A magnetron sputtering device, a rotating cathode, and an end component

Abstract

The present invention relates to the technical field of magnetron sputtering, and discloses a magnetron sputtering device, a rotating cathode and an end component. A target cylinder mounting flange is mounted on the mounting end of the end body. An opening corresponding to the water outlet end of the water inlet channel is provided in the middle of the target cylinder mounting flange. An annular chamber extending around the opening is provided in the middle of the target cylinder mounting flange. A first coolant port communicating with the water inlet end of the water outlet channel is provided on one side of the annular chamber close to the end body. A second coolant port communicating with the internal space of the target cylinder is provided on the side of the annular chamber far from the end body. The second coolant port is located at the edge of the target cylinder mounting flange. By arranging an annular chamber inside the flange, and then setting the second coolant port communicating with the end of the internal flow channel of the target cylinder at the edge of the flange based on the annular chamber, while ensuring the sealing effect of the flange edge, the second coolant port is close to the inner wall of the target cylinder, so that the gas in the target cylinder can be completely discharged during water filling, and there is no exhaust dead angle.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetron sputtering, and particularly to a magnetron sputtering device, a rotating cathode and an end component. Background Art

[0002] The rotating cathode is the core component for film coating in a vacuum magnetron sputtering coating device. Its working characteristic is that the target cylinder is in a rotating state during operation. Therefore, the utilization rate of the target cylinder is high, and the number of arcs on the target surface is small and the target surface is clean. For the existing vacuum dynamic sealing structure of the rotating cathode, some use vacuum magnetic fluid sealing, and some use skeleton lip rubber dynamic sealing. There are problems that heat generation causes the failure of the vacuum dynamic seal or the decline of the dynamic seal performance under high-power operation and high-temperature environment. Therefore, it is necessary to fill water inside the cathode for water cooling during operation.

[0003] In the design of the cooling water channel structure in the prior art, referring to Figure 1 , when the rotating cathode is filled with cooling water, due to the gravity of the cooling water and the structural design inside the target cylinder, gas cannot be completely discharged, that is, the inside of the target cylinder cannot be completely filled with water. Thus, under the condition of using high power, problems such as target cracking and high-temperature indium flow in the bonded indium layer are likely to occur on the target cylinder. This problem is particularly obvious in the case of upward sputtering, that is, when the plasma region is in the upper part (the heat source is in the upper part). Referring to Figure 2 , when the device is maintained and the new target cylinder is replaced, since the cooling water inside the target cylinder cannot be completely drained, the cooling water flows to the on-site equipment or the floor, polluting the equipment or the on-site environment. When filling water, the upper part of the target cylinder cannot be filled with cooling water, the target cylinder is not sufficiently cooled under high-power processes, and when draining water, the cooling water inside the target cylinder cannot be completely discharged from the target cylinder, polluting the on-site environment.

[0004] In addition, since the target cylinder is in a rotating state, the vacuum coating equipment needs to have functions such as dynamic transmission of electric power, dynamic water seal for cooling water, and dynamic vacuum seal. In the existing rotating cathode structure, in order to facilitate the design of water, electricity modules and drive modules, the water inlet and outlet ends, electric power transmission ends, and drive input ends are usually set at the ends of both ends of the magnetic rod. In the conventional rotating cathode structure, the functions of water inlet and outlet for cooling water and dynamic transmission and introduction of electric power are set at one end of the target cylinder as a water and electricity functional unit block, and the driving function for rotating the target cylinder is set at the other end of the target cylinder as a driving functional unit block, and the return water channel opening is set on the magnetic rod at the other end of the target cylinder. Or the functions of water inlet and outlet, dynamic transmission and introduction of electric power, and driving for rotating the target cylinder are set at one end of the target cylinder as a water, electricity and drive functional unit block, and the return water channel opening is set on the magnetic rod at the other end of the target cylinder. Or the functions of water inlet and outlet, dynamic transmission and introduction of electric power, and drive function are designed at one end of the target cylinder as a water, electricity and drive functional unit block, and the return water channel opening is set at the other end of the target cylinder. This layout method simplifies the layout difficulty of water and electricity at the ends, but requires separate operations from both sides of the magnetic rod during connection and maintenance. At the same time, in a high-power or high-temperature environment, the cooling of the vacuum dynamic seal lip rubber ring is not sufficient; the return water channel is set at the other end of the target cylinder and cannot be set at the end of the distal magnetic rod. In some equipment upgrade and transformation projects, it is necessary to replace all the ends at both ends of the target cylinder to achieve the function of filling the target cylinder with water. Summary of the Invention

[0005] To solve the technical problems existing in the background art, the present invention provides a magnetron sputtering device, a rotating cathode, and an end component.

[0006] An end component provided by the present invention includes: an end body and a target cylinder mounting flange;

[0007] An inlet channel and an outlet channel are provided in the end body. The outlet end of the inlet channel and the inlet end of the outlet channel are located at the mounting end of the end body. The target cylinder mounting flange is mounted on the mounting end of the end body. An opening corresponding to the outlet end of the inlet channel is provided in the middle of the target cylinder mounting flange. An annular chamber extending around the opening is provided in the middle of the target cylinder mounting flange. A first coolant port communicating with the inlet end of the outlet channel is provided on the side of the annular chamber close to the end body, and a second coolant port communicating with the inside of the target cylinder is provided on the side of the annular chamber away from the end body. The second coolant port is located at the edge of the target cylinder mounting flange.

[0008] Preferably, the second coolant port includes a first inlet part and a second inlet part. The first inlet part is located on the end face of the target cylinder mounting flange away from the end body, and the second inlet part is located on the outer peripheral face of the target cylinder mounting flange.

[0009] Preferably, the end body includes an end base, a central support, and a drive bushing. The central support is installed on the end base. The water inlet channel is located inside the central support. The drive bushing is sleeved outside the central support and is rotatably installed on the end base. The water outlet channel is located outside the central support. The target cylinder mounting flange is installed on the drive bushing.

[0010] Preferably, a rotary electrical contact is provided on the central support. The end base, the central support, the rotary electrical contact, and the target cylinder mounting flange are electrically connected in sequence to form a target cylinder electrical transmission path.

[0011] Preferably, a spring is provided on the side of the rotary electrical contact away from the target cylinder mounting flange. The spring is sleeved outside the central support and is connected to the central support. The rotary electrical contact and the central support are electrically connected through an electrically conductive wire.

[0012] In the present invention, for the proposed end component, the target cylinder mounting flange is installed on the installation end of the end body. An opening corresponding to the water outlet end of the water inlet channel is provided in the middle of the target cylinder mounting flange. An annular chamber extending around the opening is provided in the middle of the target cylinder mounting flange. A first coolant port communicating with the water inlet end of the water outlet channel is provided on the side of the annular chamber close to the end body. A second coolant port communicating with the internal space of the target cylinder is provided on the side of the annular chamber away from the end body. The second coolant port is located at the edge of the target cylinder mounting flange. Through the above-optimized end component design, an annular chamber is provided inside the flange, and then based on the annular chamber, the second coolant port communicating with the end of the flow channel inside the target cylinder is provided at the edge of the flange. While ensuring the sealing effect of the flange edge, the second coolant port is close to the inner wall of the target cylinder, so that the gas in the target cylinder can be completely discharged when filling with water, and there is no exhaust dead angle.

[0013] The present invention also proposes a rotary cathode, including the above-mentioned end component.

[0014] Preferably, it includes: a drive end, a support end, a magnetic rod, and a target cylinder; the drive end adopts the end component. A rotatably installed target cylinder support flange is provided on the support end. The magnetic rod is located between the drive end and the support end. One end of the magnetic rod is installed on the central support and the other end is installed on the target cylinder support flange. The target cylinder is sleeved outside the magnetic rod. Both ends of the target cylinder are installed on the target cylinder mounting flange and the target cylinder support flange respectively;

[0015] A first flow channel communicating with the water inlet channel is provided in the middle of the magnetic rod. A second flow channel is formed between the magnetic rod and the inner wall of the target cylinder. The first flow channel communicates with the second flow channel.

[0016] Preferably, a return port communicating the first flow channel with the second flow channel is provided on the magnetic rod. The return port is located on the side wall of the first flow channel at the end away from the drive end.

[0017] Preferably, a third flow channel communicating the first flow channel and the second flow channel is provided inside the target cylinder support flange.

[0018] The present invention also provides a magnetron sputtering device, including the above-mentioned rotating cathode.

[0019] In the present invention, the technical effects of the proposed magnetron sputtering device and the rotating cathode are similar to those of the above-mentioned end component, so they will not be elaborated here. Description of the Drawings

[0020] Figure 1 Schematic diagram of water filling of a rotating cathode in the prior art.

[0021] Figure 2 Schematic diagram of water drainage of a rotating cathode in the prior art.

[0022] Figure 3 Schematic diagram of the structure of an embodiment of a rotating cathode proposed by the present invention.

[0023] Figure 4 Schematic diagram of the structure of an embodiment of an end component proposed by the present invention.

[0024] Figure 5 For Figure 4 Enlarged view of part A.

[0025] Figure 6 Schematic diagram of the structure of the target cylinder mounting flange in an embodiment of an end component proposed by the present invention.

[0026] Figure 7 Schematic diagram of the cooperation between the drive shaft sleeve and the vacuum dynamic seal in an embodiment of an end component proposed by the present invention.

[0027] Figure 8 Schematic diagram of water filling of an embodiment of a rotating cathode proposed by the present invention.

[0028] Figure 9 Schematic diagram of water drainage of an embodiment of a rotating cathode proposed by the present invention.

[0029] Figure 10 Schematic diagram of the structure of another embodiment of a rotating cathode proposed by the present invention.

[0030] Figure 11 Schematic diagram of the structure of an embodiment of a magnetron sputtering device proposed by the present invention.

[0031] Reference Signs:

[0032] 1 Substrate to be coated; 101 Central support; 102 End base; 104 Insulating plate; 105 Transition base; 106 Water and electricity access block; 108 Coolant dynamic seal; 109 Vacuum dynamic seal; 110 First bearing; 111 Second bearing; 112 Synchronous belt; 113 Conductive belt; 114 Spring; 115 Rotary electrical contact; 116 Magnetic rod;

[0033] 201 Drive shaft sleeve; 202 Target cylinder mounting flange; 2021 First coolant port; 2022 Second coolant port; 20221 First inlet part; 20222 Second inlet part; 203 Bolt; 205 Target cylinder; 207 Target cylinder support flange;

[0034] 301 Support end;

[0035] 4001 First flow channel; 4002 Second flow channel; 4003 Third flow channel. Detailed implementation manner

[0036] Referring to Figure 4 and 5 and

[0037] In the end body, there are a water inlet channel and a water outlet channel. The water outlet end of the water inlet channel and the water inlet end of the water outlet channel are located at the installation end of the end body. The target cylinder mounting flange 202 is installed on the installation end of the end body. In the middle of the target cylinder mounting flange 202, there is an opening corresponding to the water outlet end of the water inlet channel. In the middle of the target cylinder mounting flange 202, there is an annular chamber extending around the opening. On the side of the annular chamber close to the end body, there is a first coolant port 2021 communicating with the water inlet end of the water outlet channel. On the side of the annular chamber far from the end body, there is a second coolant port 2022 communicating with the internal space of the target cylinder 205. The second coolant port 2022 is located at the edge of the target cylinder mounting flange 202.

[0038] In order to illustrate in detail the specific working mode of the end component of this embodiment, this embodiment also proposes a rotary cathode, including the end component described above.

[0039] Specifically, referring to Figure 3, the rotating cathode of this embodiment includes: a driving end, a supporting end 301, a magnetic rod 116, and a target cylinder 205; the driving end adopts the above-mentioned end component, and a rotatably installed target cylinder support flange 207 is provided on the supporting end 301. The magnetic rod 116 is located between the driving end and the supporting end 301. One end of the magnetic rod 116 is installed on the end body, and the other end is installed on the target cylinder support flange 207. The target cylinder 205 is sleeved outside the magnetic rod 116, and both ends of the target cylinder 205 are respectively installed on the target cylinder installation flange 202 and the target cylinder support flange 207. A first flow channel 4001 communicating with the water inlet channel is provided in the middle of the magnetic rod 116, and a second flow channel 4002 is formed between the inner wall of the magnetic rod 116 and the target cylinder 205.

[0040] Referring to Figure 3 and 11 , when the magnetron sputtering device using the rotating cathode of this embodiment works, the plasma is generated by the magnetic field in the middle magnetic rod, bombarding the peripheral target cylinder 205, so that the target particles are sputtered onto the substrate 1 to be coated. At the same time, the driving shaft sleeve 201 drives the target cylinder installation flange at the proximal end, the target cylinder, and the target cylinder support flange at the distal end to rotate together to achieve coating. In order to cool each component, the inside of the target cylinder is filled with cooling water during operation.

[0041] Referring to Figure 8 , when the rotating cathode of this embodiment is filled with water, the coolant is sent into the water inlet channel in the driving end by the water and electricity access block 106, then enters the first flow channel inside the magnetic rod 116, enters the second flow channel from the distal end of the magnetic rod, and then returns to the water outlet channel in the end. Since the flange drives the target cylinder to rotate together during operation, the second coolant port can be rotated to the upper edge of the flange during water filling. At this time, after filling water for a period of time, the air in the upper part of the target cylinder 205 is discharged from the second coolant port at the top edge of the flange through the annular chamber in the flange and then through the water outlet channel. When the coolant port rotates to the uppermost part, the air is completely discharged.

[0042] Referring to Figure 9 , when draining water, compressed air is sent into the water inlet channel by the water and electricity access block 106, then enters the first flow channel inside the magnetic rod 116, enters the second flow channel from the distal end of the magnetic rod, and then returns to the water outlet channel in the end. During the draining process, the second coolant port of the target cylinder installation flange 202 rotates to the lower edge of the flange. After draining water for a period of time, the coolant in the lower part of the target cylinder 205 is completely drained from the lowermost second coolant port through the annular chamber.

[0043] Those skilled in the art should understand that the internal cooling of the cathode in this application is not limited to water, and other liquid coolants can also be filled into the water inlet channel and the water outlet channel to achieve the cooling function.

[0044] In the specific design of the rotating cathode, the power connection module of the target can be set at one end of the distal support end, or at one end of the proximal drive end. In actual work, the power connection end, the water inlet and outlet end, and the drive end of the rotating cathode are all set within the same end, which is convenient for equipment maintenance. At the same time, when upgrading the cathode without a cooling function, only the proximal end needs to be replaced to achieve the upgrade of the cathode water cooling function, and the original distal end can continue to be used, greatly reducing the transformation cost.

[0045] In a specific design of the proximal drive end, the drive end includes a end base 102, a central support 101, and a drive shaft sleeve 201. The central support 101 is installed on the end base 102. The water inlet channel is located inside the central support 101. The drive shaft sleeve 201 is sleeved outside the central support 101 and is rotatably installed on the end base 102. The water outlet channel is located outside the central support 101. The target cylinder mounting flange 202 is installed on the drive shaft sleeve 201. The water inlet channel is arranged inside the central support, and the water outlet channel is arranged inside the drive shaft sleeve and between the drive shaft sleeve 201 and the central support 101, so that the coolant fills the main components inside the end body, improving the cooling effect of the end body during operation and ensuring the working reliability.

[0046] In actual design, the end base is set as a cylindrical structure. The central support and the drive shaft sleeve 201 are installed inside the end base. The central support includes a mounting part connected to the end base and a support part for supporting the magnetic rod. The drive shaft sleeve 201 is sleeved outside the support part. There are bearings and vacuum dynamic seals between the drive shaft sleeve 201 and the inner wall of the end base. To improve the cooling effect, in the specific design of the water outlet channel, the water outlet channel can be arranged between the drive shaft sleeve 201 and the central support. Refer to Figure 7 , the seal is installed on the drive shaft sleeve 201. The water inlet end of the water outlet channel is arranged inside the drive shaft sleeve 201. By improving the cooling effect of the drive shaft sleeve 201, the cooling effect of the seal is greatly improved. In particular, the vacuum dynamic seal located on the side close to the target cylinder between the end base and the drive shaft sleeve 201 is arranged corresponding to the water inlet end of the water outlet channel, effectively enhancing the cooling effect of the sealing structure of the vacuum dynamic seal.

[0047] Refer to Figure 4 , in the specific circuit design, a rotating electrical contact 115 is provided on the central support 101. The end base 102, the central support 101, the rotating electrical contact 115, and the target cylinder mounting flange 202 are electrically connected in sequence to form a target cylinder electrical transmission path. The end base 102, the central support 101, the rotating electrical contact 115, and the target cylinder mounting flange 202, as electrical transmission components, are located in the water outlet channel inside the drive shaft sleeve 201 and are immersed in the coolant during operation to ensure the cooling effect.

[0048] In a further specific design, a spring 114 is provided on the side of the rotary electrical contact 115 away from the target cylinder mounting flange 202. The spring 114 is sleeved outside the central support 101 and connected to the central support 101. The rotary electrical contact 115 is electrically connected to the central support 101 through electrical conduction. Through spring support, the electrical contact reliability between the rotary electrical contact and the target cylinder mounting flange is ensured.

[0049] In addition, the way of connecting the distal ends of the first flow channel and the second flow channel can be achieved through various design methods, and the present application does not limit the way of connecting the distal ends of the first flow channel and the second flow channel. For example Figure 10 As shown, in a specific connection design, a first flow channel 4001 communicating with the water inlet channel is provided in the middle of the magnetic rod 116, and a second flow channel 4002 is formed between the magnetic rod 116 and the inner wall of the target cylinder 205; a return port communicating with the second flow channel 4002 is provided on the side wall of the first flow channel 4001. As Figure 3 As shown, in another specific connection design, a first flow channel 4001 communicating with the water inlet channel is provided in the middle of the magnetic rod 116, a second flow channel 4002 is formed between the magnetic rod 116 and the inner wall of the target cylinder 205, and a third flow channel 4003 communicating the first flow channel 4001 and the second flow channel 4002 is provided inside the target cylinder support flange 207.

[0050] Referring to Figure 6 , in other specific embodiments, when specifically designing the target cylinder mounting flange, in order to ensure that the coolant and gas in the target cylinder are discharged completely, in the specific setting mode of the second coolant port, the second coolant port 2022 includes a first inlet part 20221 and a second inlet part 20222. The first inlet part 20221 is located on the end face of the target cylinder mounting flange 202 away from the end body, and the second inlet part 20222 is located on the outer peripheral surface of the target cylinder mounting flange 202. When filling with water, the gas in the upper part of the second flow channel in the target cylinder can enter the annular chamber simultaneously from the first inlet part located on the flange end face and the second inlet part located on the side wall of the flange outer edge, forming a three-dimensional inlet area, increasing the inlet area, improving the exhaust efficiency, and ensuring that the gas is discharged completely. Similarly, when draining water, the coolant can enter the annular chamber in the flange simultaneously from the first inlet part and the second inlet part, ensuring that the coolant is discharged completely.

[0051] Referring to Figure 11 , this embodiment also proposes a magnetron sputtering device, including the above-mentioned rotary cathode.

[0052] In this embodiment, for the proposed magnetron sputtering device, rotating cathode and end head assembly, the target cylinder mounting flange is mounted on the mounting end of the end head body. An opening corresponding to the water outlet end of the water inlet channel is provided in the middle of the target cylinder mounting flange. An annular chamber extending around the opening is provided in the middle of the target cylinder mounting flange. A first coolant port communicating with the water inlet end of the water outlet channel is provided on one side of the annular chamber close to the end head body. A second coolant port communicating with the internal space of the target cylinder is provided on the side of the annular chamber far from the end head body. The second coolant port is located at the edge of the target cylinder mounting flange. Through the above-optimized end head assembly, an annular chamber is provided inside the flange, and then based on the annular chamber, the second coolant port communicating with the end of the internal flow channel of the target cylinder is arranged at the edge of the flange. While ensuring the sealing effect of the flange edge, the second coolant port is close to the inner wall of the target cylinder, enabling the gas in the target cylinder to be completely discharged when filled with water and there is no exhaust dead angle.

[0053] The rotating cathode and end head assembly of this embodiment will be described in detail below through specific examples.

[0054] In the cooling water channel structure design of the prior art, when filling with water, the cooling water in the upper part of the target cylinder cannot be filled completely, and the cooling of the target cylinder is not sufficient under high-power processes. When draining water, the cooling water in the target cylinder cannot be completely discharged from the target cylinder, polluting the on-site environment; in a high-power or high-temperature environment, the cooling of the vacuum dynamic sealing lip-shaped rubber ring is not sufficient; the return water channel is arranged at the other end of the target cylinder and cannot be arranged at the end of the remote magnetic rod. In some equipment upgrade and transformation projects, it is necessary to replace all the end heads at both ends of the target cylinder to achieve the function of filling the target cylinder with water.

[0055] The problems to be solved in this embodiment are that the target cylinder can be completely filled with water, the water in the target cylinder can be completely drained when draining water, the cooling effect of the vacuum dynamic sealing lip-shaped rubber ring is increased, and at the same time, all the functions of water inlet and outlet, dynamic transmission and introduction function of electric power, driving function of target cylinder rotation, and channel openings for filling with water / full drainage are all arranged at one end of the target cylinder to form a unit integrating all functions. The return water port of the complete water channel formed by the magnetic rod and the target cylinder can be designed arbitrarily at the other end of the target cylinder, which can be on the magnetic rod, or on the functional block at the other end of the target cylinder, or both.

[0056] The rotating cathode of this embodiment includes a proximal drive end head, a distal support end head, a magnetic rod, and a target cylinder.

[0057] The proximal end head includes: a central support 101, a head base 102, a water and electricity access block 106, a coolant dynamic seal 108, a vacuum dynamic seal 109, a first bearing 110, a second bearing 111, a synchronous belt 112, a conductive belt 113, a spring 114, a rotary electrical contact 115, a drive shaft sleeve 201, a target cylinder mounting flange 202, a target cylinder 205, and a target cylinder support flange 207. In the way of connecting electricity at the end head, the power supply is connected to the water and electricity access block 106, and then transmitted in sequence to the head base 102, the central support 101, the conductive belt 113, and the rotary electrical contact 115. Then the static rotary electrical contact 115 is transmitted to the rotating target cylinder mounting flange 202, and thus transmitted to the target cylinder 205.

[0058] The head base 102 and the central support 101 are both made of conductive metal. To ensure the insulation performance, an insulating plate 104 and a transition base 105 can be arranged on the head base to achieve insulation and grounding. The insulating plate is made of insulating engineering plastic or other insulating materials. The transition base 105 is made of conductive metal or insulating material. The water and electricity access block 106 is made of conductive metal.

[0059] A coolant dynamic seal 108 is arranged between the head base and the rotating shaft sleeve for the dynamic seal of the coolant at the water outlet end of the water outlet channel. The coolant dynamic seal 108 is made of a lip-shaped oil seal of rubber material or others.

[0060] The head base and the rotating shaft sleeve are rotationally matched through the first bearing 110 and the second bearing 111, and a vacuum dynamic seal 109 is also arranged between them for the dynamic seal of vacuum - atmosphere on the side of the rotating shaft sleeve close to the target cylinder. The vacuum dynamic seal 109 is made of a lip-shaped oil seal of rubber material or others.

[0061] The synchronous belt 112 bypasses the rotating shaft sleeve for driving the drive shaft sleeve 201 to rotate. The conductive belt 113 realizes the electrical transmission between the central support 101 and the rotary electrical contact 115. The spring 114 is used to realize the pressing between the static rotary electrical contact 115 and the dynamic target cylinder mounting flange 202. In actual driving, gears or electromagnetic coupling and other methods can be used instead of the synchronous belt to realize the driving of the rotating shaft sleeve.

[0062] The target cylinder mounting flange 202 is fixed on the drive shaft sleeve 201 through bolts 203 to realize the connection and sealing of the drive shaft sleeve 201 and the target cylinder 205, provide a circular sealing surface for the vacuum dynamic seal and the coolant dynamic seal inside the target cylinder, and provide a return channel for the coolant and an exhaust channel for gas when filling water, provide a discharge channel for the coolant when draining water, and form a gap close to the inner wall of the target cylinder 205 at the place connected to the target cylinder 205. The target cylinder mounting flange 202 is made of conductive metal. The end of the target cylinder can be fixed on the two end flanges through a locking clip.

[0063] The magnetic rod 116 realizes the magnetic field required for magnetron sputtering coating. The hollow center provides a channel for the coolant to flow from one end of the target cylinder to the other end. The target cylinder 205 is made of sputtering material and is sleeved outside the magnetic rod. The distal support end 301 is provided with a target cylinder support flange 207 for the distal support of the magnetic rod 116 and the coolant seal.

[0064] Water filling: The coolant enters the water inlet channel from the water and electricity access block 106, then enters the hollow center of the magnetic rod 116 through the coolant port in the flange, enters the space between the magnetic rod and the target cylinder through several coolant ports on the distal target cylinder support flange 207, enters the water outlet channel through the coolant port of the target cylinder mounting flange 202, and returns to the water and electricity access block 106.

[0065] During operation, the target cylinder 205 is in a rotating state, and the coolant port of the target cylinder mounting flange 202 is in a rotating state. After water filling for a period of time, the air in the upper part of the target cylinder 205 is discharged when the second coolant port 2022 rotates to the uppermost position.

[0066] Drainage: Compressed air enters the coolant port of the flange from the water and electricity access block 106 through the water inlet channel, then enters the hollow center of the magnetic rod 116, enters the space between the magnetic rod 116 and the target cylinder 205 through several coolant ports on the distal target cylinder support flange 207, enters the water outlet channel through the coolant port of the target cylinder mounting flange 202, and returns to the water and electricity access block 106.

[0067] During operation, the target cylinder 205 is in a rotating state, and the coolant port of the target cylinder mounting flange 202 is in a rotating state. After drainage for a period of time, the coolant at the lowermost part of the target cylinder 205 is completely discharged when the coolant port rotates to the lowermost position.

[0068] This application integrates functions such as water inlet and outlet, dynamic transmission and introduction of electric power, rotation drive function of the target material. All the channel openings for water filling and complete drainage are set at one end of the target material, forming a unit integrating all functions, improving the reliability of the equipment operating in high-power and high-temperature environments. The highly integrated design of functions can reduce manufacturing costs, reduce the modification content of existing equipment upgrades, and greatly reduce the equipment upgrade and transformation costs. When draining, the cooling water in the target material can be completely discharged from the target material, keeping the equipment site clean.

[0069] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, making equivalent replacements or changes, should be covered by the protection scope of the present invention.

Claims

1. A terminal assembly, characterized in that: include: The end body and the target barrel mounting flange (202); A water inlet channel and a water outlet channel are provided in the terminal body, the water outlet end of the water inlet channel and the water inlet end of the water outlet channel are located at the mounting end of the terminal body, a target barrel mounting flange (202) is mounted on the mounting end of the terminal body, an opening corresponding to the water outlet end of the water inlet channel is provided in the middle of the target barrel mounting flange (202), an annular chamber extending around the opening is provided in the middle of the target barrel mounting flange (202), a first coolant port (2021) communicating with the water inlet end of the water outlet channel is provided on a side of the annular chamber close to the terminal body, a second coolant port (2022) communicating with the inside of the target barrel (205) is provided on a side of the annular chamber away from the terminal body, and the second coolant port (2022) is located at the edge of the target barrel mounting flange (202); The second coolant port (2022) comprises a first inlet portion (20221) and a second inlet portion (20222), wherein the first inlet portion (20221) is located on an end surface of a target barrel mounting flange (202) away from the end head body, and the second inlet portion (20222) is located on an outer peripheral surface of the target barrel mounting flange (202).

2. The tip assembly according to claim 1, characterized in that: The end head body comprises an end head base (102), a central support (101), and a drive shaft sleeve (201); the central support (101) is mounted on the end head base (102); the water inlet channel is located inside the central support (101); the drive shaft sleeve (201) is sleeved outside the central support (101) and is rotatably mounted on the end head base (102); the water outlet channel is located outside the central support (101); and the target barrel mounting flange (202) is mounted on the drive shaft sleeve (201).

3. The tip assembly according to claim 2, characterized in that: A rotating electrical contact (115) is provided on the central support (101), and the end base (102), the central support (101), the rotating electrical contact (115) and the target barrel mounting flange (202) are electrically connected in sequence to form a target barrel electrical transmission path.

4. The tip assembly according to claim 3, characterized in that: A spring (114) is provided on the side of the rotating electric contact (115) away from the target barrel mounting flange (202); the spring (114) is sleeved outside the central support (101) and connected to the central support (101); the rotating electric contact (115) and the central support (101) are electrically connected via a conductive tape.

5. A rotating cathode, characterized in that: Comprising the tip assembly according to any one of claims 1-4.

6. The rotating cathode according to claim 5, characterized in that: include: A driving end head, a supporting end head (301), a magnetic rod (116) and a target barrel (205); the driving end head adopts an end head assembly, the supporting end head (301) is provided with a rotatably mounted target barrel supporting flange (207), the magnetic rod (116) is located between the driving end head and the supporting end head (301), one end of the magnetic rod (116) is mounted on the central support (101) and the other end is mounted on the target barrel supporting flange (207), the target barrel (205) is sleeved outside the magnetic rod (116), and the two ends of the target barrel (205) are respectively mounted on the target barrel mounting flange (202) and the target barrel supporting flange (207); A first flow channel (4001) communicating with the water inlet channel is provided in the middle of the magnetic bar (116), a second flow channel (4002) communicating with the water outlet channel is provided between the magnetic bar (116) and the inner wall of the target tube (205), and the first flow channel (4001) and the second flow channel (4002) are communicated.

7. The rotating cathode according to claim 6, characterized in that: The magnetic bar (116) is provided with a reflux port connecting the first flow channel (4001) and the second flow channel (4002), and the reflux port is located on the side wall of the first flow channel (4001) at an end away from the driving end.

8. The rotating cathode according to claim 6, characterized in that: A third flow channel (4003) communicating with the first flow channel (4001) and the second flow channel (4002) is provided inside the target barrel supporting flange (207).

9. A magnetron sputtering device, characterized in that: Comprising a rotating cathode according to any one of claims 5-8.

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