Adjustable atomic force microscope

Abstract

The invention provides an adjustable atomic force microscope. The adjustable atomic force microscope comprises a bottom plate, a placement platform, a first driving mechanism, a second driving mechanism, a third driving mechanism, an adjusting mechanism and a detection mechanism, the placing platform and the first driving mechanism are both arranged on one surface of the bottom plate, the first driving mechanism is used for driving the second driving mechanism, and the second driving mechanism is used for driving the third driving mechanism; the third driving mechanism is used for driving the adjusting mechanism, and the detection mechanism is arranged on the adjusting mechanism. When the adjustable atomic force microscope is used, through the cooperative operation of the first driving mechanism, the second driving mechanism, the third driving mechanism, the adjusting mechanism and the detection mechanism, rapid adjustment can be carried out according to specific requirements, the adjustable atomic force microscope is suitable for experimental detection of large samples, the time consumed for adjusting and positioning is short, and the efficiency is high.

Description

Technical Field

[0001] The invention relates to the technical field of microscopes, and in particular to an adjustable atomic force microscope. Background Art

[0002] Atomic Force Microscope (AFM) is an analytical instrument that can be used to study the surface structure of solid materials, including insulators. AFM uses a microcantilever to sense and amplify the force between the sharp probe on the cantilever and the atoms of the sample being tested, thereby achieving the purpose of detection. It has atomic-level resolution, so AFM is widely used in cutting-edge scientific and technological fields such as nanomaterials and biomedicine for its ultra-high detection accuracy at the nanometer level.

[0003] At present, the common atomic force microscope adjusts the position of the sample to be tested by moving the sample stage during the experiment, which is only suitable for experiments with small samples. When large samples need to be tested experimentally, the adjustment and positioning takes a long time and is inefficient. Summary of the invention

[0004] To solve the above problems, the present invention adopts the following technical solution: an adjustable atomic force microscope, comprising: a base plate, a placement platform, a first driving mechanism, a second driving mechanism, a third driving mechanism, an adjusting mechanism and a detecting mechanism;

[0005] The placement platform and the first driving mechanism are both arranged on one surface of the bottom plate, the first driving mechanism is used to drive the second driving mechanism, and the second driving mechanism is used to drive the third driving mechanism;

[0006] The third driving mechanism is used to drive the adjusting mechanism, and the detecting mechanism is arranged on the adjusting mechanism.

[0007] Furthermore, four shock absorbing components are included, and the four shock absorbing components are all arranged on a side of the bottom plate away from the placement platform.

[0008] Further, the first driving mechanism includes a first driving motor, a first connecting rod and two first screw rods, the first driving motor, the first connecting rod and the two first screw rods are all arranged on one surface of the base plate, the first driving motor is used to drive one of the first screw rods, and the output shaft of the first driving motor is connected to one end of the first connecting rod, and the other end of the first connecting rod is rotatably connected to another first screw rod.

[0009] Furthermore, a first sliding block is slidably disposed on each of the first screw rods, and two first sliding blocks are correspondingly disposed.

[0010] Furthermore, the second driving mechanism includes a second driving motor, a second connecting rod and two second screw rods, each of the second screw rods is arranged on a first sliding block, the second driving motor is used to drive a second screw rod, and the output shaft of the second driving motor is connected to one end of the second connecting rod, and the other end of the second connecting rod is rotatably connected to another second screw rod.

[0011] Furthermore, a second sliding block is slidably arranged on each of the second screw rods, and two second sliding blocks are arranged correspondingly.

[0012] Furthermore, the third driving mechanism includes a third driving motor and a third screw rod, the third screw rod is arranged on the two second sliding blocks, and the third driving motor is used to drive the third screw rod.

[0013] Furthermore, a third slider is slidably arranged on the third screw rod, and the adjusting mechanism is arranged on the third slider.

[0014] Furthermore, the adjustment mechanism includes a first displacement platform, a second displacement platform and a mounting frame, the first displacement platform is arranged on the third slider, the first displacement platform is used to adjust the second displacement platform, the second displacement platform is used to adjust the mounting frame, and the detection mechanism is arranged on the mounting frame.

[0015] Furthermore, the first translation stage includes a stepper motor and a piezoelectric translation stage, the stepper motor is arranged on the third slider, the output shaft of the stepper motor is connected to a lifting screw rod, a moving block is arranged on the lifting screw rod, the piezoelectric translation stage is arranged on the moving block, and the second translation stage is arranged on the piezoelectric translation stage.

[0016] The beneficial effects of the present invention are: using this adjustable atomic force microscope, through the coordinated operation between the first drive mechanism, the second drive mechanism, the third drive mechanism, the adjustment mechanism and the detection mechanism, it can be quickly adjusted according to specific needs, is suitable for experimental detection of large samples, and the time consumed for adjustment and positioning is short and the efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings further illustrate the present invention, but the embodiments in the accompanying drawings do not constitute any limitation to the present invention.

[0018] Figure 1 A schematic diagram of one direction of an adjustable atomic force microscope provided by an embodiment;

[0019] Figure 2 A schematic diagram of another direction of an adjustable atomic force microscope provided by an embodiment. DETAILED DESCRIPTION

[0020] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings of the embodiments of the present invention, and the present invention is not limited to the following specific implementation methods. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0021] like Figure 1 to Figure 2 As shown, an adjustable atomic force microscope includes: a base plate 100, a placement platform 200, a first driving mechanism, a second driving mechanism, a third driving mechanism, an adjustment mechanism and a detection mechanism 700; the placement platform 200 and the first driving mechanism are both arranged on one surface of the base plate 100, the first driving mechanism is used to drive the second driving mechanism, and the second driving mechanism is used to drive the third driving mechanism; the third driving mechanism is used to drive the adjustment mechanism, and the detection mechanism 700 is arranged on the adjustment mechanism.

[0022] The adjustable atomic force microscope also includes four shock absorbing components 800, and the four shock absorbing components 800 are all arranged on the side of the bottom plate 100 away from the placement platform 200. Specifically, the four shock absorbing components 800 can be rubber, or air floating pads, or a structure used for shock absorption in the prior art, and can play a good shock absorption effect, which is not described in detail in this embodiment. Furthermore, the plane of the placement platform 200 is parallel to the bottom plate 100, that is, it can ensure that when the sample is placed on the placement platform 200, it can be placed horizontally on the placement platform 200.

[0023] In the above embodiment, the first driving mechanism includes a first driving motor 310, a first connecting rod 320 and two first screw rods 330, the first driving motor 310, the first connecting rod 320 and the two first screw rods 330 are all arranged on one surface of the bottom plate 100, the first driving motor 310 is used to drive one first screw rod 330, and the output shaft of the first driving motor 310 is connected to one end of the first connecting rod 320, and the other end of the first connecting rod 320 is rotatably connected to another first screw rod 330. A first slider 331 is slidably arranged on each first screw rod 330, and the two first sliders 331 are arranged correspondingly. The second driving mechanism includes a second driving motor 410, a second connecting rod 420 and two second screw rods 430, each second screw rod 430 is arranged on a first slider 331, the second driving motor 410 is used to drive one second screw rod 430, and the output shaft of the second driving motor 410 is connected to one end of the second connecting rod 420, and the other end of the second connecting rod 420 is rotatably connected to another second screw rod 430. A second slider 431 is slidably disposed on each of the second screw rods 430, and two second sliders 431 are disposed correspondingly. The third driving mechanism includes a third driving motor 510 and a third screw rod 520, and the third screw rod 520 is disposed on two of the second sliders 431, and the third driving motor 510 is used to drive the third screw rod 520. A third slider 521 is slidably disposed on the third screw rod 520, and the adjusting mechanism is disposed on the third slider 521.

[0024] Further, the adjustment mechanism includes a first displacement stage, a second displacement stage 620 and a mounting frame 630, wherein the first displacement stage is disposed on the third slider 521, the first displacement stage is used to adjust the second displacement stage 620, the second displacement stage 620 is used to adjust the mounting frame 630, and the detection mechanism 700 is disposed on the mounting frame 630. The first displacement stage includes a stepping motor 611 and a piezoelectric displacement stage 612, wherein the stepping motor 611 is disposed on the third slider 521, the output shaft of the stepping motor 611 is connected to a lifting screw rod, a moving block is disposed on the lifting screw rod, the piezoelectric displacement stage 612 is disposed on the moving block, and the second displacement stage 620 is disposed on the piezoelectric displacement stage 612.

[0025] It is worth mentioning that this adjustable atomic force microscope is controlled by an external control program, that is, the normal progress of the entire experimental process is controlled by the program. Using this adjustable atomic force microscope, by placing the sample on the placement platform 200, and then adjusting the position of the adjustment mechanism and the detection mechanism 700 in a large range through the first drive mechanism, the second drive mechanism and the third drive mechanism, that is, there will be a sensor on the mounting frame 630. During the movement, the sensor will sense in real time, and then send the specific position signal to the control system, and compare the position of the sample to be detected with the preset position of the control system, and then adjust the position of the entire adjustment mechanism and the detection mechanism 700. In other words, by starting the first drive motor 310, the first drive motor 310 drives a first screw rod 330 to rotate, and also drives the first connecting rod 320 to rotate, so that the other first screw rod 330 is also rotated under the rotation of the first connecting rod 320. It is worth mentioning that how the first drive motor 310 can drive the first connecting rod 320 to rotate while driving a first screw rod 330 to rotate can be realized by existing technology, for example, by connecting the output shaft of the first drive motor 310 to a gear set to achieve, and no cumbersome description is given in this embodiment. That is, the two first screw rods 330 rotate at the same time, so that the two first sliders 331 move, which is equivalent to adjusting the position of the entire adjustment mechanism and the detection mechanism 700 in the X-axis direction in the horizontal direction. After the adjustment is completed, the third drive motor 510 is started, and the output shaft of the third drive motor 510 rotates to drive the third screw rod 520 to rotate, and then drives the third slider 521 to slide, which is equivalent to adjusting the position of the entire adjustment mechanism and the detection mechanism 700 in the Y-axis direction in the horizontal direction. Then the second drive motor 410 is started, and the second drive motor 410 drives a second screw rod 430 to rotate while also driving the second connecting rod 420 to rotate, so that the other second screw rod 430 also rotates under the rotation of the second connecting rod 420. It is worth mentioning that how the second drive motor 410 can drive the second connecting rod 420 to rotate while driving a second screw rod 430 to rotate can be realized by existing technology, for example, by connecting the output shaft of the second drive motor 410 to a gear set, which is not described in detail in this embodiment. That is, the two second screw rods 430 rotate at the same time, thereby causing the two second sliders 431 to move, which is equivalent to adjusting the position of the entire adjustment mechanism and detection mechanism 700 in the vertical direction, that is, equivalent to adjusting the position in the Z-axis direction. Therefore, by using the first drive mechanism, the second drive mechanism and the third drive mechanism, the entire adjustment mechanism and detection mechanism 700 can be adjusted over a wide range, so that it moves to a preset position where the sample needs to be detected.Furthermore, through the stepper motor 611 and the piezoelectric shift stage 612, combined with the second shift stage 620, the entire detection mechanism 700 is adjusted in a small range. It is worth mentioning that the second shift stage 620 is a nano-shift stage. That is to say, during the experiment, the position of the entire detection mechanism 700 is adjusted by the nano-shift stage.

[0026] In the above embodiment, if a preset detection position of the sample has been detected and another detection position needs to be detected, a large range of adjustment is directly performed through the cooperation of the first drive mechanism, the second drive mechanism and the third drive mechanism, and then a small range of adjustment is performed through the stepper motor 611 and the piezoelectric shift stage 612. Finally, during the detection, the second shift stage 620 is used to move and detect.

[0027] It is worth mentioning that the detection mechanism 700 is a mechanism commonly used for experimental detection in atomic force microscopes in the prior art, which can be implemented by using the prior art and will not be described in detail in this embodiment.

[0028] That is to say, by using this adjustable atomic force microscope, through the coordinated operation between the first drive mechanism, the second drive mechanism, the third drive mechanism, the adjustment mechanism and the detection mechanism 700, it can be quickly adjusted according to specific needs, is suitable for experimental detection of large samples, and the time consumed in adjustment and positioning is short and the efficiency is high.

[0029] In summary, the above-mentioned embodiments are not limitative embodiments of the present invention, and any modifications or equivalent variations made by those skilled in the art on the basis of the essential contents of the present invention are within the technical scope of the present invention.

Claims

1. An adjustable atomic force microscope, characterized in that: include: A bottom plate, a placement platform, a first driving mechanism, a second driving mechanism, a third driving mechanism, an adjustment mechanism and a detection mechanism; The placement platform and the first driving mechanism are both arranged on one surface of the bottom plate, the first driving mechanism is used to drive the second driving mechanism, and the second driving mechanism is used to drive the third driving mechanism; The third driving mechanism is used to drive the adjusting mechanism, and the detecting mechanism is arranged on the adjusting mechanism.

2. The adjustable atomic force microscope according to claim 1, characterized in that: It also includes four shock absorbing components, which are all arranged on a side of the bottom plate away from the placement platform.

3. The adjustable atomic force microscope according to claim 2, characterized in that: The first driving mechanism includes a first driving motor, a first connecting rod and two first screw rods. The first driving motor, the first connecting rod and the two first screw rods are all arranged on one surface of the base plate. The first driving motor is used to drive one of the first screw rods, and the output shaft of the first driving motor is connected to one end of the first connecting rod, and the other end of the first connecting rod is rotatably connected to another first screw rod.

4. The adjustable atomic force microscope according to claim 3, characterized in that: A first sliding block is slidably arranged on each of the first screw rods, and two first sliding blocks are arranged correspondingly.

5. The adjustable atomic force microscope according to claim 4, characterized in that: The second driving mechanism includes a second driving motor, a second connecting rod and two second screw rods, each of the second screw rods is arranged on a first sliding block, the second driving motor is used to drive a second screw rod, and the output shaft of the second driving motor is connected to one end of the second connecting rod, and the other end of the second connecting rod is rotatably connected to another second screw rod.

6. The adjustable atomic force microscope according to claim 5, characterized in that: A second sliding block is slidably arranged on each of the second screw rods, and two of the second sliding blocks are arranged correspondingly.

7. The adjustable atomic force microscope according to claim 6, characterized in that: The third driving mechanism includes a third driving motor and a third screw rod. The third screw rod is arranged on two of the second sliding blocks. The third driving motor is used to drive the third screw rod.

8. The adjustable atomic force microscope according to claim 7, characterized in that: A third sliding block is slidably arranged on the third screw rod, and the adjusting mechanism is arranged on the third sliding block.

9. The adjustable atomic force microscope according to claim 8, characterized in that: The adjustment mechanism includes a first displacement stage, a second displacement stage and a mounting frame, the first displacement stage is arranged on the third slider, the first displacement stage is used to adjust the second displacement stage, the second displacement stage is used to adjust the mounting frame, and the detection mechanism is arranged on the mounting frame.

10. The adjustable atomic force microscope according to claim 9, characterized in that: The first displacement platform includes a stepper motor and a piezoelectric displacement platform, the stepper motor is arranged on the third slider, the output shaft of the stepper motor is connected to a lifting screw rod, a moving block is arranged on the lifting screw rod, the piezoelectric displacement platform is arranged on the moving block, and the second displacement platform is arranged on the piezoelectric displacement platform.

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