A diaphragm motion device, scanning motion method thereof, and exposure device

Abstract

The present invention provides an aperture motion device, a scanning motion method thereof, and an exposure device, relating to the field of semiconductor device technology. The device comprises a connected motion assembly and a mass balance assembly. The motion assembly comprises a first guide rail, a first slider, a second slider, a first driver, and a second driver. The mass balance assembly comprises a first guide rail, a third slider, a fourth slider, a first driver, and a second driver. The first and third drivers are electrically connected to a first control circuit, and the second and fourth drivers are electrically connected to a second control circuit. The device has a simple structure, and the third and fourth sliders can synchronize and reverse the movement of the first and second sliders without delay. Compared to existing technologies, the design of this device reduces the need for complex control algorithms, has a faster response speed, and can achieve reaction force balance more promptly.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to an aperture motion device, a scanning motion method thereof, and an exposure device. Background Art

[0002] In today's era, technological advancements are advancing at an astonishing rate. With the rapid development of communications, computer, and sensor technologies, the semiconductor industry is experiencing a booming development. Chip manufacturing processes are also undergoing continuous evolution and innovation. Exposure devices, as key equipment in the chip manufacturing process, have a direct impact on the overall progress of the semiconductor chip industry through their production accuracy and efficiency.

[0003] The exposure device is a key tool for projecting the design pattern onto the silicon wafer, determining the final structure of the chip and lying at the heart of semiconductor chip technology. The aperture motion mechanism is a key component of the exposure device, equipped with movable aperture plates. Slit windows are formed between the multiple aperture plates, allowing the light beam to pass through the slit windows. The areas outside the windows are blocked by the aperture plates and cannot transmit light. During the exposure process, the laser beam from the exposure system projects the mask pattern through the slit window onto the silicon wafer on the workpiece stage. The slit window limits the size and center position of the mask surface illumination field during the scanning exposure process, preventing the imaging beam from exposing areas outside the exposure field. During scanning exposure, the aperture motion mechanism and the mask stage assembly perform high-precision, high-acceleration synchronous motion, generating a reaction force on the frame, causing a significant impact on the frame and thus affecting the accuracy and efficiency of the exposure process.

[0004] In related technologies, compensation components are often designed to balance the movement of the aperture blade. The specific process involves using a scale or sensor to obtain the aperture blade's acceleration in real time, calculating the corresponding acceleration force, and then controlling the compensation component to perform reverse acceleration to achieve mass balance compensation. However, this method requires high control algorithms, complex programming, and a certain amount of latency in both the calculation and drive processes, making real-time, synchronized mass balance compensation impossible. Furthermore, the need for corresponding motion detection components complicates the overall structure of the aperture motion mechanism and increases design and manufacturing costs. Summary of the Invention

[0005] The technical problem solved by the present invention is that the existing aperture motion device cannot perform mass balance compensation in real time.

[0006] To solve the above problems, in a first aspect, the present invention provides an aperture motion device, comprising a motion component and a mass balancing component connected to each other;

[0007] The motion assembly includes:

[0008] A first guide rail extending along a first direction;

[0009] A motion unit includes a first slider and a second slider slidably disposed on the first guide rail, the first slider and the second slider being spaced apart along the first direction, and each of the first slider and the second slider being provided with an aperture piece;

[0010] a first driving member and a second driving member, for respectively driving the first slider and the second slider to move along the first direction on the first guide rail;

[0011] The mass balance component includes:

[0012] a second guide rail, parallel to the first guide rail and symmetrically arranged with respect to the first guide rail in a second direction, the first direction being perpendicular to the second direction;

[0013] a mass balancing unit, comprising a third slider and a fourth slider slidably disposed on the second guide rail, wherein the third slider and the fourth slider are spaced apart along the first direction;

[0014] a third driving member and a fourth driving member, for respectively driving the third slider and the fourth slider to move along the first direction on the second guide rail;

[0015] The first driving member and the third driving member are electrically connected to a first control circuit, and the first control circuit is used to control the first driving member and the third driving member to synchronously generate driving forces equal in magnitude and opposite in direction; the second driving member and the fourth driving member are electrically connected to a second control circuit, and the second control circuit is used to control the third driving member and the fourth driving member to synchronously generate driving forces equal in magnitude and opposite in direction.

[0016] Optionally, the first driving member, the second driving member, the third driving member and the fourth driving member have the same structure, and all include a stator coil and a mover magnet group, and the magnetic field generated by the stator coil and the magnetic field generated by the mover magnet group cooperate to generate a force that drives the mover magnet group to move;

[0017] A first cover plate is connected to the first guide rail, and a second cover plate is connected to the second guide rail;

[0018] The stator coil of the first driving member is arranged on the first cover plate, and the movable magnet group is arranged on the first slider; the stator coil of the second driving member is arranged on the first cover plate, and the movable magnet group is arranged on the second slider; the stator coil of the third driving member is arranged on the second cover plate, and the movable magnet group is arranged on the third slider; the stator coil of the fourth driving member is arranged on the second cover plate, and the movable magnet group is arranged on the fourth slider.

[0019] Optionally, the first control circuit and the second control circuit have the same structure, both comprising a controller, an inverting amplifier, a first motor driver, and a second motor driver; the controller is configured to generate two identical control signals, wherein one control signal controls the operation of the first motor driver, and the other control signal is converted by the inverting amplifier into an inverted control signal and then controls the operation of the second motor driver;

[0020] The first motor driver of the first control circuit is electrically connected to the stator coil of the first drive component, and the second motor driver is electrically connected to the stator coil of the third drive component; the first motor driver of the second control circuit is electrically connected to the stator coil of the second drive component, and the second motor driver is electrically connected to the stator coil of the fourth drive component.

[0021] Optionally, the first guide rail and the second guide rail are both air-floating guide rails, and the first slider, the second slider, the third slider and the fourth slider are all air-floating sliders.

[0022] Optionally, the first guide rail includes a first air floating plate and a second air floating plate connected vertically, the first cover plate is connected to the first air floating plate and is arranged parallel to and spaced from the second air floating plate, and the first slider and the second slider are both arranged between the first cover plate and the second air floating plate;

[0023] The second guide rail includes a third air floating plate and a fourth air floating plate connected vertically. The second cover plate is connected to the third air floating plate and is arranged parallel to and spaced from the fourth air floating plate. The third slider and the fourth slider are both arranged between the second cover plate and the fourth air floating plate.

[0024] Optionally, a first groove is provided on a side of the first slider and the second slider facing the first cover plate, and the movable magnet group of the first driving member and the movable magnet group of the second driving member are respectively embedded in the corresponding first groove;

[0025] The third slider and the fourth slider are both provided with a second groove on one side facing the second cover plate, and the movable magnet group of the third driving member and the movable magnet group of the fourth driving member are respectively embedded in the corresponding second grooves.

[0026] Optionally, the mass of the third slider is greater than the sum of the masses of the first slider and the aperture plate, and the mass of the fourth slider is greater than the sum of the masses of the second slider and the aperture plate.

[0027] Optionally, the first guide rail is fixedly connected to the second guide rail, and a flexible hinge is provided at both ends of the first guide rail along the first direction and at both ends of the second guide rail along the first direction, and the motion component and the mass balancing component are connected to the external frame through the flexible hinge.

[0028] In a second aspect, the present invention provides an exposure device comprising the aperture motion device described in any one of the above items.

[0029] In a third aspect, the present invention further provides a scanning motion method applied to any of the above-mentioned aperture motion devices, the method comprising the following steps:

[0030] The first slider is located at the first end of the first guide rail, the second slider is located on the first guide rail and the distance between the second slider and the first slider is the minimum aperture blade spacing, the third slider is located at the second end of the second guide rail, and the fourth slider is located on the second guide rail and the distance between the fourth slider and the third slider is the minimum aperture blade spacing, and the scanning motion begins;

[0031] The second control circuit controls the second slider to accelerate along the positive direction of the first direction toward the second end of the first guide rail, and the fourth slider to accelerate along the negative direction of the first direction toward the first end of the second guide rail simultaneously. After a first preset time interval, the first control circuit controls the first slider to accelerate along the positive direction of the first direction toward the second end of the first guide rail, and the third slider to accelerate along the negative direction of the first direction toward the first end of the second guide rail simultaneously.

[0032] The second slider moves to the second end of the first guide rail and stops moving, the fourth slider moves to the first end of the second guide rail and stops moving, the first slider moves to the minimum aperture blade spacing when the distance between it and the second slider is stopped moving, and the third slider moves to the minimum aperture blade spacing when the distance between it and the fourth slider is stopped moving.

[0033] After a second preset time interval, the first control circuit controls the first slider to accelerate along the negative direction of the first direction toward the first end of the first guide rail, and the third slider to accelerate along the positive direction of the first direction toward the second end of the second guide rail simultaneously. After a first preset time interval, the second control circuit controls the second slider to accelerate along the negative direction of the first direction toward the first end of the first guide rail, and the fourth slider to accelerate along the positive direction of the first direction toward the second end of the second guide rail simultaneously.

[0034] The first slider moves to the first end of the first guide rail and stops, the third slider moves to the second end of the second guide rail and stops, the second slider moves to the minimum aperture blade spacing when the distance between the second slider and the first slider reaches the minimum aperture blade spacing, and the fourth slider moves to the minimum aperture blade spacing when the distance between the fourth slider and the third slider reaches the minimum aperture blade spacing.

[0035] Repeat the above steps until the scanning motion is completed.

[0036] The aperture motion device, scanning motion method, and exposure device of the present invention control the first and third driving members to generate driving forces of equal magnitude and opposite direction, so that the force exerted on the device by the movement of the first slider and the force exerted on the device by the movement of the third slider are equal in magnitude and opposite in direction, and the two forces cancel each other out. By simultaneously connecting the first and third driving members to a first control circuit, the first and third driving members can be synchronized in real time. When the first slider moves, the third slider can achieve synchronous reverse movement without delay. Correspondingly, when the second slider moves, the fourth slider can achieve synchronous reverse movement without delay, and the force exerted on the device by the second slider and the force exerted on the device by the fourth slider can cancel each other out. This allows the mass balance assembly to compensate for the mass balance of the motion assembly, eliminating frame vibration. Compared to the prior art, the aperture motion device of the present invention reduces the need for complex control algorithms, has a simple overall structure, and offers faster response speed, enabling more timely counterforce balance, improving the response speed and stability of the system operation. Furthermore, the design and manufacturing costs are low, and it is easier to implement and maintain. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 Schematic diagram of the structure of an aperture motion device according to an embodiment of the present invention;

[0038] Figure 2 for Figure 1 Schematic diagram of the top view of the middle aperture movement device;

[0039] Figure 3 for Figure 1 Schematic diagram of the disassembled structure of the middle aperture motion device Figure 1 ;

[0040] Figure 4 for Figure 1 Schematic diagram of the disassembled structure of the middle aperture motion device Figure 2 ;

[0041] Figure 5 for Figure 1 Schematic diagram of the disassembled structure of the middle aperture motion device Figure 3 ;

[0042] Figure 6 FIG. 4 is a flow chart of a scanning motion method of an aperture motion device according to an embodiment of the present invention.

[0043] Description of reference numerals:

[0044] 11-first guide rail; 111-first air-floating plate; 112-second air-floating plate; 12-first slider; 13-second slider; 14-aperture plate; 15-first cover plate; 21-second guide rail; 211-third air-floating plate; 212-fourth air-floating plate; 22-third slider; 23-fourth slider; 24-second cover plate; 311-first groove; 312-second groove; 32-connecting plate; 33-flexible hinge. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0046] It should be noted that in the present invention, descriptions such as "first" and "second" are only used for descriptive purposes and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the technical features indicated. Therefore, features defined as "first" and "second" may explicitly or implicitly include at least one of such features. The directions or positional relationships indicated by the terms "upper", "lower", "front", "back", "left", "right", etc. are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the devices or elements referred to must have a specific direction, be constructed and operate in a specific direction. Therefore, they should not be understood as limiting the present invention.

[0047] In the present invention, unless otherwise specified or limited, the terms "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can mean fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will be able to understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0048] The aperture motion device in the prior art has problems such as complex program design, inability to perform mass balance compensation in real time, and complex overall structure.

[0049] To solve the above technical problems, please refer to Figures 1 to 3 An embodiment of the present invention provides an aperture motion device comprising a motion assembly and a mass balance assembly, the motion assembly and the mass balance assembly being connected. The aperture motion device can be used in an exposure device. The motion assembly is used to adjust the size of a slit window, and the mass balance assembly is used to eliminate oscillatory impact forces generated during the motion of the motion assembly.

[0050] Specifically, the motion assembly can be fixed to the frame of the exposure device. The periodic high-acceleration scanning motion of the motion assembly will generate a large impact reaction force on the frame, thereby affecting the vibration stability of the exposure device's illumination system and affecting the accuracy and efficiency of the exposure process. The aperture motion device of the present invention directly connects the mass balance assembly to the motion assembly, so that the force generated by the mass balance assembly can be directly transmitted to the motion assembly and offset the force generated by the motion of the motion assembly. In other words, the forces generated by the motion of the motion assembly and the mass balance assembly offset each other before being transmitted to the frame. Compared to installing the mass balance assembly on the frame, the force transmission path is simpler and more direct, which helps to reduce or even eliminate the impact force directly borne by the frame, reduce mechanical wear, and ensure production accuracy.

[0051] The motion assembly includes a first guide rail 11, a motion unit, a first driver (not shown), and a second driver (not shown). The first guide rail 11 extends along a first direction; the motion unit includes a first slider 12 and a second slider 13 slidably mounted on the first guide rail 11. The first and second sliders 12, 13 are spaced apart along the first direction, and each of the first and second sliders 12, 13 is provided with an aperture plate 14. The first and second drivers are used to respectively drive the first and second sliders 12, 13 to move along the first guide rail 11 in the first direction. A slit window is formed between the two aperture plates 14. The first and second drivers respectively drive the first and second sliders 12, 13 to move, allowing the two aperture plates 14 to move in the same direction, toward each other, or away from each other, thereby adjusting the size of the slit window. The laser beam of the exposure system can project the mask pattern onto the silicon wafer on the workpiece stage through the slit window, thereby achieving exposure production.

[0052] The mass balancing assembly includes a second guide rail 21, a mass balancing unit, a third driver (not shown), and a fourth driver (not shown). The second guide rail 21 is parallel to the first guide rail 11 and symmetrically arranged in a second direction, with the first direction being perpendicular to the second direction. The mass balancing unit includes a third slider 22 and a fourth slider 23 slidably arranged on the second guide rail 21, with the third slider 22 and the fourth slider 23 spaced apart along the first direction. The third driver and the fourth driver are used to respectively drive the third slider 22 and the fourth slider 23 to move along the second guide rail 21 in the first direction. In this way, the third driver and the fourth driver can respectively drive the third slider 22 and the fourth slider 23 to move. By arranging the second guide rail 21 parallel to the first guide rail 11, both the motion unit and the mass balancing unit move in the first direction, which helps the mass balancing unit output a reaction force opposite to the force applied by the motion unit on the frame, thereby achieving mass balance compensation for the motion unit and reducing frame vibration.

[0053] In this embodiment, the first driving member and the third driving member are electrically connected to a first control circuit (not shown in the figure), and the first control circuit is used to control the first driving member and the third driving member to synchronously generate driving forces of equal magnitude and opposite directions; the second driving member and the fourth driving member are electrically connected to a second control circuit (not shown in the figure), and the second control circuit is used to control the third driving member and the fourth driving member to synchronously generate driving forces of equal magnitude and opposite directions.

[0054] It should be noted that the first slider 12, the second slider 13, the third slider 22, and the fourth slider 23 are each driven by a different driver, and the movement of each slider is independently controlled by the corresponding driver. By electrically connecting the first and third drivers to the same control circuit, they can always operate synchronously, thereby ensuring that the first slider 12 and the third slider 22 always move synchronously. By controlling the first and third drivers to generate equal and opposite driving forces, the force exerted on the device by the movement of the first slider 12 and the force exerted on the device by the movement of the third slider 22 are equal in magnitude and opposite in direction, and the two forces cancel each other out. Similarly, the second slider 13 and the fourth slider 23 always move synchronously, and the force exerted on the device by the movement of the second slider 13 and the force exerted on the device by the movement of the fourth slider 23 cancel each other out. In this way, the mass balance assembly can compensate for the mass balance of the moving assembly, thereby reducing or even eliminating frame vibration and improving the accuracy and efficiency of the exposure process.

[0055] The aperture motion device of the embodiment of the present invention can simultaneously control the movements of the first and third driving members via a first control circuit, so that when the first slider 12 moves, the third slider 22 can achieve synchronous movement without delay. Correspondingly, the second control circuit simultaneously controls the movements of the second and fourth driving members, so that when the second slider 13 moves, the fourth slider 23 can achieve synchronous movement without delay. Compared to the prior art method of achieving mass balance compensation by acquiring the motion acceleration of the aperture blade 14 in real time, calculating the acceleration force, and controlling the compensation component to perform reverse acceleration, the design of the aperture motion device of the present invention reduces the need for complex control algorithms, has a simple overall structure, and has a faster response speed, which can achieve reaction force balance more promptly, improving the response speed and stability of the system. At the same time, the design and manufacturing costs are low, and it is easier to implement and maintain.

[0056] Optionally, the first driving member, the second driving member, the third driving member and the fourth driving member have the same structure and all include a stator coil and a movable magnet group. The magnetic field generated by the stator coil and the magnetic field generated by the movable magnet group cooperate to generate a force that drives the movable magnet group to move; a first cover plate 15 is connected to the first guide rail 11, and a second cover plate 24 is connected to the second guide rail 21; the stator coil of the first driving member is arranged on the first cover plate 15, and the movable magnet group is arranged on the first slider 12; the stator coil of the second driving member is arranged on the first cover plate 15, and the movable magnet group is arranged on the second slider 13; the stator coil of the third driving member is arranged on the second cover plate 24, and the movable magnet group is arranged on the third slider 22; the stator coil of the fourth driving member is arranged on the second cover plate 24, and the movable magnet group is arranged on the fourth slider 23.

[0057] Taking the first driving member and the first slider 12 as an example, the first slider 12 is slidably connected to the first guide rail 11 to limit the direction of movement of the first slider 12. The first driving member includes a stator coil and a movable magnet group. The stator coil is fixed to the first cover plate 15, and the movable magnet group is installed on the first slider 12 and can slide with the first slider 12. When the stator coil is energized, the excitation magnetic field generated by the stator coil and the magnetic field generated by the movable magnet group can interact to generate a driving force, thereby pushing the first slider 12 to slide along the first guide rail 11. The working principles of the second, third, and fourth driving members are similar to those of the first driving member and will not be repeated here.

[0058] It should be noted that the first, second, third, and fourth drive elements have identical structures. Specifically, the stator coils of each drive element have identical parameters, such as the number of turns, inductance, and resistance, and the area and magnetic field strength of the mover magnet groups are identical. Under the same drive circuit, the interaction forces generated between each stator coil and its corresponding mover magnet group are equal in magnitude.

[0059] To achieve synchronous reverse motion of the first slider 12 and the third slider 22, the first control circuit may include a controller, an inverting amplifier, a first motor driver, and a second motor driver. The controller is configured to generate two identical control signals, one of which controls the first motor driver, and the other, which is converted by the inverting amplifier into an inverted control signal and then controls the second motor driver. The first motor driver of the first control circuit is electrically connected to the stator coil of the first driver, and the second motor driver is electrically connected to the stator coil of the third driver. Specifically, the controller is configured to generate the control signal; the inverting amplifier is configured to output the input control signal in reverse; and the motor driver is configured to control parameters such as the current and voltage applied to the stator coil, thereby controlling the magnitude and direction of the driving force. By providing an inverting amplifier, the control signal and the reverse control signal have the same shape and frequency but opposite polarity. The control signal, through the first motor driver, controls the current to flow through the stator coil of the first driver in a preset direction and magnitude, thereby driving the first slider 12 in the positive or negative direction of the first direction. The reverse control signal, through the second motor driver, controls the current to flow through the stator coil of the third driver in a direction opposite to the preset direction, thereby driving the third slider 22 in a direction opposite to the direction of movement of the first slider 12. This results in the driving forces generated by the first and third drivers being in opposite directions. Because the first and third drivers have the same structure and the control signal and reverse control signal have the same shape and frequency, the driving forces generated by the first and third drivers are equal in magnitude. In this way, the forces generated by the movement of the first and third sliders 12 and 22 can offset each other.

[0060] Similarly, the second control circuit may also include a controller, a reverse amplifier, a first motor driver and a second motor driver. The first motor driver of the second control circuit is electrically connected to the stator coil of the second drive member, and the second motor driver is electrically connected to the stator coil of the fourth drive member to achieve synchronous reverse movement of the second slider 13 and the fourth slider 23. The forces generated by the second slider 13 and the fourth slider 23 can offset each other.

[0061] Optionally, both the first guide rail 11 and the second guide rail 21 are air-bearing guide rails, and the first slider 12, the second slider 13, the third slider 22, and the fourth slider 23 are air-bearing sliders. Specifically, taking the first guide rail 11 and the first slider 12 as an example, the first guide rail 11 is generally elongated and has air holes or slits for injecting gas. The side of the first slider 12 corresponding to the first guide rail 11 may be provided with an air cushion cavity corresponding to the air holes or slits in the first guide rail 11. High-pressure gas can be evenly injected from the air holes or slits on the surface of the first guide rail 11, forming a uniform air film between the first guide rail 11 and the first slider 12. This air film can support the first slider 12 and keep it suspended on the first guide rail 11. Driven by the first driving member, the first slider 12 moves along the first guide rail 11. There is no contact between the first slider 12 and the first guide rail 11, resulting in low resistance. This facilitates high-speed and high-acceleration movement of the first slider 12, while also reducing wear on the first slider 12 and the first guide rail 11, thereby increasing the service life of the device.

[0062] See also Figure 4 and Figure 5 Furthermore, the first guide rail 11 may include a first air-floating plate 111 and a second air-floating plate 112 connected vertically. The first cover plate 15 is connected to the first air-floating plate 111 and spaced parallel to the second air-floating plate 112. The first slider 12 and the second slider 13 are both located between the first cover plate 15 and the second air-floating plate 112. Specifically, the first cover plate 15, the first air-floating plate 111, and the second air-floating plate 112 are connected in a U-shaped structure. A long groove extending in a first direction is formed between the first cover plate 15 and the second air-floating plate 112. The first slider 12 and the second slider 13 can move in the first direction within the long groove. Taking the first slider 12 as an example, the first slider 12 can be a plate-like structure. The first slider 12 and the first air-floating plate 111 and the first slider 12 and the second air-floating plate 112 are both spaced apart and can form an air film. The L-shaped first guide rail 11 can provide support for the first slider 12 in two directions, preventing friction between the first slider 12 and the first guide rail 11 and improving the movement stability of the first slider 12. The stator coil of the first driving member can be arranged on the side of the first cover plate 15 facing the first slider 12, the movable magnet group can be arranged on the side of the first slider 12 facing the first cover plate 15, and the aperture piece 14 can be connected to the side of the first slider 12 away from the first air floating plate 111.

[0063] The second guide rail 21 may include a third air-floating plate 211 and a fourth air-floating plate 212 connected perpendicularly. The second cover plate 24 is connected to the third air-floating plate 211 and is spaced apart and parallel to the fourth air-floating plate 212. The third slider 22 and the fourth slider 23 are both disposed between the second cover plate 24 and the fourth air-floating plate 212. The mounting structure between the third slider 22, the fourth slider 23, and the second guide rail 21 is similar to that of the first slider 12 and the first guide rail 11 described above and will not be further described here.

[0064] More preferably, the first slider 12 and the second slider 13 are each provided with a first groove 311 on the side facing the first cover plate 15, and the movable magnet group of the first driving member and the movable magnet group of the second driving member are respectively embedded in the corresponding first groove 311; the third slider 22 and the fourth slider 23 are each provided with a second groove 312 on the side facing the second cover plate 24, and the movable magnet group of the third driving member and the movable magnet group of the fourth driving member are respectively embedded in the corresponding second groove 312. In this way, the movable magnet group can be prevented from protruding from the surface of the corresponding installed slider, which facilitates the installation of the first slider 12 and the second slider 13 in the long groove formed between the first cover plate 15 and the second air floating plate 112, and the installation of the third slider 22 and the fourth slider 23 in the long groove formed between the second cover plate 24 and the fourth air floating plate 212.

[0065] It should be noted that the movement of each slider is independently controlled by each driver, that is, the stator coil corresponding to each slider must be separately provided. In the illustrated embodiment, taking the first slider 12 and the second slider 13 as an example, the stator coil of the first driver and the stator coil of the second driver are both provided on the first cover plate 15. The two stator coils can be arranged sequentially along the first direction and the length of each is half of the first cover plate 15. To avoid the stator coil of the first driver affecting the movable magnet group on the second slider 13 when energized, the length of the first slider 12 and the second slider 13 along the first direction can be designed to be longer. The groove 31 on the first slider 12 can be set as far away from the second slider 13 as possible, and the aperture piece 14 on the first slider 12 can be set as close to the second slider 13 as possible. The groove 31 on the second slider 13 can be set as far away from the first slider 12 as possible, and the aperture piece 14 on the second slider 13 can be set as close to the first slider 12 as possible. In this way, the movement stroke of the aperture piece 14 on the first slider 12 toward the second slider 13 and the movement stroke of the aperture piece 14 on the second slider 13 toward the first slider 12 can be increased as much as possible, which is conducive to controlling the size of the slit window formed by the two aperture pieces 14, and the first driving member and the second driving member do not interfere with each other.

[0066] Optionally, the mass of the third slider 22 is greater than the sum of the masses of the first slider 12 and the aperture blade 14, and the mass of the fourth slider 23 is greater than the sum of the masses of the second slider 13 and the aperture blade 14. Specifically, taking the first and third sliders 12 and 22 as an example, since the driving force applied by the first driver to the first slider 12 and the driving force applied by the third driver to the third slider 22 are equal in magnitude, during the synchronous motion of the first and third sliders 12 and 22, the equation m1a1 + m3a3 = 0 is obtained. Here, m1 is the sum of the masses of the first slider 12 and the aperture blade 14, a1 is the acceleration of the first slider 12, m3 is the mass of the third slider 22, and a3 is the acceleration of the third slider 22. Integrating both sides of the equation yields m1h1 + m3h3 = 0. Here, h1 is the distance traveled by the first slider 12, and h3 is the distance traveled by the third slider 22. Furthermore, it can be seen that the distance traveled by the first and third sliders 12 and 22 is inversely proportional to their masses. By setting the mass of the third slider 22 to be greater than the combined mass of the first slider 12 and the aperture blade 14, the third slider 22 has greater inertia and a shorter sliding distance, effectively offsetting the force generated by the movement of the first slider 12. Furthermore, increasing the mass of the third slider 22 reduces the system's resonant frequency, minimizing the impact of external disturbances (such as ambient vibration) on the device. Similarly, by setting the mass of the fourth slider 23 to be greater than the combined mass of the second slider 13 and the aperture blade 14, the force generated by the movement of the second slider 13 can be more effectively offset.

[0067] Optionally, the first guide rail 11 is fixedly connected to the second guide rail 21, and a flexible hinge 33 is provided at both ends of the first guide rail 11 and the second guide rail 21 along the first direction. The motion assembly and the mass balance assembly are connected to the external frame via the flexible hinge 33. Specifically, in this embodiment, the first air-floating plate 111 and the third air-floating plate 211 are fixedly connected to each other, thereby fixedly connecting the first guide rail 11 and the second guide rail 21, i.e., connecting the motion assembly and the mass balance assembly. Connecting plates 32 are provided at both ends of the first guide rail 11 along the first direction. The connecting plates 32 are connected to both the first guide rail 11 and the second guide rail 21, serving as a connection base for the flexible hinge 33. The connecting plates 32 also seal the ends of the elongated slot formed between the first cover plate 15 and the second air-floating plate 112, and between the second cover plate 24 and the fourth air-floating plate 212, preventing the slider moving within the slot from escaping from either end. The motion component and the mass balance component are connected to the frame of the exposure device through four flexible hinges 33. The flexible hinges 33 can eliminate the torque generated by the center of gravity offset of the motion component and the mass balance component during the movement of each slider, and attenuate the vibration transmitted from the motion component and the mass balance component to the frame, thereby avoiding affecting the accuracy and efficiency of the exposure process.

[0068] Second, embodiments of the present invention further provide an exposure apparatus comprising the aperture motion device of the aforementioned embodiment. The aperture blades 14 of the aperture motion device are synchronized with the mask stage of the exposure apparatus for scanning and achieving exposure production. Because this exposure apparatus utilizes all of the technical solutions of the aforementioned embodiments, it possesses at least all of the beneficial effects brought about by the technical solutions of the aforementioned embodiments, and a detailed description thereof will not be repeated here.

[0069] Thirdly, please refer to Figure 6 The embodiment of the present invention further provides a scanning motion method of the aperture motion device applied to the above embodiment, the method comprising the following steps:

[0070] S1: The first slider 12 is located at the first end of the first guide rail 11, the second slider 13 is located on the first guide rail 11 and the distance between the second slider 13 and the first slider 12 is the minimum aperture plate 14 spacing, the third slider 22 is located at the second end of the second guide rail 21, the fourth slider 23 is located on the second guide rail 21 and the distance between the second slider 23 and the third slider 22 is the minimum aperture plate 14 spacing, and the scanning movement starts.

[0071] S2: The second control circuit controls the second slider 13 to accelerate along the positive direction of the first direction toward the second end of the first guide rail 11, and the fourth slider 23 to accelerate along the negative direction of the first direction toward the first end of the second guide rail 21 simultaneously. After a first preset time interval, the first control circuit controls the first slider 12 to accelerate along the positive direction of the first direction toward the second end of the first guide rail 11, and the third slider 22 to accelerate along the negative direction of the first direction toward the first end of the second guide rail 21 simultaneously;

[0072] S3: The second slider 13 moves to the second end of the first guide rail 11 and stops. The fourth slider 23 moves to the first end of the second guide rail 21 and stops. The first slider 12 moves to a point where the distance between it and the second slider 13 is equal to the minimum spacing between the aperture blades 14 and stops. The third slider 22 moves to a point where the distance between it and the fourth slider 23 is equal to the minimum spacing between the aperture blades 14 and stops.

[0073] S4: After the second preset time interval, the first control circuit controls the first slider 12 to accelerate along the negative direction of the first direction toward the first end of the first guide rail 11, and the third slider 22 to accelerate along the positive direction of the first direction toward the second end of the second guide rail 21. After the first preset time interval, the second control circuit controls the second slider 13 to accelerate along the negative direction of the first direction toward the first end of the first guide rail 11, and the fourth slider 23 to accelerate along the positive direction of the first direction toward the second end of the second guide rail 21.

[0074] S5: The first slider 12 moves to the first end of the first guide rail 11 and stops. The third slider 22 moves to the second end of the second guide rail 21 and stops. The second slider 13 moves to a distance between the second slider 13 and the first slider 12 equals the minimum aperture blade 14 spacing and stops. The fourth slider 23 moves to a distance between the third slider 22 and the third slider 22 equals the minimum aperture blade 14 spacing and stops.

[0075] S6: Repeat the above steps until the scanning motion is completed.

[0076] Specifically, the first end of the first guide rail 11 and the first end of the second guide rail 21 are located on the same side of the aperture motion device. The direction from the first end to the second end of the first guide rail 11 is defined as the positive direction of the first direction, and the direction from the second end to the first end of the first guide rail 11 is defined as the negative direction of the first direction. The first slider 12 is located on the negative side of the second slider 13, and the third slider 22 is located on the positive side of the fourth slider 23. The minimum aperture spacing can be the distance between the first slider 12 and the second slider 13 when the first slider 12 is located at the first end of the first guide rail 11 and the second slider 13 moves in the negative direction to the limit of its travel. The travel of the second slider 13 is limited by the relative position of the corresponding stator coil and the movable magnet assembly. The minimum aperture spacing can be preset by designing the position of the stator coil and the movable magnet assembly. The first preset time interval can be designed according to the slit window size required in actual exposure production. The first slider 12 and the second slider 13 are accelerated sequentially. By adjusting the first preset time interval, the distance between the two aperture blades 14 during scanning can be controlled, thereby adjusting the size of the slit window. The second preset time interval is the preparation time interval for coordinating the mask stage with related operations. During the scanning process, the third slider 22 always moves synchronously with the first slider 12 in the opposite direction to offset the force generated by the movement of the first slider 12. The fourth slider 23 always moves synchronously with the second slider 13 in the opposite direction to offset the force generated by the movement of the second slider 13, thereby reducing frame vibration and ensuring exposure production. The above steps S1-S5 represent a movement cycle of the aperture blade 14 performing the scanning movement. By repeating steps S1-S5, the movable aperture device performs periodic scanning movement, achieving exposure production of the exposure device.

[0077] Although the present invention is disclosed as above, the protection scope of the present invention is not limited thereto. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the protection scope of the present invention.

Claims

1. A diaphragm motion device, characterized in that: including connected motion components and mass balancing components; The motion assembly includes: A first guide rail (11) extending along a first direction; A motion unit comprising a first slider (12) and a second slider (13) slidably arranged on the first guide rail (11), the first slider (12) and the second slider (13) being spaced apart along the first direction, and a diaphragm (14) being provided on each of the first slider (12) and the second slider (13); A first driving member and a second driving member, for respectively driving the first slider (12) and the second slider (13) to move along the first direction on the first guide rail (11); The mass balance component includes: a second guide rail (21) parallel to the first guide rail (11) and symmetrically arranged with respect to the first guide rail (11) in a second direction, the first direction being perpendicular to the second direction; A mass balancing unit comprises a third slider (22) and a fourth slider (23) slidably arranged on the second guide rail (21), wherein the third slider (22) and the fourth slider (23) are spaced apart along the first direction; a third driving member and a fourth driving member, for respectively driving the third slider (22) and the fourth slider (23) to move along the first direction on the second guide rail (21); The first driving member and the third driving member are electrically connected to a first control circuit, and the first control circuit is used to control the first driving member and the third driving member to synchronously generate driving forces equal in magnitude and opposite in direction; the second driving member and the fourth driving member are electrically connected to a second control circuit, and the second control circuit is used to control the third driving member and the fourth driving member to synchronously generate driving forces equal in magnitude and opposite in direction.

2. The aperture motion device according to claim 1, wherein: The first driving member, the second driving member, the third driving member and the fourth driving member have the same structure and all include a stator coil and a mover magnet group. The magnetic field generated by the stator coil and the magnetic field generated by the mover magnet group cooperate to generate a force that drives the mover magnet group to move. A first cover plate (15) is connected to the first guide rail (11), and a second cover plate (24) is connected to the second guide rail (21); The stator coil of the first driving member is arranged on the first cover plate (15), and the movable magnet group is arranged on the first slider (12); the stator coil of the second driving member is arranged on the first cover plate (15), and the movable magnet group is arranged on the second slider (13); the stator coil of the third driving member is arranged on the second cover plate (24), and the movable magnet group is arranged on the third slider (22); the stator coil of the fourth driving member is arranged on the second cover plate (24), and the movable magnet group is arranged on the fourth slider (23).

3. The aperture movement device according to claim 2, characterized in that The first control circuit and the second control circuit have the same structure and both include a controller, an inverting amplifier, a first motor driver, and a second motor driver. The controller is used to generate two identical control signals, one of which controls the operation of the first motor driver, and the other of which is converted by the inverting amplifier into an inverted control signal and then controls the operation of the second motor driver. The first motor driver of the first control circuit is electrically connected to the stator coil of the first driving member, and the second motor driver is electrically connected to the stator coil of the third driving member; The first motor driver of the second control circuit is electrically connected to the stator coil of the second driving member, and the second motor driver is electrically connected to the stator coil of the fourth driving member.

4. The aperture motion device according to claim 2, wherein: The first guide rail (11) and the second guide rail (21) are both air-floating guide rails, and the first slider (12), the second slider (13), the third slider (22) and the fourth slider (23) are all air-floating sliders.

5. The aperture movement device according to claim 4, characterized in that The first guide rail (11) comprises a first air-floating plate (111) and a second air-floating plate (112) connected vertically, the first cover plate (15) is connected to the first air-floating plate (111) and is arranged parallel to and spaced from the second air-floating plate (112), and the first slider (12) and the second slider (13) are both arranged between the first cover plate (15) and the second air-floating plate (112); The second guide rail (21) comprises a third air-floating plate (211) and a fourth air-floating plate (212) connected vertically, the second cover plate (24) is connected to the third air-floating plate (211) and is arranged parallel to and spaced from the fourth air-floating plate (212), and the third slider (22) and the fourth slider (23) are both arranged between the second cover plate (24) and the fourth air-floating plate (212).

6. The aperture movement device according to claim 5, characterized in that A first groove (311) is provided on one side of the first slider (12) and the second slider (13) facing the first cover plate (15), and the movable magnet group of the first driving member and the movable magnet group of the second driving member are respectively embedded in the corresponding first groove (311); The third slider (22) and the fourth slider (23) are both provided with a second groove (312) on one side facing the second cover plate (24), and the movable magnet group of the third driving member and the movable magnet group of the fourth driving member are respectively embedded in the corresponding second groove (312).

7. The aperture motion device according to claim 1, wherein: The mass of the third slider (22) is greater than the sum of the masses of the first slider (12) and the aperture plate (14), and the mass of the fourth slider (23) is greater than the sum of the masses of the second slider (13) and the aperture plate (14).

8. The aperture motion device according to claim 1, wherein: The first guide rail (11) is fixedly connected to the second guide rail (21), and a flexible hinge (33) is provided at both ends of the first guide rail (11) along the first direction and at both ends of the second guide rail (21) along the first direction, and the motion component and the mass balancing component are connected to the external frame through the flexible hinge (33).

9. An exposure device, characterized in that: Comprising the aperture movement device according to any one of claims 1-8.

10. A scanning motion method applied to the aperture motion device according to any one of claims 1 to 8, characterized in that: The following steps are involved: The first slider is located at the first end of the first guide rail, the second slider is located on the first guide rail and the distance between the second slider and the first slider is the minimum aperture blade spacing, the third slider is located at the second end of the second guide rail, and the fourth slider is located on the second guide rail and the distance between the fourth slider and the third slider is the minimum aperture blade spacing, and the scanning motion begins; The second control circuit controls the second slider to accelerate along the positive direction of the first direction toward the second end of the first guide rail, and the fourth slider to accelerate along the negative direction of the first direction toward the first end of the second guide rail simultaneously. After a first preset time interval, the first control circuit controls the first slider to accelerate along the positive direction of the first direction toward the second end of the first guide rail, and the third slider to accelerate along the negative direction of the first direction toward the first end of the second guide rail simultaneously. The second slider moves to the second end of the first guide rail and stops moving, the fourth slider moves to the first end of the second guide rail and stops moving, the first slider moves to the minimum aperture blade spacing when the distance between it and the second slider is stopped moving, and the third slider moves to the minimum aperture blade spacing when the distance between it and the fourth slider is stopped moving. After a second preset time interval, the first control circuit controls the first slider to accelerate along the negative direction of the first direction toward the first end of the first guide rail, and the third slider to accelerate along the positive direction of the first direction toward the second end of the second guide rail simultaneously. After a first preset time interval, the second control circuit controls the second slider to accelerate along the negative direction of the first direction toward the first end of the first guide rail, and the fourth slider to accelerate along the positive direction of the first direction toward the second end of the second guide rail simultaneously. The first slider moves to the first end of the first guide rail and stops, the third slider moves to the second end of the second guide rail and stops, the second slider moves to the minimum aperture blade spacing when the distance between the second slider and the first slider reaches the minimum aperture blade spacing, and the fourth slider moves to the minimum aperture blade spacing when the distance between the fourth slider and the third slider reaches the minimum aperture blade spacing. Repeat the above steps until the scanning motion is completed.

Images