Flexible magnetic tactile sensor and method of manufacturing the same

Abstract

The application provides a flexible magnetic tactile sensor and a preparation method thereof, wherein the method comprises the following steps: constructing an elastomer structure of a target sensor, wherein the elastomer is formed based on a mixed material of a flexible material and a magnetic material; performing magnetization treatment on the elastomer to form a three-dimensional detection layer; and packaging the three-dimensional detection layer and a detection chip to form the flexible magnetic tactile sensor. The application can improve the sensitivity of the sensor, simplify the preparation process and improve the production efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of flexible electronics, more particularly, to a flexible magnetic tactile sensor and a preparation method thereof. BACKGROUND

[0002] At present, flexible electronic devices have characteristics of resisting folding, bending, compression, stretching and the like, and have broad application prospects in the fields of energy conversion, wearable devices, health care, information display and the like. As one of many flexible electronic devices, a flexible tactile sensor provides a possibility for a machine to interact with the surrounding environment, and thus is widely used. Common tactile sensors include capacitive, resistive, piezoelectric and the like. However, the sensors based on the above principles have poor output linearity, large hysteresis and the like, which limits the use range of the sensors.

[0003] In recent years, magnetic sensors have been more and more widely used due to the advantages of simple structure, high linearity and long service life. However, the previous way of using a hard permanent magnet block with an elastic matrix is contrary to the lightness, flexibility and stretchability of flexible devices. Therefore, a magnetoelastic material is usually used to replace the combination of a permanent magnet and a magnetic film. However, this method causes the magnetic field strength to decrease due to the dispersion of the magnetic material, thereby affecting the performance of the sensor.

[0004] In addition, the current preparation method of the flexible tactile sensor is mainly based on mold forming, which greatly reduces the uniformity of the sensor and limits its application in production. Although the use of 3D printing of magnetoelastic materials can significantly reduce this situation, the mainstream 3D printing processes (such as DIW, FDM and the like) have problems of simple forming structure and low production efficiency. In addition, the initial magnetic field strength of the sensor is usually large, the sensitivity is low, and it is difficult to meet the high-precision sensing requirements.

[0005] Therefore, it is necessary to explore a flexible magnetic tactile sensor and a preparation method thereof to improve the sensitivity of the sensor and simplify the preparation process and improve the production efficiency. SUMMARY

[0006] In view of the above problems, the present application provides a flexible magnetic tactile sensor and a preparation method thereof to solve the problems of simple forming structure, low production efficiency and poor sensitivity of the existing flexible sensor.

[0007] The preparation method of the flexible magnetic tactile sensor provided by the present application comprises: constructing the structure of an elastic body of a target sensor, wherein the elastic body is formed based on a mixed material of a flexible material and a magnetic material;

[0008] The elastic body is subjected to magnetization treatment to form a three-dimensional detection layer.

[0009] The stereoscopic detection layer and the detection chip package form a flexible magnetic tactile sensor.

[0010] In addition, an optional technical solution is to construct a structure of an elastomer of a target sensor, including:

[0011] constructing a base structure of a target sensor; wherein the base structure includes a flexible substrate and the elastomer arranged on the flexible substrate, and the flexible substrate is formed based on the flexible material.

[0012] In addition, an optional technical solution is that the flexible substrate is a hollow frame structure in a circular or polygonal shape; when the flexible substrate is circular, the elastomer includes a polygonal support frame embedded inside the flexible substrate, and a first inclined leg arranged on the polygonal support frame;

[0013] wherein one end of each of the different first inclined legs is connected to a different side of the polygonal support frame, and the other end of each of the different first inclined legs intersects at a point; when the flexible substrate is polygonal, the elastomer includes a circular support frame embedded inside the flexible substrate, and a second inclined leg arranged on the circular support frame;

[0014] wherein one end of each of the different second inclined legs is connected to the circular support frame, and the other end intersects at a point.

[0015] In addition, an optional technical solution is that the one end of each of the different second inclined legs connected to the circular support frame is uniformly spaced on the circular support frame.

[0016] In addition, an optional technical solution is to magnetize the base structure to form a stereoscopic detection layer, including:

[0017] extruding and limiting the base structure by a pre-set limiting mold; wherein each of the inclined legs of the extruded base structure is parallel to each other and adhered together; wherein the inclined legs include the first inclined legs and the second inclined legs;

[0018] magnetizing the inclined legs in the limiting mold in the same direction;

[0019] taking out the magnetized inclined legs from the limiting mold to form a stereoscopic detection layer.

[0020] In addition, an optional technical solution is that the limiting mold includes a support and a limiting hole arranged on the support, and the shape of the limiting hole is adapted to the outer shape of the adhered inclined legs;

[0021] the inclined legs are inserted into the limiting hole for limiting.

[0022] In addition, the optional technical solution is that the elastic body is a centripetal magnetization structure, so that the central area of the bottom of the three-dimensional detection layer appears a magnetic field direction change phenomenon.

[0023] In addition, the optional technical solution is that after forming the base structure and before magnetizing the base structure, the method further comprises:

[0024] The base structure is subjected to low-temperature baking, and the baked base structure is cleaned;

[0025] The cleaned base structure is subjected to vacuum drying; wherein,

[0026] The temperature of the vacuum drying is lower than the melting point of the flexible material.

[0027] In addition, the optional technical solution is that the flexible material comprises at least one of TPU, TPE, SBS and SEBS.

[0028] The magnetic material comprises at least one of neodymium iron boron and samarium iron nitride.

[0029] In another aspect, the application also provides a flexible magnetic tactile sensor prepared by the above-mentioned flexible magnetic tactile sensor preparation method.

[0030] By using the above-mentioned flexible magnetic tactile sensor and its preparation method, first, the structure of the elastic body of the target sensor is constructed, the elastic body is formed based on the mixed material of the flexible material and the magnetic material, then the elastic body is subjected to magnetization treatment to form a three-dimensional detection layer, and finally the three-dimensional detection layer and the detection chip are packaged to form a flexible magnetic tactile sensor, which can realize a more complex sensor structure, improve production efficiency, and the magnetization process is controllable, which can improve the sensitivity of the sensor.

[0031] To the accomplishment of the foregoing and related ends, one or more aspects of the application comprise the features hereinafter fully described and particularly pointed out in the following specification and attached claims. The following description and the annexed drawings set forth in detail certain illustrative aspects of the application. However, these aspects are indicative of but a few of the various ways in which the principles of the application can be employed. Other aspects and advantages of the application will become apparent from the following detailed description, taken in conjunction with the accompanying drawings, illustrating by way of example the principles of the application. BRIEF DESCRIPTION OF DRAWINGS

[0032] Other objects and results of the application will become more fully understood and appreciated only upon a reading of the following detailed description, taken in conjunction with the accompanying drawings, in which:

[0033] Figure 1 Flow chart of the flexible magnetic tactile sensor preparation method according to the embodiment of the application;

[0034] Figure 2A schematic diagram of a three-dimensional structure of a three-dimensional detection layer according to an embodiment of the present application;

[0035] Figure 3 A side view of a three-dimensional detection layer according to an embodiment of the present application;

[0036] Figure 4 A schematic diagram of a magnetizing direction of a three-dimensional detection layer according to an embodiment of the present application;

[0037] Figure 5 A schematic structure of a flexible magnetic tactile sensor according to an embodiment of the present application;

[0038] Figure 6 A magnetic field intensity distribution diagram of a flexible magnetic tactile sensor according to an embodiment of the present application;

[0039] Figure 7 A magnetic field distribution diagram of a central region of a flexible magnetic tactile sensor according to an embodiment of the present application, where the magnetic field direction changes with distance;

[0040] Figure 8 A stress-strain diagram of a flexible magnetic tactile sensor according to an embodiment of the present application during compression;

[0041] Figure 9 A packaging structure diagram of an inclined leg according to an embodiment of the present application.

[0042] The reference signs include: a flexible substrate 1, a polygonal support frame 2, a first inclined leg 3, a base layer 4, a pin array 5, a detection chip 6, a PCB 7, and an elastomer 10.

[0043] The same reference signs in all the drawings indicate similar or corresponding features or functions. DETAILED DESCRIPTION

[0044] In the following description, for the purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. It can be apparent, however, that such embodiment(s) can be practiced without using all the specific details. In other instances, well-known structures and devices are shown in block diagram form in order to facilitate describing one or more embodiments.

[0045] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0046] To solve the problems of simple forming structure, low production efficiency and poor sensitivity of the existing flexible sensor, the present application provides a flexible magnetic tactile sensor and a preparation method thereof, which uses flexible material to form the flexible substrate of the sensor, and uses mixed material to form the elastomer on the flexible substrate, both of which are printed and formed by adhesive jet printing equipment respectively, and finally the magnetized treatment is performed on the formed substrate structure in a special way, which not only can realize more complex sensor structure and improve production efficiency, but also can control the magnetizing process and achieve the purpose of improving the sensitivity of the sensor.

[0047] To describe the flexible magnetic tactile sensor and the preparation method thereof in detail, the specific embodiments of the present application will be described in detail below in combination with the drawings.

[0048] Figure 1 The preparation method of the flexible magnetic tactile sensor according to the embodiment of the present application is shown.

[0049] As Figure 1 shown, the preparation method of the flexible magnetic tactile sensor of the embodiment of the present application comprises:

[0050] S100: constructing the structure of the elastomer of the target sensor, the elastomer being formed based on the mixed material of flexible material and magnetic material;

[0051] S200: magnetizing the elastomer to form a three-dimensional detection layer;

[0052] S300: packaging the three-dimensional detection layer and a detection chip to form a flexible magnetic tactile sensor.

[0053] Specifically, the flexible magnetic tactile sensor manufacturing method can include: constructing a base structure of a target sensor; wherein the base structure includes a flexible substrate and an elastomer disposed on the flexible substrate. At the same time, a flexible material and a mixed material of the flexible material and a magnetic material can be obtained; wherein the flexible substrate is formed based on the flexible material, and the elastomer is formed based on the mixed material; the base structure is subjected to magnetization treatment to form a three-dimensional detection layer; and the three-dimensional detection layer and a detection chip are packaged to form a flexible magnetic tactile sensor.

[0054] As a specific example, the flexible magnetic tactile sensor manufacturing method of the embodiment of the present application can include:

[0055] Step 1: constructing a base structure of a target sensor; wherein the base structure includes a flexible substrate and an elastomer disposed on the flexible substrate.

[0056] The construction of the base structure of the target sensor can be completed by using related modeling software, in which the shape and size of the flexible substrate, the structure and size of the elastomer, and the positional relationship between the flexible substrate and the elastomer, etc. can be determined for subsequent printing operations.

[0057] Step 2: obtaining a flexible material and a mixed material of the flexible material and a magnetic material; wherein the flexible material is used to form the flexible substrate, and the mixed material is used to form the elastomer.

[0058] The flexible material can be selected from at least one of TPU, TPE, SBS and SEBS; the magnetic material includes at least one of neodymium iron boron and samarium iron nitrogen. After the flexible material and the magnetic material are determined, the flexible material powder and the magnetic material powder are prepared, the agglomerated material is removed by using a screen, and the two powders are uniformly mixed in a blender according to a certain ratio. Finally, the mixed material is packaged for use after the mixing is completed.

[0059] Step 3: placing the flexible material in a binder jet printing device to print the flexible substrate.

[0060] Step 4: taking out the flexible material, and placing the mixed material in the binder jet printing device to print the elastomer on the flexible substrate to form the base structure.

[0061] After the above material preparation is completed, the printing operation can be started. First, the flexible material is placed in the predetermined binder jet printing device, and the flexible substrate is printed according to the printing parameters such as size and shape. After the flexible substrate is printed, the printing is paused, the flexible material powder tank is taken out, the pre-prepared mixed material is loaded into the powder tank, and the printing of the elastomer is continued.

[0062] Specifically, the related parameters of the binder jet printing device are as follows: the inkjet amount of a single layer is 0.028 muL / mm 2 , the printing layer thickness is 0.05 mm, and the entire base structure is cut into 100 layers for printing, so that the number of layers at which the printing of the flexible substrate stops is determined according to the thickness of the flexible substrate, and the specific parameters can be set according to the size and requirements of the base structure.

[0063] Step five: magnetizing the base structure to form a three-dimensional detection layer;

[0064] Step six: packaging the three-dimensional detection layer and the detection chip to form a flexible magnetic tactile sensor.

[0065] Wherein, after the base structure is printed, it can be taken out of the binder jet printing device, then subjected to special magnetization treatment to form a three-dimensional detection layer, and then packaged with the detection chip of the sensor at a certain detection distance to form a flexible magnetic tactile sensor.

[0066] In addition, after the base structure is formed and before the base structure is magnetized, it further includes: first, baking the base structure at a low temperature, and cleaning the baked base structure; then, vacuum drying the cleaned base structure; wherein the temperature of vacuum drying is lower than the melting point of the flexible material.

[0067] It can be seen that the base structure formed by preliminary printing has almost no mechanical properties, so the base structure can be taken out of the binder jet printing device after the excess powder around the base structure is removed, dried at a lower temperature in a constant temperature oven for a period of time, and then the excess powder around the base structure is blown away with an ear cleaning ball to complete the pre-bonding process of the base structure. The temperature in the pre-bonding process can be set to 70-90 DEG C, which will not affect the material itself in the case of rapid bonding. Then, the base structure after pre-bonding and cleaning is subjected to vacuum drying treatment, the vacuum oven temperature close to but lower than the melting point of the flexible material is set, the base structure after pre-bonding and cleaning is placed in the oven and baked for a period of time in a vacuum state, and finally the base structure is taken out of the oven after cooling.

[0068] In the flexible magnetic tactile sensor of the embodiment of the present application, the flexible substrate can be a hollow frame structure in a circular or polygonal shape, and the elastomer is arranged in a three-dimensional structure on the flexible substrate; wherein, when the flexible substrate is circular, the elastomer can include a polygonal support frame embedded in the flexible substrate, and a first inclined leg arranged on the polygonal support frame, wherein one end of each first inclined leg is connected to a different side of the polygonal support frame, and the other end of each first inclined leg intersects at a point (as shown in the drawings) to form a stress point. In the application process, external pressure acts on the stress point, and a corresponding electrical signal can be generated through the deformation of the stress point to complete the signal acquisition of the sensor.

[0069] Figures 2 to 4 The schematic structures of the three-dimensional detection layer according to embodiments of the application are shown respectively. As shown in the figures, Figures 2 to 4 As shown in the figures, the flexible substrate 1 is circular, and the support frame 2 is square. In this case, four first inclined legs 3 can be provided. One end of each of the four first inclined legs 3 is fixed at the center of one side of the square support frame, and the other end is inclined inwardly and intersects with the other first inclined legs 3 to form a symmetrical three-dimensional cross structure. The claw-shaped three-dimensional cross structure can effectively improve the magnetic gradient effect, thereby achieving efficient force-magnetic conversion.

[0070] In another specific embodiment, when the flexible substrate is polygonal, the elastic body can include a circular support frame embedded in the flexible substrate, and a second inclined leg provided on the circular support frame. One end of each of the different second inclined legs is connected to the circular support frame, and the other end intersects at a point.

[0071] Specifically, the deformed structure of the flexible substrate can be square or regular pentagon, hexagon, etc. The support frame located therein can be set as an inscribed circle tangent to each side of the polygonal flexible substrate. In this case, three or more second inclined legs can be provided. The multiple second inclined legs can be uniformly spaced on the circular support frame. Through the deformation of the structure, i.e., the deformation of the multiple inclined legs, the detection range of the sensor can be improved, and the application range thereof can be expanded.

[0072] In addition, the flexible substrate and the support frame in the elastic body can also be set as polygonal structures. The vertices of the polygonal support frame can be distributed at the midpoints of the sides of the flexible substrate, and the inclined legs can still be distributed in the form of multiple claws to form a three-dimensional elastic structure.

[0073] It should be noted that, in the process of magnetizing the base structure to form the three-dimensional detection layer, the base structure is extruded and limited by a pre-set limiting mold. The extruded base structure has parallel and adhered inclined legs. The inclined legs include first inclined legs and second inclined legs. The inclined legs in the limiting mold are magnetized in the same direction. Finally, the magnetized inclined legs are taken out of the limiting mold to form the three-dimensional detection layer.

[0074] Specifically, since the flexible substrate and the elastomer both have certain elasticity, in order to ensure the consistency of the magnetizing direction and overcome the problem that the initial magnetic field strength is large in the traditional sensor, resulting in low sensitivity, the special magnetizing process is performed on the substrate structure, the inclined legs are extruded to form a structure that is mutually attached and consistent in direction, and then the magnetizing is performed from the flexible substrate to the stress point direction of the inclined leg, so that the magnetic field direction of the center of the bottom of the substrate structure is changed in the compression process, and then the distance between the entire substrate structure and the detection chip is adjusted, so that the initial magnetic field strength at a certain position is close to 0, thereby greatly reducing the value of B0, and the sensitivity (△B / B0) is greatly improved, wherein B0 represents the initial measurement value when there is no signal input, and B represents the measurement value when there is signal input.

[0075] Therefore, the elastomer of the embodiment of the present application can adopt a centripetal magnetizing structure to cause the center area of the bottom of the three-dimensional detection layer to have the phenomenon of magnetic field direction change, so that the initial magnetic field can be adjusted to be close to 0, specifically, the limiting mold includes a support and a limiting hole arranged on the support, the shape of the limiting hole is matched with the shape of the inclined legs after being attached together; the inclined legs are extruded to be parallel to each other and pass through the limiting hole for binding and limiting, and then the inclined legs are placed in a magnetizing device such as a strong magnetic coil for magnetizing, after the magnetizing is completed, the inclined legs are extracted from the limiting hole to release the binding, and the centripetal magnetized three-dimensional detection layer is obtained.

[0076] In other words, in the magnetizing process of the three-dimensional detection layer, the distance between the three-dimensional detection layer and the detection chip can be adjusted to change the strength of the initial magnetic field, the distance at which the initial magnetic field strength is close to 0 is determined by the detection chip, and the three-dimensional detection layer and the detection chip are packaged according to the distance, and a flexible magnetic tactile sensor with high sensitivity is formed.

[0077] Specifically, Figure 5 A schematic structure of the flexible magnetic tactile sensor according to the embodiment of the present application is shown.

[0078] As Figure 5 shown, the flexible magnetic tactile sensor of the embodiment of the present application includes a substrate layer 4, a three-dimensional detection layer (including an elastomer 10) arranged on the substrate layer 4, a PCB 7 located below the substrate layer 4, a detection chip 6 located on the PCB 7, and a row of pins 5 for facilitating plug-in positioning, wherein the detection chip 6 can be a Hall chip or the like. In the detection process, the three-dimensional detection layer will deform under external pressure, the distance between the three-dimensional detection layer and the detection chip 6 will change, thereby causing the magnetic field strength to change, and finally the detection chip 6 detects the magnetic field strength to complete the detection of the signal.

[0079] Figure 6The magnetic field strength distribution of the flexible magnetic tactile sensor according to the embodiment of the application is shown, and it can be known that, after special magnetization (centripetal magnetization), the magnetic field direction of the central area at the bottom of the three-dimensional detection layer can be changed, so that the initial magnetic field can be adjusted to be close to 0, and the sensitivity of the sensor is improved. Figure 7 The magnetic field distribution in which the magnetic field direction of the central area changes with the distance is shown, wherein the distances 0.5 mm, 1.7 mm and 2 mm refer to the vertical distance between the central distance at the bottom of the three-dimensional detection layer and the detection chip, and the adjustment of the magnetic field strength can be realized by adjusting the packaging distance between the two. Figure 8 The stress and strain of the flexible magnetic tactile sensor in the compression process are shown, wherein the compression modulus is about 0.22 Mpa in the strain range of 0-45%, and the compression modulus is about 1.25 Mpa in the strain range of 45%-57%, and it can be known that the stress performance can also be obviously improved after centripetal magnetization.

[0080] It should be noted that, since the modulus of the elastomer with the three-dimensional frame structure is limited, the signal is easy to be saturated when the mechanical test is performed, and therefore, when a larger signal needs to be tested, the flexible substrate and the polygonal support frame can be removed, and the PDMS pouring technology (the process of pouring polydimethylsiloxane (PDMS) material into a mold to form a microfluidic chip through solidification) is used, only the inclined legs are molded and solidified, and a packaging structure as shown in the accompanying drawings is formed. Figure 9 The packaging structure can improve the range of the elastomer, and meet the needs of more application scenarios.

[0081] Corresponding to the above-mentioned flexible magnetic tactile sensor preparation method, the application also provides a flexible magnetic tactile sensor prepared by using the above-mentioned flexible magnetic tactile sensor preparation method.

[0082] According to the flexible magnetic tactile sensor and the preparation method thereof of the application, the more complex structure design, larger area and higher efficiency manufacturing can be realized through the adhesive jet printing technology, and meanwhile, the magnetic field direction of the central area at the bottom of the three-dimensional detection layer can be changed in the compression process through the combination of the elastomer design of the inclined leg structure and the special magnetization mode, and then the initial magnetic field strength at a certain position is close to 0 by adjusting the distance between the three-dimensional detection layer and the detection chip, and then the packaging is performed, so that the value of B0 is greatly reduced, and the detection sensitivity is improved.

[0083] The flexible magnetic tactile sensor and the preparation method thereof according to the present application are described above with reference to the drawings by way of example. However, those skilled in the art should understand that various improvements can be made to the flexible magnetic tactile sensor and the preparation method thereof according to the present application described above without departing from the content of the present application. Therefore, the protection scope of the present application should be determined by the content of the appended claims.

Claims

1. A method of preparing a flexible magnetic haptic sensor, characterized in that, The application relates to a flexible magnetic tactile sensor preparation method. The application comprises the following steps: Constructing the structure of the elastomer of the target sensor, which is formed based on a mixed material of a flexible material and a magnetic material; Performing magnetization treatment on the elastomer to form a three-dimensional detection layer; Packaging the three-dimensional detection layer and a detection chip to form the flexible magnetic tactile sensor; Constructing the structure of the elastomer of the target sensor, which comprises the following steps: Constructing the base structure of the target sensor; wherein the base structure comprises a flexible base and the elastomer arranged on the flexible base, and the flexible base is formed based on the flexible material; The flexible base is a hollow frame structure with a circular shape or a polygonal shape; When the flexible base is circular, the elastomer comprises a polygonal support frame embedded in the flexible base, and first inclined legs arranged on the polygonal support frame; One end of each of the different first inclined legs is connected with a different side of the polygonal support frame, and the other end of each of the different first inclined legs intersects at a point; When the flexible base is polygonal, the elastomer comprises a circular support frame embedded in the flexible base, and second inclined legs arranged on the circular support frame; One end of each of the different second inclined legs is connected with the circular support frame, and the other end of each of the different second inclined legs intersects at a point; The one ends of the different second inclined legs connected with the circular support frame are uniformly and spacedly distributed on the circular support frame; 2. The method of claim 1, wherein the method further comprises: The elastomer is a centripetal magnetization structure, so that the central region of the bottom of the three-dimensional detection layer appears a magnetic field direction change phenomenon. Performing magnetization treatment on the base structure to form a three-dimensional detection layer, which comprises the following steps: Extruding and limiting the base structure through a pre-set limiting mold; wherein the extruded and limited base structure has parallel and adhered inclined legs; wherein the inclined legs comprise the first inclined legs and the second inclined legs; Performing same-direction magnetization treatment on the inclined legs in the limiting mold; Taking out the magnetized inclined legs from the limiting mold to form the three-dimensional detection layer.

3. The flexible magnetic tactile sensor preparation method according to claim 2, wherein The limiting mold comprises a support and limiting holes arranged on the support, and the shape of the limiting holes is matched with the shape of the adhered inclined legs; 4. The method of claim 2, wherein the magnetic haptics sensor is a flexible magnetic haptics sensor. The inclined legs are inserted into the limiting holes for limiting. After the base structure is formed and before the magnetization treatment is performed on the base structure, the method further comprises the following steps: Performing low-temperature baking on the base structure, and cleaning the baked base structure; Performing vacuum drying on the cleaned base structure; wherein The temperature of the vacuum drying is lower than the melting point of the flexible material.

5. The flexible magnetic tactile sensor preparation method according to claim 1, wherein The flexible material comprises at least one of TPU, TPE, SBS and SEBS; 6. A flexible magneto-tactile sensor characterized by, The magnetic material comprises at least one of neodymium iron boron and samarium iron nitride. The flexible magnetic tactile sensor is prepared by using the flexible magnetic tactile sensor preparation method according to any one of claims 1-5.

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