Silicon carbide APD ultraviolet imaging system prototype

Abstract

The invention discloses a silicon carbide APD ultraviolet imaging system prototype, and belongs to the technical field of ultraviolet detection equipment.The silicon carbide APD ultraviolet imaging system prototype is characterized in that an object placing plate is arranged and used for placing a semiconductor or integrated circuit device to be detected, a detection lens faces the device to be detected, the device to be detected is placed in the visual field range of the detection lens, and an ultraviolet detection module is connected with the detection lens through the detection lens; analyzing and outputting an ultraviolet signal on the to-be-tested device; according to the device, a plurality of illuminating lamps uniformly surrounding the detection lens are arranged, the visual field range of the detection lens is uniformly illuminated, shadow distribution on the surface of the to-be-detected device is reduced, imaging of the to-be-detected device on the storage plate is easier to observe, external illuminating equipment does not need to be arranged, and compared with the external illuminating equipment, the equipment is more convenient to use. The device is clearer in imaging and easier to judge ultraviolet imaging.

Description

Technical Field

[0001] The invention belongs to the technical field of ultraviolet detection equipment, and in particular relates to a principle prototype of a silicon carbide APD ultraviolet imaging system. Background Art

[0002] UV detectors are sensors that convert electromagnetic radiation signals into a signal form that is easy to receive and process. These detectors mainly rely on the photoelectric effect, which converts optical radiation into electrical signals. The photoelectric effect is mainly divided into two types: external photoelectric effect and internal photoelectric effect. In the external photoelectric effect, photons excite the photocathode to produce photoelectrons, which are then collected by the external electrode, and the obtained optical signal (such as current, etc.) represents the intensity of the received radiation.

[0003] Current UV detectors are widely used in semiconductor or integrated circuit testing. During operation, the detection lens is aimed at the device under test to observe the UV data on its surface. However, due to the small size of the device under test, the detection lens needs to be close to the device, which makes it easy for the detector to block the light on the surface of the device under test, thereby reducing the observation effect. In addition, if the lighting is set directly next to the detection equipment, shadows may be generated on the surface of the device under test, which will also affect the test results. Summary of the invention

[0004] In view of this, an object of the present invention is to provide a principle prototype of a silicon carbide APD ultraviolet imaging system, which improves the observation effect of the device under test by setting an illumination structure in the same direction as the detection lens.

[0005] In order to achieve the above object, the present invention provides the following technical solutions:

[0006] The present invention includes an ultraviolet detection module, a support frame, a detection lens and a storage plate, the support frame is fixed on the storage plate, the ultraviolet detection module and the detection lens are fixed on the support frame, the detection lens is connected to the ultraviolet detection module, and the detection lens includes a lens barrel, the end of the lens barrel is provided with ultraviolet transparent glass, a layer of barrel shell is arranged around the outer side of the end of the lens barrel, and a plurality of lighting lamps are arranged at the end of the barrel shell, the lighting lamps face the observation direction of the lens barrel, and the lighting lamps are evenly surrounded on the outer side of the end of the lens barrel.

[0007] Furthermore, a plurality of grooves are provided on the cylinder shell around the lens barrel array, and the lighting lamp is provided with a rotating shaft perpendicular to the irradiation direction of the lighting lamp. The rotating shaft is rotatably arranged in the groove, and the rotating shaft is also perpendicular to the radius of the cylinder shell. A gear is coaxially provided on the rotating shaft, and also includes a slip ring sliding along the outer side of the cylinder shell. A plurality of racks are provided on the inner side of the slip ring around the array, and the racks are meshed with the gears. By moving the slip ring along the cylinder shell, a plurality of the lighting lamps can switch between scattered and focused irradiation modes.

[0008] Furthermore, the support frame includes a column, a first beam is horizontally slidably provided on the upper end of the column, a second beam is horizontally slidably provided on the first beam, the sliding directions of the first beam and the second beam are perpendicular, and the ultraviolet detection module and the detection lens are both fixed at the end of the second beam.

[0009] Furthermore, the storage plate is provided with a disc-shaped bottom plate, a bottom cylinder is provided to rotate around the bottom plate, and also includes a storage plate, a support shaft is provided along the diameter of the storage plate, the support shaft passes along the diameter of the bottom cylinder, one end of the support shaft passes through the side of the bottom cylinder and is provided with a rotating handle.

[0010] Furthermore, a plurality of return springs are provided on the bottom surface of the storage tray, and the return springs are symmetrically distributed relative to the support axis. Support steel balls are provided at the bottom ends of the return springs. With the support of the return springs, the storage tray remains in a horizontal state.

[0011] The beneficial effects of the present invention are:

[0012] The present invention sets a placement plate for placing semiconductor or integrated circuit devices to be tested, and places the device to be tested within the field of view of the detection lens by pointing a detection lens toward the device to be tested. The ultraviolet detection module analyzes and outputs the ultraviolet signal on the device to be tested through the detection lens. The present invention sets a plurality of lighting lamps uniformly surrounding the detection lens to uniformly illuminate the field of view of the detection lens, reduce the shadow distribution on the surface of the device to be tested, and make the imaging of the device to be tested on the placement plate easier to observe. The device does not need to set up an external lighting device. Compared with an external lighting device, the imaging of the device is clearer and it is easier to judge the ultraviolet imaging.

[0013] Other advantages, objectives and features of the present invention will be described in the following description and will be apparent to those skilled in the art to some extent, or those skilled in the art may be taught from the practice of the present invention. The objectives and other advantages of the present invention may be realized and obtained through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to make the purpose, technical solution and beneficial effects of the present invention clearer, the present invention provides the following drawings for illustration:

[0015] Figure 1 Schematic diagram of the overall ultraviolet imaging system according to an embodiment of the present invention;

[0016] Figure 2 This is an overall schematic diagram of a detection lens according to an embodiment of the present invention;

[0017] Figure 3 is a cross-sectional view of a detection lens according to an embodiment of the present invention;

[0018] Figure 4 is a cross-sectional view of a storage plate according to an embodiment of the present invention;

[0019] The markings in the attached drawings are as follows: 1. UV detection module; 2. Support frame; 21. Post; 22. First crossbeam; 23. Second crossbeam; 3. Detection lens; 31. Lens barrel; 32. UV transparent glass; 33. Shell; 331. Sink; 34. Illuminating lamp; 341. Rotating shaft; 342. Gear; 35. Slip ring; 351. Rack; 4. Storage plate; 41. Chassis; 42. Bottom barrel; 43. Storage plate; 44. Support shaft; 45. Reset spring; 46. Support steel balls. DETAILED DESCRIPTION

[0020] like Figure 1 As shown, the present invention discloses a principle prototype of a silicon carbide APD ultraviolet imaging system, comprising an ultraviolet detection module 1, a support frame 2, a detection lens 3 and a storage plate 4, wherein the support frame 2 is fixed on the storage plate 4, the ultraviolet detection module 1 and the detection lens 3 are fixed on the support frame 2, the detection lens 3 is connected to the ultraviolet detection module 1, and a semiconductor or a device with an integrated circuit is placed on the storage plate 4, and ultraviolet imaging of the device is performed through the detection lens 3 and the ultraviolet detection module 1, referring to Figure 2 The detection lens 3 includes a lens barrel 31, an ultraviolet transparent glass 32 is provided at the end of the lens barrel 31, a tube shell 33 is provided around the outer side of the end of the lens barrel 31, and a plurality of lighting lamps 34 are provided at the end of the tube shell 33. The lighting lamps 34 face the observation direction of the lens barrel 31, and the lighting lamps 34 are evenly surrounded on the outer side of the end of the lens barrel 31.

[0021] In the present invention, a placement plate 4 is provided for placing semiconductor or integrated circuit devices to be tested, and the device to be tested is placed within the field of view of the detection lens 3 by pointing the detection lens 3 toward the device to be tested. The ultraviolet detection module 1 analyzes and outputs the ultraviolet signal on the device to be tested through the detection lens 3; the present invention is provided with a plurality of lighting lamps 34 uniformly surrounding the detection lens 3 to uniformly illuminate the field of view of the detection lens 3, thereby reducing the shadow distribution on the surface of the device to be tested and making the imaging of the device to be tested on the placement plate 4 easier to observe. This device does not need to be provided with an external lighting device. Compared with an external lighting device, this device has clearer imaging and is easier to judge ultraviolet imaging.

[0022] In a further solution, Figure 2 and Figure 3As shown, the barrel shell 33 is provided with a plurality of recessed grooves 331 around the lens barrel 31 array, the illuminating lamp 34 is provided with a rotating shaft 341 perpendicular to the irradiation direction of the illuminating lamp 34, the rotating shaft 341 is rotatably arranged in the recessed groove 331, the rotating shaft 341 is also perpendicular to the radius of the barrel shell 33, a gear 342 is coaxially provided on the rotating shaft 341, and also includes a slip ring 35 sliding along the outer side of the barrel shell 33, a plurality of racks 351 are provided around the array on the inner side of the slip ring 35, the racks 351 are meshed with the gears 342, and the slip ring 35 is moved along the barrel shell 33, and the plurality of illuminating lamps 34 are switched between the scattering and focusing irradiation modes.

[0023] In this structure, a slip ring 35 is provided for uniformly controlling the illumination angle of the illumination lamp 34. The slip ring 35 is movable outside the cylindrical shell 33. Through manual control, the illumination lamp 34 is driven to rotate under the meshing of the rack 351 and the gear 342, so as to control the illumination angles of several illumination lamps 34 at the same time. During the sliding process of the slip ring 35, the illumination lamp 34 switches between a scattering state and a gathering state. Through the state change of the illumination lamp 34, the illumination intensity on the surface of the device under test is quickly changed, and the observation effect of the surface of the device under test is further improved: in the gathering illumination state, the position of the device under test that needs to be observed can be emphasized, and in the scattering state, the surface of the device under test is evenly illuminated and the visible range is large.

[0024] In a further solution, Figure 1 As shown, the support frame 2 includes a column 21, a first crossbeam 22 is horizontally slidably provided on the upper end of the column 21, a second crossbeam 23 is horizontally slidably provided on the first crossbeam, the sliding directions of the first crossbeam 22 and the second crossbeam 23 are perpendicular, and the ultraviolet detection module 1 and the detection lens 3 are both fixed at the end of the second crossbeam 23.

[0025] By providing the first crossbeam 22 and the second crossbeam 23, the detection lens 3 can be moved horizontally at will. When the device to be tested is fixed, the protruding observation position of the component to be tested can be changed. This structure improves the control freedom of the system and the experimental observation capability.

[0026] In a further solution, Figure 1 and Figure 4 As shown, the storage plate 4 is provided with a disc-shaped bottom plate 41, around which a bottom cylinder 42 is rotatably arranged, and also includes a storage plate 43, along the diameter of which a support shaft 44 is provided, and the support shaft 44 passes along the diameter of the bottom cylinder 42, and one end of the support shaft 44 passes through the side of the bottom cylinder 42 and is provided with a rotating handle.

[0027] By rotating the handle horizontally and vertically, the horizontal and vertical angles of the device to be tested fixed on the placement plate 43 can be controlled. Through simple manipulation, the observation position of the device to be tested can be more easily directed toward the detection lens 3, making it easier to observe the surface of the device to be tested with an irregular shape, and assisting the illumination of the lamp tube to present clear positive observation data.

[0028] In a further solution, Figure 1 and Figure 4 As shown, a plurality of return springs 45 are provided on the bottom surface of the storage tray 43 , and the return springs 45 are symmetrically distributed relative to the support shaft 44 . A support steel ball 46 is provided at the bottom end of the return spring 45 . With the support of the return spring 45 , the storage tray 43 remains in a horizontal state.

[0029] This structure, after the storage tray 43 is rotated at a horizontal angle, can assist the storage tray 43 to return to its horizontal position through the support of a plurality of return springs 45. With the support of the supporting steel balls 46, the storage tray 43 can smoothly rotate on the storage board 4, thereby improving the storage capacity of the storage board 4 and facilitating observation and operation.

[0030] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the present invention.

Claims

1. A prototype of a silicon carbide APD ultraviolet imaging system, characterized by: The invention comprises an ultraviolet detection module (1), a support frame (2), a detection lens (3) and a storage plate (4), wherein the support frame (2) is fixed on the storage plate (4), the ultraviolet detection module (1) and the detection lens (3) are fixed on the support frame (2), the detection lens (3) is connected to the ultraviolet detection module (1), and the detection lens (3) comprises a lens barrel (31), an end of the lens barrel (31) is provided with ultraviolet transparent glass (32), a layer of barrel shell (33) is arranged around the outer side of the end of the lens barrel (31), and a plurality of illuminating lamps (34) are arranged at the end of the barrel shell (33), the illuminating lamps (34) face the observation direction of the lens barrel (31), and the illuminating lamps (34) are evenly arranged around the outer side of the end of the lens barrel (31).

2. The principle prototype of the silicon carbide APD ultraviolet imaging system according to claim 1, characterized in that: The barrel shell (33) is provided with a plurality of recessed grooves (331) around the lens barrel (31) array, and the illuminating lamp (34) is provided with a rotating shaft (341) perpendicular to the irradiation direction of the illuminating lamp (34). The rotating shaft (341) is rotatably arranged in the recessed groove (331), and the rotating shaft (341) is also perpendicular to the radius of the barrel shell (33). A gear (342) is coaxially arranged on the rotating shaft (341), and also includes a slip ring (35) sliding along the outer side of the barrel shell (33). The inner side of the slip ring (35) is provided with a plurality of racks (351) around the array, and the racks (351) are meshed with the gears (342). When the slip ring (35) is moved along the barrel shell (33), the plurality of illuminating lamps (34) are switched between scattering and focusing irradiation modes.

3. The principle prototype of the silicon carbide APD ultraviolet imaging system according to claim 2, characterized in that: The support frame (2) comprises a column (21), a first crossbeam (22) is horizontally slidably disposed on the upper end of the column (21), a second crossbeam (23) is horizontally slidably disposed on the first crossbeam, the sliding directions of the first crossbeam (22) and the second crossbeam (23) are perpendicular, and the ultraviolet detection module (1) and the detection lens (3) are both fixed to the end of the second crossbeam (23).

4. The principle prototype of the silicon carbide APD ultraviolet imaging system according to claim 3 is characterized in that: The storage plate (4) is provided with a disc-shaped bottom plate (41), a bottom cylinder (42) is rotatably arranged around the bottom plate (41), and also includes a storage plate (43), a support shaft (44) is provided along the diameter of the storage plate (43), the support shaft (44) passes along the diameter of the bottom cylinder (42), one end of the support shaft (44) passes through the side of the bottom cylinder (42) and is provided with a rotating handle.

5. The principle prototype of the silicon carbide APD ultraviolet imaging system according to claim 4, characterized in that: A plurality of return springs (45) are provided on the bottom surface of the storage tray (43), and the return springs (45) are symmetrically distributed relative to the support shaft (44). Support steel balls (46) are provided at the bottom ends of the return springs (45). With the support of the return springs (45), the storage tray (43) is kept in a horizontal state.

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