Test fixture for silicon adapter plate detection

By designing a test fixture for silicon adapter plate detection, the problem of difficult positioning and easy breaking of the silicon plate body during detection is solved, and the limit, lifting and indication functions of the silicon plate body are realized, improving the accuracy and efficiency of the detection.

CN119619568AActive Publication Date: 2025-03-14ZHUHAI YIXIN SEMICONDUCTOR CO LTD
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Patent Information

Application Number
CN202411969267.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-30
Publication Date
2025-03-14
Estimated Expiration
2044-12-30

AI Technical Summary

Technical Problem

During the processing process, the silicon adapter plate is prone to breaking or shorting of metal re-wiring layer of the substrate, or between the through holes between the layers and RDL, and the silicon plate body is difficult to position during detection, which is prone to extrusion and fragmentation or edge drops.

Method used

A test fixture for silicon adapter plate detection is designed, including a base, an operating plate, a moving plate, a distance adjustment mechanism, a gate plate, a horizontal and vertical sliding mechanism and a lifting mechanism. Through these structures, the limiting, lifting and indicating functions of the silicon plate body are realized to prevent breakage and edge drops, and the detection position is recorded to avoid position errors.

Benefits of technology

Effectively prevent the silicon plate body from breaking due to V-port, ensure that the edge of the silicon plate body does not fall into the gap, and record the detection position, avoid position errors, and improve the accuracy and efficiency of detection.

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Abstract

The invention relates to the technical field of silicon plate detection, in particular to a test fixture for silicon adapter plate detection, which comprises a base, the upper surface of the base is connected with an operation plate through a rotating mechanism, two sides of the upper surface of the operation plate are respectively provided with a moving plate, and the rear ends of the two moving plates are provided with a distance adjusting mechanism. The surfaces, close to each other, of the two movable plates are fixedly connected with a plurality of grid plates respectively, the grid plates on the two sides are distributed in a staggered mode, the upper surface of the movable plate on one side is connected with a connecting frame through a transverse and longitudinal sliding mechanism, one side surface of the connecting frame is fixedly connected with an upper plate, and the lower surface of the upper plate is connected with a lower plate through a lifting mechanism. The lower surface of a silicon plate body can be stably lifted, the problem that the silicon plate body is broken due to a V-shaped opening formed in the surface of the silicon plate body is effectively solved, the detection position can be effectively recorded, and the problem that the position of a corresponding small plate is misremembered during re-detection after a certain small plate is paused for recording is solved.
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Description

Technical Field

[0001] The present invention relates to the technical field of silicon board detection, and in particular to a test fixture for detecting a silicon adapter board. Background Art

[0002] Silicon interposer, also known as the middle layer or interposer, usually refers to the functional layer of interconnection and pin redistribution between the chip and the packaging substrate. At present, silicon interposers are mainly made of silicon-based materials. Silicon is used as an interposer and TSV (Through Silicon Via) is used as a line interconnection tool to make the integrated system smaller, more power-efficient, and have higher bandwidth. In order to improve production efficiency, each silicon interposer will eventually be processed into multiple circuit boards. In the prior art, a V-groove is cut on the silicon interposer, and then the circuit board is divided into multiple small boards by breaking.

[0003] During the processing of silicon adapter boards, virtual disconnection and shorting of the metal redistribution layer (RDL) on the same layer of the substrate, or virtual disconnection and shorting between the interlayer via (Via) and the RDL, are common. This type of silicon adapter board is difficult to identify during the inspection before assembly, and is very likely to flow into the module assembly production process line, leaving hidden dangers to the reliability of the module product. It is necessary to add a continuity test link before the silicon adapter board is used for assembly, and both open circuit defects and short circuit defects need to be checked through testing.

[0004] Since the silicon plate with V-grooves is difficult to position during testing, it is easy to be squeezed and broken when the fixture is positioned; in addition, since the silicon plate is thin, and there is a gap between the clamping position of the fixture and the table top, the edge of the silicon plate is easy to get stuck in the gap when clamping; and since there are many small boards that need to be tested on each silicon plate, it is easy to forget the position of the small board that has been tested when recording in the middle, which brings inconvenience. Summary of the invention

[0005] The purpose of the present invention is to solve the shortcomings of the background technology and to propose a test fixture for silicon adapter board detection.

[0006] To achieve the above purpose, the technical solution adopted by the present invention is: a test fixture for silicon adapter board detection, including a base, the upper surface of the base is connected to an operating panel through a rotating mechanism, movable plates are respectively arranged on both sides of the upper surface of the operating panel, and a distance adjustment mechanism is arranged at the rear ends of the two movable plates. A plurality of grid plates are respectively fixedly connected to the adjacent sides of the two movable plates, and the grid plates on both sides are staggered. The upper surface of the movable plate on one side is connected to a connecting frame through a horizontal and vertical sliding mechanism, one side surface of the connecting frame is fixedly connected to an upper plate, the lower surface of the upper plate is connected to a lower plate through a lifting mechanism, and the front end of the lower plate is fixedly connected to an indicator frame.

[0007] Preferably, the rotating mechanism includes a raised seat fixedly mounted on the upper surface of the base, a servo motor is fixedly embedded on the upper surface of the raised seat, an output shaft of the servo motor is fixedly connected to a spline shaft, and a spline cylinder is fixedly connected to the lower surface of the operating panel, and the spline cylinder is slidably sleeved on the outer surface of the spline shaft.

[0008] Preferably, the distance adjusting mechanism includes a fixed seat fixedly connected to the back of the operating panel, a screw rod rotatably penetrates the inner side of the fixed seat, one end of the screw rod is fixedly connected to a polygonal block, the rear end of the movable plate is fixedly connected to a distance adjusting plate, the distance adjusting plate is slidably sleeved on the back of the operating panel, and the screw rod thread penetrates the inner side of the operating panel.

[0009] Preferably, a guide plate is fixedly connected to the front end of the movable plate, and the guide plate is slidably sleeved in front of the operating plate.

[0010] Preferably, the transverse and longitudinal sliding mechanism includes a concave frame fixedly connected to the upper surface of the movable plate, two longitudinal rods are fixedly connected to the inner side of the concave frame, and the outer surfaces of the two longitudinal rods are slidably sleeved with a longitudinal sliding block, one side of the longitudinal sliding block is fixedly connected to an L-shaped frame, two transverse rods are fixedly connected to the inner side of the L-shaped frame, and the outer surfaces of the two transverse rods are slidably sleeved with a transverse sliding block, and the rear end of the connecting frame is fixedly connected to the front surface of the transverse sliding block.

[0011] Preferably, a reinforcement plate is fixedly connected to the upper surface of the L-shaped frame.

[0012] Preferably, the lifting mechanism includes a guide rod fixedly connected to the front end of the upper surface of the lower plate, the upper end of the guide rod slides through the inner side of the upper plate, the rear end of the upper surface of the lower plate is rotatably connected to a threaded rod, the upper end of the threaded rod is threaded through the inner side of the upper plate, and the upper end of the threaded rod is fixedly connected to a swivel head.

[0013] Preferably, the lower end of the threaded rod is fixedly connected with a rotating disk, the upper surface of the lower plate is fixedly connected with a limiting sleeve, the rotating disk is rotatably embedded in the inner side of the limiting sleeve, and the threaded rod is rotatably passed through the upper surface of the limiting sleeve.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The present invention places the silicon plate on the upper surface of the grid plate, and then rotates the screw rod to move the distance adjustment plates on both sides closer to each other until the moving plates on both sides are respectively attached to the two sides of the silicon plate body, thereby achieving the limit function of the silicon plate body. Since the grid plates on both sides are staggered, the lower surface of the silicon plate body is ensured to be stably lifted, effectively preventing the silicon plate body from breaking due to the V-shaped opening on the surface;

[0016] 2. In the present invention, since the grid plate is connected to the moving plate, the problem of the edge of the silicon plate falling into the gap between the moving plate and the operating plate will not occur;

[0017] 3. In the present invention, due to the existence of the indicator frame, the detection position can be effectively recorded, which prevents the problem of misremembering the corresponding small plate position when detecting again after pausing the recording at a certain small plate, and plays a better indicating role. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a test fixture for silicon adapter board detection of the present invention;

[0019] Figure 2 This is a schematic diagram of a test fixture for silicon adapter board testing according to the present invention from a bottom view of an operation panel;

[0020] Figure 3 A test fixture for detecting a silicon transfer board according to the present invention Figure 2 Enlarged view of point A in the middle;

[0021] Figure 4 It is a schematic diagram of a rotating mechanism of a test fixture for testing a silicon adapter plate according to the present invention;

[0022] Figure 5 It is a schematic diagram of the horizontal and vertical sliding mechanism of a test fixture for silicon adapter board detection of the present invention;

[0023] Figure 6 A test fixture for detecting a silicon transfer board according to the present invention Figure 5 Enlarged view of point B in the middle;

[0024] Figure 7 A test fixture for detecting a silicon transfer board according to the present invention Figure 5 Enlarged view of point C in the middle;

[0025] Figure 8 It is a schematic diagram of a threaded rod of a test fixture for testing a silicon adapter board according to the present invention;

[0026] Fig. 9 The present invention is a schematic diagram of a test fixture for silicon adapter board detection in use.

[0027] 1. Base; 2. Cushion seat; 3. Servo motor; 4. Spline shaft; 5. Spline cylinder; 6. Operation panel; 7. Moving plate; 8. Grid plate; 9. Guide plate; 10. Distance adjustment plate; 11. Fixed seat; 12. Screw rod; 13. Polygonal block; 14. Concave frame; 15. Longitudinal rod; 16. Longitudinal slider; 17. Transverse rod; 18. Reinforcement plate; 19. L-shaped frame; 20. Transverse slider; 21. Connecting frame; 22. Upper plate; 23. Lower plate; 24. Indicator frame; 25. Guide rod; 26. Threaded rod; 27. Screw head; 28. Limit sleeve; 29. ​​Rotating disk; 30. Silicon plate; 31. V-mouth. DETAILED DESCRIPTION

[0028] The following description is used to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are only examples, and those skilled in the art may think of other obvious variations.

[0029] like Figure 1-Figure 9 A test fixture for silicon adapter board detection is shown, including a base 1, the upper surface of the base 1 is connected to an operating plate 6 through a rotating mechanism, movable plates 7 are respectively arranged on both sides of the upper surface of the operating plate 6, and distance adjustment mechanisms are arranged at the rear ends of the two movable plates 7. The adjacent sides of the two movable plates 7 are respectively fixedly connected with a plurality of grid plates 8, and the grid plates 8 on both sides are staggered. The staggered distribution design can make the silicon plate body 30 still be supported in the largest possible area when placed, the upper surface of the movable plate 7 on one side is connected to a connecting frame 21 through a horizontal and vertical sliding mechanism, and one side surface of the connecting frame 21 is fixedly connected to an upper plate 22, the lower surface of the upper plate 22 is connected to a lower plate 23 through a lifting mechanism, and the front end of the lower plate 23 is fixedly connected to an indicator frame 24.

[0030] The rotating mechanism includes a raised seat 2 fixedly mounted on the upper surface of the base 1, a servo motor 3 fixedly embedded on the upper surface of the raised seat 2, a spline shaft 4 fixedly connected to the output shaft of the servo motor 3, a spline cylinder 5 fixedly connected to the lower surface of the operating panel 6, and the spline cylinder 5 slidably sleeved on the outer surface of the spline shaft 4. This part of the design facilitates the disassembly and maintenance of the operating panel 6. By lifting the operating panel 6, the spline cylinder 5 can be separated from the surface of the spline shaft 4, which is convenient for operation. The servo motor 3 can control the rotation of the operating panel 6, which is convenient for replacing the edge to continue the detection after detecting one side of the silicon plate body 30.

[0031] The distance adjustment mechanism includes a fixed seat 11 fixedly connected to the back of the operating plate 6, a screw rod 12 is rotatably penetrated inside the fixed seat 11, one end of the screw rod 12 is fixedly connected to a polygonal block 13, and a distance adjustment plate 10 is fixedly connected to the rear end of the movable plate 7, the distance adjustment plate 10 is slidably sleeved behind the operating plate 6, and the screw rod 12 is threadedly penetrated inside the operating plate 6. The polygonal block 13 is convenient for the user to rotate the screw rod 12, and the threads on the surface of the screw rod 12 are bilaterally symmetrical, and when rotating, the two distance adjustment plates 10 will move closer to or farther from each other.

[0032] The front end of the moving plate 7 is fixedly connected with a guide plate 9, and the guide plate 9 is slidably sleeved in front of the operating plate 6. The guide plate 9 is used to improve the stability of the moving plate 7 when it moves.

[0033] The horizontal and vertical sliding mechanism includes a concave frame 14 fixedly connected to the upper surface of the moving plate 7, two longitudinal rods 15 are fixedly connected to the inner side of the concave frame 14, and the outer surfaces of the two longitudinal rods 15 are slidably sleeved with a longitudinal slider 16, one side of the longitudinal slider 16 is fixedly connected to an L-shaped frame 19, and two transverse rods 17 are fixedly connected to the inner side of the L-shaped frame 19, and the outer surfaces of the two transverse rods 17 are slidably sleeved with a transverse slider 20, and the rear end of the connecting frame 21 is fixedly connected to the front surface of the transverse slider 20. When the indicator frame 24 moves forward and backward, the longitudinal slider 16 will slide forward and backward along the surface of the longitudinal rod 15, and when the indicator frame 24 moves horizontally, the transverse slider 20 moves horizontally along the surface of the transverse rod 17.

[0034] A reinforcing plate 18 is fixedly connected to the upper surface of the L-shaped frame 19 , and the reinforcing plate 18 is used to enhance the strength of the L-shaped frame 19 to prevent the L-shaped frame 19 from being deformed due to excessive overturning moment.

[0035] The lifting mechanism includes a guide rod 25 fixedly connected to the front end of the upper surface of the lower plate 23, the upper end of the guide rod 25 slides through the inner side of the upper plate 22, and a threaded rod 26 is rotatably connected to the rear end of the upper surface of the lower plate 23. The upper end of the threaded rod 26 is threaded through the inner side of the upper plate 22, and a screw head 27 is fixedly connected to the upper end of the threaded rod 26. The screw head 27 facilitates the user to rotate the threaded rod 26, and the guide rod 25 is used to improve the stability of the lower plate 23 when it moves up and down.

[0036] The lower end of the threaded rod 26 is fixedly connected with a rotating disk 29, and the upper surface of the lower plate 23 is fixedly connected with a limiting sleeve 28, the rotating disk 29 is rotatably embedded in the inner side of the limiting sleeve 28, and the threaded rod 26 rotates through the upper surface of the limiting sleeve 28. The limiting sleeve 28 plays a limiting role, so that the threaded rod 26 can rotate relative to the lower plate 23, and the lower end of the threaded rod 26 will not separate from the surface of the lower plate 23.

[0037] When in use, the silicon plate body 30 is placed on the upper surface of the grid plate 8. Then, by rotating the screw rod 12, the distance adjustment plates 10 on both sides are moved closer to each other until the movable plates 7 on both sides are respectively attached to the two side edges of the silicon plate body 30, thereby achieving the limiting function of the silicon plate body 30. Since the grid plates 8 on both sides are staggered, it is ensured that the lower surface of the silicon plate body 30 is stably supported, and the silicon plate body 30 is effectively prevented from breaking due to the V-shaped opening 31 on the surface. At the same time, because the grid plate 8 is connected to the movable plate 7, the edge of the silicon plate body 30 will not fall into the gap between the movable plate 7 and the operating plate 6.

[0038] During the detection process, since the silicon board body 30 is composed of a number of small boards distributed in an array, each small board needs to be detected step by step during the detection. During the detection, the indicator frame 24 is moved accordingly to the top of the small board to be detected, and the detection connector is passed through the indicator frame 24 to perform circuit detection on the small board. After the detection is completed, the adjacent small boards are detected one by one by moving horizontally or forward and backward. During this process, due to the existence of the indicator frame 24, the detection position can be effectively recorded to prevent the problem of pausing and recording at a certain small board and remembering the wrong position of the corresponding small board when detecting again, which plays a good indicating role.

[0039] The user rotates the screw head 27 to rotate the threaded rod 26, thereby causing the lower plate 23 to approach or move relative to the upper plate 22, so as to change the distance between the indicator frame 24 and the silicon plate body 30. Without scratching the surface of the silicon plate body 30, the user can get as close to the surface of the silicon plate body 30 as possible, so that the user can pass the detection connector through the indicator frame 24 to detect the small board, thereby bringing convenience to the detection.

[0040] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only describe the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. A test fixture for testing a silicon adapter plate, comprising a base (1), characterized in that: The upper surface of the base (1) is connected to an operating plate (6) via a rotating mechanism, movable plates (7) are respectively arranged on both sides of the upper surface of the operating plate (6), and a distance adjustment mechanism is arranged at the rear ends of the two movable plates (7). A plurality of grid plates (8) are respectively fixedly connected to the adjacent sides of the two movable plates (7), and the grid plates (8) on both sides are staggered. The upper surface of one side of the movable plate (7) is connected to a connecting frame (21) via a horizontal and vertical sliding mechanism, and one side surface of the connecting frame (21) is fixedly connected to an upper plate (22), and the lower surface of the upper plate (22) is connected to a lower plate (23) via a lifting mechanism, and the front end of the lower plate (23) is fixedly connected to an indicating frame (24).

2. A test fixture for silicon adapter board detection according to claim 1, characterized in that: The rotating mechanism comprises a raised seat (2) fixedly mounted on the upper surface of the base (1); a servo motor (3) is fixedly embedded on the upper surface of the raised seat (2); the output shaft of the servo motor (3) is fixedly connected to a spline shaft (4); the lower surface of the operating panel (6) is fixedly connected to a spline cylinder (5); and the spline cylinder (5) is slidably sleeved on the outer surface of the spline shaft (4).

3. A test fixture for silicon adapter board detection according to claim 1, characterized in that: The pitch adjustment mechanism comprises a fixed seat (11) fixedly connected to the rear side of the operating plate (6), a screw rod (12) rotatably penetrates the inner side of the fixed seat (11), one end of the screw rod (12) is fixedly connected to a polygonal block (13), a rear end of the movable plate (7) is fixedly connected to a pitch adjustment plate (10), the pitch adjustment plate (10) is slidably sleeved on the rear side of the operating plate (6), and the screw rod (12) threadably penetrates the inner side of the operating plate (6).

4. A test fixture for silicon adapter board detection according to claim 1, characterized in that: The front end of the movable plate (7) is fixedly connected with a guide plate (9), and the guide plate (9) is slidably sleeved in front of the operating plate (6).

5. The test fixture for silicon adapter board detection according to claim 1, characterized in that: The transverse and longitudinal sliding mechanism comprises a concave frame (14) fixedly connected to the upper surface of the movable plate (7), two longitudinal rods (15) being fixedly connected to the inner side of the concave frame (14), the outer surfaces of the two longitudinal rods (15) being slidably sleeved with a longitudinal sliding block (16), one side of the longitudinal sliding block (16) being fixedly connected to an L-shaped frame (19), the inner side of the L-shaped frame (19) being fixedly connected to two transverse rods (17), the outer surfaces of the two transverse rods (17) being slidably sleeved with a transverse sliding block (20), and the rear end of the connecting frame (21) being fixedly connected to the front surface of the transverse sliding block (20).

6. A test fixture for silicon adapter board testing according to claim 5, characterized in that: A reinforcing plate (18) is fixedly connected to the upper surface of the L-shaped frame (19).

7. A test fixture for silicon adapter board detection according to claim 1, characterized in that: The lifting mechanism comprises a guide rod (25) fixedly connected to the front end of the upper surface of the lower plate (23), the upper end of the guide rod (25) slides through the inner side of the upper plate (22), and a threaded rod (26) is rotatably connected to the rear end of the upper surface of the lower plate (23), the upper end of the threaded rod (26) is threadedly passed through the inner side of the upper plate (22), and the upper end of the threaded rod (26) is fixedly connected to a swivel head (27).

8. The test fixture for silicon adapter board detection according to claim 7, characterized in that: The lower end of the threaded rod (26) is fixedly connected to a rotating disk (29), the upper surface of the lower plate (23) is fixedly connected to a limiting sleeve (28), the rotating disk (29) is rotatably embedded in the inner side of the limiting sleeve (28), and the threaded rod (26) is rotatably passed through the upper surface of the limiting sleeve (28).

Citation Information

Patent Citations

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    CN102445566A

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    CN109581173A

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