Multi-inlet gas inlet cavity with scraper for exhaust gas treatment equipment
By designing a multi-inlet air intake chamber with a scraper, and utilizing a combination of scrapers and rollers, the problem of dust blockage in the air intake chamber was solved, enabling continuous operation and efficient operation of the waste gas treatment equipment.
Patent Information
- Application Number
- CN202411529811.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-30
- Publication Date
- 2025-12-05
- Estimated Expiration
- 2044-10-30
AI Technical Summary
The air intake chamber of existing waste gas treatment equipment is prone to clogging due to dust, causing the equipment to malfunction.
A multi-inlet air intake chamber with a scraper is designed. The support frame is driven to rotate by a drive component. The scraper removes dust from the side wall of the air intake chamber. The bottom scraping module and the upper roller work together to prevent dust accumulation and ensure smooth airflow.
It effectively prevents blockage of the air intake chamber, ensures continuous operation of the waste gas treatment equipment, reduces the risk of equipment downtime, and improves equipment efficiency and reliability.
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Figure CN119532556B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of waste gas treatment, and particularly relates to a multi-inlet gas inlet cavity with scrapers for a waste gas treatment device. BACKGROUND
[0002] With the increasing prosperity of the semiconductor industry, the production capacity is increasing, and various waste gases (NF3, PH3, B2H6, SiH4, etc.) are generated in the production process. Most of these gases are harmful to the human body and the environment. The discharged waste gas is mostly heavier than air. If it is discharged into the atmosphere, it will spread and deposit on the ground after spreading, and reach a very high concentration, causing serious environmental pollution and endangering human health. If a fire source is encountered, a fire will occur, and even an explosion will occur. Therefore, the market demand for waste gas treatment equipment is very large. However, due to the different internal facilities and environments of semiconductor manufacturers, there is a great demand for various practical special devices for waste gas treatment equipment. At present, the waste gas treatment equipment includes a gas inlet cavity. In the process of waste gas entering the gas inlet cavity, dust blocks the gas inlet cavity (silane reacts with oxygen to produce a large amount of silicon dioxide), causing the device to stop running. SUMMARY
[0003] The present application provides a multi-inlet gas inlet cavity with scrapers for a waste gas treatment device to solve the problem of dust blocking the gas inlet cavity in the prior art, which causes the device to stop running.
[0004] The present application provides a multi-inlet gas inlet cavity with scrapers for a waste gas treatment device, comprising:
[0005] A gas inlet cavity device has a gas inlet cavity inside, and an outlet port is provided at the bottom of the gas inlet cavity device, the outlet port is provided with a limiting ring extending radially inward, and a plurality of gas inlet ports are provided on the side wall of the gas inlet cavity device;
[0006] A cavity scraper device includes a driving component, a support frame, a plurality of scrapers, and a plurality of lower rollers. The support frame is rotatably arranged in the gas inlet cavity, the driving component is connected with the support frame, and the driving component is used to drive the support frame to rotate. A plurality of scrapers are arranged at intervals on the outer periphery of the support frame, and the scrapers are used to scrape off the dust on the side wall of the gas inlet cavity when the support frame rotates. A plurality of lower rollers are arranged at intervals in the circumferential direction at the bottom of the support frame and are in rolling cooperation with the limiting ring;
[0007] A plurality of gas inlet devices are in one-to-one correspondence with a plurality of gas inlet ports and are in communication. The gas inlet device is used to input air into the inside of the gas inlet cavity device.
[0008] According to the multi-inlet gas inlet cavity with scrapers for a waste gas treatment device provided by the present application, the scrapers are parallel to the side wall of the gas inlet cavity, and the distance between adjacent two scrapers is equal.
[0009] According to the application, the multi-inlet scraping blade gas inlet cavity for waste gas treatment equipment is characterized in that the scraping blade device in the cavity further comprises:
[0010] A plurality of bottom scraping modules are arranged at the bottom of the support frame in a circumferential direction, and a plurality of lower rollers are respectively installed on the plurality of bottom scraping modules through lower roller shafts.
[0011] According to the application, the multi-inlet scraping blade gas inlet cavity for waste gas treatment equipment is characterized in that the scraping blade device in the cavity further comprises:
[0012] A plurality of upper rollers are arranged at the upper part of the support frame in a circumferential direction, and the upper rollers are horizontally arranged and installed on the support frame through upper roller shafts.
[0013] According to the application, the multi-inlet scraping blade gas inlet cavity for waste gas treatment equipment is characterized in that the driving component comprises:
[0014] A driving assembly is arranged at the top of the gas inlet cavity device.
[0015] A driving shaft is connected to the driving assembly at one end.
[0016] A toothed disc is arranged at the upper part of the support frame.
[0017] A driving rod is arranged inside the gas inlet cavity, and the other end of the driving shaft is connected to the driving rod.
[0018] According to the application, the multi-inlet scraping blade gas inlet cavity for waste gas treatment equipment is characterized in that the driving component further comprises:
[0019] A connecting rod is connected to the driving rod at one end, and the other end of the connecting rod is connected to the other end of the driving shaft through a shaft coupling after passing through the top of the gas inlet cavity device.
[0020] An oil seal is arranged on the outer periphery of the connecting rod and between the outer periphery of the connecting rod and the top wall of the gas inlet cavity device.
[0021] A sealing ring is arranged on the outer periphery of the connecting rod and between the outer periphery of the connecting rod and the top wall of the gas inlet cavity device.
[0022] According to the application, a multi-inlet gas inlet cavity with a scraper for a waste gas treatment device is provided.
[0023] The gas inlet cavity is formed in the interior of the gas inlet cavity shell, the side wall of the gas inlet cavity shell is provided with a plurality of gas inlet ports arranged in a circumferential direction, and two adjacent gas inlet ports are arranged in a staggered manner in an up-down direction.
[0024] According to the application, a multi-inlet gas inlet cavity with a scraper for a waste gas treatment device is provided.
[0025] According to the application, a multi-inlet gas inlet cavity with a scraper for a waste gas treatment device is provided.
[0026] The overflow flange includes a flange body and a flange cover, both of which are arranged at the bottom of the limiting ring, the flange body is located outside the flange cover, the inner side of the flange body is provided with a first convex ring extending radially inward, the first convex ring is located below the flange cover, the upper surface of the first convex ring is formed with a flow guide groove, and the outer side of the flange body is provided with a liquid inlet port in communication with the flow guide groove.
[0027] According to the application, a multi-inlet gas inlet cavity with a scraper for a waste gas treatment device is provided.
[0028] The multi-inlet gas inlet cavity with a scraper for a waste gas treatment device provided by the application can prevent dust on the side wall of the gas inlet cavity from blocking the gas inlet cavity by driving the support frame to rotate and scraping the dust with the scraper, thereby avoiding the waste gas treatment device from stopping working due to the blocking of the gas inlet cavity. BRIEF DESCRIPTION OF DRAWINGS
[0029] In order to make the technical solutions in the present application or the prior art clearer, the accompanying drawings needed in the embodiments or the prior art description will be briefly introduced. Obviously, the accompanying drawings in the following description are only some embodiments of the present application, and other accompanying drawings can be obtained by those skilled in the art without any creative effort on the basis of these accompanying drawings.
[0030] Figure 1 is a three-dimensional structural schematic view of a multi-inlet blade-equipped gas inlet cavity of a waste gas treatment device provided by the present application.
[0031] Figure 2 is a side view structural schematic view of a multi-inlet blade-equipped gas inlet cavity of a waste gas treatment device provided by the present application.
[0032] Figure 3 is a three-dimensional structural schematic view of a multi-inlet blade-equipped gas inlet cavity of a waste gas treatment device provided by the present application.
[0033] Figure 4 is a top view structural schematic view of a multi-inlet blade-equipped gas inlet cavity of a waste gas treatment device provided by the present application.
[0034] Figure 5 is a side view sectional structural schematic view of a gas inlet cavity device provided by the present application.
[0035] Figure 6 is Figure 5 a local enlarged structural schematic view of B in
[0036] Figure 7 is a structural schematic view of a gas inlet blade provided by the present application.
[0037] Figure 8 is a structural schematic view of a gas inlet blade provided by the present application.
[0038] Figure 9 is a structural schematic view of a gas inlet blade provided by the present application.
[0039] Figure 10 is Figure 8 a structural schematic view of A-A section in
[0040] Figure 11 is a structural schematic view of a negative pressure detection pipe blade provided by the present application.
[0041] Figure 12 is a structural schematic view of a negative pressure detection pipe blade cooperating with a gas inlet connecting pipe provided by the present application.
[0042] Figure 13 is a sectional view schematic view of a negative pressure detection pipe blade cooperating with a gas inlet connecting pipe provided by the present application.
[0043] Figure 14 is a structural schematic view of a guide assembly provided by the present application.
[0044] Figure 15 is a structural schematic view of a flexible scraper provided by the present application.
[0045] Figure 16 is a structural schematic view of a flexible scraper provided by the present application. Figure 13 is a partial enlarged structural schematic view of A of the flexible scraper.
[0046] Figure 17 is a structural schematic view of an air inlet scraper provided by the present application.
[0047] Figure 18 is a structural schematic view of an air inlet scraper provided by the present application.
[0048] Figure 19 is a structural schematic view of an air inlet scraper provided by the present application.
[0049] Figure 20 is a structural schematic view of an air inlet scraper provided by the present application.
[0050] Reference signs:
[0051] 11, connecting flange; 20, sealing assembly; 21, sealing flange; 22, motor flange; 23, step; 24, connecting shaft; 25, outer sealing ring; 26, inner sealing ring; 30, scraper; 40, driving assembly; 41, motor; 42, speed reducer; 50, scraper fixing plate; 60, purging air inlet pipe;
[0052] 100, air inlet scraper;
[0053] 110, scraper assembly; 111, scraper plate; 112, air vent hole; 113, circumferential side surface;
[0054] 120, scraper connecting assembly; 121, first scraper connecting rod; 122, first flexible connecting piece; 123, second scraper connecting rod; 124, air outlet hole;
[0055] 130, scraper driving assembly;
[0056] 140, housing; 141, guide pipe; 142, fixing pipe; 143, straight-through type sleeve; 144, straight pipe section; 145, elbow pipe section;
[0057] 150, sleeve air inlet pipe; 160, throttle valve;
[0058] 210, guide assembly; 211, first guide pipe; 212, second guide pipe; 213, elbow pipe;
[0059] 220, flexible scraper; 221, detection port scraper section; 222, flexible section; 223, connecting section;
[0060] 230, driving assembly; 231, driving cylinder; 2311, piston rod; 232, cylinder connecting sleeve;
[0061] 240, second connecting sleeve; 241, scraper connecting rod;
[0062] 250, first connecting sleeve; 251, pressure detection port;
[0063] 300, air inlet cavity device; 310, air inlet cavity; 311, air outlet port; 312, limiting ring; 313, air inlet port; 314, air inlet cavity shell; 315, interlayer cavity; 316, heat source mounting port; 317, inlet pipe; 318, second interface; 400, cavity scraper device; 410, driving component; 411, support frame; 412, scraper; 413, lower roller; 414, scraping bottom module; 415, upper roller; 417, driving shaft; 418, toothed disc; 419, driving rod; 500, air inlet device; 510, air inlet pipe; 520, negative pressure detection pipe scraper; 530, air inlet connecting pipe; 540, negative pressure detection port; 610, flange body; 611, flange cover; 612, first convex ring; 613, flow guide groove; 614, second convex ring; 615, annular flow channel; 616, camber surface. DETAILED DESCRIPTION
[0064] In order to make the objects, technical solutions and advantages of the present application clearer, the technical solutions in the present application will be clearly and completely described below with reference to the drawings in the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.
[0065] In the description of the embodiments of the present application, it should be noted that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the embodiments of the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.
[0066] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.
[0067] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0068] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.
[0069] like Figures 1 to 5 As shown, the multi-inlet scraper-equipped air intake chamber of the waste gas treatment equipment includes an air intake chamber device 300, an internal scraper device 400, and multiple air intake devices 500. The air intake chamber device 300 has an air intake chamber 310 inside, and an air outlet port 311 is provided at the bottom of the air intake chamber device 300. The air outlet port 311 is provided with a radially inwardly extending limiting ring 312, and multiple air intake ports 313 are provided on the side wall of the air intake chamber device 300.
[0070] The cavity scraper device 400 includes a drive component 410, a support frame 411, multiple scrapers 412, and multiple lower rollers 413. The support frame 411 is rotatably disposed within the air intake cavity 310. The drive component 410 is connected to the support frame 411 and is used to drive the support frame 411 to rotate. The multiple scrapers 412 are spaced apart on the outer periphery of the support frame 411 and are used to scrape dust off the sidewalls of the air intake cavity 310 when the support frame 411 rotates. The multiple lower rollers 413 are spaced apart circumferentially at the bottom of the support frame 411 and roll in cooperation with the limiting ring 312. By setting the lower rollers 413, the support frame 411 can be supported, while avoiding contact between the support frame 411 and the limiting ring 312, thus reducing the friction during the rotation of the support frame 411. Multiple air intake devices 500 are connected to multiple air intake ports 313 one-to-one and are used to input air into the interior of the air intake cavity device 300.
[0071] When process exhaust gas enters the inlet chamber 310, it reacts rapidly with the reactive gas inside the chamber at high temperatures. Some dust will flow out from the bottom of the inlet chamber 310 through the airflow, while a small amount of dust will adhere to the inner wall of the inlet chamber 310. After prolonged operation, dust blockage will occur in the inlet chamber 310. The exhaust gas treatment equipment provided by this invention uses a multi-inlet inlet chamber with a scraper. The drive component 410 drives the support frame 411 to rotate. When the support frame 411 rotates, the scraper 412 scrapes away the dust on the side wall of the inlet chamber 310, preventing dust from clogging the inlet chamber 310 and avoiding the exhaust gas treatment equipment from stopping operation due to blockage of the inlet chamber 310.
[0072] In one embodiment of the present invention, the cavity scraper device 400 is made of corrosion-resistant material, the air inlet cavity 310 is circular, the support frame 411 is circular, the scraper 412 is vertically arranged, the scraper 412 is parallel to the side wall of the air inlet cavity 310, the distance between two adjacent scrapers 412 is equal, the scraper 412 is welded to the support frame 411, and the number of scrapers 412 is determined according to actual needs.
[0073] In one embodiment of the present invention, such as Figure 5 As shown, the cavity scraper device 400 also includes multiple scraping modules 414. Each scraping module 414 is rectangular and is welded to the bottom of the support frame 411. Alternatively, the scraping modules 414 and the support frame 411 can be connected by screws. The multiple scraping modules 414 are spaced circumferentially at the bottom of the support frame 411, and the distance between adjacent scraping modules 414 can be the same or different. Multiple lower rollers 413 are respectively mounted on the multiple scraping modules 414 via their shafts. The scraping modules 414 are used to push the dust falling on the limiting ring 312 towards the air outlet 311.
[0074] Although the scraper 412 can remove dust from the side wall of the air intake chamber 310, the dust from the scraper 412 will fall onto the limiting ring 312 as it moves downward. By setting a bottom scraping module 414 at the bottom of the support frame 411, the bottom scraping module 414 can push the dust at the bottom of the air intake chamber 310 out of the air intake chamber 310 through the air outlet 311.
[0075] In one embodiment of the present invention, such as Figure 5 As shown, the cavity scraper device 400 also includes multiple upper rollers 415. These upper rollers 415 are circumferentially spaced on the upper part of the support frame 411. The upper rollers 415 are horizontally positioned and mounted on the support frame 411 via their shafts. The upper rollers 415 roll in contact with the side wall of the air intake cavity 310. Because the contact point between the drive rod 419 and the gear disc 418 is not at the center of the gear disc 418, the gear disc 418 experiences uneven force, tending to be biased towards one side. By providing upper rollers 415 on the upper part of the support frame 411, and allowing them to roll in contact with the side wall of the air intake cavity 310, the upper rollers 415 both limit the movement of the support frame 411, ensuring it is centered within the air intake cavity 310, and prevent contact between the support frame 411 and the side wall of the air intake cavity 310, thus reducing friction during the rotation of the support frame 411.
[0076] In one embodiment of the present invention, such as Figures 1 to 5 As shown, the drive component 410 includes a drive assembly, a drive shaft 417, a geared disc 418, and a drive rod 419. The drive assembly is located at the top of the air intake chamber device 300, and the drive assembly and drive shaft 417 are located outside the air intake chamber 310. The drive shaft 417 is vertically arranged, and one end of the drive shaft 417 is connected to the drive assembly. The geared disc 418 is annular and is located on the upper part of the support frame 411. The geared disc 418 and the support frame 411 are coaxially arranged. The geared disc 418 is welded to the support frame 411 or integrally formed with the support frame 411. The geared disc 418 is an internal geared ring; however, the geared disc 418 can also be an external geared ring. A drive rod 419 is disposed inside the air intake chamber 310, and is coaxially arranged with the drive shaft 417. The other end of the drive rod 419 is connected to the drive shaft 417. Multiple positioning blocks are spaced apart on the bottom edge of the drive rod 419. The shape of the positioning blocks matches the shape of the protruding teeth of the gear disk 418, and the positioning blocks are used to mesh with the protruding teeth of the gear disk 418. In this embodiment, three protruding teeth are provided, and the distance between any two adjacent protruding teeth is equal. When the drive rod 419 rotates, the protruding teeth and positioning blocks cooperate to drive the gear disk 418 to rotate.
[0077] Furthermore, the drive assembly includes a motor and a reducer. The motor shaft is connected to the input shaft of the reducer, and the output shaft of the reducer is connected to one end of the drive shaft 417. Both the motor housing and the reducer housing are connected to the motor mounting plate, and the motor mounting plate is connected to the top of the air intake housing 314 by screws.
[0078] In one embodiment of the present invention, such as Figures 1 to 5 As shown, the drive component 410 also includes a connecting rod, an oil seal, and a sealing ring. One end of the connecting rod is connected to the drive rod 419, and the other end of the connecting rod passes through the top of the air intake chamber device 300 and is then connected to the other end of the drive shaft 417 via a coupling. Specifically, the top of the air intake chamber housing 314 is provided with a connecting hole, which communicates with the air intake chamber 310 but not with the interlayer chamber 315. One end of the connecting rod is welded to the drive rod 419 or integrally formed, and the other end of the connecting rod passes through the connecting hole and is connected to the coupling, which is then connected to the other end of the drive shaft 417.
[0079] An oil seal is fitted around the outer periphery of the connecting rod, located between the outer peripheral surface of the connecting rod and the top wall of the air intake chamber device 300. Specifically, the oil seal is located between the outer peripheral surface of the connecting rod and the inner wall of the connecting hole. The oil seal is used to seal the gap between the outer peripheral surface of the connecting rod and the inner wall of the connecting hole. A sealing ring is fitted around the outer periphery of the connecting rod, located between the outer peripheral surface of the connecting rod and the top wall of the air intake chamber device 300. Specifically, the sealing ring is located between the outer peripheral surface of the connecting rod and the inner wall of the connecting hole. The sealing ring is used to seal the gap between the outer peripheral surface of the connecting rod and the inner wall of the connecting hole. Preferably, the sealing ring is an O-ring.
[0080] When the motor drives the reducer to rotate, the motor drives the drive shaft 417 to rotate. The drive shaft 417 drives the connecting rod to rotate through the coupling. The connecting rod drives the support frame 411 to rotate through the drive rod 419. The support frame 411 drives the scraper 412 to rotate in the air intake chamber 310 with the cooperation of the upper and lower rollers 413. During the rotation, the air intake chamber 310 is doubly sealed by the sealing ring and the oil seal. During the rotation, some of the dust scraped off by the scraper 412 on the chamber wall and top will remain at the bottom of the chamber. At this time, the bottom scraping module 414 pushes the dust out of the bottom of the air intake chamber 310.
[0081] In one embodiment of the present invention, such as Figure 5As shown, the air intake chamber device 300 includes an air intake chamber housing 314, and an air intake chamber 310 is formed inside the air intake chamber housing 314. The side wall of the air intake chamber housing 314 is provided with a plurality of air intake ports 313. The plurality of air intake ports 313 are arranged at intervals along the circumference, and adjacent two air intake ports 313 are staggered in the vertical direction. This arrangement allows for more air intake ports 313 to be provided in a limited space. The air inlet port 313 can be configured with 6, 8, 10, 12 or more as needed. The air inlet port 313 is equipped with an air inlet flange. The air inlet flange is a standard KF vacuum flange, which can be easily assembled and disassembled. The air inlet flange and the air inlet pipe 510 are inserted into each other. This connection method is used to spatially isolate the exhaust gas from the medium in the interlayer cavity 315, which can greatly reduce the impact of the interlayer medium on the exhaust gas flowing through the air inlet pipe 510. For example, some high-temperature exhaust gas will form dust during the cooling process. If the air inlet pipe 510 is not isolated from the cooling medium in the interlayer cavity 315, a large amount of dust will be formed at the air inlet and block the air inlet pipe 510.
[0082] A sandwiched cavity 315 is provided inside the side wall and top wall of the inlet chamber housing 314. Various media can be introduced into the sandwiched cavity 315 as needed. For example, cooling water can be introduced to reduce the temperature between the inner and outer walls of the cavity, while high-temperature steam can be introduced to protect the internal temperature. The sandwiched cavity 315 is provided inside the side wall and top wall of the inlet chamber housing 314 for the following three reasons: 1. Corrosive gases (fluorides) in the exhaust gas corrode the inner wall of the inlet chamber 310 at high temperatures. Cooling water can reduce the inner wall temperature, thus reducing and slowing down corrosion. 2. High temperatures lead to high external temperatures for the inlet chamber 310. Cooling water can lower the external wall temperature of the inlet chamber 310, protecting employee safety during equipment maintenance and inspection. 3. Some process exhaust gases require higher temperatures to decompose. Using high-temperature steam can protect the internal temperature, reduce heat loss, and thus increase the internal temperature.
[0083] The lower part of the outer wall of the intake chamber housing 314 is provided with a first interface communicating with the interlayer cavity 315. Preferably, multiple first interfaces are provided, and the multiple first interfaces are arranged at intervals along the outer periphery of the intake chamber 310. The first interface can input or output a medium. The outer side of the top wall of the intake chamber housing 314 is provided with a second interface 318 communicating with the interlayer cavity 315. Multiple second interfaces 318 are provided, and the second interfaces 318 can input or output a medium. When using a liquid medium, it can be input into the interlayer cavity 315 through the second interface 318 and output from the first interface; when using a gaseous medium, it can be input into the interlayer cavity 315 through the first interface and output from the second interface 318. This flexible installation according to different media allows the medium to fill the interlayer cavity 315 to achieve better cooling or heat preservation effects. The limiting ring 312 is located at the bottom of the intake chamber housing 314. The limiting ring 312 is detachably connected to the intake chamber housing 314. Preferably, the limiting ring 312 is connected to the intake chamber housing 314 by bolts.
[0084] Furthermore, the top of the intake chamber housing 314 has a fixing pull ring. When maintaining the chamber, the intake chamber housing 314 can be flipped over and fixed by the chain and pull ring, which facilitates maintenance.
[0085] In one embodiment of the present invention, the top of the air intake chamber housing 314 is provided with a heat source mounting port 316 communicating with the air intake chamber 310. The heat source mounting port 316 is located at the center of the top of the air intake chamber housing 314. The heat source mounting port 316 is used to install an ion torch or a natural gas burner. The heat source mounting port 316 is sealed by an O-ring or a sealing gasket.
[0086] In one embodiment of the present invention, such as Figure 5 and Figure 6 As shown, the multi-inlet scraper-equipped air inlet chamber of the waste gas treatment equipment also includes an overflow flange. The overflow flange includes a flange body 610 and a flange cover 611. Both the flange body 610 and the flange cover 611 are located at the bottom of the limiting ring 312. Both the flange body 610 and the flange cover 611 are annular. The thickness of the flange body 610 is greater than the thickness of the flange cover 611, and the inner diameter of the flange body 610 is greater than the outer diameter of the flange cover 611. The flange body 610 is located on the outer periphery of the flange cover 611. Preferably, an annular groove is provided on the outer peripheral surface of the flange cover 611, and a sealing ring is provided in the annular groove. The inner side of the flange body 610 and the outer side of the flange cover 611 are sealed together by the sealing ring. An annular groove is provided on the upper surface of the flange cover 611 away from the flange body 610, and a sealing ring is provided in the annular groove. The upper surface of the flange cover 611 and the lower surface of the limiting ring 312 are sealed together by the sealing ring. An annular groove is provided on the upper surface of the flange body 610, and a sealing ring is provided in the annular groove. The upper surface of the flange body 610 and the lower surface of the limiting ring 312 are sealed together by the sealing ring.
[0087] A first convex ring 612 extending radially inward is provided on the inner side of the flange body 610. The width of the first convex ring 612 is smaller than the width of the flange cover 611. The first convex ring 612 is located below the flange cover 611. A guide groove 613 is formed on the upper surface of the first convex ring 612. The guide groove 613 is annular. The side wall of the guide groove 613 away from the flange body 610 is inclined. The inclined surface can reduce the resistance of the medium flowing from the guide groove 613 to the annular flow channel 615 and allow more medium to flow to the arc surface 616 of the second convex ring 614.
[0088] The flange body 610 has multiple liquid inlets connected to the guide channel 613 on its outer side. These inlets are evenly spaced circumferentially, allowing liquid to be introduced from different directions. In this embodiment, four liquid inlets are provided, but the number is not limited to this and can be determined according to actual needs. An inlet pipe 317 connected to the liquid inlets is located on the outer side of the flange body 610. The normal at the connection point between the inlet pipe 317 and the external liquid inlet of the flange body 610 forms a 53.4-degree angle. This liquid inlet is tangent to the guide channel 613. After circulating water is introduced through the four inlets, it rotates and flows within the guide channel 613. This rotational flow ensures that the circulating water is evenly distributed within the guide channel 613 and finally flows out from the beak-shaped opening between the flange cover 611 and the flange body 610.
[0089] A second protruding ring 614 is formed on the lower surface of the flange cover 611 on the side away from the flange body 610. The second protruding ring 614 is annular and protrudes downward relative to the upper surface of the flange body 610. The second protruding ring 614 is located on the side of the first protruding ring 612 away from the flange body 610. The second protruding ring 614 and the side of the first protruding ring 612 away from the flange body 610 cooperate to form an annular flow channel 615 that communicates with the guide groove 613. The thickness of the annular flow channel 615 is less than the thickness of the guide groove 613. In this way, the guide groove 613 plays a certain temporary storage role for the circulating water, which improves the stability of the circulating water in the annular flow channel 615. The outlet of the annular flow channel 615 faces downward.
[0090] In one embodiment of the present invention, such as Figure 6As shown, the side of the second convex ring 614 facing the first convex ring 612 is an arc surface 616, which forms a liquid outlet resembling an eagle's beak between the second convex ring 614 and the first convex ring 612. Circulating water first flows into the guide channel 613 from the inlet pipe 317 and rotates, then flows from the guide channel 613 to the annular flow channel 615. At this time, the flow rate of the circulating water increases. Then, the circulating water is ejected through the eagle-beak liquid outlet, directed towards the side of the first convex ring 612 away from the flange body 610, causing the annular water curtain to flow downwards along the side of the first convex ring 612 away from the flange body 610, thereby washing away dust on the inner wall (the lower part of the flange body 610 is connected to the reaction chamber, which also washes away dust from the inner wall of the reaction chamber).
[0091] In one embodiment of the present invention, the air intake device 500 includes an air intake pipe 510, an air intake scraper 100, and a negative pressure detection tube scraper 520. The air intake pipe 510 is a circular tube, and an air intake connecting pipe 530 communicating with the air intake pipe 510 is provided on the side wall of the air intake pipe 510. The air intake pipe 510 and the air intake connecting pipe 530 are perpendicular to the air intake pipe 510. The air intake pipe 510 and the air intake connecting pipe 530 cooperate to form a three-way connector. The air intake pipe 510 and the air intake connecting pipe 530 are welded together or integrally formed. One end of the air intake pipe 510 is inserted into the air intake port 313 and connected to the air intake flange through a flange. The air intake pipe 510 communicates with the air intake chamber 310 through the air intake port 313. Air enters the air intake pipe 510 through the air intake connecting pipe 530 and then enters the air intake chamber 310 from one end of the air intake pipe 510.
[0092] In one embodiment of the present invention, such as Figure 7 As shown, the air inlet scraper 100 can be used to unclog blocked air intake pipes. The air inlet scraper 100 includes a scraper assembly 110, a scraper connecting assembly 120, and a first scraper drive assembly 130. The scraper assembly 110 is disposed inside the air intake pipe and abuts against the inner wall of the air intake pipe. One end of the scraper connecting assembly 120 is connected to the scraper assembly 110. The first scraper drive assembly 130 is connected to the other end of the scraper connecting assembly 120, and drives the scraper assembly 110 to move via the scraper connecting assembly 120.
[0093] In one embodiment of the present invention, by providing a scraper assembly 110 that can abut against the inner wall of the intake pipe, a scraper connecting assembly 120 connected to the scraper assembly 110, and a first scraper driving assembly 130 for driving the scraper connecting assembly 120, the scraper connecting assembly 120 can be driven by the first scraper driving assembly 130, thereby causing the scraper assembly 110 to move inside the intake pipe, so that the scraper assembly 110 can scrape off the dust on the inner wall of the intake pipe and avoid blockage of the intake pipe. This solves the problems of dust blockage in the intake pipe of the exhaust gas treatment equipment and the difficulty in installing traditional cylinder scrapers in the prior art.
[0094] It should be noted that the first scraper drive assembly 130 can drive the scraper assembly 110 to move along the axial direction of the intake pipe through the scraper connection assembly 120, and can also drive the scraper assembly 110 to rotate relative to the intake pipe.
[0095] In some embodiments of the present invention, the first scraper drive assembly 130 may be a rotary cylinder or a motor, etc. Taking a rotary cylinder as an example, the rotary cylinder drives the air intake pipe connection assembly to rotate, thereby driving the scraper assembly 110 to rotate inside the air intake pipe.
[0096] In some other embodiments, the first scraper drive assembly 130 can be a linear cylinder, which can drive the scraper assembly 110 to move linearly along the axial direction of the air intake pipe through the scraper connecting assembly 120.
[0097] Furthermore, both linear and rotary cylinders are dual-drive cylinders and have two types of air inlet pipes to prevent incorrect installation during the installation process.
[0098] The following description will take the example of the scraper assembly 110 moving linearly along the axial direction of the air intake pipe within the air intake pipe to illustrate the air intake scraper 100 of the present invention.
[0099] like Figure 9 and Figure 10 As shown, in some embodiments of the present invention, the scraper assembly 110 includes a scraper plate 111, the circumferential side surface 113 of which is used to abut against the inner wall of the intake pipe. When the scraper plate 111 moves along the axial direction of the intake pipe, the circumferential side surface 113 of the scraper plate 111 can scrape off the dust on the inner wall of the intake pipe. One end of the scraper connecting assembly 120 is connected to the first end face of the scraper plate 111, and the scraper connecting assembly 120 is used to slide along the axial direction of the intake pipe. The first scraper driving assembly 130 drives the scraper plate 111 to reciprocate along the axial direction of the intake pipe through the scraper connecting assembly 120. By setting the scraper plate 111 whose circumferential side surface abuts against the inner wall of the intake pipe, and the scraper connecting assembly 120 which slides along the axial direction of the intake pipe, and in conjunction with the first scraper driving assembly 130, dust can be removed from the intake pipe along the axial direction. The structure is simple and the operation is convenient.
[0100] Specifically, the linear cylinder is connected to the other end of the scraper connecting assembly 120, and is used to drive the scraper plate 111 to reciprocate along the axial direction of the air intake pipe through the scraper connecting assembly 120, so as to scrape off the dust adhering to the inner wall of the air intake pipe.
[0101] like Figure 10As shown, furthermore, along the axial direction of the air intake pipe, the scraper blade 111 is provided with a vent hole 112. The vent hole 112 can ensure that the gas in the air intake pipe flows smoothly when the scraper blade 111 is working, so as to achieve continuous operation and improve the working speed.
[0102] It should be noted that the shape of the vent 112 is not limited in this embodiment. Preferably, the vent 112 is a fan-shaped hole. The central angle of each fan-shaped hole points to the center of the scraper plate 111.
[0103] Specifically, the cross-section of the scraper blade 111 has the same shape as the cross-section of the intake pipe. For example, the cross-section of the scraper blade 111 is circular.
[0104] like Figures 9 to 11 As shown, the scraper connecting assembly 120 further includes a first scraper connecting rod 121, a first flexible connector 122, and a second scraper connecting rod 123. One end of the first scraper connecting rod 121 is connected to the first end face of the scraper plate 111 and is used for sliding engagement with the intake pipe; one end of the first flexible connector 122 is connected to the other end of the first scraper connecting rod 121. One end of the second scraper connecting rod 123 is connected to the other end of the first flexible connector 122, and the other end of the second scraper connecting rod 123 is connected to the first scraper driving assembly 130. By setting the first scraper connecting rod 121, a mounting base can be provided for the scraper plate 111, which guides the scraper plate 111 and ensures that the scraper plate 111 can move axially along the intake pipe when subjected to force. By providing the first flexible connector 122, the shape of the scraper connecting assembly 120 can be adjusted according to actual conditions. For example, the first flexible connector 122 can be bent, which reduces the footprint of the scraper connecting assembly 120, facilitating the miniaturization of the air inlet scraper 100 and making it easier to use in areas with limited space. Additionally, the installation direction of the first scraper drive assembly 130 can be adjusted to reduce installation space. By providing the second scraper connecting rod 123, a mounting base can be provided for the first scraper drive assembly 130, facilitating force transmission.
[0105] Specifically, one end of the first scraper connecting rod 121 is welded to the first end face of the scraper plate 111, and one end of the first flexible connector 122 is welded to the other end of the first scraper connecting rod 121; one end of the second scraper connecting rod 123 is welded to the other end of the first flexible connector 122, and the other end of the second scraper connecting rod 123 is connected to the piston rod of the cylinder. The piston rod of the cylinder drives the scraper plate 111 to reciprocate along the axial direction of the intake pipe through the second scraper connecting rod 123, the first flexible connector 122, and the first scraper connecting rod 121.
[0106] Furthermore, the first flexible connector 122 can be a tension spring. The tension spring allows the waves to fit tightly together in the free state, ensuring that the scraper blade 111 operates with rigid force, thus improving the dust removal effect.
[0107] like Figures 7 to 10 As shown, the air inlet scraper 100 further includes a housing 140; the housing 140 has an internal receiving cavity, the scraper connecting assembly 120 is located in the receiving cavity, and a ventilation gap is formed between it and the inner sidewall of the housing 140; the housing 140 has an air inlet hole communicating with the ventilation gap; the first scraper connecting rod 121 is a tube, and multiple air outlet holes 124 are opened on the side of the first scraper connecting rod 121, the multiple air outlet holes 124 are spaced apart along the axial direction of the first scraper connecting rod 121, and the air outlet holes 124 communicate with the ventilation gap. When the scraper plate 111 reciprocates along the axial direction of the air inlet pipe, the first scraper connecting rod 121 also moves relative to the air inlet pipe, and the air inlet hole, the first scraper connecting rod 121 and the ventilation gap form a purging pipeline, and the air outlet holes 124 on the first scraper connecting rod 121 have a purging effect. When the scraper blade 111 is working, the airflow from the air outlet 124 will ensure that the first scraper connecting rod 121 is under positive pressure and that there is a continuous flow of air, ensuring that no dust enters the interior of the outer casing 140, thus protecting the inside of the scraper from corrosion by dust and exhaust gas.
[0108] Specifically, one end of the housing 140 is used to connect to the intake pipe, and the other end of the housing 140 is threaded to the cylinder and has a sealing gasket inside. The receiving cavity of the housing 140 can ensure that the piston rod of the cylinder can move freely.
[0109] Specifically, a ferrule air inlet pipe 150 is installed at the air inlet of the outer casing 140, and a throttle valve 160 is installed on the ferrule air inlet pipe 150. The throttle valve 160 is used to adjust the airflow rate into the ventilation gap to ensure that the airflow discharged from the air outlet 124 can prevent dust and exhaust gas from entering the receiving cavity of the outer casing 140, and to ensure that the interior of the air inlet scraper 100 is not corroded by dust and exhaust gas.
[0110] like Figures 7 to 11As shown, the outer casing 140 further includes a guide tube 141 and a fixing tube 142. The guide tube 141 is sleeved on the outside of the first scraper connecting rod 121 and the first flexible connector 122, and one end of the guide tube 141 is used to connect to the air intake pipe. One end of the fixing tube 142 is detachably connected to the other end of the guide tube 141, and the fixing tube 142 is sleeved on the outside of the second scraper connecting rod 123. The other end of the fixing tube 142 is connected to the first scraper drive assembly 130. By setting the guide tube 141, the first scraper connecting rod 121 and the first flexible connector 122 can be protected. By setting the fixing tube 142, the second scraper connecting rod 123 can be protected. By detachably connecting the guide tube 141 and the fixing tube 142, it is convenient to maintain and disassemble the air intake scraper 100. For example, if the tension spring is damaged and needs to be replaced, the scraper plate 111 needs maintenance, or the linear cylinder needs maintenance, the guide tube 141 and the fixing tube 142 can be disassembled first.
[0111] Specifically, the guide tube 141 and the fixed tube 142 are connected by a straight-through type fitting 143 to form a housing 140 with an internal receiving cavity. The fixed tube 142 is threadedly assembled with the linear cylinder. The piston rod of the linear cylinder is connected to the second scraper connecting rod 123. An air inlet is provided on the wall of the fixed tube 142. The length of the fixed tube 142 varies with the stroke of the linear cylinder, and the fixed tube 142 ensures that the movement of the piston rod within its maximum stroke is not interfered with.
[0112] Understandably, the straight-through ferrule 143 can be a straight-through reducing ferrule.
[0113] Furthermore, the guide tube 141 includes a straight section 144 and a bent section 145. The straight section 144 is sleeved on the outside of the first scraper connecting rod 121, and one end of the straight section 144 is used to connect to the intake pipe. The bent section 145 is formed at the other end of the straight section 144; the bent section 145 is sleeved on the outside of the first flexible connector 122; the end of the bent section 145 away from the straight section 144 is detachably connected to the fixed tube 142. Specifically, one end of the straight section 144 is used for welding connection to the intake pipe, the other end of the straight section 144 is integrally formed with the bent section 145, and the other end of the bent section 145 is detachably connected to the fixed tube 142 through a straight-through type clamp 143. A linear cylinder drives the second scraper connecting rod 123 to move relative to the fixed pipe 142. The second scraper connecting rod 123 pushes the first flexible connector 122, which is the tension spring, to deform. At this time, the tension spring moves relative to the bent pipe section 145. The tension spring drives the first scraper connecting rod 121 to move in the straight pipe section 144, and at the same time drives the scraper plate 111 to move along the axial direction of the air intake pipe, thereby scraping away the dust on the inner wall of the air intake pipe.
[0114] Specifically, the bend section 145 is flexible, meaning that the shape of the bend section 145 can change to ensure that the deformation of the first flexible connector 122 is not interfered with by the bend section 145.
[0115] like Figures 17 to 19 As shown, the air inlet scraper 100 includes a drive assembly 40, a sealing assembly 20, and a scraper 30. The other end of the air inlet pipe 510 is provided with an opening. The sealing assembly 20 is provided at the other end of the air inlet pipe 510 and seals the opening. The scraper 30 is provided inside the air inlet pipe 510 and extends spirally along the axial direction of the air inlet pipe 510. The drive assembly 40 is connected to the sealing assembly 20 and the scraper 30. The drive assembly 40 is used to drive the scraper 30 to rotate so as to scrape off the dust on the inner wall of the air inlet pipe 510.
[0116] The air inlet scraper 100 provided by this invention, driven by the drive assembly 40 to rotate the scraper 30, can scrape off the dust on the inner wall of the air inlet pipe 510, effectively solving the problem of dust blockage in the air inlet. Because the scraper 30 is spiral-shaped, one rotation can scrape the inner wall of the air inlet pipe 510 multiple times, improving cleaning efficiency. Furthermore, the spiral-shaped scraper 30 can also push the dust scraped off from the air outlet of the air inlet pipe 510, preventing dust accumulation inside the air inlet pipe 510.
[0117] In one embodiment of the present invention, the scraper 30 is made of a corrosion-resistant material. The pitch of the scraper 30 is equal to its outer diameter, so that the cross-section of the scraper 30 forms a 45° angle with the axis of the air inlet pipe 510, thereby maximizing the dust-propulsion effect of the scraper 30. The length of the scraper 30 is greater than the length of the air inlet pipe 510, so that part of the scraper 30 protrudes from the air inlet pipe 510. The pitch, number of turns, and outer diameter of the scraper 30 can all be adjusted as needed.
[0118] In one embodiment of the present invention, such as Figure 19 As shown, the cross-sectional area of the scraper 30 is circular, semi-circular, triangular, or square. Compared to a scraper 30 with a circular cross-section, scrapers 30 with semi-circular, triangular, or square cross-sections have the best scraping effect. When the cross-section of the scraper 30 is semi-circular, the flat surface of the scraper 30 faces outward, and the round surface faces inward, to reduce the contact area between the scraper 30 and the dust, thereby reducing the accumulation of dust on the scraper 30. Both semi-circular and square scrapers 30 utilize the sharp corners of the scraper 30 to remove dust from inside the intake pipe 510.
[0119] When the air intake pipe 510 is horizontally positioned, the scraper 30 is also horizontal. The dust scraped off by the scraper 30 can be carried out of the air intake pipe 510 outlet by the airflow entering through the air intake connecting pipe 12, and can also be pushed out of the air intake pipe 510 outlet by the rotating scraper 30. When the air intake pipe 510 is vertically positioned, the scraper 30 is also vertical. The dust scraped off by the scraper 30 can be carried out of the air intake pipe 510 outlet by the airflow entering through the air intake connecting pipe 12 and the gravity of the dust, and can also be pushed out of the air intake pipe 510 outlet by the rotating scraper 30.
[0120] In one embodiment of the present invention, the drive assembly 40 includes a motor 41 and a reducer 42. The input end of the reducer 42 is connected to the shaft of the motor 41, and the output end of the reducer 42 is connected to the other end of the connecting shaft 24. The housing of the reducer 42 abuts against the step 23. Alternatively, the step 23 can be positioned on the reducer 42, and the step 23 can abut against the side of the sealing flange 21 facing the reducer 42. Since the scraper 30 encounters significant resistance during dust removal, placing the reducer 42 between the motor 41 and the scraper 30 can increase the torque output of the drive assembly 40 and enhance the scraping effect of the scraper 30. The housing of the motor 41 is connected to the housing of the reducer 42; alternatively, the reducer 42 can be integrated into the motor housing.
[0121] In one embodiment of the present invention, the sealing assembly 20 includes a sealing flange 21 and a motor flange 22. A connecting flange 11 is provided on the outer peripheral surface of the other end of the intake pipe 510. The sealing flange 21 is connected to the connecting flange 11. Preferably, a flange sealing ring is provided between the sealing flange 21 and the connecting flange 11 to improve the sealing performance between the sealing flange 21 and the connecting flange 11. The sealing flange 21 facilitates connection with the intake pipe 510. The sealing flange 21 seals the opening, and a through hole is provided inside the sealing flange 21, extending along the central axis of the sealing flange 21. The through hole is used to install the connecting shaft 24. In this embodiment, the sealing flange 21 is a KF flange. Of course, the specific structure of the sealing flange 21 is not limited to this and is determined according to actual needs.
[0122] The motor flange 22 facilitates the connection between the scraper 30 and the drive assembly 40. The motor flange 22 is fitted onto the end of the sealing flange 21 furthest from the intake pipe 510, and is connected to the drive assembly 40. Specifically, the motor flange 22 has a sheet-like structure and is fitted onto the left end of the sealing flange 21 furthest from the intake pipe 510. The motor flange 22 is welded to the sealing flange 21 or integrally formed. Each of the four corners of the motor flange 22 has a through hole, and the motor flange 22 is connected to the reducer housing via screws within these through holes. Compared to using a cylinder or other types of drive mechanisms, using a motor 41 in conjunction with a reducer 42 effectively reduces the size of the drive assembly 40.
[0123] In one embodiment of the present invention, the sealing flange 21 forms a step 23 on the side of the motor flange 22 facing the drive assembly 40, that is, the sealing flange 21 protrudes relative to the motor flange 22, and a gap is formed between the motor flange 22 and the reducer housing. The drive assembly 40 abuts against the step 23. Specifically, the reducer housing abuts against the step 23, which is a circular step 23. The step 23 is provided to seal against the reducer housing, preventing exhaust gas from contacting the reducer 42 or the motor 41 and causing corrosion of the motor 41 or the reducer 42.
[0124] In one embodiment of the present invention, the step 23 is provided with a sealing ring made of rubber, which seals against the drive assembly 40 and the step 23. Preferably, two sealing rings are provided: an outer sealing ring 25 and an inner sealing ring 26. The diameter of the outer sealing ring 25 is larger than that of the inner sealing ring 26. The inner sealing ring 26 is coaxially arranged with the through hole and is sleeved on the outer circumferential surface of the rotating shaft. The inner sealing ring 26 is used to seal the gap between the step 23 and the reducer housing, as well as the gap between the rotating shaft and the step 23. The outer sealing ring 25 is located outside the inner sealing ring 26 and is used to seal the gap between the step 23 and the reducer housing to form a secondary seal. Damage to either the outer sealing ring 25 or the inner sealing ring 26 will not affect the normal operation of the equipment.
[0125] In one embodiment of the present invention, the step 23 is provided with a groove, and the sealing ring is partially embedded in the groove. Specifically, there are two grooves, namely an inner groove and an outer groove. The inner groove is coaxially arranged with the through hole and communicates with the through hole. The inner sealing ring 26 is embedded in the inner groove. The outer groove is located on the outer periphery of the inner groove, and the central axis of the outer groove is the same straight line as the central axis of the inner groove. The outer sealing ring 25 is embedded in the outer groove.
[0126] In one embodiment of the present invention, a connecting shaft 24 is inserted through the sealing flange 21. One end of the connecting shaft 24 is connected to the scraper 30, and the other end of the connecting shaft 24 is connected to the drive assembly 40. Specifically, the connecting shaft 24 passes through the through hole and is sealed to the sealing flange 21 by an inner sealing ring 26. One end of the connecting shaft 24 is directly connected to the scraper 30 or connected to the scraper 30 through the scraper fixing plate 50. The output end of the reducer 42 is provided with a plug hole, which is a non-circular hole. The cross-section of the other end of the connecting shaft 24 is non-circular, and the other end of the connecting shaft 24 is inserted into the plug hole. Of course, in some embodiments, the output end of the reducer 42 can also be directly connected to the scraper 30 or the scraper fixing plate 50 after passing through the through hole.
[0127] In one embodiment of the present invention, the air inlet scraper 100 further includes a scraper fixing plate 50. The scraper fixing plate 50 has a circular sheet structure. The gap between the circular scraper fixing plate 50 and the inner wall of the air inlet pipe 510 can be minimized, which can effectively prevent dust in the air inlet pipe 510 from spreading to the motor end, effectively preventing dust blockage that could cause the drive assembly 40 to jam or be damaged. The scraper fixing plate 50 is disposed inside the air inlet pipe 510 and is welded to the scraper 30. Of course, the scraper fixing plate 50 can also be plugged into the scraper 30 or connected in other detachable ways to facilitate replacement of the scraper fixing plate 50 or the scraper 30. The side of the scraper fixing plate 50 facing away from the scraper 30 is connected to one end of the connecting shaft 24. Specifically, the side of the scraper fixing plate 50 facing away from the scraper 30 is provided with a connecting part, which is provided with a threaded blind hole. One end of the connecting shaft 24 is inserted into the threaded blind hole and threadedly engaged with the threaded blind hole.
[0128] Furthermore, the sidewall of the blind hole is provided with a threaded through hole, and a screw is provided in the threaded through hole. The screw abuts against one end of the connecting shaft 24, thereby fixing one end of the connecting shaft 24 in the threaded blind hole.
[0129] Furthermore, since high temperatures are conducted from the scraper 30 to the connecting shaft 24 during the operation of the exhaust gas treatment equipment, thermal expansion and contraction can easily cause the connection between the connecting shaft 24 and the scraper fixing plate 50 to loosen, leading to the separation of the scraper 30 from the motor 41. Therefore, during the connection of the connecting shaft 24 and the scraper fixing plate 50, high-temperature resistant fixing adhesive is injected between the connecting shaft 24 and the scraper fixing plate 50. The high-temperature resistant fixing adhesive can prevent the connection between the connecting shaft 24 and the scraper fixing plate 50 from loosening, and can also prevent the exhaust gas from corroding the end face of the connecting shaft 24 or the output end of the reducer 42.
[0130] In one embodiment of the present invention, the air inlet scraper 100 further includes a purge air inlet pipe 60. The sealing assembly 20 is provided with an air inlet hole communicating with the interior of the air inlet pipe 510. The purge air inlet pipe 60 communicates with the air inlet hole and is used to deliver gas into the air inlet pipe 510 through the air inlet hole. Preferably, the air inlet hole is provided on the sealing flange 21, specifically, the air inlet hole is provided on the edge of the sealing flange 21.
[0131] Because there is a small space between the scraper 30 and the sealing assembly 20, and a small gap between the scraper 30 and the inner wall of the intake pipe 510, the purge intake pipe 60 supplies gas into the intake pipe 510 through the intake port, keeping the space between the scraper 30 and the sealing assembly 20 under positive pressure. This prevents exhaust gas in the intake pipe 510 from entering the space between the scraper 30 and the sealing assembly 20, thus avoiding contact between the exhaust gas and the connecting shaft 24 or the reducer 42. The gas also passes through the space between the scraper 30 and the sealing assembly 20 into the gap between the scraper 30 and the inner wall of the intake pipe 510, protecting the scraper 30 from corrosion by the exhaust gas and extending its service life. Since the motor 41 and the reducer 42 are mostly made of carbon steel or aluminum, which are not corrosion-resistant, the purge intake pipe 60, which supplies gas into the intake pipe 510 through the intake port, solves the problem of damage caused by corrosion of the motor 41.
[0132] In another embodiment of the invention, such as Figure 20 As shown, in another embodiment, the scraper 30 has a rod-shaped structure and extends along the axial direction of the air intake pipe 510. The cross-section of the scraper 30 is semi-circular, and the plane of the scraper 30 faces the inner wall of the air intake pipe 510, that is, the plane of the scraper 30 faces outward and the circular surface faces inward, so as to reduce the contact area between the scraper 30 and the dust, thereby reducing the accumulation of dust on the scraper 30.
[0133] In one embodiment of the present invention, such as Figure 11 and Figure 12 As shown, the air intake connection pipe 530 is provided with a negative pressure detection port 540, and the negative pressure detection pipe scraper includes a guide assembly 210, a flexible scraper 220 and a drive assembly 230.
[0134] The guide assembly 210 is adapted to connect to the negative pressure detection port 540; the flexible scraper 220 is inserted through the guide assembly 210; the drive assembly 230 is connected to the flexible scraper 220, and the drive assembly 230 is adapted to drive the flexible scraper 220 to move closer to or away from the negative pressure detection port 540 along the extension direction of the guide assembly 210.
[0135] Specifically, the drive assembly 230 drives the flexible scraper 220 to move closer to the negative pressure detection port 540 to a first position, where the flexible scraper 220 extends into the negative pressure detection port 540 and pushes away the blockage at the negative pressure detection port 540; the drive assembly 230 then drives the flexible scraper 220 to move away from the negative pressure detection port 540 to a second position, where the flexible scraper 220 moves away from the negative pressure detection port 540. Thus, the drive assembly 230 drives the flexible scraper 220 to switch between the first and second positions. In the first position, the flexible scraper 220 extends into the negative pressure detection port 540 and pushes the blockage away; in the second position, the flexible scraper 220 moves away from the negative pressure detection port 540.
[0136] It should be noted that during the normal operation of the exhaust gas treatment equipment, the flexible scraper 220 is in the second position; when it is necessary to clean the blocked negative pressure detection port 540, the flexible scraper 220 is switched from the second position to the first position. During the process of the flexible scraper 220 moving from the second position to the first position, the blockage in the negative pressure detection port 540 is cleared.
[0137] Understandably, the flexible scraper 220 is connected to the negative pressure detection port 540 of the air inlet connecting pipe via the guide assembly 210 and moves along the extension direction of the guide assembly 210 to achieve reciprocating movement between the first position and the second position. In the first position, the flexible scraper 220 extends into the negative pressure detection port 540 and pushes the blockage away, which can clean the blocked negative pressure detection port 540 during normal operation of the equipment, avoiding downtime for cleaning and thus improving processing efficiency. In the second position, the flexible scraper 220 is away from the negative pressure detection port 540 and does not affect the normal use of the equipment. Thus, the blocked negative pressure detection port 540 of the equipment can be cleaned regularly by the scraper in the negative pressure detection pipe to avoid blockage and extend the maintenance cycle.
[0138] The negative pressure detection tube scraper provided in this embodiment of the invention is connected to the guide assembly 210 through the negative pressure detection port 540 of the air inlet connecting pipe. The flexible scraper 220 is inserted through the guide assembly 210, and the flexible scraper 220 is driven by the drive assembly 230 to move closer to or away from the negative pressure detection port 540. The movement of the flexible scraper 220 closer to the negative pressure detection port 540 pushes away the blockage at the negative pressure detection port 540, thereby cleaning the blocked negative pressure detection port 540, avoiding downtime caused by blockage, and thus improving the efficiency of equipment use. In addition, using the flexible scraper 220 to clean the negative pressure detection port 540 allows for adjustment of the installation direction and position of the drive assembly 230, thereby reducing the installation space and making it suitable for installation environments with limited space.
[0139] In one embodiment of the present invention, the guide assembly 210 includes a guide tube, through which a flexible scraper 220 passes, and the guide tube provides guidance for the movement of the flexible scraper 220.
[0140] Optional, such as Figure 14 As shown, the guide tube includes a first guide tube 211 and a second guide tube 212 connected together. The first guide tube 211 and the second guide tube 212 have a preset included angle. The first guide tube 211 is connected to the negative pressure detection port 540. The flexible scraper 220 passes through the first guide tube 211 and the second guide tube 212. One end of the flexible scraper 220 is close to the negative pressure detection port 540, and the other end of the flexible scraper 220 is connected to the drive assembly 230.
[0141] It should be noted that due to the limited floor space of the exhaust gas treatment equipment, the installation space for the negative pressure detection tube scraper is limited, making it impossible to install traditional scrapers. This invention utilizes an angled design between the first guide tube 211 and the second guide tube 212 to achieve a bending design of the guide tubes, thereby reducing the installation space and making it suitable for installation within the limited space of the exhaust gas treatment equipment.
[0142] Furthermore, the first guide tube 211 and the second guide tube 212 are connected by a bend 213, so that the first guide tube 211 and the second guide tube 212 are smoothly connected, so that the flexible scraper 220 is smoothly arranged at the connection position of the first guide tube 211 and the second guide tube 212, avoiding the flexible scraper 220 from getting stuck or damaged at the connection position between the first guide tube 211 and the second guide tube 212 due to bending transition.
[0143] Optionally, the guide tube can be a flexible tube, and the guide tube can be bent according to the installation space of the exhaust gas treatment equipment so that the guide tube is composed of multiple segments. Optionally, the bent guide tube includes the first guide tube 211, the bend 213 and the second guide tube 212 mentioned above.
[0144] It should be noted that when the guide tube is designed for bending, the inside of the guide tube should be free from deformation to ensure the stability of the flexible scraper 220 during movement.
[0145] In this embodiment, the guide assembly 210 includes a second guide tube 212, a bend 213 and a first guide tube 211 connected in sequence, with the first guide tube 211 and the second guide tube 212 arranged vertically; of course, in other embodiments, the included angle between the first guide tube 211 and the second guide tube 212 can be designed to be 0°~180° according to the actual installation space, preferably 45°~135°.
[0146] In an optional embodiment of the present invention, such as Figure 13 and Figure 15As shown, the flexible scraper 220 includes a detection port scraper section 221, a flexible section 222 and a connecting section 223 connected in sequence. The detection port scraper section 221 is located in the first guide tube 211, the connecting section 223 is located in the second guide tube 212, and the flexible section 222 is at least partially located in the bend tube 213.
[0147] It is understood that the scraper section 221 of the detection port is located in the first guide tube 211, and the connecting section 223 is located in the second guide tube 212. Both the first guide tube 211 and the second guide tube 212 are straight tubes, so the scraper section 221 of the detection port and the connecting section 223 are both straight sections. During the movement of the flexible scraper 220 driven by the drive assembly 230, the scraper section 221 of the detection port is always located in the first guide tube 211, and the connecting section 223 is always located in the second guide tube 212. Therefore, the length of the flexible section 222 is greater than the length of the bend 213. During the movement of the flexible scraper 220, the flexible section 222 is at least partially located in the bend 213 to ensure the stability of the scraper section 221 of the detection port along the axial direction of the first guide tube 211, thereby improving the cleaning effect.
[0148] Optionally, the cross-section of the flexible scraper 220 can also be any shape such as rectangular, triangular, or elliptical, to adapt to negative pressure detection ports 540 with different shapes. This application does not specifically limit the outer contour shape of the flexible scraper 220.
[0149] In one embodiment of the present invention, such as Figure 12 and Figure 13 As shown, the negative pressure detection tube scraper also includes a first connecting sleeve 250, which has three connection ports: a first connection port, a second connection port, and a third connection port. The first connection port is connected to the negative pressure detection port 540, the second connection port is connected to the first guide tube 211 of the guide assembly 210, and the third connection port serves as the pressure detection port 251.
[0150] For example, the first connecting sleeve 250 is a three-way sleeve, with the first and second connecting ports arranged opposite to each other, connecting the first guide tube 211 and the negative pressure detection port 540 respectively. The middle connecting port of the three-way sleeve serves as the pressure detection port 251, used to connect the negative pressure detection component. It should be noted that the negative pressure detection port 540 and the guide assembly 210 are connected by the first connecting sleeve 250 for easy maintenance and disassembly.
[0151] In one embodiment of the present invention, such as Figure 13 and Figure 16 As shown, the negative pressure detection tube scraper also includes a second connecting sleeve 240, the first end of which is sleeved on the second guide tube 212, and the drive assembly 230 is connected to the second end of the second connecting sleeve 240.
[0152] For example, the upper end of the second connecting sleeve 240 is connected to the lower end of the second guide tube 212, and the drive assembly 230 is fixed to the lower end of the second connecting sleeve 240.
[0153] In this embodiment, the second connecting sleeve 240 is a straight-through type sleeve, and the lower part of the second guide tube 212 is connected to the straight-through type sleeve. Depending on the size of the second guide tube 212, the second connecting sleeve 240 can be a straight-through type variable diameter sleeve. It should be noted that in this embodiment, the drive assembly 230 and the guide assembly 210 are assembled using the second connecting slot, which facilitates maintenance and disassembly.
[0154] Furthermore, the drive assembly 230 includes a drive cylinder 231 and a cylinder connecting sleeve 232. The drive cylinder 231 is connected to the lower end of the second connecting sleeve 240 through the cylinder connecting sleeve 232. The drive cylinder 231 and the cylinder connecting sleeve 232 are connected by threads, and a sealing gasket is provided between the drive cylinder 231 and the cylinder connecting sleeve 232. The sealing gasket includes, but is not limited to, a Teflon sealing gasket.
[0155] It is understandable that, such as Figure 13 and Figure 16 As shown, the piston rod 2311 of the drive cylinder 231 is located inside the cylinder connecting sleeve 232, which ensures that the piston rod 2311 can move freely. It should be noted that the length of the cylinder connecting sleeve 232 adapts to changes in the drive stroke to ensure that the piston rod 2311 moves freely without interference during the cylinder stroke.
[0156] In a preferred embodiment of the present invention, a scraper connecting rod 241 is provided inside the second connecting sleeve 240, and the scraper connecting rod 241 connects the flexible scraper 220 and the output of the drive assembly 230; specifically, the scraper connecting rod 241 connects the connecting section 223 of the flexible scraper 220 and the piston rod 2311.
[0157] Understandably, the scraper connecting rod 241 within the second connecting sleeve 240 serves two purposes: firstly, it connects the flexible scraper 220 and the drive cylinder 231; secondly, it guides the movement of the flexible scraper 220. It should be noted that the piston rod 2311 requires space to move, resulting in a large space at the front when the cylinder retracts. This large space hinders the movement of the flexible scraper 220 (as it would twist due to lack of guidance). Therefore, the scraper connecting rod 241 provides guidance for the movement of the flexible scraper 220 within this large space.
[0158] In this embodiment, the drive cylinder 231 is a dual drive cylinder, and the dual drive cylinder uses two different specifications of air pipes to prevent incorrect installation of air pipes during the installation process.
[0159] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims
1. A multi-inlet blade-equipped gas inlet chamber for an exhaust gas treatment device, characterized by, The application relates to an air inlet cavity device, an in-cavity scraper device and a plurality of air inlet devices. The air inlet cavity device has an air inlet cavity inside, and the bottom of the air inlet cavity device is provided with an air outlet port provided with a limiting ring extending radially inward; the sidewall of the air inlet cavity device is provided with a plurality of air inlet ports. The in-cavity scraper device comprises a driving component, a support frame, a plurality of scrapers and a plurality of lower rollers; the support frame is rotatably arranged in the air inlet cavity; the driving component is connected with the support frame and is used for driving the support frame to rotate; a plurality of scrapers are arranged at intervals on the outer periphery of the support frame and are used for scraping dust on the sidewall of the air inlet cavity when the support frame rotates; a plurality of lower rollers are arranged at intervals in the circumferential direction on the bottom of the support frame and are in rolling cooperation with the limiting ring. The plurality of air inlet devices are in one-to-one correspondence with the plurality of air inlet ports and are used for inputting air into the inside of the air inlet cavity device.
2. The multi-inlet blade-carrying gas inlet cavity for exhaust gas treatment equipment according to claim 1, characterized by, The scrapers are parallel to the sidewall of the air inlet cavity, and the distance between two adjacent scrapers is equal.
3. The multi-inlet with blade inlet cavity for exhaust treatment apparatus according to claim 1, wherein The in-cavity scraper device further comprises: A plurality of bottom scraping modules are arranged at intervals in the circumferential direction on the bottom of the support frame, and a plurality of lower rollers are respectively installed on the plurality of bottom scraping modules through lower roller shafts in one-to-one correspondence; the bottom scraping modules are used for pushing dust falling on the limiting ring to the air outlet port.
4. The multi-inlet with blade inlet cavity for exhaust treatment apparatus according to claim 1, wherein The in-cavity scraper device further comprises: A plurality of upper rollers are arranged at intervals in the circumferential direction on the upper portion of the support frame; the upper rollers are horizontally arranged and are installed on the support frame through upper roller shafts; the upper rollers are in rolling cooperation with the sidewall of the air inlet cavity.
5. The multi-inlet with blade inlet cavity for exhaust treatment device according to any one of claims 1 to 4, characterized in that, The driving component comprises: A driving assembly is arranged on the top of the air inlet cavity device; One end of a driving shaft is connected with the driving assembly; A toothed disc is arranged on the upper portion of the support frame; A driving rod is arranged in the inside of the air inlet cavity; the other end of the driving shaft is connected with the driving rod; a plurality of positioning blocks are arranged at intervals on the edge of the bottom of the driving rod; the positioning blocks are used for meshing with the protruding teeth of the toothed disc.
6. The multi-inlet with blade inlet cavity for exhaust treatment apparatus according to claim 5, wherein The driving component further comprises: One end of a connecting rod is connected with the driving rod; the other end of the connecting rod is connected with the other end of the driving shaft through a shaft coupling after penetrating through the top of the air inlet cavity device; An oil seal is arranged on the outer periphery of the connecting rod and is located between the outer peripheral surface of the connecting rod and the top wall of the air inlet cavity device; A sealing ring is arranged on the outer periphery of the connecting rod and is located between the outer peripheral surface of the connecting rod and the top wall of the air inlet cavity device.
7. The multi-inlet with blade gas inlet cavity for exhaust gas treatment equipment according to any one of claims 1 to 4, characterized in that, The air inlet cavity device comprises: The air inlet cavity shell is provided with a plurality of air inlet ports on the side wall, the air inlet ports are arranged in a circumferential direction, and two adjacent air inlet ports are arranged in a staggered manner in a vertical direction.
8. The multi-inlet with scraper gas inlet cavity for exhaust treatment equipment according to claim 7, characterized by, The air inlet cavity shell is provided with a heat source installation port on the top portion of the air inlet cavity shell, and the heat source installation port is used for installing an ion torch or a natural gas burner.
9. The multi-inlet with blade inlet cavity for exhaust treatment apparatus according to claim 7, wherein Further comprising: The overflow flange comprises a flange body and a flange cover, the flange body and the flange cover are arranged on the bottom of the limiting ring, the flange body is located on the outer periphery of the flange cover, the inner side of the flange body is provided with a first convex ring extending radially inward, the first convex ring is located below the flange cover, the upper surface of the first convex ring is formed with a flow guide groove, and the outer side of the flange body is provided with a liquid inlet port in communication with the flow guide groove; the lower surface of the flange cover is formed with a second convex ring away from the flange body, the second convex ring is located on the side away from the flange body of the first convex ring, and the second convex ring and the side away from the flange body of the first convex ring cooperatively form an annular flow channel in communication with the flow guide groove, and the liquid outlet of the annular flow channel is downward.
10. The multi-inlet with scraper gas inlet cavity for exhaust treatment equipment according to claim 9, characterized by, The side of the second convex ring facing the first convex ring is an arc surface.
Citation Information
Patent Citations
Semiconductor processing waste gas treatment equipment
CN112915718A
Reaction cavity device capable of automatically cleaning waste gas and dust
CN216367352U