Supporting structure of single-side polishing machine

Abstract

The supporting structure of the single-face polishing machine comprises a box body, the box body comprises a lower box body and an upper box body arranged on the lower box body, a supporting column is connected between the lower box body and the upper box body to form an up-down split type supporting structure, a lower polishing disc assembly is arranged in the middle of the lower box body, and a lower polishing disc assembly is arranged in the middle of the lower box body. An upper polishing head assembly is arranged above the lower polishing disc assembly, and the upper polishing head assembly is arranged on the upper box body and used for pressurizing and polishing a workpiece on the lower polishing disc assembly. The supporting structure of the single-face polishing machine adopts upper and lower split type supporting, can avoid an upper polishing head shaft system resonance point, eliminates equipment vibration, improves the perpendicularity of an upper polishing head system and a lower polishing disc, guarantees the machining precision, and meanwhile increases the equipment machining space.

Description

Technical Field

[0001] The invention relates to the field of polishing equipment, and in particular to a split support structure of a single-side polishing machine. Background Art

[0002] Single-sided polishing machines are currently the main equipment for processing hard and brittle materials such as monocrystalline silicon, polycrystalline silicon, electronic-grade silicon, and sapphire. As the size of workpieces becomes larger and larger, the size of workpiece carriers also becomes larger and larger, and the processing accuracy requirements become higher and higher. Traditional support structures are difficult to ensure high-precision processing. Summary of the invention

[0003] The purpose of the present invention is to overcome the problems existing in the prior art and provide a support structure for a single-sided polishing machine, which can avoid the resonance point of the upper polishing head shaft system, eliminate the vibration of the equipment, improve the verticality between the upper polishing head spindle and the lower polishing disc, ensure the processing accuracy of the equipment, and increase the operating space of the equipment.

[0004] In order to achieve the above technical objectives and the above technical effects, the present invention is implemented through the following technical solutions: A support structure of a single-sided polishing machine includes a box body, which includes a lower box body and an upper box body arranged on the lower box body, a support column is connected between the lower box body and the upper box body to form an upper and lower split support structure, a lower polishing disc assembly is provided in the middle position of the lower box body, an upper polishing head assembly is provided above the lower polishing disc assembly, and the upper polishing head assembly is arranged on the upper box body for pressurizing and polishing a workpiece on the lower polishing disc assembly.

[0005] Furthermore, the support columns are arranged on the outer sides of the lower box body and the upper box body to form an external support structure.

[0006] Furthermore, a corresponding pressurizing cylinder is provided at the upper end of the upper polishing head assembly, and a corresponding upper polishing plate is provided at the lower end. An upper plate shaft assembly is provided between the pressurizing cylinder and the upper polishing plate, and the pressurizing cylinder drives the upper polishing plate to pressurize via the upper plate shaft assembly.

[0007] Furthermore, a gear is provided on the upper disk shaft assembly, and the gear is meshed with the corresponding upper disk drive assembly for transmission. The upper disk drive assembly is composed of a motor and a corresponding reduction gear set, and the motor drives the upper polishing disk to rotate through the reduction gear set.

[0008] Furthermore, the upper disk drive assembly is arranged on the upper box body.

[0009] Furthermore, a liquid receiving basin is provided below the lower polishing plate assembly, and the liquid receiving basin is fixedly connected to the lower box body for receiving the polishing liquid.

[0010] Furthermore, a plurality of positioning guide wheels are provided on the inner edge of the liquid receiving basin for limiting the edge of the lower throwing plate assembly.

[0011] The beneficial effects of the present invention are: The support structure of the single-sided polishing machine of the present invention adopts upper and lower split supports, which can avoid the resonance point of the upper polishing head shaft system, eliminate equipment vibration, improve the verticality of the upper polishing head system and the lower polishing plate, ensure processing accuracy, and increase equipment processing space. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural schematic diagram of the present invention.

[0013] Explanation of the numbers in the figure: 1. upper box body, 2. lower box body, 3. lower throwing plate assembly, 4. positioning guide wheel, 5. liquid receiving basin, 6. support column, 7. upper plate drive assembly, 8. upper throwing head assembly. DETAILED DESCRIPTION

[0014] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0015] like Figure 1 As shown, a support structure of a single-sided polishing machine includes a box body, wherein the box body includes a lower box body 2 and an upper box body 1 arranged on the lower box body 2. In the present embodiment, the upper box body 1 and the lower box body 2 are castings, which are cast by HT350. The casting structure is provided with reinforcing ribs, and the non-machined surface is coated with polyurethane paint. A support column 6 is connected between the lower box body 2 and the upper box body 1 to form an upper and lower split support structure. A lower polishing disc assembly 3 is provided in the middle position of the lower box body 2, and an upper polishing head assembly 8 is provided above the lower polishing disc assembly 3. The upper polishing head assembly 8 is arranged on the upper box body 1, and is used for pressurizing and polishing the workpiece on the lower polishing disc assembly 3.

[0016] The support columns 6 are arranged on the outer sides of the lower box body 2 and the upper box body 1 to form an outer support structure.

[0017] The upper end of the upper polishing head assembly 8 is provided with a corresponding pressurizing cylinder, and the lower end is provided with a corresponding upper polishing plate. An upper plate shaft assembly is provided between the pressurizing cylinder and the upper polishing plate, and the pressurizing cylinder drives the upper polishing plate to pressurize through the upper plate shaft assembly.

[0018] The upper disk shaft assembly is provided with a gear, which is meshed with the corresponding upper disk drive assembly 7 for transmission. The upper disk drive assembly 7 is composed of a motor and a corresponding reduction gear set. The motor drives the upper polishing disk to rotate through the reduction gear set.

[0019] The upper disk driving assembly 7 is arranged on the upper box body 1 .

[0020] A liquid receiving basin 5 is provided below the lower polishing plate assembly 3 , and the liquid receiving basin 5 is fixedly connected to the lower box body 2 for receiving the polishing liquid.

[0021] The inner edge of the liquid receiving basin 5 is provided with a plurality of positioning guide wheels 4 for limiting the edge of the lower throwing plate assembly 3 .

[0022] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A support structure of a single-side polishing machine, comprising a box, characterized in that: The box body comprises a lower box body (2) and an upper box body (1) arranged on the lower box body (2); a support column (6) is connected between the lower box body (2) and the upper box body (1) to form an upper and lower split support structure; a lower polishing disc assembly (3) is provided in the middle of the lower box body (2); an upper polishing head assembly (8) is provided above the lower polishing disc assembly (3); the upper polishing head assembly (8) is arranged on the upper box body (1) and is used to pressurize and polish a workpiece on the lower polishing disc assembly (3).

2. The support structure of the single-side polishing machine according to claim 1, characterized in that: The support columns (6) are arranged on the outside of the lower box body (2) and the upper box body (1), forming an external support structure.

3. The support structure of the single-side polishing machine according to claim 1, characterized in that: The upper end of the upper polishing head assembly (8) is provided with a corresponding pressurizing cylinder, and the lower end is provided with a corresponding upper polishing disc. An upper disc shaft assembly is provided between the pressurizing cylinder and the upper polishing disc, and the pressurizing cylinder drives the upper polishing disc to pressurize via the upper disc shaft assembly.

4. The support structure of the single-side polishing machine according to claim 3, characterized in that: The upper disk shaft assembly is provided with a gear, and the gear is meshed with a corresponding upper disk drive assembly (7) for transmission. The upper disk drive assembly (7) is composed of a motor and a corresponding reduction gear set, and the motor drives the upper polishing disk to rotate via the reduction gear set.

5. The support structure of the single-side polishing machine according to claim 4, characterized in that: The upper disk drive assembly (7) is arranged on the upper box body (1).

6. The support structure of the single-side polishing machine according to claim 1, characterized in that: A liquid receiving basin (5) is provided below the lower polishing plate assembly (3); the liquid receiving basin (5) is fixedly connected to the lower box body (2) and is used to receive polishing liquid.

7. The support structure of the single-side polishing machine according to claim 6, characterized in that: A plurality of positioning guide wheels (4) are provided on the inner edge of the liquid receiving basin (5) for limiting the edge of the lower throwing plate assembly (3).

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