A sealed reversing valve
By using a retractable elastic protective tube in the directional control valve in conjunction with the mounting plate and mounting ring, and combining it with the guide ring and limit groove design, the problem of insufficient sealing performance of traditional directional control valves in the semiconductor industry is solved, achieving good sealing effect and production safety.
Patent Information
- Application Number
- CN202411744087.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-30
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2044-11-30
AI Technical Summary
Traditional directional valves are unable to meet the stringent sealing requirements for highly toxic gases in the semiconductor industry, leading to gas leaks and production safety issues.
The valve stem is designed to move stably and effectively seal the valve cavity by using a retractable elastic protective tube that works in conjunction with the mounting plate and mounting ring, along with a guide ring and limit groove design. This allows the valve to adapt to temperature changes and pressure fluctuations through its flexibility.
It improves sealing performance, prevents gas leakage, extends valve life, ensures production safety, and reduces maintenance frequency, meeting the high-frequency and high-precision requirements of semiconductor manufacturing.
Smart Images

Figure CN119594209B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of valves, in particular to a sealed reversing valve. BACKGROUND
[0002] In the semiconductor industry, the application of reversing valves is not only extensive but also crucial. Reversing valves can change the flow path of fluids (gases or liquids) to achieve switching between different channels, thereby ensuring the stability and consistency of gas supply.
[0003] However, since the special gases involved in the semiconductor industry are highly toxic gases, there are extremely stringent requirements for sealing performance, and traditional reversing valves cannot meet the above sealing requirements. SUMMARY
[0004] In order to overcome the shortcomings of the prior art, the present application provides a sealed reversing valve with good sealing performance.
[0005] The sealed reversing valve provided by the present application adopts the following technical scheme:
[0006] A sealed reversing valve, comprising a valve seat, a valve cavity opened in the valve seat, a valve rod slidably arranged in the valve cavity along its own axial direction, an execution assembly for driving the valve rod to slide, a fluid inlet, a first fluid outlet and a second fluid outlet are opened on the valve seat and communicate with the valve cavity, the execution assembly comprises a driving shaft inserted into the valve cavity, the driving shaft is coaxially connected with the valve rod, an installation disc is arranged on the driving shaft, the installation disc is located in the valve cavity, an installation ring is arranged in the valve cavity, a telescopic elastic protective tube is sleeved on the driving shaft, one end of the elastic protective tube is sleeved on the installation disc, and the other end of the elastic protective tube is inserted into the installation ring.
[0007] By adopting the above technical scheme, the elastic protective tube can cooperate with the installation disc and the installation ring to effectively seal the valve cavity and prevent the gas in the valve cavity from leaking out. At the same time, the telescopic elastic protective tube not only does not interfere with the movement of the driving shaft, but also can effectively adapt to temperature changes and pressure fluctuations through its own telescopic property, so as to continuously maintain good sealing performance during the use of the reversing valve.
[0008] Preferably, the elastic protective tube comprises a corrugated tube body, a first connecting ring arranged at one end of the tube body, the first connecting ring is sleeved on the installation disc, a first limiting ring is arranged around the installation disc, the first limiting ring abuts against the outer end wall of the tube body, a first limiting groove is formed between the first limiting ring and the installation disc, and the first connecting ring is embedded in the first limiting groove.
[0009] By adopting the technical scheme, not only the connection strength between the elastic protection pipe and the mounting disc can be improved, but also the contact area between the mounting disc and the elastic protection pipe is increased, so that the elastic protection pipe is prevented from being damaged under the extrusion of the mounting disc; meanwhile, the first connecting ring is embedded in the first limiting groove, so that the elastic protection pipe is prevented from being twisted during the stretching and contracting process, thereby affecting the sealing effect.
[0010] Preferably, the other end of the pipe body is provided with a second connecting ring, the second connecting ring is inserted into the mounting ring, a second limiting ring is annularly arranged in the mounting ring, the second limiting ring abuts against the inner end wall of the pipe body, a second limiting groove is formed between the second limiting ring and the mounting ring, and the second connecting ring is embedded in the second limiting groove.
[0011] By adopting the technical scheme, not only the connection strength between the elastic protection pipe and the mounting ring can be improved, but also the contact area between the mounting ring and the elastic protection pipe is increased, so that the elastic protection pipe is prevented from being damaged under the extrusion of the mounting ring; meanwhile, the second connecting ring is embedded in the second limiting groove, which can cooperate with the first limiting groove, so that the elastic protection pipe is prevented from being twisted during the stretching and contracting process, thereby affecting the sealing effect.
[0012] Preferably, the sealing type reversing valve further comprises a valve core which is inlaid in the valve cavity, a valve groove which is opened in the valve core, and a valve rod which is slidably inserted into the valve groove, wherein a guide ring is sleeved on the valve rod, an outer wall of the guide ring is provided with at least one first guide plane which extends along the axial direction of the valve groove, and the two sides of the first guide plane are respectively provided with first abutting ends which abut against the groove wall of the valve groove.
[0013] By adopting the technical scheme, the valve rod can keep relatively stable linear motion between the valve groove under the action of the first guide plane, so that the valve rod is prevented from shaking or deviating during the motion process, thereby improving the sealing performance and service life of the valve.
[0014] Preferably, an outer wall of one end of the driving shaft close to the valve rod is provided with at least one second guide plane which extends along the axial direction of the valve groove, the second guide plane is arranged at an angle with the first guide plane, and the two sides of the second guide plane are respectively provided with second abutting ends which abut against the groove wall of the valve groove.
[0015] By adopting the technical scheme, the valve rod can keep relatively stable linear motion between the valve groove under the cooperation of the first guide plane and the second guide plane, so that the valve rod is prevented from shaking or deviating during the motion process, thereby improving the sealing performance and service life of the valve.
[0016] Preferably, the outer diameter of the guide ring gradually increases or decreases along the axial direction of the valve rod, the inner wall of the valve groove is provided with a plurality of third limiting grooves around its own circumference, each of the third limiting grooves is provided with a telescopic limiting block, the limiting block is provided with a limiting surface close to the valve rod, and the limiting surface is obliquely arranged and matched with the outer wall of the guide ring.
[0017] By adopting the above technical scheme, the valve rod can keep relatively stable linear motion under the cooperation of the plurality of limiting blocks, and further avoids shaking or deviation of the valve rod during movement. Meanwhile, the plurality of limiting blocks can also be supported on the circumferential side of the guide ring to improve the motion stability of the valve rod.
[0018] Preferably, the valve cavity includes a first chamber for accommodating the valve core, a second chamber located at one end of the first chamber, and a third chamber located at the other end of the first chamber. The elastic protective tube is arranged in the second chamber. The valve groove has a first slot for inserting the drive shaft at one end close to the second chamber. The valve groove has a second slot communicating with the third chamber at one end close to the third chamber. The fluid inlet and the first fluid outlet both communicate with the third chamber. The second fluid outlet communicates with the valve groove. The valve rod has a rod head penetrating out of the second slot. The rod head can be shielded on the second slot or separated from the second slot and shielded on the first fluid outlet during the sliding stroke of the valve rod.
[0019] By adopting the above technical scheme, the rod head can quickly and accurately switch the flow direction of the fluid between the first fluid outlet and the second fluid outlet during the movement of the valve rod.
[0020] Preferably, a first communication port is arranged on the groove wall of the valve groove, the second fluid outlet communicates with the first communication port, and a second communication port is arranged on the valve rod along the radial direction thereof. When the rod head shields the first fluid outlet, the second communication port is in positive butt joint with the first communication port.
[0021] By adopting the above technical scheme, the second communication port can only be connected with the second fluid outlet when the first fluid outlet is shielded, thereby avoiding affecting the flow of gas due to the simultaneous connection of the first fluid outlet and the second fluid outlet.
[0022] Preferably, a butt joint groove is further arranged on the valve rod, the butt joint groove is coaxially arranged around the circumferential side of the second communication port, a telescopic butt joint pipe is arranged in the butt joint groove, and when the second communication port is in positive butt joint with the first communication port, the butt joint pipe is inserted into the first communication port.
[0023] By adopting the above technical solution, the gas can directly enter the first connecting port through the connecting pipe, thus preventing the gas from escaping outward when flowing between the second connecting port and the first connecting port.
[0024] Preferably, the actuation assembly includes an actuation seat, an actuation cavity formed within the actuation seat, a piston slidably disposed within the actuation cavity along the axial direction of the actuation cavity, and an air inlet formed on the actuation seat. The axial direction of the actuation cavity is consistent with the axial direction of the valve cavity. The end of the drive shaft away from the valve stem is coaxially connected to the piston. The actuation cavity includes a first cavity and a second cavity located on both sides of the piston. An elastic element is disposed in the first cavity, and the second cavity communicates with the air inlet.
[0025] By adopting the above technical solution, the piston can reciprocate under the cooperation of the gas inlet and the spring to drive the valve stem to move. It can respond to the control signal quickly and accurately and realize the instantaneous switching of gas flow direction.
[0026] In summary, the present invention has at least one of the following beneficial technical effects:
[0027] 1. The flexible protective tube can cooperate with the mounting plate and mounting ring to achieve effective sealing of the valve cavity and prevent gas from leaking out of the valve cavity;
[0028] 2. The retractable elastic protective tube not only does not interfere with the movement of the drive shaft, but it can also effectively adapt to temperature changes and pressure fluctuations through its own elasticity, so as to maintain good sealing performance during the use of the directional valve. Attached Figure Description
[0029] Figure 1 This is a three-dimensional structural schematic diagram of the sealed reversing valve in the embodiments of this application;
[0030] Figure 2 This is a left view of the sealed reversing valve in the embodiments of this application;
[0031] Figure 3 yes Figure 2 Schematic diagram of section AA in the diagram;
[0032] Figure 4 yes Figure 2 Schematic diagram of the BB section in the diagram;
[0033] Figure 5 yes Figure 3 Enlarged diagram of point C in the diagram;
[0034] Figure 6 yes Figure 3 Enlarged diagram of point D in the diagram.
[0035] Marked in the attached diagram:
[0036] 1. valve seat;
[0037] 2. valve chamber; 2a, first chamber; 2b, second chamber; 2c, third chamber;
[0038] 3. valve stem; 3a, stem head;
[0039] 4. actuating assembly; 4a, drive shaft; 4a1, second guide plane; 4a2, second abutting end; 4b, actuating seat; 4c, actuating chamber; 4c1, first cavity; 4c2, second cavity; 4d, piston; 4e, gas inlet; 4f, elastic member;
[0040] 5. fluid inlet; 6, first fluid outlet; 7, second fluid outlet; 8, mounting disc; 9, mounting ring;
[0041] 10. elastic protection tube; 10a, tube body; 10b, first connecting ring; 10c, second connecting ring;
[0042] 11. first limiting ring; 12, first limiting groove; 13, second limiting ring; 14, second limiting groove;
[0043] 15. valve core; 16, valve groove; 16a, first notch; 16b, second notch; 16c, first communication port;
[0044] 17. guide ring; 17a, first guide plane; 17b, first abutting end;
[0045] 18. third limiting groove; 19, limiting block; 19a, limiting surface;
[0046] 20. second communication port; 21, butt joint groove; 22, butt joint tube; 23, first spring; 24, second spring. DETAILED DESCRIPTION
[0047] The following will be described in detail in combination with the accompanying drawings. Figures 1-6 The present application will be further described in detail.
[0048] In the description of the present application, it should be understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.
[0049] Referring to Figures 1-6As shown in the figure, a sealed reversing valve is shown, including a valve seat 1 arranged vertically, a valve cavity 2 opened in the valve seat 1, a valve rod 3 arranged in the valve cavity 2 and slidable along its own axis, an execution assembly 4 for driving the valve rod 3 to slide, the execution assembly 4 being located at the upper end of the valve seat 1, the valve seat 1 being provided with a fluid inlet 5, a first fluid outlet 6 and a second fluid outlet 7 which are in communication with the valve cavity 2, the fluid inlet 5 being located at one side of the valve seat 1, and the first fluid outlet 6 and the second fluid outlet 7 being located at the other side of the valve seat 1.
[0050] In combination Figure 3 As shown in the figure, the execution assembly 4 includes a drive shaft 4a inserted into the valve cavity 2 from top to bottom, the drive shaft 4a is coaxially connected with the valve rod 3, the drive shaft 4a is provided with a mounting disc 8, the mounting disc 8 is located in the valve cavity 2, the valve cavity 2 is inscribed with a mounting ring 9, the mounting disc 8 and the mounting ring 9 are arranged in an upper and lower manner, the drive shaft 4a is sleeved with an elastic protective pipe 10 which is retractable, one end of the elastic protective pipe 10 is sleeved on the mounting disc 8, and the other end is inserted into the mounting ring 9. Among them, the elastic protective pipe 10 is a bellows.
[0051] In this way, the elastic protective pipe 10 as a barrier of the valve cavity 2 can cooperate with the mounting disc 8 and the mounting ring 9 to achieve effective sealing of the valve cavity 2, so as to avoid the gas in the valve cavity 2 from leaking outwards; at the same time, the retractable elastic protective pipe 10 not only will not interfere with the movement of the drive shaft 4a, but also can effectively adapt to temperature changes and pressure fluctuations through its own retractability, so as to continuously maintain good sealing performance in the use process of the reversing valve. In the semiconductor industry, when processing toxic, harmful or valuable gas, the excellent sealing ability of the bellows can prevent environmental pollution, product quality decline and economic loss caused by gas leakage, and ensure the safety and reliability of the production process; at the same time, the setting of the elastic protective pipe 10 can prolong the service life of the valve, in the high-frequency and high-precision production environment of semiconductor manufacturing, the frequency of valve maintenance and replacement is reduced, and the production cost and the risk of production interruption are reduced.
[0052] In the embodiment, the elastic protective pipe 10 includes a bellows-shaped pipe body 10a, a first connecting ring 10b arranged at the upper end of the pipe body 10a, and a second connecting ring 10c arranged at the lower end of the pipe body 10a, the first connecting ring 10b is sleeved on the mounting disc 8, the mounting disc 8 is annularly provided with a first limiting ring 11, the first limiting ring 11 abuts against the outer end wall of the pipe body 10a, a first limiting groove 12 is formed between the first limiting ring 11 and the mounting disc 8, and the first connecting ring 10b is embedded in the first limiting groove 12; the second connecting ring 10c is inserted into the mounting ring 9, the mounting ring 9 is annularly provided with a second limiting ring 13, the second limiting ring 13 abuts against the inner end wall of the pipe body 10a, a second limiting groove 14 is formed between the second limiting ring 13 and the mounting ring 9, and the second connecting ring 10c is embedded in the second limiting groove 14.
[0053] The first connecting ring 10b can be embedded in the first limiting groove 12 and abut against the first limiting ring 11 and the mounting plate 8. This not only improves the connection strength between the elastic protective tube 10 and the mounting plate 8, but also increases the contact area between the mounting plate 8 and the elastic protective tube 10, preventing the elastic protective tube 10 from being damaged under the pressure of the mounting plate 8. The second connecting ring 10c can be embedded in the second limiting groove 14 and abut against the second limiting ring 13 and the mounting ring 9. This not only improves the connection strength between the elastic protective tube 10 and the mounting ring 9, but also increases the contact area between the mounting ring 9 and the elastic protective tube 10, preventing the elastic protective tube 10 from being damaged under the pressure of the mounting ring 9. At the same time, embedding the first connecting ring 10b and the second connecting ring 10c in the first limiting groove 12 and the second limiting groove 14 respectively can also prevent the elastic protective tube 10 from twisting during the expansion and contraction process, thus affecting its sealing effect.
[0054] Horizontal abutment rings are provided at the ends of the first limiting ring 11 and the second limiting ring 13. The horizontal abutment rings can further increase the contact area between the first limiting ring 11 and the second limiting ring 13 and the pipe body 10a, and can also assist in pushing the elastic protective tube 10 to extend and retract.
[0055] In this embodiment, combined with Figures 3-4 As shown, the sealed reversing valve also includes a valve core 15 coaxially connected in the valve cavity 2, a valve groove 16 opened in the valve core 15, a valve stem 3 slidably passing through the valve groove 16, a guide ring 17 sleeved on the valve stem 3, and first guide planes 17a respectively provided on the opposite side walls of the guide ring 17. Both first guide planes 17a extend along the axial direction of the valve groove 16, and each first guide plane 17a has a first contact end 17b on both sides. All four first contact ends 17b abut against the groove wall of the valve groove 16.
[0056] When the valve stem 3 moves, it can maintain a relatively stable linear motion with the valve groove 16 under the action of the first guide plane 17a and the two first contact ends 17b, which prevents the valve stem 3 from shaking or deviating during the movement, thereby improving the sealing performance and service life of the valve.
[0057] Furthermore, two second guide planes 4a1 are provided on the outer wall of the drive shaft 4a near the valve stem 3. The two second guide planes 4a1 are arranged opposite each other and both extend along the axial direction of the valve groove 16. Each of the two guide planes 4a1 has a second abutment end 4a2 on both sides, and all four second abutment ends 4a2 abut against the groove wall of the valve groove 16. Among them, the two second guide planes 4a1 correspond one-to-one with the two first guide planes 17a, and the corresponding second guide planes 4a1 are arranged at an angle to the first guide planes 17a.
[0058] When the drive shaft 4a moves, it can keep a relatively stable linear motion between the valve groove 16 under the action of the second guide plane 4a1 and the two second contact ends 4a2, avoiding its influence on the movement of the valve rod 3; at the same time, the valve rod 3 can also achieve further accurate guidance under the misalignment of the first guide plane 17a and the second guide plane 4a1, completely avoiding the shaking or deviation of the valve rod 3 during movement. In semiconductor manufacturing, this helps to maintain the stability of gas supply and the precise control of process parameters. For example, in the thin film deposition process, stable gas flow and pressure are crucial for the quality and uniformity of the deposited layer.
[0059] In this embodiment, in combination with Figure 3 and Figure 5 As shown, the outer diameter of the guide ring 17 gradually decreases along the vertical downward direction, and the inner wall of the valve groove 16 is provided with four third limiting grooves 18 around its own circumference, each of which is provided with a first spring 23 and a limiting block 19 mounted on the first spring 23, the side of the limiting block 19 close to the valve rod 3 has a limiting surface 19a, which is inclined along the vertical direction towards the direction close to the guide ring 17, which can match and fit with the outer wall of the guide ring 17. When the valve rod 3 moves downward, the guide ring 17 can gradually press the plurality of limiting blocks 19 into the third limiting grooves 18 through its inclined outer wall, and the plurality of limiting blocks 19 can realize the support and guidance of the guide ring 17 during retraction, to further improve the movement stability and reliability of the valve rod 3; when the valve rod 3 moves upward, the guide ring 17 gradually separates from the plurality of limiting blocks 19, and the plurality of limiting blocks 19 extend and gradually support on the guide ring 17 to limit the valve rod 3.
[0060] In this embodiment, in combination with Figure 3As shown, the valve cavity 2 comprises a first chamber 2a for accommodating the valve core 15, a second chamber 2b located at the upper end of the first chamber 2a, a third chamber 2c located at the lower end of the first chamber 2a, the elastic sleeve 10 is arranged in the second chamber 2b, the upper end of the valve groove 16 has a first slot 16a for inserting the driving shaft 4a, the lower end of the valve groove 16 has a second slot 16b in communication with the third chamber 2c, the fluid inlet 5 is communicated to the side of the third chamber 2c, the first fluid outlet 6 is communicated to the lower end of the third chamber 2c, and the second fluid outlet 7 is communicated to the side of the valve groove 16. The valve rod 3 has a rod head 3a penetrating out of the second slot 16b, and the rod head 3a is square-shaped and can be respectively shielded on the second slot 16b or shielded on the first fluid outlet 6 in the sliding stroke of the valve rod 3. When the rod head 3a is shielded on the second slot 16b, the fluid can flow in the direction from the fluid inlet 5 to the first fluid outlet 6; when the rod head 3a is shielded on the first fluid outlet 6, the fluid can flow in the direction from the fluid inlet 5 to the second slot 16b, and then enter the second fluid outlet 7 through the valve groove 16.
[0061] In the embodiment, a first communication port 16c is formed on the groove wall of the valve groove 16, the second fluid outlet 7 is communicated with the first communication port 16c, and a second communication port 20 is formed on the valve rod 3 and penetrates the valve rod 3 in the radial direction. When the rod head 3a is shielded on the first fluid outlet 6, the second communication port 20 is in positive butt joint with the first communication port 16c. In this way, the valve rod 3 can realize the synchronous switching of the first fluid outlet 6 and the second fluid outlet 7 through the second communication port 20 and the rod head 3a in a single stroke, and the switching efficiency is high; at the same time, the second communication port 20 can be connected with the second fluid outlet 7 only when the first fluid outlet 6 is shielded, so as to avoid affecting the flow of the gas due to the simultaneous connection of the first fluid outlet 6 and the second fluid outlet 7.
[0062] In the embodiment, in combination with Figure 3 and Figure 6 As shown, the valve rod 3 is further provided with a butt joint groove 21 coaxially surrounding the circumferential side of the second communication port 20, a second spring 24 is arranged in the butt joint groove 21, a butt joint pipe 22 is mounted on the second spring 24, and the butt joint pipe 22 is coaxially arranged with the butt joint groove 21. When the second communication port 20 is in positive butt joint with the first communication port 16c, the butt joint pipe 22 is inserted into the first communication port 16c; and when the second communication port 20 is relatively misaligned with the first communication port 16c, the butt joint pipe 22 is pressed into the butt joint groove 21. When the second communication port 20 is in positive butt joint with the first communication port 16c, the gas can directly enter the inside of the first communication port 16c through the butt joint pipe 22, so as to avoid the outward escape of the gas when flowing between the second communication port 20 and the first communication port 16c.
[0063] In the embodiment, in combination with Figure 3As shown, the execution assembly 4 includes an execution seat 4b, an execution cavity 4c opened in the execution seat 4b, a piston 4d slidably arranged in the execution cavity 4c along the axial direction of the execution cavity 4c, a gas inlet 4e opened on the execution seat 4b, the axial direction of the execution cavity 4c is consistent with the axial direction of the valve cavity 2, the driving shaft 4a is coaxially connected with the piston 4d at the end away from the valve rod 3, the execution cavity 4c includes a first cavity 4c1 and a second cavity 4c2 located at the upper and lower sides of the piston 4d respectively, the first cavity 4c1 is provided with an elastic element 4f, and the second cavity 4c2 is in communication with the gas inlet 4e. The elastic element 4f is also a spring. The compressed air can be input into the second cavity 4c2 from the gas inlet 4e, so that the piston 4d can realize reciprocating motion under the cooperation of the compressed air and the spring, so as to drive the valve rod 3 to move, which can quickly and accurately respond to the control signal, realize the instantaneous switching of the gas flow direction, and is suitable for the semiconductor manufacturing process which has very high requirements on the switching speed and accuracy of the gas. For example, in the chip etching process, the timely and accurate supply of different etching gases can be ensured.
[0064] Specifically, during the ventilation, the gas acts on the piston 4d, and the piston 4d drives the valve rod 3 to move upwards; after stopping the ventilation, the elastic potential energy of the spring is released, and the valve rod 3 is pushed to move downwards.
[0065] In the embodiment, the valve rod 3 is arranged in the valve seat 1, the execution assembly 4 is installed above the valve seat 1 and the driving shaft 4a is directly inserted into the valve cavity 2, so that the structure of the whole reversing valve is more compact, the volume is smaller, and the weight is lighter. Such compact structure not only saves the installation space, but also is easier to layout and install in the complex pipeline system. In the places such as semiconductor factories which have limited space and dense pipelines, the installation position requirements can be more flexibly adapted, the overall integration and aesthetic degree of the system are improved, and the subsequent maintenance and repair work is also facilitated.
[0066] The implementation principle of the sealed reversing valve in the embodiment of the application is as follows:
[0067] The compressed air is input into the second cavity 4c2 from the gas inlet 4e, the compressed air drives the piston 4d to move upwards, the piston 4d drives the valve rod 3 to move upwards, the valve rod 3 keeps linear motion in the valve groove 16 by the first guide plane 17a and the second guide plane 4a1 during the upward movement, the plurality of limiting blocks 19 extend and gradually bear on the circumferential side of the guide ring 17, the valve rod 3 stops moving when the rod head 3a blocks the second slot 16b, and at this time the fluid can flow along the direction from the fluid inlet 5 to the first fluid outlet 6;
[0068] After the gas supply is stopped, the elastic member 4f pushes the piston 4d to move downward, the piston 4d drives the valve stem 3 to move downward, in the process of moving downward, the valve stem 3 keeps linear motion in the valve groove 16 through the first guide plane 17a and the second guide plane 4a1, the guide ring 17 extrudes the plurality of limiting blocks 19 and presses the plurality of limiting blocks 19 into the third limiting groove 18, when the stem head 3a blocks the first fluid outlet 6, the valve stem 3 stops moving, at this time, the second communication port 20 is butt jointed with the first communication port 16c, and the fluid can flow along the direction from the fluid inlet 5 to the second fluid outlet 7.
[0069] The embodiments of the specific implementation are the preferred embodiments of the application, not limited to the protection scope of the application, so: any equivalent changes made according to the structure, shape, principle of the application should be covered within the protection scope of the application.
Claims
1. A sealed reversing valve comprising a valve seat (1), a valve chamber (2) made in said valve seat (1), a valve stem (3) slidable in its own axial direction and arranged in said valve chamber (2), an actuating assembly (4) for driving the sliding of said valve stem (3), said valve seat (1) being provided with a fluid inlet (5), a first fluid outlet (6) and a second fluid outlet (7) communicating with said valve chamber (2), characterized in that: The execution assembly (4) comprises a driving shaft (4a) inserted into the valve cavity (2), the driving shaft (4a) is coaxially connected with the valve rod (3), the driving shaft (4a) is provided with a mounting disc (8), the mounting disc (8) is located in the valve cavity (2), the valve cavity (2) is inscribed with a mounting ring (9), the driving shaft (4a) is sleeved with an elastic protective tube (10) which can be stretched and contracted, one end of the elastic protective tube (10) is sleeved on the mounting disc (8), and the other end is inserted into the mounting ring (9); The sealing reversing valve further comprises a valve core (15) inscribed in the valve cavity (2) and a valve groove (16) opened in the valve core (15), and the valve rod (3) is slidably arranged in the valve groove (16); The valve cavity (2) comprises a first cavity (2a) for accommodating the valve core (15), a second cavity (2b) located at one end of the first cavity (2a), and a third cavity (2c) located at the other end of the first cavity (2a), the elastic protective tube (10) is arranged in the second cavity (2b), one end of the valve groove (16) close to the second cavity (2b) has a first slot (16a) for inserting the driving shaft (4a), one end of the valve groove (16) close to the third cavity (2c) has a second slot (16b) in communication with the third cavity (2c), the fluid inlet (5) and the first fluid outlet (6) are in communication with the third cavity (2c), the second fluid outlet (7) is in communication with the valve groove (16), the valve rod (3) has a rod head (3a) penetrating out of the second slot (16b), and the rod head (3a) can be shielded on the second slot (16b) or separated from the second slot (16b) and shielded on the first fluid outlet (6) in the sliding stroke of the valve rod (3); A first communication port (16c) is opened in the groove wall of the valve groove (16), the second fluid outlet (7) is in communication with the first communication port (16c), and a second communication port (20) is radially penetrated in the valve rod (3), when the rod head (3a) is shielded on the first fluid outlet (6), the second communication port (20) is in positive butt joint with the first communication port (16c); The valve rod (3) is further provided with a butt joint groove (21), the butt joint groove (21) is coaxially surrounded on the side of the second communication port (20), the butt joint groove (21) is provided with a butt joint tube (22) which can be stretched and contracted, when the second communication port (20) is in positive butt joint with the first communication port (16c), the butt joint tube (22) is inserted into the first communication port (16c).
2. A sealed directional control valve according to claim 1, characterised in that: The elastic protection pipe (10) comprises a corrugated pipe body (10a), a first connecting ring (10b) arranged at one end of the pipe body (10a), the first connecting ring (10b) is sleeved on the mounting disc (8), a first limiting ring (11) is arranged around the mounting disc (8), the first limiting ring (11) abuts against the outer end wall of the pipe body (10a), a first limiting groove (12) is formed between the first limiting ring (11) and the mounting disc (8), and the first connecting ring (10b) is embedded in the first limiting groove (12).
3. A sealed directional control valve according to claim 2, characterised in that: The other end of the pipe body (10a) is provided with a second connecting ring (10c), the second connecting ring (10c) is inserted into the mounting ring (9), a second limiting ring (13) is arranged around the mounting ring (9), the second limiting ring (13) abuts against the inner end wall of the pipe body (10a), a second limiting groove (14) is formed between the second limiting ring (13) and the mounting ring (9), and the second connecting ring (10c) is embedded in the second limiting groove (14).
4. A sealed directional valve according to any one of claims 1-3, characterized in that: The guide ring (17) is sleeved on the valve rod (3), the outer wall of the guide ring (17) is provided with at least one first guide plane (17a), the first guide plane (17a) extends along the axial direction of the valve groove (16), and the two sides of the first guide plane (17a) are respectively provided with first abutting ends (17b), and the two first abutting ends (17b) abut against the groove wall of the valve groove (16).
5. A sealed directional control valve according to claim 4, characterised in that: The outer wall of one end of the driving shaft (4a) close to the valve rod (3) is provided with at least one second guide plane (4a1), the second guide plane (4a1) extends along the axial direction of the valve groove (16), the second guide plane (4a1) is arranged at an angle with the first guide plane (17a), the two sides of the second guide plane (4a1) are respectively provided with second abutting ends (4a2), and the two second abutting ends (4a2) abut against the groove wall of the valve groove (16).
6. A sealed directional control valve according to claim 4, characterised in that: The outer diameter of the guide ring (17) gradually increases or decreases along the axial direction of the valve rod (3), a plurality of third limiting grooves (18) are arranged around the inner wall of the valve groove (16) in the circumferential direction, a telescopic limiting block (19) is arranged in each third limiting groove (18), the limiting block (19) is provided with a limiting surface (19a) on the side close to the valve rod (3), the limiting surface (19a) is arranged at an angle and matches the outer wall of the guide ring (17).
7. A sealed directional control valve according to any one of claims 1-3, characterized in that: The execution assembly (4) comprises an execution seat (4b), an execution cavity (4c) formed in the execution seat (4b), a piston (4d) slidably arranged in the execution cavity (4c) along the axial direction of the execution cavity (4c), and a gas inlet (4e) formed on the execution seat (4b), the axial direction of the execution cavity (4c) is consistent with the axial direction of the valve cavity (2), one end of the drive shaft (4a) away from the valve rod (3) is coaxially connected with the piston (4d), the execution cavity (4c) comprises a first cavity (4c1) and a second cavity (4c2) located on the two sides of the piston (4d) respectively, an elastic member (4f) is arranged in the first cavity (4c1), and the second cavity (4c2) is in communication with the gas inlet (4e).
Citation Information
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