Radio frequency power supply dynamic power stabilization system and method based on PID regulation and control

Abstract

The invention discloses a radio frequency power supply dynamic power stabilization system and method based on PID regulation and control, and in a radio frequency ion source, the beam size and the radio frequency power are strongly correlated. In order to ensure beam stability and optimize radio frequency power output, a PID regulation and control module is designed, and radio frequency power is dynamically regulated in a negative feedback regulation and control mode so as to compensate power fluctuation caused by factors such as heating of parts such as a grid mesh or a coil, plasma load change and current drift, and fine regulation of the radio frequency power is realized. The invention relates to the technical field of radio frequency power supplies. According to the radio frequency power supply dynamic power stabilization system based on PID regulation and control and the method thereof, the design ensures that the radio frequency power supply can maintain stable power output under different working conditions and fault conditions, the system has fault self-diagnosis and protection functions, and the reliability and the safety of the system are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of radio frequency power supplies, and specifically to a dynamic power stabilization system and method for radio frequency power supplies based on PID regulation. Background Art

[0002] Based on the original PID regulation module, a multi-sensor fusion technology is introduced. By combining the plasma density signal detected by a Langmuir probe and the electrical characteristic signals of the radio frequency power supply, more precise power control is achieved. Weights are assigned according to the contribution degree and reliability of each sensor signal to radio frequency power control. The plasma density signal detected by the Langmuir probe directly reflects the state of the plasma and plays a key role in radio frequency power control, and a relatively high weight (such as 0.6) can be assigned to it; the electrical characteristic signals (voltage, current) of the radio frequency power supply reflect the working state of the power supply and also have an important impact on power control, and a medium weight (such as 0.3) can be assigned to them; the state signal of the gas flow controller has a certain impact on the generation and maintenance of the plasma, and a relatively low weight (such as 0.1) can be assigned to it.

[0003] After multiplying each sensor signal by the corresponding weight coefficient and summing them up, a comprehensive feedback signal is obtained. The specific formula is as follows: S 综合 = ω 1 S 朗缪尔 + ω 2 S 电特征 + ω 3 S 气体流量 ; Wherein, S 综合 is the comprehensive feedback signal, ω 1, ω 2, ω 3 are the weight coefficients of the Langmuir probe signal, the electrical characteristic signal of the radio frequency power supply, and the signal of the gas flow controller respectively, and ω 1 + ω 2 + ω 3 = 1.

[0004] Filtering algorithm: A low-pass filter is used to filter out high-frequency noise in the sensor signals. For the plasma density signal detected by the Langmuir probe, since its change is relatively slow, a low-pass filter with a relatively low cut-off frequency (such as a Butterworth filter) can be used, and the cut-off frequency can be set to about 100 Hz. For the electrical characteristic signal of the radio frequency power supply, since it may contain higher-frequency interference components, a low-pass filter with a slightly higher cut-off frequency can be used, and the cut-off frequency is set to about 1 kHz.

[0005] The sliding average filter performs sliding average filtering on the status signal of the gas flow controller. The number of sampling points is about 10 to smooth the signal fluctuations and reduce random interference.

[0006] For the integrated signal after multi-sensor fusion, Kalman filtering is used for optimal estimation to improve the accuracy and reliability of the signal. According to the system model and measurement model, the Kalman gain is updated in real time to filter the integrated signal.

[0007] (Radio frequency ion source) AND (Beam current) AND (Power) AND (PID OR Regulation) AND (Negative feedback regulation) AND (Dynamic adjustment) AND (Power fluctuation compensation) AND (Grid heating) AND (Coil heating) AND (Plasma load change) AND (Current drift) AND (Fine adjustment) AND (Stable power output t) AND (Fault self-diagnosis) AND (Protection OR Safety OR Reliability). Summary of the Invention

[0008] (1) Technical problems to be solved Aiming at the deficiencies of the prior art, the present invention provides a dynamic power stabilization system and method for a radio frequency power supply based on PID regulation. Sensors such as a Langmuir probe, a voltage and current detection module of the radio frequency power supply, and a gas flow controller are respectively connected to corresponding signal acquisition circuits to ensure the stability and accuracy of signal transmission. A high-precision signal acquisition circuit is designed, including an amplifier, a filter, etc., to preprocess the sensor signals to make them suitable for subsequent analog-to-digital conversion and processing.

[0009] (2) Technical solutions To achieve the above objectives, the present invention is realized through the following technical solutions: A dynamic power stabilization system for a radio frequency power supply based on PID regulation includes the following units: A gas flow control unit that detects the status of the gas flow controller and controls the gas flow controller to supply gas to the plasma source. The gas flow control unit is connected to the gas flow controller and receives control signals from a computer; A Langmuir probe electrical characteristic parameter detection unit for detecting the voltage signal applied to the Langmuir probe and the current signal generated when the plasma acts on the Langmuir probe. The Langmuir probe electrical characteristic parameter detection unit is connected to the Langmuir probe and outputs signals to the plasma density calculation unit; A plasma density calculation unit that receives the signals of the Langmuir probe, calculates the density of the plasma based on the voltage and current signals detected by the Langmuir probe, and outputs the calculation result to the PID control unit; The PID control unit receives the output of the plasma density calculation unit, and according to the comparison result between the plasma density and the set value, outputs a radio frequency power supply control signal to control the working voltage of the radio frequency power supply and outputs a control signal to the radio frequency power supply; The radio frequency power supply electrical characteristic detection unit collects the voltage and current signals of the radio frequency power supply, judges the working state of the radio frequency power supply and the discharge stability of the plasma, is connected to the radio frequency power supply, and outputs a signal to the PID control unit; The fault diagnosis and protection unit monitors the key parameters of the system in real time. Once an abnormality is detected, it immediately triggers a protection mechanism, is connected to the radio frequency power supply and the PID control unit, and outputs a fault signal to the PID control unit; The computer control system coordinates the work of each part, realizes automatic control and data processing, and is connected to the gas flow control unit, the Langmuir probe electrical characteristic parameter detection unit, the PID control unit and the fault diagnosis and protection unit.

[0010] Preferably, the key parameters of the system monitored by the fault diagnosis and protection unit in real time include voltage, current and temperature.

[0011] Preferably, the PID control unit adopts a PID control algorithm, and the expression of the PID control algorithm is as follows: ; Where: u(t): The control quantity output by the controller; e(t): Deviation signal; K p : Proportional coefficient; K i : Integral coefficient; K d : Differential coefficient.

[0012] Preferably, the deviation signal e(t) is the difference between the set value and the actual value.

[0013] Preferably, the adaptive PID parameter adjustment algorithm has the following calculation method: ; Where, K p0 , K i0 and K d0 are the initial PID parameters; ΔK p , ΔK i and ΔK d are the increments dynamically adjusted according to the system response.

[0014] Preferably, by monitoring the operation data of the system, indicators such as plasma density fluctuations, RF power output stability, and beam current stability are monitored to evaluate the performance of the system. According to the evaluation results, the sensor signal processing scheme is adjusted and optimized to improve the overall performance and reliability of the system.

[0015] Preferably, according to the spectral characteristics of the actual signal, the parameters of the filter are optimized to improve the filtering effect and the system response speed.

[0016] The present invention also provides a method for dynamically stabilizing the power of an RF power supply based on PID regulation, which adopts a dynamic power stabilization system for an RF power supply based on PID regulation, specifically including the following steps: S1. System initialization: Set the initial PID parameters, gas flow rate, and RF power, check whether each component is working properly, and ensure the safety of the system; S2. Real-time monitoring and data acquisition: Monitor the gas flow rate through the gas flow control unit, detect the electrical characteristic parameters of the plasma through a Langmuir probe, calculate the plasma density, and monitor the voltage and current of the RF power supply through the RF power supply electrical characteristic detection unit; S3. Deviation calculation and PID control: Calculate the deviation between the set value and the actual value of the plasma density, and calculate the control signal through the PID control unit according to the deviation value to adjust the output power of the RF power supply; S4. Fault diagnosis and protection: Real-time monitor the voltage, current, and temperature parameters of the system to determine whether there is an abnormality. Once a fault is detected, immediately trigger the protection mechanism to stop the output of the RF power supply and ensure the safety of the system; S5. Adaptive parameter adjustment: Analyze whether the PID parameters need to be adjusted according to the real-time response of the system, and dynamically adjust the PID parameters according to the adaptive algorithm to optimize the system performance; S6. Stable operation and optimization: During the stable operation of the system, continuously monitor the plasma density and the status of the RF power supply, record the operation data, analyze the system performance, and optimize the control strategy.

[0017] (III) Beneficial effects The present invention provides a dynamic power stabilization system and method for an RF power supply based on PID regulation. Compared with the prior art, the following beneficial effects are achieved: (1) The dynamic power stabilization system and method of the RF power supply based on PID regulation combine the plasma density signal detected by the Langmuir probe and the electrical characteristic signal of the RF power supply to achieve more comprehensive system state monitoring. This multi-dimensional data acquisition can more accurately reflect the actual situation of plasma discharge, improving the accuracy and stability of control. Through the real-time acquisition and processing of multi-sensor data, the system can respond more quickly to changes in plasma density and RF power, timely adjust the control strategy, and ensure the uniformity and stability of plasma discharge.

[0018] (2) The dynamic power stabilization system and method of the RF power supply based on PID regulation, by integrating a fault diagnosis module, can monitor the key parameters of the system in real time, such as the voltage, current, temperature, etc. of the RF power supply. Once an anomaly is detected, the protection mechanism is immediately triggered to ensure system safety. Through the fault diagnosis and protection functions, the system can take timely measures when potential faults occur, avoiding equipment damage and safety accidents, and significantly improving the reliability and safety of the system.

[0019] (3) The dynamic power stabilization system and method of the RF power supply based on PID regulation dynamically adjust the parameters of the PID controller according to the real-time response of the system. This adaptive adjustment enables the system to automatically optimize the control parameters under different working conditions, improving the stability and response speed of the system. The adaptive PID parameter adjustment algorithm enables the system to better adapt to different working conditions and load changes, improving the overall performance and adaptability of the system; through the PID control unit and the adaptive adjustment algorithm, the system can achieve fine adjustment of RF power, ensuring the uniformity and stability of plasma discharge.

[0020] (4) The dynamic power stabilization system and method of the RF power supply based on PID regulation monitor the key parameters of the system in real time. Once an anomaly is detected, the protection mechanism is immediately triggered to ensure system safety. This fault diagnosis and protection function can effectively prevent equipment damage and safety accidents, improving the reliability and safety of the system. Redundancy is considered in the system design to ensure that the system can continue to operate normally when a certain component fails, further improving the reliability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is the PID operation logic diagram of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0022] Next, in combination with the accompanying drawings in the embodiments of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0023] Please refer to Figure 1 , the embodiments of the present invention provide a technical solution: a dynamic power stabilization system for a radio frequency power supply based on PID regulation, including the following units: A gas flow control unit that detects the state of the gas flow controller and controls the gas flow controller to supply gas to the plasma source. The gas flow control unit is connected to the gas flow controller and receives control signals from the computer; A Langmuir probe electrical characteristic parameter detection unit for detecting the voltage signal applied to the Langmuir probe and the current signal generated when the plasma acts on the Langmuir probe. The Langmuir probe electrical characteristic parameter detection unit is connected to the Langmuir probe and outputs signals to the plasma density calculation unit; A plasma density calculation unit that receives the signals of the Langmuir probe, calculates the density of the plasma according to the voltage and current signals detected by the Langmuir probe, and outputs the calculation result to the PID control unit; A PID control unit that receives the output of the plasma density calculation unit, outputs a radio frequency power supply control signal according to the comparison result between the plasma density and the set value, controls the working voltage of the radio frequency power supply, and outputs a control signal to the radio frequency power supply; A radio frequency power supply electrical characteristic detection unit that collects the voltage and current signals of the radio frequency power supply, judges the working state of the radio frequency power supply and the discharge stability of the plasma, is connected to the radio frequency power supply, and outputs signals to the PID control unit; A fault diagnosis and protection unit that monitors the key parameters of the system in real time. Once an abnormality is detected, it immediately triggers a protection mechanism, is connected to the radio frequency power supply and the PID control unit, and outputs a fault signal to the PID control unit; A computer control system that coordinates the work of each part, realizes automatic control and data processing, and is connected to the gas flow control unit, the Langmuir probe electrical characteristic parameter detection unit, the PID control unit, and the fault diagnosis and protection unit.

[0024] In the embodiments of the present invention, the key parameters monitored by the fault diagnosis and protection unit in real time include voltage, current, and temperature.

[0025] In the embodiments of the present invention, the PID control unit adopts a PID control algorithm, and the expression of the PID control algorithm is as follows: ; Wherein: u(t): The control quantity output by the controller; e(t): The deviation signal (the difference between the set value and the actual value); K p : The proportional coefficient; K i : The integral coefficient; K d : The differential coefficient.

[0026] 5. A dynamic power stabilization system for a radio frequency power supply based on PID regulation according to claim 1, characterized in that: an adaptive PID parameter adjustment algorithm, and the calculation method is as follows: ; Wherein, K p0 , K i0 and K d0 are the initial PID parameters; ΔK p , ΔK i and ΔK d are the increments dynamically adjusted according to the system response.

[0027] In the embodiments of the present invention, by monitoring the operation data of the system, monitoring indicators such as plasma density fluctuation, radio frequency power output stability, and beam current stability, evaluating the performance of the system, and according to the evaluation results, adjusting and optimizing the sensor signal processing scheme to improve the overall performance and reliability of the system.

[0028] In the embodiments of the present invention, according to the spectral characteristics of the actual signal, the parameters of the filter are optimized, such as adjusting the cut-off frequency of the low-pass filter, the sampling points of the moving average filter, and the initial parameters of the Kalman filter, etc., to improve the filtering effect and the system response speed.

[0029] Connect sensors such as Langmuir probes, voltage and current detection modules of radio frequency power supplies, and gas flow controllers to the corresponding signal acquisition circuits respectively to ensure the stability and accuracy of signal transmission.

[0030] Design a high-precision signal acquisition circuit, including an amplifier, a filter, etc., to preprocess the sensor signal to make it suitable for subsequent analog-to-digital conversion and processing.

[0031] Write a program to control the data acquisition card to synchronously acquire the signals of each sensor. The acquisition frequency is determined according to the signal characteristics. For example, the acquisition frequency of the Langmuir probe signal is 1 kHz, the acquisition frequency of the electrical characteristic signal of the radio frequency power supply is 10 kHz, and the acquisition frequency of the gas flow controller signal is 100 Hz. Preprocess the acquired signals, including range conversion, zero calibration, etc.

[0032] According to the above weight distribution principle and filtering algorithm, perform weighted processing and filtering on the preprocessed sensor signals. Implement corresponding filtering functions in software, such as Butterworth low-pass filtering function, moving average filtering function, and Kalman filtering function, and filter the synthesized signal after weighted processing.

[0033] Use the filtered synthesized signal as the feedback input of the PID controller. According to the set control target (such as the set value of plasma density), calculate the control signal through the PID control algorithm and output it to the RF power supply to achieve dynamic adjustment of the RF power.

[0034] In the initial stage of system operation, adjust and optimize the weight coefficients of each sensor signal through experiments and data analysis to obtain the best control effect. If it is found that the Langmuir probe signal is greatly interfered, its weight can be appropriately reduced and the weight of the electrical characteristic signal of the RF power supply can be increased.

[0035] Add a fault diagnosis module to monitor the key parameters of the system in real time, such as the voltage, current, temperature, etc. of the RF power supply. Once an abnormality is detected, immediately trigger the protection mechanism to ensure the safety of the system.

[0036] Design an adaptive PID parameter adjustment algorithm to dynamically adjust the parameters of the PID controller according to the real-time response of the system, and improve the stability and response speed of the system.

[0037] The embodiment of the present invention also provides a method for dynamically stabilizing the power of an RF power supply based on PID regulation, which adopts a system for dynamically stabilizing the power of an RF power supply based on PID regulation, and specifically includes the following steps: S1. System initialization: Set the initial PID parameters, gas flow rate, and RF power, check whether each component is working properly, and ensure the safety of the system; S2. Real-time monitoring and data acquisition: Monitor the gas flow rate through the gas flow control unit, detect the electrical characteristic parameters of the plasma through the Langmuir probe, calculate the plasma density, and monitor the voltage and current of the RF power supply through the electrical characteristic detection unit of the RF power supply; S3. Deviation calculation and PID control: Calculate the deviation between the set value and the actual value of the plasma density, and calculate the control signal through the PID control unit according to the deviation value to adjust the output power of the RF power supply; S4. Fault diagnosis and protection: Monitor the voltage, current, and temperature parameters of the system in real time, judge whether an abnormality occurs, and once a fault is detected, immediately trigger the protection mechanism to stop the output of the RF power supply to ensure the safety of the system; S5. Adaptive parameter adjustment: Analyze whether the PID parameters need to be adjusted according to the real-time response of the system, and dynamically adjust the PID parameters according to the adaptive algorithm to optimize the system performance; S6. Stable operation and optimization: During the stable operation of the system, continuously monitor the plasma density and the status of the RF power supply, record the operation data, analyze the system performance, and optimize the control strategy.

[0038] Beneficial improvement points of the adaptive PID parameter adjustment algorithm: 1. Use machine learning algorithms (such as neural networks, support vector machines, etc.) to learn and analyze the operation data of the system, automatically adjust the PID parameters, and improve the adaptive ability and control accuracy of the system.

[0039] Implementation steps: S1. During the operation of the system, collect a large amount of operation data, including parameters such as plasma density, voltage and current of the RF power supply, gas flow rate, etc., as well as the corresponding PID parameters and control effects. S2. Use the collected data to train the machine learning model and establish the mapping relationship between the input parameters (such as system status, target control quantity, etc.) and the output PID parameters. S3. During the operation of the system, obtain the current input parameters in real time, quickly calculate the optimal PID parameters through the trained model, and update them to the PID controller.

[0040] 2. Traditional adaptive PID parameter adjustment algorithms often rely on linear system models, while the actual RF power supply system may have nonlinear characteristics; the improved algorithm takes into account the nonlinear factors of the system, adopts a nonlinear PID control strategy, and improves the adaptability and control performance of the system under different working conditions.

[0041] Implementation steps: Conduct a detailed modeling of the RF power supply system, including the modeling of nonlinear links, such as the nonlinear characteristics of the plasma, the nonlinearity of the RF power amplifier, etc. According to the nonlinear model of the system, design a nonlinear PID controller, such as using multi-segment PID control, fuzzy logic-based PID control and other methods, so that the PID parameters can be adaptively adjusted according to the nonlinear characteristics of the system. Verify the designed nonlinear PID controller through simulation, and analyze its control effects under different working conditions, such as system stability, response speed, overshoot, etc.

[0042] 3. During the adaptive PID parameter adjustment process, add limiting conditions for the PID parameter adjustment, such as the change range of the parameters, the adjustment step size, etc., to prevent the PID parameters from being too large or too small, and avoid problems such as system instability or deterioration of control performance.

[0043] Implementation steps: According to the characteristics of the system and the actual operation requirements, determine the PID parameters (Kp , K i , K d ), and the reasonable variation range and adjustment step size; K p varies in the range of [0.5, 2.0], and the adjustment step size is 0.1; K i varies in the range of [0.1, 1.0], and the adjustment step size is 0.05; K d varies in the range of [0.01, 0.5], and the adjustment step size is 0.01; When adjusting the PID parameters each time, it is judged whether the adjusted parameters exceed the set limit range. If they exceed the range, the parameters are adjusted to the boundary values of the limit range; According to the operating state and control effect of the system, dynamically adjust the limit range and adjustment step size of the PID parameters; in the system startup stage, the variation range of the parameters can be appropriately relaxed to accelerate the response speed of the system; in the system stable operation stage, the variation range of the parameters can be reduced to improve the stability of the system.

[0044] 4. Combine the adaptive PID parameter adjustment algorithm with multi-sensor fusion technology, make full use of the rich information provided by multiple sensors, more comprehensively reflect the state of the system, and improve the accuracy and reliability of PID parameter adjustment.

[0045] Implementation steps: Perform fusion processing on data from different sensors (Langmuir probe, radio frequency power supply electrical characteristic detection unit, gas flow control unit, etc.), and use methods such as weighted average and Kalman filtering to obtain a more accurate system state estimation value; Take the fused system state data as input, and calculate the optimal PID parameters according to the adaptive PID parameter adjustment algorithm; the PID parameters can be comprehensively adjusted in combination with the plasma density deviation and change rate after fusion, and the voltage and current information of the radio frequency power supply, so that the system reaches the best control effect; Real-time monitor the working state of each sensor. Once a sensor failure or data anomaly is found, handle it in a timely manner, such as eliminating abnormal data, enabling backup sensors, etc., to ensure the accuracy and reliability of the fused data.

[0046] 5. Improve the convergence of the adaptive PID parameter adjustment algorithm so that it can converge to the optimal PID parameters faster, reduce the adjustment time and oscillation of the system, and improve the response speed and stability of the system.

[0047] Implementation steps: Conduct an in-depth analysis of the existing adaptive PID parameter adjustment algorithm to find out the key factors affecting the algorithm convergence, including parameter update rules, learning rate, etc.; Optimize the update rule of PID parameters, introduce mechanisms such as momentum term or adaptive learning rate to accelerate the convergence speed of parameters; when updating parameters, not only consider the current error information, but also consider the direction and speed of previous parameter updates, so that the parameters can approach the optimal value faster; Verify the convergence of the improved adjustment algorithm through simulation and experiments, and analyze its convergence performance under different initial conditions and system perturbations; according to the verification results, further adjust the parameters and structure of the algorithm to ensure its good convergence.

[0048] Since there are many feedback quantities, multiple feedback quantities need to be operated on and then given to the feedback input of the PID.

[0049] At the same time, the content not described in detail in this specification belongs to the prior art well known to those skilled in the art.

[0050] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device.

[0051] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A dynamic power stabilization system for a radio frequency power supply based on PID regulation, characterized in that: It includes the following units: A gas flow control unit that detects the status of the gas flow controller and controls the gas flow controller to supply gas to the plasma source; A Langmuir probe electrical characteristic parameter detection unit for detecting the voltage signal applied to the Langmuir probe and the current signal generated when the plasma acts on the Langmuir probe; A plasma density calculation unit that receives the signal of the Langmuir probe, calculates the density of the plasma according to the voltage and current signals detected by the Langmuir probe, and outputs the calculation result to the PID control unit; A PID control unit that receives the output of the plasma density calculation unit, outputs a radio frequency power supply control signal according to the comparison result between the plasma density and the set value, controls the working voltage of the radio frequency power supply, and outputs a control signal to the radio frequency power supply; A radio frequency power supply electrical characteristic detection unit that collects the voltage and current signals of the radio frequency power supply, judges the working state of the radio frequency power supply and the discharge stability of the plasma, is connected to the radio frequency power supply, and outputs a signal to the PID control unit; A fault diagnosis and protection unit that monitors the key parameters of the system in real time. Once an abnormality is detected, it immediately triggers a protection mechanism, is connected to the radio frequency power supply and the PID control unit, and outputs a fault signal to the PID control unit; A computer control system that coordinates the work of each part, realizes automatic control and data processing, and is connected to the gas flow control unit, the Langmuir probe electrical characteristic parameter detection unit, the PID control unit, and the fault diagnosis and protection unit.

2. The dynamic power stabilization system of a radio frequency power supply based on PID regulation according to claim 1, wherein: The key parameters of the system monitored in real time by the fault diagnosis and protection unit include voltage, current, and temperature.

3. A dynamic power stabilization system for a radio frequency power supply based on PID regulation according to claim 1, characterized in that: The PID control unit adopts a PID control algorithm, and the expression of the PID control algorithm is as follows: ； Where: u(t): The control quantity output by the controller; e(t): The deviation signal; K p : proportionality coefficient; K i : Integration coefficient; K d : Differential coefficient.

4. A dynamic power stabilization system for a radio frequency power supply based on PID regulation according to claim 3, characterized in that: The deviation signal e(t) is the difference between the set value and the actual value.

5. A dynamic power stabilization system for a radio frequency power supply based on PID regulation according to claim 1, characterized in that: An adaptive PID parameter adjustment algorithm, the calculation method is as follows: ； Among them, K p0 , K i0 and K d0 are initial PID parameters; ΔK p , ΔK i and ΔK d are increments dynamically adjusted according to the system response.

6. The dynamic power stabilization system of a radio frequency power supply based on PID regulation according to claim 1, characterized in that: By monitoring the operation data of the system, monitoring indicators such as plasma density fluctuation, radio frequency power output stability, and beam current stability, evaluating the performance of the system, and according to the evaluation results, adjusting and optimizing the sensor signal processing scheme to improve the overall performance and reliability of the system.

7. A dynamic power stabilization system for a radio frequency power supply based on PID regulation according to claim 1, characterized in that: According to the spectral characteristics of the actual signal, optimize the parameters of the filter to improve the filtering effect and the system response speed.

8. A dynamic power stabilization method for a radio frequency power supply based on PID control, characterized in that: Adopt the radio frequency power supply dynamic power stability system based on PID regulation described in any one of claims 1-7, specifically including the following steps: S1. System initialization: Set the initial PID parameters, gas flow, and radio frequency power, check whether each component is working properly, and ensure the safety of the system; S2. Real-time monitoring and data acquisition: Monitor the gas flow through the gas flow control unit, detect the electrical characteristic parameters of the plasma through the Langmuir probe, calculate the plasma density, and monitor the voltage and current of the radio frequency power supply through the radio frequency power supply electrical characteristic detection unit; S3. Deviation calculation and PID control: Calculate the deviation between the set value and the actual value of the plasma density, and according to the deviation value, calculate the control signal through the PID control unit to adjust the output power of the radio frequency power supply; S4, Fault Diagnosis and Protection: Real-time monitor the voltage, current, and temperature parameters of the system to determine if there are any abnormalities. Once a fault is detected, immediately trigger the protection mechanism to stop the RF power output and ensure the safety of the system; S5, Adaptive Parameter Adjustment: Analyze whether PID parameters need to be adjusted based on the real-time response of the system. Dynamically adjust the PID parameters according to the adaptive algorithm to optimize the system performance; S6, Stable Operation and Optimization: During the stable operation of the system, continuously monitor the plasma density and the status of the RF power supply, record the operation data, analyze the system performance, and optimize the control strategy.

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