A method for splitting brittle materials

Through the combined use of ultrafast laser and CO2 laser, combined with the principle of thermal expansion and contraction, the efficient and precise lobe processing of brittle materials is achieved, and the cracks or edge collapse problems arise during the cutting process of brittle materials are solved, thereby improving processing efficiency and yield.

CN119609375BActive Publication Date: 2025-04-08SHENZHEN JIXIANGYUN TECH CO LTD
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Patent Information

Application Number
CN202510170026.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-02-17
Publication Date
2025-04-08
Estimated Expiration
2045-02-17

AI Technical Summary

Technical Problem

During the processing of brittle materials, both mechanical cutting and laser cutting have cracks or edge collapse problems, and it is difficult to achieve efficient and accurate lobe processing.

Method used

Ultrafast laser is used to cut brittle material through the Bessel beam to form an inner contour track hole ring, and the crack ring is heated by CO2 laser, so that the crack ring and the inner contour track hole ring penetrate through to form a hole crack trajectory. Subsequently, through the principle of thermal expansion and contraction, the temperature difference change of the brittle material is controlled to achieve cold crack separation of the target cutting inner profile.

Benefits of technology

It effectively solves the cracks or edge collapse problems that brittle materials occur during cutting, realizes efficient and precise lobe processing of brittle materials, and improves yield and processing efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention relates to the technical field of material processing, and specifically discloses a method for splitting brittle materials, comprising the following steps: obtaining a target cutting inner contour of the brittle material, using an ultrafast laser to cut a beam cutting point through a Bessel beam to obtain a plurality of inner contour trajectory holes, and 2 Laser heating and cutting of the crack ring allows the crack ring and the inner contour trajectory hole ring to penetrate to form a hole crack trajectory; the brittle material after the hole crack trajectory processing is heated as a whole and heated to the target temperature value, and the target cutting inner contour is cooled to make the target cutting inner contour cold crack and fall off, which solves the problem of cracks or edge collapse of existing brittle materials during mechanical cutting or laser cutting, and has a good splitting effect, can be compatible with different brittle material products, and can adapt to the splitting of products of different sizes and specifications, and the split cross-section is smooth without edge collapse, which greatly improves the processing efficiency and product quality.
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Description

Technical Field

[0001] The invention relates to the technical field of material processing, and in particular to a method for splitting brittle materials. Background Art

[0002] With the development and progress of technology, in the processing industry of high-hardness brittle materials such as glass, the traditional mechanical cutting of brittle materials has been changed; it uses diamond tools or carbide tools to cut brittle materials through mechanical force. The processing efficiency is relatively low and it is only suitable for some simple cutting needs. In addition, mechanical cutting is prone to edge collapse and cracks, which has a certain impact on the processing quality. Or the use of water jet cutting will produce a large amount of waste during the cutting process, which will cause a certain burden on the environment. Since it relies on physical impact to achieve cutting, burrs and cracks may appear when cutting complex patterns or fine lines, which requires subsequent processing.

[0003] In view of the above shortcomings, laser cutting has gradually been used, which is a more advanced cutting method in brittle material processing. Laser cutting technology has been widely used in the brittle material processing industry due to its advantages of high precision, high efficiency and low loss. Compared with traditional mechanical processing methods, laser cutting can achieve precise cutting of brittle materials, but in the processing method of inner contour cutting fragments, there will still be edge collapse or burrs on the cutting section. Therefore, it is urgent to study a method to improve the fragmentation of brittle materials. Summary of the invention

[0004] The object of the present invention is to provide a method for splitting brittle materials to solve the above-mentioned problems.

[0005] The purpose of the present invention can be achieved through the following technical solutions:

[0006] A method for splitting brittle materials, comprising the following steps:

[0007] Step 1: Obtain the target center point of the target cutting inner contour of the brittle material and the contour radius value R of the target inner contour, use ultrafast laser to cut the beam cutting point through the Bessel beam, and obtain a number of inner contour trajectory holes. At this time, obtain the inner contour trajectory hole ring, and measure the inner contour trajectory hole ring to obtain a trajectory hole ring qualified signal;

[0008] Step 2: Based on the qualified signal of the trajectory hole ring, the contour radius value R of the target inner contour is obtained again, and then the crack ring is cut by heating with a CO2 laser, so that the crack ring and the inner contour trajectory hole ring penetrate to form a hole crack trajectory;

[0009] Step 3: The brittle material after hole crack track processing is heated as a whole to a target temperature value, and a heating completion signal is obtained;

[0010] Step 4: Based on the heating completion signal, calculate and obtain the cooling target temperature value LT of the target cutting inner contour, then cool the target cutting inner contour, cool the temperature of the target cutting inner contour to the cooling target temperature value LT within the target cooling time t, monitor the edge temperature of the target cutting inner contour, and generate a cooling completion signal to cause the target cutting inner contour to cold crack and fall off.

[0011] As a further solution of the present invention: the process of obtaining the qualified signal of the track hole ring includes:

[0012] The inner contour trajectory holes in the inner contour trajectory hole ring are marked as i in sequence, where i is 1, 2, 3, etc.; the cutting data of each inner contour trajectory hole is obtained, and the cutting data includes the trajectory hole diameter value DG i and trajectory aperture radial value RJ i ;

[0013] Determine the track hole diameter value DG i Whether they are all within the trajectory hole qualified value range [DGmin, DGmax] and obtain the trajectory hole qualified signal;

[0014] Based on the track hole qualified signal, through Calculate the target deviation value KP of the trajectory hole i ; Get the target deviation value KP of the trajectory hole i The maximum value among them is recorded as the maximum value of the trajectory hole target deviation KPmax; the maximum value of the trajectory hole target deviation KPmax is compared with the trajectory hole target deviation threshold KPJ to obtain the normal signal of the inner contour trajectory hole;

[0015] Based on the normal signal of the inner contour trajectory hole, the average value and standard deviation of the trajectory hole radial value are calculated to obtain the trajectory hole radial mean value Erj and the trajectory hole radial standard value Frj;

[0016] pass The trajectory hole radial measurement value PH is calculated and then it is determined whether the trajectory hole radial measurement value PH is within the trajectory hole radial qualified value range [PHGmin, PHGmax] to obtain the trajectory hole ring qualified signal.

[0017] As a further solution of the present invention: determining the track hole diameter value DG i Are they all within the qualified value range of the trajectory hole [DGmin, DGmax]? If the trajectory hole diameter value DG i If all of them are within the qualified value range of the trajectory hole [DGmin, DGmax], a qualified trajectory hole signal is generated; otherwise, a failed trajectory hole signal is generated.

[0018] As a further solution of the present invention: compare the maximum value KPmax of the trajectory hole target deviation with the trajectory hole target deviation threshold KPJ. If the maximum value KPmax of the trajectory hole target deviation is greater than the trajectory target deviation threshold KPJ, an inner contour trajectory hole abnormal signal is generated; if the maximum value KPmax of the trajectory hole target deviation is less than or equal to the trajectory target deviation threshold KPJ, an inner contour trajectory hole normal signal is generated.

[0019] As a further solution of the present invention: determine whether the trajectory hole radial metering value PH is within the trajectory hole radial qualified value range [PHGmin, PHGmax]. If the trajectory hole radial metering value PH is within the trajectory hole radial qualified value range [PHGmin, PHGmax], generate a trajectory hole ring qualified signal; if the trajectory hole radial metering value PH is not within the trajectory hole radial qualified value range [PHGmin, PHGmax], generate a trajectory hole ring unqualified signal.

[0020] As a further solution of the present invention: the heating completion signal is obtained in the following manner:

[0021] Obtain the target heating temperature value TM, and use contact heating to heat the brittle material as a whole; select several monitoring points evenly on the surface of the brittle material and mark them as n, where n is 1, 2, 3, etc.; then obtain the temperature values ​​of several monitoring points through the temperature sensor, which are recorded as the point temperature value TD n ,

[0022] The point temperature values ​​are averaged to obtain the point temperature mean TDJ. Calculate the point temperature deviation value TDP;

[0023] Get the maximum and minimum values ​​of the point temperature values, record them as the maximum point temperature TDmax and the minimum point temperature TDmin; through Calculate and obtain the point temperature difference extreme value TDC;

[0024] The point temperature deviation value TDP and the point temperature difference extreme value TDC are judged, and a heating completion signal is obtained.

[0025] As a further solution of the present invention: the point temperature deviation value TDP and the point temperature difference extreme value TDC are judged, if the point temperature deviation value TDP is less than the point temperature deviation threshold TPY, and the point temperature difference extreme value TDC is less than the point temperature difference threshold TCY, a heating completion signal is generated; otherwise, a heating abnormality signal is generated.

[0026] As a further solution of the present invention: the calculation method of the cooling target temperature value LT is:

[0027] Get the stable shedding spacing value WFL of the target cutting inner contour, through Calculate and obtain the shedding temperature difference value Twc of the target cutting inner contour, where a is the internal shrinkage coefficient of the brittle material;

[0028] Then through The cooling target temperature value LT is obtained by calculation.

[0029] As a further solution of the present invention: the process of monitoring the edge temperature of the target cutting inner contour and generating the cooling completion signal is as follows:

[0030] Select several inner monitoring points on the edge of the target cutting inner contour inside the track hole ring, and then select several outer monitoring points on the edge of the brittle material outside the track hole ring with the track hole ring as the symmetry axis, and record each inner detection point and the outer monitoring point as a monitoring point group, and mark the monitoring point group as v, where v is 1, 2, 3...; obtain the temperature of the monitoring point group through the temperature sensor, and record the temperature value of the inner detection point in each monitoring point group as the inner point temperature value NT v , and record the temperature value of the external monitoring point in each group of monitoring points as the external point temperature value WT v ;

[0031] pass Calculate the cold crack temperature difference LL of v monitoring point groups v ; Take the cold cracking temperature difference LL v The minimum value among them is recorded as the minimum cold cracking temperature difference LLmin;

[0032] The minimum cold crack shedding temperature difference LLmin is compared with the shedding temperature difference Twc to obtain the cooling completion signal.

[0033] As a further solution of the present invention: comparing the minimum cold crack shedding temperature difference LLmin with the shedding temperature difference Twc, if the minimum cold crack shedding temperature difference LLmin is greater than or equal to the shedding temperature difference Twc, generating a cooling completion signal;

[0034] If the minimum cold crack shedding temperature difference LLmin is less than the shedding temperature difference value Twc, a cooling abnormality signal is generated.

[0035] Beneficial effects of the present invention:

[0036] The principle of thermal expansion and contraction is adopted to control the temperature difference of brittle materials within a unit time to achieve cold crack separation of the inner contour of the target cutting, which solves the problem of cracks or edge collapse of existing brittle materials during mechanical cutting or laser cutting. The splitting effect is good, and the cold crack edge will not break, which improves the yield rate in the processing of brittle materials;

[0037] This method is compatible with different brittle material products and can be adapted to the splitting of products of different sizes and specifications. The cross section of the split is smooth and has no edge chipping, which greatly improves processing efficiency and product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The present invention will be further described below in conjunction with the accompanying drawings.

[0039] Figure 1 It is a schematic flow chart of the method of the present invention;

[0040] Figure 2 It is a schematic diagram of the inner contour track hole ring structure in the present invention;

[0041] Figure 3 This Figure 2 Schematic diagram of the method structure in the middle A area;

[0042] Figure 4 It is a schematic diagram of the structure of the cold cracking device in the present invention;

[0043] Figure 5 It is a schematic diagram of the cold crack structure of the target material and the workpiece in the present invention.

[0044] In the figure: 1. The whole blank; 2. The workpiece; 3. The target material; 4. The upper cold plate; 5. The upper cylinder; 6. The lower cold plate; 7. The lower cylinder. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0046] Example 1: Please refer to Figure 1 As shown, the present invention is a method for splitting brittle materials, comprising the following steps:

[0047] Step 1: Obtain the target center point of the target cutting inner contour of the brittle material, and simultaneously obtain the contour radius value R of the target inner contour. Based on the target center point of the target cutting inner contour, determine the cutting trajectory of the target cutting inner contour, select a number of beam cutting points on the cutting trajectory of the target cutting inner contour, and use ultrafast laser to cut the beam cutting points through the Bessel beam to obtain a number of inner contour trajectory holes. At this time, obtain the inner contour trajectory hole ring, and measure the inner contour trajectory hole ring to obtain a trajectory hole ring qualified signal; wherein, the inner contour trajectory hole ring of the cutting inner contour is as follows Figure 2As shown in the figure, since the focused spot of the Bessel laser beam is only 2 to 3 μm, the separated surfaces of the brittle materials after cutting are usually still tightly combined and cannot be split automatically, especially for materials with low thermal expansion coefficients, such as glass with a thermal expansion coefficient of 5×10 -6 / ℃, it is difficult to achieve automatic separation for thick brittle materials such as 4-12mm;

[0048] The process of obtaining the qualified signal of the track hole ring includes:

[0049] S1: mark the inner contour trajectory holes in the inner contour trajectory hole ring as i in sequence, where i is 1, 2, 3, etc.; obtain the cutting data of each inner contour trajectory hole, the cutting data includes the trajectory hole diameter value DG i and trajectory aperture radial value RJ i ; Regarding cutting data, wherein the trajectory hole diameter value is the diameter of the inner contour trajectory hole obtained by each Bessel beam cutting, and the trajectory hole radial value is the distance from the center of each inner contour trajectory hole to the target center point;

[0050] S2: Determine the track hole diameter value DG i Are they all within the qualified value range of the trajectory hole [DGmin, DGmax]:

[0051] If the track hole diameter value DG i Whether they are all within the trajectory hole qualified value range [DGmin, DGmax], generating a trajectory hole qualified signal;

[0052] Otherwise, a trajectory hole failure signal is generated;

[0053] Since the focused spot of the Bessel laser beam is only 2 to 3 um, it is necessary to ensure that each track hole is within the track hole qualified value range. The minimum and maximum values ​​of the track hole qualified value range can be 2 um and 3 um.

[0054] S3: Based on the qualified signal of the track hole, pass Calculate the target deviation value KP of the trajectory hole i ;

[0055] Get the target deviation value KP of the trajectory hole i The maximum value among them is recorded as the maximum value of the trajectory hole target deviation KPmax;

[0056] Compare the maximum value of the track hole target deviation KPmax with the track hole target deviation threshold KPJ:

[0057] If the maximum value KPmax of the trajectory hole target deviation is greater than the trajectory target deviation threshold KPJ, an inner contour trajectory hole abnormal signal is generated;

[0058] If the maximum value KPmax of the trajectory hole target deviation is less than or equal to the trajectory target deviation threshold KPJ, a normal signal of the inner contour trajectory hole is generated;

[0059] When the target deviation value of the track hole is too large, it means that the position of a track hole is more biased towards the outer contour of the brittle material. At this time, the product of the brittle material obtained by this processing may be unqualified;

[0060] S4: Based on the normal signal of the inner contour trajectory hole, the average value and the standard deviation value of the trajectory hole radial value are calculated to obtain the trajectory hole radial mean value Erj and the trajectory hole radial standard value Frj;

[0061] pass Calculate and obtain the trajectory hole radial measurement value PH;

[0062] Determine whether the trajectory hole radial measurement value PH is within the trajectory hole radial qualified value range [PHGmin, PHGmax];

[0063] By calculating the radial measurement value of the trajectory holes, it can be determined whether the distribution of all trajectory holes is at the edge of the target cutting inner contour;

[0064] If the trajectory hole radial measurement value PH is within the trajectory hole radial qualified value range [PHGmin, PHGmax], a trajectory hole ring qualified signal is generated;

[0065] If the trajectory hole radial measurement value PH is not within the trajectory hole radial qualified value range [PHGmin, PHGmax], a trajectory hole ring unqualified signal is generated;

[0066] Since the trajectory hole is the inner contour line of the brittle material of the target cutting inner contour after the fall-off, if the deviation of the trajectory hole is too large, the non-circularity of the target cutting inner contour will be greater. Therefore, it is necessary to ensure that the trajectory of the trajectory hole is circular;

[0067] Step 2: Based on the qualified signal of the trajectory hole ring, the contour radius value R of the target inner contour is obtained again, and then the crack ring is cut by CO2 laser heating, so that the crack ring and the inner contour trajectory hole ring penetrate to form a hole crack trajectory, such as Figure 3 As shown, since the target cutting inner contour belongs to the inner contour, the gap of the hole crack trajectory is small, so it still cannot be separated automatically;

[0068] Step 3: The brittle material after hole crack track processing is heated as a whole to a target temperature value, and a heating completion signal is obtained;

[0069] Specifically: obtain the target heating temperature value TM, use contact heating to heat the brittle material as a whole; select several monitoring points evenly on the surface of the brittle material and mark them as n, where n is 1, 2, 3...; then obtain the temperature values ​​of several monitoring points through the temperature sensor, which are recorded as the point temperature value TD n ,

[0070] The point temperature values ​​are averaged to obtain the point temperature mean TDJ. Calculate the point temperature deviation value TDP;

[0071] Get the maximum and minimum values ​​of the point temperature values, record them as the maximum point temperature TDmax and the minimum point temperature TDmin; through Calculate and obtain the point temperature difference extreme value TDC;

[0072] If the point temperature deviation value TDP is less than the point temperature deviation threshold value TPY, and the point temperature difference extreme value TDC is less than the point temperature difference threshold value TCY, a heating completion signal is generated;

[0073] In order to ensure the uniformity of heating of the brittle material as a whole, the mean temperature of the obtained point is first calculated, and then the extreme value of the temperature difference of the obtained point is calculated. At this time, it can be judged whether the overall temperature of the brittle material is uniform, and at the same time, the deviation from the target heating temperature value is within the qualified range;

[0074] Otherwise, a heating abnormality signal is generated;

[0075] Step 4: Based on the heating completion signal, the cooling target temperature value LT of the target cutting inner contour is calculated and obtained, and then the target cutting inner contour is cooled and lowered by the cold cracking device, and the temperature of the target cutting inner contour is cooled down to the cooling target temperature value LT within the target cooling time t, and the edge temperature of the target cutting inner contour is monitored, and a cooling completion signal is generated, and the cold cracking device is removed to make the target cutting inner contour cold crack and fall off;

[0076] The calculation method of the cooling target temperature value LT is:

[0077] M1: Get the stable shedding spacing value WFL of the target cutting inner contour, through Calculate and obtain the shedding temperature difference value Twc of the target cutting inner contour, where a is the internal shrinkage coefficient of the brittle material;

[0078] M2: Pass again Calculate and obtain the cooling target temperature value LT;

[0079] The process of monitoring the edge temperature of the target cutting inner contour and generating the cooling completion signal is as follows:

[0080] W1: Select several inner monitoring points on the edge of the inner contour of the target cutting inside the track hole ring, and then select several outer monitoring points on the edge of the brittle material outside the track hole ring with the track hole ring as the symmetry axis. Each inner detection point and the outer monitoring point are recorded as a monitoring point group, and the monitoring point group is marked as v, where v is 1, 2, 3...; obtain the temperature of the monitoring point group through the temperature sensor, and record the temperature value of the inner detection point in each monitoring point group as the inner point temperature value NT v , and record the temperature value of the external monitoring point in each group of monitoring points as the external point temperature value WT v ;

[0081] W2: Pass Calculate the cold crack temperature difference LL of v monitoring point groups v ; Take the cold cracking temperature difference LL v The minimum value among them is recorded as the minimum cold cracking temperature difference LLmin;

[0082] W3: Compare the minimum cold crack shedding temperature difference LLmin with the shedding temperature difference Twc;

[0083] If the minimum cold crack shedding temperature difference LLmin is greater than or equal to the shedding temperature difference Twc, a cooling completion signal is generated;

[0084] If the minimum cold crack shedding temperature difference LLmin is less than the shedding temperature difference Twc, a cooling abnormality signal is generated;

[0085] The principle of thermal expansion and contraction is adopted to control the temperature difference of brittle materials within a unit time to achieve cold crack separation of the inner contour of the target cutting, which solves the problem of cracks or edge collapse of existing brittle materials during mechanical cutting or laser cutting. The splitting effect is good, and the cold crack edge will not break, which improves the yield rate in the processing of brittle materials;

[0086] This method is compatible with different brittle material products and can be adapted to the splitting of products of different sizes and specifications. The cross section of the split is smooth and has no edge chipping, which greatly improves processing efficiency and product quality.

[0087] Embodiment 2: Based on the above embodiment, this embodiment provides the following technical method based on the cold cracking device in step 4, referring to Figure 4 As shown;

[0088] It includes an upper cold plate 4 and a lower cold plate 6. The upper cold plate 4 is controlled by an upper cylinder 5 to move up and down, and the lower cold plate 6 is controlled by a lower cylinder 7 to move up and down.

[0089] The heated brittle material is cooled by laminating the upper cold plate 4 and the lower cold plate 6. During the cooling process, the temperature of the upper cold plate 4 and the lower cold plate 6 is relatively low, such as 5°C. When the upper cold plate 4 and the lower cold plate 6 are simultaneously laminating the upper and lower surfaces of the target cutting inner contour, the target cutting inner contour will be cooled quickly and reach the cooling target temperature, such as from 90°C to 50°C.

[0090] like Figure 4 As shown in the figure, the target material 3 to be cut and removed from the whole blank 1 of the brittle material is the target cutting inner contour, and the workpiece 2 is obtained after the target material 3 is cut and cold-cracked and removed, which is the product of the brittle material;

[0091] For example, taking a certain glass as an example, the radius of the target material 3 is 50mm. If the heating temperature of the workpiece 2 and the target material 3 is 90℃, and then the target material 3 is cooled to 50℃ by the cold cracking device, at this time, the temperature difference between the workpiece 2 and the target material 3 is 40℃, then the shrinkage of the target material 3 of the brittle material caused by cold shrinkage is , that is, the crack spacing is 10um, where the shrinkage coefficient of the glass is 5×10 -6 / ℃, and the crack spacing is greater than the minimum spacing required for shedding 7um, the target material 3 can be separated from the fragments to obtain the fragmented workpiece 2, such as Figure 5 As shown;

[0092] Since the temperature difference is the key point of cold cracking, several temperature sensors are set in the process of cooling and splitting by the cold cracking device to monitor the temperature difference between the target material 3 and the workpiece 2 in real time. If the temperature difference between the target material 3 and the workpiece 2 reaches 40°C within the cooling setting time, it means that the cold cracking process is good and the separation crack spacing can be achieved. If the target temperature difference is not reached within the setting time, it means that the cooling is abnormal.

[0093] It should be noted that the setting of the cold crack temperature difference is calculated based on the performance, thickness and area of ​​the brittle material, and is measured through experiments in the pre-production process;

[0094] This method is compatible with different brittle material products and can be adapted to the splitting of products of different sizes and specifications. The cross section of the split is smooth and has no edge chipping, which greatly improves processing efficiency and product quality.

[0095] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A method for splitting brittle materials, characterized in that: The following steps are involved: Step 1: Obtain the target center point of the target cutting inner contour of the brittle material and the contour radius value R of the target inner contour, use ultrafast laser to cut the beam cutting point through the Bessel beam, and obtain a number of inner contour trajectory holes. At this time, obtain the inner contour trajectory hole ring, and measure the inner contour trajectory hole ring to obtain the trajectory hole ring qualified signal. The acquisition process of the trajectory hole ring qualified signal includes: marking the inner contour trajectory holes in the inner contour trajectory hole ring as i in sequence, where i is 1, 2, 3...; obtaining the cutting data of each inner contour trajectory hole, the cutting data includes the trajectory hole diameter value DGi and the trajectory hole radial value RJi; judging whether the trajectory hole diameter value DGi is within the trajectory hole qualified value range [DGmin, DGmax], and obtaining the trajectory hole qualified signal; based on the trajectory hole qualified signal, through Calculate and obtain the trajectory hole target deviation value KPi; obtain the maximum value of the trajectory hole target deviation value KPi, recorded as the trajectory hole target deviation maximum value KPmax; compare the trajectory hole target deviation maximum value KPmax with the trajectory hole target deviation threshold value KPJ to obtain the inner contour trajectory hole normal signal; Based on the normal signal of the inner contour trajectory hole, the average value and standard deviation of the trajectory hole radial value are calculated to obtain the trajectory hole radial mean value Erj and the trajectory hole radial standard value Frj; Calculate and obtain the trajectory hole radial measurement value PH; then determine whether the trajectory hole radial measurement value PH is within the trajectory hole radial qualified value range [PHGmin, PHGmax], and obtain the trajectory hole ring qualified signal; Step 2: Based on the qualified signal of the trajectory hole ring, the contour radius value R of the target inner contour is obtained again, and then the crack ring is cut by heating with a CO2 laser, so that the crack ring and the inner contour trajectory hole ring penetrate to form a hole crack trajectory; Step 3: The brittle material after hole crack track processing is heated as a whole to a target temperature value, and a heating completion signal is obtained; Step 4: Based on the heating completion signal, calculate and obtain the cooling target temperature value LT of the target cutting inner contour, then cool the target cutting inner contour, cool the temperature of the target cutting inner contour to the cooling target temperature value LT within the target cooling time t, monitor the edge temperature of the target cutting inner contour, and generate a cooling completion signal to cause the target cutting inner contour to cold crack and fall off.

2. A method for splitting brittle materials according to claim 1, characterized in that: Determine whether the trajectory hole diameter values ​​DGi are all within the trajectory hole qualified value range [DGmin, DGmax]. If the trajectory hole diameter values ​​DGi are all within the trajectory hole qualified value range [DGmin, DGmax], generate a trajectory hole qualified signal; otherwise, generate a trajectory hole unqualified signal.

3. A method for splitting brittle materials according to claim 1, characterized in that: The maximum value KPmax of the trajectory hole target deviation is compared with the trajectory hole target deviation threshold KPJ. If the maximum value KPmax of the trajectory hole target deviation is greater than the trajectory target deviation threshold KPJ, an inner contour trajectory hole abnormal signal is generated; if the maximum value KPmax of the trajectory hole target deviation is less than or equal to the trajectory target deviation threshold KPJ, an inner contour trajectory hole normal signal is generated.

4. A method for splitting brittle materials according to claim 1, characterized in that: Determine whether the trajectory hole radial measurement value PH is within the trajectory hole radial qualified value range [PHGmin, PHGmax], if the trajectory hole radial measurement value PH is within the trajectory hole radial qualified value range [PHGmin, PHGmax], generate a trajectory hole ring qualified signal; If the trajectory hole radial measurement value PH is not within the trajectory hole radial qualified value range [PHGmin, PHGmax], a trajectory hole ring unqualified signal is generated.

5. A method for splitting brittle materials according to claim 1, characterized in that: The heating completion signal is obtained in the following manner: Obtain the target heating temperature value TM, and use contact heating to heat the brittle material as a whole; select several monitoring points evenly on the surface of the brittle material and mark them as n, where n is 1, 2, 3, etc.; then obtain the temperature values ​​of several monitoring points through the temperature sensor, which are recorded as point temperature values ​​TDn. The point temperature values ​​are averaged to obtain the point temperature mean TDJ. Calculate the point temperature deviation value TDP; Get the maximum and minimum values ​​of the point temperature values, record them as the maximum point temperature TDmax and the minimum point temperature TDmin; through Calculate and obtain the extreme value of the point temperature difference TDC; The point temperature deviation value TDP and the point temperature difference extreme value TDC are judged, and a heating completion signal is obtained.

6. A method for splitting brittle materials according to claim 5, characterized in that: The point temperature deviation value TDP and the point temperature difference extreme value TDC are judged. If the point temperature deviation value TDP is less than the point temperature deviation threshold TPY, and the point temperature difference extreme value TDC is less than the point temperature difference threshold TCY, a heating completion signal is generated; otherwise, a heating abnormality signal is generated.

7. A method for splitting brittle materials according to claim 1, characterized in that: The calculation method of the cooling target temperature value LT is: Get the stable shedding spacing value WFL of the target cutting inner contour, through Calculate and obtain the shedding temperature difference value Twc of the target cutting inner contour, where a is the internal shrinkage coefficient of the brittle material; Then through The cooling target temperature value LT is calculated and obtained.

8. A method for splitting brittle materials according to claim 1, characterized in that: The process of monitoring the edge temperature of the target cutting inner contour and generating a cooling completion signal is as follows: Select a number of inner monitoring points on the edge of the target cutting inner contour inside the track hole ring, and then select a number of outer monitoring points on the edge of the brittle material outside the track hole ring with the track hole ring as the symmetry axis, and record each inner detection point and the outer monitoring point as a monitoring point group, and mark the monitoring point group as v, where v is 1, 2, 3...; obtain the temperature of the monitoring point group through a temperature sensor, record the temperature value of the inner detection point in each monitoring point group as the inner point temperature value NTv, and record the temperature value of the outer monitoring point in each monitoring point group as the outer point temperature value WTv; pass Calculate and obtain the cold crack shedding temperature difference values ​​LLv of the v monitoring point groups; take the minimum value among the cold crack shedding temperature difference values ​​LLv, and record it as the minimum cold crack shedding temperature difference value LLmin; The minimum cold crack shedding temperature difference LLmin is compared with the shedding temperature difference Twc to obtain the cooling completion signal.

9. A method for splitting brittle materials according to claim 8, characterized in that: The minimum cold crack shedding temperature difference LLmin is compared with the shedding temperature difference value Twc. If the minimum cold crack shedding temperature difference LLmin is greater than or equal to the shedding temperature difference value Twc, a cooling completion signal is generated. If the minimum cold crack shedding temperature difference LLmin is less than the shedding temperature difference value Twc, a cooling abnormality signal is generated.

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