A raw material sampling device for photoresist production
By designing an automated photoresist sampling device, the problem of sampling consistency caused by operator differences was solved, achieving stable and accurate sample acquisition, reducing the risk of contamination, and improving sampling efficiency and data reliability.
Patent Information
- Application Number
- CN202411340843.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-25
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2044-09-25
AI Technical Summary
In current photoresist production, the difference in operator skill level and experience leads to reduced sampling consistency, affecting the accuracy and reliability of subsequent analysis. Furthermore, manual sampling is prone to sample contamination and data distortion.
An automated sampling device was designed, comprising a drive motor, belt drive, slide bar, movable block, and cylinder. By precisely controlling the movement of the sampling tube, it ensures that each sampling is performed under the same standard, thereby reducing the risk of contamination.
This ensures the stability and consistency of the sampling process, improves data reliability and sample purity, and guarantees the accuracy of sampling efficiency and sample quality.
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Figure CN119510049B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application relates to the technical field of photoresist production, in particular to a raw material sampling device for photoresist production. BACKGROUND
[0002] Photoresist, also known as photoresist, is a kind of etching film material whose solubility changes through irradiation or radiation of ultraviolet light, electron beam, ion beam, X-ray, etc. It is a mixed liquid sensitive to light composed of three main components: photosensitive resin, sensitizer and solvent. In the production process of photoresist, a variety of raw materials are needed, and before production, the raw materials need to be sampled to detect their physical and chemical properties, such as purity, viscosity, molecular weight, etc., so as to ensure that the raw materials meet the specified quality standards.
[0003] For example, the "raw material sampling device for photoresist production" with publication number CN218271541U includes a main body cylinder, a drive part, and multiple sampling cylinders. The main body cylinder has a negative pressure channel along its axial direction. The negative pressure channel has a piston that moves along the axial direction of the main body cylinder. The piston separates the negative pressure channel into a working chamber and an auxiliary chamber along the axial direction of the main body cylinder. The working chamber is open at one end away from the piston. One end of any sampling cylinder can extend into the working chamber from the open end of the working chamber and be detachably connected to the main body cylinder. Each sampling cylinder has a glue storage chamber. The side wall of the glue storage chamber away from the piston is provided with a glue suction port. The side wall close to the piston is made of flexible material to form a flexible side wall. The drive part is drivingly connected to the piston to drive the piston to move along the axial direction of the main body cylinder.
[0004] However, in the existing technology, if the sampling process relies entirely on manual operation, it will not only result in low efficiency and increase the time and labor costs, but also different operators will use different methods and standards when sampling due to differences in technical level and experience, which will reduce the consistency of the samples and affect the accuracy and reliability of subsequent analysis. In addition, during the manual sampling process, the wrong sampling method or improper operation can also contaminate the samples, which can seriously affect the test results, cause data deviation or distortion, and thus adversely affect the overall research or production process. SUMMARY
[0005] The purpose of the present application is to provide a raw material sampling device for photoresist production to solve the problem of different operators using different methods and standards when sampling due to differences in technical level and experience, which will reduce the consistency of the samples and affect the accuracy and reliability of subsequent analysis.
[0006] In order to achieve the above object, the present application provides the following technical scheme: A raw material sampling device for photoresist production, comprising a bottom plate and a storage box fixedly installed on one side of the top of the bottom plate, a material taking pump is installed on one side of the top of the bottom plate, a lifting mechanism is installed on the inner side of the storage box, a back-to-back frame is fixedly connected on one side of the top of the bottom plate, and a sampling mechanism is installed on the top of the back-to-back frame.
[0007] The sampling mechanism comprises a fixed frame, a swing rod, a first sliding rod fixedly connected to the inner side of the top end of the fixed frame, a moving sleeve slidingly connected to the surface of the first sliding rod, the swing rod being rotatably connected to the bottom end of the fixed frame at one end, a second sliding rod fixedly connected to the bottom of the moving sleeve, an active block slidingly connected to the outer surface of the second sliding rod, a second fixed rod fixedly connected to the bottom of the active block, a rotating frame rotatably connected to one side of the active block, an active rod fixedly connected to the bottom of the rotating frame, a sliding block slidingly connected to the outer surface of the active rod, a spring installed between the rotating frame and the sliding block, the spring being sleeved on the outer surface of the active rod, a rotating rod fixedly connected to the side wall of the sliding block, a second crank fixedly connected to the outer surface of the rotating rod, a second push rod fixedly connected to the side wall of one end of the second crank, a second limiting hole formed in the top end of the swing rod, a first limiting hole formed in the bottom end of the swing rod, a second driving block slidingly connected to the inner side of the second limiting hole, the second push rod being rotatably connected to the outer surface of the second driving block, and a sampling element installed on one side of the active block.
[0008] Preferably, a first crank is rotatably connected to the side wall of the bottom end of the fixed frame, a first push rod is fixedly connected to the side wall of one end of the first crank, and a first driving block is rotatably connected to the outer surface of the first push rod and slidingly connected to the first limiting hole.
[0009] Preferably, one end of the rotating rod is rotatably connected to the fixed frame, a second fixed plate is fixedly connected to the bottom of the active block, a baffle is fixedly connected to the bottom end of the moving sleeve, and the inner diameter of the active block is smaller than the outer diameter of the baffle.
[0010] Preferably, a driving motor is installed on the inner side of the back-to-back frame, a belt transmission element is fixedly connected to the output end of the driving motor, and the driven wheel of the belt transmission element is fixedly connected to one end of the first crank.
[0011] Preferably, the sampling element comprises a mounting frame, the mounting frame is fixedly connected to the bottom end of the second fixed rod at one end, and a second fixed plate is fixedly connected to the side wall of the active block.
[0012] Preferably, a second air cylinder is installed on the top of the second fixed plate, a sampling tube is installed on the inner side of the mounting frame, a piston rod is slidingly connected to the inner side of the sampling tube, and the top of the piston rod is fixedly connected to the bottom output end of the second air cylinder.
[0013] Preferably, the lifting mechanism comprises a fixed strip and a first air cylinder, the inside of the fixed strip is slidably connected with a lifting block, one end of the lifting block is fixedly connected with a lifting rod, the inside of the fixed strip is rotatably connected with a first fixed rod, and the top of the first fixed rod is rotatably connected with a scissor type frame.
[0014] Preferably, the top end of the first air cylinder is fixedly connected with the inner wall of the storage box, the output end of the first air cylinder is fixedly connected with a first fixed plate, the bottom end of the first fixed plate is fixedly connected with the lifting rod, and one end of the lifting rod is fixedly connected with the top of the scissor type frame.
[0015] Preferably, the inside of the fixed strip is provided with a moving hole, the inside of the moving hole is slidably connected with a lifting ring, one end of the lifting ring penetrates through the moving hole, one end of the lifting ring is fixedly connected with a moving rod, and the moving rod is rotatably connected with the scissor type frame.
[0016] Preferably, the inside of the lifting ring is fixedly connected with a sampling head, the top of the sampling head is fixedly connected with a conveying pipe in communication, one end of the conveying pipe is fixedly communicated with a material taking pump, the output end of the material taking pump is fixedly connected with a discharging pipe, the top of the bottom plate is provided with a sample storage box, and the output end of the discharging pipe is located above the sample storage box.
[0017] Compared with the prior art, the present application has the following advantages:
[0018] 1、In the present application, during the sampling process, the driving motor drives the first crank through the belt transmission member, promotes the circular motion of the first push rod, and then drives the first driving block to slide, which ensures the swing of the swing rod, thereby causing the reverse force of the second driving block, so that the second crank also moves, the rotating rod transmits the force to the sliding block, and the swing of the movable rod is caused, the movement directly controls the movement of the second fixed rod and the sampling member, ensures that the sampling tube can be accurately cut into the sample storage box, realizes stable and consistent sampling, each sampling is carried out under the same standard and condition, thereby ensuring the consistency of the sampling amount, improving the reliability of the data, in addition, the automatic sampling process in the closed environment greatly reduces the risk of external pollution, ensures that the obtained sample is pure and true, and accurately reflects the characteristics of the sample in the sample storage box.
[0019] 2、The movable rod swings under the action of the sliding block, effectively transmits the force to the rotating frame, thereby causing the movement of the movable block and cooperation, which not only makes the movable rod and the moving sleeve slide relative to each other, but also promotes the moving sleeve to slide on the surface of the first slide rod, when the moving sleeve reaches the end of the fixed frame, the movable block continues to slide on the second slide rod, drives the second fixed rod and the second fixed plate to move downward, so that the sampling tube can be smoothly inserted into the inside of the sample box, thereby effectively obtaining the internal liquid sample, the design ensures that the sampling process is smooth, guarantees the integrity of the sample, after the sampling is completed, the system uses the second cylinder to control the piston rod, realizes the precise suction of the photoresist, the cooperation of the swing rod and the first crank generates a reciprocating force, enhances the coordination of the internal structure of the system, promotes the movable block to stably move in a straight line, in addition, the design of the up-down movement of the movable block makes the sampling process more efficient and convenient, ensures that the sample is uniformly distributed in the sample box, through precise motion control and structural design, the sampling efficiency is improved, the stability and reliability of the sample quality are ensured, the suction and sampling process of the photoresist are more smooth, and finally the efficient and accurate liquid sample extraction is realized.
[0020] 3、The force of the first cylinder drives the first fixed plate to move in the active direction, and then drives the lifting rod to move up and down, which makes the lifting block slide in the fixed strip, and with the transmission of the force at the bottom end of the lifting rod, the scissor frame is opened, driving the moving rod to slide, the opening of the scissor frame controls the position of the lifting ring, so that it moves in a straight line under the limitation of the moving hole, the sampling head is connected with the top of the lifting ring and moves up and down with the lifting ring, by adjusting the height of the lifting ring, the sampling head can be deep into the inside of the sample box at different depths, realizing the multi-layer collection of the sample, which not only improves the sampling efficiency, but also ensures the representativeness and uniformity of the sampling, so that the whole sampling process is very accurate and reliable. BRIEF DESCRIPTION OF DRAWINGS
[0021] Figure 1 It is a whole structure schematic view of the raw material sampling device for photoresist production of the application;
[0022] Figure 2 It is a top view structure schematic view of the raw material sampling device for photoresist production of the application;
[0023] Figure 3 It is a structure schematic view of the sampling mechanism in the raw material sampling device for photoresist production of the application;
[0024] Figure 4 It is a split structure schematic view of the sampling mechanism in the raw material sampling device for photoresist production of the application;
[0025] Figure 5It is a partial exploded view of the sampling mechanism in the raw material sampling device for photoresist production of the present application.
[0026] Figure 6 It is a partial structure schematic view of the raw material sampling device for photoresist production of the present application.
[0027] Figure 7 It is a structure schematic view of the lifting mechanism in the raw material sampling device for photoresist production of the present application.
[0028] Figure 8 It is a partial internal structure schematic view of the lifting mechanism in the raw material sampling device for photoresist production of the present application.
[0029] Figure 9 It is a partial exploded view of the lifting mechanism in the raw material sampling device for photoresist production of the present application.
[0030] In the figure: 1, bottom plate; 2, storage box; 3, lifting mechanism; 31, fixed strip; 311, moving hole; 32, lifting ring; 33, sampling head; 331, conveying pipe; 34, lifting rod; 35, lifting block; 36, first air cylinder; 361, first fixed plate; 37, moving rod; 38, first fixed rod; 39, scissor frame; 4, material taking pump; 41, discharge pipe; 5, sampling mechanism; 51, fixed frame; 52, first sliding rod; 53, moving sleeve; 531, second sliding rod; 532, baffle; 54, movable block; 541, second fixed plate; 542, second fixed rod; 55, swing rod; 551, first limiting hole; 552, second limiting hole; 56, movable rod; 561, rotating frame; 562, sliding block; 563, rotating rod; 57, first crank; 571, first pushing rod; 572, first driving block; 58, spring; 59, second crank; 591, second pushing rod; 592, second driving block; 6, sample storage box; 7, driving motor; 71, belt transmission part; 8, sampling part; 81, second air cylinder; 82, mounting frame; 83, sampling pipe; 84, piston rod; 9, huizi frame. DETAILED DESCRIPTION
[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0032] Embodiment one: refer to Figure 1 - Figure 6The utility model discloses a raw material sampling device for photoresist production, including bottom plate 1 and its top one side fixed mounting storage tank 2, the bottom plate 1 top one side is installed with the material taking pump 4, and the storage tank 2 inner side is installed with the lifting mechanism 3, and the bottom plate 1 top one side is fixedly connected with the back -shaped frame 9, and the back -shaped frame 9 top is installed with sampling mechanism 5.
[0033] Sampling mechanism 5 includes fixed frame 51 and swing rod 55, and the first slide 52 is fixedly connected with the top end inner side of fixed frame 51, and the mobile sleeve 53 is slidably connected with the surface of first slide 52, and the swing rod 55 one end is rotatably connected with the bottom end of fixed frame 51, and the second slide 531 is fixedly connected with the bottom of mobile sleeve 53, and the movable block 54 is slidably connected with the outer surface of second slide 531, and the second fixed rod 542 is fixedly connected with the bottom of movable block 54, and the rotary frame 561 is rotatably connected with one side of movable block 54, and the movable rod 56 is fixedly connected with the bottom of rotary frame 561, and the sliding block 562 is slidably connected with the outer surface of movable rod 56, and the spring 58 is installed between rotary frame 561 and sliding block 562, and the spring 58 is sleeved on the outer surface of movable rod 56, and the rotary rod 563 is fixedly connected with the side wall of sliding block 562, and the second crank 59 is fixedly connected with the outer surface of rotary rod 563, and the second push rod 591 is fixedly connected with the one end side wall of second crank 59, and the second limiting hole 552 is formed in the top end of swing rod 55, and the first limiting hole 551 is formed in the bottom end of swing rod 55, and the second drive block 592 is slidably connected with the inner side of second limiting hole 552, and the second push rod 591 is rotatably connected with the outer surface of second drive block 592, and the sampling piece 8 is installed on one side of movable block 54.
[0034] In the embodiment, when sampling, the photoresist in the storage tank 2 is sampled by the material taking pump 4 cooperating with the sampling head 33, so as to be transported to the sample storage box 6 through the discharge pipe 41. Then, the inside of the sample storage box 6 is partially sampled by the sampling piece 8, and multiple sampling can be carried out, so as to divide the samples in the sample storage box 6 into multiple groups. When the samples are divided by the sampling mechanism 5, the power of the driving motor 7 is transmitted to the first crank 57 through the belt transmission 71, so as to drive the first push rod 571 to move, and make it start to move in a circular motion. In this process, the first push rod 571 will drive the first drive block 572 to move together. At this time, the first drive block 572 will slide in the first limiting hole 551, so as to make the first crank 57 continue to rotate. The cooperation of the first push rod 571 and the first drive block 572 will exert force on the swing rod 55, so that the swing rod 55 swings when moving. Due to the swing of the swing rod 55, the second drive block 592 can slide in the second limiting hole 552, so as to exert a reverse force on the second push rod 591, so that the second crank 59 starts to move.
[0035] Because the linear velocity of the second push rod 591 is different due to the rotation of the swing rod 55, the second crank 59 cannot complete a complete circular motion when rotating. With the continuous swing of the swing rod 55, the second crank 59 will also swing. During the movement, the rotating rod 563 transmits the force to the sliding block 562, so that the movable rod 56 starts to swing.
[0036] The swing of the movable rod 56 will cause the movement of the movable block 54, thereby controlling the movement of the second fixed rod 542, so as to control the movement of the sampling member 8. With the change of the position of the sampling member 8, the sample in the sample storage box 6 can be sampled through the sampling tube 83, and by controlling the movement of the movable rod 56, the consistency and repeatability of sampling are ensured. Each sampling can be completed under the same standard and condition, which ensures the same sampling amount. Such consistency not only improves the reliability of data, but also makes the subsequent analysis and comparison of experimental data more scientific and reasonable. Through this fully automated sampling system, the sampling process is carried out in a closed environment, which maximizes the reduction of these risks, so as to obtain a more pure sample which truly reflects the characteristics of the sample in the sample storage box 6.
[0037] Embodiment two: Figure 3 - Figure 6 As shown, the bottom end side wall of the fixed frame 51 is rotatably connected with the first crank 57, one end side wall of the first crank 57 is fixedly connected with the first push rod 571, the outer surface of the first push rod 571 is rotatably connected with the first driving block 572, and the first driving block 572 is slidably connected with the first limiting hole 551. One end of the rotating rod 563 is rotatably connected with the fixed frame 51, the bottom of the movable block 54 is fixedly connected with the second fixed plate 541, the bottom end of the moving sleeve 53 is fixedly connected with the baffle 532, and the inner diameter of the movable block 54 is smaller than the outer diameter of the baffle 532. The inside of the H-shaped frame 9 is installed with the driving motor 7, the output end of the driving motor 7 is fixedly connected with the belt transmission member 71, and the driven wheel of the belt transmission member 71 is fixedly connected with one end of the first crank 57. The sampling member 8 comprises a mounting frame 82, one end of the mounting frame 82 is fixedly connected with the bottom end of the second fixed rod 542, and the side wall of the movable block 54 is fixedly connected with the second fixed plate 541. The top of the second fixed plate 541 is installed with the second air cylinder 81, the inside of the mounting frame 82 is installed with the sampling tube 83, the inside of the sampling tube 83 is slidably connected with the piston rod 84, and the top of the piston rod 84 is fixedly connected with the bottom output end of the second air cylinder 81.
[0038] In this embodiment, during the sampling process, when the movable rod 56 is subjected to the force generated by the sliding block 562, the swing not only causes the movable rod 56 to move, but also effectively transmits the force it bears to the rotating frame 561. The rotating frame 561 is also pushed by the additional force of the spring 58, causing relative sliding between the movable rod 56 and the sliding block 562. In this process, the continuous swing of the movable rod 56 will cause the rotating frame 561 to further transmit the force to the movable block 54, prompting the moving sleeve 53 to slide on the surface of the first slide rod 52.
[0039] As the moving sleeve 53 moves towards one end of the first slide rod 52, when it reaches the end, it will not be able to continue to move forward due to the restriction of the fixed frame 51. This restriction means that at this time, the swing of the movable rod 56 will not be able to continue to transmit the force to the moving sleeve 53, causing the entire system to enter a relatively static state.
[0040] At the same time, the movable block 54, under the action of the force, begins to slide on the surface of the second slide rod 531 to control its own downward movement. As the movable block 54 moves downward, it will drive the second fixed rod 542 and the second fixed plate 541 to move downward together, so that the bottom end of the sampling tube 83 can be inserted into the inside of the sample box 6. This design makes the sampling process smooth, ensuring that the internal liquid sample can be effectively obtained.
[0041] After the sampling is completed, the second cylinder 81 can be used to control the movement of the piston rod 84 to achieve the suction of the internal photoresist. This process requires precise control to ensure accurate and complete sampling. In this process, the swing rod 55 will produce a cyclic reciprocating force under the continuous action of the first crank 57, thereby enhancing the coordination between the first crank 57, the movable rod 56 and other related structures. In this way, the movable block 54 will perform linear motion back and forth.
[0042] During the linear motion of the movable block 54, the two endpoints of its motion trajectory will undergo up and down movement changes. This up and down movement design makes the sampling process more efficient and convenient, ensuring that after the entire sampling is completed, the final sample can be evenly distributed inside the sample box. The design of this system not only improves the efficiency of sampling, but also ensures the stability and reliability of the sampling quality, making the suction and sampling process of the photoresist more smooth.
[0043] Embodiment Three: According to Figure 7 - Figure 9As shown, the lifting mechanism 3 includes a fixed bar 31 and a first cylinder 36, the inside of the fixed bar 31 is slidably connected with a lifting block 35, one end of the lifting block 35 is fixedly connected with a lifting rod 34, the inside of the fixed bar 31 is rotatably connected with a first fixed rod 38, the top of the first fixed rod 38 is rotatably connected with a scissor frame 39. The top end of the first cylinder 36 is fixedly connected with the inner wall of the storage box 2, the output end of the first cylinder 36 is fixedly connected with a first fixed plate 361, the bottom end of the first fixed plate 361 is fixedly connected with the lifting rod 34, one end of the lifting rod 34 is fixedly connected with the top of the scissor frame 39. The inside of the fixed bar 31 is provided with a moving hole 311, the inside of the moving hole 311 is slidably connected with a lifting ring 32, one end of the lifting ring 32 penetrates through the moving hole 311, one end of the lifting ring 32 is fixedly connected with a moving rod 37, and the moving rod 37 is rotatably connected with the scissor frame 39. The inside of the lifting ring 32 is fixedly connected with a sampling head 33, the top of the sampling head 33 is fixedly communicated with a conveying pipe 331, one end of the conveying pipe 331 is fixedly communicated with a sampling pump 4, the output end of the sampling pump 4 is fixedly connected with a discharge pipe 41, and the top of the bottom plate 1 is provided with a sample storage box 6. The output end of the discharge pipe 41 is located above the sample storage box 6.
[0044] In this embodiment, during the sampling process, the force generated by the first cylinder 36 can effectively push the first fixed plate 361 to move in the active direction. With the continuous movement of the first fixed plate 361, its displacement will be directly transmitted to the lifting rod 34 connected therewith, so that the lifting rod 34 begins to move up and down. The movement of the lifting rod 34 is not only one-way, but also drives the lifting block 35 to slide inside the fixed bar 31. This sliding process is very critical because it provides the necessary up-down adjustment space for subsequent sampling.
[0045] In particular, when the force generated at the bottom end of the lifting rod 34 is transmitted to the scissor frame 39, since the first fixed rod 38 is firmly fixed inside the fixed bar 31, the scissor frame 39 can effectively respond to this force. The bottom end of the scissor frame 39 begins to drive the moving rod 37 to slide, resulting in the gradual unfolding of the scissor frame 39.
[0046] At the same time, the unfolding of the scissor frame 39 also controls the position of the lifting ring 32, so that the lifting ring 32 can perform precise linear lifting motion under the limitation of the moving hole 311. This design ensures that the adjustment of the lifting ring 32 during sampling is controlled and predictable. The movement path of the lifting ring 32 is actually limited by the design, so that its activity range can be accurately set, thereby avoiding unnecessary damage or mis-sampling.
[0047] In addition, the sampling head 33 is directly connected to the top of the lifting ring 32, and moves correspondingly with the lifting ring 32. The design of the lifting ring 32 allows it to move up and down accurately in the vertical direction, which is crucial for the flexible positioning of the sampling head 33. By adjusting the height of the lifting ring 32, the sampling head 33 can reach different depths inside the sample box 6, achieving multi-level sampling of the sample. This design not only improves the efficiency of sampling, but also ensures the representativeness and uniformity of the sampled sample.
[0048] The working principle and method of using the device: during sampling, the first fixed plate 361 is moved by the force of the first cylinder 36, and as the first fixed plate 361 continues to move, it drives the lifting rod 34 to lift. At this time, the lifting rod 34 drives the lifting block 35 to slide inside the fixed strip 31. In this process, the force at the bottom end of the lifting rod 34 is transmitted to the scissor frame 39, and since the first fixed rod 38 is fixed to the inside of the fixed strip 31, the bottom end of the scissor frame 39 can drive the moving rod 37 to slide. This not only causes the scissor frame 39 to gradually expand, but also controls the position of the lifting ring 32, so that one end of the lifting ring 32 moves linearly under the restriction of the moving hole 311. At the same time, the sampling head 33 moves inside the storage box 2 under the drive of the lifting ring 32, achieving sampling at different depths.
[0049] During sampling, the storage pump 4 cooperates with the sampling head 33 to sample the photoresist inside the storage box 2, and transports it to the sample box 6 through the discharge pipe 41. In this process, the sample box 6 is partially sampled by the sampling member 8, which can achieve multiple sampling and divide the sample inside the sample box 6 into multiple groups.
[0050] When the sampling mechanism 5 is sampling, the power of the driving motor 7 is transmitted to the first crank 57 through the belt transmission 71, so that the first crank 57 starts to move and drives the first push rod 571 to move in a circular motion. In this process, the first push rod 571 drives the first driving block 572 to move together, and at this time, the first driving block 572 slides inside the first limiting hole 551, so that the first crank 57 rotates. The first push rod 571 and the first driving block 572 jointly act on the swing rod 55, causing the swing rod 55 to swing when it moves. Due to the swing of the swing rod 55, the second driving block 592 will slide inside the second limiting hole 552, and the second push rod 591 will be reversely acted on, so that the second crank 59 starts to move. Due to the rotation of the swing rod 55, the linear speed of the second push rod 591 is different, so that the second crank 59 cannot move in a complete circular motion when it rotates. With the continuous swing of the swing rod 55, the second crank 59 will also swing. When the rotating rod 563 moves with the second crank 59, it will transmit the force to the sliding block 562, so that the movable rod 56 starts to swing.
[0051] The swing of the movable rod 56 will cause the movement of the movable block 54, so as to control the movement of the second fixed rod 542, so as to adjust the position of the sampling piece 8. With the change of the position of the sampling piece 8, the sample in the sample box 6 can be sampled through the sampling tube 83.
[0052] In the sampling process, when the movable rod 56 is swung by the action of the sliding block 562, it will transmit the force to the rotating frame 561. Due to the action of the spring 58, the rotating frame 561 will be pushed, causing the relative sliding of the movable rod 56 and the sliding block 562. In this process, the continuous movement of the movable rod 56 will make the rotating frame 561 transmit the force to the movable block 54, so that the moving sleeve 53 slides on the surface of the first sliding rod 52. When the moving sleeve 53 moves to one end of the first sliding rod 52, it cannot continue to move due to the limitation of the fixed frame 51, and at this time, the swing of the movable rod 56 cannot transmit the force to the moving sleeve 53.
[0053] Therefore, after the movable block 54 is acted on, it will slide on the surface of the second sliding rod 531, control the movable block 54 to move downward, drive the second fixed rod 542 and the second fixed plate 541 to move downward together, so that the bottom end of the sampling tube 83 is inserted into the sample box 6. Then, the piston rod 84 is controlled to move by the second cylinder 81, so that the inside photoresist can be sucked.
[0054] With the swing lever 55 continuously subjected to the force from the first crank 57, the first crank 57 cooperates with the force from the swing lever 56 and other structures to make the movable block 54 move linearly back and forth. At the two ends of the linear motion, the movable block 54 also moves up and down, so that after the sampling in the sample box 6 is completed, the sample can be evenly divided in the sample box.
[0055] Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can make modifications to the technical solutions recorded in the foregoing embodiments, or make equivalent replacements to some of the technical features, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.
Claims
1. A raw material sampling device for photoresist production, comprising a base plate (1) and a storage box (2) fixedly installed on one side of the top of the base plate (1), and a sampling pump (4) is installed on one side of the top of the base plate (1), characterized in that: The inside of the storage box (2) is provided with a lifting mechanism (3), one side of the top of the bottom plate (1) is fixedly connected with a back-to-back frame (9), and the top of the back-to-back frame (9) is provided with a sampling mechanism (5); The sampling mechanism (5) comprises a fixed frame (51) and a swing rod (55), the inner side of the top end of the fixed frame (51) is fixedly connected with a first sliding rod (52), the surface of the first sliding rod (52) is slidably connected with a moving sleeve (53), one end of the swing rod (55) is rotatably connected with the bottom end of the fixed frame (51), the bottom of the moving sleeve (53) is fixedly connected with a second sliding rod (531), the outer surface of the second sliding rod (531) is slidably connected with a movable block (54), the bottom of the movable block (54) is fixedly connected with a second fixed rod (542), one side of the movable block (54) is rotatably connected with a rotating frame (561), the bottom of the rotating frame (561) is fixedly connected with a movable rod (56), the outer surface of the movable rod (56) is slidably connected with a sliding block (562), a spring (58) is arranged between the rotating frame (561) and the sliding block (562), the spring (58) is sleeved on the outer surface of the movable rod (56), the side wall of the sliding block (562) is fixedly connected with a rotating rod (563), the outer surface of the rotating rod (563) is fixedly connected with a second crank (59), one end of the side wall of the second crank (59) is fixedly connected with a second push rod (591), the top end of the swing rod (55) is provided with a second limiting hole (552), the bottom end of the swing rod (55) is provided with a first limiting hole (551), the inner side of the second limiting hole (552) is slidably connected with a second driving block (592), the outer surface of the second push rod (591) is rotatably connected with the second driving block (592), and one side of the movable block (54) is provided with a sampling piece (8). 2.The raw material sampling device for photoresist production of claim 1, wherein: The bottom end of the fixed frame (51) is rotatably connected with a first crank (57), one end of the side wall of the first crank (57) is fixedly connected with a first push rod (571), and the outer surface of the first push rod (571) is rotatably connected with a first driving block (572), and the first driving block (572) is slidably connected with the first limiting hole (551). 3.The raw material sampling device for photoresist production of claim 2, wherein: One end of the rotating rod (563) is rotatably connected with the fixed frame (51), the bottom of the movable block (54) is fixedly connected with a second fixed plate (541), the bottom end of the moving sleeve (53) is fixedly connected with a baffle (532), and the inner diameter of the movable block (54) is smaller than the outer diameter of the baffle (532).
4. The raw material sampling device for photoresist production according to claim 3, characterized in that: The inside of the back-to-back frame (9) is provided with a driving motor (7), the output end of the driving motor (7) is fixedly connected with a belt transmission part (71), and the driven wheel of the belt transmission part (71) is fixedly connected with one end of the first crank (57).
5. The raw material sampling device for photoresist production according to claim 1, characterized in that: The sampling piece (8) comprises a mounting frame (82), one end of the mounting frame (82) is fixedly connected with the bottom end of the second fixed rod (542), and the side wall of the movable block (54) is fixedly connected with the second fixed plate (541).
6. The raw material sampling device for photoresist production according to claim 5, characterized in that: The second fixed plate (541) top is mounted with the second cylinder (81), the mounting frame (82) inside is mounted with the sampling pipe (83), the sampling pipe (83) inside is slidably connected with the piston rod (84), the piston rod (84) top is fixedly connected with the second cylinder (81) bottom output end. 7.The raw material sampling device for photoresist production of claim 1, wherein: The lifting mechanism (3) includes a fixed strip (31) and a first cylinder (36), the fixed strip (31) is slidably connected with a lifting block (35), one end of the lifting block (35) is fixedly connected with a lifting rod (34), the fixed strip (31) is rotatably connected with a first fixed rod (38), the first fixed rod (38) top is rotatably connected with a shear frame (39). 8.The raw material sampling device for photoresist production of claim 7, wherein: The first cylinder (36) top end is fixedly connected with the inner wall of the storage box (2), the first cylinder (36) output end is fixedly connected with a first fixed plate (361), the first fixed plate (361) bottom end is fixedly connected with the lifting rod (34), one end of the lifting rod (34) is fixedly connected with the top of the shear frame (39). 9.The raw material sampling device for photoresist production of claim 8, wherein: The fixed strip (31) inside is provided with a moving hole (311), the moving hole (311) inside is slidably connected with a lifting ring (32), one end of the lifting ring (32) penetrates the moving hole (311), one end of the lifting ring (32) is fixedly connected with a moving rod (37), the moving rod (37) is rotatably connected with the shear frame (39). 10.The raw material sampling device for photoresist production of claim 9, wherein: The lifting ring (32) inside is fixedly connected with a sampling head (33), the sampling head (33) top is fixedly connected with a conveying pipe (331), one end of the conveying pipe (331) is fixedly communicated with a material taking pump (4), the material taking pump (4) output end is fixedly connected with a discharge pipe (41), the bottom plate (1) top is mounted with a sample storage box (6), the discharge pipe (41) output end is located above the sample storage box (6).
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