Mask plate, mask device and display panel

Abstract

The invention provides a mask plate, a mask device and a display panel. The mask plate comprises a body part and a shielding part. A mask opening is defined by the body part, and the mask opening is used for light intensity of a first preset value to penetrate through. The shielding part is connected to the body part and located on the peripheral side of the mask opening, the shielding part comprises a plurality of first parts and a plurality of second parts, the first parts and the second parts are alternately arranged, the transmittance of the first parts is larger than that of the second parts, and the shielding part is used for transmitting light with the second preset value intensity in the direction away from the mask opening. The absolute value of the difference value between the first preset value light intensity and the second preset value light intensity is gradually increased. The display effect of the display panel can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of display devices, and in particular to a mask plate, a mask device, and a display panel. Background Art

[0002] Flat display panels such as Liquid Crystal Display (LCD) panels, Organic Light Emitting Display (OLED) panels and display panels using Light Emitting Diode (LED) devices are widely used in various consumer electronic products such as mobile phones, televisions, personal digital assistants, digital cameras, laptops, desktop computers, etc. due to their advantages such as high image quality, power saving, thin body and wide application range, becoming the mainstream in display devices. Summary of the invention

[0003] The embodiments of the present application provide a mask plate, a mask device, and a display panel, which can improve the display effect of the display panel.

[0004] In a first aspect, an embodiment of the present application provides a mask plate, which includes a main body and a shielding portion. The main body encloses a mask opening, and the mask opening is used to transmit a first predetermined value of light intensity. The shielding portion is connected to the main body and is located on the peripheral side of the mask opening. The shielding portion includes a plurality of first parts and a plurality of second parts, and the first parts and the second parts are alternately arranged. The transmittance of the first part is greater than the transmittance of the second part. The shielding portion is used to transmit a second predetermined value of light intensity, and the absolute value of the difference between the first predetermined value of light intensity and the second predetermined value of light intensity is increasing along the direction away from the mask opening.

[0005] In some embodiments, the plurality of first portions and the plurality of second portions are alternately arranged along a circumference of the mask opening.

[0006] In some embodiments, when the mask is aligned with the photoresist material, the width of the first portion decreases and the width of the second portion increases in the direction away from the mask opening, and the width direction is the direction in which the first portion and the second portion are arranged side by side.

[0007] In some embodiments, when the mask plate is used to prepare the negative photoresist material, the width of the first portion increases in a direction away from the mask opening, and the width of the second portion decreases in a direction in which the first portion and the second portion are arranged side by side.

[0008] In some embodiments, the first portion and the second portion are alternately arranged along a radial direction of the mask opening, and a plurality of first portions and a plurality of second portions are alternately arranged along a direction away from the mask opening.

[0009] In some embodiments, along a direction away from the mask opening, a width dimension of at least one of the plurality of first portions and the plurality of second portions is in a decreasing trend, and the width direction is a direction in which the first portions and the second portions are arranged side by side.

[0010] In some embodiments, the transmittance of the first part is the same as the transmittance of the mask opening, the width of the first part is smaller than the exposure accuracy of the exposure equipment, the transmittance of the second part is zero, and the width direction is the direction in which the first part and the second part are arranged side by side.

[0011] In some embodiments, the first portion is disposed through the mask.

[0012] In some embodiments, the first portion has a width dimension d, 0 μm<d≤2.5 μm.

[0013] In some embodiments, the transmittance of the first portion is less than the transmittance of the mask opening.

[0014] In some embodiments, along a direction away from the mask opening, an absolute value of a difference between a transmittance of at least one of the plurality of first portions and the plurality of second portions and a transmittance of the mask opening increases.

[0015] In a second aspect, an embodiment of the present application provides a mask device, comprising a frame and a mask plate in any of the above embodiments. The mask plate is arranged on the frame.

[0016] In a third aspect, an embodiment of the present application provides a display panel, the display panel includes a plurality of light-emitting pixels, and the pixel openings of at least some of the light-emitting pixels are formed by the mask device in any of the aforementioned embodiments. The light emission angle of at least some of the light-emitting pixels is greater than 10 degrees.

[0017] In some embodiments, the display panel also includes a base substrate and a pixel defining portion, the pixel defining portion and the light-emitting pixel are both located on one side of the base substrate, the orthographic projection of the pixel defining portion on the base substrate encloses an orthographic projection of the pixel opening on the base substrate; the pixel defining portion includes a side wall facing the pixel opening and a bottom wall facing the base substrate, the angle between the side wall and the bottom wall is α, 10°≤α≤25°.

[0018] The embodiment of the present application provides a mask plate, a mask device and a display panel. In the process of preparing the pixel definition layer of the display panel, the mask plate controls the area of ​​light irradiation to form a pixel definition part and a pixel opening in the pixel definition layer. The mask opening of the mask plate can be used to prepare the pixel definition part or the pixel opening, and the shielding part is used to prepare the edge of the pixel definition part facing the pixel opening. Since the absolute value of the difference between the first predetermined value light intensity and the second predetermined value light intensity is increasing, the light intensity of the area closer to the mask opening in the shielding area of ​​the shielding part is closer to the light intensity of the mask opening area, and the difference between the light intensity of the area farther away from the mask opening in the shielding area of ​​the shielding part and the light intensity of the mask opening area is greater. In the development process, the closer the edge of the pixel definition part is to the mask opening, the more it is developed, and the farther the edge of the pixel definition part is from the mask opening, the less it is developed, so that the edge thickness of the pixel definition part is gradually thinned, and the edge of the prepared pixel definition part is reduced to block the light emitted from the pixel opening, so as to increase the light emission range of the pixel opening, improve the light emission rate of the display panel, and then improve the display effect of the display panel. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solution of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0020] Figure 1 is a structural schematic diagram of a display panel provided in an embodiment of the present application;

[0021] Figure 2 is a structural schematic diagram of a mask plate provided in an embodiment of the present application;

[0022] Figure 3 yes Figure 2 A schematic diagram of an enlarged structure of P;

[0023] Figure 4 yes Figure 2 Another enlarged structural diagram of P in the middle;

[0024] Figure 5 is a structural schematic diagram of another mask plate provided in an embodiment of the present application;

[0025] Figure 6 is a structural schematic diagram of another mask plate provided in an embodiment of the present application;

[0026] Figure 7 yes Figure 6 A schematic diagram of an amplified structure of Q in the middle;

[0027] Figure 8yes Figure 6 Another enlarged structural diagram of the middle Q;

[0028] Fig. 9 yes Figure 6 Another enlarged structural diagram of the middle Q;

[0029] Fig.10 yes Figure 6 Another enlarged structural diagram of the middle Q;

[0030] Fig.11 yes Figure 6 Another schematic diagram of the enlarged structure of the medium Q.

[0031] Marking Description:

[0032] 10. main body; 11. mask opening;

[0033] 20. shielding portion; 21. first portion; 22. second portion;

[0034] 100. Display panel;

[0035] 110, substrate; 120, array layer; 130, light-emitting functional layer; 131, pixel defining layer; 131a, defining portion; 131b, light-emitting opening; 132, light-emitting layer; 140, encapsulation layer; 150, color filter layer; 151, shielding layer; 151a, shielding structure; 151b, filter opening; 152, filter layer;

[0036] X, width direction. DETAILED DESCRIPTION

[0037] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating the examples of the present application.

[0038] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0039] In the existing display panel, the pixel opening in the pixel definition layer is used to transmit light to form a display screen, and the pixel defining portion in the pixel definition layer is used to enclose the pixel opening to avoid light crosstalk in pixel openings of different colors.

[0040] However, the pixel defining portion blocks the pixel opening, causing the light emission angle of the pixel opening to decrease, thereby causing the light emission rate of the display panel to decrease, thereby reducing the display effect.

[0041] Figure 1 It is a structural schematic diagram of a display panel provided in an embodiment of the present application. Figure 2 It is a structural schematic diagram of a mask plate provided in an embodiment of the present application. Figure 3 yes Figure 2 Schematic diagram of an enlarged structure of P.

[0042] In view of this, first of all, please refer to Figures 1 to 3 The embodiment of the present application provides a mask plate, which includes a main body 10 and a shielding part 20. The main body 10 encloses a mask opening 11, and the mask opening 11 is used to transmit a light intensity of a first predetermined value. The shielding part 20 is connected to the main body 10 and is located on the peripheral side of the mask opening 11. The shielding part 20 includes a plurality of first parts 21 and a plurality of second parts 22. The first parts 21 and the second parts 22 are alternately arranged. The transmittance of the first part 21 is greater than the transmittance of the second part 22. The shielding part 20 is used to transmit a light intensity of a second predetermined value. Along the direction away from the mask opening 11, the absolute value of the difference between the first predetermined value light intensity and the second predetermined value light intensity presents an increasing trend.

[0043] Taking the display panel 100 as an OLED display panel as an example, the film layer structure of the display panel 100 may be a base substrate 110 , an array layer 120 , a light-emitting functional layer 130 and an encapsulation layer 140 in sequence.

[0044] In other examples, the film layer structure of the OLED display panel may also be a base substrate 110, an array layer 120, a light-emitting functional layer 130, an encapsulation layer 140, and a color filter layer 150 in sequence, wherein the light-emitting functional layer 130 includes a pixel defining layer 131 and a light-emitting layer 132, the pixel defining layer 131 includes a defining portion 131a and a light-emitting opening 131b, the defining portion 131a encloses a plurality of light-emitting openings 131b, and the light-emitting layer 132 is located in the light-emitting opening 131b. The color filter layer 150 includes a shielding layer 151 and a filter layer 152, the shielding layer 151 includes a shielding structure 151a and a filter opening 151b, the shielding structure 151a encloses a plurality of filter openings 151b, and the filter layer 152 is located in the filter opening 151b. The mask plate can be used to prepare the pixel defining layer 131, and can also be used to prepare the color filter layer 150. Hereinafter, the pixel defining layer 131 and the shielding layer 151 are collectively referred to as a pixel definition layer, the defining portion 131a and the shielding structure 151a are collectively referred to as a pixel defining portion, and the light emitting opening 131b and the filter opening 151b are collectively referred to as a pixel opening.

[0045] Optionally, the mask plate may include a gray-tone mask (GTM) and a half-tone mask (HTM).

[0046] Exemplarily, the main body 10 may be an integral structure, or may be a separate structure composed of a plurality of parts. For example, a plurality of parts enclose a mask opening 11 .

[0047] Optionally, one or more mask openings 11 may be provided on one main body 10. The shapes of the multiple mask openings 11 may be the same, or may be different.

[0048] Optionally, the mask opening 11 may be a through-hole structure, or may be filled with a light-transmitting material.

[0049] In some examples, the main body 10 also includes a light-blocking portion, which encloses a mask opening 11. During the preparation of the pixel definition layer, light is irradiated onto the mask plate, and part of the light is irradiated onto the material layer to be prepared through the mask opening 11, and the other part of the light is blocked by the light-blocking portion. The intensity of the light irradiated onto the material layer can be the same as the intensity of the light before passing through the mask plate, and of course, can also be different. Optionally, the light-blocking portion can be located on the side of the shielding portion 20 that is away from the mask opening 11, and the shielding portion 20 can also be at least part of the light-blocking portion.

[0050] Optionally, the shielding portion 20 and the main body 10 may be an integral structure, or may be a separate structure. For example, the shielding portion 20 and the main body 10 may be fixedly connected by welding, riveting, bonding or other methods.

[0051] The shielding portion 20 is located around the mask opening 11 . Exemplarily, the mask opening 11 may be rectangular, rhombus, circular or other shapes. The shielding portion 20 may be distributed around the mask opening 11 in the shape of the edge of the mask opening 11 .

[0052] Exemplarily, the shapes of the first portion 21 and the second portion 22 may be the same, or may be different.

[0053] Exemplarily, one second portion 22 is disposed between two adjacent first portions 21 , and one first portion 21 is disposed between two adjacent second portions 22 .

[0054] Exemplarily, the shapes of the plurality of first portions 21 may be the same, or may be similar. For example, the shapes of two adjacent first portions 21 are both rectangular, and the area of ​​one first portion 21 is a multiple of the area of ​​the other first portion 21 .

[0055] In some examples, the transmittance can be tested by GB / T2410-2008, ISO 13468-1, etc.

[0056] The second part 22 will block a part of the light or the first part 21 and the second part 22 will both block a part of the light, so that the intensity of light passing through the blocking part 20 is lower than the intensity of light passing through the mask opening 11. The blocking part 20 is used to prepare the edge of the pixel defining part in the pixel definition layer. The light passing through the blocking part 20 is irradiated to the edge of the pixel defining part, so that the edge thickness of the pixel defining part is thinned.

[0057] In some examples, the preparation process of the pixel definition layer may include a photolithography process, which may include processes such as photoresist coating, soft drying, exposure, development, and hard drying. The mask plate in the embodiment of the present application can be used in the exposure process.

[0058] In some examples, the material of the pixel definition layer may include a positive photoresist material and a negative photoresist material. When the positive photoresist undergoes an exposure process, the exposed portion of the positive photoresist softens, and in the development process, the softened portion is dissolved by a developer to form a pixel opening. When the negative photoresist undergoes an exposure process, the exposed portion of the negative photoresist solidifies to form a pixel defining portion, and the unexposed portion is dissolved by a developer in the development process to form a pixel opening. Optionally, the material of the shielding structure in the color filter layer may include a negative photoresist. The material of the pixel defining portion in the pixel definition layer between the array layer and the encapsulation layer may include a positive photoresist. The embodiments of the present application are exemplified below by taking the material of the pixel definition layer as a negative photoresist.

[0059] The absolute value of the difference between the first predetermined light intensity and the second predetermined light intensity may increase in multiples along the direction away from the mask opening 11 , or may increase in a fixed value.

[0060] It can be understood that the difference between the first predetermined light intensity and the second predetermined light intensity can be a positive number or a negative number. When the difference between the first predetermined light intensity and the second predetermined light intensity is a positive number, the light intensity of the second predetermined light intensity in the direction away from the mask opening is gradually reduced; when the difference between the first predetermined light intensity and the second predetermined light intensity is a negative number, the light intensity of the second predetermined light intensity in the direction away from the mask opening is gradually increased.

[0061] Exemplarily, when the mask plate is used to prepare a positive photoresist material, for example, the first predetermined light intensity is 100, and the second predetermined light intensity is 90, 80, 70, 50, 20, . . . in a direction away from the mask opening.

[0062] Exemplarily, when the mask plate is preparing a negative photoresist material, for example, the first predetermined light intensity is 0, and the second predetermined light intensity is 10, 20, 30, 50, 70, 90, ... in a direction away from the mask opening. Optionally, the shielding portion 20 can be adjusted according to pixel openings of different colors.

[0063] The embodiment of the present application provides a mask plate, in the process of preparing the pixel definition layer of the display panel, the mask plate controls the area of ​​light irradiation to form a pixel definition part and a pixel opening in the pixel definition layer. The mask opening 11 of the mask plate can be used to prepare the pixel definition part or the pixel opening, and the shielding part 20 is used to prepare the edge of the pixel definition part facing the pixel opening. Since the absolute value of the difference between the first predetermined value light intensity and the second predetermined value light intensity is increasing, the light intensity of the area closer to the mask opening in the shielding area of ​​the shielding part is closer to the light intensity of the mask opening area, and the difference between the light intensity of the area farther away from the mask opening in the shielding area of ​​the shielding part and the light intensity of the mask opening area is greater. In the development process, the closer the edge of the pixel definition part is to the mask opening, the more it is developed, and the farther the edge of the pixel definition part is from the mask opening, the less it is developed, so that the edge thickness of the pixel definition part is gradually thinned, and the edge of the prepared pixel definition part is reduced to block the light emitted from the pixel opening, so as to increase the light emission range of the pixel opening, improve the light emission rate of the display panel, and then improve the display effect of the display panel.

[0064] Figure 4 yes Figure 1 Schematic diagram of another enlarged structure of P.

[0065] In some optional embodiments, Figures 1 to 4 As shown, multiple first parts 21 and multiple second parts 22 are alternately arranged along the circumference of the mask opening 11 to simplify the arrangement of the first parts 21 and the second parts 22, reduce the difficulty of making the first parts 21 and the second parts 22, and improve the manufacturing accuracy of the first parts 21 and the second parts 22.

[0066] Taking the mask plate as a GTM mask plate as an example, the second portion 22 may be a light shielding structure, the first portion 21 may be a light transmitting structure, and the first portion 21 and the second portion 22 may alternately form a tooth-like structure in the circumferential direction of the mask opening 11 .

[0067] In some optional embodiments, Figure 2 and Figure 3 As shown, when the mask plate is aligned with the photoresist material, the width dimension of the first portion 21 decreases along the direction away from the mask opening 11, and the width dimension of the second portion 22 increases. The width direction X is the direction in which the first portion 21 and the second portion 22 are arranged side by side.

[0068] Exemplarily, the shape of the first portion 21 may be a trapezoid or a triangle, and the end of the first portion 21 having the largest dimension along its own width direction X is located at a side of the first portion 21 close to the mask opening 11 .

[0069] Exemplarily, the shape of the second portion 22 may be a trapezoid or a triangle, and the end of the second portion 22 with the smallest size along its own width direction X is located at a side of the second portion 22 close to the mask opening 11 .

[0070] In these optional embodiments, since the exposed portion of the positive photoresist material will be removed, the width of the first portion 21 is decreasing, so that the light passing through the first portion 21 is gradually reduced in the direction away from the mask opening 11, and the intensity of the light irradiated to the edge of the pixel defining portion in the direction toward the center of the pixel defining portion is gradually weakened, so that the edge of the pixel defining portion is removed less and less in the direction away from the mask opening, resulting in the edge thickness of the pixel defining portion gradually thickening in the direction away from the mask opening, thereby improving the light output angle of the pixel opening. At the same time, by setting the second portion 22 as described above, it is beneficial to improve the thickness smoothness of the edge of the pixel defining portion.

[0071] In some optional embodiments, Figure 2 and Figure 4 As shown, when the mask plate is used to prepare negative photoresist material, the width of the first portion 21 increases and the width of the second portion 22 decreases in the direction away from the mask opening 11. The width direction is the direction in which the first portion 21 and the second portion 22 are arranged side by side.

[0072] Exemplarily, the shape of the first portion 21 may be a trapezoid or a triangle, and the end of the first portion 21 with the smallest size along its own width direction X is located on a side of the first portion 21 close to the mask opening 11 .

[0073] Exemplarily, the shape of the second portion 22 may be a trapezoid or a triangle, and the end of the second portion 22 having the largest dimension along its own width direction X is located at a side of the second portion 22 close to the mask opening 11 .

[0074] In these optional embodiments, since the exposed portion of the negative photoresist material will be retained, the size of the first portion 21 along the first width direction X is increasing, so that the light passing through the first portion 21 gradually increases in the direction away from the mask opening 11, and then the intensity of the light irradiated to the edge of the pixel defining portion in the direction toward the center of the pixel defining portion gradually increases, so that the edge of the pixel defining portion is retained more and more in the direction away from the mask opening 11, resulting in the edge thickness of the pixel defining portion gradually thickening in the direction away from the mask opening 11, thereby improving the light output angle of the pixel opening. At the same time, by setting the second portion 22 as described above, it is beneficial to improve the thickness smoothness of the edge of the pixel defining portion.

[0075] Figure 5 This is a schematic diagram of the structure of another mask plate provided in an embodiment of the present application. Figure 6 This is a schematic diagram of the structure of another mask plate provided in an embodiment of the present application. Figure 7 yes Figure 6 Schematic diagram of an amplified structure of Q.

[0076] In some optional embodiments, Figures 5 to 7 As shown, the first portion 21 and the second portion 22 are alternately arranged along the radial direction of the mask opening 11 .

[0077] Optionally, the first portion 21 may be a ring-shaped structure, for example, a closed ring-shaped structure or the first portion 21 may be divided into a plurality of sub-portions, and the plurality of sub-portions are arranged around the mask opening 11 .

[0078] Optionally, the second portion 22 may be a ring-shaped structure. Figure 6 The closed ring structure shown or Figure 5 The second portion 22 is shown to be divided into a plurality of sub-portions, and the plurality of sub-portions are arranged around the mask opening 11 .

[0079] Exemplarily, the plurality of first portions 21 and the plurality of second portions 22 may be in a plurality of ring structures.

[0080] In some examples, the mask plate is a GTM mask plate, for example, the first portion 21 can be an annular through structure, the first portion 21 penetrates the mask plate, the second portion 22 is a light shielding structure, a gap is set between two adjacent second portions 22, and the gap forms the first portion 21. Optionally, the plurality of second portions 22 can be connected to the body portion 10, for example, each second portion 22 is provided with a connecting portion, and the connecting portion is connected to the body portion 10.

[0081] In these optional embodiments, the above-mentioned configuration is helpful to improve the edge thickness accuracy of the pixel defining portion, so as to increase the light emission range of the pixel opening, thereby improving the display effect of the display panel.

[0082] In some optional embodiments, Figure 6 and Figure 7 As shown, the transmittance of the first part 21 is the same as the transmittance of the mask opening 11, the width of the first part 21 is smaller than the exposure accuracy of the exposure equipment, the transmittance of the second part 22 is zero, and the width direction X is the direction in which the first part 21 and the second part 22 are arranged side by side.

[0083] It can be understood that when the mask plate is a GTM mask plate, it is necessary to use an exposure device to illuminate the mask plate when preparing the pixel definition layer. The transmittance of the second part 22 is zero, that is, the second part 22 can be a shading structure, and the exposure equipment has exposure accuracy. When the size of the first part 21 along its own width direction X is smaller than the exposure accuracy, when the light emitted by the exposure equipment is irradiated onto multiple first parts 21, the light passing through the first parts 21 will be diffracted, so that the intensity of light passing through the multiple first parts 21 is lower than the intensity of light passing through the mask opening 11, and then when the light passing through the first part 21 is irradiated on the material layer, a part of the material layer in the thickness direction will be solidified, and another part of the material layer in the thickness direction will be dissolved by the developer, so that the edge thickness of the pixel defining part is reduced, the pixel defining part reduces the shielding of the pixel opening, and the light output range of the pixel opening is increased.

[0084] In some examples, the first portion 21 is disposed throughout the mask plate to reduce the difficulty of manufacturing the first portion 21 , so that the first portion 21 and the second portion 22 can be manufactured together to improve the manufacturing efficiency of the mask plate.

[0085] Optionally, the mask opening 11 is provided through the mask plate.

[0086] In some examples, the width dimension of the first portion 21 is d, 0μm<d≤2.5μm. For example, the width dimension of the first portion 21 is 0.1μm, 0.2μm, 0.5μm, 0.8μm, 1μm, 1.1μm, 1.3μm, 1.6μm, 1.9μm, 2.2μm or 2.5μm.

[0087] Optionally, the width of the first portion 21 and the width of the second portion 22 may be the same or different. For example, the widths of the adjacent first portion 21 and the second portion 22 may be the same.

[0088] Figure 8 yes Figure 6 Another schematic diagram of the enlarged structure of the medium Q. Fig. 9 yes Figure 6 Another schematic diagram of the enlarged structure of the medium Q.

[0089] In some optional embodiments, Figure 6 , Figure 8 and Fig. 9 As shown, along the direction away from the mask opening 11 , the width dimension of at least one of the plurality of first portions 21 and the plurality of second portions 22 is in a decreasing trend, and the width direction is the direction in which the first portions and the second portions are arranged side by side.

[0090] In combination with the above content, when the first portion 21 and the second portion 22 are both arranged around the mask opening 11, as Figure 8 As shown, the widths of the plurality of first portions 21 decrease gradually in a direction away from the mask opening 11 .

[0091] In some examples, when the first portion 21 and the second portion 22 are both disposed around the mask opening 11, as Fig. 9 As shown, the widths of the plurality of second portions 22 decrease gradually in a direction away from the mask opening 11 .

[0092] In some examples, when both the first portion 21 and the second portion 22 are arranged around the mask opening 11, the widths of the first portion 21 and the second portion 22 decrease in a direction away from the mask opening 11. Exemplarily, the first second portion 22 is located close to the mask opening 11, and the first second portion 22, the first first portion 21, the second second portion 22, the second first portion 21, ... the Nth second portion 22, and the Nth first portion 21 are located in sequence in a direction away from the mask opening 11; the width of the first second portion 22 is d21, the width of the first first portion 21 is d11, the width of the second second portion 22 is d22, the width of the second first portion 21 is d12, ... the width of the Nth second portion 22 is d2n, and the width of the Nth first portion 21 is d1n, d21>d11>d22>d12>……>d2n>d1n.

[0093] It can be understood that the GTM mask plate needs to be irradiated by an exposure device, and the shielding part 20 of the GTM mask plate controls the second predetermined value of light intensity by means of light diffraction. In the embodiment of the present application, the above-mentioned setting is used to make the light diffracted through the first part 21 and irradiated on the edge of the pixel defining part. The thickness of the edge of the pixel defining part will have different degrees of solidification in multiple areas, so that the thickness of the pixel defining part will have different thickness values ​​of solidification in multiple areas, thereby further slowing down the thickness change of the pixel defining part, thereby improving the light-emitting angle of the pixel opening and improving the light output brightness of the display panel.

[0094] In some optional embodiments, the transmittance of the first portion 21 is less than the transmittance of the mask opening 11, further reducing the second predetermined value of light intensity transmitted through the shielding portion 20 to reduce the edge thickness of the prepared pixel defining portion.

[0095] In some examples, the mask is an HTM mask, and the transmittance of the mask opening 11 may be greater than the transmittance of the first portion 21 and greater than the transmittance of the second portion 22 .

[0096] Fig.10 yes Figure 6 Another schematic diagram of the enlarged structure of the medium Q. Fig.11 yes Figure 6 Another schematic diagram of the enlarged structure of the medium Q.

[0097] In some optional embodiments, Fig.10 and Fig.11 As shown, along the direction away from the mask opening 11 , the absolute value of the difference between the transmittance of at least one of the plurality of first portions 21 and the plurality of second portions 22 and the transmittance of the mask opening 11 increases.

[0098] In combination with the foregoing, the first portion 21 and the second portion 22 may both be disposed around the mask opening 11. In some examples, such as Fig.10 As shown in FIG. 1 , the absolute value of the difference between the transmittance of the plurality of first portions 21 and the transmittance of the mask opening 11 increases in a direction away from the mask opening 11. In other examples, such as Fig.11As shown, the absolute value of the difference between the transmittance of the plurality of second portions 22 and the transmittance of the mask opening 11 increases in a direction away from the mask opening 11. In some other examples, the absolute value of the difference between the transmittance of the first portion 21 and the transmittance of the mask opening 11 and the absolute value of the difference between the transmittance of the second portion 22 and the transmittance of the mask opening 11 both increase in a direction away from the mask opening 11. Exemplarily, the first second part 22 is the one close to the mask opening 11, and along the direction away from the mask opening 11, there are the first second part 22, the first first part 21, the second second part 22, the second first part 21...the Nth second part 22 and the Nth first part 21; the absolute value of the difference between the transmittance of the first second part 22 and the transmittance of the mask opening 11 is T21, the absolute value of the difference between the transmittance of the first first part 21 and the transmittance of the mask opening 11 is T11, the absolute value of the difference between the transmittance of the second second part 22 and the transmittance of the mask opening 11 is T22, the absolute value of the difference between the transmittance of the second first part 21 and the transmittance of the mask opening 11 is T12...the absolute value of the difference between the transmittance of the Nth second part 22 and the transmittance of the mask opening 11 is T2n, and the absolute value of the difference between the transmittance of the Nth first part 21 and the transmittance of the mask opening 11 is T1n. T21>T11>T22>T12>……>T2n>T1n.

[0099] It can be understood that when the light emitted by the exposure equipment is irradiated on the shielding part 20 of the HTM mask plate, the light will pass through the first part 21 and the second part 22 with different transmittances and irradiate on the edge of the pixel defining part. The thickness of multiple areas at the edge of the pixel defining part will have different degrees of solidification, so that the thickness of multiple areas of the pixel defining part will have different thickness values ​​of solidification, thereby further slowing down the thickness change of the pixel defining part, increasing the light-emitting angle of the pixel opening, and increasing the light output brightness of the display panel.

[0100] In a second aspect, an embodiment of the present application provides a mask device, comprising a frame and a mask plate in any of the above embodiments. The mask plate is arranged on the frame.

[0101] It should be noted that the mask device provided in the embodiment of the present application has the beneficial effects of the mask plate in any of the aforementioned embodiments. For specific contents, please refer to the aforementioned description of the beneficial effects of the mask device, and the embodiments of the present application will not be repeated here. Although the embodiments disclosed in the present application are as above, the contents described are only embodiments adopted to facilitate the understanding of the present application and are not intended to limit the present application. Any technician in the technical field to which the present application belongs can make any modifications and changes in the form and details of the implementation without departing from the spirit and scope disclosed in the present application, but the scope of protection of the present application shall still be based on the scope defined in the attached claims.

[0102] Thirdly, Figure 1 As shown, an embodiment of the present application provides a display panel, the display panel includes a plurality of light-emitting pixels. The pixel openings of at least some of the light-emitting pixels are formed by the mask device in any of the aforementioned embodiments. The light emission angle of at least some of the light-emitting pixels is greater than 10 degrees.

[0103] In some examples, the display panel includes a plurality of light-emitting pixels, and the light emission angle of a portion of the light-emitting pixels is greater than 30 degrees. For example, the display panel includes a plurality of red light-emitting pixels, a plurality of blue light-emitting pixels, and a plurality of green light-emitting pixels, wherein the light emission angles of the plurality of red light-emitting pixels are all greater than 10 degrees. Of course, the light emission angles of light-emitting pixels of other colors may also be greater than 10 degrees. The "light emission angle" here may refer to the light emission angle emitted from the display panel to the outside world, or may refer to the light emission angle emitted by the light-emitting layer in the display panel. In other examples, the light emission angles of all light-emitting pixels in the display panel are greater than 10 degrees.

[0104] It can be understood that the mask device in any of the aforementioned embodiments can prepare pixel openings of luminous pixels of different colors and / or different areas (e.g., the middle area and edge area of ​​the display panel) on the display panel, increase the light output angle of the corresponding pixel opening, reduce the possibility of color deviation of the display panel, and improve the display effect of the display panel. In some optional embodiments, the display panel also includes a substrate and a pixel defining portion, the pixel defining portion and the luminous pixel are both located on one side of the substrate, and the orthographic projection of the pixel defining portion on the substrate substrate encloses the orthographic projection of the pixel opening on the substrate; the pixel defining portion includes a side wall facing the side of the pixel opening and a bottom wall facing the side of the substrate, and the angle between the side wall and the bottom wall is α, 10°≤α≤25°.

[0105] As an example, the pixel defining portion and the light-emitting pixel are both located on the same side of the substrate, and the pixel defining portion can be enclosed to form a pixel opening, for example, the pixel defining portion is a defining portion, and the pixel opening is a light-emitting opening. Alternatively, the pixel defining portion is a shielding structure, and the pixel opening is a filter opening. The embodiment of the present application is illustrated by taking the pixel defining portion as a shielding structure and the pixel opening as a filter opening. The shielding structure is prepared by a mask device, and the angle between the side wall and the bottom wall of the shielding structure is α, 10°≤α≤25°. For example, the angle between the side wall and the bottom wall of the shielding structure is 10°, 11°, 12°, 13°, 15°, 17°, 18°, 19°, 20°, 21°, 22°, 23°, 24° or 25°. Of course, the angle between the side wall and the bottom wall of the defining portion can be the same as the angle between the side wall and the bottom wall of the shielding structure.

[0106] The above-mentioned configuration of the embodiment of the present application is helpful to reduce the taper angle of the pixel defining portion, increase the light-emitting range of the pixel opening, and increase the application range of the display panel.

[0107] The above is only a specific implementation of the present application. Those skilled in the art can clearly understand that for the convenience and simplicity of description, the replacement of other connection methods described above can refer to the corresponding process in the aforementioned method embodiment, and will not be repeated here. It should be understood that the protection scope of the present application is not limited to this. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in this application, and these modifications or replacements should be included in the protection scope of the present application.

Claims

1. A mask plate, characterized in that: include: The main body is enclosed to form a mask opening, and the mask opening is used to transmit a light intensity of a first predetermined value; A shielding portion is connected to the main body and is located on the peripheral side of the mask opening. The shielding portion includes a plurality of first parts and a plurality of second parts. The first parts and the second parts are alternately arranged. The transmittance of the first parts is greater than the transmittance of the second parts. The shielding portion is used to transmit a second predetermined value of light intensity. Along the direction away from the mask opening, the absolute value of the difference between the first predetermined value of light intensity and the second predetermined value of light intensity presents an increasing trend.

2. The mask plate according to claim 1, characterized in that: The plurality of first portions and the plurality of second portions are alternately arranged along a circumferential direction of the mask opening.

3. The mask plate according to claim 2, characterized in that: When the mask plate is aligned with the photoresist material, the width of the first part decreases along the direction away from the mask opening, and the width of the second part increases. The width direction is the direction in which the first part and the second part are arranged side by side.

4. The mask plate according to claim 2, characterized in that: When the mask plate is used to prepare negative photoresist material, the width of the first part increases and the width of the second part decreases in the direction away from the mask opening. The width direction is the direction in which the first part and the second part are arranged side by side.

5. The mask plate according to claim 1, characterized in that: The first part and the second part are alternately arranged along the radial direction of the mask opening; Preferably, along a direction away from the mask opening, a width dimension of at least one of the plurality of first portions and the plurality of second portions presents a decreasing trend, and the width direction is a direction in which the first portions and the second portions are arranged side by side.

6. The mask plate according to claim 1, characterized in that: The transmittance of the first portion is the same as the transmittance of the mask opening, the width of the first portion is smaller than the exposure accuracy of the exposure device, the transmittance of the second portion is zero, and the width direction is the direction in which the first portion and the second portion are arranged side by side; Preferably, the first portion is arranged through the mask plate; Preferably, the width dimension of the first portion is d, 0 μm<d≤2.5 μm.

7. The mask plate according to claim 1, characterized in that: The transmittance of the first portion is less than the transmittance of the mask opening; Preferably, along a direction away from the mask opening, an absolute value of a difference between a transmittance of at least one of the plurality of first portions and the plurality of second portions and a transmittance of the mask opening presents an increasing trend.

8. A mask device, characterized in that: include: frame; The mask plate according to any one of claims 1 to 7 is arranged on the frame.

9. A display panel, characterized in that: It comprises a plurality of light-emitting pixels, wherein pixel openings of at least some of the light-emitting pixels are formed by the mask device according to claim 8, and the light emission angle of at least some of the light-emitting pixels is greater than 10 degrees.

10. The display panel according to claim 9, characterized in that: The display panel also includes a base substrate and a pixel defining portion, the pixel defining portion and the light-emitting pixel are both located on one side of the base substrate, the pixel defining portion is enclosed on the base substrate as an orthographic projection of the pixel opening to form an orthographic projection of the pixel opening on the base substrate; the pixel defining portion includes a side wall facing the side of the pixel opening and a bottom wall facing the side of the base substrate, the angle between the side wall and the bottom wall is α, 10°≤α≤25°.

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