Intake diverter, purging structure and process chamber

Abstract

The present application relates to the technical field of process treatment equipment, and particularly to an intake air diverter, a purging structure, and a process chamber. The intake air diverter includes a diverter body; the diverter body has a first end face, a second end face, and a side surface located between the first end face and the second end face; the diverter body is provided with a commutation channel and a diversion channel, the commutation channel is communicated between the side surface and the first end face, the diversion channel is communicated between the first end face and the second end face, and the commutation channel and the diversion channel are isolated from each other. The intake air diverter can adjust the flow direction of the purging gas, so that the purging gas can flow to a preset position through the guidance of the commutation channel and the diversion channel, so as to thoroughly purge the purging area of the purging structure and prevent the occurrence of purging blind spots, which may affect the purging effect.

Description

Technical Field

[0001] The present application relates to the technical field of process treatment equipment, and particularly relates to an intake air diverter, a purging structure and a process chamber. Background Art

[0002] In process treatment, a workpiece to be processed can be placed in a chamber of the equipment for process treatment. Among them, the chamber of the equipment is divided into an upper chamber and a lower chamber which are distributed up and down. The upper chamber is used to introduce process gas so that the workpiece to be processed can achieve a process reaction in an environment filled with process gas. The lower chamber is used to introduce purging gas to prevent the deposition of process gas from corroding the chamber.

[0003] Specifically, the process treatment equipment is provided with an intake structure communicated with the lower chamber, and purging gas is introduced into the lower chamber through this intake structure. In the current process treatment equipment, the intake structure for providing purging gas is relatively simple, and there are purging blind spots, that is, there are positions that the purging gas of the intake structure cannot reach, resulting in incomplete purging. Summary of the Invention

[0004] The present application provides an intake air diverter, a purging structure and a process chamber. The intake air diverter can be applied to equipment purging to purge the purging area of the purging structure without purging blind spots.

[0005] In a first aspect, the present application provides an intake diverter that can be installed in the opening groove of an intake purge structure to purge the purge area of the purge structure. During the purging process through the opening groove, the intake diverter can change the purge path of the purge gas to prevent the occurrence of purge blind spots. The intake diverter includes a diverter body having a first end face and a second end face, the first end face and the second end face being disposed opposite to each other, and the surface between the first end face and the second end face can be regarded as the side face of the intake diverter. The intake diverter is further provided with a mutually isolated commutation channel and a diversion channel. The commutation channel is communicated between the side face and the first end face, and can direct the airflow on the side face to the first end face, or direct the airflow on the first end face to the side face. The diversion channel is communicated between the first end face and the second end face, and can direct the airflow on the first end face to the second end face, or direct the airflow on the second end face to the first end face. The commutation channel and the diversion channel form a gas flow channel of "side face - first end face - second end face", and this channel can change the flow direction of the airflow. During operation, the intake diverter is installed in the required purge structure, and through the cooperation of the intake diverter and the purge structure, the flow direction of the purge gas is adjusted so that the purge gas can flow to the preset position through the guidance of the commutation channel and the diversion channel to purge the purge area of the purge structure more thoroughly and prevent the occurrence of purge blind spots, which may affect the purge effect. In application, the intake diverter can be installed in the opening groove to be purged for use. Since the intake diverter is relatively independent and detachable from the structure body, the intake diverter can be applied in different application scenarios according to requirements. Moreover, the structures of the commutation channel and the diversion channel in the intake diverter can also be adjusted to meet the purge requirements of different process scenarios of the purge structure according to requirements.

[0006] Among them, the commutation channel may include an air distribution groove and at least two air distribution holes. The air distribution groove is arranged on the side face of the diverter body, and the at least two air distribution holes are communicated between the air distribution groove and the first end face. When the purge gas enters from the air distribution groove, the purge gas can diffuse in the air distribution groove to achieve air distribution. The purge gas in the air distribution groove can move to the first end face through the at least two air distribution holes, and the at least two air distribution holes divide the purge gas to improve the uniformity of the distribution of the purge gas on the first end face. Among them, the maximum radial dimension of the air distribution hole perpendicular to the axial direction can be selected from 1.0 mm to 10.0 mm. According to different application scenarios, the number of air distribution holes can be 20 - 30.

[0007] Specifically, the at least two air distribution holes may be arranged along a first direction, and the first direction is perpendicular to the axial center line direction of the air distribution hole. That is to say, the at least two air distribution holes are located on the same horizontal plane, so that the airflow formed by the purge gas divided by the at least two air distribution holes can be distributed in a planar shape, which is convenient for the purge gas to be evenly distributed in the first direction.

[0008] Possibly, at least two of the above-mentioned air distribution holes are centrosymmetrically distributed with respect to the air equalizing groove, so that the air flow formed by the purging gas shunted through the at least two air distribution holes is centrosymmetrically distributed.

[0009] In order to control the flow direction of the purging gas, the axis line of the air distribution hole can be parallel to the bottom of the air equalizing groove. Of course, there can also be an included angle between the axis line of the air distribution hole and the bottom of the air equalizing groove.

[0010] In a possible implementation manner, the intake air diverter further includes a sealing assembly, and the sealing assembly is disposed around the side surface of the diverter body. When the intake air diverter is installed into the opening groove of the purging structure, the sealing assembly can improve the installation reliability and sealing performance.

[0011] Specifically, the sealing assembly can include a first sealing ring and a second sealing ring. The first sealing ring is close to the first end face, and the second sealing ring is close to the second end face. Along the direction from the first end face to the second end face, the first sealing ring and the second sealing ring cooperate to install the intake air diverter into the opening groove of the purging structure.

[0012] Among them, the material of the first sealing ring can be polytetrafluoroethylene, rubber or silica gel. The material of the second sealing ring can also be polytetrafluoroethylene, rubber or silica gel. When the first sealing ring and the second sealing ring are made of polytetrafluoroethylene, the first sealing ring and the second sealing ring can maintain good lubricity, which is convenient for the disassembly and assembly of the intake air diverter.

[0013] In order to facilitate the removal of the intake air diverter from the purging structure, the intake air diverter can further include a disassembly and assembly part. The disassembly and assembly part is fixed to the diverter body, and the disassembly and assembly part is provided with a disassembly and assembly interface for cooperating with a tooling. When it is necessary to remove the intake air diverter, the tooling is cooperated with the disassembly and assembly structure, and a force is applied to the tooling to pull out the intake air diverter to achieve the removal.

[0014] In a possible implementation manner, the diverter body is further provided with a conduction groove. The conduction groove is located on the side surface of the diverter body, and the conduction groove communicates between the second end face and the commutation channel. The air flow in the commutation channel can partially flow through the conduction groove to the second end face, or part of the air flow at the second end face can flow through the conduction groove into the commutation channel.

[0015] Second aspect, the present application provides a purging structure, including a structural body and any one of the intake air distributors provided in the first aspect above. The structural body has an opening groove, and the structural body is further provided with a purging port communicated with the opening groove. The intake air distributor is installed in the opening groove, the side surface of the distributor body is matched with the opening groove, and the commutation channel is communicated with the purging port. The first end surface of the distributor body faces the bottom of the opening groove. The opening side of the structural body can be installed on the equipment to be purged, and purging gas is introduced into the purging port. The purging gas can purge the opening groove through the commutation channel and the diversion channel of the intake air splitter, preventing the existence of purging blind areas in the opening groove and affecting the purging effect.

[0016] Third aspect, the present application provides a process chamber, including a cavity body, and the cavity body is provided with the purging structure provided in the second aspect above. The cavity body has an upper chamber and a lower chamber, wherein the upper chamber is used for introducing process gas, and the lower chamber is used for introducing purging gas. The opening of the structural body in the purging structure is communicated with the lower chamber. During operation, the purging gas can enter the lower chamber through the purging structure, preventing the process gas in the upper chamber from depositing and causing corrosion to the inside of the cavity body. Description of the Drawings

[0017] Figure 1 It is a schematic cross-sectional structure diagram of a process chamber provided by an embodiment of the present application;

[0018] Figure 2a It is a schematic cross-sectional structure diagram of a state of a substrate loading structure in a process chamber provided by an embodiment of the present application;

[0019] Figure 2b It is a schematic cross-sectional structure diagram of another state of a substrate loading structure in a process chamber provided by an embodiment of the present application;

[0020] Figure 3a It is a schematic cross-sectional structure diagram of a purging structure provided by an embodiment of the present application;

[0021] Figure 3b It is Figure 3a a schematic diagram of the flow path of the purging gas in the purging structure in;

[0022] Figure 4a It is a schematic cross-sectional structure diagram of another purging structure provided by an embodiment of the present application;

[0023] Figure 4b It is Figure 4a a schematic diagram of the flow path of the purging gas in the purging structure in;

[0024] Figure 5a It is a schematic structure diagram of an intake air distributor provided by an embodiment of the present application;

[0025] Figure 5bis Figure 5a a schematic structural view of another perspective of the intake air diverter in

[0026] Figure 5c is Figure 5a a right view of the intake air diverter in

[0027] Figure 6a a schematic structural view of another intake air diverter provided by an embodiment of the present application;

[0028] Figure 6b is Figure 6a a schematic structural view of another perspective of the intake air diverter in

[0029] Figure 6c is Figure 6a a right view of the intake air diverter in

[0030] Figure 6d is Figure 6a a top view of the intake air diverter in

[0031] Figure 6e is Figure 6d a schematic cross-sectional structural view at V-V in

[0032] Figure 7a a schematic cross-sectional structural view of an intake air diverter provided by an embodiment of the present application;

[0033] Figure 7b is Figure 7a a schematic diagram of the flow path of the purge gas when the intake air diverter cooperates with the opening groove in

[0034] Figure 8a a schematic structural view of another intake air diverter provided by an embodiment of the present application;

[0035] Figure 8b is Figure 8a a schematic structural view of another perspective of the intake air diverter in

[0036] Figure 8c is Figure 8a a top view of the intake air diverter in

[0037] Figure 8d is Figure 8c a schematic cross-sectional structural view at T-T in

[0038] Figure 9a a schematic cross-sectional structural view of another intake air diverter provided by an embodiment of the present application;

[0039] Figure 9b is Figure 7a a schematic diagram of the flow path of the purge gas when the intake air diverter cooperates with the opening groove in

[0040] Figure 10a Schematic cross-sectional structure diagram of a diverter body in an intake diverter provided by an embodiment of the present application;

[0041] Figure 10b Schematic cross-sectional structure diagram of a diverter body in another intake diverter provided by an embodiment of the present application;

[0042] Figure 10c Schematic cross-sectional structure diagram of a diverter body in another intake diverter provided by an embodiment of the present application;

[0043] Figure 11a Schematic diagram of the cross-sectional shape of an air distribution hole in an intake diverter provided by an embodiment of the present application;

[0044] Figure 11b Schematic diagram of the cross-sectional shape of an air distribution hole in another intake diverter provided by an embodiment of the present application;

[0045] Figure 11c Schematic diagram of the cross-sectional shape of an air distribution hole in another intake diverter provided by an embodiment of the present application;

[0046] Figure 12 Schematic structure diagram of another intake diverter provided by an embodiment of the present application;

[0047] Figure 13 Schematic cross-sectional structure diagram of the cooperation between an intake diverter and an opening groove provided by an embodiment of the present application;

[0048] Figure 14 Schematic cross-sectional structure diagram of a substrate loading structure provided by an embodiment of the present application.

[0049] Description of reference numerals:

[0050] 1 - Diverter body;

[0051] 10 - Intake diverter; 11 - First structural part; 12 - Second structural part;

[0052] 100 - Purge structure;

[0053] 2 - Disassembly and assembly part;

[0054] 20 - Structural body;

[0055] 200 - Cavity; 201 - Opening groove; 202 - Support structure;

[0056] 31 - First sealing ring; 32 - Second sealing ring;

[0057] 300 - Substrate loading structure; 301 - Substrate loading channel; 302 - Valve baffle; 321 - Notch;

[0058] 3011 - Inlet section; 3012 - Outlet section;

[0059] 400 - Carrier tray;

[0060] A1 - Upper chamber; A2 - Lower chamber; B - Guide space; C1 - Commutation channel; C2 - Diversion channel; L - Aperture; Q - Central axis; R - Axis line; W - Bottom surface; X - First direction; Y - Second direction; Z - Third direction; a1 - Inlet end; a2 - Outlet end; b - Air inlet; c1 - Bottom of groove; c2 - Opening; d - Purge port; e1 - First end face; e2 - Second end face; e3 - Side face; h - Conducting groove; f1 - First sealing groove; f2 - Second sealing groove; g - Disassembly and assembly interface;

[0061] C11 - Gas - equalizing groove; C12 - Gas - distributing hole. Detailed implementation manners

[0062] In some process treatments, the workpiece to be processed is placed in a process chamber for treatment. The process chamber generally includes an upper chamber and a lower chamber. Process gas is introduced into the upper chamber to perform process treatment on the workpiece to be processed, and purge gas is introduced into the lower chamber to avoid adverse effects on the chamber caused by the deposition of process gas. In the traditional technology, the process chamber is provided with a purge structure, and the purge gas is sent into the lower chamber through the purge structure. Among them, the purge gas needs to purge the purge area of the purge structure, and there is a purge blind area during the purging process, which affects the purging effect.

[0063] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings. The terms used in the following embodiments are only for the purpose of describing specific embodiments and are not intended to limit the present application. As used in the specification and appended claims of the present application, the singular forms "a", "an", "the", "above", "said", "this" are also intended to include forms such as "one or more", unless there is a clear contrary indication in the context.

[0064] References to "one embodiment" or "some embodiments" or the like described in this specification mean that a particular feature, structure, or characteristic described in connection with that embodiment is included in one or more embodiments of the present application. Thus, statements such as "in one embodiment", "in some embodiments", "in other some embodiments", "in still other embodiments", etc. that appear in different places in this specification do not necessarily all refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized. The terms "comprising", "including", "having" and their variants all mean "including but not limited to", unless otherwise specifically emphasized.

[0065] As Figure 1 shown, an embodiment of the present application provides a process chamber, which includes a chamber 200. The internal space of the chamber 200 can accommodate a substrate and perform a process on the substrate. A susceptor 400 for carrying a workpiece to be processed is disposed inside the chamber 200. The susceptor 400 can be supported by a support structure 202 and rotate around a central axis Q inside the chamber 200. The central axis Q passes through the center of the susceptor 400, and the axis line of the support structure 202 is collinear with the central axis Q. During operation, the workpiece to be processed can be placed on the susceptor 400, and the susceptor 400 rotates around the central axis Q, thereby driving the workpiece to be processed to rotate around the central axis Q. With the susceptor 400 as a reference, the internal space of the chamber 200 is divided into an upper chamber A1 and a lower chamber A2. It can be considered that the susceptor 400 defines the upper chamber A1 and the lower chamber A2 of the chamber 200. During the process, the workpiece to be processed is placed on the susceptor 400, and a process gas is introduced into the upper chamber A1 so that the workpiece to be processed can be processed in an environment filled with the process gas. At the same time, a purge gas is introduced into the lower chamber A2 to prevent the process gas from depositing and causing corrosion and other effects on the inner surface of the chamber 200.

[0066] Specifically, the process chamber is provided with a substrate loading structure 300. The substrate loading structure 300 has a substrate loading channel 301 communicating with the lower chamber A2. During operation, the workpiece to be processed can enter or exit the internal space of the chamber 200 through the substrate loading channel 301, and then the susceptor 400 is moved so that the workpiece is in the upper chamber A1.

[0067] As Figure 2a shown in the structure of the substrate loading structure 300, along the extending direction of the substrate loading channel 301, the substrate loading structure 300 has an inlet end a1 and an outlet end a2. The outlet end a2 is used to communicate with the lower chamber A2 of the chamber 200. A valve baffle 302 is disposed inside the substrate loading channel 301. The valve baffle 302 is movably installed inside the substrate loading channel 301. Specifically, the valve baffle 302 can be moved by structures such as an air valve and a cylinder, so that the valve baffle 302 can be in a Figure 2aThe first state of entering the substrate loading channel 301 as shown. When the valve baffle 302 moves along the Figure 2a arrow direction shown, until Figure 2b it moves out of the substrate loading channel 301 as shown, the valve baffle 302 is in the second state. Referring to Figure 2a as shown, when the valve baffle 302 is in the first state, the substrate loading channel 301 is separated by the valve baffle 302 into an inlet section 3011 and an outlet section 3012. The outlet section 3012 can be considered as a section of the channel docked with the cavity 200. Referring to Figure 2b as shown, when delivering a workpiece to be processed into the cavity 200, move the valve baffle 302 to make the valve baffle 302 in the second state. The workpiece to be processed enters the inlet section 3011 from the inlet end a1 and enters the outlet section 3012, and then enters the lower chamber A2 of the cavity 200 from the outlet end a2 after passing through the outlet section 3012. When the workpiece to be processed enters the outlet section 3012, the valve baffle 302 can return to the first state through structures such as an air valve and a cylinder. The valve baffle 302 blocks the substrate loading channel 301, and the inlet section 3011 and the outlet section 3012 are isolated from each other. It should be understood that there will be a small gap between the valve baffle 302 and the substrate loading channel 301 due to requirements such as manufacturing process, structural assembly, and movement space, that is to say, the valve baffle 302 cannot completely isolate the inlet section 3011 and the outlet section 3012.

[0068] Refer to Figure 2a and Figure 2b as shown together. The substrate loading structure 300 is further provided with an air inlet b, and the air inlet b is communicated with the outlet section 3012. During the process treatment, when the workpiece to be processed enters the lower chamber A2 of the cavity 200 and the valve baffle 302 is in the first state, purge gas can be introduced into the outlet section 3012 through the air inlet b, and the purge gas can enter the lower chamber A2 of the cavity 200 through the outlet section 3012.

[0069] As Figure 3a shown, an embodiment of the present application provides a purge structure 100, and this purge structure 100 can introduce purge gas into structures such as a chamber. The purge structure 100 includes a structure body 20, and the structure body 20 has an opening groove 201 and a purge port d communicated with the opening groove 201. It can be considered that the opening groove 201 is the purge area of the purge structure 100. The opening groove 201 has a groove bottom c1 and an opening c2. Please continue to refer to Figure 3aAs shown, the purging structure 100 further includes an intake air diverter 10, which is disposed in the opening groove 201. The intake air diverter 10 has a first end face e1 and a second end face e2, and the first end face e1 is opposite to the second end face e2. Among them, the first end face e1 faces the bottom c1 of the groove, and the second end face e2 faces away from the bottom c1 of the groove. There is a certain distance between the first end face e1 and the bottom c1 of the groove, so that a guiding space B is formed between the bottom c1 of the groove and the intake air diverter 10. The intake air diverter 10 is provided with a commutation channel C1 and a diversion channel C2. The commutation channel C1 communicates between the first end face e1 and the purging port d, so the commutation channel C1 can communicate the guiding space B with the purging port d. The diversion channel C2 communicates between the first end face e1 and the second end face e2, so the diversion channel C2 can communicate the guiding space B with the opening c2.

[0070] It should be understood that the purging structure 100 can specifically be Figure 2a and Figure 2b the substrate loading structure 300 shown in the figure. That is to say, when the purging structure 100 is applied to the process chamber, it can be used as the substrate loading structure 300 of the process chamber. At this time, the structure on one side of the bottom c1 of the opening groove 201 needs to be replaced with a valve baffle 302. When the valve baffle 302 is in the first state, an opening groove 201 is formed between the valve baffle 302 and the outlet section 3012.

[0071] As Figure 3b shown, when purging gas is introduced into the purging port d, the direction of the purging gas entering the opening groove 201 from the purging port d is close to perpendicular to the extending direction of the opening groove 201. The purging gas entering the opening groove 201 enters the commutation channel C1 and enters the guiding space B between the first end face e1 and the bottom c1 of the groove through the commutation channel C1. The purging gas discharged from the commutation channel C1 is reflected by the bottom c1 of the groove and then enters the diversion channel C2, and is discharged from the second end face e2 after passing through the diversion channel C2. During the flow of the purging gas, the intake air diverter 10 changes the flow direction of the purging gas through the structures of the commutation channel C1 and the diversion channel C2. The purging gas can thoroughly purge the guiding space B between the bottom c1 of the groove and the first end face e1 of the intake air diverter 10, so that all positions of the guiding space B are purged, preventing the occurrence of purging blind spots, thereby achieving a good purging effect. When the purging structure 100 is applied as Figure 2a and Figure 2b the substrate loading structure 300 in the figure, purging gas can be transported to the lower chamber A2 of the process chamber through the purging structure 100. During the flow of the purging gas, there is no purging blind spot.

[0072] In some embodiments, such as Figure 4aAs shown, the intake diverter 10 is further provided with a conduction groove h, which communicates between the commutation channel C1 and the second end face e2, and can realize the conduction between the air flow in the commutation channel C1 and the air flow at the second end face e2. The conduction groove h is isolated from the diversion channel C2. Among them, the conduction groove h can be arranged on the side face e3 of the intake diverter 10, and at this time the conduction groove h is an open structure. The conduction groove h can also be arranged in the form of a through hole between the commutation channel C1 and the second end face e2. Here, exemplarily, the conduction groove h is arranged on the side face e3 of the intake diverter 10 and is in an open shape. When the intake diverter 10 is installed in the opening groove 201, the conduction groove h is located between the groove wall of the opening groove 201 and the side face e3 of the intake diverter 10.

[0073] Specifically, the radial dimension of the conduction groove h is relatively small, which is used to pass a small amount of air flow to ensure that most of the purge gas is purged through the commutation channel C1 and the diversion channel C2. Of course, there may be multiple conduction grooves h. Combining Figure 4b As shown in the schematic diagram of the purge gas flow, after the purge gas enters the commutation channel C1 through the purge port d, most of the purge gas will flow through the commutation channel C1 to the guiding space B between the first end face e1, and then be discharged from the second end face e2 after passing through the diversion channel C2. There is also a small part of the purge gas that directly flows to the second end face e2 through the conduction groove h, and the flow direction of this part of the air flow can be referred to as the dotted arrow. This part of the purge gas can purge a part of the space on the second end face e2, further improving the purge effect.

[0074] As Figure 5a and Figure 5b shown in the intake diverter 10, the intake diverter 10 includes a diverter body 1, and the shape of the diverter body 1 is adapted to the shape of the opening groove 201 of the intake diverter 10. Based on Figure 5a the structure of the diverter body 1 shown, the first direction X, the second direction Y and the third direction Z that are perpendicular to each other in pairs are set. Figure 5c shows the right view of the diverter body 1. The first direction X can be considered as the length direction of the diverter body 1, the second direction Y can be considered as the width direction of the diverter body 1, and the third direction Z can be considered as the height direction of the diverter body 1. When the diverter body 1 is installed in the opening groove 201 of the structural body, the second direction Y is parallel to the extension direction of the opening groove 201.

[0075] The outer surface of the diverter body 1 can include a first end face e1, a second end face e2 and a side face e3 between the first end face e1 and the second end face e2. An air distribution groove C11 is arranged on the side face e3, and an air distribution hole C12 is arranged between the air distribution groove C11 and the first end face e1. The air distribution hole C12 can conduct the air distribution groove C11 and the first end face e1. Combining Figure 4aAs shown, when installing the intake air diverter 10 onto the purging structure 100, the air distribution groove C11 corresponds to the position of the purging port d on the structure body 20, such that the air distribution groove C11 communicates with the purging port d. At this time, the air distribution groove C11 and the air distribution holes C12 form the commutation channel C1 of the intake air diverter 10.

[0076] It should be understood that since the intake air diverter 10 and the opening groove 201 of the structure body 20 are relatively independent and detachable, the intake air diverter 10 can be applied to different application scenarios according to requirements. Moreover, the structures of the commutation channel C1 and the diversion channel C2 in the intake air diverter 10 can also be adjusted to meet the purging requirements of different process scenarios of the purging structure 100 according to requirements. That is to say, for a purging structure, there may be different purging modes, and intake air diverters 10 with different structures can be installed in the opening groove 201 of the structure body 20 as needed, so as to meet different purging process requirements.

[0077] The intake air diverter 10 is used to be installed in the opening groove 201, and a detachable connection is provided between the intake air diverter 10 and the opening groove 201. Specifically, in a possible implementation manner, the diverter body 1 includes a first structural part 11 and a second structural part 12. One end of the first structural part 11 away from the second structural part 12 forms a first end face e1, and one end of the second structural part 12 away from the first structural part 11 forms a second end face e2. A stepped shape is formed between the first structural part 11 and the second structural part 12. Of course, the first structural part 11 and the second structural part 12 of the diverter body 1 are adapted to the structure of the opening groove 201 of the structure body. Part of the air distribution groove C11 is located in the first structural part 11, and part is located in the second structural part 12. A first sealing groove f1 surrounding the side face e3 is provided on the first structural part 11, and a second sealing groove f2 surrounding the side face e3 is provided on the second structural part 12. The second sealing groove f2, the first sealing groove f1 is close to the first end face e1, and the second sealing groove f2 is close to the second end face e2.

[0078] Based on Figure 5a As shown, referring to Figure 6a and Figure 6b As shown, a first sealing ring 31 can be provided in the first sealing groove f1, and a second sealing ring 32 can be provided in the second sealing groove f2. Figure 6c Figure 17 shows a right view of the intake air diverter 10, Figure 6d Figure 19 shows a top view of the intake air diverter 10, Figure 6e Figure 21 shows Figure 6dThe sectional structure at V-V. The depth of the first sealing groove f1 is less than the thickness of the first sealing ring 31. When the first sealing ring 31 is installed in the first sealing groove f1, the first sealing groove f1 will protrude from the side surface e3 of the diverter body 1. Similarly, the depth of the second sealing groove f2 is less than the thickness of the second sealing ring 32. When the second sealing ring 32 is installed in the second sealing groove f2, the second sealing groove f2 will protrude from the side surface e3 of the diverter body 1.

[0079] As Figure 7a shown, when the intake air diverter 10 is installed in the opening groove 201, the first sealing ring 31 is located between the opening groove 201 and the first structural part 11, and the second sealing ring 32 is located between the opening groove 201 and the second structural part 12. The first sealing ring 31 and the second sealing ring 32 form a sealing assembly disposed between the diverter body 1 and the opening groove 201. The diverter body 1 and the opening groove 201 can be firmly installed through this sealing assembly, and the sealing performance between the diverter body 1 and the opening groove 201 can be improved, preventing the purge gas from leaking during the flow process.

[0080] Specifically, the materials of the first sealing ring 31 and the second sealing ring 32 can be selected from elastic structures such as polytetrafluoroethylene, rubber, and silica gel, which can deform and generate frictional force between the diverter body 1 and the opening groove 201, so that the diverter body 1 is firmly installed in the opening groove 201. When the first sealing ring 31 and the second sealing ring 32 are made of polytetrafluoroethylene (abbreviated as PTFE), the first sealing ring 31 and the second sealing ring 32 can be combined with the diverter body 1 by hot fitting. Hot fitting refers to the process of first heating and expanding the containing part and then installing the contained part into the mating position for two parts with interference fit. For this application, the containing part refers to the first sealing groove f1 and the second sealing groove f2, and the contained part refers to the first sealing ring 31 and the second sealing ring 32. That is, when manufacturing the intake air diverter 10, the diverter body 1 is heated to expand the first sealing groove f1 and the second sealing groove f2, and then the first sealing ring 31 is installed in the first sealing groove f1, and the second sealing ring 32 is installed in the second sealing groove f2 to complete the assembly of the sealing assembly and the diverter body 1.

[0081] When the first sealing ring 31 and the second sealing ring 32 are made of polytetrafluoroethylene, the friction coefficient of polytetrafluoroethylene is extremely low, which can play a certain lubricating role between the sealing assembly and the opening groove 201, facilitating disassembly and assembly. In addition, the cross-sectional shapes of the first sealing ring 31 and the second sealing ring 32 can be circular, elliptical, polygonal, etc., which are not limited here.

[0082] Possibly, the number of the vent holes C12 can be multiple, specifically at least two. Exemplarily, the number of the vent holes C12 is multiple and arranged along the first direction X, and the first direction X is perpendicular to the axis line of the vent holes C12. The purge gas discharged from the multiple vent holes C12 is in a planar shape, and the distribution along the first direction X is relatively uniform.

[0083] In the implementation of this application, the air distribution groove C11 is exemplarily in a groove shape. When the purge gas enters the air distribution groove C11 from the vent holes C12, the purge gas can be evenly diffused in the air distribution groove C11. After being evenly diffused, the purge gas is shunted into the multiple vent holes C12, and the redistribution of the purge gas can be realized. Through the shunting of the multiple vent holes C12, the flow rate and flow velocity of the purge gas in the multiple vent holes C12 can be kept relatively balanced, and the purge gas can purge any position in the diversion space as comprehensively as possible.

[0084] Along the first direction X, the multiple vent holes C12 can be arranged to be centrosymmetrically distributed with respect to the air distribution groove C11. When the purge gas is discharged from the multiple vent holes C12, a centrosymmetric air flow distribution can be formed in the guiding space B, further improving the effect of balanced purging. Of course, the multiple vent holes C12 do not necessarily have to be centrosymmetrically distributed with respect to the air distribution groove C11, and the embodiments of this application do not make any limitations in this regard.

[0085] In addition, the distance between any two vent holes C12 can be set to be the same, so that the multiple vent holes C12 are arranged in an array along the first direction X. When the purge gas is discharged from the multiple vent holes C12, a more balanced air flow distribution can be formed in the guiding space B, so that each area of the guiding space B can be purged by a similar air flow.

[0086] Combined Figure 6a and Figure 6e As shown, in order to evenly purge the guiding space B, the arrangement of the vent holes C12 can be adapted to the range of the guiding space B along the first direction X, so that the purge gas can purge any place along the first direction X of the guiding space B after being discharged from the multiple vent holes C12, reducing the possibility of purging blind spots.

[0087] Based on Figures 6a to 6e the structure of the intake air diverter 10 shown, Figure 7bShows the gas flow path of the purge gas passing through the purge structure 100 with the intake diverter 10. When the purge gas is introduced through the purge port d, the direction of the purge gas entering the opening groove 201 from the purge port d is almost parallel to the third direction Z. The purge gas entering the opening groove 201 enters the equalizing groove C11 of the commutation channel C1, and the purge gas diffuses and fills the equalizing groove C11 in the equalizing groove C11 to achieve gas equalization. The purge gas in the equalizing groove C11 enters a plurality of split holes C12, and after being split by the plurality of split holes C12, it enters the guiding space B between the first end face e1 and the groove bottom c1. The purge gas discharged from the commutation channel C1 is reflected by the groove bottom c1 and then enters the diversion channel C2, and is discharged from the second end face e2 after passing through the diversion channel C2. During the flow of the purge gas, the intake diverter 10 changes the flow direction of the purge gas through the structures of the commutation channel C1 and the diversion channel C2, and the purge gas can purge the opening groove 201 more thoroughly, so that all positions of the opening groove 201 are purged, preventing the occurrence of purge blind spots, thereby achieving a good purge effect.

[0088] Combined Figure 8a with Figure 8b as shown, the intake diverter 10 is further provided with a notch 321, and the notch 321 is specifically provided on the second sealing ring 32. Combined Figure 8c with the top view of the intake diverter 10 shown in Figure 8d and the cross-sectional structure at T-T shown in Figure 9a as shown, the notch 321 can communicate the spaces on both sides of the second sealing ring 32. As Figure 9a shown, when the intake diverter 10 is installed in the opening groove 201, the notch 321 can conduct the equalizing groove C11 and the second end face e2. The number of notches 321 can be multiple, and the multiple notches 321 are arranged in an array along the first direction X. The radial dimension of the notch 321 is small and can be used to pass a relatively small air flow.

[0089] Further combined Figure 9b as shown, when the purge gas is introduced through the purge port d into the opening groove 201, it enters the equalizing groove C11, a plurality of split holes C12 of the commutation channel C1 to the guiding space B, and then passes through the diversion channel C2 to the second end face e2, further purging the space at the second end face e2. Among them, a small part of the purge gas entering the commutation channel C1 can reach the second end face e2 through the notch 321 on the second sealing ring 32. At this time, the notch 321 on the second sealing ring 32 can serve as a conduction structure for the intake diverter 10 to connect the commutation channel C1 and the second end face e2. That is to say, it can be considered that the notch 321 here is equivalent to Figure 4a the conduction groove h in

[0090] As Figure 10aSchematic cross-sectional structure diagram of the shunt body 1 shown, the cross-section being parallel to the second direction Y and the third direction Z. The axis line R of the air distribution hole C12 is parallel to the bottom surface W of the air equalizing groove C11. Alternatively, as Figure 10b and Figure 10c shown, the axis line R of the air distribution hole C12 is inclined at a certain angle α with respect to the bottom surface W of the air equalizing groove C11. The magnitude of this angle α can be selected according to the specific structure of the shunt body 1 and the application scenario.

[0091] In the intake air shunt 10 provided in the embodiment of the present application, the number of air distribution holes C12 can be set to 20 - 30 according to the structure of different opening grooves 201. Among them, the maximum radial dimension perpendicular to the axial direction of the air distribution hole C12 is 1.0 mm - 10.0 mm. This maximum radial dimension refers to the maximum dimension of the air distribution hole C12 perpendicular to the axial direction and passing through the axis line. The cross-section perpendicular to the axial direction of the air distribution hole C12 can be circular, elliptical, polygonal or oblong. Among them, polygons include but are not limited to shapes such as triangles, rectangles, rhombuses, trapezoids, etc. The shape of the oblong can refer to Figure 11a the runway shape shown. At this time, the aperture L of the air distribution hole C12 is the distance between the centers of the two arcs of the oblong. As Figure 11b shown, when the cross-section perpendicular to the axial direction of the air distribution hole C12 is circular, the maximum dimension perpendicular to the axial direction of the air distribution hole C12 is the diameter of the circle, that is, the aperture L of the air distribution hole C12 is the diameter of the circle. As Figure 11c shown, when the cross-section perpendicular to the axial direction of the air distribution hole C12 is rectangular, for example, square, the maximum dimension perpendicular to the axial direction of the air distribution hole C12 is the diagonal of the rectangle, that is, the aperture L of the air distribution hole C12 is the diagonal of the rectangle.

[0092] As Figure 12 shown, an intake air shunt 10 also includes a disassembly and assembly part 2 provided on the shunt body 1, and the disassembly and assembly part 2 is provided with a disassembly and assembly interface g for cooperating with a tooling. The disassembly and assembly part 2 can be an integral structure with the shunt body 1 and is integrally formed by casting, machining, etc.

[0093] Combined with Figure 13 shown, when the intake air shunt 10 is installed in the opening groove 201 of the structural body 20, the disassembly and assembly part 2 can be provided on the second end face e2 of the shunt body 1. When removing the intake air shunt 10, the tooling is fitted with the disassembly and assembly interface g, and then a force is applied to the tooling in the direction from the groove bottom c1 to the opening c2, and the entire intake air shunt 10 is pulled out and removed along the Figure 13 arrow direction shown. When installing, the intake air shunt can be directly inserted into the opening groove 201.

[0094] When installing the intake air shunt 10 into Figure 2a the substrate loading structure 300 shown, asFigure 14 As shown, the disassembly and assembly part 2 can be arranged on the first end face e1 of the diverter body 1. When removing the intake diverter 10, move the valve baffle 302 out of the substrate loading channel 301, then insert the tooling from the inlet end a1 into the substrate loading channel 301 to cooperate with the disassembly and assembly interface g, and then apply a force from the outlet end a2 to the inlet end a1 to the tooling. Pull out and remove the entire intake diverter 10 along the Figure 14 arrow direction shown. During installation, move the valve baffle 302 out of the substrate loading channel 301, and the intake diverter can be directly inserted into the opening groove 201.

[0095] In summary, through the settings of the commutation channel C1 and the diversion channel C2 in the intake diverter 10 provided by the embodiment of the present application, the flow direction of the purging gas can be changed, so that the purging gas can purge the preset position in a preset manner during the flowing process to prevent the occurrence of purging blind spots. When installing the intake diverter 10 into the opening groove 201 of the structural body, through the cooperation between the intake diverter 10 and the bottom c1 of the groove, the purging gas sent from the purging port d can be guided to the space near the bottom c1 of the groove, so as to perform global purging on the opening groove 201 of the opening groove 201, prevent the existence of purging blind spots, and improve the purging effect. Among them, the structural settings of the sub-air holes C12 and the air distribution grooves C11 can achieve the effect of "air distribution - diversion" for the purging gas, so that the purging gas can purge the guiding space B between the bottom c1 and the intake diverter 10 more evenly, further improving the purging effect. In addition, the intake diverter 10 is an independent structure, and the detachable cooperation mode between the intake diverter 10 and the structural body 20 enables the intake diverter 10 to be installed on different purging structures 100, so as to meet the purging requirements of various process scenarios.

[0096] The above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An air intake splitter (10), characterized in that: include: The diverter body (1); The flow divider body (1) has a first end face (e1), a second end face (e2) and a side face (e3) located between the first end face (e1) and the second end face (e2); the flow divider body (1) is provided with a reversing channel (C1) and a flow guiding channel (C2); the reversing channel (C1) comprises a gas-uniform groove (C11) and at least two gas-dividing holes (C12); the gas-uniform groove (C11) is provided on the side face (e3) of the flow divider body (1); the at least two gas-dividing holes (C12) are connected between the gas-uniform groove (C11) and the first end face (e1); the flow guiding channel (C2) is connected between the first end face (e1) and the second end face (e2); the reversing channel (C1) and the flow guiding channel (C2) are isolated from each other; The air inlet diverter (10) is used to be installed in a structural body (20) of a purge structure (100) provided in a cavity of a process chamber, wherein the structural body (20) has an opening groove (201) and a purge port (d) connected to the opening groove (201), the air inlet diverter (10) is provided in the opening groove (201), the side surface (e3) of the diverter body (1) is used to cooperate with the opening groove (201), the first end surface (e1) of the diverter body (1) is used to face the bottom of the opening groove (201) and have a certain distance from the bottom of the groove, and the reversing channel (C1) is used to communicate with the purge port (d).

2. The air intake splitter (10) according to claim 1, characterized in that: The at least two air dividing holes (C12) are arranged along a first direction, and the first direction (X) is perpendicular to the axial centerline direction of the air dividing holes (C12).

3. The air intake splitter (10) according to claim 2, characterized in that: The at least two gas distribution holes (C12) are distributed in a centrally symmetrical manner with respect to the gas homogenizing groove (C11).

4. The air intake splitter (10) according to any one of claims 1 to 3, characterized in that: The axis of the gas separation hole (C12) is parallel to the bottom of the gas uniforming groove (C11).

5. The air intake splitter (10) according to any one of claims 1 to 3, characterized in that: The maximum radial dimension of the air dividing hole (C12) perpendicular to the axial direction is 1.0 mm to 10.0 mm.

6. The air intake splitter (10) according to any one of claims 1 to 3, characterized in that: The number of the air dividing holes (C12) is 20-30.

7. The air intake splitter (10) according to any one of claims 1 to 3, characterized in that: It also comprises a sealing component, which is arranged around the side surface (e3) of the diverter body (1).

8. The air intake splitter (10) according to claim 7, characterized in that: The sealing assembly comprises a first sealing ring (31) and a second sealing ring (32); The first sealing ring (31) is close to the first end surface (e1), and the second sealing ring (32) is close to the second end surface (e2).

9. The air intake splitter (10) according to claim 8, characterized in that: The material of the first sealing ring (31) and / or the second sealing ring (32) is polytetrafluoroethylene, rubber or silicone.

10. The air intake splitter (10) according to any one of claims 1 to 3 or any one of claims 8 to 9, characterized in that: It also comprises a disassembly and assembly part (2), the disassembly and assembly part (2) being fixed to the diverter body (1), the disassembly and assembly part (2) being provided with a disassembly and assembly interface (g) for cooperating with a tool.

11. The air intake splitter (10) according to any one of claims 1 to 3 or any one of claims 8 to 9, characterized in that: A conducting groove (h) is provided on the side surface (e3) of the diverter body (1), and the conducting groove (h) is connected between the second end surface (e2) and the reversing channel (C1).

12. A purge structure (100), characterized in that: It comprises a structural body (20) and an air intake splitter (10) according to any one of claims 1 to 11; The structural body (20) has an open groove (201), and the structural body (20) is also provided with a purge port (d) communicating with the open groove (201); The air intake splitter (10) is installed in the open groove (201), the side surface (e3) of the splitter body (1) cooperates with the open groove (201), the reversing channel (C1) is connected with the purge port (d), and the first end surface (e1) of the splitter body (1) faces the bottom of the open groove (201).

13. A process chamber, characterized in that: The invention comprises a cavity (200), wherein the cavity (200) is provided with the purge structure (100) as claimed in claim 12, wherein the cavity (200) has an upper chamber (A1) and a lower chamber (A2), and an opening (c2) of a structural body (20) of the purge structure (100) is connected to the lower chamber (A2).

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