Capacitance film thickness measuring device

Abstract

The invention provides a capacitance film thickness measuring device, and relates to the technical field of thickness meters, the capacitance film thickness measuring device comprises a test bench, the top surface of the test bench is provided with a test groove, the side wall of the test groove is provided with a displacement roller, the displacement roller can roll on the side wall of the test groove along the length direction of the test groove, and the displacement roller and the bottom surface of the test groove are arranged in parallel. According to the capacitance film thickness measuring device provided by the invention, through the arrangement of the test bench, the displacement roller, the telescopic rod, the pressing block, the capacitance type displacement sensor, the displacement amplification mechanism and the constant force driving mechanism, when the thickness of a capacitance film is measured, it can be ensured that the acting force of the pressing block on the capacitance film is always kept consistent; according to the invention, measurement errors caused by different deformation amounts of the capacitance film due to different acting forces on the capacitance film are reduced, the consistency of measurement results is ensured, and in addition, measurement can be carried out after the displacement amount of the telescopic rod is amplified, so that the accuracy of detection results is improved, and the large measurement result error caused by too small displacement amount of the telescopic rod is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of thickness gauges, and in particular to a capacitance film thickness measuring device. Background Art

[0002] Capacitor film is a thin film material with specific electrical properties. The thickness of the capacitor film is very small and it has good flexibility and can adapt to different application scenarios and shape requirements. The thickness of the capacitor film is usually between a few microns and tens of microns. The specific thickness will vary depending on different application requirements, materials and types of capacitors. Therefore, the thickness of the capacitor film needs to be measured during preparation.

[0003] In actual situations, most capacitor film thickness measurements are performed using mechanical thickness gauges. During measurement, the measuring rod is manually pressed so that the measuring end of the measuring rod rests against the capacitor film, and the pointer is driven to rotate through a gear transmission. The thickness of the capacitor film is observed by the indication of the pointer. However, in actual situations, the thickness of the capacitor film is only measured at a single position. When measuring the thickness of the capacitor film at various locations, multiple measurement operations are required, and the operation is cumbersome. However, during the measurement process, the staff cannot control the pressing force each time, which will cause the capacitor film to be squeezed to different degrees during the measurement process, and the measurement repeatability and consistency are relatively poor. Summary of the invention

[0004] Based on the technical problems existing in the background technology, the present invention proposes a capacitance film thickness measuring device.

[0005] A capacitive film thickness measuring device proposed in the present invention comprises a test bench, wherein a test slot is provided on the top surface of the test bench, a displacement roller is installed on the side wall of the test slot, the displacement roller can roll on the side wall of the test slot along the length direction of the test slot, the displacement roller is arranged in parallel with the bottom surface of the test slot, a plurality of telescopic holes are provided in the circumferential direction of the outer circumference of the displacement roller, a telescopic rod is slidably installed in the telescopic hole, a pressing block is fixedly installed at the end of the telescopic rod, a displacement amplification mechanism is installed in the telescopic hole, a capacitive displacement sensor is installed in the displacement roller, and the displacement amplification mechanism is used to amplify the displacement of the telescopic rod in the telescopic hole and transmit it to the measuring end of the capacitive displacement sensor;

[0006] A constant force driving mechanism is also installed in the displacement roller, and the constant force driving mechanism can drive the telescopic rod to move out of the telescopic hole with a constant pressure.

[0007] Preferably, the displacement amplification mechanism comprises a fixed pulley, a bracket, a movable pulley, a traction rope and a reset assembly; an amplification working chamber is provided in the displacement roller, the number of the fixed pulleys is multiple, and the multiple fixed pulleys are rotatably mounted in the amplification working chamber, the bracket is fixedly mounted on the telescopic rod, and the bracket is located in the amplification working chamber, the number of the movable pulleys is also multiple, and the multiple movable pulleys are rotatably mounted on the bracket, one end of the traction rope is fixedly connected to the inner wall of the amplification working chamber, the traction rope is passed around the multiple fixed pulleys and the multiple movable pulleys in turn, and the other end of the traction rope is fixedly connected to the measuring end of the capacitive displacement sensor;

[0008] The reset component is used to drive the measuring end of the capacitive displacement sensor to slide and reset.

[0009] Preferably, the reset assembly includes a No. 1 constant force spring and an insulating slide rod; a No. 1 movable groove is opened in the displacement roller, the No. 1 constant force spring is installed in the No. 1 movable groove, the inner ring end of the No. 1 constant force spring is fixedly installed in the No. 1 movable groove, one end of the insulating slide rod is fixedly connected to the outer ring end of the No. 1 constant force spring, and the other end of the insulating slide rod is fixedly connected to the output end of the capacitive displacement sensor.

[0010] Preferably, the constant force driving mechanism includes a No. 2 constant force spring and a transmission rod; a No. 2 movable groove is opened in the displacement roller, the No. 2 constant force spring is installed in the No. 2 movable groove, the inner ring end of the No. 2 constant force spring is fixedly installed in the No. 2 movable groove, the outer ring end of the No. 2 constant force spring is fixedly connected to the transmission rod, and the other end of the transmission rod is fixedly connected to one end of the telescopic rod away from the pressure block.

[0011] Preferably, gears are fixedly mounted on both ends of the telescopic rod, a rolling groove is provided in the test bench, a rack is fixedly mounted in the rolling groove, and the gear is meshed with the rack.

[0012] Preferably, a gantry is slidably mounted on the test bench, and both ends of the displacement roller rotate to penetrate the two end vertical sections of the gantry respectively.

[0013] A capacitance film thickness measuring device proposed by the present invention has the following beneficial effects: by setting a test bench, a displacement roller, a telescopic rod, a pressure block, a capacitive displacement sensor, a displacement amplification mechanism and a constant force driving mechanism, when measuring the thickness of the capacitance film, it can ensure that the force exerted by the pressure block on the capacitance film is always consistent, thereby reducing the measurement error caused by different deformation amounts of the capacitance film due to different forces exerted on the capacitance film, and ensuring the consistency of the measurement results. In addition, the displacement of the telescopic rod can be amplified before measurement, thereby improving the accuracy of the detection result and reducing the large error in the measurement result caused by the small displacement of the telescopic rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the overall structure of a capacitive film thickness measuring device proposed by the present invention;

[0015] Figure 2 A cross-sectional view of the position of the telescopic rod in the displacement roller in a capacitive film thickness measuring device proposed by the present invention;

[0016] Figure 3 It is a partial enlarged view of the position of the telescopic rod in the displacement roller in the capacitive film thickness measuring device proposed by the present invention;

[0017] Figure 4 A schematic diagram of the structure of a telescopic rod and a pressing block in a capacitive film thickness measuring device proposed by the present invention;

[0018] Figure 5 It is an end cross-sectional view of a capacitance film thickness measuring device proposed by the present invention;

[0019] Figure 6 This is a cross-sectional view of the position of a gear in a capacitive film thickness measuring device proposed by the present invention within a test bench.

[0020] In the figure: 1. test bench; 2. displacement roller; 3. telescopic rod; 4. pressure block; 5. capacitive displacement sensor; 6. fixed pulley; 7. bracket; 8. movable pulley; 9. traction rope; 10. enlarged working chamber; 11. constant force spring No. 1; 12. insulating slide rod; 13. constant force spring No. 2; 14. transmission rod; 15. gear; 16. rack; 17. portal frame. DETAILED DESCRIPTION

[0021] Reference Figure 1-Figure 6The present invention proposes a capacitance film thickness measuring device, comprising a test bench 1, a test slot is provided on the top surface of the test bench 1, when measuring the thickness of the capacitance film, a section of the capacitance film is cut and laid flat on the bottom surface of the test slot, a displacement roller 2 is installed on the side wall of the test slot, the displacement roller 2 can roll on the side wall of the test slot along the length direction of the test slot, when measuring the thickness of the capacitance film, the displacement roller 2 rolls on the side wall of the test slot, the displacement roller 2 is arranged parallel to the bottom surface of the test slot, a plurality of telescopic holes are provided on the outer circumference of the displacement roller 2, a telescopic rod 3 is slidably installed in the telescopic hole, a pressing block 4 is fixedly installed at the end of the telescopic rod 3, in a normal state, when the displacement roller 2 moves, the pressing block 4 always presses against the bottom inner wall of the test slot, a displacement amplification mechanism is installed in the telescopic hole, and a capacitance type is installed in the displacement roller 2 The displacement sensor 5, the displacement amplification mechanism is used to amplify the displacement of the telescopic rod 3 in the telescopic hole and transmit it to the measuring end of the capacitive displacement sensor 5. The capacitive displacement sensor 5 includes a cylindrical electrode and a cylindrical electrode sliding in the cylindrical electrode. In the specific operation process, the capacitive film is flattened on the bottom inner wall of the test groove, and then the displacement roller 2 is rolled, so that the pressure block 4 on the outer periphery of the displacement roller 2 is pressed against the surface of the capacitive film and rolls. Due to the thickness of the capacitive film, the distance between the pressure block 4 and the axis of the displacement roller 2 will be reduced, and the pressure block 4 will drive the telescopic rod 3 to slide in the telescopic hole. When the telescopic rod 3 is displaced in the telescopic hole, the displacement amplification mechanism amplifies the displacement of the telescopic rod 3 in the telescopic hole, so that the movement of the measuring end of the capacitive displacement sensor 5 is amplified, so that the detection result is more accurate.

[0022] When the pressure block 4 is driven to press against the capacitor film, in actual situations, in order to reduce the error caused by the compression deformation of the capacitor film, it is necessary to ensure that the force of the pressure block 4 on the capacitor film remains consistent. In addition, in actual situations, some capacitor films have different thicknesses due to various reasons. When measuring, when a straight spring is used as a driving power source, when the straight spring is compressed, the rebound force of the straight spring changes with the degree of compression, resulting in different pressures of the pressure block 4 on the capacitor film, which will affect the measurement results. Therefore, the following design is provided:

[0023] A constant force driving mechanism is also installed in the displacement roller 2. The constant force driving mechanism can drive the telescopic rod 3 to move outside the telescopic hole with a constant pressure. During the measurement process, the constant force driving mechanism drives the telescopic rod 3 to move outside the telescopic hole with a constant pressure, ensuring that the force exerted by the pressure block 4 on the capacitor film is always consistent, reducing the measurement error caused by different deformation of the capacitor film, thereby ensuring the accuracy of the measurement of the capacitor film thickness.

[0024] like Figure 2 , Figure 3 and Figure 4As shown in, the displacement amplification mechanism includes a fixed pulley 6, a bracket 7, a movable pulley 8, a traction rope 9 and a reset assembly; an amplification working chamber 10 is opened in the displacement roller 2, the number of fixed pulleys 6 is four, and the four fixed pulleys 6 are rotatably mounted in the amplification working chamber 10, the bracket 7 is fixedly mounted on the telescopic rod 3, and the bracket 7 is located in the amplification working chamber 10, the number of movable pulleys 8 is also four, and the four movable pulleys 8 are rotatably mounted on the bracket 7, one end of the traction rope 9 is fixedly connected to the inner wall of the amplification working chamber 10, and the traction rope 9 passes around the four fixed pulleys 6 and the four movable pulleys 8 in turn, and the four fixed pulleys 6 cooperate with the four movable pulleys 8 and the traction rope 9 as shown in Figure 3 As shown in the figure, a structure similar to a movable pulley group is formed, and the other end of the traction rope 9 is fixedly connected to the measuring end of the capacitive displacement sensor 5. When the telescopic rod 3 slides in the telescopic hole, the telescopic rod 3 will drive the bracket 7 and the movable pulley 8 to move synchronously. During the movement, since the position of the fixed pulley 6 cannot be changed, one end of the traction rope 9 is fixed, and the other end of the traction rope 9 is pulled. The pulled end of the traction rope 9 pulls the measuring end of the capacitive displacement sensor 5 to generate displacement. Since the displacement is amplified, the position of the measuring end of the capacitive displacement sensor 5 is also amplified, so that the measurement result can be more accurate. The displacement amplification mechanism has a simple structure and low manufacturing and installation costs. In addition, it occupies a small space and is more suitable for installation and use in the displacement roller 2.

[0025] The traditional displacement amplification structure can also use the coordinated transmission of large gears and small gears, but because the thickness of the capacitor film is relatively small, when using the coordination of large gears and small gears, certain requirements are needed for the accuracy of the gears. When the accuracy of the gears reaches a certain requirement, when measuring the thickness of the capacitor film, its displacement is relatively small, so the number of gear teeth needs to reach a sufficient number, resulting in smaller teeth that are easily worn and damaged. In addition, the meshing clearance will also cause inaccuracy in the thickness measurement structure.

[0026] The reset component is used to drive the measuring end of the capacitive displacement sensor 5 to slide and reset. The reset component includes a No. 1 constant force spring 11 and an insulating slide bar 12; a No. 1 movable groove is opened in the displacement roller 2, and the No. 1 constant force spring 11 is installed in the No. 1 movable groove. The inner ring end of the No. 1 constant force spring 11 is fixedly installed in the No. 1 movable groove, one end of the insulating slide bar 12 is fixedly connected to the outer ring end of the No. 1 constant force spring 11, and the other end of the insulating slide bar 12 is fixedly connected to the output end of the capacitive displacement sensor 5. When the traction rope 9 pulls the measuring end of the capacitive displacement sensor 5 to move, after the measurement is completed, the No. 1 constant force spring 11 works to pull the insulating slide bar 12 to slide, and the insulating slide bar 12 pulls the measuring end of the capacitive displacement sensor 5 to slide and reset, thereby driving the telescopic rod 3 to slide and reset, and the capacitive film can be repeatedly measured continuously. The No. 1 constant force spring 11 also keeps the pulling force on the telescopic rod 3 consistent, thereby ensuring the force on the capacitive film.

[0027] like Figure 2 and Figure 3 As shown in the figure, the constant force driving mechanism includes a No. 2 constant force spring 13 and a transmission rod 14; a No. 2 movable groove is opened in the displacement roller 2, and the No. 2 constant force spring 13 is installed in the No. 2 movable groove, and the inner ring end of the No. 2 constant force spring 13 is fixedly installed in the No. 2 movable groove, and the outer ring end of the No. 2 constant force spring 13 is fixedly connected to the transmission rod 14, and the other end of the transmission rod 14 is fixedly connected to the end of the telescopic rod 3 away from the pressure block 4. Due to the characteristics of the No. 2 constant force spring 13, the No. 2 constant force spring 13 can always push the transmission rod 14 with constant force, and then the transmission The moving rod 14 drives the telescopic rod 3 to move out of the telescopic hole, so that the pressure block 4 is constantly pressed against the surface of the capacitor film. In actual situations, the reaction of the No. 1 constant force spring 11 will also drive the pressure block 4 to exert a force on the capacitor film. Similarly, the rebound force of the No. 1 constant force spring 11 is constant, so the force exerted on the capacitor film is always consistent. Therefore, it can ensure that when measuring the thickness of the capacitor film, the pressing force is always kept consistent, reducing the deformation of the capacitor film due to different forces, resulting in large errors in the detection results, thereby ensuring the accuracy of the detection results.

[0028] like Figure 5 and Figure 6 As shown in , gears 15 are fixedly installed at both ends of the telescopic rod 3, a rolling groove is opened in the test bench 1, a rack 16 is fixedly installed in the rolling groove, the gear 15 is meshed with the rack 16, a gantry 17 is slidably installed on the test bench 1, and the two ends of the displacement roller 2 rotate through the two end vertical sections of the gantry 17 respectively. During specific operation, a linear electric slide rail is installed on the test bench 1, and the gantry 17 is fixedly installed on the slider of the linear electric slide rail, driving the gantry 17 to make a linear motion, and the gantry 17 drives the displacement roller 2 to synchronously displace. Since the gear 15 fixedly connected to the displacement roller 2 is meshed with the rack 16, the displacement roller 2 and the gear 15 roll, so that the pressure block 4 on the periphery of the displacement roller 2 is in turn against the capacitor film, thereby completing the thickness measurement of the large-area capacitor film, and the operation steps are simple, reducing the measurement error.

[0029] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A capacitive film thickness measuring device, characterized in that: The test bench (1) comprises a test slot on the top surface of the test bench (1), a displacement roller (2) is installed on the side wall of the test slot, the displacement roller (2) can roll on the side wall of the test slot along the length direction of the test slot, the displacement roller (2) is arranged in parallel with the bottom surface of the test slot, a plurality of telescopic holes are opened on the outer circumference of the displacement roller (2), a telescopic rod (3) is slidably installed in the telescopic hole, a pressing block (4) is fixedly installed at the end of the telescopic rod (3), a displacement amplification mechanism is installed in the telescopic hole, a capacitive displacement sensor (5) is installed in the displacement roller (2), and the displacement amplification mechanism is used to amplify the displacement of the telescopic rod (3) in the telescopic hole and transmit it to the measuring end of the capacitive displacement sensor (5); A constant force driving mechanism is also installed in the displacement roller (2), and the constant force driving mechanism can drive the telescopic rod (3) to move outside the telescopic hole with a constant pressure.

2. A capacitive film thickness measuring device according to claim 1, characterized in that: The displacement amplification mechanism comprises a fixed pulley (6), a bracket (7), a movable pulley (8), a traction rope (9) and a reset component; an amplification working chamber (10) is provided in the displacement roller (2); the number of the fixed pulleys (6) is multiple, and the multiple fixed pulleys (6) are all rotatably mounted in the amplification working chamber (10); the bracket (7) is fixedly mounted on the telescopic rod (3), and the bracket (7) is located in the amplification working chamber (10); the number of the movable pulleys (8) is also multiple, and the multiple movable pulleys (8) are all rotatably mounted on the bracket (7); one end of the traction rope (9) is fixedly connected to the inner wall of the amplification working chamber (10); the traction rope (9) sequentially passes around the multiple fixed pulleys (6) and the multiple movable pulleys (8); the other end of the traction rope (9) is fixedly connected to the measuring end of the capacitive displacement sensor (5); The reset component is used to drive the measuring end of the capacitive displacement sensor (5) to slide and reset.

3. A capacitance film thickness measuring device according to claim 2, characterized in that: The reset assembly comprises a No. 1 constant force spring (11) and an insulating slide bar (12); a No. 1 movable groove is provided in the displacement roller (2), the No. 1 constant force spring (11) is installed in the No. 1 movable groove, the inner ring end of the No. 1 constant force spring (11) is fixedly installed in the No. 1 movable groove, one end of the insulating slide bar (12) is fixedly connected to the outer ring end of the No. 1 constant force spring (11), and the other end of the insulating slide bar (12) is fixedly connected to the output end of the capacitive displacement sensor (5).

4. A capacitive film thickness measuring device according to claim 1, characterized in that: The constant force driving mechanism comprises a No. 2 constant force spring (13) and a transmission rod (14); a No. 2 movable groove is provided in the displacement roller (2), the No. 2 constant force spring (13) is installed in the No. 2 movable groove, the inner ring end of the No. 2 constant force spring (13) is fixedly installed in the No. 2 movable groove, the outer ring end of the No. 2 constant force spring (13) is fixedly connected to the transmission rod (14), and the other end of the transmission rod (14) is fixedly connected to one end of the telescopic rod (3) away from the pressing block (4).

5. A capacitive film thickness measuring device according to claim 1, characterized in that: Gears (15) are fixedly mounted on both ends of the telescopic rod (3); a rolling groove is provided in the test bench (1); a rack (16) is fixedly mounted in the rolling groove; the gear (15) meshes with the rack (16).

6. A capacitance film thickness measuring device according to claim 1, characterized in that: A gantry frame (17) is slidably mounted on the test bench (1), and the two ends of the displacement roller (2) rotate to penetrate the two end vertical sections of the gantry frame (17).

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