Real-time calibration system and method for fast mirror position accuracy

By using temperature sensors and calibration models in the fast mirror position accuracy real-time calibration system, the problem of poor real-time calibration of fast mirror position accuracy at different temperatures is solved, and high-precision and high-real-time position calibration is achieved.

CN119595257BActive Publication Date: 2025-05-16CHANGCHUN SUMMIT PHOTOELECTRIC TECH CO LTD
View PDF 1 Cites 0 Cited by

Patent Information

Application Number
CN202510142967.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-02-10
Publication Date
2025-05-16
Estimated Expiration
2045-02-10

Smart Images

  • Figure CN119595257B_ABST
    Figure CN119595257B_ABST
Patent Text Reader

Abstract

The present application discloses a real-time calibration system and method for the position accuracy of a quick reflex mirror. The system sets a temperature sensor on each motor of the quick reflex mirror, measures the detection temperature of each motor of the quick reflex mirror in real time through the temperature sensor, and then performs a temperature cycle test in combination with a high and low temperature box and a theodolite, and calculates the calibration temperature based on the detection temperature of each motor through a processing component, and generates a calibration model based on the calibration temperature and the position of the quick reflex mirror obtained from multiple tests; finally, the position accuracy of the quick reflex mirror is calibrated through the calibration temperature and calibration model obtained in real time; it can detect and calibrate in real time, and further eliminate errors, thereby improving real-time performance and improving the position accuracy of the quick reflex mirror. The present application solves the technical problems of poor real-time performance and low position accuracy of the quick reflex mirror.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present application relates to the technical field of photoelectric device measurement, and in particular to a system and method for real-time calibration of the position accuracy of a fast-reflection mirror. Background Art

[0002] Fast mirrors have the advantages of small moment of inertia, high positioning accuracy, and fast response speed. They have been used in scanning image motion compensation, line of sight stabilization, and laser communication. Installing fast mirrors in the imaging optical path can effectively improve the imaging quality of the system. Since position control is the basic working mode of fast mirrors, the requirements for position control include not only static steady-state positioning accuracy, but also dynamic positioning accuracy under a wide temperature range, which is also a key indicator to measure its performance.

[0003] In recent years, with the rapid development of the high-precision optical industry, higher requirements have been placed on the position accuracy of the fast mirror. The position accuracy of the fast mirror depends on the measurement results of the internally embedded angle sensor. However, due to the influence of temperature changes, the sensor has drift problems, which will cause inaccurate position accuracy. Therefore, in order to solve the above problems, it is necessary to calibrate the position accuracy of the fast mirror in real time at different temperatures to improve the position accuracy of the fast mirror within the operating temperature range.

[0004] In the prior art, the patent with application number 202310908524.X discloses a fast mirror temperature drift measurement and correction system and method. The invention measures the temperature drift coefficient of the fast mirror at different temperatures and corrects the fast mirror in combination with a preset calibration strategy, thereby reducing the impact of ambient temperature changes on the accuracy of the fast mirror and solving the problem of low position accuracy of the fast mirror to a certain extent. However, the patent requires the use of an external temperature control device to measure the temperature of the fast mirror. When the device is not available, real-time temperature measurement cannot be achieved, and the real-time performance is poor. Moreover, the patent directly uses the measured temperature for the determination of the temperature drift coefficient, so that the calibration error is still large, resulting in low position accuracy of the fast mirror.

[0005] Currently, no effective solution has been proposed to address the problems of poor real-time performance and low position accuracy of the fast-reflection mirror in related technologies. Summary of the invention

[0006] The main purpose of the present application is to provide a system and method for real-time calibration of the position accuracy of a fast reflex mirror, so as to solve the problems of poor real-time performance and low position accuracy of the fast reflex mirror.

[0007] In order to achieve the above objective, according to one aspect of the present application, a real-time calibration system for the position accuracy of a fast reflection mirror is provided.

[0008] The real-time calibration system for the position accuracy of a quick reflex mirror according to the present application comprises: a table, on which a high and low temperature box, a theodolite and a processing component are arranged, a quick reflex mirror is arranged in the high and low temperature box, and the processing component is electrically connected to the quick reflex mirror; at least two motors are arranged on the quick reflex mirror, and each of the motors is arranged with a temperature sensor; the high and low temperature box is used to keep the temperature for a specified time at each interval of a specified temperature value; at least two temperature sensors are used to obtain multiple groups of temperature information groups after multiple detections; wherein each temperature information group contains at least two detection temperatures; the theodolite is used to measure multiple quick reflex mirror positions corresponding to the multiple groups of temperature information groups when aligning the quick reflex mirror; the processing component is used to calculate multiple groups of calibration temperatures according to the multiple groups of temperature information groups; generate a calibration model with reference to the multiple groups of calibration temperatures and the corresponding multiple quick reflex mirror positions; calculate the calibration temperature according to the second temperature information measured by the at least two temperature sensors, and input the calibration temperature into the calibration model to obtain the position change; control the quick reflex mirror to carry out real-time calibration based on the position change and the preset correction strategy.

[0009] Furthermore, the table top is a marble vibration isolation table top and is integrally formed with the high and low temperature box.

[0010] Furthermore, a standard mirror is provided in the high and low temperature box; the theodolite is also used to measure multiple standard mirror positions when aligning with the standard mirror; the processing component is also used to determine whether the currently measured standard mirror position meets the error requirement each time the temperature information group is detected and obtained, and if so, read the currently measured temperature information group.

[0011] Further, generating a calibration model with reference to multiple sets of calibration temperatures and corresponding multiple sets of quick mirror positions measured by theodolites includes: generating a position-temperature table with reference to multiple sets of calibration temperatures and corresponding multiple sets of quick mirror positions measured by theodolites, and performing nonlinear fitting based on the position-temperature table to generate a calibration curve.

[0012] Further, the calculating of the multiple groups of calibration temperatures according to the multiple groups of temperature information groups includes: averaging the four detected temperatures in each group of temperature information groups to obtain the multiple groups of calibration temperatures; the formula is as follows:

[0013] ; where t 1 is the detected temperature of the first motor, t 2 is the detected temperature of the second motor, t 3 is the detected temperature of the third motor, t 4 is the detected temperature of the fourth motor.

[0014] Furthermore, the processing component is also used to obtain a filtered position accuracy change after performing noise reduction on the position change through a low-pass filter, and to convert the filtered position accuracy change into a code value and then compensate it to the AD real-time acquisition value.

[0015] Furthermore, the quick reflex mirror comprises: a quick reflex mirror body and a quick reflex mirror control box, and the quick reflex mirror body, the processing component and the quick reflex mirror control box are electrically connected.

[0016] Furthermore, the processing component includes: a computer and a simulator, the simulator is electrically connected to the fast mirror control box via a transmission line, and the computer and the simulator are electrically connected; one end of the transmission line is connected to the simulator, and the other end passes through a hole on the high and low temperature box and is connected to the fast mirror control box.

[0017] Furthermore, a power supply is provided on the table top, and the power supply is electrically connected to the quick-reflection mirror control box via a power line.

[0018] In order to achieve the above objective, according to another aspect of the present application, a method for real-time calibration of the position accuracy of a fast reflection mirror is provided.

[0019] According to the method for real-time calibration of the position accuracy of a fast reflex mirror of the present application, the real-time calibration system for the position accuracy of a fast reflex mirror is used for calibration.

[0020] In the embodiment of the present application, a method of real-time calibration of the position accuracy of the quick reflex mirror is adopted. A temperature sensor is set on each motor of the quick reflex mirror, and the detection temperature of each motor of the quick reflex mirror is measured in real time by the temperature sensor. Then, a temperature cycle test is carried out in combination with a high and low temperature box and a theodolite, and a calibration temperature is calculated based on the detection temperature of each motor by a processing component. At the same time, a calibration model is generated according to the calibration temperature and the quick reflex mirror position obtained from multiple tests; finally, the quick reflex mirror position accuracy is calibrated by the calibration temperature and the calibration model obtained in real time; the purpose of real-time detection and calibration and further elimination of errors is achieved, thereby realizing the technical effect of improving real-time performance and improving the position accuracy of the quick reflex mirror, and thus solving the technical problems of poor real-time performance and low position accuracy of the quick reflex mirror. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings constituting a part of this application are used to provide a further understanding of this application, so that other features, purposes and advantages of this application become more obvious. The schematic embodiment drawings and their descriptions of this application are used to explain this application and do not constitute an improper limitation on this application. In the drawings:

[0022] Figure 1 is a structural schematic diagram of a fast mirror position accuracy real-time calibration system according to an embodiment of the present application;

[0023] Figure 2 It is a schematic diagram of the calibration process of a real-time calibration system for the position accuracy of a fast reflection mirror according to an embodiment of the present application.

[0024] 1. Theodolite; 2. Table; 3. High and low temperature chamber; 4. Quick reflex mirror body; 5. Standard mirror; 6. Quick reflex mirror control box; 7. Hole; 8. Simulator; 9. Power cord; 10. Power supply; 11. Computer; 12. Motor; 13. Temperature sensor (thermistor). DETAILED DESCRIPTION

[0025] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0026] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequential order. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0027] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present invention and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0028] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those skilled in the art, the specific meanings of these terms in the present invention can be understood according to specific circumstances.

[0029] In addition, the terms "installed", "set", "provided with", "connected", "connected", and "socketed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0031] According to an embodiment of the present invention, a real-time calibration system for the position accuracy of a fast-reflection mirror is provided. Figure 1 and Figure 2 As shown, the system includes:

[0032] A table 2, on which a high and low temperature box 3, a theodolite 1 and a processing component are arranged, a quick reflection mirror is arranged in the high and low temperature box 3, and the processing component is electrically connected to the quick reflection mirror; at least two motors 12 are arranged on the quick reflection mirror, and each of the motors 12 is provided with a temperature sensor 13;

[0033] High and low temperature box 3, used for keeping temperature at designated intervals for designated time;

[0034] At least two temperature sensors 13, used to obtain multiple groups of temperature information groups through multiple detections; wherein each temperature information group contains at least two detected temperatures;

[0035] Theodolite 1 is used to measure multiple quick-reflection mirror positions corresponding to multiple groups of temperature information when aligning the quick-reflection mirror;

[0036] A processing component is used to calculate multiple groups of calibration temperatures based on multiple groups of temperature information groups; generate a calibration model with reference to the multiple groups of calibration temperatures and the corresponding multiple fast mirror positions; calculate the calibration temperature based on the second temperature information group measured by at least two temperature sensors 13, and input the calibration temperature into the calibration model to obtain the position change; control the fast mirror to perform real-time calibration based on the position change and a preset correction strategy.

[0037] Preferably, the quick reflex mirror comprises: a quick reflex mirror body 4 and a quick reflex mirror control box 6, and the quick reflex mirror body 4, the processing component and the quick reflex mirror control box 6 are electrically connected.

[0038] Preferably, the processing component includes: a computer 11 and a simulator 8, wherein the simulator 8 is electrically connected to the fast mirror control box 6 via a transmission line; one end of the transmission line is connected to the simulator 8, and the other end passes through the hole 7 on the high and low temperature box 3 and is connected to the fast mirror control box 6.

[0039] Preferably, a power supply 10 is further provided on the table top 2 , and the power supply 10 is electrically connected to the quick-reflection mirror control box 6 via a power supply line 9 .

[0040] When in use, first install the quick-reflex mirror position accuracy real-time calibration system according to the above structure and connection relationship. Place the system at room temperature below 25 degrees Celsius, power the quick-reflex mirror control box 6 with the power supply 10, and control the quick-reflex mirror body 4 to lock at the zero position through the quick-reflex mirror control box 6; use the theodolite 1 to aim at the quick-reflex mirror body 4, read the current quick-reflex mirror position, and at the same time, read the current temperature information group detected by at least two temperature sensors 13, and map the two to each other and store them. Repeat this process to obtain multiple groups of temperature-position mapping relationships below 25 degrees Celsius, and then build a calibration model based on this mapping relationship, and carry out real-time calibration through the calibration model and the preset correction strategy.

[0041] Similarly, within the full temperature range of the fast reflector, a high and low temperature box 3 is set to enter a temperature cycle mode to conduct a temperature cycle test. The temperature difference is fixed at 5 degrees Celsius at intervals. After reaching the temperature, keep warm for two hours, use the theodolite 1 to aim at the fast reflector body 4, read the current position of the fast reflector, and at the same time, read the current temperature information group detected by at least two temperature sensors 13, and map the two to each other and store them. Repeatedly, multiple groups of temperature-position mapping relationships above 25 degrees Celsius can be obtained, and then a calibration model is constructed based on this mapping relationship, and real-time calibration is carried out through the calibration model and the preset correction strategy. According to the real-time calibration system for the position accuracy of the fast reflector provided by the present invention, the position accuracy of the fast reflector can be measured at different temperatures, so as to find out the change law of its position accuracy. Through the analysis of the measurement data, a calibration model of the position change of the fast reflector at different temperatures with the temperature change is solved by mathematical modeling, and the calibration of the fast reflector is carried out based on this.

[0042] In the above process, in order to ensure the real-time and accuracy of temperature detection, a temperature sensor 13 is installed at each position of the motor 12. A temperature information group containing at least two detected temperatures is obtained by at least the temperature sensor 13 each time, and a calibration temperature is calculated based on the temperature information group. The calibration temperature is used as the information finally associated with the position, thereby realizing temperature calibration and ensuring that the obtained calibration temperature is more accurate, so that the mapping relationship between position and temperature is closer to the actual situation and the error is effectively eliminated. By using this mapping relationship to construct a calibration model, the position accuracy of the fast reflex mirror can also be improved.

[0043] In addition, after the calibration model is generated, the second temperature information group of the fast reflex mirror to be calibrated when it is working can be detected in real time through the temperature sensor 13, and then the calibration temperature is calculated according to the multiple detected temperatures in the second temperature information group, and then the position change corresponding to the calibration temperature is determined through the calibration model, and finally real-time calibration is carried out based on the position change combined with the preset correction strategy; the temperature of the fast reflex mirror to be calibrated is calibrated, the calibration temperature obtained is guaranteed to be more accurate, the position change obtained by the calibration model is more precise, the error is further eliminated, and the position accuracy of the fast reflex mirror is further improved.

[0044] It should be understood that the multiple sets of calibration temperatures calculated based on the multiple sets of temperature information include:

[0045] The average value of the four detected temperatures in each temperature information group is calculated to obtain multiple groups of calibration temperatures; the formula is as follows:

[0046] ; Among them, among them, t 1 is the detected temperature of the first motor, t 2 is the detected temperature of the second motor, t 3 is the detected temperature of the third motor, t 4 is the detected temperature of the fourth motor.

[0047] The error is further eliminated by taking the average value of the test temperatures of four thermistors.

[0048] From the above description, it can be seen that the present invention achieves the following technical effects:

[0049] In the embodiment of the present application, a method of real-time calibration of the position accuracy of the quick reflex mirror is adopted. A temperature sensor 13 is set on each motor 12 of the quick reflex mirror, and the detection temperature of each motor 12 of the quick reflex mirror is measured in real time by the temperature sensor 13. Then, a temperature cycle test is carried out in combination with the high and low temperature box 3 and the theodolite 1, and a calibration temperature is calculated based on the detection temperature of each motor 12 by the processing component. At the same time, a calibration model is generated according to the calibration temperature and the quick reflex mirror position obtained by multiple tests; finally, the quick reflex mirror position accuracy is calibrated by the calibration temperature and the calibration model obtained in real time; the purpose of real-time detection and calibration and further elimination of errors is achieved, thereby realizing the technical effect of improving real-time performance and improving the position accuracy of the quick reflex mirror, and thus solving the technical problems of poor real-time performance and low position accuracy of the quick reflex mirror.

[0050] According to an embodiment of the present invention, preferably, the table top 2 is a marble vibration isolation table top 2, and is integrally formed with the high and low temperature box 3. The high and low temperature box 3 and the marble vibration isolation table are an integrated device, which is used to isolate external vibrations and vibrations caused by the operation of the compressor inside the high and low temperature box 3, and eliminate the influence of external vibrations on the position accuracy of the fast reflection mirror.

[0051] According to the embodiment of the present invention, preferably, a standard mirror 5 is also provided in the high and low temperature box 3; the theodolite 1 is also used to measure multiple standard mirror positions when aligning with the standard mirror 5; the processing component is also used to determine whether the currently measured standard mirror position meets the error requirement each time the temperature information group is detected and acquired, and if so, read the currently measured temperature information group. In order to prevent data errors, a standard mirror is used for calibration. Before recording data each time, the crosshairs of the theodolite 1 need to be aimed at the standard mirror. Since the position of the standard mirror does not change with temperature, when the reading value of the standard mirror meets the error requirement, the mirror reading of the quick-reflection mirror body is read, thereby eliminating the reading error and ensuring the correctness of the reading of the quick-reflection mirror.

[0052] According to an embodiment of the present invention, preferably, the generation of a calibration model with reference to multiple groups of calibration temperatures and corresponding multiple groups of quick mirror positions measured by the theodolite 1 includes: generating a position-temperature table with reference to multiple groups of calibration temperatures and corresponding multiple groups of quick mirror positions measured by the theodolite 1, and performing nonlinear fitting based on the position-temperature table to generate a calibration curve. After the temperature cycle test is completed, a table is generated according to the stored temperature and position mapping relationship, and the position value at each temperature is calculated by subtracting the position value at 25°C from the position value based on 25°C to calculate the position deviation. The temperature value is taken as the first column, the position deviation is taken as the second column, and then data fitting is performed, and the curve closest to 100% is used as the final calibration curve. The nonlinear part of the temperature and position errors is added, and nonlinear fitting is performed to further improve the position accuracy.

[0053] According to an embodiment of the present invention, preferably, the processing component is also used to obtain a filtered position accuracy change after the position change is subjected to a low-pass filter for noise reduction, and the filtered position accuracy change is converted into a code value and then compensated to the AD real-time acquisition value. In order to prevent the problem of excessive position fluctuation caused by real-time compensation, the position accuracy change is compensated after passing through a primary low-pass filter, which is more adaptable.

[0054] It should be noted that the steps shown in the flowcharts of the accompanying drawings can be executed in a computer system such as a set of computer executable instructions, and that, although a logical order is shown in the flowcharts, in some cases, the steps shown or described can be executed in an order different from that shown here.

[0055] According to an embodiment of the present invention, a method for real-time calibration of the position accuracy of a fast reflex mirror is also provided, which uses a real-time calibration system for the position accuracy of a fast reflex mirror for calibration, and can achieve the same technical effect as the real-time calibration system for the position accuracy of a fast reflex mirror.

[0056] Obviously, those skilled in the art should understand that the above modules or steps of the present invention can be implemented by a general computing device, they can be concentrated on a single computing device, or distributed on a network composed of multiple computing devices, and optionally, they can be implemented by a program code executable by a computing device, so that they can be stored in a storage device and executed by the computing device, or they can be made into individual integrated circuit modules, or multiple modules or steps therein can be made into a single integrated circuit module for implementation. Thus, the present invention is not limited to any specific combination of hardware and software.

[0057] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A real-time calibration system for the position accuracy of a fast mirror, characterized in that: include: A table, on which a high and low temperature box, a theodolite and a processing component are arranged, a quick reflection mirror is arranged in the high and low temperature box, and the processing component is electrically connected to the quick reflection mirror; at least two motors are arranged on the quick reflection mirror, and each of the motors is provided with a temperature sensor; High and low temperature box, used to keep the temperature at a specified interval for a specified time; At least two temperature sensors, used to obtain multiple groups of temperature information through multiple detections; wherein each temperature information group contains at least two detected temperatures; Theodolite is used to measure multiple quick-reflection mirror positions corresponding to multiple groups of temperature information when aligning the quick-reflection mirror; A processing component is used to calculate multiple groups of calibration temperatures according to multiple groups of temperature information groups; generate a calibration model with reference to the multiple groups of calibration temperatures and the corresponding multiple fast mirror positions; calculate the calibration temperature according to the second temperature information group measured by at least two temperature sensors, and input the calibration temperature into the calibration model to obtain the position change; control the fast mirror to perform real-time calibration based on the position change and a preset correction strategy; the generation of the calibration model with reference to the multiple groups of calibration temperatures and the corresponding multiple groups of fast mirror positions measured by theodolite includes: generating a position-temperature table with reference to the multiple groups of calibration temperatures and the corresponding multiple groups of fast mirror positions measured by theodolite, and performing nonlinear fitting based on the position-temperature table to generate a calibration curve.

2. The system according to claim 1, characterized in that The table top is a marble vibration isolation table top and is integrally formed with the high and low temperature box.

3. The system according to claim 1, characterized in that The high and low temperature box is also provided with a standard mirror; The theodolite is also used to measure multiple standard mirror positions when aligning the standard mirror surface; The processing component is also used to determine whether the currently measured standard mirror position meets the error requirement each time the temperature information group is detected and acquired, and if so, read the currently measured temperature information group.

4. The system according to claim 1, characterized in that The step of calculating multiple groups of calibration temperatures according to multiple groups of temperature information groups includes: The average value of the four detected temperatures in each temperature information group is calculated to obtain multiple groups of calibration temperatures; the formula is as follows: ; Among them, t1 is the detected temperature of the first motor, t2 is the detected temperature of the second motor, t3 is the detected temperature of the third motor, and t4 is the detected temperature of the fourth motor.

5. The system according to claim 1, characterized in that The processing component is also used to obtain a filtered position accuracy change after performing noise reduction on the position change through a low-pass filter, and to convert the filtered position accuracy change into a code value and then compensate it to the AD real-time acquisition value.

6. The system according to claim 1, characterized in that The quick reflex mirror comprises: a quick reflex mirror body and a quick reflex mirror control box. The quick reflex mirror body, the processing component and the quick reflex mirror control box are electrically connected.

7. The system according to claim 6, characterized in that The processing component includes: a computer and a simulator, the simulator is electrically connected to a quick-reflection mirror control box via a transmission line, and the computer and the simulator are electrically connected; one end of the transmission line is connected to the simulator, and the other end passes through a hole on a high and low temperature box and is connected to the quick-reflection mirror control box.

8. The system according to claim 7, characterized in that The table top is also provided with a power supply, which is electrically connected to the quick-reflection mirror control box via a power line.

9. A method for real-time calibration of the position accuracy of a fast mirror, characterized in that: Calibration is performed using the fast mirror position accuracy real-time calibration system as claimed in any one of claims 1 to 8.

Citation Information

Patent Citations

  • System and method for measuring and correcting temperature excursion of fast reflecting mirror

    CN116625241A