Integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator

Abstract

The invention relates to the field of vibration isolators, in particular to an integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator which is characterized in that the first end of a buckling beam is connected to the side face of a bearing platform, and the second end of the buckling beam is connected to a base; more than three buckling beams are connected to the side surface of the bearing platform; the first end of the linear spring is connected to the bottom surface of the bearing platform, and the second end of the linear spring is connected to the base; the more than three linear springs are connected to the bottom surface of the bearing platform; after equipment is arranged on the bearing platform, the axial force of the buckling beam and the position of the linear spring are adjusted according to the load applied to the bearing platform by the equipment arranged on the bearing surface of the bearing platform. The quasi-zero stiffness vibration isolator solves the technical problems that in the prior art, a quasi-zero stiffness vibration isolator concentrates on the single degree of freedom in the translation direction, only vibration isolation of specific load mass can be achieved, and friction and gaps are introduced into a hinge structure.

Description

Technical Field

[0001] The present application relates to the technical field of vibration isolators, and in particular to an integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator. Background Art

[0002] Various precision manufacturing fields, such as semiconductor manufacturing, photolithography, etc., require multi-degree-of-freedom vibration isolators for high-precision processing. In the fields of aerospace equipment and remote sensing satellites, in order to prevent some vibration sources on the satellite from transmitting vibration to sensitive electronic devices, thereby affecting the actual working state of the satellite, multi-degree-of-freedom vibration isolators are also needed to isolate disturbances in multiple directions.

[0003] However, the current research on quasi-zero stiffness isolators is mostly focused on single-degree-of-freedom systems in the translational direction. Moreover, most of the structures that have been studied so far have hinged structures, which will introduce friction and gaps, which is not conducive to the isolation of low-frequency vibrations. In addition, most of the nonlinear isolators based on the quasi-zero stiffness theory can only achieve vibration reduction of a specific load mass, and cannot meet the requirements of vibration isolation of different load masses. Summary of the invention

[0004] The embodiment of the present application provides an integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator, which realizes vibration isolation in three degrees of freedom directions according to different load masses within an integrated gapless friction structure.

[0005] According to one aspect of an embodiment of the present application, an integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator is provided, characterized in that it includes:

[0006] Pedestal;

[0007] The load-bearing platform includes a load-bearing surface, a bottom surface, and side surfaces;

[0008] A buckling beam, comprising a first end and a second end, wherein the first end of the buckling beam is connected to the side of the bearing platform, and the second end of the buckling beam is connected to the base; more than three buckling beams are connected to the side of the bearing platform;

[0009] A linear spring, comprising a first end and a second end, wherein the first end of the linear spring is connected to the bottom surface of the bearing platform, and the second end of the linear spring is connected to the base; more than three linear springs are connected to the bottom surface of the bearing platform;

[0010] The axial force of the buckling beam and the position of the linear spring are adjusted according to the load applied to the bearing platform by the equipment placed on the bearing surface of the bearing platform.

[0011] Based on the above embodiment, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0012] The pressure regulating mechanism is arranged on the base and comprises:

[0013] A pre-tightening bolt is threadedly connected to the adjusting threaded hole, the adjusting threaded hole is arranged on the base, and the stud end of the pre-tightening bolt is connected to the second end of the buckling beam.

[0014] Based on the above embodiment, the pressure regulating mechanism further includes:

[0015] A force sensor is mounted on the end face of the stud end of the pre-tightening bolt;

[0016] The beam transfer cylinder is used to connect the force sensor and the buckling beam.

[0017] Based on the above embodiment, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0018] A height adjustment mechanism is mounted on the base and is used to change the height of the second end of the linear spring.

[0019] Based on the above embodiment, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0020] The spring position adjustment unit is used to adjust the position of each of the linear springs.

[0021] Based on the above embodiment, the carrying platform is a hexahedron whose top angles are all right angles, and the carrying surface and bottom surface of the carrying platform are both squares with equal sides;

[0022] Each side surface of the bearing platform is connected to two buckling beams.

[0023] Based on the above embodiment, each side surface of the carrying platform is provided with two vertical grooves penetrating the carrying surface and the bottom surface thereof, and the two grooves on each side surface of the carrying platform are mirror-symmetrical with respect to the vertical center line of the side surface;

[0024] The second end of each of the buckling beams is connected to a groove bottom of the groove.

[0025] Based on the above embodiment, the base includes four columns, and the four columns are respectively arranged on four sides of the load plane;

[0026] The second end of the buckling beam is connected to the column in the corresponding direction.

[0027] On the basis of the above embodiment, a linear spring is provided at the center of the bearing platform, and four linear springs are symmetrically arranged with the center of the bearing platform as the center.

[0028] Based on the above embodiment, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator is characterized by further comprising:

[0029] An adjusting unit is used to adjust the height of the second end of the linear spring, the position of the second end of the buckling beam, and the position between the linear springs after the equipment is placed on the bearing platform.

[0030] Compared with the prior art, in an embodiment of the present application, the first end of the buckling beam is connected to the side of the bearing platform, and the second end of the buckling beam is connected to the base; more than three buckling beams are connected to the side of the bearing platform; the first end of the linear spring is connected to the bottom surface of the bearing platform, and the second end of the linear spring is connected to the base; more than three linear springs are connected to the bottom surface of the bearing platform; after placing the device on the bearing platform, the axial force of the buckling beam and the position of the linear spring are adjusted according to the load applied to the bearing platform by the device placed on the bearing surface of the bearing platform. In summary, the buckling beam, linear spring, base and bearing platform in the vibration isolator provided by the present application do not contain hinged structures. By adjusting the position of the linear spring and the height of its second end and the position of the second end of the buckling beam, the mass of the load is adapted to provide vibration isolation in the vertical direction and the rotation direction around the axis in the horizontal plane. This solves the technical problem that the research on quasi-zero stiffness isolators in the prior art focuses on single-degree-of-freedom systems in the translational direction, can only achieve vibration isolation of a specific load mass, and the hinged structure introduces friction and gaps that are not conducive to the isolation of low-frequency vibrations.

[0031] The negative stiffness structure of the three-degree-of-freedom adjustable quasi-zero stiffness isolator provided in the present application is based on a buckled beam and has quasi-zero stiffness characteristics in three degrees of freedom, namely, the translational freedom along the vertical Z axis and the torsion freedom around two horizontal axes. Specifically,

[0032] First, in terms of translational freedom, according to the buckled beam theory, when the axial pressure on a slender buckled beam with both ends clamped exceeds its first-order critical buckling pressure, a negative stiffness characteristic will appear at its midpoint in the lateral direction. Using this characteristic, an elastic structure with lateral translational negative stiffness characteristics is proposed.

[0033] The inventive idea of ​​the negative stiffness structure in the torsional direction is to fix the ends of the beams on both sides of the load-bearing platform. When the load-bearing platform rotates around a certain horizontal axis, the buckled beam parallel to the axis of rotation shows the superposition of lateral stiffness and torsional stiffness. When the axial pressure in the buckled beam is large enough, resulting in the negative stiffness of the lateral displacement being greater than the positive stiffness of the torsional displacement, the load-bearing platform rotates around the horizontal axis and shows negative stiffness.

[0034] Combining the negative stiffness principles of the above two ideas, and arranging multiple linear springs as linear positive stiffness in the vertical translation direction and horizontal torsion direction to match the negative stiffness of the beam, an integrated three-degree-of-freedom quasi-zero stiffness system is proposed. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0036] Figure 1 It is a structural schematic diagram of an integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to an embodiment of the present application;

[0037] Figure 2 It is a schematic diagram of the structure between the buckling beam and the base in the integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to an embodiment of the present application;

[0038] Figure 3 It is a structural schematic diagram of the linear spring and the base of the integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to an embodiment of the present application. DETAILED DESCRIPTION

[0039] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0040] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0041] Before describing and explaining the embodiments of the present application in detail, some terms, nouns and technical contents involved in the embodiments of the present application are first explained.

[0042] Example 1

[0043] Reference Figure 1 The integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator provided in this embodiment includes:

[0044] Base 100;

[0045] The bearing platform 1 comprises an upward bearing surface, a downward bottom surface and vertical side surfaces;

[0046] A buckling beam 2, comprising a first end and a second end, wherein the first end of the buckling beam 2 is connected to the side of the carrying platform 1, and the second end of the buckling beam 2 is connected to the base 100; 8 buckling beams 2 are connected to the side of the carrying platform 1;

[0047] A linear spring 4, comprising a first end and a second end, wherein the first end of the linear spring 4 is connected to the bottom surface of the carrying platform 1, and the second end of the linear spring 4 is connected to the base 100; 5 linear springs 4 are connected to the bottom surface of the carrying platform 1;

[0048] The axial force of the buckling beam 2 and the position of the linear spring 4 are adjusted according to the load applied to the bearing platform 1 by a device placed on the bearing surface of the bearing platform 1 .

[0049] In this embodiment, 8 buckling beams 2 are provided, and in other embodiments, fewer buckling beams 2, such as 3, or more buckling beams 2, such as 9, may be provided. At least 3 buckling beams 2 can ensure that forces in different directions are applied to the carrying platform 1 within the plane where the carrying platform 1 is located, and can ensure that the position of the carrying platform 1 is stable.

[0050] In this embodiment, 5 linear springs 4 are provided, and in other embodiments, fewer linear springs 4 may be provided, for example, 3, or more linear springs 4 may be provided, for example, 6. At least 3 linear springs 4 can ensure that the support platform 1 can be flipped at any angle relative to the horizontal plane and remain stable.

[0051] In this embodiment, the positive stiffness generated by the linear spring 4 and the negative stiffness generated by the buckling deformation of the buckling beam 2 during operation, the mechanisms providing positive and negative stiffness (the linear spring 4 and the buckling beam 2) are connected in parallel, the positive stiffness mechanism mainly provides static supporting force, and the negative stiffness mechanism is used to offset the stiffness of the positive stiffness mechanism, so that the three-degree-of-freedom adjustable quasi-zero stiffness isolator presents a quasi-zero stiffness characteristic near the steady-state operating point, so it has low-frequency resonance performance and large static bearing capacity.

[0052] Firstly, during operation of the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator provided in this embodiment, the buckling beam 2 is fixedly connected to the base 100 and the supporting platform 1, and does not include a hinge; the linear spring 4 is fixedly connected to the base 100 and the supporting platform 1, and does not include a hinge; therefore, there is no friction or gap between the buckling beam 2 and the base 100 and the supporting platform 1, and there is no friction or gap between the linear spring 4 and the base 100 and the supporting platform 1, which is beneficial to the isolation of low-frequency vibrations.

[0053] The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator provided in this embodiment can ensure the horizontal working state of the buckling beam 2 and its stability by changing the position of the linear spring 4 in the vertical direction according to the weight of the equipment, and change its negative stiffness by adjusting the position of the second end of the buckling beam 2, thereby ensuring that the vertical direction presents a quasi-zero stiffness characteristic near the steady-state working point.

[0054] The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator provided in this embodiment changes the torsional stiffness of the support provided by the linear springs 4 to the support platform 1 by adjusting the distance between the positions of the plurality of linear springs 4 relative to the center of gravity of the support platform 1 (the torsion refers to the rotation around the axis in any direction within the plane where the support platform 1 is located): the closer the linear springs 4 are to the center of the support platform 1, the smaller the torsional stiffness of the support provided to the support platform 1; the farther the linear springs 4 are from the center of the support platform 1, the greater the torsional stiffness of the support provided to the support platform 1. The positive stiffness in the torsional direction provided by the linear springs 4 to the support platform 1 matches the negative stiffness in the torsional direction generated by the buckling beam to the support platform 1, ensuring that the torsional direction exhibits a quasi-zero stiffness characteristic near the steady-state operating point.

[0055] Before work, the equipment to be isolated is placed on the bearing platform 1. Depending on the weight of the equipment, the linear spring 4 will be compressed to different degrees. The height position of the second end of the linear spring 4 is adjusted according to the compression of the linear spring 4, so that the buckling beam 2 can maintain a horizontal state under different load conditions.

[0056] Then, the pressure on the buckling beam 2 is adjusted by changing the position of the second end of the buckling beam 2 , so that the vertical negative stiffness generated by the buckling beam 2 matches the vertical positive stiffness of the linear spring 4 .

[0057] Finally, the position of the linear spring 4 is adjusted to adjust the distance between it and the center of gravity of the supporting platform 1, so that the positive stiffness in the torsional direction provided by the linear spring 4 to the supporting platform 1 matches the negative stiffness in the torsional direction generated by the buckling beam on the supporting platform 1.

[0058] This embodiment can accommodate different processing errors and material errors by jointly adjusting the axial force of the buckling beam 2 and the distance of the linear spring 4, thereby ensuring that the three-degree-of-freedom adjustable quasi-zero stiffness isolator can achieve quasi-zero stiffness in three directions.

[0059] This embodiment provides a specific implementation method for adjusting the position of the second end of the buckled beam 2. Figure 2 In this specific implementation, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0060] The pressure regulating mechanism is disposed on the base 100 and includes:

[0061] The pre-tightening bolt 10 is threadedly connected to the adjusting threaded hole, and the adjusting threaded hole is provided on the base 100 . The stud end of the pre-tightening bolt 10 is connected to the second end of the buckling beam 2 .

[0062] By rotating the nut end of the pre-tightening bolt 10 , its position on the base 100 is changed, thereby changing the position of the second end of the buckling beam 2 and changing the stiffness of the buckling beam 2 .

[0063] In this embodiment, the stud end of the pre-tightening bolt 10 is first connected to the force sensor 11 and the beam transition cylinder 12, and the end surface of the beam transition cylinder 12 can be provided with a threaded hole to be fixedly connected to the second end of the buckling beam 2 through a thread. The pre-tightening bolt 10 can be tightened along the central axis of the threaded hole and transmit the pre-tightening force to the buckling beam 2 through the force sensor 11, thereby applying pressure to the buckling beam 2 to make the buckling beam 2 reach a buckling state.

[0064] The force sensor 11 can monitor the pressure value on the second end of the buckling beam 2 during the rotation of the preload bolt 10, so whether the negative stiffness of the buckling beam 2 matches the positive stiffness of the spring is monitored by monitoring the pressure on the buckling beam 2. In other embodiments, the displacement of the second end of the buckling beam 2 is monitored, and whether the negative stiffness of the buckling beam 2 matches the positive stiffness of the spring is monitored by the displacement.

[0065] This embodiment provides a specific implementation method for adjusting the position of the second end of the linear spring 4. Figure 1 In this specific implementation, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0066] The height adjustment mechanism 6 is installed on the base 100 and is used to change the height of the second end of the linear spring 4 .

[0067] The height adjustment structure in this embodiment includes a scissor mechanism and a mounting platform 5, the lower ends of the two legs of the scissor mechanism are installed on the base 100, the upper ends of the two legs are connected to the mounting platform 5, and the second end of the linear spring 4 is installed on the mounting platform 5.

[0068] By changing the distance between the upper ends (or lower ends) of the two legs, the height of the mounting platform 5 is changed, thereby changing the height of the second end of the linear spring 4 .

[0069] This embodiment provides a specific implementation method for adjusting the position between the linear springs 4. Figure 3 In this specific implementation, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further includes:

[0070] The spring position adjustment unit is used to adjust the position of each linear spring 4, and includes a guide rail 14 located on the mounting platform 5 and a slider 13 sliding in the guide rail 14. The second end of the linear spring 4 is connected to the slider 13. By sliding the slider 13 in the guide rail 14, the position of the linear springs 4 is changed. For a uniform mass distribution and regular shape, such as the positive direction, the center of gravity of the load-bearing platform 1 is its geometric center. The guide rail 14 is set relative to the geometric center. Adjusting the position of the linear spring 4 along the guide rail 14 can conveniently, accurately and quickly adjust the position of the linear spring 4 relative to the center of gravity of the load-bearing platform 1.

[0071] In this embodiment, a guide post is provided on the upper surface of the slider 13 , and the guide post is inserted into the spring hole at the second end of the linear spring 4 , so as to avoid bending deformation of the linear spring 4 during the deformation process.

[0072] This embodiment provides a specific implementation of the structure of the carrying platform 1. Figure 1 , the carrying platform 1 is a hexahedron whose vertex angles are all right angles, and the carrying surface and bottom surface of the carrying platform 1 are both squares with equal sides;

[0073] Each side surface of the bearing platform 1 is connected to two buckling beams 2 .

[0074] In this embodiment, the structure of the bearing platform 1 is regular, and two buckling beams 2 are arranged on each side to provide negative stiffness more stably.

[0075] On the basis of the above embodiment, each of the side surfaces of the carrying platform 1 is provided with two vertical grooves penetrating the carrying surface and the bottom surface thereof, and the two grooves on each side surface of the carrying platform 1 are mirror-symmetrical with respect to the vertical center line of the side surface;

[0076] The second end of each of the buckling beams 2 is connected to the bottom of one of the grooves.

[0077] The groove can maximize the bearing area of ​​the bearing platform 1 and maximize the position change range of the linear spring, so that the distance between the second ends of the two opposite buckling beams 2 has the best effect on the stiffness.

[0078] Based on the above implementation, this embodiment provides a specific implementation of the structure of the base 100. Figure 1 The base 100 comprises four columns 8, and the four columns 8 are respectively arranged on four sides of the load plane 1;

[0079] The second end of the buckling beam 2 is connected to the column 8 in the corresponding direction.

[0080] In this embodiment, the lower end of the column 8 is connected to the base plate 9 , and the second end of the linear spring 4 is connected to the base plate 9 directly or through the height adjustment mechanism 6 .

[0081] In this embodiment, reference Figure 1 The upper end of the column 8 is provided with a step near the outer side, and a semicircular groove is provided on the upper end surface near the inner side, wherein a threaded hole coaxial with the semicircular groove is provided in the step; after the preload bolt 10 is screwed into the threaded hole, the force sensor 11, the beam transfer cylinder 12 and the buckling beam 2 are connected, the cover plate 7 and the column 8 are fixedly connected with screws or bolts, and the second end of the buckling beam 2 is pressed to realize the working state of the second end of the buckling beam 2 being fixedly supported.

[0082] This embodiment provides a specific implementation method of the arrangement of the five linear springs 4. Figure 3 , a linear spring 4 is arranged at the center of the bearing platform 1, and four linear springs 4 are symmetrically arranged with the center of the bearing platform 1 as the center. The distance from the four symmetrically arranged linear springs 4 on the periphery to the center is adjusted so that the positive stiffness in the torsion direction of the bearing platform 1 matches the negative stiffness in the torsion direction of the platform generated by the horizontal buckling beam 2. This positional relationship can make the adjustment process simple and fast while ensuring that the linear springs 4 stably support the bearing platform 1. In a preferred embodiment, the distances of the peripheral linear springs 4 relative to the central linear spring 4 change simultaneously.

[0083] In one embodiment, the three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator further comprises:

[0084] The adjusting unit is used to adjust the height of the second end of the linear spring 4 , the position of the second end of the buckling beam 2 , and the position between the linear springs 4 after the equipment is placed on the supporting platform 1 .

[0085] The adjustment unit can monitor the mass of the equipment, the natural frequency of the vibration isolator in the vertical direction and the natural frequency in the torsional direction in real time, and change the height of the second end of the linear spring 4, the position of the second end of the buckling beam 2 and the position between the linear springs 4 according to the monitoring structure.

[0086] The adjustment unit can be a computer device connected to the sensor, in which the relationship between the mass of the device and the height of the second end of the linear spring 4, and the relationship between the natural frequency of the isolator in the vertical direction and the natural frequency in the torsional direction and the position of the second end of the buckling beam 2 and the position of the linear spring 4 are stored.

[0087] The serial numbers of the above-mentioned embodiments of the present application are for description only and do not represent the advantages or disadvantages of the embodiments.

[0088] In the above embodiments of the present application, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, please refer to the relevant description of other embodiments.

[0089] In the several embodiments provided in this application, it should be understood that the disclosed technical content can be implemented in other ways. Among them, the device embodiments described above are only schematic, for example, the division of units is only a logical function division, and there may be other division methods in actual implementation, for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, units, and can be electrical or other forms.

[0090] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0091] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0092] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art or all or part of the technical solution, can be embodied in the form of a software product, which is stored in a storage medium and includes several instructions for a computer device (which can be a personal computer, server or network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: U disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), mobile hard disk, disk or optical disk, etc. Various media that can store program codes.

[0093] The above is only a preferred implementation of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. An integrated high-order stable three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator, characterized in that: include: Pedestal; The load-bearing platform includes a load-bearing surface, a bottom surface, and side surfaces; A buckling beam, comprising a first end and a second end, wherein the first end of the buckling beam is connected to the side of the bearing platform, and the second end of the buckling beam is connected to the base; more than three buckling beams are connected to the side of the bearing platform; A linear spring, comprising a first end and a second end, wherein the first end of the linear spring is connected to the bottom surface of the bearing platform, and the second end of the linear spring is connected to the base; more than three linear springs are connected to the bottom surface of the bearing platform; The axial force of the buckling beam and the position of the linear spring are adjusted according to the load applied to the bearing platform by the equipment placed on the bearing surface of the bearing platform.

2. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 1, characterized in that: Also includes: The pressure regulating mechanism is arranged on the base and comprises: A pre-tightening bolt is threadedly connected to the adjusting threaded hole, the adjusting threaded hole is arranged on the base, and the stud end of the pre-tightening bolt is connected to the second end of the buckling beam.

3. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 2, characterized in that: The pressure regulating mechanism further comprises: A force sensor is mounted on the end face of the stud end of the pre-tightening bolt; The beam transfer cylinder is used to connect the force sensor and the buckling beam.

4. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 1, characterized in that: Also includes: A height adjustment mechanism is mounted on the base and is used to change the height of the second end of the linear spring.

5. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 1, characterized in that: Also includes: The spring position adjustment unit is used to adjust the position of each of the linear springs.

6. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 1, characterized in that: The carrying platform is a hexahedron with right angles at the top, and the carrying surface and bottom surface of the carrying platform are both squares with equal sides; Each side surface of the bearing platform is connected to two buckling beams.

7. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 6, characterized in that: Each side surface of the carrying platform is provided with two vertical grooves penetrating the carrying surface and the bottom surface thereof, and the two grooves on each side surface of the carrying platform are mirror-symmetrical with respect to the vertical center line of the side surface; The second end of each of the buckling beams is connected to a groove bottom of the groove.

8. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 7, characterized in that: The base comprises four columns, and the four columns are respectively arranged on four sides of the load plane; The second end of the buckling beam is connected to the column in the corresponding direction.

9. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 1, characterized in that: A linear spring is arranged at the center of the bearing platform, and four linear springs are symmetrically arranged with the center of the bearing platform as the center.

10. The three-degree-of-freedom adjustable quasi-zero stiffness vibration isolator according to claim 1, characterized in that: Also includes: An adjusting unit is used to adjust the height of the second end of the linear spring, the position of the second end of the buckling beam, and the position between the linear springs after the equipment is placed on the bearing platform.

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