Radio frequency signal phase shift circuit, radio frequency signal generating device and radio frequency power supply equipment

Abstract

The invention provides a radio frequency signal phase shift circuit, a radio frequency signal generating device and radio frequency power supply equipment, and relates to the technical field of radio frequency, and the radio frequency signal phase shift circuit comprises a first phase shift circuit, a second phase shift circuit and a phase shift control unit. The first phase shift circuit is used for moving the phase angle of the radio frequency signal by a first angle so as to obtain an intermediate phase shift signal and output the intermediate phase shift signal through the first output end. And the second phase shift circuit is used for moving the phase angle of the intermediate phase shift signal by a second angle to obtain a target phase shift signal and outputting the target phase shift signal through the output end. The phase shift control unit is connected with the first phase shift circuit and the second phase shift circuit, and is used for determining a first angle and a second angle at least according to the phase angle of the radio frequency signal and controlling the first phase shift circuit to move the phase angle of the radio frequency signal by the first angle; and controlling the second phase shift circuit to shift the phase angle of the intermediate phase shift signal by a second angle. The phase angle modulation requirement of the radio frequency signal can be met.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency signal phase shift circuit, a radio frequency signal generating device and a radio frequency power supply. Background Art

[0002] At present, with the development of RF power supply related technologies, more detailed requirements have been put forward for RF power supply, especially in some scenarios, the phase of the RF signal output by the RF power supply also needs to be controlled, and the existing RF power supply often cannot meet the phase angle modulation requirements of the RF signal. Therefore, how to modulate the phase angle of the RF signal according to specific needs has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a radio frequency signal phase shift circuit, a radio frequency signal generating device and a radio frequency power supply device, which can meet the phase angle modulation requirements of the radio frequency signal.

[0004] In a first aspect, a radio frequency signal phase shift circuit is provided, the radio frequency signal phase shift circuit comprising a first phase shift circuit, a second phase shift circuit and a phase shift control unit, the first phase shift circuit comprising a first input terminal and a first output terminal, the second phase shift circuit comprising a second input terminal and a second output terminal. The first input terminal of the first phase shift circuit is used to receive the radio frequency signal output by the radio frequency power supply, the first phase shift circuit is used to shift the phase angle of the radio frequency signal by a first angle to obtain an intermediate phase shift signal and output it through the first output terminal. The second input terminal of the second phase shift circuit is connected to the first output terminal of the first phase shift circuit, the second phase shift circuit is used to shift the phase angle of the intermediate phase shift signal by a second angle to obtain a target phase shift signal and output it through the second output terminal. The phase shift control unit is connected to both the first phase shift circuit and the second phase shift circuit, the phase shift control unit is used to determine the first angle and the second angle at least according to the phase angle of the radio frequency signal, and control the first phase shift circuit to shift the phase angle of the radio frequency signal by the first angle, and control the second phase shift circuit to shift the phase angle of the intermediate phase shift signal by the second angle.

[0005] In a possible implementation, the first phase shift circuit includes a first cable, the first cable includes an opposite first end, a second end, and a connection point between the first end and the second end, the first end is a first input end of the first phase shift circuit, the connection point is a first output end of the first phase shift circuit, and the second end is open. The first angle changes according to the position of the connection point, and the phase shift control unit is used to control the connection point to be in a corresponding position according to the first angle after determining the first angle at least according to the phase angle of the radio frequency signal, so that the phase angle of the radio frequency signal moves by the first angle.

[0006] In a possible implementation, the phase shift control unit includes a first acquisition module, a first adjustment module, and a first control module. The first acquisition module is connected to the first end, and the first acquisition module is used to acquire the phase angle of the radio frequency signal. The first adjustment module is connected to the connection point, and the first adjustment module is used to adjust the position of the connection point so that the connection point changes between the first end and the second end. The first control module is connected to both the first acquisition module and the first adjustment module, and the first control module is used to receive the phase angle of the radio frequency signal, and determine the first angle at least according to the phase angle of the radio frequency signal, and control the first adjustment module to adjust the position of the connection point according to the relationship between the first angle, the length of the first cable, and the wavelength of the radio frequency signal transmitted in the first cable, so that the connection point is in a corresponding position.

[0007] In a possible implementation, the first control module determines the first angle based on the phase angle of the RF signal and a first preset phase shift ratio, wherein the first preset phase shift ratio is equal to the ratio of the angle by which the first phase shift circuit shifts the phase angle of the RF signal to the sum of the angles by which the first phase shift circuit and the second phase shift circuit respectively shift the phase angle of the RF signal.

[0008] In a possible implementation, the length of the first cable is equal to the wavelength of the radio frequency signal transmitted in the first cable, and when the position of the connection point changes from the first end to the second end, the first angle correspondingly changes from zero to 2π.

[0009] In a possible implementation, the second phase shift circuit includes a resistor module and at least one reactance device, and the resistor module and the at least one reactance device are both arranged between the second input terminal and the second output terminal of the second phase shift circuit. The resistor module has a variable resistance value, and the second angle changes according to the change of the resistance value of the resistor module, and the phase shift control unit is used to control the resistance value of the resistor module to a corresponding resistance value according to the second angle after determining the second angle at least according to the phase angle of the radio frequency signal.

[0010] In a possible implementation, the phase shift control unit includes a second acquisition module, a second adjustment module and a second control module. The second acquisition module is connected to the second input end of the second phase shift circuit, and the second acquisition module is used to acquire the phase angle of the intermediate phase shift signal. The second adjustment module is connected to the resistance module, and the second adjustment module is used to adjust the resistance value of the resistance module. The second control module is connected to both the second acquisition module and the second adjustment module, and the second control module is used to receive the phase angle of the intermediate phase shift signal, and determine the second angle according to the phase angle of the intermediate phase shift signal, and control the second adjustment module to adjust the resistance value of the resistance module according to the second angle, the resistance value of the resistance module and the reactance value of each reactance device, so that the resistance value of the resistance module is the corresponding resistance value.

[0011] In a possible implementation, the resistor module includes a first resistor, the first resistor has a variable resistance value, and the at least one reactance device includes a first reactance device and a second reactance device. Wherein, the first reactance device and the second reactance device are connected between the second input terminal and the second output terminal of the second phase shift circuit, one end of the first resistor is connected to the connection point between the first reactance device and the second reactance device, and the other end of the first resistor is grounded; or, the first resistor and the first reactance device are connected between the second input terminal and the second output terminal of the second phase shift circuit, one end of the second reactance device is connected to the connection point between the first resistor and the first reactance device, and the other end of the second reactance device is grounded; or, the first resistor and the second reactance device are connected between the second input terminal and the second output terminal of the second phase shift circuit, one end of the first reactance device is connected to the connection point between the first resistor and the second reactance device, and the other end of the first reactance device is grounded.

[0012] In a second aspect, a radio frequency signal generating device is also provided, the radio frequency signal generating device includes a radio frequency power supply and a radio frequency signal phase shift circuit. The radio frequency signal phase shift circuit includes a first phase shift circuit, a second phase shift circuit and a phase shift control unit, the first phase shift circuit includes a first input end and a first output end, and the second phase shift circuit includes a second input end and a second output end. The first input end of the first phase shift circuit is used to receive the radio frequency signal output by the radio frequency power supply, and the first phase shift circuit is used to shift the phase angle of the radio frequency signal by a first angle to obtain an intermediate phase shift signal and output it through the first output end. The second input end of the second phase shift circuit is connected to the first output end of the first phase shift circuit, and the second phase shift circuit is used to shift the phase angle of the intermediate phase shift signal by a second angle to obtain a target phase shift signal and output it through the second output end. The phase shift control unit is connected to both the first phase shift circuit and the second phase shift circuit, and the phase shift control unit is used to determine the first angle and the second angle at least according to the phase angle of the radio frequency signal, and control the first phase shift circuit to shift the phase angle of the radio frequency signal by the first angle, and control the second phase shift circuit to shift the phase angle of the intermediate phase shift signal by the second angle.

[0013] In a third aspect, a radio frequency power supply device is further provided, the radio frequency power supply device comprising a radio frequency signal generating device. The radio frequency signal generating device comprises a radio frequency power supply and a radio frequency signal phase shift circuit.

[0014] The RF signal phase shift circuit, RF signal generating device and RF power supply equipment of the present application are configured to determine the first angle and the second angle at least according to the phase angle of the RF signal by setting a phase shift control unit, and control the first phase shift circuit to move the phase angle of the RF signal by the first angle to obtain an intermediate phase shift signal, and control the second phase shift circuit to move the phase angle of the intermediate phase shift signal by the second angle to obtain a target phase shift signal, thereby being able to modulate the phase angle of the RF signal to meet the phase angle modulation requirements of the RF signal. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 Schematic diagram of a radio frequency signal phase shift circuit in an embodiment of the present application.

[0017] Figure 2 FIG. 4 is a schematic diagram of a first phase shift circuit and a phase shift control unit in an embodiment of the present application.

[0018] Figure 3 FIG. 4 is a schematic diagram of a second phase shift circuit and a phase shift control unit in an embodiment of the present application.

[0019] Figure 4 FIG. 4 is a schematic diagram of a second phase shift circuit in an embodiment of the present application.

[0020] Figure 5 FIG. 4 is a schematic diagram of a second phase shift circuit in yet another embodiment of the present application.

[0021] Figure 6 FIG. 4 is a schematic diagram of a second phase shift circuit in another embodiment of the present application.

[0022] Figure 7 FIG. 4 is a schematic diagram of a radio frequency signal generating device in an embodiment of the present application.

[0023] Figure 8 It is a schematic diagram of a radio frequency power supply device in one embodiment of the present application.

[0024] Description of the accompanying drawings: 1000, RF power supply equipment, PA, RF signal generating device, RF, RF power supply, RFS, RF signal, 10, RF signal phase shift circuit, 100, first phase shift circuit, i1, first input terminal, o1, first output terminal, IPS, intermediate phase shift signal, 110, first cable, T1, first terminal, T2, second terminal, Ts, connection point, 200, second phase shift circuit, i2, second input terminal, o2, second output terminal, TPS, target phase shift signal , 210, reactance device, 211, first reactance device, 212, second reactance device, 220, resistance module, R1, first resistor, GND, ground, 300, phase shift control unit, α1, first angle, α2, second angle, 310, first acquisition module, 320, first adjustment module, 330, first control module, CS1, first control signal, 340, second acquisition module, 350, second adjustment module, 360, second control module, CS2, second control signal. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0026] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0027] In the following, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "plurality" means two or more.

[0028] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0029] See also Figure 1 , Figure 1 FIG. 1 is a schematic diagram of a radio frequency signal phase shift circuit in an embodiment of the present application. Figure 1As shown, the present application provides a radio frequency signal phase shift circuit 10, the radio frequency signal phase shift circuit 10 includes a first phase shift circuit 100, a second phase shift circuit 200 and a phase shift control unit 300, the first phase shift circuit 100 includes a first input terminal i1 and a first output terminal o1, and the second phase shift circuit 200 includes a second input terminal i2 and a second output terminal o2. The first input terminal i1 of the first phase shift circuit 100 is used to receive the radio frequency signal RFS output by the radio frequency power supply RF, and the first phase shift circuit 100 is used to shift the phase angle of the radio frequency signal RFS by a first angle α1 to obtain an intermediate phase shift signal IPS and output it through the first output terminal o1. The second input terminal i2 of the second phase shift circuit 200 is connected to the first output terminal o1 of the first phase shift circuit 100, and the second phase shift circuit 200 is used to shift the phase angle of the intermediate phase shift signal IPS by a second angle α2 to obtain a target phase shift signal TPS and output it through the second output terminal. The phase shift control unit 300 is connected to both the first phase shift circuit 100 and the second phase shift circuit 200. The phase shift control unit 300 is used to determine the first angle α1 and the second angle α2 based on at least the phase angle of the radio frequency signal RFS, and control the first phase shift circuit 100 to move the phase angle of the radio frequency signal RFS to the first angle α1, and control the second phase shift circuit 200 to move the phase angle of the intermediate phase shift signal IPS to the second angle α2.

[0030] Therefore, the RF signal phase shift circuit 10 in the present application, by setting the phase shift control unit 300 to at least determine the first angle α1 and the second angle α2 according to the phase angle of the RF signal RFS, and controlling the first phase shift circuit 100 to move the phase angle of the RF signal RFS by the first angle α1 to obtain the intermediate phase shift signal IPS, and controlling the second phase shift circuit 200 to move the phase angle of the intermediate phase shift signal IPS by the second angle α2 to obtain the target phase shift signal TPS, so that the phase angle of the RF signal RFS can be modulated to meet the phase angle modulation requirement of the RF signal RFS.

[0031] It should be noted that the phase angle of the target phase shift signal TPS and the phase angle of the radio frequency signal RFS may be different or the same, that is, the sum of the first angle α1 and the second angle α2 may not be zero or may be zero.

[0032] Please also read Figure 2 , Figure 2 FIG. 1 is a schematic diagram of a first phase shift circuit and a phase shift control unit in an embodiment of the present application. Figure 1 , Figure 2As shown, the first phase shift circuit 100 includes a first cable 110, the first cable 110 includes a first end T1 and a second end T2 opposite to each other, and a connection point Ts located between the first end T1 and the second end T2, the first end T1 is a first input end i1 of the first phase shift circuit 100, the connection point Ts is a first output end o1 of the first phase shift circuit 100, and the second end T2 is open. The first angle α1 changes according to the position of the connection point Ts, and the phase shift control unit 300 is used to control the connection point Ts to be in a corresponding position according to the first angle α1 after determining the first angle α1 at least according to the phase angle of the radio frequency signal RFS, so that the phase angle of the radio frequency signal RFS moves by the first angle α1.

[0033] Thus, the RF signal phase shift circuit 10 in the present application, by setting the first cable 110, can perform a corresponding phase shift on the RF signal RFS received by the first cable 110 and then output it, so that the phase shift control unit 300 can control the connection point Ts to be in a corresponding position according to the first angle α1 after determining the first angle α1, so that the phase angle of the RF signal RFS moves by the first angle α1.

[0034] like Figure 1 , Figure 2 As shown, the phase shift control unit 300 includes a first acquisition module 310, a first adjustment module 320 and a first control module 330. The first acquisition module 310 is connected to the first end T1, and the first acquisition module 310 is used to acquire the phase angle of the radio frequency signal RFS. The first adjustment module 320 is connected to the connection point Ts, and the first adjustment module 320 is used to adjust the position of the connection point Ts so that the connection point Ts changes between the first end T1 and the second end T2. The first control module 330 is connected to both the first acquisition module 310 and the first adjustment module 320, and the first control module 330 is used to receive the phase angle of the radio frequency signal RFS, and determine the first angle α1 at least according to the phase angle of the radio frequency signal RFS, and control the first adjustment module 320 to adjust the position of the connection point Ts according to the relationship between the first angle α1, the length of the first cable 110 and the wavelength of the radio frequency signal RFS transmitted in the first cable 110, so that the connection point Ts is in a corresponding position.

[0035] Therefore, in the RF signal phase shift circuit 10 of the present application, the angle of the phase angle shift of the received RF signal RFS by the first cable 110 is related to the position of the connection point Ts, that is, according to the relationship between the first angle α1, the length of the first cable 110 and the wavelength of the RF signal RFS transmitted in the first cable 110, it is possible to determine that the position of the ground point GND corresponds to the angle of the phase angle shift of the RF signal RFS, so that the connection point Ts is in the corresponding position, and the first adjustment module 320 can be controlled to move the phase angle of the RF signal RFS by the first angle α1.

[0036] In one or more embodiments, the first cable 110 of the first phase shift circuit 100 may be a coaxial cable.

[0037] In one or more embodiments, the first acquisition module 310 can obtain the phase angle of the radio frequency signal RFS based on the preset phase angle, and output the phase angle of the radio frequency signal RFS to the first control module 330. The phase angle of the radio frequency signal RFS is also as shown in FIG. Figure 2 For example, generally speaking, the phase angle of the radio frequency signal RFS output by the radio frequency power source RF is zero, and the preset phase angle may be zero.

[0038] Furthermore, the first acquisition module 310 can obtain the phase angle of the RF signal RFS by comparing the preset waveform corresponding to the preset phase angle with the waveform of the RF signal RFS, or by comparing the preset point corresponding to the preset phase angle with the corresponding point of the RF signal RFS.

[0039] In one or more embodiments, the first control module 330 is used to obtain a first control signal CS1 based on the relationship between the first angle α1, the length of the first cable 110, and the wavelength of the radio frequency signal RFS transmitted in the first cable 110, and output the first control signal CS1 to the first adjustment module 320 to control the first adjustment module 320 to adjust the position of the connection point Ts so that the connection point Ts is at a corresponding position.

[0040] In particular, the connection point Ts of the first cable 110 may be electrically connected to the second input terminal i2 of the second phase shift circuit 200 through a conductor, so that the connection point Ts of the first cable 110 is connected to the second input terminal i2 of the second phase shift circuit 200 .

[0041] Further, when the connection point Ts of the first cable 110 is electrically connected to the second input end i2 of the second phase shift circuit 200 through a conductor, the conductor may be a flexible conductor. Since the first cable 110 and the second phase shift circuit 200 are generally arranged at fixed positions, it is not convenient to adjust the positions. In order to make the connection point Ts of the first cable 110 adjustable, the conductor is set as a flexible conductor, so that the electrical connection between the conductor and the connection point Ts of the first cable 110 can be adjusted, so that the first adjustment module 320 can adjust the position of the connection point Ts of the first cable 110.

[0042] Furthermore, the first regulating module 320 may include an regulating motor.

[0043] like Figure 1 , Figure 2As shown, the first control module 330 determines the first angle α1 according to the phase angle of the RF signal RFS and a first preset phase shift ratio, wherein the first preset phase shift ratio is equal to the ratio of the angle by which the first phase shift circuit 100 shifts the phase angle of the RF signal RFS to the sum of the angles by which the first phase shift circuit 100 and the second phase shift circuit 200 respectively shift the phase angle of the RF signal RFS.

[0044] Therefore, the radio frequency signal phase shift circuit 10 in the present application, due to the provision of the first phase shift circuit 100 and the second phase shift circuit 200, can shift the phase angle of the radio frequency signal RFS in stages.

[0045] The first preset phase shift ratio is the ratio of the first angle α1 to the sum of the first angle α1 and the second angle α2.

[0046] In one or more embodiments, the first preset phase shift ratio is between 0 and 1 and can be set according to specific needs.

[0047] Further, the first preset ratio may be 1, that is, the first control module 330 may determine the first angle α1 only according to the phase angle of the radio frequency signal RFS.

[0048] The length of the first cable 110 is equal to the wavelength of the radio frequency signal RFS transmitted in the first cable 110 , and when the position of the connection point Ts changes from the first end T1 to the second end T2 , the first angle α1 changes from zero to 2π accordingly.

[0049] Specifically, the first angle α1 can be -jβl , where β=2π / λ, e is a natural constant, j is an imaginary unit, π is the circumference of a circle, β is the phase velocity of the radio frequency signal RFS transmitted in the first cable 110, λ is the wavelength of the radio frequency signal RFS transmitted in the first cable 110, and l is the length from the first end T1 of the first cable 110 to the connection point Ts. If the length of the first cable 110 is λ, during the process of the position of the connection point Ts changing from the first end T1 to the second end T2, the first angle α1 changes from zero to 2π accordingly. For example, when l=4 / λ, the first angle α1 may be 2 / π; when l=2 / λ, the first angle α1 may be π.

[0050] Therefore, the RF signal phase shift circuit 10 in the present application can meet the phase angle modulation requirement of the RF signal RFS when the length of the first cable 110 is equal to the wavelength of the RF signal RFS transmitted in the first cable 110 .

[0051] In one or more embodiments, the frequency of the radio frequency signal RFS output by the radio frequency power source RF is between 300 kHz and 300 MHz.

[0052] Thus, in the RF signal phase shift circuit 10 of the present application, the wavelength of the RF signal RFS output by the RF power supply RF transmitted in the first cable 110 is related to the frequency of the RF signal RFS. When the frequency of the RF signal RFS output by the RF power supply RF is between 300kHz and 300MHz, that is, when the frequency of the RF signal RFS is a microwave frequency, the wavelength is shorter and the length of the first cable 110 is also shorter, which saves space and is also convenient for moving the position of the ground GND point of the first cable 110.

[0053] Please also read Figure 3 , Figure 3 FIG. 1 is a schematic diagram of a second phase shift circuit and a phase shift control unit in an embodiment of the present application. Figure 1 , Figure 3 As shown, the second phase shift circuit 200 includes a resistor module 220 and at least one reactance device 210, and the resistor module 220 and the at least one reactance device 210 are both arranged between the second input terminal i2 and the second output terminal o2 of the second phase shift circuit 200. The resistor module 220 has a variable resistance value, and the second angle α2 changes according to the change of the resistance value of the resistor module 220. The phase shift control unit 300 is used to control the resistance value of the resistor module 220 to be a corresponding resistance value according to the second angle α2 after determining the second angle α2 at least according to the phase angle of the radio frequency signal RFS.

[0054] Therefore, the RF signal phase shift circuit 10 in the present application can change the second angle α2 according to the change of the resistance value of the resistance module 220 by setting the second phase shift circuit 200 to include a resistance module 220 and at least one reactance device 210, thereby obtaining the target phase shift signal TPS.

[0055] It should be noted that the resistance value of the resistance module 220 and the reactance value of at least one reactance device 210 can be set according to specific needs. In order to reduce the power value of the radio frequency signal RFS of the second phase shift circuit 200, the resistance value of the resistance module 220 can be less than the first threshold, and the reactance value of each reactance device can be less than the second threshold.

[0056] It should be noted that, when the first phase shift circuit 100 includes the first cable 110 and the first preset ratio is 1, generally speaking, since the accuracy of the first phase shift circuit 100 using the first cable 110 is relatively low, it is still necessary to set the second phase shift circuit 200 to move the phase angle of the intermediate phase shift signal IPS, that is, the radio frequency signal RFS is first coarsely adjusted by the first phase shift circuit 100, and then fine-tuned by the second phase shift circuit 200 to obtain the required target phase shift signal TPS.

[0057] like Figure 1 , Figure 3As shown, the phase shift control unit 300 includes a second acquisition module 340, a second adjustment module 350 and a second control module 360. The second acquisition module 340 is connected to the second input terminal i2 of the second phase shift circuit 200, and the second acquisition module 340 is used to acquire the phase angle of the intermediate phase shift signal IPS. The second adjustment module 350 is connected to the resistance module 220, and the second adjustment module 350 is used to adjust the resistance value of the resistance module 220. The second control module 360 ​​is connected to both the second acquisition module 340 and the second adjustment module 350, and the second control module 360 ​​is used to receive the phase angle of the intermediate phase shift signal IPS, and determine the second angle α2 according to the phase angle of the intermediate phase shift signal IPS, and control the second adjustment module 350 to adjust the resistance value of the resistance module 220 according to the second angle α2, the resistance value of the resistance module 220 and the reactance value of each reactance device, so that the resistance value of the resistance module 220 is the corresponding resistance value.

[0058] Therefore, the angle of the phase angle shift of the received intermediate phase shift signal IPS by the RF signal phase shift circuit 10, the resistor module 220 and the at least one reactance device 210 in the present application is related to the resistance value of the resistor module 220 and the reactance value of each reactance device, that is, according to the second angle α2, the resistance value of the resistor module 220 and the reactance value of each reactance device, the phase angle shift angle of the intermediate phase shift signal IPS corresponding to the resistance value of the resistor module 220 can be determined, so that the resistance value of the resistor module 220 is the corresponding resistance value, and the second adjustment module 350 can be controlled to move the phase angle of the intermediate phase shift signal IPS by the second angle α2.

[0059] In one or more embodiments, the second acquisition module 340 can obtain the phase angle of the intermediate phase shift signal IPS based on the phase angle of the radio frequency signal RFS, and output the phase angle of the intermediate phase shift signal IPS to the second control module 360. The intermediate phase shift signal IPS is also as shown in FIG. Figure 3 When the second acquisition module 340 acquires the phase angle of the intermediate phase shift signal IPS based on the phase angle of the radio frequency signal RFS, the second acquisition module 340 may be connected to the first acquisition module 310 to receive the phase angle of the radio frequency signal RFS.

[0060] Furthermore, the second acquisition module 340 can obtain the phase angle of the intermediate phase-shift signal IPS by comparing the waveform of the RF signal RFS with the waveform of the intermediate phase-shift signal IPS, or can obtain the phase angle of the intermediate phase-shift signal IPS by comparing any point of the RF signal RFS with the corresponding point of the intermediate phase-shift signal IPS.

[0061] In one or more embodiments, the second control module 360 ​​is used to obtain a second control signal CS2 based on the second angle α2, the resistance value of the resistance module 220 and the reactance value of each reactance device, and output the second control signal CS2 to the second adjustment module 350 to control the second adjustment module 350 to adjust the resistance value of the resistance module 220 so that the resistance value of the resistance module 220 is the corresponding resistance value.

[0062] Furthermore, the second regulating module 350 may include an regulating motor.

[0063] Please also read Figure 4 , Figure 5 , Figure 6 , Figure 4 is a schematic diagram of a second phase shift circuit in an embodiment of the present application, Figure 5 is a schematic diagram of a second phase shift circuit in yet another embodiment of the present application, Figure 6 FIG. 1 is a schematic diagram of a second phase shift circuit in another embodiment of the present application. Figure 3-Figure 6 As shown, the resistor module 220 includes a first resistor R1 having a variable resistance value, and the at least one reactance device 210 includes a first reactance device 211 and a second reactance device 212 .

[0064] Among them, Figure 3 , Figure 4 As shown, the first inductor 211 and the second inductor 212 are connected between the second input terminal i2 and the second output terminal o2 of the second phase shift circuit 200, one end of the first resistor R1 is connected to the connection point Ts between the first inductor 211 and the second inductor 212, and the other end of the first resistor R1 is grounded GND; or Figure 3 , Figure 5 As shown, the first resistor R1 and the first reactance device 211 are connected between the second input terminal i2 and the second output terminal o2 of the second phase shift circuit 200, one end of the second reactance device 212 is connected to the connection point Ts between the first resistor R1 and the first reactance device 211, and the other end of the second reactance device 212 is grounded GND; or Figure 3 , Figure 6 As shown, the first resistor R1 and the second inductor 212 are connected between the second input terminal i2 and the second output terminal o2 of the second phase shift circuit 200, one end of the first inductor 211 is connected to the connection point Ts between the first resistor R1 and the second inductor 212, and the other end of the first inductor 211 is grounded GND.

[0065] Therefore, the RF signal phase shift circuit 10 in the present application can modulate the phase angle of the intermediate phase shift signal IPS by setting the first resistor R1, the first inductor 211 and the second inductor 212 to meet the phase angle modulation requirements of the intermediate phase shift signal IPS, and by setting the first resistor R1 to have a variable resistance value, the resistance value of the resistance module 220 can be made to be a corresponding resistance value.

[0066] Specifically, taking the example in which the first inductor 211 and the second inductor 212 are connected between the second input terminal i2 and the second output terminal o2 of the second phase shift circuit 200, one end of the first resistor R1 is connected to the connection point Ts between the first inductor 211 and the second inductor 212, and the other end of the first resistor R1 is grounded GND, the second angle α2 can be tan[AB-(A+B)C] / A, wherein A is the resistance value of the first resistor R1, B is the reactance value of the first inductor 211, and C is the reactance value of the second inductor 212. When the resistance value A of the first resistor R1 changes, the second angle α2 will also change accordingly.

[0067] In one or more embodiments, the first reactance device 211 may be a capacitive device or an inductive device, and the second capacitive device may also be a capacitive device or an inductive device.

[0068] In one or more embodiments, the first control module 330 and the second control module 360 ​​can be general-purpose processors such as a central processing unit (CPU), or digital signal processors (DSP), application specific integrated circuits (ASIC), field programmable gate arrays (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or microprocessors such as micro control units (MCU).

[0069] The RF signal phase shift circuit 10 of the present application, through the above structure, can control the first phase shift circuit 100 to move the phase angle of the RF signal RFS to the first angle α1 to obtain the intermediate phase shift signal IPS, and control the second phase shift circuit 200 to move the phase angle of the intermediate phase shift signal IPS to the second angle α2 to obtain the target phase shift signal TPS, and adjust the first angle α1 and / or the second angle α2 as needed, so that the phase angle of the RF signal RFS can be modulated to meet the phase angle modulation requirement of the RF signal RFS.

[0070] See also Figure 7 , Figure 7 FIG. 1 is a schematic diagram of a radio frequency signal generating device in an embodiment of the present application. Figure 7 As shown, the present application further provides a radio frequency signal generating device PA, the radio frequency signal generating device PA comprising a radio frequency power supply RF and the radio frequency signal phase shift circuit 10 in any of the aforementioned embodiments.

[0071] Please refer again Figure 1 .like Figure 1 As shown, the RF signal phase shift circuit 10 includes a first phase shift circuit 100, a second phase shift circuit 200 and a phase shift control unit 300. The first phase shift circuit 100 includes a first input terminal i1 and a first output terminal o1, and the second phase shift circuit 200 includes a second input terminal i2 and a second output terminal o2. The first input terminal i1 of the first phase shift circuit 100 is used to receive the RF signal RFS output by the RF power supply RF, and the first phase shift circuit 100 is used to shift the phase angle of the RF signal RFS by a first angle α1 to obtain an intermediate phase shift signal IPS and output it through the first output terminal o1. The second input terminal i2 of the second phase shift circuit 200 is connected to the first output terminal o1 of the first phase shift circuit 100, and the second phase shift circuit 200 is used to shift the phase angle of the intermediate phase shift signal IPS by a second angle α2 to obtain a target phase shift signal TPS and output it through the second output terminal. The phase shift control unit 300 is connected to both the first phase shift circuit 100 and the second phase shift circuit 200. The phase shift control unit 300 is used to determine the first angle α1 and the second angle α2 based on at least the phase angle of the radio frequency signal RFS, and control the first phase shift circuit 100 to move the phase angle of the radio frequency signal RFS to the first angle α1, and control the second phase shift circuit 200 to move the phase angle of the intermediate phase shift signal IPS to the second angle α2.

[0072] The more specific structure of the RF signal phase shift circuit 10 may refer to the relevant content of the RF signal phase shift circuit 10 in any of the aforementioned embodiments, which will not be described in detail here.

[0073] The RF signal phase shift circuit 10 and the RF signal generating device PA of the present application, through the above structure, can control the first phase shift circuit 100 to move the phase angle of the RF signal RFS to the first angle α1 to obtain the intermediate phase shift signal IPS, and control the second phase shift circuit 200 to move the phase angle of the intermediate phase shift signal IPS to the second angle α2 to obtain the target phase shift signal TPS, and adjust the first angle α1 and / or the second angle α2 as needed, so that the phase angle of the RF signal RFS can be modulated to meet the phase angle modulation requirements of the RF signal RFS.

[0074] See also Figure 8 , Figure 8FIG. 1 is a schematic diagram of a radio frequency power supply device in an embodiment of the present application. Figure 8 As shown, the present application further provides a radio frequency power supply device 1000, and the radio frequency power supply device 1000 includes the radio frequency signal generating device PA in any of the aforementioned embodiments.

[0075] Please refer again Figure 7 .like Figure 7 As shown, the radio frequency signal generating device PA includes a radio frequency power supply RF and a radio frequency signal phase shift circuit 10 .

[0076] The RF signal phase shift circuit 10, RF signal generating device PA and RF power supply equipment 1000 of the present application can control the first phase shift circuit 100 to move the phase angle of the RF signal RFS to the first angle α1 to obtain the intermediate phase shift signal IPS, and control the second phase shift circuit 200 to move the phase angle of the intermediate phase shift signal IPS to the second angle α2 to obtain the target phase shift signal TPS, and adjust the first angle α1 and / or the second angle α2 as needed, so as to modulate the phase angle of the RF signal RFS to meet the phase angle modulation requirements of the RF signal RFS.

[0077] In the multiple embodiments provided in the present application, it should be understood that the disclosed devices and equipment can be implemented in other ways. For example, the device embodiments described above are only schematic; for example, the division of units is only a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0078] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0079] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may be physically included separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of hardware plus software functional units.

[0080] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A radio frequency signal phase shift circuit, characterized in that: It comprises a first phase shift circuit, a second phase shift circuit and a phase shift control unit, wherein the first phase shift circuit comprises a first input terminal and a first output terminal, and the second phase shift circuit comprises a second input terminal and a second output terminal; The first input end of the first phase shift circuit is used to receive the radio frequency signal output by the radio frequency power supply, and the first phase shift circuit is used to shift the phase angle of the radio frequency signal by a first angle to obtain an intermediate phase shift signal and output it through the first output end; The second input end of the second phase shift circuit is connected to the first output end of the first phase shift circuit, and the second phase shift circuit is used to shift the phase angle of the intermediate phase shift signal by a second angle to obtain a target phase shift signal and output it through a second output end; The phase shift control unit is connected to both the first phase shift circuit and the second phase shift circuit, and is used to determine the first angle and the second angle based on at least the phase angle of the radio frequency signal, and control the first phase shift circuit to move the phase angle of the radio frequency signal by the first angle, and control the second phase shift circuit to move the phase angle of the intermediate phase shift signal by the second angle.

2. The radio frequency signal phase shift circuit according to claim 1, characterized in that: The first phase shift circuit includes a first cable, the first cable includes an opposite first end, a second end, and a connection point between the first end and the second end, the first end is a first input end of the first phase shift circuit, the connection point is a first output end of the first phase shift circuit, and the second end is open; The first angle changes according to the position of the connection point, and the phase shift control unit is used to determine the first angle at least according to the phase angle of the radio frequency signal, and then control the connection point to be in a corresponding position according to the first angle so that the phase angle of the radio frequency signal moves by the first angle.

3. The radio frequency signal phase shift circuit according to claim 2, characterized in that: The phase shift control unit includes a first acquisition module, a first adjustment module and a first control module; The first acquisition module is connected to the first end, and the first acquisition module is used to acquire the phase angle of the radio frequency signal; The first adjustment module is connected to the connection point, and the first adjustment module is used to adjust the position of the connection point so that the connection point changes between the first end and the second end; The first control module is connected to both the first acquisition module and the first adjustment module. The first control module is used to receive the phase angle of the radio frequency signal, determine the first angle at least according to the phase angle of the radio frequency signal, and control the first adjustment module to adjust the position of the connection point according to the relationship between the first angle, the length of the first cable, and the wavelength of the radio frequency signal transmitted in the first cable, so that the connection point is at a corresponding position.

4. The radio frequency signal phase shift circuit according to claim 3, characterized in that: The first control module determines the first angle according to the phase angle of the RF signal and a first preset phase shift ratio, wherein the first preset phase shift ratio is equal to the ratio of the angle by which the first phase shift circuit shifts the phase angle of the RF signal to the sum of the angles by which the first phase shift circuit and the second phase shift circuit respectively shift the phase angle of the RF signal.

5. The radio frequency signal phase shift circuit according to claim 2, characterized in that: The length of the first cable is equal to the wavelength of the radio frequency signal transmitted in the first cable, and when the position of the connection point changes from the first end to the second end, the first angle changes from zero to 2π accordingly.

6. The radio frequency signal phase shift circuit according to claim 1, characterized in that: The second phase shift circuit comprises a resistance module and at least one reactance device, wherein the resistance module and the at least one reactance device are both arranged between a second input terminal and a second output terminal of the second phase shift circuit; The resistance module has a variable resistance value, the second angle changes according to the resistance value of the resistance module, and the phase shift control unit is used to control the resistance value of the resistance module to a corresponding resistance value according to the second angle after determining the second angle at least according to the phase angle of the radio frequency signal.

7. The radio frequency signal phase shift circuit according to claim 6, characterized in that: The phase shift control unit includes a second acquisition module, a second adjustment module and a second control module; The second acquisition module is connected to the second input end of the second phase shift circuit, and the second acquisition module is used to acquire the phase angle of the intermediate phase shift signal; The second adjustment module is connected to the resistance module, and the second adjustment module is used to adjust the resistance value of the resistance module; The second control module is connected to both the second acquisition module and the second adjustment module. The second control module is used to receive the phase angle of the intermediate phase shift signal, determine the second angle according to the phase angle of the intermediate phase shift signal, and control the second adjustment module to adjust the resistance value of the resistance module according to the second angle, the resistance value of the resistance module and the reactance value of each reactance device, so that the resistance value of the resistance module is the corresponding resistance value.

8. The radio frequency signal phase shift circuit according to claim 6, characterized in that: The resistor module includes a first resistor having a variable resistance value, and the at least one reactance device includes a first reactance device and a second reactance device; Among them, the first inductor and the second inductor are connected between the second input terminal and the second output terminal of the second phase shift circuit, one end of the first resistor is connected to the connection point between the first inductor and the second inductor, and the other end of the first resistor is grounded; or, the first resistor and the first inductor are connected between the second input terminal and the second output terminal of the second phase shift circuit, one end of the second inductor is connected to the connection point between the first resistor and the first inductor, and the other end of the second inductor is grounded; or, the first resistor and the second inductor are connected between the second input terminal and the second output terminal of the second phase shift circuit, one end of the first inductor is connected to the connection point between the first resistor and the second inductor, and the other end of the first inductor is grounded.

9. A radio frequency signal generating device, characterized in that: It comprises a radio frequency power supply and a radio frequency signal phase shift circuit as claimed in any one of claims 1 to 8.

10. A radio frequency power supply device, characterized in that: It comprises the radio frequency signal generating device as claimed in claim 9.

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