A vacuum ion coating device capable of uniformly coating films

Abstract

The present invention discloses a vacuum ion coating device capable of uniformly coating films, which relates to the technical field of coating devices and includes a support plate. A vacuum coating device main body is arranged at the upper end of the support plate, and a protective door is arranged on one side of the vacuum coating device main body; in the vacuum ion coating device of this design, when the inner wall of the vacuum coating device main body needs to be cleaned, the output end of the lifting motor drives the lifting screw rod to rotate along the inside of the threaded hole, so that the lifting frame drives the rotating seat to descend. During the descending process, the output end of the first rotating motor drives the rotating gear to engage along the inside of the tooth groove, so that the tooth groove drives the rotating seat to rotate, and at the same time drives the cleaning brush to rotate along the inner wall of the vacuum coating device main body, thereby rotating and cleaning the inside of the vacuum coating device main body. There is no need for manual cleaning of the inside of the vacuum coating device main body, which saves time and effort and improves the cleaning efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of coating devices, and in particular to a vacuum ion coating device capable of uniformly coating films. Background Art

[0002] Vacuum coating machines mainly refer to a type of coating that needs to be carried out under a relatively high vacuum degree. Specifically, there are many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD pulsed laser deposition, etc. The main idea is divided into two types: evaporation and sputtering.

[0003] During the use of the existing coating devices, impurities are likely to accumulate inside. After use, manual cleaning tools need to be used by workers for manual brushing. The operation is cumbersome, time-consuming and laborious, and the cleaning efficiency is low. For this reason, the present invention proposes a vacuum ion coating device capable of uniformly coating films. Summary of the Invention

[0004] Aiming at the deficiencies of the prior art, the present invention provides a vacuum ion coating device capable of uniformly coating films, which solves the problems raised in the above background art.

[0005] To achieve the above object, the present invention is realized through the following technical solutions: A vacuum ion coating device capable of uniformly coating films, including a support plate, a vacuum coating device main body is arranged at the upper end of the support plate, a protective door is arranged on one side of the vacuum coating device main body, a door lock is arranged between the vacuum coating device main body and the protective door, a vacuum pump is arranged at the upper end of the vacuum coating device main body, an arc target and a control cabinet are arranged outside the vacuum coating device main body, a base is arranged at the bottom of the support plate, a cleaning component and a moving seat are arranged inside the vacuum coating device main body, rollers are arranged at the bottom of the moving seat, a hanging part rotating component is arranged between the moving seat and the vacuum coating device main body, a hanging rack is arranged at the upper end of the moving seat, and a hanging rack self-rotating component is arranged between the moving seat and the hanging rack;

[0006] The cleaning component includes a lifting motor, the output end of the lifting motor is connected with a lifting screw rod, a lifting frame is arranged inside the vacuum coating device main body, a threaded hole is arranged in the middle of the lifting frame, a rotating seat is arranged at the upper end of the lifting frame, a slider is connected to the bottom of the rotating seat, a chute and a toothed groove are arranged on the outside of the lifting frame, a cleaning brush and a mounting frame are arranged on the outside of the lifting frame, and a rotating motor I is arranged on the outside of the mounting frame, and the output end of the rotating motor I is connected with a rotating gear.

[0007] As a further technical solution of the present invention, the support plate is fixedly connected to the main body of the vacuum coating device. A hinge is provided between the main body of the vacuum coating device and the protective door. The input end of the vacuum pump is communicated with the inside of the main body of the vacuum coating device. The number of arc targets is several groups and is distributed in an array. A control circuit board and a power supply module are arranged inside the control cabinet.

[0008] As a further technical solution of the present invention, the output end of the lifting motor is fixedly connected to the lifting screw. The lifting screw is adapted to the threaded hole. The rotating seat is fixedly connected to the slider. The rotating seat is of an annular structure. The sliding groove is adapted to the slider.

[0009] As a further technical solution of the present invention, the cleaning brush is fixedly connected to the rotating seat. The cleaning brush is in contact with the inner wall of the main body of the vacuum coating device. The mounting frame is fixedly connected to the rotating seat. The output end of the first rotating motor is fixedly connected to the rotating gear. The rotating gear is engaged with the tooth groove.

[0010] As a further technical solution of the present invention, the hanging part rotating assembly includes a connecting seat. A driving motor is fixedly connected to the bottom of the connecting seat. The output end of the driving motor is fixedly connected to a positioning seat. A positioning groove adapted to the positioning seat is opened at the bottom of the moving seat.

[0011] As a further technical solution of the present invention, an electric telescopic rod is arranged in the middle of the main body of the vacuum coating device. The output end of the electric telescopic rod is connected to the connecting seat. A guiding hole is opened in the middle of the connecting seat. A guiding rod adapted to the guiding hole is fixedly connected to the bottom of the support plate. A limiting block is fixedly connected to the bottom of the guiding rod.

[0012] As a further technical solution of the present invention, the hanging rack self-rotating assembly includes a bearing seat. A driven gear is fixedly connected to the outside of the hanging rack. An inner cavity is opened inside the moving seat. A second rotating motor is arranged inside the inner cavity. The second rotating motor is fixedly connected to the inner cavity.

[0013] As a further technical solution of the present invention, the output end of the second rotating motor is fixedly connected to a driving gear. The number of the second rotating motors and the driving gears is equal to the number of the hanging racks. The driving gear is engaged with the driven gear.

[0014] The present invention provides a vacuum ion coating device capable of uniformly coating. Compared with the prior art, the following beneficial effects are achieved:

[0015] 1. This design is a vacuum ion coating device capable of uniform coating. Through the setting of the cleaning component, when the inner wall of the vacuum coating device main body needs to be cleaned, the output end of the lifting motor drives the lifting screw to rotate along the inside of the threaded hole, causing the lifting frame to drive the rotating seat to descend. During the descent, the output end of the first rotating motor drives the rotating gear to engage along the inside of the tooth groove, causing the tooth groove to drive the rotating seat to rotate, and at the same time driving the cleaning brush to rotate along the inner wall of the vacuum coating device main body, so as to rotate and clean the inside of the vacuum coating device main body. There is no need for manual cleaning of the inside of the vacuum coating device main body, which saves time and effort and improves the cleaning efficiency.

[0016] 2. This design is a vacuum ion coating device capable of uniform coating. Through the setting of the hanging part rotation component, when the moving seat needs to rotate, the output end of the electric telescopic rod drives the connecting seat to rise, causing the guide hole to slide along the outside of the guide rod. Further, the connecting seat drives the driving motor and the positioning seat to engage with the positioning groove. Start the driving motor, and the output end of the driving motor drives the positioning seat and the moving seat to rotate, causing several groups of hanging frames and hanging parts on the upper end of the moving seat to rotate for coating operation, improving the coating efficiency.

[0017] 3. This design is a vacuum ion coating device capable of uniform coating. Through the setting of the hanging frame self-rotation component, when the hanging frame needs to self-rotate, the output end of the second rotating motor drives the driving gear to engage with the driven gear, causing the driven gear to drive the hanging frame to rotate along the inside of the bearing seat, and further driving the hanging parts outside the hanging frame to rotate, so that the hanging parts can be uniformly coated. Description of the Drawings

[0018] Figure 1 It is a structural schematic diagram of a vacuum ion coating device capable of uniform coating;

[0019] Figure 2 It is another perspective view of a vacuum ion coating device capable of uniform coating;

[0020] Figure 3 It is a side sectional view of a vacuum ion coating device capable of uniform coating;

[0021] Figure 4 It is for a vacuum ion coating device capable of uniform coating Figure 3 The enlarged view of A in it;

[0022] Figure 5 It is for a vacuum ion coating device capable of uniform coating Figure 3 The enlarged view of B in it;

[0023] Figure 6 It is for a vacuum ion coating device capable of uniform coatingFigure 3 Enlarged view of C;

[0024] Figure 7 For a vacuum ion coating device capable of uniformly coating films Figure 3 Enlarged view of D.

[0025] In the figure: 1, support plate; 2, main body of vacuum coating device; 3, protective door; 4, door lock; 5, vacuum pump; 6, arc target; 7, control cabinet; 8, base; 9, cleaning component; 91, lifting motor; 92, lifting screw; 93, lifting frame; 94, threaded hole; 95, rotating seat; 96, slider; 97, sliding groove; 98, cleaning brush; 99, tooth groove; 910, mounting frame; 911, first rotating motor; 912, rotating gear; 10, moving seat; 11, roller; 12, hanging rack; 13, hanging part rotating component; 131, connecting seat; 132, driving motor; 133, positioning seat; 134, positioning groove; 135, electric telescopic rod; 136, guiding hole; 137, guiding rod; 138, limiting block; 14, hanging rack self-rotating component; 141, bearing seat; 142, driven gear; 143, inner cavity; 144, second rotating motor; 145, driving gear. Specific embodiments

[0026] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0027] Please refer to Figures 1-7 , the present invention provides a technical solution for a vacuum ion coating device capable of uniformly coating films: a vacuum ion coating device capable of uniformly coating films, including a support plate 1, a main body of a vacuum coating device 2 is arranged at the upper end of the support plate 1, a protective door 3 is arranged on one side of the main body of the vacuum coating device 2, a door lock 4 is arranged between the main body of the vacuum coating device 2 and the protective door 3, a vacuum pump 5 is arranged at the upper end of the main body of the vacuum coating device 2, an arc target 6 and a control cabinet 7 are arranged outside the main body of the vacuum coating device 2, a base 8 is arranged at the bottom of the support plate 1, a cleaning component 9 and a moving seat 10 are arranged inside the main body of the vacuum coating device 2, rollers 11 are arranged at the bottom of the moving seat 10, a hanging part rotating component 13 is arranged between the moving seat 10 and the main body of the vacuum coating device 2, a hanging rack 12 is arranged at the upper end of the moving seat 10, and a hanging rack self-rotating component 14 is arranged between the moving seat 10 and the hanging rack 12;

[0028] Among them, the cleaning component 9 includes a lifting motor 91. The output end of the lifting motor 91 is connected to a lifting screw 92. Inside the main body 2 of the vacuum coating device, there is a lifting frame 93. A threaded hole 94 is provided in the middle of the lifting frame 93. A rotating seat 95 is provided at the upper end of the lifting frame 93. A slider 96 is connected to the bottom of the rotating seat 95. A sliding groove 97 and a tooth groove 99 are provided on the outer side of the lifting frame 93. A cleaning brush 98 and a mounting frame 910 are provided outside the lifting frame 93. A first rotating motor 911 is provided on the outer side of the mounting frame 910. The output end of the first rotating motor 911 is connected to a rotating gear 912.

[0029] As Figures 1-2 shown, the support plate 1 is fixedly connected to the main body 2 of the vacuum coating device. A hinge is provided between the main body 2 of the vacuum coating device and the protective door 3. The input end of the vacuum pump 5 is communicated with the inside of the main body 2 of the vacuum coating device. The number of arc targets 6 is several groups and is distributed in an array. A control circuit board and a power module are provided inside the control cabinet 7, which is beneficial for performing the coating operation.

[0030] As Figures 3-5 shown, the output end of the lifting motor 91 is fixedly connected to the lifting screw 92. The lifting screw 92 is adapted to the threaded hole 94. The rotating seat 95 is fixedly connected to the slider 96. The rotating seat 95 is of a circular ring structure. The sliding groove 97 is adapted to the slider 96. The cleaning brush 98 is fixedly connected to the rotating seat 95. The cleaning brush 98 is in contact with the inner wall of the main body 2 of the vacuum coating device. The mounting frame 910 is fixedly connected to the rotating seat 95. The output end of the first rotating motor 911 is fixedly connected to the rotating gear 912. The rotating gear 912 meshes with the tooth groove 99, which is beneficial for cleaning the inner wall of the main body 2 of the vacuum coating device.

[0031] As Figure 6 shown, the hanging part rotating component 13 includes a connecting seat 131. A driving motor 132 is fixedly connected to the bottom of the connecting seat 131. A positioning seat 133 is fixedly connected to the output end of the driving motor 132. A positioning groove 134 adapted to the positioning seat 133 is provided at the bottom of the moving seat 10. An electric telescopic rod 135 is provided in the middle of the main body 2 of the vacuum coating device. The output end of the electric telescopic rod 135 is connected to the connecting seat 131. A guiding hole 136 is provided in the middle of the connecting seat 131. A guiding rod 137 adapted to the guiding hole 136 is fixedly connected to the bottom of the support plate 1. A limiting block 138 is fixedly connected to the bottom of the guiding rod 137, which is beneficial for the rotation of the moving seat 10, facilitating the rotation of the hanging rack 12 and the hanging parts at the upper end of the hanging rack 12, and facilitating uniform coating.

[0032] As Figure 7As shown in the figure, the hanger self-rotation assembly 14 includes a bearing seat 141. A driven gear 142 is fixedly connected to the outer side of the hanger 12. An inner cavity 143 is formed inside the moving seat 10. A second rotation motor 144 is arranged inside the inner cavity 143. The second rotation motor 144 is fixedly connected to the inner cavity 143. The output end of the second rotation motor 144 is fixedly connected to a driving gear 145. The number of the second rotation motors 144 and the driving gears 145 is equal to the number of the hangers 12. The driving gear 145 meshes with the driven gear 142, which is beneficial to the self-rotation of the hanger 12, facilitating the rotation of the hanging parts and ensuring that the hanging parts can be evenly coated.

[0033] The working principle of the present invention is as follows: During the use of the device, the hanging parts are hung on the upper end of the hanger 12. The protective door 3 is opened, and the moving seat 10 and the hanger 12 are pushed into the interior of the vacuum coating device main body 2 through the rollers 11. The protective door 3 is closed. Then, the moving seat 10 is rotated through the hanging part rotation assembly 13, and at the same time, the hanger self-rotation assembly 14 drives the hanger 12 to perform self-rotation to uniformly coat the hanging parts.

[0034] It should be noted that through the setting of the cleaning assembly 9, when the inner wall of the vacuum coating device main body 2 needs to be cleaned, the output end of the lifting motor 91 drives the lifting screw rod 92 to rotate along the inside of the threaded hole 94, so that the lifting frame 93 drives the rotating seat 95 to descend. During the descending process, under the support of the mounting frame 910, the output end of the first rotation motor 911 drives the rotating gear 912 to mesh along the inside of the tooth groove 99, so that the tooth groove 99 drives the rotating seat 95 to rotate, and at the same time drives the slider 96 to rotate along the inside of the sliding groove 97, further driving the cleaning brush 98 to rotate along the inner wall of the vacuum coating device main body 2, thereby rotating and cleaning the inside of the vacuum coating device main body 2 until the lifting frame 93 moves to the bottom of the vacuum coating device main body 2. Then, control the output end of the lifting motor 91 to reverse, thereby driving the lifting frame 93 to rise, and at the same time, the cleaning brush 98 continuously cleans the inner wall of the vacuum coating device main body 2. Then, the inside of the vacuum coating device main body 2 can be rinsed with clean water to wash away the impurities after cleaning, eliminating the need for manual cleaning of the inside of the vacuum coating device main body 2, saving time and effort and improving the cleaning efficiency.

[0035] It should be noted that through the setting of the hanging part rotation assembly 13, when the moving seat 10 needs to rotate, the output end of the electric telescopic rod 135 drives the connecting seat 131 to rise, so that the guiding hole 136 slides along the outside of the guiding rod 137. Further, the connecting seat 131 drives the driving motor 132 and the positioning seat 133 to engage with the positioning groove 134. The driving motor 132 is started, so that the output end of the driving motor 132 drives the positioning seat 133 and the moving seat 10 to rotate, so that several groups of hanging brackets 12 and hanging parts on the upper end of the moving seat 10 rotate, and the coating operation is carried out to improve the coating efficiency.

[0036] It should be noted that through the setting of the hanging bracket self-rotation assembly 14, when the hanging bracket 12 needs to self-rotate, the output end of the rotation motor two 144 drives the driving gear 145 to engage with the driven gear 142, so that the driven gear 142 drives the hanging bracket 12 to rotate along the inside of the bearing seat 141, and further drives the hanging parts outside the hanging bracket 12 to rotate, so that the hanging parts can be evenly coated.

[0037] The above are only the preferred embodiments of the invention. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and retouches can be made, and these improvements and retouches should also be regarded as the protection scope of the present invention. The structures, devices and operation methods not specifically described and explained in the present invention, unless otherwise specified and limited, are implemented according to the conventional means in the art.

Claims

1. A vacuum ion coating device capable of uniformly coating films, comprising a support plate (1), characterized in that, A vacuum coating device main body (2) is provided at the upper end of the support plate (1). A protective door (3) is provided on one side of the vacuum coating device main body (2). A door lock (4) is provided between the vacuum coating device main body (2) and the protective door (3). A vacuum pump (5) is provided at the upper end of the vacuum coating device main body (2). An arc target (6) and a control cabinet (7) are provided on the outer side of the vacuum coating device main body (2). A base (8) is provided at the bottom of the support plate (1). A cleaning component (9) and a moving seat (10) are provided inside the vacuum coating device main body (2). Rollers (11) are provided at the bottom of the moving seat (10). A hanging part rotation component (13) is provided between the moving seat (10) and the vacuum coating device main body (2). A hanging rack (12) is provided at the upper end of the moving seat (10). A hanging rack self-rotation component (14) is provided between the moving seat (10) and the hanging rack (12); The cleaning component (9) includes a lifting motor (91). The output end of the lifting motor (91) is connected to a lifting screw rod (92). A lifting frame (93) is provided inside the vacuum coating device main body (2). A threaded hole (94) is provided in the middle of the lifting frame (93). A rotating seat (95) is provided at the upper end of the lifting frame (93). A slider (96) is connected to the bottom of the rotating seat (95). A sliding groove (97) and a tooth groove (99) are provided on the outer side of the lifting frame (93). A cleaning brush (98) and a mounting frame (910) are provided outside the lifting frame (93). A first rotating motor (911) is provided on the outer side of the mounting frame (910). The output end of the first rotating motor (911) is connected to a rotating gear (912).

2. The vacuum ion coating device capable of uniformly coating according to claim 1, characterized in that, The support plate (1) and the vacuum coating device main body (2) are fixedly connected. A hinge is provided between the vacuum coating device main body (2) and the protective door (3). The input end of the vacuum pump (5) is communicated with the inside of the vacuum coating device main body (2). The number of arc targets (6) is several groups and they are distributed in an array. A control circuit board and a power module are provided inside the control cabinet (7).

3. A vacuum ion coating device capable of uniformly coating, as described in claim 1, wherein The output end of the lifting motor (91) and the lifting screw rod (92) are fixedly connected. The lifting screw rod (92) and the threaded hole (94) are adapted to each other. The rotating seat (95) and the slider (96) are fixedly connected. The rotating seat (95) is of a circular ring structure. The sliding groove (97) and the slider (96) are adapted to each other.

4. A vacuum ion coating device capable of uniformly coating, as described in claim 1, wherein The cleaning brush (98) and the rotating seat (95) are fixedly connected. The cleaning brush (98) is in contact with the inner wall of the vacuum coating device main body (2). The mounting frame (910) and the rotating seat (95) are fixedly connected. The output end of the first rotating motor (911) and the rotating gear (912) are fixedly connected. The rotating gear (912) and the tooth groove (99) are meshed with each other.

5. A vacuum ion coating device capable of uniformly coating, according to claim 1, wherein The hanging part rotation assembly (13) includes a connecting seat (131). A driving motor (132) is fixedly connected to the bottom of the connecting seat (131). A positioning seat (133) is fixedly connected to the output end of the driving motor (132). A positioning groove (134) adapted to the positioning seat (133) is formed at the bottom of the moving seat (10).

6. A vacuum ion coating device capable of uniformly coating, as described in claim 5, wherein, An electric telescopic rod (135) is arranged in the middle of the vacuum coating device main body (2). The output end of the electric telescopic rod (135) is connected to the connecting seat (131). A guiding hole (136) is formed in the middle of the connecting seat (131). A guiding rod (137) adapted to the guiding hole (136) is fixedly connected to the bottom of the supporting plate (1). A limiting block (138) is fixedly connected to the bottom of the guiding rod (137).

7. A vacuum ion coating device capable of uniformly coating, as described in claim 1, wherein, The hanger self-rotation assembly (14) includes a bearing seat (141). A driven gear (142) is fixedly connected to the outer side of the hanger (12). An inner cavity (143) is formed inside the moving seat (10). A second rotating motor (144) is arranged inside the inner cavity (143), and the second rotating motor (144) is fixedly connected to the inner cavity (143).

8. A vacuum ion coating device capable of uniformly coating, according to claim 7, wherein A driving gear (145) is fixedly connected to the output end of the second rotating motor (144). The number of the second rotating motors (144) and the driving gears (145) is equal to the number of the hangers (12). The driving gear (145) is meshed with the driven gear (142).

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