High-frequency power supply device

Abstract

This high-frequency power supply device is provided with a control unit that controls the output level of a combined output obtained by power combining the amplifier outputs of a multi-stage power amplifier. The control unit executes: (a) determining an amplifier output reference value pref for determining an output level output by each amplifier; (b) comparing the output feedback value pfb of each amplifier with the output reference value pref of the amplifier; (c) setting, for each power amplifier, an operation amount MV for controlling an output level of each amplifier output of each power amplifier; and (d) the output level of each amplifier output of each power amplifier is controlled according to each set operation amount MV. The high-frequency power supply device combines the power output by the plurality of amplifiers that has been amplified by the multi-stage power amplifiers, thereby suppressing a reduction in power supply efficiency due to the difference in the amplifier output power of the respective power amplifiers.

Description

Technical Field

[0001] The present invention relates to a high-frequency power supply device having a power amplification section and a power synthesis section composed of a multi-stage power amplifier, and relates to a high-frequency power supply device that distributes a high-frequency signal to multiple power amplifiers, synthesizes the power of each amplifier output after power amplification by each power amplifier through the power synthesis section, and outputs the synthesized output. Background Art

[0002] A high-frequency power supply device is known in which a power amplification section is formed by a plurality of power amplifiers connected in parallel, and a power synthesizing section synthesizes the power of amplifier outputs obtained from the power amplifiers of each stage and outputs the synthesized output. Among such high-frequency power supply devices, a linear amplifier type high-frequency power supply device using a class AB amplifier as each power amplifier (see Patent Document 1) or a switching amplifier type high-frequency power supply device using a class D amplifier (see Patent Document 2) is known.

[0003] In a multi-stage power amplifier in parallel, the output power amplified by each stage of the power amplifier varies according to the characteristic deviation of the semiconductor element (MOSFET, bipolar transistor) used in the power amplifier and the deviation of the circuit components used in the peripheral amplifier circuit of the power amplifier. For example, when the output power of a certain stage of the power amplifier is set to 1000W (60dBm), when the amplification degree of the power amplifier varies by a maximum of ±1.5dB, the output power is 708W (58.5dBm) when the -1.5dB variation is made, and the output power is 1412W (61.5dBm) when the +1.5dB variation is made. Therefore, with respect to the reference power of 1000W, a power variation of a maximum power difference of about 300W is generated above and below.

[0004] Regarding the variation of the output power of the power amplifier, Patent Document 1 records the following: the output levels of the output powers of the two power amplifiers are compared to set the optimal output level, the control voltage of the variable attenuator of the power amplifier is adjusted, and the attenuation of the variable attenuator is controlled to minimize the loss of the power synthesis unit.

[0005] Patent Document 2 discloses that a power amplifier section is formed of two power amplifiers connected in parallel, and that harmonic output is changed by changing the phase of each of the two power amplifiers with respect to a sudden load change.

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Publication No. 2001-237651

[0009] Patent Document 2: Japanese Patent Application Publication No. 2021-106462 Summary of the invention

[0010] Problems to be solved by the invention

[0011] The combined output of the high frequency power supply device is obtained by combining the power outputs of the multi-stage power amplifiers. On the other hand, the power efficiency of each power amplifier varies according to the output power corresponding to the characteristics of the semiconductor devices constituting each power amplifier.

[0012] When the output power differs due to the deviation of the semiconductor elements and circuit components of each power amplifier, the power efficiency of each power amplifier varies due to the output power / power efficiency characteristics, and the power efficiency between each power amplifier varies. In this way, if the power efficiency between each power amplifier is not uniform, each power amplifier cannot be driven with the best power efficiency when the power of each amplifier output is combined. Therefore, the overall power efficiency of the high-frequency power supply device is reduced.

[0013] In the above-mentioned prior art, Patent Document 1 compares the output levels of two power amplifiers in response to the change in the output power of the high-frequency power supply device, and controls the attenuation of each power amplifier to minimize the loss of the power combiner. However, Patent Document 1 does not disclose the problem of power efficiency of each power amplifier of the high-frequency power supply device and the means to solve the problem.

[0014] In addition, Patent Document 2 changes the phases of two power amplifiers in response to sudden load changes, thereby reducing the electrical stress generated in the circuit components and load device of the high-frequency power supply device when the load suddenly changes without increasing the size of the power supply device. However, Patent Document 2 does not disclose the problem of power efficiency of each power amplifier of the high-frequency power supply device and the means for solving the problem.

[0015] The present invention aims to solve the above-mentioned conventional problems and to suppress the reduction in power efficiency of a high-frequency power supply device caused by the power difference between the amplifier outputs of each power amplifier in a high-frequency power supply device that combines the power outputs of multiple amplifiers after power amplification by a multi-stage power amplifier.

[0016] Means for solving problems

[0017] (A) High frequency power supply device

[0018] A1: Structure

[0019] The high frequency power supply device of the present invention comprises:

[0020] A power amplifier section, which is composed of multiple power amplifiers connected in parallel;

[0021] a distribution unit that distributes the high-frequency signal to each power amplifier;

[0022] a power combining unit for combining the power of the plurality of amplifier outputs after power amplification by the respective power amplifiers and outputting the obtained combined output;

[0023] a detector that detects the feedback value; and

[0024] A control section controls an output level.

[0025] In the present invention, as a detector, there is an amplifier output detection unit that detects the amplifier output feedback value p of the power amplifier. fb ; A synthetic output detection unit, which detects the synthetic output feedback value P FB The combined output detection unit is connected between the power combining unit and the output end, separates the traveling wave power from the output end to the load and the reflected wave power from the output end to the power combining unit, and detects the combined output feedback value P according to the traveling wave power. FB The combined output detection unit may use, for example, a directional coupler.

[0026] The control unit of the present invention performs:

[0027] (a) According to the synthetic output command value P com Or the synthetic output feedback value P FB , to determine the amplifier output reference value p ref (Amplifier output command value p com Or the amplifier output conversion value p FB ), the amplifier outputs a reference value p ref Used to determine the output level of each amplifier output;

[0028] (b) The amplifier output feedback value p detected by the amplifier output detection unit is fb The amplifier output reference value p ref (Amplifier output command value p com , amplifier output conversion value p FB ) for comparison;

[0029] (c) setting a manipulation amount MV for controlling the output level of each amplifier output of each power amplifier for each power amplifier;

[0030] (d) The output level of each amplifier output of each power amplifier is controlled according to each set operation amount MV.

[0031] In addition, "P" represents a composite output, and "p" represents an amplifier output. In each character string described after the symbols P and p, "com" represents a command value, "ref" represents a reference value, "FB" represents feedback of the composite output, and "fb" represents feedback of the amplifier output.

[0032] Composite output command value P com It is a command value for determining a target value of the combined output of the power combining unit.

[0033] Amplifier output feedback value p fb It is the power value of the amplifier output of each power amplifier and is detected by the amplifier output detection unit.

[0034] Synthetic output feedback value P FB It is the power value of the combined output of the power combining unit and is detected by the combined output detection unit.

[0035] Amplifier output reference value p ref is a reference value for determining the output level of the amplifier output. As this reference value, the amplifier output command value p com Or the amplifier output conversion value p FB .

[0036] Amplifier output command value p com The output command value P is determined for each power amplifier, and the synthesized output command value P is proportionally allocated according to the number of power amplifiers, i.e., the number N, and the output power / power efficiency characteristics of the power amplifiers. com , and thus calculate the amplifier output command value p com .

[0037] Amplifier output conversion value p FB The amplifier output determined for each power amplifier is proportionally allocated according to the number of power amplifier stages, i.e., the number N, and the output power / power efficiency characteristics of the power amplifier. FB , from which the amplifier output conversion value p is calculated FB .

[0038] In the present invention, in setting the operation amount MV for controlling the output level of the amplifier output of the power amplifier, the output level of the combined output is determined based on the combined output command value P for the amplifier output of each power amplifier. com Or the synthetic output feedback value P FB , to determine the amplifier output reference value p ref (Amplifier output command value p com Or the amplifier output conversion value p FB ), the amplifier outputs a reference value p refIt is used to determine the output level (a) of the amplifier output, and to set the amplifier output reference value p ref (Amplifier output command value p com Or the amplifier output conversion value p FB ) is used as a reference for controlling the output level of each amplifier output and is combined with the amplifier output feedback value p fb Comparing (b), through the above (a) and (b), the reference value used to set the manipulated variable MV for controlling each power amplifier is stabilized without relying on the feedback value of each amplifier output, thereby stabilizing the control of the output level.

[0039] In the control of the conventional device, the feedback values ​​output by each amplifier are compared with each other, and the manipulated variable MV is set by the relative comparison between the feedback values. Therefore, it is difficult to determine which feedback value is normal, so the reference for setting the manipulated variable MV is unstable. In contrast, in the present invention, the synthetic output command value P is used to determine the normal feedback value. com Or the synthetic output feedback value P FB , determine the amplifier output reference value p for each power amplifier ref (Amplifier output command value p com Or the amplifier output conversion value p FB ), and these amplifiers output reference values ​​p ref (Amplifier output command value p com Or the amplifier output conversion value p FB ) as the reference value and the output feedback value p of each amplifier fb By making the comparison, the manipulation amount MV can be set without depending on the feedback values ​​outputted from the amplifiers.

[0040] In the case of a fault in the first-stage power amplifier of the existing high-frequency power supply device and inability to output, the entire device may stop operating. In contrast, even if a fault occurs in the first-stage power amplifier and inability to output, the high-frequency power supply device of the present invention can continue to operate by automatically optimizing the output balance of the power amplifiers of other stages.

[0041] A2: Setting of the operation volume MV

[0042] In the setting of the manipulated variable MV, the amplifier output feedback value p is used as fb The amplifier output reference value p of each power amplifier used as the reference value for comparison ref (Amplifier output command value p com Or the amplifier output conversion value p FB ), can be obtained by combining the synthetic output command value P com The setting method (A2-a) or based on the synthetic output feedback value P FB It is obtained by setting method (A2-b).

[0043] A2-a: Based on the synthetic output command value P com How to set the manipulated variable MV

[0044] In this setting method, the combined output command value P com , set the amplifier output command value p com As the operation amount MV of each power amplifier.

[0045] The control unit determines the output level of the combined output according to the combined output instruction value P com , the number of power amplifiers N and the output power / power efficiency characteristics of each power amplifier, determine the amplifier output command value p of each power amplifier com In addition, the control unit sets and controls the amplifier output feedback value p detected by each amplifier output detection unit. fb becomes the amplifier output command value p com The operation amount MV is set, and the gain of the power amplifier is controlled according to the set operation amount MV. In addition, the number N of power amplifiers is an integer greater than 2, which is equivalent to the number of stages of the power amplifier.

[0046] The operation amount MV can be set in two ways: a setting method (a1) in which the outputs of the power amplifiers are set to a uniform output level; and a setting method (a2) in which the outputs of the power amplifiers are set to an individual output level.

[0047] (a1) Setting method for uniform output level

[0048] In this setting method, each power amplifier has an equal output power / power efficiency characteristic, and each output power is set so that the power efficiency of each power amplifier is the same.

[0049] The control unit outputs the synthetic command value P com Divide by the number of power amplifiers N to calculate the "synthesized output command value P com / Number N” is P com / N, and the calculated value is determined as the operation amount MV of each power amplifier, that is, the amplifier output command value p com .

[0050] The composite output command value / number is P com / N amplifier output command value p com The output power / power efficiency characteristics of each power amplifier are equal, so by setting the output power to a uniform output, the power efficiency of each power amplifier is equal, and the overall power efficiency is improved.

[0051] (a2) Control method for setting individual output levels

[0052] In this setting method, each power amplifier has a unique output power / power efficiency characteristic. In each unique output power / power efficiency characteristic of the power amplifier, the control unit uses each output power value determined for the same power efficiency as the operation amount MV of each power amplifier to determine the amplifier output command value p com The amplifier outputs the command value p com In the setting, each amplifier output command value p com The sum of the sum of the output command value P is determined as the composite output command value P com By applying the amplifier output command value p com Determine the sum of which is the composite output command value P com Such restriction can suppress the fluctuation of the output level of the combined output.

[0053] A2-b: Based on the synthetic output feedback value P FB How to set the manipulated variable MV

[0054] In this setting method, according to the synthetic output feedback value P FB , set the amplifier output conversion value p FB As the operation amount MV of each power amplifier.

[0055] The control unit outputs the feedback value P according to the synthesis output of the power synthesis unit. FB , the number of power amplifiers N, and the output power / power efficiency characteristics of each power amplifier, determine the amplifier output conversion value p of each power amplifier FB The control unit sets the amplifier output feedback value p detected by each amplifier output detection unit. fb The amplifier output conversion value p FB The operation amount MV is used to control the gain of the power amplifier according to the operation amount MV. FB The amplifier output determined for each power amplifier is proportionally allocated to the synthesized output feedback value P according to the number N of power amplifiers and the output power / power efficiency characteristics of the power amplifiers. FB , from which the amplifier output conversion value p is calculated FB .

[0056] Based on the synthetic output feedback value P FB In the setting of , as the setting of the operation amount MV, there are: a setting method (b1) of setting the output of each power amplifier to a uniform output level; and a setting method (b2) of setting the output of each power amplifier to an independent output level.

[0057] (b1) Setting method of uniform output level

[0058] In this setting method, each power amplifier has an equal output power / power efficiency characteristic, and each output power is set so that the power efficiency of each power amplifier is the same.

[0059] The control unit calculates the synthetic output feedback value P FB The "synthesized output feedback value P" is obtained by dividing by the number of power amplifiers N. FB / The number of power amplifiers N” is P FB / N uniform output, and the calculated value is determined as the operation amount MV of each power amplifier, that is, the amplifier output conversion value p FB The output power / power efficiency characteristics of each power amplifier are equal, so by setting the output power to a uniform output, the power efficiency of each power amplifier is equal, and the overall power efficiency is improved.

[0060] (b2) Individual output level control method

[0061] In this setting method, each power amplifier has its own unique output power / power efficiency characteristics.

[0062] In the output power / power efficiency characteristics inherent to each power amplifier, the control unit converts the amplifier output conversion value p from each power amplifier to achieve the same power efficiency. FB The output conversion value p of each amplifier is determined in the combination of FB The sum of the output feedback value P FB By converting the amplifier output to p FB The sum of the two components is limited to become the composite output feedback value P FB , which can suppress the variation of the output level of the synthesized output.

[0063] A3: Operation volume MV

[0064] The operation amount MV for controlling the output level of the amplifier output of the power amplifier section is set according to the amplifier mode of each stage of the power amplifier of the power amplifier section.

[0065] (a) When each power amplifier of the power amplification section is composed of a linear amplifier, the linear amplifier includes an amplifier with a variable attenuator, and the attenuation amount A of the amplifier with a variable attenuator is adjusted. tt To set the manipulated value MV.

[0066] (b) When each power amplifier of the power amplification section is composed of a switching amplifier including a phase control section, the operation amount MV is set according to the phase shift amount θ and the phase amount θ of the phase control section. The phase shift amount θ is a control amount for controlling the power amount in the phase shift control, and the phase amount θ is a control amount for controlling the timing of turning on / off of a switching element such as a bidirectional thyristor included in the phase controller.

[0067] The gains of the power amplifiers of each stage can be made uniform by adjusting the manual adjustment circuit based on the variable resistor, but in this case, the adjustment process requires a lot of man-hours, and there is also the problem that it is difficult to automatically cope with the gain fluctuations caused by the aging of the power amplifiers of each stage. In contrast, in the present invention, in the case of a linear amplifier, the attenuation A of the amplifier with a variable attenuator is adjusted. tt These problems can be solved by controlling the phase shift amount θ and the phase amount θ of the phase control unit as the manipulated variable MV and controlling the phase shift amount θ and the phase amount θ of the phase control unit as the manipulated variable MV in the case of a switching amplifier.

[0068] A4: Abnormality detection of power amplifier

[0069] As a method of detecting an abnormality in the power amplifier unit, there are two methods: FB Abnormal detection method (a); based on the output feedback value p of each amplifier fb Anomaly detection method (b).

[0070] (a) Based on the synthetic output feedback value P FB Anomaly detection method

[0071] The control unit outputs the feedback value P according to the synthesis FB To detect abnormal conditions. In one method, the synthesized output feedback value P FB and the composite output command value P com The synthetic output feedback value P is compared FB Relative to the amplifier composite output command value P com If it exceeds the permissible range, it is detected that the power amplifier is in an abnormal state.

[0072] In another embodiment, according to the synthesized output feedback value P FB The change in the synthetic output feedback value P FB When the fluctuation range exceeds the allowable range, it is detected that the power amplifier is in an abnormal state.

[0073] (b) Based on the amplifier output feedback value p fb Anomaly detection method

[0074] The control unit outputs the feedback value p according to the amplifier fbTo detect abnormal conditions. In one approach, the amplifier output feedback value p fb and the amplifier output command value p com For comparison, the amplifier output feedback value p fb Relative to the amplifier output command value p com If it exceeds the permissible range, it is detected that the power amplifier is in an abnormal state.

[0075] In another embodiment, according to the amplifier output feedback value p fb The change in the amplifier output feedback value p fb When the fluctuation range exceeds the allowable range, it is detected that the power amplifier is in an abnormal state.

[0076] (B) : Control method of high frequency power supply device

[0077] B1: Control Methods

[0078] A control method for a high-frequency power supply device, wherein the high-frequency power supply device comprises: a power amplifying section, which is composed of a plurality of power amplifiers connected in parallel; a distribution section, which distributes a high-frequency signal to each power amplifier of the power amplifying section; a power synthesizing section, which performs power synthesis on a plurality of amplifier outputs after power amplification by each power amplifier, and outputs the synthesized output;

[0079] In the control method,

[0080] (a) According to the synthetic output command value P com Or the synthetic output feedback value P FB , to determine the amplifier output reference value p used to determine the output level of each amplifier output ref (Amplifier output command value p com Or the amplifier output conversion value p FB ).

[0081] (b) The output feedback value of each amplifier is p fb The amplifier output reference value p ref (Amplifier output command value p of each amplifier output com Or the amplifier output conversion value p FB ) for comparison.

[0082] (c) Based on the comparison, a manipulation amount MV for controlling the output level of each amplifier output is set for each power amplifier.

[0083] (d) The output level of each amplifier output of each power amplifier is controlled according to each operation amount MV.

[0084] B2: Setting of the manipulated volume MV

[0085] In the setting of the manipulated variable MV, the amplifier output feedback value p is used as fb The amplifier output reference value p of each power amplifier used as the reference value for comparison ref , with: based on the synthetic output command value P com Setting method (B2-a) or based on the synthetic output feedback value P FB There are two setting methods: setting method (B2-b).

[0086] B2-a: Based on the synthetic output command value P com How to set the manipulated variable MV

[0087] According to the synthesis output command value P com , the number of power amplifiers N, and the output power / power efficiency characteristics of each power amplifier, determine the amplifier output command value p of each power amplifier com , the amplifier output command value p com As the amplifier output reference value p ref , set the control to each amplifier output feedback value p fb becomes the amplifier output command value p com The operation volume MV.

[0088] B2-b: Based on the synthetic output feedback value P FB How to set the manipulated variable MV

[0089] According to the synthetic output feedback value P FB , the number of power amplifiers N, and the output power / power efficiency characteristics of each power amplifier, determine the amplifier output conversion value p of each power amplifier FB , the amplifier output conversion value p FB As the amplifier output reference value p ref , set the control to each amplifier output feedback value p fb The amplifier output conversion value p FB The operation volume MV.

[0090] Effects of the Invention

[0091] As described above, according to the present invention, it is possible to suppress a decrease in power efficiency of a high-frequency power supply device caused by a difference in output power between the power amplifiers. BRIEF DESCRIPTION OF THE DRAWINGS

[0092] Figure 1 This is a diagram for explaining a schematic structure of a high-frequency power supply device according to the present invention.

[0093] Figure 2 This is a diagram for explaining the schematic operation of the high-frequency power supply device of the present invention.

[0094] Figure 3 This is a block diagram for explaining a configuration example of a linear amplifier of the high-frequency power supply device of the present invention.

[0095] Figure 4 This is a flowchart showing an example of the operation of the linear amplifier of the high-frequency power supply device of the present invention.

[0096] Figure 5 is used to illustrate the synthetic output feedback value P according to the present invention. FB Figure 2. Anomaly detection performed.

[0097] Figure 6 1 is a flow chart showing abnormality detection of an amplifier according to the present invention.

[0098] Figure 7 is used to illustrate the amplifier output feedback value p according to the present invention. fb Figure 2. Anomaly detection performed.

[0099] Figure 8 This is a flowchart showing abnormality detection of the amplifier output of the power amplifier of the present invention.

[0100] Fig. 9 It is an explanatory diagram for explaining uniform setting of the amplifier output level and setting of the operation amount MV according to the present invention.

[0101] Fig.10 This is a flowchart for explaining the uniform setting of the amplifier output level and the setting of the manipulation amount MV according to the present invention.

[0102] Fig.11 It is an explanatory diagram for explaining uniform setting of the amplifier output level and setting of the operation amount MV according to the present invention.

[0103] Fig.12 This is a flowchart for explaining the uniform setting of the amplifier output level and the setting of the manipulation amount MV according to the present invention.

[0104] Fig.13 It is an explanatory diagram for explaining the individual setting of the amplifier output level and the setting of the manipulation amount MV according to the present invention.

[0105] Fig.14 This is a flowchart for explaining the individual setting of the amplifier output level and the setting of the manipulated variable MV according to the present invention.

[0106] Fig.15 is used for the attenuation A of the present invention tt This is a flowchart that explains an example of setting operations.

[0107] Fig.16This is a flowchart for explaining setting operation example 1 of the present invention.

[0108] Fig.17 This is an operation diagram for explaining setting operation example 1 of the present invention.

[0109] Fig.18 This is a flowchart for explaining setting operation example 2 of the present invention.

[0110] Fig.19 This is an action diagram for explaining setting action example 2 of the present invention.

[0111] Fig. 20 This is a flowchart for explaining setting operation example 3 of the present invention.

[0112] Fig.21 This is an action diagram for explaining setting action example 3 of the present invention.

[0113] Fig. 22 This is a flowchart for explaining setting operation example 4 of the present invention.

[0114] Fig.23 This is a block diagram for explaining a configuration example of a switching amplifier in the high-frequency power supply device of the present invention.

[0115] Fig.24 This is a diagram showing a configuration example of a phase controller using a bidirectional thyristor. DETAILED DESCRIPTION

[0116] (1) Schematic structure of the high-frequency power supply device of the present invention

[0117] Below, use Figure 1 The schematic structure of the high-frequency power supply device of the present invention will be described.

[0118] The high-frequency power supply device PS of the present invention comprises: a control unit 1, which controls the high-frequency power supply device PS; a power amplifier unit 4, which is composed of a plurality of power amplifiers 4A, 4B, ..., 4N connected in parallel; an RF signal unit 2, which generates a high-frequency signal (RF signal); a distribution unit 3, which distributes the high-frequency signal (RF signal) generated by the RF signal unit 2 to each power amplifier (4A to 4N) of the power amplifier unit 4; a power synthesis unit 6, which synthesizes the power of a plurality of amplifier outputs after power amplification by each power amplifier (4A to 4N) and outputs the synthesized output; an amplifier output detection unit 5, which detects the amplifier output of each power amplifier (4A to 4N) and sends the amplifier output feedback value p to the power amplifier 4. fb Feedback to the control unit 1; the synthesis output detection unit 7, which is connected between the power synthesis unit 6 and the output terminal OUT, and detects the synthesis output feedback value P according to the separated traveling wave power FB.

[0119] The power amplifiers 4A, 4B, ... 4N may use, for example, class AB linear amplifiers or class D switching amplifiers.

[0120] The control unit 1 includes: an amplifier control unit 1a, which controls the gain of each stage power amplifier (4A~4N) of the power amplifier unit 4; an amplifier abnormality detection unit 1b, which detects the abnormality of the power amplifier (4A~4N); a distribution control unit 1c, which controls the distribution unit 3 that distributes the RF signal; and an RF signal setting unit 1d, which sets the frequency and signal level of the high-frequency signal (RF signal).

[0121] The amplifier control unit 1a includes an amplifier output reference value setting unit 1a-1 and an operation amount setting unit 1a-2. The amplifier output reference value setting unit 1a-1 sets an amplifier output reference value p for determining an output level of each amplifier output. ref The operation amount setting unit 1a-2 feeds back the amplifier output feedback value p of each power amplifier (4A to 4N) detected by the amplifier output detection unit 5. fb The amplifier output reference value p set by the amplifier output reference value setting unit 1a-1 ref A comparison is made, and based on the comparison, an operation variable MV is set for each power amplifier (4A-4N), and the operation variable MV is used to control the output level of each amplifier output of each power amplifier (4A-4N). ref The synthetic output command value P can be used com The amplifier output command value p is set com , or according to the synthetic output feedback value P FB The amplifier output conversion value p is set FB .

[0122] The power amplifiers 4A, 4B, ..., 4N of the power amplifier unit 4 operate according to the operation amount MV set for each power amplifier to reduce the amplifier output feedback value p fb The amplifier output reference value p ref The manipulated variable MV is equivalent to the amplifier gain, for example, in an amplifier with an attenuator, it is the attenuation A. tt , in the switching amplifier it is the phase shift θ and the phase amount Θ.

[0123] The amplifier control unit 1a controls the output level of the amplifier output of each power amplifier 4A, 4B, ... 4N of the power amplifier unit 4 according to each operation amount MV. The amplifier output reference value setting unit 1a-1 controls the output level of the amplifier output of each power amplifier 4A, 4B, ... 4N of the power amplifier unit 4 according to the combined output command value P of the output level of the high frequency power supply device PS output from the output terminal OUT to the control unit 1. com , or the synthesized output feedback value P detected by the synthesized output detection unit 7FB , set the amplifier output reference value p ref The amplifier output command value p is a value which is a value which is a value which is a level of the output of the amplifier output which is output by each power amplifier 4A, 4B, ... 4N of the power amplifier unit 4. com Or the amplifier output conversion value p FB , to set the amplifier output reference value p ref The synthesized output command value P is proportionally allocated according to the number of power amplifiers 4A, 4B, ... 4N and the output power / power efficiency of each power amplifier 4A, 4B, ... 4N. com Or the synthetic output feedback value P FB , thereby performing the amplifier output reference value setting unit 1a-1 to set the amplifier output reference value p ref Settings.

[0124] The amplifier abnormality detection unit 1b detects the amplifier output feedback value p fb Or the synthetic output feedback value P FB To detect whether the amplifier has any abnormal status.

[0125] The distribution control unit 1c distributes the high-frequency signal (RF signal) to each of the power amplifiers 4A, 4B, ... 4N of the power amplifier unit 4. When the driven power amplifiers 4A, 4B, ... 4N are changed due to a setting change or the like, the supply of the high-frequency signal (RF signal) to the stopped power amplifiers 4A, 4B, ... 4N is stopped. In addition, when an abnormality is detected in any of the power amplifiers 4A, 4B, ... 4N by the amplifier abnormality detection unit 1b, the distribution of the high-frequency signal (RF signal) to the power amplifier in which the abnormality is detected is stopped.

[0126] The RF signal setting unit 1d sets the frequency and signal level of the high-frequency signal (RF signal) based on setting data stored inside or setting data input from the outside.

[0127] The combined output detection unit 7 separates the traveling wave and the reflected wave using, for example, a directional coupler, and detects a combined output feedback value P based on the separated traveling wave. FB And feed back to the control unit 1.

[0128] (2) General operation of high-frequency power supply device

[0129] use Figure 2 The schematic operation of the high-frequency power supply device of the present invention will be described.

[0130] The high frequency power supply device of the present invention outputs a synthesized output through the operations of amplifier abnormality detection (SA), setting of the manipulated variable MV (SB), amplifier control (SC), power synthesis (SD) and output detection (SE).

[0131] (SA) Abnormality detection of power amplifier

[0132] The control unit 1 monitors the output level of the amplifier output outputted from each power amplifier (4A to 4N) of the power amplifying unit 4, or the output level of the synthesized output synthesized by the power synthesizing unit 6. When these output levels deviate from the reference level, or when the fluctuation range of the output level deviates from the allowable range, it is determined that an abnormality has occurred in the amplifier, and an abnormality detection of the amplifier is performed.

[0133] The time at which the power amplifier (4A to 4N) performs abnormality detection can be arbitrarily set, such as at a predetermined time point such as when the operation starts, in addition to being performed at a predetermined time interval during the operation of the high-frequency power supply device.

[0134] (SB) Setting of the manipulated variable MV

[0135] When an abnormality of the power amplifier (4A-4N) is detected, it indicates that there is a difference between the output levels of the power amplifiers (4A-4N), indicating an imbalance in the power efficiency of the power amplifiers (4A-4N), and the overall power efficiency is reduced. In order to maintain the overall power efficiency of the high-frequency power supply device at a high state, the power efficiency of each power amplifier (4A-4N) is required to be equal.

[0136] The operation amount MV for controlling the output level of the amplifier output of each power amplifier (4A to 4N) is set so that the power efficiency of each power amplifier (4A to 4N) is uniform. The operation amount MV is, for example, the attenuation amount A of the attenuator of the attenuator amplifier in the linear amplifier. tt In the switching amplifier, the phase shift amount θ and the phase amount θ of the phase control unit are used. The phase shift amount θ is the control amount for controlling the power amount in the phase shift control, and the phase amount θ is the control amount for controlling the timing of turning on / off of a switching element such as a bidirectional thyristor (TRIAC) possessed by the phase controller.

[0137] When setting the manipulated variable MV, set the amplifier output reference value p ref Serves as a reference for comparison with the output level of the output power outputted by each power amplifier (4A to 4N).

[0138] The output level of the output power outputted by the high frequency power supply device PS is proportionally allocated according to the number N of power amplifiers (4A to 4N) and the output power / power efficiency characteristics. com , or the synthesized output feedback value P detected by the synthesized output detection unit 7 FB , thus, the amplifier output command value p is obtained com , amplifier output conversion value p FB, thus setting the amplifier output reference value p ref .

[0139] According to the amplifier output feedback value p of each power amplifier (4A to 4N) fb The amplifier output reference value p ref (Amplifier output command value p com Or the amplifier output conversion value p FB ) to calculate the manipulated value MV. The manipulated value MV is equivalent to the gain of the amplifier. For example, in an amplifier with an attenuator, it is the attenuation A. tt , in the switching amplifier it is the phase shift θ and the phase amount Θ.

[0140] (SC) Amplifier Control

[0141] The control unit 1 controls the output level of the amplifier output of each power amplifier (4A to 4N) according to each operation amount MV to reduce the amplifier output feedback value p fb The amplifier output reference value p ref (Amplifier output command value p com Or the amplifier output conversion value p FB ) deviation.

[0142] (SD) Power Synthesis

[0143] The power combiner 6 combines the power of the amplifier outputs of the power amplifiers (4A to 4N). Known combining circuits (combiners) include structures using resistors, structures using transformers, and hybrid circuits. The power combiner 6 of the present invention can use any combining circuit selected to suit the output characteristics.

[0144] (SE) Output Detection

[0145] The output detection includes: amplifier output detection (SEa) for detecting the output of each amplifier of each power amplifier (4A to 4N), and combined output detection (SEb) for detecting the combined output after power combination.

[0146] The output feedback value p of each amplifier detected by the amplifier output detection (SEa) fb , in addition to being used for abnormality detection by power amplifier abnormality detection (SA), it is also used for setting the manipulated variable MV by setting the manipulated variable MV (SB). In addition, the synthesized output feedback value P detected by the synthesized output detection (SEb) FB In addition to being used for abnormality detection of the power amplifier by abnormality detection of the power amplifier (SA), it is also used for setting the amplifier output command value p by setting the manipulated variable MV (SB). com Calculation.

[0147] (3) High-frequency power supply device based on linear amplifier

[0148] The high-frequency power supply device of the present invention can form each power amplifier (4A to 4N) of the power amplifier section 4 by a class AB linear amplifier or a class D switching amplifier.

[0149] Hereinafter, a configuration example (3a) and an operation example (3b) of a high-frequency power supply device based on a linear amplifier will be described.

[0150] (3a) Example of a linear amplifier configuration

[0151] Figure 3 This is a block diagram for explaining a configuration example of a linear amplifier of the high-frequency power supply device of the present invention.

[0152] The high frequency power supply device 10 includes a control unit 11 , an RF signal unit 12 , a distributor 13 , a power amplifier 14 , an amplifier output detector 15 , a power combiner 16 , a combined output detector 17 , an A / D converter 18 , and a D / A converter 19 .

[0153] The RF signal unit 12 includes an RF signal generating unit 12a, a power control amplifier 12b, and a power control interface 12c. The RF signal unit 12 generates a frequency signal of a high frequency output of a high frequency power supply device, that is, a high frequency signal (RF signal). The high frequency signal (RF signal) generated by the RF signal generating unit 12a is power-controlled to a predetermined power level by the power control amplifier 12b, and is transmitted to the distribution unit 13. The power control amplifier 12b can be composed of a variable attenuator amplifier, for example. The gain of the variable attenuator amplifier is controlled according to the attenuation amount of the control signal input from the power control interface 12c.

[0154] The distributor 13 distributes the high-frequency signal (RF signal) generated by the RF signal generator 12a to the multi-stage power amplifiers 14A, 14B, ... 14D of the power amplifier 14. In addition, "N" represents the number of power amplifiers in the power amplifier 14, and is appropriately set according to the output level of the high-frequency output set for the high-frequency power supply device, the output level of the amplifier output of the power amplifiers 14A, 14B, ... 14D, etc. The distributor 13 distributes the high-frequency signal (RF signal) of the signal level corresponding to the output level of the amplifier output of each power amplifier to each power amplifier 14A, 14B, ... 14D. When the output levels of the amplifier outputs of the power amplifiers 14A, 14B, ... 14D are the same, the signal levels of the high-frequency signals (RF signals) distributed to the power amplifiers 14A, 14B, ... 14D are the same.

[0155] Each power amplifier 14A, 14B, ... 14D is composed of, for example, linear amplifiers of a variable gain amplifier 14a, a driver amplifier 14b, and a terminal power amplifier 14c connected in series, and performs power amplification on the high frequency signal (RF signal) distributed from the distributor 13 to obtain an amplifier output. The variable gain amplifier 14a can be composed of, for example, a variable attenuator amplifier, and a control signal of the attenuation amount transmitted from the control unit 11 is input via a D / A converter 19 to perform gain adjustment. The driver amplifier 14b amplifies the level of the high frequency signal (RF signal) after gain adjustment by the variable gain amplifier 14a, and the terminal power amplifier 14c amplifies the signal power amplified by the driver amplifier 14b to the output level set for each power amplifier 14A, 14B, ... 14D. The amplifiers of the power amplifiers 14A, 14B, ... 14D can use, for example, class AB linear amplifiers.

[0156] The power combining unit 16 combines the power of a plurality of amplifier outputs after power amplification by the power amplifiers 14A, 14B, ..., 14D, and outputs the obtained combined output.

[0157] The amplifier output detection unit 15 is connected between each power amplifier 14A, 14B, ... 14D and the power synthesis unit 16, detects the amplifier output of each power amplifier 14A, 14B, ... 14D, and generates an amplifier output feedback value p fb The digital signal is converted into a digital signal by the A / D converter 18 and then returned to the control unit 11 .

[0158] The combined output detection unit 17 is connected between the power combining unit 16 and the output terminal OUT, and receives the combined output feedback value P FB Return to the control unit 11. The combined output detection unit 17 can be composed of a directional coupler, which separates the traveling wave power toward the load and the reflected wave power returned from the load, and detects the traveling wave power as the combined output feedback value P FB .

[0159] The control unit 11 includes: an amplifier control unit 11a, which controls the gain of a variable gain amplifier 14a of a power amplifier (14A to 14D) of the power amplifier unit 14; a power amplifier abnormality detection unit 11b, which detects abnormalities of the power amplifier (14A to 14D); a distribution control unit 11c, which controls the RF signal distribution of the distribution unit 13; and an RF signal setting unit 11d, which sets the frequency and signal level of a high-frequency signal (RF signal).

[0160] The amplifier control unit 11a includes an amplifier output reference value setting unit 11a-1 and an operation amount setting unit 11a-2. The amplifier output reference value setting unit 11a-1 sets the amplifier output reference value p ref , the amplifier outputs a reference value p refThe operation amount setting unit 11a-2 is used to determine the output level of the amplifier output of the power amplifiers 14A to 14D. fb The amplifier output reference value p set by the amplifier output reference value setting unit 11a-1 ref The comparison is performed, and based on the comparison, the attenuation amount A is set for each power amplifier 14A to 14D. tt , the attenuation A tt The variable gain amplifiers 14a of the power amplifiers 14A to 14D are used to control the output level of each amplifier output of each power amplifier 14A to 14D. The variable gain amplifiers 14a of the power amplifiers 14A to 14D are respectively set according to the attenuation amount A set for each variable gain amplifier 14a. tt Control is performed to reduce the amplifier output feedback value p fb The amplifier output reference value p ref Deviation. Attenuation A tt Equivalent to the amplifier gain.

[0161] According to the attenuation A tt The output level of the amplifier output of each power amplifier 14A to 14D of the power amplifier section 14 is controlled. The amplifier output reference value setting section 11a-1 controls the output level of the amplifier output of each power amplifier 14A to 14D of the power amplifier section 14. The amplifier output reference value setting section 11a-1 controls the output level of the amplifier output of the high frequency power supply device PS from the output terminal OUT according to the combined output command value P of the output level to be outputted from the output terminal OUT of the high frequency power supply device PS to the control section 11. com , or the composite output feedback value P detected by the composite output detection unit 17 FB , setting the amplifier output reference value p for instructing the output level of the amplifier output of the power amplifiers 14A to 14D ref (Amplifier output command value p com , amplifier output conversion value p FB The synthesized output command value P is proportionally allocated according to the number N of power amplifiers 14A to 14D and the output power / power efficiency of each power amplifier 14A to 14D. com Or the synthetic output feedback value P FB , thereby performing the amplifier output reference value setting unit 11a-1 to set the amplifier output reference value p ref (Amplifier output command value p com , amplifier output conversion value p FB ) settings.

[0162] The power amplifier abnormality detection unit 11b detects the amplifier output feedback value p fb Or the synthetic output feedback value P FB To detect whether the power amplifier has any abnormal status.

[0163] The distribution control unit 11c distributes the high frequency signal (RF signal) to each power amplifier 14A to 14D of the power amplifier unit 14. When the power amplifier to be driven is changed due to abnormality or the like detected in the power amplifiers 14A to 14D, the supply of the high frequency signal (RF signal) to the power amplifier in which the abnormality is detected is stopped.

[0164] The RF signal setting unit 11 d sets the frequency and signal level of the high-frequency signal (RF signal) based on setting data stored inside or setting data input from the outside.

[0165] (3b) Example of Linear Amplifier Operation

[0166] Hereinafter, regarding the operation examples of the linear amplifier in the high-frequency power supply device of the present invention, the following operation examples will be described.

[0167] (3b-1) Actions to detect abnormal conditions

[0168] (3b-2) Action of Setting the Manipulation Variable MV

[0169] (3b-3) Set the attenuation amount A tt Action

[0170] Figure 4 is a flowchart showing an example of the operation of a linear amplifier, steps (SA) to (SE) and Figure 2 The flowchart of is represented accordingly.

[0171] (3b-1: Example of detection operation of abnormal state of power amplifier section)

[0172] Preset the amplifier operation amount MV (attenuation amount A tt )’s initial value MV o (Initial attenuation A tto )(SO), the amplifier outputs of the power amplifiers are obtained by driving the linear amplifiers with the gains determined by the initially set operation amount MV, and these amplifier outputs are power combined to obtain a combined output (SC).

[0173] The presence or absence of an abnormal state (SA) in the power amplifier section is detected based on the amplifier output and the synthesized output obtained in step (SC). In the abnormality detection step (SA), when an abnormal state is detected, the operation amount MV (attenuation amount A) of the linear amplifier of each power amplifier is set. tt )(SB), using the updated manipulated variable MV (attenuation amount A tt ) to control the linear amplifier (SC).

[0174] The power amplifier unit may detect an abnormal state by performing a fault detection (SA4) which is always performed, in addition to the abnormality determination (SA2, SA3) which is performed at a time point after a predetermined time has passed or at a predetermined time point (SA1).

[0175] After a predetermined time has passed or at a predetermined time point (SA1), the amplifier output feedback value p of each power amplifier is performed. fb Abnormal detection (SA2) or based on the synthetic output feedback value P FB Abnormality detection (SA3). In addition, abnormality detection can also be performed by always monitoring the fault detection (SA4) of the power amplifier device.

[0176] When an abnormality is detected in the abnormality detection of (SA2) or (SA3), or when a fault is detected in the fault detection of (SA4), (SA5) sets and updates the operation amount MV (SB) of the linear amplifier of each power amplifier. In setting the operation amount MV, if the amplifier is an amplifier with an attenuator, the attenuation amount A is set to tt Set as the manipulated value MV.

[0177] For abnormality detection (SA) of the power amplifier, use Figure 5 as well as Figure 6 The synthetic output feedback value P detected by the synthetic output detection unit 17 is described. FB Anomaly detection (SA3) performed using Figure 7 as well as Figure 8 The amplifier output feedback value p detected by the amplifier output detection unit 15 is described. fb Anomaly detection (SA2) performed.

[0178] (SA3: According to the synthetic output feedback value P FB Anomaly detection performed

[0179] According to the synthetic output feedback value P FB The abnormality detection of the power amplifier can be performed by synthesizing the output command value P com Method (a) as a comparison reference, or based on the synthetic output feedback value P FB The variation range is determined in the manner (b).

[0180] (a) The synthetic output feedback value P FB and the composite output command value P com Compare and output the feedback value P according to the synthesis FB Whether it converges to the synthetic output command value P com The power amplifier is detected to detect abnormalities within the specified range as a benchmark. Figure 51 is a flowchart showing abnormality detection of the power amplifier.

[0181] Get the composite output command value P com (S11), obtain the synthetic output feedback value P FB (S12), set the synthesis output threshold P th1 (S13). The synthetic output feedback value P FB At the synthetic output command value P com The synthetic output threshold P is the reference th1 In the case of the range of (S14), the synthetic output feedback value P FB If the synthesized output feedback value P is within the allowable range, it is determined that the power amplifier is in a normal state (S17). FB At the synthetic output command value P com The synthetic output threshold P is the reference th1 When the synthetic output feedback value P is out of the range (S14), FB If it is outside the permissible range, it is determined that the power amplifier is in an abnormal state (S15), and an abnormality in the combined output is detected (S16).

[0182] (b) According to the synthetic output feedback value P FB The power amplifier is detected for abnormality based on the fluctuation range.

[0183] Monitor the synthetic output feedback value P FB The power amplifier abnormality is detected based on whether the fluctuation range that changes with time is within a predetermined range. Figure 6 1 is a flowchart showing abnormality detection of the amplifier.

[0184] Get the synthetic output feedback value P FB1 (S21), after a predetermined time has passed (S22), the synthetic output feedback value P is obtained. FB2 (S23) Calculate the composite output feedback value P obtained at the two time points FB1 and the synthesized output feedback value P FB2 The difference ΔP FB (=P FB2 -P FB1 )(S24). Set the synthesis output threshold P th2 (S25), the difference ΔP FB and the synthetic output threshold P th2 A comparison is performed (S26).

[0185] In the differential ΔP FB At the synthetic output threshold ±P th2 In the case of the range of FBIf the difference ΔP is within the allowable range, the power amplifier is judged to be normal (S29). FB At the synthetic output threshold ±P th2 If it is outside the range of FB If it is outside the allowable range, an abnormality determination is performed (S27), and an abnormality of the synthesized output is detected (S28).

[0186] (SA2: According to the amplifier output feedback value p fb Anomaly detection performed

[0187] The abnormality detection of the power amplifier can be performed by using the amplifier output command value p com Method (a) for comparison reference, or based on the amplifier output feedback value P fb The variation range is determined in the manner (b).

[0188] (a) According to the amplifier output feedback value p fb and the amplifier output command value p com Abnormality detection of the amplifier output of the power amplifier is performed by comparison.

[0189] The amplifier output feedback value p fb and the amplifier output command value p com Compare, according to the amplifier output feedback value p fb Whether it converges to the amplifier output command value p com The power amplifier is detected to detect abnormalities within the specified range as a benchmark. Figure 7 This is a flowchart showing abnormality detection of the amplifier output of the power amplifier.

[0190] Get the amplifier output command value p com By combining the synthetic output command value P com Divide by the number of amplifiers N to calculate the amplifier output command value p com The amplifier output command value p obtained by this calculation is com (=P com / N) is: the synthetic output command value P com The command output level is obtained by dividing the command output level into equal parts according to the number N of amplifiers (S31).

[0191] Get the amplifier output feedback value p fb (S32), setting the amplifier output threshold p th3 (S33). The amplifier outputs the feedback value p fb The amplifier outputs the command value p com The reference is at the amplifier output threshold p th3In the case of the range of (S34), the amplifier outputs the feedback value p fb If the amplifier output feedback value p is within the allowable range, it is determined that the power amplifier is normal (S37). fb The amplifier outputs the command value p com The reference is at the amplifier output threshold p th3 When the amplifier output feedback value p is out of the range (S34), fb The output of the power amplifier is out of the allowable range and abnormality is determined (S35), and an abnormality in the amplifier output of the power amplifier is detected (S36).

[0192] (b) According to the amplifier output feedback value p fb Abnormality detection of the amplifier output of the power amplifier is performed by measuring the fluctuation range of the amplifier output of the power amplifier.

[0193] Monitor amplifier output feedback value p fb The fluctuation range that changes with time is used to detect amplifier output abnormality based on whether the fluctuation range is within a specified range. Figure 8 This is a flowchart showing abnormality detection of the amplifier output of the power amplifier.

[0194] Get the amplifier output feedback value p fb1 (S41), after a predetermined time has passed (S42), the amplifier output feedback value p is obtained. fb2 (S43) Calculate the amplifier output feedback value p at the two time points obtained fb1 The amplifier output feedback value p fb2 The difference Δp fb (=p fb2 -p fb1 )(S44). Set the amplifier output threshold p th4 (S45), the difference Δp fb The amplifier output threshold p th4 A comparison is performed (S46).

[0195] In the differential Δp fb At the amplifier output threshold ±p fb4 In the case of the amplifier output feedback value p fb If the difference Δp is within the allowable range, the amplifier output is determined to be normal (S49). fb At the amplifier output threshold ±p th4 If the amplifier output feedback value is outside the range of fb If it is outside the allowable range, an abnormality determination is performed (S47), and an abnormality in the amplifier output is detected (S48).

[0196] (3b-2: Operation MV setting operation)

[0197] The operation amount MV is used to adjust the output level of the amplifier output of each power amplifier so that it becomes a set level. If the set level of the amplifier output of each power amplifier is different, the operation amount MV is also different, and the operation amount MV is determined according to the output level of the amplifier output set for each power amplifier (amplifier set level). Therefore, the amplifier set level of each power amplifier is first determined, and the operation amount MV is set according to the amplifier set level.

[0198] Amplifier Setting Levels:

[0199] The amplifier output level (amplifier setting level) set for each power amplifier may be set to a uniform value for a plurality of power amplifiers based on the output power / power efficiency characteristics of each power amplifier, or may be set to an individual value for each power amplifier.

[0200] When a plurality of power amplifiers have a common output power / power efficiency characteristic, by uniformly setting the amplifier output level (amplifier setting level) set for each power amplifier, the power efficiency of each power amplifier becomes equal, thereby improving the overall power efficiency.

[0201] Furthermore, when a plurality of power amplifiers each have a unique output power / power efficiency characteristic, the overall power efficiency can be improved by individually setting the output level of the amplifier output of each power amplifier so that the power efficiency of each power amplifier is equal.

[0202] The amplifier output level (amplifier setting level) set for the power amplifier depends on the number N of power amplifiers to be driven and the output level of the combined output. The number N of power amplifiers in the driving state is obtained based on the amplifier state detected by the amplifier abnormality detection. In addition, based on the combined output command value P com Or the synthetic output feedback value P FB Find the output level of the composite output.

[0203] The following describes the setting of the amplifier setting level and the operation amount MV, with respect to each of the case (a) in which the amplifier output level is set to a uniform value and the case (b) in which the amplifier output level is set to a single value.

[0204] (a) Uniform setting of amplifier output level

[0205] In the uniform setting of the amplifier output level and the operation amount MV accompanying the uniform setting, the amplifier output command value p of each power amplifier com is the feedback value p fbThe value used as the reference value for comparison. The amplifier outputs the command value p com Based on the synthesis output command value P com The setting (a1) or based on the synthetic output feedback value P FB It is obtained by setting (a2).

[0206] (a1) Based on the combined output command value P com Settings

[0207] Fig. 9 and Fig.10 It is used to explain the output command value P according to the synthesis com An explanatory diagram and a flowchart showing an example of uniformly setting the amplifier output level and setting the manipulated variable MV. Fig. 9 The horizontal axis represents output, and the vertical axis represents power efficiency. Fig. 9 This indicates the case where the amplifier outputs of the three power amplifiers are equal.

[0208] Fig. 9 (a) shows the normal operation state, showing the output of the three power amplifiers. out1 、p out2 、p out3 The state of equal power output. Through normal operation, the amplifier output command value p of each amplifier com Become a P com / 3, amplifier output p out1 、p out2 、p out3 The output level is equal. out (=p out1 +p out2 +p out3 ). The composite output P out The combined output command value P com At this time, each power amplifier has the same output power / power efficiency characteristic, so the power efficiency EF1 of each power amplifier is equal, and the overall power efficiency is in a high state.

[0209] Fig. 9 (b) represents the amplifier output p out3 Reduced abnormal state, synthetic output P out (=p out1 +p out2 +p out3 ) becomes the ratio of the combined output command value P com The amplifier output p out1 、p out2 Although the amplifier output command value p is based on each power amplifier com (=Pcom / 3) equal output level, but p out3 Due to amplifier abnormality, the amplifier output value is lower than the command value p com (=P com / 3). At this time, the output amplifier outputs p out1 、p out2 The power amplifier power efficiency remains at EF1, but the amplifier output p out3 The power efficiency of the power amplifier is reduced to EF2, and therefore the overall power efficiency is reduced.

[0210] Fig. 9 (c) shows the setting of the operation amount MV when an abnormality of the amplifier is detected. Fig. 9 As shown in (b), at the amplifier output p out3 Reduced case, the amplifier output p out3 and the amplifier output command value p com (=P com / 3) produces a difference Δ1. The manipulated variable MV is the gain adjustment amount of the amplifier to eliminate this difference, and the amplifier output p is reduced. out3 The amplifier output command value p com (=P com / 3). As a result, each amplifier outputs p out1 、p out2 、p out3 The output levels become equal, the power efficiency of each amplifier becomes equal to EF1, and the overall power efficiency returns to a high state.

[0211] exist Fig.10 In the flowchart, after amplifier abnormality detection (SA), the operation amount MV (SB) is set, the amplifier control (SC) is performed according to the operation amount MV, the synthesized output is output through power synthesis (SD), and output detection (SE) is performed.

[0212] Next, regarding the synthetic output command value P com The setting (SB) of the manipulated variable MV is applied to the attenuation A of the amplifier with attenuator. tt The following describes the case of the operation amount MV.

[0213] Based on the amplifier abnormality detection (SA), the number N of power amplifiers to be driven is determined (S51). com and the number of power amplifiers N, the synthesized output command value P com Divide by N to calculate the output command value p of each amplifier com (=P com / N)(S52). Calculate the amplifier output command value pcom The amplifier output feedback value p fb The difference Δ1(=p fb -p com )(S53), find the attenuation A that eliminates the difference Δ1 tt (S54), update and save the calculated attenuation amount A tt (S55).

[0214] Using the updated attenuation A tt The power amplifier is driven and controlled (SC) by the gain of each power amplifier, and the amplifier output of each power amplifier is power synthesized (SD). Regarding output detection (SE), the amplifier output feedback value p of each power amplifier is detected. fb , or the combined output feedback value P after power synthesis FB .

[0215] (a2) Based on the synthetic output feedback value P FB Settings

[0216] Fig.11 as well as Fig.12 It is used to explain the synthetic output feedback value P FB An explanatory diagram and a flowchart showing an example of uniformly setting the amplifier output level and setting the manipulated variable MV. Fig.11 The horizontal axis represents output, and the vertical axis represents power efficiency. Fig.11 This indicates the case where the amplifier outputs of the three power amplifiers are equal.

[0217] Fig.11 (a) indicates the normal operation state, which shows the amplifier output feedback value p of the three power amplifiers. fb1 、p fb2 、p fb3 The power output is equal. Set the synthetic output feedback value at this time to P FB1 When the amplifier output feedback value p of each power amplifier is fb1 、p fb2 、p fb3 The output level and the synthesized output feedback value P FB1 The converted value p of the amplifier output per power amplifier is evenly divided by the number of power amplifiers. FB (=P FB1 / 3) are equal, the synthetic output is P out for (p fb1 +p fb2 +p fb3 ).

[0218] At this time, each power amplifier has the same output power / power efficiency characteristic, so the power efficiency EF1 of each amplifier is equal, and the overall power efficiency is high.

[0219] Fig.11 (b) represents the amplifier output p out3 In this state, the composite output P out2 (=p out1 +p out2 +p out3 ) becomes a synthetic output P higher than the normal state out1 (i.e. P out ) low value. The amplifier output p out1 、p out2 The synthetic output feedback value P of the normal state FB1 The amplifier output conversion value p is evenly divided by the number of power amplifiers. FB (=P FB1 / 3) output level. In contrast, p out3 Due to amplifier abnormality, the amplifier output conversion value p FB (=P FB1 / 3) low value.

[0220] At this time, the output amplifier outputs p out1 、p out2 The power amplifier power efficiency is maintained at EF1, but the amplifier output p out3 The power efficiency of the amplifier is reduced to EF2, so the power efficiency of the entire power amplifier unit is reduced.

[0221] Fig.11 (c) indicates the setting of the manipulated variable MV when an amplifier abnormality is detected. Fig.11 As shown in (b), at the amplifier output p out3 Reduced case, the amplifier output p out3 Compared with the amplifier output in normal state, p FB (=P FB1 / 3) produces a difference Δ2. The manipulated variable MV is the amount by which the amplifier gain is adjusted to eliminate this difference, and the amplifier output p that is reduced in output out3 rises and causes the amplifier output p out1 and p out2 The output levels are reduced to an equal level, making the power efficiency of all power amplifiers equal.

[0222] At this time, the amplifier output p out1 、p out2 、p out3 The amplifier output conversion value p FB2 (=PFB2 / 3). In addition, the adjusted synthetic output feedback value P FB2 is the amplifier output p after the rise adjustment out3 With the drop adjusted amplifier output p out1 、p out2 The value obtained by adding.

[0223] Therefore, each amplifier outputs p out1 、p out2 、p out3 The output levels are equalized, and the power supply efficiency of each power amplifier is equalized to EF3, so that the power supply efficiency of the entire power amplifier section can be improved compared to before the gain adjustment.

[0224] exist Fig.12 In the flowchart, after the fault amplifier detection (SA), the operation amount MV (SB) is set, the amplifier control (SC) is performed according to the operation amount MV, the synthesized output is output through power synthesis (SD), and the output detection (SE) is performed.

[0225] Next, regarding the synthetic output feedback value P FB The setting (SB) of the manipulated variable MV is applied to the attenuation A of the amplifier with attenuator. tt The following describes the case of the operation amount MV.

[0226] According to the fault amplifier detection (SA), the power amplifier to be driven is determined and the number of units that can be driven N is calculated (S61). FB and the number of power amplifiers N, the synthesized output feedback value P FB Divide by N to calculate the amplifier output conversion value p for each power amplifier FB (=P FB / N)(S62). Calculate the calculated amplifier output conversion value p FB The amplifier output feedback value p of each power amplifier fb The difference Δ2(=p fb -p FB )(S63), for each power amplifier to be driven, the attenuation A required to eliminate the difference Δ2 is calculated. tt (S64), update and save the calculated attenuation amount A tt (S65).

[0227] According to the updated attenuation A tt The gains of the power amplifiers are obtained, and the drive control (SC) of the power amplifiers is performed, and the power of the amplifier outputs of the power amplifiers is combined (SD). Regarding output detection (SE), the amplifier output feedback value p of each power amplifier is detected. fb, or the combined output feedback value P after power synthesis FB .

[0228] (b) Individual setting of amplifier output level

[0229] Regarding the individual setting of the amplifier output level, a plurality of power amplifiers are driven with equal power efficiency, and the amplifier output level of each power amplifier is set so that the combined output after power combination becomes the combined output command value P com At this time, the amplifier output command value p of each power amplifier is com is a value that is an index of the amplifier output level of each power amplifier and is set to the amplifier output command value p com The total value is the composite output command value P com .

[0230] Fig.13 as well as Fig.14 These are an explanatory diagram and a flowchart for explaining the individual setting of the amplifier output level and the setting of the manipulated variable MV. Fig.13 The horizontal axis represents output, and the vertical axis represents power efficiency.

[0231] Fig.13 (a) shows the normal operation state. The three power amplifiers are driven with equal power efficiency EF4 and output p out1 、p out2 、p out3 The amplifier output. out1 、p out2 、p out3 The combined output P obtained by combining the power out1 (=p out1 +p out2 +p out3 ) is the composite output command value P com In the case where the power amplifier has an inherent output power / power efficiency characteristic, when the power efficiency is set to be the same, each power amplifier outputs a different amplifier output level according to each output power / power efficiency characteristic. out1 、p out2 、p out3 . Fig.13 (a) shows this state, each power amplifier outputs different amplifier output p under the same power supply efficiency EF4 out1 、p out2 、p out3 .

[0232] Fig.13 (b) indicates that a power amplifier is stopped and the amplifier output p out3In this state, although the output amplifier outputs p out1 and p out2 The power amplifier has the same power efficiency, but the composite output P out3 (=p out1 +p out2 ) becomes a synthetic output P higher than the normal state out1 Low value, out of the synthetic output command value P com .

[0233] Fig.13 (c) indicates the setting of the manipulated variable MV when an amplifier abnormality is detected. Fig.13 As shown in (b), at the amplifier output p out3 If it disappears, the output command value P com Compared to the synthetic output P out3 The amplifier output is insufficient for the amplifier output p out3 To compensate for the shortfall in the amplifier output, the amplifier output p out1 and the amplifier output p out2 Increase. Amplifier output p out1 and the amplifier output p out2 The increase of makes the amplifier output command value p of the power amplifier com The amplifier outputs the command value p com The gain of the power amplifier is adjusted by the operating amount MV corresponding to the increase in the power.

[0234] When adjusting the gain of the power amplifier, the amplifier output p is set according to the output power / power efficiency characteristics. out1 and the amplifier output p out2 The distribution makes the power efficiency of each power amplifier the same value. Fig.13 (c) indicates the amplifier output p out1 and the amplifier output p out2 The power efficiency is evenly distributed to EF5.

[0235] As a result, the power supply efficiency of each power amplifier becomes equal to EF5, and the power supply efficiency of the entire power amplifier section can be improved compared to before gain adjustment.

[0236] exist Fig.14 In the flowchart, after amplifier abnormality detection (SA), the operation amount MV (SB) is set, the amplifier control (SC) is performed according to the operation amount MV, the synthesized output is output through power synthesis (SD), and output detection (SE) is performed.

[0237] Next, regarding the setting (SB) of the manipulated variable MV for determining the amplifier output level for the power amplifier alone, the attenuation amount A of the amplifier with the attenuator is set. tt The following describes the case of the operation amount MV.

[0238] According to the fault amplifier detection (SA), the power amplifier to be driven is determined (S71). According to the combined output command value P com and output power / power efficiency characteristics, calculate the amplifier output command value p of the power amplifier to be driven com (S72). The output power / power efficiency characteristic is characteristic data indicating the relationship between the amplifier output and power efficiency of the power amplifier. It is characteristic data inherent to each power amplifier of each stage constituting the power amplifier unit. It is stored in a readable storage unit and is read out according to the power amplifier to be driven to calculate the amplifier output command value p. com (S70) According to the amplifier output command value p of the power amplifier calculated in (S72), com Calculate the attenuation A tt (S73), update and save the calculated attenuation amount A tt (S74).

[0239] According to the updated attenuation A tt The gains of the power amplifiers are obtained, and the drive control (SC) of the power amplifiers is performed, and the power of the amplifier outputs of the power amplifiers is combined (SD). Regarding output detection (SE), the amplifier output feedback value p of each power amplifier is detected. fb , or the combined output feedback value P after power synthesis FB .

[0240] Next, use Figure 15 to Figure 21 For setting the attenuation A tt The following are examples 1 to 3 of the operation. Fig. 22 Operation Example 4 for setting the power supply efficiency EF will be described.

[0241] (3b-3: Attenuation A tt Setting action)

[0242] Action examples 1 to 3 are based on the amplifier output feedback value p fb Converges to the amplifier output command value p com The attenuation value A is set within the range of the reference value. tt Action example.

[0243] (a) Setting action example 1

[0244] Regarding operation example 1, the amplifier output feedback value p fbWhether it converges to the amplifier output command value p com In the judgment that the reference value is within the prescribed range, the amplifier output command value p is com The upper limit is compared with the amplifier output command value p in the second stage. com The lower limit is compared.

[0245] First, set the initial attenuation A tto (S80). Use Fig.15 The flow chart for the initial attenuation A tto The following describes an example of the setting operation.

[0246] Get the composite output command value P com (S80a), the number of stages N (number of units N) of power amplifiers constituting the power amplification section is obtained (S80b). Based on the obtained combined output command value P com and the number of stages N, find the amplifier output command value p of each power amplifier com (=P com / N)(S80c).

[0247] According to the output power / power efficiency characteristics of each power amplifier and the amplifier output command value p com , calculate the attenuation A of each power amplifier tt Attenuation A tt In the calculation, the amplifier output p that satisfies each power amplifier is obtained based on the output power / power efficiency characteristics. out The value of the combined output becomes the amplifier output command value p com The attenuation A under these two conditions is tt (S80d). tt Set to initial attenuation A tto (S80e).

[0248] use Fig.16 Flowchart and Fig.17 The operation diagram of setting operation example 1 is described below. The initial attenuation amount A set in S80 is used. tto To drive the power amplifier and obtain the amplifier output feedback value p fb (S81).

[0249] In the first stage of comparison, the amplifier output feedback value p is obtained. fb and the amplifier output command value p com The amplifier output command value p com The upper limit of the amplifier output command value p com Add the threshold p thThe value obtained (p com +p th )(S82).

[0250] The amplifier output feedback value p fb No more than (p com +p th ) (S82), reduce the attenuation amount A tt , so that the amplifier output feedback value p fb On the other hand, the amplifier outputs the feedback value p fb for (p com +p th ) or more (S82), increase the attenuation amount A tt , so that the amplifier output feedback value p fb Decrease (S83u). Use the attenuation A set in (S83d) or (S83u) tt To drive the power amplifier and obtain the amplifier output feedback value p fb (S84).

[0251] In the second stage comparison, the amplifier output feedback value p is obtained. fb and the amplifier output command value p com The amplifier output command value p com The lower limit is the output command value p from the amplifier. com Subtract the threshold p th The value obtained (p com -p th )(S85).

[0252] The amplifier output feedback value p fb for (p com -p th ) or more (S85), increase the attenuation amount A tt , so that the amplifier output feedback value p fb On the other hand, the amplifier outputs the feedback value p fb Less than (p com -p th ) (S85), reduce the attenuation amount A tt , so that the amplifier output feedback value p fb Rise (S86d). Use the attenuation A set in (S86d) or (S86u) tt To drive the power amplifier and obtain the amplifier output feedback value p fb (S87).

[0253] Determine whether it converges to the obtained amplifier output feedback value p fband the amplifier output command value p com within the range of the upper limit and the lower limit (S88).

[0254] The amplifier output feedback value p fb At the upper limit (p com +p th ) and the lower limit (p com -p th ) is out of the range (S88), return to (S81) and calculate the attenuation amount A again tt On the other hand, the amplifier output feedback value p fb At the upper limit (p com +p th ) and the lower limit (p com -p th ) (S88), the attenuation amount A tt The value at that time point is determined (S89).

[0255] exist Fig.17 In the operation example (a), the feedback value p is output from the amplifier. fb Less than the lower limit (p com -p th ) value, and reduce the attenuation A in the first stage comparison. tt (S83d). Thus, the amplifier outputs the feedback value p fb Increase to less than the upper limit (p com +p th ), the attenuation A is increased in the second stage comparison tt (S86u). As a result, the amplifier outputs a feedback value p fb Converges to the upper limit (p com +p th ) and the lower limit (p com -p th ) range, set the attenuation A tt .

[0256] exist Fig.17 In the operation example (b), the feedback value p is output from the amplifier. fb Exceeding the lower limit (p com -p th ) value, and reduce the attenuation A in the first stage comparison. tt (S83d). Thus, the amplifier outputs the feedback value p fb Exceeding the upper limit (p com +p th ) and increases, the attenuation A is increased in the second stage comparison tt (S86u). As a result, the amplifier outputs a feedback value p fb Converges to the upper limit (pcom +p th ) and the lower limit (p com -p th ) range, set the attenuation A tt .

[0257] exist Fig.17 In the operation example (c), the feedback value p is output from the amplifier. fb The upper limit (p com +p th ) and the lower limit (p com -p th ) starts to control, reducing the attenuation A in the first stage comparison tt (S83d). Thus, the amplifier outputs the feedback value p fb Exceeding the upper limit (p com +p th ) and increases, the attenuation A is increased in the second stage comparison tt (S86u). At the amplifier output feedback value p fb Not less than the upper limit (p com +p th ), the first level comparison is performed again and the attenuation amount A is increased. tt (S83u). Thus, the amplifier outputs the feedback value p fb Not less than the lower limit (p com -p th ), the attenuation A is increased in the second stage comparison. tt (S86u). As a result, the amplifier outputs a feedback value p fb Converges to the upper limit (p com +p th ) and the lower limit (p com -p th ) range, set the attenuation A tt .

[0258] exist Fig.17 In the operation example (d), the feedback value p is output from the amplifier. fb To exceed the upper limit (p com +p th ) value, and increase the attenuation A in the first stage comparison. tt (S83u). Thus, the amplifier outputs the feedback value p fb The decline did not exceed the lower limit (p com -p th ), the attenuation A is increased in the second stage comparison tt (S86u). At the amplifier output feedback value p fb Below the lower limit (p com -p th), the first-level comparison is performed again to reduce the attenuation amount A tt (S83d). Thus, the amplifier outputs the feedback value p fb Does not exceed the lower limit (p com -p th ), the attenuation A is reduced in the second stage comparison. tt (S86d). As a result, the amplifier outputs a feedback value p fb Converges to the upper limit (p com +p th ) and the lower limit (p com -p th ) range, set the attenuation A tt .

[0259] (b) Setting action example 2

[0260] Regarding setting operation example 2, at the amplifier output feedback value p fb Whether it converges to the amplifier output command value p com In the judgment that the reference value is within the prescribed range, the amplifier output command value p is com The lower limit is compared with the amplifier output command value p in the second stage. com The upper limit is compared.

[0261] use Fig.18 Flowchart and Fig.19 The following describes the setting operation example 2. As in operation example 1, the initial attenuation amount A set in S80 is set. tto , using the initial attenuation A tto To drive the power amplifier and obtain the amplifier output feedback value p fb (S91).

[0262] In the first stage of comparison, the amplifier output feedback value p is obtained. fb and the amplifier output command value p com The amplifier output command value p com The lower limit is the output command value p from the amplifier. com Subtract the threshold p th The value obtained (p com -p th )(S92).

[0263] The amplifier output feedback value p fb Less than (p com -p th ) (S92), reduce the attenuation amount A tt , so that the amplifier output feedback value p fbOn the other hand, the amplifier outputs the feedback value p fb for (p com -p th ) or more (S92), increase the attenuation amount A tt , so that the amplifier output feedback value p fb Decrease (S93u). Use the attenuation A set in (S93d) or (S93u) tt To drive the power amplifier and obtain the amplifier output feedback value p fb (S94).

[0264] In the second stage comparison, the amplifier output feedback value p is obtained. fb and the amplifier output command value p com The amplifier output command value p com The upper limit of the amplifier output command value p com Add the threshold p th The value obtained (p com +p th )(S95).

[0265] The amplifier output feedback value p fb for (p com +p th ) or more (S95), increase the attenuation amount A tt , so that the amplifier output feedback value p fb On the other hand, the amplifier outputs the feedback value p fb Less than (p com +p th ) (S95), reduce the attenuation amount A tt , so that the amplifier output feedback value p fb Rise (S96d). Use the attenuation A set in (S96d) or (S96u) tt To drive the power amplifier and obtain the amplifier output feedback value p fb (S97).

[0266] Determine whether it converges to the obtained amplifier output feedback value p fb and the amplifier output command value p com within the range of the upper limit and the lower limit (S98).

[0267] The amplifier output feedback value p fb At the upper limit (p com +p th ) and the lower limit (p com -p th) is out of the range (S98), return to (S91) and calculate the attenuation amount A again tt On the other hand, the amplifier output feedback value p fb At the upper limit (p com +p th ) and the lower limit (p com -p th ) (S98), the attenuation amount A tt The value at that time point is determined (S99).

[0268] exist Fig.19 In the setting operation example (a), the feedback value p is output from the amplifier. fb Less than the lower limit (p com -p th ) value, and reduce the attenuation A in the first stage comparison. tt (S93d). Thus, the amplifier outputs the feedback value p fb Increase to less than the upper limit (p com +p th ), the attenuation A is reduced in the second stage comparison tt (S96d). Thus, the amplifier outputs the feedback value p fb Exceeding the upper limit (p com +p th ), the first level comparison is performed again and the attenuation amount A is increased. tt (S93u). Thus, the amplifier outputs the feedback value p fb Still exceeding the upper limit (p com +p th ) state, increase the attenuation A in the second stage comparison tt (S96u). As a result, the amplifier outputs a feedback value p fb Converges to the upper limit (p com +p th ) and the lower limit (p com -p th ) range, set the attenuation A tt .

[0269] exist Fig.19 In the setting operation example (b), the feedback value p is output from the amplifier. fb Exceeding the upper limit (p com +p th ) value, and increase the attenuation A in the first stage comparison. tt (S93u). Thus, the amplifier outputs the feedback value p fb Exceeding the lower limit (p com -p th ) decreases, the attenuation A is reduced in the second stage comparisontt (S96d). Thus, the amplifier outputs the feedback value p fb Does not exceed the lower limit (p com -p th ), the first-stage comparison is performed again to reduce the attenuation amount A tt (S93d). Thus, the amplifier outputs the feedback value p fb Exceeding the lower limit (p com -p th ), the attenuation A is reduced in the second stage comparison tt (S96d). As a result, the amplifier outputs a feedback value p fb Converges to the upper limit (p com +p th ) and the lower limit (p com -p th ) range, set the attenuation A tt .

[0270] exist Fig.19 In the setting operation example (c), the feedback value p is output from the amplifier. fb The upper limit (p com +p th ) and the lower limit (p com -p th ) starts to control the value between the first level and increases the attenuation A in the first level comparison. tt (S93u). Thus, the amplifier outputs the feedback value p fb Exceeding the lower limit (p com -p th ) decreases, the attenuation A is reduced in the second stage comparison tt (S96d). As a result, the amplifier outputs a feedback value p fb Converges to the upper limit (p com +p th ) and the lower limit (p com -p th ) range, set the attenuation A tt .

[0271] exist Fig.19 In the setting operation example (d), the feedback value p is output from the amplifier. fb Exceeding the upper limit (p com +p th ) value, and increase the attenuation A in the first stage comparison. tt (S93u). Thus, the amplifier outputs the feedback value p fb Become the upper limit (p com +p th ) and the lower limit (p com -p th), the attenuation A is reduced in the second-stage comparison. tt (S96d). As a result, the amplifier outputs a feedback value p fb Converges to the upper limit (p com +p th ) and the lower limit (p com -p th ) range, set the attenuation A tt .

[0272] (c) Setting Action Example 3

[0273] Regarding setting operation example 3, at the amplifier output feedback value p fb Whether it converges to the amplifier output command value p com The judgment is made that the reference value is within the prescribed range, and the amplifier outputs the command value p com The upper limit and amplifier output command value p com The lower limit of the double-team range is compared.

[0274] use Fig. 20 Flowchart and Fig.21 The operation diagram of setting operation example 3 is described. As in operation example 1, the initial attenuation amount A set in S80 is set. tto , using the initial attenuation A tto To drive the power amplifier and obtain the amplifier output feedback value p fb (S101).

[0275] The amplifier output feedback value p obtained by determining fb Is the amplifier outputting the command value p? com The upper limit and amplifier output command value p com The lower limit of the range is enclosed, and the attenuation of the power amplifier is calculated. com The lower limit is the output command value p from the amplifier. com Subtract the threshold p th The value obtained (p com -p th ), as the amplifier output command value p com The upper limit of the amplifier output command value p com Add the threshold p th The value obtained (p com +p th )(S102).

[0276] The amplifier output feedback value p fb The amplifier outputs the command value p com The upper limit and amplifier output command value p comIf the attenuation is within the range of the lower limit of tt (S103).

[0277] The amplifier output feedback value p fb is greater than the amplifier output command value p com The upper limit value (p com +p th ) value, increase the attenuation (S104u), and at the amplifier output feedback value p fb is the ratio amplifier output command value p com The lower limit value (p com -p th ) is a small value, reduce the attenuation amount (S104d).

[0278] The attenuation amount determined in (S104d) or (S104u) is used to return to (S101), drive the power amplifier and obtain the amplifier output feedback value p fb , repeat the steps after (S102) again to determine the attenuation A tt .

[0279] exist Fig.21 In the setting operation example (a), the amplifier output feedback value p is obtained. fb At the upper limit (p com +p th ) and the lower limit (p com -p th ) (S102), therefore, the attenuation at this time is determined as the attenuation A tt (S103).

[0280] exist Fig.21 In the setting operation example (b), the amplifier output feedback value p is obtained. fb is above the upper limit (p com +p th ) value (S102), therefore, the attenuation is increased (S104u). The amplifier output feedback value p obtained by the increased attenuation fb The upper limit (p com +p th ) and the lower limit (p com -p th ) (S102), the attenuation at this time is determined as the attenuation A tt (S103).

[0281] exist Fig.21 In the setting operation example (c), the amplifier output feedback value p is obtained. fb is above the upper limit (p com +pth ) value (S102), therefore, the attenuation is increased (S104u). The amplifier output feedback value p obtained by the increased attenuation fb Still exceeds the upper limit (p com +p th ) value (S102), the attenuation is increased again (S104u). The amplifier output feedback value p obtained by the increased attenuation fb The upper limit (p com +p th ) and the lower limit (p com -p th ) (S102), the attenuation at this time is determined as the attenuation A tt (S103).

[0282] exist Fig.21 In the setting operation example (d), the amplifier output feedback value p is obtained. fb is below the lower limit (p com -p th ) value (S102), therefore, the attenuation amount is reduced (S104d). The amplifier output feedback value p obtained by the reduced attenuation amount fb The upper limit (p com +p th ) and the lower limit (p com -p th ) (S102), the attenuation at this time is determined as the attenuation A tt (S103).

[0283] exist Fig.21 In the setting operation example (e), the amplifier output feedback value p is obtained. fb is below the lower limit (p com -p th ) value (S102), therefore, the attenuation is reduced (S104d). The amplifier output feedback value p obtained by the reduced attenuation fb Still below the lower limit (p com -p th ) value (S102), reduce the attenuation amount again (S104d).

[0284] The amplifier output feedback value p obtained by the reduced attenuation fb The upper limit (p com +p th ) and the lower limit (p com -p th ) (S102), the attenuation at this time is determined as the attenuation A tt (S103).

[0285] exist Fig.21 In the setting operation example (f), the amplifier output feedback value p is obtained. fb is above the upper limit (p com +p th ) value (S102), therefore, the attenuation is increased (S104u). The amplifier output feedback value p obtained by the increased attenuation fb is below the lower limit (p com -p th ) value (S102), the attenuation is reduced (S104d). The amplifier output feedback value p obtained by the reduced attenuation is fb The upper limit (p com +p th ) and the lower limit (p com -p th ) (S102), the attenuation at this time is determined as the attenuation A tt (S103).

[0286] (3b-4: Setting operation of power supply efficiency EF)

[0287] Example 4 of setting action is to synthesize output P out Converges to the synthetic output command value P com This is an operation example of setting the power supply efficiency EF under the condition that the power supply efficiency EF is within the predetermined range of the reference value.

[0288] use Fig. 22 The setting action example 4 is described with reference to the flowchart of FIG.

[0289] In order to synthesize the output command value P com Set the appropriate power efficiency EF and obtain the composite output command value P as the reference. com ( S110 ), the initial power efficiency EF0 of the power amplifier is set ( S111 ).

[0290] Based on the output power / power efficiency characteristics of each power amplifier, the amplifier output p of each power amplifier is obtained corresponding to the initial power efficiency EF0. out When the power amplifier section has a plurality of power amplifiers with the same output power / power efficiency characteristics, the amplifier output p of each power amplifier is out The amplifier output p is calculated to be the same as the output power (S112). out Add to calculate the composite output P out (S113).

[0291] Set the lower limit output P of the combined output obtained by the power amplifier limit, determine the composite output P calculated in S113 out Whether the lower limit is met, output P limit (S114).

[0292] The calculated composite output P out The lower limit output P limit In the above case, it is determined that the required minimum power output is obtained, and it is determined whether the combined output command value P is satisfied. com . According to the synthesis output P out Is it at the synthetic output command value P? com The determination is performed within the allowable error ΔP range (S115).

[0293] The calculated composite output P out At the synthetic output command value P com If the allowable error ΔP is within the range of out Determine the amplifier output p of each power amplifier out (S117).

[0294] The calculated composite output P out No synthetic output command value P com If it is within the allowable error ΔP range, change the power supply efficiency EF (S118) and repeat the process starting from (S112).

[0295] In (S114), the calculated composite output P out Does not exceed the lower limit output P limit If the power efficiency EF can be changed, the power efficiency EF is changed (S118), and the process from (S112) is repeated. On the other hand, if the power efficiency EF cannot be changed, a satisfactory composite output P is not obtained in the setting of the power amplifier at the current time point. out , therefore, the setting of the power amplifier is re-evaluated (S119).

[0296] (4) High-frequency power supply device based on switching amplifier

[0297] When each power amplifier of the power amplification section is composed of a switching amplifier including a phase control section, the operation amount MV is set by the phase shift amount θ and the phase amount θ of the phase control section. Fig.23 The following describes a configuration example of a high frequency power supply device based on a switching amplifier. Fig.24 A configuration example of the phase control unit will be described.

[0298] Structure example 1:

[0299] Fig.23This is a block diagram for explaining a configuration example of a switching amplifier in the high-frequency power supply device of the present invention.

[0300] Structural Example 1 shows an example of controlling the output level of each amplifier output of each power amplifier by controlling the operation amount MV by the phase shift amount θ and the phase amount θ, and controlling the output level of the high-frequency power supply device by increasing or decreasing the DC voltage of the DC power supply. In Structural Example 1, an example of increasing or decreasing the DC voltage of the DC power supply by PWM control is shown.

[0301] The high frequency power supply device 20 includes a control unit 21 , a DC power supply unit 22 , a distribution unit 23 , a power amplifier unit 24 , an amplifier output detection unit 25 , a power synthesis unit 26 , a synthesis output detection unit 27 , an A / D converter 28 , and an RF signal generation unit 29 .

[0302] The DC power supply unit 22 is a power supply unit capable of controlling a DC voltage, and includes: an AC power supply 22a, an AC / DC conversion unit 22b that converts the AC voltage of the AC power supply 22a into a DC voltage, a DC / DC conversion unit 22c that amplifies the amplitude of the DC voltage converted by the AC / DC conversion unit 22b through PWM control, and a PWM signal generation unit 22d that generates a PWM signal for PWM control of the DC / DC conversion unit 22c.

[0303] The DC / DC converter 22c outputs a DC voltage corresponding to the duty ratio of the PWM signal based on the PWM signal generated by the PWM signal generator 22d, and applies the DC voltage to the final-stage power amplifier 24c.

[0304] The power amplifier 24 has a plurality of power amplifiers 24A, 24B, ... 24N. The digital amplifiers of the RF phase conversion unit / phase control unit 24a, the driving circuit 24b, and the terminal-stage power amplifier 24c are connected in series to form the power amplifiers 24A to 24N. The RF signal generated by the RF signal generation unit 29 is distributed from the distribution unit 23 to the power amplifiers 24A, 24B, ... 24N. The RF phase conversion unit / phase control unit 24a converts the RF signal distributed from the distribution unit 23 into a phase shift signal, and controls the output level of each amplifier output of each power amplifier 24A, 24B, ... 24N by phase shift control. The DC voltage applied from the DC power supply unit 22 is adjusted by PWM control, and the voltage of the terminal-stage power amplifier 24c is adjusted, thereby improving the accuracy of power control.

[0305] The RF phase conversion unit / phase control unit 24 a may use a DC / RF converter of a class D amplifier formed of a bridge circuit of semiconductor switching elements.

[0306] The RF phase conversion unit / phase control unit 24a of the power amplifier 24A and the RF phase conversion unit / phase control unit 24a of the power amplifier 24B are phase-shift controlled based on the phase shift amount θ and the phase amount θ, and power is combined by the power combining unit 26. Similarly, the RF phase conversion unit / phase control unit 24a of the power amplifier 24C and the RF phase conversion unit / phase control unit 24a of the power amplifier 24D are phase-shift controlled based on the phase shift amount θ and the phase amount θ, and power is combined by the power combining unit 26.

[0307] The control unit 21 includes: a phase shift setting control unit 21a, which controls the phase of the switch of the RF phase conversion unit / phase control unit 24a of the power amplifier (24A~24N) of the power amplifier unit 24; a power amplifier abnormality detection unit 21b, which detects the abnormality of the power amplifier (24A~24N); a distribution control unit 21c, which controls the RF signal distribution of the distribution unit 23; an RF signal setting unit 21d, which sets the frequency and signal level of the high-frequency signal (RF signal); and a DC power supply control unit 21e, which controls the output level of the terminal-level power amplifier 24c.

[0308] The phase shift amount setting control unit 21a includes an amplifier output reference value setting unit 21a-1 and an operation amount setting unit 21a-2. Fig.23 The description of the amplifier output reference value setting unit 21a-1 and the operation amount setting unit 21a-2 is omitted.

[0309] The amplifier output reference value setting unit 21a-1 sets the amplifier output reference value p ref , the amplifier outputs a reference value p ref The operation amount setting unit 21a-2 is used to determine the output level of the amplifier output of the power amplifiers 24A to 24N. The amplifier output feedback value p detected by the amplifier output detection unit 25 is fb The amplifier output reference value p set by the amplifier output reference value setting unit 21a-1 ref The comparison is performed, and based on the comparison, a phase shift amount θ for controlling the output level of each amplifier output of each power amplifier 24A-24N is set for each power amplifier 24A-24N. Each RF phase conversion unit / phase control unit 24a of the power amplifier 22A~24N is controlled based on the phase shift amount θ to reduce the amplifier output feedback value p fb The amplifier output reference value p ref The phase shift amount θ corresponds to the amplifier gain. The output level of the amplifier output of each power amplifier 24A to 24N of the power amplification unit 24 is controlled according to the phase shift amount θ.

[0310] The amplifier output reference value setting unit 21a-1 sets the output level of the high frequency power supply device 20 output from the output terminal OUT, and adjusts the output level according to the synthesized output command value P com or the composite output feedback value P detected by the composite output detection unit 27 FB , setting the amplifier output reference value p for instructing the output level of the amplifier output of the power amplifiers 24A to 24N ref (Amplifier output command value p com , amplifier output conversion value p FB ).

[0311] The synthesized output command value P is proportionally allocated according to the number N of power amplifiers 24A to 24N and the output power / power efficiency of each power amplifier 24A to 24N. com Or the synthetic output feedback value P FB , thereby performing the amplifier output reference value setting section 21a-1 to set the amplifier output reference value p ref (Amplifier output command value p com , amplifier output conversion value p FB The output level of the terminal stage power amplifier 24c can be controlled by the DC power supply voltage of the DC power supply control unit 21e.

[0312] Structure Example 2:

[0313] Configuration Example 2 is a configuration in which a phase controller using a bidirectional thyristor or the like is used instead of the RF phase conversion unit / phase control unit 24 a.

[0314] Configuration Example 1 shows an example in which, in the RF phase converter / phase control section 24a, the RF phase converter converts the signal into a phase shift signal, and the phase control section performs phase shift control on each power amplifier section.

[0315] On the other hand, the phase controller of structural example 2 uses the phase amount θ to control the timing of turning on the bidirectional thyristor to perform power control. In the phase controller of structural example 2, instead of the RF phase conversion unit / phase control unit 24a, the power of the amplifier output is controlled by adjusting the on / off of the switching element such as the bidirectional thyristor using the phase amount θ.

[0316] Fig.24 An example of a phase controller using a bidirectional thyristor is shown. The phase controller connects a series circuit of a resistor and a switch element in parallel with the bidirectional thyristor, and connects the connection end of the switch element and a resistor to the gate end of the bidirectional thyristor. The power of the amplifier output is controlled by adjusting the timing of turning on the switch element using the phase amount θ.

[0317] Possibility of Industrial Application

[0318] The high-frequency power supply device of the present invention can be applied to a high-frequency power supply (RF generator) used in semiconductor manufacturing equipment, liquid crystal panel manufacturing equipment, and the like.

[0319] Explanation of symbols

[0320] 1. Control Unit

[0321] 1a Amplifier control section

[0322] 1a-2 Operation amount setting unit

[0323] 1a-1 Amplifier output reference value setting unit

[0324] 1b Amplifier abnormality detection unit

[0325] 1c Distribution Control Unit

[0326] 1d RF signal setting unit

[0327] 2 RF signal section

[0328] 3 Distribution Department

[0329] 4 Power amplifier

[0330] 4A, 4B Power Amplifier

[0331] 5 Amplifier output detection section

[0332] 6 Power synthesis unit

[0333] 7 Synthetic output detection unit

[0334] 10 High frequency power supply device

[0335] 11. Control Unit

[0336] 11a Amplifier control section

[0337] 11a-1 Amplifier output reference value setting unit

[0338] 11a-2 Operation amount setting unit

[0339] 11b Power amplifier abnormality detection unit

[0340] 11c Allocation Control Unit

[0341] 11d RF signal setting unit

[0342] 12 RF signal unit

[0343] 12a RF signal generation unit

[0344] 12b Power Control Amplifier

[0345] 12c Power Control Interface

[0346] 13 Distribution Department

[0347] 14 Power amplifier

[0348] 14A~14D Power Amplifier

[0349] 14a Variable Gain Amplifier

[0350] 14b Driver Amplifier

[0351] 14c Final-level power amplifier

[0352] 15 Amplifier output detection section

[0353] 16 Power synthesis unit

[0354] 17 Synthetic output detection unit

[0355] 18A / D converter

[0356] 19D / A Converter

[0357] 20 High frequency power supply device

[0358] 21 Control Department

[0359] 21a Phase shift setting control unit

[0360] 21a-1 Amplifier output reference value setting unit

[0361] 21a-2 Operation amount setting unit

[0362] 21b Power amplifier abnormality detection unit

[0363] 21c Distribution Control Department

[0364] 21d RF signal setting unit

[0365] 21e DC power supply control unit

[0366] 22 DC power supply

[0367] 22A~24N Power Amplifier

[0368] 22a AC power supply

[0369] 22d PWM signal generation unit

[0370] 23 Distribution Department

[0371] 24 Power amplifier

[0372] 24A~24N Power Amplifier

[0373] 24B, 24C, 24D Power Amplifier

[0374] 24a RF phase conversion unit / phase control unit

[0375] 24b drive circuit

[0376] 24c Final-level power amplifier

[0377] 25 Amplifier output detection section

[0378] 26 Power synthesis unit

[0379] 27 Synthetic output detection unit

[0380] 28A / D converter

[0381] 29 RF signal generation unit

[0382] A tt Attenuation

[0383] A tto Initial attenuation

[0384] EF, EF1~EF4 power supply efficiency

[0385] EF0 Initial power efficiency

[0386] MV Operation Volume

[0387] MV o Initial Value

[0388] OUT Output

[0389] P FB , P FB1 , P FB2 Synthetic output feedback value

[0390] P fb 、p fb1 、p fb2 Amplifier output feedback value

[0391] P limit Lower limit output

[0392] P out , P out1 , P out2 , P out3 Synthetic Output

[0393] P th1 , P th2 Synthetic output threshold

[0394] PS High Frequency Power Supply

[0395] p FB Amplifier output conversion value

[0396] p com Amplifier output command value

[0397] p out 、p out1 、p out2 、p out3 Amplifier Output

[0398] p ref Amplifier output reference value

[0399] p th Threshold

[0400] p th3 、p th4 Amplifier Output Threshold

[0401] Δ1, Δ2 difference

[0402] ΔP Permissible error

[0403] ΔP FB difference

[0404] Δp fb difference

[0405] Θ Phase quantity

[0406] θ phase shift amount.

Claims

1. A high frequency power supply device, characterized in that: have: A power amplifier section, which is composed of multiple amplifiers connected in parallel; a distribution unit that distributes the high-frequency signal to each amplifier of each power amplification unit; a power combining unit for combining the power of the plurality of amplifier outputs after power amplification by the power amplifying units and outputting a combined output obtained by the power combination; an amplifier output detection unit, which detects the amplifier output of the power amplifier unit and outputs an amplifier output feedback value p fb ; A synthesis output detection unit is connected between the power synthesis unit and the output terminal, separates the traveling wave power, and detects the synthesis output feedback value P of the synthesis output of the power synthesis unit. FB ; as well as A control unit determines the amplifier output command value p com , the amplifier outputs the command value p com The control unit is used to determine the output level of each amplifier output, and the control unit outputs each amplifier output feedback value p detected by the amplifier output detection unit. fb With the amplifier output command value p com Comparison is made, an operation amount MV is set for each power amplifier unit, and an output level of each amplifier output of each power amplifier unit is controlled according to each operation amount MV, wherein the operation amount MV is used to control the output level of each amplifier output of each power amplifier unit, The control unit determines a target value of the combined output of the power combining unit based on a combined output instruction value P com Or the synthetic output feedback value P FB , to determine the amplifier output command value p com .

2. The high frequency power supply device according to claim 1, characterized in that: The control unit determines the output level of the combined output according to the combined output instruction value P com , the number N of the power amplifiers, and the output power / power efficiency characteristics of each power amplifier to determine the amplifier output command value p of each power amplifier com , where N is an integer greater than 2, The control is set to the amplifier output feedback value p detected by each amplifier output detection unit. fb becomes the amplifier output command value p com The operation volume MV.

3. The high frequency power supply device according to claim 2, characterized in that: Each of the power amplifiers has equal output power / power efficiency characteristics, The control unit sets the synthesized output command value P com The "composite output command value P" obtained by dividing by the number N of the power amplifiers com / Number N” is P com / N is determined as the amplifier output command value p of each power amplifier unit. com .

4. The high frequency power supply device according to claim 2, characterized in that: Each of the power amplifiers has inherent output power / power efficiency characteristics. The control unit sets each output power value determined for the same power efficiency as the amplifier output command value p of each power amplifier unit under the output power / power efficiency characteristics inherent to each of the power amplifier units. com , and each amplifier outputs a command value p com The sum of the ... com .

5. The high frequency power supply device according to claim 1, characterized in that: The control unit outputs a feedback value P according to the synthesis output of the power synthesis unit. FB , the number N of the power amplifiers and the output power / power efficiency characteristics of each power amplifier to determine the amplifier output command value p of each power amplifier com , and set the control to the amplifier output feedback value p detected by each amplifier output detection unit fb becomes the amplifier output command value p com The operation volume MV.

6. The high frequency power supply device according to claim 5, characterized in that: Each of the power amplifiers has equal output power / power efficiency characteristics, The control unit outputs the synthetic feedback value P FB The "synthesized output feedback value P" obtained by dividing by the number N of the power amplifier sections FB / The number of power amplifiers N” is P FB / N is determined as the amplifier output command value p of each power amplifier unit. com .

7. The high frequency power supply device according to claim 2, characterized in that: Each of the power amplifiers has inherent output power / power efficiency characteristics. The control unit sets each output power value determined for the same power efficiency as the amplifier output command value p of each power amplifier unit under the output power / power efficiency characteristics inherent to each of the power amplifier units. com , and each amplifier outputs a command value p com The sum of the sum of the output feedback values ​​is determined as the synthetic output feedback value P FB .

8. The high frequency power supply device according to any one of claims 1 to 7, characterized in that: Each amplifier stage of each power amplifier section is composed of a linear amplifier, and the linear amplifier includes an amplifier with a variable attenuator. The manipulation amount MV is the attenuation amount of the variable attenuator of the amplifier with a variable attenuator.

9. The high frequency power supply device according to any one of claims 1 to 7, characterized in that: Each amplifier stage of each of the power amplifiers is composed of a switching amplifier including a phase control unit, The manipulated variable MV is a phase variable of the phase control unit.

10. The high frequency power supply device according to any one of claims 2 to 7, characterized in that: The control unit outputs the feedback value P according to the synthesis FB The synthesized output command value P com comparison, or the feedback value P of the synthesized output FB to detect abnormality in the power amplifier unit.

11. The high frequency power supply device according to any one of claims 2 to 7, characterized in that: The control unit outputs a feedback value p according to the amplifier fb With the amplifier output command value p com comparison, or the amplifier output feedback value p fb to detect abnormality in the power amplifier unit.

12. A control method for a high frequency power supply device, characterized in that: The high frequency power supply device comprises: A power amplifier section, which is composed of multiple amplifiers connected in parallel; a distribution unit that distributes the high-frequency signal to each amplifier stage of each of the power amplification units; and a power combining unit that combines the power of the plurality of amplifier outputs after power amplification by the power amplifying units and outputs the obtained combined output, In the control method, (a) Based on the combined output command value P for determining the target value of the combined output of the power combining unit com or the synthesized output feedback value P of the synthesized output of the power synthesizer FB , to determine the amplifier output command value p for determining the output level of each amplifier output com , (b) The output feedback value of each amplifier is p fb The amplifier output command value p of each amplifier output com For comparison, (c) setting a manipulation variable MV for controlling the output level of each amplifier output for each power amplifier section, (d) controlling the output level of each amplifier output of each of the power amplifying sections according to each of the manipulation amounts MV.

13. The control method of a high frequency power supply device according to claim 12, characterized in that: According to the synthesis output command value P com , the number N of the power amplifiers, and the output power / power efficiency characteristics of each power amplifier to determine the amplifier output command value p of each power amplifier com , Set the control to each amplifier output feedback value p fb becomes the amplifier output command value p com The operation volume MV.

14. The control method of a high frequency power supply device according to claim 12, characterized in that: According to the synthesized output feedback value P FB , the number N of the power amplifiers, and the output power / power efficiency characteristics of each power amplifier to determine the amplifier output command value p of each power amplifier com , Set the control to each amplifier output feedback value p fb becomes the amplifier output command value p com The operation volume MV.

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