Horizontal graphite boat suitable for horizontal furnace

Abstract

The horizontal graphite boat comprises a graphite bottom plate, a plurality of groups of graphite supporting blocks are arranged on the two sides of the top of the graphite bottom plate, a graphite inner boat piece is arranged between every two adjacent graphite supporting blocks in each group, and graphite electrode blocks are arranged at one ends of the graphite supporting blocks and the graphite bottom plate. A graphite outer sheet is arranged at the top of the uppermost graphite supporting block, a plurality of positioning grooves are formed in the surface of the graphite bottom plate, a plurality of positioning holes are formed in the surfaces of the graphite outer sheet and the graphite inner boat sheet, and a ceramic supporting pipe is inserted into each positioning hole; and the outer wall of the top end of the ceramic supporting tube is engraved with an external thread and is in threaded connection with a graphite locking nut matched with the external thread. By adopting the scheme that the graphite boat sheet is horizontally designed, the condition of sheet warping can be avoided through the gravity of the silicon wafer, the compatibility of the current equipment is ensured, and the graphite boat sheet can be used under the condition that the equipment is not adjusted.

Description

Technical Field

[0001] The invention belongs to the technical field of graphite boats, and in particular relates to a horizontal graphite boat suitable for a horizontal furnace. Background Art

[0002] Graphite boat is a device used for PECVD coating of solar cells. It consists of boat ceramic rods, ceramic tubes, clamping points, nuts and other accessories. There are insulating ceramic tubes between the graphite boats.

[0003] At present, the commonly used is the horizontal PECVD furnace tube equipment. The state of the graphite boat in the furnace tube is as shown in the attached manual. Figure 1 As shown, the graphite boat is installed perpendicular to the horizontal plane. The vertical insert of the silicon wafer is fixed by three points on the boat. Under high temperature conditions, the silicon wafer is prone to warping, resulting in defective products being plated on the reverse side, and then unable to meet the current process requirements for winding that are getting higher and higher. Therefore, in view of the above problems, the horizontal graphite boat suitable for a horizontal furnace provided by the present invention is of great significance. Summary of the invention

[0004] The present invention provides a horizontal graphite boat suitable for a horizontal furnace. The graphite boat is designed horizontally so that silicon wafers are placed horizontally in silicon wafer grooves on the surface of the graphite boat, thereby effectively avoiding wafer warping due to the silicon wafer's own gravity. Compared with the existing graphite boat structure, the overall layout is redesigned, while also ensuring the compatibility of current equipment, so that the horizontal graphite boat can be used without adjusting the equipment, thereby solving the problems in the background technology.

[0005] To solve the above technical problems, the present invention is achieved through the following technical solutions:

[0006] A horizontal graphite boat suitable for a horizontal furnace of the present invention comprises a graphite bottom plate, a pair of ceramic boat feet are arranged on both sides of the bottom of the graphite bottom plate, and a plurality of groups of graphite support blocks are arranged on both sides of the top of the graphite bottom plate, each group of the graphite support blocks is formed by a plurality of graphite support blocks placed vertically, and a graphite inner boat sheet is arranged between each group of two adjacent graphite support blocks, a graphite support block and one end of the graphite bottom plate are provided with a graphite electrode block, and a graphite outer sheet is arranged on the top of the graphite support block located at the top, a plurality of positioning grooves are opened on the surface of the graphite bottom plate, a plurality of positioning holes are opened on the surfaces of the graphite outer sheet and the graphite inner boat sheet, a ceramic support tube is inserted into each of the positioning holes, the outer wall of the bottom end of the ceramic support tube and the inner wall of the positioning groove are respectively engraved with external threads and internal threads that match each other, and the outer wall of the top end of the ceramic support tube is engraved with external threads and is threadedly connected with a graphite locking nut that matches it;

[0007] The graphite outer sheet and each graphite inner boat sheet are positioned and fixed by the mutual cooperation among the ceramic support tube, the positioning hole, the positioning groove and the graphite locking nut.

[0008] Furthermore, the graphite inner boat sheets are placed horizontally, and the distances between every two adjacent graphite inner boat sheets are equal.

[0009] Furthermore, a plurality of silicon wafer grooves are formed on the surface of each of the graphite inner boat sheets. The silicon wafer grooves are rectangular and distributed in a linear array.

[0010] Furthermore, the number of the positioning grooves and the positioning holes is the same, the diameters thereof are equal to the outer diameter of the ceramic support tube, and the center of each positioning groove corresponds to the center of each positioning hole one by one;

[0011] Furthermore, the silicon wafer is horizontally placed on the graphite inner boat, aligned and fitted into the corresponding silicon wafer groove, and the position of the silicon wafer can be prevented from being shifted under the action of gravity.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] (1) When the horizontal graphite boat suitable for a horizontal furnace in the present invention is used, a horizontal design scheme of the graphite boat is adopted, so that the silicon wafer is horizontally placed in the silicon wafer groove on the surface of the graphite boat, thereby effectively preventing the silicon wafer from warping due to its own gravity;

[0014] (2) When the horizontal graphite boat suitable for a horizontal furnace in the present invention is used, the overall layout is redesigned compared to the existing graphite boat structure, while also ensuring the compatibility of the current equipment, so that the horizontal graphite boat can be used without adjusting the equipment;

[0015] (3) The structure is simple and the installation and disassembly are convenient and quick.

[0016] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the structure of a graphite boat in the prior art;

[0019] Figure 2 It is a schematic diagram of installing a silicon wafer in a graphite boat in the prior art;

[0020] Figure 3 It is a structural schematic diagram of a horizontal graphite boat suitable for a horizontal furnace of the present invention;

[0021] Figure 4 It is a structural schematic diagram of the graphite bottom plate in the present invention;

[0022] Figure 5 It is a schematic diagram of the structure of the graphite inner boat sheet in the present invention.

[0023] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0024] 1. Graphite bottom plate; 2. Ceramic boat foot; 3. Graphite support block; 4. Graphite inner boat sheet; 5. Graphite electrode block; 6. Graphite outer sheet; 7. Positioning groove; 8. Positioning hole; 9. Ceramic support tube; 10. Graphite locking nut; 11. Silicon wafer slot. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] In the description of the present invention, it should be understood that the terms "relative", "one end", "inside", "lateral", "end", "two ends", "both sides", "front", "one end face", "the other end face" and the like indicating orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0027] See also Figure 1-5As shown, a horizontal graphite boat suitable for a horizontal furnace of the present invention comprises a graphite bottom plate 1, a pair of ceramic boat feet 2 are arranged on both sides of the bottom of the graphite bottom plate 1, and a plurality of groups of graphite support blocks 3 are arranged on both sides of the top of the graphite bottom plate 1, each group of graphite support blocks 3 is formed by a plurality of graphite support blocks 3 placed vertically, and a graphite inner boat sheet 4 is arranged between each group of two adjacent graphite support blocks 3, a graphite support block 3 and one end of the graphite bottom plate 1 are provided with a graphite electrode block 5, and a graphite outer sheet 6 is arranged on the top of the graphite support block 3 located at the top, a plurality of positioning grooves 7 are opened on the surface of the graphite bottom plate 1, a plurality of positioning holes 8 are opened on the surfaces of the graphite outer sheet 6 and the graphite inner boat sheet 4, a ceramic support tube 9 is inserted into each positioning hole 8, the outer wall of the bottom end of the ceramic support tube 9 and the inner wall of the positioning groove 7 are respectively engraved with external threads and internal threads that match each other, and the outer wall of the top end of the ceramic support tube 9 is engraved with external threads and is threadedly connected with a graphite locking nut 10 that matches it.

[0028] The graphite inner boat sheets 4 are placed horizontally, and the distances between every two adjacent graphite inner boat sheets 4 are equal. The silicon wafers can be placed horizontally on each graphite inner boat sheet 4 under the action of gravity, thereby effectively avoiding the wafer warping.

[0029] Among them, the surface of each graphite inner boat sheet 4 is provided with a plurality of silicon wafer grooves 11, which are rectangular and distributed in a linear array. When the silicon wafer is placed horizontally on the graphite inner boat sheet 4, it can be aligned and fitted into the corresponding silicon wafer groove 11 to play a limiting role, thereby preventing the position of the silicon wafer from shifting.

[0030] Among them, the number of positioning grooves 7 and positioning holes 8 is the same, and their diameters are equal to the outer diameter of the ceramic support tube 9, and the center of each positioning groove 7 corresponds to the center of each positioning hole 8. Each ceramic support tube 9 can be aligned with and pass through the positioning holes 8 corresponding to the surface of the graphite outer sheet 6 and the graphite inner boat sheet 4, and the bottom of each ceramic support tube 9 is threadedly connected in the corresponding positioning groove 7, and then the graphite locking nut 10 is threadedly connected to the top of each ceramic support tube 9 and tightened, so that the graphite outer sheet 6 and each graphite inner boat sheet 4 can be positioned and fixed through the mutual cooperation between the ceramic support tube 9, the positioning hole 8, the positioning groove 7, and the graphite locking nut 10.

[0031] The standard parts used in the application documents can all be purchased from the market. All the components in this application document can be customized according to the description in the specification and drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the prior art. Machinery, parts and equipment all adopt conventional models in the prior art.

[0032] The working principle of the present invention is:

[0033] When the present invention is in use, multiple silicon wafers can be placed horizontally on each graphite inner boat sheet 4, and aligned and fitted into the corresponding silicon wafer grooves 11, and then the graphite inner boat sheet 4 together with each silicon wafer is placed between each group of two adjacent graphite support blocks 3, and then each ceramic support tube 9 is aligned and passed through the positioning holes 8 corresponding to the graphite outer sheet 6 and the surface of the graphite inner boat sheet 4, and the bottom of each ceramic support tube 9 is threadedly connected in the corresponding positioning groove 7, and then the graphite locking nut 10 is threadedly connected to the top of each ceramic support tube 9 and tightened, so that the graphite outer sheet 6 and each graphite inner boat sheet 4 can be positioned and fixed through the mutual cooperation between the ceramic support tube 9, the positioning hole 8, the positioning groove 7, and the graphite locking nut 10. When the graphite boat is placed in the furnace tube for processing, the silicon wafer can be placed horizontally on each graphite inner boat sheet 4 under the action of gravity, thereby effectively avoiding the situation of warping of the wafer.

[0034] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A horizontal graphite boat suitable for a horizontal furnace, characterized in that: The invention comprises a graphite base plate (1), wherein a pair of ceramic boat feet (2) are arranged on both sides of the bottom of the graphite base plate (1), and a plurality of groups of graphite support blocks (3) are arranged on both sides of the top of the graphite base plate (1), each group of the graphite support blocks (3) is composed of a plurality of graphite support blocks (3) placed vertically, and a graphite inner boat sheet (4) is arranged between two adjacent graphite support blocks (3) in each group, and a graphite electrode block (5) is arranged at one end of the graphite support block (3) and the graphite base plate (1), and the graphite support block (3) located at the top is ) is provided with a graphite outer sheet (6) at the top, a plurality of positioning grooves (7) are provided on the surface of the graphite bottom plate (1), a plurality of positioning holes (8) are provided on the surfaces of the graphite outer sheet (6) and the graphite inner boat sheet (4), a ceramic support tube (9) is inserted into each of the positioning holes (8), the outer wall of the bottom end of the ceramic support tube (9) and the inner wall of the positioning groove (7) are respectively engraved with external threads and internal threads that match each other, and the outer wall of the top end of the ceramic support tube (9) is engraved with external threads and is threadedly connected with a graphite locking nut (10) that matches it; The graphite outer sheet (6) and each graphite inner boat sheet (4) are positioned and fixed by the mutual cooperation among the ceramic support tube (9), the positioning hole (8), the positioning groove (7) and the graphite locking nut (10).

2. The horizontal graphite boat suitable for a horizontal furnace according to claim 1, characterized in that: The graphite inner boat sheets (4) are placed horizontally, and the distance between every two adjacent graphite inner boat sheets (4) is equal.

3. The horizontal graphite boat suitable for a horizontal furnace according to claim 1, characterized in that: A plurality of silicon wafer grooves (11) are provided on the surface of each of the graphite inner boat sheets (4); the silicon wafer grooves (11) are rectangular and distributed in a linear array.

4. The horizontal graphite boat suitable for a horizontal furnace according to claim 1, characterized in that: The number of the positioning grooves (7) and the positioning holes (8) are the same, and their diameters are equal to the outer diameter of the ceramic support tube (9), and the center of each positioning groove (7) corresponds to the center of each positioning hole (8) one by one.

5. The horizontal graphite boat suitable for a horizontal furnace according to claim 1, characterized in that: The silicon wafer is horizontally placed on the graphite inner boat sheet (4), aligned and fitted into the corresponding silicon wafer groove (11), and the position of the silicon wafer can be prevented from being shifted under the action of gravity.

Images