Aluminum nitride ceramic auxiliary lifting adjusting device

Abstract

The invention discloses an aluminum nitride ceramic auxiliary lifting adjusting device which comprises a fixed base, the fixed base is connected with a top plate, the fixed base is connected with an adjusting unit, the adjusting unit is provided with a slope butt joint groove, the adjusting unit is connected with a lifting block, and the lifting block is provided with a slope butt joint groove. The lifting block is provided with a slope sliding groove in sliding connection with the slope butt joint groove, and when the adjusting unit moves close to one side of the fixed base, the lifting block moves close to one side of the top plate. When the adjusting unit moves relative to the fixed base, the lifting block can be synchronously driven to move, and due to the fact that the lifting block abuts against the top plate, the inclination degree of the top plate changes accordingly, and follow-up machining treatment on the aluminum nitride ceramic surface is facilitated.

Description

Technical Field

[0001] The invention relates to the technical field of ceramic processing, and in particular to an aluminum nitride ceramic auxiliary lifting and adjusting device. Background Art

[0002] Aluminum nitride ceramic heater for semiconductor equipment is also called "heater". It is an important component in CVD equipment to support and evenly heat the wafer. It is mainly made of aluminum nitride ceramic material, has excellent thermal conductivity and high temperature resistance, and can operate stably at high temperatures. Aluminum nitride heater also has a layer of RF radio frequency metal electrode mesh near the surface of the ceramic. The uniformity of the electrode mesh from the surface has a great impact on the use of the final product.

[0003] For example, the publication number "CN114158147A" discloses "a ceramic heating plate lead-out electrode connection structure and its connection method", including a joint, a lead-out electrode, and a connection hole buried in the ceramic matrix, wherein the lead-out electrode includes an electrode tube segment and an electrode rod segment, a first gap is set between the electrode tube segment and the connection hole, and a second gap is set between the electrode rod segment and the electrode tube segment. However, in actual applications, since aluminum nitride ceramics will deform during the sintering process, the larger the external dimensions, the greater the deformation caused by sintering, and the electrode mesh sintered inside will also have an uneven surface shape. Therefore, during the processing process, it is necessary to fine-tune the inclination of the processing disk to perform a smoothing adjustment. Summary of the invention

[0004] In view of the problem in the prior art mentioned in the background technology that the distance between the RF electrode mesh and the ceramic surface during the processing of aluminum nitride ceramics is not uniform enough, the present invention provides an auxiliary lifting and adjusting device for aluminum nitride ceramics, which can fine-tune the processing disk on which the aluminum nitride ceramics are placed, thereby changing the inclination of the processing disk, thereby ensuring the uniformity of the distance between the internal electrode mesh and the ceramic surface after grinding.

[0005] To achieve the above objectives, the present invention adopts the following technical solutions.

[0006] An auxiliary lifting and adjusting device for aluminum nitride ceramics includes a fixed base, the fixed base is connected to a top plate, an adjusting unit is connected to the fixed base, the adjusting unit is provided with an inclined surface docking groove, the adjusting unit is connected to a lifting block, and the lifting block is provided with an inclined surface slide groove slidably connected to the inclined surface docking groove. When the adjusting unit moves close to one side of the fixed base, the lifting block moves close to one side of the top plate. In the present application, the aluminum nitride ceramics need to be placed on the top plate of the processing disk so that the surface of the aluminum nitride ceramics can be processed. After the detection equipment is used to detect the degree of inclination of the radio frequency electrode mesh in the aluminum nitride ceramics, the aluminum nitride ceramics are tilted to a certain degree and then ground so that the internal radio frequency electrode mesh can be kept parallel to the surface of the aluminum nitride ceramics. Therefore, a device is required to fine-tune the inclination of the top plate. In the present application, a lifting block is placed under the top plate, and the degree of inclination of the top plate is controlled by the lifting action of the lifting block. Specifically, in the present application, a fixed base is provided, which remains fixed and can be connected to a fixed component of a processing disk; an adjusting unit is connected to the fixed base, wherein the adjusting unit can move relative to the fixed base, wherein specifically, the adjusting unit can be an adjusting block connected by bolts, and the fixed base is connected by bolts, when the bolt rotates relative to the fixed base, the nut on the bolt drives the adjusting block to move, and there is a clearance fit between the bolt and the adjusting block, rather than a threaded connection, thereby ensuring that the adjusting block does not rotate but only moves laterally, and the setting method of the adjusting unit includes but is not limited to the above-mentioned structure, which can realize the movement of the adjusting unit relative to the fixed base; and an inclined docking groove is also provided on the adjusting unit, wherein the inclined docking groove is inclined, and the inclined docking groove is docked with the inclined slide groove provided on the lifting block, and similarly the inclined slide groove is also inclined, so when the adjusting unit is displaced relative to the fixed base, it can synchronously drive the lifting block to displace, and since the lifting block abuts against the top plate, the inclination of the top plate changes accordingly, which is convenient for subsequent processing of the aluminum nitride ceramic surface.

[0007] Preferably, a placement groove is provided in the inclined surface slide groove, an installation groove is provided in the inclined surface docking groove, a placement cavity is formed between the placement groove and the installation groove, and an elastic telescopic member is installed in the placement cavity. A placement groove is provided in the inclined surface slide groove, and an installation groove is provided in the inclined surface docking groove, wherein the installation groove and the placement groove are docked, so that a placement cavity can be formed between the installation groove and the docking groove, and the elastic telescopic member can be placed in the placement cavity, so that when the adjustment unit is displaced relative to the fixed base, the elastic telescopic member can be squeezed, so that the elastic telescopic member can squeeze the adjustment unit and the lifting block on both sides, so that during the resetting process, it can be smoother, so that the adjustment unit can rebound under the drive of the elastic telescopic member, and similarly, due to the rebound of the adjustment unit, the inclined surface docking groove and the inclined surface slide groove on the adjustment unit are displaced, so that the lifting block can move downward, and the position of the top plate is adjusted, avoiding the passive displacement of the adjustment unit by squeezing the lifting block by preventing the pressure of the top plate itself; by setting the elastic contraction member, the smoothness of the adjustment is guaranteed.

[0008] Preferably, the placement slot includes a movable bottom block, a receiving chamber is provided on the fixed base, the receiving chamber is slidably connected to the movable bottom block, an elastic restoring member is provided between the bottom of the receiving chamber and the movable bottom block, the inclination of the receiving chamber is the same as the inclination of the inclined slide groove, when the adjustment unit moves close to the fixed base, the elastic telescopic member is compressed, the lifting block moves toward one side of the top plate, the movable bottom block moves toward the bottom of the receiving chamber synchronously, and the movable bottom block remains in contact with the placement slot. A movable bottom block is provided inside the placement slot, wherein the movable bottom block is not fixedly connected to the placement slot, but slidably connected to the placement slot, wherein the top of the movable bottom block serves as the bottom of the placement slot, so one end of the elastic telescopic member abuts against the top of the movable bottom block, and since the movable bottom block is also slidably connected to the receiving chamber, when the adjustment unit moves toward one side of the fixed base, the elastic telescopic member will be subjected to an extrusion force, and thus will squeeze the movable bottom block toward the fixed base, that is, the movable bottom block will slide toward the inside of the receiving chamber, since the inclination of the receiving chamber is the same as the inclination of the inclined slide groove, and at the same time, when the adjustment unit moves toward the fixed base When one side moves, the lifting block will be driven to move synchronously through the inclined docking groove, so that the position of the movable bottom block can always be kept in contact with the lifting block. It is necessary to control the elastic stiffness coefficient of the elastic telescopic part to be greater than the elastic stiffness coefficient of the elastic recovery part, so that during the movement of the movable bottom block, the elastic recovery part will be squeezed first, thereby ensuring that the movable bottom block can maintain contact with the placement groove, and when the movable bottom block abuts against the placement groove, the elastic telescopic part will be squeezed due to the limitation of the placement groove. During this process, the elastic telescopic part and the elastic recovery part will produce a stable matching effect to ensure the fit of the movable bottom block and the placement groove. Since the lifting block receives a vertical downward force during operation, the above-mentioned setting method can make the force transmitted downward by the lifting block be transmitted to the adjusting unit by the inclined slide groove and to the fixed base by the movable bottom block, so that the pressure of the lifting block is shared by the fixed base and the lifting block, avoiding the transmission method of only transmitting to the adjusting unit and then to the fixed base through the adjusting unit, thereby causing various problems such as uneven force, lengthy force transmission process, and affecting the smoothness of resetting; at the same time, since the elastic telescopic member moves synchronously with the movable bottom block, it is avoided that when the lifting block is displaced, the elastic bottom block and the bottom surface of the placement groove are relatively displaced, affecting the smoothness of the action, and at the same time, when the movable bottom block moves toward one side of the accommodating cavity, the elastic telescopic member will also be affected by the inclined guide in the placement groove and bend, so the end of the elastic telescopic member always remains fixed between the contact surface, relying on its own bending to adapt to the misalignment changes at both ends, thereby ensuring smoothness, and at the same time, since relative friction is avoided, noise is also avoided.

[0009] Preferably, both ends of the elastic telescopic member are snap-connected to the installation groove and the placement groove, and when the elastic telescopic member is bent, the elastic telescopic member maintains the snap-connected connection with the installation groove and the placement groove. Both ends of the elastic telescopic member are snap-connected, wherein the snap-connected connection method is generally to set a limit groove at the bottom of the groove, so as to avoid radial displacement of the end of the elastic telescopic member. At the same time, when used in conjunction with the movable bottom block, when the movable bottom block is displaced, the vertical position of the movable bottom block changes, thereby driving the end of the elastic telescopic member to change synchronously, and because the snap-connected connection is adopted, the elastic telescopic member is prevented from falling out.

[0010] Preferably, the placement slot includes a notch, the width of the notch is greater than or equal to the width of the movable bottom block, and the lifting block can be separated from the movable bottom block along the lifting direction. The size of the notch is set to be greater than or equal to the size of the movable bottom block, thereby providing conditions for the separation of the lifting block from the movable bottom block. When the movable bottom block or the elastic reset member is stuck, the lifting block will not be affected by the omnidirectional limiting effect, but can still achieve a certain lifting function, providing a fault tolerance rate.

[0011] Preferably, the placement groove includes a contraction opening, and the width of the contraction opening is smaller than the width of the movable bottom block. The contraction opening is set smaller than the size of the movable bottom block, so that the contact effect between the movable bottom block and the lifting block can be maintained in real time, and the movement of the lifting block can synchronously affect the movement of the movable bottom block. When the elastic restoring member fails, the movement of the lifting block can still drive the movable bottom block to move synchronously.

[0012] Preferably, the lifting block includes a rotating support plate arranged near one side of the top plate, the lifting block includes a lifting base arranged far from the top plate, the lifting base is provided with a docking spherical surface near the rotating support plate, and the rotating support plate is provided with a sliding ball groove connected to the docking spherical surface near the lifting base. When the lifting block is lifted or lowered, the rotating support plate is in contact with the top plate on the side away from the docking spherical surface, and the sliding ball groove rotates relative to the docking spherical surface. By arranging the lifting block into two parts, the lifting block can adapt to the position change of the top plate in real time. When the lifting block rises, the inclination of the top plate changes, so the rotating support plate is in contact with the bottom surface of the top plate, thereby changing the adaptability. Since the rotating support plate and the lifting base are rotatably connected, they can rotate freely to adapt accordingly, thereby ensuring that when the top plate is tilted, the lifting block can still provide a stable support effect and maintain surface contact.

[0013] Preferably, the adjustment unit includes a guide docking groove, the adjustment unit is slidably connected to a guide block, and the guide block includes a guide groove slidably connected to the guide docking groove. The sliding connection between the guide docking groove and the guide groove makes the movement of the adjustment unit more uniform, wherein the guide block and the lifting block are preferably arranged relative to each other, so that both sides of the adjustment unit can be subject to the limiting guide effect, thereby ensuring the stability of the adjustment.

[0014] Preferably, the adjustment unit includes an oblique top groove, the guide block includes an oblique bottom groove, an oblique elastic member is placed between the oblique top groove and the oblique bottom groove, and the oblique elastic member is inclined relative to the movement direction of the adjustment unit. An oblique elastic member is arranged between the oblique top groove and the oblique bottom groove, and the oblique elastic member is arranged obliquely; since the guide block needs to have a guiding function, it is required that the guide block cannot move, and the movement direction of the adjustment unit is toward the fixed base side, so the relative sliding direction between the guide block and the adjustment unit also needs to face the fixed base, so the oblique elastic member is arranged obliquely, which can ensure that the two sides of the oblique elastic member are respectively on the oblique top groove and the oblique bottom groove, and ensure that the reset elastic force can act on both.

[0015] Preferably, the elastic telescopic member is arranged in parallel along the movement direction of the adjustment unit. Since the inclined surface connection groove and the inclined surface slide groove are arranged in an oblique direction, the elastic telescopic member is arranged in parallel, so that the elastic telescopic member can place both ends in the placement groove and the installation groove respectively to achieve an elastic reset effect.

[0016] The beneficial effects of the present invention are as follows: (1) The processing disk on which the aluminum nitride ceramic is placed can be fine-tuned so that the inclination of the processing disk changes, thereby ensuring that the distance between the internal electrode mesh and the ceramic surface is uniform after grinding; (2) It can prevent the end of the elastic telescopic member from moving laterally during the operation, and at the same time ensure that the force of the lifting block can be stably and dispersedly transmitted to the fixed base and the adjustment unit, thereby ensuring the stability of the device operation; (3) It can adapt to the changes in the inclination of the top plate and provide stable support, ensuring continuous surface contact and avoiding unstable support. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is an exploded view of the present invention.

[0018] Figure 2 It is a first exploded view of the regulating unit in the present invention.

[0019] Figure 3 It is a cross-sectional view of the adjustment unit in the present invention.

[0020] Figure 4 It is a second exploded view of the regulating unit in the present invention.

[0021] Figure 5 It is a third exploded view of the regulating unit in the present invention.

[0022] Figure 6 This is a cross-sectional view of Example 2.

[0023] Figure 7 This is a partial axonometric view of Example 2.

[0024] Figure 8 This is a top view of Example 3.

[0025] Fig. 9 This is a top view of Example 4.

[0026] Fig.10 This is a cross-sectional view of Example 5.

[0027] In the figure: 1 fixed base, 11 accommodating cavity, 12 elastic recovery member; 2 top plate; 3 adjusting unit, 31 bolt, 32 adjusting block, 33 oblique docking groove, 331 mounting groove, 34 placement cavity, 35 elastic telescopic member, 36 guide docking groove, 361 oblique top groove, 362 oblique elastic member; 4 lifting block, 41 inclined sliding groove, 411 placement groove, 412 movable bottom block, 413 notch, 414 contraction opening, 42 rotating support plate, 421 sliding ball groove, 43 lifting base, 431 docking spherical surface; 5 guide block, 51 guide groove, 52 oblique bottom groove; 6 base plates, 61 support columns. DETAILED DESCRIPTION

[0028] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0029] Embodiment 1: like Figure 1 , 2As shown, an aluminum nitride ceramic auxiliary lifting and adjustment device includes a fixed base 1, the fixed base 1 is connected to a top plate 2 and a bottom plate 6, a support column 61 is arranged between the top plate 2 and the bottom plate 6, the fixed base 1 is connected to the support column 61, the fixed base 1 is connected to an adjustment unit 3, the adjustment unit 3 is provided with an inclined docking groove 33, the adjustment unit 3 is connected to a lifting block 4, the lifting block 4 is provided with an inclined slide groove 41 slidably connected to the inclined docking groove 33, when the adjustment unit 3 moves close to one side of the fixed base 1, the lifting block 4 moves close to one side of the top plate. In the present application, the aluminum nitride ceramic needs to be placed on the top plate 2 of the processing disk so that the surface of the aluminum nitride ceramic can be processed. After the detection equipment is used to detect the degree of inclination of the RF electrode mesh in the aluminum nitride ceramic, the aluminum nitride ceramic is tilted to a certain degree and then ground so that the internal RF electrode mesh can remain parallel to the surface of the aluminum nitride ceramic. Therefore, a device is required to fine-tune the inclination of the top plate 2. In the present application, a lifting block 4 is placed under the top plate 2, and the inclination of the top plate 2 is controlled by the lifting action of the lifting block 4. Specifically, in the present application, a fixed base 1 is provided, the fixed base 1 remains fixed and can be connected to the fixed component of the processing disk; an adjusting unit 3 is connected to the fixed base 1, wherein the adjusting unit 3 can move relative to the fixed base 1. In the present embodiment, the adjusting unit 3 includes a bolt 31 and an adjusting block 32, wherein a nut is provided at the end of the bolt 31, and a hole that can pass the bolt 31 is provided on the adjusting block 32. The bolt 31 passes through the adjusting block 32 and is connected to the fixed base 1, and is threadedly connected to the fixed base 1. The fixed base 1 is connected by the bolt 31. When the bolt 31 rotates relative to the fixed base 1, the nut on the bolt 31 drives the adjusting block 32 to move, and the bolt 31 and the adjusting block 32 are connected. It is a clearance fit rather than a threaded connection, so as to ensure that the adjustment block 32 does not rotate and only moves laterally. The setting method of the adjustment unit 3 includes but is not limited to the above-mentioned structure, which can realize the movement of the adjustment unit 3 relative to the fixed base 1; and the adjustment unit 3 is also provided with a bevel docking groove 33, wherein the bevel docking groove 33 is inclined, and the bevel docking groove 33 is docked with the bevel slide groove 41 arranged on the lifting block 4, and the bevel slide groove 41 is also inclined. Therefore, when the adjustment unit 3 is displaced relative to the fixed base 1, the lifting block 4 can be driven to move synchronously. Since the lifting block 4 abuts against the top plate 2, the inclination of the top plate 2 changes accordingly, which is convenient for the subsequent processing of the aluminum nitride ceramic surface.

[0030] like Figure 3 , 4As shown in FIG. 5 , a placement groove 411 is provided in the inclined sliding groove 41, a mounting groove 331 is provided in the inclined connecting groove 33, a placement cavity 34 is formed between the placement groove 411 and the mounting groove 331, and an elastic telescopic member 25 is installed in the placement cavity 34. A placement groove 411 is provided in the inclined slide groove 41, and an installation groove 331 is provided in the inclined docking groove 33, wherein the installation groove 331 is docked with the placement groove 411, so that a placement cavity 34 can be formed between the installation groove 331 and the docking groove, and the elastic telescopic member 25 can be placed inside through the placement cavity 34, so that when the adjusting unit 3 is displaced relative to the fixed base 1, the elastic telescopic member 25 can be squeezed, so that the elastic telescopic member 25 can squeeze the adjusting unit 3 and the lifting block 4 on both sides, so that during the resetting process, it can be smoother, so that the adjusting unit 3 can rebound under the drive of the elastic telescopic member 25, similarly, due to the rebound of the adjusting unit 3, the inclined docking groove 33 on the adjusting unit 3 and the inclined slide groove 41 are displaced, so that the lifting block 4 can move downward, and the position of the top plate 2 is adjusted, avoiding the passive displacement of the adjusting unit 3 by squeezing the lifting block 4 by preventing the pressure of the top plate itself; the smoothness of the adjustment is guaranteed by setting the elastic contraction member.

[0031] like Figure 3 , 4 As shown in Figures 5 and 6, the adjusting unit 3 includes a guide docking groove 36, and the adjusting unit 3 is slidably connected with a guide block 5, and the guide block 5 includes a guide groove 51 slidably connected to the guide docking groove 36. The sliding connection between the guide docking groove 36 and the guide groove 51 makes the movement of the adjusting unit 3 more uniform, wherein the guide block 5 is preferably arranged relative to the setting position of the lifting block 4, so that both sides of the adjusting unit 3 can be guaranteed to be subject to the limiting guiding effect, thereby ensuring the stability of the adjustment.

[0032] like Figure 4 , 5 As shown, the adjustment unit 3 includes an oblique top groove 361, the guide block 5 includes an oblique bottom groove 52, and an oblique elastic member 362 is placed between the oblique top groove 361 and the oblique bottom groove 52, and the oblique elastic member 362 is inclined relative to the movement direction of the adjustment unit 3. An oblique elastic member 362 is arranged between the oblique top groove 361 and the oblique bottom groove 52, and the oblique elastic member 362 is arranged obliquely; since the guide block 5 needs to have a guiding function, it is required that the guide block 5 cannot move, and the movement direction of the adjustment unit 3 is toward the side of the fixed base 1, so the relative sliding direction between the guide block 5 and the adjustment unit 3 also needs to face the fixed base 1, so the oblique elastic member 362 is arranged obliquely, which can ensure that the two sides of the oblique elastic member 362 are respectively on the oblique top groove 361 and the oblique bottom groove 52, ensuring that the reset elastic force can act on both.

[0033] like Figure 3 As shown, the elastic telescopic member 25 is arranged in parallel along the movement direction of the adjustment unit 3. Since the inclined surface connection groove 33 and the inclined surface slide groove 41 are arranged in an oblique direction, the elastic telescopic member 25 is arranged in parallel, so that the elastic telescopic member 25 can place both ends in the placement groove 411 and the installation groove 331 respectively, to achieve an elastic reset effect.

[0034] Embodiment 2: like Figure 6 , 7As shown, what is different from Example 1 is that in this embodiment, the placement groove 411 includes a movable bottom block 412, and a accommodating chamber 11 is arranged on the fixed base 1. The accommodating chamber 11 is slidably connected to the movable bottom block 412, and an elastic recovery member 12 is arranged between the bottom of the accommodating chamber 11 and the movable bottom block 412. The inclination of the accommodating chamber 11 is the same as the inclination of the inclined slide groove 41. When the adjustment unit 3 moves close to the fixed base 1, the elastic telescopic member 25 is compressed, the lifting block 4 moves toward the side of the top plate, and the movable bottom block 412 moves toward the bottom of the accommodating chamber 11 synchronously, and the movable bottom block 412 remains in contact with the placement groove 411. A movable bottom block 412 is arranged inside the placement groove 411, wherein the movable bottom block 412 is not fixedly connected to the placement groove 411, but is slidably connected to the placement groove 411, wherein the top of the movable bottom block 412 serves as the bottom of the placement groove 411, so one end of the elastic telescopic member 25 abuts against the top of the movable bottom block 412, and since the movable bottom block 412 is also slidably connected to the accommodating cavity 11, when the adjusting unit 3 moves toward the side of the fixed base 1, the elastic telescopic member 25 will be subjected to an extrusion force, and thus will squeeze the movable bottom block 412 toward the side of the fixed base 1, that is, the movable bottom block 412 will slide toward the inside of the accommodating cavity 11, and since the inclination degree of the accommodating cavity 11 is the same as the inclination degree of the inclined slide groove 41, and at the same time, when the adjusting unit 3 moves toward the fixed base 1, When one side of the base 1 moves, the lifting block 4 will be driven to move synchronously through the inclined docking groove 33, so that the position of the movable bottom block 412 can always be kept in contact with the lifting block 4, wherein it is necessary to control the elastic stiffness coefficient of the elastic telescopic member 25 to be greater than the elastic stiffness coefficient of the elastic recovery member 12, so that during the movement of the movable bottom block 412, the elastic recovery member 12 will be squeezed preferentially, thereby ensuring that the movable bottom block 412 can maintain contact with the placement groove 411, and when the movable bottom block 412 abuts against the placement groove 411, the elastic telescopic member 25 will be squeezed due to the limitation of the placement groove 411. During this process, the elastic telescopic member 25 and the elastic recovery member 12 will produce a stable matching effect to ensure that the movable bottom block 412 is in contact with the placement groove 411.Since the lifting block 4 receives a vertical downward force during operation, the above-mentioned setting method can make the force transmitted downward by the lifting block 4 be transmitted to the adjusting unit 3 by the inclined slide groove 41, and be transmitted to the fixed base 1 by the movable bottom block 412, so that the pressure of the lifting block 4 is shared by the fixed base 1 and the lifting block 4, avoiding the transmission method of only transmitting to the adjusting unit 3 and then transmitting to the fixed base 1 through the adjusting unit 3, thereby causing various problems such as uneven force, lengthy force transmission process, and affecting the smoothness of reset; at the same time, due to the elastic telescopic member 25 moves synchronously with the movable bottom block 412, thereby avoiding relative displacement between the elastic bottom block and the bottom surface of the placement groove 411 when the lifting block 4 is displaced, which affects the smoothness of the movement. At the same time, when the movable bottom block 412 moves toward the side of the accommodating chamber 11, the elastic telescopic member 25 will also be affected by the inclined surface guide in the placement groove 411 and bend. Therefore, the end of the elastic telescopic member 25 always remains fixed between the contact surface and relies on its own bending to adapt to the misalignment changes at both ends, thereby ensuring smoothness. At the same time, since relative friction is avoided, noise is also avoided.

[0035] Both ends of the elastic telescopic member 25 are snap-connected with the mounting groove 331 and the placement groove 411. When the elastic telescopic member 25 is bent, the elastic telescopic member 25 maintains the snap-connected connection with the mounting groove 331 and the placement groove 411. Both ends of the elastic telescopic member 25 are snap-connected, wherein the snap-connected connection is generally provided with a limit groove at the bottom of the groove, thereby preventing the end of the elastic telescopic member 25 from radial displacement. At the same time, when used in conjunction with the movable bottom block 412, when the movable bottom block 412 is displaced, the vertical position of the movable bottom block 412 changes, thereby driving the end of the elastic telescopic member 25 to change synchronously. Since the snap-connected connection is adopted, the elastic telescopic member 25 is prevented from coming out.

[0036] Embodiment 3: like Figure 8 As shown, different from the embodiment 1, the placement groove 411 in this embodiment includes a movable bottom block 412, a receiving chamber 11 is provided on the fixed base 1, the receiving chamber 11 is slidably connected to the movable bottom block 412, an elastic recovery member 12 is provided between the bottom of the receiving chamber 11 and the movable bottom block 412, the inclination of the receiving chamber 11 is the same as the inclination of the inclined slide groove 41, when the adjustment unit 3 moves close to the fixed base 1, the elastic telescopic member 25 is compressed, the lifting block 4 moves toward the side of the top plate, the movable bottom block 412 moves toward the bottom of the receiving chamber 11 synchronously, and the movable bottom block 412 remains in contact with the placement groove 411. The placement groove 411 includes a notch 413, the width of the notch 413 is greater than or equal to the width of the movable bottom block 412, and the lifting block 4 can be separated from the movable bottom block 412 along the lifting direction.

[0037] The size of the slot 413 is set to be greater than or equal to the size of the movable bottom block 412, thereby providing conditions for the separation of the lifting block 4 and the movable bottom block 412. When the movable bottom block 412 or the elastic reset member is stuck, the lifting block 4 will not be affected by the all-round limiting effect, but can still achieve a certain lifting function, providing fault tolerance. A movable bottom block 412 is arranged inside the placement groove 411, wherein the movable bottom block 412 is not fixedly connected to the placement groove 411, but is slidably connected to the placement groove 411, wherein the top of the movable bottom block 412 serves as the bottom of the placement groove 411, so one end of the elastic telescopic member 25 abuts against the top of the movable bottom block 412, and since the movable bottom block 412 is also slidably connected to the accommodating cavity 11, when the adjusting unit 3 moves toward the side of the fixed base 1, the elastic telescopic member 25 will be subjected to an extrusion force, and thus will squeeze the movable bottom block 412 toward the side of the fixed base 1, that is, the movable bottom block 412 will slide toward the inside of the accommodating cavity 11, and since the inclination degree of the accommodating cavity 11 is the same as the inclination degree of the inclined slide groove 41, and at the same time, when the adjusting unit 3 moves toward the fixed base 1, When one side of the base 1 moves, the lifting block 4 will be driven to move synchronously through the inclined docking groove 33, so that the position of the movable bottom block 412 can always be kept in contact with the lifting block 4, wherein it is necessary to control the elastic stiffness coefficient of the elastic telescopic member 25 to be greater than the elastic stiffness coefficient of the elastic recovery member 12, so that during the movement of the movable bottom block 412, the elastic recovery member 12 will be squeezed preferentially, thereby ensuring that the movable bottom block 412 can maintain contact with the placement groove 411, and when the movable bottom block 412 abuts against the placement groove 411, the elastic telescopic member 25 will be squeezed due to the limitation of the placement groove 411. During this process, the elastic telescopic member 25 and the elastic recovery member 12 will produce a stable matching effect to ensure that the movable bottom block 412 is in contact with the placement groove 411. Since the lifting block 4 will receive a vertical downward force during operation, the above-mentioned setting method can make the force transmitted downward by the lifting block 4 be transmitted to the adjusting unit 3 by the inclined slide groove 41 and to the fixed base 1 by the movable bottom block 412, so that the pressure on the lifting block 4 is shared by the fixed base 1 and the lifting block 4, avoiding the transmission method of only transmitting to the adjusting unit 3 and then to the fixed base 1 through the adjusting unit 3, thereby causing uneven force, lengthy force transmission process, and various problems affecting the smoothness of resetting.

[0038] Embodiment 4: like Fig. 9As shown, different from the embodiment 1, the placement groove 411 in this embodiment includes a movable bottom block 412, a receiving chamber 11 is provided on the fixed base 1, the receiving chamber 11 is slidably connected to the movable bottom block 412, an elastic recovery member 12 is provided between the bottom of the receiving chamber 11 and the movable bottom block 412, the inclination of the receiving chamber 11 is the same as the inclination of the inclined slide groove 41, when the adjustment unit 3 moves close to the fixed base 1, the elastic telescopic member 25 is compressed, the lifting block 4 moves toward the side of the top plate, and the movable bottom block 412 moves toward the bottom of the receiving chamber 11 synchronously, and the movable bottom block 412 remains in contact with the placement groove 411. The placement groove 411 includes a shrinking opening 414, and the width of the shrinking opening 414 is smaller than the width of the movable bottom block 412.

[0039] The size of the contraction opening 414 is set smaller than that of the movable bottom block 412, so that the contact effect between the movable bottom block 412 and the lifting block 4 can be maintained in real time, and the movement of the lifting block 4 can synchronously affect the movement of the movable bottom block 412. When the elastic return member 12 fails, the movable bottom block 412 can still be driven to move synchronously through the movement of the lifting block 4. A movable bottom block 412 is arranged inside the placement groove 411, wherein the movable bottom block 412 is not fixedly connected to the placement groove 411, but is slidably connected to the placement groove 411, wherein the top of the movable bottom block 412 serves as the bottom of the placement groove 411, so one end of the elastic telescopic member 25 abuts against the top of the movable bottom block 412, and since the movable bottom block 412 is also slidably connected to the accommodating cavity 11, when the adjusting unit 3 moves toward the side of the fixed base 1, the elastic telescopic member 25 will be subjected to an extrusion force, and thus will squeeze the movable bottom block 412 toward the side of the fixed base 1, that is, the movable bottom block 412 will slide toward the inside of the accommodating cavity 11, and since the inclination degree of the accommodating cavity 11 is the same as the inclination degree of the inclined slide groove 41, and at the same time, when the adjusting unit 3 moves toward the fixed base 1, When one side of the base 1 moves, the lifting block 4 will be driven to move synchronously through the inclined docking groove 33, so that the position of the movable bottom block 412 can always be kept in contact with the lifting block 4, wherein it is necessary to control the elastic stiffness coefficient of the elastic telescopic member 25 to be greater than the elastic stiffness coefficient of the elastic recovery member 12, so that during the movement of the movable bottom block 412, the elastic recovery member 12 will be squeezed preferentially, thereby ensuring that the movable bottom block 412 can maintain contact with the placement groove 411, and when the movable bottom block 412 abuts against the placement groove 411, the elastic telescopic member 25 will be squeezed due to the limitation of the placement groove 411. During this process, the elastic telescopic member 25 and the elastic recovery member 12 will produce a stable matching effect to ensure that the movable bottom block 412 is in contact with the placement groove 411. Since the lifting block 4 will receive a vertical downward force during operation, the above-mentioned setting method can make the force transmitted downward by the lifting block 4 be transmitted to the adjusting unit 3 by the inclined slide groove 41 and to the fixed base 1 by the movable bottom block 412, so that the pressure on the lifting block 4 is shared by the fixed base 1 and the lifting block 4, avoiding the transmission method of only transmitting to the adjusting unit 3 and then to the fixed base 1 through the adjusting unit 3, thereby causing uneven force, lengthy force transmission process, and various problems affecting the smoothness of resetting.

[0040] Embodiment 5: like Fig.10As shown, different from the embodiment 1, the lifting block 4 in this embodiment includes a rotating support plate 42 arranged near the top plate, the lifting block 4 includes a lifting base 43 arranged away from the top plate, the lifting base 43 is provided with a docking spherical surface 431 on the side close to the rotating support plate 42, and the rotating support plate 42 is provided with a sliding ball groove 421 connected to the docking spherical surface 431 on the side close to the lifting base 43. When the lifting block 4 is lifted or lowered, the side of the rotating support plate 42 away from the docking spherical surface 431 is in contact with the top plate, and the sliding ball groove 421 rotates relative to the docking spherical surface 431. By arranging the lifting block 4 into two parts, the lifting block 4 can adapt to the position change of the top plate 2 in real time. When the lifting block 4 rises, the inclination of the top plate 2 changes, so the rotating support plate 42 is in contact with the bottom surface of the top plate 2, so that the adaptability changes. Since the rotating support plate 42 and the lifting base 43 are rotatably connected, they can rotate freely to adapt accordingly, thereby ensuring that when the top plate 2 is tilted, the lifting block 4 can still provide a stable support effect and maintain surface contact.

Claims

1. An aluminum nitride ceramic auxiliary lifting and adjusting device, characterized in that: It includes a fixed base, the fixed base is connected to a top plate, the fixed base is connected to an adjusting unit, the adjusting unit is provided with an inclined docking groove, the adjusting unit is connected to a lifting block, the lifting block is provided with an inclined sliding groove slidably connected to the inclined docking groove, when the adjusting unit moves close to one side of the fixed base, the lifting block moves close to one side of the top plate.

2. According to the aluminum nitride ceramic auxiliary lifting and adjusting device described in claim 1, it is characterized in that: A placement groove is arranged in the inclined surface sliding groove, an installation groove is arranged in the inclined surface connecting groove, a placement cavity is formed between the placement groove and the installation groove, and an elastic telescopic member is installed in the placement cavity.

3. According to the aluminum nitride ceramic auxiliary lifting and adjusting device described in claim 2, it is characterized in that: The placement groove includes a movable bottom block, a accommodating cavity is arranged on the fixed base, the accommodating cavity is slidably connected to the movable bottom block, an elastic recovery member is arranged between the bottom of the accommodating cavity and the movable bottom block, the inclination of the accommodating cavity is the same as the inclination of the inclined sliding groove, when the adjustment unit moves close to the fixed base, the elastic telescopic member is compressed, the lifting block moves toward one side of the top plate, and the movable bottom block moves toward the bottom of the accommodating cavity synchronously, and the movable bottom block remains in contact with the placement groove.

4. The aluminum nitride ceramic auxiliary lifting and adjusting device according to claim 3, characterized in that: Both ends of the elastic telescopic member are snap-connected with the mounting groove and the placement groove. When the elastic telescopic member is bent, the elastic telescopic member maintains the snap-connected connection with the mounting groove and the placement groove.

5. The aluminum nitride ceramic auxiliary lifting and adjusting device according to claim 3, characterized in that: The placement groove includes a notch, the width of the notch is greater than or equal to the width of the movable bottom block, and the lifting block can be separated from the movable bottom block along the lifting direction.

6. The aluminum nitride ceramic auxiliary lifting and adjusting device according to claim 3, characterized in that: The placement groove includes a shrinkage opening, and the width of the shrinkage opening is smaller than the width of the movable bottom block.

7. An aluminum nitride ceramic auxiliary lifting and adjusting device according to any one of claims 1 to 6, characterized in that: The lifting block includes a rotating support plate arranged on a side close to the top plate, and the lifting block includes a lifting base arranged on a side away from the top plate. A docking spherical surface is arranged on the side of the lifting base close to the rotating support plate, and a sliding ball groove connected to the docking spherical surface is arranged on the side of the rotating support plate close to the lifting base. When the lifting block is lifted or lowered, the side of the rotating support plate away from the docking spherical surface is in contact with the top plate, and the sliding ball groove rotates relative to the docking spherical surface.

8. An aluminum nitride ceramic auxiliary lifting and adjusting device according to any one of claims 1 to 6, characterized in that: The adjusting unit comprises a guide docking groove, the adjusting unit is slidably connected with a guide block, and the guide block comprises a guide groove slidably connected to the guide docking groove.

9. The aluminum nitride ceramic auxiliary lifting and adjusting device according to claim 8, characterized in that: The adjustment unit includes an oblique top groove, the guide block includes an oblique bottom groove, an oblique elastic member is placed between the oblique top groove and the oblique bottom groove, and the oblique elastic member is inclined relative to the movement direction of the adjustment unit.

10. An aluminum nitride ceramic auxiliary lifting and adjusting device according to any one of claims 2 to 6, characterized in that: The elastic expansion member is arranged in parallel along the moving direction of the adjustment unit.

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