Auxiliary chamber cleaning device and single crystal furnace

Abstract

The embodiment of the invention provides an auxiliary chamber cleaning device and a single crystal furnace. The auxiliary chamber cleaning device comprises a charging barrel sleeve used for being connected with a lifting device of the single crystal furnace; the mounting plate is arranged on the charging barrel sleeve in a sleeving manner; the wall supporting blocks are arranged on the mounting plate in a sliding manner and are arranged in the circumferential direction of the charging barrel sleeve, and the wall supporting blocks slide in the direction close to or away from the axis of the charging barrel sleeve so as to abut against an auxiliary chamber of the single crystal furnace; the connecting assembly is used for connecting the charging barrel sleeve with a feeding device of the single crystal furnace; and the adjusting assembly is arranged on the charging barrel sleeve and connected with the wall supporting blocks so as to drive the multiple wall supporting blocks to move synchronously. The cleaning efficiency of the auxiliary chamber of the single crystal furnace is improved.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal furnaces, and in particular to a sub-chamber cleaning device and a single crystal furnace. Background Art

[0002] In the process of single crystal furnace pulling, recharging is an important link, and it is also the most time-consuming and longest idle step in the single furnace pulling cycle. After each recharging, the auxiliary chamber needs to be cleaned to maintain the quality of crystal formation, extend the service life of the equipment, improve production efficiency, and ensure production safety.

[0003] In the prior art, the feeding device of the single crystal furnace is located in the sub-chamber of the single crystal furnace. When feeding is needed, the feeding device is lifted to the feeding port by using the lifting device on the single crystal furnace, the raw materials are placed in the feeding device, and then the feeding device is lowered by the lifting device. After the feeding device is lowered to the set position of the single crystal furnace, it abuts against the furnace body. By continuing to move the lifting device downward, the connecting rod on the feeding device moves downward, the feeding device is opened, and the raw materials are placed in the crucible of the single crystal furnace. After the feeding is completed, the operator needs to use a dust-free cloth wrapped in a steel pipe to go deep into the sub-chamber for cleaning.

[0004] However, the cleaning efficiency is low through manual cleaning. Summary of the invention

[0005] The embodiments of the present application provide a sub-chamber cleaning device and a single crystal furnace, which are used to solve the problem that the sub-chamber of the single crystal furnace needs to be cleaned manually and the cleaning efficiency is low.

[0006] In a first aspect, an embodiment of the present application provides a sub-chamber cleaning device, comprising:

[0007] A barrel sleeve, which is used to connect with a lifting device of a single crystal furnace;

[0008] A mounting plate, the mounting plate being sleeved on the barrel sleeve;

[0009] A plurality of wall support blocks, which are slidably disposed on the mounting plate and arranged along the circumference of the barrel sleeve, and the wall support blocks slide toward or away from the axial direction of the barrel sleeve to abut against the auxiliary chamber of the single crystal furnace;

[0010] A connecting assembly, used to connect the barrel sleeve with a feeding device of the single crystal furnace;

[0011] An adjusting component is arranged on the barrel sleeve and connected with the wall supporting block to drive a plurality of the wall supporting blocks to move synchronously.

[0012] In a possible implementation, the connecting assembly includes a connecting sleeve, a connecting rod and a connecting piece, the connecting sleeve is arranged on the barrel sleeve, the connecting rod is slidably inserted into the barrel sleeve, and the connecting piece is arranged in the connecting sleeve for connecting the connecting rod.

[0013] In a possible implementation, the connecting member includes a first clamping block and a first elastic portion, the first clamping block is slidably disposed in the connecting sleeve, a first passing groove is provided on the barrel sleeve, the first clamping block passes through the first passing groove and is inserted into the barrel sleeve, the first elastic portion is disposed on the first clamping block and is connected to the connecting sleeve to drive the first clamping block to move toward the barrel sleeve;

[0014] The connecting rod is provided with a first sliding block, and the bottom of the first sliding block abuts against the top of the first clamping block to limit the first sliding block from moving out of the barrel sleeve.

[0015] In a possible embodiment, the adjustment assembly includes an adjustment member and a plurality of articulated rods, the connecting sleeve is slidably mounted on the barrel sleeve, one end of the articulated rod is correspondingly hinged to the support wall block, and the other end is hinged to the connecting sleeve, the articulated rod is arranged along the circumference of the connecting sleeve, and the adjustment member is arranged in the connecting sleeve to drive the connecting sleeve to slide.

[0016] In a possible implementation, the adjusting member includes a second clamping block and a second elastic portion, the second clamping block is slidably disposed in the connecting sleeve, the second elastic portion is disposed on the second clamping block and is connected to the connecting sleeve to drive the second clamping block to be inserted into the first running groove; the second clamping block is provided with a first limiting portion and a second limiting portion, the second limiting portion is located above the first limiting portion, and the barrel sleeve is provided with a second running groove;

[0017] The connecting rod is provided with a second sliding block, and the second sliding block is used to abut against the first limiting portion to drive the first limiting portion to move upward, thereby driving the second limiting portion to slide into the second running groove and engage with the bottom wall of the second running groove.

[0018] In a possible implementation manner, a first inclined surface is disposed on the top of the first sliding block, a third inclined surface is disposed on the bottom of the first clamping block, and the second sliding block is slidably sleeved on the connecting rod;

[0019] When the barrel sleeve moves toward the bottom of the single crystal furnace, the first inclined surface abuts against the third inclined surface, and the first inclined surface pushes the third inclined surface to move, so that the first slider moves to between the first clamping block and the second clamping block, and the connecting rod is hung on the first clamping block;

[0020] When the barrel sleeve continues to move toward the bottom of the single crystal furnace, the first inclined surface pushes the second clamping block to move so that the first slider moves to the second clamping block, and the second slider pushes the third inclined surface to move so that the second slider moves between the second clamping block and the first clamping block, and the second slider abuts against the first limiting portion to push the second clamping block to move toward the mounting plate, thereby clamping the second limiting portion with the second travel groove.

[0021] In a possible embodiment, a second inclined surface is provided at the bottom of the second slider, the diameter of the second slider is larger than the diameter of the first slider, and a fourth inclined surface is provided at the top of the first limiting portion; the second inclined surface cooperates with the fourth inclined surface to move the connecting rod out of the barrel sleeve.

[0022] In a possible implementation manner, the adjustment assembly further includes a reset member, the reset member includes an extension rod and a limit plate, the limit plate is slidably sleeved between the barrel sleeve and the connecting sleeve, the extension rod is connected to the limit plate and extends to the top of the mounting plate to abut against the top of the single crystal furnace;

[0023] A fifth inclined surface is provided on a side of the second limiting portion facing the limiting piece, and the limiting piece is used to abut against the fifth inclined surface to drive the second limiting portion to disengage from the second running groove.

[0024] In a possible implementation, arc plates are provided on both sides of the support wall block, and the arc plates between adjacent support wall blocks are overlapped so that when the support wall block abuts against the auxiliary chamber, the support wall block and the arc plates are jointly arranged to form a circular ring.

[0025] In a second aspect, an embodiment of the present application provides a single crystal furnace, comprising a single crystal furnace body and a sub-chamber cleaning device arranged in the single crystal furnace body.

[0026] The embodiment of the present application provides a sub-chamber cleaning device and a single crystal furnace. The sub-chamber cleaning device installs a barrel sleeve on a lifting device and connects it to a feeding device of the single crystal furnace through a connecting component. The feeding device is driven to move during the movement of the lifting device, thereby realizing the lifting and lowering of the feeding device of the single crystal furnace. In addition, during the lifting and lowering of the feeding device, a plurality of support wall blocks can be adjusted to open and abut against the side wall of the sub-chamber wall of the single crystal furnace through an adjusting component. The barrel sleeve is then driven to move by the lifting device, so that the side wall of the sub-chamber can be cleaned through the support wall blocks. There is no need to manually insert a steel pipe into the sub-chamber to perform reciprocating push-pull cleaning of the side wall of the sub-chamber, thereby improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0028] Figure 1 A schematic diagram of the structure of the secondary chamber cleaning device provided in this application;

[0029] Figure 2 for Figure 1 A cross-sectional view of

[0030] Figure 3 for Figure 2 A position state diagram of the middle connecting rod being hooked to the first clamping block;

[0031] Figure 4 for Figure 2 A position state diagram of the second slider abutting against the second clamping block;

[0032] Figure 5 for Figure 2 Figure 2 shows the position state of the second limiting portion inserted into the second running groove.

[0033] Description of reference numerals:

[0034] 100, barrel sleeve; 110, first running groove; 120, second running groove; 130, guide cover; 200, mounting plate; 300, wall support block; 310, arc plate; 400, connecting assembly; 410, connecting sleeve; 420, connecting rod; 421, first slider; 4211, first inclined surface; 422, second slider; 4221, second inclined surface; 430, connecting piece; 431, first clamping block ; 4311, third inclined plane; 432, first elastic part; 500, adjustment assembly; 510, adjustment member; 511, second clamping block; 5111, first limiting part; 5112, second limiting part; 5113, fourth inclined plane; 5114, fifth inclined plane; 512, second elastic part; 520, hinged rod; 530, reset member; 531, extension rod; 532, limiting plate; 533, reinforcing plate.

[0035] The above drawings have shown clear embodiments of the present application, which will be described in more detail later. These drawings and text descriptions are not intended to limit the scope of the present application in any way, but to illustrate the concept of the present application to those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0036] Exemplary embodiments will be described in detail herein, examples of which are shown in the accompanying drawings. When the following description refers to the drawings, the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the following exemplary embodiments do not represent all implementations consistent with the present application. Instead, they are merely examples of devices and methods consistent with some aspects of the present application as detailed in the appended claims.

[0037] It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0038] In this application, unless otherwise clearly specified and limited, the terms "installation", "connection", "fixation" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0039] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0040] In the process of single crystal furnace pulling, recharging is an important link, and it is also the most time-consuming and longest idle step in the single furnace pulling cycle. After each recharging, the auxiliary chamber needs to be cleaned to maintain the quality of crystal formation, extend the service life of the equipment, improve production efficiency, and ensure production safety.

[0041] In the prior art, the feeding device of the single crystal furnace is located in the auxiliary chamber of the single crystal furnace. When feeding is required, the feeding device is lifted to the feeding port by the lifting device (heavy hammer) on the single crystal furnace, and the raw materials are placed in the feeding device. The feeding device is then lowered by the lifting device. After the feeding device is lowered to the set position of the single crystal furnace, it abuts against the furnace body. The lifting device is continued to move downward so that the connecting rod on the feeding device moves downward, the feeding device is opened, and the raw materials are placed in the crucible of the single crystal furnace. After the feeding is completed, the operator needs to use a steel pipe wrapped with a dust-free cloth to go deep into the auxiliary chamber for cleaning. The stainless steel round tube is connected to a circular ring, and the circular ring is wrapped with dust-free paper or dust-free cloth. The operator manually passes the steel pipe into the auxiliary chamber of the single crystal furnace, and then manually pushes and pulls the steel pipe back and forth for cleaning.

[0042] However, the cleaning efficiency is low and the labor intensity of the operators is high through manual cleaning.

[0043] The present application provides a sub-chamber cleaning device and a single crystal furnace. The sub-chamber cleaning device installs a barrel sleeve on a lifting device and connects it to a feeding device of the single crystal furnace through a connecting component. The feeding device is driven to move during the movement of the lifting device, thereby realizing the lifting and lowering of the feeding device of the single crystal furnace. In addition, during the lifting and lowering of the feeding device, a plurality of support wall blocks can be adjusted to open and abut against the side wall of the sub-chamber wall of the single crystal furnace through an adjusting component. The barrel sleeve is then driven to move by the lifting device, so that the side wall of the sub-chamber can be cleaned through the support wall blocks. There is no need to manually insert a steel pipe into the sub-chamber to perform reciprocating push-pull cleaning of the side wall of the sub-chamber, thereby improving production efficiency and reducing the labor intensity of operators.

[0044] The technical solution of the present application and how the technical solution of the present application solves the above-mentioned technical problems are described in detail below with specific embodiments. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be repeated in some embodiments. The embodiments of the present application will be described below in conjunction with the accompanying drawings.

[0045] In a first aspect, the present application provides a sub-chamber cleaning device, referring to Figure 1 and Figure 2 , the secondary chamber cleaning device comprises:

[0046] The barrel sleeve 100 is used to connect with the lifting device of the single crystal furnace;

[0047] A mounting plate 200, the mounting plate 200 is sleeved on the barrel sleeve 100;

[0048] A plurality of wall support blocks 300, which are slidably disposed on the mounting plate 200 and arranged along the circumference of the barrel sleeve 100, and the wall support blocks 300 slide toward or away from the axial direction of the barrel sleeve 100 to abut against the auxiliary chamber of the single crystal furnace;

[0049] A connecting assembly 400 is used to connect the barrel sleeve 100 and the charging device of the single crystal furnace to lift the charging device;

[0050] The adjusting component 500 is disposed on the barrel sleeve 100 and connected to the wall supporting block 300 to drive the plurality of wall supporting blocks 300 to move synchronously.

[0051] Among them, the barrel sleeve 100 is threadedly connected to the bottom of the lifting device of the single crystal furnace. The lifting device of the single crystal furnace is a heavy hammer structure, which is the prior art and will not be described here. The feeding device is located in the sub-chamber of the single crystal furnace. The feeding device is driven by the lifting device to move along the height direction of the single crystal furnace. When the feeding device moves to the top of the single crystal furnace, the raw materials can be added to the feeding device, and then the feeding device is lowered to the set position in the single crystal furnace through the lifting device, and abutted with the furnace body of the single crystal furnace, thereby limiting the further downward movement of the feeding device. By continuing to move the lifting device downward, the discharge port at the bottom of the feeding device is opened through the connecting rod connected to the lifting device, and the raw materials are lowered into the crucible of the single crystal furnace. After completing one feeding, the lifting device drives the feeding device to move upward, and repeats this process to realize the re-feeding process of the single crystal furnace.

[0052] Exemplarily, four supporting wall blocks 300 are provided, and the four supporting wall blocks 300 are evenly distributed in the circumferential direction and installed on the mounting plate 200. A guide cover 130 is provided at the bottom of the barrel sleeve 100, and the diameter of the guide cover 130 close to the barrel sleeve 100 is smaller than the diameter of the guide cover 130 away from the barrel sleeve 100. This facilitates alignment with the feeding device and reduces the possibility of misalignment.

[0053] In the embodiment of the present application, the barrel sleeve 100 is installed on the lifting device and connected to the feeding device of the single crystal furnace through the connecting component 400. The feeding device is driven to move during the movement of the lifting device, thereby realizing the lifting and lowering of the feeding device of the single crystal furnace. In addition, during the lifting and lowering of the feeding device, the plurality of support wall blocks 300 can be adjusted to open and abut against the side wall of the auxiliary chamber wall of the single crystal furnace through the adjusting component 500. The barrel sleeve 100 is then driven to move by the lifting device, and the side wall of the auxiliary chamber can be cleaned through the support wall blocks 300. There is no need to manually insert a steel pipe into the auxiliary chamber to perform reciprocating push-pull cleaning of the side wall of the auxiliary chamber, thereby improving production efficiency and reducing the labor intensity of operators.

[0054] In one possible implementation, refer to Figure 1 and Figure 2 The connecting assembly 400 includes a connecting sleeve 410, a connecting rod 420 and a connecting piece 430. The connecting sleeve 410 is arranged on the barrel sleeve 100, the connecting rod 420 is slidably inserted into the barrel sleeve 100, and the connecting piece 430 is arranged in the connecting sleeve 410 for connecting the connecting rod 420.

[0055] Among them, the bottom of the connecting rod 420 is fixedly connected to a limiting block, the diameter of the limiting block is larger than the diameter of the connecting rod 420, and the limiting block is used to be inserted into the connecting ring of the feeding device. The inner diameter of the connecting ring of the feeding device is smaller than the diameter of the limiting block to play a limiting role, connecting the barrel sleeve 100 with the feeding device, and then driving the feeding device to move.

[0056] In one possible implementation, refer to Figure 1 and Figure 2 The connecting member 430 includes a first clamping block 431 and a first elastic portion 432. The first clamping block 431 is slidably arranged in the connecting sleeve 410. The barrel sleeve 100 is provided with a first running groove 110. The first clamping block 431 passes through the first running groove 110 and is inserted into the barrel sleeve 100. The first elastic portion 432 is arranged on the first clamping block 431 and is connected to the connecting sleeve 410 to drive the first clamping block 431 to move toward the barrel sleeve 100.

[0057] A first sliding block 421 is disposed on the connecting rod 420 , and the bottom of the first sliding block 421 abuts against the top of the first clamping block 431 to limit the first sliding block 421 from moving out of the barrel sleeve 100 .

[0058] Specifically, a chamber is provided in the connecting sleeve 410 for the first clamping block 431 to slide in the connecting sleeve 410, and the first clamping block 431 slides in the horizontal direction toward the central axis of the barrel sleeve 100. The chamber on the connecting sleeve 410 is connected with the first running groove 110, so that the first clamping block 431 can move to the inside of the barrel sleeve 100. The first clamping block 431 is divided into a front end and a rear end fixed together, wherein the front end of the first clamping block 431 is used to be inserted into the barrel sleeve 100, and the rear end of the first clamping block 431 is a round rod with a diameter smaller than the front end. The first elastic part 432 is a spring, and the spring is sleeved on the round rod at the rear end. One end of the spring abuts against the end of the front end, and the other end abuts against the inner side wall of the connecting sleeve 410. The first elastic part 432 is in a compressed state to drive the first clamping block 431 to move toward the barrel sleeve 100. Furthermore, the round rod at the rear end is passed through the connecting sleeve 410, and an end cap is threadedly connected to the round rod at the rear end. The diameter of the end cap is larger than the diameter of the round rod, so that the end cap abuts against the connecting sleeve 410 to limit the position of the round rod.

[0059] The first slider 421 is threadedly connected to one end of the connecting rod 420 close to the single crystal furnace lifting device. When the first slider 421 is located at the upper end of the first block 431, the bottom of the first slider 421 abuts against the top of the first block 431, thereby limiting the sliding out of the first slider 421, so as to facilitate the movement of the feeding device through the lifting device to realize the normal feeding process.

[0060] In one possible implementation, refer to Figure 1and Figure 2 The adjustment assembly 500 includes an adjustment member 510 and a plurality of hinged rods 520. The connecting sleeve 410 is slidably mounted on the barrel sleeve 100. One end of the hinged rod 520 is correspondingly hinged on the supporting wall block 300, and the other end is hinged on the connecting sleeve 410. The hinged rod 520 is arranged along the circumference of the connecting sleeve 410, and the adjustment member 510 is arranged in the connecting sleeve 410 to drive the connecting sleeve 410 to slide.

[0061] Among them, the articulated rods 520 are arranged in a one-to-one correspondence with the wall support blocks 300. For example, when the wall support blocks 300 are arranged in four numbers, the articulated rods 520 are also arranged in four numbers. A plurality of slide grooves are provided on the mounting plate 200, and the slide grooves are arranged in a one-to-one correspondence with the wall support blocks 300. The wall support blocks 300 are bolted with articulated blocks, and the articulated blocks extend through the slide grooves to the bottom of the mounting plate 200. One end of the articulated rod 520 is hinged on the articulated block, and the other end is hinged on the connecting sleeve 410. The connecting sleeve 410 is slidably sleeved on the barrel sleeve 100 and is located below the mounting plate 200. In addition, the four articulated rods 520 are circumferentially hinged on the connecting sleeve 410, so that the articulated rods 520 are synchronously driven to move by the up and down sliding of the connecting sleeve 410, thereby driving the four wall support blocks 300 to slide synchronously.

[0062] In one possible implementation, refer to Figure 1 and Figure 2 The adjusting member 510 includes a second clamping block 511 and a second elastic portion 512. The second clamping block 511 is slidably disposed in the connecting sleeve 410. The second elastic portion 512 is disposed on the second clamping block 511 and connected to the connecting sleeve 410 to drive the second clamping block 511 to be inserted into the first running groove 110. The second clamping block 511 is provided with a first limiting portion 5111 and a second limiting portion 5112. The second limiting portion 5112 is located above the first limiting portion 5111. The barrel sleeve 100 is provided with a second running groove 120.

[0063] A second slider 422 is provided on the connecting rod 420 , and the second slider 422 is used to abut against the first limiting portion 5111 to drive the first limiting portion 5111 to move upward, thereby driving the second limiting portion 5112 to slide into the second running groove 120 and engage with the bottom wall of the second running groove 120 .

[0064] Specifically, the second block 511 is located above the first block 431, and the second block 511 also slides in the chamber and is inserted into the first running groove 110. The length of the first running groove 110 in the axial direction of the barrel sleeve 100 is greater than the sum of the heights of the first block 431 and the second block 511, so that the wall support block 300 has sufficient displacement distance.

[0065] The second clamping block 511 is also divided into a front end and a rear end fixed together, wherein the front end of the second clamping block 511 is used to be inserted into the barrel sleeve 100, and the rear end of the second clamping block 511 is a round rod with a diameter smaller than the front end. The second elastic part 512 is a spring, which is sleeved on the round rod at the rear end, one end of the spring abuts against the end of the front end, and the other end abuts against the inner wall of the connecting sleeve 410, and the second elastic part 512 is in a compressed state to drive the second clamping block 511 to move toward the barrel sleeve 100. In addition, the round rod at the rear end is inserted into the outside of the connecting sleeve 410, and the end cap is threadedly connected to the round rod at the rear end, and the diameter of the end cap is larger than the diameter of the round rod, so that the end cap abuts against the connecting sleeve 410 to limit the position of the round rod.

[0066] In one possible implementation, refer to Figure 1 and Figure 2 The top of the first slider 421 is provided with a first inclined surface 4211, the bottom of the first block 431 is provided with a third inclined surface 4311, and the second slider 422 is slidably sleeved on the connecting rod 420;

[0067] When the barrel sleeve 100 moves toward the bottom of the single crystal furnace, the first inclined surface 4211 abuts against the third inclined surface 4311, and the first inclined surface 4211 pushes the third inclined surface 4311 to move, so that the first slider 421 moves between the first clamping block 431 and the second clamping block 511, and the connecting rod 420 is hung on the first clamping block 431;

[0068] When the barrel sleeve 100 continues to move toward the bottom of the single crystal furnace, the first inclined surface 4211 pushes the second clamping block 511 to move, so that the first slider 421 moves to the second clamping block 511, and the second slider 422 pushes the third inclined surface 4311 to move, so that the second slider 422 moves between the second clamping block 511 and the first clamping block 431, and the second slider 422 abuts against the first limiting portion 5111 to push the second clamping block 511 toward the mounting plate 200, so as to clamp the second limiting portion 5112 with the second travel groove 120.

[0069] Specifically, the second slider 422 is slidably sleeved on the connecting rod 420, the first slider 421 restricts the second slider 422 from sliding out of the connecting rod 420, and the diameter of the second slider 422 is larger than the diameter of the first slider 421. The first slider 421 and the second slider 422 are both conical, the upper end diameter of the first slider 421 is smaller than the lower end diameter, that is, the top of the first slider 421 is set as the first inclined surface 4211, and the upper end diameter of the second slider 422 is larger than the lower end diameter, that is, the bottom of the second slider 422 is set as the second inclined surface 4221.

[0070] Reference Figure 2 and Figure 3When the feeding device needs to be lifted, the barrel sleeve 100 moves toward the bottom of the single crystal furnace, the first inclined surface 4211 abuts against the third inclined surface 4311, and the first inclined surface 4211 pushes the third inclined surface 4311 to move, so that the first slider 421 moves between the first block 431 and the second block 511, and the connecting rod 420 is hung on the first block 431 to realize the connection between the barrel sleeve 100 and the feeding device, so as to facilitate the feeding of the single crystal furnace.

[0071] Reference Figure 2 , Figure 4 and Figure 5 When it is necessary to clean the auxiliary chamber of the single crystal furnace, after the feeding device abuts against the furnace body of the single crystal furnace, the barrel sleeve 100 continues to move toward the bottom of the single crystal furnace. At this time, the barrel sleeve 100 slides relatively with the connecting rod 420, and the first inclined surface 4211 pushes the second block 511 to move, so that the first slider 421 moves to the second block 511, and the second slider 422 pushes the third inclined surface 4311 to move, so that the second slider 422 moves between the second block 511 and the first block 431, and the top end surface of the second slider 422 abuts against the first limit portion 5111, and continues Move the barrel sleeve 100 downward, and the second slider 422 pushes the second clamping block 511 to move toward the mounting plate 200. The second limiting portion 5112 on the second clamping block 511 moves out of the first running groove 110 and moves into the second running groove 120, so that the second limiting portion 5112 is engaged with the second running groove 120 to fix the position of the first clamping block 431. At this time, the connecting sleeve 410 moves upward to open the support wall block 300 and abut against the auxiliary chamber of the single crystal furnace. After the second running groove 120 limits the second limiting portion 5112, the position of the support wall block 300 is fixed.

[0072] In one possible implementation, refer to Figure 1 and Figure 2 A second inclined surface 4221 is provided at the bottom of the second slider 422, the diameter of the second slider 422 is greater than the diameter of the first slider 421, and a fourth inclined surface 5113 is provided at the top of the first limiting portion 5111; the second inclined surface 4221 cooperates with the fourth inclined surface 5113 to move the connecting rod 420 out of the barrel sleeve 100.

[0073] The length of the second limiting portion 5112 is smaller than that of the first limiting portion 5111 , that is, the first limiting portion 5111 is closer to the axis of the barrel sleeve 100 , and a fifth inclined surface 5114 is provided on one side of the second limiting portion 5112 facing the limiting sheet 532 . So that in the process of the second slider 422 pushing the first limiting portion 5111 to move upward, the fifth inclined surface 5114 abuts against the top wall of the first running groove 110, and under the action of upward pressure, the second blocking block 511 slides in the direction away from the barrel sleeve 100 until the second limiting portion 5112 completely withdraws from the first running groove 110, the first limiting portion 5111 still partially abuts against the second slider 422 to continue to push the second blocking block 511 to move upward until the second limiting portion 5112 moves to the second running groove 120. At this time, stop moving the barrel sleeve 100 downward and instead move the barrel sleeve 100 upward, so that the second slider 422 is separated from the first limiting portion 5111, and under the action of the second elastic portion 512, the second limiting portion 5112 is inserted into the second running groove 120 to fix the second blocking block 511.

[0074] In one possible implementation, refer to Figure 1 and Figure 2 The adjustment assembly 500 further includes a reset member 530, which includes an extension rod 531 and a stopper 532. The stopper 532 is slidably sleeved between the barrel sleeve 100 and the connecting sleeve 410. The extension rod 531 is connected to the stopper 532 and extends to the top of the mounting plate 200 to abut against the top of the single crystal furnace.

[0075] A fifth inclined surface 5114 is disposed on one side of the second limiting portion 5112 facing the limiting piece 532 . The limiting piece 532 is used to abut against the fifth inclined surface 5114 to drive the second limiting portion 5112 to be separated from the second running groove 120 .

[0076] The limiting piece 532 is a cylinder, and the top of the limiting piece 532 is provided with an edge for connecting with the extension rod 531. The limiting piece 532 and the extension rod 531 are threadedly connected, and the extension rod 531 slides through the mounting plate 200 and extends to the top of the barrel sleeve 100. The extension rod 531 is threadedly connected with a reinforcing plate 533, and the reinforcing plate 533 is used to abut against the top wall of the single crystal furnace. The setting of the reinforcing plate 533 increases the contact area with the top of the single crystal furnace and reduces the possibility of damaging the single crystal furnace during the abutment process. In the embodiment of the present application, the extension rod 531 is set to 4, and the 4 extension rods 531 are respectively connected to two reinforcing plates 533.

[0077] In a possible implementation, arc plates 310 are provided on both sides of the wall support block 300, and the arc plates 310 between adjacent wall support blocks 300 are overlapped so that when the wall support block 300 abuts against the auxiliary chamber, the wall support block 300 and the arc plates 310 are jointly arranged to form a ring.

[0078] Specifically, the arc plates 310 on both sides of the wall support block 300 are arranged in two pieces, and the two arc plates 310 on the same side are arranged to overlap each other, and there is a spacing between the two arc plates 310, so that an arc plate 310 on an adjacent wall support block 300 can be inserted between the two arc plates 310. Through the arrangement of the arc plates 310, when the wall support block 300 is opened, a complete circle is formed to abut against the side wall of the auxiliary chamber, so as to improve the cleaning effect of the auxiliary chamber.

[0079] A protrusion is also provided on the top of the wall support block 300. The protrusion is located on the side away from the barrel sleeve 100 and is chamfered at a large angle to reduce the possibility of the wall support block 300 damaging the side wall of the single crystal furnace auxiliary chamber during the cleaning process of the auxiliary chamber.

[0080] The use process of the auxiliary chamber cleaning device is as follows:

[0081] Reference Figure 2 and Figure 3 When feeding is needed, the barrel sleeve 100 is connected to the lifting device, and the barrel sleeve 100 is driven by the lifting device to move toward the bottom of the single crystal furnace, the first inclined surface 4211 abuts against the third inclined surface 4311, and the first inclined surface 4211 pushes the third inclined surface 4311 to move, so that the first slider 421 moves between the first clamping block 431 and the second clamping block 511, and the connecting rod 420 is hung on the first clamping block 431 to realize the connection between the barrel sleeve 100 and the feeding device, and the feeding device is lifted by the barrel sleeve 100. After lifting to the required position, the raw material is added into the feeding device, and the barrel sleeve 100 is lowered, and the feeding device is moved to the bottom of the single crystal furnace and abutted against the single crystal furnace wall, and the barrel sleeve 100 is continued to be moved down. At this time, the connecting rod 420 moves toward the inside of the feeding device, thereby driving the internal structure of the feeding device to open the feeding device, and release the raw material into the crucible of the single crystal furnace, completing a feeding process, and repeating the above process to achieve repeated feeding.

[0082] Reference Figure 2 , Figure 4 and Figure 5When it is necessary to clean the auxiliary chamber of the single crystal furnace, after the feeding device abuts against the furnace body of the single crystal furnace, the barrel sleeve 100 continues to move toward the bottom of the single crystal furnace. At this time, the barrel sleeve 100 slides relatively with the connecting rod 420, and the first inclined surface 4211 pushes the second clamping block 511 to move, so that the first slider 421 moves to the second clamping block 511, and the second slider 422 pushes the third inclined surface 4311 to move, so that the second slider 422 moves between the second clamping block 511 and the first clamping block 431, and the top end surface of the second slider 422 abuts against the first limiting portion 5111, and the barrel sleeve 100 continues to move downward, and the second The slider 422 pushes the second clamping block 511 to move toward the mounting plate 200, and the second limiting portion 5112 on the second clamping block 511 moves out of the first running groove 110 and moves into the second running groove 120, so that the second limiting portion 5112 is engaged with the second running groove 120 to fix the position of the first clamping block 431. At this time, the connecting sleeve 410 moves upward to open the support wall block 300 and abut against the auxiliary chamber of the single crystal furnace. After the second running groove 120 limits the second limiting portion 5112, the position of the support wall block 300 is fixed. At this time, the inner wall of the auxiliary chamber can be cleaned by moving the barrel sleeve 100 up and down.

[0083] When resetting is required, move the barrel sleeve 100 upward so that the extension rod 531 abuts against the top of the single crystal furnace, and continue to move the barrel sleeve 100 upward to push the limiting plate 532 to move downward. The limiting plate 532 abuts against the fifth inclined surface 5114 to push the second clamping block 511 to slide. After the second limiting portion 5112 disengages from the second limiting groove, stop moving the barrel sleeve 100, and the connecting sleeve 410 moves downward under the action of gravity until the first clamping block 431 abuts against the bottom wall of the first travel groove 110, thereby driving the support wall block 300 to retract and realize the resetting of the support wall block 300.

[0084] Reference Figure 2 , Figure 4 and Figure 5 In the above process, the connecting rod 420 can also be disengaged from the barrel sleeve 100, that is, the barrel sleeve 100 is separated from the feeding device to facilitate the return to the starting position.

[0085] When the second slider 422 is located between the first block 431 and the second block 511, the feeding device abuts against the single crystal furnace and moves the barrel sleeve 100 upward. The second slider 422 moves upward on the connecting rod 420. After the first slider 421 contacts the fourth inclined surface 5113, it pushes the fourth inclined surface 5113 to move, so that the first slider 421 enters between the first block 431 and the second block 511 and abuts against the second slider 422. Then, the barrel sleeve 100 continues to be lifted. The second inclined surface 4221 pushes the second block 511 to move. The second slider 422 moves out of the barrel sleeve 100 through the first block 431. At the same time, the diameter of the first slider 421 is smaller than that of the second slider 422. Therefore, it follows the second slider 422 to move out of the barrel sleeve 100, thereby realizing the separation of the barrel sleeve 100 from the connecting rod 420.

[0086] In a second aspect, an embodiment of the present application provides a single crystal furnace, comprising a single crystal furnace body and a sub-chamber cleaning device arranged in the single crystal furnace body.

[0087] A single crystal furnace provided in an embodiment of the present application is achieved by installing a barrel sleeve 100 on a lifting device and connecting it to a feeding device of the single crystal furnace through a connecting component 400. The feeding device is driven to move during the movement of the lifting device, thereby realizing the lifting and lowering of the feeding device of the single crystal furnace. In addition, during the lifting and lowering of the feeding device, the plurality of support wall blocks 300 can be adjusted to be opened and abutted against the side wall of the auxiliary chamber wall of the single crystal furnace by adjusting the adjustment component 500. The barrel sleeve 100 is then driven to move by the lifting device, so that the side wall of the auxiliary chamber can be cleaned by the support wall blocks 300. There is no need to manually insert a steel pipe into the auxiliary chamber to perform reciprocating push-pull cleaning of the side wall of the auxiliary chamber, thereby improving the production efficiency. In addition, the ring formed by the support wall blocks 300 is in full contact with the side wall of the auxiliary chamber, thereby reducing the situation of inadequate cleaning.

[0088] Finally, it should be noted that those skilled in the art will readily conceive of other embodiments of the present invention after considering the specification and practicing the invention disclosed herein. The present invention is intended to cover any variations, uses or adaptations of the present invention, which follow the general principles of the present invention and include common knowledge or customary technical means in the art not disclosed by the present invention, are not limited to the precise structure described above and shown in the drawings, and may be modified and changed in various ways without departing from the scope thereof. The scope of the present invention is limited only by the appended claims.

Claims

1. A secondary chamber cleaning device, characterized in that: include: A barrel sleeve (100), the barrel sleeve (100) being used to be connected to a lifting device of a single crystal furnace; A mounting plate (200), wherein the mounting plate (200) is sleeved on the barrel sleeve (100); a plurality of wall support blocks (300), the wall support blocks (300) being slidably disposed on the mounting plate (200) and arranged along the circumference of the barrel sleeve (100), the wall support blocks (300) sliding toward or away from the axial direction of the barrel sleeve (100) to abut against the auxiliary chamber of the single crystal furnace; A connecting assembly (400) for connecting the barrel sleeve (100) to a charging device of the single crystal furnace; An adjusting component (500) is arranged on the barrel sleeve (100) and connected to the wall supporting block (300) to drive a plurality of the wall supporting blocks (300) to move synchronously.

2. The auxiliary chamber cleaning device according to claim 1, characterized in that: The connecting assembly (400) comprises a connecting sleeve (410), a connecting rod (420) and a connecting piece (430); the connecting sleeve (410) is arranged on the barrel sleeve (100); the connecting rod (420) is slidably inserted into the barrel sleeve (100); and the connecting piece (430) is arranged in the connecting sleeve (410) for connecting the connecting rod (420).

3. The auxiliary chamber cleaning device according to claim 2, characterized in that: The connecting member (430) comprises a first clamping block (431) and a first elastic portion (432); the first clamping block (431) is slidably arranged in the connecting sleeve (410); a first passing groove (110) is provided on the barrel sleeve (100); the first clamping block (431) passes through the first passing groove (110) and is inserted into the barrel sleeve (100); the first elastic portion (432) is arranged on the first clamping block (431) and is connected to the connecting sleeve (410) to drive the first clamping block (431) to move toward the barrel sleeve (100); A first sliding block (421) is provided on the connecting rod (420), and the bottom of the first sliding block (421) abuts against the top of the first clamping block (431) to limit the first sliding block (421) from moving out of the barrel sleeve (100).

4. The sub-chamber cleaning device according to claim 3, characterized in that: The adjustment assembly (500) comprises an adjustment member (510) and a plurality of hinged rods (520); the connecting sleeve (410) is slidably mounted on the barrel sleeve (100); one end of the hinged rod (520) is correspondingly hinged on the supporting wall block (300), and the other end is hinged on the connecting sleeve (410); the hinged rod (520) is arranged along the circumference of the connecting sleeve (410); the adjustment member (510) is arranged in the connecting sleeve (410) to drive the connecting sleeve (410) to slide.

5. The sub-chamber cleaning device according to claim 4, characterized in that: The adjusting member (510) comprises a second clamping block (511) and a second elastic portion (512), wherein the second clamping block (511) is slidably arranged in the connecting sleeve (410), and the second elastic portion (512) is arranged on the second clamping block (511) and connected to the connecting sleeve (410) to drive the second clamping block (511) to be inserted into the first running groove (110); the second clamping block (511) is provided with a first limiting portion (5111) and a second limiting portion (5112), and the second limiting portion (5112) is located above the first limiting portion (5111), and the barrel sleeve (100) is provided with a second running groove (120); The connecting rod (420) is provided with a second slider (422), and the second slider (422) is used to abut against the first limiting portion (5111) to drive the first limiting portion (5111) to move upward, thereby driving the second limiting portion (5112) to slide into the second running groove (120) and engage with the bottom wall of the second running groove (120).

6. The sub-chamber cleaning device according to claim 5, characterized in that: The top of the first sliding block (421) is provided with a first inclined surface (4211), the bottom of the first clamping block (431) is provided with a third inclined surface (4311), and the second sliding block (422) is slidably sleeved on the connecting rod (420); When the barrel sleeve (100) moves toward the bottom of the single crystal furnace, the first inclined surface (4211) abuts against the third inclined surface (4311), and the first inclined surface (4211) pushes the third inclined surface (4311) to move, so that the first sliding block (421) moves between the first clamping block (431) and the second clamping block (511), and the connecting rod (420) is hung on the first clamping block (431); When the barrel sleeve (100) continues to move toward the bottom of the single crystal furnace, the first inclined surface (4211) pushes the second clamping block (511) to move, so that the first slider (421) moves to the second clamping block (511), and the second slider (422) pushes the third inclined surface (4311) to move, so that the second slider (422) moves between the second clamping block (511) and the first clamping block (431), and the second slider (422) abuts against the first limiting portion (5111) to push the second clamping block (511) to move toward the mounting plate (200), so as to clamp the second limiting portion (5112) with the second travel groove (120).

7. The sub-chamber cleaning device according to claim 6, characterized in that: A second inclined surface (4221) is provided at the bottom of the second slider (422); the diameter of the second slider (422) is greater than the diameter of the first slider (421); a fourth inclined surface (5113) is provided at the top of the first limiting portion (5111); the second inclined surface (4221) cooperates with the fourth inclined surface (5113) to enable the connecting rod (420) to move out of the barrel sleeve (100).

8. The sub-chamber cleaning device according to claim 5, characterized in that: The adjustment assembly (500) further comprises a reset member (530), the reset member (530) comprising an extension rod (531) and a limit plate (532), the limit plate (532) being slidably sleeved between the barrel sleeve (100) and the connecting sleeve (410), the extension rod (531) being connected to the limit plate (532) and extending to the top of the mounting plate (200) so as to abut against the top of the single crystal furnace; A fifth inclined surface (5114) is provided on the side of the second limiting portion (5112) facing the limiting plate (532), and the limiting plate (532) is used to abut against the fifth inclined surface (5114) to drive the second limiting portion (5112) to disengage from the second travel groove (120).

9. The secondary chamber cleaning device according to any one of claims 1 to 8, characterized in that: Arc plates (310) are arranged on both sides of the wall support block (300), and the arc plates (310) between adjacent wall support blocks (300) are arranged in an overlapping manner, so that when the wall support block (300) abuts against the auxiliary chamber, the wall support block (300) and the arc plates (310) are jointly arranged to form a circular ring.

10. A single crystal furnace, characterized in that: It comprises a single crystal furnace body and a sub-chamber cleaning device as described in any one of claims 1 to 9 arranged in the single crystal furnace body.

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