Fluid treatment device

Abstract

The invention discloses a fluid treatment device, which relates to the technical field of semiconductor fluid transportation and comprises a fluid control body provided with a temporary storage cavity for storing fluid; the adjusting piece is movably connected in the temporary storage cavity, a movable gap is formed between the fluid control body and the adjusting piece, and the adjusting piece is used for adjusting the internal volume of the temporary storage cavity; the edge of one side of the deformation part is connected with the side wall of the fluid control body, the edge of the other side of the deformation part is connected with the end, extending into the temporary storage cavity, of the adjusting part, and the deformation part blocks a movable gap between the adjusting part and the fluid control body along with movement of the adjusting part; the fluid control body is further provided with an inlet flow channel and an outlet flow channel, the inlet flow channel is communicated with the temporary storage cavity, and the outlet flow channel is communicated with the movable gap. According to the invention, the fluid transmission process of the semiconductor manufacturing process can be optimized, the photoresist waste is reduced, and the wet particle phenomenon is inhibited or improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor fluid transportation, and in particular to a fluid processing device. Background Art

[0002] In the semiconductor field, fluid delivery devices are key technologies for achieving precise fluid dispensing. Due to the high cost of many photochemicals used in the semiconductor industry, it is particularly important to optimize fluid delivery and dispensing processes to reduce material waste and improve production efficiency.

[0003] In order to avoid sealing performance problems during fluid transmission and to avoid particles generated by contact friction, the prior art generally sets a rolling diaphragm. One side of the rolling diaphragm contacts the fluid, while the other side does not. The side that does not contact the fluid is used to install the valve stem. The side of the rolling diaphragm that contacts the fluid is set at the connection structure with the pump chamber. However, since the fluid mainly enters and flows out of the pump chamber, the fluid in the U-shaped gap between the rolling diaphragm and the inner wall of the pump chamber has poor fluidity, which will form residues and deteriorate over time, resulting in the phenomenon of wet particles.

[0004] During the photoresist coating process, wet particles in the fluid adhere to the wafer surface, which not only affects the quality and uniformity of the photoresist but may also cause damage to semiconductor devices.

[0005] Therefore, it is necessary to provide a fluid processing device to solve the above problems existing in the prior art. Summary of the invention

[0006] The object of the present invention is to provide a fluid processing device to optimize the semiconductor fluid transmission process, reduce material waste and avoid the adhesion of wet particles.

[0007] To achieve the above object, the technical solution of the present invention is as follows: The present invention provides a fluid processing device, comprising: The fluid control body is provided with a temporary storage cavity for storing fluid; An adjusting member, movably connected in the temporary storage chamber, a movable gap is formed between the fluid control body and the adjusting member, and the adjusting member is used to adjust the internal volume of the temporary storage chamber; A deformable member, one side edge of which is connected to the side wall of the fluid control body, and the other side edge of which is connected to one end of the adjusting member extending into the temporary storage cavity, wherein the deformable member blocks the movable gap between the adjusting member and the fluid control body as the adjusting member moves; Among them, the fluid control body is also provided with an inlet flow channel and an outlet flow channel, the inlet flow channel is communicated with the temporary storage chamber, the outlet flow channel is communicated with the movable gap, and a first flow channel is also arranged between the outlet flow channel and the temporary storage chamber, the first flow channel is located between the fluid control body and the adjustment member, and the first flow channel is used to connect the outlet flow channel with the temporary storage chamber.

[0008] By adopting the above technical solution, after the fluid enters the inlet flow channel, it enters the temporary storage chamber connected thereto, and then flows out from the end of the active gap to the outlet. Compared with the prior art, the fluid flows directly from the inlet to the temporary storage chamber and then to the outlet, and there is a large area of ​​poor fluidity in the active gap. In the present invention, when the fluid flows into the active gap through the outlet flow channel, the dynamic flow of the fluid can continuously impact the active gap, thereby effectively reducing the risk of wet particles precipitating.

[0009] Furthermore, the temporary storage cavities are distributed along a horizontal direction, and the adjusting member moves horizontally along an extension direction of the temporary storage cavities.

[0010] By adopting the above technical solution, the present invention sets the adjustment part to move in the horizontal direction. Compared with the prior art in which the adjustment part is set in the vertical direction, the horizontal movement of the adjustment part of the present invention can prevent the fluid from accumulating at the bottom of the temporary storage chamber due to gravity. The movement of the adjustment part increases the fluidity of the fluid inside the temporary storage chamber, thereby reducing the risk of wet particles precipitating.

[0011] Furthermore, the fluid control body is provided with a circulation channel, and the circulation channel is communicated with the temporary storage chamber.

[0012] By adopting the above technical solution, the fluid control body can realize the circulation of the fluid by opening a circulation channel, thereby realizing the pumping in and out of the fluid. In addition, through the design of the circulation channel, the fluid can flow repeatedly in the temporary storage chamber, which helps to maintain the stability of the fluid, avoid the condensation or precipitation of the fluid due to long-term static state, reduce the possibility of fluid retention or accumulation in a specific position, and thus avoid the precipitation of wet particles.

[0013] Furthermore, the fluid control body also includes a first on-off portion, a second on-off portion and a third on-off portion, wherein the outlet of the first on-off portion is connected to one end of the temporary storage chamber, and is used to control the flow of fluid into the temporary storage chamber; the inlet of the second on-off portion is connected to the other end of the temporary storage chamber, and is used to control the outflow of fluid in the temporary storage chamber; the third on-off portion is arranged between the temporary storage chamber and the circulation channel, and the third on-off portion is used to control the connection and disconnection between the temporary storage chamber and the circulation channel.

[0014] By adopting the above technical solution and setting three on-off parts, the fluid processing device can achieve flexible fluid control. The linkage of the first on-off part, the second on-off part and the third on-off part enables the inflow, outflow and circulation of the fluid to be accurately adjusted. Under different working conditions, the flow path of the fluid can be adjusted as needed to ensure the efficient operation of the fluid system.

[0015] Furthermore, a second flow channel is provided between the circulation channel and the temporary storage chamber, the second flow channel is located between the fluid control body and the adjustment member, and the second flow channel is used to connect the circulation channel and the temporary storage chamber.

[0016] Furthermore, the temporary storage chamber has an axis, the inlet flow channel and the outlet flow channel are located on a side of the axis of the temporary storage chamber close to the ground, and the circulation flow channel is located on a side of the axis of the temporary storage chamber away from the ground.

[0017] By adopting the above technical solution, when the fluid, especially the photoresist, passes through the circulation channel, since the gravity of the gas in the photoresist is much lower than the photoresist itself, the bubbles will escape to the liquid surface of the photoresist in the circulation channel due to buoyancy, thereby achieving the removal of bubbles in the fluid in the fluid processing device and optimizing the subsequent coating process.

[0018] Further, the adjusting member includes a driving part, and the first on-off part, the second on-off part and the third on-off part are diaphragm valves.

[0019] Furthermore, the diaphragm valve includes a valve body, a diaphragm arranged in the valve body, and an actuator, the diaphragm is connected to the actuator, the actuator is connected to the driving part, and the driving part is used to drive the actuator to perform reciprocating motion to drive the diaphragm to perform synchronous reciprocating motion, so that the valve body is in a flow or cut-off state.

[0020] Furthermore, a first flow channel circular hole and a second flow channel circular hole are formed on the valve body, and the first flow channel circular hole and the second flow channel circular hole are used for the fluid in the temporary storage cavity to flow out and flow in, respectively.

[0021] Furthermore, the driving part includes a frame and a driving source, the driving source is mounted on the frame, a driving end of the driving source is connected to the adjusting member, and the driving source is used to drive the adjusting member to move in the horizontal direction in the temporary storage chamber.

[0022] Furthermore, a guide ring is provided in the temporary storage chamber, a port on one side of the guide ring is communicated with the first flow channel, and a port on the other side of the guide ring is communicated with the temporary storage chamber.

[0023] The beneficial effect of the fluid treatment device provided by the present invention is that in the process of the fluid flowing into the active gap through the outlet flow channel, the dynamic flow of the fluid can continuously impact the active gap, thereby effectively reducing the risk of wet particles precipitating out. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of the overall structure of a fluid treatment device according to an embodiment of the present invention; Figure 2 This is a cross-sectional view of the overall structure of a fluid treatment device according to an embodiment of the present invention; Figure 3 A three-dimensional internal structure diagram of a fluid control body according to an embodiment of the present invention; Figure 4 This is a structural cross-sectional view of a fluid control body according to an embodiment of the present invention; Figure 5 This is a front view of a fluid control body according to an embodiment of the present invention; Figure 6 This is an overall structural diagram of a deformation member and an adjustment member according to an embodiment of the present invention; Figure 7 It is a partial cross-sectional view of a fluid control body according to an embodiment of the present invention; Figure 8 It is a cross-sectional view of a deformable member and an adjusting member according to an embodiment of the present invention.

[0025] Figure numerals: 1. fluid control body; 11. temporary storage chamber; 111. inlet flow channel; 1111. first vertical section; 112. outlet flow channel; 1121. first horizontal section; 1122. second vertical section; 113. circulation flow channel; 1131. third vertical section; 1132. second horizontal section; 114. first flow channel; 115. second flow channel; 116. guide ring; 12. first on-off part; 121. valve body; 122. actuator; 123. first flow channel circular hole; 124. second flow channel circular hole; 13. second on-off part; 14. third on-off part; 2. adjustment part; 21. movable gap; 22. drive part; 221. frame; 222. drive source; 3. deformation part; 4. gas connector; 5. solenoid valve. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0027] The present invention is applicable to the semiconductor equipment industry. The embodiments of the present invention deliver fluid such as photoresist in a dispensing mode to supply it to a wafer.

[0028] The specific implementation modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0029] like Figure 1-Figure 8 As shown, a fluid processing device includes a fluid control body 1, an adjustment member 2 and a deformation member 3.

[0030] The fluid control body 1 has a temporary storage chamber 11 for storing fluid inside. The temporary storage chamber 11 is columnar and is opened along the horizontal extension direction of the fluid control body 1. The adjustment member 2 is columnar and movably connected in the temporary storage chamber 11. Please refer to Figure 7 , the adjusting member 2 moves left and right in the temporary storage chamber 11, thereby changing the volume of the temporary storage chamber 11 to achieve pumping out and suction of the fluid. Figure 7 and Figure 8 For example, the adjusting member 2 can move in the temporary storage chamber 11 . Figure 7 The middle adjustment member 2 is located at the left end of the temporary storage chamber 11. Figure 8 The middle adjustment member 2 is located at the right end of the temporary storage chamber 11. In this embodiment, the movable connection is a sliding connection. An annular movable gap 21 is formed between the fluid control body 1 and the adjustment member 2, and the adjustment member 2 is used to adjust the internal volume of the temporary storage chamber 11. The adjustment member 2 moves horizontally along the extension direction of the temporary storage chamber 11, that is, the axial direction.

[0031] Reference Figure 4-Figure 6As shown, one side edge of the deformable member 3 is connected to the side wall of the fluid control body 1, and the other side edge of the deformable member 3 is connected to one end of the adjusting member 2 extending into the temporary storage cavity 11. The deformable member 3 blocks the active gap 21 between the adjusting member 2 and the fluid control body 1 along with the movement of the adjusting member 2. In other embodiments of the present invention, the deformable member 3 is a columnar diaphragm or a rolling diaphragm. Taking the rolling diaphragm as an example, the connection between the rolling diaphragm and the fluid control body 1 can be a fixed setting or a detachable setting. In this embodiment, the deformable member 3 is preferably fixed to the side wall of the fluid treatment device by a fixed setting, and its fixing method can be a snap connection or an integral molding, etc. In this embodiment, the rolling diaphragm is preferably fixed to the side wall of the fluid treatment device by an integral molding. By placing the temporary storage cavity 11 and the active direction of the rolling diaphragm on a horizontal plane rather than a vertical plane, the accumulation of fluid in the U-shaped active gap 21 due to gravity is avoided. The accumulation of fluid in the active gap 21 will cause the fluidity of the fluid in the active gap 21 to become lower, and then the wet particle phenomenon will occur.

[0032] The fluid control body 1 is provided with an inlet flow channel 111, an outlet flow channel 112 and a circulation flow channel 113, and the circulation flow channel 113 is interconnected with the temporary storage chamber 11; the circulation flow channel 113 includes a third vertical section 1131 and a second horizontal section 1132. The inlet flow channel 111 includes a first vertical section 1111, and the first vertical section 1111 is connected with the temporary storage chamber 11, allowing the fluid to enter the temporary storage chamber 11. The outlet flow channel 112 includes a second vertical section 1122 and a first horizontal section 1121, and the outlet flow channel 112 is connected with the active gap 21 of the fluid control body 1 through the second vertical section 1122, the first horizontal section 1121 and the first flow channel 114, allowing the fluid to flow out smoothly after passing through the temporary storage chamber 11. In the process of the fluid passing through the outlet flow channel 112 or the circulation flow channel 113, the dynamically flowing fluid continuously impacts the active gap 21. This design allows the fluid to always remain in a moving state in the active gap 21, reducing the static residence time of the fluid. Compared with the prior art, the present invention can effectively reduce the risk of wet particle precipitation.

[0033] In some embodiments of the present invention, a first flow channel 114 is also designed between the outlet flow channel 112 and the temporary storage chamber 11. The first flow channel 114 is located between the fluid control body 1 and the adjustment member 2, and its function is to connect the outlet flow channel 112 and the temporary storage chamber 11. An inlet joint is provided at the lower end of the inlet flow channel 111, and an outlet joint is provided at the lower end of the outlet flow channel 112. A circulation port joint is provided at the upper end of the circulation flow channel 113. It should be noted that, since the figure is a cross-sectional view, the temporary storage chamber 11 and the inlet flow channel 111 are not intuitively connected, but in fact, the two are interconnected. Similarly, the first horizontal section 1121 and the second vertical section 1122 are actually interconnected.

[0034] Reference Figure 3 In some embodiments of the present invention, the fluid control body 1 further includes a first on-off portion 12, a second on-off portion 13 and a third on-off portion 14. The inlet of the second on-off portion 13 is connected to the first vertical section 1111, and the outlet is connected to the temporary storage chamber 11, so as to control the outflow of the fluid in the temporary storage chamber 11; the inlet of the first on-off portion 12 is connected to the temporary storage chamber 11, the first flow channel 114 and the first horizontal section 1121 in sequence. The outlet of the first on-off portion 12 is connected to the second vertical section 1122; the third on-off portion 14 is arranged between the temporary storage chamber 11 and the circulation channel 113, the inlet of the third on-off portion 14 is connected to the temporary storage chamber 11, and the outlet of the second flow channel 115 is connected to the third vertical section 1131, and the third on-off portion 14 is used to control the on-off between the temporary storage chamber 11 and the circulation channel 113.

[0035] Reference Figure 2 In some embodiments of the present invention, the inlet flow channel 111 and the outlet flow channel 112 are located below the temporary storage chamber 11 , and the circulation flow channel 113 is located above the temporary storage chamber 11 .

[0036] It should be noted that in the photoresist coating process, there will be trace bubbles in the photoresist for various reasons. The presence of bubbles may cause many adverse effects. For example, bubbles may cause depressions or uneven areas on the coating surface during the coating process, which will affect the overall thickness of the photoresist. Reducing bubbles can ensure the uniformity of the coating, thereby improving the quality of subsequent exposure and development. Therefore, reducing bubbles is crucial for subsequent processes.

[0037] Specifically, the present invention starts the circulating channel 113 above the temporary storage chamber 11, so that the outlet of the circulating channel 113 is located above the fluid control body 1. By closing the first on-off portion 12 and the second on-off portion 13, the entry and outflow of the fluid in the fluid control body are stopped. At this time, the adjustment member 2 is reciprocated to make the fluid reciprocate between the temporary storage chamber 11, the circulating channel 113 and the second channel 115. When the fluid, especially the photoresist, passes through the circulating channel 113, since the gravity of the gas in the photoresist is much lower than the photoresist itself, the bubbles will escape to the liquid surface of the photoresist in the circulating channel 113 due to buoyancy, thereby achieving the removal of bubbles in the fluid in the fluid processing device and optimizing the subsequent glue coating process.

[0038] In some embodiments of the present invention, the adjustment member 2 includes a driving portion 22, and the first on-off portion 12, the second on-off portion 13 and the third on-off portion 14 are diaphragm valves. The diaphragm valve includes a valve body 121, a diaphragm arranged in the valve body 121 and an actuator 122, and the diaphragm realizes switching the flow state inside the valve body 121. That is, the reciprocating motion of the diaphragm changes the gap change in the flow area of ​​the valve body 121, thereby changing the flow rate of the fluid. In other embodiments, a sealing ring is provided on the diaphragm. The driving portion 22 is used to connect the adjustment member 2 to perform reciprocating linear motion, thereby realizing the suction and pumping out of the fluid in the temporary storage chamber 11. The actuator 122 is used to inflate or exhaust the air chamber, so that the diaphragm and the fluid control body 1 are switched between fitting and separation.

[0039] In some other embodiments of the present invention, a first flow channel circular hole 123 and a second flow channel circular hole 124 are provided on the valve body 121, and the first flow channel circular hole 123 and the second flow channel circular hole 124 are respectively used for the fluid in the temporary storage chamber 11 to flow out and flow in; wherein, when the air chamber is filled with gas, the diaphragm moves and fits to block the first flow channel circular hole 123 and the second flow channel circular hole 124; when the air chamber is not filled with gas, the diaphragm moves away from the first flow channel circular hole 123.

[0040] like Figure 1 As shown, in some embodiments of the present invention, the actuator 122 includes a solenoid valve 5, an air pipe and a gas connector 4. It should be noted that any other driving mechanism that can drive the first on-off portion 12, the second on-off portion 13 or the third on-off portion 14 to form a flow or cut-off state can be used, and the present invention is not limited thereto. The solenoid valve 5 is arranged on the air pipe connected to the valve body 121, and the solenoid valve 5 is used to control the on and off of the gas. The gas connector 4 is connected to an external gas source, the solenoid valve 5 is opened, and the gas enters the air pipe.

[0041] In some other embodiments of the present invention, the first on-off part 12 and the second on-off part 13 are both ball valves or flapper valves. The advantages of using a ball valve are that it has a simple structure, a small size, is easy to install and maintain, and has a wide range of applications. The advantages of using a flapper valve are that it has good sealing performance, high durability, and convenient operation.

[0042] It should be noted that the specific structures of the first switching part 12 , the second switching part 13 and the third switching part 14 are not specifically limited.

[0043] In some embodiments of the present invention, the driving unit 22 includes a frame 221 and a driving source 222, the driving source 222 is mounted on the frame 221, the driving end of the driving source 222 is connected to the adjusting member 2, and the driving source 222 is used to drive the adjusting member 2 to move horizontally in the temporary storage chamber 11. In some embodiments of the present invention, the driving source 222 is an electric cylinder, an electric push rod or other driving device that can realize the left and right movement of the adjusting member 2 in the temporary storage chamber 11. In the present invention, the electric cylinder is preferred, and the control accuracy of the electric cylinder is high, which can reach up to micrometer level.

[0044] The electric cylinder is used as a driving source in the fluid processing device of the present invention, and the electric mechanism is used to realize the precise movement of the adjustment member 2 in the horizontal direction in the temporary storage chamber 11. The electric cylinder is composed of a motor, a lead screw, a valve stem and a cylinder body. The motor is the core component of the electric cylinder, which is responsible for providing power to drive the lead screw to rotate. The lead screw is connected to the valve stem through a thread, and the rotation of the motor causes the lead screw to move linearly, thereby pushing the valve stem to move along its axial direction. One end of the valve stem is connected to the adjustment member 2, and the movable direction of the adjustment member 2 is the horizontal direction. When the system receives a control signal, the motor starts to run. According to the required movement direction, the rotation direction of the motor is set to clockwise or counterclockwise to ensure that the rotation of the lead screw can drive the valve stem to move in the desired direction. The motor drives the lead screw to rotate through its output shaft, and the rotation of the lead screw causes the valve stem to move linearly in the horizontal direction under the action of its thread. The movement of the valve stem directly affects the position of the adjustment member 2. By adjusting the rotation speed and rotation angle of the motor, the horizontal position of the adjustment member 2 in the temporary storage chamber 11 can be accurately controlled. This precision is crucial for storing and releasing fluids, especially in the context of the semiconductor industry, which requires high precision and high stability in fluid handling. In addition, the small size of the electric cylinder makes the overall size of the fluid handling device smaller.

[0045] At the same time, in order to ensure that the adjustment member 2 can achieve accurate horizontal movement, a control system is also equipped. The control system can monitor the position of the adjustment member 2 in real time, and adjust the working state of the motor through the feedback mechanism. The application of electric cylinders in fluid handling devices has multiple advantages. First, its driving efficiency is high, and it can respond quickly to control signals and achieve dynamic adjustment. Secondly, the structure of the electric cylinder is relatively compact, which is easy to integrate into the equipment and can reduce the space occupied by the equipment. In addition, the durability and reliability of the electric cylinder enable it to operate stably for a long time in industrial applications, reducing maintenance costs.

[0046] In some other embodiments of the present invention, a guide ring 116 is provided in the temporary storage chamber 11, and one side of the guide ring 116 is interconnected with the first flow channel 114, and the other side is interconnected with the temporary storage chamber 11. The guide ring 116 can effectively guide the flow of the fluid, reduce the generation of eddy currents, and improve the uniformity of the fluid flow. By optimizing the flow path of the fluid, the guide ring 116 reduces the residence time of the fluid in the temporary storage chamber 11, and further reduces the risk of wet particles precipitating.

[0047] In summary, the beneficial effects of the fluid treatment device provided by the present invention are: First, the fluid handling device forms a seal between the fluid control body 1 and the adjusting member 2 by forming an active gap 21 between the temporary storage chamber 11 and the rolling diaphragm, and by blocking the active gap 21 with the movement of the deformable member 3, that is, the rolling diaphragm accompanying the adjustment member 2, thereby preventing fluid leakage and maintaining appropriate pressure. After the fluid enters the inlet flow channel 111, it enters the temporary storage chamber 11 connected thereto, and then flows out from the outlet after passing through the active gap 21. Compared with the prior art, the fluid flows directly from the inlet flow channel 111 to the temporary storage chamber 11 and then flows out from the outlet. In the process of the fluid flowing into the active gap 21 through the outlet flow channel 112, the dynamic flow of the fluid can continuously impact the active gap 21, ensuring the continuous movement of the fluid in the active gap 21, reducing the static residence time, and effectively improving the flow displacement effect of the photoresist, thereby effectively reducing the risk of wet particle precipitation. In the high-precision coating process, if the photoresist is in a static state for a long time, bubbles and precipitates may be generated due to temperature changes or external environmental influences, thereby affecting the uniformity of its coating and the coating thickness. By improving the dynamic fluidity of the fluid, the device effectively suppresses the precipitation of wet particles, thereby improving the reliability and accuracy of the glue coating process.

[0048] Secondly, the present invention does not need to set up a separate chamber for separating bubbles. Instead, the bubbles are guided to the circulation joint in the circulation channel 113 for discharge, thereby preventing the fluid containing bubbles from flowing from the outlet to the wafer, thereby improving the process yield and ensuring the overall quality of the photoresist coating.

[0049] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0050] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0051] Unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include the first feature being in direct contact with the second feature, or may include the first feature being in contact with the second feature through another feature between them instead of being in direct contact. Moreover, a first feature being "above", "above" and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0052] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A fluid processing device, characterized in that: include: The fluid control body is provided with a temporary storage cavity for storing fluid; An adjusting member, movably connected in the temporary storage chamber, a movable gap is formed between the fluid control body and the adjusting member, and the adjusting member is used to adjust the internal volume of the temporary storage chamber; A deformable member, one side edge of which is connected to the side wall of the fluid control body, and the other side edge of which is connected to one end of the adjusting member extending into the temporary storage cavity, wherein the deformable member blocks the movable gap between the adjusting member and the fluid control body as the adjusting member moves; Among them, the fluid control body is also provided with an inlet flow channel and an outlet flow channel, the inlet flow channel is communicated with the temporary storage chamber, the outlet flow channel is communicated with the movable gap, and a first flow channel is also arranged between the outlet flow channel and the temporary storage chamber, the first flow channel is located between the fluid control body and the adjustment member, and the first flow channel is used to connect the outlet flow channel with the temporary storage chamber.

2. The fluid treatment device according to claim 1, characterized in that: The temporary storage cavities are distributed along a horizontal direction, and the adjusting member moves horizontally along an extending direction of the temporary storage cavities.

3. The fluid treatment device according to claim 2, characterized in that: The fluid control body is provided with a circulation channel, and the circulation channel is communicated with the temporary storage cavity.

4. The fluid treatment device according to claim 3, characterized in that: The fluid control body also includes a first on-off portion, a second on-off portion and a third on-off portion, wherein the outlet of the first on-off portion is connected to one end of the temporary storage chamber, and is used to control the fluid to flow into the temporary storage chamber; the inlet of the second on-off portion is connected to the other end of the temporary storage chamber, and is used to control the outflow of the fluid in the temporary storage chamber; the third on-off portion is arranged between the temporary storage chamber and the circulation channel, and is used to control the on-off between the temporary storage chamber and the circulation channel.

5. The fluid treatment device according to claim 4, characterized in that: A second flow channel is further provided between the circulation channel and the temporary storage chamber. The second flow channel is located between the fluid control body and the adjustment member. The second flow channel is used to connect the circulation channel and the temporary storage chamber.

6. The fluid treatment device according to claim 4, characterized in that: The temporary storage chamber has an axis, the inlet flow channel and the outlet flow channel are located on a side of the axis of the temporary storage chamber close to the ground, and the circulation flow channel is located on a side of the axis of the temporary storage chamber far from the ground.

7. The fluid treatment device according to claim 4, characterized in that: The adjusting member comprises a driving part, and the first on-off part, the second on-off part and the third on-off part are diaphragm valves.

8. The fluid treatment device according to claim 7, characterized in that: The diaphragm valve includes a valve body, a diaphragm arranged in the valve body, and an actuator. The diaphragm is connected to the actuator, and the actuator is connected to the driving part. The driving part is used to drive the actuator to perform reciprocating motion to drive the diaphragm to perform synchronous reciprocating motion, so that the valve body is in a flow or cutoff state.

9. The fluid treatment device according to claim 8, characterized in that: The valve body is provided with a first flow channel circular hole and a second flow channel circular hole, and the first flow channel circular hole and the second flow channel circular hole are respectively used for the fluid in the temporary storage cavity to flow out and flow in.

10. The fluid treatment device according to claim 7, characterized in that: The driving part includes a frame and a driving source, wherein the driving source is mounted on the frame, a driving end of the driving source is connected to the adjusting member, and the driving source is used to drive the adjusting member to move in the temporary storage chamber along a horizontal direction.

11. The fluid treatment device according to claim 2, characterized in that: A guide ring is arranged in the temporary storage chamber, a port on one side of the guide ring is communicated with the first flow channel, and a port on the other side of the guide ring is communicated with the temporary storage chamber.

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