopper 601, and the other end of the right-angle pipe 612 is fixedly connected to a water tank 613, and the water tank 613 is in a barrel; The waste water in the liquid collecting hopper 601 is directly poured into the water tank 613 through the right-angle pipe 612 .

[0033] Further, such as Figure 1 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Fig. 9 As shown, a water wheel 614 is provided in the inner cavity of the water tank 613. The outer side of the water wheel 614 is made of rubber. The outer side of the water wheel 614 is in close contact with the water tank 613. Rotating rods are extended from both ends of the water wheel 614. Two sets of rotating rods penetrate the two sides of the water tank 613 and extend to the outside thereof. The water tank 613 is sealed and sleeved with the rotating rods. The wastewater is accelerated by the spiral plate 602 and collides with the inner cavity of the water tank 613, thereby driving the water wheel 614 to rotate.

[0034] Further, such as Figure 1 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Fig. 9 As shown, synchronous belts 615 are symmetrically arranged on the left and right sides of the water tank 613, the bottom of the synchronous belt 615 is sleeved with the rotating rods extending from the two ends of the water wheel 614, and the synchronous belt 615 is inclined, and the bottom of the water tank 613 is symmetrically connected with a liquid outlet pipe 616; When the water wheel 614 rotates under the impact of the waste water, it drives the synchronous belt 615 to transmit, thereby facilitating the energy conversion.

[0035] Example 2 further optimizes the vertical wet process cleaning equipment provided in Example 1. Specifically, Figure 1 , Figure 2 and Fig. 9 As shown, a conveyor belt 7 is provided above the liquid collecting hopper 601, and the conveyor belt 7 is located between the water retaining plate 1 and the liquid collecting hopper 601, and rotating rollers 8 are symmetrically sleeved on the inner side of the conveyor belt 7, and a group of rotating rollers 8 are sleeved on the top of the conveyor belt 7; The water wheel 614 drives the rotating roller 8 to rotate synchronously under the action of the synchronous belt 615, thereby providing power support for the conveyor belt 7, thereby facilitating the movement of the substrate.

[0036] Further, such as Figure 1 , Figure 2 and Fig. 9 As shown, a hanging plate 3 is fixedly installed on the top of the outer side of the nozzle 2, and the top of the hanging plate 3 is arc-shaped. A hanging rod 4 is vertically arranged above the nozzle 2, and the nozzle 2 is connected to the hanging rod 4 through the hanging plate 3, and the hanging plate 3 is hung on the outer side of the hanging rod 4; The nozzle 2 is suspended below the suspension rod 4 by means of the provided hanging plate 3 , and then the hanging plate 3 and the nozzle 2 are easily rotated around the suspension rod 4 under the push of the baffle 5 , thereby changing the spraying angle of the nozzle 2 .

[0037] The use process of the vertical wet process cleaning equipment provided by the present invention is as follows: Liquid spraying: When in use, gas and liquid are transported to the inner cavity of the nozzle 2 through the air inlet pipe and the liquid inlet pipe installed in sequence on the top of the nozzle 2, and the gas and liquid are mixed inside the nozzle 2, and finally sprayed out through the nozzles evenly distributed on the side wall of the nozzle 2, thereby achieving cleaning; Angle adjustment: When there is no substrate transported in the middle of the two groups of nozzles 2, the liquid sprayed from the nozzles 2 will directly hit the outer surface of the baffle 5 installed between the nozzles 2 opposite to it, and fall along the baffle 5. When the angle of the nozzle 2 and the nozzle is required, the center rod 608 can be rotated first, and the ratchet wheels 610 installed at both ends of the center rod 608 cooperate with the ratchet claws set in the inner cavity of the spherical rod 611 to rotate the center rod 608 and the transmission plate 609, so that the rotating disk 609 is tilted. At this time, the falling wastewater hits the transmission plate 609, which can provide a moving starting power for the water guide plate 607. Then, by manual The water guide plate 607 is rotated, and the spherical rods 611 of the spherical sleeves on both sides of the water guide plate 607 push the central tube 608 and the baffle plate 5 to move, and then the baffle plate 5 drives the nozzle 2 to tilt the rock suspension rod 4, and then adjusts the angle of the nozzle until it is adjusted to an appropriate position. When the water guide plate 607 rotates, it drives the rotating shaft 605 fixedly installed at the bottom thereof and the spring plate 606 inside the connecting groove 604 opened at the top of the fixed column 603 to rotate, and is fixed and limited by the connecting groove 604. When in use, a servo motor can also be added at the bottom of the spring plate 606 to drive manual rotation; Power conversion: When the wastewater falls, it is first diverted by the water guide plate 607, so that it falls on the top of the spiral plate 602 and is accelerated by the spiral plate 602. Then, it is transported to the inner cavity of the water tank 613 through the right-angle tube 612 fixedly installed at the bottom of the liquid collecting hopper 601, and hits the water wheel 614 in the inner cavity of the water tank 613 to rotate. When the water wheel 614 rotates, under the action of the synchronous belts 615 arranged on both sides thereof, it drives the rotating roller 8 and the conveyor belt 7 to rotate, thereby driving the substrate transmission.

[0038] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] Obviously, the embodiments described above are only some embodiments of the present invention, rather than all embodiments. The preferred embodiments of the present invention are given in the accompanying drawings, but they do not limit the patent scope of the present invention. The present invention can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive. Although the present invention has been described in detail with reference to the aforementioned embodiments, for those skilled in the art, it is still possible to modify the technical solutions recorded in the aforementioned specific embodiments, or to perform equivalent replacements for some of the technical features therein. Any equivalent structure made using the contents of the specification and drawings of the present invention, directly or indirectly used in other related technical fields, is also within the scope of patent protection of the present invention.

Claims

1. A vertical wet process cleaning equipment, characterized in that: The invention comprises symmetrically staggered water baffles (1), wherein the inner cavity of the water baffles (1) is evenly distributed with nozzles (2), and three groups are arranged on the inner side of each group of the water baffles (1), and a baffle (5) is fixedly installed between the three groups of nozzles (2). A conveyor belt (7) is arranged below the two groups of the water baffles (1), and an adjustment component (6) is arranged below the conveyor belt (7), and the adjustment component (6) comprises a liquid collecting hopper (601), wherein the liquid collecting hopper (601) is funnel-shaped, and a spiral plate (602) is fixedly installed in the inner cavity of the liquid collecting hopper (601).

2. A vertical wet process cleaning equipment according to claim 1, characterized in that: A water guide plate (607) is provided above the liquid collecting hopper (601), and a central rod (608) for connection is provided in an array of side walls of the water guide plate (607), and ratchets (610) are fixedly mounted at both ends of the central rod (608).

3. A vertical wet process cleaning equipment according to claim 2, characterized in that: Transmission plates (609) are symmetrically mounted at the upper and lower ends of the center rod (608), and spherical rods (611) are symmetrically arranged at the two ends of the transmission plate (609). The spherical ends of one group of spherical rods (611) are spherically sleeved with the side wall of the water guide plate (607), and the spherical ends of the other group of spherical rods (611) are rotatably connected with the inner wall of the baffle (5). The inner sides of the other ends of the two groups of spherical rods (611) are both provided with ratchet pawls, and the two groups of spherical rods (611) are sleeved with the ratchet wheel (610) via the ratchet pawls.

4. The vertical wet process cleaning equipment according to claim 3, characterized in that: A rotating shaft (605) is fixedly mounted on the bottom of the water guide plate (607), and a spring plate (606) is fixedly mounted on the bottom of the rotating shaft (605). A fixing column (603) is provided below the water guide plate (607), and the fixing column (603) is fixedly connected to the inner wall of the spiral plate (602).

5. The vertical wet process cleaning equipment according to claim 4, characterized in that: The top of the fixed column (603) is flush with the top of the liquid collecting bucket (601), the bottom of the fixed column (603) is higher than the bottom of the liquid collecting bucket (601), and a connecting groove (604) is provided on the top of the fixed column (603). The fixed column (603) is sleeved with the bottom of the rotating shaft (605) and the spring plate (606) through the connecting groove (604).

6. The vertical wet process cleaning equipment according to claim 5, characterized in that: A right-angle pipe (612) for transporting wastewater is fixedly installed at the bottom of the liquid collecting hopper (601), and the other end of the right-angle pipe (612) is fixedly connected to a water tank (613), and the water tank (613) is barrel-shaped.

7. The vertical wet process cleaning equipment according to claim 6, characterized in that: The inner cavity of the water tank (613) is provided with a water wheel (614), and rotating rods are extended from both left and right ends of the water wheel (614), and two groups of rotating rods penetrate both sides of the water tank (613) and extend to the outside thereof.

8. The vertical wet process cleaning equipment according to claim 7, characterized in that: Synchronous belts (615) are symmetrically arranged on the left and right sides of the water tank (613); the bottom of the synchronous belt (615) is sleeved with rotating rods extending from both ends of the water wheel (614); and the bottom of the water tank (613) is symmetrically connected to a liquid outlet pipe (616).

9. The vertical wet process cleaning equipment according to claim 8, characterized in that: A conveyor belt (7) is provided above the liquid collecting hopper (601), and the conveyor belt (7) is located between the water retaining plate (1) and the liquid collecting hopper (601). Rotating rollers (8) are symmetrically sleeved on the inner side of the conveyor belt (7), and a group of rotating rollers (8) are sleeved on the top of the conveyor belt (7).

10. The vertical wet process cleaning equipment according to claim 9, characterized in that: A hanging plate (3) is fixedly mounted on the top of the outer side of the nozzle (2); the top of the hanging plate (3) is arc-shaped; a hanging rod (4) is vertically arranged above the nozzle (2); and the nozzle (2) is connected to the hanging rod (4) via the hanging plate (3).

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