An apparatus and method for measuring the pH value of an alumina polishing liquid for semiconductor gallium oxide

Abstract

The present invention discloses a pH value measuring device and method for aluminum oxide polishing liquid of semiconductor gallium oxide, belonging to the technical field of pH value measurement; it includes a cylinder body, an annular cylinder cover and an annular water storage tank fixedly installed on the upper side of the annular cylinder cover. A layered sampling component is installed in the cylinder body. The layered sampling component includes a fixed rod fixedly installed in the cylinder body. A moving ring is slidably connected to the outer side of the fixed rod, and a plurality of storage grooves are circumferentially and evenly formed on the outer side of the moving ring. During the process of measuring the pH value of the aluminum oxide polishing liquid, by moving the moving plate to drive the rotating cover and the connecting ring to move. After the rotating cover and the connecting ring penetrate into the preparation liquid, the rotating cover will rotate relative to the connecting ring. With the cooperation of the opening, the preparation liquid in the cylinder body enters the storage groove in sequence in small amounts, thereby completing the sequential sampling operation of the preparation liquid, and the sampling positions are different, and the sampling effect is good.

Description

Technical Field

[0001] The present invention relates to the technical field of pH value determination, and in particular to a device and method for determining the pH value of an aluminum oxide polishing liquid for semiconductor gallium oxide. Background Art

[0002] Gallium oxide is a transparent oxide semiconductor material with broad application prospects in optoelectronic devices. It is used as an insulating layer for Ga-based semiconductor materials and an ultraviolet filter. In the production process of semiconductor gallium oxide, it is necessary to perform chemical mechanical polishing on the semiconductor gallium oxide. Chemical reagents are used to selectively dissolve the different concave and convex areas on the surface of the semiconductor gallium oxide, and then mechanical force is used to rub the surface to achieve the purpose of flattening. The chemical reagent is a polishing liquid, and the aluminum oxide polishing liquid is a polishing liquid with ultrafine aluminum oxide as an abrasive. The main component is a micron or submicron abrasive, which is mainly used for grinding and polishing in high-precision optical instruments, hard disk substrates, magnetic heads, ceramics, optical fiber connectors, etc.;

[0003] In the preparation process of aluminum oxide polishing liquid, pH value is a very important parameter, which directly affects the stability of the polishing liquid and the polishing effect. Therefore, it is necessary to measure the pH value of the polishing liquid multiple times, and then add pH value regulator and deionized water to maintain the stability of the prepared liquid. When measuring the pH value of the polishing liquid, it is necessary to sample different positions of the polishing liquid and then measure it. Sampling multiple times is time-consuming and laborious, and after each sampling, the sampling tube needs to be replaced or cleaned, which leads to extremely low overall work efficiency. In addition, in the process of detection, in order to ensure the accuracy of the measurement, it is necessary to ensure that the volume of the added stabilizing liquid (the purpose of adding the stabilizing liquid is to lower the temperature of the sampling liquid to prevent the high temperature from affecting the measurement of the pH value, and the stabilizing liquid can dilute the sampling liquid, so that the pH value can be measured more accurately) is the same in each measurement, which invisibly increases the workload of the workers. In the process of mixing the stabilizing liquid and the sampling liquid, there is no means of promotion, and the mixing time is long, which further reduces the overall work efficiency. Therefore, a semiconductor aluminum oxide polishing liquid pH value determination device and method are provided. Summary of the invention

[0004] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a device and method for measuring the pH value of alumina polishing liquid for semiconductor gallium oxide.

[0005] The present invention adopts the following technical solutions:

[0006] An equipment for measuring the pH value of an alumina polishing liquid for semiconductor gallium oxide, comprising a cylinder body, an annular cover and an annular water storage tank fixedly installed on the upper side of the annular cover. A layered sampling assembly is installed in the cylinder body. The layered sampling assembly includes a fixed rod fixedly installed in the cylinder body. A moving ring is slidably connected to the outer side of the fixed rod. A plurality of storage grooves are evenly circumferentially opened on the outer side of the moving ring. A rotating cover is rotatably connected to the upper side of the moving ring. An opening is formed on the outer side of the rotating cover. A sliding rod is fixedly connected to the inner side of the rotating cover. A sliding groove is formed on the outer side of the fixed rod. The sliding rod and the sliding groove are slidably connected. A plurality of moving rods are fixedly connected to the upper side of the rotating cover. The upper sides of the plurality of moving rods are fixedly connected to the same moving plate. A plurality of clamping plates are fixedly connected to the upper side of the annular cover. The plurality of clamping plates are grouped in pairs. A rotating rod is rotatably connected between each pair of clamping plates. A fixed box is slidably installed on the outer side of the rotating rod. A moving pipe is slidably connected to the side wall of the fixed box. The moving pipe penetrates through the side wall of the fixed box. A moving box is fixedly connected to the side of the moving pipe away from the fixed box. The fixed box is communicated with the annular water storage tank through a connecting pipe. A control pipe is fixedly connected to the outer side of the annular water storage tank.

[0007] Preferably, a control assembly for controlling the rotation of the fixed box is installed on the upper side of the annular cover. The control assembly includes a plurality of gantry rods fixedly installed on the upper side of the annular cover. The plurality of gantry rods are located below the fixed box and are arranged in one-to-one correspondence with the fixed box. A rotating cylinder is rotatably connected to the outer sides of the plurality of gantry rods. A gear cylinder is fixedly connected to the outer side of the rotating cylinder. A rack is meshed with the outer side of the gear cylinder. A first connecting rod is fixedly connected to the outer side of the rack. The upper ends of the plurality of first connecting rods are jointly fixedly connected to a connecting ring. A return spring is fixedly connected between the connecting ring and the annular cover. A semi-gear is fixedly connected to the outer side of the rotating rod. The semi-gear is meshed with the gear cylinder. Two sleeve rings are fixedly connected to the outer side of the rotating rod. A torsion spring is fixedly connected between the two sleeve rings and the clamping plate. A deep groove is formed on the lower side of the fixed box. A sliding plate is slidably connected in the deep groove. A tension spring is fixedly connected between the sliding plate and the side wall of the deep groove. Two second connecting rods are fixedly connected to the lower side of the sliding plate. The two second connecting rods are fixedly connected to the sleeve ring.

[0008] Preferably, a shaking assembly for controlling the shaking of the fixed box is installed on the outer side of the rotating rod. The shaking assembly includes a third connecting rod fixedly installed on the lower side of the fixed box. A fixed ring is fixedly connected to the outer side of the third connecting rod. Two protrusions are fixedly connected to the outer side of the fixed ring. A plurality of round rods are fixedly circumferentially connected to the outer side of the rotating cylinder.

[0009] Preferably, the surfaces of the plurality of round rods and the protrusions are all smooth.

[0010] Preferably, two limiting grooves are symmetrically formed on the outer side of the fixed rod, and two limiting plates are slidably connected in the two limiting grooves, and the limiting plates are fixedly connected to the moving ring.

[0011] Preferably, a sealing rubber pad is fixedly connected to the outer side of the moving ring.

[0012] Preferably, a retaining ring is fixedly connected to one side of the moving pipe located inside the fixed box.

[0013] A method for measuring the pH value of an alumina polishing solution for semiconductor gallium oxide includes the following steps:

[0014] S1. Move the moving plate downward so that the moving ring and the rotating cover as a whole enter the preparation liquid, and start the sampling operation;

[0015] S2. After the sampling operation is completed, move the moving plate upward to drive the moving ring and the rotating cover as a whole to move upward, so that the moving ring and the rotating cover move to the upper side of the annular cylinder cover, and then make the sampling liquid enter the moving box;

[0016] S3. Move the moving ring slightly downward so that the sampling liquid enters the fixed box from the moving box and is mixed with the stable liquid inside the fixed box. And during this process, the fixed box is in a shaking state to improve the mixing efficiency of the stable liquid and the sampling liquid;

[0017] S4. Detect the liquid inside the fixed box with a pH test paper.

[0018] The beneficial effects of the present invention are:

[0019] 1. First, during the process of measuring the pH value of the alumina polishing solution, by moving the moving plate to drive the rotating cover and the connecting ring to move. After the rotating cover and the connecting ring penetrate into the preparation liquid, the rotating cover will rotate relative to the connecting ring. With the cooperation of the opening, the preparation liquid in the cylinder will enter the storage tank in small amounts in turn, thereby completing the sequential sampling operation of the preparation liquid, and the sampling positions are different, and the sampling effect is good;

[0020] 2. After the sampling is completed, drive the whole device to move upward so that the sampling liquid enters the fixed box through the moving box, and then is mixed with the stable liquid inside the fixed box. During this process, the stable liquid inside the annular water storage tank automatically enters the fixed box, and the volume of the stable liquid entering different fixed boxes is the same, and the pH value detection operation for different positions of the polishing liquid can be carried out simultaneously, with a high degree of automation;

[0021] 3. During the mixing process of the stabilizing liquid and the sampling liquid, the entire fixing box is in a shaking state, which can improve the mixing efficiency of the stabilizing liquid and the sampling liquid. And after the pH value detection is completed, the fixing box will still form a certain degree of shaking, thereby forming a cleaning operation for the fixing box. The device has a simple structure and a relatively high degree of intelligence. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic structural diagram of a pH value measuring device for an alumina polishing liquid of semiconductor gallium oxide proposed by the present invention;

[0023] Figure 2 is a schematic structural diagram of an annular cylinder cover in a pH value measuring device for an alumina polishing liquid of semiconductor gallium oxide proposed by the present invention;

[0024] Figure 3 is a schematic connection diagram of a fixing rod in a pH value measuring device for an alumina polishing liquid of semiconductor gallium oxide proposed by the present invention;

[0025] Figure 4 is an unfolded schematic diagram of a chute in a pH value measuring device for an alumina polishing liquid of semiconductor gallium oxide proposed by the present invention;

[0026] Figure 5 is a schematic connection diagram of a fixing rod and a rotating cover in a pH value measuring device for an alumina polishing liquid of semiconductor gallium oxide proposed by the present invention;

[0027] Figure 6 is an unfolded connection schematic diagram of a rotating cover and a moving ring in a pH value measuring device for an alumina polishing liquid of semiconductor gallium oxide proposed by the present invention;

[0028] Figure 7 is a top view connection schematic diagram of an annular water storage tank in a pH value measuring device for an alumina polishing liquid of semiconductor gallium oxide proposed by the present invention;

[0029] Figure 8 is a schematic connection diagram of a fixing box and a moving box in a pH value measuring device for an alumina polishing liquid of semiconductor gallium oxide proposed by the present invention;

[0030] Figure 9 is a schematic connection diagram of a fixing box and a moving box from another angle in a pH value measuring device for an alumina polishing liquid of semiconductor gallium oxide proposed by the present invention;

[0031] Figure 10 is a bottom view connection schematic diagram of a fixing box and a moving box in a pH value measuring device for an alumina polishing liquid of semiconductor gallium oxide proposed by the present invention;

[0032] Figure 11 is Figure 10 an enlarged structural view of part A in

[0033] Figure 12 This is a state change diagram of the fixed box and the moving box in a pH value measuring device for aluminum oxide polishing liquid of semiconductor gallium oxide proposed by the present invention.

[0034] In the figure: 1 cylinder body; 2 annular cylinder cover; 3 annular water storage tank; 4 control pipe; 5 moving plate; 6 moving rod; 7 rotating cover; 8 fixed rod; 9 sliding groove; 10 opening; 11 limiting groove; 12 sliding rod; 13 moving ring; 14 storage tank; 15 limiting plate; 16 connecting pipe; 17 fixed box; 18 connecting ring; 19 gantry rod; 20 moving box; 21 moving pipe; 22 retaining ring; 23 rotating cylinder; 24 clamping plate; 25 first connecting rod; 26 rack; 27 gear cylinder; 28 round rod; 29 fixing ring; 30 rotating rod; 31 torsion spring; 32 sleeve ring; 33 protrusion; 34 semi-gear; 35 second connecting rod; 36 deep groove; 37 sliding plate; 38 third connecting rod; 39 tension spring. Specific embodiments

[0035] Refer to Figures 1 - 12 , a pH value measuring device for aluminum oxide polishing liquid of semiconductor gallium oxide, including a cylinder body 1, an annular cylinder cover 2, and an annular water storage tank 3 fixedly installed on the upper side of the annular cylinder cover 2;

[0036] First, during the preparation of the aluminum oxide polishing liquid, the corresponding raw materials are poured into the cylinder body 1, and operations such as heating the cylinder body 1 are carried out to start the preparation. The above are all prior arts and will not be elaborated further.

[0037] Such as Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9, a layered sampling assembly is installed inside the cylinder body 1. The layered sampling assembly includes a fixed rod 8 fixedly installed inside the cylinder body 1. A moving ring 13 is slidably connected to the outer side of the fixed rod 8. A plurality of storage grooves 14 are evenly circumferentially formed on the outer side of the moving ring 13. A rotating cover 7 is rotatably connected to the upper side of the moving ring 13. An opening 10 is formed on the outer side of the rotating cover 7. A sliding rod 12 is fixedly connected to the inner side of the rotating cover 7. A sliding groove 9 is formed on the outer side of the fixed rod 8. The sliding rod 12 and the sliding groove 9 are slidably connected. A plurality of moving rods 6 are fixedly connected to the upper side of the rotating cover 7. The upper sides of the plurality of moving rods 6 are fixedly connected to the same moving plate 5. A plurality of clamping plates 24 are fixedly connected to the upper side of the annular cylinder cover 2. The plurality of clamping plates 24 are grouped in pairs. A rotating rod 30 is rotatably connected between each pair of clamping plates 24. A fixed box 17 is slidably installed on the outer side of the rotating rod 30. A moving pipe 21 is slidably connected to the side wall of the fixed box 17. The moving pipe 21 penetrates through the side wall of the fixed box 17. A moving box 20 is fixedly connected to the side of the moving pipe 21 away from the fixed box 17. The fixed box 17 is communicated with the annular water storage tank 3 through a connecting pipe 16. A control pipe 4 is fixedly connected to the outer side of the annular water storage tank 3. A limiting plate 15 is slidably connected in two limiting grooves 11. The limiting plate 15 is fixedly connected to the moving ring 13. A retaining ring 22 is fixedly connected to the side of the moving pipe 21 located inside the fixed box 17. A sealing rubber pad is fixedly connected to the outer side of the moving ring 13;

[0038] First, Figure 4 is an expanded view of the sliding groove 9, where the sliding groove 9 can be divided into three parts. Among them, both the "L" and "N" parts are spiral, and although neither the "L" nor the "N" part exceeds one turn, it is approximately one turn. The "M" part is linear. Figure 4 In, the arrow pointing to the left indicates downward movement, and the arrow pointing to the right indicates upward movement. Secondly, Figure 8 is Figure 7 a connection diagram of the left half of the fixed box 17 and the rack 26 in Figure 7 a connection diagram of the right half of the fixed box 17 and the rack 26 in and Figure 8For the mirror setting, initially, the rotating cover 7 and the moving ring 13 are both in the "M" position. When it is necessary to sample the preparation liquid inside the cylinder 1, the moving plate 5 is moved downward. The moving plate 5 drives the rotating cover 7 to move downward through the moving rod 6. At this time, under the action of the chute 9 and the sliding rod 12, the rotating cover 7 moves downward following the moving rod 6. Under the action of the limiting groove 11 and the limiting plate 15, the moving ring 13 moves downward following the rotating cover 7. When the sliding rod 12 moves from the M area to the L area, the moving ring 13 and the rotating cover 7 have entered the preparation liquid as a whole. At this time, the preparation liquid enters the storage tank 14 through the opening 10. Since there is an opening 10 on the outer side of the rotating cover 7 and the diameter of the opening 10 is smaller than the distance between two adjacent storage tanks 14, there will be no state where two storage tanks 14 are opened simultaneously. At the same time, under the action of the chute 9 and the sliding rod 12, although the rotating cover 7 moves downward following the moving rod 6, the rotating cover 7 will also rotate relative to the moving ring 13 (during the downward movement of the moving plate 5 and the moving rod 6, only a downward moving force is provided to the moving plate 5, and there is no other restriction on the moving plate 5, that is, the moving plate 5 can rotate by itself). During the downward movement of the moving rod 6 driving the rotating cover 7 and the moving ring 13, the storage tanks 14 are opened in sequence, and the preparation liquid enters the storage tank 14 through the opening 10, thus completing multiple sampling operations on the preparation liquid, and the sampling positions are different. When the sliding rod 12 moves to the bottom of the cylinder 1, the sliding rod 12 also moves to the end of the "L" part in the chute 9. At this time, the sampling operation has been completed. During the above sampling process, the opening 10 does not rotate a full circle, that is, the opening 10 will not return to the initial position. Therefore, there will be no preparation liquid at different positions in the storage tank 14. And under the action of the sealing rubber pad and the rotating cover 7, all the storage tanks 14 are sealed from each other, and the sampling liquid in the storage tank 14 will not enter other storage tanks 14. After sampling, the moving plate 5 is moved upward. At this time, the whole device repeats the above opposite operations. During this process, the storage tank 14 is in the same position as when sampling, so it will not affect the sampling liquid. When the rotating cover 7 and the moving ring 13 move from the L area to the M area as a whole, the rotating cover 7 and the moving ring 13 are removed from the preparation liquid. During the above overall working process, that is, in the three states where the rotating cover 7 and the moving ring 13 are in the M area as a whole, the rotating cover 7 and the moving ring 13 have just moved from the M area to the L area, and the rotating cover 7 and the moving ring 13 have just moved from the L area to the M area, there is exactly one storage tank 14 in the open state, that is, the initial position of the opening 10. During the subsequent pH value detection process, the sampling liquid in this storage tank 14 should be ignored. When the rotating cover 7 and the moving ring 13 move from the M area to the N area as a whole, the rotating cover 7 and the moving ring 13 move to the upper side of the annular cylinder cover 2. At this time, the moving box 20 is located directly below the storage tank 14 (the reason why the moving box 20 is located directly below the storage tank 14 is described below), and the moving box 20 and the storage tank 14 are in one-to-one correspondence.That is, a moving box 20 corresponds to the lower part of a storage slot 14. When the rotating cover 7 and the moving ring 13 enter the N area as a whole, at this time, under the action of the sliding groove 9 and the sliding rod 12, the rotating cover 7 rotates relative to the moving ring 13. However, different from the L area, the thread pitch in the N area is smaller, that is, the vertical distance in the N area is smaller. Therefore, after the moving ring 13 and the moving rod 6 only move upward a small distance, the sliding rod 12 has moved to the upper end of the sliding groove 11. During this process, under the action of the opening 10, the storage slots 14 are opened one by one again, and the sampling liquid inside the storage slots 14 flows into the moving box 20 through the opening 10. Then, the sampling liquid inside the moving box 20 enters the fixed box 17 through the moving pipe 21 (the reason for the movement of the sampling liquid is described below), and then the corresponding pH value detection operation is carried out.

[0039] Such as Figure 8 , Figure 9 , Figure 10 , Figure 12 , a control component for controlling the rotation of the fixed box 17 is installed on the upper side of the annular cylinder cover 2. The control component includes a plurality of gantry rods 19 fixedly installed on the upper side of the annular cylinder cover 2. The plurality of gantry rods 19 are located under the fixed box 17 and are arranged in one-to-one correspondence with the fixed box 17. A rotating cylinder 23 is rotatably connected to the outside of the plurality of gantry rods 19. A gear cylinder 27 is fixedly connected to the outside of the rotating cylinder 23. A rack 26 is meshed with the outside of the gear cylinder 27. A first connecting rod 25 is fixedly connected to the outside of the rack 26. The upper ends of the plurality of first connecting rods 25 are fixedly connected together to form a connecting ring 18. A return spring is fixedly connected between the connecting ring 18 and the annular cylinder cover 2. A semi-gear 34 is fixedly connected to the outside of the rotating rod 30. The semi-gear 34 is meshed with the gear cylinder 27. Two collar rings 32 are fixedly connected to the outside of the rotating rod 30. A torsion spring 31 is fixedly connected between the two collar rings 32 and the clamping plate 24. A deep groove 36 is opened on the lower side of the fixed box 17. A sliding plate 37 is slidably connected in the deep groove 36. A tension spring 39 is fixedly connected between the sliding plate 37 and the side wall of the deep groove 36. Two second connecting rods 35 are fixedly connected to the lower side of the sliding plate 37. The two second connecting rods 35 are fixedly connected to the collar rings 32;

[0040] First, when performing the pH value detection, first add an appropriate amount of stabilizing liquid to the annular water storage tank 3. Second, in the initial state, the whole device is in Figure 12 the Z state in. At this time, the rack 26 abuts against the upper wall of the annular cylinder cover 2. During the upward movement of the moving plate 5 and the moving rod 6, the moving rod 6 drives the rotating cover 7 and the moving ring 13 to move upward. At this time, the fixed box 17 and the moving box 20 are in the Z state, which will not affect the upward movement of the rotating cover 7 and the moving ring 13. Before the rotating cover 7 and the moving ring 13 move to the N area, the rotating cover 7 has abutted against the connecting ring 18. Therefore, it will drive the connecting ring 18 to move upward. The connecting ring 18 drives the rack 26 to move upward through the first connecting rod 25, so as toFigure 8 Based on the direction of rotation, the rack 26 drives the meshing gear cylinder 27 to rotate counterclockwise, the gear cylinder 27 drives the meshing half gear 34 to rotate clockwise, the half gear 34 drives the fixed box 17 to rotate clockwise as a whole, and the fixed box 17 drives the moving box 20 to rotate clockwise as a whole, until the fixed box 17 and the moving box 20 move to the Y state as a whole. In this process, since the moving tube 21 and the fixed box 17 are slidably connected, the moving tube 21 and the moving box 20 are only affected by gravity as a whole. Therefore, in the Z state, the distance between the moving box 20 and the fixed box 17 is the smallest. In the Y state, the distance between the moving box 20 and the fixed box 17 is the largest, and the retaining ring 22 and the inner wall of the fixed box 17 are against each other. Then, in the Y state, the moving box 20 moves to the lower side of the storage groove 14. After the rotating cover 7 and the moving ring 13 move to the N area, the gear cylinder 27 and the half gear 34 are just in the disconnected state. However, after the rotating cover 7 and the moving ring 13 move to the N area, the rotating cover 7 will also drive the connecting ring 18 to move upward, that is, the gear cylinder 27 is still in the state of counterclockwise rotation. Therefore, under the dual action of the torsion spring 31 and the gear cylinder 27, the half gear 34 and the fixed box 17 are disconnected. 17 is always in the Y state as a whole and is stationary (at this time, the gear cylinder 27 and the half gear 34 are always in an interlaced state of engagement and disconnection, so that the half gear 34 as a whole will form a slight shake, but the amplitude of this shake is small, so it can be ignored and can be approximately regarded as a stationary state), and in the above working process, in the Y state, the position of the connecting pipe 16 is low, and the stabilizing liquid inside the annular water storage tank 3 can enter the fixed box 17 through the connecting pipe 16, and in the Z state, the position of the connecting pipe 16 is high, and the high point is higher than the liquid level of the stabilizing liquid inside the annular water storage tank 3. Therefore, the stable liquid inside the annular water storage tank 3 will not enter the fixed box 17, and after the sampling liquid inside the storage tank 14 enters the movable box 20, the movable plate 5 is moved downward, and the movable plate 5 drives the rotating cover 7 and the movable ring 13 to move downward as a whole through the moving rod 6. At this time, under the dual action of the torsion spring 31 and the reset spring, the fixed box 17 rotates counterclockwise as a whole, and the fixed box 17 and the movable box 20 change from the Y state to the Z state as a whole. The sampling liquid inside the movable box 20 enters the fixed box 17 through the moving tube 21, and the sampling liquid and the stable liquid inside the fixed box 17 are mixed.

[0041] like Figure 10 , Figure 11 A shaking assembly for controlling the shaking of the fixed box 17 is installed on the outer side of the rotating rod 30, and the shaking assembly includes a third connecting rod 38 fixedly installed on the lower side of the fixed box 17, and a fixing ring 29 is fixedly connected to the outer side of the third connecting rod 38, and two protrusions 33 are fixedly connected to the outer side of the fixing ring 29. A plurality of round rods 28 are fixedly connected to the outer side of the rotating cylinder 23 in the circumferential direction, and the surfaces of the plurality of round rods 28 and the protrusions 33 are all smooth.

[0042] First, in the normal state, the stretching springs 39 on both sides are in a balanced state. When the half gear 34 and the gear cylinder 27 are at the connected terminal, the round rod 28 just abuts against the protrusion 33 when rotating. When the round rod 28 abuts against the protrusion 33, the round rod 28 abuts against the protrusion 33 and drives the whole fixed ring 29 to move. The fixed ring 29 drives the fixed box 17 to move through the third connecting rod 38, thereby destroying the balance of the stretching spring 39, causing the fixed box 17 to move back and forth left and right relative to the sliding plate 37 and the collar 32, and further causing the fixed box 17 to be in a shaking state (based on Figure 11 the direction). When the fixed box 17 is in a shaking state, the whole fixed box 17 is in the Y state or the Z state. When in the Y state, the sampling liquid and the stabilizing liquid can be quickly mixed to accelerate the mixing. When in the Z state, the stabilizing liquid is located in the fixed box 17, and thus a cleaning operation on the fixed box 17 can be formed.

[0043] A method for measuring the pH value of an alumina polishing liquid for semiconductor gallium oxide, comprising the following steps:

[0044] S1. Move the moving plate 5 downward to make the moving ring 13 and the rotating cover 7 enter the preparation liquid as a whole, and start the sampling operation;

[0045] S2. After the sampling operation is completed, move the moving plate 5 upward to drive the moving ring 13 and the rotating cover 7 to move upward as a whole, so that the moving ring 13 and the rotating cover 7 move to the upper side of the annular cylinder cover 2, and then make the sampling liquid enter the moving box 20;

[0046] S3. Slightly move the moving ring 13 downward to make the sampling liquid enter the fixed box 17 from the moving box 20 and mix with the stabilizing liquid inside the fixed box 17. And during this process, the fixed box 17 is in a shaking state to improve the mixing efficiency of the stabilizing liquid and the sampling liquid;

[0047] S4. Detect the liquid inside the fixed box 17 with a pH test paper.

[0048] In the present invention, when it is necessary to perform a pH value detection operation on the preparation liquid, the specific operation is as follows: Move the moving plate 5 downward. The moving plate 5 drives the rotating cover 7 to move downward through the moving rod 6. At this time, under the action of the sliding groove 9 and the sliding rod 12, the rotating cover 7 moves downward following the moving rod 6. Under the action of the limiting groove 11 and the limiting plate 15, the moving ring 13 moves downward following the rotating cover 7. When the sliding rod 12 moves from the M area to the L area, the rotating cover 7 and the moving ring 13 as a whole have entered the preparation liquid. Under the action of the sliding groove 9 and the sliding rod 12, although the rotating cover 7 moves downward following the moving rod 6, the rotating cover 7 will also rotate relative to the moving ring 13. During the process of the moving rod 6 driving the rotating cover 7 and the moving ring 13 to move downward, the storage grooves 14 are sequentially opened, and the preparation liquid enters the storage grooves 14 through the openings 10, thereby completing multiple sampling operations on the preparation liquid, and the sampling positions are different. After the sampling is completed, move the moving plate 5 upward. At this time, the whole device repeats the above opposite operations. During this process, the positions of the storage grooves 14 when they are opened are the same as those during sampling, so the sampling liquid will not be affected. When the rotating cover 7 and the moving ring 13 as a whole move from the L area to the M area, the rotating cover 7 and the moving ring 13 are removed from the preparation liquid. When the rotating cover 7 and the moving ring 13 as a whole move from the M area to the N area, the rotating cover 7 and the moving ring 13 move to the upper side of the annular cylinder cover 2. At this time, the moving rod 6 drives the rotating cover 7 and the moving ring 13 to move upward. At this time, the fixed box 17 and the moving box 20 are in the Z state and will not affect the upward movement of the rotating cover 7 and the moving ring 13. At this time, the stable liquid inside the annular water storage tank 3 enters the fixed box 17 through the connecting pipe 16. Before the rotating cover 7 and the moving ring 13 move to the N area, the rotating cover 7 has already abutted against the connecting ring 18, so it will drive the connecting ring 18 to move upward. The connecting ring 18 drives the rack 26 to move upward through the first connecting rod 25, so as to Figure 8Based on the direction, the rack 26 drives the meshing gear cylinder 27 to rotate counterclockwise, the gear cylinder 27 drives the meshing half gear 34 to rotate clockwise, the half gear 34 drives the fixed box 17 to rotate clockwise as a whole, and the fixed box 17 drives the moving box 20 to rotate clockwise as a whole, until the fixed box 17 and the moving box 20 move to the Y state as a whole. At this time, the moving box 20 is located just below the storage slot 14, and the moving box 20 and the storage slot 14 match one by one, that is, a moving box 20 is provided on the outside of a storage slot 14. When the rotating cover 7 and the moving ring 13 enter the N area as a whole, under the action of the slide groove 9 and the slide rod 12, the rotating cover 7 rotates relative to the moving ring 13. However, unlike the L area, the thread pitch of the N area is smaller. Therefore, after the moving ring 13 and the moving rod 6 only move upward a short distance, The rotating cover 7 has rotated to the end of the N area. During this process, under the action of the opening 10, the storage slots 14 are opened one by one again, and the sampled liquid inside the storage slots 14 flows into the movable box 20 through the opening 10. After the sampled liquid inside the storage slots 14 enters the movable box 20, the movable plate 5 is moved downward, and the movable plate 5 drives the rotating cover 7 and the movable ring 13 to move downward as a whole through the movable rod 6. At this time, under the dual action of the torsion spring 31 and the reset spring, the fixed box 17 rotates counterclockwise as a whole, and the fixed box 17 and the movable box 20 change from the Y state to the Z state as a whole. The sampled liquid inside the movable box 20 enters the fixed box 17 through the movable tube 21, and the sampled liquid is mixed with the stable liquid phase inside the fixed box 17. The pH value of the liquid inside the fixed box 17 is detected by comparison. This is a prior art and no unnecessary elaboration is made.

[0049] When the half gear 34 and the gear cylinder 27 are at the terminal end of the connection, the round rod 28 can just abut against the protrusion 33 when rotating. When the round rod 28 and the protrusion 33 abut against each other, the round rod 28 and the protrusion 33 abut against each other and drive the fixing ring 29 to move as a whole. The fixing ring 29 drives the fixing box 17 to move through the third connecting rod 38, thereby destroying the balance of the tension spring 39, causing the fixing box 17 to move back and forth relative to the slide plate 37 and the collar 32, thereby causing the fixing box 17 to be in a shaking state (with Figure 11 direction as the basis), when the fixed box 17 is in a shaking state, the fixed box 17 as a whole is in a Y state or a Z state. When in the Y state, the sampling liquid and the stabilizing liquid can be quickly mixed to accelerate the mixing. When in the Z state, the stabilizing liquid is located in the fixed box 17, thereby forming a cleaning operation for the fixed box 17.

Claims

1. A device for measuring the pH value of alumina polishing liquid for semiconductor oxide, comprising a cylinder (1), an annular cylinder cover (2), and an annular water storage tank (3) fixedly mounted on the upper side of the annular cylinder cover (2), characterized in that: A stratified sampling assembly is installed in the cylinder (1), and the stratified sampling assembly comprises a fixed rod (8) fixedly installed in the cylinder (1), a movable ring (13) is slidably connected to the outer side of the fixed rod (8), a plurality of storage grooves (14) are evenly arranged on the outer side of the movable ring (13), a rotating cover (7) is rotatably connected to the upper side of the movable ring (13), an opening (10) is arranged on the outer side of the rotating cover (7), a sliding rod (12) is fixedly connected to the inner side of the rotating cover (7), a sliding groove (9) is arranged on the outer side of the fixed rod (8), the sliding rod (12) and the sliding groove (9) are slidably connected, a plurality of movable rods (6) are fixedly connected to the upper side of the rotating cover (7), and the upper sides of the plurality of movable rods (6) are A same movable plate (5) is fixedly connected, a plurality of clamping plates (24) are fixedly connected to the upper side of the annular cylinder cover (2), the plurality of clamping plates (24) are arranged in groups of two, a rotating rod (30) is rotatably connected between each group of clamping plates (24), a fixed box (17) is slidably mounted on the outer side of the rotating rod (30), a movable tube (21) is slidably connected to the side wall of the fixed box (17), the movable tube (21) penetrates the side wall of the fixed box (17), a side of the movable tube (21) away from the fixed box (17) is fixedly connected to the movable box (20), the fixed box (17) is connected to the annular water storage tank (3) via a connecting tube (16), and a control tube (4) is fixedly connected to the outer side of the annular water storage tank (3).

2. The device for measuring pH value of alumina polishing liquid for semiconductor gallium oxide according to claim 1, characterized in that: A control assembly for controlling the rotation of the fixed box (17) is installed on the upper side of the annular cylinder cover (2). The control assembly comprises a plurality of gantry rods (19) fixedly installed on the upper side of the annular cylinder cover (2). The plurality of gantry rods (19) are located on the lower side of the fixed box (17) and are arranged one-to-one with the fixed box (17). The outer sides of the plurality of gantry rods (19) are rotatably connected to a rotating cylinder (23). The outer side of the rotating cylinder (23) is fixedly connected to a gear cylinder (27). The outer side of the gear cylinder (27) is meshingly connected to a rack (26). The outer side of the rack (26) is fixedly connected to a first connecting rod (25). The upper ends of the plurality of first connecting rods (25) are commonly fixedly connected to a connecting ring (18). The connecting ring (18) and the annular cylinder cover (23) are connected to the rotating cylinder (23). A return spring is fixedly connected between the cover (2); a half gear (34) is fixedly connected to the outer side of the rotating rod (30); the half gear (34) and the gear cylinder (27) are meshed; two collars (32) are fixedly connected to the outer side of the rotating rod (30); a torsion spring (31) is fixedly connected between the two collars (32) and the clamping plate (24); a deep groove (36) is opened on the lower side of the fixed box (17); a slide plate (37) is slidably connected in the deep groove (36); a tension spring (39) is fixedly connected between the slide plate (37) and the side wall of the deep groove (36); two second connecting rods (35) are fixedly connected to the lower side of the slide plate (37); the two second connecting rods (35) and the collars (32) are fixedly connected.

3. The device for measuring pH value of alumina polishing liquid for semiconductor gallium oxide according to claim 2, characterized in that: A shaking assembly for controlling the shaking of the fixed box (17) is installed on the outside of the rotating rod (30), and the shaking assembly includes a third connecting rod (38) fixedly installed on the lower side of the fixed box (17), a fixing ring (29) is fixedly connected to the outside of the third connecting rod (38), two protrusions (33) are fixedly connected to the outside of the fixing ring (29), and a plurality of round rods (28) are fixedly connected to the outside of the rotating cylinder (23) in a circumferential direction.

4. The device for measuring pH value of alumina polishing liquid for semiconductor gallium oxide according to claim 3, characterized in that: The surfaces of the plurality of round rods (28) and protrusions (33) are all smooth.

5. The device for measuring pH value of alumina polishing liquid for semiconductor gallium oxide according to claim 4, characterized in that: Two limiting grooves (11) are symmetrically formed on the outer side of the fixing rod (8), and limiting plates (15) are slidably connected in the two limiting grooves (11), and the limiting plates (15) are fixedly connected to the moving ring (13).

6. The device for measuring pH value of alumina polishing liquid for semiconductor gallium oxide according to claim 5, characterized in that: A sealing rubber pad is fixedly connected to the outer side of the movable ring (13).

7. The device for measuring pH value of alumina polishing liquid for semiconductor gallium oxide according to claim 6, characterized in that: The movable tube (21) is located inside the fixed box (17) and is fixedly connected to a retaining ring (22) on one side thereof.

8. A method for measuring the pH value of the semiconductor gallium oxide aluminum oxide polishing liquid according to claim 7, characterized in that: The following steps are involved: S1, moving the movable plate (5) downward, so that the movable ring (13) and the rotating cover (7) enter the preparation liquid as a whole, and starting the sampling operation; S2. After the sampling operation is completed, the movable plate (5) is moved upward, driving the movable ring (13) and the rotating cover (7) to move upward as a whole, so that the movable ring (13) and the rotating cover (7) are moved to the upper side of the annular cylinder cover (2), and then the sample liquid enters the movable box (20); S3, the movable ring (13) is slightly moved downward, so that the sample liquid enters the fixed box (17) from the movable box (20) and mixes with the stabilizing liquid inside the fixed box (17), and during this process, the fixed box (17) is in a shaking state, thereby improving the mixing efficiency of the stabilizing liquid and the sample liquid; S4. Detect the liquid inside the fixed box (17) using pH test paper.

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