Active and passive composite vibration reduction system

Abstract

The invention discloses an active and passive composite vibration reduction system, and particularly relates to the technical field of vibration reduction equipment, the active and passive composite vibration reduction system comprises a bottom shell, a load platform, a passive vibration reduction device and an active vibration reduction device, and the passive vibration reduction device and the active vibration reduction device are both arranged between the bottom shell and the load platform; the passive damping device comprises a positive stiffness mechanism and a negative stiffness mechanism which are arranged in parallel; the active damping device comprises a controller, a sensor, a piezoelectric actuator and a flat plate type voice coil motor, the sensor is fixed on the load platform, the sensor, the piezoelectric actuator and the flat plate type voice coil motor are all in signal connection with the controller, and the controller processes signals transmitted by the sensor and transmits commands to the piezoelectric actuator and the flat plate type voice coil motor. The method has higher control precision, stronger anti-interference capability and more excellent adaptability and flexibility, the inherent frequency and the formant peak value of the damping device are effectively reduced, the high attenuation of high-frequency vibration is ensured, and broadband vibration attenuation is realized.

Description

Technical Field

[0001] The invention relates to the technical field of vibration reduction equipment, and in particular to an active and passive composite vibration reduction system. Background Art

[0002] At present, ship power equipment is developing towards high power and high speed, which has further highlighted the problem of hull equipment vibration. At the same time, it has also brought new challenges to the ship's stealth performance, impact resistance and protection of shipborne sensitive equipment.

[0003] The vibration reduction system in the field of ship vibration reduction adopts a combination of active and passive methods to achieve better vibration reduction effects, so as to improve its anti-disturbance ability and service life. The current mainstream vibration reduction schemes usually adopt voice coil motors combined with spiral springs, piezoelectric ceramics combined with bending springs, and Lorentz motors combined with positive and negative stiffness parallel mechanisms. However, each of these combinations has some inherent disadvantages, which limits its application effect in specific occasions. For example, the combination design of voice coil motors and spiral springs may have dynamic response delays under the demand for rapid response, thereby affecting the vibration reduction effect; although the combination of piezoelectric ceramics and bending springs can provide high-frequency rapid response characteristics, its stroke is short, and piezoelectric ceramics are prone to cracking when impacted or overloaded, so it is difficult to apply in environments with large loads or large impacts; in the combination of Lorentz motors and positive and negative stiffness parallel mechanisms, Lorentz motors involve a variety of mechanical and electromagnetic components, with complex structures and difficult debugging. Under specific working conditions, Lorentz motors may face problems such as electromagnetic interference and overheating, and due to their nonlinear characteristics, their vibration reduction effects are difficult to predict, which increases the difficulty of control and adjustment in practical applications. Summary of the invention

[0004] The purpose of the present invention is to provide an active-passive composite vibration reduction system to solve the problems existing in the above-mentioned prior art, with higher control accuracy, stronger anti-interference ability, better adaptability and flexibility, effectively reduce the natural frequency and resonance peak-to-peak value of the vibration reduction device, and ensure high attenuation of high-frequency vibration, thereby achieving wide-band vibration attenuation.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] The present invention provides an active-passive composite vibration reduction system, comprising a bottom shell, a load platform, a passive vibration reduction device and an active vibration reduction device, wherein the passive vibration reduction device and the active vibration reduction device are both arranged between the bottom shell and the load platform;

[0007] The passive vibration reduction device comprises a positive stiffness mechanism and a negative stiffness mechanism arranged in parallel;

[0008] The active vibration reduction device includes a controller, a sensor, a piezoelectric actuator and a flat voice coil motor. The sensor is fixed on the load platform. The sensor, the piezoelectric actuator and the flat voice coil motor are all connected to the controller signal. The controller processes the signal transmitted by the sensor and sends commands to the piezoelectric actuator and the flat voice coil motor.

[0009] Preferably, the positive stiffness mechanism includes a plurality of transverse groove springs, which are evenly distributed between the bottom shell and the load platform, one end of the transverse groove spring is connected to the load platform, and the other end is fixedly connected to the bottom surface of the bottom shell.

[0010] Preferably, the negative stiffness mechanism includes four negative stiffness units, and one of the negative stiffness units is respectively connected to the four corners of the bottom shell, and the negative stiffness unit includes a fixed plate, a slide rail, a slider, a spring and a connecting rod. The fixed plate is fixedly connected to the side wall of the bottom shell, the slide rail is vertically fixedly connected to the fixed plate, the slider is slidably connected to the slide rail, one end of the spring is fixedly connected to the slider, and the other end is fixedly connected to the fixed plate, one end of the connecting rod is hinged to one end of the slider away from the spring, and the other end is hinged to the connecting column of the load platform, and the two negative stiffness units arranged on the opposite side walls of the bottom shell are symmetrical about the connecting column.

[0011] Preferably, the negative stiffness unit further comprises a limiting pad, an end of the sliding block close to the fixed plate is fixedly connected to the limiting pad, an end of the fixed plate close to the sliding block is fixedly connected to the limiting pad, and the spring sleeve is arranged outside the limiting pad.

[0012] Preferably, the number of the piezoelectric actuators is the same as the number of the transverse groove springs, and the piezoelectric actuator includes a piezoelectric actuator body and a base, the piezoelectric actuator body is fixedly connected to the base, the base is fixedly installed at one end of the transverse groove spring away from the bottom shell, and the piezoelectric actuator body is fixedly connected to the bottom surface of the load platform.

[0013] Preferably, the flat-panel voice coil motor includes a stator, a mover and an output shaft, the stator is fixedly connected to the bottom surface of the bottom shell, the mover is slidably connected to the stator, and when the stator is energized, the mover can move in a vertical direction, one end of the output shaft is fixedly connected to the mover, and the other end is fixedly connected to the bottom surface of the load platform.

[0014] Preferably, there are multiple planar voice coil motors, and the multiple planar voice coil motors are fixedly connected side by side.

[0015] Preferably, a buffer device is further included, and the buffer device is arranged between the bottom shell and the load platform.

[0016] Preferably, the buffer device includes a plurality of hydraulic buffers, the plurality of hydraulic buffers are evenly distributed between the bottom shell and the load platform, and the hydraulic buffers are fixedly connected to the bottom surface of the bottom shell.

[0017] Preferably, an observation window is provided on the side wall of the bottom shell.

[0018] Compared with the prior art, the present invention has achieved the following technical effects:

[0019] The present invention provides an active-passive composite vibration reduction system. The passive vibration reduction device arranged between the bottom shell and the load platform comprises a positive stiffness mechanism and a negative stiffness mechanism arranged in parallel. The positive stiffness mechanism has the functions of high stiffness and large bearing capacity, and the negative stiffness mechanism can reduce the dynamic stiffness of the vibration reduction device. The positive stiffness mechanism and the negative stiffness mechanism are connected in parallel so that the system has the characteristics of high static stiffness and low dynamic stiffness, and the vibration reduction device can ensure a low natural frequency while having a large bearing capacity, achieve the effect of high static stiffness and low dynamic stiffness, reduce the natural frequency of the system and broaden the vibration reduction bandwidth; the active vibration reduction device adopts a flat voice coil motor and a piezoelectric actuator in parallel as dual actuators to provide dual active control forces, realizes dynamic adjustment through a controller, reduces the resonance peak-to-peak value of the vibration reduction device, ensures high attenuation of high-frequency vibration, and realizes wide-band vibration attenuation. Compared with the traditional single active actuator, the active vibration reduction device has higher control accuracy, stronger anti-interference ability, better adaptability and flexibility, as well as improved dynamic response characteristics and comprehensive vibration reduction effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is a structural schematic diagram of the active and passive composite vibration reduction system;

[0022] Figure 2 The schematic diagram of the structure of the active-passive composite vibration reduction system (without the load platform);

[0023] Figure 3 is a schematic diagram of the connection between the negative stiffness mechanism 4 and the load platform;

[0024] Figure 4 It is a schematic diagram of the connection between the piezoelectric actuator, the transverse groove spring and the load platform;

[0025] Figure 5It is a schematic diagram of the structure of the piezoelectric actuator and the transverse groove spring;

[0026] Figure 6 It is a structural schematic diagram of a flat-plate voice coil motor;

[0027] Figure 7 is a schematic diagram of the structure of the buffer device;

[0028] Figure 8 is a schematic diagram of the structure of the bottom shell;

[0029] Fig. 9 It is a schematic diagram of the principle of the traditional passive vibration reduction system;

[0030] Fig.10 It is a schematic diagram of the principle of the active and passive composite vibration reduction system of the present invention;

[0031] Fig.11 It is a comparison diagram of the transmissibility curves of the traditional passive vibration reduction, the passive vibration reduction of the present invention, and the active-passive composite vibration reduction system of the present invention.

[0032] In the figure: 1. load platform; 101. limit boss; 102. connecting column; 2. bottom shell; 201. observation window; 202. limit column; 203. connecting boss; 3. positive stiffness mechanism; 301. transverse groove spring; 4. negative stiffness mechanism; 401. spring; 402. slide rail; 403. slider; 404. connecting rod; 405. limit pad; 5. hydraulic buffer; 501. rubber head; 502. piston rod; 503. adjusting nut; 6. flat voice coil motor; 601. mover; 602. stator; 603. output shaft; 7. piezoelectric actuator; 701. piezoelectric actuator body; 702. base. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] The purpose of the present invention is to provide an active-passive composite vibration reduction system to solve the problems existing in the above-mentioned prior art, with higher control accuracy, stronger anti-interference ability, better adaptability and flexibility, effectively reduce the natural frequency and resonance peak-to-peak value of the vibration reduction device, and ensure high attenuation of high-frequency vibration, thereby achieving wide-band vibration attenuation.

[0035] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0036] The present invention provides an active and passive composite vibration reduction system, such as Figure 1-2 As shown, it includes a bottom shell 2, a load platform 1, a passive vibration reduction device and an active vibration reduction device, and the passive vibration reduction device and the active vibration reduction device are both arranged between the bottom shell 2 and the load platform 1; the passive vibration reduction device includes a positive stiffness mechanism 3 and a negative stiffness mechanism 4 arranged in parallel; the active vibration reduction device includes a controller, a sensor, a piezoelectric actuator 7 and a flat voice coil motor 6, the sensor is fixed on the load platform 1, the sensor, the piezoelectric actuator 7 and the flat voice coil motor 6 are all connected to the controller signal, the controller processes the signal transmitted by the sensor, and sends commands to the piezoelectric actuator 7 and the flat voice coil motor 6. The passive vibration reduction device arranged between the bottom shell 2 and the load platform 1 includes a positive stiffness mechanism 3 and a negative stiffness mechanism 4 arranged in parallel; the positive stiffness mechanism 3 has the function of high stiffness and large bearing capacity, and the negative stiffness mechanism 4 can reduce the dynamic stiffness of the vibration reduction device. The positive stiffness mechanism 3 and the negative stiffness mechanism 4 are connected in parallel so that the system has the characteristics of high static stiffness and low dynamic stiffness, which can achieve the effect of high static stiffness and low dynamic stiffness while ensuring a low natural frequency of the system while having a large bearing capacity, thereby reducing the natural frequency of the system and broadening the vibration reduction bandwidth; the active vibration reduction device adopts a flat-plate voice coil motor 6 and a piezoelectric actuator 7 in parallel as dual actuators to provide dual active control forces, and realizes dynamic adjustment through a controller. The piezoelectric actuator 7 and the flat-plate voice coil motor As a dual actuator, the machine 6 can analyze the data transmitted by the sensor by using a controller with various algorithms such as PID control, fuzzy control or adaptive control, and calculate the active control force to be applied, so as to achieve dynamic adjustment of vibration, reduce the peak value of system resonance, ensure high attenuation of high-frequency vibration, and achieve wide-band vibration attenuation. Compared with the traditional single active actuator, the dual actuator of the piezoelectric actuator 7 and the flat voice coil motor 6 can work at different phases, and specifically suppress the vibration of a specific frequency by adjusting the phase difference between the two actuators, so as to have higher control accuracy, stronger anti-interference ability, better adaptability and flexibility, as well as improved dynamic response characteristics and comprehensive vibration reduction effect. And by distributing the load to the two actuators, the pressure that a single actuator needs to bear is reduced. In the case of failure of one actuator, the other actuator can still continue to work, ensuring that the basic functions of the system are not affected, and improving the stability and reliability of the system and the fault tolerance; and for some nonlinear systems, the dual actuator can realize nonlinear control strategies, and improve the vibration reduction effect of the system by nonlinear adjustment of the force.

[0037] The piezoelectric actuator 7 has a fast high-frequency response characteristic and a precise control effect. The fast high-frequency response characteristic can achieve a fast response and control to the excitation, and then quickly adjust the active vibration reduction force. At the same time, the micron-level or even nanometer-level displacement adjustment can provide high-precision displacement control. However, one of the disadvantages of the piezoelectric actuator 7 is its short stroke, which makes it difficult to apply it to large-amplitude vibration problems. Compared with piezoelectric ceramics, the flat-plate voice coil motor 6 has a large stroke and can achieve large-amplitude vibration compensation, but its response frequency is low. Therefore, the flat-plate voice coil motor 6 and the piezoelectric actuator 7 are connected in parallel to compensate each other, solving the problems of the short stroke of the piezoelectric actuator 7 and the low response frequency of the flat-plate voice coil motor 6, thereby achieving high-precision active vibration reduction while ensuring effective control of a large range of vibration amplitudes.

[0038] It is further preferred in the embodiment of the present invention that the positive stiffness mechanism 3 includes a plurality of transverse groove springs 301, and the plurality of transverse groove springs 301 are evenly distributed between the bottom shell 2 and the load platform 1, one end of the transverse groove spring 301 is connected to the load platform 1, and the other end is fixedly connected to the bottom surface of the bottom shell 2. The transverse groove spring 301 can effectively absorb and attenuate the impact and vibration from the external environment, and improve the dynamic performance of the vibration reduction device; at the same time, it has high axial stiffness and large load-bearing capacity as well as good wear resistance and fatigue resistance, and a long service life; and the stiffness of the transverse groove spring 301 can be flexibly adjusted by changing the size, shape and material properties of the transverse groove to meet the vibration reduction requirements of different environments, and realize the adjustability of stiffness.

[0039] It is further preferred in the embodiment of the present invention that Figure 3 As shown, the negative stiffness mechanism 4 includes four negative stiffness units, and a negative stiffness unit is connected to each of the four corners of the bottom shell 2. The negative stiffness unit includes a fixed plate, a slide rail 402, a slider 403, a spring 401 and a connecting rod 404. The fixed plate is fixedly connected to the side wall of the bottom shell 2, the slide rail 402 is vertically fixedly connected to the fixed plate, the slider 403 is slidably connected to the slide rail 402, one end of the spring 401 is fixedly connected to the slider 403, and the other end is fixedly connected to the fixed plate, one end of the connecting rod 404 is hinged to the end of the slider 403 away from the spring 401, and the other end is hinged to the connecting column 102 of the load platform 1, and the two negative stiffness units arranged on the opposite side walls of the bottom shell 2 are symmetrical about the connecting column 102; the negative stiffness unit also includes a limit pad 405, one end of the slider 403 close to the fixed plate is fixedly connected to the limit pad 405, one end of the fixed plate close to the slider 403 is fixedly connected to the limit pad 405, and the spring 401 is sleeved outside the limit pad 405. The negative stiffness mechanism 4 provides negative stiffness and elastic restoring force through the rotational connection between the connecting rod 404 and the slider 403 and the sliding compression spring 401 of the slider 403 on the slide rail 402; at the same time, the limit pad 405 can prevent the spring 401 from failing when overloaded; the compensation of negative stiffness reduces the overall stiffness of the system, which is beneficial to the reduction of the natural frequency.

[0040] It is further preferred in the embodiment of the present invention that Figure 4-5 As shown, the number of piezoelectric actuators 7 is the same as the number of transverse groove springs 301, and the piezoelectric actuator 7 includes a piezoelectric actuator body 701 and a base 702. The piezoelectric actuator body 701 is fixedly connected to the base 702, and the base 702 is fixedly installed at one end of the transverse groove spring 301 away from the bottom shell 2. The piezoelectric actuator body 701 is fixedly connected to the bottom surface of the load platform 1. The piezoelectric actuator body 701 is fixedly connected to the limiting boss 101 on the bottom surface of the load platform 1, and the base 702 of the piezoelectric actuator 7 is connected to the top of the transverse groove spring 301 through bolts to achieve positioning, which can realize the series connection of the piezoelectric actuator 7 and the transverse groove spring 301, realize axial positioning, and ensure the axial transmission of the elastic restoring force.

[0041] It is further preferred in the embodiment of the present invention that Figure 6 As shown, the flat-plate voice coil motor 6 includes a stator 602, a mover 601 and an output shaft 603. The stator 602 is fixedly connected to the bottom surface of the bottom shell 2. The mover 601 is slidably connected to the stator 602. When the stator 602 is energized, the mover 601 can move in the vertical direction. One end of the output shaft 603 is fixedly connected to the mover 601, and the other end is fixedly connected to the bottom surface of the load platform 1. The flat-plate voice coil motor 6 generates a main force and transmits it axially to the load platform 1 to achieve vibration reduction. In addition to the advantages of traditional voice coil motors, the flat-plate voice coil motor 6 also has the characteristics of large contact area, fast heat dissipation, lightweight structure and long service life. There are multiple flat-plate voice coil motors 6, and multiple flat-plate voice coil motors 6 are fixedly connected side by side. The vibration isolation performance can be further improved by arranging multiple flat-plate voice coil motors 6 side by side, while increasing the active control force, ensuring a compact structure and saving space.

[0042] It is further preferred in the embodiment of the present invention that Figure 7As shown, the active and passive composite vibration reduction system also includes a buffer device, which is arranged between the bottom shell 2 and the load platform 1. The buffer device includes a plurality of hydraulic buffers 5, which are evenly distributed between the bottom shell 2 and the load platform 1, and the hydraulic buffer 5 is fixedly connected to the bottom surface of the bottom shell 2. Further preferably, the free end of the piston rod 502 of the hydraulic buffer 5 is sleeved with a rubber head 501, and the rubber head 501 can absorb vibration and impact; the oil of the hydraulic buffer 5 has a certain viscosity, and when the top of the hydraulic buffer 5 is impacted or vibrated, the impact force can be absorbed by the flow of the oil, and the impact force can be converted into oil pressure for uniform dispersion, which provides damping to suppress resonance and mitigate impact; an adjusting nut 503 is also installed at the bottom of the hydraulic buffer 5, and the height of the hydraulic buffer 5 can be changed by rotating the adjusting nut 503, and the impact on the top of the hydraulic buffer 5 can be adjusted to adapt to different loads, and it is ensured that the internal mechanism of the system will not be crushed when overloaded while increasing the bearing capacity.

[0043] It is further preferred in the embodiment of the present invention that Figure 8 As described above, the side wall of the bottom shell 2 is provided with an observation window 201, which is convenient for timely observing the operation of the internal structure of the vibration reduction device; the bottom surface of the bottom shell 2 has a hollow limit column 202 for fixed connection with the hydraulic buffer 5, the hollow limit column 202 can reduce the weight of the vibration reduction device, and the hollow limit column 202 has a thread inside, which is convenient for threaded connection with the hydraulic buffer 5. The bottom surface of the bottom shell 2 also has a connecting boss 203 for fixed connection with the transverse groove spring 301, and the connecting boss 203 can position and fix the bottom of the transverse groove spring 301.

[0044] like Fig. 9 As shown, the mass of the load platform is M, the stiffness of the vibration reduction system is k, and the damping of the system is c. The differential equation of the vibration reduction platform under passive control is:

[0045]

[0046] The transfer function corresponding to passive vibration reduction is:

[0047]

[0048] Where x0 is the vibration displacement of the load platform, x i is the vibration displacement of the base platform, s=jω is the complex variable of Laplace transform, ω is the frequency domain coefficient, c is the equivalent damping of the mechanism, k is the equivalent stiffness between the load platform and the base platform, and M is the mass of the load platform.

[0049] Fig.10 and Fig. 9Compared with the traditional vibration damping system, the system has two more active actuators. A feedback sensor is attached to one side of the load platform to obtain feedback signals and transmit them to the controller. The controller generates control signals and transmits them to the actuators to generate forces F1 and F2 to offset vibration. The differential equation of the vibration damping platform under feedback control is:

[0050]

[0051] The transfer function of the system using the integral force feedback control algorithm is:

[0052]

[0053] Where c is the equivalent damping of the vibration reduction system, k is the equivalent stiffness of the vibration isolation system, and M is the mass of the load platform. i When it is much larger than the equivalent damping c, the equivalent damping of the system can be ignored.

[0054] like Fig.11 As shown, it can be seen that the design of the active and passive composite vibration reduction system of the present invention reduces the stiffness of the system, shifts the natural frequency forward, reduces the resonance peak at the low frequency of the system, and still maintains a high attenuation rate at the high frequency.

[0055] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. An active and passive composite vibration reduction system, characterized in that: It includes a bottom shell, a load platform, a passive vibration reduction device and an active vibration reduction device, wherein the passive vibration reduction device and the active vibration reduction device are both arranged between the bottom shell and the load platform; The passive vibration reduction device comprises a positive stiffness mechanism and a negative stiffness mechanism arranged in parallel; The active vibration reduction device includes a controller, a sensor, a piezoelectric actuator and a flat voice coil motor. The sensor is fixed on the load platform. The sensor, the piezoelectric actuator and the flat voice coil motor are all connected to the controller signal. The controller processes the signal transmitted by the sensor and sends commands to the piezoelectric actuator and the flat voice coil motor.

2. The active and passive composite vibration reduction system according to claim 1, characterized in that: The positive stiffness mechanism includes a plurality of transverse groove springs, which are evenly distributed between the bottom shell and the load platform. One end of the transverse groove spring is connected to the load platform, and the other end is fixedly connected to the bottom surface of the bottom shell.

3. The active and passive composite vibration reduction system according to claim 1, characterized in that: The negative stiffness mechanism includes four negative stiffness units, and one of the negative stiffness units is connected to each of the four corners of the bottom shell. The negative stiffness unit includes a fixed plate, a slide rail, a slider, a spring and a connecting rod. The fixed plate is fixedly connected to the side wall of the bottom shell, the slide rail is vertically fixedly connected to the fixed plate, the slider is slidably connected to the slide rail, one end of the spring is fixedly connected to the slider, and the other end is fixedly connected to the fixed plate, one end of the connecting rod is hinged to one end of the slider away from the spring, and the other end is hinged to the connecting column of the load platform, and the two negative stiffness units arranged on the opposite side walls of the bottom shell are symmetrical about the connecting column.

4. The active and passive composite vibration reduction system according to claim 3 is characterized in that: The negative stiffness unit further comprises a limiting pad, one end of the sliding block close to the fixing plate is fixedly connected to the limiting pad, one end of the fixing plate close to the sliding block is fixedly connected to the limiting pad, and the spring is sleeved outside the limiting pad.

5. The active and passive composite vibration reduction system according to claim 2, characterized in that: The number of the piezoelectric actuators is the same as the number of the transverse groove springs. The piezoelectric actuator includes a piezoelectric actuator body and a base. The piezoelectric actuator body is fixedly connected to the base. The base is fixedly installed at one end of the transverse groove spring away from the bottom shell. The piezoelectric actuator body is fixedly connected to the bottom surface of the load platform.

6. The active and passive composite vibration reduction system according to claim 1, characterized in that: The flat-plate voice coil motor includes a stator, a mover and an output shaft. The stator is fixedly connected to the bottom surface of the bottom shell. The mover is slidably connected to the stator. When the stator is energized, the mover can move in a vertical direction. One end of the output shaft is fixedly connected to the mover, and the other end is fixedly connected to the bottom surface of the load platform.

7. The active and passive composite vibration reduction system according to claim 6, characterized in that: There are multiple planar voice coil motors, and the multiple planar voice coil motors are fixedly connected side by side.

8. The active and passive composite vibration reduction system according to claim 1, characterized in that: A buffer device is also included, and the buffer device is arranged between the bottom shell and the load platform.

9. The active and passive composite vibration reduction system according to claim 8, characterized in that: The buffer device includes a plurality of hydraulic buffers, and the plurality of hydraulic buffers are evenly distributed between the bottom shell and the load platform, and the hydraulic buffers are fixedly connected to the bottom surface of the bottom shell.

10. The active and passive composite vibration reduction system according to claim 1, characterized in that: The side wall of the bottom shell is provided with an observation window.

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