Magnetic suspension rotor for rapid annealing equipment

Abstract

The invention discloses a magnetic suspension rotor for rapid annealing equipment, which belongs to the technical field of semiconductor manufacturing processes, and improves the rotation stability and heat conduction uniformity of the magnetic suspension rotor by changing the structure of the magnetic suspension rotor and increasing rectangular grooves and positioning surfaces. The contact area of the magnetic suspension rotor and the bottom of the supporting ring is increased, so that the wafer heat conduction uniformity is improved, and the wafer surface film thickness uniformity, stability and repeatability in the technological process are improved. The rotor structure is used for rapid annealing equipment, solves the problems of uneven heat conduction temperature and the like in an existing rotor structure, improves the stability and reliability of a system, prolongs the service life of the system, and improves the uniformity, stability and repeatability of film thickness.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor manufacturing process, and in particular relates to a magnetic suspension rotor used for rapid annealing equipment. Background Art

[0002] Rapid annealing is an important heat treatment process in the semiconductor manufacturing process. It usually heats and cools the semiconductor wafer in a short time to improve the physical and electrical properties of the material. Rapid annealing is a process method that heats the entire silicon wafer to a temperature range of 400~1300℃ in a very short time; since the rapid heat treatment time is short, it is very important to ensure the uniformity of the heat treatment of the object to be processed.

[0003] The rotors in traditional rapid annealing equipment generally use mechanical bearings or air-floating support structures. However, in high-temperature environments, mechanical wear, friction, and uneven temperature can easily affect the processing quality of wafers and even cause equipment failure. To this end, a rotor design based on magnetic levitation technology is proposed, which can achieve high-precision rotation without contact, improving the reliability and processing quality of the equipment.

[0004] In the existing technical solution, under the action of the magnetic field, the stator drives the rotor, and the rotor is suspended and rotates smoothly, with a maximum speed of 320rpm. Figure 1 The magnetic levitation system shown is composed of a stator 1, a magnetic levitation rotor 2, and a sensor 3; the rotor is mainly composed of four cylinders 101 that contact a support ring 5, and a clamping pin 4 clamps the support ring 5. An edge ring 7 is installed on the support ring 5, and a 12-inch silicon wafer 6 falls on the center of the edge ring 7.

[0005] In the existing technical solution, in the spike process of the rapid thermal processing furnace (RTP), the rapid cold and hot will cause wafer warping, resulting in uneven load and heating; the current magnetic levitation rotor structure has uneven heating, which affects the process results. Summary of the invention

[0006] Based on the technical problems existing in the prior art, the present invention provides a magnetic levitation rotor for rapid annealing equipment to solve the problems in the prior art solutions such as mechanical wear, friction and temperature unevenness affecting wafer quality and equipment failure in a high temperature environment.

[0007] According to the technical solution of the present invention, the present invention provides a magnetic levitation rotor for rapid annealing equipment, which improves the rotor rotation stability and heat conduction uniformity by changing the rotor structure, adding rectangular grooves and positioning surfaces; and increases the contact area between the magnetic levitation rotor and the bottom of the support ring, thereby improving the thermal conductivity uniformity of the wafer.

[0008] In one embodiment, the magnetic suspension rotor is an annular cylinder, and 36 circular holes of the same diameter are evenly arranged on the upper circumference of the magnetic suspension rotor. The diameter of the circular hole is any length of 20mm-35mm. The diameter of the circular hole is 27mm.

[0009] In one embodiment, 24 teeth with the same spacing are arranged in the circumferential direction of the boss, and the teeth are above the circular hole. The material of the magnetic suspension rotor is a material with high temperature resistance and low thermal expansion coefficient.

[0010] In one embodiment, a rectangular groove is provided on the inner wall of the magnetic suspension rotor, and the rectangular groove is arranged above the circular hole and connected to the circular hole through a support ring. Four O-rings are evenly installed in the rectangular groove, and the four O-rings are transitionally matched with a support ring. The positioning surface supports the O-ring to block the support ring from moving downward. The shape of the boss is cylindrical.

[0011] Compared with the prior art, the beneficial technical effects of the present invention are as follows: 1. The present invention provides a magnetically suspended rotor design for rapid annealing equipment, which can ensure stable suspension and efficient rotation of the rotor during the annealing process. Precise control: The magnetically suspended rotor can provide high-precision rotational motion to ensure better uniformity of the wafer during the processing process, thereby improving product quality and pass rate. The rotor of the present invention has 24 teeth, which has the advantages of providing higher precision, more stable operation and greater torque compared to the original 8-tooth rotor. Temperature uniformity: The rotor design takes into account the uniform distribution of the thermal field to ensure uniform temperature of the wafer during the annealing process and avoid local overheating or uneven cooling.

[0012] 2. The rotor of the present invention is made of SUS630 material, which has the following characteristics: high cleanliness, no precipitation, no particles. High temperature stability: The rotor is made of high temperature resistant material and can operate stably for a long time in a high temperature vacuum environment. The present invention adopts an integrated processing method, which is easy to take and put and simple to operate.

[0013] 3. The present invention sets up an overall structure through a system for monitoring the deformation of the magnetic levitation rotor during heating, thereby achieving the method of monitoring and correcting the deformation of the magnetic levitation rotor in the present technology, performing alarm monitoring and correction according to the actual degree of deformation, and avoiding the OOP problem caused by inaccurate low-temperature temperature measurement and unreasonable setting of the temperature difference setting range.

[0014] 4. The present invention uses a system for monitoring the deformation of the magnetic levitation rotor during heating and designs an adjustment structure, so that the heating lamp can be quickly removed when the heating lamp stops in an emergency, and the heating lamp can be separated from the magnetic levitation rotor to avoid the difficulty in dissipating the residual heat of the heating lamp after the heating stops.

[0015] 5. The present invention provides a recovery structure by using a system for monitoring the deformation of the magnetic levitation rotor during heating, thereby facilitating external resetting of the magnetic levitation rotor, thereby avoiding the difficulty in resetting the magnetic levitation rotor after displacement, and manual resetting easily leaving fingerprints on the magnetic levitation rotor.

[0016] 6. The present invention provides a wire bundling structure through a system for monitoring the deformation of the magnetically suspended rotor during heating, thereby facilitating bundling of the connecting wires and preventing the connecting wires from becoming entangled during use, thereby accelerating the aging of the connecting wires. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of a magnetic suspension system in the prior art; Figure 2 It is a schematic diagram of a three-dimensional structure provided by the present invention; Figure 3 is a front view provided according to the present invention; Figure 4 According to the present invention, Figure 3 A magnified schematic diagram of point A; Figure 5 It is a schematic diagram of the three-dimensional structure of a system for monitoring the deformation of a magnetically suspended rotor during heating provided by the present invention; Figure 6 It is a schematic diagram of the internal structure of a system for monitoring the deformation of a magnetically suspended rotor during heating according to the present invention; Figure 7 It is a schematic diagram of the top view of the structure of the system for monitoring the deformation of the magnetic suspension rotor during heating provided by the present invention; Figure 8 It is a schematic diagram of the adjustment structure of the system for monitoring the deformation of the magnetic suspension rotor during heating provided by the present invention; Fig. 9 It is a schematic diagram of the recovery structure of the system for monitoring the deformation of the magnetic suspension rotor during heating provided by the present invention; Fig.10 According to the present invention, Fig. 9 A schematic diagram of the side structure of Fig.11 According to the present invention, Fig.10 The enlarged view of point B; Fig.12 It is a schematic diagram of the beam structure of the system for monitoring the deformation of a magnetically suspended rotor during heating provided by the present invention; Fig.13 According to the present invention, Fig.12 Schematic diagram of part of the structure.

[0018] Description of reference numerals in the accompanying drawings: 1. stator; 2. magnetic suspension rotor; 3. sensor; 4. clamping pin; 5. support ring; 6. silicon wafer; 7. edge ring; 101. cylinder; 102. round hole; 103. tooth; 104. rectangular groove; 105. positioning surface; 106. boss; 901. rotating device; 902. heating lamp; 903. quartz window; 904. thermometer; 905. reflector; 906. temperature controller; 907. displacement sensor; 9. edge ring; 10. cavity; 11. adjustment structure; 1101. fixing plate; 1102. mounting plate; 1103. jack; 1104. hydraulic rod; 1105. swivel; 1106. plug rod; 1107. spring; 1108. connecting rod; 1109. mounting rod; 1110. auxiliary rod; 1111. auxiliary plate; 1112. positioning rod; 111 3. round plate; 1114. connecting rod; 12. recovery structure; 1201. connecting rail; 1202. limit rod; 1203. connecting block; 1204. sliding rod; 1205. reset plate; 1206. protective pad; 1207. notch; 1208. round pad; 1209. handle; 1210. rotating groove; 1211. rotating rod; 1212. snap ring; 1213. clamping block; 1214. fixed Fixed rod; 1215, connecting block; 1216, limiting block; 1217, coil spring; 1218, shaft rod; 1219, turntable; 13, wire harness structure; 1301, connecting plate; 1302, clamping plate; 1303, rectangular plate; 1304, protective cover; 1305, sliding bar; 1306, connecting groove; 1307, round rod; 1308, magnetic sheet; 1309, iron sheet; 1310, wire harness groove. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] It should also be noted that, for ease of description, only the parts related to the invention are shown in the drawings. In the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0021] It should be noted that the concepts such as "first" and "second" mentioned in the present invention are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0022] It should be noted that the modifications of "one" and "plurality" mentioned in the present invention are illustrative rather than restrictive, and those skilled in the art should understand that, unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0023] In the existing technology, one type of rotor uses mechanical bearings or air-floating support structures. However, in high-temperature environments, problems such as mechanical wear, friction, and uneven temperature can easily affect the processing quality of wafers and even cause equipment failure. Another type of rotor uses magnetic levitation technology. In the spike process, rapid changes in temperature can cause wafer warping, uneven load and heating, and affect process results.

[0024] The Spike process is a semiconductor manufacturing technology that is mainly used to heat the surface of a silicon wafer in a very short time to achieve rapid annealing. Specifically, the Spike process includes the following types: ‌Flash Lamp Annealing (FLA): Use a high-intensity flash lamp to heat the surface of the silicon wafer in milliseconds. It is suitable for ultra-shallow doping activation with a line width below 20nm, which can minimize impurity diffusion while maintaining a high impurity activation rate. ‌Laser Spike Annealing (LSA): Use a laser light source to heat the surface of the silicon wafer in microseconds. It is suitable for advanced process nodes that require high-precision control, such as FinFET and high-k / metal gate (HKMG) device manufacturing. These Spike processes are characterized by completing the heating and annealing process in an extremely short time, which is suitable for advanced semiconductor manufacturing processes that require high-precision control.

[0025] The present invention proposes an improvement plan for the problems existing in the prior art: by changing the rotor structure, adding rectangular grooves and positioning surfaces, the rotor rotation stability and heat conduction uniformity are improved; the contact area between the rotor and the bottom of the support ring 5 is increased to improve the thermal conductivity uniformity of the wafer, and the uniformity, stability and repeatability of the film thickness on the wafer surface during the process are improved.

[0026] When the rapid annealing equipment is running, the magnetic suspension system uses the magnetic force generated by the electromagnetic coil to float the rotor, achieving contactless suspension. Under the regulation of the control system, the rotor can maintain a high-precision rotation state. In this way, the mechanical wear of the rotor and equipment can be effectively reduced under high temperature and vacuum environments, ensuring uniform temperature distribution of the wafer during annealing, thereby improving processing quality.

[0027] The invention provides a magnetic suspension rotor for rapid annealing equipment, which can ensure stable suspension and efficient rotation of the rotor during the annealing process.

[0028] See also Figure 1-Figure 4A magnetic suspension rotor for a rapid annealing device includes a cylinder 101, a circular hole 102, teeth 103, a rectangular groove 104, a positioning surface 105 and a boss 106.

[0029] The magnetic suspension rotor 2 is an annular cylinder, and 36 circular holes 102 of the same diameter and 24 teeth 103 of the same spacing are evenly arranged on the upper circumference of the rotor. The diameter of the circular hole is any length of 20mm-35mm. In an embodiment, the diameter of the circular hole is preferably 27mm. The circular holes 102 are provided to better reduce the weight and the moment of inertia; further, the stability of the rotor rotation is improved by providing 36 circular holes 102 of the same diameter.

[0030] The rotor material is a high temperature resistant material with a low thermal expansion coefficient, ensuring that the shape is stable at high temperatures and that the rotation accuracy is not affected by thermal expansion and contraction. In one embodiment, the rotor material is preferably SUS630, which is a martensitic precipitation hardened stainless steel with good magnetic properties, high strength, and high hardness. It also has good welding performance and corrosion resistance. The thermal expansion coefficient of SUS630 (20°C to 200°C) is 11.0 × 10 -6 / °C.

[0031] Twenty-four teeth 103 with the same spacing are provided in the circumferential direction of the boss 106 , and the teeth 103 are above the circular hole 102 .

[0032] Compared with the prior art, the number of teeth of the present invention is increased to 24, which increases the stability of the rotor rotation. Compared with the original 8 teeth, it can provide higher precision, more stable operation and greater torque. The 24 teeth of the present invention allow more precise rotation control, especially at high speed rotation, because the more teeth there are, the finer the distribution of the magnetic field, and the motor controller can adjust the speed and angle more accurately.

[0033] An increase in the number of teeth means that the magnetic force interval between each tooth is smaller, and the fluctuation and vibration of the rotor will be reduced when it rotates. This helps to maintain stability at high speeds and avoid vibration or instability caused by fewer teeth. Rotors with more teeth can provide higher torque output under the same conditions because more teeth are in contact each time the magnetic pole acts, and the interaction between the magnetic field and the rotor is stronger. This is very helpful for maintaining a continuous high speed during rapid annealing.

[0034] The rotor takes into account the low gas evolution rate and corrosion resistance in a vacuum environment, and prevents the material from being contaminated at high temperatures. It is achieved by selecting suitable materials and using electrolytic polishing for surface treatment.

[0035] The inner wall of the rotor is provided with a rectangular groove 104, which is arranged above the circular hole 102 and connected to the circular hole 102 through a support ring 105. Four O-rings are evenly installed in the rectangular groove 104, and the four O-rings are transitionally matched with a support ring 5 to increase stability and reduce vibration. In one embodiment, the O-ring is preferably made of perfluororubber, which is resistant to high temperatures and is not easy to precipitate impurities; The positioning surface 105 supports the O-ring, blocks the support ring 5 from moving downward, and plays a role in vertically positioning the support ring 5. In the embodiment, the positioning surface 105 realizes thermal field uniformity. By setting the positioning surface 105, the temperature of the wafer is ensured to be uniform during the annealing process to avoid local overheating or uneven cooling.

[0036] The boss 106 is cylindrical in shape, and the material of the boss 106 is a material that is resistant to high temperatures and has a low coefficient of thermal expansion. In one embodiment, the boss material is preferably SUS630.

[0037] like Figure 1 As shown, the coil inside the stator 1 generates a magnetic field to make the magnetic suspension rotor 2 float and rotate; the rotation of the magnetic suspension rotor 2 is fed back by the sensor 3; four support columns are arranged on the magnetic suspension rotor 2, and the support columns have four countersunk holes for installing the clamping pins 4, and the four countersunk holes of the support columns and the clamping pins 4 are clearance fit; the bottom surface of the support ring 5 is attached to the magnetic suspension rotor 2 by gravity, and the clamping pins 4 position the circumference of the support ring 5, and the clamping pins 4 and the support ring 5 are interference fit; the edge ring 7 is installed on the support ring 5, and the edge ring 7 and the support ring 5 are clearance fit; the silicon wafer 6 is placed on the edge ring 7, and the silicon wafer 6 and the edge ring 7 are clearance fit.

[0038] like Figure 2 As shown, 36 circular holes 102 with the same diameter and 24 teeth 103 with the same spacing are evenly arranged on the upper part of the circumference of the rotor.

[0039] like Figure 3 and Figure 4 As shown, a rectangular groove 104 is provided on the inner wall of the rotor, and four sealing rings 105 with a length of 15 mm are installed in the rectangular groove 104. The sealing ring 105 and the rectangular groove 104 are interference fit to prevent the sealing ring 105 from falling off.

[0040] Furthermore, if Figure 5-Figure 13As shown, in the present invention, the magnetic suspension rotor is first heated and then rapidly annealed and cooled; in the heating process, in order to prevent the magnetic suspension rotor from deforming, the present invention also proposes a system for monitoring the deformation of the magnetic suspension rotor during heating, which includes a cavity 10 and an adjustment structure 11, a rotating device 901 is installed on the surface of the lower end of the cavity 10, a plurality of heating lamps 902 are arranged inside the cavity 10, and the plurality of heating lamps 902 are connected to the cavity 10 by means of the adjustment structure 11, and three displacement sensors are installed inside the cavity 10. The cavity 10 is provided with a sensor 907, seven thermometers 904 are installed inside the cavity 10, the lower ends of the temperature sensors and thermometers are installed with connecting wires, the lower ends of the connecting wires are installed with a temperature controller 906, a quartz window 903 is installed inside the cavity 10, an edge ring 9 is installed inside the cavity 10, a magnetic suspension rotor 2 is placed above the edge ring 9, a reflector 905 is installed inside the cavity 10, an adjustment structure 11 is provided on the upper surface of the cavity 10, a recovery structure 12 is provided on the arc surface of the reflector 905, and a beam structure 13 is provided at the lower end of the cavity 10 , a top view of the relative installation positions of the temperature detector and the displacement sensor 907, the temperature detector and the displacement sensor 907 are installed at equal distances below the cavity 10 and arranged along the radial direction of the reflector 905, usually 7 thermometers 904 can be selected and set, and the number of displacement sensors 907 can be set according to actual use. In this design, 3 are taken as an example. Since the magnetic suspension rotor 2 is in a rotating state during the process, the thermometer and the displacement sensor 907 can collect the temperature and distance information on the fixed radius circumference of the magnetic suspension rotor 2. At the same time, according to the number of displacement sensors 907, the upper heating lamp 902 can be divided into 3 groups of lamp zones Zone1, Zone2, and Zone3 from the inside to the outside; the displacement sensor 907 transmits the ranging data signal to the temperature controller 906 to complete the real-time adjustment of the power of the corresponding lamp zone. During the heating process, if the magnetic suspension rotor 2 is unevenly heated, the above two deformations will occur. At this time, the real-time ranging of the displacement detector will change. Both of these deformations will cause the friction between the magnetic suspension rotor 2 and the support ring to decrease during the process, thereby increasing the magnetic suspension rotor 2. The risk of OOP, the magnetic suspension rotor 2 penetrates the cavity 10 and falls on the edge ring 9. At this time, the laser displacement sensor 907 emits laser to the fixed point to detect the initial height S0 of the magnetic suspension rotor 2 from the reflector 905, which is defined as the reference distance. At the same time, the height difference of the three reference measurement points is monitored. If the difference is within the allowable range, it is considered that the magnetic suspension rotor 2 is level in the cavity 10 and the process can be performed normally. During the process, the magnetic suspension rotor 2 rotates at a fixed speed through the magnetic suspension device, and the displacement sensor 907 measures the distance of the fixed emission points at a certain frequency. The real-time height of the three fixed points is defined as S1, and the surface deformation of the magnetic suspension rotor 2 is calculated through the real-time distance of the monitoring points of the magnetic suspension rotor 2;The deformation information of the magnetic suspension rotor 2 is fed back to the temperature controller 906. The temperature controller 906 adjusts the voltage output of the three light zones according to the distances of the three ranging points. The relationship between the control voltage of each light zone and the ranging height can be simplified as: V=P*(S1-S0)+I*S1 S0: initial height of the distance measuring point, S1: real-time height; V: output voltage of the sensor corresponding to the lamp area; P / I: proportional coefficient of the control process; if S1>S0, the power output of the lamp area needs to be increased; if S1<S0, the power output of the corresponding lamp area needs to be reduced, and the distance S1 of the three sampling points is compared in real time. When the real-time distance difference of the three points is adjusted to the allowable range, the power adjustment of the temperature controller 906 is stopped. By timely compensating for the actual deformation of the magnetic suspension rotor 2, the OOP problem caused by the reduction of friction between the magnetic suspension rotor 2 and the support ring due to deformation in the following two directions caused by uneven heating during the heating process can be prevented.

[0041] The specific settings and functions of the adjustment structure 11, the recovery structure 12, and the wiring structure 13 are described in detail below.

[0042] like Figure 5 and Figure 8As shown, the adjustment structure 11 includes a fixed plate 1101, which is fixedly connected to the cavity 10, and a hydraulic rod 1104 is installed on the upper surface of the fixed plate 1101. The arc surface of the output end of the hydraulic rod 1104 is rotatably connected to a swivel 1105, and the arc surface of the swivel 1105 is fixedly connected to a mounting rod 1109. The end of the mounting rod 1109 away from the swivel 1105 is fixedly connected to an auxiliary rod 1110, and the arc surface of the auxiliary rod 1110 is fixedly connected to a plurality of connecting rods 1108. The lower end of the connecting rod 1108 is fixedly connected to a circular plate 1113, and the lower surface of the circular plate 1113 is fixedly connected to a plurality of connecting rods 1114. The lower end of the connecting rod 1114 is fixedly connected to the heating lamp 902. A plurality of positioning rods 1112, the arc surface of the circular plate 1113 is fixedly connected with a plurality of auxiliary plates 1111, the auxiliary plates 1111 are slidably connected with the positioning rods 1112, the inner wall of the mounting rod 1109 is slidably connected with the plug rod 1106, the arc surface of the output end of the hydraulic rod 1104 is fixedly connected with the mounting plate 1102, the inner wall of the mounting plate 1102 is provided with a socket 1103, the plug rod 1106 is adapted to the socket 1103, when it is necessary to stop the heating urgently, in order to avoid the residual heat of the heating lamp 902 from continuing to heat, the hydraulic rod 1104 is started to move, the output end of the hydraulic rod 1104 is raised, the hydraulic rod 1104 drives the swivel 1105 to move, the swivel 1105 drives the mounting rod 1109 to move, and the mounting The mounting rod 1109 drives the insertion rod 1106 and the auxiliary rod 1110 to move, the auxiliary rod 1110 drives the connecting rod 1108 to move, the connecting rod 1108 drives the circular plate 1113 to move upward, the circular plate 1113 drives the connecting rod 1114 to move, the connecting rod 1114 drives the heating lamp 902 to rise and separate from the cavity 10, wherein the circular plate 1113 drives the auxiliary plate 1111 to move, the auxiliary plate 1111 is separated from the positioning rod 1112, and after moving to a suitable height, the rotating ring 1105 is rotated to move, the rotating ring 1105 drives the mounting rod 1109 to move, and after moving to a suitable position, the insertion rod 1106 is pulled to move, and when the mounting rod 1109 and the mounting plate 1102 are aligned, The insertion rod 1106 is inserted into the socket 1103 for fixing. The arc surface of the insertion rod 1106 is covered with a spring 1107. The two ends of the spring 1107 are fixedly connected to the insertion rod 1106 and the installation rod 1109 respectively. When the insertion rod 1106 needs to be inserted for fixing, the insertion rod 1106 is pulled to move, and the insertion rod 1106 drives the spring 1107 to stretch. Then the insertion rod 1106 is aligned with the installation rod 1109 and the socket 1103, and then the insertion rod 1106 is released. The spring 1107 contracts and drives the insertion rod 1106 to be inserted and fixed. The connecting rod 1108 is a stainless steel rod with a circular cross-section. The stainless steel material can increase the service life of the connecting rod 1108 and prevent the connecting rod 1108 from rusting during use.

[0043] The whole adjustment structure 11 has the effect that the heating lamp can be quickly removed when the heating lamp stops in an emergency.

[0044] like Figures 9 to 11As shown, the recovery structure 12 includes a plurality of connecting rails 1201, and the plurality of connecting rails 1201 are fixedly connected to the reflecting plate 905. The connecting rails 1201 are internally slidably connected to a sliding rod 1204, and the upper end of the sliding rod 1204 is fixedly connected to a connecting block 1203, and the end of the connecting block 1203 close to the magnetic suspension rotor 2 is fixedly connected to a reset plate 1205, and the arc surface of the sliding rod 1204 is fixedly connected to a circular pad 1208, and the inner wall of the cavity 10 is provided with a rotating groove 1210, and the inner wall of the rotating groove 1210 is slidably connected to a rotating rod 1211, and the upper end of the rotating rod 1211 is fixedly connected to a rotating disk 1219, and the inner wall of the rotating disk 1219 is provided with a plurality of notches 1207, and the notches 1207 are slidably connected to the sliding rod 1204, and the circular surface of the cavity 10 is fixedly connected to the circular pad 1208. The arc surface is fixedly connected to the limit block 1216, and the inner wall of the limit block 1216 is rotatably connected to the shaft rod 1218. The arc surface of the shaft rod 1218 is fixedly connected to the connecting block 1215. The end of the connecting block 1215 close to the cavity 10 is fixedly connected to the fixing rod 1214, and the upper end of the fixing rod 1214 is fixedly connected to the clamping block 1213. The lower end of the rotating rod 1211 is fixedly connected to the clamping ring 1212, and the clamping ring 1212 abuts against the clamping block 1213. The end of the connecting block 1215 away from the fixing rod 1214 is fixedly connected to the handle 1209. The arc surfaces at both ends of the shaft rod 1218 are both covered with coil springs 1217, and the two ends of the coil spring 1217 are respectively fixedly connected to the connecting block 1215 and the limit block 1216. When the wafer 8 deviates, it needs to be When resetting, pull the handle bar 1209 to move, the handle bar 1209 drives the connecting block 1215 to move, the connecting block 1215 drives the shaft rod 1218 to rotate on the inner wall of the limit block 1216, the connecting block 1215 drives the coil spring 1217 to contract, and then the connecting block 1215 drives the fixing rod 1214 to move, the fixing rod 1214 drives the clamping block 1213 to move, the clamping block 1213 is separated from the clamping ring 1212, and then the clamping ring 1212 is rotated to move, the clamping ring 1212 drives the rotating rod 1211 to move, the rotating rod 1211 slides on the inner wall of the rotating groove 1210, the rotating rod 1211 drives the rotating disk 1219 to move, the rotating disk 1219 drives the notch 1207 to move, and the notch 1207 is moved. 07 drives the slide bar 1204 to move, the slide bar 1204 drives the round pad 1208 to move, the slide bar 1204 slides on the inner wall of the connecting rail 1201, the slide bar 1204 drives the connecting block 1203 to move, the connecting block 1203 drives the reset plate 1205 to move, the reset plate 1205 resets the magnetic suspension rotor 2, after the reset is completed, the snap ring 1212 is rotated in the reverse direction to move, the snap ring 1212 drives the rotating rod 1211 to reset, the rotating rod 1211 drives the rotating disk 1219 to rotate in the reverse direction, the rotating disk 1219 drives the notch 1207 to move, the notch 1207 drives the slide bar 1204 to move to the side away from the magnetic suspension rotor 2, the slide bar 1204 drives the connecting block 1203 to move,The connecting block 1203 drives the reset plate 1205 to move outward, drives the reset plate 1205 to expand outward, and releases the handle 1209 after moving to the appropriate position. The coil spring 1217 contracts and drives the connecting block 1215 to reset, and the connecting block 1215 drives the fixing rod 1214 to move upward, and the fixing rod 1214 drives the clamping block 1213 and the clamping ring 1212 to clamp and fix, thereby completing the reset of the magnetic suspension rotor 2, and the internal fixation of the connecting rail 1201 A limit rod 1202 is connected, and the limit rod 1202 is slidably connected to the slide rod 1204. The limit rod 1202 can limit the slide rod 1204 to prevent the slide rod 1204 from deflecting during use, thereby improving the sliding stability of the round rod 1307. A protective pad 1206 is fixedly connected to the side of the reset plate 1205 close to the magnetic suspension rotor 2. The protective pad 1206 is a rubber pad. The protective pad 1206 can protect the magnetic suspension rotor 2 to prevent the magnetic suspension rotor 2 from being worn during use.

[0045] The whole recovery structure 12 has the effect of facilitating external resetting of the magnetic suspension rotor after a disc is generated.

[0046] like Fig.12 and Fig.13As shown, the harness structure 13 includes two connecting plates 1301, the two connecting plates 1301 are fixedly connected to the cavity 10, the lower end of the connecting plate 1301 is fixedly connected to a rectangular plate 1303, the inner walls of both ends of the rectangular plate 1303 are provided with connecting grooves 1306, the inner wall of the connecting groove 1306 is slidably connected to a connecting strip, the lower surface of the connecting strip is fixedly connected to a clamping plate 1302, the bottom wall of the connecting groove 1306 is fixedly connected to an iron sheet 1309, and one end of the sliding bar 1305 close to the iron sheet 1309 is fixedly connected A magnetic sheet 1308 is connected, and the magnetic sheet 1308 and the iron sheet 1309 are attracted to each other. The inner wall of the rectangular plate 1303 and the clamping plate 1302 on the side close to each other is provided with a cable tie groove 1310. When the connecting wire needs to be tied, the clamping plate 1302 is pulled to move, and the clamping plate 1302 drives the slide bar 1305 to move, and the slide bar 1305 drives the magnetic sheet 1308 and the iron sheet 1309 to separate, and then the slide bar 1305 slides on the inner wall of the connecting groove 1306, and then the rectangular plate 1303 and the clamping plate are connected. 1302 is separated, and then the connecting wire is placed in the wire harness groove 1310, and then the clamping plate 1302 is pulled to drive the slide bar 1305 to move, and the slide bar 1305 is aligned with the connecting groove 1306, and then the slide bar 1305 is inserted into the connecting groove 1306. After moving to the appropriate position, the magnetic sheet 1308 and the iron sheet 1309 are adsorbed and fixed, and then the clamping plate 1302 and the rectangular plate 1303 are used to harness the connecting wire. The interior of the connecting groove 1306 is fixedly connected with a round rod 1307, and the round rod 130 7 is slidably connected to the slide bar 1305, and the round rod 1307 can limit the slide bar 1305 to prevent the slide bar 1305 from deflecting when it is moved and used, thereby improving the sliding stability of the slide bar 1305. The inner wall of the cable tying groove 1310 is fixedly connected with a protective sleeve 1304, and the cross-section of the protective sleeve 1304 is semicircular. The protective sleeve 1304 can protect the connecting wires to prevent excessive wear of the rectangular plate 1303 and the clamping plate 1302 when the connecting wires are bundled.

[0047] The entire wire bundling structure 13 has the effect of facilitating bundling of the connecting wires.

[0048] The overall working principle is as follows: 1. A top view of the relative installation positions of the temperature detector and the displacement sensor 907. The temperature detector and the displacement sensor 907 are equidistantly installed below the cavity 10 and arranged along the radial direction of the reflector 905. Usually, 7 thermometers 904 can be selected and set, and the number of displacement sensors 907 can be set according to actual use. In this design, 3 are taken as an example. Since the magnetic suspension rotor 2 is in a rotating state during the process, the thermometer and the displacement sensor 907 can collect the temperature and distance information on the fixed radius circumference of the magnetic suspension rotor 2. At the same time, according to the number of displacement sensors 907, the upper heating lamp 902 can be divided into 3 groups of lamp zones Zone 1, Zone 2, and Zone 3 from the inside to the outside; the displacement sensor 907 transmits the ranging data signal to the temperature controller 906 to complete the real-time adjustment of the power of the corresponding lamp zone. If the magnetic suspension rotor 2 is unevenly heated during the heating process, deformations in the above two situations will occur. At this time, the real-time ranging of the displacement detector will change. These two situations will occur during the process. All kinds of deformation will lead to a decrease in the friction between the magnetic suspension rotor 2 and the support ring, thereby increasing the risk of OOP of the magnetic suspension rotor 2. After the magnetic suspension rotor 2 penetrates the cavity 10, it falls on the edge ring 9. At this time, the laser displacement sensor 907 emits a laser to a fixed point to detect the initial height S0 of the magnetic suspension rotor 2 from the reflector 905, which is defined as the reference distance. At the same time, the height difference of the three reference measurement points is monitored. If the difference is within the allowable range, it is considered that the magnetic suspension rotor 2 is level in the cavity 10 and the process can be performed normally. During the process, the magnetic suspension rotor 2 rotates at a fixed speed through the magnetic suspension device, and the displacement sensor 907 measures the distance of the fixed emission points at a certain frequency. The real-time height of the three fixed points is defined as S1. The surface deformation of the magnetic suspension rotor 2 is calculated by the real-time distance of the monitoring points of the magnetic suspension rotor 2; the deformation information of the magnetic suspension rotor 2 is fed back to the temperature controller 906, and the temperature controller 906 adjusts the voltage output of the three lamp areas according to the distance of the three ranging points. The relationship between the control voltage of each lamp area and the ranging height can be simplified to the relationship: V=P*(S1-S0)+I*S1 S0: initial height of the distance measuring point, S1: real-time height; V: output voltage of the sensor corresponding to the lamp area; P / I: proportional coefficient of the control process; if S1>S0, the power output of the lamp area needs to be increased; if S1<S0, the power output of the corresponding lamp area needs to be reduced, and the distance S1 of the three sampling points is compared in real time. When the real-time distance difference of the three points is adjusted to the allowable range, the power adjustment of the temperature controller 906 is stopped. By timely compensating for the actual deformation of the magnetic suspension rotor 2, the OOP problem caused by the reduction of friction between the magnetic suspension rotor 2 and the support ring due to deformation in the following two directions caused by uneven heating during the heating process can be prevented.

[0049] 2. When it is necessary to stop the heating urgently, in order to prevent the residual heat of the heating lamp 902 from continuing to heat, start the hydraulic rod 1104 to move, the output end of the hydraulic rod 1104 rises, the hydraulic rod 1104 drives the swivel 1105 to move, the swivel 1105 drives the installation rod 1109 to move, the installation rod 1109 drives the insertion rod 1106 and the auxiliary rod 1110 to move, the auxiliary rod 1110 drives the connecting rod 1108 to move, the connecting rod 1108 drives the circular plate 1113 to move upward, the circular plate 1113 drives the connecting rod 1114 to move, the connecting rod 1114 drives the heating lamp 902 to rise and separate from the cavity 10, wherein the circular plate 1113 drives the auxiliary plate 1111 to move, and the auxiliary plate 1111 and the positioning rod 1112 move. The two ends of the connecting rod 1108 are separated. After moving to the appropriate height, the swivel 1105 is rotated to move, and the swivel 1105 drives the mounting rod 1109 to move. After moving to the appropriate position, the plug rod 1106 is pulled to move. When the mounting rod 1109 and the mounting plate 1102 are aligned, the plug rod 1106 is inserted into the socket 1103 for fixation. When the plug rod 1106 needs to be inserted for fixation, the plug rod 1106 is pulled to move, and the plug rod 1106 drives the spring 1107 to stretch. Then, the plug rod 1106 is aligned with the mounting rod 1109 and the socket 1103, and then the plug rod 1106 is released. The spring 1107 is contracted to drive the plug rod 1106 to be inserted for fixation. The stainless steel material can increase the service life of the connecting rod 1108 and prevent the connecting rod 1108 from rusting during use.

[0050] 3. When the magnetic suspension rotor 2 is offset and needs to be reset, pull the handle 1209 to move, the handle 1209 drives the connecting block 1215 to move, the connecting block 1215 drives the shaft 1218 to rotate on the inner wall of the limit block 1216, the connecting block 1215 drives the coil spring 1217 to shrink, and then the connecting block 1215 drives the fixing rod 1214 to move, the fixing rod 1214 drives the clamping block 1213 to move, the clamping block 1213 is separated from the clamping ring 1212, and then the clamping ring 1212 is rotated to move, and the clamping ring 1212 drives the rotating The rod 1211 moves, the rotating rod 1211 slides on the inner wall of the rotating groove 1210, the rotating rod 1211 drives the rotating disk 1219 to move, the rotating disk 1219 drives the notch 1207 to move, the notch 1207 drives the sliding rod 1204 to move, the sliding rod 1204 drives the round pad 1208 to move, the sliding rod 1204 slides on the inner wall of the connecting rail 1201, the sliding rod 1204 drives the connecting block 1203 to move, the connecting block 1203 drives the reset plate 1205 to move, the reset plate 1205 resets the magnetic suspension rotor 2, and the magnetic suspension rotor 2 is reset. After the positioning is completed, the snap ring 1212 is rotated in the opposite direction to move, the snap ring 1212 drives the rotating rod 1211 to reset, the rotating rod 1211 drives the rotating disk 1219 to rotate in the opposite direction, the rotating disk 1219 drives the notch 1207 to move, the notch 1207 drives the sliding rod 1204 to move to the side away from the magnetic suspension rotor 2, the sliding rod 1204 drives the connecting block 1203 to move, the connecting block 1203 drives the reset plate 1205 to move outward, drives the reset plate 1205 to expand outward, and releases the handle 1209 coil spring 121 after moving to the appropriate position. 7 is driven to shrink, the coil spring 1217 drives the connecting block 1215 to reset, the connecting block 1215 drives the fixing rod 1214 to move upward, the fixing rod 1214 drives the clamping block 1213 to clamp and fix with the clamping ring 1212, thereby completing the resetting of the magnetic suspension rotor 2, the limiting rod 1202 can limit the sliding rod 1204 to prevent the sliding rod 1204 from deflecting during use, thereby improving the sliding stability of the round rod 1307, and the protective pad 1206 can protect the magnetic suspension rotor 2 to prevent the magnetic suspension rotor 2 from being worn during use.

[0051] 4. When the connecting wires need to be bundled, pull the clamping plate 1302 to move, the clamping plate 1302 drives the slide bar 1305 to move, the slide bar 1305 drives the magnetic sheet 1308 to separate from the iron sheet 1309, and then the slide bar 1305 slides on the inner wall of the connecting groove 1306, and then the rectangular plate 1303 is separated from the clamping plate 1302, and then the connecting wire is placed in the wire bundling groove 1310, and then the clamping plate 1302 is pulled to drive the slide bar 1305 to move, align the slide bar 1305 with the connecting groove 1306, and then the slide bar 1305 is moved. 05 is inserted into the connecting groove 1306. After moving to the appropriate position, the magnetic sheet 1308 and the iron sheet 1309 are adsorbed and fixed. Then the splint 1302 and the rectangular plate 1303 bundle the connecting wires. The round rod 1307 can limit the sliding bar 1305 to prevent the sliding bar 1305 from shifting when being moved and used, thereby improving the sliding stability of the sliding bar 1305. The protective cover 1304 can protect the connecting wires to prevent excessive wear of the rectangular plate 1303 and the splint 1302 when bundling the connecting wires.

[0052] The present invention utilizes magnetic levitation technology to achieve the suspension of the rotor. This technology enables the rotor to reduce contact with the surrounding environment during operation, thereby reducing energy loss and improving the operating efficiency of the equipment. The magnetic levitation rotor of the present invention is specially designed for the spike process of rapid annealing equipment; rapid annealing is an important step in material processing and can improve the performance of the material. The application of the magnetic levitation rotor makes the annealing process faster and more efficient.

[0053] The present invention proposes a new type of magnetic levitation rotor design, which is suitable for high-precision rotation of rapid annealing equipment, and can maintain efficient and stable operation of the equipment under extreme conditions such as high temperature and vacuum, significantly improving the reliability of the equipment and the processing quality of the magnetic levitation rotor. The invention mainly focuses on the use of magnetic levitation technology to achieve rotor suspension and rapid annealing, and the specific application methods used in rapid annealing equipment, including how to cooperate with other parts of the equipment and how to control the rotation speed of the rotor.

[0054] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A magnetically suspended rotor for rapid annealing equipment, characterized in that: The invention improves the rotation stability and heat conduction uniformity of the magnetic suspension rotor by changing the rotor structure and adding a rectangular groove (104) and a positioning surface (105); and increases the contact area between the magnetic suspension rotor and the bottom of the support ring, thereby improving the heat conduction uniformity of the wafer.

2. The magnetic suspension rotor for rapid annealing equipment according to claim 1, characterized in that: The magnetic suspension rotor is an annular cylinder, and 36 circular holes (102) with the same diameter are evenly arranged on the circumference of the upper part of the magnetic suspension rotor.

3. The magnetic suspension rotor for rapid annealing equipment according to claim 2, characterized in that: The diameter of the circular hole is any length between 20mm and 35mm.

4. The magnetic suspension rotor for rapid annealing equipment according to claim 3, characterized in that: The diameter of the circular hole is 27 mm.

5. The magnetic suspension rotor for rapid annealing equipment according to claim 1, characterized in that: The boss (106) is provided with 24 teeth (103) with the same spacing in the circumferential direction, and the teeth (103) are above the circular hole (102).

6. The magnetic suspension rotor for rapid annealing equipment according to claim 1, characterized in that: The magnetic suspension rotor material is a high temperature resistant material with a low thermal expansion coefficient.

7. The magnetic suspension rotor for rapid annealing equipment according to claim 1, characterized in that: A rectangular groove (104) is provided on the inner wall of the magnetic suspension rotor. The rectangular groove (104) is arranged above the circular hole (102) and is connected to the circular hole (102) via a support (105).

8. The magnetic suspension rotor for rapid annealing equipment according to claim 1, characterized in that: Four O-rings are evenly distributed in the rectangular groove (104), and the four O-rings are transitionally matched with a support ring (5).

9. The magnetic suspension rotor for rapid annealing equipment according to claim 1, characterized in that: The locating surface (105) supports the O-ring and blocks the downward movement of the support ring (5).

10. The magnetic suspension rotor for rapid annealing equipment according to claim 1, characterized in that: The boss (106) is cylindrical in shape.

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