Method and system for adjusting symmetry of radio frequency voltage

Abstract

The invention provides a radio frequency voltage symmetry adjustment method and system, and relates to the technical field of radio frequency. The method comprises the steps that a driving module generates a radio frequency driving signal at the current moment and outputs the radio frequency driving signal to a power module, so that the power module provides a resonance energy signal for a resonance module, the resonance module generates a positive radio frequency voltage and a negative radio frequency voltage under the action of the resonance energy signal, and a feedback module detects the positive radio frequency voltage and the negative radio frequency voltage respectively and outputs the positive radio frequency voltage and the negative radio frequency voltage. If the positive feedback voltage and the negative feedback voltage do not meet a preset voltage symmetry condition, the driving module controls the temperature control module to heat a magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current moment, and the power module is powered on; enabling the resonance module to generate the adjusted positive radio frequency voltage and the adjusted negative radio frequency voltage until the adjusted positive radio frequency voltage and the adjusted negative radio frequency voltage meet a preset voltage symmetry condition, and obtaining the positive radio frequency voltage and the negative radio frequency voltage with symmetrical amplitudes.

Description

Technical Field

[0001] The present invention relates to the field of radio frequency technology, and in particular to a method and system for adjusting radio frequency voltage symmetry. Background Art

[0002] At present, there are two ways to generate RF voltage for quadrupoles: parallel resonance and series resonance. Series resonance is more complicated for the circuit system, requiring two sets of identical driving circuits to generate RF voltages with the same amplitude and a phase difference of 180°. Parallel resonance can adjust the coupling mode of the primary and secondary coils to generate RF voltages with the same amplitude and a phase difference of 180°. However, it is difficult to ensure the symmetry of the RF voltage amplitude.

[0003] The existing technology is to change the symmetry of RF voltage by changing the number of turns of the coil. In this process, manual adjustment is mainly used, and synchronous measurement is required during the adjustment. In addition, the external measurement process will affect its own resonance, making the adjustment process very troublesome and the accuracy is not high. Summary of the invention

[0004] The object of the present invention is to provide a method and system for adjusting RF voltage symmetry in view of the deficiencies in the above-mentioned prior art, so that by changing the temperature of the magnetic core, the resonant module can generate positive RF voltage and negative RF voltage with symmetrical RF voltage amplitude.

[0005] To achieve the above purpose, the technical solution adopted in the embodiment of the present application is as follows:

[0006] In a first aspect, an embodiment of the present application provides a method for adjusting RF voltage symmetry, which is applied to a RF voltage symmetry adjustment system, wherein the RF voltage symmetry adjustment system includes: a driving module, a power module, a resonance module, a feedback module, and a temperature control module, and the method includes:

[0007] The driving module generates and outputs a radio frequency driving signal to the power module at a current moment, so that the power module provides a resonance energy signal for the resonance module;

[0008] The resonance module generates a positive radio frequency voltage and a negative radio frequency voltage under the action of the resonance energy signal;

[0009] The feedback module detects the positive RF voltage and the negative RF voltage respectively, obtains and feeds back the positive feedback voltage and the negative feedback voltage at the current moment to the driving module;

[0010] If the positive feedback voltage and the negative feedback voltage do not satisfy the preset voltage symmetry condition, the driving module controls the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonance module generates adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and negative RF voltage satisfy the preset voltage symmetry condition.

[0011] In an optional implementation, the driving module controls the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonance module generates adjusted positive RF voltage and negative RF voltage, including:

[0012] The driving module calculates the current control amount using a preset control algorithm according to the positive feedback voltage and the negative feedback voltage;

[0013] The driving module determines the heating output power of the temperature control module according to the current control amount;

[0014] The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonance module generates adjusted positive radio frequency voltage and negative radio frequency voltage.

[0015] In an optional implementation manner, the driving module calculates the current control amount using a preset control algorithm according to the positive feedback voltage and the negative feedback voltage, including:

[0016] The driving module calculates a current voltage error according to the positive feedback voltage and the negative feedback voltage, and calculates a current control increment according to the current voltage error and the historical voltage error by using the preset control algorithm;

[0017] The driving module calculates the current control amount according to the current control increment and the control amount corresponding to the historical voltage error.

[0018] In an optional implementation manner, the calculating the current control increment according to the current voltage error and the historical voltage error by using the preset control algorithm includes:

[0019] According to the current voltage error and the historical voltage error, the preset control algorithm is used to calculate a first contribution, a second contribution, and a third contribution;

[0020] The first contribution, the second contribution and the third contribution are accumulated to obtain the current control increment.

[0021] In an optional implementation manner, the historical voltage error includes: a voltage error at a first moment and a voltage error at a second moment, wherein the first moment is a moment before the current moment, and the second moment is a moment before the first moment; the calculating the first contribution, the second contribution, and the third contribution according to the current voltage error and the historical voltage error using the preset control algorithm includes:

[0022] determining the first contribution according to the current voltage error, the voltage error at the first moment and a preset proportional control parameter;

[0023] Determining the second contribution according to the current voltage error and a preset integral control parameter;

[0024] The third contribution is determined according to the current voltage error, the voltage error at the first moment, the voltage error at the second moment, and a preset differential control parameter.

[0025] In an optional embodiment, the driving module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonance module generates adjusted positive RF voltage and negative RF voltage, including:

[0026] The driving module calculates a heating driving duty cycle according to the heating output power, and generates a heating driving signal according to the heating driving duty cycle;

[0027] The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating driving signal, so that the resonance module generates adjusted positive radio frequency voltage and negative radio frequency voltage.

[0028] In a second aspect, an embodiment of the present application provides a radio frequency voltage symmetry adjustment system, the radio frequency voltage symmetry adjustment system comprising: a driving module, a power module, a resonance module, a feedback module and a temperature control module, wherein the first output end of the driving module is connected to the input end of the power module, and the output end of the power module is connected to the input end of the resonance module; the output end of the resonance module is connected to the input end of the feedback module, and the output end of the feedback module is connected to the input end of the driving module; the second output end of the driving module is connected to the input end of the temperature control module, and the output end of the temperature control module is connected to the magnetic core of the power module;

[0029] The driving module is used to generate and output a radio frequency driving signal to the power module; the power module is used to provide a resonance energy signal to the resonance module; the resonance module is used to generate a positive radio frequency voltage and a negative radio frequency voltage under the action of the resonance energy signal; the feedback module is used to detect the positive radio frequency voltage and the negative radio frequency voltage respectively, obtain and feed back a positive feedback voltage and a negative feedback voltage to the driving module;

[0030] The driving module is also used to control the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage when the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition, so that the resonance module generates adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and negative RF voltage meet the preset voltage symmetry condition.

[0031] In an optional implementation, the driving module includes: a control unit, a digital-to-analog conversion unit, a differential-integral circuit, a mixer and a direct data generator, wherein a first output end of the control unit is connected to an input end of the digital-to-analog conversion unit, an output end of the digital-to-analog conversion unit is connected to an input end of the differential-integral circuit, an output end of the differential-integral circuit is connected to an input end of the mixer, an output end of the mixer is a first output end of the driving module, and an output end of the mixer is connected to an input end of the power module;

[0032] The second output end of the control unit is the second output end of the driving module, the second output end of the control unit is connected to the input end of the temperature control module, the second output end of the control unit is also connected to the input end of the direct data generator, and the output end of the direct data generator is connected to the input end of the mixer.

[0033] In an optional embodiment, the power module includes: a power amplifier and a transformer, the input end of the power amplifier is the input end of the power module, the output end of the power amplifier is connected to the primary side of the transformer, and the secondary side of the transformer is connected to the input end of the resonance module.

[0034] In an optional embodiment, the temperature control module includes: a switch unit, a heating plate and a temperature measuring plate, the input end of the switch unit is the input end of the temperature control module, the output end of the switch unit is connected to the heating plate, the heating plate and the temperature measuring plate wrap the magnetic core of the transformer in the power module, and the temperature measuring plate is also connected to the control unit in the driving module.

[0035] The beneficial effects of this application are:

[0036] The embodiment of the present application provides a method and system for adjusting RF voltage symmetry, the method comprising: a driving module generates and outputs an RF driving signal to a power module at a current moment, so that the power module provides a resonant energy signal to the resonant module, the resonant module generates a positive RF voltage and a negative RF voltage under the action of the resonant energy signal, the feedback module detects the positive RF voltage and the negative RF voltage respectively, obtains and feeds back the positive feedback voltage and the negative feedback voltage at the current moment to the driving module, if the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition, the driving module controls the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonant module generates adjusted positive RF voltage and negative RF voltage, until the adjusted positive RF voltage and negative RF voltage meet the preset voltage symmetry condition, thereby changing the temperature of the magnetic core so that the resonant module generates positive RF voltage and negative RF voltage with symmetrical RF voltage amplitudes. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0038] Figure 1 A schematic diagram of the structure of a radio frequency voltage symmetry adjustment system provided in an embodiment of the present application;

[0039] Figure 2 One of the flow charts of a method for adjusting symmetry of radio frequency voltage provided in an embodiment of the present application;

[0040] Figure 3 A second flow chart of a method for adjusting symmetry of radio frequency voltage provided in an embodiment of the present application;

[0041] Figure 4 A third flow chart of a method for adjusting symmetry of radio frequency voltage provided in an embodiment of the present application;

[0042] Figure 5 A fourth flow chart of a method for adjusting symmetry of radio frequency voltage provided in an embodiment of the present application;

[0043] Figure 6 The fifth flowchart of a method for adjusting RF voltage symmetry provided in an embodiment of the present application.

[0044] Description of main component symbols: 110 - drive module; 120 - power module; 130 - resonance module; 140 - feedback module; 150 - temperature control module; C1 - first capacitor; C2 - second capacitor; C3 - third capacitor; C4 - fourth capacitor; C5 - fifth capacitor. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments.

[0046] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0047] In the description of the present application, it should be noted that if the terms "upper", "lower", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, or is the orientation or position relationship in which the product of the application is usually placed when used. It is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0048] In addition, the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0049] It should be noted that, in the absence of conflict, the features in the embodiments of the present application may be combined with each other.

[0050] Figure 1 This is a schematic diagram of the structure of a radio frequency voltage symmetry adjustment system provided in an embodiment of the present application. Figure 1As shown, the RF voltage symmetry adjustment system includes: a driving module 110, a power module 120, a resonance module 130, a feedback module 140 and a temperature control module 150, wherein the first output end of the driving module 110 is connected to the input end of the power module 120, and the output end of the power module 120 is connected to the input end of the resonance module 130; the output end of the resonance module 130 is connected to the input end of the feedback module 140, and the output end of the feedback module 140 is connected to the input end of the driving module 110; the second output end of the driving module 110 is connected to the input end of the temperature control module 150, and the output end of the temperature control module 150 is connected to the magnetic core of the power module 120.

[0051] The driving module 110 is used to generate and output a radio frequency driving signal to the power module 120; the power module 120 is used to provide a resonance energy signal to the resonance module 130; the resonance module 130 is used to generate a positive radio frequency voltage and a negative radio frequency voltage under the action of the resonance energy signal; the feedback module 140 is used to respectively detect the positive radio frequency voltage and the negative radio frequency voltage, obtain and feed back the positive feedback voltage and the negative feedback voltage to the driving module 110.

[0052] The driving module 110 is also used to control the temperature control module 150 to heat the magnetic core of the power module 120 according to the positive feedback voltage and the negative feedback voltage when the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition, so that the resonance module 130 generates adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and the negative RF voltage meet the preset voltage symmetry condition.

[0053] In this embodiment, the input end of the driving module 110 is also connected to the interactive device. After the interactive device issues a command to generate a radio frequency voltage, the driving module 110 generates and outputs a radio frequency driving signal to the power module 120 according to the received command.

[0054] Optionally, the driving module 110 includes: a control unit, a digital-to-analog conversion unit DAC, a differential-integral circuit (PID circuit), a mixer and a direct data generator DDS, the first output end of the control unit is connected to the input end of the digital-to-analog conversion unit DAC, the output end of the digital-to-analog conversion unit DAC is connected to the input end of the differential-integral circuit (PID circuit), the output end of the differential-integral circuit (PID circuit) is connected to the input end of the mixer, the output end of the mixer is the first output end of the driving module 110, and the output end of the mixer is connected to the input end of the power module 120.

[0055] Specifically, the second output end of the control unit is the second output end of the driving module 110, the second output end of the control unit is connected to the input end of the temperature control module 150, the second output end of the control unit is also connected to the input end of the direct data generator DDS, and the output end of the direct data generator DDS is connected to the input end of the mixer.

[0056] After receiving the command sent by the interactive device, the control unit sends a radio frequency voltage corresponding to the mass number of 500, and then generates a radio frequency driving signal through the digital-to-analog conversion unit, differential-integral circuit, mixer and direct data generator in the driving module 110.

[0057] Optionally, the power module 120 includes: a power amplifier D1 and a transformer, the input end of the power amplifier D1 is the input end of the power module 120 , the output end of the power amplifier D1 is connected to the primary side of the transformer, and the secondary side of the transformer is connected to the input end of the resonance module 130 .

[0058] Specifically, after the power module 120 receives the RF drive signal sent by the driving module 110, the RF drive signal is amplified by the power amplifier D1 to provide a resonant energy signal for the resonance module 130, wherein the power amplifier D1 can be a metal-oxide semiconductor field effect transistor (MOSFET), the gate of the transistor is connected to the output end of the driving module 110, the drain of the transistor is connected to the primary side of the transformer, and the source of the transistor is grounded.

[0059] The resonance module 130 includes: a quadrupole, which is composed of four cylindrical or hyperbolic cylindrical electrodes parallel to and equidistant from the central axis to form two groups of positive and negative electrodes, which are respectively applied with two groups of DC voltages and radio frequency voltages to form a dynamic electric field, a group of positive electrodes includes a first positive electrode and a second positive electrode, one end of the first positive electrode is connected to the first coil of the secondary side of the transformer, and the other end of the first positive electrode is connected to the second positive electrode, the first positive electrode and the second positive electrode generate a positive radio frequency voltage, and the connection point of the first positive electrode and the second positive electrode is connected to the feedback module 140, and the feedback module 140 can detect the positive radio frequency voltage.

[0060] A group of negative electrodes includes a first negative electrode and a second negative electrode, one end of the first negative electrode is connected to the second coil of the secondary side of the transformer, the other end of the first negative electrode is connected to the second negative electrode, the first negative electrode and the second negative electrode generate a negative RF voltage, and the connection point of the first negative electrode and the second negative electrode is connected to the feedback module 140, and the feedback module 140 can detect the negative RF voltage.

[0061] One end of the first coil of the secondary side of the transformer is connected to one end of the second coil through the first capacitor C1, the other end of the first coil is grounded through the second capacitor C2, and the other end of the second coil is grounded through the third capacitor C3.

[0062] The feedback module 140 is composed of two identical feedback circuits, each feedback circuit includes: a voltage divider circuit, a full-wave rectifier circuit and a filter circuit, wherein the input end of the first feedback circuit is connected to the connection point of the first positive electrode and the second positive electrode through the fourth capacitor C4, for detecting the positive RF voltage; the input end of the second feedback circuit is connected to the connection point of the first negative electrode and the second negative electrode through the fifth capacitor C5, for detecting the negative RF voltage, and the detected positive RF voltage and negative RF voltage are reduced to obtain positive feedback voltage and negative feedback voltage, and the control module in the driving module 110 can collect the positive feedback voltage and negative feedback voltage through a high-precision AD sampling chip.

[0063] After the driving module 110 obtains the positive feedback voltage and the negative feedback voltage, it determines whether the positive feedback voltage and the negative feedback voltage meet the preset voltage symmetry condition. If not, the temperature control module 150 is controlled to heat the magnetic core of the power module 120 according to the positive feedback voltage and the negative feedback voltage, so as to change the temperature of the magnetic core, so that the resonance module 130 generates adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and negative RF voltage meet the preset voltage symmetry condition.

[0064] Optionally, the temperature control module 150 includes: a switch unit, a heating plate and a temperature measuring plate. The input end of the switch unit is the input end of the temperature control module 150, and the output end of the switch unit is connected to the heating plate. The heating plate and the temperature measuring plate wrap the magnetic core of the transformer in the power module 120, and the temperature measuring plate is also connected to the control unit in the driving module 110.

[0065] Specifically, there are a first magnetic core and a second magnetic core between the primary and secondary sides of the transformer, the first magnetic core is located between the primary and the first coil, and the second magnetic core is located between the primary and the second coil. The heating plate and the temperature measuring plate can wrap any magnetic core of the transformer. If the heating plate and the temperature measuring plate wrap the first magnetic core, the control unit controls the temperature control module 150 to heat the first magnetic core wrapped by the heating plate to change the temperature of the first magnetic core; if the heating plate and the temperature measuring plate wrap the second magnetic core, the control unit controls the temperature control module 150 to heat the second magnetic core wrapped by the heating plate to change the temperature of the second magnetic core. The temperature measuring plate is used to measure the temperature of the magnetic core and feed back the temperature of the magnetic core to the control unit in real time. Figure 1 In the example provided, a heating plate and a temperature measuring plate wrap the first magnetic core for heating the first magnetic core, and no limitation is imposed on the magnetic core wrapped by the heating plate and the temperature measuring plate.

[0066] In summary, an embodiment of the present application provides a radio frequency voltage symmetry adjustment system, which includes: a driving module, a power module, a resonance module, a feedback module and a temperature control module, wherein the first output end of the driving module is connected to the input end of the power module, and the output end of the power module is connected to the input end of the resonance module; the output end of the resonance module is connected to the input end of the feedback module, and the output end of the feedback module is connected to the input end of the driving module; the second output end of the driving module is connected to the input end of the temperature control module, and the output end of the temperature control module is connected to the magnetic core of the power module; the driving module is used to generate and output a radio frequency driving signal to the power module; the power module is used to provide resonance for the resonance module energy signal; the resonance module is used to generate positive RF voltage and negative RF voltage under the action of the resonance energy signal; the feedback module is used to detect the positive RF voltage and the negative RF voltage respectively, obtain and feed back the positive feedback voltage and the negative feedback voltage to the driving module; the driving module is also used to control the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage when the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition, so that the resonance module generates adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and the negative RF voltage meet the preset voltage symmetry condition, that is, the resonance module generates positive RF voltage and negative RF voltage with symmetrical RF voltage amplitudes.

[0067] The embodiment of the present application also provides a method for adjusting RF voltage symmetry, which is applied to a RF voltage symmetry adjustment system. The RF voltage symmetry adjustment system includes: a driving module, a power module, a resonance module, a feedback module and a temperature control module. The RF voltage symmetry adjustment system is described in the above embodiment. Next, the RF voltage symmetry adjustment method provided in the embodiment of the present application is explained in detail through specific examples in combination with the accompanying drawings. Figure 2 One of the flow charts of a method for adjusting symmetry of radio frequency voltage provided in an embodiment of the present application is as follows: Figure 2 As shown, the method includes:

[0068] S101: The driving module generates and outputs a radio frequency driving signal to the power module at the current moment, so that the power module provides a resonance energy signal to the resonance module.

[0069] S102: The resonance module generates a positive radio frequency voltage and a negative radio frequency voltage under the action of the resonance energy signal.

[0070] S103 , the feedback module detects the positive RF voltage and the negative RF voltage respectively, obtains and feeds back the positive feedback voltage and the negative feedback voltage at the current moment to the driving module.

[0071] S104. If the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition, the driving module controls the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonance module generates adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and negative RF voltage meet the preset voltage symmetry condition.

[0072] In this embodiment, the input end of the driving module is also connected to the interactive device. After the interactive device sends a command to generate a radio frequency voltage, the control unit in the driving module sends a radio frequency voltage corresponding to a mass number of 500 according to the received command, and then generates a radio frequency driving signal at the current moment through the digital-to-analog conversion unit, differential-integral circuit, mixer and direct data generator in the driving module.

[0073] After the power module receives the current RF driving signal sent by the driving module, the power amplifier in the power module amplifies the power of the current RF driving signal to provide a resonance energy signal for the resonance module.

[0074] Under the action of the resonant energy signal, the quadrupole in the resonant module generates a positive RF voltage by a group of positive electrodes and a negative RF voltage by a group of negative electrodes. The two feedback circuits of the feedback module detect the positive RF voltage and the negative RF voltage in real time, reduce the detected positive RF voltage and the negative RF voltage to obtain the positive feedback voltage and the negative feedback voltage, and feed back the positive feedback voltage and the negative feedback voltage at the current moment to the driving module.

[0075] After the driving module collects the positive feedback voltage and negative feedback voltage at the current moment, it determines whether the positive feedback voltage and negative feedback voltage at the current moment meet the preset voltage symmetry condition, wherein the preset voltage symmetry condition is whether the amplitudes of the positive feedback voltage and the negative feedback voltage are equal, or whether the amplitude error of the positive feedback voltage and the negative feedback voltage is within a preset error range.

[0076] If the feedback voltage and negative feedback voltage at the current moment do not meet the preset voltage symmetry condition, the temperature control module is controlled to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage, so as to change the temperature of the magnetic core, so that the resonance module generates adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and negative RF voltage meet the preset voltage symmetry condition.

[0077] In summary, an embodiment of the present application provides a method for adjusting RF voltage symmetry, which is applied to an RF voltage symmetry adjustment system. The method includes: a driving module generates and outputs an RF driving signal to a power module at a current moment, so that the power module provides a resonant energy signal to the resonant module, and the resonant module generates a positive RF voltage and a negative RF voltage under the action of the resonant energy signal. The feedback module detects the positive RF voltage and the negative RF voltage respectively, obtains and feeds back the positive feedback voltage and the negative feedback voltage at the current moment to the driving module. If the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition, the driving module controls the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonant module generates adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and negative RF voltage meet the preset voltage symmetry condition, thereby changing the temperature of the magnetic core so that the resonant module generates positive RF voltage and negative RF voltage with symmetrical RF voltage amplitudes.

[0078] The embodiment of the present application also provides another possible implementation of the RF voltage symmetry adjustment method. Figure 3 The second flow chart of a method for adjusting symmetry of radio frequency voltage provided in the embodiment of the present application is as follows. Figure 3 As shown, the driving module controls the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonance module generates the adjusted positive RF voltage and the negative RF voltage, including:

[0079] S201 . The driving module calculates the current control amount according to the positive feedback voltage and the negative feedback voltage using a preset control algorithm.

[0080] S202: The driving module determines the heating output power of the temperature control module according to the current control amount.

[0081] S203: The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonance module generates adjusted positive radio frequency voltage and negative radio frequency voltage.

[0082] In this embodiment, the driving module determines that the positive feedback voltage and the negative feedback voltage do not satisfy the preset voltage symmetry condition. If the heating plate and the temperature measuring plate in the temperature control module are wrapped on the first magnetic core of the transformer, and the first magnetic core is located between the primary side and the first coil, then the temperature of the first magnetic core will affect the inductance generated by the first coil. Since the first coil is connected to the first positive electrode of a group of positive electrodes, the temperature of the first magnetic core will affect the positive RF voltage generated by a group of positive electrodes.

[0083] The positive feedback voltage is used as the target value, and the negative feedback voltage is used as the actual value. The preset control algorithm is used to calculate the current control quantity, and the heating output power of the temperature control module is determined. The temperature control module is controlled to heat the first magnetic core, change the temperature of the first magnetic core, and then change the positive RF voltage generated by a group of positive electrodes, so that the resonance module generates adjusted positive RF voltage and negative RF voltage.

[0084] Similarly, if the heating plate and the temperature measuring plate in the temperature control module are wrapped on the second magnetic core of the transformer, and the second magnetic core is located between the primary side and the second coil, the temperature of the second magnetic core will affect the inductance generated by the second coil. Since the second coil is connected to the first negative electrode of a group of positive electrodes, the temperature of the second magnetic core will affect the positive RF voltage generated by a group of negative electrodes.

[0085] The negative feedback voltage is taken as the target value, and the positive feedback voltage is taken as the actual value. The preset control algorithm is used to calculate the current control quantity, and the heating output power of the temperature control module is determined. The temperature control module is controlled to heat the second magnetic core, change the temperature of the second magnetic core, and then change the negative RF voltage generated by a group of negative electrodes, so that the resonance module generates adjusted positive RF voltage and negative RF voltage.

[0086] It should be noted that the calculation formula for the inductance generated by the coil is as follows:

[0087] L=(kμ0μ s N 2 *S) / I

[0088] Where μ0 is the vacuum magnetic permeability μ0=4π*10 -7 , μ s is the relative magnetic permeability of the magnetic core inside the coil, μ for an air-core coil s =1,N 2 is the square of the number of coil turns, S is the cross-sectional area of ​​the coil in square meters, I is the length of the coil in meters, and k is a coefficient that depends on the ratio of the radius (R) to the length (I) of the coil.

[0089] The relationship between temperature and relative magnetic permeability, taking manganese-zinc ferrite as an example, in general, as the temperature increases, the magnetic permeability of manganese-zinc ferrite will decrease. This is because the temperature increase will increase the thermal vibration between the magnetic particles, making it difficult for the magnetic particles to respond to the saturation magnetization intensity, thereby reducing the magnetic permeability. However, the general change of magnetic permeability with temperature is more complicated, which can be expressed by the following expression:

[0090] μ0=f(T)

[0091] Then the calculation formula of the inductance generated by the coil is adjusted to:

[0092] L=(kf(T)μ s N 2*S) / I

[0093] The inductance changes with temperature, so the inductance will cause the actual RF voltage to change. Temperature can change the actual RF voltage. The temperature control module is controlled to heat the magnetic core of the power module so that the resonance module generates positive RF voltage and negative RF voltage with symmetrical amplitude.

[0094] The driving module uses a preset control algorithm based on the positive feedback voltage and the negative feedback voltage to calculate the current control quantity as a numerical value, and then converts the current control quantity into a heating output power. For example, if the current control quantity is 5, the heating output power is 50%. Then, based on the heating output power, the temperature control module is controlled to heat the magnetic core of the power module.

[0095] In the method provided in the embodiment of the present application, the driving module calculates the current control quantity according to the positive feedback voltage and the negative feedback voltage using a preset control algorithm, and the driving module determines the heating output power of the temperature control module according to the current control quantity. The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonance module generates adjusted positive RF voltage and negative RF voltage, thereby achieving a change in the temperature of the magnetic core and obtaining positive RF voltage and negative RF voltage with symmetrical amplitude.

[0096] The embodiment of the present application also provides another possible implementation of the RF voltage symmetry adjustment method. Figure 4 The third flow chart of a method for adjusting symmetry of radio frequency voltage provided in the embodiment of the present application. Figure 4 As shown, the drive module uses a preset control algorithm to calculate the current control quantity according to the positive feedback voltage and the negative feedback voltage, including:

[0097] S301. The driving module calculates a current voltage error according to the positive feedback voltage and the negative feedback voltage, and calculates a current control increment according to the current voltage error and the historical voltage error using a preset control algorithm.

[0098] In this embodiment, the preset control algorithm is a proportional-integral-differential control algorithm (PID algorithm). First, the current voltage error f_err is calculated based on the positive feedback voltage and the negative feedback voltage, and then the PID algorithm is used to process the current voltage error f_err and the historical voltage error to obtain the current control increment f_deltaU.

[0099] S302: The driving module calculates a current control amount according to a current control increment and a control amount corresponding to a historical voltage error.

[0100] The current control quantity f_kU is obtained by summing the control quantity corresponding to the current control increment and the historical voltage error.

[0101] In the method provided in the embodiment of the present application, the driving module calculates the current voltage error based on the positive feedback voltage and the negative feedback voltage, and calculates the current control increment using a preset control algorithm based on the current voltage error and the historical voltage error; the driving module calculates the current control quantity based on the control quantity corresponding to the current control increment and the historical voltage error, which is used to determine the heating control quantity at the current moment.

[0102] The embodiment of the present application also provides another possible implementation of the RF voltage symmetry adjustment method. Figure 5 The fourth flow chart of a method for adjusting symmetry of radio frequency voltage provided in an embodiment of the present application. Figure 5 As shown, according to the current voltage error and the historical voltage error, a preset control algorithm is used to calculate the current control increment, including:

[0103] S401 . Calculate a first contribution, a second contribution, and a third contribution using a preset control algorithm according to a current voltage error and a historical voltage error.

[0104] S402: Accumulate the first contribution, the second contribution, and the third contribution to obtain a current control increment.

[0105] In this embodiment, the current voltage error and the historical voltage error are calculated by using a PID algorithm to obtain the first contribution, the second contribution, and the third contribution.

[0106] Optionally, the historical voltage error includes: a voltage error at a first moment and a voltage error at a second moment, wherein the first moment is a moment before the current moment, and the second moment is a moment before the first moment.

[0107] A first contribution is determined according to the current voltage error, the voltage error at the first moment and a preset proportional control parameter.

[0108] A second contribution is determined according to the current voltage error and a preset integral control parameter.

[0109] A third contribution is determined according to the current voltage error, the voltage error at the first moment, the voltage error at the second moment, and a preset differential control parameter.

[0110] Specifically, the calculation expression of the first contribution is as follows:

[0111] f_kpU=f_kp*(f_err-f_errLast)

[0112] Among them, f_kpU represents the first contribution, f_kp represents the preset proportional control parameter, f_err represents the current voltage error, and f_errLast represents the voltage error at the first moment.

[0113] The calculation expression of the second contribution is as follows:

[0114] f_kiU=f_ki*f_err

[0115] Among them, f_kiU represents the second contribution, f_ki represents the preset integral control parameter, and f_err represents the current voltage error.

[0116] The calculation expression of the third contribution is as follows:

[0117] f_kdU=f_kd*(f_err-2*f_errLast+f_errPrev)

[0118] Among them, f_kdU represents the third contribution, f_kd represents the preset differential control parameter, f_err represents the current voltage error, f_errLast represents the voltage error at the first moment, and f_errPrev represents the voltage error at the second moment.

[0119] According to the calculation expression of the first contribution amount, the calculation expression of the second contribution amount, and the calculation expression of the third contribution amount, the first contribution amount, the second contribution amount, and the third contribution amount are calculated respectively.

[0120] Then, the first contribution, the second contribution and the third contribution are accumulated to obtain the current control increment f_deltaU.

[0121] In the method provided in the embodiment of the present application, a preset control algorithm is used to calculate the first contribution, the second contribution and the third contribution based on the current voltage error and the historical voltage error, and the first contribution, the second contribution and the third contribution are accumulated to obtain the current control increment, which is used to obtain the current control amount.

[0122] The embodiment of the present application also provides another possible implementation of the RF voltage symmetry adjustment method. Figure 6 FIG5 is a flow chart of a method for adjusting symmetry of radio frequency voltage provided in an embodiment of the present application. Figure 6 As shown, the driving module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonance module generates adjusted positive RF voltage and negative RF voltage, including:

[0123] S501 . The driving module calculates a heating driving duty cycle according to the heating output power, and generates a heating driving signal according to the heating driving duty cycle.

[0124] S502: The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating driving signal, so that the resonance module generates adjusted positive radio frequency voltage and negative radio frequency voltage.

[0125] In this embodiment, the heating drive duty cycle D is calculated based on the heating output power f_kU and the preset heating value Full. The heating drive duty cycle D is expressed as: D = f_kU / Full. The heating drive duty cycle D is also the duty cycle of the PWM wave output by the driving module, wherein the heating output power f_kU can be regarded as the heating time, and the preset heating value Full can be 10 or 100, which represents the upper limit of the heating output power f_kU. The maximum value of the heating output power f_kU is the preset heating value, and the heating is at full power at this time. If the heating output power f_kU is 10 and the preset heating value Full is 100, the heating drive duty cycle D is 1%.

[0126] The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating driving signal, so that the resonance module generates adjusted positive radio frequency voltage and negative radio frequency voltage.

[0127] Specifically, the temperature control module drives the switch unit to control the heating plate to heat according to the heating drive signal, so as to heat the magnetic core and change the temperature of the magnetic core, so that the resonance module generates adjusted positive RF voltage and negative RF voltage.

[0128] For example, if the resistance of the heating plate is R and the external power supply voltage is V, the output power is expressed as: P = U 2 / R; The relationship between the actual heating voltage U and the power supply voltage is: U = V*D.

[0129] The output power of the heating plate is: P = V 2 *(f_kU / Full) 2 / R.

[0130] It can be seen that the change of the heating output power f_kU will cause the change of the heating power of the heating plate, thereby changing the temperature of the magnetic core.

[0131] In the method provided in the embodiment of the present application, the driving module calculates the heating drive duty cycle according to the heating output power, and generates a heating drive signal according to the heating drive duty cycle. The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating drive signal, so that the resonance module generates adjusted positive RF voltage and negative RF voltage, thereby achieving adjustment of the symmetry of the positive RF voltage and the negative RF voltage.

[0132] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art who is familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A method for adjusting symmetry of radio frequency voltage, characterized in that: Applied to a radio frequency voltage symmetry adjustment system, the radio frequency voltage symmetry adjustment system includes: a driving module, a power module, a resonance module, a feedback module and a temperature control module, and the method includes: The driving module generates and outputs a radio frequency driving signal to the power module at a current moment, so that the power module provides a resonance energy signal for the resonance module; The resonance module generates a positive radio frequency voltage and a negative radio frequency voltage under the action of the resonance energy signal; The feedback module detects the positive RF voltage and the negative RF voltage respectively, obtains and feeds back the positive feedback voltage and the negative feedback voltage at the current moment to the driving module; If the positive feedback voltage and the negative feedback voltage do not satisfy the preset voltage symmetry condition, the driving module controls the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonance module generates adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and negative RF voltage satisfy the preset voltage symmetry condition.

2. The method according to claim 1, characterized in that The driving module controls the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage at the current moment, so that the resonance module generates adjusted positive radio frequency voltage and negative radio frequency voltage, including: The driving module calculates the current control amount using a preset control algorithm according to the positive feedback voltage and the negative feedback voltage; The driving module determines the heating output power of the temperature control module according to the current control amount; The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonance module generates adjusted positive radio frequency voltage and negative radio frequency voltage.

3. The method according to claim 2, characterized in that The driving module calculates the current control amount using a preset control algorithm according to the positive feedback voltage and the negative feedback voltage, including: The driving module calculates a current voltage error according to the positive feedback voltage and the negative feedback voltage, and calculates a current control increment according to the current voltage error and the historical voltage error by using the preset control algorithm; The driving module calculates the current control amount according to the current control increment and the control amount corresponding to the historical voltage error.

4. The method according to claim 3, characterized in that The step of calculating the current control increment according to the current voltage error and the historical voltage error by using the preset control algorithm includes: According to the current voltage error and the historical voltage error, the preset control algorithm is used to calculate a first contribution, a second contribution, and a third contribution; The first contribution, the second contribution and the third contribution are accumulated to obtain the current control increment.

5. The method according to claim 4, characterized in that The historical voltage error includes: a voltage error at a first moment and a voltage error at a second moment, wherein the first moment is a moment before the current moment, and the second moment is a moment before the first moment; the first contribution, the second contribution, and the third contribution are calculated according to the current voltage error and the historical voltage error using the preset control algorithm, including: determining the first contribution according to the current voltage error, the voltage error at the first moment and a preset proportional control parameter; Determining the second contribution according to the current voltage error and a preset integral control parameter; The third contribution is determined according to the current voltage error, the voltage error at the first moment, the voltage error at the second moment, and a preset differential control parameter.

6. The method according to claim 2, characterized in that The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating output power, so that the resonance module generates adjusted positive radio frequency voltage and negative radio frequency voltage, including: The driving module calculates a heating driving duty cycle according to the heating output power, and generates a heating driving signal according to the heating driving duty cycle; The driving module controls the temperature control module to heat the magnetic core of the power module according to the heating driving signal, so that the resonance module generates adjusted positive radio frequency voltage and negative radio frequency voltage.

7. A radio frequency voltage symmetry adjustment system, characterized in that: The RF voltage symmetry adjustment system includes: a driving module, a power module, a resonance module, a feedback module and a temperature control module, wherein the first output end of the driving module is connected to the input end of the power module, and the output end of the power module is connected to the input end of the resonance module; the output end of the resonance module is connected to the input end of the feedback module, and the output end of the feedback module is connected to the input end of the driving module; the second output end of the driving module is connected to the input end of the temperature control module, and the output end of the temperature control module is connected to the magnetic core of the power module; The driving module is used to generate and output a radio frequency driving signal to the power module; the power module is used to provide a resonance energy signal to the resonance module; the resonance module is used to generate a positive radio frequency voltage and a negative radio frequency voltage under the action of the resonance energy signal; the feedback module is used to detect the positive radio frequency voltage and the negative radio frequency voltage respectively, obtain and feed back a positive feedback voltage and a negative feedback voltage to the driving module; The driving module is also used to control the temperature control module to heat the magnetic core of the power module according to the positive feedback voltage and the negative feedback voltage when the positive feedback voltage and the negative feedback voltage do not meet the preset voltage symmetry condition, so that the resonance module generates adjusted positive RF voltage and negative RF voltage until the adjusted positive RF voltage and negative RF voltage meet the preset voltage symmetry condition.

8. The system according to claim 7, characterized in that The driving module comprises: a control unit, a digital-to-analog conversion unit, a differential-integral circuit, a mixer and a direct data generator, wherein a first output end of the control unit is connected to an input end of the digital-to-analog conversion unit, an output end of the digital-to-analog conversion unit is connected to an input end of the differential-integral circuit, an output end of the differential-integral circuit is connected to an input end of the mixer, an output end of the mixer is a first output end of the driving module, and an output end of the mixer is connected to an input end of the power module; The second output end of the control unit is the second output end of the driving module, the second output end of the control unit is connected to the input end of the temperature control module, the second output end of the control unit is also connected to the input end of the direct data generator, and the output end of the direct data generator is connected to the input end of the mixer.

9. The system according to claim 7, characterized in that The power module includes: a power amplifier and a transformer, the input end of the power amplifier is the input end of the power module, the output end of the power amplifier is connected to the primary side of the transformer, and the secondary side of the transformer is connected to the input end of the resonance module.

10. The system according to claim 7, characterized in that The temperature control module includes: a switch unit, a heating plate and a temperature measuring plate. The input end of the switch unit is the input end of the temperature control module, and the output end of the switch unit is connected to the heating plate. The heating plate and the temperature measuring plate wrap the magnetic core of the transformer in the power module, and the temperature measuring plate is also connected to the control unit in the driving module.

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