A gallium oxide washing device convenient for removing impurities

By designing a gallium oxide washing device with cleaning brush and drying components, the problem of incomplete cleaning and slow drying of gallium oxide is solved, and thorough cleaning and rapid drying of gallium oxide surfaces are achieved.

CN119565959BActive Publication Date: 2025-07-25SHANDONG SDIC HLDG GRP CO LTD
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
CN202411818077.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-12-11
Publication Date
2025-07-25
Estimated Expiration
2044-12-11

AI Technical Summary

Technical Problem

The existing gallium oxide cleaning device has problems such as incomplete cleaning, residual impurities and water droplets on the surface, and slow drying speed.

Method used

A gallium oxide washing device including a decompression chamber assembly, a cleaning liquid spray assembly and a drying assembly is designed. By driving the assembly, the cleaning brush and jaw rotation is driven, and combined with the cleaning liquid spray and nitrogen drying, the thorough cleaning and drying of the gallium oxide surface is achieved.

Benefits of technology

Complete cleaning and rapid drying of gallium oxide surfaces are achieved, effectively removing impurities and improving cleaning efficiency and effect.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119565959B_ABST
    Figure CN119565959B_ABST
Patent Text Reader

Abstract

The present invention relates to the technical field of auxiliary tools for preparing gallium oxide, and specifically relates to a gallium oxide washing device that is convenient for removing impurities. It includes an impurity removal chamber assembly. The cleaning brush is attached to the surface of gallium oxide. By driving the assembly to rotate forward, the toothed ring rotates, and then the roller rolls on the annular track, causing the T-shaped rod to rotate, and then driving the jaw to rotate, so that the gallium oxide clamped on the jaw rotates. When the sphere rotates to the position of the convex block, the push-pull shaft is ejected, and the first spring stretches. Then, the driven rod rotatably connected to the other end of the push-pull shaft pushes the cleaning brush to rotate on the jaw, realizing the cleaning of the surface of gallium oxide. During the cleaning process, the cleaning liquid spraying assembly sprays the cleaning liquid on the surface of gallium oxide, and at the same time, the cleaning liquid spraying assembly rotates. When the driving assembly rotates in the reverse direction, the gallium oxide rotates in the reverse direction, and at the same time, the cleaning brush rotates to brush the surface of gallium oxide, making the cleaning more complete and the cleaning effect better.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention relates to the technical field of auxiliary tools for preparing gallium oxide, and specifically to a gallium oxide washing device that is convenient for removing impurities. Background Art

[0002] Gallium oxide, also known as gallium sesquioxide, is a wide-bandgap semiconductor with Eg = 4.9 eV. Its electrical conductivity and luminescence characteristics have long attracted people's attention. Ga2O3 is a transparent oxide semiconductor material with broad application prospects in optoelectronic devices. It is used as an insulating layer for Ga-based semiconductor materials and an ultraviolet filter. It can also be used as an O2 chemical detector;

[0003] There is a prior adjustable gallium oxide preparation cleaning device with the publication number CN221017597U, including a box body, and also including an adjustment mechanism. The adjustment mechanism is arranged at the top of the box body. The adjustment mechanism includes an immersion chamber, a flushing chamber, a sleeve, a support rod, a top plate, a connecting rod, and a hanging basket. Immersion chambers and flushing chambers are respectively opened on both sides inside the box body, and a sleeve is fixedly connected to the middle position at the top of the box body. The hydroxide precipitate of gallium to be processed is placed inside the hanging basket. First, it is pre-soaked inside the immersion chamber. After soaking, the top plate is pulled to lift it, and then the top plate is rotated to move one side of the soaked hanging basket into the flushing chamber for flushing treatment, while the hanging basket on the other side can be lifted by pulling up the connecting rod, thereby facilitating the removal of materials and the placement and soaking of subsequent materials. By soaking first and then flushing, the cleaning efficiency is improved, the adjustment is convenient, and the use is flexible;

[0004] The existing equipment for cleaning gallium oxide mainly has the following disadvantages:

[0005] 1. When cleaning, the cleaning liquid is sprayed on the surface of gallium oxide and then rinsed with water. Such a cleaning method will cause impurities to remain on the surface of gallium oxide and the cleaning is incomplete;

[0006] 2. After the cleaning is completed, there are water droplets or cleaning liquid remaining on the surface of gallium oxide, and the drying speed is slow. There will be impurities remaining after drying. Summary of the Invention

[0007] The purpose of the present invention is to provide a gallium oxide washing device that is convenient for removing impurities to solve the problems raised in the above background art.

[0008] To achieve the above-mentioned invention purpose, the present invention adopts the following technical solutions:

[0009] Provided is a gallium oxide washing device facilitating impurity removal, including an impurity removal chamber assembly. A driving assembly is fixedly connected to the bottom of the impurity removal chamber assembly. A cleaning liquid spraying assembly and a drying assembly are also fixedly connected to the bottom of the impurity removal chamber assembly. A cleaning mechanism is rotatably connected inside the impurity removal chamber assembly; wherein

[0010] The cleaning mechanism includes:

[0011] A driven assembly, which is fixedly installed inside the impurity removal chamber assembly. A plurality of brushing assemblies are rotatably connected to the driven assembly, and the plurality of brushing assemblies are arranged in a ring; wherein

[0012] The driven assembly includes:

[0013] A plurality of connecting blocks, one ends of the plurality of connecting blocks are fixedly connected to an annular track, the plurality of connecting blocks are arranged in a ring, the other ends of the connecting blocks are fixedly connected to one end of a connecting rod, the connecting blocks are fixedly connected to one end of a sliding shaft, the other end of the sliding shaft is slidably connected to a toothed ring, and one ends of the plurality of brushing assemblies are fixedly connected to the toothed ring; and

[0014] Each of the plurality of brushing assemblies includes:

[0015] A right-angle block, one end of the right-angle block is fixedly connected below the toothed ring, the other end of the right-angle block is rotatably connected to a T-shaped rod, one end of the T-shaped rod is fixedly connected with a roller, the roller abuts against the lower part of the annular track, the upper and lower ends of the other end of the T-shaped rod are each adapted to a lead screw through a threaded hole, the lead screw is rotatably connected to a clamping jaw, one end of the clamping jaw is slidably connected to a push-pull shaft, one end of the push-pull shaft is fixedly connected with a sphere, the push-pull shaft is fixedly connected to one end of a first spring, the other end of the first spring is fixedly connected to the clamping jaw, convex blocks are fixedly connected to both sides of the right-angle block, the other end of the push-pull shaft is rotatably connected to one end of a driven rod, the other end of the driven rod is rotatably connected to the upper end near the edge of a cleaning brush, and the cleaning brush is rotatably connected to the other end of the clamping jaw.

[0016] Further, the impurity removal chamber assembly includes:

[0017] A cleaning liquid guiding groove, which is arranged directly below the toothed ring. The other end of the connecting rod is fixed to the outside of the cleaning liquid guiding groove. A cleaning liquid outlet is opened at the bottom of the cleaning liquid guiding groove. The cleaning liquid outlet is fixedly connected to one end of a second spring, the other end of the second spring is fixedly connected to one end of a liquid outlet shaft, a flow blocking plug is fixedly connected to the liquid outlet shaft, and a hemispherical block is fixedly connected to the other end of the liquid outlet shaft; and

[0018] The cleaning liquid guiding groove is fixedly connected to a housing, the cleaning liquid guiding groove is arranged inside the housing, and a feed inlet is provided on the housing.

[0019] Further, the driving assembly includes:

[0020] A motor, the motor is fixed at the bottom of the housing, the output end of the motor is fixedly connected with a bevel gear, the outside of the cleaning liquid guiding groove is rotatably connected with a driving shaft, the lower end of the driving shaft is fixedly connected with a bevel gear, the two bevel gears are meshed, the driving shaft is fixedly connected with a first synchronous pulley, the first synchronous pulley is located below the cleaning liquid guiding groove, the driving shaft is also fixedly connected with a driving gear, the driving gear is located above the cleaning liquid guiding groove, the driving gear is meshed with a toothed ring, and the upper end of the driving shaft is fixedly connected with a first ratchet wheel.

[0021] Further, the cleaning liquid spraying assembly includes:

[0022] An infusion pump, the infusion pump is fixedly connected to the bottom of the housing, the liquid outlet end of the infusion pump is fixedly connected with one end of a transfer pipe, the other end of the transfer pipe is rotatably connected with one end of an infusion tube, the infusion tube is also fixedly connected with a second synchronous pulley, the second synchronous pulley and the first synchronous pulley are driven by a synchronous belt, the infusion tube is rotatably connected to the cleaning liquid guiding groove, the other end of the infusion tube is fixedly connected with a spray head, the infusion tube is fixedly connected with a hinge block, the hinge block is fixedly connected with one end of a connecting rod, and the other end of the connecting rod is fixedly connected with a liquid pushing block.

[0023] Further, a liquid inlet and a liquid outlet are formed on one side of the housing, the liquid inlet end of the infusion pump is fixedly connected with one end of a hose, the hose passes through the liquid inlet, the liquid outlet and the cleaning liquid outlet are respectively fixedly connected with the two ends of the hose, and an exhaust port is formed at the upper end of the housing.

[0024] Further, a limiting block is fixedly connected inside the housing; and

[0025] The drying assembly includes:

[0026] A driven shaft, the driven shaft is rotatably connected to the limiting block, the lower end of the driven shaft is fixedly connected with a second ratchet wheel, the second ratchet wheel is adapted to the first ratchet wheel, the upper end of the driven shaft is fixedly connected with one end of a first rotating rod, the other end of the first rotating rod is rotatably connected with one end of a second rotating rod, the other end of the second rotating rod is rotatably connected with a piston, the piston is slidably connected to a storage tank, the storage tank is provided with an air inlet and an air outlet, one-way valves are fixedly connected to both the air inlet and the air outlet, and the air outlet is fixedly connected with a drying jet head through a pipeline.

[0027] Compared with the prior art, the above one or more technical solutions have the following beneficial effects:

[0028] 1. When cleaning gallium oxide, place the block gallium oxide between two clamping jaws, rotate the lead screw so that the two clamping jaws clamp the gallium oxide, and the cleaning brush is attached to the surface of the gallium oxide. The driving assembly rotates in the forward direction, so that the gear ring rotates, and then the roller rolls on the circular track, so that the T-bar rotates, and then the clamping jaws are driven to rotate, so that the gallium oxide clamped on the clamping jaws rotates. When the ball rotates to the position of the convex block, the push-pull shaft is ejected, and the spring is stretched, so that the driven rod rotatably connected to the other end of the push-pull shaft pushes the cleaning brush to rotate on the clamping jaw, thereby cleaning the surface of the gallium oxide. During the cleaning process, the cleaning liquid spraying assembly sprays the cleaning liquid on the surface of the gallium oxide, and the cleaning liquid spraying assembly rotates at the same time. When the driving assembly rotates in the reverse direction, the gallium oxide rotates in the reverse direction, and the cleaning brush rotates at the same time to scrub the surface of the gallium oxide, so that the cleaning is more complete and the cleaning effect is better.

[0029] 2. When the motor rotates in the opposite direction, the ratchet wheel 1 drives the ratchet wheel 2 to rotate through the adaptation of the ratchet wheel 1 and the ratchet wheel 2, and then drives the driven shaft and the rotating rod 1 to rotate. The two ends of the rotating rod 2 are respectively connected with the rotating rod 1 and the piston, so that the rotating rod 1 drives the piston to slide in the storage tank when it rotates. When the piston slides outward, the one-way valve fixedly connected to the air inlet opens, and the one-way valve fixedly connected to the air outlet closes. At this time, nitrogen enters the storage tank. When the piston slides inward, the one-way valve fixedly connected to the air inlet closes, and the one-way valve fixedly connected to the air outlet opens. At this time, nitrogen enters the drying nozzle through the pipeline and is sprayed out. Since the cleaning liquid has a high temperature when cleaning gallium oxide, and some components in the cleaning liquid will undergo oxidation-reduction reaction with metal impurities on the surface of gallium oxide, which is an exothermic reaction, the temperature in the shell is high, which can make the nitrogen sprayed from the drying nozzle heat up, which is helpful to dry the surface of gallium oxide after cleaning. At the same time, the cleaning brush can remove impurities on the surface of gallium oxide. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The drawings in the specification that constitute a part of the present invention are used to provide further understanding of the present invention. The schematic embodiments of the present invention and their description are used to explain the present invention and do not constitute improper limitations on the present invention. In addition, the terms "installed", "set", "provided with", "connected", "connected", and "socketed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be internally connected between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0031] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present invention;

[0032] Figure 2 Schematic diagram of the overall three-dimensional structure decomposition of the present invention;

[0033] Figure 3 Schematic diagram of the overall three-dimensional structure of the driven component of the present invention;

[0034] Figure 4 Schematic diagram of the overall three-dimensional structure of the scrubbing component of the present invention;

[0035] Figure 5 Schematic diagram of the overall three-dimensional structure decomposition of the flow blocking plug of the present invention;

[0036] Figure 6 Schematic diagram of the overall three-dimensional structure of the driving component of the present invention;

[0037] Figure 7 Schematic diagram of the overall three-dimensional structure of ratchet one of the present invention;

[0038] Figure 8 Schematic diagram of the overall three-dimensional structure of the cleaning liquid spraying component of the present invention;

[0039] Figure 9 Schematic diagram of the overall three-dimensional structure decomposition of the cleaning liquid spraying component of the present invention;

[0040] Figure 10 Schematic diagram of the overall three-dimensional structure decomposition of the drying component of the present invention;

[0041] In the attached drawings, the list of components represented by each reference numeral is as follows:

[0042] 1. Impurity removal chamber component; 11. Cleaning liquid guiding groove; 111. Cleaning liquid outlet; 12. Spring two; 13. Liquid outlet shaft; 14. Flow blocking plug; 15. Hemispherical block; 16. Housing; 161. Feed inlet; 162. Liquid inlet; 163. Liquid outlet; 164. Exhaust port; 165. Limiting block;

[0043] 2. Driving component; 21. Motor; 22. Bevel gear; 23. Driving shaft; 24. Synchronous pulley one; 25. Driving gear; 26. Ratchet one;

[0044] 3. Cleaning liquid spraying component; 31. Liquid infusion pump; 32. Adapter pipe; 33. Liquid infusion pipe; 34. Synchronous pulley two; 35. Synchronous belt; 36. Nozzle; 37. Hinge block; 38. Link; 39. Liquid pushing block;

[0045] 4. Drying component; 41. Driven shaft; 42. Ratchet two; 43. Rotating rod one; 44. Rotating rod two; 45. Piston; 46. Storage tank; 461. Air inlet; 462. Air outlet; 47. Check valve; 48. Pipeline; 49. Drying jet head;

[0046] 5. Cleaning mechanism; 51. Driven component; 511. Connecting block; 512. Annular track; 513. Connecting rod; 514. Sliding shaft; 515. Tooth ring; 52. Brushing component; 521. Right-angle block; 5211. Bump; 522. T-shaped rod; 523. Roller; 524. Screw rod; 525. Claw; 526. Push-pull shaft; 527. Sphere; 528. First spring; 529. Driven rod; 5291. Cleaning brush. Detailed implementation manners

[0047] In order to enable those skilled in the art to better understand the solution of this application, the following will clearly and completely describe the technical solutions in the embodiments of this application with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the scope of protection of this application.

[0048] Refer to Figure 1-4 As shown, a gallium oxide washing device for facilitating the removal of impurities includes an impurity removal chamber assembly 1. The bottom of the impurity removal chamber assembly 1 is fixedly connected to a driving component 2. The bottom of the impurity removal chamber assembly 1 is also fixedly connected to a cleaning liquid spraying component 3 and a drying component 4. A cleaning mechanism 5 is rotatably connected inside the impurity removal chamber assembly 1; among them

[0049] The cleaning mechanism 5 includes:

[0050] A driven component 51, the driven component 51 is fixedly installed inside the impurity removal chamber assembly 1, and several brushing components 52 are rotatably connected to the driven component 51. The several brushing components 52 are arranged in a ring; among them

[0051] The driven component 51 includes:

[0052] Several connecting blocks 511. One end of the several connecting blocks 511 is fixedly connected to the annular track 512. The several connecting blocks 511 are arranged in a ring. The other end of the connecting block 511 is fixedly connected to one end of the connecting rod 513. The connecting block 511 is fixedly connected to one end of the sliding shaft 514. The other end of the sliding shaft 514 is slidably connected to the tooth ring 515. One end of each of the several brushing components 52 is fixedly connected to the tooth ring 515; and

[0053] Each of the several brushing components 52 includes:

[0054] A right-angle block 521, one end of which is fixedly connected to the bottom of the gear ring 515, and the other end of which is rotatably connected to a T-shaped rod 522, one end of which is fixedly connected to a roller 523, and the roller 523 abuts against the bottom of the annular track 512, and the upper and lower ends of the other end of the T-shaped rod 522 are adapted to a screw rod 524 through threaded holes, and the screw rod 524 is rotatably connected to a clamping jaw 525, and one end of the clamping jaw 525 is slidably connected to a push-pull shaft 526. One end of the push-pull shaft 526 is fixedly connected to a sphere 527, the push-pull shaft 526 is fixedly connected to one end of a spring 528, the other end of the spring 528 is fixedly connected to the clamp 525, the two sides of the right-angle block 521 are fixedly connected to protrusions 5211, the other end of the push-pull shaft 526 is rotatably connected to one end of a driven rod 529, the other end of the driven rod 529 is rotatably connected to the upper end of a cleaning brush 5291 near the edge, and the cleaning brush 5291 is rotatably connected to the other end of the clamp 525.

[0055] When cleaning gallium oxide, the block of gallium oxide is placed between the two clamps 525, and the two clamps 525 clamp the gallium oxide by rotating the screw rod 524. The cleaning brush 5291 is attached to the surface of the gallium oxide, and the drive assembly 2 rotates in the positive direction, so that the gear ring 515 rotates, and then the roller 523 rolls on the annular track 512, so that the T-bar 522 rotates, and then the clamps 525 rotate, so that the gallium oxide clamped on the clamps 525 rotates. When the ball 527 rotates to the position of the protrusion 5211, , the push-pull shaft 526 is pushed out, and the spring 1 528 is stretched, so that the driven rod 529 rotatably connected to the other end of the push-pull shaft 526 pushes the cleaning brush 5291 to rotate on the clamp 525, thereby cleaning the surface of the gallium oxide. During the cleaning process, the cleaning liquid spraying component 3 sprays the cleaning liquid on the surface of the gallium oxide, and the cleaning liquid spraying component 3 rotates at the same time. When the driving component 2 rotates in the opposite direction, the gallium oxide rotates in the opposite direction, and the cleaning brush 5291 rotates at the same time. At this time, the drying component 4 works to dry the surface of the gallium oxide.

[0056] Reference Figure 5 and 9 As shown, the impurity removal chamber component 1 includes:

[0057] A cleaning liquid guide groove 11, wherein the cleaning liquid guide groove 11 is arranged directly below the gear ring 515, the other end of the connecting rod 513 is fixed to the outside of the cleaning liquid guide groove 11, a cleaning liquid outlet 111 is provided at the bottom of the cleaning liquid guide groove 11, the cleaning liquid outlet 111 is fixedly connected to one end of a spring 2 12, the other end of the spring 2 12 is fixedly connected to one end of a liquid outlet shaft 13, a flow blocking plug 14 is fixedly connected to the liquid outlet shaft 13, and a hemispherical block 15 is fixedly connected to the other end of the liquid outlet shaft 13; and

[0058] The cleaning liquid guiding groove 11 is fixedly connected to the housing 16. The cleaning liquid guiding groove 11 is arranged inside the housing 16, and a feed port 161 is provided on the housing 16.

[0059] A manually operable door is provided on the feed port 161. When performing the cleaning operation, the door of the feed port 161 is closed. During the cleaning process, the cleaning liquid spraying assembly 3 rotates. During this process, the cleaning liquid spraying assembly 3 pushes the waste liquid after cleaning to flow in the cleaning liquid guiding groove 11. When the cleaning liquid spraying assembly 3 rotates to the position of the hemispherical block 15, it pushes the hemispherical block 15 downward. At this time, the second spring 12 is stretched, and at the same time, the flow blocking plug 14 leaves the cleaning liquid outlet 111, and at this time, the waste liquid flows out from the cleaning liquid outlet 111.

[0060] Refer to Figure 6-7 As shown, the driving assembly 2 includes:

[0061] A motor 21, the motor 21 is fixed at the bottom of the housing 16. The output end of the motor 21 is fixedly connected with a bevel gear 22. The outer side of the cleaning liquid guiding groove 11 is rotatably connected with a driving shaft 23. The lower end of the driving shaft 23 is fixedly connected with a bevel gear 22. The two bevel gears 22 are meshed. A first synchronous wheel 24 is fixedly connected to the driving shaft 23. The first synchronous wheel 24 is located below the cleaning liquid guiding groove 11. A driving gear 25 is also fixedly connected to the driving shaft 23. The driving gear 25 is located above the cleaning liquid guiding groove 11. The driving gear 25 is meshed with the toothed ring 515. The upper end of the driving shaft 23 is fixedly connected with a first ratchet 26.

[0062] Start the motor 21, drive the bevel gear 22 fixedly connected thereto to rotate. Through the meshing action of the two bevel gears 22, drive the driving shaft 23, the driving gear 25, the first synchronous wheel 24 and the first ratchet 26 to rotate. Through the meshing action of the first synchronous wheel 24 and the toothed ring 515, drive the toothed ring 515 to rotate.

[0063] Refer to Figure 8 As shown, the cleaning liquid spraying assembly 3 includes:

[0064] The infusion pump 31 is fixedly connected to the bottom of the housing 16. The liquid outlet end of the infusion pump 31 is fixedly connected to one end of the adapter tube 32. The other end of the adapter tube 32 is rotatably connected to one end of the infusion tube 33. A second synchronous pulley 34 is also fixedly connected to the infusion tube 33. The second synchronous pulley 34 is driven by a synchronous belt 35 in cooperation with the first synchronous pulley 24. The infusion tube 33 is rotatably connected to the cleaning liquid guiding groove 11. The other end of the infusion tube 33 is fixedly connected to a nozzle 36. An articulated block 37 is fixedly connected to the infusion tube 33. The articulated block 37 is fixedly connected to one end of a connecting rod 38. The other end of the connecting rod 38 is fixedly connected to a liquid pushing block 39.

[0065] Since the first synchronous pulley 24 is driven by the synchronous belt 35 in cooperation with the second synchronous pulley 34, when the first synchronous pulley 24 rotates, it drives the second synchronous pulley 34 to rotate, thereby causing the infusion tube 33 to rotate. The rotation of the infusion tube 33 drives the articulated block 37, the connecting rod 38, and the liquid pushing block 39 to rotate. The liquid pushing block 39 pushes the waste liquid to flow in the cleaning liquid guiding groove 11, and the rotation of the infusion tube 33 drives the nozzle 36 to rotate.

[0066] One side of the housing 16 is provided with a liquid inlet 162 and a liquid outlet 163. The liquid inlet end of the infusion pump 31 is fixedly connected to one end of a flexible tube. The flexible tube passes through the liquid inlet 162. The liquid outlet 163 and the cleaning liquid outlet 111 are respectively fixedly connected to both ends of the flexible tube. An exhaust port 164 is provided at the upper end of the housing 16.

[0067] Under the action of the infusion pump 31, the cleaning liquid enters the nozzle 36 from the flexible tube passing through the liquid inlet 162 and then sprays out. The liquid after cleaning enters the flexible tube from the cleaning liquid outlet 111 and then flows out from the liquid outlet 163. The gas generated during cleaning can be discharged through the exhaust port 164 and collected.

[0068] Refer to Figure 10 As shown, a limiting block 165 is fixedly connected inside the housing 16; and

[0069] The drying assembly 4 includes:

[0070] Driven shaft 41, the driven shaft 41 is rotatably connected to the limit block 165, a second ratchet 42 is fixedly connected to the lower end of the driven shaft 41, the second ratchet 42 is adapted to the first ratchet 26, the upper end of the driven shaft 41 is fixedly connected to one end of the first rotating rod 43, the other end of the first rotating rod 43 is rotatably connected to one end of the second rotating rod 44, the other end of the second rotating rod 44 is rotatably connected to a piston 45, the piston 45 is slidably connected to the storage tank 46, an air inlet 461 and an air outlet 462 are formed in the storage tank 46, and one-way valves 47 are fixedly connected to both the air inlet 461 and the air outlet 462. The air outlet 462 is fixedly connected to a drying jet head 49 through a pipeline 48.

[0071] When the motor 21 rotates in the reverse direction, due to the adaptation between the first ratchet 26 and the second ratchet 42, the first ratchet 26 drives the second ratchet 42 to rotate, thereby driving the driven shaft 41 and the first rotating rod 43 to rotate. Due to the rotational connection between the two ends of the second rotating rod 44 and the first rotating rod 43 and the piston 45 respectively, when the first rotating rod 43 rotates, it drives the piston 45 to slide in the storage tank 46. When the piston 45 slides outwards, the one-way valve 47 fixedly connected to the air inlet 461 opens, and at the same time, the one-way valve 47 fixedly connected to the air outlet 462 closes. At this time, nitrogen enters the storage tank 46. When the piston 45 slides inwards, the one-way valve 47 fixedly connected to the air inlet 461 closes, and at the same time, the one-way valve 47 fixedly connected to the air outlet 462 opens. At this time, nitrogen enters the drying jet head 49 through the pipeline 48 and is ejected. Since the cleaning liquid is at a relatively high temperature when cleaning gallium oxide, and some components in the cleaning liquid will undergo an oxidation-reduction reaction with the metal impurities on the surface of gallium oxide, and this reaction is an exothermic reaction, the temperature inside the housing 16 is relatively high, which can heat up the nitrogen ejected from the drying nozzle 36.

[0072] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In the description of the present invention, unless otherwise specified and limited, it should be noted that the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a mechanical connection or an electrical connection, or it can be the communication inside two elements. It can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific situations.

[0073] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A gallium oxide washing device convenient for removing impurities, characterized in that: It includes an impurity removal chamber assembly (1), a driving assembly (2) is fixedly connected to the bottom of the impurity removal chamber assembly (1), a cleaning liquid spraying assembly (3) and a drying assembly (4) are also fixedly connected to the bottom of the impurity removal chamber assembly (1), and a cleaning mechanism (5) is rotatably connected inside the impurity removal chamber assembly (1); among them The cleaning mechanism (5) includes: A driven assembly (51), the driven assembly (51) is fixedly installed inside the impurity removal chamber assembly (1), and a plurality of brushing assemblies (52) are rotatably connected to the driven assembly (51), and the plurality of brushing assemblies (52) are arranged in a ring; among them The driven assembly (51) includes: A plurality of connecting blocks (511), one ends of the plurality of connecting blocks (511) are fixedly connected to the annular track (512), the plurality of connecting blocks (511) are arranged in a ring, the other ends of the connecting blocks (511) are fixedly connected to one end of the connecting rod (513), the connecting blocks (511) are fixedly connected to one end of the sliding shaft (514), the other end of the sliding shaft (514) is slidably connected to the gear ring (515), and one ends of the plurality of brushing assemblies (52) are fixedly connected to the gear ring (515); and Each of the plurality of brushing assemblies (52) includes: A right-angle block (521), one end of the right-angle block (521) is fixedly connected below the gear ring (515), the other end of the right-angle block (521) is rotatably connected to the T-shaped rod (522), one end of the T-shaped rod (522) is fixedly connected with a roller (523), the roller (523) abuts against the lower part of the annular track (512), the upper and lower ends of the other end of the T-shaped rod (522) are adapted to the lead screw (524) through threaded holes, the lead screw (524) is rotatably connected with the claw (525), one end of the claw (525) is slidably connected with a push-pull shaft (526), one end of the push-pull shaft (526) is fixedly connected with a sphere (527), the push-pull shaft (526) is fixedly connected with one end of the first spring (528), the other end of the first spring (528) is fixedly connected with the claw (525), convex blocks (5211) are fixedly connected to both sides of the right-angle block (521), the other end of the push-pull shaft (526) is rotatably connected to one end of the driven rod (529), the other end of the driven rod (529) is rotatably connected to the upper end near the edge of the cleaning brush (5291), and the cleaning brush (5291) is rotatably connected to the other end of the claw (525).

2. The gallium oxide washing device for facilitating impurity removal according to claim 1, wherein: The impurity removal chamber assembly (1) includes: The cleaning liquid guiding groove (11), the cleaning liquid guiding groove (11) is arranged directly below the toothed ring (515), the other end of the connecting rod (513) is fixed on the outside of the cleaning liquid guiding groove (11), a cleaning liquid outlet (111) is opened at the bottom of the cleaning liquid guiding groove (11), one end of a second spring (12) is fixedly connected to the cleaning liquid outlet (111), the other end of the second spring (12) is fixedly connected to one end of the liquid outlet shaft (13), a flow blocking plug (14) is fixedly connected to the liquid outlet shaft (13), and a hemispherical block (15) is fixedly connected to the other end of the liquid outlet shaft (13); and The cleaning liquid guiding groove (11) is fixedly connected to the housing (16), the cleaning liquid guiding groove (11) is arranged inside the housing (16), and a feed port (161) is provided on the housing (16).

3. The gallium oxide washing device for facilitating impurity removal according to claim 2, wherein: The driving assembly (2) includes: A motor (21), the motor (21) is fixed at the bottom of the housing (16), the output end of the motor (21) is fixedly connected with a bevel gear (22), the outside of the cleaning liquid guiding groove (11) is rotatably connected with a driving shaft (23), the lower end of the driving shaft (23) is fixedly connected with a bevel gear (22), the two bevel gears (22) are meshed, a first synchronous pulley (24) is fixedly connected to the driving shaft (23), the first synchronous pulley (24) is located below the cleaning liquid guiding groove (11), a driving gear (25) is also fixedly connected to the driving shaft (23), the driving gear (25) is located above the cleaning liquid guiding groove (11), the driving gear (25) is meshed with the toothed ring (515), and a first ratchet wheel (26) is fixedly connected to the upper end of the driving shaft (23).

4. The gallium oxide washing device for facilitating impurity removal according to claim 3, wherein: The cleaning liquid spraying assembly (3) includes: An infusion pump (31), the infusion pump (31) is fixedly connected to the bottom of the housing (16), the liquid outlet end of the infusion pump (31) is fixedly connected to one end of a transfer pipe (32), the other end of the transfer pipe (32) is rotatably connected to one end of an infusion pipe (33), a second synchronous pulley (34) is also fixedly connected to the infusion pipe (33), the second synchronous pulley (34) is driven by a synchronous belt (35) with the first synchronous pulley (24), the infusion pipe (33) is rotatably connected to the cleaning liquid guiding groove (11), the other end of the infusion pipe (33) is fixedly connected to a spray head (36), a hinge block (37) is fixedly connected to the infusion pipe (33), the hinge block (37) is fixedly connected to one end of a connecting rod (38), and the other end of the connecting rod (38) is fixedly connected to a liquid pushing block (39).

5. The gallium oxide washing device for facilitating impurity removal according to claim 4, wherein: One side of the housing (16) is provided with a liquid inlet (162) and a liquid outlet (163). The liquid inlet end of the infusion pump (31) is fixedly connected to one end of a hose. The hose passes through the liquid inlet (162). The liquid outlet (163) and the cleaning liquid outlet (111) are respectively fixedly connected to both ends of the hose. An exhaust port (164) is provided at the upper end of the housing (16).

6. The gallium oxide washing device for facilitating impurity removal according to claim 5, wherein: A limiting block (165) is fixedly connected inside the housing (16); and The drying assembly (4) includes: A driven shaft (41) rotatably connected to the limiting block (165). A second ratchet (42) is fixedly connected to the lower end of the driven shaft (41). The second ratchet (42) is adapted to the first ratchet (26). The upper end of the driven shaft (41) is fixedly connected to one end of a first rotating rod (43). The other end of the first rotating rod (43) is rotatably connected to one end of a second rotating rod (44). The other end of the second rotating rod (44) is rotatably connected to a piston (45). The piston (45) is slidably connected to a storage tank (46). An air inlet (461) and an air outlet (462) are provided on the storage tank (46). One-way valves (47) are fixedly connected to both the air inlet (461) and the air outlet (462). The air outlet (462) is fixedly connected to a drying jet head (49) through a pipe (48).

Citation Information

Patent Citations

  • An adjustable gallium oxide preparation and cleaning device

    CN221017597U

  • Wafer cleaning device and cleaning method thereof

    CN117457537A

  • Gallium arsenide wafer box cleaning device

    CN213915368U