Colored capped photosensitive polymer and preparation method and use thereof, black photoresist, black matrix

Abstract

The present application discloses a colored end-capped photosensitive polymer and a preparation method, use, black photoresist, and black matrix thereof, and relates to the field of photoresist technology, wherein the raw materials for preparing the colored end-capped photosensitive polymer include dianhydride monomers, alcohols, colored end-capped monomers, first diamine monomers, and second diamine monomers. End-capping the photosensitive polymer molecular chain by a colored group containing an azo structure can not only significantly improve the OD value of the black photoresist, but also enable the black photoresist to have better mechanical properties and lithographic properties.

Description

Technical Field

[0001] The present application relates to the field of photoresist technology, and in particular to a colored capped photosensitive polymer and a preparation method and use thereof, a black photoresist, and a black matrix. Background Art

[0002] In the display industry, black photoresist made of black photosensitive polyimide material can be used as a pixel definition layer (PDL) that divides pixel units in an orderly manner. A black matrix is ​​formed through a photolithography process to prevent light leakage. Black photoresist materials used for display need to have a high OD value (optical density) to effectively prevent light from penetrating. At the same time, they should have strong mechanical properties to ensure that the black matrix pattern will not fall off or break under stress, and they also need to have good photolithography performance.

[0003] At present, black photoresist is mainly prepared by doping process, such as doping carbon black, titanium black and other substances. In order to obtain a higher OD value, a larger doping amount is often required. Therefore, agglomeration is prone to occur, resulting in a significant decrease in the stability, mechanical properties, and lithographic performance of black photoresist. Although intrinsic colored polyimide can solve the agglomeration problem of carbon black, titanium black, etc., in order to obtain a high OD value, it is necessary to increase the proportion of colored monomers in the molecular chain, and an excessively high proportion of colored monomers will lead to a significant decrease in the mechanical properties, lithographic properties and other film properties after curing. Therefore, in order to take into account the film performance, it is necessary to control the proportion of colored monomers, which will lead to a limited increase in the OD value. Summary of the invention

[0004] Existing black photoresists are difficult to achieve both a high OD value and good film performance. The present application prepares a photosensitive polymer by end-capping with a colored group containing an azo structure, aiming to significantly improve the OD value while also achieving good mechanical properties and lithography performance.

[0005] To achieve the above objectives, this application provides the following technical solutions:

[0006] The first aspect of the present application provides a colored end-capped photosensitive polymer, the structural formula of the colored end-capped photosensitive polymer is as follows:

[0007] ;

[0008] Among them, the colored end-capping group R containing an azo structure is .

[0009] Ar is selected from the following groups:

[0010] .

[0011] X1 and X2 are independently selected from the following groups:

[0012] .

[0013] Among the groups listed above, Both represent the connection sites.

[0014] R1 to R4 are independently selected from hydrogen and an alkyl group having 1 to 4 carbon atoms. The alkyl group may be a linear alkyl group or a branched alkyl group. As an example, the alkyl group having 1 to 4 carbon atoms may be a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a sec-butyl group, or a tert-butyl group.

[0015] R1, R2, R3 and R4 can all be hydrogen, or all be alkyl, or some can be hydrogen and the rest can be alkyl. The higher the proportion of hydrogen, that is, the higher the carboxyl content in the colored end-capped photosensitive polymer, the better the alkali solubility of the colored end-capped photosensitive polymer. Appropriate alkali solubility can achieve the best exposure and development effect of the black photoresist.

[0016] In the structural formula, n is selected from 4, 5, 6, 7, 8, 9, 10, 11, and 12, and m is selected from 3, 4, 5, 6, 7, 8, 9, and 10.

[0017] In some preferred embodiments, Ar is selected from the following groups:

[0018] , , ;

[0019] The X1 and X2 are independently selected from the following groups:

[0020] , .

[0021] The second aspect of the present application provides a method for preparing a colored end-capped photosensitive polymer. The raw materials of the preparation method include a dianhydride monomer, an alcohol, a colored end-capping monomer, a first diamine monomer, and a second diamine monomer.

[0022] The dianhydride monomer includes at least one of pyromellitic dianhydride, 4,4'-biphenyl ether dianhydride, hexafluoro dianhydride, 3,3,4,4-biphenyltetracarboxylic dianhydride, 3,3,4,4-diphenyl sulfone tetracarboxylic dianhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride and diphenyl sulfide dianhydride.

[0023] The alcohol includes at least one of methanol, ethanol, propanol and butanol. The propanol may be n-propanol or isopropanol. The butanol may be n-butanol, isobutanol, sec-butanol and tert-butanol.

[0024] The colored end-capping monomer includes Disperse Black 9 containing an azo structure.

[0025] The first diamine monomer includes at least one of 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane, 3,3'-diamino-4,4'-dihydroxydiphenyl sulfone, 2,2-bis(4-hydroxy-3-aminophenyl)propane, 3,3'-dihydroxybenzidine, 2-amino-4-[(3-amino-4-hydroxyphenyl)methyl]phenol, bis(3-amino-4-hydroxyphenyl)ketone, 4,4'-oxybis(2-aminophenol), 2,2-bis[3-(3-aminobenzamide)-4-hydroxyphenyl]hexafluoropropane, and 2,2-bis[3-(4-aminobenzamide)-4-hydroxyphenyl]hexafluoropropane. The second diamine monomer is 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone.

[0026] In some preferred embodiments, the preparation method includes the following steps S1, S2, S3 and S4.

[0027] Step S1, esterification reaction is carried out between the dianhydride monomer and the alcohol to obtain a first intermediate.

[0028] In some preferred embodiments, the molar ratio of the dianhydride monomer to the alcohol is (0.5-1): 1. By adjusting the molar ratio of the dianhydride monomer to the alcohol, the carboxyl content on the molecular chain of the colored end-capped photosensitive polymer can be adjusted, thereby adjusting the alkali solubility of the colored end-capped photosensitive polymer.

[0029] In some preferred embodiments, when the esterification reaction is carried out, pyridine or triethylamine is used as a catalyst, the reaction temperature is 40° C. to 100° C., and the reaction time is 3 hours to 8 hours. The amount of the catalyst added can be 1% to 5% of the mass of the dianhydride monomer.

[0030] Step S2, subjecting the first intermediate to an acyl chloride reagent to an acyl chloride reaction to obtain a second intermediate. The molar ratio of the first intermediate to the acyl chloride reagent can be determined according to actual conditions. The acyl chloride reagent can be, for example, thionyl chloride.

[0031] In some preferred embodiments, the temperature of the acyl chlorination reaction is 0°C to 40°C, and the reaction time is 3 hours to 8 hours.

[0032] Step S3, allowing the second intermediate to undergo a capping reaction with the colored capping monomer to obtain a third intermediate.

[0033] In some preferred embodiments, the molar amount of the colored end-capping monomer is 8% to 12% of the total molar amount of the first diamine monomer and the second diamine monomer.

[0034] In some preferred embodiments, the temperature of the end-capping reaction is 0°C to 40°C, and the reaction time is 3 hours to 5 hours.

[0035] Step S4, polymerizing the third intermediate, the first diamine monomer, and the second diamine monomer to obtain the colored capped photosensitive polymer.

[0036] In some preferred embodiments, the molar ratio of the first diamine monomer to the second diamine monomer is (0.5-1.5): 1. More preferably, the molar ratio of the diamine monomer is (1-1.5): 1. Further preferably, the molar ratio of the diamine monomer is (1-1.3): 1.

[0037] In some preferred embodiments, the ratio of the molar number of the dianhydride monomer to the total molar number of the first diamine monomer, the second diamine monomer and the colored end-capping monomer is 1:(0.5-1.5). More preferably, the molar ratio is 1:(0.7-1.2).

[0038] In some preferred embodiments, the polymerization reaction temperature is 0°C to 40°C, and the reaction time is 3 hours to 5 hours.

[0039] In some embodiments, step S3 and step S4 may be combined into a one-step reaction, that is, the second intermediate, the colored end-capping monomer, the first diamine monomer, and the second diamine monomer are reacted in one pot. However, this method is not easy to control the polymer structure.

[0040] It should also be noted that the present application adopts a method of first end-capping and then polymerization. Compared with the previous method of first polymerization and then end-capping, this method ensures the access amount of colored end-capping monomers on the molecular chain, thereby obtaining a higher OD value and comprehensive performance.

[0041] The third aspect of the present application provides the use of the above-mentioned colored end-capped photosensitive polymer or the colored end-capped photosensitive polymer prepared by the above-mentioned preparation method in the preparation of black photoresist. The colored end-capped photosensitive polymer is very suitable for use in the preparation of black photoresist to improve the OD value of the black photoresist and maintain the mechanical properties and lithographic properties of the black photoresist at a high level.

[0042] The fourth aspect of the present application provides a black photoresist, which includes, in parts by weight: 10 to 35 parts of the above-mentioned colored end-capped photosensitive polymer or the colored end-capped photosensitive polymer prepared by the above-mentioned preparation method; 5 to 20 parts of photosensitizer; 1 to 10 parts of cross-linking agent; 1 to 10 parts of leveling agent; and 50 to 90 parts of solvent.

[0043] In some preferred embodiments, the photosensitizer includes a diazonaphthoquinone compound. As an example, the photosensitizer includes 2,3,4-trihydroxybenzophenone 1,2-diazidenaphthoquinone-5-sulfonate.

[0044] In some preferred embodiments, the crosslinking agent includes at least one of 2,6-dimethoxymethyl-4-tert-butylphenol, 4-methyl-2,6-dimethoxyphenol, 2,6-dimethoxyhydroquinone, and 2,6-dimethoxy-4-phenylphenol.

[0045] In some preferred embodiments, the leveling agent includes at least one of polydimethylsiloxane, polyether-modified organic siloxane, polyester-modified organic siloxane and alkyl-modified organic siloxane.

[0046] In some preferred embodiments, the solvent includes at least one of N-methylpyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, γ-butyrolactone, dimethyl sulfoxide, ethyl lactate, diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, and propylene glycol methyl ether acetate.

[0047] A fifth aspect of the present application provides a black matrix, which is prepared by using the above-mentioned black photoresist through an exposure and development process.

[0048] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0049] The present application uses a colored end-capping group R containing an azo structure to end-cap the photosensitive polymer molecular chain, which can not only significantly improve the OD value of the black photoresist, but also enable the black photoresist to have better mechanical properties and lithographic properties. At the same time, the colored end-capped photosensitive polymer of the present application has a simple preparation process, easy control of molecular weight, mild reaction conditions, and is very suitable for industrial applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] The following drawings describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only used for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale. Among them:

[0051] Figure 1 This is an infrared spectrum of the colored end-capped photosensitive polymer prepared in Example 3 of the present application;

[0052] Figure 2 This is an infrared spectrum of the colored end-capped photosensitive polymer prepared in Example 5 of the present application;

[0053] Figure 3 This is the infrared spectrum of the colored end-capped photosensitive polymer prepared in Example 8 of the present application. DETAILED DESCRIPTION

[0054] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the contents of the present application. It is obvious to those skilled in the art that various local modifications to the disclosed embodiments are made, and the general principles defined herein can be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims. Unless otherwise specified, the reagents and raw materials used can be purchased commercially. The experimental methods for which specific conditions are not indicated in the following examples are selected according to conventional methods and conditions, or according to the product specifications.

[0055] Example 1

[0056] This embodiment provides a method for preparing a colored end-capped photosensitive polymer, wherein the ratio of the molar number of the dianhydride monomer to the total molar number of the diamine monomer and the end-capping monomer (hereinafter referred to as the "anhydride amine ratio") is 1:0.8, and the percentage of the molar number of the end-capping monomer to the total molar number of the diamine (hereinafter referred to as the "end-capping monomer content") is 10%, and specifically comprises the following steps:

[0057] (1) Under nitrogen protection, into a dry 500 mL three-necked flask were added 4,4'-biphenyl ether dianhydride 10.8574 g (0.035 mol), 3,3,4,4-diphenyl sulfone tetracarboxylic dianhydride 12.5398 g (0.035 mol), n-butanol 8.820 g (0.12 mol), triethylamine 0.4958 g (0.0049 mol), and N-methylpyrrolidone 81 mL, respectively. The mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0058] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0059] (3) 1.6820 g (0.0056 mol) of Disperse Black 9 was added to System B at a reaction temperature of 25°C for 2 hours to obtain System C.

[0060] (4) Under nitrogen protection, into a dry 500 mL three-necked flask were added 7.1885 g (0.0239 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 17.6877 g (0.0293 mol) of 2,2-bis[3-(3-aminobenzamido)-4-hydroxyphenyl]hexafluoropropane, 19.30 g (0.2440 mol) of pyridine, and 162 mL of N-methylpyrrolidone. The mixture was heated to 50 °C and stirred for 2 h to obtain System D.

[0061] (5) The temperature of system D was lowered to 10°C, and system C was added dropwise to system D. The mixture was reacted for 3 hours to obtain system E. System E was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a colored capped photosensitive polymer.

[0062] The present embodiment also provides a method for preparing a black photoresist, comprising: in parts by weight, uniformly mixing 25 parts of the colored end-capped photosensitive polymer prepared in the present embodiment, 5 parts of 2,3,4-trihydroxybenzophenone 1,2-diazide naphthoquinone-5-sulfonate, 2 parts of 2,6-dimethoxymethyl-4-tert-butylphenol, 1 part of polyether-modified organic silicone Silicon 4408, and 67 parts of N-methylpyrrolidone to obtain a black photoresist.

[0063] Example 2

[0064] This embodiment provides a method for preparing a colored end-capped photosensitive polymer, wherein the anhydride-amine ratio is 1:1 and the end-capping monomer content is 10%, and the method specifically comprises the following steps:

[0065] (1) Under nitrogen protection, into a dry 500 mL three-necked flask were added 4,4'-biphenyl ether dianhydride 10.8574 g (0.035 mol), 3,3,4,4-diphenyl sulfone tetracarboxylic dianhydride 12.5398 g (0.035 mol), n-butanol 8.820 g (0.12 mol), triethylamine 0.4958 g (0.0049 mol), and N-methylpyrrolidone 81 mL, respectively. The mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0066] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0067] (3) 2.1025 g (0.007 mol) of Disperse Black 9 was added to System B at a reaction temperature of 25°C for 2 hours to obtain System C.

[0068] (4) Under nitrogen protection, into a dry 500 mL three-necked flask were added 8.9856 g (0.0299 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 22.1096 g (0.0366 mol) of 2,2-bis[3-(3-aminobenzamido)-4-hydroxyphenyl]hexafluoropropane, 19.30 g (0.2440 mol) of pyridine, and 179 mL of N-methylpyrrolidone. The mixture was heated to 50 °C and stirred for 2 h to obtain System D.

[0069] (5) The temperature of system D was lowered to 10°C, and system C was added dropwise to system D. The mixture was reacted for 3 hours to obtain system E. System E was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a colored capped photosensitive polymer.

[0070] The preparation method of black photoresist can refer to Example 1.

[0071] Example 3

[0072] This embodiment provides a method for preparing a colored end-capped photosensitive polymer, wherein the anhydride-amine ratio is 1:1.2 and the end-capping monomer content is 10%, and specifically comprises the following steps:

[0073] (1) Under nitrogen protection, into a dry 500 mL three-necked flask were added 4,4'-biphenyl ether dianhydride 10.8574 g (0.035 mol), 3,3,4,4-diphenyl sulfone tetracarboxylic dianhydride 12.5398 g (0.035 mol), n-butanol 8.820 g (0.12 mol), triethylamine 0.4958 g (0.0049 mol), and N-methylpyrrolidone 81 mL, respectively. The mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0074] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0075] (3) 2.5230 g (0.0084 mol) of Disperse Black 9 was added to System B at a reaction temperature of 25°C for 2 hours to obtain System C.

[0076] (4) Under nitrogen protection, into a dry 500 mL three-necked flask were added 10.7827 g (0.0359 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 26.5315 g (0.0439 mol) of 2,2-bis[3-(3-aminobenzamido)-4-hydroxyphenyl]hexafluoropropane, 19.30 g (0.2440 mol) of pyridine, and 219 mL of N-methylpyrrolidone. The mixture was heated to 50 °C and stirred for 2 h to obtain System D.

[0077] (5) The temperature of system D was lowered to 10°C, and system C was added dropwise to system D. The mixture was reacted for 3 hours to obtain system E. System E was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a colored capped photosensitive polymer.

[0078] The preparation method of black photoresist can refer to Example 1.

[0079] Example 4

[0080] This embodiment provides a method for preparing a colored end-capped photosensitive polymer, wherein the anhydride-amine ratio is 1:1 and the end-capping monomer content is 10%, and the method specifically comprises the following steps:

[0081] (1) Under nitrogen protection, into a dry 500 mL three-necked flask were added 4,4'-biphenyl ether dianhydride 10.8574 g (0.035 mol), 3,3,4,4-diphenyl sulfone tetracarboxylic dianhydride 12.5398 g (0.035 mol), n-butanol 8.820 g (0.12 mol), triethylamine 0.4958 g (0.0049 mol), and N-methylpyrrolidone 81 mL, respectively. The mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0082] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0083] (3) 2.1025 g (0.007 mol) of Disperse Black 9 was added to System B at a reaction temperature of 25°C for 2 hours to obtain System C.

[0084] (4) Under nitrogen protection, into a dry 500 mL three-necked flask were added 8.9856 g (0.0299 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 22.1096 g (0.0366 mol) of 2,2-bis[3-(4-aminobenzamide)-4-hydroxyphenyl]hexafluoropropane, 19.30 g (0.2440 mol) of pyridine, and 230 mL of N-methylpyrrolidone. The mixture was heated to 50 °C and stirred for 2 h to obtain System D.

[0085] (5) The temperature of system D was lowered to 10°C, and system C was added dropwise to system D. The mixture was reacted for 3 hours to obtain system E. System E was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a colored capped photosensitive polymer.

[0086] The preparation method of black photoresist can refer to Example 1.

[0087] Example 5

[0088] This embodiment provides a method for preparing a colored end-capped photosensitive polymer, wherein the anhydride-amine ratio is 1:1.1 and the end-capping monomer content is 8%, and specifically comprises the following steps:

[0089] (1) Under nitrogen protection, 4,4'-biphenyl ether dianhydride 6.2042 g (0.02 mol), 3,3,4,4-diphenyl sulfone tetracarboxylic dianhydride 7.1656 g (0.02 mol), n-butanol 5.040 g (0.07 mol), triethylamine 0.2833 g (0.0028 mol), and N-methylpyrrolidone 60 mL were added in sequence into a dry 250 mL three-necked flask, heated to 90°C, and reacted for 6 hours to obtain System A.

[0090] (2) The temperature of system A was cooled to 0°C, and 9.76 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0091] (3) 1.0573 g (0.0035 mol) of Disperse Black 9 was added to System B at a reaction temperature of 25°C for 2 hours to obtain System C.

[0092] (4) Under nitrogen protection, into a dry 500-mL three-necked flask were added 5.7075 g (0.0190 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 14.0437 g (0.0232 mol) of 2,2-bis[3-(4-aminobenzamide)-4-hydroxyphenyl]hexafluoropropane, 11.03 g (0.1394 mol) of pyridine, and 172 mL of N-methylpyrrolidone. The mixture was heated to 50°C and stirred for 2 h to obtain System D.

[0093] (5) The temperature of system D was lowered to 10°C, and system C was added dropwise to system D. The mixture was reacted for 3 hours to obtain system E. System E was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a colored capped photosensitive polymer.

[0094] The preparation method of black photoresist can refer to Example 1.

[0095] Example 6

[0096] This embodiment provides a method for preparing a colored end-capped photosensitive polymer, wherein the anhydride-amine ratio is 1:1.2 and the end-capping monomer content is 9%, and specifically comprises the following steps:

[0097] (1) Under nitrogen protection, 4,4'-biphenyl ether dianhydride 6.2042 g (0.02 mol), 3,3,4,4-diphenyl sulfone tetracarboxylic dianhydride 7.1656 g (0.02 mol), n-butanol 5.040 g (0.07 mol), triethylamine 0.2833 g (0.0028 mol), and N-methylpyrrolidone 60 mL were added in sequence into a dry 250 mL three-necked flask, heated to 90°C, and reacted for 6 hours to obtain System A.

[0098] (2) The temperature of system A was cooled to 0°C, and 9.76 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0099] (3) 1.2976 g (0.0043 mol) of Disperse Black 9 was added to System B at a reaction temperature of 25°C for 2 hours to obtain System C.

[0100] (4) Under nitrogen protection, into a dry 500 mL three-necked flask were added 6.1940 g (0.0206 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 15.2704 g (0.0252 mol) of 2,2-bis[3-(4-aminobenzamide)-4-hydroxyphenyl]hexafluoropropane, 11.03 g (0.1394 mol) of pyridine, and 184 mL of N-methylpyrrolidone. The mixture was heated to 50 °C and stirred for 2 h to obtain System D.

[0101] (5) The temperature of system D was lowered to 10°C, and system C was added dropwise to system D. The mixture was reacted for 3 hours to obtain system E. System E was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a colored capped photosensitive polymer.

[0102] The preparation method of black photoresist can refer to Example 1.

[0103] Example 7

[0104] This embodiment provides a method for preparing a colored end-capped photosensitive polymer, wherein the anhydride-amine ratio is 1:1 and the end-capping monomer content is 10%, and the method specifically comprises the following steps:

[0105] (1) Under nitrogen protection, 21.7147 g (0.07 mol) of 4,4'-biphenyl ether dianhydride, 8.820 g (0.12 mol) of n-butanol, 0.4958 g (0.0049 mol) of triethylamine and 75 mL of N-methylpyrrolidone were added to a dry 500 mL three-necked flask in sequence, and the mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0106] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0107] (3) 2.1025 g (0.007 mol) of Disperse Black 9 was added to System B at a reaction temperature of 25°C for 2 hours to obtain System C.

[0108] (4) Under nitrogen protection, into a dry 500-mL three-necked flask were added 8.9856 g (0.0299 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 9.4481 g (0.0366 mol) of 2,2-bis(4-hydroxy-3-aminophenyl)propane, 19.30 g (0.2440 mol) of pyridine, and 136 mL of N-methylpyrrolidone. The mixture was heated to 50°C and stirred for 2 h to obtain System D.

[0109] (5) The temperature of system D was lowered to 10°C, and system C was added dropwise to system D. The mixture was reacted for 3 hours to obtain system E. System E was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a colored capped photosensitive polymer.

[0110] The preparation method of black photoresist can refer to Example 1.

[0111] Example 8

[0112] This embodiment provides a method for preparing a colored end-capped photosensitive polymer, wherein the anhydride-amine ratio is 1:0.8 and the end-capping monomer content is 10%, and specifically comprises the following steps:

[0113] (1) Under nitrogen protection, 21.7147 g (0.07 mol) of 4,4'-biphenyl ether dianhydride, 8.820 g (0.12 mol) of n-butanol, 0.4958 g (0.0049 mol) of triethylamine and 75 mL of N-methylpyrrolidone were added to a dry 500 mL three-necked flask in sequence, and the mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0114] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0115] (3) 1.6820 g (0.0056 mol) of Disperse Black 9 was added to System B at a reaction temperature of 25°C for 2 hours to obtain System C.

[0116] (4) Under nitrogen protection, into a dry 500-mL three-necked flask were added 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone 7.1885 g (0.0239 mol), 2,2-bis(4-hydroxy-3-aminophenyl)propane 7.5584 g (0.0293 mol), pyridine 19.30 g (0.2440 mol), and N-methylpyrrolidone 118 mL. The mixture was heated to 50 °C and stirred for 2 h to obtain System D.

[0117] (5) The temperature of system D was lowered to 10°C, and system C was added dropwise to system D. The mixture was reacted for 3 hours to obtain system E. System E was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a colored capped photosensitive polymer.

[0118] The preparation method of black photoresist can refer to Example 1.

[0119] Example 9

[0120] This embodiment provides a method for preparing a colored end-capped photosensitive polymer, wherein the anhydride-amine ratio is 1:1 and the end-capping monomer content is 9%, and specifically comprises the following steps:

[0121] (1) Under nitrogen protection, 21.7147 g (0.07 mol) of 4,4'-biphenyl ether dianhydride, 8.820 g (0.12 mol) of n-butanol, 0.4958 g (0.0049 mol) of triethylamine and 75 mL of N-methylpyrrolidone were added to a dry 500 mL three-necked flask in sequence, and the mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0122] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0123] (3) 1.8923 g (0.0063 mol) of Disperse Black 9 was added to System B at a reaction temperature of 25°C for 2 hours to obtain System C.

[0124] (4) Under nitrogen protection, into a dry 500-mL three-necked flask were added 9.0329 g (0.0301 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 9.4978 g (0.0368 mol) of 2,2-bis(4-hydroxy-3-aminophenyl)propane, 19.30 g (0.2440 mol) of pyridine, and 135 mL of N-methylpyrrolidone. The mixture was heated to 50°C and stirred for 2 h to obtain System D.

[0125] (5) The temperature of system D was lowered to 10°C, and system C was added dropwise to system D. The mixture was reacted for 3 hours to obtain system E. System E was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a colored capped photosensitive polymer.

[0126] The preparation method of black photoresist can refer to Example 1.

[0127] Example 10

[0128] This embodiment provides a method for preparing a colored end-capped photosensitive polymer, wherein the anhydride-amine ratio is 1:0.8 and the end-capping monomer content is 11%, and specifically comprises the following steps:

[0129] (1) Under nitrogen protection, 21.7147 g (0.07 mol) of 4,4'-biphenyl ether dianhydride, 8.820 g (0.12 mol) of n-butanol, 0.4958 g (0.0049 mol) of triethylamine and 75 mL of N-methylpyrrolidone were added to a dry 500 mL three-necked flask in sequence, and the mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0130] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0131] (3) 1.8502 g (0.0062 mol) of Disperse Black 9 was added to System B at a reaction temperature of 25°C for 2 hours to obtain System C.

[0132] (4) Under nitrogen protection, into a dry 500-mL three-necked flask were added 7.1506 g (0.0238 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 7.5187 g (0.0291 mol) of 2,2-bis(4-hydroxy-3-aminophenyl)propane, 19.30 g (0.2440 mol) of pyridine, and 119 mL of N-methylpyrrolidone. The mixture was heated to 50°C and stirred for 2 h to obtain System D.

[0133] (5) The temperature of system D was lowered to 10°C, and system C was added dropwise to system D. The mixture was reacted for 3 hours to obtain system E. System E was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a colored capped photosensitive polymer.

[0134] The preparation method of black photoresist can refer to Example 1.

[0135] Comparative Example 1

[0136] This comparative example provides a method for preparing a photosensitive polymer, which is different from Example 7 in that the end-capping monomer content is 0%, and specifically comprises the following steps:

[0137] (1) Under nitrogen protection, into a dry 500 mL three-necked flask were added 21.7147 g (0.07 mol) of 4,4'-biphenyl ether dianhydride, 8.820 g (0.12 mol) of n-butanol, 0.4958 g (0.0049 mol) of triethylamine, and 67 mL of N-methylpyrrolidone. The mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0138] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0139] (3) Under nitrogen protection, into a dry 500 mL three-necked flask were added 9.4585 g (0.0315 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 9.9453 g (0.0385 mol) of 2,2-bis(4-hydroxy-3-aminophenyl)propane, 19.30 g (0.244 mol) of pyridine, and 115 mL of N-methylpyrrolidone. The mixture was heated to 50 °C and stirred for 2 h to obtain System C.

[0140] (4) The temperature of system C was lowered to 10°C, and system B was added dropwise to system C. The mixture was reacted for 3 hours to obtain system D. System D was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a photosensitive polymer.

[0141] The preparation method of black photoresist can refer to Example 1.

[0142] Comparative Example 2

[0143] This comparative example provides a method for preparing a photosensitive polymer, which is different from Example 8 in that the end-capping monomer content is 0%, and specifically comprises the following steps:

[0144] (1) Under nitrogen protection, 21.7147 g (0.07 mol) of 4,4'-biphenyl ether dianhydride, 8.820 g (0.12 mol) of n-butanol, 0.4958 g (0.0049 mol) of triethylamine and 75 mL of N-methylpyrrolidone were added to a dry 500 mL three-necked flask in sequence, and the mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0145] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0146] (3) Under nitrogen protection, into a dry 500 mL three-necked flask were added 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone 7.5668 g (0.0347 mol), 2,2-bis(4-hydroxy-3-aminophenyl)propane 7.9563 g (0.0308 mol), pyridine 19.30 g (0.2440 mol), and N-methylpyrrolidone 100 mL. The mixture was heated to 50 °C and stirred for 2 h to obtain System C.

[0147] (4) The temperature of system C was lowered to 10°C, and system B was added dropwise to system C. The mixture was reacted for 3 hours to obtain system D. System D was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a photosensitive polymer.

[0148] The preparation method of black photoresist can refer to Example 1.

[0149] Comparative Example 3

[0150] This embodiment provides a method for preparing a photosensitive polymer, which is different from Embodiment 2 in that the end-capping monomer content is 0%, and specifically comprises the following steps:

[0151] (1) Under nitrogen protection, into a dry 500 mL three-necked flask were added 4,4'-biphenyl ether dianhydride 10.8574 g (0.035 mol), 3,3,4,4-diphenyl sulfone tetracarboxylic dianhydride 12.5398 g (0.035 mol), n-butanol 8.820 g (0.12 mol), triethylamine 0.4958 g (0.0049 mol), and N-methylpyrrolidone 81 mL, respectively. The mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0152] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0153] (3) Under nitrogen protection, into a dry 500 mL three-necked flask were added 9.4585 g (0.0315 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 23.2733 g (0.0385 mol) of 2,2-bis[3-(3-aminobenzamido)-4-hydroxyphenyl]hexafluoropropane, 19.30 g (0.2440 mol) of pyridine, and 189 mL of N-methylpyrrolidone. The mixture was heated to 50 °C and stirred for 2 h to obtain System C.

[0154] (4) The temperature of system C was lowered to 10°C, and system B was added dropwise to system C. The mixture was reacted for 3 hours to obtain system D. System D was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a photosensitive polymer.

[0155] The preparation method of black photoresist can refer to Example 1.

[0156] Comparative Example 4

[0157] This embodiment provides a method for preparing a photosensitive polymer, which is different from Embodiment 3 in that the end-capping monomer content is 0%, and specifically comprises the following steps:

[0158] (1) Under nitrogen protection, into a dry 500 mL three-necked flask were added 4,4'-biphenyl ether dianhydride 10.8574 g (0.035 mol), 3,3,4,4-diphenyl sulfone tetracarboxylic dianhydride 12.5398 g (0.035 mol), n-butanol 8.820 g (0.12 mol), triethylamine 0.4958 g (0.0049 mol), and N-methylpyrrolidone 81 mL, respectively. The mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0159] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0160] (3) Under nitrogen protection, into a dry 500 mL three-necked flask were added 11.3502 g (0.0378 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 27.9279 g (0.0462 mol) of 2,2-bis[3-(3-aminobenzamido)-4-hydroxyphenyl]hexafluoropropane, 19.30 g (0.2440 mol) of pyridine, and 216 mL of N-methylpyrrolidone. The mixture was heated to 50 °C and stirred for 2 h to obtain System C.

[0161] (4) The temperature of system C was lowered to 10°C, and system B was added dropwise to system C. The mixture was reacted for 3 hours to obtain system D. System D was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a photosensitive polymer.

[0162] The preparation method of black photoresist can refer to Example 1.

[0163] Comparative Example 5

[0164] This embodiment provides a method for preparing a photosensitive polymer, which is different from Embodiment 4 in that the end-capping monomer content is 0%, and specifically comprises the following steps:

[0165] (1) Under nitrogen protection, into a dry 500 mL three-necked flask were added 4,4'-biphenyl ether dianhydride 10.8574 g (0.035 mol), 3,3,4,4-diphenyl sulfone tetracarboxylic dianhydride 12.5398 g (0.035 mol), n-butanol 8.820 g (0.12 mol), triethylamine 0.4958 g (0.0049 mol), and N-methylpyrrolidone 81 mL, respectively. The mixture was heated to 90°C and reacted for 6 hours to obtain System A.

[0166] (2) The temperature of system A was cooled to 0°C, and 17.07 g of dichlorothionyl was added dropwise to system A. After the addition was completed, the temperature was raised to 25°C and the reaction was carried out for 6 hours to obtain system B.

[0167] (3) Under nitrogen protection, into a dry 500 mL three-necked flask were added 9.4585 g (0.0315 mol) of 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone, 23.2733 g (0.0385 mol) of 2,2-bis[3-(4-aminobenzamide)-4-hydroxyphenyl]hexafluoropropane, 19.30 g (0.2440 mol) of pyridine, and 227 mL of N-methylpyrrolidone. The mixture was heated to 50 °C and stirred for 2 hours to obtain System C.

[0168] (4) The temperature of system C was lowered to 10°C, and system B was added dropwise to system C. The mixture was reacted for 3 hours to obtain system D. System D was added dropwise to deionized water to precipitate a precipitate. The precipitate was repeatedly washed with deionized water and freeze-dried to obtain a photosensitive polymer.

[0169] The preparation method of black photoresist can refer to Example 1.

[0170] Infrared test

[0171] The photosensitive polymers prepared in Example 3, Example 5 and Example 8 were tested using the Thermo Fisher Nicolet Is20 in projection mode, with the spectrum sampling range of 4000~500cm -1 , resolution 4cm -1 , the number of scans was 16 times, and the heating rate was 2°C / min.

[0172] Figures 1 to 3 The infrared spectra of the colored end-capped photosensitive polymers prepared in Example 3, Example 5, and Example 8 are shown respectively. -1 ~3300cm -1 The absorption peak of amide bond appeared at 1750cm -1 ~1650cm -1 A relatively strong absorption peak of carbonyl is formed at 1630 cm -1 ~1575cm -1The absorption peak of -N=N- appeared at 1100cm -1 The absorption peak of the CO single bond of phenol appears at . It can be seen that the colored end-capped photosensitive polymer is successfully prepared in the embodiment of the present application.

[0173] GPC Testing

[0174] GPC test was performed using a high performance liquid chromatograph (Shimadzu LC-20ADXR). 20 mmol / L H3PO4 was added to N-methylpyrrolidone as the mobile phase, the test temperature was 40°C, the test flow rate was 0.7 mL / min, detector A: RID-20A, channel 1. Table 1 shows the test results of weight average molecular weight (Mw), number average molecular weight (Mn), polydispersity coefficient (Mw / Mn), Z average molecular weight (Mz), and Z+1 average molecular weight (Mz+1).

[0175] Table 1 Molecular weight test results

[0176]

[0177] OD value test

[0178] The black photoresist prepared in the embodiment and the comparative example was coated on a quartz plate at a rotation speed of 1000 rpm, 1500 rpm, 2000 rpm, 2500 rpm, and 3000 rpm, and then cured at 250° C. for 2 hours to obtain five black cured films of different thicknesses. The absorbance of the black cured films of different thicknesses at 550 nm was measured using an ultraviolet-visible spectrophotometer (Shimadzu UV-1900i), and the OD value of 1.0 μm was calculated by fitting, and the results are shown in Table 2.

[0179] Mechanical properties test

[0180] The black photoresist prepared in the embodiment and the comparative example was cured at 250°C for 2 hours to produce a black cured film sample with a thickness of 10 μm, a width of 5.3 cm, and a length of 4 cm. The black cured film sample was tested using an Instron 68SC-1 tensile testing machine. The black cured film sample was stretched from 0 N at a speed of 10 mm / min at 25°C. The test results are shown in Table 2.

[0181] Lithography performance

[0182] The black photoresist prepared in the embodiment and the comparative example was spin-coated on a silicon wafer substrate and placed on a 120°C hot plate for 120 seconds to volatilize most of the solvent to obtain a dry film. The dry film was exposed using a stepper lithography machine (SSB320) at an exposure dose of 250 mJ / cm 2 Then, the image was developed with 2.38% tetramethylammonium hydroxide (TMAH) for 40 seconds. The photolithography results are shown in Table 2.

[0183] Table 2 OD value test and related performance test results

[0184]

[0185] As shown in Table 2, compared with the photosensitive polymer without end-capping, the colored end-capped photosensitive polymer prepared by using a specific end-capping monomer containing an azo structure can significantly improve the OD value of the black photoresist. In addition, after the photosensitive polymer is end-capped by using a specific end-capping monomer containing an azo structure, the tensile strength of the black photoresist can reach more than 96.2MPa, the elongation at break can reach more than 7.1%, and the modulus can reach more than 2.1GPa. Compared with the photosensitive polymer without end-capping, the mechanical properties will decrease, but can still be maintained at a high level. At the same time, the black photoresist prepared by using the colored end-capped photosensitive polymer of the present application can obtain a pattern with a resolution of 3μm~5μm after photolithographic development. Therefore, the use of a specific end-capping monomer containing an azo structure to end-cap the photosensitive polymer can make the black photoresist have excellent photolithographic performance.

[0186] In summary, when the present application adopts a specific method of capping colored groups containing azo structures to prepare colored capped photosensitive polymers, it can not only significantly improve the OD value of black photoresist, but also have good mechanical properties and lithographic properties.

[0187] The above description of the embodiments is to facilitate those of ordinary skill in the art to understand and apply the present application. It is obvious that those familiar with the art can easily make various modifications to these embodiments and apply the general principles described herein to other embodiments without having to pay creative labor. Therefore, the present application is not limited to the embodiments herein, and improvements and modifications made by those skilled in the art based on the contents disclosed in the present application without departing from the scope and spirit of the present application are within the scope of the present application.

Claims

1. A colored end-capped photosensitive polymer, characterized in that: The structural formula of the colored end-capped photosensitive polymer is as follows: ； Wherein, the colored end-capping group R is ; Ar is selected from the following groups: ； X1 and X2 are independently selected from the following groups: ； In the group represents the junction site; R1 to R4 are independently selected from hydrogen and an alkyl group having 1 to 4 carbon atoms; n is an integer of 4 to 12, and m is an integer of 3 to 10.

2. The colored end-capped photosensitive polymer according to claim 1, characterized in that: in: The Ar is selected from the following groups: 、 、 ； The X1 and X2 are independently selected from the following groups: 、 。 3. A method for preparing a colored end-capped photosensitive polymer, characterized in that: The raw materials of the preparation method include dianhydride monomer, alcohol, colored end-capping monomer, first diamine monomer and second diamine monomer; wherein: The dianhydride monomer includes at least one of pyromellitic dianhydride, 4,4'-biphenyl ether dianhydride, hexafluoro dianhydride, 3,3,4,4-biphenyltetracarboxylic dianhydride, 3,3,4,4-diphenyl sulfone tetracarboxylic dianhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride, and diphenyl sulfide dianhydride; The alcohol includes at least one of methanol, ethanol, propanol and butanol; The colored end-capping monomer includes disperse black 9; The first diamine monomer includes at least one of 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane, 3,3'-diamino-4,4'-dihydroxydiphenyl sulfone, 2,2-bis(4-hydroxy-3-aminophenyl)propane, 3,3'-dihydroxybenzidine, 2-amino-4-[(3-amino-4-hydroxyphenyl)methyl]phenol, bis(3-amino-4-hydroxyphenyl)methanone, 4,4'-oxybis(2-aminophenol), 2,2-bis[3-(3-aminobenzamido)-4-hydroxyphenyl]hexafluoropropane, and 2,2-bis[3-(4-aminobenzamido)-4-hydroxyphenyl]hexafluoropropane; The second diamine monomer is 1,8-dihydroxy-2,4,5,7-tetraamino-9,10-anthraquinone; The preparation method comprises the following steps: Allowing the dianhydride monomer and the alcohol to undergo an esterification reaction to obtain a first intermediate; Allowing the first intermediate to undergo an acyl chlorination reaction with an acyl chlorination agent to obtain a second intermediate; Allowing the second intermediate to undergo a capping reaction with the colored capping monomer to obtain a third intermediate; The third intermediate, the first diamine monomer and the second diamine monomer are polymerized to obtain the colored capped photosensitive polymer.

4. The preparation method according to claim 3, characterized in that: The preparation method satisfies at least one of the following conditions: (1) The molar ratio of the dianhydride monomer to the alcohol is (0.5-1):1; (2) The molar number of the colored end-capping monomer is 8% to 12% of the total molar number of the first diamine monomer and the second diamine monomer; (3) The molar ratio of the first diamine monomer to the second diamine monomer is (0.5-1.5):1; (4) The ratio of the molar number of the dianhydride monomer to the total molar number of the first diamine monomer, the second diamine monomer and the colored end-capping monomer is 1:(0.5-1.5).

5. The preparation method according to claim 3, characterized in that: The preparation method satisfies at least one of the following conditions: 1) When carrying out the esterification reaction, pyridine or triethylamine is used as a catalyst, and the reaction temperature is 40° C. to 100° C., and the reaction time is 3 hours to 8 hours; 2) The temperature of the acyl chlorination reaction is 0°C to 40°C, and the reaction time is 3 hours to 8 hours; 3) The temperature of the end-capping reaction is 0°C to 40°C, and the reaction time is 3 hours to 5 hours; 4) The polymerization reaction temperature is 0°C to 40°C, and the reaction time is 3 hours to 5 hours.

6. Use of the colored end-capped photosensitive polymer according to claim 1 or 2 or the colored end-capped photosensitive polymer prepared by the preparation method according to any one of claims 3 to 5 in preparing black photoresist.

7. A black photoresist, characterized in that: The invention comprises, in parts by weight: 10 to 35 parts of the colored end-capped photosensitive polymer according to claim 1 or 2 or the colored end-capped photosensitive polymer prepared by the preparation method according to any one of claims 3 to 5; 5 to 20 parts of a photosensitizer; 1 to 10 parts of a cross-linking agent; 1 to 10 parts of a leveling agent; and 50 to 90 parts of a solvent.

8. The black photoresist according to claim 7, characterized in that: The photosensitizer includes a diazonaphthoquinone compound; and / or, the cross-linking agent comprises at least one of 2,6-dimethoxymethyl-4-tert-butylphenol, 4-methyl-2,6-dimethoxyphenol, 2,6-dimethoxyhydroquinone, and 2,6-dimethoxy-4-phenylphenol; And / or, the leveling agent includes at least one of polydimethylsiloxane, polyether-modified organic siloxane, polyester-modified organic siloxane and alkyl-modified organic siloxane; And / or, the solvent includes at least one of N-methylpyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, γ-butyrolactone, dimethyl sulfoxide, ethyl lactate, diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, and propylene glycol methyl ether acetate.

9. A black matrix, characterized in that: The black photoresist according to claim 7 or 8 is prepared by an exposure and development process.

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