Temperature control system and temperature control method

Abstract

The embodiment of the invention provides a temperature control system and a temperature control method, and relates to the technical field of semiconductor temperature control. The temperature control system comprises a refrigerating system, a cold carrying system and a circulating system. The refrigerating system comprises a refrigerating main path, a first branch and a second branch, wherein the first branch and the second branch are connected to the refrigerating main path and arranged in parallel. The circulation system comprises a circulation main path, and a third branch, a fourth branch and a fifth branch which are connected to the circulation main path and arranged in parallel. And the first branch exchanges heat with the fifth branch. And the second branch exchanges heat with the cold carrying system. And the cold carrying system exchanges heat with the third branch. And the fourth branch exchanges heat with the refrigeration main path. Circulating liquid of the circulating system selectively passes through the third branch, the fourth branch or the fifth branch. And valves are arranged on the first branch, the second branch, the third branch, the fourth branch and the fifth branch. The temperature can be quickly switched, the output liquid supply temperature is stabilized, the equipment energy consumption is reduced, the production efficiency and the product quality are improved, and the cost is reduced.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor temperature control technology, and in particular to a temperature control system and a temperature control method. Background Art

[0002] Temperature control is a crucial link in the semiconductor manufacturing process, especially in the chip production process. In order to ensure the quality and performance of the chip, accurate and stable temperature control is required to adjust the temperature of the circulating fluid. Different chip processing technologies have different requirements for the temperature of the circulating fluid, and the load status will also change during the actual production process.

[0003] The existing temperature control system is not sensitive enough when facing load changes, resulting in large temperature fluctuations in the temperature control system, affecting production efficiency and product quality. In addition, the existing temperature control system consumes a lot of energy when the temperature changes, and the long-term operation cost of the equipment is high. Summary of the invention

[0004] The purpose of the present invention includes providing a temperature control system and method, which can quickly switch the circulating fluid temperature in the face of load changes, and can reduce equipment energy consumption, improve production efficiency and product quality, and reduce costs.

[0005] The embodiments of the present invention can be implemented as follows:

[0006] In a first aspect, the present invention provides a temperature control system, comprising a refrigeration system, a cold-carrying system and a circulation system, wherein the refrigeration system comprises a refrigeration main circuit and a first branch and a second branch connected to the refrigeration main circuit and arranged in parallel, and the circulation system comprises a circulation main circuit and a third branch, a fourth branch and a fifth branch connected to the circulation main circuit and arranged in parallel, the first branch exchanges heat with the fifth branch through a first evaporator, the second branch exchanges heat with the cold-carrying system through a second evaporator, the cold-carrying system exchanges heat with the third branch through a first heat exchanger, and the fourth branch exchanges heat with the refrigeration main circuit through a first condenser, wherein the circulating fluid of the circulation system can selectively pass through the third branch, the fourth branch or the fifth branch, and valves are provided on the first branch, the second branch, the fifth branch, the third branch and the fourth branch.

[0007] In a second aspect, the present invention provides a temperature control method, which is applied to the temperature control system described in the above embodiment, and the method comprises:

[0008] Acquire a second temperature setting value of the second temperature sensor as SV0;

[0009] Acquire a second temperature measurement value PV0 of the second temperature sensor in real time;

[0010] Calculating a difference X between the second temperature setting value SV0 and the second temperature measurement value PV0;

[0011] If a≤X<a+A, the opening of the first expansion valve increases by M%;

[0012] If a+A≤X<a+B, the opening of the first expansion valve increases by N%;

[0013] If a+B≤X≤bB, the opening of the first expansion valve remains unchanged;

[0014] If bB<X≤bA, the opening of the first expansion valve is reduced by M%;

[0015] If bA<X≤b, the opening of the first expansion valve is reduced by N%;

[0016] If X<a, the opening of the first expansion valve increases by H%;

[0017] If X>b, the opening degree of the first expansion valve is reduced by H%; wherein a<0<A<B<b.

[0018] The beneficial effects of the temperature control system and method provided by the embodiments of the present invention include:

[0019] The temperature control system of the present invention includes a refrigeration system, a circulation system and a cold-carrying system. The refrigerant of the refrigeration system flows from the refrigeration main road into the first branch and the second branch respectively and then merges and flows back to the refrigeration main road. The circulating liquid of the circulation system flows from the circulation main road into multiple branches respectively and then merges and flows back to the circulation main road. The cold-carrying system exchanges heat with the second branch as an intermediate medium and then exchanges heat with one of the branches of the circulation system, so that multiple branches of the circulation system can exchange heat with the first branch, the cold-carrying system and the refrigeration main road respectively. The state of the valves on each branch (the state includes whether it is turned on or not, whether one is turned on, the opening, etc.) can be controlled to achieve accurate control of the circulating liquid temperature in the circulation system, and the temperature can be quickly switched to adapt to the temperature control requirements of the load. At the same time, it can also reduce the energy consumption of the equipment. The temperature control system of the present invention can quickly switch the temperature, stably output the liquid supply temperature, reduce the energy consumption of the equipment, improve production efficiency and product quality, and reduce costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1This is a schematic diagram of the structure of the temperature control system provided in this embodiment.

[0022] Icons: 100-temperature control system; 10-refrigeration system; 11-compressor; 111-first temperature sensor; 112-first pressure sensor; 113-third temperature sensor; 114-second pressure sensor; 12-first condenser; 13-second condenser; 14-liquid storage tank; 141-fourth temperature sensor; 15-first expansion valve; 16-first evaporator; 17-second expansion valve; 18-second evaporator; 20-cooling system; 21-energy storage tank; 2 11-first inlet; 212-first outlet; 213-second inlet; 214-second outlet; 22-first solenoid valve; 23-first heat exchanger; 30-circulation system; 31-expansion tank; 32-circulation pump; 33-second temperature sensor; 35-load end; 37-second solenoid valve; 38-three-way valve; 381-third inlet; 382-third outlet; 383-fourth outlet; 39-third solenoid valve; 391-second heat exchanger; 40-cooling water system. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0026] In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, they are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0027] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0028] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0029] Please refer to Figure 1 The temperature control system 100 provided in the embodiment of the present invention includes a refrigeration system 10, a cooling system 20 and a circulation system 30.

[0030] The refrigeration system 10 is used to circulate the refrigerant and cool the refrigerant so that the coldness of the refrigerant is transferred to the circulation system 30. The cooling system 20 is used to circulate the cooling medium, which acts as an intermediate medium to transfer the coldness of the refrigerant to the circulation system 30. The circulation system 30 is used to circulate the circulating fluid, which obtains coldness from the refrigerant and the cooling medium and cools the load end 35.

[0031] The refrigeration system 10 includes a refrigeration main circuit and a first branch and a second branch connected to the refrigeration main circuit in parallel. The circulation system 30 includes a circulation main circuit and a third branch, a fourth branch and a fifth branch connected to the circulation main circuit in parallel. The first branch exchanges heat with the fifth branch through the first evaporator 16. The second branch exchanges heat with the cooling system 20 through the second evaporator 18. The cooling system 20 exchanges heat with the third branch through the first heat exchanger 23. The fourth branch exchanges heat with the refrigeration main circuit through the first condenser 12. Among them, the circulating fluid of the circulation system 30 can selectively pass through the third branch, the fourth branch or the fifth branch. Valves are provided on the first branch, the second branch, the fifth branch, the third branch and the fourth branch. The mass flow of the refrigerant and the circulating fluid can be controlled by adjusting the state of the valve, thereby controlling the cooling capacity of the temperature control system 100, wherein the state includes whether it is on or off, one is on, the opening degree, etc.

[0032] Specifically, the refrigeration system 10 includes a compressor 11, a first condenser 12, a second condenser 13 and a liquid accumulator 14, which are sequentially arranged on the refrigeration main circuit, a first expansion valve 15 and a first evaporator 16, which are arranged on the first branch circuit, and a second expansion valve 17 and a second evaporator 18, which are arranged on the second branch circuit. The outlet of the compressor 11 on the refrigeration main circuit is connected to the first side inlet of the first condenser 12. The first side outlet of the first condenser 12 is connected to the first side inlet of the second condenser 13. The first side outlet of the second condenser 13 is connected to the inlet of the liquid accumulator 14. The outlet of the liquid accumulator 14 is connected to the first branch circuit and the second branch circuit.

[0033] On the first branch, the first expansion valve 15, the first side of the first evaporator 16, and the inlet of the compressor 11 are connected in sequence. Specifically, the outlet of the accumulator 14 is connected to the inlet of the first expansion valve 15. The outlet of the first expansion valve 15 is connected to the first side inlet of the first evaporator 16. The first side outlet of the first evaporator 16 is connected to the inlet of the compressor 11.

[0034] On the second branch, the second expansion valve 17, the first side of the second evaporator 18, and the inlet of the compressor 11 are connected in sequence. Specifically, the outlet of the accumulator 14 is connected to the inlet of the second expansion valve 17. The outlet of the second expansion valve 17 is connected to the first side inlet of the second evaporator 18. The first side outlet of the second evaporator 18 is connected to the inlet of the compressor 11.

[0035] It can be understood that the refrigerant is compressed by the compressor 11 to form a high-temperature and high-pressure refrigerant gas, which is initially condensed by the first condenser 12 in sequence, and then enters the second condenser 13 for further condensation into liquid, and is stored in the liquid storage 14. After the refrigerant comes out of the liquid storage 14, it is divided into two paths. One path passes through the first expansion valve 15 and enters the first evaporator 16 for evaporation and temperature increase. The high-temperature refrigerant vapor returns to the compressor 11 after coming out of the first evaporator 16; the other path of refrigerant passes through the second expansion valve 17 and enters the second evaporator 18 for evaporation and heat absorption and temperature increase. The refrigerant vapor is formed and returns to the compressor 11 after coming out of the second evaporator 18.

[0036] In this embodiment, the refrigerant is divided into two paths and passes through the first evaporator 16 and the second evaporator 18 respectively. The first evaporator 16 is used to exchange heat with the circulation system 30, take away the heat of the circulating fluid in the circulation system 30, and cool the circulating fluid. The second evaporator 18 is used to exchange heat with the cooling system 20, take away the heat of the cooling medium in the cooling system 20, and cool the cooling medium.

[0037] Furthermore, a first temperature sensor 111 and a first pressure sensor 112 are provided at the inlet of the compressor 11. The first temperature sensor 111 is convenient for detecting the temperature of the refrigerant circulating in the compressor 11. The first pressure sensor 112 can detect the pressure of the refrigerant entering the compressor 11. According to the physical properties of the refrigerant, the temperature value corresponding to the saturated state under the pressure can be checked, and the temperature value corresponding to the saturated state can be compared with the actual measured value of the first temperature sensor 111, so as to ensure that the compressor 11 can still work normally, thereby ensuring the accuracy of temperature control.

[0038] In this embodiment, a third temperature sensor 113 and a second pressure sensor 114 are provided at the outlet of the compressor 11. It is understood that the third temperature sensor 113 is used to detect the temperature of the refrigerant discharged from the compressor 11. The second pressure sensor 114 is used to detect the pressure of the refrigerant discharged from the compressor 11, thereby detecting the working state of the compressor 11.

[0039] Furthermore, a fourth temperature sensor 141 is further provided at the outlet of the liquid accumulator 14 . The fourth temperature sensor 141 is used to detect the temperature of the refrigerant discharged from the liquid accumulator 14 .

[0040] Specifically, the cooling system 20 includes an energy storage box 21, a first solenoid valve 22 and a first heat exchanger 23. The energy storage box 21 is provided with a first inlet 211, a first outlet 212, a second inlet 213 and a second outlet 214. The second side outlet of the second evaporator 18 is connected to the first inlet 211. The second side inlet of the second evaporator 18 is connected to the first outlet 212. The second outlet 214 is connected to the inlet of the first solenoid valve 22. The outlet of the first solenoid valve 22 is connected to the first side inlet of the first heat exchanger 23. The first side outlet of the first heat exchanger 23 is connected to the second inlet 213.

[0041] It can be understood that the coolant in the energy storage tank 21 flows out from the first outlet 212, enters the second side of the second evaporator 18 to cool down, and then flows back to the energy storage tank 21 from the first inlet 211. The cooled coolant in the energy storage tank 21 enters the first heat exchanger 23 through the second outlet 214 and the first solenoid valve 22 for heat exchange, and flows back to the energy storage tank 21 through the second inlet 213 after being heated, and the cycle is repeated.

[0042] The first heat exchanger 23 is used to exchange heat with the circulation system 30. Specifically, the circulation system 30 includes an expansion tank 31, a circulation pump 32, a second temperature sensor 33 and a load end 35, which are sequentially arranged on the circulation main road, a second solenoid valve 37 arranged on the fifth branch road, and a three-way valve 38 arranged on the third branch road and the fourth branch road. The circulation main road is selectively connected to the third branch road or the fourth branch road via the three-way valve 38, wherein the three-way valve 38 includes a third inlet 381, a third outlet 382 and a fourth outlet 383; the outlet of the expansion tank 31 on the circulation main road is connected to the inlet of the circulation pump 32. The outlet of the circulation pump 32 is connected to the inlet of the load end 35. The second temperature sensor 33 is arranged between the circulation pump 32 and the expansion tank 31. The outlet of the load end 35 is respectively connected to the inlet of the second solenoid valve 37 and the third inlet 381 of the three-way valve 38; the outlet of the second solenoid valve 37 on the fifth branch road is connected to the second side inlet of the first evaporator 16. The second side outlet of the first evaporator 16 is communicated with the inlet of the expansion tank 31 .

[0043] In this embodiment, the water tank of the circulation system 30 is replaced by an expansion tank 31, and the liquid filling amount is about 1 / 3 of the water tank, which reduces the overall capacity, reduces energy consumption and enables rapid response.

[0044] Further, the third inlet 381 of the three-way valve 38 on the third branch is communicated with the third outlet 382, ​​the third outlet 382 is communicated with the second side inlet of the first heat exchanger 23, and the second side outlet of the first heat exchanger 23 is communicated with the inlet of the expansion tank 31. The third inlet 381 of the three-way valve 38 on the fourth branch is communicated with the fourth outlet 383, and the fourth outlet 383 is communicated with the second side inlet of the first condenser 12. The second side outlet of the first condenser 12 is communicated with the inlet of the expansion tank 31.

[0045] It can be understood that in the circulation system 30, the circulating fluid is heated up from the load end 35 and is divided into two paths. One path passes through the second solenoid valve 37 and returns to the first evaporator 16 for cooling, and then returns to the expansion tank 31, and reaches the load end 35 after being pressurized by the circulation pump 32; the other path comes out of the load end 35 and enters from the third inlet 381 of the three-way valve 38, enters the second side of the first heat exchanger 23 from the third outlet 382, ​​exchanges heat with the cooling system 20, enters the expansion tank 31, passes through the circulation pump 32 in sequence, and reaches the load end 35; or enters from the third inlet 381 of the three-way valve 38, enters the second side of the first condenser 12 from the fourth outlet 383, exchanges heat with the refrigerant of the refrigeration system 10, enters the expansion tank 31, and passes through the circulation pump 32 in sequence, and reaches the load end 35.

[0046] In this embodiment, multiple branches are set in the circulation system 30 to realize multiple refrigeration of the circulation system 30 and the first condenser 12, the first heat exchanger 23 and the first evaporator 16. By setting an expansion valve, a solenoid valve or a three-way valve 38 on each branch, the state of each valve is adjusted (wherein the state includes whether it is on or off, one is turned on, the opening is adjusted, etc.), so as to adjust the temperature of the circulating fluid, quickly switch the temperature, stabilize the output liquid supply temperature, and multiple refrigeration reduces the power of the compressor 11, reduces the energy consumption of the equipment, improves the production efficiency and product quality, and reduces the cost.

[0047] Further, the circulation system 30 also includes a sixth branch, which is connected to the circulation main circuit and connected in parallel with the fifth branch. The second heat exchanger 391 and the third solenoid valve 39 are provided on the sixth branch. Specifically, the outlet of the load end 35 is also connected to the inlet of the third solenoid valve 39. The outlet of the third solenoid valve 39 is connected to the first side inlet of the second heat exchanger 391. The first side outlet of the second heat exchanger 391 is connected to the inlet of the expansion tank 31.

[0048] It is understandable that the circulating fluid of the circulation system 30 in this embodiment is further provided with a sixth branch after it comes out of the load end 35. After coming out of the load end 35, the circulating fluid passes through the third solenoid valve 39 and enters the second heat exchanger 391 for heat exchange, enters the expansion tank 31 after cooling, and then passes through the circulation pump 32 in sequence and returns to the load end 35.

[0049] Specifically, in this embodiment, the circulating liquid is passed through the first side of the second heat exchanger 391, and the second side of the second heat exchanger 391 is connected to the cooling water system 40. By passing cooling water through the second side of the second heat exchanger 391, the temperature of the circulating liquid is taken away, so that the circulating liquid is cooled.

[0050] In this embodiment, temperature monitoring is performed at multiple locations in the temperature control system 100 to adjust the temperature and improve the temperature control accuracy. In addition to the above-mentioned temperature sensor installation locations, one or more temperature sensors or pressure sensors may also be installed at other locations, depending on actual needs and are not limited here.

[0051] The temperature control system 100 of this embodiment also includes a cooling water system 40. The cooling water system 40 is connected to the second side of the second heat exchanger 391. The cooling water system 40 is also connected to the second side of the second condenser 13. The cooling water provided by the cooling water system 40 can exchange heat with the refrigerant of the refrigeration system 10 and the circulating fluid of the circulation system 30, respectively, to reduce the temperature of the refrigerant and the circulating fluid. At the same time, the heat of the entire temperature control system 100 is taken away, the heat exchange between the temperature control system 100 and the outside is realized, and the heat dissipation efficiency is improved.

[0052] The working principle and process of the temperature control system 100 provided in this embodiment are:

[0053] The refrigerant flow path is as follows: after being compressed by the compressor 11, the refrigerant forms a high-temperature and high-pressure refrigerant gas, which enters the first condenser 12 for preliminary condensation, and then enters the second condenser 13 for further condensation into liquid, enters the liquid storage tank 14 for storage, and then is divided into two paths, one path enters the first expansion valve 15 for throttling and pressure reduction, enters the first evaporator 16 for evaporation and refrigeration to become refrigerant vapor, and returns to the compressor 11; the other path passes through the second expansion valve 17 for throttling and pressure reduction, enters the second evaporator 18 for evaporation and refrigeration to become refrigerant vapor, and returns to the compressor 11.

[0054] The brine flow path is as follows: the brine in the energy storage tank 21 enters the second evaporator 18 to exchange heat with the refrigerant and is cooled, and then returns to the energy storage tank 21. The brine passes through the first solenoid valve 22 from the other side of the energy storage tank 21 and enters the first heat exchanger 23 for heat exchange, so that the circulating fluid on the second side of the first heat exchanger 23 is cooled, and the brine returns to the energy storage tank 21 after heating.

[0055] The circulation path of the circulating liquid is as follows: the circulating liquid is heated up from the load end 35 and is divided into four paths. One path comes out from the load end 35 and passes through the second solenoid valve 37 to return to the first evaporator 16 for cooling, and then returns to the expansion tank 31. After being pressurized by the circulating pump 32, it reaches the load end 35. The other path comes out from the load end 35 and enters from the third inlet 381 of the three-way valve 38, and enters the second side of the first heat exchanger 23 from the third outlet 382. After exchanging heat with the cooling system 20, it enters the expansion tank 31 and passes through the circulation pump 32 in sequence. The three-way circulating fluid enters from the third inlet 381 of the three-way valve 38, enters the second side of the first condenser 12 from the fourth outlet 383, exchanges heat with the refrigerant of the refrigeration system 10, enters the expansion tank 31, passes through the circulating pump 32 in sequence, and reaches the load end 35; after the four-way circulating fluid comes out of the load end 35, it passes through the third solenoid valve 39 and enters the second heat exchanger 391 for heat exchange, enters the expansion tank 31 after cooling, and then passes through the circulating pump 32 in sequence and returns to the load.

[0056] Cooling water flow path: The cooling water system 40 in this embodiment includes two cooling water loops, which are respectively connected to the second side of the second condenser 13 and the second side of the second heat exchanger 391.

[0057] This embodiment also provides a temperature control method, which is applied to the temperature control system 100 of the above embodiment. Specifically, the temperature control method includes:

[0058] Acquire the second temperature setting value of the second temperature sensor 33 as SV0;

[0059] Acquire the second temperature measurement value PV0 of the second temperature sensor 33 in real time;

[0060] Calculate the difference X between the second temperature setting value SV0 and the second temperature measurement value PV0, that is, X=SV0-PV0;

[0061] If a≤X<a+A, the opening of the first expansion valve 15 increases by M%;

[0062] If a+A≤X<a+B, the opening of the first expansion valve 15 increases by N%;

[0063] If a+B≤X≤bB, the opening degree of the first expansion valve 15 remains unchanged;

[0064] If bB<X≤bA, the opening degree of the first expansion valve 15 is reduced by M%;

[0065] If bA<X≤b, the opening degree of the first expansion valve 15 is reduced by N%;

[0066] If X<a, the opening of the first expansion valve 15 increases by H%;

[0067] If X>b, the opening degree of the first expansion valve 15 is reduced by H%, wherein a<0<A<B<b.

[0068] Specifically, in this embodiment, a=-1, b=1, A=0.5, B=0.9, M=2, N=1, H=5, namely:

[0069] If -1≤X<-0.5, the opening of the first expansion valve 15 increases by 2%;

[0070] If -0.5≤X<-0.1, the opening of the first expansion valve 15 increases by 1%;

[0071] If -0.1≤X≤0.1, the opening degree of the first expansion valve 15 remains unchanged;

[0072] If 0.1<X<0.5, the opening degree of the first expansion valve 15 is reduced by 1%;

[0073] If 0.5<X≤1, the opening degree of the first expansion valve 15 is reduced by 2%;

[0074] If X<-1, the opening of the first expansion valve 15 increases by 5%;

[0075] If X>1, the opening degree of the first expansion valve 15 is reduced by 5%.

[0076] Through step-by-step adjustment, we can save energy and reduce consumption, and also improve the accuracy of temperature control.

[0077] It can be understood that X is the difference between the set temperature value and the measured temperature value. When X is greater than the preset range, for example, when X is greater than 0.1, it means that the actual temperature value is low. At this time, by adjusting the opening of the first expansion valve 15, the opening of the first expansion valve 15 is reduced, the cooling capacity is reduced, and the measured temperature value is increased, so that the value of X is reduced; when X is less than 0.1, it means that the actual temperature value is high. At this time, by adjusting the opening of the first expansion valve 15, the opening of the first expansion valve 15 is increased, so that the measured temperature value is reduced, so that the value of X is increased, and finally the value of X is stabilized between ±0.1.

[0078] Furthermore, the present invention controls the opening of the first expansion valve 15 to be different by setting different ranges. When X deviates more from the preset range, ie ±0.1, the opening adjustment value of the first expansion valve 15 is larger.

[0079] It should be noted that the opening adjustment value of the first expansion valve 15 refers to the value of each adjustment of the first expansion valve 15. In this embodiment, the opening of the first expansion valve 15 is gradually adjusted, for example, once after a certain period of time, specifically once every 1 second.

[0080] Of course, the above values ​​may also be set to other values, which can be determined according to needs and system circuits and are not limited here.

[0081] It can be understood that by comparing the actual temperature of the circulating fluid with the preset temperature, the opening of the first expansion valve 15 is adjusted so that the temperature of the circulating fluid is maintained within a certain range of the preset temperature, thereby achieving precise temperature control.

[0082] Furthermore, the temperature control method of this embodiment also includes:

[0083] In the case of a≤X≤b, a first temperature measurement value PV1 of the first temperature sensor 111 and a first pressure measurement value PV2 of the first pressure sensor 112 are acquired in real time;

[0084] Converting the first pressure measurement value PV2 into a saturation temperature value PV2' according to the pressure-enthalpy diagram;

[0085] Calculate the difference Y between the saturated temperature value PV2' and the first temperature measurement value PV1, that is, Y = PV2'-PV1;

[0086] If c≤Y≤d, the opening degree of the first expansion valve 15 remains unchanged;

[0087] If e≤Y<c, the opening of the first expansion valve 15 increases by P%;

[0088] If d<Y≤0, the opening degree of the first expansion valve 15 is reduced by Q%.

[0089] Specifically, in this embodiment, c=-9, d=-5, e=-15, P=1, Q=5, that is,

[0090] If -9≤Y≤-5, the opening degree of the first expansion valve 15 remains unchanged;

[0091] If -15≤Y<-9, the opening of the first expansion valve 15 increases by 1%;

[0092] If -5<Y≤0, the opening degree of the first expansion valve 15 is reduced by 5%.

[0093] The temperature control method of this embodiment also includes:

[0094] If X<a, the speed of the compressor 11 decreases by R%;

[0095] If a≤X≤b, the speed of the compressor 11 remains unchanged;

[0096] If b<X, the rotation speed of the compressor 11 increases by R%.

[0097] Furthermore, the temperature control method of this embodiment also includes:

[0098] When the second temperature setting value SV0 is greater than the second temperature measurement value PV0, that is, X>0, the third inlet 381 is connected to the fourth outlet 383;

[0099] The opening of the second expansion valve 17 is controlled according to the PID control program until SV0-1=PV0, and the opening of the second expansion valve 17 is adjusted according to the value of Y;

[0100] If c≤Y≤d, the opening degree of the second expansion valve 17 remains unchanged;

[0101] If e≤Y<c, the opening of the second expansion valve 17 increases by P%;

[0102] If d<Y≤0, the opening degree of the second expansion valve 17 is reduced by Q%.

[0103] Specifically, if -9≤Y≤-5, the opening degree of the second expansion valve 17 remains unchanged;

[0104] If -15≤Y<-9, the opening of the second expansion valve 17 increases by 1%;

[0105] If -5<Y≤0, the opening degree of the second expansion valve 17 is reduced by 5%.

[0106] The temperature control method of this embodiment also includes:

[0107] When -10°C<SV0<30°C, the third inlet 381 is connected to the third outlet 382; the PID control program is called to control the opening of the first solenoid valve 22;

[0108] Until SV0-1=PV0, the output value of the first electromagnetic valve 22 is reduced to 50% of the current value and the operation is maintained.

[0109] The temperature control method of this embodiment also includes:

[0110] When SV0 ≥ 30°C, the PID control program is called to control the opening of the third solenoid valve 39;

[0111] Until SV0-1=PV0, the output value of the third electromagnetic valve 39 is reduced to 50% of the current value and the operation is maintained.

[0112] The beneficial effects of the temperature control system 100 and the temperature control method provided by the embodiment of the present invention include:

[0113] The temperature control system 100 of the present invention includes a refrigeration system 10, a circulation system 30 and a cooling system 20. The refrigerant of the refrigeration system 10 flows from the refrigeration main circuit into the first branch and the second branch respectively and then merges and flows back to the refrigeration main circuit, the circulating liquid of the circulation system 30 flows from the circulation main circuit into multiple branches respectively and then merges and flows back to the circulation main circuit, and the cooling system 20 acts as an intermediate medium to exchange heat with the second branch and then exchanges heat with one of the branches of the circulation system 30, so that multiple branches of the circulation system 30 can exchange heat with the first branch, the cooling system 20 and the refrigeration main circuit respectively. By controlling the state of the valves on each branch (the state includes whether it is turned on or not, whether one is turned on, the opening degree, etc.), the temperature of the circulating liquid in the circulation system 30 can be accurately controlled, the temperature can be quickly switched, and the temperature control requirements of the load can be adapted. At the same time, the energy consumption of the equipment can also be reduced. The temperature control system 100 of the present invention can quickly switch the temperature, stably output the liquid supply temperature, reduce the energy consumption of the equipment, improve the production efficiency and product quality, and reduce the cost.

[0114] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A temperature control system (100), characterized in that: The invention comprises a refrigeration system (10), a cooling system (20) and a circulation system (30), wherein the refrigeration system (10) comprises a refrigeration main circuit and a first branch and a second branch connected to the refrigeration main circuit and arranged in parallel, and the circulation system (30) comprises a circulation main circuit and a third branch, a fourth branch and a fifth branch connected to the circulation main circuit and arranged in parallel; the first branch exchanges heat with the fifth branch through a first evaporator (16), the second branch exchanges heat with the cooling system (20) through a second evaporator (18), the cooling system (20) exchanges heat with the third branch through a first heat exchanger (23), and the fourth branch exchanges heat with the refrigeration main circuit through a first condenser (12), wherein the circulating fluid of the circulation system (30) can selectively pass through the third branch, the fourth branch or the fifth branch, and valves are provided on the first branch, the second branch, the third branch, the fourth branch and the fifth branch.

2. The temperature control system (100) according to claim 1, characterized in that: The refrigeration system (10) comprises a compressor (11), a first condenser (12), a second condenser (13) and a liquid accumulator (14) which are sequentially arranged on the refrigeration main circuit, a first expansion valve (15) and the first evaporator (16) which are arranged on the first branch circuit, and a second expansion valve (17) and the second evaporator (18) which are arranged on the second branch circuit; the outlet of the compressor (11) on the refrigeration main circuit is connected to a first side inlet of the first condenser (12), the first side outlet of the first condenser (12) is connected to a first side inlet of the second condenser (13), the first side outlet of the second condenser (13) is connected to an inlet of the liquid accumulator (14), and the outlet of the liquid accumulator (14) is connected to the first branch circuit and the second branch circuit; the first expansion valve (15), the first side of the first evaporator (16) and the inlet of the compressor (11) on the first branch circuit are sequentially connected; the second expansion valve (17), the first side of the second evaporator (18) and the inlet of the compressor (11) on the second branch circuit are sequentially connected.

3. The temperature control system (100) according to claim 2, characterized in that: The cooling system (20) comprises an energy storage box (21), a first solenoid valve (22) and the first heat exchanger (23); the energy storage box (21) is provided with a first inlet (211), a first outlet (212), a second inlet (213) and a second outlet (214); the second side outlet of the second evaporator (18) is connected to the first inlet (211); the second side inlet of the second evaporator (18) is connected to the first outlet (212); the second outlet (214) is connected to the inlet of the first solenoid valve (22); the outlet of the first solenoid valve (22) is connected to the first side inlet of the first heat exchanger (23); and the first side outlet of the first heat exchanger (23) is connected to the second inlet (213).

4. The temperature control system (100) according to claim 3, characterized in that: The circulation system (30) comprises an expansion tank (31), a circulation pump (32), a second temperature sensor (33) and a load end (35) which are sequentially arranged on the circulation main road, a second solenoid valve (37) arranged on the fifth branch road, and a three-way valve (38) arranged on the third branch road and the fourth branch road, wherein the circulation main road is selectively connected to the third branch road or the fourth branch road via the three-way valve (38), wherein the three-way valve (38) comprises a third inlet (381), a third outlet (382) and a fourth outlet (383); the outlet of the expansion tank (31) on the circulation main road is connected to the inlet of the circulation pump (32), and the outlet of the circulation pump (32) is connected to the inlet of the load end (35); the second temperature sensor (33) is arranged between the circulation pump (32) and the expansion tank (31), and the outlets of the load end (35) are respectively connected to the second solenoid valve (37). The inlet of the three-way valve (37) is connected to the inlet of the first evaporator (16) and the third inlet (381) of the three-way valve (38); the outlet of the second solenoid valve (37) on the fifth branch is connected to the second side inlet of the first evaporator (16), and the second side outlet of the first evaporator (16) is connected to the inlet of the expansion tank (31); the third inlet (381) of the three-way valve (38) on the third branch is connected to the third outlet (382), and the third outlet (382) is connected to the second side inlet of the first heat exchanger (23), and the second side outlet of the first heat exchanger (23) is connected to the inlet of the expansion tank (31); the third inlet (381) of the three-way valve (38) on the fourth branch is connected to the fourth outlet (383), and the fourth outlet (383) is connected to the second side inlet of the first condenser (12), and the second side outlet of the first condenser (12) is connected to the inlet of the expansion tank (31).

5. The temperature control system (100) according to claim 4, characterized in that: The circulation system (30) further comprises a sixth branch, the sixth branch being connected to the main circulation path and connected in parallel with the fifth branch, the sixth branch being provided with a second heat exchanger (391) and a third solenoid valve (39), the outlet of the load end (35) being communicated with the inlet of the third solenoid valve (39), the outlet of the third solenoid valve (39) being communicated with the first side inlet of the second heat exchanger (391), and the first side outlet of the second heat exchanger (391) being communicated with the inlet of the expansion tank (31).

6. The temperature control system (100) according to claim 4, characterized in that: A first temperature sensor (111) and a first pressure sensor (112) are provided at the inlet of the compressor (11).

7. The temperature control system (100) according to claim 4, characterized in that: A third temperature sensor (113) and a second pressure sensor (114) are also provided at the outlet of the compressor (11).

8. The temperature control system (100) according to claim 4, characterized in that: A fourth temperature sensor (141) is also provided at the outlet of the liquid storage container (14).

9. A temperature control method, characterized in that: Applied to the temperature control system (100) according to claim 6, the method comprising: Acquire a second temperature setting value of the second temperature sensor (33) as SV0; Acquiring in real time a second temperature measurement value PV0 of the second temperature sensor (33); Calculating a difference X between the second temperature setting value SV0 and the second temperature measurement value PV0; If a≤X<a+A, the opening of the first expansion valve (15) increases by M%; If a+A≤X<a+B, the opening of the first expansion valve (15) increases by N%; If a+B≤X≤bB, the opening degree of the first expansion valve (15) remains unchanged; If bB<X≤bA, the opening degree of the first expansion valve (15) is reduced by M%; If bA<X≤b, the opening degree of the first expansion valve (15) is reduced by N%; If X<a, the opening of the first expansion valve (15) increases by H%; If X>b, the opening degree of the first expansion valve (15) is reduced by H%; wherein a<0<A<B<b.

10. The temperature control method according to claim 9, characterized in that: In the case where a≤X≤b, the method further comprises: Acquiring in real time a first temperature measurement value PV1 of the first temperature sensor (111) and a first pressure measurement value PV2 of the first pressure sensor (112); Converting the first pressure measurement value PV2 into a saturation temperature value PV2' according to the pressure-enthalpy diagram; Calculating a difference Y between the saturated temperature value PV2' and the first temperature measurement value PV1; If c≤Y≤d, the opening degree of the first expansion valve (15) remains unchanged; If e≤Y<c, the opening of the first expansion valve (15) increases by P%; If d<Y≤0, the opening degree of the first expansion valve (15) is reduced by Q%.

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